Interface device and method for adjusting interface device

Abstract

An interface device is arranged between a test head and tested equipment, and comprises a first adjusting group, a second adjusting group, two first frames, two second frames and an electrical connection part. The two first frames are erected on the first adjusting set side by side, and the two first frames move face to face or back to back along the Y axis through actuation of the first adjusting set so as to be suitable for bearing the performance plate. And the two second frames are erected on the second adjusting group in parallel, and the two second frames move face to face or back to back along the Y axis through the action of the second adjusting group so as to correspond to the probe module of the test head. One end of the electrical connection component is installed on the first frame so as to be electrically connected with the performance board, and the other end of the electrical connection component is installed on the second frame so as to be electrically connected with the probe module. The interface device can improve the application freedom degree of the test head and the performance board. A method for adjusting an interface device is also provided.

Description

TECHNICAL FIELD

[0001] The present application relates to a testing device for semiconductor elements, and in particular to an interface device disposed between a testing head and a device under test, and an adjustment method of the interface device. BACKGROUND

[0002] A testing device for testing semiconductor elements and the like generally includes a testing head, and a performance board or a load board disposed on the testing head. The performance board is provided with a chip testing seat for carrying a chip under test, and transmits a testing signal output from the testing head to the chip under test through the chip testing seat.

[0003] In response to testing heads of different sizes, the performance board needs to be selected to correspond to the size of the testing head so as to be fitted and installed with the testing head, and thus the performance board has a low degree of freedom in use. In addition, if a large-area performance board is used, the chip testing seat disposed on the performance board cannot be stably carried or supported, and thus the testing quality of the chip under test will be affected. SUMMARY

[0004] The present application provides an interface device and an adjustment method of the interface device, which can improve the degree of freedom in use of the testing head and the performance board, and can effectively support chip testing seats of different sizes on the performance board.

[0005] To achieve one or some or all of the above purposes or other purposes, an embodiment of the present application provides an interface device disposed between a testing head and a device under test. The testing head includes a probe module, the device under test includes a performance board and a chip testing seat, and the chip testing seat is disposed on the performance board. The interface device includes a first adjustment group, a second adjustment group, two first frames, two second frames, and an electrical connection component. The two first frames are parallel and are disposed on the first adjustment group. Through the actuation of the first adjustment group, the two first frames are adapted to move towards each other or away from each other along the Y-axis. The two first frames have a spacing space therebetween, and the two first frames are adapted to carry the performance board. The two second frames are parallel and are disposed on the second adjustment group. Through the actuation of the second adjustment group, the two second frames are adapted to move towards each other or away from each other along the Y-axis. The two second frames are adapted to correspond to the probe module of the testing head. One end of the electrical connection component is mounted on one of the two first frames to electrically connect the performance board, and the other end of the electrical connection component is mounted on one of the two second frames to electrically connect the probe module.

[0006] In an embodiment of the present application, the first adjusting assembly further comprises two first guide rails and a plurality of first sliding seats, the first guide rails are parallel to the first racks, the first sliding seats are disposed at opposite ends of the two first frames and are respectively sleeved on the first guide rails, when the two first frames move with the first racks, the first sliding seats slide on the first guide rails respectively.

[0007] In an embodiment of the present application, the first adjusting assembly further comprises two first guide rails and a plurality of first sliding seats, the first guide rails are parallel to the first racks, the first sliding seats are disposed at opposite ends of the two first frames and are respectively sleeved on the first guide rails, when the two first frames move with the first racks, the first sliding seats slide on the first guide rails respectively.

[0008] In an embodiment of the present application, the number of the first adjusting assemblies is two, the two first adjusting assemblies are arranged in parallel, the two first frames are arranged on the two first adjusting assemblies in parallel, and the rotations of the first gears of the two first adjusting assemblies are synchronous.

[0009] In an embodiment of the present application, the second adjusting assembly further comprises two second guide rails and a plurality of second sliding seats, the second guide rails are parallel to the second racks, the second sliding seats are disposed at opposite ends of the two second frames and are respectively sleeved on the second guide rails, when the two second frames move with the second racks, the second sliding seats slide on the second guide rails respectively.

[0010] In an embodiment of the present application, the second adjusting assembly further comprises two second guide rails and a plurality of second sliding seats, the second guide rails are parallel to the second racks, the second sliding seats are disposed at opposite ends of the two second frames and are respectively sleeved on the second guide rails, when the two second frames move with the second racks, the second sliding seats slide on the second guide rails respectively.

[0011] In an embodiment of the present application, the number of the second adjusting assemblies is two, the two second adjusting assemblies are arranged in parallel, the two second frames are arranged on the two second adjusting assemblies in parallel, and the rotations of the second gears of the two second adjusting assemblies are synchronous.

[0012] In an embodiment of the present application, the rotation direction of the first gear is opposite or same to the rotation direction of the second gear.

[0013] In an embodiment of the present application, the interface device further comprises a base, the first adjustment group further comprises a first motor device, and the second adjustment group further comprises a second motor device. The base has two opposite first side walls. The first motor device and the second motor device are arranged on the first side walls. A transmission shaft of the first motor device is connected with the first gear to control the operation of the first gear. A transmission shaft of the second motor device is connected with the second gear to control the operation of the second gear.

[0014] In an embodiment of the present application, the interface device further comprises a base and two telescopic dust covers. The base has two opposite second side walls. Each telescopic dust cover is connected between each first frame and each second side wall. When the two first frames move towards each other along the Y axis, the telescopic dust covers are stretched. When the two first frames move away from each other along the Y axis, the telescopic dust covers are compressed.

[0015] In an embodiment of the present application, the interface device further comprises a third adjustment group, a fourth adjustment group, and a bearing structure. The bearing structure comprises first support bars, second support bars, and support columns. The first support bars are arranged along the X axis on the third adjustment group. The first support bars comprise odd-numbered first support bars and even-numbered first support bars. The odd-numbered first support bars move in a direction opposite to the even-numbered first support bars on the X axis through the operation of the third adjustment group. The second support bars are arranged along the Y axis on the fourth adjustment group. The second support bars comprise odd-numbered second support bars and even-numbered second support bars. The odd-numbered second support bars move in a direction opposite to the even-numbered second support bars on the Y axis through the operation of the fourth adjustment group. The support columns are arranged at the intersection of the first support bars and the second support bars.

[0016] In an embodiment of the present application, at the intersection of the first support bars and the second support bars, each first support bar has a first slot formed in the length direction of the first support bar, and each second support bar has a second slot formed in the length direction of the second support bar. The first slots and the second slots are cross-shaped and intersected. The support columns are arranged at the overlapping parts of the first slots and the second slots.

[0017] In an embodiment of the present application, when the odd-numbered first support bars and the even-numbered first support bars move on the X axis, the support columns slide along the second slots. When the odd-numbered second support bars and the even-numbered second support bars move on the Y axis, the support columns slide along the first slots.

[0018] In an embodiment of the present application, along one of the second support bars, the support posts include first support posts to second m support posts arranged in sequence along the X-axis, m being a positive integer, wherein the distance between the (2n-1)th support post and the 2nth support post corresponds to the length of the chip test socket along the X-axis, n being a positive integer and n being less than or equal to m.

[0019] In an embodiment of the present application, along one of the first support bars, the support posts include first support posts to second p support posts arranged in sequence along the Y-axis, p being a positive integer, wherein the distance between the (2q-1)th support post and the 2qth support post corresponds to the width of the chip test socket along the Y-axis, q being a positive integer and q being less than or equal to p.

[0020] In an embodiment of the present application, the interface device further includes a plurality of support seats, each of the support seats including a body and a plurality of protruding platform portions, the body having opposite first and second surfaces, the protruding platform portions being formed on the first surface, the support seat being supported by the (2q-1)th support post and the 2qth support post on two adjacent first support bars arranged in a quadrilateral, or the support seat being supported by the (2n-1)th support post and the 2nth support post on two adjacent second support bars arranged in a quadrilateral.

[0021] In an embodiment of the present application, each of the support posts includes a slot, and each of the support seats further includes four insertion portions formed on the second surface, the insertion portions being respectively inserted into the slots of the support posts arranged in a quadrilateral.

[0022] In an embodiment of the present application, the third adjustment set includes two third racks and a third gear, the length directions of the third racks being parallel to each other and extending along the X-axis, the third gear being engaged between the third racks, the third racks being adapted to move relative to each other in the radial direction of the third gear, wherein the odd-numbered first support bars are fixed to one of the third racks, and the even-numbered first support bars are fixed to the other of the third racks.

[0023] In an embodiment of the present application, first mounting holes are formed along the length direction of the third racks, and each of the first support bars is fixed to one of the first mounting holes.

[0024] In an embodiment of the present application, the number of the third adjustment sets is two, the two third adjustment sets being arranged in a spaced manner, the third gears of the two third adjustment sets being synchronously rotatable, the odd-numbered first support bars being fixed to two of the third racks having the same moving direction of the two third adjustment sets, and the even-numbered first support bars being fixed to the other two of the third racks having the same moving direction of the two third adjustment sets.

[0025] In an embodiment of the present application, the fourth adjusting set comprises two fourth racks and a fourth gear, the fourth racks are parallel to each other and extend along the Y-axis, the fourth gear is engaged between the fourth racks, the fourth racks are adapted to move relative to each other on the opposite sides of the fourth gear, wherein the odd-numbered second support bars are fixed to one of the fourth racks, and the even-numbered second support bars are fixed to the other of the fourth racks.

[0026] In an embodiment of the present application, the fourth racks are provided with second mounting holes along the length direction, and each of the second support bars is fixed to one of the second mounting holes.

[0027] In an embodiment of the present application, the fourth adjusting set comprises two fourth racks and a fourth gear, the fourth racks are parallel to each other and extend along the Y-axis, the fourth gear is engaged between the fourth racks, the fourth racks are adapted to move relative to each other on the opposite sides of the fourth gear, wherein the odd-numbered second support bars are fixed to one of the fourth racks, and the even-numbered second support bars are fixed to the other of the fourth racks.

[0028] In an embodiment of the present application, the interface device further comprises a bearing platform, the third adjusting set further comprises a third motor device, the fourth adjusting set further comprises a fourth motor device, the bearing platform is arranged in the interval space, the third gear and the fourth gear are arranged on the side of the bearing platform facing the performance board, the third motor device and the fourth motor device are installed on the side of the bearing platform facing the test head, wherein the transmission shaft of the third motor device penetrates through the bearing platform and is connected with the third gear to control the operation of the third gear, and the transmission shaft of the fourth motor device penetrates through the bearing platform and is connected with the fourth gear to control the operation of the fourth gear.

[0029] The adjusting method of the interface device is provided by an embodiment of the present application, and includes: adjusting two first frames to move towards or away from each other along a Y axis to carry a performance board via the two first frames; adjusting two second frames to move towards or away from each other along the Y axis to correspond to probe modules of a test head; adjusting odd-numbered first support strips and even-numbered first support strips to move along an X axis to make support columns slide along second grooves; and adjusting odd-numbered second support strips and even-numbered second support strips to move along the Y axis to make the support columns slide along first grooves. Wherein, along one of the second support strips, the support columns include 1st support column to 2mth support column arranged in sequence along the X axis, m is a positive integer, and a distance between the (2n-1)th support column and the 2nth support column via the support columns sliding along the second grooves corresponds to a length of each chip test seat in a direction of the X axis, n is a positive integer and n is less than or equal to m. Along one of the first support strips, the support columns include 1st support column to 2pth support column arranged in sequence along the Y axis, p is a positive integer, and a distance between the (2q-1)th support column and the 2qth support column via the support columns sliding along the first grooves corresponds to a width of each chip test seat in a direction of the Y axis, q is a positive integer and q is less than or equal to p.

[0030] The present application adjusts the movement of the two first frames / second frames towards or away from each other via the first adjusting group / second adjusting group, so that the freedom of use of the test head and the performance board is improved, and the compatibility of size conversion between the test head and the performance board is achieved. The displacement of the first support strips / second support strips of the carrying structure is adjusted via the third adjusting group / fourth adjusting group, so that the distance between the support columns at the staggered positions of the first support strips and the second support strips can be adjusted, and the chip test seats of different sizes can be effectively supported through the performance board.

[0031] The above description is only a summary of the technical solutions of the present application. In order to make the technical solutions of the present application more clear, the content of the specification can be implemented, and in order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the following preferred embodiments are described in detail below, and the accompanying drawings are described as follows. BRIEF DESCRIPTION OF DRAWINGS

[0032] Figure 1 is a schematic diagram of the appearance structure of the interface device of an embodiment of the present application.

[0033] Figure 2 is a schematic diagram of the interface device of an embodiment of the present application.

[0034] Figure 3 is a schematic diagram of the interface device of an embodiment of the present application.

[0035] Figure 4 is Figure 3Another perspective view of the interface device of

[0036] Figure 5 is a top view of the configuration of the interface device and the performance board of an embodiment of the present application.

[0037] Figure 6 is a corresponding view of the support structure and the chip test socket of an embodiment of the present application.

[0038] Figure 7 is an exploded view of the third adjustment group, the fourth adjustment group and the support structure of an embodiment of the present application.

[0039] Figure 8 is a perspective exploded view of the interface device of another embodiment of the present application.

[0040] Figure 9 is a view of the assembly of part of the structure of the interface device of another embodiment of the present application.

[0041] Figure 10 is an exploded view of the support seat and the support structure of an embodiment of the present application.

[0042] Figure 11 is a view of the assembly of part of the structure of the support seat, the support structure, the performance board and the chip test socket of an embodiment of the present application.

[0043] Figure 12 is a flow chart of the adjustment method of the interface device of an embodiment of the present application. DETAILED DESCRIPTION

[0044] An embodiment of the present application provides an interface device adapted to be disposed between a test head and a device under test. The test head generally comprises a plurality of probe modules. The device under test comprises a performance board and a chip test socket. The chip test socket is disposed on the performance board. The chip test socket is adapted to hold a chip under test. Figure 1 is a view of the appearance structure of the interface device of an embodiment of the present application, Figure 2 is a perspective exploded view of the interface device of an embodiment of the present application. As shown in Figure 1 and Figure 2 , the interface device 10 comprises a first adjustment group 12 (indicated in Figure 2 ), a second adjustment group 14 (indicated in Figure 2 ), two first frames 16, 16', two second frames 18, 18' (indicated in Figure 2 ) and an electrical connection component 20. Figure 3 is a view of the assembly of part of the structure of the interface device of an embodiment of the present application, Figure 4 is Figure 3 another perspective view of the interface device of Figure 2 , Figure 3 andFigure 4 As shown, two first frames 16 and 16' are arranged side-by-side and mounted on a first adjustment group 12. Through the operation of the first adjustment group 12, the two first frames 16 and 16' can move towards each other or away from each other along the Y-axis. There is a gap 22 between the two first frames 16 and 16'. Two second frames 18 and 18' are arranged side-by-side and mounted on a second adjustment group 14. Through the operation of the second adjustment group 14, the two second frames 18 and 18' can move towards each other or away from each other along the Y-axis. Figure 1 and Figure 2 As shown, the probe end 201 of each electrical connection component 20 is mounted on the first frame 16, 16', and the other probe end 202 of each electrical connection component 20 is mounted on the second frame 18, 18'. Figure 1 and Figure 2 The illustration shows only the electrical connection component 20 mounted on the first frame 16 and the second frame 18 as an example.

[0045] Following the above explanation, please refer to the following: Figure 3 As shown, the first adjustment group 12 includes two first racks 121 and 121' and a first gear 122. The length directions of the two first racks 121 and 121' are parallel to each other and extend along the Y-axis. The first gear 122 meshes between the two first racks 121 and 121', that is, the two first racks 121 and 121' mesh on opposite radial sides of the first gear 122, and the two first racks 121 and 121' can move relative to each other on opposite radial sides of the first gear 122. One first frame 16 is mounted on one of the first racks 121, and the other first frame 16' is mounted on the other first rack 121'. In one embodiment, the first adjustment group 12 further includes a first motor device 123, the drive shaft of which is connected to the first gear 122 to control the operation of the first gear 122.

[0046] In one embodiment, such as Figure 3 As shown, there are, for example, two first adjustment groups 12, and the two first adjustment groups 12, 12a are arranged alternately. Two first frames 16, 16' are mounted side-by-side on the two first adjustment groups 12, 12a. Specifically, the first frame 16 is mounted on the first racks 121, 121a of the first adjustment groups 12, 12a, and the first frame 16' is mounted on the first racks 121', 121a' of the first adjustment groups 12, 12a. The rotation of the first gears 122, 122a of the two first adjustment groups 12, 12a is synchronized. The rotation direction of the first gears 122, 122a can be selected as synchronous rotation in the same direction or synchronous rotation in opposite directions, depending on the arrangement of the first frames 16, 16' and the first racks 121, 121a, 121', 121a'. Figure 3In the configuration shown, the two first gears 122 and 122a rotate synchronously in opposite directions. That is, when the first gear 122 rotates in the first direction of rotation and the first gear 122a rotates in the second direction of rotation, the first racks 121 and 121a move in the same direction (e.g., the first direction D1) and at the same speed, while the first racks 121' and 121a' move in the same direction (e.g., the second direction D2) and at the same speed. Since the first direction D1 and the second direction D2 are opposite, the two first frames 16 and 16' can move away from each other in opposite directions. When the first gear 122 rotates in the second direction of rotation and the first gear 122a rotates in the first direction of rotation, the two first frames 16 and 16' can move closer to each other in opposite directions.

[0047] Correspondingly, such as Figure 4 As shown, the second adjustment group 14 includes two second racks 141 and 141' and a second gear 142. The length directions of the two second racks 141 and 141' are parallel to each other and extend along the Y-axis. The second gear 142 meshes between the two second racks 141 and 141', that is, the two second racks 141 and 141' mesh with the radially opposite sides of the second gear 142 respectively, and the two second racks 141 and 141' can move relative to each other on the radially opposite sides of the second gear 142. One second frame 18 is mounted on one of the second racks 141, and the other second frame 18' is mounted on the other second rack 141'. In one embodiment, each second adjustment group further includes a second motor device 143, the drive shaft of which is connected to the second gear 142 to control the operation of the second gear 142.

[0048] In one embodiment, such as Figure 4 As shown, there are, for example, two second adjustment groups 14, with the two second adjustment groups 14 and 14a spaced apart. Two second frames 18 and 18' are mounted side-by-side on the two second adjustment groups 14 and 14a. The second frame 18 is mounted on the second racks 141 and 141a of the second adjustment groups 14 and 14a, and the second frame 18' is mounted on the second racks 141' and 141a' of the second adjustment groups 14 and 14a. The rotation of the second gears 142 and 142a of the two second adjustment groups 14 and 14a is synchronized. The rotation direction of the second gears 142 and 142a can be selected as synchronous rotation in the same direction or synchronous rotation in opposite directions, depending on the arrangement of the second frames 18 and 18' and the second racks 141, 141a, 141', and 141a'. Figure 4In the configuration shown, the two second gears 142 and 142a rotate synchronously in opposite directions. That is, when the second gear 142 rotates in the first direction of rotation and the second gear 142a rotates in the second direction of rotation, the second racks 141 and 141a move simultaneously in the same direction (e.g., the first direction D1) and at the same speed, while the second racks 141' and 141a' move simultaneously in the same direction (e.g., the second direction D2) and at the same speed. Since the first direction D1 and the second direction D2 are opposite, the two second frames 18 and 18' can move away from each other in opposite directions. When the second gear 142 rotates in the second direction of rotation and the second gear 142a rotates in the first direction of rotation, the two second frames 18 and 18' can move closer together in opposite directions.

[0049] Please continue reading. Figure 1 and Figure 2 As shown, the interface device 10 further includes a base 24, the base 24 having two opposing first sidewalls 241, 241' and two opposing second sidewalls 242, 242'. The first motor device 123 (labeled as...) Figure 3 ) and the second motor device 143 (marked in Figure 3 It is located on the first side wall 241. Please also refer to... Figure 3 As shown, when the interface device 10 includes two first adjustment groups 12, 12a and two second adjustment groups 14, 14a, two first motor devices 123, 123a are respectively disposed on two first sidewalls 241, 241', and two second motor devices 143, 143a are respectively disposed on two first sidewalls 241, 241'. In one embodiment, each first motor device 123 / 123a and each second motor device 143 / 143a can be disposed side by side on the first sidewalls 241 / 241', wherein the drive shaft of the first motor device 123 / 123a can, for example, face upward (i.e., towards the first frame 16, 16') to connect with the first gear 122 / 122a, and the drive shaft of the second motor device 143 / 143a can, for example, face downward (i.e., towards the second frame 18, 18') to connect with the second gear 142 / 142a. In an embodiment not shown, the installation of the first motor device 123 / 123a and the second motor device 143 / 143a may be omitted, and the first frame 16, 16' and the second frame 18, 18' may be moved and adjusted manually.

[0050] In one embodiment, please refer to [further details]. Figure 2 , Figure 3 and Figure 4As shown, the first adjustment group 12 / 12a further includes two first guide rails 124 / 124a and a plurality of first sliding seats 125 / 125a. The first guide rails 124 / 124a are arranged parallel to one side of the outer first rack 121 / 121a. In one embodiment, the first guide rails 124 / 124a are supported by the first sidewalls 241 / 241' of the base 24. The first sliding seats 125 and 125a are disposed at opposite ends of the first frame 16 / 16' and respectively fitted onto the first guide rails 124 / 124a. When the first frame 16 moves with the first racks 121 and 121a and the first frame 16' moves with the first racks 121' and 121a', the first sliding seats 125 and 125a slide on the first guide rails 124 and 124a respectively.

[0051] Continuing from the above explanation, as Figure 3 and Figure 4 As shown, the second adjustment group 14 / 14a further includes two second guide rails 144 / 144a and a plurality of second sliding seats 145 / 145a. The second guide rails 144 / 144a are arranged parallel to the second racks 141 / 141a. In one embodiment, the second guide rails 144 / 144a are mounted on a mounting bracket 62 (marked below the base 24) Figure 1 and Figure 2 (And will be explained later) Supported by. The second sliding seat 145 and the second sliding seat 145a are disposed at opposite ends of the second frame 18 / 18' and respectively sleeved on the second guide rail 144 / 144a. When the second frame 18 moves with the second racks 141 and 141a and the second frame 18' moves with the second racks 141' and 141a', the second sliding seats 145 and 145a slide on the second guide rails 144 and 144a respectively.

[0052] Figure 5 This is a top view schematic diagram of the configuration of the interface device and performance board according to an embodiment of the present invention. Please also refer to... Figure 1 and Figure 5 As shown, the two first frames 16, 16' are adapted to bear the load of the performance plate 30, and the two second frames 18, 18' (indicated in...) Figure 2 to Figure 4The probe module is suitable for the corresponding test head (not shown in the figure). When a larger performance board 30 is selected, the two first frames 16, 16' can move backward to be closer to the edge 301 of the large-area performance board 30, thus providing overall support for the large-area performance board 30; at the same time, the probe end 201 of the electrical connection component 20 installed on the first frames 16, 16' can be electrically connected to the test resource area 32 of the performance board 30. When a smaller performance board 30 is selected, the two first frames 16, 16' can move towards each other, bringing them closer together to jointly support the smaller-area performance board 30, and the probe end 201 of the electrical connection component 20 installed on the first frames 16, 16' can be electrically connected to the test resource area 32 of the performance board 30.

[0053] Continuing from the above description, different types of test heads have probe modules with different configurations. When the probe module configuration occupies a small area, the two second frames 18 and 18' (marked as...) Figure 2 to Figure 4 The probe end 202 (marked on) of the electrical connection component 20 installed on the second frame 18, 18' can be driven by the opposite movement. Figure 2 Electrically connected to the probe module; when the probe module occupies a large area, the two second frames 18, 18' can move in opposite directions to drive the probe end 202 of the electrical connection component 20 installed on the second frames 18, 18' to be electrically connected to the probe module.

[0054] The rotation direction of the first gear 122 / 122a and the rotation direction of the second gear 142 / 142a can be opposite or the same. That is, when the two first frames 16 and 16' move towards each other, the two second frames 18 and 18' can move towards each other or away from each other; when the two first frames 16 and 16' move away from each other, the two second frames 18 and 18' can move towards each other or away from each other. For example, when the probe module of the test head occupies a small area, and the two second frames 18 and 18' move towards each other, the away movement of the two first frames 16 and 16' allows for the selection of a large-area performance plate 30 to expand the space, or the towards-facing movement of the two first frames 16 and 16' allows for the use of a small-area performance plate 30. In other words, the degree of freedom in the use of the test head and performance plate 30 is increased. Furthermore, when the probe module of the test head occupies a large area, the two second frames 18 and 18' move in opposite directions. At this time, the performance board 30 can be selected with an appropriate size according to the requirements. Moreover, the performance board 30 can be supported by the opposing / opposite movements of the two first frames 16 and 16', thus achieving compatibility between the size conversion of the test head and the performance board 30.

[0055] Continuing from the above explanation, as Figure 1 , Figure 2 and Figure 5As shown, the interface device 10 further includes two telescopic dust covers 26 and 26', which are connected between the first frame 16 and 16' and the second sidewall 242 and 242'. When the two first frames 16 and 16' move towards each other along the Y-axis, the telescopic dust covers 26 and 26' are stretched; when the two first frames 16 and 16' move away from each other along the Y-axis, the telescopic dust covers 26 and 26' are compressed. By extending / compressing the telescopic dust covers 26 and 26', the area above the base 24 adjacent to the second sidewall 242 and 242' (or the area not covered by the performance plate 30) can be effectively covered to prevent dust from the environment from falling into the base 24, thus providing an effective dustproof effect.

[0056] On the other hand, such as Figure 5 As shown, when the performance board 30 is supported by the first frames 16 and 16', the multiple chip test sockets 34 disposed in the middle region of the performance board 30 correspond to the space 22 between the two first frames 16 and 16' (marked in...). Figure 1 In order to more effectively support the chip test socket 34, such as Figure 1 , Figure 2 and Figure 3 As shown, the interface device 10 further includes a supporting structure 40, a third adjustment group 42, and a fourth adjustment group 44, which are disposed corresponding to the interval space 22. In one embodiment, the supporting structure 40 includes multiple first support bars 401, multiple second support bars 402, and multiple support columns 403, wherein the first support bars 401 and the second support bars 402 are staggered, and the support columns 403 pass through the staggered positions of the first support bars 401 and the second support bars 402. Figure 6 This is a schematic diagram showing the correspondence between the support structure and the chip test socket according to an embodiment of the present invention, wherein the performance board 30 is omitted. Figure 6 As shown, four adjacent support pillars 403 arranged at the four corners can jointly support a chip test socket 34 (represented by dashed boxes). Preferably, the four support pillars 403 are separated by a performance board 30 (shown on...). Figure 5 The support column 403 is placed against the four corners of the chip test socket 34 to achieve better support. Optionally, in one embodiment, the position of the support column 403 may not only correspond to the four corners of the chip test socket 34, but may also be used for support in any combination of positions within the range of the chip test socket 34 as needed.

[0057] Please continue reading. Figure 6As shown, specifically, looking along one of the second support bars 402, the support pillars 403 passing through the staggered positions of the first support bar 401 and the second support bar 402 include the first support pillar C1, the second support pillar C2, the third support pillar C3, ... to the 2m support pillar C2m arranged sequentially on the X-axis, where m is a positive integer. The distance x1 between the (2n-1)th support pillar and the 2nth support pillar corresponds to the length s of each chip test socket 34 in the X-axis direction, where n is a positive integer and n is less than or equal to m. For example, as... Figure 6 As shown, along one of the second support bars 402, there are sequentially arranged support pillars C1, C2, C3, ..., C15, and C16 (i.e., m = 8), where the distance x1 between the first support pillar C1 and the second support pillar C2 (n = 1), the distance x1 between the third support pillar C3 and the fourth support pillar C4 (n = 2), ..., the distance x1 between the 15th support pillar C15 and the 16th support pillar C16 (n = 8) corresponds to the length s of each chip test socket 34 in the X-axis direction. Figure 6 The embodiment shown is based on the example that each chip test socket 34 has an equal length s and each distance x1 is equal, but it is not limited to this.

[0058] Correspondingly, looking along one of the first support bars 401, the support pillars 403 passing through the staggered positions of the first support bar 401 and the second support bar 402 include the first support pillar D1, the second support pillar D2, ... to the 2pth support pillar D2p arranged sequentially on the Y-axis, where p is a positive integer. The distance between the (2q-1)th support pillar and the 2qth support pillar corresponds to the width w of each chip test socket 34 in the Y-axis direction, where q is a positive integer and q is less than or equal to p. For example, as... Figure 6 As shown, along one of the first support bars 401, there are sequentially arranged first support pillars D1, second support pillars D2, third support pillars D3, and fourth support pillars D4 (i.e., p=2), where the distance y1 between the first support pillar D1 and the second support pillar D2 (q=1 at this time), and the distance y1 between the third support pillar D3 and the fourth support pillar D4 (q=2 at this time), correspond to the width w of each chip test socket 34 in the Y-axis direction. Figure 6 The embodiment shown is based on the example that the width w of each chip test socket 34 is equal and the distance y1 of each chip test socket is equal, but it is not limited to this.

[0059] Therefore, since the distance x1 between two adjacent left and right support pillars 403 corresponds to the left and right length s of a single chip test socket 34, and the distance y1 between two adjacent front and rear support pillars 403 corresponds to the front and rear width w of a single chip test socket 34, the four adjacent support pillars 403 distributed at the four corners can be separated by the performance board 30 (shown on...) Figure 5 The four corners of the chip test socket 34 are pressed against each other to support the chip test socket 34.

[0060] Furthermore, in response to chip test sockets 34 of different sizes, it is further explained that the displacement of the first support bar 401 and the second support bar 402 is adjusted by the third adjustment group 42 and the fourth adjustment group 44, so as to appropriately adjust the distance x1 / y1 between the support columns 403, thereby effectively supporting chip test sockets 34 of different sizes.

[0061] Figure 7 This is an exploded view of the third adjustment group, the fourth adjustment group, and the load-bearing structural member according to an embodiment of the present invention. Figure 6 and Figure 7 As shown, multiple first support bars 401 are arranged along the X-axis in the third adjustment group 42. The first support bars 401 include odd-numbered first support bars 401a and even-numbered first support bars 401b. Through the operation of the third adjustment group 42, the movement direction of the odd-numbered first support bars 401a on the X-axis is opposite to that of the even-numbered first support bars 401b on the X-axis. Specifically, in one embodiment, the third adjustment group 42 includes two third racks 421 and 421' and a third gear 422. The length directions of the third racks 421 and 421' are parallel to each other and extend along the X-axis. The third gear 422 meshes between the two third racks 421 and 421'. The two third racks 421 and 421' can move relative to each other on opposite radial sides of the third gear 422. The odd-numbered first support bar 401a is fixed to one of the third racks 421, and the even-numbered first support bar 401b is fixed to the other third rack 421'. By means of the operation of the third rack 422, the odd-numbered first support bar 401a and the adjacent even-numbered first support bar 401b can move away from each other or move closer to each other.

[0062] For example, the first support bars 401 are arranged along the X-axis from left to right as support bar 1, support bar 2, support bar 3, support bar 4, ..., support bar 15 and support bar 16. The odd-numbered first support bars 401a (including support bars 1, 3, ... and 15) are fixed to the third rack 421, and the even-numbered first support bars 401b (including support bars 2, 4, ... and 16) are fixed to another third rack 421'. When the third gear 422 rotates in a direction of rotation (e.g., counterclockwise), the odd-numbered first support bars 401a move synchronously to the right, and the even-numbered first support bars 401b move synchronously to the left. As a result, the distances x1' between support bars 1 and 2, between support bars 3 and 4, ..., and between support bars 15 and 16 decrease. Conversely, when the third gear 422 rotates in another direction of rotation (e.g., clockwise), the odd-numbered first support bar 401a moves synchronously to the left, for example, and the even-numbered first support bar 401b moves synchronously to the right, for example. Then the distance x1' between the first and second support bars, the distance x1' between the third and fourth support bars, ..., and the distance x1' between the 15th and 16th support bars increases.

[0063] Continuing from the above description, the second support bar 402 is staggered with the first support bar 401. Multiple second support bars 402 are arranged along the Y-axis in the fourth adjustment group 44. The second support bars 402 include odd-numbered second support bars 402a and even-numbered second support bars 402b. Through the operation of the fourth adjustment group 44, the movement direction of the odd-numbered second support bars 402a on the Y-axis is opposite to that of the even-numbered second support bars 402b on the Y-axis. Specifically, in one embodiment, the fourth adjustment group 44 includes two fourth racks 441 and 441' and a fourth gear 442. The length directions of the fourth racks 441 and 441' are parallel to each other and extend along the Y-axis. The fourth gear 442 meshes between the fourth racks 441 and 441'. The two fourth racks 441 and 441' can move relative to each other on opposite radial sides of the fourth gear 442. The odd-numbered second support bar 402a is fixed to one of the fourth racks 441, and the even-numbered second support bar 402b is fixed to the other fourth rack 441'. Through the actuation of the fourth racks 441 and 441', the odd-numbered second support bar 402a and the adjacent even-numbered second support bar 402b can move away from or closer to each other.

[0064] For example, the second support bars 402 are arranged along the Y-axis in the following order from front to back as support bar 1', support bar 2', support bar 3', and support bar 4'. The odd-numbered second support bars 402a (including support bars 1' and 3') are fixed to the fourth rack 441, and the even-numbered second support bars 402b (including support bars 2' and 4'') are fixed to another fourth rack 441'. When the fourth gear 442 rotates in one direction, the odd-numbered second support bars 402a move backward synchronously, while the even-numbered second support bars 402b move forward synchronously. This increases the distance y1' between support bars 1' and 2', and the distance y1' between support bars 3' and 4'. Conversely, when the fourth gear 442 rotates in the other direction, the odd-numbered second support bars 402a move forward synchronously, for example, while the even-numbered second support bars 402b move backward synchronously, for example, and the distance y1' between the first support bar' and the second support bar', and the distance y1' between the third support bar' and the fourth support bar', become smaller.

[0065] Please continue reading. Figure 6 and Figure 7 As shown, a plurality of first grooves 404 are formed along the length of the first support bar 401, and a plurality of second grooves 405 are formed along the length of the second support bar 402. Each first groove 404 and each second groove 405 is located at the intersection of the first support bar 401 and the second support bar 402, that is, at each intersection, the first grooves 404 and the second grooves 405 are cross-shaped; and each support post 403 passes through the overlapping portion of the first grooves 404 and the second grooves 405 at each intersection. Figure 6 and Figure 7 The example shown is that the first support bar 401 is staggered and stacked on top of the second support bar 402. However, it is not limited to this example. Alternatively, the second support bar 402 can be staggered and stacked on top of the first support bar 401.

[0066] Among them, such as Figure 7As shown, taking a separate support column 403 as an example, each support column 403 includes a body 406 and two expansion portions 407, which are respectively disposed at opposite ends of the body 406. In one embodiment, the body 406 is, for example, a cuboid, having opposite left side 408 and right side (not shown), and opposite front side 409 and rear side (not shown); the expansion portion 407 is, for example, round and flat, and the outer diameter of the expansion portion 407 is larger than the outer diameter of the body 406. The body 406 passes through the overlapping portion of the first groove 404 and the second groove 405 at an alternating position, while the two expansion portions 407 restrict the vertical displacement of the body 406. When the support column 403 passes through the overlapping portion of the first groove 404 and the second groove 405, the left side 408 and the right side of the body 406 abut against the inner edge of the first groove 404, and the front side 409 and the rear side of the body 406 abut against the inner edge of the second groove 405. When the first support bar 401 (including odd-numbered first support bars 401a and even-numbered first support bars 401b) moves left / right on the X-axis, the support column 403 slides along the second groove 405; when the second support bar 402 (including odd-numbered second support bars 402a and even-numbered second support bars 402b) moves forward / backward on the Y-axis, the support column 403 slides along the first groove 404. In other words, the function of the first groove 404 and the second groove 405 is to provide the support column 403 with room to move on the first support bar 401 and the second support bar 402. The length of the first groove 404 and the second groove 405 can be adjusted according to the requirements. At the same time, the first groove 404 and the second groove 405 also have a limiting function. When the position of one of them, such as the second support bar 402, is determined, the support column 403 will not move at the position of the first support bar 402 when the other one, such as the first support bar 401, is adjusted.

[0067] Based on the above, by the operation of the third adjustment group 42 and the fourth adjustment group 44, the distance x1 between two adjacent left and right support pillars 403 can be adjusted to accommodate the left and right lengths s of different chip test sockets 34, and the distance y1 between two adjacent front and rear support pillars 403 can be adjusted to accommodate the front and rear widths w of different chip test sockets 34. Therefore, the four adjacent support pillars 403 distributed at the four corners can respectively abut against the four corners of the chip test socket 34 through the performance plate 30 to jointly support one chip test socket 34. Among them, the displacement space of the two adjacent left and right support pillars 403 is limited by the length of the second groove 405, and the displacement space of the two adjacent front and rear support pillars 403 is limited by the length of the first groove 404; that is, the support pillars 403 can slide freely within the range supported by the first groove 404 and the second groove 405, wherein the size of the first groove 404 and the second groove 405 can be adjusted according to the requirements.

[0068] In one embodiment, such asFigure 6 and Figure 7 As shown, the third racks 421 and 421' have a plurality of first mounting holes 423 formed along their length, and each first support bar 401 is fixed to one of the first mounting holes 423. The fourth racks 441 and 441' have a plurality of second mounting holes 443 formed along their length, and each second support bar 402 is fixed to one of the second mounting holes 443. In one embodiment, the first mounting holes 423 and the second mounting holes 443 are, for example, screw holes, and the first support bar 401 and the second support bar 402 are locked in the screw holes by means of screws (not shown), thereby fixing the first support bar 401 and the second support bar 402 to the third racks 421 / 421' and the fourth racks 441 / 441', respectively.

[0069] By means of the dense arrangement of the first mounting holes 423, the positions of the odd-numbered first support bars 401a and even-numbered first support bars 401b on the third rack 421 / 421' can be pre-adjusted according to the distance between adjacent chip test sockets 34 on the X-axis, so that the distance x2 between the even-numbered first support bar 401b and its adjacent high-numbered odd-numbered first support bar 401a corresponds to the distance between adjacent chip test sockets 34 on the X-axis; correspondingly, by means of the dense arrangement of the second mounting holes 443, the positions of the odd-numbered second support bars 402a and even-numbered second support bars 402b on the fourth rack 441 / 441' can be pre-adjusted according to the distance between adjacent chip test sockets 34 on the Y-axis, so that the distance y2 between the even-numbered second support bar 402b and its adjacent high-numbered odd-numbered second support bar 402a corresponds to the distance between adjacent chip test sockets 34 on the Y-axis.

[0070] In other words, the first mounting hole 423 / second mounting hole 443 provides adjustable mounting positions for the first support bar 401 / second support bar 402. By adjusting the mounting position, the values ​​of distances x2 and y2 can be adjusted; then, by actuating the third gear 422 and the fourth gear 442, the values ​​of distances x1' and y1' can be adjusted respectively. This further improves the freedom of positional distribution of the support pillar 403, allowing for more precise support of the four corners of the chip test socket 34 across the performance plate 30, ensuring the testing stability of the chip under test. The distances between adjacent chip test sockets 34 on the X-axis can be the same or different, and the distances between adjacent chip test sockets 34 on the Y-axis can be the same or different.

[0071] Please continue reading. Figure 7 As shown, the interface device 10 further includes a support platform 50, which is disposed on the base 24 (marked as...). Figure 1 Within and located in interval space 22 (marked in) Figure 1In one embodiment, there are two third adjustment groups 42 and two fourth adjustment groups 44. The two third adjustment groups 42 and 42a are spaced apart (e.g., one in front of the other on the support platform 50), and the two fourth adjustment groups 44 are spaced apart (e.g., one on the left and one on the right on the support platform 50). The third gears 422 and 422a of the third adjustment groups 42 and 42a, and the fourth gears 442 and 442a of the fourth adjustment groups 44 and 44a are positioned on the support platform 50 facing the performance plate 30 (shown on...). Figure 5 The third adjustment group 42 / 42a further includes a third motor device 424 / 424a, and the fourth adjustment group 44 / 44a further includes a fourth motor device 444 / 444a. The third motor devices 424, 424a and the fourth motor devices 444, 444a are installed on the side of the support platform 50 facing the test head (not shown). The drive shaft of the third motor device 424 / 424a passes through the support platform 50 and is connected to the third gear 422 / 422a to control the operation of the third gear 422 / 422a. The drive shaft of the fourth motor device 444 / 444a passes through the support platform 50 and is connected to the fourth gear 442 / 442a to control the operation of the fourth gear 442 / 442a.

[0072] Continuing from the above description, the rotation of the third gears 422 and 422a of the two third adjustment groups 42 and 42a is synchronized. The odd-numbered first support bar 401a is fixed to two of the third racks 421 and 421a of the two third adjustment groups 42 and 42a that have the same direction of movement, and the even-numbered first support bar 401b is fixed to the other two third racks 421' and 421a' of the two third adjustment groups 42 and 42a that have the same direction of movement. The rotation of the fourth gears 442 and 442a of the two fourth adjustment groups 44 and 44a is synchronized. The odd-numbered second support bar 402a is fixed to two of the fourth racks 441 and 441a of the two fourth adjustment groups 44 and 44a that have the same direction of movement, and the even-numbered second support bar 402b is fixed to the other two fourth racks 441' and 441a' of the two fourth adjustment groups 44 and 44a that have the same direction of movement.

[0073] The rotation direction of the third gears 422 and 422a can be selected as synchronous rotation in the same direction or synchronous rotation in opposite directions, depending on the configuration of the odd-numbered first support bars 401a and even-numbered first support bars 401b on the third racks 421, 421a, 421', and 421a'. Correspondingly, the rotation direction of the fourth gears 442 and 442a can be selected as synchronous rotation in the same direction or synchronous rotation in opposite directions, depending on the configuration of the odd-numbered second support bars 402a and even-numbered second support bars 402b on the fourth racks 441, 441a, 441', and 441a'. Figure 6 and Figure 7In the configuration shown, the two third gears 422 and 422a rotate synchronously in opposite directions, and the two fourth gears 442 and 442a rotate synchronously in opposite directions, but are not limited to this.

[0074] In one embodiment, please refer to [further details]. Figure 1 and Figure 2 As shown, the interface device 10 further includes an interface circuit board 60 and a mounting bracket 62. The mounting bracket 62 is adapted to be mounted on the test head. The interface circuit board 60 is disposed between the second frames 18, 18' and the mounting bracket 62 via the support of the mounting bracket 62, so that the other probe end 202 of the electrical connection component 20 mounted on the second frames 18, 18' can be electrically connected to the test head via the interface circuit board 60. However, it is not limited to this. In embodiments not shown, the interface circuit board and mounting bracket may be omitted, wherein the other end of the electrical connection component mounted on the second frame can be directly electrically connected to the test head.

[0075] Figure 8 This is an exploded perspective view of an interface device according to another embodiment of the present invention. Figure 9 This is a schematic diagram of a partial structural assembly of an interface device according to another embodiment of the present invention, as shown below. Figure 8 and Figure 9 As shown, the interface device 10A further includes multiple support bases 70, which are disposed on the load-bearing structural member 40. Other components and configurations have been disclosed. Figure 2 or Figure 3 The details will not be elaborated upon here. Figure 10 This is an exploded view of a support base and load-bearing structural component according to an embodiment of the present invention, as shown below. Figure 8 to Figure 10 As shown, each support 70 includes a body 72 and multiple protruding platform portions 74, 74', as... Figure 10 As shown, the body 72 has a first surface 721 and a second surface 722 opposite to each other. Protruding platform portions 74 and 74' are formed on the first surface 721. In one embodiment, the protruding platform portions 74 are distributed, for example, around the periphery of the first surface 721, and the protruding platform portions 74' are distributed, for example, in the central region of the first surface 721.

[0076] Continuing from the above description, the support base 70 is supported by the (2q-1)th support column and the 2qth support column on two adjacent first support bars 401 arranged at four corners, or the support base 70 is supported by the (2n-1)th support column and the 2nth support column on two adjacent second support bars 402 arranged at four corners. For examples, please refer to [the relevant documentation / reference]. Figure 6 and Figure 8As shown, one of the support bases 70 is supported by the third support column D3 and the fourth support column D4 on the odd-numbered first support bar 401a, and the third support column D3 and the fourth support column D4 on the adjacent even-numbered first support bar 401b. Alternatively, one of the support bases 70 is supported by the first support column C1 and the second support column C2 on the odd-numbered second support bar 402a, and the first support column C1 and the second support column C2 on the adjacent even-numbered second support bar 402b.

[0077] Please continue reading. Figure 10 As shown, the support base 70 further includes four insertion portions 76 formed on the second surface 722. In one embodiment, the insertion portions 76 are provided, for example, at the four corners of the second surface 722. Correspondingly, slots 410 are formed on the support pillars 403 of each supporting structural member 40. The support base 70 is combined with the supporting structural member 40 by the insertion portions 76 being respectively inserted into the slots 410 of the support pillars 403 distributed at the four corners.

[0078] Figure 11 This is a partial cross-sectional schematic diagram of the configuration of a support base, a load-bearing structure, a performance board, and a chip test socket according to an embodiment of the present invention, wherein two support bases 70 and two chip test sockets 34 are shown for illustration. Figure 11 As shown, the insertion portion 76 of the support base 70 is inserted into the slot 410 of the support post 403. The protruding platform portions 74 and 74' of the support base 70 abut against the performance board 30, and further support the chip test socket 34 across the performance board 30. Since the distribution of the multiple protruding platform portions 74 and 74' on the body 72 of the support base 70 is not limited to the four corners, but can be customized according to structural analysis, the multiple protruding platform portions 74 and 74' can be effectively distributed in the peripheral and central areas of the first surface 721 of the body 72. This effectively supports the chip test socket 34 across the performance board 30, preventing a portion of the performance board 30 supporting the central area of ​​the chip test socket 34 from becoming unstable and suspended, thereby ensuring the testing stability of the chip under test.

[0079] Figure 12 This is a flowchart illustrating an adjustment method for an interface device according to an embodiment of the present invention, as shown below. Figure 12As shown, the adjustment method includes: adjusting the two first frames 16, 16' to move towards or away from each other along the Y-axis to bear the performance plate 30 via the two first frames 16, 16', which is step S10. Adjusting the two second frames 18, 18' to move towards or away from each other along the Y-axis to correspond to the probe module of the test head, which is step S12. Steps S12 and S10 have no order restriction. Then, adjusting the odd-numbered first support bar 401a and even-numbered first support bar 401b to move along the X-axis, so that the support column 403 slides along the second groove 405 on the second support bar 402, which is step S14. Adjusting the odd-numbered second support bar 402a and even-numbered second support bar 402b to move along the Y-axis, so that the support column 403 slides along the first groove 404 on the first support bar 401, which is step S16. Steps S16 and S14 have no order restriction.

[0080] Among them, looking along one of the second support bars 402, the support columns 403 passing through the staggered positions of the first support bar 401 and the second support bar 402 include the first support column C1, the second support column C2, the third support column C3, ... to the 2m support column C2m arranged in sequence on the X-axis, where m is a positive integer. The distance x1 between the (2n-1)th support column and the 2nth support column corresponds to the length s of each chip test socket 34 in the X-axis direction, where n is a positive integer and n is less than or equal to m. Furthermore, looking along one of the first support bars 401, the support pillars 403 passing through the staggered positions of the first support bar 401 and the second support bar 402 include the first support pillar D1, the second support pillar D2, ... to the second p support pillar D2p arranged sequentially on the Y-axis, where p is a positive integer. The distance between the (2q-1)th support pillar and the second qth support pillar, which slides along the first groove 404 via the support pillars 403, corresponds to the width w of each chip test socket 34 in the Y-axis direction, where q is a positive integer and q is less than or equal to p.

[0081] Based on the above, the interface device and the adjustment method of the interface device according to the embodiments of the present invention have at least one of the following advantages:

[0082] (1) When the probe module of the test head occupies a small area, a large-area performance board can be selected to expand the space by means of the back-to-back movement of the two first frames, or a small-area performance board can still be adopted by means of the opposite-to-facing movement of the two first frames. Therefore, the degree of freedom in the use of the test head and performance board is increased.

[0083] (2) When the probe module of the test head occupies a large area, the performance board can be selected according to the requirements. The performance board can be supported by the relative movement of the two first frames, thus achieving compatibility between the size conversion of the test head and the performance board.

[0084] (3) To accommodate chip test sockets of different sizes on the performance board, the distance between the support columns can be appropriately adjusted by adjusting the displacement of the first and second support bars of the bearing structure, thereby effectively supporting chip test sockets of different sizes across the performance board. In addition, by providing densely arranged mounting holes on the rack, the first and second support bars can be provided with adjustable mounting positions, thereby further improving the freedom of distribution of the support column positions.

[0085] (4) Multiple support seats corresponding to the chip test socket are set on the load-bearing structure. The chip test socket can be supported by multiple protruding platforms evenly distributed or widely distributed on the support seats, which avoid the bending of the performance board due to the large size or heavy weight of the chip test socket, thus affecting the test quality and achieving better test quality.

[0086] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention in any way. Although the present invention has been disclosed above with reference to preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can make some modifications or alterations to the methods and techniques disclosed above without departing from the scope of the present invention to create equivalent embodiments. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present invention without departing from the scope of the present invention shall still fall within the scope of the present invention.

Claims

1. An interface device, characterized by An interface device is disposed between a test head and a device under test, the test head includes a plurality of probe modules, the device under test includes a performance board and a plurality of chip test sockets, the chip test sockets are disposed on the performance board, the interface device comprises: at least one first adjustment group; at least one second adjustment group; two first frames are disposed in parallel on the at least one first adjustment group, and the two first frames are adapted to move towards or away from each other along a Y-axis via actuation of the at least one first adjustment group, the two first frames have a spacing space therebetween, and the two first frames are adapted to carry the performance board; two second frames are disposed in parallel on the at least one second adjustment group, and the two second frames are adapted to move towards or away from each other along the Y-axis via actuation of the at least one second adjustment group, the two second frames are adapted to correspond to the probe modules of the test head; and a plurality of electrical connection components, one end of each of the electrical connection components is mounted to one of the two first frames to electrically connect the performance board, and the other end of each of the electrical connection components is mounted to one of the two second frames to electrically connect the probe modules.

2. The interface device of claim 1, wherein, The at least one first adjustment group includes two first racks and a first gear, the length directions of the first racks are parallel to each other and extend along the direction of the Y-axis, the first gear is engaged between the first racks, the first racks are adapted to move relative to each other on the opposite sides of the radial direction of the first gear, one of the two first frames is disposed on one of the first racks, and the other of the two first frames is disposed on the other of the first racks.

3. The interface device of claim 2, wherein, The at least one first adjustment group further includes two first guide rails and a plurality of first sliding seats, the first guide rails are disposed parallel to the first racks, the first sliding seats are disposed at opposite ends of the two first frames and are respectively sleeved on the first guide rails, and when the two first frames are actuated with the first racks, the first sliding seats are respectively slid on the first guide rails.

4. The interface device of claim 2, wherein, The number of the at least one first adjustment group is two, the two first adjustment groups are disposed in parallel, the two first frames are disposed in parallel on the two first adjustment groups, and the rotations of the first gears of the two first adjustment groups are synchronized.

5. The interface device of claim 2, wherein, The at least one second adjustment group includes two second racks and a second gear, the length directions of the second racks are parallel to each other and extend along the direction of the Y-axis, the second gear is engaged between the second racks, the second racks are adapted to move relative to each other on the opposite sides of the radial direction of the second gear, one of the two second frames is disposed on one of the second racks, and the other of the two second frames is disposed on the other of the second racks.

6. The interface device of claim 5, wherein, The at least one second adjustment group further comprises two second guide rails and a plurality of second sliding seats, the second guide rails are parallel to the second rack, the second sliding seats are arranged at opposite ends of the two second frames and are sleeved on the second guide rails, when the two second frames are driven by the second rack, the second sliding seats slide on the second guide rails respectively.

7. The interface device of claim 5, wherein, The number of the at least one second adjustment group is two, the two second adjustment groups are arranged in parallel, the two second frames are arranged on the two second adjustment groups in parallel, and the rotation of the second gears of the two second adjustment groups is synchronous.

8. The interface device of claim 5, wherein, The rotation direction of the first gear is opposite to or the same as the rotation direction of the second gear.

9. The interface device of claim 5, wherein, The interface device further comprises a base, the at least one first adjustment group further comprises a first motor device, the at least one second adjustment group further comprises a second motor device, the base has two opposite first side walls, the first motor device and the second motor device are arranged on the first side walls, the transmission shaft of the first motor device is connected with the first gear to control the driving of the first gear, and the transmission shaft of the second motor device is connected with the second gear to control the driving of the second gear.

10. The interface device of claim 5, wherein, The interface device further comprises a base and two telescopic dust covers, the base has two opposite second side walls, each telescopic dust cover is connected between each of the two first frames and each of the second side walls, when the two first frames move towards each other along the Y-axis, the telescopic dust cover is stretched, and when the two first frames move away from each other along the Y-axis, the telescopic dust cover is compressed.

11. The interface device of claim 1, wherein, The interface device further comprises at least one third adjustment group, at least one fourth adjustment group and a bearing structure, which are arranged corresponding to the interval space, wherein the bearing structure comprises a plurality of first support bars, a plurality of second support bars and a plurality of support columns, The first support bars are arranged along an X-axis on the at least one third adjustment group, the first support bars comprise a plurality of odd-numbered first support bars and a plurality of even-numbered first support bars, through the driving of the at least one third adjustment group, the moving direction of the odd-numbered first support bars on the X-axis is opposite to that of the even-numbered first support bars on the X-axis, The second support bars are arranged alternately with the first support bars, the second support bars are arranged along the Y-axis on the at least one fourth adjustment group, the second support bars comprise a plurality of odd-numbered second support bars and a plurality of even-numbered second support bars, through the driving of the at least one fourth adjustment group, the moving direction of the odd-numbered second support bars on the Y-axis is opposite to that of the even-numbered second support bars on the Y-axis, The support columns are arranged at the alternating positions of the second support bars and the first support bars.

12. The interface device of claim 11, wherein, Each of the first support bars is formed with a first cutout in the length direction thereof at the staggered position with the second support bars, and each of the second support bars is formed with a second cutout in the length direction thereof at the staggered position with the first support bars, the first cutout and the second cutout being cross-staggered, and each of the support columns is arranged in the overlapping portion of each of the first cutout and each of the second cutout.

13. The interface device of claim 12, wherein, When the odd-numbered first support bars and the even-numbered first support bars move along the X-axis, the support columns slide along the second cutout, and when the odd-numbered second support bars and the even-numbered second support bars move along the Y-axis, the support columns slide along the first cutout.

14. The interface device of claim 13, wherein, The support columns comprise 1st to 2mth support columns arranged in sequence along the X-axis, m being a positive integer, wherein the distance between the (2n-1)th support column and the 2nth support column corresponds to the length of each of the chip test sockets in the direction of the X-axis, n being a positive integer and n being less than or equal to m.

15. The interface device of claim 14, wherein, The support columns comprise 1st to 2pth support columns arranged in sequence along the Y-axis, p being a positive integer, wherein the distance between the (2q-1)th support column and the 2qth support column corresponds to the width of each of the chip test sockets in the direction of the Y-axis, q being a positive integer and q being less than or equal to p.

16. The interface device of claim 15, wherein, The interface device further comprises a plurality of support seats, each of the support seats comprising a body having a first surface and a second surface opposite to each other, and a plurality of protruding platform portions formed on the first surface, the support seat being carried by the (2q-1)th support column and the 2qth support column on two adjacent first support bars arranged in a quadrilateral distribution, or the support seat being carried by the (2n-1)th support column and the 2nth support column on two adjacent second support bars arranged in a quadrilateral distribution.

17. The interface device of claim 16, wherein, Each of the support columns comprises a slot, and each of the support seats further comprises four insertion portions formed on the second surface, the insertion portions being respectively inserted into the slots of the support columns arranged in a quadrilateral distribution.

18. The interface device of claim 11, wherein, The at least one third adjusting set comprises two third racks and a third gear, the length directions of the third racks being parallel to each other and extending along the direction of the X-axis, the third gear being engaged between the third racks, the third racks being adapted to move oppositely on the two sides in the radial direction of the third gear, wherein the odd-numbered first support bars are fixed to one of the third racks, and the even-numbered first support bars are fixed to the other of the third racks.

19. The interface device of claim 18, wherein, A plurality of first mounting holes are formed on the third racks in the length direction thereof, and each of the first support bars is fixed to one of the first mounting holes.

20. The interface device of claim 18, wherein, The number of the at least one third adjusting group is two, the two third adjusting groups are arranged in interval, the rotation of the third gears of the two third adjusting groups is synchronous, the odd-numbered first supporting bars are fixed to two third racks of the two third adjusting groups with the same moving direction, and the even-numbered first supporting bars are fixed to the other two third racks of the two third adjusting groups with the same moving direction.

21. The interface device of claim 18, wherein, The at least one fourth adjusting group comprises two fourth racks and a fourth gear, the length directions of the fourth racks are parallel to each other and extend along the direction of the Y axis, the fourth gear is engaged between the fourth racks, and the fourth racks are adapted to move oppositely on the opposite sides of the fourth gear in the radial direction, wherein the odd-numbered second supporting bars are fixed to one of the fourth racks, and the even-numbered second supporting bars are fixed to the other of the fourth racks.

22. The interface device of claim 21, wherein, A plurality of second mounting holes are formed on the fourth racks along the length direction, and each of the second supporting bars is fixed to one of the second mounting holes.

23. The interface device of claim 21, wherein, The number of the at least one fourth adjusting group is two, the two fourth adjusting groups are arranged in interval, the rotation of the fourth gears of the two fourth adjusting groups is synchronous, the odd-numbered second supporting bars are fixed to two fourth racks of the two fourth adjusting groups with the same moving direction, and the even-numbered second supporting bars are fixed to the other two fourth racks of the two fourth adjusting groups with the same moving direction.

24. The interface device of claim 21, wherein, The interface device further comprises a bearing platform, the at least one third adjusting group further comprises a third motor device, the at least one fourth adjusting group further comprises a fourth motor device, the bearing platform is arranged in the interval space, the third gear and the fourth gear are arranged on the side of the bearing platform facing the performance board, the third motor device and the fourth motor device are installed on the side of the bearing platform facing the test head, the transmission shaft of the third motor device penetrates through the bearing platform and is connected with the third gear to control the action of the third gear, and the transmission shaft of the fourth motor device penetrates through the bearing platform and is connected with the fourth gear to control the action of the fourth gear.

25. A method of adjusting an interface device as claimed in claim 13, wherein, Comprise: Adjusting the two first frames to move towards each other or away from each other along the Y axis to carry the performance board through the two first frames; Adjusting the two second frames to move towards each other or away from each other along the Y axis to correspond to the probe module of the test head; Adjusting the odd-numbered first supporting bars and the even-numbered first supporting bars to move on the X axis to make the supporting columns slide along the second cut groove; and Adjusting the odd-numbered second supporting bars and the even-numbered second supporting bars to move on the Y axis to make the supporting columns slide along the first cut groove, wherein ​ Along one of the second support bars, the support columns comprise 1st support columns to 2nd support columns arranged sequentially in the X-axis, m is a positive integer, wherein the distance between the (2n-1)th support column and the 2nth support column corresponds to the length of each chip test socket in the direction of the X-axis through the support columns sliding along the second cutting groove, n is a positive integer and n is less than or equal to m, Along one of the first support bars, the support columns comprise 1st support columns to 2nd support columns arranged sequentially in the Y-axis, p is a positive integer, wherein the distance between the (2q-1)th support column and the 2qth support column corresponds to the width of each chip test socket in the direction of the Y-axis through the support columns sliding along the first cutting groove, q is a positive integer and q is less than or equal to p.

Images