Laser cleaning device

Abstract

The invention relates to a laser cleaning device which comprises a first laser set and a second laser set, and the first laser set comprises a first laser light source, a first collimating mirror matched with the first laser light source and a variable path reflecting mirror set; the second laser group comprises a second laser light source and an immutable path reflecting mirror group matched with the second laser light source; the first laser light source and the second laser light source are finally focused to the surface of a workpiece to be detected through the focusing mirror, the variable-path reflecting mirror group can adjust the laser reflecting path and the laser reflecting angle, and the invariable-path reflecting mirror group can adjust the laser reflecting angle. The movement track length and the movement speed of the light source on the surface of the to-be-detected workpiece can be respectively adjusted. Through cooperative use of the two laser sets, the movement track size, the movement speed and the focus position of the two laser sets can be adjusted, the distance between the movement tracks and the relative position of focusing light spots can also be adjusted, the use range is widened, the cleaning effect is improved, and applicability is high.

Description

Technical Field

[0001] This invention relates to the technical field of laser cleaning, specifically to a laser cleaning device, and more particularly to a composite laser cleaning device. Background Technology

[0002] Lasers possess the advantages of high energy density, high efficiency, low heat input, and minimal workpiece deformation. With the decreasing cost of lasers, their applications are becoming increasingly widespread, and laser cleaning is gradually replacing traditional cleaning processes. Composite laser cleaning technology not only possesses the advantages of single-laser cleaning but also improves the adaptability and efficiency of laser cleaning. However, existing composite laser cleaning technologies have a fixed optical path structure, and the relative positions of multiple light sources cannot be adjusted in real time. The cleaning effect of composite light sources is closely related to their sequential order, so the laser cleaning direction must consider the relative positions of the composite light sources. This results in cleaning operations only being possible along a single direction; when operations are needed in the opposite direction, adjustments to the cleaning head or moving structure are required.

[0003] Therefore, it is necessary to develop composite laser cleaning technology in which the internal optical path of the cleaning head can be adjusted in real time, so that the relative position of the optical path can be adjusted and the cleaning efficiency can be higher. Summary of the Invention

[0004] The purpose of this invention is to provide an improved laser cleaning device. Through structural improvements, the laser beam path can be adjusted, allowing the relative position of the composite light source to be adjusted in real time during the cleaning process, thus ensuring the cleaning effect and improving the efficiency of the cleaning operation.

[0005] To achieve the above objectives, the technical solution of the present invention is: a laser cleaning device, characterized in that: the cleaning device includes a first laser group and a second laser group, the first laser group includes a first laser source, a first collimating lens cooperating with the first laser source, and a variable path reflector group; the second laser group includes a second laser source and a fixed path reflector group cooperating with the second laser source; the first and second laser sources are finally focused onto the surface of the workpiece to be inspected by a focusing lens, the first collimating lens can move along the laser light path direction, the variable path reflector group can adjust both the laser reflection path and the laser reflection angle, the second collimating lens can move along the laser light path direction, and the laser reflection path of the fixed path reflector group remains unchanged, but the laser reflection angle can be adjusted, so that the first and second laser sources can respectively adjust their trajectory length and speed on the surface of the workpiece to be inspected, and the relative position of the first laser source focused on the surface of the workpiece to be inspected can be adjusted.

[0006] Preferably, the variable path reflector assembly includes an adjustable angle reflector, a fixed reflector, and at least one vibrating adjustable reflector. The adjustable angle reflector is connected to an angle adjustment motor, which can drive the adjustable angle reflector to rotate and form two angular positions, so that the variable path reflector assembly forms two different laser reflection paths.

[0007] Furthermore, the variable path reflector assembly includes a vibrating adjustable reflector, an adjustable angle reflector, and a fixed reflector arranged sequentially. A galvanometer motor is connected to the vibrating adjustable reflector to adjust its vibration frequency and vibration angle. When the adjustable angle reflector is at the first angle position, the laser in the laser reflection path is reflected sequentially by the vibrating adjustable reflector and the adjustable angle reflector before entering the focusing lens. When the adjustable angle reflector is at the second angle position, the laser in the laser reflection path is reflected sequentially by the vibrating adjustable reflector and the fixed reflector before entering the focusing lens.

[0008] Furthermore, the variable path reflector assembly includes one adjustable-angle reflector, two vibrating adjustable reflectors, and one fixed reflector. Each of the two vibrating adjustable reflectors is connected to a galvanometer motor to adjust its vibration frequency and angle. When the adjustable-angle reflector is at the first angle position, the laser in the laser reflection path is reflected sequentially by the fixed reflector and one vibrating adjustable reflector before entering the focusing lens. When the adjustable-angle reflector is at the second angle position, the laser in the laser reflection path is reflected sequentially by the adjustable-angle reflector and the other vibrating adjustable reflector before entering the focusing lens.

[0009] Furthermore, the first laser source is output by a first laser output optical cable and a first laser output head. The first collimating lens can move along the laser beam path to adjust the focal position of the laser in the vertical direction. The second laser source is output by a second laser output optical cable and a second laser output head. A second collimating lens is provided below the second laser output head and can move along the laser beam path to adjust the focal position of the laser in the vertical direction.

[0010] Furthermore, the invariant path reflector group forms an invariant laser reflection path, while the variable path reflector group forms two different laser reflection paths on both sides of the invariant laser reflection path.

[0011] Furthermore, the immutable path reflector assembly includes a fixed reflector and a vibrating adjustable reflector arranged sequentially. The vibrating adjustable reflector is connected to a vibrating mirror motor to adjust the vibration frequency and vibration angle of the vibrating adjustable reflector.

[0012] Compared with the prior art, the technical solution of the present invention not only improves the overall technical solution, but also includes many improvements in details. Specifically, it has the following beneficial effects: 1. The improved solution of the present invention includes a cleaning device comprising a first laser group and a second laser group. The first laser group includes a first laser source, a first collimating mirror cooperating with the first laser source, and a variable path reflector group. The second laser group includes a second laser source and a non-variable path reflector group cooperating with the second laser source. By using the two laser groups in combination, not only can the movement trajectory size, movement speed, and focal position of the two laser groups be adjusted, but the distance between their movement trajectories and the relative position of the focused spot can also be adjusted, thus expanding the scope of application, improving the cleaning effect, and making it highly applicable. 2. In the technical solution of the present invention, the first and second laser sources are finally focused onto the surface of the workpiece to be inspected by a focusing lens. The first collimating lens can move along the laser light path. The variable path reflector group can adjust both the laser reflection path and the laser reflection angle. The second collimating lens can move along the laser light path. The laser reflection path of the non-variable path reflector group remains unchanged, but the laser reflection angle can be adjusted. This allows the first and second laser sources to adjust their trajectory length and speed on the surface of the workpiece to be inspected, respectively. Different light source paths and other parameters can be combined according to different operational needs to achieve the best cleaning effect, improve cleaning efficiency, save labor, and reduce costs. 3. In the structure of this invention, the first and second laser sources are independent of each other and can be adjusted quickly and effectively to meet various different situations that arise during the implementation of the operation. It has the ability to deal with emergencies and has a wide range of applications. 4. The present invention has a simple structure, reasonable layout, and diverse variations, which can meet the application needs of different occasions and is easy to promote and utilize. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of the present invention.

[0014] Figure 2 This is a schematic diagram of the adjustable angle reflector at a first angular position in one embodiment of the present invention.

[0015] Figure 3 This is a schematic diagram of the adjustable angle reflector at a second angle position in one embodiment of the present invention.

[0016] Figure 4 This is a schematic diagram of the cleaning process according to an embodiment of the present invention.

[0017] Figure 5 This is another structural schematic diagram of an embodiment of the present invention.

[0018] Figure 6 This is a schematic diagram of another embodiment of the present invention.

[0019] Figure 7 This is a schematic diagram of the adjustable angle reflector at a first angular position in another embodiment of the present invention.

[0020] Figure 8 This is a schematic diagram of the adjustable angle reflector at a second angle position in another embodiment of the present invention.

[0021] Figure 9 This is a schematic diagram of the cleaning process according to another embodiment of the present invention.

[0022] Figure label: 111 First light source output optical cable; 112 Second light source output optical cable; 121 First light source output head, 122 Second light source output head; 131 First collimating lens, 132 Second collimating lens; 141 Angle adjustment motor, 142 First galvanometer motor, 143 Second galvanometer motor, 144 Second galvanometer motor; 151 Adjustable angle reflector, 152 First vibrating adjustable reflector, 153 Second fixed reflector, 154 Second vibrating adjustable reflector, 155 First fixed reflector, 156 Third vibrating adjustable reflector; 1511 First angular position, 1512 Second angular position; 161 focusing lens. Detailed Implementation

[0023] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0024] This invention provides a laser cleaning device, see details below. Figure 1The difference between this and existing technologies lies in the following: the cleaning device includes a first laser group and a second laser group. The first laser group includes a first laser source, a first collimating lens that cooperates with the first laser source, and a variable path reflector group. The second laser group includes a second laser source and a fixed path reflector group that cooperates with the second laser source. The first and second laser sources are finally focused onto the surface of the workpiece to be inspected by a focusing lens. The first collimating lens can move along the laser beam path. The variable path reflector group can adjust both the laser reflection path and the laser reflection angle. The second collimating lens can move along the laser beam path. The laser reflection path of the fixed path reflector group remains unchanged, but the laser reflection angle can be adjusted. This allows the first and second laser sources to adjust their trajectory length and speed on the surface of the workpiece to be inspected, respectively. The relative position of the first laser source focused on the surface of the workpiece to be inspected can be adjusted.

[0025] During implementation, the first and second laser sources are independent of each other and can be adjusted quickly and effectively. Not only can the movement trajectory size, movement speed, and focal position of the two sets of lasers be adjusted, but the distance between their movement trajectories and the relative position of the focused spot can also be adjusted, which expands the scope of application, improves the cleaning effect, and has strong applicability.

[0026] The following details how to adjust and calculate the speed, trajectory size, and spacing of the light source on the workpiece surface. Since these parameters are determined not only by the vibration angle, frequency, and mirror angle of the galvanometer motor (as described in this patent), but also by the focusing lens parameters, and because the focusing lens in practical applications is composed of multiple lenses, using different focusing lens parameters will result in different speeds, trajectory sizes, and spacing of the light source on the workpiece surface. Therefore, in the following formulas and algorithms, the parameter 'n' is introduced when the focusing lens affects the calculation results.

[0027] The galvanometer motor is set to vibrate at an angle θ (degrees or radians) and at a frequency f (hertz or Hz). The vibrating adjustable mirror connected to the galvanometer motor has the same vibration angle θ and frequency f. The fixed mirror or adjustable mirror is fine-tuned at the first angular position by an angle Δα (degrees or radians). The optical path distance from the fixed mirror or adjustable mirror to the upper surface of the focusing mirror at the first angular position is r (millimeters). The optical path distance from the vibrating adjustable mirror to the upper surface of the focusing mirror is R (millimeters). The size of the trajectory of the light source on the upper surface of the focusing mirror is l (millimeters). The distance between the trajectories of the first and second light sources on the upper surface of the focusing mirror is d (millimeters), and d has a minimum value d0. The focusing mirror influence parameter is n, a unitless constant whose value is determined by the focusing mirror. The speed of the light source on the workpiece surface is V, in millimeters per second (mm / s); the size of the trajectory of the light source on the workpiece surface is L, in millimeters (mm); the distance between the trajectories of the first light source and the second light source on the workpiece surface is D, in millimeters (mm).

[0028] The algorithm formulas for the light source's motion speed, trajectory size, and trajectory spacing on the workpiece surface are as follows: = (θ is in degrees) or = (θ is in radians) = (θ is in degrees) or = (θ is in radians) = = = (θ is in degrees) or = = (θ is in radians) = (Δα is in degrees) or = (Δα is in radians) = (Δα is in degrees) or = (Δα is in radians) Combination Figure 1 Make the following calculations: (θ2 is in radians) (θ2 is in radians) (Δα is in radians) Where: L2 is the size of the second light source's trajectory on the workpiece surface; V2 is the speed of the second light source's movement on the workpiece surface; D is the distance between the first and second light sources' trajectories on the workpiece surface; n is a parameter determined by the focusing lens; θ2 is the vibration angle of the second adjustable vibrating mirror 154; f2 is the vibration frequency of the second adjustable vibrating mirror 154; R2 is the optical path distance from the second adjustable vibrating mirror 154 to the upper surface of the focusing lens 161; d0 is the minimum distance between the first and second light sources' trajectories on the upper surface of the focusing lens 161; Δα is the fine-tuning angle of the first fixed mirror 155 or the fine-tuning angle of the adjustable mirror 151 at the first angular position 1511; r is the optical path distance from the first fixed mirror 155 or the adjustable mirror 151 at the first angular position 1511 to the upper surface of the focusing lens.

[0029] Example 1 This embodiment describes a laser cleaning device, see details below. Figure 1 , 5 The cleaning device includes a first laser group and a second laser group. The first laser group includes a first laser source, a first collimating lens that cooperates with the first laser source, and a variable path reflector group. The second laser group includes a second laser source and a fixed path reflector group that cooperates with the second laser source. The first and second laser sources are finally focused onto the surface of the workpiece to be inspected by a focusing lens. The first collimating lens can move along the laser beam path. The variable path reflector group can adjust both the laser reflection path and the laser reflection angle. The second collimating lens can move along the laser beam path. The laser reflection path of the fixed path reflector group remains unchanged, but the laser reflection angle can be adjusted. This allows the first and second laser sources to adjust their trajectory length and speed on the surface of the workpiece to be inspected, respectively. The relative position of the first laser source focused on the surface of the workpiece to be inspected can be adjusted.

[0030] Furthermore, the variable path reflector assembly includes a vibrating adjustable reflector, an adjustable angle reflector, and a fixed reflector arranged sequentially. An angle-adjusting motor is connected to the adjustable angle reflector, which can drive the reflector to rotate 75 degrees, creating two angular positions, thus forming two different laser reflection paths. A galvanometer motor is connected to the vibrating adjustable reflector to adjust its vibration frequency and angle. When the adjustable angle reflector is in the first angular position, the laser in the reflection path is reflected sequentially by the vibrating and adjustable angle reflectors before entering the focusing lens. When the adjustable angle reflector is in the second angular position, the laser in the reflection path is reflected sequentially by the vibrating and fixed reflectors before entering the focusing lens.

[0031] Furthermore, the first laser source is output by a first laser output optical cable and a first laser output head. The first collimating lens can move along the laser beam path to adjust the focal position of the laser in the vertical direction. The second laser source is output by a second laser output optical cable and a second laser output head. A second collimating lens is provided below the second laser output head and can move along the laser beam path to adjust the focal position of the laser in the vertical direction.

[0032] Furthermore, the invariant path reflector group forms an invariant laser reflection path, while the variable path reflector group forms two different laser reflection paths on both sides of the invariant laser reflection path.

[0033] Specifically, the first light source output optical cable 111 is connected to the first light source output head 121, and the second light source output optical cable 112 is connected to the second light source output head 122; the adjustable angle reflector 151 is connected to the angle adjustment motor 141, the first vibrating adjustable reflector 152 is connected to the first galvanometer motor 142, and the second vibrating adjustable reflector 154 is connected to the second galvanometer motor 143; the position of the first collimating mirror 131 or the second collimating mirror 132 can be moved along the optical path direction; the angle of the second fixed reflector 153 or the first fixed reflector 155 can be finely adjusted.

[0034] The first collimating lens 131 is placed between the first light source output head 121 and the first vibrating adjustable reflector 152. The adjustable angle reflector 151 is placed between the first vibrating adjustable reflector 152 and the first fixed reflector 155 or the focusing lens 161. The first fixed reflector 155 is placed between the adjustable angle reflector 151 or the first vibrating adjustable reflector 152 and the focusing lens 161.

[0035] The adjustable angle reflector 151 is connected to the angle adjustment motor 141, and the adjustable angle reflector 151 has two angular positions, namely the first angular position 1511 and the second angular position 1512. Figure 2As shown, when the adjustable angle reflector 151 is at the first angle position 1511, the light source after collimation 131 is first reflected by the first vibrating adjustable reflector 152 to the adjustable angle reflector 151, and then passes through the focusing lens 161; as Figure 3 As shown, when the adjustable angle reflector 151 is at angle position 1512, the light source that has passed through the collimator 131 is first reflected by the first vibrating adjustable reflector 152 to the first fixed reflector 155, and then passes through the focusing lens 161; when the adjustable angle reflector 151 is at the first angle position 1511, the angle can be finely adjusted.

[0036] The second collimating lens 132 is placed between the second light source output head 122 and the second fixed reflector 153. The second fixed reflector 153 is placed between the second collimating lens 132 and the second vibrating adjustable reflector 154. The second vibrating adjustable reflector 154 is placed between the second fixed reflector 153 and the focusing lens 161.

[0037] The position of the focal point of the first or second light source in the vertical direction can be adjusted by adjusting the position of the first collimating lens 131 or the second collimating lens 132 along the light path; for example... Figure 4 As shown, by adjusting the angle of the first fixed reflector 155, the second fixed reflector 153, or the adjustable angle reflector 151 at the first angle position 1511, the distance D between the motion trajectories of the first light source and the second light source on the surface of the workpiece can be adjusted; for example... Figure 4 As shown, by adjusting the vibration frequency and vibration angle of the first galvanometer motor 142 and the second galvanometer motor 143, the vibration frequency and vibration angle of the first adjustable vibrating mirror 152 and the second adjustable vibrating mirror 154 can be adjusted, thereby adjusting the motion trajectory dimensions L1 and L2 of the first light source and the second light source on the surface of the workpiece to be measured and the speed of the laser; by adjusting the angle adjustment motor 141, the angle position of the adjustable angle mirror 151 can be adjusted.

[0038] The second light source output from the second light source output head 122 is collimated by the second collimating mirror 132, its direction is changed by the second fixed reflector 153, and then it passes through the second adjustable vibrating reflector 154 connected to the second galvanometer motor 143. The laser can move according to the set motion trajectory size and speed, and the second light source is focused on the surface of the workpiece to be measured by the focusing mirror 161; for example... Figure 2 As shown, when the adjustable angle reflector 151 is at the first angle position 1511, the first light source output from the first light source output head 121 is collimated by the first collimating mirror 131, and then, after passing through the first vibrating adjustable reflector 152 connected to the first galvanometer motor 142, moves according to the set trajectory size and speed. The adjustable angle reflector 151 changes its direction, and the focusing mirror 161 focuses the first light source onto the surface of the workpiece to be measured. Figure 3As shown, when the adjustable angle reflector 151 is at angle position 1512, the first light source output by the first light source output head 121 is collimated by the first collimating mirror 131, and then moves according to the set trajectory size and speed by the first vibrating adjustable reflector 152 connected to the first galvanometer motor 142. After the first fixed reflector 155 changes direction, the laser is focused on the surface of the workpiece to be measured by the focusing mirror 161.

[0039] The first light source is a continuous laser or a pulsed laser, and the second light source is a pulsed laser. The output head 121 of the first light source is a QBH output head, and the output head 122 of the second light source is a QBH or optical isolator output head. When both the first and second light sources are pulsed lasers, the first light source is a large-spot, flat-top, or long-pulse-width pulsed laser, and the second light source is a small-spot, Gaussian-spot, or short-pulse-width pulsed laser. For example... Figure 4 As shown, during the cleaning operation, the first light source, a continuous laser, is positioned in front, followed by the second light source, a pulsed laser. The first and second light sources can be of the same wavelength or different wavelengths. When the cleaning direction is from left to right, as shown... Figure 2 The adjustable-angle reflector 151 shown is located at the first angle position 1511, which ensures that the first light source is in front and the second light source is behind during the cleaning operation. When the cleaning direction is from right to left, as shown... Figure 3 The adjustable angle reflector 151 shown is located at angle position 1512, which can ensure that the first light source is in front and the second light source is behind during the cleaning operation.

[0040] Example 2 This embodiment describes a laser cleaning device, see details below. Figure 6 The cleaning device includes a first laser group and a second laser group. The first laser group includes a first laser source, a first collimating lens that cooperates with the first laser source, and a variable path reflector group. The second laser group includes a second laser source and a fixed path reflector group that cooperates with the second laser source. The first and second laser sources are finally focused onto the surface of the workpiece to be inspected by a focusing lens. The first collimating lens can move along the laser beam path. The variable path reflector group can adjust both the laser reflection path and the laser reflection angle. The second collimating lens can move along the laser beam path. The laser reflection path of the fixed path reflector group remains unchanged, but the laser reflection angle can be adjusted. This allows the first and second laser sources to adjust their trajectory length and speed on the surface of the workpiece to be inspected, respectively. The relative position of the first laser source focused on the surface of the workpiece to be inspected can be adjusted.

[0041] Furthermore, the variable path reflector assembly includes one adjustable-angle reflector, two vibrating adjustable reflectors, and one fixed reflector. An angle-adjusting motor is connected to the adjustable-angle reflector, which can drive the reflector to rotate 60-85 degrees, forming two angular positions. This allows the variable path reflector assembly to create two different laser reflection paths. A galvanometer motor is connected to each of the two vibrating adjustable reflectors to adjust their vibration frequency and angle. When the adjustable-angle reflector is in the first angular position, the laser in the reflection path is reflected sequentially by the fixed reflector and one vibrating adjustable reflector before entering the focusing lens. When the adjustable-angle reflector is in the second angular position, the laser in the reflection path is reflected sequentially by the adjustable-angle reflector and the other vibrating adjustable reflector before entering the focusing lens.

[0042] Furthermore, the immutable path reflector assembly includes a fixed reflector and a vibrating adjustable reflector arranged sequentially. The vibrating adjustable reflector is connected to a vibrating mirror motor to adjust the vibration frequency and vibration angle of the vibrating adjustable reflector.

[0043] Specifically, the first light source output optical cable 111 is connected to the first light source output head 121, and the second light source output optical cable 112 is connected to the second light source output head 122; the adjustable angle reflector 151 is connected to the angle adjustment motor 141, the second vibrating adjustable reflector 154 is connected to the first galvanometer motor 142, the third vibrating adjustable reflector 156 is connected to the second galvanometer motor 143, and the first vibrating adjustable reflector 152 is connected to the third galvanometer motor 144; the position of the first collimating mirror 131 or the second collimating mirror 132 can be moved along the optical path direction; the angle of the first fixed reflector 155 or the second fixed reflector 153 can be finely adjusted.

[0044] The first collimating lens 131 is positioned between the first light source output head 121 and the adjustable angle reflector 151. The adjustable angle reflector 151 is positioned between the first collimating lens 131 and either the first fixed reflector 155 or the second vibrating adjustable reflector 154. The first fixed reflector 155 is positioned between the adjustable angle reflector 151 and the first vibrating adjustable reflector 152. The first vibrating adjustable reflector 152 is positioned between the first fixed reflector 155 and the focusing lens 161. The second vibrating adjustable reflector 154 is positioned between the adjustable angle reflector 151 and the focusing lens 161.

[0045] The adjustable angle reflector 151 is connected to the angle adjustment motor 141, and the adjustable angle reflector 151 has two angular positions, namely the first angular position 1511 and the second angular position 1512. Figure 7 As shown, when the adjustable angle reflector 151 is at the first angle position 1511, the light source, after collimation 131, directly illuminates the first fixed reflector 155; as Figure 8As shown, when the adjustable angle reflector 151 is located at the second angle position 1512, the light source that has passed through the collimator 131 is first reflected by the adjustable angle reflector 151 to the second vibrating adjustable reflector 154. When the adjustable angle reflector 151 is located at the second angle position 1512, the angle can be finely adjusted.

[0046] The second collimating mirror 132 is placed between the second light source output head 122 and the second fixed reflector 153. The second fixed reflector 153 is placed between the second collimating mirror 132 and the third vibrating adjustable reflector 156. The third vibrating adjustable reflector 156 is placed between the second fixed reflector 153 and the focusing mirror 161.

[0047] The focal position of the laser in the vertical direction can be adjusted by adjusting the position of the first collimating lens 131 or the second collimating lens 132 along the optical path; for example... Figure 9 As shown, by adjusting the angle of the first fixed reflector 155, the second fixed reflector 153, or the adjustable angle reflector 151 at the second angle position 1512, the distance D between the motion trajectories of the first light source and the second light source on the surface of the workpiece can be adjusted; for example... Figure 9 As shown, by adjusting the vibration frequency and vibration angle of the first galvanometer motor 142, the second galvanometer motor 143, and the third galvanometer motor 144, the vibration frequency and vibration angle of the second adjustable vibrating mirror 154, the third adjustable vibrating mirror 156, and the first adjustable vibrating mirror 152 can be adjusted, thereby adjusting the motion trajectory dimensions L1 and L2 of the first and second light sources on the surface of the workpiece to be measured and the movement speed of the laser; by adjusting motor 141, the angle position of the adjustable angle mirror 151 can be adjusted.

[0048] The laser output from the second light source output head 122 is collimated by the second collimating mirror 132, its direction is changed by the second fixed reflector 153, and it passes through the third adjustable vibrating reflector 156 connected to the galvanometer motor 143. The laser can move according to the set size and speed, and is focused on the surface of the workpiece by the focusing mirror 161; for example... Figure 7 As shown, when the adjustable angle reflector 151 is at the first angle position 1511, the laser output from the first light source output head 121 is collimated by the first collimating mirror 131, its direction is changed by the first fixed reflector 155, and then by the first vibrating adjustable reflector 152 connected to the third galvanometer motor 144. The laser can move according to the set size and speed, and is focused on the surface of the workpiece by the focusing mirror 161; as shown... Figure 8As shown, when the adjustable angle reflector 151 is at angle position 1512, the laser output from the first light source output head 121 is collimated by the first collimating lens 131, changes direction by the adjustable angle reflector 151, and passes through the second vibrating adjustable reflector 154 connected to the first galvanometer motor 142. The laser can move according to the set size and speed, and is focused on the surface of the workpiece to be measured by the focusing lens 161.

[0049] The first light source is a continuous laser, and the second light source is a pulsed laser. The output heads 121 and 122 of the first and second light sources are QBH output heads. Figure 9 As shown, during the cleaning operation, the first light source, a continuous laser, is positioned in front, followed by the second light source, a pulsed laser. The first and second light sources can be of the same wavelength or different wavelengths. When the cleaning direction is from left to right, as shown... Figure 7 The adjustable-angle reflector 151 shown is located at the first angle position 1511, which ensures that the first light source is in front and the second light source is behind during the cleaning operation. When the cleaning direction is from right to left, as shown... Figure 8 The adjustable angle reflector 151 shown is located at the second angle position 1512, which can ensure that the first light source is in front and the second light source is behind during the cleaning operation.

[0050] In summary, the present invention has the following advantages: This invention patent uses a reflector connected to a galvanometer motor to edit the length and speed of the laser motion trajectory, and the first and second light sources are independently editable.

[0051] This invention patent uses a reflector connected to an angle-adjusting motor to adjust the optical path of the first light source, so that the relative position of the first and second light sources focused on the workpiece surface can be quickly adjusted and can be adjusted in real time according to actual operation requirements.

[0052] This invention patent uses independent optical paths for the first and second light sources, and does not use a beam combiner. Therefore, the first and second light sources can be light sources of the same wavelength or light sources of different wavelengths. Different light sources can be selected for combination according to different operational needs, making it more widely applicable.

[0053] The dimensions and speed of the motion trajectory of the first and second light sources at the focal position can be adjusted, the focal position can be adjusted, the distance between the motion trajectories can be adjusted, and the relative position of the focused light spots of the first and second light sources can be adjusted. Therefore, the cleaning method of this invention has a wide range of process adjustment and strong applicability.

[0054] The above description, in conjunction with specific preferred embodiments, provides a further detailed explanation of the present invention. It should not be construed that the specific implementation of the present invention is limited to these descriptions. For those skilled in the art, various simple deductions or substitutions can be made without departing from the concept of the present invention, and all such modifications and substitutions should be considered within the scope of protection of the present invention.

Claims

1. A laser cleaning device, characterized in that: The cleaning device includes a first laser group and a second laser group. The first laser group includes a first laser source, a first collimating lens that cooperates with the first laser source, and a variable path reflector group. The second laser group includes a second laser source and a fixed path reflector group that cooperates with the second laser source. The first and second laser sources are finally focused onto the surface of the workpiece to be inspected by a focusing lens. The first collimating lens can move along the laser beam path. The variable path reflector group can adjust both the laser reflection path and the laser reflection angle. The second collimating lens can move along the laser beam path. The laser reflection path of the fixed path reflector group remains unchanged, but the laser reflection angle can be adjusted. This allows the first and second laser sources to adjust their trajectory length and speed on the surface of the workpiece to be inspected, respectively. The relative position of the first laser source focused on the surface of the workpiece to be inspected can be adjusted.

2. The laser cleaning apparatus according to claim 1, characterized in that: The variable path reflector assembly includes an adjustable angle reflector, a fixed reflector, and at least one vibrating adjustable reflector. An angle adjustment motor is connected to the adjustable angle reflector, which can drive the adjustable angle reflector to rotate and form two angular positions, so that the variable path reflector assembly forms two different laser reflection paths.

3. The laser cleaning apparatus according to claim 2, characterized in that: The variable path reflector assembly includes a vibrating adjustable reflector, an adjustable angle reflector, and a fixed reflector arranged sequentially. A galvanometer motor is connected to the vibrating adjustable reflector to adjust its vibration frequency and angle. When the adjustable angle reflector is at the first angle position, the laser in the laser reflection path is reflected sequentially by the vibrating adjustable reflector and the adjustable angle reflector before entering the focusing lens. When the adjustable angle reflector is at the second angle position, the laser in the laser reflection path is reflected sequentially by the vibrating adjustable reflector and the fixed reflector before entering the focusing lens.

4. The laser cleaning apparatus according to claim 2, characterized in that: The variable path reflector assembly includes one adjustable angle reflector, two vibrating adjustable reflectors, and one fixed reflector. Each of the two vibrating adjustable reflectors is connected to a galvanometer motor to adjust its vibration frequency and angle. When the adjustable angle reflector is at the first angle position, the laser in the laser reflection path is reflected sequentially by the fixed reflector and one vibrating adjustable reflector before entering the focusing lens. When the adjustable angle reflector is at the second angle position, the laser in the laser reflection path is reflected sequentially by the adjustable angle reflector and the other vibrating adjustable reflector before entering the focusing lens.

5. The laser cleaning apparatus according to claim 1, characterized in that: The first laser source is output by the first laser output optical cable and the first laser output head. The first collimating lens can move along the laser beam path to adjust the focal position of the laser in the vertical direction.

6. The laser cleaning apparatus according to claim 1, characterized in that: The second laser source is output by a second laser output optical cable and a second laser output head. A second collimating lens is provided below the second laser output head. The second collimating lens can move along the laser beam path to adjust the focal position of the laser in the vertical direction.

7. The laser cleaning apparatus according to claim 1, characterized in that: An invariant path reflector group forms an invariant laser reflection path, while a variable path reflector group forms two different laser reflection paths on either side of the invariant laser reflection path.

8. The laser cleaning apparatus according to claim 1, characterized in that: The invariant path reflector assembly includes a fixed reflector and a vibrating adjustable reflector arranged sequentially. The vibrating adjustable reflector is connected to a vibrating mirror motor to adjust the vibration frequency and vibration angle of the vibrating adjustable reflector.

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