Movable coaxial inlet and outlet water-cooled electrode device

Abstract

The invention relates to the technical field of electrode cooling, in particular to a movable coaxial inlet and outlet water-cooled electrode device which comprises an electrode holder, and a cooling water channel is arranged in the electrode holder; the coaxial water inlet and outlet assembly comprises a conductive copper pipe and a water inlet hose coaxially arranged in the conductive copper pipe, a water return channel is formed between the water inlet hose and the conductive copper pipe, and the water inlet hose and the water return channel are communicated with the cooling water channel to form a circulating water channel used for cooling the electrode holder. The evaporation boat has the advantages that the space utilization rate is increased, movement of the evaporation boat is facilitated, and the problems of welding cracking and water leakage are avoided.

Description

Technical Field

[0001] This application relates to the technical field of electrode cooling, and in particular to a movable coaxial inlet and outlet water-cooled electrode device. Background Technology

[0002] Currently, vacuum metallization technology is widely used in packaging, decoration, and electronics industries, providing an effective solution for surface treatment of numerous products and greatly enhancing their performance and appearance. The basic principle of vacuum metallization is to heat an evaporation boat in a vacuum environment using electric current, causing high-purity aluminum wires placed on the boat to melt and evaporate. The evaporated aluminum molecules are deposited on the substrate surface, forming a uniform metal film. During this process, the temperature of the evaporation boat reaches over 1200℃.

[0003] In vacuum aluminizing equipment, when the evaporation boat is heated to a high temperature, the electrode holder needs to be water-cooled to reduce the temperature. In related technologies, two independent copper pipes are typically welded onto the anode electrode holder, serving as the inlet and outlet pipes respectively, forming a cooling water circuit to lower the anode temperature.

[0004] Regarding the aforementioned technologies: Since vacuum aluminum plating is carried out in the vacuum chamber of the vacuum aluminum plating equipment, the space of the vacuum chamber is limited. Two copper tubes need to be connected by two flange interfaces to pass through the chamber, which will occupy a lot of space and is not conducive to the compact design and layout of the equipment. Summary of the Invention

[0005] To improve space utilization, this application provides a movable coaxial inlet and outlet water-cooled electrode device.

[0006] This application provides a movable coaxial inlet and outlet water-cooled electrode device, which adopts the following technical solution: A movable coaxial inlet and outlet water-cooled electrode device, comprising: An electrode holder, wherein a cooling water channel is provided inside the electrode holder; A coaxial water inlet / outlet assembly includes a conductive copper tube and a water inlet hose coaxially disposed inside the conductive copper tube. A return water channel is formed between the water inlet hose and the conductive copper tube. The water inlet hose and the return water channel are respectively connected to the cooling water channel to form a circulating water path for cooling the electrode holder.

[0007] By adopting the above technical solution, two copper pipes are combined into one, and the water inlet hose is placed inside the conductive copper pipe to form a coaxial water inlet and outlet structure. This solves the problem of multiple copper pipes occupying a lot of space and simplifies the water circuit. Cooling water enters the cooling water channel through the water inlet hose and then flows out from the return water channel, forming a circulating water circuit to cool the electrode holder. This ensures that the part of the electrode holder that carries current is cooled by cooling water, making the electrode holder temperature stable, reducing resistance changes and corresponding current fluctuations in the evaporation boat, and thus reducing the impact on the aluminum film in the coating process.

[0008] Optionally, it also includes a mounting base, a sliding assembly, and a flexible conductive element. The electrode base is connected to the sliding assembly, and the electrode base is movably mounted on the mounting base via the sliding assembly. The flexible conductive element is electrically connected to the conductive copper tube and the electrode base, respectively.

[0009] By adopting the above technical solution, the electrode holder is movably mounted on the mounting base via a sliding assembly. This movable design makes it more convenient to install and remove the workpiece (such as an evaporation boat) from the electrode holder, allowing operators to easily move the electrode holder to complete the corresponding operations. Simultaneously, the flexible conductive component is electrically connected to both the conductive copper tube and the electrode holder. This ensures that current can be smoothly conducted from the conductive copper tube to the electrode holder, maintaining its normal operation. Furthermore, the flexible conductive component possesses a certain degree of flexibility, adapting to the movement of the electrode holder and preventing connection breakage due to movement. Compared to the plastic deformation connection method used in existing technologies, this significantly increases the service life, reduces the occurrence of situations where the workpiece cannot be clamped tightly due to connection problems, and improves the stability and reliability of the electrode device. This, in turn, helps to enhance the working stability of the evaporation boat during the coating process and reduces the impact on coating quality.

[0010] Optionally, the sliding assembly includes a plurality of bearings disposed between the electrode holder and the mounting base, the electrode holder being slidable on the mounting base via the bearings.

[0011] By adopting the above technical solution, multiple bearings are installed between the electrode holder and the mounting base, allowing the electrode holder to slide on the mounting base via the bearings. Since the rolling friction coefficient of the bearings is much lower than that of sliding friction, the resistance during electrode holder movement is reduced. Simultaneously, the rolling motion of the bearings provides good guidance, ensuring that the electrode holder slides along a specific trajectory during movement, thus better controlling the direction and position of the electrode holder's movement. This improves the accuracy of the electrode holder's movement, making the clamping of the evaporation boat easier, avoiding problems of misalignment or non-parallelism, and reducing maintenance time.

[0012] Optionally, the flexible conductive element includes a soft copper busbar, which is made of multiple layers of ribbon-like copper wire braided together.

[0013] By adopting the above technical solution, the soft copper busbar is made of multi-layered ribbon-like copper wire, giving it a certain degree of flexibility, allowing it to swing and bend freely. In the clamping design of the evaporation boat, the soft copper busbar replaces the original plastic deformation method, no longer relying on the material's inherent properties, thus increasing its service life and reducing problems caused by insufficient clamping. Simultaneously, the soft copper busbar, utilizing copper's good thermal conductivity, connects to water-cooled components at both ends, effectively dissipating its own heat. This allows the copper tube temperature throughout the circuit to reach a stable state, reducing heat generation and ensuring a stable evaporation boat current during coating. The resistance changes due to temperature variations, preventing current fluctuations. This results in a more stable evaporation boat state during coating, making it easier to produce high-quality aluminum films.

[0014] Optionally, it also includes an inner support assembly and an outer support assembly. The inner support assembly is disposed in the vacuum chamber and is connected to the flexible conductive element and the coaxial water inlet / outlet assembly respectively. The outer support assembly passes through the inner wall of the vacuum chamber and is connected to the coaxial water inlet / outlet assembly. The outer support assembly is also connected to the conductive copper tube and the water inlet hose respectively.

[0015] By adopting the above technical solution, the inner support assembly is set inside the vacuum chamber and connected to the flexible conductive component and the coaxial water inlet / outlet assembly respectively. The outer support assembly passes through the inner wall of the vacuum chamber and is connected to the coaxial water inlet / outlet assembly. The outer support assembly is also connected to the conductive copper pipe and the water inlet hose, thus forming a stable connection system between the inside and outside of the vacuum chamber for the entire water-cooled electrode device. The inner support assembly provides support and connection for the flexible conductive component and the coaxial water inlet / outlet assembly within the vacuum chamber, while the outer support assembly ensures the communication between the coaxial water inlet / outlet assembly and the outside, thereby ensuring the normal operation of the circulating water circuit and achieving effective cooling of the electrode holder. Simultaneously, the arrangement of the inner and outer support assemblies helps to rationally arrange the various parts of the electrode device inside and outside the vacuum chamber, reducing the space occupied inside the vacuum chamber, making the entire device more compact, facilitating the design and maintenance of other parts, and ensuring stable operation of the electrode device in a vacuum environment, thus improving the reliability and stability of the device.

[0016] Optionally, the inner support assembly includes an inner water inlet copper block and an inner water return copper block, the inner water inlet copper block and the inner water return copper block are connected, flexible tubes are respectively provided on the inner water inlet copper block and the inner water return copper block, the conductive copper tube is connected to the inner water return copper block, the water inlet hose is connected to the cooling water channel through one of the flexible tubes, and the water return channel is connected to the cooling water channel through another flexible tube.

[0017] By adopting the above technical solution, the inner inlet copper block and the inner return copper block are connected, and flexible tubes are respectively installed on them. The conductive copper tube is connected to the inner return copper block. The inlet hose is connected to the cooling water channel through the flexible tube, and the return water channel is also connected to the cooling water channel through the flexible tube. This connects the coaxial inlet and outlet water assembly with the cooling water channel in the electrode holder, allowing cooling water to enter the cooling water channel from the inlet hose through the flexible tube to cool the electrode holder, and then return to the return water channel from the cooling water channel through another flexible tube, realizing a cooling cycle. This ensures that the electrode holder can receive continuous and effective cooling, improves the cooling efficiency and stability of the electrode device, reduces the impact of excessive temperature on the performance of the electrode device, extends the service life of the electrode device, and also helps maintain the stability of the electrode device during operation, ensuring the quality of related processes (such as coating processes).

[0018] Optionally, the external support assembly includes an external water inlet copper block, an external water return copper block, and an insulating block. The external water inlet copper block is connected to the external water return copper block and is connected to the water inlet hose. The external water inlet copper block is used to connect to the water distributor. The external water return copper block is disposed on the inner wall of the vacuum chamber and is connected to the conductive copper pipe. The external water return copper block is connected to the water return channel. The insulating block is disposed between the external water return copper block and the inner wall of the vacuum chamber.

[0019] By adopting the above technical solution, the external inlet copper block is connected to the inlet hose and used to connect to the water distributor, allowing cooling water from the water distributor to be introduced into the inlet hose and then into the cooling water channel of the electrode holder to cool the electrode holder. The external return copper block is connected to the conductive copper pipe and communicates with the return water channel, allowing the cooling water after passing through the electrode holder to return to the external return copper block and be led out through the return water channel. This achieves sealed coaxial inlet and outlet water cooling, simplifying the complex dual-channel water circuit into a single-channel inlet and outlet water structure, reducing the space occupied by parts, making the electrode device more compact, and facilitating the design and maintenance of other parts. At the same time, the insulating block is placed between the external return copper block and the inner wall of the vacuum chamber, ensuring that the entire system will not short-circuit to ground, ensuring the safe and stable operation of the system in the vacuum chamber environment.

[0020] Optionally, a spring clamping mechanism is also included, which is disposed in the vacuum chamber and connected to the electrode holder. The spring clamping mechanism is used to drive the electrode holder to move along the mounting base so that the electrode holder clamps or releases a workpiece to be installed.

[0021] By adopting the above technical solution, the spring clamping mechanism is set inside the vacuum chamber and connected to the electrode holder. Utilizing the elastic force of the spring clamping mechanism, the electrode holder can be driven to move along the mounting base. When a workpiece needs to be installed, the spring clamping mechanism drives the electrode holder to move towards the workpiece and clamp it, ensuring the stability of the workpiece installation. When the workpiece needs to be removed, the spring clamping mechanism drives the electrode holder to move in the opposite direction to release the workpiece. Simultaneously, the elastic clamping force of the spring clamping mechanism can adapt to changes in the size and shape of the workpiece, ensuring the reliability and stability of the clamping, avoiding workpiece installation problems caused by insufficient clamping or misalignment, and improving the accuracy and quality of workpiece installation.

[0022] Optionally, the cooling water channel is U-shaped, and the inlet hose and the return water channel are respectively connected to both ends of the cooling water channel.

[0023] By adopting the above technical solution, the cooling water channel is arranged in a U-shape, and the inlet hose and return water channel are connected to both ends of the cooling water channel, so that the cooling water enters the cooling water channel from the inlet hose and flows in the U-shaped cooling water channel, which can fully contact the electrode seat and remove the heat generated by the electrode seat. Then it flows out from the return water channel to form a complete circulation water path, thereby ensuring that the electrode seat can be effectively cooled, making the temperature distribution of the electrode seat more uniform, reducing the resistance change caused by excessive local temperature, and thus making the current of the evaporation boat more stable. This results in less impact on the aluminum film during the coating process and helps to produce high-quality aluminum film.

[0024] Optionally, the water inlet hose is a steel wire hose.

[0025] By adopting the above technical solution, the steel wire hose has a certain degree of flexibility, making it easy to install inside the conductive copper tube. At the same time, it has steel wire, making it less prone to deformation. This ensures that cooling water is stably delivered into the electrode holder during use, thereby ensuring that the cooling water channel can form a normal circulating water path, achieving effective cooling of the electrode holder and ensuring the stable operation of the electrode device.

[0026] In summary, this application includes at least one of the following beneficial technical effects: 1. The coaxial inlet and outlet water assembly is adopted, which combines two copper pipes into one, reducing the space occupied by parts, making the electrode device more compact, and facilitating the design and maintenance of other parts. 2. Flexible conductive components (soft copper busbars) are used to achieve the movement of the evaporation boat clamping, which is more convenient to use, has a longer service life, and will not cause welding cracks or water leakage problems; 3. The cooling water channel runs through the entire electrode system, which stabilizes the temperature of the electrode system, reduces the change in resistance value, minimizes the fluctuation of the evaporation boat current, and reduces the impact on the aluminum film in the coating process. 4. The electrode holder slides on the mounting base via bearings, reducing resistance during movement, improving the accuracy of clamping the evaporation boat, making operation easier, preventing misalignment or non-parallelism, and reducing maintenance time. Attached Figure Description

[0027] Figure 1 This is a schematic diagram of the overall structure of a movable coaxial inlet and outlet water-cooled electrode device according to an embodiment of this application.

[0028] Figure 2 This is a side view of a movable coaxial inlet / outlet water-cooled electrode device according to an embodiment of this application.

[0029] Figure 3 It is along Figure 2 A partial structural cross-sectional view of line AA in the middle.

[0030] Figure 4 This is a front view of a movable coaxial inlet and outlet water-cooled electrode device according to an embodiment of this application.

[0031] Figure 5 It is along Figure 4 A structural cross-sectional view of the BB line in the middle.

[0032] Figure 6 It is along Figure 4 A structural cross-sectional view of the CC line.

[0033] Explanation of reference numerals in the attached figures: 1. Electrode holder; 11. Cooling water channel; 12. Anode protection plate; 2. Coaxial inlet / outlet water assembly; 21. Conductive copper pipe; 22. Inlet water hose; 23. Return water channel; 3. Mounting base; 4. Sliding assembly; 41. Bearing; 5. Flexible conductive component; 6. Inner support assembly; 61. Inner inlet copper block; 62. Inner return water copper block; 63. Flexible pipe; 7. Outer support assembly; 71. Outer inlet copper block; 72. Outer return water copper block; 73. Insulating block; 74. Pagoda connector; 8. Spring clamping mechanism; 9. Chamber wall. Detailed Implementation

[0034] The following is in conjunction with the appendix Figure 1-6 This application will be described in further detail.

[0035] This application discloses a movable coaxial inlet and outlet water-cooled electrode device.

[0036] It should be noted that, in the description of this invention, the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0037] Reference Figure 1 A movable coaxial inlet / outlet water-cooled electrode device includes an electrode holder 1, a coaxial inlet / outlet water assembly 2, a mounting base 3, a sliding assembly 4, a flexible conductive element 5, an inner support assembly 6, an outer support assembly 7, and a spring clamping mechanism 8. The mounting base 3, the inner support assembly 6, and the spring clamping mechanism 8 are respectively disposed within a vacuum chamber. The outer support assembly 7 passes through the inner wall of the vacuum chamber. The coaxial inlet / outlet water assembly 2 is connected to both the inner support assembly 6 and the outer support assembly 7. The electrode holder 1 is movably mounted on the mounting base 3 via the sliding assembly 4. One end of the flexible conductive element 5 is electrically connected to the coaxial inlet / outlet water assembly 2 via the outer support assembly 7, and the other end of the flexible conductive element 5 is electrically connected to the electrode holder 1. The inner wall of the vacuum chamber is hereinafter defined as the chamber wall 9.

[0038] Reference Figure 2 and Figure 3 The external support assembly 7 includes an external water inlet copper block 71, an external water return copper block 72, and an insulating block 73. The external water inlet copper block 71 and the external water return copper block 72 are detachably connected. In this embodiment, the external water inlet copper block 71 and the external water return copper block 72 are connected by a snap-fit ​​connection. In other embodiments, the external water inlet copper block 71 and the external water return copper block 72 may also be connected by a thread.

[0039] The external water inlet copper block 71 is located outside the vacuum chamber, and pagoda connectors 74 are fixedly connected to the side walls of the external water inlet copper block 71 and the external water return copper block 72, respectively. The external water inlet copper block 71 and the external water return copper block 72 are connected to a water distributor through the pagoda connectors 74, so that the water distributor provides cooling water to the whole device and allows the cooling water to flow back from the external water return copper block 72 to the water distributor. In other embodiments, the external water return copper block 72 can also be connected to an external cooling water storage device through the pagoda connectors 74 to transport the returned cooling water back to the cooling water storage device.

[0040] A sealing ring is installed between the external inlet copper block 71 and the external return copper block 72 to prevent cooling water leakage. The external return copper block 72 passes through the chamber wall 9. In this embodiment, the external return copper block 72 is connected to the chamber wall 9 by a flange.

[0041] Insulating block 73 is filled between the outer return water copper block 72 and the chamber wall 9 to ensure that the entire system will not short-circuit to ground, thus ensuring the safe and stable operation of the system in the vacuum chamber environment. O-rings are installed between insulating block 73 and chamber wall 9, and between insulating block 73 and outer return water copper block 72, to ensure the vacuum seal of the vacuum chamber.

[0042] Reference Figure 3 The coaxial inlet / outlet water assembly 2 includes a conductive copper pipe 21 and an inlet hose 22 coaxially disposed within the conductive copper pipe 21. A return water channel 23 is formed between the inlet hose 22 and the conductive copper pipe 21. One end of the conductive copper pipe 21 is fixedly connected to an external return water copper block 72, and an O-ring is also installed between the conductive copper pipe 21 and the external return water copper block 72 to prevent cooling water leakage. In this embodiment, the conductive copper pipe 21 is made of copper or other metals with good electrical conductivity.

[0043] The inlet hose 22 is connected to the external inlet copper block 71 through the pagoda connector 74, and the return water channel 23 is connected to the external return copper block 72. The end face of the external return copper block 72 has a deep groove, which can accommodate the pagoda connector 74 connected to the inlet hose 22 and leave a certain space.

[0044] In this embodiment, the inlet hose 22 is a steel wire hose. Hose with steel wire is less prone to deformation but still possesses a certain degree of flexibility, making it easy to install. The steel wire hose can be replaced with other hoses with similar properties, such as rubber hoses containing a fiber-reinforced layer.

[0045] The inner support assembly 6 includes an inner water inlet copper block 61 and an inner water return copper block 62, respectively disposed within the vacuum chamber. The inner water inlet copper block 61 and the inner water return copper block 62 are detachably connected. In this embodiment, the inner water inlet copper block 61 and the inner water return copper block 62 are connected by a snap-fit ​​mechanism, and their structural principles are similar, serving to achieve the transfer and connection of the water channels. The inner water inlet copper block 61 and the inner water return copper block 62 can be made of metal materials such as copper. In other embodiments, the inner water inlet copper block 61 and the inner water return copper block 62 can also be connected by threads.

[0046] One end of the conductive copper pipe 21 is fixedly connected to the inner return water copper block 62, and an O-ring is also installed between the conductive copper pipe 21 and the inner return water copper block 62. A pagoda connector 74 is also installed on the inner inlet copper block 61 and the inner return water copper block 62 respectively, and the inlet hose 22 is connected to the inner inlet copper block 61 through the pagoda connector 74.

[0047] The inner inlet copper block 61 and the inner return copper block 62 are each connected to a flexible tube 63 via a pagoda connector 74. The two flexible tubes 63 are respectively connected to the electrode base 1, so that the inlet hose 22 can be connected to the electrode base 1 through one flexible tube 63, and the return water channel 23 can be connected to the electrode base 1 through the other flexible tube 63. In this embodiment, the flexible tube 63 is a rubber water pipe.

[0048] Reference Figure 4 and Figure 5 In this embodiment, the electrode holder 1 is made of a metal material with good electrical conductivity and the ability to withstand certain temperatures, such as a copper alloy. A cooling water channel 11 is provided inside the electrode holder 1. The cooling water channel 11 is U-shaped, allowing the cooling water to circulate better within the electrode holder 1 and effectively remove heat. Furthermore, the U-shaped cooling water channel 11 allows for the staggered installation of the pagoda connector 74 on the electrode holder 1, preventing interference between the connectors.

[0049] Two flexible pipes 63 are connected to both ends of the cooling water channel 11 through the pagoda connector 74, so that a circulating water path is formed between the water inlet hose 22, the water return channel 23 and the cooling water channel 11 to allow the cooling water to circulate.

[0050] Reference Figure 3 The end of the flexible conductive element 5 furthest from the electrode base 1 is connected to the inner water-inlet copper block 61. In this embodiment, the flexible conductive element 5 includes a soft copper busbar, which is made of multiple layers of ribbon-like copper wire. The soft copper busbar has a certain degree of flexibility and can swing and bend freely. Its conductivity is the same as that of ordinary copper busbars. This ensures that the current can be smoothly conducted from the conductive copper tube 21 to the electrode base 1, maintaining the normal operation of the electrode base 1. On the other hand, it can adapt to the movement of the electrode base 1 and will not cause problems such as connection breakage due to the movement of the electrode base 1. Compared with the connection method using plastic deformation in the prior art, it greatly increases the service life and reduces the occurrence of situations such as the workpiece not being clamped tightly due to connection problems.

[0051] It should be noted that during operation, the external power supply (not shown in the figure) is connected to the external water inlet copper block 71 through a cable, so that the current can be conducted to the electrode seat 1 through the external water inlet copper block 71, the external water return copper block 72, the conductive copper pipe 21, the internal water return copper block 62, the internal water inlet copper block 61 and the flexible conductive part 5, and finally flow to the evaporation boat to complete the conductive function.

[0052] In addition, the internal water-inlet copper block 61 and the electrode holder 1 are water-cooled, which can remove the heat generated by the soft copper busbar itself through contact. In other embodiments, the soft copper busbar can also be replaced by other materials with flexible conductive properties, such as flexible graphite conductive tape.

[0053] Reference Figure 5 and Figure 6The sliding assembly 4 includes multiple bearings 41, which are disposed between the electrode seat 1 and the mounting seat 3. In this embodiment, the bearings 41 can be rolling bearings, or sliding bearings, etc., depending on the actual situation.

[0054] There are four bearings 41, which are arranged in pairs. The two pairs of bearings 41 are respectively arranged on both sides of the electrode holder 1, and the bearings 41 can slide on the mounting base 3 so that the electrode holder 1 can slide on the mounting base 3 through the bearings 41, thereby reducing the resistance when the electrode holder 1 moves and improving the accuracy of movement.

[0055] The mounting base 3 can be designed with multiple steps to provide a horizontal limit for the electrode holder 1 and the bearing 41, preventing problems such as non-parallelism or misalignment when clamping the evaporation boat. In this embodiment, the mounting base 3 can be made of a high-strength metal material, such as stainless steel.

[0056] Reference Figure 3 A spring clamping mechanism 8 is disposed within the vacuum chamber and connected to the electrode holder 1. The spring clamping mechanism 8 is used to drive the electrode holder 1 to move along the mounting base 3, so that the electrode holder 1 clamps or releases a workpiece to be installed. The workpiece to be installed refers to the evaporation boat.

[0057] In this embodiment, the spring clamping mechanism 8 can be composed of a spring and a push rod, etc., and the electrode seat 1 is moved by the elastic force of the spring. In other embodiments, the spring clamping mechanism 8 can also be a structure such as an electric push rod.

[0058] An anode protection plate 12 is slidably disposed on the electrode holder 1 and fixed in the vacuum chamber, so as to facilitate the interception of particles sputtered or volatilized by the evaporation boat by the anode protection plate 12 to protect the electrode holder 1.

[0059] The implementation principle of a movable coaxial inlet and outlet water-cooled electrode device according to an embodiment of this application is as follows: When it is necessary to cool the electrode base 1, the cooling water enters the inlet hose 22 through the outer inlet copper block 71, and then enters the cooling water channel 11 through the inlet hose 22 and the flexible pipe 63. It then flows from the cooling water channel 11 to another flexible pipe 63, flows into the return water channel 23 through the flexible pipe 63, and finally flows back to the water distributor through the pagoda connector 74 on the outer return copper block 72. The above process is repeated to complete the cooling of the electrode base 1.

[0060] The movable coaxial inlet / outlet water-cooled electrode device of this embodiment reduces the space occupied by the vacuum chamber and improves space utilization through its innovative coaxial inlet / outlet water structure. The use of soft copper busbars and bearings 41 avoids problems such as weld cracking and leakage caused by plastic deformation of copper tubes, extending the service life of the device. Water cooling runs throughout the entire electrode system, stabilizing the temperature of the electrode holder 1 and minimizing resistance changes, thereby ensuring stable evaporation boat current and improving coating quality. Simultaneously, the electrode holder 1 slides and is guided by bearings 41, reducing movement resistance, improving clamping accuracy and operational convenience, and lowering maintenance time and costs. This represents a significant improvement and contribution compared to existing technologies.

[0061] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A movable coaxial inlet / outlet water-cooled electrode device, characterized in that, include: Electrode holder (1), wherein a cooling water channel (11) is provided inside the electrode holder (1); The coaxial water inlet and outlet assembly (2) includes a conductive copper tube (21) and a water inlet hose (22) coaxially disposed inside the conductive copper tube (21). A return water channel (23) is formed between the water inlet hose (22) and the conductive copper tube (21). The water inlet hose (22) and the return water channel (23) are respectively connected to the cooling water channel (11) to form a circulating water path for cooling the electrode seat (1).

2. The movable coaxial inlet and outlet water-cooled electrode device according to claim 1, characterized in that: It also includes a mounting base (3), a sliding assembly (4) and a flexible conductive element (5). The electrode base (1) is connected to the sliding assembly (4). The electrode base (1) is movably mounted on the mounting base (3) through the sliding assembly (4). The flexible conductive element (5) is electrically connected to the conductive copper tube (21) and the electrode base (1) respectively.

3. The movable coaxial inlet and outlet water-cooled electrode device according to claim 2, characterized in that: The sliding assembly (4) includes a plurality of bearings (41) disposed between the electrode seat (1) and the mounting seat (3), and the electrode seat (1) is able to slide on the mounting seat (3) via the bearings (41).

4. The movable coaxial inlet and outlet water-cooled electrode device according to claim 2, characterized in that: The flexible conductive element (5) includes a soft copper busbar, which is made of multiple layers of ribbon-like copper wire.

5. The movable coaxial inlet / outlet water-cooled electrode device according to claim 2, characterized in that: It also includes an inner support assembly (6) and an outer support assembly (7). The inner support assembly (6) is disposed in the vacuum chamber and is connected to the flexible conductive element (5) and the coaxial water inlet / outlet assembly (2) respectively. The outer support assembly (7) is installed on the inner wall of the vacuum chamber and is connected to the coaxial water inlet / outlet assembly (2). The outer support assembly (7) is connected to the conductive copper tube (21) and the water inlet hose (22) respectively.

6. The movable coaxial inlet / outlet water-cooled electrode device according to claim 5, characterized in that: The inner support assembly (6) includes an inner water inlet copper block (61) and an inner water return copper block (62). The inner water inlet copper block (61) is connected to the inner water return copper block (62). Flexible tubes (63) are respectively provided on the inner water inlet copper block (61) and the inner water return copper block (62). The conductive copper tube (21) is connected to the inner water return copper block (62). The water inlet hose (22) is connected to the cooling water channel (11) through one of the flexible tubes (63). The water return channel (23) is connected to the cooling water channel (11) through another flexible tube (63).

7. The movable coaxial inlet / outlet water-cooled electrode device according to claim 5, characterized in that: The external support assembly (7) includes an external water inlet copper block (71), an external water return copper block (72), and an insulating block (73). The external water inlet copper block (71) is connected to the external water return copper block (72). The external water inlet copper block (71) is connected to the water inlet hose (22). The external water inlet copper block (71) is used to connect to the water distributor. The external water return copper block (72) is disposed on the inner wall of the vacuum chamber and connected to the conductive copper pipe (21). The external water return copper block (72) is connected to the water return channel (23). The insulating block (73) is disposed between the external water return copper block (72) and the inner wall of the vacuum chamber.

8. The movable coaxial inlet and outlet water-cooled electrode device according to claim 2, characterized in that: It also includes a spring clamping mechanism (8), which is disposed in the vacuum chamber and connected to the electrode seat (1). The spring clamping mechanism (8) is used to drive the electrode seat (1) to move along the mounting base (3) so that the electrode seat (1) clamps or releases a workpiece to be installed.

9. The movable coaxial inlet and outlet water-cooled electrode device according to claim 1, characterized in that: The cooling water channel (11) is U-shaped, and the water inlet hose (22) and the water return channel (23) are respectively connected to both ends of the cooling water channel (11).

10. The movable coaxial inlet and outlet water-cooled electrode device according to claim 1, characterized in that: The water inlet hose (22) is a steel wire hose.

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