Control device, adsorption device, and information processing device

Abstract

The control device (1000) supplies power to one or more vacuum pumps (100, 200, 300, 400) connected to the vacuum path (700) so as to operate at a first rotational speed when reducing the pressure in the vacuum path (700). Furthermore, when the pressure in the vacuum path (700) is reduced to a first pressure or less, the control device (1000) stops the power supply to the one or more vacuum pumps (100, 200, 300, 400), or suppresses the power supply so that the one or more vacuum pumps (100, 200, 300, 400) operate at a second rotational speed that is lower than the first rotational speed.

Description

Technical Field

[0001] This invention relates to control devices, adsorption devices, and information processing devices. Background Technology

[0002] In structures that use multiple pumps to draw or deliver fluids such as water and air, a technique is known to stop some pumps from operating in order to extend the pump's lifespan.

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 2018-112162

[0006] Patent Document 2: Japanese Patent Application Publication No. 2014-34926

[0007] Patent Document 3: Japanese Patent Application Publication No. 2021-173231 Summary of the Invention

[0008] The problem that the invention aims to solve

[0009] In devices such as those that use adsorption pads to adsorb objects, there is room for improvement in order to extend their lifespan.

[0010] In one aspect, the present invention aims to provide a control device, an adsorption device, and an information processing device that can extend the life of a pump.

[0011] Solution for solving the problem

[0012] In one embodiment, when depressurizing within the vacuum path, the control device supplies power to one or more vacuum pumps connected to the vacuum path at a first rotational speed. Furthermore, if the pressure within the vacuum path is reduced to below the first pressure, the control device either stops supplying power to the one or more vacuum pumps or suppresses power supply by causing the one or more vacuum pumps to operate at a second rotational speed lower than the first rotational speed.

[0013] One proposed solution can extend the lifespan of the pump. Attached Figure Description

[0014] Figure 1 This is a perspective view showing an example of the conveying system according to the first embodiment.

[0015] Figure 2 This is a top view showing an example of the adsorption device according to the first embodiment.

[0016] Figure 3This is a perspective view showing an example of the adsorption device according to the first embodiment.

[0017] Figure 4 This is a perspective view showing another example of the adsorption device according to the first embodiment.

[0018] Figure 5 This is a cross-sectional view showing an example of the adsorption device according to the first embodiment.

[0019] Figure 6 This is a side sectional view showing an example of an accessory assembled to the main body according to the first embodiment.

[0020] Figure 7 This is a cross-sectional view showing an example of the main body of the first embodiment.

[0021] Figure 8 This is a diagram showing an example of the structure of the adsorption device according to the first embodiment.

[0022] Figure 9 This is a functional block diagram illustrating an example of a control device according to the first embodiment.

[0023] Figure 10 This is a diagram showing an example of the parameters of the first embodiment.

[0024] Figure 11 This is a graph illustrating an example of the shift in pressure within the vacuum path and the current supplied to each vacuum pump in the first embodiment.

[0025] Figure 12A This is a cross-sectional view showing an example of the operating condition of the adsorption device according to the first embodiment.

[0026] Figure 12B This is a cross-sectional view showing an example of the operating condition of the adsorption device according to the first embodiment.

[0027] Figure 12C This is a cross-sectional view showing an example of the operating condition of the adsorption device according to the first embodiment.

[0028] Figure 12D This is a cross-sectional view showing an example of the operating condition of the adsorption device according to the first embodiment.

[0029] Figure 12E This is a cross-sectional view showing an example of the operating condition of the adsorption device according to the first embodiment.

[0030] Figure 12F This is a cross-sectional view showing an example of the operating condition of the adsorption device according to the first embodiment.

[0031] Figure 13This is an example of a setup screen for the first embodiment.

[0032] Figure 14 This is a graph showing another example of the shift in pressure within the vacuum path and the current supplied to each vacuum pump in the first embodiment.

[0033] Figure 15 This is a flowchart illustrating an example of the processing performed by the control device of the first embodiment.

[0034] Figure 16 This is a perspective view of an example of a conveying system of the first modified example.

[0035] Figure 17 This is a side view showing another example of an information processing device representing the first modified example.

[0036] Figure 18 This is a diagram illustrating an example of the conveying system in the second variation.

[0037] Figure 19 This is a diagram illustrating an example of the conveying system in the second variation.

[0038] Figure 20 This is a block diagram representing an example of an information processing device that executes a control program. Detailed Implementation

[0039] Hereinafter, embodiments of the control device, adsorption device, and information processing device disclosed in this application will be described in detail based on the accompanying drawings. It should be noted that the dimensional relationships and ratios of the components in the drawings may sometimes differ from reality. The drawings may also contain parts with different dimensional relationships and ratios. In each drawing, for ease of understanding, sometimes the top surface of the vacuum pump 100 (described later) is shown as having the positive Y-axis, and the vacuum pump 100 is mounted to the positive X-axis and negative Z-axis of the main body 500 in a coordinate system. It should be noted that throughout the description of the embodiments, the same reference numerals are used to denote the same components.

[0040] [First Implementation]

[0041] The control device 1000 of the first embodiment is used for Figure 1 The conveying system 1 shown includes an adsorption device 10 and an information processing device 2000. Figure 1 This is a perspective view showing an example of the conveying system according to the first embodiment. (See diagram below.) Figure 1As shown, the adsorption device 10 of the first embodiment is, for example, mounted on the front end of the robotic arm 900. As explained later, the adsorption device 10 is controlled by a control device 1000, and furthermore, as explained later, an information processing device 2000 sets the parameters used by the control device 1000. The control device 1000 is communicatively connected to the adsorption device 10 and the information processing device 2000, for example, via a cable or through a wired or wireless network.

[0042] The robotic arm 900 is, for example, a known vertical multi-joint type robotic arm having multiple joints, multiple arms, and a support. The robotic arm 900 moves the suction device 10 attached to the support by rotating or extending the multiple joints. It should be noted that the robotic arm 900 can also be a known horizontal multi-joint type robotic arm, etc. Furthermore, the robotic arm 900 can be controlled by a device other than the control device 1000 or the information processing device 2000.

[0043] The adsorption device 10 of the first embodiment uses a vacuum pump to adsorb an object (not shown) to hold the object. Figures 2 to 7 The structure of the adsorption device 10 will be described. Figure 2 This is a top view showing an example of the adsorption device according to the first embodiment. Figure 3 This is a perspective view showing an example of the adsorption device according to the first embodiment. Figure 4 This is a perspective view showing another example of the adsorption device according to the first embodiment. Figure 5 This is a cross-sectional view showing an example of the adsorption device according to the first embodiment. Figure 6 This is a side sectional view showing an example of an accessory assembled to the main body according to the first embodiment. Figure 7 This is a cross-sectional view showing an example of the main body of the first embodiment. Figure 5 Indicates in Figure 3 The cross section is obtained by cutting along line A-A. Figure 6 Indicates in Figure 3 The cross section is obtained by cutting along line B-B. Figure 7 Indicates in Figure 5 The cross section is obtained by cutting along the D-D line.

[0044] like Figures 2 to 5 As shown, the adsorption device 10 of the first embodiment includes a main body 500, a plurality of vacuum pumps 100 to 400, adsorption pads 710 to 770, and accessories 800. It should be noted that... Figure 4 In order to show the internal structure of the main body 500, details are omitted. Figure 5 An illustration of the bottom surface 690 of the main body 500. Furthermore, Figure 4 This indicates that vacuum pumps 200 and 400 are not installed on the main body 500.

[0045] like Figure 2 As shown, the main body 500 is assembled to the robotic arm 900 via the attachment 800. Furthermore, the robotic arm 900 and the main body 500 are connected via... Figure 2 The cable 905 shown is for power connection. It should be noted that in the following figures, the illustrations of cable 905 and other components may sometimes be omitted.

[0046] like Figure 2 and Figure 3 As shown, vacuum pumps 100 to 400 are mounted on the positive direction side of the Y-axis. Figure 5 The upper surface 590 side of the main body 500 shown. Furthermore, as... Figure 4 As shown, vacuum pumps 100 to 400 are vacuum pumps in the form of components that can be detached from the main body 500. For example, the numbers stored in the counter 1401 described below are assigned to vacuum pumps 100 to 400 in such a way that vacuum pump 100 is "1" and vacuum pump 400 is "4".

[0047] like Figure 4 As shown, ventilation paths 610 to 670 are formed in the main body 500. As explained later, ventilation paths 610 to 640 are respectively connected to connection ports 517 to 547 connected to vacuum pumps 100 to 400. Furthermore, ventilation paths 610 to 640 are respectively connected to sockets 617 to 647 for connecting adsorption pads 710 to 740. In this case, socket 617 is connected to connection port 517 via ventilation path 610. For example, ventilation path 630 passes through… Figure 5 The O-ring 638 shown is used to ensure airtightness. Specifically, the ventilation path 610 connects the connection port 517 and the adsorption pad 710. Furthermore, as shown... Figure 4 As shown, adsorption pads 750 to 770 are connected to the ventilation paths 650 to 670 respectively. In addition, O-rings 638 and other components that can ensure airtightness, such as screws, washers, gaskets, and fluororubber tape, can also be used.

[0048] In addition, such as Figure 4 As shown, connecting pipes 656 to 676 connecting ventilation paths 610 to 640 and ventilation paths 650 to 670 are formed in the main body 500. In the first embodiment, ventilation paths 650 to 670, the portions of the adsorption pads 710 to 740 in ventilation paths 610 to 640, and connecting pipes 656 to 676 constitute a vacuum path 700 as a space in a vacuum state. Furthermore, as Figure 4 As shown, the main body 500 also includes a substrate 580.

[0049] Appendix 800 assembles the main body 500 onto external devices such as the robotic arm 900. For example... Figure 6As shown, accessory 800 includes a pressure display unit 810, a pressure sensor 820, a solenoid valve 830, and an assembly unit 890. (As shown...) Figure 6 As shown, pressure sensor 820 and solenoid valve 830 are connected to vacuum path 700 of body 500 via connection port 577 of piping connection member 823 and body 500. It should be noted that solenoid valve 830 is an example of a release valve.

[0050] Pressure sensor 820 detects the air pressure within vacuum path 700. Solenoid valve 830, controlled by control device 1000, switches between open and closed states of vacuum path 700. When solenoid valve 830 is open, vacuum path 700 is open to the atmosphere. Pressure display unit 810 displays, for example, the air pressure within vacuum path 700 measured by pressure sensor 820. It should be noted that accessory 800, for example, is... Figure 4 Bolts 851 and 854 shown and Figure 3 Bolts 852 and 853 are shown to fix the body 500 to the upper surface 590.

[0051] Air within the vacuum path 700 of the main body 500 is drawn in by vacuum pumps 100 to 400. Vacuum pumps 100 to 400, for example, rotate impellers by motors operating at speeds corresponding to PWM (Pulse Width Modulation) signals, thereby drawing air from the suction port and discharging it from the discharge port, thus reducing the pressure within the vacuum path 700.

[0052] Vacuum pumps 100 to 400 are connected in parallel to vacuum path 700 to reduce pressure within vacuum path 700. In this case, as explained later, the adsorption device 10 of the first embodiment can reduce pressure within vacuum path 700 even if any one or more of vacuum pumps 100 to 400 are removed. Furthermore, vacuum pumps 100 to 400 can be controlled independently of the operation of other vacuum pumps. For example, in Figure 5 and Figure 7 The image shows a state where vacuum pump 300 is working while vacuum pump 200 is stopped.

[0053] like Figure 5 and Figure 7 As shown, an air vent 635 and a check valve 633 are provided in the ventilation path 630 through which the air drawn by the vacuum pump 300 passes, to switch the open and closed states of the ventilation path 630. Similarly, as... Figure 7 As shown, check valves 613, 623, and 643, and vent ports 615, 625, and 645 are respectively installed in ventilation paths 610, 620, and 640. Furthermore, as... Figure 5As shown, ventilation path 620 includes spring 624, and ventilation path 630 includes spring 634. It should be noted that... Figure 7 In the middle, vents 615, 625, and 645 are covered by check valves 613, 623, and 643 respectively, and are therefore not visible. It should be noted that... Figure 7 The illustration of substrate 580 is omitted.

[0054] like Figure 5 As shown, in the first embodiment, the check valve 623 is forced by the spring 624 in the negative direction of the Y-axis, i.e., in the direction of closing the vent 625. It should be noted that the spring 624 is an example of a force-applying member. That is, in the first embodiment, the main body 500 includes a force-applying member 624 that applies force to the check valve 623 in the direction that closes it. In this state, as... Figure 5 As indicated by the arrow, the air drawn from the adsorption pad 720 is blocked by the check valve 623. It should be noted that the force-applying component is not limited to a spring; it can also be other components such as rubber, magnets, shape memory alloys, or disc bimetallic parts (thermal expansion valves). For example, disc bimetallic parts can be appropriately applied depending on the temperature of the gas being drawn in.

[0055] On the other hand, such as Figure 5 As shown, by drawing air from the ventilation path 630 by the vacuum pump 300, the check valve 633 moves towards the positive direction in the Y-axis direction, i.e., towards the open vent 635. That is, in the first embodiment, the check valve 633 is closed when the vacuum pump 300 connected to the connection port 537 is stopped, and open when the vacuum pump 300 is operating. In this case, in addition to the air drawn from the adsorption pad 730, the air drawn from the adsorption pads 720 and 760 is also drawn... Figure 5 As shown, air is drawn into the vacuum pump 300 via the connection port 537 through the connecting pipe 666. Similarly, air drawn from the adsorption pads 710, 740, 750 and 770 is also drawn into the vacuum pump 300 via the connecting pipes 656 and 676.

[0056] Furthermore, when the vacuum pump 300 stops operating, the check valve 633 returns to the closed state by the force applied by the spring 634. In this structure, the check valve 633 also remains closed after the vacuum pump 300 is disassembled. That is, with the adsorption pads 710 to 770 adsorbing the object, a vacuum state is maintained inside the main body 500, whether the vacuum pump 300 stops operating or is disassembled, thus preventing the object from falling off.

[0057] Furthermore, in the first embodiment, other vacuum pumps 200 are connected to connection ports 527 other than connection port 537. In this case, the check valve 633 connected to connection port 537 can operate independently of the other check valves 623. For example, sometimes, even if vacuum pump 200 stops and check valve 623 is closed, other check valves 633 are open when vacuum pump 300 is operating. That is, check valves 623 operate independently of the operation of the vacuum pumps connected to other check valves. In addition, check valves 613 to 643 and solenoid valve 830 independently switch the open and closed states of ventilation paths 610 to 670.

[0058] Furthermore, in the first embodiment, such as Figure 5 As shown, the adsorption pad 730, check valve 633, and connection port 537 are arranged in a straight line. This structure simplifies the construction of the ventilation path 630 of the main body 500 and reduces [the risk of air loss / damage]. Figure 5 The thickness T1 of the main body 500 shown.

[0059] In addition, such as Figure 5 As shown, the check valve 623 in the closed state divides the ventilation path 620 into a first space 621 and a second space 622. That is, the ventilation path 620 has a first space 621 formed between the check valve 623 and the connection port 527 and a second space 622 formed between the check valve 623 and the adsorption pad 720. In this case, the check valve 623 remains closed regardless of the air pressure in the second space 622. Furthermore, the first space 621 is not included in a space that is in a vacuum state.

[0060] In this structure, the vacuum state of the second space 622 is released by the operation of the solenoid valve 830 of the accessory 800. Specifically, the solenoid valve 830, which is connected to the second space 622 via connecting pipes 666, 676 and connection port 577, changes from a closed state to an open state, thereby opening the previously vacuumed second space 622 to the atmosphere. According to this structure, the vacuum state can be released without activating individual check valves 613 to 643, thus simplifying the construction and saving power consumption generated when the vacuum state is opened. In particular, when using multiple vacuum pumps, the weight of the main body 500 can be reduced by reducing the number of solenoid valves (for example, less than the number of vacuum pumps).

[0061] The adsorption device 10 described above has the following features: Figure 8 The structure shown. Figure 8 This is a diagram illustrating an example of the structure of the adsorption device according to the first embodiment. It should be noted that... Figure 8 In Chinese, double dashes represent airflow, while dashed lines represent the flow of signals or power. For example... Figure 8 As shown, vacuum pumps 100 to 400 are connected to vacuum path 700 via check valves 613 to 643, respectively. For example, check valves 613 to 643 are disposed in the venting path between vacuum pumps 100 to 400 and vacuum path 700. Furthermore, suction pads 710 to 770 are connected to vacuum path 700, and pressure sensor 820 and solenoid valve 830 are connected via piping connection member 823.

[0062] In such a conveying system 1, the control device 1000 controls the rotational speed of the vacuum pumps 100 to 400 by controlling the power supply to the vacuum pumps 100 to 400. In addition, the control device 1000 can also control the operation of the solenoid valve 830 and the display of the pressure display unit 810.

[0063] Figure 9 This is a functional block diagram illustrating an example of the control device in the first embodiment. For example... Figure 9 As shown, the control device 1000 of the first embodiment is connected to the adsorption device 10 and the information processing device 2000 in a communicable manner, for example, via a network 8000. Furthermore, as... Figure 9 As shown, the network 8000 can also connect to a display device 3000 and an input device 4000 that are different from the pressure display unit 810. The display device 3000 is, for example, an LCD monitor, a CRT monitor, a touch panel, etc., and the input device 4000 is, for example, a switch button, a mouse, a keyboard, a touch panel, etc.

[0064] The control device 1000 includes a storage circuit 1400 and a processing circuit 1500. It should be noted that the control device 1000 may also include communication I / F (Interface), a display device, an input device, etc. (not shown).

[0065] The storage circuit 1400 is implemented, for example, by a storage device such as a memory. The storage circuit 1400 stores various programs that are executed by the processing circuit 1500. Furthermore, the storage circuit 1400 temporarily stores various data used when executing various programs by the processing circuit 1500. For example, the storage circuit 1400 stores a counter 1401 and a parameter 1402.

[0066] Counter 1401 stores information related to the operating sequence of vacuum pumps 100 to 400. For example, counter 1401 stores the numbers of vacuum pumps 100 to 400 that have just operated. For instance, if vacuum pump 100 was the last vacuum pump to operate, counter 1401 stores the number "1" indicating vacuum pump 100. Furthermore, counter 1401 may also store the numbers of the vacuum pumps 100 to 400 that started operating first when the adsorption device 10 begins adsorption. It should be noted that the information stored in counter 1401 is an example of first information related to any one or more vacuum pumps and second information related to the vacuum pump that first started power supply. Furthermore, as shown in step S111 described later, the vacuum pump that first started power supply refers to the vacuum pump that started power supply after all other vacuum pumps had stopped.

[0067] Parameter 1402 stores values ​​such as pressure-related thresholds used for processing by the processing circuit 1500, as well as values ​​such as the duty ratio of the PWM signal corresponding to the rotational speed of the vacuum pump 100 to 400. Figure 10 This is a diagram illustrating an example of the parameters of the first embodiment. The parameters 1402 of the first embodiment include a suppression start pressure 1421 and a rerun pressure 1422 as pressure-related thresholds, and include a maximum duty cycle 1431, a suppression duty cycle 1432, and a maintenance duty cycle 1433 as duty cycle-related values. The values ​​stored in parameter 1402 can be pre-registered, for example, or input by the information processing device 2000.

[0068] The suppression start pressure 1421 is, for example, a threshold used to determine whether to suppress or stop the power supply to vacuum pumps 100 to 400. The restart pressure 1422 is a threshold used to determine whether to increase or start the power supply to vacuum pumps 100 to 400, which have had their power supply suppressed or stopped. It should be noted that the suppression start pressure 1421 is an example of a first pressure, and the restart pressure 1422 is an example of a second pressure.

[0069] The duty cycle determines the power supply value corresponding to the rotational speed at which the vacuum pump operates from 100 to 400 rpm. The maximum duty cycle 1431 corresponds to the first rotational speed described later, the suppression duty cycle 1432 corresponds to the second rotational speed described later, and the maintenance duty cycle 1433 corresponds to the third rotational speed described later. For example... Figure 10 As shown, the duty cycle 1433 is maintained, for example, less than the maximum duty cycle 1431 and greater than the suppressed duty cycle 1432.

[0070] It should be noted that parameter 1402 may also store, for example, the pressure related to the desorption determination that the target object has been detached from the adsorption device 10, and the pressure related to the adsorption determination that the target object has been adsorbed into the adsorption device 10. The suppression start pressure 1421 is, for example, lower than the pressure related to the adsorption determination, and the restart pressure 1422 is, for example, lower than the pressure related to the desorption determination.

[0071] The processing circuit 1500 is implemented by a processor such as a CPU (Central Processing Unit). The processing circuit 1500 controls the entire control device 1000. The processing circuit 1500 performs various processes by reading various programs stored in the storage circuit 1400 and executing the read programs. For example, the processing circuit 1500 has a pressure processing unit 1501 and an adsorption control unit 1502.

[0072] The pressure processing unit 1501 acquires the pressure within the vacuum path 700 detected by the pressure sensor 820. Furthermore, the pressure processing unit 1501 outputs the acquired pressure value to the adsorption control unit 1502 and displays the pressure value on the pressure display unit 810 of the adsorption device 10.

[0073] The adsorption control unit 1502 controls the vacuum pumps 100 to 400 to operate at a speed corresponding to the PWM signal by outputting a PWM signal to the vacuum pumps 100 to 400. It should be noted that the output of the PWM signal is an example of power supply to the vacuum pumps. In this case, the adsorption control unit 1502 determines the duty cycle of the PWM signal based on the pressure value input from the pressure processing unit 1501 and with reference to the duty cycles stored in the parameter 1402, thereby determining the speed of the vacuum pumps 100 to 400.

[0074] In the first embodiment, when the adsorption control unit 1502 receives an instruction to start adsorption and thus depressurizes the vacuum path 700, it controls the vacuum pumps 100 to 400 to operate at a first rotational speed. For example, the adsorption control unit 1502 outputs a PWM signal corresponding to the maximum duty cycle 1431 with reference to parameter 1402, thereby supplying power to the vacuum pumps 100 to 400.

[0075] Furthermore, the adsorption control unit 1502 uses the pressure value to determine whether the pressure within the vacuum path 700 is below the suppression start pressure 1421 stored in parameter 1402. When the pressure within the vacuum path 700 is reduced to below the suppression start pressure 1421, the adsorption control unit 1502 suppresses the power supply by causing one or more vacuum pumps 100 to 400 to operate at a second speed less than the first speed. The adsorption control unit 1502, for example, outputs a PWM signal corresponding to the suppression duty cycle 1432 with reference to parameter 1402.

[0076] It should be noted that when the pressure within the vacuum path 700 is reduced to below the suppression start pressure 1421, and the suppression duty cycle 1432 stored in parameter 1402 is zero, the adsorption control unit 1502 stops outputting the PWM signal. In this case, the adsorption control unit 1502 stops supplying power to one or more vacuum pumps. It should be noted that the vacuum pumps whose power supply is suppressed or stopped can be any one or more of the operating vacuum pumps 100 to 400, or all of them.

[0077] Furthermore, the adsorption control unit 1502 determines whether the pressure within the vacuum path 700 is above the re-operation pressure 1422 stored in parameter 1402 when the power supply is suppressed or stopped. If the pressure within the vacuum path 700 rises above the re-operation pressure 1422, the adsorption control unit 1502 increases or begins power supply to any one or more of the vacuum pumps 100 to 400. At this time, the adsorption control unit 1502 can also cause any one or more vacuum pumps to operate at a third speed less than the first speed. For example, when the power supply is increased or started, the adsorption control unit 1502 outputs a PWM signal corresponding to the maintenance duty cycle 1433, thereby causing any one or more of the vacuum pumps 100 to 400 to operate at the third speed. It should be noted that the vacuum pump that begins power supply can be either a previously started vacuum pump among the multiple vacuum pumps 100 to 400 or a newly started vacuum pump.

[0078] Furthermore, when one or more vacuum pumps are operating at a third rotational speed, the adsorption control unit 1502 determines whether the pressure within the vacuum path 700 has once again fallen below the suppression start pressure 1421. If the pressure within the vacuum path 700 is reduced to below the suppression start pressure 1421 again, the adsorption control unit 1502 suppresses or stops the power supply to one or more vacuum pumps operating at the third rotational speed. By repeatedly suppressing or stopping and increasing or starting the power supply to the vacuum pumps 100 to 400, the power consumption of the adsorption device 10 can be suppressed without hindering the adsorption of the target object, and the lifespan of the vacuum pumps 100 to 400 can be extended. At this time, by operating the vacuum pumps 100 to 400 at a second or third rotational speed lower than the first rotational speed, in addition to saving power and extending lifespan, noise reduction can also be achieved.

[0079] Furthermore, when the adsorption control unit 1502 of the first embodiment operates any one or more vacuum pumps at a third rotational speed, it stores information related to the vacuum pumps operating at the third rotational speed in the counter 1401, thereby storing first information related to any one or more vacuum pumps that have operated at the third rotational speed. For example, when the vacuum pump 100 is operated at the third rotational speed, the adsorption control unit 1502 stores the number "1" corresponding to the vacuum pump 100 in the counter 1401 as first information related to any one vacuum pump.

[0080] Subsequently, after suppressing or stopping the power supply to any one or more vacuum pumps, if the pressure within the vacuum path 700 rises again to a second pressure or higher, the adsorption control unit 1502, referring to the first information, increases or starts the power supply to one or more other vacuum pumps that are different from the other one or more vacuum pumps. For example, if the number stored in the counter 1401 is "1", the adsorption control unit 1502 can then start a vacuum pump 200 that is different from any one of the vacuum pumps 100 by incrementing the stored number by 1, thus using the vacuum pump corresponding to the incremented number. Therefore, the adsorption control unit 1502 then starts a vacuum pump 200 that is different from any one of the vacuum pumps 100. This balances the start-up sequence of vacuum pumps 100 to 400, suppressing fatigue degradation of each vacuum pump. Alternatively, the adsorption control unit 1502 may, for example, activate vacuum pumps 100 and 300 as corresponding vacuum pumps when the number stored in the counter 1401 is "1", and activate vacuum pumps 200 and 400 as vacuum pumps corresponding to the added number, thereby controlling multiple vacuum pumps simultaneously. It should be noted that, when the number stored in the counter 1401 is "4", as explained later, for example, the remainder obtained by dividing the number obtained by adding 1 to the stored number by the number of vacuum pumps can also be calculated.

[0081] use Figure 11 and Figures 12A to 12F The operation of the adsorption device 10 controlled by the adsorption control unit 1502 will be explained. Figure 11 This is a graph showing an example of the shift in pressure within the vacuum path and the current supplied to each vacuum pump in the first embodiment. Figures 12A to 12F This is a cross-sectional view showing an example of the operating condition of the adsorption device according to the first embodiment. Figure 11 In the diagram, the horizontal axis represents the passage of time, and the vertical axis shows the pressure value 799 within the vacuum path 700 or the current value 199 to 499 supplied to the vacuum pumps 100 to 400. The current value corresponds to the duty cycle and the rotational speed of the vacuum pumps 100 to 400.

[0082] exist Figure 11At time point A, before the vacuum pump 100 to 400 starts, the check valves 613 to 643 of the adsorption device 10 are as follows: Figure 12A All shown are in the off state.

[0083] In the first embodiment, when the adsorption device 10 starts working, the vacuum pump 100 to 400 is engaged with... Figure 11 The maximum duty cycle of 1431, as shown, corresponds to the first rotational speed. At this time, as... Figure 11 As shown, when the adsorption control unit 1502 operates the one or more vacuum pumps at the first rotational speed, it can periodically change the power supply to increase the rotational speed of each vacuum pump in stages. According to this structure, the maximum value of the inrush current during startup of the adsorption device 10 can be suppressed, thus achieving energy savings.

[0084] It should be noted that, in the first embodiment, when one or more vacuum pumps 100 to 400 are operating at a first rotational speed, the adsorption control unit 1502 can start supplying power to each vacuum pump at different time points. For example, in Figure 11 At time point B, vacuum pump 200 starts after vacuum pump 100 starts. At this time, vacuum pumps 300 and 400 have not yet started. In this situation, as... Figure 12B As shown, among check valves 613 to 643, only check valves 613 and 623 are open, while check valves 633 and 643 remain closed. It should be noted that the air suction capacity of the vacuum pump 100, which starts first, is greater than that of the vacuum pump 200. This structure also helps to suppress the maximum surge current when the adsorption device 10 starts.

[0085] And, as Figure 11 As shown at time point C, with all vacuum pumps 100 to 400 operating at the first speed, the check valves 613 to 643 of the adsorption device 10 are as follows: Figure 12C All shown are in an open state. In this case, the pressure within the vacuum path 700 is as follows: Figure 11 The time point C shows a rapid decrease.

[0086] Then, when the pressure within the vacuum path 700 falls below the suppression start pressure 1431, the adsorption control unit 1502 suppresses the power supply by causing all vacuum pumps 100 to 400 to operate at a second rotational speed, i.e., by supplying power corresponding to the suppression duty cycle 1432. It should be noted that the vacuum pumps receiving the power supply corresponding to the suppression duty cycle 1432 may not be all of the vacuum pumps 100 to 400, but only a portion thereof.

[0087] At time point D when the power supply is suppressed, the check valves 613 to 643 of the adsorption device 10, as... Figure 12DAs shown, it remains open; on the other hand, the vacuum pump has a suction capacity of 100 to 400 times that of air. Figure 12C The state shown is small. In this case, the pressure within the vacuum path 700 at time point D is as follows: Figure 11 It rises slowly as shown.

[0088] Then, before the pressure within the vacuum path 700 rises to the pressure related to the desorption determination, i.e., before the adsorbed object falls off, the pressure within the vacuum path 700 reaches the restart pressure 1422. At this time, the adsorption control unit 1502 causes one or more vacuum pumps to operate at a third rotational speed. The third rotational speed corresponds to the maintenance duty cycle 1433, as follows: Figure 11 The time point E is shown, for example, a rotational speed that is less than the first rotational speed but greater than the second rotational speed.

[0089] In this state, the check valves 613 to 643 of the adsorption device 10 are as follows: Figure 12E All are shown to be kept open, but the vacuum pump 300, operating at the third speed, draws more air than the three vacuum pumps 100, 200, and 400, which are operating at the second speed. In this case, as... Figure 11 As shown at time point E, the pressure within the vacuum path 700 drops again.

[0090] At this time, the adsorption control unit 1502 stores information indicating that the vacuum pump 300 has been operated at a third rotational speed in the counter 1401. For example, the adsorption control unit 1502 stores the number "3" indicating the vacuum pump 300 in the counter 1401. Then, when the adsorption control unit 1502 operates any one or more vacuum pumps at the third rotational speed at the next timing, it refers to the counter 1401 to determine any one or more vacuum pumps corresponding to a number different from the stored number. For example... Figure 11 As shown, the adsorption control unit 1502 first operates the vacuum pump 100 at the third speed, and then sequentially operates the vacuum pumps 200, 300 and 400 at the third speed.

[0091] exist Figure 11 After time point E, when it is determined that the pressure within the vacuum path 700 has once again reached the suppression start pressure 1421, the adsorption control unit 1502 controls the vacuum pump 300, which is currently operating at a third rotation speed, to operate at a second rotation speed. In this case, the adsorption control unit 1502 changes the power supplied to the vacuum pump 300 from the power corresponding to the maintenance duty cycle 1433 to the power corresponding to the suppression duty cycle 1432.

[0092] After that, Figure 11At time point F, when the pressure within the vacuum path 700 reaches the restart pressure 1422 again, the adsorption control unit 1502 causes the vacuum pump 400, which is different from the vacuum pump 300 that just operated at the third speed, to operate at the third speed. In this state, similar to time point E, the check valves 613 to 643 of the adsorption device 10 operate as follows: Figure 12F All of them remain open. On the other hand, the vacuum pump 400, which is operating at the third speed, draws more air than the three vacuum pumps 100 to 300, which are operating at the second speed.

[0093] After that, Figure 11 At time point G, if the termination condition described below is met, for example, through operation of the control device 1000 by a user (not shown), the solenoid valve 830 of the adsorption device 10 opens, and vacuum pumps 100 to 400 all stop. Consequently, check valves 613 to 643 also return to normal. Figure 12A The system is in the closed state as shown, and the pressure within the vacuum path 700 has also returned to atmospheric pressure.

[0094] It should be noted that the structure can also be as follows: even when the vacuum pumps 100 to 400 of the adsorption device 10 are operating, various threshold values ​​related to the pressure stored in parameter 1402 and various duty cycles corresponding to the rotational speed of the vacuum pump can be changed. In the first embodiment, parameter 1402 can be set, for example, by the information processing device 2000.

[0095] like Figure 9 As shown, the information processing apparatus 2000 of the first embodiment includes a storage circuit 2400 and a processing circuit 2500. The storage circuit 2400 is implemented by a storage device such as a memory. The storage circuit 2400 stores various programs that are executed by the processing circuit 2500. In addition, the storage circuit 2400 temporarily stores various data used when executing various programs by the processing circuit 2500. Moreover, the storage circuit 2400 stores screen data 2401 for displaying the setting screen 2600 described later.

[0096] The processing circuit 2500 is implemented by a processor such as a CPU. The processing circuit 2500 controls the entire information processing device 2000. The processing circuit 2500 performs various processes by reading various programs stored in the storage circuit 2400 and executing the read programs. For example, the processing circuit 2500 has a display unit 2501 and an input / output unit 2502.

[0097] The display unit 2501 reads the screen data 2401 from the storage circuit 2400, and for example... Figure 9 The display device 3000 shown displays... Figure 13 The settings screen shown is 2600. Figure 13This is an example diagram showing the setup screen of the first embodiment. (See diagram below.) Figure 13 As shown, the settings screen 2600 has a "Suppress Start Pressure" bar 2621 and a "Restart Pressure" bar 2622. In addition, the settings screen 2600 also has a "Maximum Duty Cycle" bar 2631, a "Suppress Duty Cycle" bar 2632, and a "Maintain Duty Cycle" bar 2633. It should be noted that, as... Figure 13 As shown, the setting screen 2600 can also have a desorption judgment pressure bar and an adsorption judgment pressure bar.

[0098] The suppression start pressure bar 2621 and the rerun pressure bar 2622 respectively display the values ​​of the suppression start pressure 1421 and the rerun pressure 1422 read from the parameter 1402 of the control device 1000. Similarly, the maximum duty cycle bar 2631, the suppression duty cycle bar 2632, and the maintenance duty cycle bar 2633 respectively display the values ​​of the maximum duty cycle 1431, the suppression duty cycle 1432, and the maintenance duty cycle 1433 read from the parameter 1402. In addition, the display unit 2501 can also display a graph 2650, which shows the relationship between each pressure threshold and each duty cycle value, created based on the parameter 1402, on the setting screen 2600.

[0099] Furthermore, the display unit 2501 obtains the rotational speed of the vacuum pumps 100 to 400 of the adsorption device 10 and the pressure within the vacuum path 700 from the adsorption device 10 or the control device 1000. In this case, the display unit 2501 may further display a graph 2660 showing the time-series changes in rotational speed and pressure on the setting screen 2600. It should be noted that in graphs 2650 and 2660, the horizontal axis represents the passage of time, and the vertical axis represents the pressure within the vacuum path 700, or the rotational speed of any one of the motors of the vacuum pumps 100 to 400. It should also be noted that the graph 2660 may display the rotational speeds of the motors of multiple vacuum pumps 100 to 400 and the current values ​​supplied to the vacuum pumps 100 to 400.

[0100] In addition, the setting screen 2600 may also include a button 2671 related to the start or stop of the vacuum pumps 100 to 400 of the adsorption device 10, and a button 2672 for switching the open and closed states of the solenoid valve 830. Furthermore, the setting screen 2600 may also include a graph 2680 that displays in real time the pressure, temperature, and rotational speed of the vacuum pumps 100 to 400 within the vacuum path 700.

[0101] Input / output unit 2502, for example via Figure 9 The input device 4000 shown accepts input of information related to the values ​​of the parameters 1402 displayed on the setting screen 2600. In this case, for example, when operating... Figure 13When the setting button 2673 is pressed, the input / output unit 2502 uses the input information to update the parameter 1402 used in the control device 1000. At this time, the display unit 2501 can also update the graph 2650 displayed on the setting screen 2600 based on the updated parameter 1402.

[0102] Furthermore, the input / output unit 2502 can also output a signal indicating that parameter 1402 has been updated to the control device 1000 when parameter 1402 is updated. In this case, the adsorption control unit 1502 of the control device 1000, upon receiving the signal, refers to parameter 1402 and uses the updated parameter 1402 to control the adsorption device 10. According to this structure, updates to parameter 1402 in the setting screen 2600 can be reflected in real-time during control by the control device 1000.

[0103] use Figure 14 This explains the processing related to the update of parameter 1402 by the information processing device 2000. Figure 14 This is a graph showing another example of the shift in pressure within the vacuum path and the current supplied to each vacuum pump in the first embodiment. Hereinafter, for example, the following will be described when the rerun pressure 1422 is updated from "-10" to "-5", the maximum duty cycle 1431 is updated from "50" to "30", the suppression duty cycle 1432 is updated from "15" to "0", and the maintenance duty cycle 1433 is updated from "30" to "20". Furthermore, the updated values ​​of parameter 1402 may sometimes be represented as rerun pressure 5422, maximum duty cycle 5431, suppression duty cycle 5432, and maintenance duty cycle 5433, respectively.

[0104] exist Figure 14 In the illustrated progression, for example, at time point A01 before all vacuum pumps 100 to 400 are started and before vacuum pump 100 reaches the first rotational speed corresponding to the maximum duty cycle 1431, the pressure within the vacuum path 700 reaches the suppression start pressure 1421. In this case, the adsorption control unit 1502 controls the vacuum pumps 100 to 400 to operate at a second rotational speed corresponding to the suppression duty cycle 1432. Alternatively, the adsorption control unit 1502 can start power supply corresponding to the suppression duty cycle 1432 not only for the already started vacuum pumps 100 to 300, but also for the vacuum pump 400 that has not yet started (stopped).

[0105] It should be noted that the adsorption control unit 1502 may also store second information related to the vacuum pump that first starts power supply when the vacuum pumps 100 to 400 are operating at the first rotational speed in the counter 1401. For example, it may also be possible to... Figure 14At time point A01, the number "1" of the vacuum pump 100 that first started power supply is stored in counter 1401. In this case, at time point A11, control device 1000 controls vacuum pump 200, which is different from vacuum pump 100 that first started power supply, to operate at a third rotational speed corresponding to the maintenance duty cycle 1433.

[0106] In addition, Figure 14 In the example shown, with Figure 11 Compared to the situation shown, the pressure rise within the vacuum path 700 is also slower when vacuum pumps 100 to 400 are operating at the second rotational speed. Furthermore, as shown at time point A11, when any one of the vacuum pumps 200 is operating at the third rotational speed, the time T12 until the pressure within the vacuum path 700 reaches the suppression start pressure 1421 again is longer than... Figure 11 The situation shown is short.

[0107] exist Figure 14 In the illustrated progression, for example, if the information processing device 2000 updates parameter 1402 at time point A21, the information processing device 2000 outputs a signal to the control device 1000 indicating that parameter 1402 has been updated. In this case, the adsorption control unit 1502 of the control device 1000 controls the vacuum pump 100 to 400 based on the updated parameter 1402.

[0108] For example, the adsorption control unit 1502 outputs a PWM signal corresponding to the updated suppression duty cycle 5432 to the vacuum pumps 100 to 400 operating at the second speed. When the updated suppression duty cycle 1432 is "0", the power supply to the vacuum pumps 100 to 400 is stopped, therefore... Figure 14 As shown, the vacuum pump stops at 100 to 400. In this case, check valves 613 to 643 also operate as follows. Figure 12A All shown will return to the off state. Additionally, as... Figure 14 As shown, the pressure within the vacuum path 700 changes rapidly compared to before the parameter 1402 was updated. Furthermore, even if the pressure within the vacuum path 700 becomes the pre-update rerun pressure 1422 (i.e., "-10") or higher, the adsorption control unit 1502 will not restart power supply to the vacuum pumps 100 to 400.

[0109] When the pressure within the vacuum path 700 becomes the updated reoperation pressure 5422, i.e., "-5" or higher, the adsorption control unit 1502 causes any one of the vacuum pumps 100 to 400 to operate at a third rotational speed corresponding to the updated maintenance duty cycle 5433. Figure 14During the shown process, the suppression start pressure 1421 is not updated, therefore the adsorption control unit 1502 causes the vacuum pump 300 to operate at the third rotational speed until the pressure within the vacuum path 700 reaches the suppression start pressure 1421, i.e., "-50". In this case, as... Figure 14 As shown, the time T22 from the start to the stop of operation of vacuum pump 300 is longer than the time T12 from the start to the stop of operation of the previous vacuum pump 200.

[0110] Then, at time A31, for example, in setting screen 2600, an input indicating the opening of solenoid valve 830 is received (operation of button 2672), thereby restoring the pressure within vacuum path 700 to atmospheric pressure. It should be noted that since the updated suppression duty cycle 5432 is "0", the rotational speed of vacuum pumps 100 to 400 is "0" at time point A21, and therefore the rotational speed of vacuum pumps 100 to 400 does not change at time point A31.

[0111] At a subsequent time point A41, for example, when the pump control input is received on the setting screen 2600 (operation of button 2671), the adsorption control unit 1502 causes the vacuum pumps 100 to 400 to operate at a first rotational speed corresponding to the updated maximum duty cycle 5431. After the parameter update 1402, before the time point A51 when the pressure in the vacuum path 700 reaches the suppression start pressure 1421, all vacuum pumps 100 to 400 reach the updated first rotational speed.

[0112] It should be noted that, as Figure 14 As shown at time point A41, when the adsorption control unit 1502 operates one or more of the vacuum pumps 100 to 400 at the first rotational speed in the next operation, it refers to the counter 1401 and starts supplying power to the vacuum pump 200, which is different from the vacuum pump 100 that started supplying power first. It should be noted that the adsorption control unit 1502 can also store the number of the vacuum pump 300 that just operated at the third rotational speed in the counter 1401 and start supplying power to the vacuum pump different from the vacuum pump 300 first. In this structure, the consumption of vacuum pumps can also be evened out.

[0113] use Figure 15 The processing flow performed by the control device 1000 and the information processing device 2000 described above will be explained. Figure 15 This is a flowchart illustrating an example of a process performed by the control device of the first embodiment. The control device 1000 of the first embodiment starts operating, for example, when it receives an input of a pump control instruction (operation of button 2671) in the setting screen 2600 and when a power source (not shown) is turned on.

[0114] like Figure 15As shown, the adsorption control unit 1502 closes the solenoid valve 830 of the adsorption device 10 (step S101). Next, the adsorption control unit 1502 reads the value of the counter 1401 of the storage circuit 1400, for example, the number of any one of the vacuum pumps 100 to 400 (step S102), and substitutes it into the variable N. Then, the adsorption control unit 1502 updates the counter 1401 with the variable N calculated by the following formula (1) (step S110). It should be noted that the following formula (1) increments the variable N and then calculates the remainder when divided by the number of vacuum pumps (4 in the first embodiment). For example, the calculation result is 2 when the variable N is 1, and the calculation result is 1 when the variable N is 4 according to the remainder of (4+1) / 4.

[0115] N = Nmod(number of pumps) + 1 (1)

[0116] Then, the adsorption control unit 1502 starts all the stopped vacuum pumps 100 to 400 that correspond to the variable N updated in S110 (step S111). For example, if the value of counter 1401 read in step S102 is "1", the value of variable N is updated to "2" by formula (1), so the adsorption control unit 1502 starts vacuum pump 200 numbered "2" in step S111. Furthermore, for example, if the value of counter 1401 read in step S102 is "4", since the value of variable N is updated to "1" by formula (1), the adsorption control unit 1502 starts vacuum pump 100 numbered "1" in step S111. Then, the adsorption control unit 1502 increments variable N (step S112).

[0117] Next, the pressure processing unit 1501 obtains a value related to the pressure in the vacuum path 700 from the pressure sensor 820 of the adsorption device 10 (step S121) and outputs it to the adsorption control unit 1502. Then, the adsorption control unit 1502 determines whether the pressure value in the vacuum path 700 is less than the suppression start pressure 1421 of the parameter 1402 stored in the storage circuit 1400 (step S122).

[0118] If the pressure value is determined to be above the suppression start pressure 1421 (step S122: Yes), the adsorption control unit 1502 increases the duty cycle to increase the rotational speed of the already started vacuum pumps (step S123). Then, the adsorption control unit 1502 determines whether there are any vacuum pumps among all vacuum pumps 100 to 400 that have not yet been started (step S129). If there are any vacuum pumps that have not been started (step S129: Yes), the adsorption control unit 1502 returns to step S111 and repeats the process, thereby starting the next vacuum pump. On the other hand, if all vacuum pumps 100 to 400 have been started (step S129: No), the process returns to step S121 and repeats the process.

[0119] On the other hand, if it is determined that the pressure value is less than the suppression start pressure 1421 (step S122: No), the adsorption control unit 1502 updates the counter 1401 using the variable N calculated by formula (1) (step S132). Then, the adsorption control unit 1502 outputs a PWM signal corresponding to the suppression duty cycle 1432 of the parameter 1402 of the storage circuit 1400, so that all vacuum pumps 100 to 400 operate at the second speed (step S133).

[0120] Next, the pressure processing unit 1501 obtains a value related to the pressure in the vacuum path 700 from the pressure sensor 820 of the adsorption device 10 (step S140) and outputs it to the adsorption control unit 1502. Then, the adsorption control unit 1502 determines whether the pressure value in the vacuum path 700 is greater than or equal to the rerun pressure 1422 of the parameter 1402 stored in the storage circuit 1400 (step S141).

[0121] If the pressure value is determined to be above the reoperation pressure (step S141: Yes), the adsorption control unit 1502 outputs a PWM signal corresponding to the maintenance duty cycle 1433 of the storage circuit 1400 to the vacuum pump, so that the vacuum pumps 100 to 400 corresponding to the variable N updated in step S132 operate at the third speed (step S142). Then, proceed to step S190.

[0122] On the other hand, if the pressure value is determined to be less than the re-running pressure 1422 (step S141: No), the adsorption control unit 1502 determines whether the pressure value in the vacuum path 700 is less than the suppression start pressure 1421 (step S151). If the pressure value is determined to be greater than or equal to the suppression start pressure 1421 (step S151: No), the process proceeds to step S190.

[0123] On the other hand, if it is determined that the pressure value is less than the suppression start pressure 1421 (step S151: Yes), the adsorption control unit 1502 outputs a PWM signal corresponding to the suppression duty cycle 1432 of the storage circuit 1400, so that the vacuum pump, which is operating at the third speed, operates at the second speed (step S152). Then, the adsorption control unit 1502 updates the variable N by formula (1) (step S153) and proceeds to step S190.

[0124] Then, the adsorption control unit 1502 determines whether the termination condition has been met (step S190). The termination condition in the first embodiment is met, for example, when the power supply (not shown) is turned off by the user's operation, when an input indicating the adsorption termination is received (operation of button 2671, button 2672), or when the pressure value in the vacuum path 700 becomes a pressure value related to the desorption determination. If the termination condition is not met (step S190: No), the process returns to step S140 and repeats the process.

[0125] On the other hand, if the termination condition is determined to have been met (step S190: Yes), the adsorption control unit 1502 stops all vacuum pumps 100 to 400 (step S191). Then, the adsorption control unit 1502 opens the solenoid valve 830 (step S192) and substitutes the variable N into the counter 1401 (step S193), ending the process.

[0126] As explained above, when depressurizing the vacuum path 700, the control device 1000 of the first embodiment supplies power to one or more vacuum pumps 100 to 400 connected to the vacuum path 700 so that they operate at a first rotational speed. Furthermore, when the pressure within the vacuum path 700 is reduced to below the first pressure, the control device 1000 stops supplying power to one or more vacuum pumps 100 to 400, or suppresses power supply by causing one or more vacuum pumps 100 to 400 to operate at a second rotational speed lower than the first rotational speed. With this structure, the pump lifespan can be extended. Furthermore, there is no need to store the cumulative operating time of each vacuum pump 100 to 400, thus simplifying the construction of the control device 1000.

[0127] [Variation Example]

[0128] The structures of each embodiment have been described above, but the embodiments are not limited thereto. For example, the number of vacuum pumps 100 to 400 is one example; the conveying system 1 may have only one vacuum pump, or it may have two, three, or more vacuum pumps. Although the adsorption device 10 is mounted on... Figure 1The example shown is of a robotic arm 900 that performs flexion and extension movements and rotation movements, but it is not limited to this. For example, it can also be attached to a robotic arm that performs extension and retraction movements, or the suction device can be configured to move along a guide rail. Alternatively, it can be structured such that the suction device is not attached to the robotic arm, guide rail, etc., and is moved by the operator by hand.

[0129] It should be noted that the information stored in the storage circuit 1400 of the control device 1000 can also be stored in the storage circuit 2400 of the information processing device 2000.

[0130] Furthermore, the check valve of the first embodiment can also be applied to adsorption devices equipped with a vacuum pump that cannot be disassembled.

[0131] Furthermore, the structure of the adsorption device 10, which includes a solenoid valve 830 controlled by the control device 1000, has been described, but as... Figure 16 and Figure 17 As shown, it can also be a structure in which the adsorption device is connected to an external solenoid valve. Figure 16 This is a perspective view of an example of a conveying system of the first modified example. Figure 17 This is a side view showing another example of the information processing apparatus representing the first modified example. It should be noted that... Figure 17 This indicates the state where the main body 500 is not connected to vacuum pumps 200 and 400. It should be noted that in the following variations, the same reference numerals are used for the parts that are the same as those shown in the previously described figures, and repeated descriptions are omitted.

[0132] like Figure 16 As shown, in the conveying system E1 of the first modified example, the adsorption device E10 includes a main body 500 and an accessory F00, which are equipped with four vacuum pumps 100 to 400. Figure 17 As shown, in the first modified example, the accessory F00 includes a connecting part F40 instead of the pressure display unit 810, the pressure sensor 820, and the solenoid valve 830. The connecting part F40 is the part that connects the accessory F00 to, for example, an external solenoid valve (not shown). Alternatively, it may be a structure in which an external display unit (not shown) and a pressure sensor (not shown) are connected to the connecting part F40.

[0133] like Figure 17 As shown, in the first modified example, the height H1 of the top surface of the accessory F00 in the Y-axis direction is less than the height of the vacuum pump 100 in the Y-axis direction. According to this structure, the assembly center of gravity of the robotic arm 900 and the adsorption device E10 can be lowered, thus improving the mobility of the conveying system E1 (the load the robot can lift; the weight that meets the technical specifications for use).

[0134] Furthermore, the main body 500 is equipped with a vacuum generating device consisting of vacuum pumps 100 to 400, which can also be used as long as suction can be achieved through the suction pad. Figure 18 and Figure 19 The image shown is not mounted on the robotic arm. Figure 18 and Figure 19 This is a diagram illustrating an example of the conveying system in the second variation. (See diagram for example.) Figure 18 and Figure 19 As shown, the vacuum generating device K50 of the second modification includes vacuum pumps 100 to 400, a main body 500, and accessories 800. Furthermore, a vacuum air pipe J80 is connected to the sleeve 677 of the vacuum generating device K50.

[0135] like Figure 18 and Figure 19 As shown, in the vacuum generator K50, the side of the main body 500 and the top of at least one of the vacuum pumps 100 to 400 are in contact with the ground plane G00. This ensures the stability of the vacuum generator K50. It should be noted that the top of the accessory 800 may also be in contact with the ground plane G00.

[0136] Furthermore, in the second modification, the robotic arm J00 is provided with a vacuum air pipe J80 connecting the vacuum generator K50 and the adsorption pad K70. For example... Figure 18 and Figure 19 As shown, the vacuum air pipe J80 is formed, for example, inside the robotic arm J00. It should be noted that the vacuum air pipe J80 may also be formed, for example, on the outside (side) of the robotic arm J00. In this structure, the adsorption pad K70 is fitted to the mounting portion J70 of the robotic arm J00.

[0137] According to the conveying system J1, the front end of the robotic arm J00 can be further lightened, thus further improving mobility.

[0138] Furthermore, the control device 1000 and information processing device 2000 shown in each embodiment and each modification can be used not only for the adsorption device 10 shown in the embodiments and each modification, but also for vacuuming other devices such as semiconductor manufacturing equipment and vacuum forming equipment.

[0139] Furthermore, the solenoid valve 830 in each embodiment and modification can be switched between open and closed states independently of the vacuum pumps 100 to 400. In this case, for example, the structure could be such that even when the vacuum pumps 100 to 400 are rotating at a relatively low speed, such as the second rotational speed, the solenoid valve 830 can still switch the open and closed states of the vacuum path 700. According to this structure, when the vacuum path 700 is switched to the closed state for pressure reduction, the inrush current can be reduced compared to starting the vacuum pump from a stopped state to the first rotational speed.

[0140] Furthermore, in the above embodiment, a structure in which any one vacuum pump operates at a third rotation speed has been described, but it is also possible to have a structure in which any two or more vacuum pumps operate simultaneously. For example, it is also possible to have a structure in an adsorption device equipped with eight vacuum pumps in which two vacuum pumps operate simultaneously at a third rotation speed. In this case, the variable N or number is established to correspond to two or more vacuum pumps, and the adsorption control unit 1502 outputs a PWM signal corresponding to the maintenance duty cycle 1433 of the storage circuit 1400 to the two or more vacuum pumps, so that the two or more vacuum pumps corresponding to the variable N operate at a third rotation speed. Moreover, the adsorption control unit 1502 updates the variable N by formula (1), and outputs the PWM signal corresponding to the maintenance duty cycle 1433 of the storage circuit 1400 to the vacuum pumps in such a way that the two or more vacuum pumps corresponding to the variable N operate at a third rotation speed. In this way, the adsorption control unit 1502 updates the variable N according to the number of vacuum pumps operating at the third rotation speed. Furthermore, the adsorption control unit 1502 stores the number corresponding to the last operating vacuum pump in the counter 1401.

[0141] Furthermore, the processing related to counter 1401 and variable N is also an example. For instance, it could be a structure where variable N is reset without being substituted into counter 1401 when the termination condition is met. Alternatively, it could be a structure where a random number is substituted into counter 1401 when the control device 1000 starts operating, or where counter 1401 is reset when the pressure value reaches the suppression start pressure.

[0142] Furthermore, for example, the control device 1000 and the information processing device 2000 can be implemented by the same computer, and the control device 1000 can also be mounted on the adsorption device 10. In addition, the release valve can be a manual valve or other structures to replace the solenoid valve 830.

[0143] Furthermore, the various processes described in each embodiment can be implemented by executing a pre-prepared program using a computer. Therefore, an example of a computer 9000 that executes a program having the same functions as the control device 1000 in each of the above embodiments will be described below. Figure 20 This is a block diagram representing an example of an information processing device that executes a control program.

[0144] exist Figure 20 The computer 9000 shown executing the control program includes a communication device 910, an input device 920, an output device 930, a ROM 940, a RAM 950, a CPU 960, and a bus 970. For example, the communication device 910, the input device 920, and the output device 930 function as a communication I / F (not shown), an input device, and a display device of the control device 1000, respectively.

[0145] Furthermore, the ROM 940 pre-stores a control program 940A that performs the same functions as in the embodiments described above. It should be noted that the control program 940A may not be recorded in the ROM 940, but rather in a storage device such as a hard disk built into the computer system, or in a recording medium that can be read by a drive not shown. Furthermore, the recording medium may include, for example, portable recording media such as CD-ROMs, DVDs, USB storage devices, SD cards, or semiconductor memories such as flash memory. It should be noted that the control program 940A may also be appropriately integrated or distributed.

[0146] Then, CPU960 reads control program 940A from ROM940, and expands this read program in the working area of ​​RAM950. Then, as... Figure 20 As shown, the CPU 960 enables the control program 940A, which is expanded on RAM 950, to function as the control process 950A.

[0147] It should be noted that, Figure 20 The text describes a computer 9000 that executes a control program with the same functions as the control device 1000, and the information processing device 2000 can also be implemented by executing a pre-prepared program using a computer. Furthermore, the computer 9000 can be, for example, a single computer, but is not limited to this; it can also be implemented using multiple computers capable of communicating with each other, or even using a virtual machine in the cloud. Additionally, all or part of the functions of the computer 9000 can be implemented using integrated circuits such as ASICs (Application Specific Integrated Circuits) and FPGAs (Field Programmable Gate Arrays).

[0148] The present invention has been described above based on the embodiments and various modifications, but the present invention is not limited to the embodiments and various modifications, and various modifications can be made without departing from the spirit of the present invention. Those skilled in the art will recognize from the claims that various modifications made without departing from this spirit are also included within the technical scope of the present invention.

[0149] Explanation of reference numerals in the attached figures

[0150] 1. E1, J1: Conveying system; 10. E10: Adsorption device; 1000: Control device; 2000: Information processing device; 1400, 2400: Storage circuit; 1401: Counter; 1402: Parameter; 1500, 2500: Processing circuit; 1501: Pressure processing unit; 1502: Adsorption control unit; 2501: Display unit; 2502: Input / output unit; 3000: Display device; 4000: Input device; 100, 200, 300, 400: Vacuum pump; 500: Main body; 517, 527, 537, 547, 577: Connection port; 580: Substrate; 590: Upper surface; 610, 620, 630, 640, 650, 660, 670: Ventilation path; 621: First space; 622: Second space Two spaces; 613, 623, 633, 643: Check valves; 624, 634: Springs; 615, 625, 635, 645: Vents; 656, 666, 676: Connecting pipes; 617, 627, 637, 647, 657, 667, 677: Sleeves; 690: Bottom surface; 700: Vacuum path; 710, 720, 730, 740, 7 50, 760, 770, K70: Adsorption pads; 800, F00: Accessories; 810: Pressure display unit; 820: Pressure sensor; 823: Piping connection component; 830: Solenoid valve; 890: Assembly unit; 900, J00: Robotic arm; F40: Connection unit; G00: Grounding surface; J70: Assembly unit; J80: Vacuum air piping; K50: Vacuum generator.

Claims

1. A control device, When depressurizing within the vacuum path, the control device supplies power to one or more vacuum pumps connected to the vacuum path at a first rotational speed. When the pressure in the vacuum path is reduced to below a first pressure, the control device stops supplying power to the one or more vacuum pumps, or suppresses the power supply by causing the one or more vacuum pumps to operate at a second speed less than the first speed.

2. The control device according to claim 1, wherein, When the power supply is suppressed or stopped, and the pressure in the vacuum path rises to a second pressure higher than the first pressure, the control device increases or starts the power supply to any one or more of the vacuum pumps.

3. The control device according to claim 2, wherein, When power supply is increased or started, the control device causes any one or more vacuum pumps to operate at a third speed, which is less than the first speed. If the pressure within the vacuum path is reduced again to below the first pressure, the control device suppresses or stops the power supply to any one or more of the vacuum pumps.

4. The control device according to claim 3, wherein, The control device stores first information related to any one or more of the vacuum pumps. If, after suppressing or stopping the power supply to any one or more of the vacuum pumps, the pressure in the vacuum path rises again to a second pressure or higher, the control device, referring to the first information, increases or restarts the power supply to one or more other vacuum pumps that are different from the aforementioned vacuum pumps.

5. The control device according to claim 1, wherein, When the vacuum pumps are operated at the first speed, the control device causes the power supply to change in stages by increasing the speed of each vacuum pump in stages.

6. The control device according to claim 1, wherein, When two or more of the vacuum pumps are operating at the first rotational speed, the control device begins to supply power to each vacuum pump at different time intervals.

7. The control device according to claim 6, wherein, The control device stores second information related to the vacuum pump that first starts supplying power among the plurality of vacuum pumps. In the next instance where one or more of the vacuum pumps are operated at the first rotational speed, the control device, referring to the second information, first begins power supply to the vacuum pump that is different from the vacuum pump that was first powered.

8. An adsorption device, The adsorption device is controlled by the control device as described in any one of claims 1 to 7, and is connected to a release valve that switches between the open and closed states of the vacuum path. The adsorption device includes a check valve, which is located in the ventilation path between the vacuum pump and the vacuum path, and switches the open and closed states of the ventilation path independently of the operation of the release valve.

9. The adsorption device according to claim 8, wherein, The release valve can switch the open and closed states of the vacuum path even when one or more vacuum pumps are operating at the second speed. The check valve is closed when the vacuum pump is stopped. The check valve is open when the vacuum pump is operating.

10. An information processing device, The information processing device displays a setting screen, which accepts input of parameter-related information. The parameters are used by the control device as described in any one of claims 1 to 7, including the first pressure, the first rotational speed, and the second rotational speed. The information processing device updates the parameters using the input information even when any of the vacuum pumps is operating.

11. The information processing apparatus according to claim 10, wherein, The information processing device acquires the rotational speed of the vacuum pump and the pressure within the vacuum path. The information processing device displays a graph showing the time-series changes in the rotational speed and the pressure, and a graph generated based on the parameters.

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