A molecular pump turbine rotor mounting fixture, a molecular pump, and an installation method.

Abstract

This invention relates to the field of vacuum generation equipment technology, and discloses a molecular pump turbine rotor mounting fixture, a molecular pump, and an installation method. The molecular pump turbine rotor mounting fixture includes: a pre-tightening member, which is disposed in a positioning groove and abuts against the turbine rotor; and a clamping member, which abuts against the pre-tightening member. The clamping member has an internal thread adapted to match the external thread. The clamping member rotates relative to the main shaft to squeeze the pre-tightening member and push the turbine rotor to move. The pressure of the pre-tightening member on the turbine rotor is along the axial direction of the main shaft, and the pre-tightening member and the positioning groove are in surface contact, resulting in a large force range. This avoids the turbine rotor tilting due to localized force. Furthermore, the clamping member and the main shaft are threadedly connected, further ensuring the coaxiality of the turbine rotor and the main shaft.

Description

Technical Field

[0001] This invention relates to the field of vacuum generation equipment technology, specifically to a molecular pump turbine rotor mounting fixture, a molecular pump, and an installation method. Background Technology

[0002] A molecular pump is a commonly used vacuum generating device. It has a chamber inside, in which a high-speed motor is installed. During operation, the high-speed rotating turbine rotor compresses the gas molecules in the chamber and gives them a directional velocity to be discharged through the exhaust port. In recent years, molecular pumps have been widely used in vacuum coating, silicon carbide, crystal growth furnace and other process fields.

[0003] The turbine rotor is a key component of the molecular pump, enabling it to achieve high pumping speed, high ultimate vacuum, and high compression ratio. Its assembly precision is crucial for ensuring the pump's high-speed and stable operation. If the runout and wobble of the main shaft and turbine rotor after assembly are not up to standard, it will cause severe wobble in the turbine rotor, leading to deviation from its central position.

[0004] In related technologies, the assembler usually installs the turbine rotor directly onto the spindle, and then uses a wrench to tighten the nut to drive the turbine rotor to the inner ring of the bearing and lock it in place. Because the contact area between the nut and the turbine rotor is small, it is easy for the turbine rotor to be out of axis from the spindle when tightening, which can lead to installation failure or excessive oscillation between the turbine rotor and the spindle. Summary of the Invention

[0005] This invention provides a molecular pump turbine rotor mounting fixture, a molecular pump, and an installation method to solve the problem of misalignment between the turbine rotor and the main shaft caused by the small contact area between the nut and the turbine rotor during installation.

[0006] In a first aspect, the present invention provides a molecular pump turbine rotor mounting fixture, the molecular pump comprising: a pump body; a pump housing, the pump housing being disposed on the pump body, the pump housing having a main shaft for mounting a turbine rotor inside the pump housing, the main shaft having an external thread; a positioning groove being provided at one end of the turbine rotor; the molecular pump turbine rotor mounting fixture is suitable for assembling the turbine rotor with the main shaft.

[0007] The molecular pump turbine rotor mounting fixture includes:

[0008] The preload is set in the positioning groove and abuts against the turbine rotor;

[0009] The clamping member abuts against the pre-tightening member. The clamping member has an internal thread adapted to match the external thread. The clamping member rotates relative to the main shaft to squeeze the pre-tightening member and drive the turbine rotor to move.

[0010] Beneficial effects:

[0011] The pre-tightening component and the positioning groove abut against each other, and the clamping component rotates relative to the main shaft to squeeze the pre-tightening component and push the turbine rotor to move. This makes the pressure of the pre-tightening component on the turbine rotor along the axial direction of the main shaft. The pre-tightening component and the positioning groove are in surface contact, and the force range is large, which avoids the turbine rotor from tilting due to local force. In addition, the clamping component and the main shaft are threaded together, which further ensures the coaxiality of the turbine rotor and the main shaft.

[0012] In one alternative embodiment, a first bearing is further included, which is rotatably disposed between the preload member and the clamping member.

[0013] Beneficial effects:

[0014] The first bearing converts the sliding friction between the clamping and pre-tightening components into rolling friction, reducing the resistance when the clamping components rotate, making it easier for workers to operate, and also reducing wear between the clamping and pre-tightening components.

[0015] In one alternative embodiment, a protrusion is provided on the outer peripheral wall of the clamping member, the protrusion being used to clamp the first bearing.

[0016] In one alternative embodiment, a first groove is provided on the side of the protrusion facing the pretensioner, and a second groove is provided on the pretensioner accordingly. The first groove and the second groove are used to accommodate the first bearing.

[0017] Beneficial effects:

[0018] The first and second grooves form a receiving space for the first bearing, achieving axial and radial limiting of the first bearing, preventing axial or radial displacement of the first bearing during rotation, and ensuring that the first bearing can rotate coaxially with the clamping component; the first and second grooves can wrap and protect the first bearing, preventing damage caused by external force collisions during operation; the groove structure formed by the first and second grooves makes the fit between the clamping component, pre-tightening component and bearing more compact, saving overall space.

[0019] In one alternative embodiment, the pretensioner has a clearance hole suitable for the clamping member to pass through, and the inner circumferential surface of the pretensioner and the outer circumferential surface of the clamping member are in clearance fit.

[0020] Beneficial effects:

[0021] The clearance hole ensures that the clamping component can pass through the preload and connect to the spindle via a thread. At the same time, the clearance fit prevents sliding friction between the inner circumferential surface of the preload and the outer circumferential surface of the clamping component, ensuring smooth rotation of the clamping component. It also prevents relative sliding between the preload and the turbine rotor caused by synchronous transmission of the preload and clamping component, which would cause wear to the turbine rotor. The clearance fit also facilitates the disassembly and installation of the tooling, improving the assembly efficiency between the preload and clamping component.

[0022] In one optional embodiment, the positioning groove includes an abutting top surface and an inclined surface. The plane of the abutting top surface is perpendicular to the axial direction of the spindle. The inclined surface is located on the side of the abutting top surface near the spindle, and the inclined surface is not parallel to the abutting top surface. The bottom surface of the preload engages with the abutting top surface.

[0023] Beneficial effects:

[0024] The contact plane is set perpendicular to the main shaft axis, so that the pressure of the preload is transmitted perpendicularly along the main shaft axis, avoiding the displacement direction of the turbine rotor from deviating from the main shaft axis.

[0025] Secondly, the present invention also provides a molecular pump, comprising: assembly using the molecular pump turbine rotor mounting fixture as described above, the molecular pump comprising:

[0026] Pump body;

[0027] Pump casing, which is mounted on the pump body;

[0028] The main shaft is rotatably mounted on the pump body;

[0029] The turbine rotor is fitted onto and connected to the main shaft, and is adapted to rotate relative to the pump body.

[0030] In one alternative implementation, it further includes:

[0031] The second bearing is rotatably mounted between the main shaft and the pump body;

[0032] A bushing is fitted onto the main shaft and abuts against the turbine rotor and the second bearing to press the second bearing together.

[0033] Beneficial effects:

[0034] The bushing is used to prevent scratches on the turbine rotor during disassembly, ensuring that the surface of the turbine rotor is not worn. At the same time, the bushing provides a positioning function for the second bearing, preventing the second bearing from moving during installation or operation of the turbine rotor.

[0035] In one optional embodiment, the turbine rotor has a positioning groove on the side away from the bushing and around the main shaft; the positioning groove includes an abutting top surface and an inclined surface, the plane of the abutting top surface is perpendicular to the axial direction of the main shaft, the inclined surface is disposed on the side of the abutting top surface close to the main shaft, and the inclined surface is not parallel to the abutting top surface.

[0036] Molecular pumps also include:

[0037] A locking element is sleeved on the spindle and located in the positioning groove. The locking element includes a limiting surface adapted to abut against the inclined surface of the positioning groove.

[0038] The lock nut is located on the side of the locking component away from the turbine rotor and is threadedly connected to the main shaft.

[0039] Beneficial effects:

[0040] The locking component and the lock nut together can lock the turbine rotor to operate stably. When the lock nut is locked, the axial locking force of the lock nut can be decomposed into the normal force along the inclined plane and the radial clamping force. The radial clamping force can make the clamping component fit tightly against the outer peripheral wall of the main shaft, avoiding axial displacement and radial offset of the turbine rotor when the molecular pump is running at high speed. At the same time, during the installation of the locking component, the inclined plane can make the limiting surface and the top surface fit together without alignment, reducing the difficulty of alignment during assembly.

[0041] Thirdly, the present invention also provides an installation method for use with the molecular pump turbine rotor mounting fixture described above, the installation method comprising:

[0042] Install the turbine rotor and bushing of the molecular pump;

[0043] Pre-install the turbine rotor on the main shaft; place the preload in the positioning slot of the turbine rotor;

[0044] The first bearing is installed in the first groove of the clamping member;

[0045] Connect the clamping piece with the first bearing installed to the spindle;

[0046] Tighten the clamping parts to press the pre-tightening parts against the turbine rotor, so that the turbine rotor presses against the bushing until the bushing is completely in contact with the inner ring of the second bearing.

[0047] Disassemble the clamping component, the first bearing, and the preload component in sequence.

[0048] Beneficial effects:

[0049] The installation method described in this invention can control the runout of the turbine rotor to within 5μm, and prevent any wobbling between the turbine rotor and the main shaft. It boasts a high first-time assembly success rate, high efficiency, and good quality. The initial imbalance of the molecular pump's overall balancing is small, resulting in high overall balancing efficiency. Furthermore, it eliminates quality problems such as severe scratches between the turbine rotor and main shaft caused by disassembling the turbine rotor due to poor assembly precision leading to large turbine wobbling, thus avoiding the scrapping of the turbine rotor and main shaft and the waste of manpower time in disassembly and assembly. Attached Figure Description

[0050] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0051] Figure 1 This is a schematic diagram of a molecular pump according to an embodiment of the present invention;

[0052] Figure 2 This is a schematic diagram of a molecular pump turbine rotor mounting fixture according to an embodiment of the present invention;

[0053] Figure 3 for Figure 2 A magnified view of part A in the diagram;

[0054] Figure 4 for Figure 3 A magnified view of part B in the diagram;

[0055] Figure 5 This is a schematic diagram of a molecular pump according to an embodiment of the present invention;

[0056] Figure 6 for Figure 5 A magnified view of part C in the diagram.

[0057] Explanation of reference numerals in the attached figures:

[0058] 1. Pump casing; 2. Pump body; 3. Water pipe assembly; 4. Main shaft; 5. Turbine rotor; 51. Bushing; 52. Locking element; 521. Limiting surface; 53. Lock nut; 54. Second bearing; 55. Positioning groove; 551. Abutting top surface; 552. Inclined surface; 61. Pre-tightening element; 611. Second groove; 612. Clearance hole; 62. First bearing; 63. Pressing element; 631. Protrusion; 632. First groove. Detailed Implementation

[0059] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0060] A molecular pump is a commonly used vacuum generating device. It has a chamber inside, in which a high-speed motor is installed. During operation, the high-speed rotating turbine rotor compresses the gas molecules in the chamber and gives them a directional velocity to be discharged through the exhaust port. In recent years, molecular pumps have been widely used in vacuum coating, silicon carbide, crystal growth furnace and other process fields.

[0061] The turbine rotor is a key component of a molecular pump, enabling it to achieve high pumping speeds, high ultimate vacuum, and high compression ratios. Its assembly precision is crucial for ensuring the pump's high-speed and stable operation. If the runout and wobble of the main shaft and turbine rotor after assembly are not up to standard, the turbine rotor will wobble severely, deviating from its central position. This leads to an excessive initial dynamic balance, making it impossible to achieve the correct overall dynamic balance for the turbine rotor. Simultaneously, it increases bearing heat generation, reducing the lifespan of the pump bearings. In severe cases, it can damage the bearings, causing abnormal noises and pump breakage, ultimately affecting the pump's product quality and operational efficiency.

[0062] In related technologies, the assembler usually installs the turbine rotor directly onto the spindle, and then uses a wrench to tighten the nut to drive the turbine rotor to the bearing inner ring position and lock it in place. Because the contact area between the nut and the turbine rotor is small, it is easy for the turbine rotor and the spindle to become misaligned when tightened. In addition, the nut can easily scratch the spindle and the turbine rotor mating hole, which can lead to installation failure, excessive wobble between the turbine rotor and the spindle, or scrapping of the turbine rotor and the spindle due to scratches.

[0063] The following is combined with Figures 1 to 6 The following describes embodiments of the present invention.

[0064] According to an embodiment of the present invention, in one aspect, a molecular pump turbine rotor mounting fixture is provided. The molecular pump includes: a pump body 2; a pump housing 1, the pump housing 1 being disposed on the pump body 2, and a main shaft 4 for mounting a turbine rotor 5 being provided inside the pump housing 1, the main shaft 4 having an external thread; a positioning groove 55 being provided at one end of the turbine rotor 5; the molecular pump turbine rotor mounting fixture is adapted to assemble the turbine rotor 5 with the main shaft 4.

[0065] The molecular pump turbine rotor mounting fixture includes:

[0066] Pre-tensioning member 61 is provided in positioning groove 55 and abuts against turbine rotor 5;

[0067] The clamping member 63 abuts against the pre-tightening member 61. The clamping member 63 has an internal thread adapted to match the external thread. The clamping member 63 rotates relative to the main shaft 4 to squeeze the pre-tightening member 61 and push the turbine rotor 5 to move.

[0068] The pretensioner 61 is generally circular, with a flat end face at the bottom that can fit into the positioning groove 55. One end of the pretensioner 61 abuts against the positioning groove 55, and the other end is provided with a boss that can abut against the upper end face of the turbine rotor 5. The boss can be designed as a circular ring coaxial with the pretensioner 61, or as multiple bosses evenly distributed around the circumference of the pretensioner 61. The end face of the boss near the clamping member 63 is coplanar, ensuring that the pretensioner 61 and the clamping member 63 can fit together.

[0069] A water pipe assembly 3 is provided at the bottom of the pump body 2 to reduce the temperature of the molecular pump.

[0070] The pre-tightening member 61 and the positioning groove 55 abut against each other, and the clamping member 63 rotates relative to the main shaft 4 to squeeze the pre-tightening member 61 and push the turbine rotor 5 to move. This makes the pressure of the pre-tightening member 61 on the turbine rotor 5 along the axial direction of the main shaft 4. The pre-tightening member 61 and the positioning groove 55 are in surface contact, and the force range is large, which avoids the turbine rotor 5 from tilting due to local force. In addition, the clamping member 63 and the main shaft 4 are threadedly driven, which further ensures the coaxiality of the turbine rotor 5 and the main shaft 4.

[0071] In one embodiment, a first bearing 62 is further included, which is rotatably disposed between the preload member 61 and the clamping member 63.

[0072] The first bearing 62 converts the sliding friction between the clamping member 63 and the pre-tightening member 61 into rolling friction, reducing the resistance when the clamping member 63 rotates, making it easier for the operator to work, and also reducing the wear between the clamping member 63 and the pre-tightening member 61.

[0073] In one embodiment, the outer peripheral wall of the clamping member 63 is provided with a protrusion 631, which is used to clamp the first bearing 62.

[0074] In one embodiment, the protrusion 631 has a first groove 632 on the side facing the pretensioner 61, and the pretensioner 61 has a corresponding second groove 611. The first groove 632 and the second groove 611 are used to accommodate the first bearing 62.

[0075] The protrusion 631 is preferably an annular protrusion integrally formed with the clamping member 63, and the outer diameter of the annular protrusion is larger than the outer diameter of the first bearing 62.

[0076] The first groove 632 and the second groove 611 form a receiving space for the first bearing 62, thereby limiting the axial and radial movement of the first bearing 62 and preventing axial or radial displacement during rotation. This ensures that the first bearing 62 can rotate coaxially with the clamping member 63. The first groove 632 and the second groove 611 can also enclose and protect the first bearing 62, preventing damage from external impacts during operation. The groove structure formed by the first groove 632 and the second groove 611 makes the fit between the clamping member 63, the pre-tightening member 61, and the bearing more compact, saving overall space.

[0077] In one embodiment, the pretensioner 61 has a clearance hole 612 suitable for the clamping member 63 to pass through, and the inner circumferential surface of the pretensioner 61 and the outer circumferential surface of the clamping member 63 are in clearance fit.

[0078] The clearance hole 612 ensures that the clamping member 63 can pass through the pre-tightening member 61 and achieve a threaded connection with the main shaft 4. At the same time, the clearance fit can prevent sliding friction between the inner circumferential surface of the pre-tightening member 61 and the outer circumferential surface of the clamping member 63, ensuring smooth rotation of the clamping member 63. It also prevents relative sliding between the pre-tightening member 61 and the turbine rotor 5 caused by synchronous transmission of the pre-tightening member 61 and the clamping member 63, which would cause wear to the turbine rotor 5. The clearance fit also facilitates the disassembly and installation of the tooling, improving the assembly efficiency between the pre-tightening member 61 and the clamping member 63.

[0079] In one embodiment, the positioning groove 55 includes an abutting top surface 551 and an inclined surface 552. The plane of the abutting top surface 551 is perpendicular to the axial direction of the spindle 4. The inclined surface 552 is disposed on the side of the abutting top surface 551 close to the spindle 4, and the inclined surface 552 is not parallel to the abutting top surface 551. The bottom surface of the preload 61 is engaged with the abutting top surface 551.

[0080] The contact plane is set perpendicular to the axis of the main shaft 4, so that the pressure of the preload is transmitted perpendicularly along the axis of the main shaft 4, and the displacement direction of the turbine rotor 5 is prevented from deviating from the axis of the main shaft 4.

[0081] According to an embodiment of the present invention, in another aspect, a molecular pump is also provided, comprising: assembling using a molecular pump turbine rotor 5 mounting fixture as described above, the molecular pump comprising:

[0082] Pump body 2;

[0083] Pump casing 1 is mounted on pump body 2;

[0084] Main shaft 4 is rotatably mounted on pump body 2;

[0085] The turbine rotor 5 is sleeved on and connected to the main shaft 4, and the turbine rotor 5 is adapted to rotate relative to the pump body 2.

[0086] In one alternative implementation, it further includes:

[0087] The second bearing 54 is rotatably disposed between the main shaft 4 and the pump body 2;

[0088] The bushing 51 is sleeved on the main shaft 4 and abuts between the turbine rotor 5 and the second bearing 54 to press the second bearing 54.

[0089] The bushing 51 is detachably connected to the turbine rotor 5 by means of bolts or other means. The bushing 51 can prevent the turbine rotor 5 and the second bearing 54 from directly contacting each other.

[0090] The bushing 51 is used to prevent scratches and other problems from occurring during the disassembly of the turbine rotor 5, so that the surface of the turbine rotor 5 is not worn. Even if scratches or other quality problems occur during the disassembly process, the cost can be saved by replacing the bushing 51. At the same time, the bushing 51 can provide positioning for the second bearing 54, preventing the second bearing 54 from moving during the installation or operation of the turbine rotor 5.

[0091] In one embodiment, the turbine rotor 5 is provided with a positioning groove 55 on the side away from the bushing 51 and around the main shaft 4; the positioning groove 55 includes an abutting top surface 551 and an inclined surface 552, the plane of the abutting top surface 551 is perpendicular to the axial direction of the main shaft 4, the inclined surface 552 is provided on the side of the abutting top surface 551 close to the main shaft 4, and the inclined surface 552 is not parallel to the abutting top surface 551.

[0092] Molecular pumps also include:

[0093] Locking member 52 is sleeved on the main shaft 4 and located in the positioning groove 55. Locking member 52 includes a limiting surface 521 adapted to abut against the inclined surface 552 of the positioning groove 55.

[0094] Lock nut 53 is located on the side of locking member 52 away from turbine rotor 5 and is threadedly connected to main shaft 4.

[0095] The locking element 52 can be designed as a cone shape that fits the positioning groove 55, and the outer peripheral surface of the locking element 52 is the limiting surface 521.

[0096] The locking element 52 and the locking nut 53 together can lock the turbine rotor 5 to operate stably. When the locking nut 53 is locked, the axial locking force of the locking nut 53 can be decomposed into the normal pressure along the inclined surface 552 and the radial clamping force. The radial clamping force can make the clamping element 63 fit tightly against the outer peripheral wall of the main shaft 4, avoiding the axial displacement and radial offset of the turbine rotor 5 when the molecular pump is running at high speed. At the same time, during the installation of the locking element 52, the inclined surface 552 can make the locking element 52 fit the limiting surface 521 and the top surface without alignment, reducing the difficulty of alignment during assembly.

[0097] According to an embodiment of the present invention, in another aspect, a mounting fixture for a molecular pump turbine rotor as described above is also provided, the mounting method comprising:

[0098] Install the turbine rotor 5 and the bushing 51 of the molecular pump;

[0099] Pre-install the turbine rotor 5 on the main shaft 4; place the pre-tightening member 61 in the positioning groove 55 of the turbine rotor 5;

[0100] The first bearing 62 is installed in the first groove 632 of the clamping member 63;

[0101] Connect the clamping part 63, which has the first bearing 62 installed, to the main shaft 4;

[0102] Tighten the clamping member 63 to press the pre-tightening member 61 against the turbine rotor 5, so that the turbine rotor 5 presses against the bushing 51 until the bushing 51 is completely in contact with the inner ring of the second bearing 54.

[0103] Disassemble the clamping component 63, the first bearing 62, and the pre-tightening component 61 in sequence.

[0104] A torque wrench can be used to tighten the clamping part 63. After removing the clamping part 63, the first bearing 62 and the pre-tightening part 61, the locking part 52 is installed into the positioning groove 55. Then, the locking nut 53 is tightened with a torque wrench. Finally, a dial indicator is used to measure the runout value of the turbine rotor 5 to check whether the assembled police uniform is qualified. The installation is then complete.

[0105] The installation method of this invention can control the runout of the turbine rotor 5 within 5μm, and prevent wobbling between the turbine rotor 5 and the main shaft 4. It achieves a high success rate in one-time assembly, high efficiency, and good quality. The initial imbalance of the molecular pump's overall balancing is small, resulting in high overall balancing efficiency. Furthermore, it avoids quality problems such as severe scratches between the turbine rotor 5 and the main shaft 4 caused by disassembling the turbine rotor 5 due to large turbine wobbling caused by poor assembly precision, thus preventing the scrapping of the turbine rotor 5 and main shaft 4 and the waste of manpower in disassembly and assembly.

[0106] Although embodiments of the invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A molecular pump turbine rotor mounting fixture, characterized in that, The molecular pump includes: a pump body (2); a pump housing (1), the pump housing (1) being disposed on the pump body (2), the pump housing (1) having a main shaft (4) for mounting a turbine rotor (5) inside the pump housing (1), the main shaft (4) having an external thread; a positioning groove (55) being provided at one end of the turbine rotor (5); the molecular pump turbine rotor mounting fixture being adapted to assemble the turbine rotor (5) with the main shaft (4); The molecular pump turbine rotor mounting fixture includes: Preload (61) is disposed in the positioning groove (55) and abuts against the turbine rotor (5); A clamping member (63) abuts against the pre-tightening member (61). The clamping member (63) has an internal thread adapted to match the external thread. The clamping member (63) rotates relative to the main shaft (4) to squeeze the pre-tightening member (61) and push the turbine rotor (5) to move. It also includes a first bearing (62), which is rotatably disposed between the preload (61) and the clamping member (63); The outer peripheral wall of the clamping member (63) is provided with a protrusion (631), which is used to clamp the first bearing (62). The protrusion (631) has a first groove (632) on the side facing the pretensioner (61), and the pretensioner (61) has a corresponding second groove (611). The first groove (632) and the second groove (611) are used to accommodate the first bearing (62). The positioning groove (55) includes an abutting top surface (551) and an inclined surface (552). The plane of the abutting top surface (551) is perpendicular to the axial direction of the main shaft (4). The inclined surface (552) is located on the side of the abutting top surface (551) close to the main shaft (4), and the inclined surface (552) is not parallel to the abutting top surface (551). The bottom surface of the pre-tightening member (61) is engaged with the abutting top surface (551).

2. The molecular pump turbine rotor mounting fixture according to claim 1, characterized in that, The pre-tightening member (61) has a clearance hole (612) suitable for the clamping member (63) to pass through, and the inner circumferential surface of the pre-tightening member (61) and the outer circumferential surface of the clamping member (63) are in clearance fit.

3. A molecular pump, characterized in that, Assembly is performed using the molecular pump turbine rotor mounting fixture as described in any one of claims 1 to 2, wherein the molecular pump comprises: Pump body (2); Pump housing (1), the pump housing (1) is disposed on the pump body (2); Main shaft (4) is rotatably mounted on the pump body (2); The turbine rotor (5) is sleeved on the main shaft (4) and connected to the main shaft (4). The turbine rotor (5) is adapted to rotate relative to the pump body (2).

4. The molecular pump according to claim 3, characterized in that, Also includes: The second bearing (54) is rotatably disposed between the main shaft (4) and the pump body (2); A bushing (51) is fitted onto the main shaft (4) and abuts between the turbine rotor (5) and the second bearing (54) to press the second bearing (54) together.

5. The molecular pump according to claim 4, characterized in that, The turbine rotor (5) has a positioning groove (55) on the side away from the bushing (51) and around the main shaft (4); the positioning groove (55) includes an abutting top surface (551) and an inclined surface (552). The plane of the abutting top surface (551) is perpendicular to the axial direction of the main shaft (4). The inclined surface (552) is located on the side of the abutting top surface (551) close to the main shaft (4), and the inclined surface (552) is not parallel to the abutting top surface (551). The molecular pump also includes: Locking member (52), the locking member (52) is sleeved on the main shaft (4) and located in the positioning groove (55), the locking member (52) includes a limiting surface (521) adapted to abut against the inclined surface (552) of the positioning groove (55). The lock nut (53) is located on the side of the locking member (52) away from the turbine rotor (5) and is threadedly connected to the main shaft (4).

6. An installation method, characterized in that, The mounting method, applied to the molecular pump turbine rotor mounting fixture as described in any one of claims 1 to 2, comprises: Install the turbine rotor (5) and bushing (51) of the molecular pump; The turbine rotor (5) is pre-installed on the main shaft (4); the preload (61) is placed in the positioning groove (55) of the turbine rotor (5); The first bearing (62) disposed between the clamping member (63) and the pre-tightening member (61) is installed in the first groove (632) of the clamping member (63); The clamping member (63) with the first bearing (62) installed is inserted into the main shaft (4); Tighten the clamping member (63) to make the pre-tightening member (61) press the turbine rotor (5) so that the turbine rotor (5) presses the bushing (51) until the bushing (51) is completely in contact with the inner ring of the second bearing (54) disposed between the main shaft (4) and the pump body (2); The clamping member (63), the first bearing (62), and the pre-tightening member (61) are disassembled in sequence.

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