Aspheric element smoothing device and method

Abstract

The invention relates to the technical field of optical element ultra-precision machining, in particular to an aspheric element smoothing device and method, and the device comprises a smoothing tool, a workpiece fixing device, a rotary driving mechanism, a linear driving mechanism and a motion carrier; the method comprises the following steps: driving the smooth disc to do reciprocating linear translation in a first direction; enabling the aspheric element to do reciprocating linear translation in the second direction; a smoothing tool traverses the surface of the aspheric element; according to the invention, a composite relative motion is constructed between the smoothing tool and the aspheric element, and the composite relative motion is superposed with reciprocating translation on the basis of traversal motion, so that the instantaneous contact track of the smoothing disc and the surface of the element becomes complicated on the microscale, and the surface of the element can be smoothed; rapid and efficient smoothing and suppression of the texture error of the intermediate-frequency band are realized, and the final surface quality of the optical element is remarkably improved.

Description

Technical Field

[0001] This invention relates to the field of ultra-precision machining technology for optical components, and specifically to a smoothing device and method for aspherical components. Background Technology

[0002] Aspherical optical elements, due to the fact that one or more of their surfaces are aspherical, have excellent aberration correction capabilities. They can effectively simplify the structure, reduce weight, and improve imaging quality in optical systems, and therefore have been increasingly widely used in high-precision fields such as aerospace, lithography systems, laser nuclear fusion, and advanced medical instruments.

[0003] In the polishing process, the surface quality directly affects the performance of the workpiece, especially in fields requiring high precision (such as laser weapons and aerospace). Among these, intermediate frequency error is one of the key factors affecting optical performance. Intermediate frequency error, also known as waviness, is defined by Livermore Laboratory's standard for classifying the errors of optical elements across different frequency bands. The spatial frequency range of intermediate frequency error is 0.33 mm⁻¹ to 8.3 mm⁻¹, corresponding to a spatial period of 0.12 mm to 33 mm.

[0004] In the field of ultra-precision machining of optical components, mid-frequency errors are typically corrected using small tool polishing and traditional manual polishing, each with its own advantages and disadvantages. Traditional manual polishing is inefficient and suffers from poor quality consistency, especially for aspherical surfaces of different shapes and sizes. Small tool polishing offers advantages such as a certain degree of process control and automation, but it also has its drawbacks. Small tool smoothing disks use a flexible material as a support layer to increase the fit between the smoothing disk and the workpiece, thereby reducing the loss of low-frequency precision during the smoothing process. However, the balance between rigidity and flexibility of the small tool smoothing disk is limited, and the lack of fit between the smoothing disk and the workpiece can introduce new mid-frequency errors, resulting in limited smoothing effects and low smoothing efficiency for aspherical components, especially for non-rotationally symmetric aspherical surfaces. This invention addresses the problem of mid-frequency texture smoothing on the surface of aspherical components by designing and proposing a novel smoothing method and apparatus for aspherical components. Summary of the Invention

[0005] To address the shortcomings of existing smoothing methods, such as low efficiency, easy loss of low-frequency accuracy, and easy introduction of new mid-frequency errors, this invention provides a smoothing device and method for aspherical elements. This method achieves efficient and stable suppression or removal of mid-frequency textures across the entire aperture range, while maintaining the already achieved low-frequency surface accuracy and high-frequency surface roughness.

[0006] This invention is achieved through the following technical solution:

[0007] A smoothing device for aspherical components, comprising:

[0008] A smoothing tool, comprising a smoothing tool head and a smoothing disk, wherein the smoothing tool head drives the smoothing disk to perform reciprocating linear translation in a first direction;

[0009] A workpiece fixing device for clamping aspherical components to be processed;

[0010] A rotary drive mechanism is connected to the workpiece fixing device and is used to drive the workpiece fixing device to perform circumferential reciprocating motion around its center.

[0011] A linear drive mechanism, which carries and connects to the rotary drive mechanism, is used to drive the rotary drive mechanism and the workpiece fixing device driven by it to perform reciprocating linear translation in the second direction.

[0012] A motion carrier is provided, wherein the smoothing tool is connected to the moving end of the motion carrier, and the motion carrier is used to drive the smoothing tool to traverse the surface of the aspherical element according to the planned processing path.

[0013] Optionally, the smoothing tool head includes: a constant pressure device, a reciprocating linear motion device, and an optical incremental encoder module. The constant pressure device is fixedly connected to the moving end of the motion carrier. The reciprocating linear motion device and the optical incremental encoder module are both connected to the constant pressure device. The smoothing disk is mounted on the reciprocating linear motion device.

[0014] Optionally, the reciprocating linear motion device includes: a voice coil motor, a linear guide mechanism, and a reciprocating motion component. The voice coil motor is used to drive the smooth disk to reciprocate linearly. The smooth disk is mounted on the reciprocating motion component. The reciprocating motion component is connected to the moving end of the voice coil motor and cooperates with the linear guide mechanism to reciprocate linearly.

[0015] The optical incremental encoder module includes a reading head and a grating ruler. The reading head is fixedly installed, and the grating ruler is mounted on the reciprocating motion component. The optical incremental encoder module is used to detect the motion position of the reciprocating motion component in real time.

[0016] Optionally, the voice coil motor is mounted on the voltage stabilizing and constant force device via a fixed base, and the moving end of the voice coil motor is fixedly connected to the reciprocating motion component via a connector;

[0017] The linear guide mechanism includes a slider and a slide rail, the slide rail is connected to the fixed base, and the slider is connected to the reciprocating motion component;

[0018] The smooth disk is connected to the reciprocating motion component via a connecting flange;

[0019] The reading head is connected to the fixed base via a fixing block.

[0020] Optionally, the motion carrier is a six-axis robotic arm; the rotary drive mechanism is a turntable; and the linear drive mechanism is a moving platform.

[0021] Optionally, the first direction and the second direction are orthogonal to each other.

[0022] Optionally, the device further includes a system control cabinet; the system control cabinet is connected to the six-axis robotic arm, the smoothing tool, the turntable, and the moving platform respectively, and is used for:

[0023] Control the six-axis robotic arm to move according to a predetermined program;

[0024] Control the start, stop, frequency, and amplitude of the reciprocating linear translation of the smoothing tool;

[0025] Control the start, stop, frequency, and amplitude of the circumferential reciprocating motion of the turntable;

[0026] Control the start, stop, frequency, and amplitude of the reciprocating linear translation of the mobile station.

[0027] A method for smoothing aspherical components, based on the smoothing device, the smoothing method comprising:

[0028] Drive the smoothing tool to make the smoothing disk reciprocate linear translation in the first direction at a preset frequency and amplitude;

[0029] Drive the linear drive mechanism to drive the aspherical element to reciprocate linear translation in the second direction at a preset frequency and amplitude;

[0030] The smoothing tool is driven by a motion carrier to traverse the surface of the aspherical element according to the planned processing path, thereby completing the smoothing of the element surface.

[0031] Optionally, the steps of planning the processing path include:

[0032] Establish a workpiece coordinate system with the center of the aspherical element as the origin;

[0033] In the surface normal direction of the aspherical element, the processing path is established according to a preset spacing; wherein, the processing path is a circular path or a grating path.

[0034] Optionally, the method further includes a step of determining the size of the smoothing disk before performing smoothing, the step including:

[0035] Calculate the maximum mismatch change between the aspherical element and the smoothing disk during the smoothing process. The formula for calculating the maximum mismatch change is as follows: ;

[0036] In the formula: This represents the translational amplitude of the tool head. This represents the translational amplitude of the workpiece. This represents the maximum relative displacement between the element and the smoothing disk during a single cycle of the smoothing process. For the maximum diameter of the smooth disk, The coordinate position of the component's aperture within The radius of curvature at that point The coordinate position of the component's aperture within The mismatch between the smoothing disk and the workpiece;

[0037] Choose to change the maximum mismatch. Minimize or make Sizes smaller than a preset threshold are used as smooth disk sizes.

[0038] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0039] This invention constructs a composite relative motion between the smoothing tool and the aspherical element, which superimposes reciprocating translation on the basis of ergonomic motion. This makes the instantaneous contact trajectory between the smoothing disk and the element surface complex at the microscale, enabling the smoothing of the element surface. This achieves rapid and efficient smoothing and suppression of texture errors in the mid-frequency band, significantly improving the final surface quality of the optical element.

[0040] The present invention provides a novel method for smoothing aspherical components, which can determine the size of the smoothing disk based on the maximum mismatch between the component and the smoothing disk during the processing, thereby improving the fit between the smoothing disk and the workpiece surface, improving the stability of the removal efficiency during the smoothing process, and ensuring the low-frequency accuracy of the component.

[0041] Secondly, the composite trajectory motion of the smoothing tool and the workpiece translation is adopted. Compared with the traditional rotation / revolution motion, the smoothing tool and the workpiece have a lower rate of change in fit and stronger fit, resulting in better smoothing effect and surface matching effect.

[0042] Meanwhile, the frequency amplitude of the composite trajectory of the smoothing tool and the workpiece translation is adjustable, and the composite motion trajectory is chaotic, which effectively avoids the introduction of new periodic mid-frequency errors in the smoothing polishing process and can significantly improve the smoothing polishing efficiency.

[0043] Finally, using a six-axis robotic arm as the motion carrier can meet the machining freedom requirements of planar, spherical, aspherical, and free-form surfaces. The smoothing tool has a constant pressure and force module and a high-precision optical incremental encoder module, which can accurately control the stability of the polishing force and the accuracy of the frequency amplitude during the smoothing process, ensuring deterministic removal during the smoothing process. Attached Figure Description

[0044] The accompanying drawings illustrate exemplary embodiments of the present invention and, together with the description thereof, serve to explain the principles of the invention. These drawings are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, but do not constitute a limitation on the embodiments of the present invention.

[0045] Figure 1 This is a schematic diagram of the structure of a non-spherical element smoothing device according to the present invention.

[0046] Figure 2 This is an overall schematic diagram of the smoothing tool head according to the present invention.

[0047] Figure 3 This is a schematic diagram of the structure of the smoothing tool head according to the present invention.

[0048] Figure 4 This is a schematic diagram of the voltage stabilizing and constant force device according to the present invention.

[0049] Figure 5 This is a schematic diagram of the structure of the optical incremental encoder module according to the present invention.

[0050] Figure 6 This is a flowchart illustrating a method for smoothing aspherical components according to the present invention.

[0051] Figure 7 This is a graph showing the variation of the maximum mismatch between different sized smoothing tool heads and components in the curve direction according to the present invention.

[0052] Figure 8 This is a schematic diagram of the composite superimposed smooth trajectory according to the present invention.

[0053] Figure 9 It is the smoothing polishing removal function according to the present invention.

[0054] Reference numerals: 1-Reciprocating linear motion device, 2-Stabilizing and constant force device, 3-Optical incremental encoder module, 4-Fixed base, 5-Voice coil motor, 6-Connector, 7-Slide rail, 8-Slider, 9-Reciprocating motion component, 10-Connecting flange, 11-Smooth disk, 12-Reading head, 13-Fixed block, 14-Grating ruler.

[0055] 21-System control cabinet, 22-Motion carrier, 23-Smoothing tool, 24-Rotary drive mechanism, 25-Linear drive mechanism. Detailed Implementation

[0056] To make the objectives, technical solutions, and advantages of this invention clearer, the invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are for illustrative purposes only and are not intended to limit the scope of the invention.

[0057] It should also be noted that, for ease of description, only the parts relevant to the present invention are shown in the accompanying drawings.

[0058] Where there is no conflict, the embodiments and features described in the present invention can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.

[0059] Example 1

[0060] like Figures 1-5 As shown, this embodiment provides a non-spherical element smoothing device that performs compound relative motion. First, the smoothing tool 23 itself has a microscopic reciprocating linear motion; second, the workpiece to be processed is fixed on a compound motion table that can simultaneously realize both "circumferential reciprocating" and "linear reciprocating" motions; finally, the motion carrier 22 drives the smoothing tool 23 to move over a wide range on the workpiece surface according to a pre-planned macroscopic path.

[0061] The following is a detailed description of the key components and their functions in this embodiment, including the smoothing tool 23, the workpiece fixing device, the rotary drive mechanism 24, the linear drive mechanism 25, and the motion carrier 22.

[0062] The smoothing tool 23 includes a smoothing tool head and a smoothing disk 11. The smoothing tool head drives the smoothing disk 11 to perform reciprocating linear translation in a first direction. The smoothing tool head has a built-in drive source that can actively drive the smoothing disk 11 at its front end to perform high-frequency reciprocating linear translation in a fixed "first direction" (e.g., the Y direction). The smoothing tool head can drive the smoothing disk 11 to perform linear reciprocating polishing translation according to a set frequency and amplitude.

[0063] The workpiece fixing device is used to clamp the aspherical component to be processed.

[0064] The rotary drive mechanism 24 is connected to the workpiece fixing device and is used to drive the workpiece fixing device to perform circumferential reciprocating motion around its center at a set frequency and amplitude. Circumferential reciprocating motion refers to reciprocating torsion within a set angular range (e.g., ±5 degrees).

[0065] The linear drive mechanism 25 carries and connects to the rotary drive mechanism 24, and is used to drive the rotary drive mechanism 24 and the workpiece fixing device driven by it to perform reciprocating linear translation in the second direction. The linear drive mechanism 25 drives the entire rotary drive mechanism 24 (and the workpiece fixing device driven by the rotary drive mechanism 24) to perform reciprocating linear translation in the "second direction" (e.g., the X direction). The linear drive mechanism 25 can drive the workpiece to perform linear reciprocating translation according to a set frequency and amplitude.

[0066] The smoothing tool 23 is connected to the moving end of the motion carrier 22, and the motion carrier 22 is used to drive the smoothing tool 23 to traverse the surface of the aspherical element according to the planned processing path; the smoothing tool 23 is mounted and fixed on the end moving end (such as a flange) of the motion carrier 22 (such as a robotic arm). During the smoothing process, the motion carrier 22 is responsible for driving the smoothing tool 23 to traverse the entire surface to be processed of the aspherical element according to the planned processing path.

[0067] The first direction and the second direction are orthogonal to each other. The composite motion is formed by the superposition of three micro-motions: the linear reciprocating motion of the smoothing tool 23 in the "first direction", the circumferential reciprocating motion of the workpiece, and the linear reciprocating motion of the workpiece in the "second direction", combined with the macro-traversal motion of the motion carrier 22.

[0068] During operation, the workpiece is fixed, and the smoothing tool 23 is brought to the workpiece surface by the motion carrier 22. Subsequently, the smoothing tool head, the rotary drive mechanism 24, and the linear drive mechanism 25 are activated simultaneously, generating three high-frequency reciprocating motions. At the same time, the motion carrier 22 begins to slowly move the smoothing tool 23 along a predetermined path, allowing it to traverse the entire diameter of the workpiece.

[0069] Example 2

[0070] like Figure 2 , Figure 3 , Figure 4 and Figure 5 As shown, this embodiment describes the smoothing tool 23.

[0071] The smoothing tool head includes: a constant pressure device 2, a reciprocating linear motion device 1, and an optical incremental encoder module 3. The constant pressure device 2 is fixedly connected to the moving end of the motion carrier 22. The reciprocating linear motion device 1 and the optical incremental encoder module 3 are both connected to the constant pressure device 2. The smoothing disk 11 is installed on the reciprocating linear motion device 1.

[0072] The constant pressure and constant force device 2 is used to apply and maintain a constant normal pressure during the processing, the reciprocating linear motion device 1 is used to generate high-frequency reciprocating smooth motion, and the optical incremental encoder module 3 is used to monitor in real time and ensure the accuracy of the motion of the execution system.

[0073] A reciprocating linear motion device 1 is fixedly installed in front of the voltage stabilizing and constant force device 2, and an optical incremental encoder module 3 is installed and fixed in the middle area of ​​the voltage stabilizing and constant force device 2.

[0074] The reciprocating linear motion device 1 includes a voice coil motor 5, a linear guide mechanism, and a reciprocating motion component 9. The voice coil motor 5 drives a smooth disk 11 to reciprocate linearly. The smooth disk 11 is mounted on the reciprocating motion component 9. The reciprocating motion component 9 is connected to the moving end of the voice coil motor 5 and cooperates with the linear guide mechanism to reciprocate linearly. The voice coil motor 5 is mounted on the voltage stabilizing and constant force device 2 via a fixed base 4. The moving end of the voice coil motor 5 is fixedly connected to the reciprocating motion component 9 via a connecting piece 6.

[0075] The fixed base 4 is installed and fixed in front of the voltage stabilizing and constant force device 2, the voice coil motor 5 is fixedly installed in front of the fixed base 4, and the connecting piece 6 is installed and fixed in front of the moving end of the voice coil motor 5.

[0076] The reciprocating motion component 9 is fixedly installed below the linear guide mechanism and the connecting component 6. The connecting flange 10 is fixedly installed below the reciprocating motion component 9, and the smooth disk 11 is fixedly installed below the connecting flange 10.

[0077] The voice coil motor 5, as a reciprocating motion source, has significant advantages such as high-frequency response, stable motion, and strong controllability, and its overall structural design allows for friction and wear between structural components during operation. The high-frequency motion of the moving end of the voice coil motor 5 drives the reciprocating motion component 9 to reciprocate along the linear guide mechanism via the connecting part 6 fixed to it. The reciprocating motion component 9 then drives the smoothing disk 11 to reciprocate via the connecting flange 10, achieving reciprocating grinding and polishing.

[0078] The optical incremental encoder module 3 includes a reading head 12 and a grating ruler 14. The reading head 12 is fixedly mounted, and the grating ruler 14 is mounted on the reciprocating motion component 9. The optical incremental encoder module 3 is used to detect the movement position of the reciprocating motion component 9 in real time. The reading head 12 is connected to the fixed base 4 via a fixing block 13. When the reciprocating motion component 9 moves under the drive of the voice coil motor 5, the grating ruler 14 fixed on it moves along with it and sweeps past the fixed reading head 12 at high speed. By reading the scale changes on the grating ruler 14, the reading head 12 can detect the instantaneous movement position of the reciprocating motion component 9 in real time and with high precision.

[0079] The reading head 12 is embedded in the fixing block 13, with the reading head 12 fixed downwards and its measuring area exposed downwards. The fixing block 13 and the reading head 12 are together fixed below the fixing base 4. The grating ruler 14 is attached to the upper surface of the boss structure of the reciprocating motion component 9 and aligned with the reading head 12 above it. The reciprocating motion component 9 drives the grating ruler 14 to reciprocate synchronously, so that the reading head 12 can detect the reciprocating position in real time through the movement of the grating ruler 14, and form a closed-loop control system with the voice coil motor 5, thereby realizing precise control of the acceleration, deceleration and reciprocating stroke of the voice coil motor 5, and thus achieving polishing with different amplitudes and different speed curves.

[0080] The linear guide mechanism includes a slider 8 and a slide rail 7. The slide rail 7 is connected to a fixed base 4, and the slider 8 is connected to a reciprocating motion component 9. The slide rail 7 is fixedly installed below the fixed base 4. The slider 8 cooperates with the slide rail 7 and can slide along the slide rail 7 in a straight line to provide stable linear motion guidance and ensure motion accuracy and stability.

[0081] The motion carrier 22 is a six-axis robotic arm; the rotary drive mechanism 24 is a turntable; and the linear drive mechanism 25 is a moving table. The six-axis robotic arm has six degrees of freedom of motion and is connected to the smoothing tool head via a flange, serving as the motion carrier 22 of the smoothing tool 23.

[0082] The device also includes a system control cabinet 21; the system control cabinet 21 is connected to the six-axis robotic arm, the smoothing tool 23, the turntable, and the moving table, and is used for:

[0083] Control the six-axis robotic arm to move according to a predetermined program;

[0084] Control the start / stop, frequency, and amplitude of the reciprocating linear translation of the smoothing tool 23;

[0085] Control the start, stop, frequency, and amplitude of the circumferential reciprocating motion of the turntable;

[0086] Control the start, stop, frequency, and amplitude of the reciprocating linear translation of the mobile station.

[0087] Optionally, the turntable is fixed to the movable stage by screws, and the workpiece is fixed to the turntable by hot melt adhesive. During the smoothing process, the workpiece is driven to perform reciprocating circumferential translation with adjustable frequency and amplitude. The movable stage is fixed to the base and connected to the turntable by screws, and the workpiece is fixed to the turntable by hot melt adhesive. During the smoothing process, the movable stage drives the turntable and the workpiece to perform reciprocating linear translation with adjustable frequency and amplitude.

[0088] Example 3

[0089] This embodiment provides a method for smoothing aspherical components, which is implemented based on the smoothing device of the aforementioned embodiment.

[0090] A method for smoothing aspherical components, based on a smoothing device, the smoothing method comprising:

[0091] Drive the smoothing tool so that its smoothing disk moves back and forth in a linear motion in the first direction at a preset frequency and amplitude; activate the smoothing tool so that its built-in drive source (such as a voice coil motor) drives the smoothing disk to move back and forth in a linear motion in the "first direction" (e.g., the Y-axis direction) at a preset frequency and amplitude.

[0092] A linear drive mechanism is activated to drive an aspherical element to reciprocate linearly in a second direction at a preset frequency and amplitude; the activated linear drive mechanism (e.g., a moving stage carrying a workpiece) drives the aspherical element clamped therein to reciprocate linearly in a "second direction" (e.g., the X-axis direction) at a preset frequency and amplitude.

[0093] The smoothing tool, driven by a motion carrier, traverses the surface of the aspherical component according to the planned processing path, completing the smoothing of the component surface. During the simultaneous occurrence of the two high-frequency reciprocating linear translation movements, the smoothing tool, driven by the motion carrier (such as a six-axis robotic arm), slowly traverses the entire surface of the aspherical component to be processed according to the pre-planned processing path (such as a grating path or a circular path).

[0094] Example 4

[0095] This embodiment provides a detailed description of two key preparatory steps in the aspherical element smoothing method described in Embodiment 3.

[0096] The steps of the planned processing path include:

[0097] Establish a workpiece coordinate system with the center of the aspherical element as the origin;

[0098] In the surface normal direction of the aspherical element, the processing path is established according to a preset spacing; wherein, the processing path is a circular path or a grating path.

[0099] According to the preset spacing (e.g., X-axis spacing) and Y-axis spacing A series of discrete path points are generated, and these path points are connected to form the processing path. Depending on the processing strategy, the path can be a circular path (i.e., a series of concentric or eccentric loops) or a grating path (i.e., a reciprocating scan line similar to an S-shape).

[0100] The steps for determining the size of the smooth disk include:

[0101] Calculate the maximum mismatch change between the aspherical element and the smoothing disk during the smoothing process. The formula for calculating the maximum mismatch change is as follows: ;

[0102] In the formula: This represents the translational amplitude of the tool head. This represents the translational amplitude of the workpiece. This represents the maximum relative displacement between the element and the smoothing disk during a single cycle of the smoothing process. For the maximum diameter of the smooth disk, The coordinate position of the component's aperture within The radius of curvature at that point The coordinate position of the component's aperture within The mismatch between the smoothing disk and the workpiece;

[0103] Choose to change the maximum mismatch. Minimize or make Sizes smaller than a preset threshold (e.g., 1 μm) are used as smooth disk sizes.

[0104] Example 5

[0105] This embodiment provides a specific example.

[0106] In this example, the object to be processed is an aspherical cylindrical element with a diameter of 64*84mm, a vertex radius of curvature R105mm, and a quadratic aspheric coefficient K=-1. Figure 6 As shown, the smoothing process includes the following steps:

[0107] S1: Calculate the maximum misalignment change between the component to be processed and the smooth disk during the processing. ,like Figure 7 The diagram shows the relationship between the maximum misfit variation and the radius of curvature of the component to be processed, calculated using the above formula. It is determined that a smoothing disk size of 10mm is optimal, as a smaller maximum misfit variation results in better tool-workpiece fit. (The maximum misfit variation should ideally be less than 1µm).

[0108] S2: Establish the aspherical model of the workpiece, and set the workpiece coordinate system with the center of the component as the origin. Set fixed values ​​for the X and Y directions respectively. and From the center of the component to the edge of the component, establish a normal direction on the surface of the component. and A circular path or grating path with a spacing is used as a smoothing processing path.

[0109] S3: Smooth tool head at frequency ,amplitude The workpiece performs reciprocating linear translation in the Y direction at a frequency of ,amplitude Performing a reciprocating linear translation in the X direction, its composite trajectory is as follows: Figure 8As shown, it conforms to a Lissajous figure distribution. By changing the frequency ratio of the smoothing tool head and the workpiece, different superpositions of coincident trajectories can be obtained, and its simulation removal function can be obtained through the Princeton equation. Figure 9 As shown, it exhibits a Gaussian-like shape, indicating that it has good deterministic removal and smoothing capabilities.

[0110] S4: Under the control of the system control cabinet, the robotic arm acts as the motion carrier of the smoothing tool, driving the smoothing tool to traverse the surface of the component according to the smoothing processing path planned in step S2. The smoothing tool performs linear reciprocating translation in the Y direction, and the workpiece is fixedly mounted on the turntable. Under the execution of the moving table, it performs linear reciprocating translation in the X direction, thereby achieving the smoothing suppression of the mid-frequency texture on the surface of the component.

[0111] In the description of this specification, the references to terms such as "one embodiment / mode," "some embodiments / modes," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment / mode or example is included in at least one embodiment / mode or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment / mode or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments / modes or examples. Furthermore, without contradiction, those skilled in the art can combine and integrate the different embodiments / modes or examples described in this specification, as well as the features of different embodiments / modes or examples.

[0112] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0113] Those skilled in the art should understand that the above embodiments are merely for illustrating the present invention and are not intended to limit the scope of the invention. Those skilled in the art can make other changes or modifications based on the above invention, and these changes or modifications still fall within the scope of the present invention.

Claims

1. A smoothing device for aspherical components, characterized in that, include: A smoothing tool (23) includes a smoothing tool head and a smoothing disk (11), wherein the smoothing tool head drives the smoothing disk (11) to perform reciprocating linear translation in a first direction; A workpiece fixing device for clamping aspherical components to be processed; A rotary drive mechanism (24) is connected to the workpiece fixing device and is used to drive the workpiece fixing device to perform circumferential reciprocating motion around its center. A linear drive mechanism (25) carries and connects to the rotary drive mechanism (24) for driving the rotary drive mechanism (24) and the workpiece fixing device driven by it to reciprocate linear translation in the second direction. The motion carrier (22) is connected to the motion end of the smoothing tool (23), and the motion carrier (22) is used to drive the smoothing tool (23) to traverse the surface of the aspherical element according to the planned processing path.

2. The aspherical element smoothing device according to claim 1, characterized in that, The smoothing tool head includes: a constant pressure device (2), a reciprocating linear motion device (1), and an optical incremental encoder module (3). The constant pressure device (2) is fixedly connected to the moving end of the motion carrier (22). The reciprocating linear motion device (1) and the optical incremental encoder module (3) are both connected to the constant pressure device (2). The smoothing disk (11) is installed on the reciprocating linear motion device (1).

3. The aspherical element smoothing device according to claim 2, characterized in that, The reciprocating linear motion device (1) includes: a voice coil motor (5), a linear guide mechanism and a reciprocating motion component (9). The voice coil motor (5) is used to drive the smooth disk (11) to reciprocate linearly. The smooth disk (11) is mounted on the reciprocating motion component (9). The reciprocating motion component (9) is connected to the moving end of the voice coil motor (5) and cooperates with the linear guide mechanism to reciprocate linearly. The optical incremental encoder module (3) includes a reading head (12) and a grating ruler (14). The reading head (12) is fixedly installed, and the grating ruler (14) is installed on the reciprocating motion component (9). The optical incremental encoder module (3) is used to detect the motion position of the reciprocating motion component (9) in real time.

4. The aspherical element smoothing device according to claim 3, characterized in that, The voice coil motor (5) is mounted on the voltage stabilizing and constant force device (2) via a fixed base (4), and the moving end of the voice coil motor (5) is fixedly connected to the reciprocating motion component (9) via a connector (6); The linear guide mechanism includes a slider (8) and a slide rail (7), the slide rail (7) is connected to the fixed base (4), and the slider (8) is connected to the reciprocating motion component (9); The smooth disk (11) is connected to the reciprocating motion component (9) via a connecting flange (10); The reading head (12) is connected to the fixed base (4) via a fixed block (13).

5. The aspherical element smoothing device according to claim 1, characterized in that, The motion carrier (22) is a six-axis robotic arm; the rotary drive mechanism (24) is a turntable; and the linear drive mechanism (25) is a moving platform.

6. The aspherical element smoothing device according to claim 1, characterized in that, The first direction and the second direction are orthogonal to each other.

7. The aspherical element smoothing device according to claim 5, characterized in that, The device also includes a system control cabinet (21); the system control cabinet (21) is connected to the six-axis robotic arm, the smoothing tool (23), the turntable, and the moving platform, and is used for: Control the six-axis robotic arm to move according to a predetermined program; Control the start, stop, frequency and amplitude of the reciprocating linear translation of the smoothing tool (23); Control the start, stop, frequency, and amplitude of the circumferential reciprocating motion of the turntable; Control the start, stop, frequency, and amplitude of the reciprocating linear translation of the mobile station.

8. A method for smoothing aspherical components, characterized in that, Based on the smoothing apparatus as described in any one of claims 1-7, the smoothing method includes: Drive the smoothing tool to make the smoothing disk reciprocate linear translation in the first direction at a preset frequency and amplitude; Drive the linear drive mechanism to drive the aspherical element to reciprocate linear translation in the second direction at a preset frequency and amplitude; The smoothing tool is driven by a motion carrier to traverse the surface of the aspherical element according to the planned processing path, thereby completing the smoothing of the element surface.

9. A method for smoothing aspherical components according to claim 8, characterized in that, The steps of the planned processing path include: Establish a workpiece coordinate system with the center of the aspherical element as the origin; In the surface normal direction of the aspherical element, the processing path is established according to a preset spacing; wherein, the processing path is a circular path or a grating path.

10. A method for smoothing aspherical components according to claim 8, characterized in that, The method further includes a step of determining the size of the smoothing disk before performing smoothing, which includes: Calculate the maximum mismatch change between the aspherical element and the smoothing disk during the smoothing process. The formula for calculating the maximum mismatch change is as follows: ; In the formula: This represents the translational amplitude of the tool head. This represents the translational amplitude of the workpiece. This represents the maximum relative displacement between the element and the smoothing disk during a single cycle of the smoothing process. For the maximum diameter of the smooth disk, The coordinate position of the component's aperture within The radius of curvature at that point The coordinate position of the component's aperture within The mismatch between the smoothing disk and the workpiece; Choose to change the maximum mismatch. Minimize or make Sizes smaller than a preset threshold are used as smooth disk sizes.

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