Supporting structure of solid-state source gasification device and solid-state source gasification device

Abstract

The invention provides a supporting structure of a solid-state source gasification device and the solid-state source gasification device, and the supporting structure is used for being arranged in a steel cylinder of the solid-state source gasification device so as to support a tray in the steel cylinder. The supporting structure comprises a first side wall and a plurality of ribs, a cavity is defined by the first side wall, the ribs are arranged in the cavity and divide the cavity into a plurality of sub-cavities, part of the sub-cavities form gas cavities, and the gas cavities are used for being communicated with a carrier gas inlet of the solid-state source gasification device and a tray cavity of the bottommost tray. The ribs can enhance the structural strength and the structural rigidity of the supporting structure, the probability of excessive deformation of the supporting structure is reduced, and air leakage of an air cavity of the supporting structure is avoided. In addition, the ribs can divide a plurality of sub-cavities, and only part of the sub-cavities serve as air cavities, so that the volume of the air cavities can be reduced, and the flow velocity of the carrier gas is increased. In addition, the ribs can improve the heat conduction efficiency between the supporting structure and the tray.

Description

Technical Field

[0001] This invention belongs to the field of gasification equipment technology, specifically relating to a support structure for a solid source gasification device and the solid source gasification device itself. Background Technology

[0002] Existing solid-state vaporization devices typically include a gas cylinder, several trays, and a support structure. The solid-state source is carried on the trays, which are stacked from top to bottom inside the gas cylinder. The support structure is usually a perforated structure (e.g., a ring structure), with a gas chamber formed on its inner side, supporting the stacked trays from the bottom. In operation, an external heating device heats the gas cylinder to the vaporization temperature of the solid-state source. A carrier gas (usually an inert gas, such as helium) is introduced from the top of the gas cylinder into the gas chamber of the support structure. The carrier gas gradually diffuses towards the upper tray area, carrying the vapor generated by the solid-state source vaporization to the outlet. The solid-state source vapor is then transported to the corresponding reaction vessel (usually the reaction chamber of a thin-film deposition device, such as CVD or ALD equipment).

[0003] However, since the support structure is usually a hollow structure, when the support structure supports the tray, the load applied by the tray to the support structure can easily cause a certain degree of deformation, resulting in the leakage of carrier gas from the side of the gas chamber, which greatly reduces the gasification efficiency of the solid source, and may even lead to the situation where the gas flow rate at the outlet cannot meet the standard.

[0004] The information disclosed in this background section is intended only to enhance the understanding of the overall background of the invention and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Summary of the Invention

[0005] The purpose of this invention is to provide a support structure for a solid source gasification device, which solves the problem that existing support structures are prone to deformation during operation.

[0006] To achieve the above objectives, a specific embodiment of the present invention provides a support structure for a solid-state gasification device. The support structure is used to be installed inside the cylinder of the solid-state gasification device to support the tray inside the cylinder. The support structure includes a first sidewall that surrounds and forms a cavity, and a plurality of ribs disposed in the cavity and dividing the cavity into a plurality of sub-cavities. Some of the sub-cavities form gas cavities, which are used to connect to the carrier gas inlet of the solid-state gasification device and the tray cavity of the bottom tray.

[0007] In one or more embodiments of the present invention, one of the sub-cavities forms an air cavity.

[0008] In one or more embodiments of the present invention, the rib includes a first rib that together with the first sidewall forms an air cavity, the first rib including two first segments connected to the first sidewall and parallel to each other, and a second segment connecting the two first segments.

[0009] In one or more embodiments of the present invention, the second segment extends along an arc.

[0010] In one or more embodiments of the present invention, the reinforcing bar further includes a plurality of second reinforcing bars, one end of the second reinforcing bar being connected to the first sidewall and the other end being connected to the first reinforcing bar.

[0011] In one or more embodiments of the present invention, the thickness of the first sidewall is 8 to 12 mm.

[0012] In one or more embodiments of the present invention, the width of the rib is 10-15 mm.

[0013] In one or more embodiments of the present invention, the ratio of the volume of the air cavity to the volume of all sub-cavities is between 0.05 and 0.3.

[0014] On the other hand, a specific embodiment of the present invention provides a solid-state gasification device, which includes a steel cylinder, a cover plate, the aforementioned support structure, several trays, and an inlet pipe. The cover plate is sealed to the top of the steel cylinder and has a carrier gas inlet. The support structure is located inside the steel cylinder, and the trays are located inside the steel cylinder and stacked on the support structure. The tray cavity of the bottommost tray is connected to the gas cavity of the support structure, and the inlet pipe is connected to the gas cavity and the carrier gas inlet.

[0015] In one or more embodiments of the present invention, the top surface height of the first sidewall is greater than the top surface height of the rib, and the bottom wall of the bottommost tray includes a main body and a protrusion provided at the bottom of the main body. The bottom surface of the main body is in contact with the top surface of the first sidewall, the bottom surface of the protrusion is in contact with the top surface of the rib, and the peripheral surface of the protrusion is in contact with the inner peripheral surface of the first sidewall.

[0016] Compared with the prior art, the ribs of the present invention can effectively enhance the overall structural strength and rigidity of the support structure, so that the support structure will hardly deform or undergo minimal deformation when bearing the pallet, avoiding unexpected deformation of the support structure that could lead to air leakage in its air chamber, and ensuring the stability of the solid source gasification process.

[0017] Furthermore, after the ribs divide the cavity of the first sidewall, only a portion of the cavity is used as a gas chamber for transporting carrier gas, which reduces the volume of the gas chamber and increases the flow rate of the carrier gas, allowing the carrier gas to mix with the solid source vapor more quickly and fully, thereby improving the gasification efficiency of the solid source.

[0018] In addition, the ribs can increase the contact area between the support structure and the pallet, improve the heat conduction efficiency between the support structure and the pallet, and further reduce the probability of deformation of the support structure. Attached Figure Description

[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a cross-sectional view of the support structure in Embodiment 1 of the present invention;

[0021] Figure 2 This is a cross-sectional view of the solid source gasification device in Embodiment 4 of the present invention;

[0022] Figure 3 This is an exploded view of the support structure and tray in Embodiment 4 of the present invention.

[0023] Explanation of main reference numerals: 1. Support structure; 11. First side wall; 12. Rib; 121. First rib; 1211. First segment; 1212. Second segment; 122. Second rib; 13. Sub-cavity; 14. Gas cavity; 2. Gas cylinder; 3. Cover plate; 31. Carrier gas inlet; 32. Gas outlet; 4. Tray; 41. Main body; 42. Protrusion; 43. Air guide pipe; 44. Tray cavity; 5. Air inlet pipe. Detailed Implementation

[0024] To enable those skilled in the art to better understand the technical solutions in this disclosure, the technical solutions in the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments in this disclosure, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this disclosure.

[0025] In the description of this invention, it should be understood that the terms "top", "bottom", "upper", "lower", "front", "rear", "left", "right", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this invention.

[0026] Furthermore, the term "first" is used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined as "first" or "second" may explicitly or implicitly include one or more of the stated features. In the description of this invention, "a plurality of" means two or more, unless otherwise explicitly specified.

[0027] Example 1

[0028] Reference Figure 1 and Figure 2 As shown, this embodiment provides a support structure 1 for a solid source gasification device. The support structure 1 is used to be installed in the bottom area inside the cylinder 2 of the solid source gasification device. It can support the tray 4 inside the cylinder 2. The support structure 1 can also adjust the height of the tray 4 to conduct the heat of the heating device outside the cylinder 2 to the tray 4.

[0029] Specifically, refer to Figure 1 As shown, the support structure 1 provided in this embodiment includes a first sidewall 11 and a plurality of ribs 12. The cross-section of the first sidewall 11 is a relatively regular annular shape, and the first sidewall 11 encloses a cavity. The ribs 12 are located inside the first sidewall 11 and extend into the cavity from the inner circumference of the first sidewall 11. Each rib 12 is connected to other ribs 12 or the inner circumference of the first sidewall 11. The ribs 12 divide the entire cavity into a plurality of relatively small sub-cavities 13, one of which forms a gas chamber 14. The gas chamber 14 is used to connect to the carrier gas inlet 31 of the solid source gasification device and the tray cavity 44 of the bottom tray 4. When the solid source vaporization device is heated, the external carrier gas can enter the gas chamber 14 of the support structure 1 through the carrier gas inlet 31 of the solid source vaporization device, and then enter the tray cavity 44 of the bottom tray 4 through the gas guiding component (e.g., gas guiding pipe 43) of the bottom tray 4. Then the carrier gas gradually diffuses upward, carrying the solid source vapor formed after the solid source on each tray 4 evaporates to the outlet 32, and the solid source vapor is stably delivered to the corresponding reaction chamber through the outlet 32.

[0030] As can be seen from the above structure, the ribs 12 in this embodiment can effectively strengthen the overall structural strength and rigidity of the support structure 1, so that the support structure 1 will hardly deform or undergo very small deformation when subjected to the load applied by the tray 4, thereby avoiding unexpected deformation of the support structure 1 and causing air leakage in its air cavity 14, thus ensuring the stability of the solid source gasification process.

[0031] Furthermore, in this embodiment, after the rib 12 divides the cavity of the first sidewall 11, only one of the sub-cavities 13 is used as the gas chamber 14 for conveying carrier gas, while the remaining sub-cavities 13 are not used for conveying carrier gas, thereby reducing the volume of the gas chamber 14. When the carrier gas enters the gas chamber 14 from the inlet pipe 5, the carrier gas is concentrated in the relatively narrow space of the gas chamber 14, and the flow rate of the carrier gas is significantly improved. This allows the carrier gas to diffuse upward and mix more quickly and fully with the solid source vapor, thereby improving the gasification efficiency of the solid source and simultaneously enhancing the response speed and stability of the solid source gasification device.

[0032] Furthermore, referring to Figure 1 As shown, the inlet pipe 5 of the solid-state vaporization device is generally arranged along the central axis of the cylinder 2, or relatively close to the central axis of the cylinder 2. Since the shape and size of the support structure 1 are generally adapted to the shapes of the cylinder 2 and the tray 4, the inlet pipe 5 is also generally arranged along the central axis of the first side wall 11 of the support structure 1, or relatively close to the central axis of the support structure 1. In order to ensure that the air cavity 14 of the support structure 1 can stably cooperate with the inlet pipe 5, in this embodiment, the position of the air cavity 14 should ensure that the central axis of the first side wall 11 can extend into the interior of the air cavity 14. Alternatively, the geometric center of the first side wall 11 is generally located on its central axis. Therefore, when the geometric center of the first side wall 11 is located inside the air cavity 14, it can also be ensured that the air cavity 14 can stably cooperate with the inlet pipe 5.

[0033] Furthermore, referring to Figure 1As shown, the rib 12 in this embodiment includes a first rib 121 and a plurality of second ribs 122. The cross-sectional shape of the first rib 121 is similar to a U-shape. The first rib 121 and the first sidewall 11 together form a sub-cavity 13, and the sub-cavity 13 serves as an air cavity 14. The first rib 121 includes two first segments 1211 and one second segment 1212. The two first segments 1211 are spaced apart and parallel to each other. One end of one side of the two first segments 1211 is connected to the inner circumferential surface of the first sidewall 11, and the other end of the two first segments 1211 is connected to the second segment 1212, thereby forming a relatively regular-shaped air cavity 14. This makes the cavity wall of the air cavity 14 relatively flat and smooth, thereby effectively reducing the flow resistance inside the air cavity 14, reducing the probability of generating eddies and turbulence inside the air cavity 14, ensuring that the carrier gas can flow relatively smoothly and uniformly inside the air cavity 14, and improving the mixing efficiency and transport stability of the carrier gas with the solid source vapor.

[0034] Furthermore, referring to Figure 1 As shown, in this embodiment, the second segment 1212 of the first rib 121 extends along an arc, allowing the cavity wall corresponding to the second segment 1212 of the air cavity 14 to smoothly transition with the cavity wall corresponding to the first segment 1211. This further improves the smoothness of the carrier gas flow within the air cavity 14 and further reduces the probability of eddies and turbulence occurring inside the air cavity 14. Furthermore, the arc-shaped extension of the second segment 1212 also avoids dead cleaning angles at the connection between the first segment 1211 and the second segment 1212, which is beneficial for factory cleaning and subsequent maintenance of the support structure 1.

[0035] Furthermore, referring to Figure 1 As shown, the rib 12 also includes two second ribs 122, one end of which is connected to the first sidewall 11, and the other end is connected to the first rib 121. The two second ribs 122 provide radial support to the first rib 121 from the first sidewall 11, significantly enhancing the structural strength and stiffness of the support structure 1, further reducing the probability of deformation of the support structure 1 under external loads, and ensuring the reliability of the sealing effect of the air cavity 14.

[0036] In other embodiments, the second rib 122 can also be set as one, three or more, which can further enhance the structural strength and structural stiffness of the support structure 1.

[0037] Furthermore, in this embodiment, the first sidewall 11 is thickened, with a thickness between 8 and 12 mm. Compared to the conventional support structure 1, the thickness of the first sidewall 11 in this embodiment significantly enhances the structural strength and rigidity of the support structure 1, resulting in minimal deformation under thermal stress and internal pressure. This reliably maintains the airtightness of the air cavity 14 and improves overall stability. Preferably, the thickness of the first sidewall 11 can be set to 8 mm, 9 mm, 10 mm, 11 mm, or 12 mm.

[0038] Furthermore, to match the thickened design of the first sidewall 11, the width of the rib 12 in this embodiment is 10~15mm. Preferably, the width of the rib 12 can be set to 10mm, 11mm, 12mm, 13mm, 14mm or 15mm.

[0039] Furthermore, in this embodiment, the ratio of the volume of the air cavity 14 to the volume of all sub-cavities 13 is between 0.05 and 0.3. Preferably, the ratio of the volume of the air cavity 14 to the volume of all sub-cavities 13 is 0.05, 0.1, 0.15, 0.2, 0.25, or 0.3.

[0040] Example 2

[0041] The support structure 1 in this embodiment is largely the same as that in embodiment 1, except that the cross-sectional shape of the first sidewall 11 in this embodiment is approximately a hollow rectangle or other regular or irregular hollow closed shape (not shown in the figure). In practical applications, the user can adapt the shape of the first sidewall 11 according to the actual shape of the cylinder 2 and the tray 4.

[0042] Example 3

[0043] The support structure 1 in this embodiment is roughly the same as that in embodiment 1. The difference is that in this embodiment, two or more sub-cavities 13 are used as air cavities 14 (not shown in the figure), thereby forming multiple air cavities 14. However, the number of sub-cavities 13 used as air cavities 14 is still less than the total number of sub-cavities 13.

[0044] Furthermore, two adjacent air chambers 14 can be connected through openings provided on the ribs 12. After the support structure 1 in this embodiment is applied to the solid source gasification device, the solid source gasification device only needs to be provided with a minimum of one air inlet pipe 5. The air inlet pipe 5 only needs to be directly connected to one of the air chambers 14, and the carrier gas is diffused into each air chamber 14 through the openings on the ribs 12, thereby simplifying the carrier gas pipeline configuration required and ensuring the consistency of the carrier gas source.

[0045] Alternatively, in other embodiments, adjacent air chambers 14 may not be interconnected, but each air chamber 14 may be provided with a separate air inlet pipe 5 to cooperate with it in delivering carrier gas.

[0046] Furthermore, the carrier gas in each gas chamber 14 diffuses upward through different gas guide pipes 43 on the bottom tray 4, promoting full mixing of the carrier gas and solid source vapor, thereby improving the uniformity and stability of solid source vaporization.

[0047] Example 4

[0048] Reference Figure 2 As shown, this embodiment provides a solid-state gasification device. In addition to the support structure 1 described in any of the above embodiments, the device also includes a cylinder 2, a cover plate 3, a tray 4, and an inlet pipe 5. The shapes of the cylinder 2, cover plate 3, and tray 4 are adapted to the shape of the support structure 1. The cylinder 2 has an internal accommodating space, and its top is open. The cover plate 3 is sealed to the top of the cylinder 2, and has a carrier gas inlet 31 and an outlet 32. The support structure 1 is located within the accommodating space of the cylinder 2, specifically at the bottom of the accommodating space. Several trays 4 are stacked and placed on top of the support structure 1. The tray 4 includes a bottom wall, a second side wall surrounding the bottom wall, and a gas guide pipe 43 penetrating the bottom wall. The bottom wall and the second side wall together form a tray cavity 44. For the bottommost tray 4, its tray cavity 44 is interconnected with the gas cavity 14 of the support structure 1 through its gas guide pipe 43. The gas inlet pipe 5 is located within the housing space of the gas cylinder 2. The gas inlet pipe 5 passes through each tray 4 in sequence. The bottom of the gas inlet pipe 5 is interconnected with the gas cavity 14 of the support structure 1, and the top of the gas inlet pipe 5 is interconnected with the carrier gas inlet 31.

[0049] Furthermore, referring to Figure 3As shown, the top surface height of the first sidewall 11 is greater than the top surface height of the rib 12. For the bottommost tray 4, its bottom wall is constructed as a stepped structure, including a main body 41 and a protrusion 42 located at the bottom of the main body 41. The main body 41 and the protrusion 42 are coaxially designed. The cross-sectional area of ​​the protrusion 42 is smaller than the cross-sectional area of ​​the main body 41. The bottom surface of the main body 41 is in contact with the top surface of the first sidewall 11, and the bottom surface of the protrusion 42 is in contact with the top surface of the rib 12. Furthermore, the peripheral surface of the protrusion 42 is in contact with the inner peripheral surface of the first sidewall 11. The support structure 1 and the bottommost tray 4 form a sealed fit, ensuring that there is virtually no carrier gas leakage at the contact point between the support structure 1 and the tray 4. This prevents the carrier gas from diffusing into non-working areas, thereby ensuring the stability of the carrier gas supply. Furthermore, the bottom wall of the lowest tray 4 can seal and isolate each sub-cavity 13 of the support structure 1, essentially completely isolating the sub-cavity 13 that serves as the gas chamber 14 from other sub-cavities 13, ensuring that the gas chamber 14 is strictly sealed, further improving the stability of the carrier gas supply. In addition, after the lowest tray 4 comes into contact with the rib 12, it can increase the contact area between the support structure 1 and the lowest tray 4. On the one hand, this can effectively improve the heat conduction efficiency between the support structure 1 and the tray 4, and ensure that heat is conducted relatively evenly from the support structure 1 to the tray 4, maintaining the temperature stability of the tray 4 during the solid source gasification process. On the other hand, it can allow the support structure 1 to provide more stable mechanical support to the tray 4, dispersing the load applied by the tray 4 to the support structure 1, further reducing the probability of deformation of the support structure 1, thereby enhancing the overall reliability of the solid source gasification device.

[0050] It will be apparent to those skilled in the art that this disclosure is not limited to the details of the exemplary embodiments described above, and that this disclosure can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of this disclosure is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this disclosure. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0051] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A support structure for a solid-state gasification device, the support structure being disposed inside a steel cylinder of the solid-state gasification device to support a tray inside the steel cylinder, characterized in that... The support structure includes a first sidewall that encloses and forms a cavity, and several ribs disposed within the cavity and dividing the cavity into multiple sub-cavities, wherein a portion of the sub-cavities form an air cavity, which is used to connect to the carrier gas inlet of the solid source gasification device and the tray cavity of the bottom tray.

2. The support structure according to claim 1, characterized in that, One of the sub-cavities forms an air cavity.

3. The support structure according to claim 1, characterized in that, The rib includes a first rib that together with the first sidewall forms an air cavity. The first rib includes two first segments that are connected to the first sidewall and are parallel to each other, and a second segment that connects the two first segments.

4. The support structure according to claim 3, characterized in that, The second segment extends along the arc.

5. The support structure according to claim 3, characterized in that, The rib also includes several second ribs, one end of which is connected to the first sidewall and the other end of which is connected to the first rib.

6. The support structure according to claim 1, characterized in that, The thickness of the first sidewall is 8~12mm.

7. The support structure according to claim 1, characterized in that, The width of the rib is 10~15mm.

8. The support structure according to claim 1, characterized in that, The ratio of the volume of the air chamber to the volume of all sub-cavities is between 0.05 and 0.

3.

9. A solid-state gasification device, characterized in that, The solid source gasification device includes: Gas cylinder; A cover plate is sealed to the top of the cylinder, and the cover plate is provided with a carrier gas inlet; The support structure as described in any one of claims 1 to 8, wherein the support structure is located inside the gas cylinder; Several trays are located inside the steel cylinder and stacked on the support structure, with the tray cavity of the bottommost tray communicating with the gas cavity of the support structure; The air inlet pipe is connected to the air chamber and the carrier gas inlet.

10. The solid-state gasification device according to claim 9, characterized in that, The top surface height of the first sidewall is greater than the top surface height of the rib. The bottom wall of the tray at the bottom includes a main body and a protrusion at the bottom of the main body. The bottom surface of the main body is in contact with the top surface of the first sidewall, the bottom surface of the protrusion is in contact with the top surface of the rib, and the circumferential surface of the protrusion is in contact with the inner circumferential surface of the first sidewall.

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