Calibration device of pushing mechanism and mechanical device calibration method based on calibration device

Abstract

The invention discloses a calibration device of a pushing mechanism and a mechanical device calibration method based on the calibration device.The device comprises an actuator, a force sensor and a calibration pusher which are mechanically connected in sequence, force transmission can be conducted in sequence, and the calibration pusher comprises a push rod and a mechanical calibration element which are mechanically connected; the mechanical calibration element is used for applying a known standard force; the self-calibration module is connected with the force sensor and the mechanical calibration element and used for obtaining detection force data of the force sensor and standard force data reversely applied to the push rod by the mechanical calibration element in the self-calibration process in the process that the actuator applies force to the calibration pusher. And the calibration coefficient of the force sensor is determined according to the comparison result of the detection force data and the standard force data, so that the drift error of the force sensor can be corrected, the force detection accuracy is improved, the self-calibration of the device is realized, the calibration stability and reliability are guaranteed, and the overall efficiency of MEMS test work is improved.

Description

Technical Field

[0001] This invention relates to the field of metrology and calibration technology for micro-electro-mechanical systems (MEMS) testing equipment, and particularly to a calibration device for a drive mechanism and a calibration method for a mechanical device based on the calibration device. Background Technology

[0002] MEMS devices (such as accelerometers, gyroscopes, inertial measurement units, tire pressure monitoring systems, and various environmental sensors) have delicate structures. During testing, high-precision mechanical forces or displacements at the micro-Newton to milli-Newton level must be applied to the devices using actuators or microprobes. Precise force control is a key prerequisite for ensuring reliable test data and avoiding device damage.

[0003] Currently, MEMS testing systems primarily employ two modes for actuators: some actuators lack a system calibration mechanism and rely on periodic manual calibration; others utilize offline calibration schemes, while some systems integrate force monitoring functions. In high-throughput production lines, actuators are typically deployed directly at each testing station to apply force during device testing.

[0004] However, periodic offline calibration cannot adapt to real-time changes in the environment and machinery. Actuators without a real-time calibration mechanism cannot detect sensor drift and mechanical wear in time, resulting in missing or delayed calibration steps and reducing calibration timeliness. Most systems lack real-time force monitoring, and anomalies are usually only detected after the device under test is damaged. Fault response relies on manual intervention and is delayed, which reduces calibration stability and reliability. The cost of integrating high-precision force sensors at each station is too high and will prolong the test cycle, reducing the overall efficiency of MEMS testing. Summary of the Invention

[0005] This invention provides a calibration device for a drive mechanism and a calibration method for a mechanical device based on the calibration device, in order to solve the problems of low stability, low reliability and low timeliness of drive mechanism calibration, and the resulting high cost and low efficiency of MEMS testing.

[0006] According to one aspect of the present invention, a calibration device for a driving mechanism is provided, comprising:

[0007] The actuator, force sensor, and calibration pusher are mechanically connected in sequence, enabling sequential force transmission. The calibration pusher includes a mechanically connected push rod and a mechanical calibration element, which is used to apply a known standard force. The self-calibration module is connected to the force sensor and the mechanical calibration element respectively. During the self-calibration process, while the actuator applies force to the calibration pusher, it acquires the detected force data of the force sensor and the standard force data applied in the opposite direction by the mechanical calibration element to the push rod, and determines the calibration coefficient of the force sensor based on the comparison result of the detected force data and the standard force data.

[0008] According to another aspect of the present invention, a method for calibrating a mechanical device based on a calibration device is provided, wherein the calibration device is a calibration device for a pushing mechanism according to any embodiment of the present invention, and the method includes:

[0009] The self-calibration module acquires the force sensor's detection force data and the standard force data applied in the opposite direction by the mechanical calibration element to the push rod during the self-calibration process, while the actuator applies force to the calibration pusher. The self-calibration module then determines the calibration coefficient of the force sensor based on the comparison between the detection force data and the standard force data.

[0010] According to another aspect of the present invention, a mechanical device calibration device based on a calibration device is provided. The calibration device is a calibration device for a pushing mechanism according to any embodiment of the present invention. The mechanical device calibration device based on the calibration device includes:

[0011] The standard data submodule is used to acquire the force sensor's detection force data and the standard force data applied in the opposite direction by the mechanical calibration element to the push rod during the self-calibration process, when the actuator applies force to the calibration pusher. The calibration coefficient submodule is used to determine the calibration coefficient of the force sensor based on the comparison result of the detection force data and the standard force data through the self-calibration module.

[0012] According to another aspect of the present invention, an electronic device is provided, the electronic device comprising:

[0013] At least one processor; and a memory communicatively connected to the at least one processor; wherein the memory stores a computer program executable by the at least one processor, the computer program being executed by the at least one processor to enable the at least one processor to perform the mechanical device calibration method based on the calibration device according to any embodiment of the present invention.

[0014] According to another aspect of the present invention, a computer-readable storage medium is provided, the computer-readable storage medium storing computer instructions, the computer instructions being configured to cause a processor to execute and implement the mechanical device calibration method based on a calibration device as described in any embodiment of the present invention.

[0015] According to another aspect of the present invention, a computer program product is also provided, including a computer program that, when executed by a processor, implements the steps of the method as described in any embodiment of the present invention.

[0016] The calibration device for the pushing mechanism in this embodiment of the invention includes an actuator, a force sensor, and a calibration pusher that are mechanically connected in sequence, enabling sequential force transmission. The calibration pusher includes a push rod and a mechanical calibration element that are mechanically connected. The mechanical calibration element is used to apply a known standard force. A self-calibration module is connected to the force sensor and the mechanical calibration element respectively. During the self-calibration process, when the actuator applies force to the calibration pusher, the module acquires the detected force data of the force sensor and the standard force data applied in the opposite direction by the mechanical calibration element to the push rod, and determines the calibration coefficient of the force sensor based on the comparison result of the detected force data and the standard force data. The sequential mechanical connection of the actuator, force sensor, and calibration actuator ensures a complete force transmission path, enabling all applied forces to be detected by the force sensor. Through the linkage of the self-calibration module, mechanical calibration elements, and force sensor, calibration coefficients are determined during actuator force application by comparing the standard force data applied in reverse by the mechanical calibration elements with the force data detected by the force sensor. This corrects drift errors in the force sensor, improves force detection accuracy, and prevents MEMS device test data distortion or device damage due to insufficient sensor precision. Simultaneously, the standard force provided by the mechanical calibration elements, combined with the self-calibration module, enables autonomous device calibration without relying on external standard tools or manual intervention. This reduces testing costs, simplifies the calibration process, lowers the operational threshold, reduces interference from the external environment on calibration results, and ensures calibration stability, reliability, and timeliness. Furthermore, the autonomous calibration function can be flexibly activated according to actual needs, promptly compensating for force sensor performance degradation, extending the effective lifespan of the device, and reducing time costs and downtime losses caused by frequent inspections or manual calibration, thereby improving the overall efficiency of MEMS testing.

[0017] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of the present invention, nor is it intended to limit the scope of the invention. Other features of the invention will become readily apparent from the following description. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1This is a schematic diagram of a calibration device for a pushing mechanism according to Embodiment 1 of the present invention;

[0020] Figure 2 This is a schematic diagram of a standard spring mechanical calibration element applicable to an embodiment of the present invention;

[0021] Figure 3 This is a schematic diagram of a standard magnetic device mechanical calibration element applicable to an embodiment of the present invention;

[0022] Figure 4 This is a physical structural diagram of a calibration device for a pushing mechanism applicable to an embodiment of the present invention;

[0023] Figure 5 This is a flowchart of a mechanical device calibration method based on a calibration device according to Embodiment 2 of the present invention;

[0024] Figure 6 This is a flowchart of another mechanical device calibration method based on a calibration device according to Embodiment 3 of the present invention;

[0025] Figure 7 This is a schematic diagram of the structure of a mechanical device calibration device based on a calibration device according to Embodiment 4 of the present invention;

[0026] Figure 8 This is a schematic diagram of the structure of an electronic device that implements the mechanical device calibration method based on a calibration device according to an embodiment of the present invention. Detailed Implementation

[0027] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.

[0028] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0029] Example 1

[0030] Figure 1 This is a schematic diagram of a calibration device for a pushing mechanism according to Embodiment 1 of the present invention. This embodiment is applicable to the calibration of pushing mechanisms. Figure 1 As shown, the calibration device includes:

[0031] The actuator 110, force sensor 120 and calibration pusher 130 are mechanically connected in sequence, enabling sequential force transmission. The calibration pusher 130 includes a mechanically connected push rod 140 and a mechanical calibration element 150, which is used to apply a known standard force.

[0032] The self-calibration module 160 is connected to the force sensor 120 and the mechanical calibration element 150 respectively. During the self-calibration process, when the actuator 110 applies force to the calibration pusher 130, it acquires the detection force data of the force sensor 120 and the standard force data applied in the opposite direction by the mechanical calibration element 150 to the push rod 140, and determines the calibration coefficient of the force sensor 120 based on the comparison result of the detection force data and the standard force data.

[0033] In this embodiment of the invention, the actuator can be specifically understood as a power output component for outputting driving force, which can drive subsequent components to complete the force application action. The force sensor can be specifically understood as a detection component connected in series between the actuator and the calibration actuator, used to detect the force value output and transmitted by the actuator in real time and generate corresponding detection force data.

[0034] A calibration actuator can be understood as a force transmission and standard force feedback component, which may include a push rod and a mechanical calibration element. It receives the force transmitted from the actuator via a force sensor and outputs a standard force in reverse through the internal mechanical calibration element. The push rod can be understood as the force transmission sub-component of the calibration actuator, receiving the force transmitted from the actuator and acting on the mechanical calibration element, while simultaneously receiving the standard force applied in reverse by the mechanical calibration element, thus achieving bidirectional force transmission. The mechanical calibration element can be understood as the standard force output sub-component of the calibration actuator, capable of outputting a standard force of known magnitude based on its own physical properties (such as elastic deformation or magnetic force), serving as the reference force source for the self-calibration process.

[0035] The self-calibration module can be understood as a control and data processing component that connects to the force sensor and mechanical calibration element respectively, and is used for data acquisition, calculation and analysis and determination of calibration coefficients. It can control the execution of the self-calibration process.

[0036] Specifically, the actuator 110 serves as a power source, the force sensor 120 as a force detection component, and the calibration pusher 130 as a force transmission and standard force feedback component. The three components are mechanically connected in sequence to construct an orderly force transmission path, which enables the sequential transmission of force. The calibration pusher 130 includes a mechanically connected push rod 140 and a mechanical calibration element 150. The mechanical calibration element 150 can output a known standard force based on its own physical characteristics. The self-calibration module 160 is connected to the force sensor 120 and the mechanical calibration element 150 respectively.

[0037] During the self-calibration process, actuator 110 applies a driving force to calibration pusher 130. This force is transmitted through force sensor 120 and is detected in real time, generating detection force data. Simultaneously, mechanical calibration element 150 within calibration pusher 130 applies a known standard force in the opposite direction to push rod 140. Self-calibration module 160 simultaneously acquires the detection force data from force sensor 120 and the standard force data from mechanical calibration element 150, and performs point-by-point comparison of the two sets of data to calculate the deviation value. Deviation value = |detection force data - standard force data|. Calibration coefficients are derived from the deviation value. For example, if the deviation value is less than or equal to a preset value... If the threshold is reached, it is determined that the current detection accuracy of the force sensor 120 meets the requirements and no correction is needed. If the deviation value is greater than the preset threshold, the calibration coefficient of the force sensor 120 is calculated based on the deviation distribution law of multiple sets of data through linear fitting or error compensation algorithm. For example, when using the single-point calibration method, the calibration coefficient can be the standard force data / detection force data. When using the multi-point calibration method, multiple sets of standard force data and detection force data corresponding to different force application conditions are selected, and a linear equation between the standard force and the detection force is established through linear fitting. The slope in the equation is used as the basic calibration coefficient, and the intercept is used as the compensation value.

[0038] Finally, the new calibration coefficient is written into the detection data processing system of the force sensor 120. The raw detection force data collected by the force sensor 120 will be corrected according to the calibration coefficient. For example, the raw detection force data is multiplied by the calibration coefficient (when using the single-point calibration method) or corrected according to the linear equation (when using the linear fitting method), etc., so as to correct the detection error caused by factors such as sensor drift and mechanical wear, and realize the calibration of detection accuracy.

[0039] Optionally, based on the above embodiments, the mechanical calibration element can be: a standard spring, wherein the deformation of the standard spring has a standard correspondence with the force, and the deformation is used to characterize the standard force data applied by the standard spring; or a standard magnetic device, wherein the magnetic gap of the standard magnetic device has a standard correspondence with the force, and the magnetic gap is used to characterize the standard force data applied by the standard magnetic device.

[0040] In this embodiment of the invention, the standard spring can be specifically understood as: a specific implementation of a mechanical calibration element, whose degree of deformation and the magnitude of the applied force follow Hooke's Law, exhibiting a stable and traceable standard correspondence. The standard magnetic device can be specifically understood as: another specific implementation of a mechanical calibration element, a component utilizing magnetic principles, such as a magnetic pawl, whose magnetic gap size has a stable quantitative correspondence with the applied force.

[0041] Specifically, the mechanical calibration element can be either a standard spring or a standard magnetic device. During the self-calibration process of the calibration device, when the actuator applies force to the calibration pusher to drive the push rod, it will also act in the opposite direction on the mechanical calibration element. If a standard spring is selected as the mechanical calibration element, the force will cause the standard spring to undergo elongation or compression deformation. Based on Hooke's Law, which governs the deformation of the standard spring and the force, the corresponding standard force data can be calculated by detecting the deformation of the spring. If a standard magnetic device is selected as the mechanical calibration element, the force will change the magnetic gap between the magnetic components. Based on the standard correspondence between the magnetic gap of the standard magnetic device and the force, the corresponding standard force data can be calculated by detecting the change parameter of the magnetic gap. The standard force data obtained by the above two methods can be compared with the force data detected by the force sensor to determine the calibration coefficient of the force sensor.

[0042] Figure 2 This is a schematic diagram of a standard spring mechanical calibration element applicable to an embodiment of the present invention, as shown below. Figure 2As shown, the core component is a helical standard spring, which is positioned in the middle of a vertical rod-like structure (such as a push rod) by a support component. The lower end of the rod is connected to a base-like structure, and the rod passes through the spring and the positioning component. When the rod-like structure is subjected to axial force, it will cause the standard spring to undergo elongation or compression deformation. Combined with the standard spring's preset stiffness coefficient (the standard correspondence between deformation and force), the corresponding standard force data can be calculated by detecting the spring's deformation, thus serving as the reference force source for the calibration device.

[0043] Figure 3 This is a schematic diagram of a standard magnetic device mechanical calibration element applicable to an embodiment of the present invention, as shown below. Figure 3 As shown, the core components are two magnetic parts fixed in the middle of a vertical rod-shaped member (such as a push rod). The upper part is marked N (representing the magnetic north pole), and the lower part is marked S (representing the magnetic south pole). The two magnetic parts are distributed vertically and alternately. The lower end of the rod is connected to a base-like structure, and the whole is housed within a supporting component. When the rod-shaped member is subjected to axial force, the relative magnetic gap between the two magnetic parts changes. Combining the preset standard correspondence between magnetic gap and force, the corresponding standard force data can be calculated by detecting the change in magnetic gap, which serves as the reference force source for the calibration device.

[0044] Understandably, the mechanical calibration element, as a reference element, has already undergone pre-characterization and calibration. The force-deformation or force-distance relationship of the standard spring or standard magnetic device has been characterized and calibrated during the device manufacturing and assembly stage. The corresponding reference force value and triggering conditions are stored in the system memory to ensure that the actuator tip can accurately contact the reference element under predefined conditions during the self-calibration cycle. Specifically, the actuator tip can be understood as the end actuation component of the calibration actuator or test actuation mechanism, which is the part that directly contacts the mechanical calibration element (standard spring or standard magnetic device) or the mechanical device to be calibrated.

[0045] Mechanical calibration elements possess relative stability within the calibration environment. Although they exhibit drift phenomena such as spring creep or magnet aging, their short- to medium-term stability under controlled conditions is far superior to that of uncalibrated MEMS force sensors. Furthermore, the drift speed is slower and more predictable, and the calibration frequency is set much shorter than the expected drift period of mechanical calibration elements.

[0046] By offering two optional types of mechanical calibration elements—standard springs and standard magnetic devices—this system can adapt to various MEMS pressure sensor testing scenarios. Standard springs are suitable for static or quasi-static calibration within a typical force range, while standard magnetic devices are suitable for high-precision micro-force calibration or non-contact force feedback calibration. The compatibility of these two solutions broadens the applicability of the calibration device and enhances its adaptability to diverse testing conditions. The deformation and force of the standard spring follow Hooke's Law, and the magnetic gap and force of the standard magnetic device have a stable quantitative correspondence. By establishing a standard correlation between force and characterization parameters based on physical properties, compared to calibration methods that rely on external calibration sources, accurate standard force data can be directly calculated by detecting deformation or magnetic gap parameters. This provides a highly reliable benchmark for determining the calibration coefficients of force sensors, ensuring the calibration accuracy of force sensors. Both standard springs and standard magnetic devices are simple in structure and stable in performance, making them less susceptible to environmental factors such as electromagnetic interference and temperature and humidity fluctuations. Their performance degrades slowly over long-term use. Furthermore, neither has complex electronic control modules, making disassembly, replacement, and maintenance simple, reducing the long-term operating cost of the calibration device and ensuring the stable operation of the self-calibration process.

[0047] Optionally, based on the above embodiments, the actuator can be a piezoelectric stack or a voice coil motor for converting electrical energy into force.

[0048] In this embodiment of the invention, the piezoelectric stack can be specifically understood as: a specific implementation of the actuator, composed of multiple layers of piezoelectric ceramic sheets stacked together, operating based on the piezoelectric effect, producing precise minute deformations after being energized, thereby outputting controllable mechanical force. The voice coil motor can be specifically understood as: another specific implementation of the actuator, belonging to a special linear motor, utilizing the principle that an energized coil experiences Ampere force in a magnetic field to achieve linear force output, featuring fast response and controllable stroke.

[0049] Correspondingly, the working principle of the actuator is to convert the externally input electrical signal (voltage or current) into a mechanical force or displacement output, providing power support for the calibration operation.

[0050] By offering two actuator options—piezoelectric stacks and voice coil motors—the piezoelectric stack, based on the piezoelectric effect, can output high-precision, short-stroke micro-forces, suitable for the micro-Newton to milli-Newton force values ​​required for MEMS testing and calibration of actuators. The voice coil motor, relying on electromagnetic principles, can achieve long-stroke, high-response force outputs, meeting calibration force requirements under different ranges and operating conditions. The combination of these two options broadens the force output coverage of the calibration device and enhances its adaptability to diverse MEMS device testing and calibration scenarios. Both the piezoelectric stack and the voice coil motor are electrically driven actuators, which can control the output mechanical force by adjusting the voltage and current parameters of the input electrical signal. Quantitative force control, compared to traditional power sources such as pneumatics and hydraulics, can effectively avoid force output errors caused by factors such as pressure fluctuations and fluid leakage, ensuring the accurate application of known verification forces during calibration. Both the piezoelectric stack and the voice coil motor are small, compact, and modular components, which are easy to integrate with force sensors, calibration actuators, and other components in the calibration device, simplifying the overall structural design of the calibration device. At the same time, neither has complex transmission components, resulting in low wear and failure rate during operation. Subsequent maintenance only requires testing of the electrical signal control module and the components themselves, which can reduce the maintenance cost and downtime of the device and ensure the efficient and stable operation of the calibration process.

[0051] Optionally, based on the above embodiments, the calibration device can be a portable calibration device.

[0052] In this embodiment of the invention, the portable calibration device can be specifically understood as: a type of calibration device design that has the structural features of being small in size, lightweight and portable, and supports on-site calibration operations outside of a fixed laboratory environment.

[0053] Specifically, the calibration device can be designed as a portable calibration equipment. By modularly integrating and miniaturizing components such as actuators, calibration pushers, and force sensors, and incorporating an embedded self-calibration module, the need for connecting large external control equipment is eliminated, thus achieving portability of the calibration device. In MEMS device production and testing scenarios, this portable calibration device can be directly transported to the testing station on the production line and quickly connected to the push mechanism to be calibrated. Without disassembling the component to be calibrated, the entire calibration process, including the application of known verification force, acquisition of displacement parameters, calculation of calibration coefficients, and self-calibration of the force sensor, can be completed.

[0054] By adopting a portable calibration device, the spatial limitations of fixed laboratories or calibration stations can be eliminated. The device can be directly carried to MEMS pressure sensor production lines and field testing sites, eliminating the need to disassemble and transport the test actuators. This enables on-site calibration, improving the flexibility and adaptability of calibration operations. The portable calibration equipment can quickly interface with production line testing stations, completing calibration operations without interrupting the normal production line rhythm. This avoids the time losses caused by component disassembly, transport, and reassembly associated with traditional fixed calibration equipment, shortening the calibration cycle and ensuring the production efficiency of MEMS devices. The portable calibration equipment is highly integrated and compact, requiring no large auxiliary facilities, reducing deployment and site occupancy costs. Its portability allows one device to serve multiple dispersed testing stations, reducing the number of devices required in multi-station scenarios and further lowering overall usage and maintenance costs. The portable calibration equipment enables on-demand, real-time calibration. When abnormal force detection accuracy occurs in the test actuators on the production line, it can quickly arrive to perform calibration and accuracy correction, avoiding production line downtime or product testing errors caused by waiting for fixed calibration equipment scheduling, ensuring the accuracy of test data and the continuity of the production process.

[0055] Furthermore, based on the above embodiments, the self-calibration module can also be used to perform zero-point adjustment on the force sensor when the self-calibration process begins.

[0056] In this embodiment of the invention, zero-point adjustment can be specifically understood as: in the initial state without external force applied, the output signal of the sensor is corrected to a preset zero-point value to eliminate zero drift error.

[0057] Specifically, in the initial stage of the self-calibration process, the self-calibration module can first control the actuator to maintain a zero-output state to ensure that the force sensor is not subjected to any external mechanical force. It then collects the real-time output signal of the force sensor under this no-load state, calculates the deviation between the signal and the preset zero-point reference value, and corrects the sensor's output parameters through a built-in compensation algorithm. For example, the zero-point deviation is written into the sensor's output data correction formula. In the subsequent force detection process, the zero-point deviation is subtracted from the original detection value collected by the sensor in real time to offset the zero drift error caused by factors such as temperature and humidity changes, mechanical component wear, or electromagnetic interference. This ensures that the sensor's output value under no-load state matches the preset zero-point reference value. After the zero-point adjustment is completed, the self-calibration module continues to execute the subsequent self-calibration process, such as standard force application and data acquisition.

[0058] By adjusting the zero point of the force sensor during the self-calibration initiation phase using the self-calibration module, zero drift errors caused by factors such as temperature and humidity fluctuations, mechanical wear, and electromagnetic interference can be eliminated in advance. This ensures that the sensor's no-load output value accurately returns to the zero-point reference, avoiding interference from zero-point deviation in subsequent comparisons of standard force and measured force data. This improves the calibration accuracy of the force sensor and ensures the accuracy of MEMS pressure sensor test data. Integrating zero-point adjustment into the initial self-calibration stage eliminates the need for a separate zero-point calibration procedure. It can seamlessly integrate with the self-calibration process, including standard force application, data acquisition, and coefficient calculation, simplifying the overall calibration operation steps and shortening the time required. The self-calibration module shortens the calibration cycle and improves the efficiency of calibration operations. Regular zero-point adjustment during self-calibration corrects sensor zero-point drift in real time, ensuring a stable output reference, extending sensor lifespan, reducing test error risks caused by zero drift, and guaranteeing the long-term reliability of MEMS pressure sensor testing equipment. The self-calibration module automatically completes zero-point adjustment without manual intervention, avoiding operational errors that may occur during manual zero-point calibration. This enhances the automation and intelligence of the calibration process, reduces operator workload, and meets the high-efficiency operation requirements of large-scale production lines.

[0059] Furthermore, based on the above embodiments, the self-calibration module can also be used to: initiate the self-calibration process when the following triggering conditions occur; the triggering conditions include: a power-on event, the passage of a set time interval, the number of calibrations completed, and a drift in the detection result of the force sensor.

[0060] In this embodiment of the invention, the power-on event can be specifically understood as: the initial moment when the calibration device is powered on and enters the working state. The set time interval can be specifically understood as: a pre-configured fixed time period; when the time elapsed since the last self-calibration is completed reaches this threshold, self-calibration is triggered. The number of completed calibrations can be specifically understood as: a counting trigger condition based on the frequency of calibration operations; when the cumulative number of completed calibrations reaches a preset value, a new round of self-calibration is triggered. The drift in the detection result can be specifically understood as: the phenomenon that the detection data output by the force sensor deviates from the standard value, discovered through manual monitoring or other auxiliary detection methods.

[0061] Specifically, the self-calibration module can automatically initiate the self-calibration process based on preset trigger conditions of various types. These can include: power-on events, where the module immediately triggers self-calibration after the calibration device is powered on to ensure that the sensor accuracy meets the standards in the initial working state of the equipment; time intervals, where the module counts according to a pre-configured time period, triggering self-calibration when the set duration is reached to achieve periodic accuracy maintenance; the number of calibrations completed, where the module accumulates the number of calibration operations, triggering self-calibration when a preset threshold is reached to adapt to the frequency requirements of large-scale operations; and drift in the force sensor's detection results, which can be detected manually or through other auxiliary means and fed back to the module. Upon receiving the feedback, the module triggers self-calibration to correct the sensor deviation.

[0062] Power-on events ensure the device is in a precise state from startup; time-interval triggers enable periodic precision maintenance; completed calibration counts adapt to the frequency requirements of large-scale operations; and result drift triggers provide a rapid response to sensor accuracy anomalies, preventing MEMS pressure sensor testing errors due to precision deviations and ensuring data accuracy. The multi-trigger design allows the self-calibration process to start on demand without manual intervention, avoiding subjective errors from manual calibration timing and reducing operator workload. It also adapts to different operating scenarios and equipment statuses, enhancing the automation and intelligence of the calibration device and meeting the needs of large-scale production lines. This system meets the high-efficiency operation requirements of MEMS pressure sensors. Through periodic and on-demand self-calibration triggered by multiple conditions, it can promptly correct accuracy deviations caused by factors such as temperature and humidity fluctuations, mechanical wear, and electromagnetic interference. This prevents the sensor from operating in a deviated state for a long time, extends the sensor's lifespan, and ensures the long-term stability and consistency of the sensor's output data, thereby improving the reliability of MEMS pressure sensor test results. The four trigger conditions can be configured according to actual operational needs. For example, the time interval threshold can be shortened in high-precision testing scenarios, and the calibration number threshold can be adjusted in batch testing scenarios to adapt to different MEMS pressure sensor testing conditions, thereby improving the scenario adaptability and usage flexibility of the calibration device.

[0063] Furthermore, based on the above embodiments, the calibration device for the actuating mechanism may further include:

[0064] The calibration operation module is used to control the actuator to apply a known verification force to the mechanical device to be calibrated during the calibration process, in which the actuator, force sensor, and calibration pusher contact the mechanical device to be calibrated, to obtain the verification force of the mechanical device to be calibrated, and to determine the calibration result based on the known verification force and the verification force; wherein, the verification force of the mechanical device to be calibrated is calculated and determined based on the displacement change parameters generated by the mechanical device to be calibrated; wherein, the mechanical device to be calibrated is a test push mechanism in a MEMS device production test system.

[0065] In this embodiment of the invention, the known verification force can be specifically understood as: the standard force value output by the actuator of the calibration device after being calibrated by its own force sensor and mechanical calibration elements, which serves as the reference force parameter for calibrating the mechanical device to be calibrated. The force to be verified can be specifically understood as: the force value calculated based on the displacement change parameters of the mechanical device to be calibrated after being subjected to the known verification force, combined with its own mechanical properties, and used for comparison with the known verification force.

[0066] The mechanical device to be calibrated can be specifically understood as the test propulsion mechanism in the MEMS device production and testing system, which is the external calibration object of this calibration device. The displacement change parameter can be specifically understood as the positional change of the mechanical device to be calibrated after being subjected to a known verification force.

[0067] Specifically, the calibration device of the actuation mechanism has dual functions of self-calibration and external calibration. The self-calibration process is used to correct the detection accuracy of the device's own force sensor, while the newly added calibration operation module is used to perform external calibration tasks. The calibration object is the test actuation mechanism in the MEMS device production and testing system, i.e., the mechanical device to be calibrated.

[0068] The calibration operation module first controls the actuator, force sensor, and calibration pusher of the device to work together to make contact and position with the mechanical device to be calibrated. Then, it drives the actuator to apply a known verification force calibrated by the self-calibration process to the mechanical device to be calibrated, and monitors the stability of the force value in real time through the force sensor. After the mechanical device to be calibrated is subjected to the known verification force, it will produce a displacement change. The calibration operation module collects the displacement change parameters and calculates the verification force by combining them with the preset mechanical model of the mechanical device to be calibrated. Finally, it performs a deviation analysis between the known verification force and the verification force. If the deviation value is within the preset threshold, the calibration is deemed qualified. If the deviation exceeds the threshold, the calibration deviation data is output. In this way, the calibration of the MEMS test push mechanism is completed and the calibration result is determined.

[0069] Through the calibration operation module, the calibration device can not only correct the accuracy of its own force sensor, but also directly calibrate the test actuator without the need for additional dedicated external calibration equipment. This expands the application scenarios and value of the device, and reduces the equipment investment cost of MEMS device production lines. The known verification force applied by the module-controlled actuator is a precise force value calibrated by the device's internal self-calibration process, possessing a highly reliable benchmark attribute. At the same time, the verification force is calculated by collecting the displacement change parameters of the test actuator and compared with the known verification force. The entire calibration process is completed based on quantified physical parameters, avoiding the subjective errors of manual calibration, ensuring the calibration accuracy of the MEMS test actuator, and thus improving the reliability of MEMS device production test data. It can realize integrated operation of automatic docking with the test actuator, force application, parameter acquisition, and result judgment without disassembling the original assembly structure of the test actuator or requiring manual step-by-step intervention. This simplifies the calibration process, shortens the calibration cycle, adapts to the high-efficiency operation requirements of large-scale MEMS device production lines, and improves the consistency and product yield of MEMS device production testing.

[0070] Optionally, based on the above embodiments, the calibration operation module may include:

[0071] The monitoring unit is used to control the actuator to apply a pre-test verification force to the mechanical device to be calibrated, so as to perform a pre-calibration test on the mechanical device to be calibrated; the monitoring unit is also used to control the actuator to apply at least one known verification force to the mechanical device to be calibrated, and correspondingly obtain at least one verification force of the mechanical device to be calibrated; the diagnostic unit is used to determine the calibration result based on the corresponding known verification force and verification force.

[0072] In this embodiment of the invention, the monitoring unit can be specifically understood as: an execution unit for controlling the actuator's motion, managing the force application process, and collecting the force data to be verified, and for outputting force parameters for pre-calibration testing and formal calibration. The pre-calibration verification force can be specifically understood as: a small-range, low-precision exploratory force applied before the formal calibration begins, used for functional pre-calibration of the mechanical device (MEMS test actuator) to be calibrated.

[0073] Pre-calibration testing can be understood as a preliminary testing step before formal calibration, involving the application of pre-testing verification forces to check for problems such as mechanical jamming or abnormal displacement response of the mechanical device to be calibrated. The diagnostic unit can be understood as the data analysis unit of the calibration operation module, used to receive known verification force and force-to-be-verified data collected by the monitoring unit, and to determine the calibration result through deviation calculation.

[0074] Specifically, the calibration operation module consists of a monitoring unit and a diagnostic unit. The monitoring unit first executes the pre-calibration test procedure: it controls the actuator to apply a pre-verification force to the push mechanism to be calibrated, and detects the displacement response of the mechanical device to be calibrated to check for abnormalities such as mechanical jamming or loose parts that may affect calibration, ensuring that the mechanical device to be calibrated is in a calibrable state. For example, the displacement data can be compared with the standard displacement response curve or a preset displacement threshold range under the same working conditions. If the collected displacement data is within the standard response range and the displacement changes with the force value in a continuous, stable, and linear manner, it is determined that the mechanical device to be calibrated has no abnormalities such as mechanical jamming or loose parts. If the displacement data shows abrupt changes, no response, or deviates from the standard range, it is determined that the mechanical device to be calibrated has abnormalities such as mechanical jamming or loose parts that may affect calibration accuracy. The monitoring unit can stop the subsequent formal calibration process and output an abnormality prompt so that the operator can promptly check and resolve the fault of the mechanical device to be calibrated.

[0075] After the pre-test is passed, the monitoring unit controls the actuator to apply at least one known verification force, which has been internally self-calibrated, to the mechanical device to be calibrated. Simultaneously, it collects the displacement change parameters of the mechanical device to be calibrated under forced force and calculates the corresponding verification force. Finally, the diagnostic unit obtains the known verification force and verification force data stored in the monitoring unit, performs deviation calculation and accuracy judgment. If the deviation value meets the preset standard, the calibration is deemed qualified. If the deviation exceeds the threshold, the specific deviation data is output to determine the calibration result and complete the calibration process.

[0076] By applying a pre-testing verification force before formal calibration through the monitoring unit, abnormalities such as mechanical jamming or loose parts of the mechanical device to be calibrated can be detected in advance. This avoids invalid calibration under faulty conditions, ensuring the smooth progress of the formal calibration process from the source and improving the reliability and effectiveness of the calibration results. The monitoring unit controls the actuator to apply at least one known verification force and obtains the corresponding verification force. It supports the comparative analysis of multiple sets of force value data. Compared with single force value calibration, it can reduce the interference of random errors on the calibration results. At the same time, the diagnostic unit performs deviation calculation and accuracy judgment based on multiple sets of corresponding data, which can more accurately evaluate the force response characteristics of the mechanical device to be calibrated and further optimize the calibration accuracy.

[0077] Optionally, based on the above embodiments, the diagnostic unit is specifically used to calculate the force deviation sequence between the known verification force and the force to be verified, and to determine the calibration result based on the force deviation sequence.

[0078] In this embodiment of the invention, the force deviation sequence can be specifically understood as: a set of deviation data formed by calculating the deviation values ​​of multiple sets of known verification forces and their corresponding forces to be verified one by one, and arranging them in the order in which the force values ​​were applied.

[0079] Specifically, the diagnostic unit first receives multiple groups of known verification force and corresponding to-be-verified force data collected by the monitoring unit. According to the force value application order, it performs deviation calculations on each group of data to obtain the absolute value of the deviation of each group of force values, and integrates these deviation values in order to form a force deviation sequence. The diagnostic unit compares each deviation value in the deviation sequence with a preset accuracy threshold, and at the same time analyzes the change trend of the deviation sequence (such as calculating statistical parameters such as mean, variance or standard deviation, etc.). Finally, it determines the calibration result of the to-be-calibrated mechanical device according to the comparison result and trend characteristics. If all deviation values meet the standards and the sequence fluctuation is stable, it is determined that the calibration is qualified; if there is a situation where the deviation value exceeds the standard or the sequence trend is abnormal, it is determined that the calibration is unqualified, and specific deviation data and abnormal points are output to provide a basis for subsequent accuracy correction.

[0080] By calculating the force deviation sequence and determining the calibration result based on this sequence, the diagnostic unit can comprehensively capture the accuracy performance of the to-be-calibrated mechanical device under different force value conditions, avoid misjudgment caused by accidental errors in single tests, and at the same time, by analyzing the fluctuation trend of the deviation sequence, it can accurately identify whether there are potential problems such as accuracy drift or response non-linearity in the device, improving the determination accuracy and reliability of the calibration result; the force deviation sequence can completely record the deviation change trajectory of the to-be-calibrated mechanical device during the application of multiple groups of force values. Based on the trend feature analysis of this sequence, the diagnostic unit can locate the specific force value range or test stage with abnormal deviation, providing data support for the fault tracing and targeted accuracy correction of the to-be-calibrated mechanical device, and reducing the time cost of subsequent maintenance and debugging; the determination method based on the force deviation sequence establishes a standardized and quantifiable calibration evaluation system, avoiding the subjectivity of manual experience judgment, making the calibration judgment criteria of different batches and different models of MEMS test driving mechanisms consistent, and improving the standardization level of the MEMS device production test process; the force deviation sequence and trend analysis data can be stored and archived, providing a historical reference benchmark for subsequent periodic calibrations and enhancing the reuse value of the data.

[0081] Optionally, based on the above embodiments, the diagnostic unit is specifically used for at least one of the following functions: generating a correction coefficient for the to-be-calibrated mechanical device according to the force deviation sequence; triggering an alarm notification if the calibration result meets the alarm condition; feeding back the calibration result for updating the anomaly detection model.

[0082] In the embodiments of the present invention, the correction coefficient can be specifically understood as: a compensation parameter calculated based on the force deviation sequence, which is used to input the control algorithm of the to-be-calibrated mechanical device to correct the deviation between its force value output and the actual force. The anomaly detection model can be specifically understood as: an algorithm model used to predict the accuracy state of the to-be-calibrated mechanical device, which uses historical calibration data (such as force deviation sequences and calibration results) as training samples and completes iterative optimization by continuously inputting new data.

[0083] Specifically, in addition to determining the calibration results through the force deviation sequence, the diagnostic unit can also perform at least one of the following functions: generating correction coefficients, triggering alarm notifications, and updating the anomaly detection model.

[0084] If the force deviation sequence of the actuator to be calibrated is within the compensable range, the diagnostic unit generates corresponding correction coefficients based on the characteristic patterns of the deviation data through fitting calculations. These coefficients are then written into the control program of the actuator to correct the force output deviation in real time, achieving accuracy calibration. For example, the deviation values ​​between each known verification force and the force to be verified in the force deviation sequence are extracted. Combined with the range of applied force values, a mathematical model of how the deviation value changes with the force value is established through linear or nonlinear fitting calculations. Based on this mathematical model, a set of correction coefficients covering the full force value range is calculated, with each correction coefficient corresponding to a deviation compensation amount for a specific force value range. Finally, the diagnostic unit writes this set of correction coefficients into the control program of the actuator to be calibrated through a data interaction interface. When the actuator outputs a force value during subsequent MEMS device testing, its control system automatically matches the correction coefficient corresponding to the current force value range and performs real-time compensation correction on the original detected force value according to a preset compensation formula (e.g., actual output force value = detected force value + corresponding range correction coefficient), thereby offsetting the force output deviation and ensuring that the force accuracy of the actuator meets the requirements of MEMS device production testing.

[0085] If the calibration results meet the preset alarm conditions, such as the deviation value exceeding the accuracy threshold for MEMS device testing or the deviation sequence showing irregular abrupt changes or other abnormal trends, the diagnostic unit will immediately activate an audible and visual alarm or push a system message to remind the operator to inspect and maintain the device.

[0086] The diagnostic unit feeds back all data, including the force deviation sequence, calibration results, and fault type, to the background anomaly detection model. The model uses the new data as samples to complete parameter iteration, thereby improving its ability to predict anomalies in the accuracy of similar devices.

[0087] By generating correction coefficients based on the force deviation sequence and writing them into the control program of the mechanical device to be calibrated, real-time dynamic correction of force output deviation can be achieved. Compared with traditional manual debugging or component replacement, this method can accurately match the deviation characteristics of the device in different force ranges, improve the force control accuracy of the mechanical device to be calibrated, and ensure the accuracy of MEMS pressure sensor test data. When the calibration result meets the alarm conditions, an alarm notification is triggered, which can issue a warning when the mechanical device to be calibrated has abnormal problems, preventing faulty devices from continuing to participate in MEMS device production testing, reducing the product defect rate caused by equipment accuracy issues, and facilitating timely intervention by operators to reduce the time cost of troubleshooting. Feeding the calibration results back to the anomaly detection model and completing model updates can continuously enrich the model's training sample library, optimize the model's ability to identify and predict device accuracy anomalies, and enable the anomaly detection model to identify potential fault trends of the mechanical device to be calibrated in advance. This allows the MEMS device production line to upgrade from passive maintenance to preventive maintenance, improving the overall intelligent operation and maintenance level and operational stability of the production line. The integrated design eliminates the need for additional independent compensation equipment, alarm devices, and model training systems, achieving integrated management, simplifying the equipment configuration of the MEMS device production and testing process, and reducing the overall operation and maintenance cost of the production line.

[0088] Furthermore, based on the above embodiments, the calibration device for the actuating mechanism may further include:

[0089] A safety interlock module is used to stop the calibration operation when a fault condition is detected; the safety interlock unit includes a hardware watchdog timer circuit, which independently cuts off the power supply to the actuator when a threshold is violated; a user interface module is used to display the real-time value of the applied verification force and other test results; an alarm unit module is used to generate an alarm notification based on the calibration results; the alarm channel includes at least one of the following: a visual indicator, an audible alarm, and a remote electronic message; a software update module is used to feed the calibration results as samples back to the anomaly detection model, which is used to determine the abnormal condition of the mechanical device to be calibrated based on the force deviation sequence.

[0090] In this embodiment of the invention, the safety interlock module can be specifically understood as a safety protection component of the calibration device, which can trigger a stop to calibration in the event of a fault. The hardware monitoring timer circuit can independently cut off the actuator power supply to prevent hardware malfunction. The user interface module can be specifically understood as an interactive component used to display real-time verification force, test results, and system status information.

[0091] The alarm unit module can be understood as a component that pushes alarm notifications through channels such as vision (e.g., indicator lights), hearing (e.g., buzzers), or remote messages (e.g., system push notifications). The software update module can be understood as a model iteration component used to feed calibration results as samples back to the anomaly detection model, optimizing its ability to identify anomalies in MEMS test actuators.

[0092] Specifically, when the device detects a fault (such as “Threshold violation on Head #1” in the alarm log indicating an abnormal threshold of push head #1), the calibration operation is stopped through the safety interlock module: if the fault trigger threshold is violated (such as the force value exceeding the upper limit), the hardware monitoring timer circuit will independently cut off the power supply to the actuator (without relying on software control), forcibly terminating the actuator's action to avoid equipment damage or expansion of test errors.

[0093] The user interface module displays real-time data, such as dynamic data of the device's current operation (e.g., the real-time force value of push head 1 or 2), progress bars (green indicates safety), and system status or version in the real-time data area. The alarm log area displays calibration events, warning messages, and fault prompts, allowing operators to intuitively understand the device's operating status.

[0094] The alarm unit module triggers an alarm based on calibration results (such as "Force approaching upper threshold" indicating that the force value is close to the upper threshold, or "Threshold violation" indicating that the threshold is violated). It notifies personnel through visual indicators (progress bar color), audible alarms (such as beeps), and remote messages (such as push logs), covering early warning needs in multiple scenarios.

[0095] The software update module uses the force values, deviation sequences, and fault results from this calibration as samples and feeds them back to the anomaly detection model. The model iteratively optimizes itself based on this data, and can more accurately identify force deviation anomalies in MEMS test actuators in the future.

[0096] By combining a safety interlock module with an independent power-off design for software-based stop operation and a hardware monitoring timer circuit, dual protection is provided in case of failure. The hardware circuit can directly cut off the actuator power supply without relying on software response, avoiding equipment malfunction caused by software freezes, reducing the risk of device damage or MEMS device test scrapping due to fault escalation, and improving the safety and reliability of the calibration process. The user interface module displays the verification force value and test results in real time, allowing operators to intuitively grasp the equipment's operating status without manually querying background data. Combined with the multi-channel alarm of the alarm unit module, abnormal information can be quickly obtained, reducing the time cost of status confirmation and abnormal response, and adapting to the efficient operation rhythm of the MEMS production line. The multi-channel alarm of the alarm unit module covers both on-site operation and remote maintenance scenarios, avoiding the omission of abnormalities due to the failure of a single alarm channel, and ensuring the stable operation of the MEMS test drive mechanism. The software update module feeds back the calibration results to the abnormality detection model, continuously enriching the model's training samples, enabling the model to more accurately identify the abnormal types corresponding to the force deviation sequence, shifting the MEMS production line from post-maintenance to proactive preventive maintenance, and reducing production line downtime caused by equipment abnormalities.

[0097] Figure 4 This is a physical structural diagram of a calibration device for a pushing mechanism applicable to an embodiment of the present invention, as shown below. Figure 4 As shown, the actuator is mechanically connected to the force sensor, which in turn is mechanically connected to the push rod of the calibration actuator. The calibration actuator contains a mechanically connected mechanical calibration element (using a standard spring as an example) and the push rod. Simultaneously, the self-calibration module establishes signal connections with both the force sensor and the mechanical calibration element within the calibration actuator via signal lines. Understandably, the other end of the mechanical calibration element is fixed. When the actuator drives the push rod to apply force to this element, the fixed-end mechanical calibration element applies a reverse standard force to the push rod, thus providing a reference force value for self-calibration. The end of the push rod of the calibration actuator (the part currently in contact with the mechanical calibration element) can be replaced with the mechanical device to be calibrated. In this case, the actuator, force sensor, and calibration actuator will contact the mechanical device to be calibrated, thereby performing the corresponding test or calibration operation.

[0098] It is important to emphasize that high-precision force sensors are expensive and cannot be individually configured for each test actuator. Furthermore, even if sensors are used, drift issues can occur over long-term use, leading to decreased measurement accuracy and making it difficult to achieve stable and reliable force measurement directly from the sensors. The self-calibration design of this invention uses a mechanical calibration element as a stable internal reference, combined with a self-calibration module to complete closed-loop calibration: during self-calibration, the actuator drives the push rod to apply force to the mechanical calibration element, which provides a known standard force. The self-calibration module simultaneously acquires the force data detected by the force sensor and this standard force data, and determines the sensor's calibration coefficient by comparing the two, thereby correcting the sensor's drift error.

[0099] Furthermore, since the mechanical device to be calibrated (MEMS test actuator) cannot directly obtain the force value it applies, it needs to rely on an external calibration medium to achieve accuracy calibration. In this embodiment of the invention, the calibration device acts as a medium. It contacts the mechanical device to be calibrated through an actuator, a force sensor, and a calibration actuator. It controls the actuator to apply a known verification force, and then calculates the verification force based on the displacement change parameters of the device after being subjected to force. Finally, the calibration result is determined by comparing the known verification force with the verification force. Combining the self-calibration logic mentioned above, it corrects the error of its own sensor with a low-cost, drift-resistant internal mechanical calibration element as a benchmark, and can also serve as a reliable force value transmission medium. This solves the pain point that the mechanical device to be calibrated cannot measure the force autonomously. At the same time, it avoids the cost of equipping each device to be calibrated with a high-priced sensor, and can also continuously ensure the accuracy of the medium itself through self-calibration. Ultimately, it realizes batch, efficient, and low-cost calibration of MEMS test actuators, which meets the actual needs of large-scale production testing of MEMS devices.

[0100] The calibration device for the pushing mechanism in this embodiment of the invention includes an actuator, a force sensor, and a calibration pusher that are mechanically connected in sequence, enabling sequential force transmission. The calibration pusher includes a push rod and a mechanical calibration element that are mechanically connected. The mechanical calibration element is used to apply a known standard force. A self-calibration module is connected to the force sensor and the mechanical calibration element respectively. During the self-calibration process, when the actuator applies force to the calibration pusher, the module acquires the detected force data of the force sensor and the standard force data applied in the opposite direction by the mechanical calibration element to the push rod, and determines the calibration coefficient of the force sensor based on the comparison result of the detected force data and the standard force data. The sequential mechanical connection of the actuator, force sensor, and calibration actuator ensures a complete force transmission path, enabling all applied forces to be detected by the force sensor. Through the linkage of the self-calibration module, mechanical calibration elements, and force sensor, calibration coefficients are determined during actuator force application by comparing the standard force data applied in reverse by the mechanical calibration elements with the force data detected by the force sensor. This corrects drift errors in the force sensor, improves force detection accuracy, and prevents MEMS device test data distortion or device damage due to insufficient sensor precision. Simultaneously, the standard force provided by the mechanical calibration elements, combined with the self-calibration module, enables autonomous device calibration without relying on external standard tools or manual intervention. This reduces testing costs, simplifies the calibration process, lowers the operational threshold, reduces interference from the external environment on calibration results, and ensures calibration stability, reliability, and timeliness. Furthermore, the autonomous calibration function can be flexibly activated according to actual needs, promptly compensating for force sensor performance degradation, extending the effective lifespan of the device, and reducing time costs and downtime losses caused by frequent inspections or manual calibration, thereby improving the overall efficiency of MEMS testing.

[0101] Example 2

[0102] Figure 5 This is a flowchart of a mechanical device calibration method based on a calibration device according to Embodiment 2 of the present invention. This embodiment is applicable to the calibration of mechanical devices based on calibration devices. The method can be executed by a mechanical device calibration device based on a calibration device. This mechanical device calibration device can be implemented in hardware and / or software and is generally configured in an electronic device. Figure 5 As shown, the method includes:

[0103] S510. During the self-calibration process, through the self-calibration module, while the actuator applies force to the calibration pusher, the detection force data of the force sensor and the standard force data applied in the opposite direction by the mechanical calibration element to the push rod are acquired.

[0104] S520. The calibration coefficient of the force sensor is determined by the self-calibration module based on the comparison result between the detected force data and the standard force data.

[0105] Specifically, the self-calibration module can be used for the autonomous calibration function of the device's force sensor. During the self-calibration process, the actuator is first controlled to apply force to the calibration pusher. During this process, the raw detection force data output by the force sensor is acquired simultaneously. At the same time, the built-in mechanical calibration element is triggered to apply a preset high-precision standard force to the push rod in the opposite direction, and the standard force data is collected or calculated. By comparing the deviation value between the detection force data and the standard force data, and combining the deviation change law, the calibration coefficient of the force sensor is determined through fitting calculation. After writing the coefficient into the control program of the force sensor, the system error of the sensor's subsequent detection can be corrected, ensuring that its detection accuracy meets the technical requirements of MEMS pressure sensor testing.

[0106] The technical solution of this invention, through a self-calibration module, acquires the force sensor's detection force data and the standard force data applied in the opposite direction by the mechanical calibration element to the push rod during the self-calibration process, while the actuator applies force to the calibration pusher. The self-calibration module determines the calibration coefficient of the force sensor based on the comparison between the detection force data and the standard force data. This eliminates the need for external calibration tools or manual operation; the calibration coefficient is automatically determined by linking the actuator, force sensor, and mechanical calibration element through the self-calibration module, simplifying the calibration process, reducing reliance on professional operations, and improving calibration convenience and efficiency. Simultaneously acquiring the force sensor's detection force data and the standard force data from the mechanical calibration element during the actuator's force application allows for real-time capture of data changes during force transmission. The calibration coefficient determined by combining the comparison results effectively corrects the force sensor's drift error, improves force detection accuracy, and provides a reliable data foundation for subsequent force measurements. The self-calibration process can be initiated before each use of the device to promptly compensate for performance degradation of the force sensor due to wear and tear, environmental changes, etc., avoiding measurement deviations caused by the cumulative deterioration of sensor accuracy over time, and ensuring the stability of force detection during long-term use of the device.

[0107] Example 3

[0108] Figure 6 This is a flowchart of another mechanical device calibration method based on a calibration device provided in Embodiment 3 of the present invention. This embodiment is a refinement of the mechanical device calibration method based on a calibration device in the above embodiments. Figure 6 As shown, the method includes:

[0109] S610. During the self-calibration process, through the self-calibration module, while the actuator applies force to the calibration pusher, the detection force data of the force sensor and the standard force data applied in the opposite direction by the mechanical calibration element to the push rod are acquired.

[0110] S620. The calibration coefficient of the force sensor is determined by the self-calibration module based on the comparison result between the detected force data and the standard force data.

[0111] S630. During the calibration process, through the calibration operation module, the actuator is controlled to apply a known verification force to the mechanical device to be calibrated by contacting the mechanical device to be calibrated via the actuator, force sensor and calibration pusher.

[0112] S640. The calibration operation module obtains the force to be verified of the mechanical device to be calibrated, and determines the calibration result based on the known verification force and the force to be verified.

[0113] The force to be verified for the mechanical device to be calibrated is calculated and determined based on the displacement change parameters generated by the mechanical device. The mechanical device to be calibrated is a test drive mechanism in a MEMS device production testing system.

[0114] Specifically, the calibration operation module performs external calibration of the test actuator in the MEMS device production testing system. It controls the actuator, force sensor, and calibration actuator to work together and achieve stable contact with the test actuator to be calibrated. Then, it controls the actuator to apply a known verification force, calibrated by itself, to the test actuator, while simultaneously collecting the displacement change parameters generated by the forced displacement. Based on a preset mechanical conversion model, the displacement change parameters are converted into the force to be verified. Finally, by comparing the deviation values ​​and patterns between the known verification force and the force to be verified, the calibration result of the test actuator is determined.

[0115] Furthermore, based on the above embodiments, the mechanical device calibration method based on the calibration device may further include:

[0116] The actuator is controlled to apply a pre-testing force to the mechanical device to be calibrated, so as to perform a pre-calibration test on the mechanical device.

[0117] Specifically, the actuator applies a preset pre-test verification force to the test push mechanism to be calibrated, and simultaneously collects the displacement response data of the test push mechanism. By comparing the matching degree of the displacement data with the standard response range, the device is checked for abnormal problems such as mechanical jamming or loose parts that may affect the calibration accuracy, thereby completing the pre-calibration test of the device.

[0118] By controlling the actuator to apply a pre-testing force to the mechanical device to be calibrated and conducting pre-tests before formal calibration, basic anomalies such as mechanical jamming or loose parts of the mechanical device to be calibrated can be detected in advance. This avoids performing invalid calibration when the device is faulty, ensuring the smooth progress of the formal calibration process from the source and improving the validity and reliability of the calibration results. Identifying faulty devices in advance and suspending calibration can avoid additional damage to the device to be calibrated or the calibration equipment caused by continuing to apply force under faulty conditions, extending the service life of the equipment, and reducing the cost of component damage caused by forced calibration.

[0119] Optionally, based on the above embodiments, obtaining the force to be verified of the mechanical device to be calibrated, and determining the calibration result based on the known verification force and the force to be verified, may include:

[0120] The actuator is controlled to apply at least one known verification force to the mechanical device to be calibrated, and the verification force of the mechanical device to be calibrated is obtained at least once accordingly; the force deviation sequence between the known verification force and the verification force is calculated, and the calibration result is determined based on the force deviation sequence.

[0121] Specifically, the actuator applies at least one known verification force to the mechanical device to be calibrated and acquires at least one verification force accordingly. For example, multiple sets of known verification forces with different gradients are applied. During each set of force application, the displacement change parameters of the mechanical device to be calibrated are collected simultaneously, and the verification force of the corresponding group is calculated according to the preset mechanical conversion model.

[0122] According to the order of force application, deviation calculations are performed on each set of known verification forces and forces to be verified, generating a force deviation sequence containing multiple sets of deviation data. By analyzing characteristics such as whether each deviation value in the force deviation sequence is within a preset accuracy threshold or whether the fluctuation trend of the deviation sequence is stable, the calibration result of the test drive mechanism is determined.

[0123] By applying at least one known verification force to the mechanical device to be calibrated through a controlled actuator and acquiring the corresponding verification force, then calculating the force deviation sequence and determining the calibration result accordingly, the accuracy performance of the mechanical device under different stress conditions can be covered. Compared with single-force application judgment, this avoids the interference of random errors on the calibration results. At the same time, the force deviation sequence generated based on multiple sets of data can completely present the accuracy change law of the device in the full force range, improving the comprehensiveness and reliability of the calibration judgment. The force deviation sequence records the deviation data of the device in different stress stages. By analyzing the fluctuation trend and abnormal nodes of the sequence, the accuracy defects or mechanical faults of the device in specific force ranges can be located, providing quantitative data support for targeted maintenance and accuracy compensation of the mechanical device to be calibrated, reducing the time cost of fault diagnosis. It avoids the subjectivity of human experience judgment, ensuring that the calibration judgment standards of MEMS testing and promotion mechanisms are consistent across different batches and models, and improving the standardization level of MEMS device production and testing processes. The force deviation sequence and the corresponding calibration results can be stored and archived, providing historical reference benchmarks for subsequent periodic calibrations and enhancing the reuse value of the data.

[0124] Optionally, based on the above embodiments, determining the calibration result according to the force deviation sequence may include at least one of the following:

[0125] The force deviation sequence is used to generate correction coefficients for the mechanical device to be calibrated, which are then used as calibration results. The calibration results are determined based on the force deviation sequence. If the calibration results meet the alarm conditions, an alarm notification is triggered. The calibration results are then fed back to update the anomaly detection model.

[0126] Specifically, based on the deviation characteristics and variation patterns of the force deviation sequence, a correction coefficient suitable for the drive mechanism to be calibrated is generated through fitting calculations. This correction coefficient is then directly used as the calibration result and written into the device control program to correct the force output deviation in real time. The device's accuracy status is analyzed based on the force deviation sequence. If the determined calibration result meets the alarm conditions (such as the deviation value exceeding the MEMS device test accuracy threshold or a sudden change in the deviation sequence), an alarm notification is immediately triggered. The calibration result is determined based on the force deviation sequence, and all data, including the force deviation sequence and calibration result, are fed back to the anomaly detection model. By enriching the model's training samples, parameter iteration is completed, thereby improving the model's ability to predict accuracy anomalies in similar test drive mechanisms.

[0127] The correction coefficients generated based on the force deviation sequence can accurately match the deviation characteristics of the mechanical device to be calibrated in different force ranges. Compared with the traditional single compensation parameter, it can achieve dynamic accuracy correction under all working conditions, improve the force control accuracy of the MEMS test push mechanism, and ensure the accuracy of MEMS pressure sensor test data. The calibration result is determined according to the force deviation sequence and an alarm notification is triggered when the alarm conditions are met. It can quickly identify faults such as device accuracy exceeding the standard or abnormal deviation fluctuations, avoid faulty devices from participating in MEMS device production testing, reduce product defect rate, and facilitate timely intervention and maintenance by operators, reducing the time cost of fault diagnosis. The calibration results based on the force deviation sequence are fed back to the anomaly detection model for updating, which can continuously enrich the model's training sample library, optimize the model's ability to identify device anomaly patterns, and enable it to capture potential fault trends of the mechanical device to be calibrated in advance, improving the overall operational stability of the production line. This integrated design eliminates the need for additional independent compensation equipment, early warning devices, and model training systems, realizing integrated management, simplifying the equipment configuration of the MEMS device production testing process, and reducing the overall operation and maintenance cost of the production line.

[0128] The technical solution of this invention, through a self-calibration module, acquires the detected force data of the force sensor and the standard force data applied in the opposite direction by the mechanical calibration element to the push rod during the self-calibration process, while the actuator applies force to the calibration pusher. The self-calibration module then determines the calibration coefficient of the force sensor based on the comparison between the detected force data and the standard force data. Through a calibration operation module, during the calibration process involving the actuator, force sensor, and calibration pusher contacting the mechanical device to be calibrated, the actuator is controlled to apply a known verification force to the device. The calibration operation module obtains the force to be verified for the mechanical device and determines the calibration result based on the known verification force and the force to be verified. By directly contacting the actuator, force sensor, and calibration actuator with the actuator to be calibrated, the system applies force for calibration, meeting the high-precision force requirements of micro-Newton to milli-Newton levels needed for MEMS testing. This avoids calibration deviations caused by insufficient adaptability of general calibration methods. The calibration operation module controls the actuator to apply a known verification force, while simultaneously calculating the verification force based on the displacement change parameters of the actuator. The calibration result is then determined by comparing the known verification force with the verification force, quantifying the force output error of the actuator. This allows for precise calibration of test actuators on the production line, timely detection of abnormal force output caused by wear, drift, or other issues, and prevention of MEMS device damage or test data distortion due to insufficient actuator precision, thus improving production yield. Furthermore, the calibration process is carried out systematically based on the modular design of the calibration device, with standardized and controllable operation procedures, balancing calibration accuracy and production efficiency, and improving the stability of large-scale MEMS device production.

[0129] Example 4

[0130] Figure 7 This is a schematic diagram of the structure of a mechanical device calibration device based on a calibration apparatus, provided in Embodiment 4 of the present invention. Figure 7 As shown, the device includes: a standard data submodule 710 and a calibration coefficient submodule 720, wherein:

[0131] The standard data submodule 710 is used to acquire the force data detected by the force sensor and the standard force data applied in the opposite direction by the mechanical calibration element to the push rod during the self-calibration process, when the actuator applies force to the calibration pusher.

[0132] The calibration coefficient submodule 720 is used to determine the calibration coefficient of the force sensor based on the comparison result of the detected force data and the standard force data through the self-calibration module.

[0133] The technical solution of this invention, through a self-calibration module, acquires the force sensor's detection force data and the standard force data applied in the opposite direction by the mechanical calibration element to the push rod during the self-calibration process, while the actuator applies force to the calibration pusher. The self-calibration module determines the calibration coefficient of the force sensor based on the comparison between the detection force data and the standard force data. This eliminates the need for external calibration tools or manual operation; the calibration coefficient is automatically determined by linking the actuator, force sensor, and mechanical calibration element through the self-calibration module, simplifying the calibration process, reducing reliance on professional operations, and improving calibration convenience and efficiency. Simultaneously acquiring the force sensor's detection force data and the standard force data from the mechanical calibration element during the actuator's force application allows for real-time capture of data changes during force transmission. The calibration coefficient determined by combining the comparison results effectively corrects the force sensor's drift error, improves force detection accuracy, and provides a reliable data foundation for subsequent force measurements. The self-calibration process can be initiated before each use of the device to promptly compensate for performance degradation of the force sensor due to wear and tear, environmental changes, etc., avoiding measurement deviations caused by the cumulative deterioration of sensor accuracy over time, and ensuring the stability of force detection during long-term use of the device.

[0134] Furthermore, based on the above embodiments, the mechanical device calibration device based on the calibration device may further include: an application of known force submodule and a calibration submodule, wherein:

[0135] The known force application submodule is used to control the actuator to apply a known verification force to the mechanical device to be calibrated during the calibration process, through the calibration operation module, when the actuator, force sensor and calibration pusher contact the mechanical device to be calibrated.

[0136] The calibration submodule is used to obtain the verification force of the mechanical device to be calibrated through the calibration operation module, and determine the calibration result based on the known verification force and the verification force; wherein, the verification force of the mechanical device to be calibrated is calculated based on the displacement change parameters generated by the mechanical device to be calibrated; wherein, the mechanical device to be calibrated is a test push mechanism in a MEMS device production test system.

[0137] Furthermore, based on the above embodiments, the mechanical device calibration device based on the calibration device may further include: a pre-test submodule, wherein:

[0138] The pre-test submodule is used to control the actuator to apply a pre-test verification force to the mechanical device to be calibrated, so as to perform a pre-calibration test on the mechanical device to be calibrated.

[0139] Based on the above embodiments, the calibration submodule is specifically used for:

[0140] The actuator is controlled to apply at least one known verification force to the mechanical device to be calibrated, and the verification force of the mechanical device to be calibrated is obtained at least once accordingly; the force deviation sequence between the known verification force and the verification force is calculated, and the calibration result is determined based on the force deviation sequence.

[0141] Based on the above embodiments, the calibration submodule is further used for at least one of the following:

[0142] The force deviation sequence is used to generate correction coefficients for the mechanical device to be calibrated, which are then used as calibration results. The calibration results are determined based on the force deviation sequence. If the calibration results meet the alarm conditions, an alarm notification is triggered. The calibration results are then fed back to update the anomaly detection model.

[0143] The mechanical device calibration device based on the calibration device provided in the embodiments of the present invention can execute the mechanical device calibration method based on the calibration device provided in any embodiment of the present invention, and has the corresponding functional modules and beneficial effects of executing the method.

[0144] The collection, storage, use, processing, transmission, provision, and disclosure of user personal information involved in the technical solution disclosed herein comply with the provisions of relevant laws and regulations and do not violate public order and good morals.

[0145] Example 5

[0146] Figure 8A schematic diagram of an electronic device 10, which can be used to implement embodiments of the present invention, is shown. The electronic device is intended to represent various forms of digital computers, such as laptop computers, desktop computers, workstations, personal digital assistants, servers, blade servers, mainframe computers, and other suitable computers. The electronic device can also represent various forms of mobile devices, such as personal digital processors, cellular phones, smartphones, wearable devices (e.g., helmets, glasses, watches, etc.), and other similar computing devices. The components shown herein, their connections and relationships, and their functions are merely illustrative and are not intended to limit the implementation of the invention described and / or claimed herein.

[0147] like Figure 8 As shown, the electronic device 10 includes at least one processor 11 and a memory, such as a read-only memory (ROM) 12 or a random access memory (RAM) 13, communicatively connected to the at least one processor 11. The memory stores computer programs executable by the at least one processor. The processor 11 can perform various appropriate actions and processes based on the computer program stored in the ROM 12 or loaded from storage unit 18 into the RAM 13. The RAM 13 can also store various programs and data required for the operation of the electronic device 10. The processor 11, ROM 12, and RAM 13 are interconnected via a bus 14. An input / output (I / O) interface 15 is also connected to the bus 14.

[0148] Multiple components in electronic device 10 are connected to I / O interface 15, including: input unit 16, such as keyboard, mouse, etc.; output unit 17, such as various types of displays, speakers, etc.; storage unit 18, such as disk, optical disk, etc.; and communication unit 19, such as network card, modem, wireless transceiver, etc. Communication unit 19 allows electronic device 10 to exchange information / data with other devices through computer networks such as the Internet and / or various telecommunications networks.

[0149] Processor 11 can be a variety of general-purpose and / or special-purpose processing components with processing and computing capabilities. Some examples of processor 11 include, but are not limited to, a central processing unit (CPU), a graphics processing unit (GPU), various special-purpose artificial intelligence (AI) computing chips, various processors running machine learning model algorithms, a digital signal processor (DSP), and any suitable processor, controller, microcontroller, etc. Processor 11 performs the various methods and processes described above, such as the mechanical device calibration method based on the calibration device, i.e.:

[0150] The self-calibration module acquires the force sensor's detection force data and the standard force data applied in the opposite direction by the mechanical calibration element to the push rod during the self-calibration process, while the actuator applies force to the calibration pusher. The self-calibration module then determines the calibration coefficient of the force sensor based on the comparison between the detection force data and the standard force data.

[0151] In some embodiments, the mechanical device calibration method based on the calibration device can be implemented as a computer program tangibly contained in a computer-readable storage medium, such as storage unit 18. In some embodiments, part or all of the computer program can be loaded and / or installed on electronic device 10 via ROM 12 and / or communication unit 19. When the computer program is loaded into RAM 13 and executed by processor 11, one or more steps of the mechanical device calibration method based on the calibration device described above can be performed. Alternatively, in other embodiments, processor 11 can be configured to perform the mechanical device calibration method based on the calibration device by any other suitable means (e.g., by means of firmware).

[0152] Various embodiments of the systems and techniques described above herein can be implemented in digital electronic circuit systems, integrated circuit systems, field-programmable gate arrays (FPGAs), application-specific integrated circuits (ASICs), application-specific standard products (ASSPs), systems-on-a-chip (SoCs), payload-programmable logic devices (CPLDs), computer hardware, firmware, software, and / or combinations thereof. These various embodiments may include implementations in one or more computer programs that can be executed and / or interpreted on a programmable system including at least one programmable processor, which may be a dedicated or general-purpose programmable processor, capable of receiving data and instructions from a storage system, at least one input device, and at least one output device, and transmitting data and instructions to the storage system, the at least one input device, and the at least one output device.

[0153] Computer programs used to implement the methods of the present invention may be written in any combination of one or more programming languages. These computer programs may be provided to a processor of a general-purpose computer, a special-purpose computer, or other programmable data processing device, such that when executed by the processor, the computer programs cause the functions / operations specified in the flowcharts and / or block diagrams to be performed. The computer programs may be executed entirely on a machine, partially on a machine, or as a standalone software package, partially on a machine and partially on a remote machine, or entirely on a remote machine or server.

[0154] In the context of this invention, a computer-readable storage medium can be a tangible medium that may contain or store a computer program for use by or in conjunction with an instruction execution system, apparatus, or device. A computer-readable storage medium may include, but is not limited to, electronic, magnetic, optical, electromagnetic, infrared, or semiconductor systems, apparatus, or devices, or any suitable combination thereof. Alternatively, a computer-readable storage medium may be a machine-readable signal medium. More specific examples of machine-readable storage media include electrical connections based on one or more wires, portable computer disks, hard disks, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM or flash memory), optical fibers, portable compact disk read-only memory (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination thereof.

[0155] To provide interaction with a user, the systems and techniques described herein can be implemented on an electronic device having: a display device (e.g., a CRT (cathode ray tube) or LCD (liquid crystal display) monitor) for displaying information to the user; and a keyboard and pointing device (e.g., a mouse or trackball) through which the user provides input to the electronic device. Other types of devices can also be used to provide interaction with the user; for example, feedback provided to the user can be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user can be received in any form (including sound input, voice input, or tactile input).

[0156] The systems and technologies described herein can be implemented in computing systems that include backend components (e.g., as data servers), or middleware components (e.g., application servers), or frontend components (e.g., user computers with graphical user interfaces or web browsers through which users can interact with implementations of the systems and technologies described herein), or any combination of such backend, middleware, or frontend components. The components of the system can be interconnected via digital data communication of any form or medium (e.g., communication networks). Examples of communication networks include local area networks (LANs), wide area networks (WANs), blockchain networks, and the Internet.

[0157] A computing system can include clients and servers. Clients and servers are generally located far apart and typically interact through communication networks. The client-server relationship is created by computer programs running on the respective computers and having a client-server relationship with each other. The server can be a cloud server, also known as a cloud computing server or cloud host, which is a hosting product within the cloud computing service system to address the shortcomings of traditional physical hosts and VPS services, such as high management difficulty and weak business scalability.

[0158] It should be understood that the various forms of processes shown above can be used, with steps reordered, added, or deleted. For example, the steps described in this invention can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution of this invention can be achieved, and this is not limited herein.

[0159] The specific embodiments described above do not constitute a limitation on the scope of protection of this invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention should be included within the scope of protection of this invention.

Claims

1. A calibration device for a driving mechanism, characterized in that, The calibration device includes: A sequentially mechanically connected actuator, force sensor, and calibration actuator are capable of sequentially transmitting force. The calibration actuator includes a mechanically connected push rod and a mechanical calibration element, the mechanical calibration element being used to apply a known standard force. The self-calibration module is connected to the force sensor and the mechanical calibration element respectively. During the self-calibration process, when the actuator applies force to the calibration pusher, it acquires the detected force data of the force sensor and the standard force data applied in the opposite direction by the mechanical calibration element to the push rod, and determines the calibration coefficient of the force sensor based on the comparison result of the detected force data and the standard force data.

2. The apparatus according to claim 1, characterized in that, The mechanical calibration element is: A standard spring, wherein the deformation of the standard spring has a standard correspondence with the force applied, and the deformation is used to characterize the standard force data applied by the standard spring; or A standard magnetic device, wherein the magnetic gap of the standard magnetic device has a standard correspondence with the force, and the magnetic gap is used to characterize the standard force data applied by the standard magnetic device.

3. The apparatus according to claim 1, characterized in that, The actuator is a piezoelectric stack or a voice coil motor, used to convert electrical energy into force.

4. The apparatus according to claim 1, characterized in that, The calibration device is a portable calibration equipment.

5. The apparatus according to any one of claims 1-4, characterized in that, The self-calibration module is also used to perform zero-point adjustment on the force sensor when the self-calibration process begins.

6. The apparatus according to any one of claims 1-4, characterized in that, The self-calibration module is also used to initiate the self-calibration process when the following triggering conditions occur: power-on event, a set time interval, the number of calibrations completed, and drift in the detection result of the force sensor.

7. The apparatus according to any one of claims 1-4, characterized in that, Also includes: The calibration operation module is used to control the actuator to apply a known verification force to the mechanical device to be calibrated during the calibration process, in which the actuator, force sensor, and calibration pusher contact the mechanical device to be calibrated, to obtain the verification force of the mechanical device to be calibrated, and to determine the calibration result based on the known verification force and the verification force; wherein, the verification force of the mechanical device to be calibrated is calculated and determined based on the displacement change parameters generated by the mechanical device to be calibrated; The mechanical device to be calibrated is a test push mechanism in a MEMS device production and testing system.

8. The apparatus according to claim 7, characterized in that, The calibration operation module includes: The monitoring unit is used to control the actuator to apply a pre-test verification force to the mechanical device to be calibrated, so as to perform a pre-calibration test on the mechanical device to be calibrated. The monitoring unit is also used to control the actuator to apply at least one known verification force to the mechanical device to be calibrated, and correspondingly obtain at least one verification force of the mechanical device to be calibrated; The diagnostic unit is used to determine the calibration result based on the corresponding known verification force and the force to be verified.

9. The apparatus according to claim 8, characterized in that, The diagnostic unit is specifically used to calculate the force deviation sequence between the known verification force and the force to be verified, and to determine the calibration result based on the force deviation sequence.

10. The apparatus according to claim 9, characterized in that, The diagnostic unit is specifically used for at least one of the following functions: Correction coefficients for the mechanical device to be calibrated are generated based on the force deviation sequence; If the calibration result meets the alarm conditions, an alarm notification is triggered; The calibration results are fed back to update the anomaly detection model.

11. The apparatus according to claim 8, characterized in that, The device further includes: A safety interlock module is used to stop the calibration operation when a fault condition is detected; the safety interlock unit includes a hardware monitoring timer circuit that independently cuts off the power supply to the actuator when a threshold is violated; A user interface module for displaying the real-time value of the applied verification force and other test results; An alarm unit module is used to generate alarm notifications based on calibration results; the alarm channels include at least one of the following: a visual indicator, an auditory alarm, and a remote electronic message; The software update module is used to feed the calibration results as samples back to the anomaly detection model, which is used to determine the abnormal conditions of the mechanical device to be calibrated based on the force deviation sequence.

12. A calibration method for a mechanical device based on a calibration apparatus, characterized in that, The calibration device is the calibration device for the driving mechanism according to any one of claims 1-11, and the method includes: Through the self-calibration module, during the self-calibration process, while the actuator applies force to the calibration pusher, the detection force data of the force sensor and the standard force data applied in the opposite direction by the mechanical calibration element to the push rod are acquired. The calibration coefficient of the force sensor is determined by the self-calibration module based on the comparison results between the detected force data and the standard force data.

13. The method according to claim 12, characterized in that, Also includes: Through the calibration operation module, during the calibration process, the actuator is controlled to apply a known verification force to the mechanical device to be calibrated by contacting the mechanical device to be calibrated through the actuator, force sensor and calibration pusher; The calibration operation module obtains the force to be verified for the mechanical device to be calibrated, and determines the calibration result based on the known verification force and the force to be verified; wherein, the force to be verified for the mechanical device to be calibrated is calculated and determined based on the displacement change parameters generated by the mechanical device to be calibrated. The mechanical device to be calibrated is a test push mechanism in a MEMS device production and testing system.

14. The method according to claim 13, characterized in that, Also includes: The actuator is controlled to apply a pre-testing force to the mechanical device to be calibrated, so as to perform a pre-calibration test on the mechanical device.

15. The method according to claim 13, characterized in that, Obtaining the force to be verified for the mechanical device to be calibrated, and determining the calibration result based on the known verification force and the force to be verified, includes: The actuator is controlled to apply at least one known verification force to the mechanical device to be calibrated, and the verification force of the mechanical device to be calibrated is obtained at least once accordingly; Calculate the force deviation sequence between the known verification force and the force to be verified, and determine the calibration result based on the force deviation sequence.

16. The method according to claim 15, characterized in that, The calibration result determined based on the force deviation sequence includes at least one of the following: Based on the force deviation sequence, correction coefficients are generated for the mechanical device to be calibrated, which are then used as the calibration result. The calibration result is determined based on the force deviation sequence. If the calibration result meets the alarm conditions, an alarm notification is triggered. The calibration result is determined based on the force deviation sequence, and the calibration result is fed back to update the anomaly detection model.

17. A mechanical device calibration device based on a calibration apparatus, characterized in that, The calibration device is the calibration device for the pushing mechanism according to any one of claims 1-11, and the mechanical device calibration device based on the calibration device includes: The standard data submodule is used to acquire the force data detected by the force sensor and the standard force data applied in the opposite direction by the mechanical calibration element to the push rod during the self-calibration process, when the actuator applies force to the calibration pusher. The calibration coefficient submodule is used to determine the calibration coefficient of the force sensor based on the comparison result between the detected force data and the standard force data through the self-calibration module.

18. An electronic device, characterized in that, The electronic device includes: At least one processor; and a memory communicatively connected to the at least one processor; wherein the memory stores a computer program executable by the at least one processor, the computer program being executed by the at least one processor to enable the at least one processor to perform the mechanical device calibration method based on the calibration device according to any one of claims 12-16.

19. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores computer instructions that, when executed by a processor, implement the mechanical device calibration method based on a calibration device as described in any one of claims 12-16.

20. A computer program product, characterized in that, The computer program product includes a computer program that, when executed by a processor, implements the mechanical device calibration method based on a calibration device according to any one of claims 12-16.

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