Turntable and bonding apparatus

Abstract

This application relates to a transfer station and bonding equipment, and pertains to the field of semiconductor packaging technology. The transfer station includes a first base, a rotary drive, and a platform assembly. The rotary drive is disposed on the first base. The platform assembly includes a second base and a platform. The second base is connected to the drive end of the rotary drive, and the platform is disposed on the second base. The platform includes at least a first platform and a second platform distributed around a rotation axis of the rotary drive. The first and second platforms are respectively used to carry different products. The rotary drive is used to drive the second base to rotate, thereby moving one of the platforms to a preset position and adjusting the platform at the preset position to a preset angle. This application can improve upon the problems of existing transfer stations, such as large space occupation, reduced production capacity, and high costs.

Description

Technical Field

[0001] This application relates to the field of semiconductor packaging technology, and in particular to a transfer station and bonding equipment. Background Technology

[0002] In the manufacturing process of optical communication modules, different turntables are required for die bonding or eutectic bonding of different types of optical module components. Typically, multiple rotary motors are arranged at the turntable station, each with an independently configured different platform to meet diverse product requirements. Among these, high-precision angle correction motors are used to correct the angles of the products on the platform.

[0003] However, such an arrangement will occupy the space of the equipment; and increase the stroke of the loading and unloading shafts, which will lengthen the loading and unloading time and reduce the production capacity of the equipment; at the same time, it will greatly increase the manufacturing cost of the equipment. Summary of the Invention

[0004] Therefore, it is necessary to provide a transfer station and bonding equipment to address the problems of existing transfer stations occupying large spaces, reducing production capacity, and incurring high costs.

[0005] To achieve the above objectives, the technical solution adopted in this application is as follows:

[0006] In a first aspect, embodiments of this application provide a transfer station, including:

[0007] First base;

[0008] A rotary drive component is disposed on the first base; and

[0009] The platform component includes a second base and at least two platforms. The second base is connected to the drive end of the rotary drive component. The at least two platforms are all disposed on the second base and distributed around the rotation axis of the rotary drive component. The at least two platforms are used to support different products.

[0010] The rotary drive is used to drive the second base to rotate, thereby moving one of the platforms to a preset position and adjusting the platform at the preset position to a preset angle.

[0011] In one embodiment of the first aspect, the transfer station further includes an air passage assembly disposed on the first base, the air passage assembly having a first air passage, one end of the first air passage opening toward the platform assembly and offset from the rotation axis of the rotary drive member;

[0012] The second base is provided with a second air passage that corresponds to the platform. One end of the second air passage opens towards the air passage assembly and is offset from the rotation axis of the rotary drive. The platform is provided with a vacuum hole, which communicates with the other end opening of the corresponding second air passage.

[0013] The rotary drive is used to drive the second base to rotate relative to the airway assembly, so that the first airway can be selectively connected to the second airway.

[0014] In one embodiment of the first aspect, the airway assembly includes:

[0015] A bracket is mounted on the first base;

[0016] A floating shaft, on which the first air passage is provided, is slidably disposed on the bracket along the rotation axis direction of the rotating drive component;

[0017] A trachea, connected to the end of the floating shaft away from the platform assembly, and in communication with the first airway; and

[0018] A lifting member is disposed on the bracket and is used to drive the floating shaft to abut against the second base.

[0019] In one embodiment of the first aspect, a first positioning pin is provided on the first base, and the first positioning pin is inserted into the bracket.

[0020] In one embodiment of the first aspect, the bracket is provided with a guide groove that extends along the rotation axis of the rotary drive member;

[0021] The floating shaft is provided with a guide part, which is slidably disposed in the guide groove.

[0022] In one embodiment of the first aspect, the lifting member includes a spring that elastically abuts against the floating shaft on the side opposite to the second base along the rotation axis of the rotary drive member.

[0023] In one embodiment of the first aspect, the platform includes a first platform, a second platform, a third platform and / or a fourth platform, the first platform, the second platform, the third platform and / or the fourth platform being distributed around the rotation axis of the rotary drive and used to carry different products;

[0024] The first platform is black, the second platform is white, the third platform is made of non-metallic material, and the fourth platform is larger than the first platform.

[0025] In one embodiment of the first aspect, a plurality of first adjusting members are provided on the first base, the plurality of first adjusting members are distributed along the circumference of the first base, the first adjusting members pass through the first base and are threadedly engaged with the first base.

[0026] In one embodiment of the first aspect, a plurality of second adjusting members are provided on the second base, the plurality of second adjusting members are distributed along the circumference of the second base, the second adjusting members pass through the second base and are threadedly engaged with the second base, and the second adjusting members abut against the driving end of the rotary drive member.

[0027] Secondly, embodiments of this application also provide a bonding device, including the transfer station described in any of the above embodiments.

[0028] Compared to related technologies, the advantages of this application are as follows: In the aforementioned transfer station, at least two platforms are provided on the second base, and each platform carries a different product. In use, a rotary drive unit drives the second base to rotate, moving any one platform to a preset position for transferring the product on that platform. Furthermore, before transferring the product, the rotary drive unit also drives the second base to rotate, adjusting the platform at the preset position to a preset angle, thereby correcting the angle of the product on that platform. Thus, the aforementioned transfer station can achieve the transfer and correction of multiple different products using a single rotary drive unit, meeting diverse product needs. It occupies less equipment space and reduces the stroke of the loading and unloading shafts, thereby shortening loading and unloading time, increasing equipment capacity, and effectively reducing equipment manufacturing costs. Attached Figure Description

[0029] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0030] Figure 1 This is a schematic diagram of the structure of the transfer station in some embodiments of this application;

[0031] Figure 2 This is an exploded view of the transfer station in some embodiments of this application;

[0032] Figure 3 This is a schematic diagram of the platform structure in some embodiments of this application;

[0033] Figure 4 This is a schematic diagram of the structure of the platform components in some embodiments of this application;

[0034] Figure 5 This is an exploded view of the platform components in some embodiments of this application;

[0035] Figure 6 This is a schematic diagram of the airway assembly in some embodiments of this application;

[0036] Figure 7 This is an exploded schematic diagram of the airway assembly in some embodiments of this application.

[0037] Explanation of reference numerals in the attached figures:

[0038] 100. First base; 110. First adjusting component; 120. First fastening bolt; 130. First spring washer; 140. First positioning pin; 200. Rotation drive component; 210. Second fastening bolt; 300. Platform assembly; 310. Second base; 311. Second adjusting component; 312. Pad; 313. Support component; 314. Third fastening bolt; 315. Second spring washer; 316. Second positioning pin; 317. Second air passage; 318. Filter element; 320, Platform; 321, First platform; 322, Second platform; 323, Third platform; 324, Fourth platform; 325, Fourth fastening bolt; 326, Vacuum hole; 400, Air passage assembly; 410, Bracket; 411, Fifth fastening bolt; 412, Guide groove; 420, Floating shaft; 421, First air passage; 422, Guide part; 430, Air pipe; 440, Lifting component; 450, Air pipe connector; 460, Clamp. Detailed Implementation

[0039] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0040] In the description of this application, it should be understood that if terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" appear, these terms indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0041] Furthermore, where the term "and / or" appears, "and / or" merely describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, or B existing alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship. Where the terms "first" and "second" appear, these terms are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, features defined with "first" or "second" can explicitly or implicitly include at least one of those features. In the description of this application, where the term "multiple" appears, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0042] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0043] In this application, unless otherwise expressly specified and limited, the use of descriptions such as "above" or "below" the second feature indicates that the first and second features are in direct contact or indirect contact via an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. Similarly, "below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0044] It should be noted that if an element is referred to as being "fixed to" or "set on" another element, it can be directly on the other element or there may be an intervening element. If an element is considered to be "connected to" another element, it can be directly connected to the other element or there may be an intervening element. If so, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and similar expressions used in this application are for illustrative purposes only and do not represent the only possible implementation.

[0045] In the manufacturing process of optical communication modules, a transfer station is needed for die bonding or eutectic bonding of optical module components. These components come in many types, including PDs (photodetectors), TIAs (trans-impedance amplifiers), ceramic substrates, ISOs (isolated devices), capacitors, optical glass, and spacers. However, the dimensions of these components vary significantly. Furthermore, the required visual background for CCD vision calibration on the transfer station also differs; for example, PDs require a black background, while TIAs require a white background. Additionally, ISOs are magnetic and sensitive to metallic materials, necessitating the use of anti-static ceramic materials for the transfer station.

[0046] Therefore, different sizes and backgrounds of transfer tables are needed when performing die bonding or eutectic bonding on different types of optical module components. Typically, multiple rotary motors are arranged at the transfer table station, each with an independently configured different platform to meet diverse product requirements. Among these, the rotary motors employ high-precision angle correction motors to adjust the angles of the products on the platform.

[0047] However, such an arrangement will occupy the space of the equipment; and increase the stroke of the loading and unloading shafts, which will lengthen the loading and unloading time and reduce the production capacity of the equipment; at the same time, it will greatly increase the manufacturing cost of the equipment.

[0048] Therefore, embodiments of this application provide a relay station for relaying and correcting multiple products during optical communication bonding processes, and it can also be used in multi-product bonding processes in other industries.

[0049] Please refer to the following: Figure 1 and Figure 2 The transfer station includes a first base 100, a rotary drive 200, and a platform assembly 300.

[0050] The rotary drive 200 is disposed on the first base 100.

[0051] The platform assembly 300 includes a second base 310 and at least two platforms 320. The second base 310 is connected to the drive end of the rotary drive 200. The at least two platforms 320 are each disposed on the second base 310 and distributed around the rotation axis of the rotary drive 200, and the at least two platforms 320 are used to support different products.

[0052] The rotary drive 200 is used to drive the second base 310 to rotate, thereby moving one of the platforms 320 to a preset position and adjusting the platform 320 in the preset position to a preset angle.

[0053] In the aforementioned transfer station, at least two platforms 320 are provided on the second base 310, and each platform 320 carries a different product. In use, the rotary drive 200 drives the second base 310 to rotate, moving any one of the platforms 320 to a preset position for transferring the product on that platform 320. Furthermore, before transferring the product, the rotary drive 200 also drives the second base 310 to rotate, adjusting the platform 320 at the preset position to a preset angle, thereby correcting the angle of the product on that platform 320. Thus, the aforementioned transfer station, using a single rotary drive 200, can achieve the transfer and correction of multiple different products, meeting diverse product needs. It occupies less equipment space and reduces the stroke of the loading and unloading shafts, thereby shortening loading and unloading time, increasing equipment capacity, and effectively reducing manufacturing costs.

[0054] For example, there are six platforms 320, which can carry up to six different products. The second base 310 is rotated by the rotary drive 200, which moves any one of the platforms 320 to a preset position, that is, the transfer position of the aforementioned transfer station, so that any one of the products can be transferred and corrected.

[0055] In contrast, the related technology requires six small transfer platforms for six different products, which in turn requires six transfer rotation correction units. Each unit requires a separate high-precision angle correction motor, which is costly and takes up space in the equipment. It also increases the stroke of the loading and unloading shafts and prolongs the loading and unloading time, thus affecting the production capacity of the equipment.

[0056] Please see Figure 3 In some embodiments, platform 320 includes a first platform 321, a second platform 322, a third platform 323, and / or a fourth platform 324. The first platform 321, the second platform 322, the third platform 323, and / or the fourth platform 324 are distributed around the rotation axis of the rotary drive 200 and are used to carry different products.

[0057] Understandably, at least two platforms 320 include at least two of the first platform 321, the second platform 322, the third platform 323, and the fourth platform 324.

[0058] Among them, the first platform 321 is black, the second platform 322 is white, the third platform 323 is made of non-metallic material, and the fourth platform 324 is larger than the first platform 321.

[0059] In use, the first platform 321 can be used to support the PD or PD pad, providing a black background for the PD or PD pad during CCD visual correction. The second platform 322 can be used to support the TIA, providing a mirrored background for the TIA during CCD visual correction. The third platform 323 can be used to support the ISO. The fourth platform 324 can be used to support relatively large ultra-large ceramic substrates.

[0060] For example, platform 320 includes a first platform 321, a second platform 322, a third platform 323 and a fourth platform 324, and the first platform 321, the fourth platform 324, the second platform 322 and the third platform 323 are distributed sequentially around the rotation axis of the rotary drive member 200.

[0061] The first platform 321 can accommodate elongated products (such as PDs and PD pads). The fourth platform 324 can simultaneously accommodate parallelogram-shaped products (such as ceramic substrates and optical glass), large square products (such as large ceramic substrates and optical calibration blocks), and circular products (such as ceramic substrates and optical glass). The second platform 322 can accommodate rectangular products (such as TIAs and ceramic substrates). The third platform 323 can accommodate small rectangular products (such as ISOs, ceramic substrates, and capacitors).

[0062] Please refer to it again. Figure 2 In some embodiments, a plurality of first adjusting members 110 are provided on the first base 100. The plurality of first adjusting members 110 are distributed circumferentially along the first base 100, and the first adjusting members 110 pass through the first base 100 and are threadedly engaged with the first base 100.

[0063] In use, the first base 100 is connected to the frame of the equipment to achieve the installation and fixation of the entire transfer station. At the same time, each of the first adjusting components 110 passes through the first base 100 and abuts against the frame.

[0064] By turning the first adjusting component 110, the length of the first adjusting component 110 extending out of the first base 100 can be adjusted, which means adjusting the distance between the first base 100 and the frame, thereby adjusting the flatness of the first base 100 and ultimately leveling the platform 320. At this time, the first base 100 serves as the flatness adjustment base plate for the entire turntable.

[0065] For example, the first adjusting member 110 is a nut screw. Furthermore, a plurality of first fastening bolts 120 are mounted on the first base 100, and first spring washers 130 are fitted onto the first fastening bolts 120. The first fastening bolts 120 are threaded into the frame. By tightening the first fastening bolts 120, the heads of the first fastening bolts 120 are pressed tightly against the first base 100 through the first spring washers 130, thereby connecting the first base 100 to the frame.

[0066] For example, the rotary drive 200 is a torque motor with multiple second fastening bolts 210 threaded through it. The second fastening bolts 210 are threaded into the first base 100. By tightening the second fastening bolts 210, the heads of the second fastening bolts 210 are pressed tightly against the rotary drive 200, thereby connecting the rotary drive 200 to the first base 100.

[0067] Please refer to the following: Figure 4 and Figure 5 In some embodiments, a plurality of second adjusting members 311 are provided on the second base 310. The plurality of second adjusting members 311 are distributed circumferentially along the second base 310, the second adjusting members 311 pass through the second base 310 and are threadedly engaged with the second base 310, and the second adjusting members 311 abut against the driving end of the rotary drive member 200.

[0068] As previously described, the second base 310 is connected to the drive end of the rotary drive 200. At the same time, each of the second adjusting members 311 passes through the second base 310 and abuts against the drive end of the rotary drive 200.

[0069] By turning the second adjusting member 311, the length of the second adjusting member 311 extending out of the second base 310 can be adjusted, that is, the distance between the second base 310 and the driving end of the rotary drive member 200 can be adjusted, thereby adjusting the flatness of the second base 310, and the platform 320 can also be leveled.

[0070] Specifically, to prevent the second adjusting member 311 from scratching the drive end surface when it abuts against the drive end of the rotary drive member 200, the second adjusting member 311 uses a larger adjusting bolt. Compared with a nut screw, the adjusting bolt has a larger contact area with the drive end, which can distribute the pressure.

[0071] However, the large size of the adjusting bolt makes it prone to loosening. To address this issue, in this embodiment, the second base 310 is further provided with a pad 312 and a support member 313, and the pad 312 and the support member 313 correspond one-to-one with the second adjusting member 311.

[0072] The second adjusting member 311 passes through both the pad 312 and the base 310, and is threadedly engaged with both the pad 312 and the base 310. The abutting member 313 passes through the pad 312 and is threadedly engaged with the pad 312, and abuts against the second base 310.

[0073] In use, after leveling by screwing on the second adjusting member 311, screw on the abutment member 313 so that the abutment member 313 abuts against the second base 310, thereby causing the pad 312 and the second base 310 to tend to move in opposite directions. At this time, the internal thread of the pad 312 abuts against the external thread of the second adjusting member 311, and the internal thread of the second base 310 abuts against the external thread of the second adjusting member 311. Moreover, the force applied by the pad 312 to the second adjusting member 311 is opposite in direction to the force applied by the second base 310 to the second adjusting member 311, thus forming a double-threaded locking structure that can lock the second adjusting member 311 and prevent it from loosening.

[0074] For example, the supporting member 313 is a nut screw. Furthermore, a third fastening bolt 314 is threaded through the second adjusting member 311, and a second spring washer 315 is fitted onto the third fastening bolt 314. The third fastening bolt 314 is threaded into the drive end of the rotary drive member 200. By tightening the third fastening bolt 314, the head of the third fastening bolt 314 is pressed against the second base 310 via the second spring washer 315 and the second adjusting member 311, thereby connecting the second base 310 to the drive end of the rotary drive member 200.

[0075] For example, a fourth fastening bolt 325 is provided on the platform 320. The fourth fastening bolt 325 is threadedly engaged with the second base 310. By tightening the fourth fastening bolt 325, the head of the fourth fastening bolt 325 is pressed tightly against the platform 320, thereby connecting the platform 320 and the second base 310.

[0076] In other words, the platform 320 and the second base 310 are detachably connected, and each platform 320 can be replaced and adjusted independently so that the corresponding platform 320 can be selected according to the product to be supported.

[0077] Furthermore, a second positioning pin 316 is provided on the second base 310. The second positioning pin 316 is inserted into the platform 320 to position the platform 320.

[0078] Please refer to the following: Figure 2 , Figure 5 and Figure 6In some embodiments, the aforementioned transfer station further includes an airway assembly 400. The airway assembly 400 is disposed on the first base 100, and a first airway 421 is provided on the airway assembly 400. One end of the first airway 421 opens toward the platform assembly 300 and is offset from the rotation axis of the rotary drive member 200.

[0079] Correspondingly, the second base 310 is provided with a second air passage 317 corresponding to the platform 320. One end of the second air passage 317 opens towards the air passage assembly 400 and is offset from the rotation axis of the rotary drive 200. The platform 320 is provided with a vacuum hole 326, which communicates with the other end opening of the corresponding second air passage 317.

[0080] The rotary drive 200 is used to drive the second base 310 to rotate relative to the air passage assembly 400, so that the first air passage 421 is selectively connected to the second air passage 317.

[0081] Understandably, the distance by which the opening of the first air passage 421 facing the platform assembly 300 deviates from the rotation axis of the rotary drive 200 is the same as or approximately the same as the distance by which the opening of the second air passage 317 facing the air passage assembly 400 deviates from the rotation axis of the rotary drive 200. As the rotary drive 200 drives the second base 310 to rotate relative to the first base 100, that is, relative to the air passage assembly 400, one of the second air passages 317 can align with the first air passage 421, and thus communicate with the first air passage 421. At this time, the vacuum hole 326 on the platform 320 corresponding to the second air passage 317 can communicate with the first air passage 421 through the second air passage 317, and the platform 320 corresponding to the second air passage 317 moves exactly to a preset position.

[0082] Furthermore, since the opening of the first air passage 421 facing the platform assembly 300 and the opening of the second air passage 317 facing the air passage assembly 400 are both offset from the rotation axis of the rotary drive 200, by driving the second base 310 to rotate relative to the air passage assembly 400, the vacuum hole 326 on any platform 320 can be connected to the first air passage 421 through the corresponding second air passage 317 when the platform 320 moves to the preset position.

[0083] In use, the first air passage 421 of the air passage assembly 400 is used to connect to an external vacuum source. The vacuum generated by the external vacuum source is output to the vacuum hole 326 through the first air passage 421 and the second air passage 317 in sequence, which can perform vacuum adsorption on the product on the platform 320.

[0084] In related technologies, for transfer stations handling multiple products, the common method to ensure vacuum adsorption at different stations is to use a rotary joint at the bottom. This method occupies significant vertical space and requires expensive selection of suitable rotary joints.

[0085] In contrast, this embodiment makes the opening of the first air passage 421 facing the platform assembly 300 and the opening of the second air passage 317 facing the air passage assembly 400 both deviate from the rotation axis of the rotary drive 200. Through the eccentric air passage design, it is ensured that any platform 320 that moves to the preset position can be vacuum adsorbed. Its structure is simpler, occupies less space in the height direction, and has a lower cost.

[0086] Additionally, it should be noted that when the rotary drive 200 drives the second base 310 to rotate, moving any one of the platforms 320 to a preset position, the rotary drive 200 also drives the second base 310 to rotate, adjusting the platform 320 at the preset position to a preset angle, thereby correcting the angle of the product on that platform 320. After correction, there may be a misalignment between the opening of the first air passage 421 facing the platform assembly 300 and the opening of the second air passage 317 facing the air passage assembly 400. Since high-precision correction is generally within a small angle of ±3°, a small angle misalignment between the two air passage openings will not cause vacuum adsorption to be limited.

[0087] Furthermore, each second air passage 317 is equipped with a filter element 318 to filter impurities drawn into the vacuum hole 326 and prevent impurities from entering the first air passage 421 through the second air passage 317.

[0088] Please refer to the following: Figure 6 and Figure 7 In some embodiments, the airway assembly 400 includes a support 410, a floating shaft 420, an air tube 430, and a lifting member 440.

[0089] The bracket 410 is located on the first base 100.

[0090] The floating shaft 420 is provided with a first air passage 421, and the floating shaft 420 is slidably disposed on the bracket 410 along the rotation axis direction of the rotating drive member 200.

[0091] The trachea 430 is connected to the end of the floating shaft 420 away from the platform assembly 300 and communicates with the first airway 421.

[0092] The lifting member 440 is disposed on the bracket 410 and is used to drive the floating shaft 420 to abut against the second base 310.

[0093] In use, the air tube 430 is connected to an external vacuum source, and the vacuum generated by the external vacuum source is output to the first airway 421 through the air tube 430.

[0094] Furthermore, during the rotation of the second base 310 relative to the first base 100 and the airway assembly 400, the floating shaft 420 can adaptively float along the rotation axis of the rotary drive 200, avoiding obstruction to the rotation of the second base 310. Simultaneously, driven by the lifting member 440, the floating shaft 420 remains in contact with the second base 310, meaning its surface is always in close contact with the surface of the second base 310, ensuring no gas leakage from the airway.

[0095] Please combine Figure 2 For example, a fifth fastening bolt 411 is provided on the bracket 410. The fifth fastening bolt 411 is threaded into the first base 100. By tightening the fifth fastening bolt 411, the head of the fifth fastening bolt 411 is pressed tightly against the bracket 410, thereby connecting the bracket 410 and the first base 100.

[0096] Please refer to it again. Figure 7 For example, the airway assembly 400 also includes an airway connector 450 and a clamp 460. One end of the airway connector 450 is connected to the floating shaft 420, and the other end is inserted into the airway 430, thereby connecting the airway 430 to the floating shaft 420. The clamp 460 is fitted onto the airway 430, tightly clamping the airway 430 onto the airway connector 450 to prevent the airway 430 from falling off.

[0097] Please combine Figure 2 Furthermore, in some embodiments, a first positioning pin 140 is provided on the first base 100, and the first positioning pin 140 is inserted into the bracket 410.

[0098] When the bracket 410 is connected to the first base 100, the first positioning pin 140 can position the bracket 410 to ensure the consistency of the installation and keep the floating shaft 420 at a certain angle, specifically, aligning the first air passage 421 on the floating shaft 420 with the platform 320 in a preset position.

[0099] Please refer to it again. Figure 7 Furthermore, in some embodiments, the bracket 410 is provided with a guide groove 412, which extends along the rotation axis of the rotary drive member 200.

[0100] Correspondingly, a guide part 422 is provided on the floating shaft 420, and the guide part 422 is slidably disposed in the guide groove 412.

[0101] When the floating shaft 420 floats on the bracket 410 along the rotation axis of the rotary drive 200, the guide part 422 slides in the guide groove 412 to guide the floating shaft 420 and keep the floating shaft 420 at a certain angle.

[0102] In some embodiments, the lifting member 440 includes a spring that elastically abuts against the side of the floating shaft 420 away from the second base 310 along the rotation axis direction of the rotation drive member 200.

[0103] Understandably, the spring is always in a compressed state and applies a spring force to the floating shaft 420 in the direction of the rotation axis of the rotary drive 200 toward the second base 310, thereby driving the floating shaft 420 to abut against the second base 310.

[0104] In some embodiments, the lifting member 440 may also be a magnet. Correspondingly, a magnet is also embedded in the floating shaft 420, with its magnetic poles opposite to those of the lifting member 440. In use, the magnet on the floating shaft 420 and the lifting member 440 are magnetically repelled, and the floating shaft 420 is driven by the magnetic force to abut against the second base 310.

[0105] In summary, in the aforementioned transfer station, the second base 310 is equipped with multiple platforms 320, including a first platform 321, a second platform 322, a third platform 323, and / or a fourth platform 324, and each platform 320 carries different products. In use, the rotary drive 200 drives the second base 310 to rotate, moving any one of the platforms 320 to a preset position for transferring the products on that platform 320. Furthermore, before transferring the products, the rotary drive 200 also drives the second base 310 to rotate, adjusting the platform 320 at the preset position to a preset angle, thereby correcting the angle of the products on that platform 320.

[0106] Therefore, the aforementioned transfer station, through a single rotary drive component 200, can achieve transfer and calibration of various different products, meeting diverse product requirements, and each platform 320 can be independently replaced and adjusted. Because only a single rotary drive component 200 is used, the aforementioned transfer station occupies less equipment space and reduces the stroke of the loading and unloading shafts, thereby shortening loading and unloading time, increasing equipment capacity, and effectively reducing manufacturing costs. Furthermore, the aforementioned transfer station, through a single first air passage 421, can meet the air path requirements of different platforms 320 without the need for rotary joints, greatly saving space in the height direction, resulting in a more compact overall structure, and eliminating the cost of expensive rotary joints.

[0107] Embodiments of this application also provide a bonding device, including the transfer station in any of the above embodiments.

[0108] This embodiment includes the transfer station as described in any of the above embodiments, and therefore has all the beneficial effects of the transfer station in any of the above embodiments, which will not be elaborated here.

[0109] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0110] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A transfer station, characterized in that, include: First base; A rotary drive component is disposed on the first base; as well as The platform component includes a second base and at least two platforms. The second base is connected to the drive end of the rotary drive component. The at least two platforms are all disposed on the second base and distributed around the rotation axis of the rotary drive component. The at least two platforms are used to support different products. The rotary drive is used to drive the second base to rotate, thereby moving one of the platforms to a preset position and adjusting the platform at the preset position to a preset angle. The transfer station also includes an air passage assembly, which is disposed on the first base. The air passage assembly has a first air passage, one end of which opens toward the platform assembly and is offset from the rotation axis of the rotary drive component. The second base is provided with a second air passage that corresponds to the platform. One end of the second air passage opens towards the air passage assembly and is offset from the rotation axis of the rotary drive. The platform is provided with a vacuum hole, which communicates with the other end opening of the corresponding second air passage. The rotary drive is used to drive the second base to rotate relative to the airway assembly, so that the first airway can be selectively connected to the second airway.

2. The transfer station according to claim 1, characterized in that, The airway assembly includes: A bracket is mounted on the first base; A floating shaft, on which the first air passage is provided, is slidably disposed on the bracket along the rotation axis direction of the rotating drive component; A trachea is connected to the end of the floating shaft away from the platform assembly and communicates with the first airway; and A lifting member is disposed on the bracket and is used to drive the floating shaft to abut against the second base.

3. The transfer station according to claim 2, characterized in that, The first base is provided with a first positioning pin, which is inserted into the bracket.

4. The transfer station according to claim 2, characterized in that, The bracket is provided with a guide groove, which extends along the rotation axis of the rotary drive component; The floating shaft is provided with a guide part, which is slidably disposed in the guide groove.

5. The transfer station according to claim 2, characterized in that, The lifting member includes a spring, which elastically abuts against the floating shaft on the side opposite to the second base along the rotation axis of the rotary drive member.

6. The transfer station according to any one of claims 1 to 5, characterized in that, The platform includes a first platform, a second platform, a third platform, and / or a fourth platform, which are distributed around the rotation axis of the rotary drive and are used to carry different products. The first platform is black, the second platform is white, the third platform is made of non-metallic material, and the fourth platform is larger than the first platform.

7. The transfer station according to any one of claims 1 to 5, characterized in that, The first base is provided with a plurality of first adjusting members, which are distributed along the circumference of the first base. The first adjusting members pass through the first base and are threadedly engaged with the first base.

8. The transfer station according to any one of claims 1 to 5, characterized in that, The second base is provided with a plurality of second adjusting members, which are distributed along the circumference of the second base. The second adjusting members pass through the second base and are threadedly engaged with the second base. The second adjusting members abut against the driving end of the rotary drive member.

9. A bonding apparatus, characterized in that, Includes the transfer station as described in any one of claims 1 to 8.

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