A pin component and plasma processing equipment

Abstract

This invention relates to the field of wafer processing equipment technology, and more particularly to a ejector pin component and plasma processing equipment, comprising a fixed base, an ejector pin body, and a locking element. The fixed base is disposed on the inner wall of a process cavity, and the fixed base has an axially extending mounting groove extending from the top to the bottom. The ejector pin body is coaxially disposed in the mounting groove. The ejector pin body includes a second pin body disposed in the mounting groove and a first pin body disposed on top of the second pin body. The diameter of the second pin body is larger than the diameter of the first pin body to form a stop step surrounding the first pin body. The locking element includes a limiting structure. This invention effectively solves the problems of slippage, brittle fracture, and unreliable reset that easily occur when the ejector pin is fixed by a thread in the prior art by setting an ejector pin body with a stop step and cooperating with a locking element that can move radially elastically in the mounting groove.

Description

Technical Field

[0001] This invention relates to the field of wafer processing equipment technology, and more particularly to a pin component and plasma processing equipment. Background Technology

[0002] In etching equipment used in semiconductor wafer fabrication, the wafer carrier is typically fixed to a cavity base. To enable automated wafer transfer, the carrier has through holes containing vertically retractable ejector pins. During transfer, the ejector pins rise in a controlled manner, their tips passing through these holes to lift and receive the wafer. After transfer, the ejector pins descend to their lowest position, allowing the wafer to smoothly fall back onto the carrier surface, thus completing the transfer. However, the currently common threaded fixing method for ejector pins and ejector pin holders has significant drawbacks: the fine threads are prone to stripping after repeated tightening, preventing the ejector pins from reliably descending to the preset position; simultaneously, the ceramic or sapphire ejector pin bodies experience stress concentration during tightening, making them highly susceptible to breakage. Summary of the Invention

[0003] This invention relates to a ejector pin component and a plasma treatment device, with the aim of solving the problems of slippage, brittle breakage, and unreliable repositioning that easily occur when ejector pins are fixed by thread in the prior art.

[0004] To achieve the above objectives, the present invention provides an ejector pin component, comprising:

[0005] A fixed base is provided on the inner wall of the process cavity, and the fixed base has an axially extending mounting groove extending from the top to the bottom;

[0006] The ejector pin body is coaxially disposed in the mounting groove. The ejector pin body includes a second needle body disposed in the mounting groove and a first needle body disposed on the top of the second needle body. The diameter of the second needle body is larger than the diameter of the first needle body to form a stop step around the first needle body.

[0007] A locking element is disposed within the mounting groove. The locking element includes a limiting structure that elastically abuts against the side wall of the mounting groove, allowing the limiting structure to move radially by the elastic abutment force. The limiting structure is adapted to the stop step. When the ejector pin body is fixed within the mounting groove, the limiting structure is located above the stop step, and the projection structure of the limiting structure on the bottom of the mounting groove at least partially overlaps with the projection structure of the stop step on the bottom of the mounting groove, so that the limiting structure blocks the stop step and the second pin body to fix the ejector pin body.

[0008] Optionally, the engagement locking member further includes a movable connector and a first elastic member;

[0009] One end of the first elastic element is connected to the side wall of the mounting groove, and the other end is connected to the movable connector. The movable connector is provided with the limiting structure. When the second needle moves axially downward and squeezes the limiting structure, the limiting structure moves radially toward the side wall of the mounting groove and elastically compresses the first elastic element. When the second needle moves downward past the limiting structure, the first elastic element pushes the limiting structure to reset above the stop step through the elastic restoring force to block the stop step and the second needle.

[0010] Optionally, the ejector pin component further includes a second elastic member coaxially disposed in the mounting groove, one end of the second elastic member being connected to the bottom of the mounting groove, and the other end extending along the axial direction of the mounting groove to abut against the bottom of the second pin body;

[0011] When the ejector pin body is fixed in the mounting groove, the second elastic member provides an elastic force to the second pin body in a direction away from the bottom of the mounting groove, so that the stop step abuts against the limiting structure;

[0012] The ejector pin body causes the second elastic element to undergo elastic deformation under the pressing pressure, and after the pressing pressure on the ejector pin body is removed, the second pin body moves upward along the axial direction under the push of the elastic deformation force of the second elastic element, and pushes the second pin body away from the limiting structure, thereby causing the ejector pin body to disengage from the mounting groove.

[0013] Optionally, the movable connector is fixedly connected to a protrusion on the side wall facing the central axis of the mounting groove, and the top of the protrusion is lower than the bottom of the second needle body in the mounting groove.

[0014] The upper part of the protrusion is configured as an arc-shaped surface structure. When the ejector pin body is fixed in the mounting groove, the orthographic projection structure of the protrusion on the bottom of the mounting groove covers the orthographic projection structure of the limiting structure on the bottom of the mounting groove; the orthographic projection structure of the protrusion on the bottom of the mounting groove at least partially covers the orthographic projection structure of the second pin body on the bottom of the mounting groove.

[0015] Optionally, the number of the limiting structures is set to several, and the several limiting structures are evenly spaced along the circumference of the mounting groove, and together form a locking structure surrounding the outer peripheral wall of the second needle body.

[0016] The limiting structure includes a lateral limiting part and a vertical limiting part. The lateral limiting part is disposed on the top of the vertical limiting part and is perpendicular to each other in the axial section of the mounting groove. The lateral limiting part extends radially to abut against the top of the stop step, thereby forming an axial limiting on the second needle body. The vertical limiting part extends axially to abut against the side wall of the second needle body, thereby forming a radial limiting on the second needle body.

[0017] Optionally, the protrusion includes a supporting structure and a gap maintaining structure disposed at the bottom of the supporting structure and extending along the axial direction. In the axial section of the mounting groove, the supporting structure is fan-shaped, and the gap maintaining structure is rectangular. The maximum radial width of the gap maintaining structure is equal to the maximum radial width of the supporting structure. When the second needle moves axially downward, the supporting structure moves radially toward the side wall of the mounting groove under the action of compression. When the second needle passes over the supporting structure and slides against the gap maintaining structure, the distance between the innermost side of the supporting structure and the central axis of the mounting groove is maintained to be less than the distance between the innermost side of the limiting structure and the central axis of the mounting groove.

[0018] Optionally, the second elastic element includes an elastic element body and a support portion disposed on the top of the elastic element body. The elastic element body is fixedly connected to the bottom of the mounting groove, and the support portion abuts against the bottom of the second needle body.

[0019] Optionally, a support member is movably provided in the mounting groove along its axial direction, the end of the first elastic member away from the movable connector is connected to the vertical part of the support member, and the end of the second elastic member away from the second needle body is connected to the horizontal part of the support member.

[0020] The support portion has a through movable hole along the axial direction. An adjusting screw is threaded into the transverse portion of the support member. The bottom of the adjusting screw is rotatably disposed on the bottom of the mounting groove. The top of the adjusting screw passes through the elastic member body and extends into the movable hole. By turning the adjusting screw, the support member moves toward or away from the bottom of the mounting groove, thereby adjusting the axial height of the ejector pin body.

[0021] Optionally, a sealing member is movably sleeved on the outer wall of the first needle body, and the projection structure of the sealing member at the opening end of the mounting groove covers the opening end of the mounting groove, so that when the ejector pin body is fixed in the mounting groove, the sealing member blocks the opening end of the mounting groove.

[0022] Optionally, the ejector pin body is provided with a nostril extending radially therethrough, the nostril being located near the top end of the ejector pin body for convenient pulling of the ejector pin body.

[0023] To achieve the above objectives, the present invention also provides a plasma processing apparatus, including a process cavity, a wafer carrier stage, and a ejector pin component disposed within the process cavity. The wafer carrier stage is disposed within the process cavity and has a through hole. The ejector pin body of the ejector pin component is movably disposed within the through hole.

[0024] The beneficial effects of this invention are as follows:

[0025] This invention effectively solves the problems of slippage, brittle fracture, and unreliable reset that easily occur in existing technologies using threaded fixing methods for ejector pins by using a stepped stop body that engages with a radially elastic locking component within the mounting groove. Simultaneously, axial locking is achieved through the overlapping projections of the limiting structure and the stepped stop, eliminating the need for thread tightening. This significantly improves the convenience and reliability of ejector pin installation and removal, and avoids damage to the ejector pin body caused by stress concentration, thereby enhancing the stability of the wafer transfer process and extending the equipment's lifespan. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the ejector pin component in an embodiment of the present invention.

[0027] Explanation of reference numerals in the attached figures:

[0028] 1. Fixed base; 101. Mounting groove; 2. Ejector pin body; 21. First pin body; 22. Second pin body; 23. Stop step; 3. Engaging locking element; 31. Limiting structure; 311. Lateral limiting part; 312. Vertical limiting part; 313. Arc-shaped guide part; 32. Movable connecting element; 33. First elastic element; 34. Supporting part; 35. Elastic element body; 36. Protrusion; 361. Supporting structure; 362. Gap maintaining structure; 4. Adjusting screw; 5. Movable hole; 6. Support element; 7. Sealing element; 8. Nose. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions in the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without inventive effort are within the scope of protection of this invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but do not exclude other elements or objects.

[0030] To address the problems existing in the prior art, embodiments of the present invention provide an ejector pin component, such as... Figure 1 As shown, the ejector pin component includes a fixed base 1, an ejector pin body 2, and an engaging locking component 3.

[0031] In one embodiment, such as Figure 1 As shown, the fixing base 1 is disposed on the inner wall of the process cavity. In other embodiments, it is not limited to being disposed only on the inner wall of the process cavity. The fixing base 1 has an axially extending mounting groove 101 extending from the top to the bottom. In this embodiment, the shape of the fixing base 1 includes, but is not limited to, a cylindrical structure, a cube, or a cuboid structure. The three-dimensional shape of the mounting groove 101 is preferably a cylindrical structure, but is not limited to a cylindrical structure.

[0032] In one embodiment, such as Figure 1 As shown, the ejector pin body 2 is coaxially disposed within the mounting groove 101. The ejector pin body 2 includes a second needle body 22 disposed within the mounting groove 101, and a first needle body 21 disposed on top of the second needle body 22. A portion of the first needle body 21 is located within the mounting groove 101, and another portion extends outside the mounting groove 101. The diameter of the second needle body 22 is larger than the diameter of the first needle body 21, forming a stop step 23 surrounding the first needle body 21.

[0033] Coaxiality can be understood as the central axis of the ejector pin body 2 coinciding with the central axis of the mounting groove 101. The following descriptions of coaxiality have the same meaning and will not be further explained.

[0034] In one embodiment, such as Figure 1As shown, the engagement locking member 3 is disposed in the mounting groove 101. The engagement locking member 3 includes a limiting structure 31. The limiting structure 31 elastically abuts against the side wall of the mounting groove 101 so that the limiting structure 31 moves radially by the elastic abutment force. The limiting structure 31 is adapted to the stop step 23. When the ejector pin body 2 is fixed in the mounting groove 101, the limiting structure 31 is located above the stop step 23, and the projection structure of the limiting structure 31 on the bottom of the mounting groove 101 at least partially overlaps with the projection structure of the stop step 23 on the bottom of the mounting groove 101, so that the limiting structure 31 blocks the stop step 23 and the second needle body 22 to fix the ejector pin body 2.

[0035] This embodiment achieves rapid and reliable locking and releasing of the ejector body 2 by using the locking structure 31 of the interlocking locking member 3 and the stop step 23 on the ejector body 2 to overlap the projection of the stop step 23 on the bottom of the mounting groove 101. The ejector body 2 can be installed without the need for traditional threaded connections. At the same time, by utilizing the elastic connection between the locking structure 31 and the side wall of the mounting groove 101, the ejector can be driven to radially move and then elastically reset by simple downward or upward operations during installation or disassembly. This avoids the risk of thread stripping or ejector breakage caused by repeated twisting, and significantly improves the convenience and maintenance efficiency of the installation and disassembly operations, thereby ensuring the stability of the wafer transfer process and the service life of the equipment.

[0036] It is worth noting that the movement path of the second needle body 22 and the limiting structure 31 during the installation process is as follows: When the second needle body 22 moves downward, the bottom of the second needle body 22 first abuts against the upper end face of the limiting structure 31, causing the limiting structure 31 to move away from the central axis of the mounting groove 101. When the top of the second needle body 22 passes the end of the limiting structure 31 that is closest to the central axis of the mounting groove 101, as the second needle body 22 continues to move downward, the limiting structure 31 is reset by the elastic holding force and moves closer to the central axis of the mounting groove 101, and finally moves to the initial position, so that the limiting structure 31 moves above the stop step 23.

[0037] In this application, the radial direction is parallel to the radius of the mounting groove 101, and the axial direction is parallel to or coincides with the axis of the mounting groove 101.

[0038] In one embodiment, such as Figure 1As shown, the engagement locking member 3 further includes a movable connecting member 32 and a first elastic member 33; one end of the first elastic member 33 is connected to the side wall of the mounting groove 101, and the other end is connected to the movable connecting member 32. The movable connecting member 32 is provided with the limiting structure 31. When the second needle body 22 moves axially downward and squeezes the limiting structure 31, the limiting structure 31 moves radially toward the side wall of the mounting groove 101, and the first elastic member 33 is elastically compressed. When the second needle body 22 moves downward past the limiting structure 31 (which can be understood as passing the end of the limiting structure 31 closest to the central axis of the mounting groove 101), the first elastic member 33 pushes the limiting structure 31 to reset and move above the stop step 23 through elastic restoring force to block the stop step 23 and the second needle body 22. The cooperation between the movable connector 32 and the first elastic element 33 allows the limiting structure 31 to be radially pushed open when the second pin body 22 is pressed down. After the second pin body 22 passes the limiting structure 31, the first elastic element 33 automatically springs the limiting structure 31 back above the stop step 23, achieving rapid and reliable locking and automatic reset of the ejector pin body 2. This eliminates the need for traditional threaded connections when installing the ejector pin body 2. It also avoids the risks of thread stripping or ejector pin breakage caused by repeated tightening, significantly improving the convenience and efficiency of assembly and disassembly operations, thereby ensuring the stability of the wafer transfer process and extending the equipment's lifespan.

[0039] In one embodiment, such as Figure 1 As shown, a plurality of limiting structures 31 are provided, and the plurality of limiting structures 31 are arranged at uniform intervals along the circumference of the mounting groove 101, preferably at equal intervals, and together form a locking structure surrounding the outer peripheral wall of the second pin body 22 to form a circumferential blocking limit on the stop step 23. In this embodiment, the plurality of limiting structures 31 arranged at uniform intervals along the circumference of the mounting groove 101 together form a locking structure surrounding the outer peripheral wall of the second pin body 22, which can achieve uniform and synchronous limiting of the ejector pin body 2 at multiple points in the circumference, effectively avoiding the problem of skewing or jamming caused by uneven force at a single point. The synergistic effect of multiple limiting structures 31 significantly enhances the reliability and stability of locking, ensuring that the ejector pin maintains a centered posture when subjected to axial load, while improving the load-bearing capacity and impact resistance, thereby providing more accurate and stable ejector pin positioning and support during wafer transfer.

[0040] In one embodiment, the specific number of the limiting structures 31 can be three, four, or six, which are configured according to the size of the mounting groove 101 and the required locking force. By arranging them evenly at intervals along the circumference of the mounting groove 101, they together form a closed or semi-closed locking ring around the outer peripheral wall of the second needle body 22. This number setting can ensure the compactness of the structure while uniformly distributing the axial and radial loads borne by the pin body 2, avoiding single-point stress concentration, thereby achieving reliable locking while taking into account the smoothness of assembly and disassembly and the stability of long-term use.

[0041] In one embodiment, such as Figure 1 As shown, the limiting structure 31 includes a lateral limiting part 311 and a vertical limiting part 312. The lateral limiting part 311 is disposed on the top of the vertical limiting part 312 and is perpendicular to each other on the axial section of the mounting groove 101. The lateral limiting part 311 extends radially to abut against the top of the stop step 23, thereby forming an axial limit on the second needle body 22. The vertical limiting part 312 extends axially to abut against the side wall of the second needle body 22, thereby forming a radial limit on the second needle body 22. By designing the limiting structure 31 as a combination of an axially extending vertical limiting part 312 and a radially extending lateral limiting part 311, the lateral limiting part 311 can reliably abut against the top of the stop step 23 to limit the axial displacement of the ejector pin body 2, while the vertical limiting part 312 provides radial constraint by conforming to the side wall of the second pin body 22, thereby achieving bidirectional limiting of the ejector pin body 2. This structure not only enhances the stability of locking and anti-sway capability, but also disperses the force through segmented design, avoids stress concentration, and improves the positioning accuracy and long-term reliability of the ejector pin during wafer transfer.

[0042] In one embodiment, on the axial section of the mounting groove 101, the shape of the lateral limiting part 311 and the vertical limiting part 312 can be a combination structure of a rectangular block and an arc plate, respectively. The lateral limiting part 311 is rectangular to provide a stable radial support surface against the top of the stop step 23, and the vertical limiting part 312 is arc plate to fit the side wall of the second needle body 22 to achieve circumferential coverage and avoid damage to the side wall of the second needle body 22. This shape design allows the lateral limiting part 311 to withstand axial load and disperse stress, while the arc contour of the vertical limiting part 312 facilitates the smooth pushing of the limiting structure 31 by the second needle body 22 during assembly and disassembly. At the same time, the segmented structure achieves bidirectional axial and radial limiting, enhancing the positioning accuracy and anti-sway capability of the ejector pin body 2 during wafer transfer.

[0043] In one embodiment, the limiting structure 31 further includes an arc-shaped guide portion 313 located at the top of the lateral limiting portion 311, such as having an arc-shaped surface protruding towards the central axis of the mounting groove 101. Specifically, the shape of the limiting structure 31 can be a bread-shaped structure, an arc-shaped structure, or a wedge-shaped structure, etc. Through the combined design of the lateral limiting portion 311 and the vertical limiting portion 312, the lateral limiting portion 311 extends radially along the mounting groove 101 to abut against the top of the stop step 23 to achieve axial locking, and the vertical limiting portion 312 extends axially to conform to the side wall of the second needle body 22 to provide radial limiting; the smooth contours of the bread-shaped structure and the arc-shaped structure facilitate the smooth pushing of the limiting structure 31 when the second needle body 22 is pressed down, and automatically resets to above the stop step 23 under the action of the elastic element after passing over it, forming a stable enclosure. Thus, under the combined action of multiple circumferentially evenly distributed limiting structures 31, reliable bidirectional limiting and rapid engagement and release functions of the ejector pin body 2 are achieved. In this embodiment, the ejector pin body 2 can be disassembled by pulling it upward with external force.

[0044] In one embodiment, such as Figure 1 As shown, the ejector pin component also includes a second elastic element coaxially disposed within the mounting groove 101. The second elastic element is in a compressed state, with one end connected to the bottom of the mounting groove 101 and the other end extending axially along the mounting groove 101 to abut against the bottom of the second pin body 22. When the ejector pin body 2 is fixed within the mounting groove 101, the second elastic element provides an elastic force to the second pin body 22 in a direction away from the bottom of the mounting groove 101, so that the stop step 23 abuts against the limiting structure 31. The elastic restoring force generated by the pre-compression of the second elastic element continuously acts upward on the bottom of the second pin body 22, so that the stop step 23 always maintains stable abutment against the limiting structure 31, effectively eliminating axial clearance and preventing the ejector pin body 2 from shaking due to vibration or impact during wafer transport.

[0045] In one embodiment, such as Figure 1As shown, under pressure, the second elastic element of the ejector pin body 2 undergoes elastic deformation. After the pressure is removed, the ejector pin body 2 moves upward along the axial direction under the elastic deformation force of the second elastic element, pushing the second needle body 22 away from the limiting structure 31, thereby disengaging the ejector pin body 2 from the mounting groove 101. This embodiment provides a stable and controllable automatic ejection function for the ejector pin body 2. When it is necessary to disassemble the ejector pin body 2, simply press down on the ejector pin body 2 to further compress and store energy in the second elastic element. After the pressure is removed, the restoring force released by the second elastic element can push the second needle body 22 and the first needle body 21 on it upward, causing the second needle body 22 to automatically push away from the limiting structure 31, achieving quick and non-destructive disassembly of the ejector pin body 2 without the need for external tools or complex operations. This effectively avoids the problems of stripping, brittle fracture, and disassembly difficulties that are easily caused by traditional threaded connections, significantly improving the convenience, safety, and efficiency of ejector pin maintenance.

[0046] In one embodiment, such as Figure 1 As shown, the movable connector 32 is fixedly connected to a protrusion 36 on the side wall facing the central axis of the mounting groove 101; the top of the protrusion 36 is lower than the bottom of the second needle body 22 in the mounting groove 101, and the upper part of the protrusion 36 is configured as an arc-shaped surface structure. When the ejector pin body 2 is fixed in the mounting groove 101, the orthographic projection structure of the protrusion 36 on the bottom of the mounting groove 101 covers the orthographic projection structure of the limiting structure 31 on the bottom of the mounting groove 101; the orthographic projection structure of the protrusion 36 on the bottom of the mounting groove 101 at least partially covers the orthographic projection structure of the second needle body 22 on the bottom of the mounting groove 101. The upper part of the protrusion 36 is designed with an arc-shaped surface structure, which allows it to make smooth contact with the second needle body 22. When the ejector pin body 2 is installed, it guides the second needle body 22 to press down smoothly and push away the movable connector 32, reducing impact and wear. At the same time, the orthographic projection structure of the protrusion 36 at the bottom of the mounting groove 101 completely covers the orthographic projection structure of the limiting structure 31 at the bottom of the mounting groove 101 and partially covers the orthographic projection structure of the second needle body 22 at the bottom of the mounting groove 101. This ensures that the limiting structure 31 can move to the bottom of the stop step 23 after reset, so as to achieve reliable disassembly and assembly.

[0047] This can be understood as follows: the orthographic projection of the protrusion 36 on the bottom of the mounting groove 101 covers the orthographic projection of the limiting structure 31 on the bottom of the mounting groove 101. That is, the radial distance between the limiting structure 31 and the closest point on the central axis of the mounting groove 101 is greater than the radial distance between the protrusion 36 and the closest point on the central axis of the mounting groove 101. By making the radial distance from the innermost side of the protrusion 36 to the central axis of the mounting groove 101 less than the radial distance from the innermost side of the limiting structure 31 to the central axis, a radial "guide step" is formed on the ejection path of the ejector pin body 2. When the ejector pin body 2 is pressed downwards, the second pin body 22 first contacts and abuts the arc-shaped surface structure of the protrusion 36. Through the squeezing force, the protrusion 36, together with the movable connecting member 32, moves away from the central axis of the mounting groove 101, thereby driving the limiting structure 31 provided on the movable connecting member 32 to move towards... Moving away from the central axis of the mounting groove 101 allows for sufficient radial space (which can be understood as the space between the innermost side of the limiting structure 31 and the central axis of the mounting groove 101), ensuring that the second needle body 22 can move smoothly upward under the elastic force of the second elastic element and pass over the limiting structure 31, thus completing the automatic ejection of the ejector pin body 2. This effectively avoids the problem of the second needle body 22 getting stuck or failing to disassemble due to radial interference caused by the limiting structure 31 on the stop step 23, thereby improving the reliability and smoothness of disassembly.

[0048] In one embodiment, such as Figure 1 As shown, the protrusion 36 includes a supporting structure 361 and a gap maintaining structure 362 disposed at the bottom of the supporting structure 361 and extending along the axial direction. In the axial section of the mounting groove 101, the supporting structure 361 has a fan-shaped structure, and the gap maintaining structure 362 has a rectangular structure. The maximum radial width of the gap maintaining structure 362 is equal to the maximum radial width of the supporting structure 361. When the second needle body 22 moves axially downward, the supporting structure 361 moves radially toward the side wall of the mounting groove 101 under the action of the squeezing force. When the second needle body 22 passes over the supporting structure 361 and slides against the gap maintaining structure 362, the minimum distance between the supporting structure 361 and the central axis of the mounting groove 101 is maintained to be less than the minimum distance between the limiting structure 31 and the central axis of the mounting groove 101.

[0049] This embodiment uses a combination design of a support structure 361 (fan-shaped) and a gap maintenance structure 362 (rectangular). When the second needle body 22 is pressed down, the support structure 361 is compressed and moves radially to make way. After the second needle body 22 passes the support structure 361, the gap maintenance structure 362 can slide and abut against the second needle body 22, thereby maintaining the minimum gap between the support structure 361 and the central axis of the mounting groove 101. This effectively maintains the radial space of the limiting structure 31 during the ejection of the second needle body 22, allowing the stop step 23 and the second needle body 22 to move smoothly upward under the push of the second elastic element and pass over the limiting structure 31. This achieves rapid and stable installation and removal of the ejector pin, improving the reliability and efficiency of the operation.

[0050] In one embodiment, such as Figure 1 As shown, the second elastic element includes an elastic element body 35 and a support portion 34 disposed on the top of the elastic element body 35. The elastic element body 35 is fixedly connected to the bottom of the mounting groove 101, and the support portion 34 abuts against the bottom of the second pin body 22. This embodiment separates the elastic element body 35 and the support portion 34, allowing the support portion 34 to directly abut against the bottom of the second pin body 22. This enables the elastic restoring force to be evenly transmitted to the pin body 2, ensuring stable abutment between the stop step 23 and the limiting structure 31 and preventing axial movement. At the same time, the support portion 34, as an intermediate connecting structure, not only protects the elastic element body 35 from local stress concentration but also facilitates cooperation with auxiliary structures such as the support member 6 or adjusting screw 4 to achieve flexible adjustment of the pre-compression amount of the second elastic element, thereby improving the stability and maintainability of the pin component during wafer transfer.

[0051] In one embodiment, the elastic element body 35 can be in the form of a helical spring, wave spring, or disc spring, etc. It is coaxially disposed at the bottom of the mounting groove 101, with its upper end abutting against the bottom of the second needle body 22 through the support part 34, and its lower end connected to the bottom of the mounting groove 101 or the support member 6. This structure acts upward on the ejector needle body 2 through the continuous elastic restoring force generated by pre-compression, so that the stop step 23 always maintains stable abutment against the limiting structure 31 to eliminate axial clearance. During disassembly, the elastic element body 35 stores energy by pressing down the ejector needle, and automatically ejects the ejector needle with its restoring force after release, realizing the dual functions of quick assembly and disassembly and stable support.

[0052] In one embodiment, the structure of the support portion 34 can be a disc-shaped support plate, but is not limited to the disc-shaped support plate.

[0053] In one embodiment, such as Figure 1As shown, a support member 6 is movably disposed within the mounting groove 101 along its axial direction. The end of the first elastic member 33 away from the movable connecting member 32 is connected to the vertical part of the support member 6, and the end of the second elastic member away from the second needle body 22 is connected to the horizontal part of the support member 6. The supporting part 34 is provided with a through movable hole 5 along its axial direction. An adjusting screw 4 is threaded into the horizontal part of the support member 6. The bottom of the adjusting screw 4 is rotatably disposed on the bottom of the mounting groove 101, and the top of the adjusting screw 4 passes through the elastic member body 35 and extends into the movable hole 5. By turning the adjusting screw 4, the support member 6 is moved toward or away from the bottom of the mounting groove 101, thereby adjusting the axial height of the ejector pin body. In this embodiment, the relative height of the support member 6 within the mounting groove 101 can be precisely adjusted by turning the adjusting screw 4. This structure not only allows for fine-tuning of the height of the ejector body 2, ensuring stable contact between the stop step 23 and the limiting structure 31, but also allows for flexible adjustment of the reset force and locking strength of the ejector body according to actual working conditions, effectively improving the adaptability, operational stability, and ease of maintenance of the ejector component to different process requirements. Furthermore, compared to the prior art method of directly adjusting multiple ejector bodies 2 by turning the threads, this invention indirectly controls the height of the support member 6 by adjusting the screw 4. This not only avoids the risk of slippage and breakage of the ejector body 2 due to repeated turning, but also significantly improves adjustment accuracy and operational reliability.

[0054] Specifically, the ejector body 2 is first removed from the fixed base 1, and then the rotation of the adjusting screw 4 is adjusted by inserting an external tool into the mounting slot 101 through a through hole set on the electrostatic chuck, so as to adjust the axial height of the support 6, thereby adjusting the relative axial height of the ejector body 2 installed in the fixed base 1, and further adjusting the coplanarity of the top ends of multiple sets of ejector bodies 2.

[0055] In one embodiment, the support member 6 can be in the form of a cylindrical structure, a tubular bracket or a U-shaped bracket, etc. It is connected to the first elastic member 33 through the vertical part to provide radial support, and connected to the second elastic member through the horizontal part to provide axial support. The support member 6 can be adjusted in axial height by adjusting the screw 4, thereby adjusting the axial height of the ejector body 2 relative to the fixed base 1, and thus adjusting the top ends of multiple ejector bodies 2 to be coplanar.

[0056] In one embodiment, such as Figure 1As shown, a sealing member 7 is movably fitted onto the outer wall of the first needle body 21, and the projection structure of the sealing member 7 at the opening end of the mounting groove 101 covers the opening end of the mounting groove 101, so that when the ejector body 2 is fixed in the mounting groove 101, the sealing member 7 seals the opening end of the mounting groove 101. This effectively prevents plasma, reaction byproducts, or particulate matter in the process chamber from entering the mounting groove 101, avoiding contamination of precision structures such as the locking member 3 and elastic members, ensuring the long-term reliability of the ejector component, while reducing maintenance frequency and improving the cleanliness and stability of the wafer processing process.

[0057] In one embodiment, the sealing element 7 can be in the form of an annular gasket, a bowl-shaped sealing cover, or a stepped sleeve. It is movably sleeved on the outer wall of the first needle body 21 and can float slightly along the axial direction. The sealing element 7 is made of a high-temperature resistant and plasma corrosion resistant material. Its outer edge diameter is larger than the diameter of the opening end of the mounting groove 101, ensuring that it can completely cover and seal the opening of the mounting groove 101 when the ejector body 2 is fixed, effectively preventing particulate contaminants and reaction by-products in the process cavity from entering. At the same time, its floating design avoids rigid interference with the ejector body 2, taking into account both sealing reliability and the flexibility of ejector movement.

[0058] In one embodiment, such as Figure 1 As shown, the ejector pin body 2 has a through-hole 8 extending radially through it. The through-hole 8 is located near the top of the ejector pin body 2 to facilitate the pulling of the ejector pin body 2. The through-hole 8 near the top of the ejector pin body 2 provides an easy point of force application for the operator. A hook-like tool can be used to pull through the through-hole 8, thereby assisting the elastic force of the second elastic element when disassembling the ejector pin. This makes it easier and more controllable to remove the ejector pin body 2 from the mounting slot 101. It is especially suitable for situations where the automatic ejection mechanism has insufficient reset force due to contamination or wear, effectively improving the convenience and reliability of ejector pin maintenance operations.

[0059] To address the problems existing in the prior art, embodiments of the present invention also provide a plasma processing device, including a process chamber, a wafer carrier stage, and a ejector pin component disposed within the process chamber. The wafer carrier stage is disposed within the process chamber and has a through hole. The ejector pin body 2 of the ejector pin component is movably disposed within the through hole. This embodiment integrates an ejector pin component including a locking element 3 and an elastic reset structure into the process chamber, and allows the ejector pin body 2 to movably pass through the through hole of the wafer carrier stage. This retains the inherent advantages of the ejector pin component, such as quick assembly and disassembly, impact resistance, and contamination prevention, while also achieving stable and precise lifting and lowering of the wafer during transport. This effectively avoids the problems of ejector pin jamming, breakage, or inaccurate reset caused by traditional threaded fixing methods, thereby significantly improving the reliability of automated wafer transport, the cleanliness of the process chamber, and the overall production efficiency of the semiconductor equipment.

[0060] In one embodiment, the plasma processing equipment can be a chemical vapor deposition equipment, a plasma etching equipment, or a plasma resist removal equipment. By integrating the ejector pin component into the process chamber, the rapid and stable lifting and lowering motion of the ejector pin body 2 enables precise positioning and automated transfer of the wafer on the carrier stage. This effectively avoids problems such as ejector pin jamming, breakage, or inaccurate reset caused by traditional threaded fixing methods, thereby significantly improving the transfer reliability of the wafer during deposition, etching, or resist removal processes, the cleanliness of the process chamber, and the overall production efficiency of the semiconductor equipment.

[0061] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the present invention. Furthermore, the present invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. A pin component, characterized in that, include: A fixed base is provided on the inner wall of the process cavity, and the fixed base has an axially extending mounting groove extending from the top to the bottom; The ejector pin body is coaxially disposed in the mounting groove. The ejector pin body includes a second needle body disposed in the mounting groove and a first needle body disposed on the top of the second needle body. The diameter of the second needle body is larger than the diameter of the first needle body to form a stop step around the first needle body. A locking element is disposed within the mounting groove. The locking element includes a limiting structure that elastically abuts against the side wall of the mounting groove, allowing the limiting structure to move radially by the elastic abutment force. The limiting structure is adapted to the stop step. When the ejector pin body is fixed within the mounting groove, the limiting structure is located above the stop step, and the projection structure of the limiting structure on the bottom of the mounting groove at least partially overlaps with the projection structure of the stop step on the bottom of the mounting groove, so that the limiting structure blocks the stop step and the second pin body to fix the ejector pin body.

2. The ejector pin component according to claim 1, characterized in that, The engagement locking member further includes a movable connector and a first elastic member; One end of the first elastic element is connected to the side wall of the mounting groove, and the other end is connected to the movable connector. The movable connector is provided with the limiting structure. When the second needle moves axially downward and squeezes the limiting structure, the limiting structure moves radially toward the side wall of the mounting groove and elastically compresses the first elastic element. When the second needle moves downward past the limiting structure, the first elastic element pushes the limiting structure to reset above the stop step through the elastic restoring force to block the stop step and the second needle.

3. The ejector pin component according to claim 2, characterized in that, It also includes a second elastic member coaxially disposed in the mounting groove, one end of the second elastic member being connected to the bottom of the mounting groove, and the other end extending along the axial direction of the mounting groove to abut against the bottom of the second needle body; When the ejector pin body is fixed in the mounting groove, the second elastic member provides an elastic force to the second pin body in a direction away from the bottom of the mounting groove, so that the stop step abuts against the limiting structure; The ejector pin body causes the second elastic element to undergo elastic deformation under the pressing pressure, and after the pressing pressure on the ejector pin body is removed, the second pin body moves upward along the axial direction under the push of the elastic deformation force of the second elastic element, and pushes the second pin body away from the limiting structure, thereby causing the ejector pin body to disengage from the mounting groove.

4. The ejector pin component according to claim 2 or 3, characterized in that, The movable connector is fixedly connected to a protrusion on the side wall facing the central axis of the mounting groove, and the top of the protrusion is lower than the bottom of the second needle body in the mounting groove. The upper part of the protrusion is configured as an arc-shaped surface structure. When the ejector pin body is fixed in the mounting groove, the orthographic projection structure of the protrusion on the bottom of the mounting groove covers the orthographic projection structure of the limiting structure on the bottom of the mounting groove; the orthographic projection structure of the protrusion on the bottom of the mounting groove at least partially covers the orthographic projection structure of the second pin body on the bottom of the mounting groove.

5. The ejector pin component according to claim 1, characterized in that, The number of limiting structures is set to several, and the several limiting structures are evenly spaced along the circumference of the mounting groove, and together they form a locking structure surrounding the outer peripheral wall of the second needle body. The limiting structure includes a lateral limiting part and a vertical limiting part. The lateral limiting part is disposed on the top of the vertical limiting part and is perpendicular to each other in the axial section of the mounting groove. The lateral limiting part extends radially to abut against the top of the stop step, thereby forming an axial limiting on the second needle body. The vertical limiting part extends axially to abut against the side wall of the second needle body, thereby forming a radial limiting on the second needle body.

6. The ejector pin component according to claim 4, characterized in that, The protrusion includes a supporting structure and a gap maintaining structure disposed at the bottom of the supporting structure and extending along the axial direction. In the axial section of the mounting groove, the supporting structure is fan-shaped and the gap maintaining structure is rectangular. The maximum radial width of the gap maintaining structure is equal to the maximum radial width of the supporting structure. When the second needle moves axially downward, the supporting structure moves radially toward the side wall of the mounting groove under the action of compression. When the second needle passes the supporting structure and slides against the gap maintaining structure, the distance between the innermost side of the supporting structure and the central axis of the mounting groove is maintained to be less than the distance between the innermost side of the limiting structure and the central axis of the mounting groove.

7. The ejector pin component according to claim 3, characterized in that, The second elastic element includes an elastic element body and a support portion disposed on the top of the elastic element body. The elastic element body is fixedly connected to the bottom of the mounting groove, and the support portion abuts against the bottom of the second needle body.

8. The ejector pin component according to claim 7, characterized in that, A support member is movably provided in the mounting groove along its axial direction. The end of the first elastic member away from the movable connector is connected to the vertical part of the support member, and the end of the second elastic member away from the second needle body is connected to the horizontal part of the support member. The support portion has a through movable hole along the axial direction. An adjusting screw is threaded into the transverse portion of the support member. The bottom of the adjusting screw is rotatably disposed on the bottom of the mounting groove. The top of the adjusting screw passes through the elastic member body and extends into the movable hole. By turning the adjusting screw, the support member moves toward or away from the bottom of the mounting groove, thereby adjusting the axial height of the ejector pin body.

9. The ejector pin component according to claim 1, characterized in that, A sealing member is movably sleeved on the outer wall of the first needle body, and the projection structure of the sealing member at the opening end of the mounting groove covers the opening end of the mounting groove, so that when the ejector pin body is fixed in the mounting groove, the sealing member blocks the opening end of the mounting groove.

10. The ejector pin component according to claim 1, characterized in that, The ejector pin body has a through-hole along its radial direction, and the through-hole is located near the top of the ejector pin body to facilitate the pulling of the ejector pin body.

11. A plasma processing device, characterized in that, The device includes a process cavity, a wafer carrier stage, and a ejector pin component as described in any one of claims 1 to 10 disposed within the process cavity. The wafer carrier stage is disposed within the process cavity and has a through hole. The ejector pin body of the ejector pin component is movably disposed within the through hole.

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