Sample positioning device and sample positioning equipment

Abstract

The invention relates to a sample positioning device and sample positioning equipment, and the sample positioning device comprises a fixed frame, a mounting frame and a mounting part. The mounting frame can move along a first direction relative to the fixed frame; the mounting part is used for mounting a sample, is arranged on the mounting rack and can move along a second direction relative to the mounting rack, and the first direction is perpendicular to the second direction; the installation frame is further provided with an indicating part, the indicating part comprises two indicating pieces, the two indicating pieces are located on the two sides of the front face and the back face of the installation part respectively, and the projections of the two indicating pieces on the front face of the installation part coincide. According to the sample positioning device and the sample positioning equipment, a mark can be positioned on the smooth back surface of the sample in a memory mode, the baffle is attached to the back surface of the sample in the process that the sample is polished through an ion grinding machine, the problem of lamination can be avoided, and meanwhile the processing efficiency can be improved.

Description

Technical Field

[0001] This application relates to the field of positioning equipment technology, specifically to a sample positioning device and sample positioning equipment. Background Technology

[0002] An ion mill uses an argon ion beam to cut and polish samples, producing a flat cross-section free from stress damage and surface contamination. It is suitable for morphological observation and elemental structure analysis under a scanning electron microscope and is widely used in electronic / photovoltaic materials, lithium-ion batteries, ceramics, metallic materials, polymer materials, semiconductor materials, etc.

[0003] When polishing samples using an ion mill, the sample is first placed on the grinding platform with its front side against a baffle, the non-grinding area is blocked by the baffle, and the target area on the front side of the sample is exposed. The target area is then positioned relative to the ion beam grinding location under an optical microscope before finally being placed in the chamber. However, due to the unevenness of the front side of the wafer sample and the gaps between the sample and the baffle, layers can accumulate at these gaps during the grinding process, affecting the observation of the sample morphology and elemental analysis.

[0004] To avoid the problem of sample layering during grinding, existing technologies can use silicone plates / resin to embed the sample to flatten the sample surface. However, this method is relatively complicated and generally takes more than 9 hours. The long sample preparation cycle of this method seriously reduces the processing rate.

[0005] Therefore, how to avoid the problem of layering while improving processing efficiency during the polishing process of samples using an ion mill is a technical problem that urgently needs to be solved by those skilled in the art. Summary of the Invention

[0006] The purpose of this application is to provide a sample positioning device and sample positioning equipment that can mark the smooth back of the sample. During the polishing process of the sample by an ion mill, the baffle is in contact with the back of the sample, which can avoid the problem of layering and improve the processing efficiency.

[0007] To address the aforementioned technical problems, this application provides a sample positioning device, comprising a fixing frame, a mounting frame, and a mounting part; the mounting frame is movable relative to the fixing frame along a first direction; the mounting part is used to mount a sample, the mounting part is disposed on the mounting frame, and is movable relative to the mounting frame along a second direction, the first direction and the second direction being perpendicular; the mounting frame is further provided with an indicator part, the indicator part comprising two indicator elements, the two indicator elements being respectively located on the front and back sides of the mounting part, and the projections of the two indicator elements on the front side of the mounting part overlapping.

[0008] The mounting section is used to mount the sample, fixing it so that the front of the sample faces upwards. Then, the sample is moved under the microscope to find the target area. Specifically, the mounting frame moves the sample relative to the fixed frame in a first direction, while the mounting section moves relative to the mounting frame in a second direction until the target area is found under the microscope. Then, the relative positions of the mounting frame and the fixed frame in the first direction are limited and fixed, and the relative positions of the mounting section and the mounting frame in the second direction are limited and fixed. One indicator of the indicator section points to the target area on the front of the sample, while the other indicator of the indicator section points to the indicator area on the back of the sample, which corresponds to the target area.

[0009] Then the mounting bracket can be flipped so that the front of the sample is facing down and the back is facing up. At this time, the laser positioning device can be used to perform laser positioning on the back of the sample according to the indicated area indicated by the indicator to form an indicator mark. Then, the sample can be removed. During the grinding process, the baffle can be attached to the back and the indicator mark exposed. The ion mill performs grinding operation according to the indicator mark. This can achieve grinding of the target area at the same time. Since the back of the sample is a silicon substrate with a flat structure, it can fit well with the baffle, avoiding the problem of layering between the sample and the baffle, thereby ensuring the accuracy of subsequent sample observation, detection and analysis.

[0010] Furthermore, compared with the traditional method of embedding samples with silicone plates / resin to flatten the sample surface, the method of this application can greatly shorten the sample preparation cycle and does not require the use of chemicals, thus improving safety performance.

[0011] Optionally, the mounting part includes a first mounting member, a second mounting member, and a connecting rod. The connecting rod is connected between the first mounting member and the second mounting member and is used to adjust the distance between the first mounting member and the second mounting member to clamp and fix the sample between the first mounting member and the second mounting member.

[0012] Optionally, one end of the connecting rod is provided with a head, and the other end is provided with a threaded portion. The threaded portion can be threadedly engaged with a threaded hole provided in the second mounting member, or the threaded portion can be engaged with a nut. The nut is provided on the side of the second mounting member away from the first mounting member.

[0013] Optionally, the mounting bracket includes a circumferentially arranged frame, and the mounting bracket further includes a first slide rail disposed on the frame, the first slide rail being disposed along the second direction; the mounting part is located in the area enclosed by the frame, and at least one of the first mounting member and the second mounting member is capable of sliding along the first slide rail.

[0014] Optionally, it further includes a guide rod, which is parallel to the first slide rail, and one end of the guide rod is fixed to the mounting part, while the other end is slidably passed through a guide hole provided in the mounting bracket; or, one end of the guide rod is fixed to the mounting bracket, while the other end of the guide rod is slidably passed through a guide hole provided in the mounting part.

[0015] Optionally, the mounting bracket further includes a second slide rail disposed on the frame, and the indicator part further includes a slider and two connectors, the two indicator pieces being respectively connected to the ends of the two connectors, the slider or the connectors being further provided with a third slide rail, the slider and the connectors being connected and being able to slide relative to each other along the third slide rail; of the second slide rail and the third slide rail, one is disposed along the first direction and the other is disposed along the second direction.

[0016] Optionally, the front and back of the mounting bracket are also provided with scales parallel to the second slide rail.

[0017] Optionally, it also includes an actuating rod, the end of which is fixed to the mounting bracket; the mounting bracket is provided with a fixing block, the fixing block is provided with a through hole, the axes of the actuating rod and the through hole are both arranged along a first direction, the actuating rod passes through the through hole, and the actuating rod can slide and rotate relative to the through hole.

[0018] Optionally, the actuating rod is further provided with two first fixing members along the axial direction. The first fixing members can slide along the axial direction of the actuating rod and are fixed to the actuating rod. The two first fixing members are respectively located on both sides of the fixing block.

[0019] This application also provides a sample positioning device, including an operating table, a microscope, a laser positioning device, and the sample positioning device as described above. The fixing frame of the sample positioning device is fixed to the operating table, and the laser positioning device is used to perform laser positioning on the back side of the sample mounted on the mounting part according to the indicator.

[0020] The sample positioning device with the sample positioning device described above has similar technical effects to the sample positioning device described above, and will not be described in detail here for the sake of saving space. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the structure of a sample positioning device provided in an embodiment of this application.

[0022] Appendix Figure 1 The reference numerals in the attached figures are explained as follows:

[0023] 1 fixed frame, 11 fixed blocks;

[0024] 2. Mounting bracket; 21. Frame; 22. First slide rail; 23. Second slide rail;

[0025] 3. Mounting section; 31. First mounting component; 32. Second mounting component; 33. Connecting rod;

[0026] 4. Indicator section; 41. Indicator element; 42. Slider; 43. Connector;

[0027] 5. Actuating lever; 51. First fixing component; 52. Operating part;

[0028] 6 guide rods;

[0029] 7. Second fastener;

[0030] 8. Third fastener;

[0031] 9 samples, 91 target areas. Detailed Implementation

[0032] To enable those skilled in the art to better understand the technical solutions of this application, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0033] This application provides a sample positioning device and a sample positioning apparatus. The sample positioning apparatus includes an operating table, a microscope, a laser positioning device, and a sample positioning device. For samples with different front and back structures, the front side has a target area that needs to be observed or tested, but the location of this target area cannot be known from the back side. The sample positioning device and sample positioning apparatus provided in this embodiment can form an indicator mark on the back side of the sample. This indicator mark corresponds to the target area on the front side of the sample, facilitating subsequent operations on the sample.

[0034] Taking wafer sample 9 as an example, before inspecting the target area 91 on the front side of the wafer, it needs to be polished using an ion mill. During the polishing process, a baffle is needed to shield the areas that do not need to be polished. Because the front side of sample 9 is uneven, gaps are left between it and the baffle. During polishing, a buildup will form in the gaps, affecting the morphology observation and elemental analysis of sample 9. The back side of sample 9 is smooth and can avoid the problem of buildup after it is attached to the baffle. However, the back side is a silicon substrate without patterns, so the target area 91 cannot be located during the polishing process, and therefore the target area 91 cannot be accurately polished.

[0035] The sample positioning device provided in this embodiment can form an indicator area corresponding to the target area 91 on the back of the sample 9. During the grinding process of the wafer sample 9 by the ion mill, the baffle can be attached to the back of the sample 9 to expose the indicator area. The target area 91 can be ground by grinding the sample 9 according to the indicator area by the ion mill. Since the back of the sample 9 is flat and attached to the baffle during the grinding process, the accumulation of layers can be avoided, thereby avoiding the impact on the detection of the sample 9.

[0036] Specifically, such as Figure 1 As shown, the sample positioning device includes a fixed frame 1, a mounting frame 2, and a mounting part 3. The mounting frame 2 is disposed on the fixed frame 1 and can move relative to the fixed frame 1 in a first direction. The mounting part 3 is disposed on the mounting frame 2 and is used to mount the sample 9. The mounting part 3 can move relative to the mounting frame 2 in a second direction. The first direction and the second direction are perpendicular.

[0037] The positioning device also includes an indicator section 4, which comprises two indicator elements 41. These two indicator elements 41 are respectively disposed on the front and back sides of the mounting section 3, and the projections of the two indicator elements 41 on the front side of the mounting section 3 coincide. Here, the front and back sides of the mounting section 3 refer to the front and back sides of the sample 9 when the mounting section 3 is equipped with the sample 9. The projections of the two indicator elements 41 on the front side of the mounting section 3 coincide, and when the mounting section 3 is equipped with the sample 9, the projections of the two indicator elements 41 on the front side of the sample 9 coincide.

[0038] In other words, when one indicator 41 points to the target area 91 on the front of the sample 9, the other indicator 41 points to the same position on the back of the sample 9 as the target area 91 on the front. The target area 91 refers to the location on the front of the sample 9 to be tested, i.e., the location that needs to be ground by the ion milling equipment.

[0039] In detail, the mounting part 3 is used to mount the sample 9, fixing the sample 9 to the mounting part 3 so that the front of the sample 9 faces upward. Then, the sample 9 is moved under the microscope to find the target area 91. Specifically, the mounting frame 2 drives the sample 9 to move relative to the fixing frame 1 in the first direction, while the mounting part 3 moves relative to the mounting frame 2 in the second direction until the target area 91 is found under the microscope. Then, the relative positions of the mounting frame 2 and the fixing frame 1 in the first direction are limited and fixed, and the relative positions of the mounting part 3 and the mounting frame 2 in the second direction are limited and fixed. One indicator 41 of the indicator part 4 points to the target area 91 on the front of the sample 9. At this time, the other indicator 41 of the indicator part 4 can point to the indicator area on the back of the sample 9, which corresponds to the target area 91.

[0040] Then the mounting bracket 2 can be flipped so that the front of the sample 9 is facing down and the back is facing up. At this time, the laser positioning device can be used to perform laser positioning on the back of the sample 9 according to the indicated area indicated by the indicator 41 to form an indicator mark. Then, the sample 9 can be removed. During the grinding process, the baffle can be attached to the back and the indicator mark exposed. The ion mill performs grinding operation according to the indicator mark. This can achieve grinding of the target area 91 at the same time. Since the back of the sample 9 is a silicon substrate with a flat structure, it can fit well with the baffle, avoiding the problem of layering between the sample 9 and the baffle, thereby ensuring the accuracy of subsequent sample observation, detection and analysis.

[0041] Furthermore, compared with the traditional method of embedding samples with silicone plates / resin to flatten the sample surface, the method of this application can greatly shorten the sample preparation cycle and does not require the use of chemicals, thus improving safety performance.

[0042] like Figure 1 As shown, the mounting part 3 includes a first mounting member 31, a second mounting member 32, and a connecting rod 33. The connecting rod 33 connects the first mounting member 31 and the second mounting member 32, and can be used to adjust the distance between the first mounting member 31 and the second mounting member 32, and can clamp the sample 9 between the first mounting member 31 and the second mounting member 32. This configuration is applicable to samples 9 of different sizes, ensuring the stability of sample 9 installation.

[0043] Furthermore, one end of the connecting rod 33 is provided with a head and the other end is provided with a threaded part. Specifically, the first mounting member 31 is provided with a through hole and the second mounting member 32 is provided with a threaded hole. The connecting rod 33 passes through the through hole, the head is located on the side of the first mounting member 31 away from the second mounting member 32, and the threaded part passes through the threaded hole and is threadedly engaged with the threaded hole. As the connecting rod 33 rotates, the distance between the first mounting member 31 and the second mounting member 32 can be adjusted.

[0044] Alternatively, both the first mounting member 31 and the second mounting member 32 may be provided with through holes, and the connecting rod 33 may pass through each through hole in sequence and be threaded with the nut. The nut is located on the side of the second mounting member 32 away from the first mounting member 31. The head of the connecting rod 33 and the nut abut against the first mounting member 31 and the second mounting member 32 respectively, so that the sample 9 is clamped and fixed between the first mounting member 31 and the second mounting member 32.

[0045] There are two sets of connecting rods 33, with at least one rod in each set. The two sets of connecting rods 33 are spaced apart and located on both sides of the sample 9, so that an installation space for installing the sample 9 can be formed between the first mounting part 31, the second mounting part 32, and the two connecting rods 33.

[0046] Of course, in this embodiment, the structure of the connecting rod 33 is not limited. For example, it can also be set as a telescopic component, such as a helical spring, or it can be set as a screw and a sleeve, with the sleeve sleeved on the outside of the screw and an internal threaded part provided inside the sleeve. When the connecting rod 33 is set as having a head at one end and a threaded part at the other end, the overall structure can be simplified and the cost can be reduced while ensuring the stability of the sample 9 installation.

[0047] In this embodiment, the specific structure of the mounting part 3 is not limited. For example, it can also be set as a frame and a clamping member (such as a C-clamp) on the frame, and the sample 9 can be clamped and fixed in the frame by the clamping member. Setting the mounting part 3 as a structure including a first mounting member 31, a second mounting member 32 and a connecting rod 33 can be used for samples 9 of different sizes, and the overall structure is simple and easy to disassemble and assemble.

[0048] Specifically, the mounting bracket 2 is a frame structure, including multiple side frames 21 arranged circumferentially. The mounting part 3 is located in the area enclosed by the side frames 21. In this way, it is convenient to indicate the corresponding position of the sample 9 from the front and back sides respectively by two indicator pieces 41. At the same time, setting the mounting bracket 2 as a frame structure enclosed by the side frames 21 has better stability.

[0049] The framework can specifically be as follows: Figure 1 The mounting bracket 2 includes four side frames 21, with two side frames 21 arranged along the second direction each having a corresponding first slide rail 22. In other words, the mounting bracket 2 includes two parallel first slide rails 22, and the two ends of the mounting part 3 slide along these two first slide rails 22 respectively. The first slide rails 22 provide guidance for the sliding of the mounting part 3, ensuring the stability of the mounting part 3 relative to the mounting bracket 2 as it slides along the second direction.

[0050] Specifically, the two ends of the first mounting member 31 can slide along the two first slide rails 22 respectively, or the two ends of the second mounting member 32 can slide along the two first slide rails 22 respectively, or the first mounting member 31 and the second mounting member 32 can slide along the two first slide rails 22 simultaneously respectively.

[0051] Specifically, there are no restrictions on the specific structure of the first slide rail 22; it can be either a groove or a rail. The end of the mounting part 3 is provided with a sliding element that can slide along the groove or rail. Alternatively, it can be as follows: Figure 1 The mounting part 3 shown is provided with sliding grooves at both ends, and the sliding grooves can slide along the first slide 22.

[0052] like Figure 1As shown, the positioning device also includes a guide rod 6, which is arranged along the second direction and parallel to the first slide rail 22. One end of the guide rod 6 is fixed to the mounting part 3, and the other end slidably passes through the frame edge 21 of the frame. That is, the frame edge 21 of the frame has a through hole, through which the guide rod 6 passes and can slide relative to the through hole. As the mounting part 3 slides along the first slide rail 22, it can drive the guide rod 6 to slide relative to the through hole. Alternatively, one end of the guide rod 6 can be fixed to the frame edge 21, and the mounting part 3 can have a through hole through which the guide rod 6 can slidably pass. The guide rod 6 further guides the sliding of the mounting part 3, ensuring smooth and stable sliding.

[0053] like Figure 1 As shown, the mounting bracket 2 is also provided with a second slide rail 23. The indicator part 4 includes a slider 42 and two connecting members 43. The slider 42 can slide along the second slide rail 23. The two indicator members 41 are respectively connected to the ends of the two connecting members 43. The slider 42 is also provided with a third slide rail. The connecting members 43 can slide relative to the slider 42 along the third slide rail. Specifically, the second slide rail 23 can be set along the second direction and parallel to the first slide rail 22, and the third slide rail can be set along the first direction. Alternatively, the second slide rail 23 can be set along the first direction, and the third slide rail can be set along the second direction and parallel to the first slide rail 22.

[0054] Alternatively, the connector 43 may be provided with a third slide, and the slider 42 may slide relative to the connector 43 along the third slide. Figure 1 As shown, the length direction of the connector 43 is arranged along the first direction, and the slider 42 is sleeved on the outside of the connector 43. The connector 43 can slide relative to the slider 42 along its length direction. At this time, the connector 43 forms the third slide along its length direction.

[0055] In other words, the indicator 41 can slide relative to the mounting bracket 2 along the first and second directions to facilitate pointing and positioning of the target area 91 of the sample 9, offering good flexibility and wide applicability. The second slide rail 23 and the third slide rail improve the movement stability of the indicator 4. Of course, the indicator 4 can also be placed arbitrarily, such as being detachable from the mounting bracket 2 and fixed at any position on the mounting bracket 2. The indicator 4 slides along the second slide rail 23, and the indicator 4 will not detach from the mounting bracket 2, preventing the indicator 4 from being lost.

[0056] After the slider 42 slides along the second slide rail 23 to the target area 91, it can be fixed to the mounting bracket 2 by the second fixing member 7. After the indicator 41 slides relative to the slider 42 along the third slide rail to the target area 91, it can be fixed to the slider 42 by the third fixing member 8. Specifically, there are no restrictions on the specific structure of the second fixing member 7 and the third fixing member 8. They can be fasteners or clamping parts, etc.

[0057] The mounting bracket 2 also has scales on its front and back sides, arranged parallel to the second slide rail 23. These scales can be located on either the frame 21 or the second slide rail 23. The scales indicate the position of the indicator 41. Before and after flipping the bracket, the scales on the two indicators 41 can be observed to ensure consistency in their positions. Alternatively, in this embodiment, the third slide rail can also have corresponding scales.

[0058] Specifically, there are no specific restrictions on the scale setting, and the scale accuracy can be consistent with the micrometer accuracy (10um, which can be estimated to 1um), thus further ensuring the indicating accuracy of the indicator 41.

[0059] like Figure 1 As shown, the positioning device also includes an actuating rod 5, the end of which is fixed to the mounting bracket 2. The mounting bracket 1 is also provided with a fixing block 11, which has a through hole. The axis of the actuating rod 5 and the axis of the through hole are both arranged along the first direction. The actuating rod 5 passes through the through hole and can slide and rotate relative to the through hole.

[0060] During the process of sliding along the through hole in the axial direction, the actuating rod 5 can drive the mounting frame 2, the mounting part 3, and the sample 9 to move relative to the fixed frame 1 in the first direction. During the process of rotating relative to the through hole, the actuating rod 5 can drive the mounting frame 2, the mounting part 3, and the sample 9 to rotate relative to the fixed frame 1 around the axis set in the first direction, so as to realize the flipping of the sample 9.

[0061] In other words, the mounting bracket 2 can be flipped relative to the fixed bracket 1. After adjusting the indicator 41 of the indicator part 4 to point to the target area 91 and fixing the relative position of the indicator part 4 and the sample 9, the mounting bracket 2 is flipped relative to the fixed bracket 1 so that the front of the sample 9 is facing down and the back is facing up. Then, laser positioning can be performed according to the indicated area of ​​the indicator 41 by the laser positioning device. Specifically, the mounting bracket 2 can be flipped relative to the fixed bracket 1 around the axis of the operating rod 5 by rotating the operating rod 5.

[0062] Of course, in this embodiment, the mounting bracket 2 may not need to be flipped relative to the fixed bracket 1. After adjusting the indicator 41 of the indicator part 4 to point to the target area 91 and fixing the relative position of the indicator part 4 and the sample 9, the entire sample positioning device can be flipped directly.

[0063] When the mounting bracket 2 can be flipped relative to the fixed bracket 1, the fixed bracket 1 can be fixed to the operating table. Specifically, it can be fixed with bolts or with a clamping mechanism. The position of the fixed bracket 1 does not need to change. After the mounting bracket 2 is flipped, the operating table can also move the fixed bracket 1 to the laser positioning device to perform laser positioning operations. This setting simplifies the flipping operation and also reduces the driving force during flipping.

[0064] The mounting bracket 2 can be moved relative to the fixed frame 1 in the first direction by moving the moving rod 5, and the mounting bracket 2 can be flipped relative to the fixed frame 1 by rotating the moving rod 5. This setting simplifies the overall structure and facilitates operation.

[0065] Of course, in this embodiment, there are no specific restrictions on how the mounting bracket 2 moves relative to the fixed bracket 1 along the first direction, or how the mounting bracket 2 rotates relative to the fixed bracket 1 about an axis set along the first direction.

[0066] Alternatively, a transition section can be provided, which has a slide rail arranged along the first direction. The mounting bracket 2 can slide along the slide rail, and the transition section can rotate relative to the fixed bracket 1 about an axis arranged along the first direction.

[0067] By setting the actuating rod 5 and the fixing block 11, it is possible to achieve both sliding of the rotating frame relative to the fixing frame 1 along the first direction and rotation of the rotating frame relative to the fixing frame 1 around the axis set along the first direction. In this way, the specific structure of the positioning device can be simplified and the cost can be reduced.

[0068] Furthermore, the actuating rod 5 is also provided with two first fixing members 51 along the axial direction. The first fixing members 51 can slide along the axial direction of the actuating rod 5, and after sliding to an appropriate position, the first fixing members 51 can be fixed to the actuating rod 5. The two first fixing members 51 are respectively located on both sides of the fixing block 11. After the actuating rod 5 moves along the first direction to the sample 9 and moves to an appropriate position, the two fixing members can be pressed against both sides of the fixing block 11 and fixed to the actuating rod 5. At this time, the relative position of the actuating rod 5 and the through hole in the axial direction (i.e., the first direction) is fixed, and the mounting bracket 2 cannot move relative to the fixing bracket 1 in the first direction. However, the actuating rod 5 can still rotate in the through hole, that is, the mounting bracket 2 can rotate relative to the fixing bracket 1.

[0069] By limiting the positions of the actuating rod 5 and the fixing block 11 by the two first fixing parts 51, it can be ensured that when the actuating rod 5 rotates in the through hole, the position of the sample 9 relative to the fixing frame 1 in the first direction is avoided, the structure has good stability and can ensure accurate positioning.

[0070] In this embodiment, the specific structure of the first fixing member 51 is not limited. For example, the first fixing member 51 can be a clamping member, which is fixed by clamping. Figure 1 As shown, the first fixing member 51 is a ring structure with an opening. The two ends of the opening are respectively provided with fixing plates. The two fixing plates can be connected by fasteners to adjust the size of the opening, thereby adjusting the tightness of the ring structure outside the actuating rod 5, so as to achieve fixation with the actuating rod 5.

[0071] Alternatively, in this embodiment, the outer wall of the actuating rod 5 may be provided with a threaded portion, and the first fixing member 51 may be provided as a nut. The nut is threadedly engaged with the threaded portion, and the position adjustment and fixation in the axial direction of the actuating rod 5 can be achieved by rotating the nut relative to the actuating rod 5.

[0072] When the first fixing member 51 is set as a clamping member, the position of the first fixing member 51 in the axial direction of the actuating rod 5 can be adjusted conveniently and quickly, which simplifies the adjustment operation and improves the adjustment efficiency.

[0073] An operating part 52 is also provided on the side of the actuating lever 5 away from the mounting bracket 2. The operating part 52 can be a handwheel, handle or the like, to facilitate the movement and rotation of the actuating lever 5.

[0074] The above are merely preferred embodiments of this application. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of this application, and these improvements and modifications should also be considered within the scope of protection of this application.

Claims

1. A sample positioning device, characterized by, The mounting device comprises a fixing frame (1), a mounting frame (2) and a mounting part (3); The mounting frame (2) is movable relative to the fixing frame (1) along a first direction; The mounting part (3) is used for mounting a sample (9), and is arranged on the mounting frame (2) and movable relative to the mounting frame (2) along a second direction, wherein the first direction is perpendicular to the second direction; The mounting frame (2) is further provided with an indicating part (4), and the indicating part (4) comprises two indicating members (41), which are respectively arranged on the front side and the back side of the mounting part (3), and the projections of the two indicating members (41) on the front side of the mounting part (3) are coincident.

2. The sample positioning device of claim 1, wherein, The mounting part (3) comprises a first mounting member (31), a second mounting member (32) and a connecting rod (33), the connecting rod (33) is connected between the first mounting member (31) and the second mounting member (32), and is used for adjusting the distance between the first mounting member (31) and the second mounting member (32) to clamp and fix the sample (9) between the first mounting member (31) and the second mounting member (32).

3. The sample positioning device of claim 2, wherein, One end of the connecting rod (33) is provided with a head part, and the other end is provided with a threaded part, the threaded part can be threadedly matched with a threaded hole arranged on the second mounting member (32), or the threaded part can be matched with a nut, and the nut is arranged on the side of the second mounting member (32) away from the first mounting member (31).

4. The sample positioning device according to any one of claims 1 to 3, characterized in that The mounting frame (2) comprises a frame (21) arranged in a circumferential direction, and further comprises a first sliding channel (22) arranged on the frame (21), and the first sliding channel (22) is arranged along the second direction; The mounting part (3) is arranged in an area enclosed by the frame (21), and at least one of the first mounting member (31) and the second mounting member (32) can slide along the first sliding channel (22).

5. The sample positioning device of claim 4, wherein, Further comprising a guide rod (6), the guide rod (6) is parallel to the first sliding channel (22), one end of the guide rod (6) is fixed to the mounting part (3), and the other end of the guide rod (6) slidably penetrates a guide hole arranged on the mounting frame (2), or one end of the guide rod (6) is fixed to the mounting frame (2), and the other end of the guide rod (6) slidably penetrates a guide hole arranged on the mounting part (3).

6. The sample positioning device of any of claims 1-3, wherein, The mounting frame (2) further comprises a second sliding channel (23) arranged on the frame (21), and the indicating part (4) further comprises a sliding block (42) and two connecting members (43), the two indicating members (41) are respectively connected to the end portions of the two connecting members (43), and the sliding block (42) or the connecting member (43) is further provided with a third sliding channel, and the sliding block (42) and the connecting member (43) are connected and can slide relative to each other along the third sliding channel; One of the second sliding channel (23) and the third sliding channel is arranged along the first direction, and the other is arranged along the second direction.

7. The sample positioning device of claim 6, wherein, The front and back of the mounting frame (2) are respectively provided with scales parallel to the second slide (23).

8. The sample positioning device of any of claims 1-3, wherein, Further comprising an action lever (5), an end of the action lever (5) is fixed with the mounting frame (2); The fixing frame (1) is provided with a fixing block (11), the fixing block (11) is provided with a through hole, the action lever (5) and the axis of the through hole are both arranged along a first direction, the action lever (5) passes through the through hole, and the action lever (5) can slide and rotate relative to the through hole.

9. The sample positioning device of claim 8, wherein, The action lever (5) is further provided with two first fixing members (51) along the axial direction, the first fixing members (51) can slide along the axial direction of the action lever (5) and are fixed with the action lever (5), and the two first fixing members (51) are respectively located on the two sides of the fixing block (11).

10. A sample positioning apparatus, characterized by, The sample positioning device is fixed to the operation table, and the laser positioning device is used for laser positioning on the back of the sample (9) fixed to the mounting portion (3) according to the indicating member (41).

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