Treatment method of DLC (Diamond Like Carbon) film

Abstract

The invention discloses a treatment method of a DLC film, which comprises the following steps: covering a to-be-protected area on the surface of an original DLC film by using a resin adhesive, the to-be-protected area being other areas on the surface of the original DLC film except the to-be-treated area; after the resin adhesive in the to-be-protected area is cured, the original DLC film is placed in a vacuum chamber; the original DLC film is heated to a preset temperature in the vacuum chamber, and meanwhile an external electric field is applied to the original DLC film; and after a preset time, converting the carbon element in the to-be-treated region into a graphite structure by utilizing the electron migration characteristic of the carbon element. By adopting the technical scheme provided by the invention, part of carbon elements in the DLC film can be converted into a graphite structure, and the method has the advantages of low energy consumption, low cost, short treatment time, simple process and the like.

Description

Technical Field

[0001] This invention relates to the field of membrane modification technology, and more particularly to a method for processing DLC ​​membranes. Background Technology

[0002] DLC (Diamond-Like Carbon) films have the following advantages: 1. Super hardness: DLC films have a hardness close to that of natural diamonds, with excellent wear resistance and scratch resistance; 2. Low coefficient of friction: DLC films have a smooth surface, which can reduce frictional losses between devices; 3. Corrosion resistance: DLC films have good resistance to chemical corrosion and oxidation.

[0003] However, DLC films also have many problems in practical applications, such as easy detachment and brittleness. Converting a portion of the DLC in the film into graphite can effectively solve these problems. Existing methods for converting DLC ​​into graphite mainly rely on high-temperature processing or plasma processing, which have drawbacks such as high energy consumption, high cost, long processing time, and complex processes. Summary of the Invention

[0004] The purpose of this invention is to provide a method for processing DLC ​​films, which can convert some of the carbon elements in the DLC film into a graphite structure, and has the advantages of low energy consumption, low cost, short processing time and simple process.

[0005] To achieve the above objectives, embodiments of the present invention provide a method for processing DLC ​​films, comprising:

[0006] The area to be protected on the surface of the original DLC film is covered with resin adhesive. The area to be protected is the area on the surface of the original DLC film other than the area to be treated.

[0007] After curing the resin adhesive in the area to be protected, the original DLC film is placed in a vacuum chamber;

[0008] The original DLC film is heated to a preset temperature in the vacuum chamber while an external electric field is applied to the original DLC film.

[0009] After a preset time, the carbon elements in the region to be processed are transformed into a graphite structure by utilizing the electron migration properties of carbon.

[0010] Furthermore, the thickness of the original DLC film is 100–150 nm.

[0011] Furthermore, the resin adhesive is arranged in the form of adhesive dots on the surface of the original DLC film in an orderly manner, either laterally or longitudinally.

[0012] Furthermore, the adhesive dots are all the same size and have the same shape.

[0013] Furthermore, the shape of the adhesive dots is square, round, or rhomboid.

[0014] Furthermore, the preset temperature is 450℃~500℃.

[0015] Furthermore, the voltage of the applied electric field is 4 to 5 kV.

[0016] Furthermore, the preset time is 15 to 18 minutes.

[0017] Compared with existing technologies, this invention provides a method for processing DLC ​​films. First, a resin adhesive is used to cover the area to be protected on the surface of the original DLC film. This area includes all regions on the surface of the original DLC film except for the area to be treated. Next, after the resin adhesive in the protected area is cured, the original DLC film is placed in a vacuum chamber. Then, the original DLC film is heated to a preset temperature in the vacuum chamber while an external electric field is applied. Finally, after a preset time, the carbon elements in the area to be treated are transformed into a graphite structure by utilizing the electron migration properties of carbon. This invention can transform some of the carbon elements in a DLC film into a graphite structure and has advantages such as low energy consumption, low cost, short processing time, and simple process. Attached Figure Description

[0018] Figure 1 This is a flowchart of a preferred embodiment of a DLC film processing method provided by the present invention. Detailed Implementation

[0019] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0020] This invention provides a method for processing DLC ​​films, see [link to relevant documentation]. Figure 1 The diagram shown is a flowchart of a preferred embodiment of a DLC film processing method provided by the present invention, the method comprising steps S11 to S14:

[0021] Step S11: Use resin adhesive to cover the area to be protected on the surface of the original DLC film. The area to be protected is the area on the surface of the original DLC film other than the area to be treated.

[0022] Step S12: After curing the resin adhesive in the area to be protected, place the original DLC film in a vacuum chamber;

[0023] Step S13: Heat the original DLC film to a preset temperature in the vacuum chamber, while applying an external electric field to the original DLC film.

[0024] Step S14: After a preset time, the carbon elements in the region to be processed are transformed into a graphite structure by utilizing the electron migration characteristics of carbon elements.

[0025] In practice, firstly, a raw DLC film containing carbon elements is prepared, and the surface of the raw DLC film is divided into areas to be treated and areas to be protected. Then, resin adhesive is used to cover and protect the areas to be protected on the surface of the raw DLC film to prevent electron migration of carbon elements in these areas under an applied electric field during subsequent processing. Next, after curing the resin adhesive on the areas to be protected on the surface of the raw DLC film, the raw DLC film is placed in a vacuum chamber. Then, the raw DLC film is processed in the vacuum chamber. The membrane is heated to a preset temperature while an external electric field is applied. Finally, after maintaining the temperature and the applied electric field for a preset time, the carbon elements in the treatment area on the surface of the original DLC membrane are transformed into a graphite structure by utilizing the electron migration characteristics of carbon elements under the applied electric field, thus forming a graphite film material. Understandably, since the protection area on the surface of the original DLC membrane is covered by resin, the carbon elements in the protection area do not undergo electron migration and remain as the original DLC film material.

[0026] In one alternative embodiment, the thickness of the original DLC film is 100–150 nm.

[0027] Specifically, in conjunction with the above embodiments, the thickness of the original DLC film processed in the embodiments of the present invention is in the range of 100nm to 150nm.

[0028] For example, the thickness of the original DLC film can be 100nm, 105nm, 110nm, 115nm, 120nm, 125nm, 130nm, 135nm, 140nm, 145nm or 150nm, and can also be set according to actual needs. This embodiment of the invention does not make specific limitations.

[0029] In one alternative embodiment, the resin adhesive is arranged in the form of adhesive dots, arranged in a transverse or longitudinal order on the surface of the original DLC film.

[0030] Specifically, in conjunction with the above embodiments, when using resin adhesive to cover and protect the area to be protected on the surface of the original DLC film, the resin adhesive is in the form of adhesive dots on the surface of the original DLC film and is arranged in an orderly manner in the horizontal or vertical direction. Correspondingly, the area to be protected on the surface of the original DLC film is also arranged in an orderly manner in the horizontal or vertical direction, and each adhesive dot covers a part of the area to be protected, and all adhesive dots cover the entire area to be protected.

[0031] In one alternative embodiment, the adhesive dots are of uniform size and shape.

[0032] Specifically, in conjunction with the above embodiments, all adhesive dots covering the entire area to be protected are of the same size, and all adhesive dots covering the entire area to be protected are of the same shape.

[0033] In one alternative embodiment, the adhesive dots are square, circular, or diamond-shaped.

[0034] Specifically, in conjunction with the above embodiments, the shape of all adhesive dots covering the entire area to be protected can be square, round, or rhomboid, or other shapes. The embodiments of the present invention do not impose specific limitations.

[0035] In one optional embodiment, the preset temperature is 450°C to 500°C.

[0036] Specifically, in conjunction with the above embodiments, when heating the original DLC film in the vacuum chamber, the original DLC film needs to be heated to a preset temperature within the range of 450°C to 500°C.

[0037] For example, the preset temperature can be 450℃, 455℃, 460℃, 465℃, 470℃, 475℃, 480℃, 485℃, 490℃, 495℃ or 500℃, and can also be set according to actual needs. This embodiment of the invention does not make specific limitations.

[0038] In one alternative embodiment, the voltage of the applied electric field is 4 to 5 kV.

[0039] Specifically, in conjunction with the above embodiments, when an external electric field is applied to the original DLC film, the voltage of the external electric field is 4kV to 5kV.

[0040] For example, the voltage of the applied electric field can be 4kV, 4.1kV, 4.2kV, 4.3kV, 4.4kV, 4.5kV, 4.6kV, 4.7kV, 4.8kV, 4.9kV or 5kV, and can also be set according to actual needs. This embodiment of the invention does not impose specific limitations.

[0041] In one optional embodiment, the preset time is 15 to 18 minutes.

[0042] Specifically, in conjunction with the above embodiments, after heating the original DLC film to 450°C to 500°C and simultaneously applying an external electric field of 4kV to 5kV to the original DLC film, the original DLC film needs to be maintained under these conditions for a preset time within the range of 15min to 18min.

[0043] For example, the preset time can be 15 minutes, 16 minutes, 17 minutes or 18 minutes, or it can be set according to actual needs. This embodiment of the invention does not make specific limitations.

[0044] It should be noted that, under low-temperature conditions, the present invention utilizes an external electric field and the electron migration characteristics of carbon elements to achieve the transformation from carbon elements to graphite structures.

[0045] Based on all the above embodiments, the implementation process of this solution is described below through the first specific embodiment, including: (1) preparing a raw DLC film with a thickness of 100nm containing carbon elements, and dividing the surface of the raw DLC film into a treatment area to be treated and a protection area other than the treatment area. Then, the protection area on the surface of the raw DLC film is covered and protected with resin glue to prevent the carbon elements in the protection area from undergoing electron migration in the applied electric field during subsequent processing; wherein, the resin glue is arranged in the form of glue dots in a horizontal or vertical orderly manner on the surface of the raw DLC film, all glue dots are the same size and shape, and all glue dots are square, round or rhomboid in shape; (2) applying resin glue to the raw DLC film with a thickness of 100nm containing carbon elements. After the resin adhesive in the area to be protected on the surface of the LC film is cured, the original DLC film is placed in a vacuum chamber; (3) the original DLC film is heated in the vacuum chamber to 450°C, and at the same time, an external electric field with a voltage of 4kV is applied to the original DLC film; (4) after being heated to 450°C and an external electric field with a voltage of 4kV is applied, the carbon element in the area to be treated on the surface of the original DLC film is transformed into a graphite structure by utilizing the electron migration characteristics of carbon element under the action of the external electric field, and a graphite film material is formed accordingly. The area to be protected is covered by resin adhesive, so that the carbon element in the area to be protected does not undergo electron migration and continues to remain the original DLC film material.

[0046] In conjunction with all the above embodiments, the implementation process of this solution is described below through a second specific embodiment, including: (1) preparing a raw DLC film with a thickness of 125nm containing carbon elements, and dividing the surface of the raw DLC film into a treatment area to be treated and a protection area other than the treatment area. Then, using resin glue to cover and protect the protection area on the surface of the raw DLC film to prevent the carbon elements in the protection area from undergoing electron migration in the applied electric field during subsequent processing; wherein, the resin glue is arranged in the form of glue dots in a horizontal or vertical orderly manner on the surface of the raw DLC film, all glue dots are the same size and shape, and all glue dots are square, round or rhomboid in shape; (2) applying resin glue to the raw DLC film. After the resin adhesive in the area to be protected on the surface of the membrane is cured, the original DLC membrane is placed in a vacuum chamber; (3) the original DLC membrane is heated in the vacuum chamber to 475°C, and at the same time, an external electric field with a voltage of 4.5kV is applied to the original DLC membrane; (4) after being heated to 475°C and an external electric field with a voltage of 4.5kV is applied, the carbon elements in the area to be treated on the surface of the original DLC membrane are transformed into graphite structure by utilizing the electron migration characteristics of carbon elements under the action of the external electric field, and graphite membrane material is formed accordingly. The area to be protected is covered by resin adhesive, so that the carbon elements in the area to be protected do not undergo electron migration and continue to remain as the original DLC membrane material.

[0047] In conjunction with all the above embodiments, the implementation process of this solution is described below through a third specific embodiment, including: (1) preparing a raw DLC film with a thickness of 150nm containing carbon elements, and dividing the surface of the raw DLC film into a treatment area to be treated and a protection area other than the treatment area. Then, using resin glue to cover and protect the protection area on the surface of the raw DLC film to prevent the carbon elements in the protection area from undergoing electron migration in the applied electric field during subsequent processing; wherein, the resin glue is arranged in the form of glue dots in a horizontal or vertical orderly manner on the surface of the raw DLC film, all glue dots are the same size and shape, and all glue dots are square, round or rhomboid in shape; (2) applying resin glue to the raw DLC film with a thickness of 150nm containing carbon elements. After the resin adhesive in the area to be protected on the surface of the LC film is cured, the original DLC film is placed in a vacuum chamber; (3) the original DLC film is heated in the vacuum chamber to 500°C, and at the same time, an external electric field with a voltage of 5kV is applied to the original DLC film; (4) after being heated to 500°C and an external electric field with a voltage of 5kV is applied for 18 minutes, the carbon elements in the area to be treated on the surface of the original DLC film are transformed into graphite structure by utilizing the electron migration characteristics of carbon elements under the action of the external electric field, and graphite film material is formed accordingly. The area to be protected is covered by resin adhesive, so that the carbon elements in the area to be protected do not undergo electron migration and continue to remain as the original DLC film material.

[0048] In summary, the DLC film processing method provided by this invention involves first covering the area to be protected on the surface of the original DLC film using resin adhesive. This area includes all regions on the surface of the original DLC film except for the area to be treated. Next, after curing the resin adhesive within the protected area, the original DLC film is placed in a vacuum chamber. Then, the original DLC film is heated to a preset temperature within the vacuum chamber while an external electric field is applied. Finally, after a preset time, the carbon elements in the area to be treated are transformed into a graphite structure using the electron migration properties of carbon. This invention can transform some of the carbon elements in a DLC film into a graphite structure and has advantages such as low energy consumption, low cost, short processing time (high efficiency), and simple process. Furthermore, it has the advantages of minimal environmental pollution and ease of large-scale production, demonstrating significant application prospects and economic benefits.

[0049] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A method for processing a DLC film, characterized in that, include: The area to be protected on the surface of the original DLC film is covered with resin adhesive. The area to be protected is the area on the surface of the original DLC film other than the area to be treated. After curing the resin adhesive in the area to be protected, the original DLC film is placed in a vacuum chamber; The original DLC film is heated to a preset temperature in the vacuum chamber while an external electric field is applied to the original DLC film. After a preset time, the carbon elements in the region to be processed are transformed into a graphite structure by utilizing the electron migration properties of carbon.

2. The method for processing DLC ​​films as described in claim 1, characterized in that, The original DLC film has a thickness of 100–150 nm.

3. The method for processing DLC ​​films as described in claim 1, characterized in that, The resin adhesive is arranged in the form of adhesive dots on the surface of the original DLC film in an orderly manner, either horizontally or vertically.

4. The method for processing DLC ​​films as described in claim 3, characterized in that, The adhesive dots are all the same size and have the same shape.

5. The method for processing DLC ​​films as described in claim 3, characterized in that, The adhesive dots can be square, round, or rhomboid in shape.

6. The method for processing DLC ​​films as described in claim 1, characterized in that, The preset temperature is 450℃~500℃.

7. The method for processing DLC ​​films as described in claim 1, characterized in that, The voltage of the applied electric field is 4 to 5 kV.

8. The method for processing DLC ​​films as described in claim 1, characterized in that, The preset time is 15 to 18 minutes.

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