Compliant piston pneumatic valve actuator

Abstract

A diaphragm valve is provided. The valve body includes a valve passage including an inlet passage and an outlet passage. The diaphragm valve also includes a valve seat adjacent the valve passage. The valve also includes a diaphragm movable to disengage from or contact with the valve seat. Further, the valve includes a piston coupled to the diaphragm and a flexure assembly coupled to the piston. An input force may be applied to the piston in a first direction to output a resultant force such that when the diaphragm is in the normally closed position, the resultant force moves the diaphragm to the open position, and when the diaphragm is in the normally open position, the resultant force moves the diaphragm to the closed position. In some examples, the resultant force may be output in a second direction that may be opposite or perpendicular to the input force.

Description

Technical Field

[0001] This disclosure generally relates to diaphragm valves, and more particularly to diaphragm valves including valve components having annular flexures. Background Technology

[0002] Semiconductor processing equipment typically uses one or more reactants (i.e., precursors) as source chemicals for performing substrate processes such as deposition, cleaning, and etching. Such semiconductor processing equipment typically includes a reaction chamber into which the precursor is supplied to perform the desired process. The supply of the precursor to the reaction chamber can be performed by a precursor delivery system, and this precursor delivery system can utilize one or more valves to control the flow of the precursor into the reaction chamber.

[0003] A precursor delivery system can utilize one or more diaphragm valves located in the flow path between the precursor's source container and the reaction chamber to achieve flow control of the precursor into the reaction chamber. The precursor (e.g., a gaseous precursor) can be pulsed into the reaction chamber by opening and closing an appropriate diaphragm valve in the precursor delivery system. The diaphragm valve may include an actuator configured to open and close a flexible diaphragm abutting a valve seat. When the diaphragm valve is in the open position, the precursor is allowed to pass through the valve passage and enter the reaction chamber. When the diaphragm valve is in the closed position, the diaphragm blocks the valve passage and prevents the precursor from entering the reaction chamber.

[0004] An example of a semiconductor processing apparatus that can utilize a precursor delivery system including one or more diaphragm valves is an atomic layer deposition (ALD) apparatus. ALD is a method for depositing thin films on a substrate, involving sequential and alternating self-saturating surface reactions, in which one or more gaseous precursors can be pulsed into the ALD reaction chamber to achieve film deposition. The ALD process may require precise temperature control of the precursors, not only in the reaction chamber but also in the precursor delivery system used to supply the precursors to the reaction chamber. In particular, precise temperature control of the wetting surfaces of the precursor delivery system (i.e., those surfaces in direct contact with the precursors) may be desirable for optimal film deposition and apparatus lifetime.

[0005] Due to the large number of pulses used in the process, fast pulse valves are crucial for atomic layer deposition. However, current fast pulse valves cannot be encapsulated in a tight space because of the close proximity of the valves. Furthermore, conventionally available pneumatic fast pulse valves are limited in their speed and temperature capabilities due to friction and engagement caused by thermal expansion in the tight sliding piston joint. Additionally, any thermal expansion can lead to asymmetric expansion.

[0006] Therefore, there is a need in the art for improved diaphragm valves that do not include sliding or rotating joints and surfaces that cause friction, while maintaining good symmetry to minimize parasitic motion caused by any thermal expansion. Summary of the Invention

[0007] This summary is provided to present the chosen concepts in a simplified form. These concepts are further described in detail in the following description of exemplary embodiments of this disclosure. This summary is not intended to identify key or essential features of the claimed subject matter, nor is it intended to limit the scope of the claimed subject matter.

[0008] A valve is provided. Specifically, in some examples, a diaphragm valve is provided. The valve body includes a valve passage including an inlet passage and an outlet passage. The valve also includes a valve seat adjacent to the valve passage. The valve further includes a diaphragm movable to contact the valve seat. Additionally, the valve includes a piston coupled to the diaphragm and an annular flexure coupled to the piston.

[0009] A method of operating a diaphragm valve is provided. The method includes connecting an annular flexure to a piston of the diaphragm valve. The method further includes connecting the piston to a diaphragm. The method further includes applying an input force to the piston in a first direction to output a resultant force such that when the diaphragm is in a normally closed position, the resultant force moves the diaphragm to an open position, and when the diaphragm is in a normally open position, the resultant force moves the diaphragm to a closed position.

[0010] An actuator is provided. The actuator includes a diaphragm movable to separate from or contact a valve seat. The actuator also includes a piston coupled to the diaphragm. The actuator further includes a flexure assembly coupled to the piston, such that the diaphragm is actuated by applying a force to the flexure assembly.

[0011] All these embodiments are intended to fall within the scope of the invention disclosed herein. These and other embodiments will become apparent to those skilled in the art from the following detailed description of certain embodiments with reference to the accompanying drawings, and the invention is not limited to any particular embodiment disclosed. Attached Figure Description

[0012] Although this specification concludes with claims that are particularly pointed out and clearly claimed as embodiments of the invention, the advantages of the embodiments of this disclosure can be more readily determined from the description of certain examples of embodiments of the present disclosure when read in conjunction with the accompanying drawings, wherein:

[0013] Figure 1A and Figure 1B A cross-sectional view of an exemplary diaphragm valve according to some examples of the present technology is shown;

[0014] Figure 2 A cross-sectional view of another exemplary diaphragm valve according to some examples of the present technology is shown;

[0015] Figure 3 A cross-sectional view of yet another exemplary diaphragm valve according to some examples of the present technology is shown;

[0016] Figure 4 Examples of this technology are shown, such as Figure 2 and Figure 3 Cross-sectional view of the symmetrical flexural component in the image;

[0017] Figure 5 A flowchart of a method for operating a diaphragm valve of Figures 1-3, according to some examples of the present technology, is shown.

[0018] It should be understood that the elements in the accompanying drawings are shown for simplicity and clarity and are not necessarily drawn to scale. For example, the relative dimensions of some elements in the drawings may be exaggerated relative to other elements to help improve the understanding of the embodiments illustrated in this disclosure. Detailed Implementation

[0019] Although certain embodiments and examples are disclosed below, those skilled in the art will understand that the invention extends beyond the specific disclosed embodiments and / or uses of the invention and their obvious modifications and equivalents. Therefore, it is intended that the scope of the disclosed invention should not be limited to the specific disclosed embodiments described below.

[0020] The illustrations presented herein are not intended to be actual views of any particular material, device, structure, or apparatus, but are merely idealized representations used to describe embodiments of this disclosure.

[0021] As used herein, the term “substrate” can refer to any one or more underlying materials on which devices, circuits or films may be formed.

[0022] As used herein, the term "atomic layer deposition" (ALD) can refer to a vapor-phase deposition process in which deposition cycles, preferably multiple consecutive cycles, are performed in a processing chamber. Typically, during each cycle, a precursor is chemisorbed onto the deposition surface (e.g., a substrate surface or a previously deposited lower layer surface, such as material from a previous ALD cycle), forming a monolayer or sub-monolayer that is not readily reactive with another precursor (i.e., a self-limiting reaction). Subsequently, if desired, a reactant (e.g., another precursor or reactive gas) can be introduced into the processing chamber to convert the chemisorbed precursor into the desired material on the deposition surface. Typically, this reactant is capable of further reacting with the precursor. Furthermore, a purging step can be utilized during each cycle to remove excess precursor from the processing chamber and / or excess reactant and / or reaction byproducts after the conversion of the chemisorbed precursor. Furthermore, as used herein, the term “atomic layer deposition” is also intended to include processes specified by related terms such as “chemical vapor deposition,” “atomic layer epitaxy” (ALE), molecular beam epitaxy (MBE), gas source MBE or organometallic MBE, and chemical beam epitaxy when performed with alternating pulses of a precursor composition, a reactive gas, and a purge gas (e.g., an inert carrier gas).

[0023] As used herein, the term “chemical vapor deposition” can refer to any process in which a substrate is exposed to one or more volatile precursors that react and / or decompose on the substrate surface to produce the desired deposition.

[0024] As used in this article, the term "wetting surface" can refer to the surface of a valve that can come into direct contact with chemical precursors.

[0025] As used in this article, the term "non-wetting surface" can refer to the surface of a valve that does not come into direct contact with chemical precursors.

[0026] In this specification, it will be understood that the terms "on" or "above" can be used to describe relative positional relationships. Another element or layer may be directly on the mentioned layer, or another layer (intermediate layer) or element may be inserted therebetween, or a layer may be disposed on the mentioned layer but not completely cover the surface of the mentioned layer. Therefore, unless the term "directly" is used alone, the terms "on" or "above" will be interpreted as relative concepts. Similarly, it should be understood that the terms "below," "under," or "beneath" will be interpreted as relative concepts.

[0027] Embodiments of this disclosure may include valves, valve components, and related methods for forming valve components. The valve may also include diaphragm valves, bellows valves, or any other valve capable of incorporating the embodiments described in this disclosure. In particular, embodiments of this disclosure provide a diaphragm valve that may include a flexible heater disposed on the unwetted surface of the diaphragm, allowing for precise temperature control on the wetted surface of the diaphragm. For example, the diaphragm valve of this disclosure can be used as part of a precursor delivery system for delivering one or more precursors to the reaction chamber of a deposition apparatus (e.g., an ALD apparatus), whereby the diaphragm valve of this disclosure can result in a reduced defect rate in film deposition. Furthermore, the diaphragm valve of this disclosure can increase the operational life (i.e., “uptime”) of semiconductor processing equipment and reduce the time interval between maintenance cycles.

[0028] Figure 1 shows a schematic cross-sectional view of an exemplary diaphragm valve 100 according to an embodiment of the present disclosure. It should be noted that the diaphragm valve 100 of Figure 1 is a non-limiting example configuration of a valve incorporating valve components including a flexible heater. Alternative configurations of the valve, incorporating the flexible heater of the present disclosure, are conceivable. It should also be noted that Figure 1 shows a simplified cross-sectional view of the exemplary valve, illustrating the key features of the valve required for understanding embodiments of the present disclosure.

[0029] More in detail, Figure 1AA cross-sectional view of an exemplary diaphragm valve 100 in the open position is shown, i.e., the valve passage 120 disposed between the inlet passage 122 and the outlet passage 124 is not obstructed by the flexible diaphragm 108, thereby allowing the precursor to flow freely through the diaphragm valve 100. Figure 1B A cross-sectional view of an exemplary diaphragm valve 100 in the closed position is shown, i.e., the valve passage 120 between the inlet passage 122 and the outlet passage 124 is blocked by a flexible diaphragm 108, thereby preventing the precursor from flowing through the diaphragm valve 100.

[0030] More specifically, valve body 102 may include valve passage 120, which includes inlet passage 122 and outlet passage 124. Inlet passage 122 may be fluidly connected to a source container (not shown) containing a suitable precursor. For example, the source container may contain a precursor in solid, liquid, gaseous, or a mixture thereof. In embodiments where the precursor is in a solid or liquid phase, the source container may also include means for converting the precursor into a gaseous precursor, such as one or more heaters. Outlet passage 124 may be fluidly connected to a reaction chamber of a semiconductor processing apparatus. For example, the reaction chamber may be used for one or more deposition processes, etching processes, and / or cleaning processes. In specific embodiments of this disclosure, outlet passage 124 may be fluidly connected to a reaction chamber of a semiconductor deposition apparatus (e.g., an atomic layer deposition (ALD) apparatus or a chemical vapor deposition (CVD) apparatus).

[0031] Valve seat 118 may be disposed adjacent to valve passage 120 and may surround the upper portion of inlet passage 122. Valve seat 118 includes an upper surface 116 that forms a sealing surface against which the wetting surface 114 of flexible diaphragm 108 is pressed to close valve passage 120. The upper surface 116 of valve seat 118 may be polished or otherwise smoothed to reduce contact resistance and reduce precursor leakage between valve seat 118 and flexible diaphragm 108 when the flexible diaphragm 108 is in the closed position, such as... Figure 2 As shown. Although the upper surface 116 of the valve seat 118 is... Figure 1A and 1B The upper surface 116 is shown as a planar surface, but alternative sealing surfaces for the upper surface 116 may be used. For example, the upper surface 116 of the valve seat 118 may include a seat ridge (not shown) extending upward from the upper surface 116 toward the flexible diaphragm 108, wherein the seat ridge may be sufficiently prominent and sized to deform the wetted surface of the flexible diaphragm 108 when the flexible diaphragm 108 is pressed against the valve seat 118.

[0032] The flexible diaphragm 108 may include a wetted surface 114 (i.e., a surface that can directly contact the precursor flowing through the diaphragm valve 100) and a non-wetting surface 112 (i.e., a surface that may not directly contact the precursor flowing through the diaphragm valve 100). The flexible diaphragm 108 may be disposed adjacent to the valve passage 120 and may be fixed to the valve body 102 at its edge 126. The valve also includes a flexible heater, wherein the flexible heater may be disposed on the non-wetting surface 112 of the flexible diaphragm 108.

[0033] The diaphragm valve 100 also includes an actuator operable to move the surface of the flexible diaphragm 108 to contact and not contact a valve seat, thereby opening and closing the valve passage 120. More specifically, the actuator may be coupled to a blade flexure 106. The blade flexure 106 is further coupled to a piston 104 that contacts the upper surface of the flexible diaphragm 108. The actuator may include multiple actuation mechanisms, including but not limited to pneumatic, hydraulic, and piezoelectric mechanisms.

[0034] The blade flexure 106 is designed to flex in the direction of axis 152. Furthermore, the blade flexure 106 is fixed to the piston 104 at end 162 and remains unfixed at the other end. Therefore, when subjected to an external force perpendicular to its length, the blade flexure 106 undergoes deformation, allowing rotational movement about the intersection of axes 152a, 152b, and 154.

[0035] During operation, an air supply is internally injected into the cylinder holding the diaphragm valve 100. Consequently, the internal pressure within the internal space 130 of the diaphragm valve 100 increases. When the piston 104 is pressurized, it attempts to move closer to the sphere, causing the blade flexure 106 to flex, thereby extending the permissible translational degree of freedom. Therefore, the piston 104 is actuated by the internal pressure and compresses the flexible diaphragm 108, actuating the diaphragm valve 100 (see [link]). Figure 1B When the pressure is released, the flexible diaphragm 108 is depressurized and the diaphragm valve 100 is opened.

[0036] Figure 2 A cross-sectional schematic diagram of another exemplary diaphragm valve 200 according to an embodiment of the present disclosure is shown. Figure 2 In the diagram, the diaphragm valve 200 is shown in the open position, meaning that the valve passage 220 located between the inlet passage 222 (which functions similarly to the inlet passage 122) and the outlet passage 224 (which functions similarly to the outlet passage 124) is not obstructed by the flexible diaphragm 208 (which functions similarly to the flexible diaphragm 108), thereby allowing the precursor to flow freely through the diaphragm valve 200.

[0037] Similar to the diaphragm valve 100 of Figure 1, a valve seat 218 may be disposed adjacent to the valve passage 220 and may surround the upper portion of the inlet passage 222. The valve seat 218 includes an upper surface 216 (functioning similarly to upper surface 116) that serves as a sealing surface against which the wetting surface 214 of the flexible diaphragm 208 is pressed to close the valve passage 220. The upper surface 216 of the valve seat 218 may be polished or otherwise smoothed to reduce contact resistance and reduce precursor leakage between the valve seat 218 and the flexible diaphragm 108 when the flexible diaphragm 108 is in the closed position.

[0038] The flexible diaphragm 208 may include a wetting surface 214 (functioning similarly to the wetting surface 114 of FIG. 1), i.e., a surface that can directly contact the precursor flowing through the diaphragm valve 200, and a non-wetting surface 212 (functioning similarly to the non-wetting surface 112), i.e., a surface that can not directly contact the precursor flowing through the diaphragm valve 200. In an exemplary embodiment, the diaphragm valve 200 may be actuated using a blade flexure 206 (functioning similarly to the blade flexure 106). In an exemplary embodiment, the diaphragm valve 200 may be actuated via an actuator (functioning similarly to the actuator of FIG. 1), which may include a plurality of mechanisms, including but not limited to pneumatic, hydraulic, and piezoelectric mechanisms.

[0039] Furthermore, the diaphragm valve 200 includes a symmetrically flexed assembly 400. The symmetrically flexed assembly 400 in... Figure 4 Further detailed description is provided below. The symmetrical flexure assembly 400 includes a first flexure segment 410 and a second flexure segment 420. (As...) Figure 4 As shown, in an exemplary embodiment, the first flexural segment 410 is nested within the second flexural segment 420. In an exemplary embodiment, the first flexural segment 410 and the second flexural segment 420 are two separate segments. Both the first flexural segment 410 and the second flexural segment 420 include thin and thick segments.

[0040] The first flexural section 410 includes flexed, thicker, longer sections 412a and 412b. The flexed, thicker, longer sections 412a and 412b are parallel to axis 452. The first flexural section 410 also includes flexed, thicker, shorter sections 414a, 414b, 414c, and 414d. Furthermore, the first flexural section 410 includes flexed, thinner corner sections 418a, 418b, 418c, and 418d. The first flexural section 410 also includes flexed, thinner connecting sections 416a and 416b.

[0041] In an exemplary embodiment, the longer, thicker flexural segments 412a and 412b are thicker than the shorter, thicker flexural segments 414a, 414b, 414c, and 414d. Furthermore, in an exemplary embodiment, the thinner corner segments 418a, 418b, 418c, and 418d are non-linear (i.e., curved). In an exemplary embodiment, the thinner connecting segments 416a and 416b are non-linear (i.e., curved). In an exemplary embodiment, the shorter, thicker flexural segments 414a, 414b, 414c, and 414d are angled inwards to form an acute angle with the longer, thicker flexural segments 412a and 412b. Furthermore, the shorter, thicker flexural segments 414a and 414b form an obtuse angle, and the shorter, thicker flexural segments 414c and 414d also form an obtuse angle.

[0042] like Figure 4 As shown, a thicker, longer flexed segment 412a connects to a thinner, flexed corner segment 418a. The thinner, flexed corner segment 418a connects to a shorter, thicker flexed segment 414b. The shorter, thicker flexed segment 414b connects to a thinner, flexed connecting segment 416a. The thinner, flexed connecting segment 416a connects to the shorter, thicker flexed segment 414a. The shorter, thicker flexed segment 414a connects to a thinner, flexed corner segment 418d. The thinner, flexed corner segment 418d connects to a longer, thicker flexed segment 412b. The longer, thicker flexed segment 412b connects to a thinner, flexed corner segment 418c. The thinner, flexed corner segment 418c connects to a shorter, thicker flexed segment 414d. The shorter, thicker flexed segment 414d connects to a thinner, flexed connecting segment 416b. The thinner, flexed connecting segment 416b connects to a shorter, thicker flexed segment 414c. The shorter, thicker flexure segment 414c connects to the thinner, corner flexure segment 418b. The thinner, corner flexure segment 418b connects to the longer, thicker flexure segment 412a.

[0043] In an exemplary embodiment, the flexural thin connecting segments 416a and 416b also include thicker portions. Specifically, the flexural thin connecting segment 416a may include a first thin portion coupled to the flexural thicker short segment 414a. The flexural thicker short segment 414a is further coupled to a thicker connecting portion, which is further coupled to a second thin portion, which is coupled to the flexural thicker short segment 414b. Similarly, the flexural thin connecting segment 416b may include a third thin portion coupled to the flexural thicker short segment 414c. The flexural thicker short segment 414c is further coupled to a thicker connecting portion, which is further coupled to a fourth thin portion, which is coupled to the flexural thicker short segment 414d. This design makes the first flexural segment 410 more robust, enabling the flexural thin connecting segments 416a or 416b to handle increased forces when pressure is applied to the first flexural segment 410.

[0044] The second flexural section 420 includes two relatively thick flexural sections 424a and 424b. The two relatively thick flexural sections 424a and 424b are parallel to the axis 454. The second flexural section 420 also includes two relatively short flexural sections 422a, 422b, 422c, and 422d. Furthermore, the second flexural section 420 includes two relatively thin corner sections 428a, 428b, 428c, and 428d. The second flexural section 420 also includes two relatively thin connecting sections 426a and 426b.

[0045] In an exemplary embodiment, the two thin flexural corner segments 428a, 428b, 428c, and 428d are non-linear (i.e., curved). In an exemplary embodiment, the two thin flexural connecting segments 426a and 426b are non-linear (i.e., curved). In an exemplary embodiment, the shorter two thicker flexural segments 422a, 422b, 422c, and 422d are angled inward to form an acute angle with the longer two thicker flexural segments 424a and 424b. Furthermore, the shorter two thicker flexural segments 422a and 422b form an obtuse angle, and the shorter two thicker flexural segments 422c and 422d also form an obtuse angle.

[0046] like Figure 4 As shown, the longer, thicker flexural segment 424a connects to the thinner, two-flexural corner segment 428a. The thinner, two-flexural corner segment 428a connects to the shorter, thicker flexural segment 422a. The shorter, thicker flexural segment 422a connects to the thinner, two-flexural connecting segment 426a. The thinner, two-flexural connecting segment 426a connects to the shorter, thicker flexural segment 422b. The shorter, thicker flexural segment 422b connects to the thinner, two-flexural corner segment 428b. The thinner, two-flexural corner segment 428b connects to the longer, thicker flexural segment 424b. The longer, thicker flexural segment 424b connects to the thinner, two-flexural corner segment 428c. The thinner, two-flexural corner segment 428c connects to the shorter, thicker flexural segment 422c. The shorter, thicker flexural segment 422c connects to the thinner, two-flexural connecting segment 426b. The thinner, two-flexural connecting segment 426b connects to the shorter, thicker flexural segment 422d. The shorter, thicker flexural segment 422d connects to the thinner, two-angled flexural segment 428d. The thinner, two-angled flexural segment 428d connects to the longer, thicker flexural segment 424a.

[0047] In an exemplary embodiment, the two thin flexural connecting segments 426a and 426b also include a thicker portion. Specifically, the thin flexural connecting segment 426a may include a first thin portion connected to the thicker flexural connecting segment 422a. The thicker flexural connecting segment 422a is further connected to a thicker connecting portion, which is further connected to a second thin portion connected to the thin flexural connecting segment 422b. Similarly, the thin flexural connecting segment 426b may include a third thin portion connected to the thin flexural connecting segment 422c. The thin flexural connecting segment 422c is further connected to a thicker connecting portion, which is further connected to a fourth thin portion connected to the thin flexural connecting segment 422d. This design makes the second flexural segment 420 more robust, enabling the thin flexural connecting segments 426a or 426b to handle increased forces when pressure is applied to the second flexural segment 420.

[0048] like Figure 4 As further shown, the first flexural segment 410 can be nested within the second flexural segment 420, such that when an input force (e.g., force 432) is applied to the second flexural segment 420, the two thin flexural connecting segments 426a and 412a are connected, and the two thin flexural connecting segments 426b and 412b are connected. In operation, when force 432 is applied to the second flexural segment 420 on the two thick flexural segments 424a in a direction along axis 452, the resultant force 434 is output in an inward direction along axis 454. Because the two thin flexural connecting segments 426b and 412b are connected, the resultant force 434 on the second flexural segment 420 is the input force on the one thick flexural segment 412b. The resultant force 436 is output along axis 452 in the direction opposite to force 432.

[0049] Return to reference Figure 2 The symmetrical flexure assembly 400 is connected to the piston 204. For example... Figure 2 As shown, the top piston section 204-1 (functioning similarly to a conventional piston) is connected to the flexed, thicker, longer section 424a, and the bottom piston section 204-2 (functioning similarly to a conventional piston rod) is connected to the flexed, thinner connecting section 416b. Due to the operation of the symmetrical flexure assembly 400, when force 432 is applied downwards along axis 252 (aligned with axis 452) to piston 204, the resultant force 436 is output in the opposite direction to force 432, thereby holding the flexible diaphragm 208 in the open position. Conversely, when force 432 is released, the resultant force 436 is in the opposite direction and pushes the flexible diaphragm 208 to the closed position. Therefore, in Figure 4In the exemplary embodiment shown, the flexible diaphragm 208 is naturally in the closed position to close the valve passage 220. However, when the input force 432 is applied to the piston 204, the flexible diaphragm 208 is pulled upward to move it to the open position and thus open the valve passage 220.

[0050] Figure 3 A schematic cross-sectional view of another exemplary diaphragm valve 300 according to an embodiment of the present disclosure is shown. Figure 3 In the diagram, the diaphragm valve 300 is shown in the open position, meaning that the valve passage 320 located between the inlet passage 322 (which functions similarly to the inlet passage 122) and the outlet passage 324 (which functions similarly to the outlet passage 124) is not obstructed by the flexible diaphragm 308 (which functions similarly to the flexible diaphragm 108), thereby allowing the precursor to flow freely through the diaphragm valve 300.

[0051] Similar to the diaphragm valve 100 of Figure 1, a valve seat 318 may be disposed adjacent to the valve passage 320 and may surround the upper portion of the inlet passage 322. The valve seat 318 includes an upper surface 316 (functioning similarly to upper surface 116) that serves as a sealing surface against which the wetting surface 314 of the flexible diaphragm 308 is pressed to close the valve passage 320. The upper surface 316 of the valve seat 318 may be polished or otherwise smoothed to reduce contact resistance and reduce precursor leakage between the valve seat 318 and the flexible diaphragm 308 when the flexible diaphragm 308 is in the closed position.

[0052] The flexible diaphragm 308 may include a wetted surface 314 (which functions similarly to the wetted surface 114 in FIG. 1), i.e., a surface that can directly contact the precursor flowing through the diaphragm valve 300, and a non-wetting surface 312 (which functions similarly to the non-wetting surface 112), i.e., a surface that can not directly contact the precursor flowing through the diaphragm valve 300.

[0053] In an exemplary embodiment, the diaphragm valve 300 can be actuated using a blade flexure 306 (which functions similarly to blade flexure 106). In an exemplary embodiment, the diaphragm valve 300 can be actuated via a flexure assembly 310 (which functions similarly to the actuator of FIG. 1), which may include multiple mechanisms, including but not limited to pneumatic, hydraulic, and piezoelectric mechanisms. However, unlike diaphragm valves 100 and 200, the flexure assembly 310 is connected at a right angle to the valve body 302 of the diaphragm valve 300. That is, instead of the force applied along axis 352 (which is aligned with axes 152, 252, and 452), an input force 332 is applied along axis 354 (which is aligned with axes 154, 254, and 454). Therefore, another component can be accommodated in spaced-out openings. The diaphragm valve 300 also includes a first piston section 304 and a second piston section 364. The flexure assembly 310 is connected to the first piston section 304, and the second piston section 364 is connected to the flexible diaphragm 308.

[0054] In an exemplary embodiment, the flexure component 310 may be a first flexure segment 410 of a symmetrical flexure component 400, but does not include a second flexure segment 420. Therefore, the first flexure segment 410 is used as a reference to describe the function of the flexure component 310. Figure 3 As shown, the flexure assembly 310 is arranged along axis 352 (which is alignable with axis 452) and axis 354 (which is alignable with axis 454). A thicker, longer flexure segment 412b can be connected to the first piston segment 304, and a thinner flexure segment 416b can be connected to the second piston segment 364. Furthermore, in an exemplary embodiment, a thicker, longer flexure segment 412a can be anchored to the wall support 382. Thus, the flexure assembly 310 remains centered at the intersection of axes 352 and 354.

[0055] Due to the operation of the first flexure section 410, when the input force 332 is applied inward along axis 354 (which is aligned with axis 454) onto the first piston section 304, the first flexure section 410 flexes to generate an output force 334 in the upward direction along axis 352. Therefore, force 334 causes the flexible diaphragm 308 to be pushed upward to the open position. Conversely, when force 332 is released, the combined output force 334 is in the downward direction, thereby releasing the flexible diaphragm 308 back to the closed position. Therefore, in Figure 3 In the exemplary embodiment shown, the flexible diaphragm 308 is naturally in the closed position to close the valve passage 320. However, when force 332 is applied to the first piston section 304, the flexible diaphragm 308 is pulled upward to move it to the open position and thus open the valve passage 320.

[0056] Figure 5A method 500 for operating a diaphragm valve (e.g., diaphragm valve 100) is described. Method 500 includes coupling a flexure assembly (e.g., blade flexure 106, flexure assembly 310, or first flexure section 410) to a piston 104 or 20 or a first piston section 304 of the diaphragm valve, as shown in block 502. In an exemplary embodiment of method 500, the flexure assembly is a symmetrical flexure assembly (e.g., flexure assembly 310 or symmetrical flexure assembly 400) coupled to both the piston and the diaphragm.

[0057] In an exemplary embodiment of method 500, coupling the symmetrical flexure assembly to the piston further includes coupling a first flexure segment (e.g., 410) to the piston and coupling a second flexure segment (e.g., 420) to the diaphragm. Method 500 may also include nesting the second flexure segment within the first flexure segment. Method 500 further includes coupling the piston to the diaphragm, as shown in block 504.

[0058] Method 500 further includes applying an input force to the piston in a first direction to output a resultant force, such that when the diaphragm is in a normally closed position, the resultant force moves the diaphragm to an open position, and when the diaphragm is in a normally open position, the resultant force moves the diaphragm to a closed position, as shown in block 506. In an exemplary embodiment of method 500, the resultant force is output in a second direction. In an exemplary embodiment of method 500, the first direction and the second direction are perpendicular to each other. In an exemplary embodiment of method 500, the first direction is opposite to the second direction.

[0059] The exemplary embodiments of this disclosure described above do not limit the scope of the invention, as these embodiments are merely examples of embodiments of the invention defined by the appended claims and their legal equivalents. Any equivalent embodiments are intended to fall within the scope of the invention. In fact, various modifications to this disclosure, such as alternative useful combinations of the elements, in addition to those shown and described herein, will become apparent to those skilled in the art from the description. Such modifications and embodiments are also intended to fall within the scope of the appended claims.

Claims

1. A valve, comprising: The valve body has a valve passage, which includes an inlet passage and an outlet passage; Valve seat, which is adjacent to the valve passage; A diaphragm that is movable to separate from or contact the valve seat; Piston, which is connected to the diaphragm; and The flexure assembly is connected to the piston.

2. The valve according to claim 1, wherein, The flexure assembly further includes: A blade flexure, which is connected to the piston and the valve body, such that when an input force is applied to the piston, the diaphragm moves to contact the valve seat.

3. The valve according to claim 2, wherein, The blade flexure is configured to actuate the valve by increasing the internal pressure of the valve.

4. The valve according to claim 1, wherein, The flexure assembly further includes: A symmetrical flexure assembly is connected to the piston and also to the diaphragm, wherein when an input force is applied to the piston in a first direction, a resultant force is output in a second direction, such that when the diaphragm is in a normally closed position, the diaphragm moves to separate from the valve seat, and wherein when the diaphragm is in a normally open position, the diaphragm moves to contact the valve seat.

5. The valve according to claim 4, wherein, The first direction and the second direction are perpendicular.

6. The valve according to claim 5, wherein, The symmetrical flexure component includes a first flexure segment, wherein the first flexure segment further includes: The first flexure with a relatively long thickness and the second flexure with a relatively long thickness. The first flexure with a relatively short thickness, the second flexure with a relatively short thickness, the third flexure with a relatively short thickness, and the fourth flexure with a relatively short thickness; The first flexure-thin corner segment, the second flexure-thin corner segment, the third flexure-thin corner segment, and the fourth flexure-thin corner segment; and First flexure-thin connecting segment and second flexure-thin connecting segment; Specifically, the first flexure with a thicker, longer segment is connected to the first flexure with a thinner, corner segment; the first flexure with a thinner, corner segment is connected to the first flexure with a thicker, shorter segment; the first flexure with a thicker, shorter segment is connected to the first flexure with a thinner, connecting segment; the first flexure with a thinner, connecting segment is connected to the second flexure with a thicker, shorter segment; the second flexure with a thicker, shorter segment is connected to the second flexure with a thinner, corner segment; the second flexure with a thinner, corner segment is connected to the second flexure with a thicker, longer segment; the second flexure with a thicker, longer segment is connected to the third flexure with a thinner, corner segment; the third flexure with a thinner, shorter segment is connected to the second flexure with a thinner, connecting segment; the second flexure with a thinner, thinner, connecting segment is connected to the fourth flexure with a thicker, shorter segment; the fourth flexure with a thicker, shorter segment is connected to the fourth flexure with a thinner, corner segment; and the fourth flexure with a thinner, corner segment is connected back to the first flexure with a thicker, longer segment.

7. The valve according to claim 4, wherein, The first direction is opposite to the second direction.

8. The valve according to claim 4, wherein, The symmetrical flexure assembly includes a first flexure section and a second flexure section, wherein the first flexure section is nested within the second flexure section such that the first flexure section is coupled to the diaphragm and the second flexure section is coupled to the piston, and wherein when the input force is applied to the piston in the first direction, the resultant force is output in the second direction to disengage the diaphragm from contact with the valve seat.

9. The valve according to claim 7, wherein, The first direction is opposite to the second direction.

10. The valve according to claim 7, comprising a second flexure section, the second flexure section further comprising: The first flexure with a relatively long thickness and the second flexure with a relatively long thickness; The first flexure with a relatively short thickness, the second flexure with a relatively short thickness, the third flexure with a relatively short thickness, and the fourth flexure with a relatively short thickness; The first two-thin-angle flexure segment, the second two-thin-angle flexure segment, the third two-thin-angle flexure segment, and the fourth two-thin-angle flexure segment; and First flexed thin connecting segment and second flexed thin connecting segment; in, The first flexure with a thicker, longer segment connects to the first flexure with a thinner, corner segment. The first flexure with a thinner, corner segment connects to the first flexure with a thicker, shorter segment. The first flexure with a thicker, shorter segment connects to the first flexure with a thinner, connecting segment. The first flexure with a thinner, connecting segment connects to the second flexure with a thicker, shorter segment. The second flexure with a thicker, shorter segment connects to the second flexure with a thinner, corner segment. The second flexure with a thinner, corner segment connects to the second flexure with a thicker, longer segment. The second flexure with a thicker, longer segment connects to the third flexure with a thinner, corner segment. The third flexure with a thinner, shorter segment connects to the third flexure with a thinner, shorter segment. The third flexure with a thinner, shorter segment connects to the second flexure with a thinner, connecting segment. The second flexure with a thinner, thinner, connecting segment connects to the fourth flexure with a thicker, shorter segment. The fourth flexure with a thicker, shorter segment connects to the fourth flexure with a thinner, corner segment, and the fourth flexure with a thinner, thinner, corner segment connects back to the first flexure with a thicker, longer segment.

11. The valve according to claim 1, wherein, The valve is a diaphragm valve.

12. The valve according to claim 1, wherein, The flexure component is a ring-shaped flexure.

13. A method of operating a diaphragm valve, comprising: Connect the flexible assembly to the piston of the diaphragm valve; Connect the piston to the diaphragm; as well as An input force is applied to the piston in the first direction to output a resultant force, such that when the diaphragm is in the normally closed position, the resultant force moves the diaphragm to the open position, and when the diaphragm is in the normally open position, the resultant force moves the diaphragm to the closed position.

14. The method according to claim 13, wherein, The resultant force is output along the second direction.

15. The method according to claim 14, wherein, The first direction and the second direction are perpendicular to each other.

16. The method of claim 14, wherein, The first direction is opposite to the second direction.

17. The method according to claim 13, wherein, Connecting the flexure assembly to the piston also includes: Connect the symmetrical flexure assembly to the piston; Connecting the symmetrical flexure assembly to the diaphragm; and The input force is applied to the piston along the first direction.

18. The method according to claim 16, in, Connecting the symmetrical flexure assembly to the piston includes connecting the first flexure segment to the piston; Connecting the symmetrical flexure assembly to the diaphragm includes connecting the second flexure segment to the diaphragm; and The second flexure segment is nested within the first flexure segment.

19. The method according to claim 13, wherein, Connecting the flexure assembly to the piston also includes connecting the blade flexure to the piston.

20. An actuator comprising: A diaphragm that is movable to separate from or contact the valve seat; The piston is connected to the diaphragm; as well as The flexure assembly is connected to the piston.

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