Transmission mechanism and wafer transmission device

Abstract

The invention provides a transmission mechanism and a wafer transmission device, and relates to the technical field of semiconductor chip manufacturing. The transmission mechanism comprises a base, a driving wheel, a driven wheel, a closed conveying belt and a tensioning assembly. The base is provided with a driving shaft and an output supporting shaft, the driving shaft is rotatably connected to the base, and the output supporting shaft and the driving shaft are arranged side by side. The driving wheel is arranged on the driving shaft, and the driving wheel and the driving shaft operate synchronously. The driven wheel is arranged on the output supporting shaft, rotates around the output supporting shaft and is used for providing power for wafer transmission. The driving wheel and the driven wheel are sleeved with the closed conveying belt. The tensioning assembly comprises a first guide wheel, the first guide wheel is arranged close to the driving wheel or the driven wheel, and the first guide wheel presses the outer side of the closed conveying belt so as to tension the closed conveying belt. The minimum distance between the edge of the first guide wheel and the edge of the driving wheel is the thickness of the closed conveying belt. According to the transmission mechanism, the problem that the transportation position of the wafer transmission device is limited can be solved.

Description

Technical Field

[0001] This application relates to the field of semiconductor chip manufacturing technology, specifically to a transmission mechanism and a wafer transport device. Background Technology

[0002] In the semiconductor manufacturing industry, wafers are the most commonly used substrate and are widely used in the manufacture of chips, integrated circuits, and electronic devices. Throughout the processing, wafers need to be transported via a transfer device for processing. These transfer devices are often in the form of vacuum robotic arms installed within a transfer cavity to facilitate wafer transfer between the Loadlock (the cavity between the atmospheric and vacuum robotic arms) and the process cavity.

[0003] Vacuum robotic arms can utilize multiple steel belt drive structures to enable a large wafer transport range. Specifically, the vacuum robotic arm centrally positions the motors at the base of the arm, using steel belt drives to power and control the various joints.

[0004] In related technologies, steel belt drive solutions all employ open-type steel belts. Due to structural limitations, the range of rotation for open-type steel belt drives cannot exceed 360°. However, for wafer transport requirements, when the shoulder, elbow, and wrist joints of a vacuum robotic arm move independently, if each steel belt drive cannot exceed 360°, it can easily lead to limitations in the wafer transport position. Summary of the Invention

[0005] This application provides a transmission mechanism and a wafer transport device, which can solve the problem of the high limitation of the transport position of the wafer transport device.

[0006] On one hand, this application provides a transmission mechanism, comprising: a base with a drive shaft and an output support shaft, the drive shaft being rotatably connected to the base, and the output support shaft being arranged side-by-side with the drive shaft; a drive wheel disposed on the drive shaft, the drive wheel rotating synchronously with the drive shaft; a driven wheel disposed on the output support shaft, the driven wheel rotating around the output support shaft, the driven wheel rotating to transport wafers; a closed conveyor belt sleeved on the outside of the drive wheel and the driven wheel; and a tensioning assembly including a first guide wheel, the first guide wheel being disposed close to the drive wheel or the driven wheel, the first guide wheel pressing against the outer side of the closed conveyor belt to tension the closed conveyor belt. The minimum distance between the edge of the first guide wheel and the edge of the drive wheel is the thickness of the closed conveyor belt.

[0007] The transmission mechanism provided in this application uses a closed conveyor belt to connect the driving wheel and the driven wheel. During the process of the driving wheel driving the driven wheel to rotate via the closed conveyor belt, the closed conveyor belt can achieve a rotation range greater than 360°. That is, the closed conveyor belt can rotate continuously clockwise or counterclockwise, allowing the driving wheel and the driven wheel to rotate continuously around their respective axes. When a wafer is mounted at one end of the driven wheel, large-angle transmission of the wafer position can be achieved. Furthermore, by setting the minimum distance between the edge of the first guide wheel and the edge of the driving wheel to be the thickness of the closed conveyor belt, the first guide wheel is positioned closest to the driving wheel while ensuring the closed conveyor belt passes smoothly through the gap between the driving wheel and the first guide wheel, avoiding jamming. Therefore, the larger the wrap angle between the closed conveyor belt and the driving wheel, the more stable the transmission process.

[0008] According to one embodiment of this application, the tensioning assembly includes a first rotating shaft, a first guide wheel sleeved on the first rotating shaft, and the position of the first rotating shaft is adjustable on a first plane, which is perpendicular to the axial direction of the first rotating shaft. Because the enclosed conveyor belt needs to meet installation tolerances with the driving and driven wheels, the tension of the enclosed conveyor belt is relatively small after installation with the driving and driven wheels. In this embodiment, the position of the first rotating shaft can be adjusted so that the first guide wheel can provide tension to the enclosed conveyor belt, thereby maintaining the smoothness of the transmission mechanism during operation.

[0009] According to one embodiment of this application, the base is provided with an adjustment groove, and a portion of the first rotating shaft is located within the adjustment groove. By setting the position of the first rotating shaft in the adjustment groove, the enclosed conveyor belt is pressed against the first guide wheel. Therefore, the adjustment groove can be used to adjust the pressing force between the enclosed conveyor belt and the first guide wheel.

[0010] According to one embodiment of this application, the enclosed conveyor belt is wound around the outside of the driving wheel and the driven wheel to form a spaced first suspension belt and a second suspension belt. The first guide wheel is disposed on the side of the first suspension belt facing away from the second suspension belt, and the first guide wheel presses against the first suspension belt. The first guide wheel can apply a force towards the second suspension belt from the outside of the first suspension belt to tension the first suspension belt. Furthermore, by pressing the first suspension belt towards the second suspension belt with the first guide wheel, the contact area between the enclosed conveyor belt and the driving wheel can be increased, that is, the wrap angle between the enclosed conveyor belt and the driving wheel can be increased.

[0011] According to one embodiment of this application, the tensioning assembly further includes a second guide wheel, which is disposed on the side of the second suspension belt facing away from the first suspension belt, and the second guide wheel presses against the second suspension belt. By setting the positions of the first guide wheel and the second guide wheel, the wrap angle between the closed conveyor belt and the driving wheel and the wrap angle between the closed conveyor belt and the driven wheel can be made equal, so that the rotational states of the driving wheel and the driven wheel are kept consistent, thereby ensuring the transmission accuracy of the transmission mechanism.

[0012] According to one embodiment of this application, the tensioning assembly further includes a third guide wheel and a fourth guide wheel; the third guide wheel and the first guide wheel are located on the same side of the first suspension belt, one of the first guide wheel and the third guide wheel is close to the driving wheel, and the other is close to the driven wheel; the fourth guide wheel and the second guide wheel are located on the same side of the second suspension belt, one of the second guide wheel and the fourth guide wheel is close to the driving wheel, and the other is close to the driven wheel.

[0013] Taking a configuration where the first and fourth guide wheels are both close to the driving wheel, and the second and third guide wheels are close to the driven wheel as an example, the first guide wheel can apply a force to the first suspension belt towards the second suspension belt, and the fourth guide wheel can apply a force to the second suspension belt towards the first suspension belt. Therefore, the first and fourth guide wheels can work together on the enclosed conveyor belt to increase the wrap angle between the enclosed conveyor belt and the driving wheel. Similarly, the second guide wheel can apply a force to the second suspension belt towards the first suspension belt, and the third guide wheel can apply a force to the first suspension belt towards the second suspension belt. Therefore, the second and third guide wheels can work together on the enclosed conveyor belt to increase the wrap angle between the enclosed conveyor belt and the driven wheel.

[0014] According to one embodiment of this application, the minimum distance between the edge of the second guide wheel and the edge of the driven wheel is the thickness of the enclosed conveyor belt; the minimum distance between the edge of the third guide wheel and the edge of the driven wheel is the thickness of the enclosed conveyor belt; and the minimum distance between the edge of the fourth guide wheel and the edge of the driving wheel is the thickness of the enclosed conveyor belt.

[0015] When the distance between the edge of the first guide wheel and the edge of the driving wheel is equal to the thickness of the enclosed conveyor belt, and the distance between the edge of the second guide wheel and the edge of the driven wheel is equal to the thickness of the enclosed conveyor belt, a large wrap angle can be achieved between the driving wheel and the enclosed conveyor belt. Similarly, when the distance between the edge of the third guide wheel and the edge of the driven wheel is equal to the thickness of the enclosed conveyor belt, and the distance between the edge of the fourth guide wheel and the edge of the driving wheel is equal to the thickness of the enclosed conveyor belt, a large wrap angle can also be achieved between the driven wheel and the enclosed conveyor belt.

[0016] By designing the parameters described above, the wrap angle between the closed conveyor belt and the driving and driven wheels can be increased while ensuring that the transmission between the closed conveyor belt and the first, second, third, and fourth guide wheels is not jammed.

[0017] According to one embodiment of this application, the minimum distance between the edges of the first guide wheel and the fourth guide wheel is twice the thickness of the enclosed conveyor belt; the minimum distance between the edges of the second guide wheel and the third guide wheel is also twice the thickness of the enclosed conveyor belt. When the minimum distance between the edges of the first guide wheel and the fourth guide wheel is twice the thickness of the enclosed conveyor belt, the wrap angle between the enclosed conveyor belt and the first guide wheel can be greater than 270°. Similarly, when the minimum distance t6 between the edges of the second guide wheel and the third guide wheel is twice the thickness of the enclosed conveyor belt, the wrap angle between the enclosed conveyor belt and the second guide wheel can be greater than 270°.

[0018] According to one embodiment of this application, the central region of the drive wheel has the largest outer diameter along its axial direction. During the transmission process between the drive wheel and the enclosed conveyor belt, when the enclosed conveyor belt deviates along its width direction, the central region of the drive wheel with a larger outer diameter can prevent the enclosed conveyor belt from deviating and promptly correct the deviated portion of the enclosed conveyor belt, thereby ensuring the transmission stability between the drive wheel and the enclosed conveyor belt.

[0019] According to one embodiment of this application, the driven wheel has a maximum outer diameter in its central region along its axial direction. During the transmission process between the driven wheel and the enclosed conveyor belt, when the enclosed conveyor belt deviates along its width direction, the central region of the driven wheel with a larger outer diameter can prevent the enclosed conveyor belt from deviating and promptly correct the deviated portion of the enclosed conveyor belt, thereby ensuring the transmission stability between the driven wheel and the enclosed conveyor belt.

[0020] On the other hand, this application provides a wafer transfer device, comprising:

[0021] An end effector; at least one set of transmission mechanisms as described in any of the above embodiments, wherein the driven wheel of the transmission mechanism is connected to the end effector. Since each set of transmission mechanisms can realize the continuous rotation of the driven wheel around the output support shaft, when the wafer transfer device uses multiple sets of transmission mechanisms, the flexible movement of the finger end of the robotic arm can be realized, thereby improving the wafer transfer range.

[0022] In addition to the technical problems solved by the embodiments of the present invention, the technical features constituting the technical solutions, and the beneficial effects brought about by the technical features of these technical solutions as described above, other technical problems that can be solved by the transmission mechanism and wafer transfer device provided by the embodiments of the present invention, other technical features included in the technical solutions, and the beneficial effects brought about by these technical features will be further described in detail in the specific embodiments. Attached Figure Description

[0023] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0024] Figure 1 This is a schematic diagram of the transmission mechanism according to an embodiment of this application;

[0025] Figure 2 This is a cross-sectional structural schematic diagram of a transmission mechanism according to an embodiment of this application;

[0026] Figure 3 The diagram illustrates the force analysis of the conveyor belt when the pulleys are stationary.

[0027] Figure 4 The diagram illustrates the force analysis of the conveyor belt when the pulley drive torque is τ.

[0028] Figure 5 The curve showing the relationship between the minimum wrap angle of the conveyor belt transmission force and the dimensionless transmission force.

[0029] Figure 6 This is a cross-sectional view of a transmission mechanism according to another embodiment of this application;

[0030] Figure 7 This is a cross-sectional structural diagram of the drive wheel according to an embodiment of this application.

[0031] Explanation of reference numerals in the attached figures:

[0032] 100 - Transmission mechanism;

[0033] 110 - Base; 111 - Adjustment groove;

[0034] 120 - Drive wheel;

[0035] 130 - Driven wheel;

[0036] 140 - Enclosed conveyor belt; 141 - First suspended belt; 142 - Second suspended belt;

[0037] 150-Tensioning assembly;

[0038] 151 - First guide wheel; 151a - First rotating shaft;

[0039] 152 - Second guide wheel; 152a - Second rotating shaft;

[0040] 153 - Third guide wheel; 153a - Third rotating shaft;

[0041] 154 - Fourth guide wheel; 154a - Fourth rotating shaft;

[0042] 160-Drive shaft;

[0043] 170 - Output support shaft;

[0044] 180-Slewing bearing;

[0045] X - Vertical direction; Y - Width direction.

[0046] The accompanying drawings illustrate specific embodiments of this application, which will be described in more detail below. These drawings and descriptions are not intended to limit the scope of the concept in any way, but rather to illustrate the concept of this application to those skilled in the art through reference to particular embodiments. Detailed Implementation

[0047] Exemplary embodiments will now be described in detail, examples of which are illustrated in the accompanying drawings. When the following description relates to the drawings, unless otherwise indicated, the same numbers in different drawings represent the same or similar elements. The embodiments described in the following exemplary embodiments do not represent all embodiments consistent with this application. Rather, they are merely examples of apparatuses and methods consistent with some aspects of this application as detailed in the appended claims. Clearly, the described embodiments are only a portion, not all, of the embodiments of this application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0048] With the continuous development of integrated circuit technology, the speed of electronic product upgrades is steadily increasing, and electronic components are gradually developing towards miniaturization, integration, and refinement, which puts forward higher requirements for thin film deposition technology.

[0049] For example, in atomic layer deposition (ALD) processes, various reactive gases or vapors can be alternately pulsed into a reaction chamber. Within the chamber, chemical reactions occur, and thin films are deposited layer by layer in the form of single atomic layers until the target film thickness is achieved. Due to its excellent three-dimensional coplanarity, superior conformal properties, and precise thickness control capabilities, ALD technology has been widely used in industries such as semiconductor devices and integrated circuits.

[0050] During thin film deposition in an atomic layer deposition (ALD) process chamber, the entire chamber is a vacuum environment. The wafer is placed on an end effector, and throughout the processing, it needs to be transferred via a transport device. This transport device is typically a vacuum robotic arm installed within the transport chamber to facilitate wafer transfer between the Loadlock (a chamber where atmospheric and vacuum robotic arms interact) and the process chamber.

[0051] Vacuum robotic arms can utilize multiple steel belt drive structures to ensure the wafers can be transported across a wide range. Specifically, the vacuum robotic arm centrally positions the motors at the base of the arm, using steel belt drives to power and control the joints, thereby enabling the transport of the wafers.

[0052] In related technologies, steel belt drive solutions all employ open-type steel belts. Due to structural limitations, the range of rotation for open-type steel belt drives is less than 360°. However, for wafer transport requirements, when the shoulder, elbow, and wrist joints of a vacuum robotic arm move independently, if each steel belt drive does not exceed 360°, it can easily lead to limitations in the wafer transport position.

[0053] Based on the aforementioned technical problems, the applicant has improved the structure of the existing transmission mechanism. In the embodiments of this application, the driving wheel and the driven wheel are connected by a closed conveyor belt. During the process of the driving wheel driving the driven wheel to rotate through the closed conveyor belt, it is less constrained by the structure of the conveyor belt. The closed conveyor belt can achieve a rotation range greater than 360°. That is, the closed conveyor belt can rotate continuously clockwise or counterclockwise, allowing the driving wheel and the driven wheel to rotate continuously around their respective axes. When a wafer is mounted at one end of the driven wheel, large-angle transmission of the wafer position can be achieved. This solves the problem of insufficient rotation angle of the open steel belt in multi-cavity bias transmission, which leads to insufficient range of motion and poor flexibility of the transmission mechanism.

[0054] It is easy to understand that when multiple transmission mechanisms of the present application embodiments are connected, since each transmission mechanism can realize a wide range of wafer position transmission, the wafer transmission range can be improved more effectively.

[0055] The transmission mechanism and wafer transfer device provided in this application are described below with reference to the accompanying drawings and specific embodiments.

[0056] See Figure 1 and Figure 2 As shown, the transmission mechanism 100 in this embodiment may include a base 110, a driving wheel 120, a driven wheel 130, a closed conveyor belt 140, and a tensioning assembly 150.

[0057] The base 110 may be equipped with a drive shaft 160 and an output support shaft 170. The drive shaft 160 is rotatably connected to the base 110. The output support shaft 170 is arranged side by side with the drive shaft 160. A drive wheel 120 is disposed on the drive shaft 160. The drive wheel 120 and the drive shaft 160 can rotate synchronously. A driven wheel 130 is disposed on the output support shaft 170. The driven wheel 130 can rotate around the output support shaft 170. The driven wheel 130 rotates to transport wafers. A closed conveyor belt 140 may be fitted over the drive wheel 120 and the driven wheel 130.

[0058] The tensioning assembly 150 may include a first guide wheel 151. The first guide wheel 151 may be disposed close to the drive wheel 120 or the driven wheel 130. The first guide wheel 151 presses against the outer side of the enclosed conveyor belt 140 to tension the enclosed conveyor belt 140. The minimum distance t1 between the edge of the first guide wheel 151 and the edge of the drive wheel 120 is the thickness of the enclosed conveyor belt 140.

[0059] It should be noted that the driven wheel 130 can achieve transfer within the wafer through a linkage structure. The driven wheel 130 and the linkage can operate synchronously. In some examples, the linkage can be a robot arm. This is not limited in the embodiments of this application.

[0060] In this embodiment, a closed conveyor belt 140 is disposed around the outside of the driving wheel 120 and the driven wheel 130, allowing the driving wheel 120 to drive the driven wheel 130 to rotate via the closed conveyor belt 140. The closed conveyor belt 140 enables the driving wheel 120 to drive the driven wheel 130 to rotate continuously, thereby realizing the transfer of the wafer by the driven wheel 130.

[0061] It is easy to understand that if the tension of the enclosed conveyor belt 140 is too low, it can easily cause the enclosed conveyor belt 140 to slip on the driving pulley 120 and the driven pulley 130, resulting in loss of transmission accuracy, reduced transmission efficiency, or even transmission failure of the transmission mechanism 100. If the tension of the enclosed conveyor belt 140 is too high, it can easily increase the fatigue strength of the enclosed conveyor belt 140 and the connected bearings, resulting in excessive tensile stress on the enclosed conveyor belt 140, or even breakage, leading to failure of the transmission mechanism 100, and can also easily generate greater noise and vibration. Therefore, in this embodiment, a tensioning assembly 150 is also provided. The first guide wheel 151 of the tensioning assembly 150 can be used to adjust the tension of the enclosed conveyor belt 140 so that there is a suitable tension between the enclosed conveyor belt 140 and the driving pulley 120 and the driven pulley 130.

[0062] It should be noted that the wrap angle refers to the central angle corresponding to the contact arc between the enclosed conveyor belt 140 and the driving wheel 120 or driven wheel 130. For example, see... Figure 1As shown, the wrap angle between the enclosed conveyor belt 140 and the driving wheel 120 is θ1, and the wrap angle between the enclosed conveyor belt 140 and the driven wheel 130 is θ2. Taking the wrap angle θ1 between the enclosed conveyor belt 140 and the driving wheel 120 as an example, the smaller the wrap angle between the enclosed conveyor belt 140 and the driving wheel 120, the shorter the contact arc length between the enclosed conveyor belt 140 and the driving wheel 120, and the smaller the frictional force generated between the contact surfaces of the enclosed conveyor belt 140 and the driving wheel 120. When the transmission force is greater than the frictional force, the driving wheel 120 and the enclosed conveyor belt 140 will slip relative to each other, leading to transmission failure. Conversely, the larger the wrap angle between the enclosed conveyor belt 140 and the driving wheel 120, the longer the contact arc length between the enclosed conveyor belt 140 and the driving wheel 120, and the larger the contact area between the enclosed conveyor belt 140 and the driving wheel 120. This helps to reduce the possibility of slippage between the enclosed conveyor belt 140 and the driving wheel 120, thereby improving the transmission stability of the transmission mechanism 100.

[0063] Specifically, in a belt drive system, the forces acting on the conveyor belt can be referenced... Figure 3 and Figure 4 As shown. When the pulley with diameter D is stationary, the preload of the conveyor belt results in a tension of F on both sides of the pulley. pre When the transmission torque is τ, the tension in the conveyor belts on both sides of the pulley is F. pre +F0 and F pre -F0, where F0=τ / D, and F0 is the transmission force.

[0064] To ensure reliable transmission in a belt drive system, it is essential to prevent relative slippage between the conveyor belt and the pulleys. This means that during transmission, at least a section of the conveyor belt with a length of L (L > 0) must maintain a tension of F within the wrap angle θ. pre It remains unchanged. According to Euler's rope equation, the wrap angle θ must satisfy the following condition, where μ is the coefficient of friction between the conveyor belt and the pulley.

[0065]

[0066] Setting F pre By making the transmission force F0 dimensionless (unit 1), we can obtain the relationship curve between the minimum wrap angle that ensures no relative slippage between the conveyor belt and the pulley and the dimensionless transmission force. (See [reference needed]). Figure 5 As shown, it's easy to understand that when the transmission force is at a certain value, the wrap angle between the conveyor belt and the pulley needs to reach a corresponding value to ensure the stability of the belt drive. The larger the dimensionless transmission force, the larger the corresponding wrap angle. For example, when the dimensionless transmission force is 0.5, the wrap angle must be at least 270°.

[0067] Therefore, in this embodiment of the application, the distance between the drive wheel 120 and the first guide wheel 151 can be set so that the conveyor belt 140 can have a larger wrap angle on the drive wheel 120, thereby satisfying the stability of the belt drive.

[0068] For example, by setting the minimum distance between the edge of the first guide wheel 151 and the edge of the drive wheel 120 as the thickness of the enclosed conveyor belt 140, the first guide wheel 151 can be positioned closest to the drive wheel 120 while ensuring that the enclosed conveyor belt 140 passes smoothly through the gap between the drive wheel 120 and the first guide wheel 151 and avoiding jamming. In this case, the larger the wrap angle between the enclosed conveyor belt 140 and the drive wheel 120, the more stable the conveying process will be.

[0069] Therefore, in the embodiments of this application, see Figure 1 As shown, when the minimum distance between the edge of the first guide wheel 151 and the edge of the drive wheel 120 is equal to the thickness of the closed conveyor belt 140, the wrap angle between the closed conveyor belt 140 and the first guide wheel 151 can be greater than or equal to 270°.

[0070] In some examples, the closed conveyor belt 140 may refer to a steel belt forming a closed loop structure. The driving pulley 120 and the driven pulley 130 may have the same direction of rotation. The first guide pulley 151 rotates in the opposite direction to the driving pulley 120.

[0071] In some examples, the driven wheel 130 and the output support shaft 170 can be connected via a slewing bearing 180. The slewing bearing 180 can be sleeved on the outside of the output support shaft 170. The driven wheel 130 is sleeved on the outside of the slewing bearing 180.

[0072] See also some of the possible implementation methods. Figure 1 and Figure 2 As shown, the tensioning assembly 150 of this embodiment may include a first rotating shaft 151a. A first guide wheel 151 is sleeved on the first rotating shaft 151a. The position of the first rotating shaft 151a on a first plane is adjustable. The first plane is perpendicular to the axial direction of the first rotating shaft 151a.

[0073] The enclosed conveyor belt 140 needs to meet installation tolerances with the drive pulley 120 and driven pulley 130. Therefore, after the enclosed conveyor belt 140 is installed with the drive pulley 120 and driven pulley 130, the tension of the enclosed conveyor belt 140 is relatively small. In this embodiment, the position of the first rotating shaft 151a can be adjusted so that the first guide pulley 151 can provide tension to the enclosed conveyor belt 140 to maintain the stability of the transmission mechanism 100 during operation.

[0074] See also some of the possible implementation methods. Figure 1As shown, the base 110 in this embodiment may be provided with an adjustment groove 111. Part of the first rotating shaft 151a may be located within the adjustment groove 111. By setting the position of the first rotating shaft 151a in the adjustment groove 111, the closed conveyor belt 140 is pressed by the first guide wheel 151, thereby adjusting the tension of the closed conveyor belt 140.

[0075] In some examples, reference Figure 1 As shown, the adjusting groove 111 can extend in the vertical direction X. Adjusting the first rotating shaft 151a to move upward can increase the tension of the closed conveyor belt 140, and adjusting the first rotating shaft 151a to move downward can decrease the tension of the closed conveyor belt 140.

[0076] In some examples, after adjusting the position of the first rotating shaft 151a to meet the tension of the enclosed conveyor belt 140, the first rotating shaft 151a can be fixed to the base 110 by fasteners.

[0077] It should be noted that the adjustment groove 111 in the embodiments of this application may be, but is not limited to, a strip groove.

[0078] See also some of the possible implementation methods. Figure 1 As shown, the enclosed conveyor belt 140 of this embodiment can be wound around the outside of the driving wheel 120 and the driven wheel 130 to form a first suspended belt 141 and a second suspended belt 142 spaced apart. The first guide wheel 151 can be disposed on the side of the first suspended belt 141 facing away from the second suspended belt 142, and the first guide wheel 151 presses against the first suspended belt 141.

[0079] It should be noted that the first suspended belt 141 can refer to the area where the driving wheel 120 and driven wheel 130 do not contact the enclosed conveyor belt 140. The second suspended belt 142 can refer to another area where the driving wheel 120 and driven wheel 130 do not contact the enclosed conveyor belt 140. (Reference) Figure 1 As shown, the first suspension belt 141 and the second suspension belt 142 are spaced apart along the vertical direction X. Along the vertical direction X, the driving wheel 120 and the driven wheel 130 are located between the first suspension belt 141 and the second suspension belt 142, with the second suspension belt 142 located above the first suspension belt 141. The sides of the first suspension belt 141 and the second suspension belt 142 that are opposite to each other are the inner sides of the first suspension belt 141 and the second suspension belt 142, respectively. The sides of the first suspension belt 141 and the second suspension belt 142 that are opposite to each other are the outer sides of the first suspension belt 141 and the second suspension belt 142, respectively.

[0080] In this embodiment, the first guide wheel 151 can apply a force towards the second suspension belt 142 from the outside of the first suspension belt 141 to tension the first suspension belt 141. Furthermore, by pressing the first suspension belt 141 towards the second suspension belt 142 using the first guide wheel 151, the contact area between the enclosed conveyor belt 140 and the drive wheel 120 can be increased, i.e., the wrap angle between the enclosed conveyor belt 140 and the drive wheel 120 can be increased.

[0081] See also some of the possible implementation methods. Figure 1 As shown, the tensioning assembly 150 in this embodiment may further include a second guide wheel 152. The second guide wheel 152 may be disposed on the side of the second suspension belt 142 facing away from the first suspension belt 141, and the second guide wheel 152 presses against the second suspension belt 142.

[0082] When the first guide wheel 151 is close to the drive wheel 120, the second guide wheel 152 can be positioned close to the driven wheel 130. This embodiment of the application is described with the first guide wheel 151 close to the drive wheel 120 and the second guide wheel 152 close to the driven wheel 130 as an example. The second guide wheel 152 can apply a force towards the first suspension belt 141 from the outside of the second suspension belt 142 to tension the second suspension belt 142. Furthermore, by pressing the second suspension belt 142 towards the first suspension belt 141 with the second guide wheel 152, the contact area between the enclosed conveyor belt 140 and the driven wheel 130 can be increased, that is, the wrap angle between the enclosed conveyor belt 140 and the driven wheel 130 can be increased.

[0083] In some examples, by setting the positions of the first guide wheel 151 and the second guide wheel 152, the wrap angle between the closed conveyor belt 140 and the driving wheel 120 and the wrap angle between the closed conveyor belt 140 and the driven wheel 130 can be made equal, so that the rotation state of the driving wheel 120 and the driven wheel 130 remains consistent, thereby ensuring the transmission accuracy of the transmission mechanism 100.

[0084] In some examples, a second rotating shaft 152a may be provided on the base 110. The second guide wheel 152 may be sleeved on the outside of the second rotating shaft 152a.

[0085] See also some of the possible implementation methods. Figure 6As shown, the tensioning assembly 150 in this embodiment may further include a third guide wheel 153 and a fourth guide wheel 154. The third guide wheel 153 and the first guide wheel 151 may be located on the same side of the first suspension belt 141. In other words, both the third guide wheel 153 and the first guide wheel 151 may be located on the outer side of the first suspension belt 141. Furthermore, one of the first guide wheel 151 and the third guide wheel 153 is closer to the driving wheel 120, and the other is closer to the driven wheel 130. The fourth guide wheel 154 and the second guide wheel 152 may be located on the same side of the second suspension belt 142. In other words, both the fourth guide wheel 154 and the second guide wheel 152 may be located on the outer side of the second suspension belt 142. One of the second guide wheel 152 and the fourth guide wheel 154 is closer to the driving wheel 120, and the other is closer to the driven wheel 130.

[0086] Taking a configuration where the first guide wheel 151 and the fourth guide wheel 154 are both close to the driving wheel 120, and the second guide wheel 152 and the third guide wheel 153 are close to the driven wheel 130 as an example, the first guide wheel 151 can apply a force to the first suspension belt 141 towards the second suspension belt 142, and the fourth guide wheel 154 can apply a force to the second suspension belt 142 towards the first suspension belt 141. Therefore, the first guide wheel 151 and the fourth guide wheel 154 can work together on the enclosed conveyor belt 140 to increase the wrap angle between the enclosed conveyor belt and the driving wheel 120. Similarly, the second guide wheel 152 can apply a force to the second suspension belt 142 towards the first suspension belt 141, and the third guide wheel 153 can apply a force to the first suspension belt 141 towards the second suspension belt 142. Therefore, the second guide wheel 152 and the third guide wheel 153 can work together on the enclosed conveyor belt 140 to increase the wrap angle between the enclosed conveyor belt and the driven wheel 130.

[0087] In summary, the first guide wheel 151, the second guide wheel 152, the third guide wheel 153, and the fourth guide wheel 154 can be used to increase the wrap angle between the enclosed conveyor belt 140 and the driving wheel 120 and the driven wheel 130, so as to improve the stability of the enclosed conveyor belt 140 during the transmission process.

[0088] In some examples, the first guide wheel 151, the second guide wheel 152, the third guide wheel 153, and the fourth guide wheel 154 may have the same direction of rotation.

[0089] See in some examples Figure 6As shown, a third rotating shaft 153a and a fourth rotating shaft 154a may be provided on the base 110. The third guide wheel 153 may be sleeved on the outside of the third rotating shaft 153a. The fourth guide wheel 154 may be sleeved on the outside of the fourth rotating shaft 154a. The axes of the first rotating shaft 151a, the second rotating shaft 152a, the third rotating shaft 153a, and the fourth rotating shaft 154a may be parallel to each other and also parallel to the axes of the driving wheel 120 and the driven wheel 130.

[0090] See also some of the possible implementation methods. Figure 6 As shown, the minimum distance t2 between the edge of the second guide wheel 152 and the edge of the driven wheel 130 can be the thickness of the enclosed conveyor belt 140. The minimum distance t3 between the edge of the third guide wheel 153 and the edge of the driven wheel 130 can be the thickness of the enclosed conveyor belt 140. The minimum distance t4 between the edge of the fourth guide wheel 154 and the edge of the driving wheel 120 can be the thickness of the enclosed conveyor belt 140.

[0091] When the distance t1 between the edge of the first guide wheel 151 and the edge of the drive wheel 120 is equal to the thickness of the enclosed conveyor belt 140, and the distance t2 between the edge of the second guide wheel 152 and the edge of the driven wheel 130 is equal to the thickness of the enclosed conveyor belt 140, a large wrap angle can be formed between the drive wheel 120 and the enclosed conveyor belt 140. When the distance t3 between the edge of the third guide wheel 153 and the edge of the driven wheel 130 is equal to the thickness of the enclosed conveyor belt 140, and the distance t4 between the edge of the fourth guide wheel 154 and the edge of the drive wheel 120 is equal to the thickness of the enclosed conveyor belt 140, a large wrap angle can be formed between the driven wheel 130 and the enclosed conveyor belt 140.

[0092] By designing the parameters described above, the wrap angle between the enclosed conveyor belt 140 and the driving wheel 120 and driven wheel 130 can be increased while ensuring that the transmission between the enclosed conveyor belt 140 and the first guide wheel 151, the second guide wheel 152, the third guide wheel 153 and the fourth guide wheel 154 is not jammed.

[0093] See also some of the possible implementation methods. Figure 6 As shown, in this embodiment of the application, the minimum distance t5 between the edge of the first guide wheel 151 and the edge of the fourth guide wheel 154 can be twice the thickness of the enclosed conveyor belt 140. The minimum distance t6 between the edge of the second guide wheel 152 and the edge of the third guide wheel 153 can be twice the thickness of the enclosed conveyor belt 140.

[0094] In this embodiment of the application, reference is made to Figure 6As shown, the first guide wheel 151 and the fourth guide wheel 154 can correspond to each other along the vertical direction X, and both the first guide wheel 151 and the fourth guide wheel 154 are close to the drive wheel 120. At this time, the smaller the minimum distance t5 between the edges of the first guide wheel 151 and the edges of the fourth guide wheel 154 along the vertical direction X, the larger the wrap angle between the enclosed conveyor belt and the drive wheel 120. Furthermore, the minimum distance t5 needs to ensure that the enclosed conveyor belt 140 can pass smoothly.

[0095] Similarly, the second guide wheel 152 and the third guide wheel 153 can correspond to each other along the vertical direction X, and both the second guide wheel 152 and the third guide wheel 153 are close to the driven wheel 130. At this time, the smaller the minimum distance t6 between the edges of the second guide wheel 152 and the edges of the third guide wheel 153 along the vertical direction X, the larger the wrap angle between the enclosed conveyor belt and the driven wheel 130. Furthermore, the minimum distance t6 needs to ensure that the enclosed conveyor belt 140 can pass smoothly.

[0096] Therefore, when the minimum distance t5 between the edge of the first guide wheel 151 and the edge of the fourth guide wheel 154 is twice the thickness of the enclosed conveyor belt 140, the wrap angle between the enclosed conveyor belt 140 and the driving wheel 120 can be greater than 270°. Similarly, when the minimum distance t6 between the edge of the second guide wheel 152 and the edge of the third guide wheel 153 is twice the thickness of the enclosed conveyor belt 140, the wrap angle between the enclosed conveyor belt 140 and the driven wheel 130 can be greater than 270°.

[0097] See also some of the possible implementation methods. Figure 7 As shown, along the axial direction of the driving wheel 120, the middle region of the driving wheel 120 has the maximum outer diameter Dx. Along the axial direction of the driven wheel 130, the middle region of the driven wheel 130 also has the maximum outer diameter Dx.

[0098] Specifically, along the width direction Y of the drive pulley 120, and from its two side edges towards the middle region, the outer diameter of the drive pulley 120 gradually increases. The outer diameter of the middle region of the drive pulley 120 is the largest. During the transmission process between the drive pulley 120 and the enclosed conveyor belt 140, when the enclosed conveyor belt 140 deviates along the width direction Y, the middle region of the drive pulley 120 with its larger outer diameter can prevent the enclosed conveyor belt 140 from deviating and promptly correct the deviated portion of the enclosed conveyor belt 140, thereby ensuring the transmission stability of the drive pulley 120 and the enclosed conveyor belt 140.

[0099] Similarly, along the width direction of the driven wheel 130, and from its two side edges towards the middle region, the outer diameter of the driven wheel 130 gradually increases. The outer diameter of the middle region of the driven wheel 130 is the largest. The width direction of the driven wheel 130 is the same as the width direction Y of the driving wheel 120. During the transmission process between the driven wheel 130 and the enclosed conveyor belt 140, when the enclosed conveyor belt 140 deviates along the width direction Y, the middle region of the driven wheel 130 with its larger outer diameter can prevent the enclosed conveyor belt 140 from deviating and promptly correct the deviated portion of the enclosed conveyor belt 140, thereby ensuring the transmission stability between the driven wheel 130 and the enclosed conveyor belt 140.

[0100] In some examples, the height of the protrusion protruding from the drive wheel 120 can be 1 / 100 of the width of the enclosed conveyor belt 140.

[0101] This application also provides a wafer transfer device, which may include an end effector and at least one set of transmission mechanisms 100.

[0102] In some examples, the wafer transfer device can transfer wafers in the form of a robotic arm. When there are multiple sets of transmission mechanisms 100, the multiple sets of transmission mechanisms 100 are connected in a transmission manner. One set of transmission mechanisms 100 can act as the upper arm of the robotic arm, one set of transmission mechanisms 100 can act as the lower arm of the robotic arm, and one set of transmission mechanisms 100 can act as the fingers of the robotic arm. The fingers can be used to transfer wafers.

[0103] Since each set of transmission mechanisms 100 can realize the continuous rotation of the driven wheel 130 around the output support shaft 170, when the wafer transfer device uses multiple sets of transmission mechanisms 100, the flexible movement of the finger end of the robotic arm can be realized to improve the wafer transfer range.

[0104] It should be noted that the numerical values ​​and ranges involved in this application are approximate values. Due to the influence of the manufacturing process, there may be a certain range of errors, which can be considered negligible by those skilled in the art.

[0105] In the description of the embodiments of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, an indirect connection through an intermediate medium, or the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in the embodiments of this application according to the specific circumstances.

[0106] In the description of this application, it should be understood that the terms “center,” “length,” “width,” “thickness,” “top,” “bottom,” “upper,” “lower,” “left,” “right,” “front,” “rear,” “vertical,” “horizontal,” “inner,” “outer,” “axial,” and “circumferential,” etc., used to indicate orientation or positional relationships are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing the present invention and simplifying the description, and are not intended to indicate or imply that the indicated position or component must have a specific orientation, or a specific structure and operation, and therefore should not be construed as a limitation of the present invention.

[0107] The devices or elements referred to in the embodiments of this application or implied herein must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as limiting the embodiments of this application. In the description of the embodiments of this application, "a plurality of" means two or more, unless otherwise precisely specified.

[0108] The terms "first," "second," "third," "fourth," etc. (if present) in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented, for example, in a sequence other than those illustrated or described herein.

[0109] Furthermore, the terms “comprising” and “having”, and any variations thereof, are intended to cover non-exclusive inclusion, such that a process, method, system, product, or apparatus that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or apparatus.

[0110] The term "multiple" in this article refers to two or more. The term "and / or" in this article is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A alone, A and B simultaneously, or B alone. Furthermore, the character " / " in this article generally indicates an "or" relationship between the preceding and following related objects; in formulas, the character " / " indicates a "division" relationship between the preceding and following related objects.

[0111] It is understood that the various numerical designations used in the embodiments of this application are merely for descriptive convenience and are not intended to limit the scope of the embodiments of this application.

[0112] It is understood that, in the embodiments of this application, the order of the above-mentioned process numbers does not imply the order of execution. The execution order of each process should be determined by its function and internal logic, and should not constitute any limitation on the implementation process of the embodiments of this application.

Claims

1. A transmission mechanism (100), characterized in that, include: The base (110) is provided with a drive shaft (160) and an output support shaft (170). The drive shaft (160) is rotatably connected to the base (110), and the output support shaft (170) is arranged side by side with the drive shaft (160). A drive wheel (120) is disposed on the drive shaft (160), and the drive wheel (120) and the drive shaft (160) rotate synchronously; A driven wheel (130) is disposed on the output support shaft (170), the driven wheel (130) rotates about the output support shaft (170), and the driven wheel (130) rotates to provide power; An enclosed conveyor belt (140) is fitted over the outside of the driving wheel (120) and the driven wheel (130); The tensioning assembly (150) includes a first guide wheel (151) disposed near the driving wheel (120) or the driven wheel (130), and the first guide wheel (151) presses against the outer side of the closed conveyor belt (140) to tension the closed conveyor belt (140). The minimum distance between the edge of the first guide wheel (151) and the edge of the drive wheel (120) is equal to the thickness of the enclosed conveyor belt (140).

2. The transmission mechanism (100) according to claim 1, characterized in that, The tensioning assembly (150) includes a first rotating shaft (151a), a first guide wheel (151) is sleeved on the first rotating shaft (151a), the position of the first rotating shaft (151a) on a first plane is adjustable, and the first plane is perpendicular to the axial direction of the first rotating shaft (151a).

3. The transmission mechanism (100) according to claim 2, characterized in that, The base (110) is provided with an adjustment groove (111), and part of the first rotating shaft (151a) is located in the adjustment groove (111). By setting the position of the first rotating shaft (151a) in the adjustment groove (111), the closed conveyor belt (140) is pressed by the first guide wheel (151).

4. The transmission mechanism (100) according to claim 1, characterized in that, The enclosed conveyor belt (140) is wrapped around the outside of the driving wheel (120) and the driven wheel (130) to form a first suspended belt (141) and a second suspended belt (142) spaced apart. The first guide wheel (151) is disposed on the side of the first suspended belt (141) facing away from the second suspended belt (142), and the first guide wheel (151) presses against the first suspended belt (141).

5. The transmission mechanism (100) according to claim 4, characterized in that, The tensioning assembly (150) further includes a second guide wheel (152), which is disposed on the side of the second suspension belt (142) facing away from the first suspension belt (141), and the second guide wheel (152) presses the second suspension belt (142) against it.

6. The transmission mechanism (100) according to claim 5, characterized in that, The tensioning assembly (150) also includes a third guide wheel (153) and a fourth guide wheel (154); The third guide wheel (153) and the first guide wheel (151) are located on the same side of the first suspension belt (141), with one of the first guide wheel (151) and the third guide wheel (153) close to the driving wheel (120) and the other close to the driven wheel (130). The fourth guide wheel (154) and the second guide wheel (152) are located on the same side of the second suspension belt (142), with one of the second guide wheel (152) and the fourth guide wheel (154) close to the driving wheel (120) and the other close to the driven wheel (130).

7. The transmission mechanism (100) according to claim 6, characterized in that, The minimum distance between the edge of the second guide wheel (152) and the edge of the driven wheel (130) is the thickness of the enclosed conveyor belt (140); The minimum distance between the edge of the third guide wheel (153) and the edge of the driven wheel (130) is the thickness of the enclosed conveyor belt (140); The minimum distance between the edge of the fourth guide wheel (154) and the edge of the drive wheel (120) is the thickness of the enclosed conveyor belt (140).

8. The transmission mechanism (100) according to claim 6, characterized in that, The minimum distance between the edge of the first guide wheel (151) and the edge of the fourth guide wheel (154) is twice the thickness of the closed conveyor belt (140); The minimum distance between the edge of the second guide wheel (152) and the edge of the third guide wheel (153) is twice the thickness of the enclosed conveyor belt (140).

9. The transmission mechanism (100) according to claim 1, characterized in that, Along the axial direction of the drive wheel (120), the middle region of the drive wheel (120) has the largest outer diameter; And / or, along the axial direction of the driven wheel (130), the middle region of the driven wheel (130) has the largest outer diameter.

10. A wafer transport device, characterized in that, include: End effector; At least one set of transmission mechanisms (100) as described in any one of claims 1 to 9, wherein the driven wheel (130) of the transmission mechanism (100) is connected to the end effector.

Images