A pin component and plasma processing equipment

Abstract

This invention relates to the field of wafer processing equipment technology, and more particularly to a ejector pin component and plasma processing equipment, comprising a fixed base, a support rod, an ejector pin body, a support portion, and a snap-fit ​​protrusion. The fixed base is disposed on the inner wall of the process cavity, and has a mounting groove recessed from the top end face to the bottom end face along its axial direction. The support rod is coaxially and movably disposed in the mounting groove. The support portion is movably disposed in the mounting groove and has a mounting hole, a first recess, and a second recess. The snap-fit ​​protrusion is disposed on the circumferential side wall of the support rod. When the snap-fit ​​protrusion moves downward along the first recess to be aligned with the second recess, the ejector pin body is screwed, causing the snap-fit ​​protrusion to screw into the second recess to fix the ejector pin body. This invention effectively avoids the problem of thread stripping caused by repeated screwing through a non-threaded connection method, ensuring that the ejector pin can be accurately reset to the preset position.

Description

Technical Field

[0001] This invention relates to the field of wafer processing equipment technology, and more particularly to a pin component and plasma processing equipment. Background Technology

[0002] In etching equipment used in semiconductor wafer fabrication, the wafer carrier is typically fixed to a cavity base. To enable automated wafer transfer, the carrier has through holes containing vertically retractable ejector pins. During transfer, the ejector pins rise in a controlled manner, their tips passing through these holes to lift and receive the wafer. After transfer, the ejector pins descend to their lowest position, allowing the wafer to smoothly fall back onto the carrier surface, thus completing the transfer. However, the currently common threaded fixing method for ejector pins and ejector pin holders has significant drawbacks: the fine threads are prone to stripping after repeated tightening, preventing the ejector pins from reliably descending to the preset position; simultaneously, the ceramic or sapphire ejector pin bodies experience stress concentration during tightening, making them highly susceptible to breakage. Summary of the Invention

[0003] This invention relates to a pin component and a plasma treatment device, the purpose of which is to effectively avoid the problem of thread stripping caused by repeated twisting through a non-threaded connection method.

[0004] To achieve the above objectives, the present invention provides an ejector pin component, comprising:

[0005] A fixed base is provided on the inner wall of the process cavity. The fixed base has a mounting groove recessed from the top end face to the bottom end face along its axial direction.

[0006] The support rod is coaxially and movably disposed within the mounting groove;

[0007] The ejector pin body is located at the top of the support rod;

[0008] A support portion is movably disposed within the mounting groove, and a mounting hole for the movement of the support rod is formed in the middle of the support portion along the axial direction of the mounting groove. A first recess is provided on the support portion along the wall of the mounting hole in a direction away from the wall of the hole. The top and bottom of the first recess are connected to the mounting groove in the axial direction. A second recess is provided on the support portion along the wall of the mounting hole in a direction away from the wall of the hole. The bottom of the second recess is connected to the mounting groove in the axial direction, and the second recess is connected to the first recess.

[0009] A snap-fit ​​protrusion is provided on the circumferential sidewall of the support rod, and the snap-fit ​​protrusion is matched with both the first recess and the second recess. When the top surface of the snap-fit ​​protrusion moves downward along the first recess to the same axial height as the top wall of the second recess, the ejector body is screwed to screw the snap-fit ​​protrusion from the first recess into the second recess to fix the ejector body.

[0010] Optionally, the top wall of the second recess is provided with a limiting protrusion extending toward the bottom of the second recess. During the process of the locking protrusion being screwed into the second recess, the movement position of the locking protrusion is determined by the ticking sound generated when it passes the limiting protrusion. After passing the limiting protrusion, the locking protrusion is clamped and limited in the second recess by cooperating with the side wall of the second recess.

[0011] Optionally, a support portion is coaxially and movably disposed within the mounting groove. The top of the support portion is connected to the bottom of the support portion, and the top surface of the support portion abuts against the bottom end of the support rod. An elastic element is fixedly connected to the bottom surface of the support portion, and the bottom end of the elastic element is fixedly connected to the bottom of the mounting groove to support the axial position of the support portion within the mounting groove.

[0012] Optionally, the top end of the support portion is recessed in the direction facing the bottom end, and the bottom of the support rod extends out of the mounting hole and into the anti-jamming groove to provide clearance space when the support rod moves circumferentially in the mounting groove.

[0013] Optionally, a flexible part is fixedly connected to the bottom of the anti-jamming groove. The flexible part abuts against the bottom of the support rod. When the snap-fit ​​protrusion passes the limiting protrusion, the flexible part provides elastic buffer deformation so that the snap-fit ​​protrusion can smoothly pass the limiting protrusion and enter the second recess. When the snap-fit ​​protrusion passes the limiting protrusion, the elastic reset of the flexible part causes the snap-fit ​​protrusion to move toward the opening of the mounting groove and abut against the top wall of the second recess.

[0014] Optionally, an adjusting rod is rotatably mounted on the bottom of the mounting groove, and a through adjusting hole is provided on the support part along its axial direction. A first threaded groove is provided on the circumferential wall of the adjusting rod along its axial direction, and a second threaded groove is provided on the wall of the adjusting hole along its axial direction. The adjusting rod is threaded into the adjusting hole through the first threaded groove and the second threaded groove, and when the adjusting rod is screwed, the axial height of the support part relative to the mounting groove is adjusted by the cooperation of the first threaded groove and the second threaded groove.

[0015] Optionally, the supporting part has a third recessed groove recessed from the top end to the bottom end. The third recessed groove is located above the adjustment through hole and communicates with the adjustment through hole. The flexible part has a communicating hole that communicates with the third recessed groove along its axial direction. The top of the adjusting rod is recessed in the third recessed groove or the communicating hole to avoid interference with the bottom of the supporting rod when the adjusting rod is rotated.

[0016] Optionally, the number of the snap-fit ​​protrusions matches the number of the first recess and the second recess, and the number of snap-fit ​​protrusions is set to a plurality, and the plurality of snap-fit ​​protrusions are arranged in an equally spaced ring around the circumference of the ejector pin body.

[0017] Optionally, anti-jamming grooves are provided on both sides of the snap-fit ​​protrusion from its top to its bottom surface. The axial cross-section of the anti-jamming groove is a right-angled triangle structure, and the inclined side of the right-angled triangle structure faces the limiting protrusion. When the snap-fit ​​protrusion and the limiting protrusion slide relative to each other, the inclined side of the right-angled triangle structure guides the snap-fit ​​protrusion to smoothly slide into or out of the second recess.

[0018] Optionally, a sealing ring is provided at the opening of the mounting groove, and the sealing ring covers the orthographic projection structure of the opening of the mounting groove onto the orthographic projection structure of the bottom wall of the mounting groove, so as to prevent plasma from entering the mounting groove.

[0019] Optionally, the bottom of the support rod is provided with a round cap extending away from the bottom of the support rod, so as to change the surface contact between the support rod and the flexible part to a point contact, thereby reducing the friction between the contact surface of the support rod and the flexible part.

[0020] To achieve the above objectives, the present invention also provides a plasma processing apparatus, including a process cavity, a wafer carrier stage, and a ejector pin component disposed within the process cavity. The wafer carrier stage is disposed within the process cavity and has a through hole. The ejector pin body of the ejector pin component is movably disposed within the through hole.

[0021] The beneficial effects of this invention are as follows:

[0022] This invention employs a snap-fit ​​locking mechanism instead of traditional threaded connections by setting a first recess and a second recess on the support portion to engage with a snap-fit ​​protrusion on the support rod. This non-threaded connection method fundamentally avoids the risk of thread stripping caused by repeated tightening, ensuring that the ejector pin can accurately return to the preset position during long-term use. At the same time, since the installation and fixing process does not require the application of huge tightening stress, it also effectively eliminates stress concentration points, significantly reducing the possibility of fracture of the ejector pin body made of brittle materials such as ceramics, thereby greatly improving the reliability and service life of the ejector pin component. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the ejector pin component in an embodiment of the present invention;

[0024] Figure 2 For the present invention Figure 1 A top cross-sectional view of the support portion with a first recess and a second recess provided in the embodiment.

[0025] Figure 3 For the present invention Figure 1 A schematic diagram of the structure in the embodiment where a circumferential protrusion is provided on the support rod;

[0026] Figure 4 For the present invention Figure 1 A front cross-sectional view of the support portion with a first recess and a second recess provided in the embodiment.

[0027] Figure 5 For the present invention Figure 1 An enlarged schematic diagram of the structure at position A in the embodiment.

[0028] Explanation of reference numerals in the attached figures:

[0029] 1. Fixed base; 1001. Mounting groove; 2. Support rod; 21. Snap-fit ​​protrusion; 3. Ejector pin body; 4. Support part; 41. Mounting hole; 42. First recessed part; 43. Second recessed part; 5. Limiting protrusion; 6. Supporting part; 7. Elastic element; 8. Adjusting rod; 9. Adjusting through hole; 10. Third recessed groove; 11. Sealing ring; 12. Flexible part. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions in the embodiments of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without inventive effort are within the scope of protection of this invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed following the word and its equivalents, but do not exclude other elements or objects.

[0031] To address the problems existing in the prior art, embodiments of the present invention provide an ejector pin component, such as... Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the ejector pin component includes a fixed base 1, a support rod 2, an ejector pin body 3, a support part 4, and a snap-fit ​​protrusion 21.

[0032] In one embodiment, such as Figure 1 As shown, the fixing base 1 is disposed on the inner wall of the process cavity. In other embodiments, it is not limited to being disposed only on the inner wall of the process cavity. The fixing base 1 has a mounting groove 1001 recessed from the top end to the bottom end and along its axial direction. In this embodiment, the shape of the fixing base 1 includes, but is not limited to, a cylindrical structure, a cube, or a cuboid structure. The three-dimensional shape of the groove cavity of the mounting groove 1001 is preferably a cylindrical structure, but is not limited to a cylindrical structure.

[0033] In one embodiment, such as Figure 1 As shown, the support rod 2 is coaxially and movably disposed within the mounting groove 1001; coaxiality can be understood as the central axis of the support rod 2 coinciding with the central axis of the groove cavity of the mounting groove 1001. The following description of coaxiality has the same meaning and will not be further explained. The support rod 2 has a cylindrical shape, and in other embodiments, the shape of the support rod 2 is not limited to a cylindrical structure, which will not be elaborated here.

[0034] Meanwhile, the axial and radial directions of the present invention are parallel to or coincide with the central axis and radial direction of the mounting groove 1001, which will not be described in detail later.

[0035] In one embodiment, such as Figure 1 As shown, the ejector pin body 3 is disposed on the top of the support rod 2; preferably, the ejector pin body 3 is coaxially disposed with the support rod 2, and the top of the ejector pin body 3 extends outside the mounting groove 1001.

[0036] In one embodiment, such as Figure 1 , Figure 2 and Figure 3 As shown, the support part 4 is movably disposed within the mounting groove 1001, and preferably the support part 4 is coaxially disposed with the mounting groove 1001; the shape of the support part 4 is not limited to a cylindrical structure or a disc-shaped structure.

[0037] In one embodiment, such as Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the support part 4 has a mounting hole 41 for moving the support rod 2, which is formed in the middle of the mounting groove 1001 along the axial direction. A first recess 42 is provided on the support part 4 along the wall of the mounting hole 41 in a direction away from the wall. The top and bottom of the first recess 42 are connected to the mounting groove 1001 in the axial direction. A second recess 43 is provided on the support part 4 along the wall of the mounting hole 41 in a direction away from the wall. The bottom of the second recess 43 is connected to the mounting groove 1001 in the axial direction. The second recessed portion 43 is connected to the first recessed portion 42; the snap-fit ​​protrusion 21 is provided on the circumferential side wall of the support rod 2, and the snap-fit ​​protrusion 21 is matched with both the first recessed portion 42 and the second recessed portion 43. When the top surface of the snap-fit ​​protrusion 21 moves downward along the first recessed portion 42 to the same axial height as the top wall of the second recessed portion 43, the ejector body 3 is screwed so that the snap-fit ​​protrusion 21 is screwed from the first recessed portion 42 into the second recessed portion 43 to fix the ejector body 3.

[0038] This embodiment utilizes a non-threaded snap-locking structure formed by the engagement of a first recess 42 and a second recess 43 on the support part 4 with a snap-fit ​​protrusion 21 on the support rod 2. During installation, simply move the snap-fit ​​protrusion 21 down along the first recess 42 and align it with the second recess 43, then screw on the ejector pin body 3 to reliably lock it in place. The operation is simple and provides a clear sense of positioning. This design fundamentally avoids the slippage problem caused by repeated screwing in traditional threaded connections, ensuring that the ejector pin can accurately return to its preset position after long-term lifting and lowering cycles. Simultaneously, since no tightening stress is required, it effectively prevents the risk of breakage due to stress concentration in brittle materials such as ceramic ejector pin bodies 3, significantly improving the reliability and service life of the ejector pin component.

[0039] Meanwhile, through the above-mentioned combined structure, when disassembling the ejector body 3, only a downward pressing force needs to be applied to the ejector body 3 and twisted in the opposite direction, so that the locking protrusion 21 can slide back along the second recess 43 to the first recess 42 and exit the mounting groove 1001 upward along the first recess 42, thereby realizing the quick and non-destructive disassembly of the ejector body 3. The entire disassembly process does not require tools and avoids the problems of stripping or component damage that may be caused by traditional thread disassembly.

[0040] In one embodiment, the first recess 42, the second recess 43, and the snap-fit ​​protrusion 21 can be mutually matching rectangular, trapezoidal, or arc-shaped structures, with an arc-shaped structure being preferred. The arc-shaped structure allows the snap-fit ​​protrusion 21 to form smooth line or surface contact with the sidewalls of the first and second recesses 42 and 43 as it moves down along the first recess 42 or screws into the second recess 43, effectively reducing stress concentration and avoiding localized wear caused by sharp edges. Simultaneously, the arc-shaped guide surface facilitates the smooth sliding of the snap-fit ​​protrusion 21 into the second recess 43 during rotational locking and provides clear feedback upon positioning with the cooperation of the limiting protrusion 5, further improving the accuracy and reliability of installation.

[0041] In one embodiment, such as Figure 4 As shown, the top wall of the second recessed portion 43 is provided with a limiting protrusion 5 extending towards the bottom of the second recessed portion 43. During the process of the engaging protrusion 21 being screwed into the second recessed portion 43, the movement position of the engaging protrusion 21 is determined by the ticking sound generated when it passes the limiting protrusion 5. After passing the limiting protrusion 5, the engaging protrusion 21 is clamped and limited in the second recessed portion 43 by cooperating with the side wall of the second recessed portion 43.

[0042] This embodiment provides clear operational feedback and a reliable locking effect through its mechanical structure. When the engaging protrusion 21 is screwed into the second recess 43 and passes the limiting protrusion 5, a "click" sound is produced, providing the operator with a clear auditory and tactile signal to accurately determine whether the locking is in place. At the same time, after passing the limiting protrusion 5, the engaging protrusion 21 is clamped and limited by the side wall of the second recess 43 and the limiting protrusion 5, forming a stable mechanical self-locking mechanism. This effectively prevents the ejector body 3 from accidentally loosening due to vibration or external force during use, thereby significantly improving the reliability and safety of the ejector component.

[0043] In one embodiment, the limiting protrusion 5 can be hemispherical, trapezoidal, or wedge-shaped, with a hemispherical structure being preferred. The hemispherical structure allows the engaging protrusion 21 to form a smooth rolling contact with the spherical surface of the limiting protrusion 5 during the screwing into the second recess 43, effectively reducing sliding friction and localized wear. Simultaneously, the hemispherical structure provides a clear "tick" sound feedback through elastic deformation when the engaging protrusion 21 passes over it, and achieves stable limiting through the contact between the spherical surface and the sidewall of the engaging protrusion 21 after passing over it, ensuring both the perceptibility of the operation and enhancing the reliability of the locking mechanism.

[0044] In one embodiment, the limiting protrusion 5 can be made of metal, engineering plastic, or elastic rubber, preferably an engineering plastic (such as POM or PEEK) with good wear resistance and moderate elasticity. Using such a material provides a clear "tick" sound feedback through the slight elastic deformation of the limiting protrusion 5 itself when the locking protrusion 21 is screwed in or out, while avoiding the sharp friction noise and excessive wear caused by metal materials. This ensures accurate positioning during operation and improves the durability and fit stability between the limiting protrusion 5 and the locking protrusion 21.

[0045] In one embodiment, such as Figure 1 As shown, a support portion 6 is coaxially and movably disposed within the mounting groove 1001. The top of the support portion 6 is connected to the bottom of the support portion 4, and the top surface of the support portion 6 abuts against the bottom end of the support rod 2. An elastic element 7 is fixedly connected to the bottom surface of the support portion 6, and the bottom end of the elastic element 7 is fixedly connected to the bottom of the mounting groove 1001, so as to support the axial position of the support portion 4 within the mounting groove 1001 through the elastic element 7. In this embodiment, the elastic force of the elastic element 7 provides stable axial support for the entire support portion 4 and the ejector pin body 3, so that the ejector pin body 3 can always be subjected to an upward elastic thrust when descending and resetting, ensuring that it accurately returns to its initial position. At the same time, the support portion 6, as an intermediate force transmission component, smoothly transmits the supporting force of the elastic element 7 to the support portion 4, effectively buffering the impact on the ejector pin during the lifting and lowering process, avoiding rigid collisions, which not only improves the stability and reliability of the ejector pin movement, but also extends the service life of the components.

[0046] In one embodiment, the elastic element 7 can be a helical spring, a wave spring, or an elastic rubber column, preferably a helical spring. Using a helical spring structure allows it to provide stable elastic support during axial compression and reset using its uniform helix, ensuring accurate reset of the ejector pin body 3 during lifting cycles. Simultaneously, the helical structure has good fatigue resistance and a long service life, effectively buffering impacts during ejector pin movement and avoiding rigid collisions, thereby improving the stability and reliability of the ejector pin component's operation.

[0047] In one embodiment, such as Figure 1 As shown, the top end of the support portion 6 is recessed with an anti-jamming groove facing the bottom end. The bottom of the support rod 2 extends out of the mounting hole 41 and into the anti-jamming groove to provide clearance space when the support rod 2 moves circumferentially in the mounting groove 1001. This configuration provides necessary radial clearance space when the support rod 2 rotates circumferentially within the mounting groove 1001, preventing rigid interference or jamming between the bottom end of the support rod 2 and the top end of the support portion 6. This structure ensures that during the tightening and locking process of the ejector pin body 3, the support rod 2 can smoothly drive the locking protrusion 21 from the first recess 42 into the second recess 43, thereby ensuring the smoothness and reliability of the non-threaded locking mechanism operation and reducing frictional wear between components.

[0048] In one embodiment, such as Figure 1 As shown, a flexible part 12 is fixedly connected to the bottom of the anti-jamming groove. The flexible part 12 abuts against the bottom of the support rod 2. When the locking protrusion 21 passes the limiting protrusion 5, the flexible part 12 provides elastic buffer deformation, allowing the locking protrusion 21 to smoothly pass the limiting protrusion 5 and enter the second recess 43. When the locking protrusion 21 passes the limiting protrusion 5, the elastic reset of the flexible part 12 causes the locking protrusion 21 to move towards the opening of the mounting groove 1001 and abut against the top wall of the second recess 43. This embodiment significantly improves the smoothness and reliability of the locking process through elastic buffering and reset. When the locking protrusion 21 is screwed into the second recess 43 and needs to pass the limiting protrusion 5, the compression deformation of the flexible part 12 can absorb some of the impact energy, provide buffering, and assist the protrusion to smoothly pass the resistance point, avoiding jamming or wear caused by hard collision; when the locking protrusion 21 passes the limiting protrusion 5, the elastic reset of the flexible part 12 will push the support rod 2 to move slightly upward, so that the locking protrusion 21 and the top wall of the second recess 43 are tightly fitted together to form a stable contact, which not only ensures the self-locking of the structure in place, but also reduces the risk of loosening caused by gaps.

[0049] In one embodiment, the flexible part 12 can be a disc-shaped, rectangular, or corrugated elastic pad, and its material can be silicone rubber, polyurethane, or fluororubber; a disc-shaped silicone rubber block is preferred. The disc-shaped structure can provide uniform axial buffering force, while the silicone rubber material has good elasticity, high temperature resistance, and plasma erosion resistance. During the screwing and locking process of the ejector pin body 3, it can absorb the impact through its own compression deformation, assist the locking protrusion 21 to smoothly pass over the limiting protrusion 5, and push the support rod 2 upward slightly during reset, ensuring that the locking protrusion 21 is stably abutted against the top wall of the second recess 43, thereby improving the reliability and durability of the locking mechanism.

[0050] In one embodiment, such as Figure 1 and Figure 5 As shown, an adjusting rod 8 is rotatably mounted on the bottom of the mounting groove 1001. A through adjusting hole 9 is provided on the support part 6 along its axial direction. A first threaded groove is provided on the circumferential wall of the adjusting rod 8 along its axial direction. A second threaded groove is provided on the wall of the adjusting hole 9 along its axial direction. The adjusting rod 8 is threadedly inserted into the adjusting hole 9 through the first threaded groove and the second threaded groove. When the adjusting rod 8 is screwed, the axial height of the support part 4 relative to the mounting groove 1001 is adjusted by the cooperation of the first threaded groove and the second threaded groove.

[0051] This embodiment utilizes the screw drive between the first and second threaded grooves by rotating the adjusting rod 8 to precisely and smoothly drive the support part 6 to rise and fall axially along the mounting groove 1001, thereby indirectly adjusting the overall height of the support part 4 and the ejector body 3. This structure achieves stepless fine-tuning of the ejector component height, facilitating precise calibration of the initial height of the ejector body 3 according to the actual position of the wafer carrier stage, ensuring the accuracy of lifting and resetting actions. Simultaneously, the threaded drive has self-locking properties, firmly maintaining the set height after adjustment and preventing displacement due to vibration or external force, significantly improving the adaptability and operational stability of the ejector component in plasma processing equipment.

[0052] It is worth noting that, compared with the existing technology of directly adjusting the axial height of multiple sets of ejector bodies 3 by screwing the threads, the present invention controls the height of the second recess 43 by adjusting the rotation of the adjusting rod 8, thereby adjusting the axial height of the ejector body 3 in the mounting groove 1001, thereby realizing the coplanar adjustment of multiple sets of ejector bodies 3. This not only avoids the risk of stripping and brittle breakage of the ejector body 3 due to repeated screwing, but also significantly improves the adjustment accuracy and operational reliability.

[0053] Specifically, the ejector body 3 is first removed from the fixed base 1, and then the adjusting rod 8 is rotated by inserting an external tool into the mounting groove 1001 to adjust the axial height of the second recess 43, thereby adjusting the relative height of the ejector body 3 installed in the fixed base 1, and then adjusting the coplanarity of the top ends of multiple sets of ejector bodies 3.

[0054] In one embodiment, such as Figure 1 and Figure 5As shown, the supporting part 6 has a third recessed groove 10 recessed from the top to the bottom surface. The third recessed groove 10 is located above the adjusting through hole 9 and communicates with the adjusting through hole 9. The flexible part 12 has a communicating hole that communicates with the third recessed groove 10 along its axial direction. The top of the adjusting rod 8 is recessed in the third recessed groove 10 or in the communicating hole to avoid interference with the bottom of the supporting rod 2 when the adjusting rod 8 is rotated. This embodiment provides the necessary axial clearance space for the rotation operation of the adjusting rod 8, effectively avoiding rigid interference or collision between the top of the adjusting rod 8 and the bottom of the ejector body 3 when rotating. This ensures that the height of the ejector component can be independently and accurately adjusted when the height of the ejector body 3 is finely adjusted by turning the adjusting rod 8, while avoiding unnecessary component wear and operational interference, and improving the convenience and reliability of equipment debugging.

[0055] In one embodiment, such as Figure 2 and Figure 3 As shown, the number of the snap-fit ​​protrusions 21 matches the number of the first recesses 42 and the second recesses 43. Several snap-fit ​​protrusions 21 are arranged in a ring around the circumference of the ejector pin body 3 at equal intervals. The advantage of this arrangement of multiple snap-fit ​​protrusions 21 in a ring around the circumference of the ejector pin body 3 is that the multi-point symmetrical snap-fit ​​structure significantly improves the uniformity of force distribution and overall stability of the ejector pin body 3 in the locked state. This design makes the force distribution between the support rod 2 and the support part 4 more balanced, effectively preventing localized wear or uneven loading caused by single-point force. Simultaneously, the cooperation of multiple snap-fit ​​protrusions 21 with the first recesses 42 and the second recesses 43 can share the load, enhancing the load-bearing capacity and vibration resistance of the locking mechanism, ensuring that the ejector pin remains reliably fixed and accurately reset under the complex operating conditions of plasma processing equipment.

[0056] In one embodiment, anti-jamming grooves are provided on both circumferential sides of the locking protrusion 21 from its top to its bottom surface. The axial cross-section of the anti-jamming groove is a right-angled triangle, and the inclined side of the right-angled triangle faces the limiting protrusion 5. When the locking protrusion 21 and the limiting protrusion 5 slide relative to each other, the inclined side of the right-angled triangle guides the locking protrusion 21 to smoothly slide into or out of the second recess 43. In this embodiment, the axial cross-section of the anti-jamming groove adopts a right-angled triangle structure, and its inclined side faces the limiting protrusion 5. When the locking protrusion 21 and the limiting protrusion 5 slide relative to each other, the smooth guide slope formed by the inclined side effectively guides the locking protrusion 21 to smoothly slide into or out of the second recess 43, avoiding jamming or hard collisions caused by right-angled edges, thereby reducing contact wear and improving the stability and smoothness of the locking and unlocking process.

[0057] In one embodiment, such as Figure 1 As shown, a sealing ring 11 is provided at the opening of the mounting groove 1001. The orthographic projection of the sealing ring 11 onto the bottom wall of the mounting groove 1001 covers the orthographic projection of the opening of the mounting groove 1001 onto the bottom wall of the mounting groove 1001, thereby preventing plasma from entering the mounting groove 1001. In this embodiment, by completely covering the projection of the opening of the mounting groove 1001 onto the bottom wall of the mounting groove 1001 with the orthographic projection of the sealing ring 11, an effective physical barrier can be formed to prevent active plasma and process byproducts generated in the process chamber of the plasma treatment equipment from entering the interior of the mounting groove 1001. This avoids the corrosion of precision moving parts such as the support rod 2 and the support part 4, and prevents the ejector pin from jamming, malfunctioning, or prematurely failing due to contamination, carbon buildup, or corrosion. This significantly improves the long-term working reliability and service life of the ejector pin components in harsh plasma environments.

[0058] In one embodiment, such as Figure 1 As shown, the bottom of the support rod 2 is provided with a round cap extending away from the bottom of the support rod 2, so as to change the surface contact between the support rod 2 and the flexible part 12 into point contact, thereby reducing the friction between the contact surfaces of the support rod 2 and the flexible part 12. This embodiment effectively reduces the contact area between the bottom of the support rod 2 and the flexible part 12 by changing the contact method from surface contact to point contact, thereby significantly reducing the sliding friction and making the support rod 2 rotate more smoothly in the mounting groove 1001, avoiding jamming. At the same time, the spherical structure of the round cap is conducive to adaptively adjusting the contact position when the support rod 2 deflects slightly, which not only ensures that the locking protrusion 21 of the ejector body 3 can smoothly slide into the second recess 43 during the screwing and locking process, but also reduces the wear of the contact surface between the support rod 2 and the flexible part 12, improving the reliability and service life of the ejector component.

[0059] To address the problems existing in the prior art, embodiments of the present invention also provide a plasma processing apparatus, including a process chamber, a wafer carrier stage, and a ejector pin component disposed within the process chamber. The wafer carrier stage is disposed within the process chamber and has a through hole. The ejector pin body 3 of the ejector pin component is movably disposed within the through hole. This embodiment achieves automated lifting and conveying of the wafer within the process chamber by allowing the ejector pin body 3 to move through the through hole on the wafer carrier stage. This ensures that the ejector pin body 3 can accurately reset during lifting using a snap-fit ​​locking mechanism, effectively avoiding the positioning inaccuracy problem caused by slippage in traditional threaded connections. It also eliminates the risk of damage to the brittle material ejector pin body 3 due to tightening stress, thereby significantly improving the reliability of wafer conveying, positioning accuracy, and the process stability and production efficiency of the entire plasma processing apparatus.

[0060] In one embodiment, the plasma processing equipment can be a plasma chemical vapor deposition equipment, a plasma etching equipment, or a plasma resist removal equipment. By integrating the ejector pin component of the present invention into the process cavity of the above-mentioned equipment, and utilizing its non-threaded snap-fit ​​locking structure, the problems of thread stripping and brittle ejector pin breakage can be effectively avoided during wafer transfer. This ensures that the wafer achieves stable and precise lifting and positioning during deposition, etching, or resist removal processes, thereby improving the reliability of the equipment process and the wafer processing yield.

[0061] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the present invention. Furthermore, the present invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. A pin component, characterized in that, include: A fixed base is provided on the inner wall of the process cavity. The fixed base has a mounting groove recessed from the top end face to the bottom end face along its axial direction. The support rod is coaxially and movably disposed within the mounting groove; The ejector pin body is located at the top of the support rod; A support portion is movably disposed within the mounting groove, and a mounting hole for the movement of the support rod is formed in the middle of the support portion along the axial direction of the mounting groove. A first recess is provided on the support portion along the wall of the mounting hole in a direction away from the wall of the hole. The top and bottom of the first recess are connected to the mounting groove in the axial direction. A second recess is provided on the support portion along the wall of the mounting hole in a direction away from the wall of the hole. The bottom of the second recess is connected to the mounting groove in the axial direction, and the second recess is connected to the first recess. A snap-fit ​​protrusion is provided on the circumferential sidewall of the support rod, and the snap-fit ​​protrusion is matched with both the first recess and the second recess. When the top surface of the snap-fit ​​protrusion moves downward along the first recess to the same axial height as the top wall of the second recess, the ejector body is screwed to screw the snap-fit ​​protrusion from the first recess into the second recess to fix the ejector body.

2. The ejector pin component according to claim 1, characterized in that, The top wall of the second recess is provided with a limiting protrusion extending toward the bottom of the second recess. During the process of the locking protrusion being screwed into the second recess, the movement position of the locking protrusion is determined by the ticking sound generated when it passes the limiting protrusion. After passing the limiting protrusion, the locking protrusion is clamped and limited in the second recess by cooperating with the side wall of the second recess.

3. The ejector pin component according to claim 2, characterized in that, A support portion is coaxially and movably disposed within the mounting groove. The top of the support portion is connected to the bottom of the support portion, and the top surface of the support portion abuts against the bottom end of the support rod. An elastic element is fixedly connected to the bottom surface of the support portion, and the bottom end of the elastic element is fixedly connected to the bottom of the mounting groove to support the axial position of the support portion within the mounting groove.

4. The ejector pin component according to claim 3, characterized in that, The top of the support portion is recessed in the direction of the bottom surface to prevent jamming, and the bottom of the support rod extends out of the mounting hole and into the anti-jamming groove to provide clearance space when the support rod moves circumferentially in the mounting groove.

5. The ejector pin component according to claim 4, characterized in that, The bottom of the anti-jamming groove is fixedly connected to a flexible part, which abuts against the bottom of the support rod. When the snap-fit ​​protrusion passes the limiting protrusion, the flexible part provides elastic buffer deformation so that the snap-fit ​​protrusion can smoothly pass the limiting protrusion and enter the second recess. When the snap-fit ​​protrusion passes the limiting protrusion, the elastic reset of the flexible part causes the snap-fit ​​protrusion to move toward the opening of the mounting groove and abut against the top wall of the second recess.

6. The ejector pin component according to claim 5, characterized in that, An adjusting rod is rotatably mounted on the bottom of the mounting groove. A through adjusting hole is provided on the support part along its axial direction. A first threaded groove is provided on the circumferential wall of the adjusting rod along its axial direction. A second threaded groove is provided on the wall of the adjusting hole along its axial direction. The adjusting rod is threaded into the adjusting hole through the first threaded groove and the second threaded groove. When the adjusting rod is screwed, the axial height of the support part relative to the mounting groove is adjusted by the cooperation of the first threaded groove and the second threaded groove.

7. The ejector pin component according to claim 6, characterized in that, The supporting part has a third recessed groove recessed from the top end to the bottom end. The third recessed groove is located above the adjustment through hole and communicates with the adjustment through hole. The flexible part has a communicating hole that communicates with the third recessed groove along its axial direction. The top of the adjusting rod is recessed in the third recessed groove or the communicating hole to avoid interference with the bottom of the supporting rod when the adjusting rod is rotated.

8. The ejector pin component according to claim 1, characterized in that, The number of the snap-fit ​​protrusions matches the number of the first recess and the second recess. There are several snap-fit ​​protrusions, and these several snap-fit ​​protrusions are arranged in an equally spaced ring around the circumference of the ejector pin body.

9. The ejector pin component according to claim 2, characterized in that, Both sides of the snap-fit ​​protrusion are provided with anti-jamming grooves from its top to its bottom surface. The axial cross-section of the anti-jamming groove is a right-angled triangle structure, and the inclined side of the right-angled triangle structure faces the limiting protrusion. When the snap-fit ​​protrusion and the limiting protrusion slide relative to each other, the inclined side of the right-angled triangle structure guides the snap-fit ​​protrusion to smoothly slide into or out of the second recess.

10. The ejector pin component according to claim 1, characterized in that, A sealing ring is provided at the opening of the mounting groove. The sealing ring covers the orthographic projection structure of the bottom wall of the mounting groove, thereby preventing plasma from entering the mounting groove.

11. The ejector pin component according to claim 5, characterized in that, The bottom of the support rod is provided with a round cap extending away from the bottom of the support rod, so as to change the surface contact between the support rod and the flexible part to a point contact, thereby reducing the friction between the contact surface of the support rod and the flexible part.

12. A plasma processing device, characterized in that, The device includes a process cavity, a wafer carrier stage, and a ejector pin component as described in any one of claims 1 to 11 disposed within the process cavity. The wafer carrier stage is disposed within the process cavity and has a through hole. The ejector pin body of the ejector pin component is movably disposed within the through hole.

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