Refrigerating device and cooling system

Abstract

A refrigeration device according to one embodiment is provided with a compressor (11), a compressor downstream heat exchanger (12), an expander (21), and an expander downstream heat exchanger (22). The compressor (11) and the expander (21) are connected by a common drive shaft (18A). The compressor downstream side heat exchanger (12) cools the natural refrigerant flowing out from the compressor (11), and the expander downstream side heat exchanger (22) exchanges heat between the natural refrigerant flowing out from the expander (21) and a temperature control object. The compressor downstream-side heat exchanger (12) and the expander downstream-side heat exchanger (22) are arranged so as to be aligned in a direction parallel to the axial direction (Ax) of the drive shaft (18A).

Description

Technical Field

[0001] Embodiments of the present invention relate to refrigeration devices and cooling systems. Background Technology

[0002] Refrigeration systems that use Freon refrigerants for circulation are widely used in various fields. However, the large amount of Freon refrigerant currently used in such systems needs to be replaced with refrigerants that have a high GWP (Global Warming Potential) and low environmental impact.

[0003] The development of Freon refrigerants with extremely low GWP is underway; for example, R1234yf has a GWP of less than 1. However, R1234yf is flammable, and its use is sometimes restricted from a safety perspective. For example, the use of flammable refrigerants is typically restricted in semiconductor manufacturing plants.

[0004] On the other hand, refrigeration systems using natural refrigerants such as nitrogen, helium, and air are known. Natural refrigerants have a gas volatile organic compound (GWP) of 0 and are non-flammable. Therefore, in refrigeration systems using natural refrigerants, appropriate safety can be ensured while minimizing environmental impact.

[0005] Existing technical documents

[0006] Patent documents

[0007] Patent Document 1: Japanese Patent Application Publication No. 2012-137291 Summary of the Invention

[0008] For example, refrigeration units using high-output natural refrigerants are typically large. Therefore, their implementation is sometimes limited due to their size. For instance, in semiconductor manufacturing plants, strict constraints are often imposed on the floor space occupied by manufacturing equipment. In the semiconductor manufacturing field, the actual implementation of refrigeration units using high-output natural refrigerants is not particularly common. One reason for this is believed to be the size of the refrigeration unit.

[0009] As refrigeration units using natural refrigerants become increasingly prevalent in various fields, minimizing their size has become a significant challenge. Furthermore, it is believed that solving this problem, combined with the advantage of low environmental impact, will lead to substantial further widespread adoption.

[0010] The present invention was made in view of the above-mentioned actual situation, and its object is to provide a refrigeration device and cooling system that can suppress environmental load and ensure safety while suppressing its size.

[0011] One embodiment of the present invention is associated with the following modes "1" to "11".

[0012] [1] A refrigeration device comprising a compressor, a compressor downstream heat exchanger, an expander, and an expander downstream heat exchanger, wherein a natural refrigerant flowing from the compressor circulates back to the compressor after sequentially passing through the compressor downstream heat exchanger, the expander, and the expander downstream heat exchanger, the compressor and the expander being connected by a common drive shaft, the compressor downstream heat exchanger cooling the natural refrigerant flowing from the compressor, and the expander downstream heat exchanger exchanging heat between the natural refrigerant flowing from the expander and a temperature-controlled object, the compressor downstream heat exchanger and the expander downstream heat exchanger being arranged in a direction parallel to or above the axial direction of the drive shaft.

[0013] [2] According to the refrigeration device of [1], wherein the downstream heat exchanger of the compressor comprises: an external heat exchanger that cools the natural refrigerant flowing out of the compressor using a heat medium different from the natural refrigerant; and an internal heat exchanger that cools the natural refrigerant flowing out of the compressor using the natural refrigerant received from the downstream heat exchanger of the expander, wherein at least one of the external heat exchanger and the internal heat exchanger is arranged with the downstream heat exchanger of the expander in a direction parallel to or along the axial direction of the drive shaft.

[0014] [3] According to the refrigeration device described in [2], the downstream heat exchanger of the expander and the internal heat exchanger are arranged sequentially in the axial direction from the expander toward the compressor.

[0015] [4] The refrigeration apparatus according to [2] or [3], wherein at least a portion of the area occupied by the compressor, the drive shaft and the expander overlaps with at least a portion of the area occupied by the downstream heat exchanger of the expander and the internal heat exchanger in the radial direction of the drive shaft perpendicular to the axial direction.

[0016] [5] The refrigeration apparatus according to any one of [2] to [4], wherein the expander, the drive shaft and the expander are arranged between the two ends of the area occupied by the downstream heat exchanger of the expander and the internal heat exchanger in a direction parallel to the axial direction.

[0017] [6] The refrigeration apparatus according to any one of [2] to [5], wherein the downstream heat exchanger of the expander, the internal heat exchanger and the external heat exchanger are arranged sequentially in the axial direction from the expander toward the compressor.

[0018] [7] The refrigeration device according to [6], wherein the external heat exchanger, the internal heat exchanger and the downstream heat exchanger of the expander are integrated.

[0019] [8] The refrigeration apparatus according to any one of [2] to [5], wherein the internal heat exchanger is integrated with the downstream heat exchanger of the expander in an adjacent manner, and the internal heat exchanger is integrated with the external heat exchanger in an adjacent manner in a direction perpendicular to the direction adjacent to the internal heat exchanger and the downstream heat exchanger of the expander.

[0020] [9] A heat exchanger unit having a first external heat exchanger, an internal heat exchanger, and a second external heat exchanger, wherein the first external heat exchanger, the internal heat exchanger, and the second external heat exchanger each have a heat exchange section capable of heat exchange between fluids flowing in different flow paths and a housing for housing the heat exchange section, wherein the housing of the first external heat exchanger, the housing of the internal heat exchanger, and the housing of the second external heat exchanger are integrated to form a common housing, wherein one of the two fluid outlets of the heat exchange section of the first external heat exchanger is connected inside the common housing to one of the two fluid inlets of the heat exchange section of the internal heat exchanger, and one of the two fluid outlets of the heat exchange section of the second external heat exchanger is connected inside the common housing to the other of the two fluid inlets of the heat exchange section of the internal heat exchanger.

[0021]

[10] The heat exchanger unit according to [9], wherein the first external heat exchanger, the internal heat exchanger and the second external heat exchanger are integrated in a linear sequence.

[0022]

[11] A cooling system comprising: a refrigeration device as described in any one of [1] to [8]; and a fluid flow device connected to a downstream heat exchanger of the expander, for the flow of a fluid that exchanges heat with the natural refrigerant flowing out of the expander as the object of temperature control.

[0023] According to the present invention, it is possible to provide a refrigeration device and a cooling system that can suppress environmental load and ensure safety while suppressing its size. Attached Figure Description

[0024] Figure 1 This is a perspective view of the cooling system according to the first embodiment.

[0025] Figure 2 This is a diagram showing the housing of the cooling system provided in the first embodiment.

[0026] Figure 3 This is a diagram showing the piping structure of the cooling system according to the first embodiment.

[0027] Figure 4 It is along Figure 1 and Figure 2 The view shown is taken from the direction of arrow IV when viewing the cooling system of the first embodiment.

[0028] Figure 5 It is along Figure 1 and Figure 2 The view showing the direction of arrow V when viewing the cooling system of the first embodiment.

[0029] Figure 6 This is a perspective view of the cooling system according to the second embodiment.

[0030] Figure 7 It is along Figure 6 The view showing the direction of arrow VII when viewing the cooling system of the second embodiment.

[0031] Figure 8 It is along Figure 6 The view showing the direction of arrow VIII when viewing the cooling system of the second embodiment.

[0032] Figure 9 This is a perspective view of the cooling system according to the third embodiment.

[0033] Figure 10 This is a diagram illustrating the cooling system of the fourth embodiment.

[0034] Figure 11 This is a diagram showing the cooling system of the fifth embodiment.

[0035] Figure 12 This is a diagram showing the cooling system of the sixth embodiment. Detailed Implementation

[0036] The following describes each implementation method.

[0037] <First Implementation>

[0038] Figure 1 This is a perspective view of the cooling system S1 according to the first embodiment. The structure of the cooling system S1 according to the first embodiment will be described below.

[0039] (Structure of the cooling system)

[0040] like Figure 1 As shown, the cooling system S1 includes a refrigeration device 10 and a fluid flow device 100. In the cooling system S1, the refrigeration device 10 is connected to the fluid flow device 100.

[0041] The refrigeration unit 10 cools the fluid that is the object of temperature control and flows through the fluid flow device 100. The fluid flow device 100 then flows the fluid cooled by the refrigeration unit 10 to the secondary temperature control object Tr. Thus, the temperature of the secondary temperature control object Tr can be controlled using the fluid flowing through the fluid flow device 100.

[0042] In this embodiment, the fluid whose temperature has been controlled by the secondary temperature control object Tr is returned to the fluid flow device 100 and cooled again by the cooling device 10. The secondary temperature control object Tr is not particularly limited, and may be, for example, a wafer that serves as an intermediate component of a semiconductor, a stage that holds the wafer, etc. In addition, the secondary temperature control object Tr may also be a mold, the space of a refrigerator or freezer, etc.

[0043] The cooling system S1 of this embodiment suppresses its size by studying the layout of the components of the refrigeration device 10 and the components of the fluid flow device 100. Figure 2 The diagram shows the housing 1 installed in the cooling system S1, indicated by a double-dotted line. The components of the refrigeration device 10 and the fluid flow device 100 can be compactly housed within the cuboid housing 1. Alternatively, the housing 1 may not be provided. The refrigeration device 10 and the fluid flow device 100 will be described in detail below.

[0044] Refrigeration unit

[0045] The refrigeration device 10 is a reverse Brayton refrigeration cycle device that circulates natural refrigerant. In this embodiment, as an example, the refrigeration device 10 circulates nitrogen, which is a natural refrigerant. However, the refrigeration device 10 may also be a structure that circulates air, helium, or the like.

[0046] Figure 3 This is a diagram showing the piping structure of the cooling system S1. (Refer to...) Figure 1 and Figure 3 The refrigeration unit 10 includes a compressor 11, a compressor downstream heat exchanger 12, an expander 21, and an expander downstream heat exchanger 22.

[0047] In the cooling system S1, the refrigerant flowing from the compressor 11 circulates back to the compressor 11 after passing sequentially through the compressor downstream heat exchanger 12, the expander 21, and the expander downstream heat exchanger 22. For this circulation, the compressor 11, the compressor downstream heat exchanger 12, the expander 21, and the expander downstream heat exchanger 22 pass through the refrigerant circulation path 16 (see reference). Figure 3 And connect.

[0048] The compressor downstream heat exchanger 12 is a heat exchanger used to cool the refrigerant flowing out of the compressor 11. On the other hand, the expander downstream heat exchanger 22 is a heat exchanger that allows the refrigerant flowing out of the expander 21 to exchange heat with the fluid flowing through the fluid flow device 100, which is a temperature control device.

[0049] In this embodiment, the downstream heat exchanger 12 of the compressor includes: an external heat exchanger 13 that cools the natural refrigerant flowing out of the compressor 11 using a heat medium different from the natural refrigerant; and an internal heat exchanger 14 that cools the natural refrigerant flowing out of the compressor 11 using the natural refrigerant received from the downstream heat exchanger 22 of the expander. The natural refrigerant flowing out of the compressor 11 passes sequentially through the external heat exchanger 13 and the internal heat exchanger 14. Therefore, specifically, the internal heat exchanger 14 cools the natural refrigerant flowing into the external heat exchanger 13 after passing through it, using the natural refrigerant received from the downstream heat exchanger 22 of the expander.

[0050] The compressor 11 compresses the refrigerant flowing from the downstream heat exchanger 22 of the expander and then delivers it to the external heat exchanger 13. The refrigerant is then cooled in stages in the external heat exchanger 13 and the internal heat exchanger 14 before flowing into the expander 21, which delivers the refrigerant to the downstream heat exchanger 22. The external heat exchanger 13 is connected to the cooling heat medium flow path 30 and receives the cooling heat medium from it. The external heat exchanger 13 then cools the high-temperature refrigerant flowing from the compressor 11 by exchanging heat with the cooling heat medium. The cooling heat medium is not particularly limited and can be water or brine. Alternatively, the external heat exchanger 13 can also be an air-cooled heat exchanger.

[0051] The internal heat exchanger 14 uses the refrigerant received from the downstream heat exchanger 22 of the expander to cool the refrigerant flowing from the compressor 11 through the external heat exchanger 13, and then delivers it to the expander 21. The expander 21 expands the refrigerant from the internal heat exchanger 14 and then delivers it to the downstream heat exchanger 22. Figure 3 As shown, the downstream heat exchanger 22 of the expander is connected to the fluid flow device 100. After cooling the fluid flowing through the fluid flow device 100, it flows out to the compressor 11.

[0052] Here, the refrigerant flowing from the downstream heat exchanger 22 of the expander to the compressor 11 flows into the compressor 11 after passing through the internal heat exchanger 14. Thus, the internal heat exchanger 14 uses the refrigerant received from the downstream heat exchanger 22 to cool the refrigerant flowing in from the external heat exchanger 13. Therefore, the refrigerant flowing from the compressor 11 to the expander 21 is cooled in stages in the external heat exchanger 13 and the internal heat exchanger 14, as described above.

[0053] The refrigeration unit 10 cools the nitrogen gas expanded by the expander 21 within a range of, for example, -60°C to -180°C, and allows it to flow into the downstream heat exchanger 22 of the expander. Because the refrigeration unit 10 can cool the refrigerant to such an extremely low temperature range, it can generally maintain a high freezing capacity even after the refrigerant has exchanged heat with the fluid in the downstream heat exchanger 22. Therefore, in this embodiment, the refrigerant flowing out of the downstream heat exchanger 22 is used in the internal heat exchanger 14 to cool the refrigerant flowing out of the compressor 11, thereby improving efficiency. However, the internal heat exchanger 14 may not be provided.

[0054] Furthermore, in the refrigeration unit 10, the compressor 11 and the expander 21 are connected by a shared motor 18 (see reference). Figure 3 The compressor 11 and the expander 21 are connected to the drive shaft 18A. Thus, by rotating the drive shaft 18A, the compressor 11 and the expander 21 rotate in conjunction. Specifically, the compressor 11 is connected to the drive shaft 18A at one end, and the expander 21 is connected to the drive shaft 18A at the other end.

[0055] The layout of the components of the refrigeration device 10 will be described in detail below. Figure 1 The numeral UD in the figure indicates the vertical direction. The vertical direction UD refers to the vertical direction. The numeral Ax indicates the direction passing through the center of the drive shaft 18A, i.e., the axial direction of the drive shaft 18A. In this embodiment, the axial direction Ax of the drive shaft 18A extends along the vertical direction UD. Thus, the compressor 11 and the expander 21 are arranged in the vertical direction UD. In this embodiment, the compressor 11 is positioned above the expander 21, but the compressor 11 can also be positioned below the expander 21. Alternatively, the axial direction Ax may not extend along the vertical direction UD; for example, the compressor 11 and the expander 21 may be arranged with the axial direction Ax along the horizontal direction.

[0056] Reference Figure 1First, the compressor downstream heat exchanger 12 and the expander downstream heat exchanger 22 are arranged in a direction parallel to the axial direction Ax. Specifically, in this embodiment, the internal heat exchanger 14 in the compressor downstream heat exchanger 12 and the expander downstream heat exchanger 22 are arranged in a direction parallel to the axial direction Ax, and in the vertical direction UD. Furthermore, the internal heat exchanger 14 is positioned above the expander downstream heat exchanger 22. That is, the expander downstream heat exchanger 22 and the internal heat exchanger 14 are arranged sequentially in the axial direction Ax along the direction from the expander 21 toward the compressor 11 (from bottom to top).

[0057] The internal heat exchanger 14 has a heat exchange section 14A capable of heat exchange between fluids (natural refrigerant to each other) flowing in different flow paths and a housing 14B for housing the heat exchange section 14A. The downstream heat exchanger 22 of the expander has a heat exchange section 22A capable of heat exchange between fluids (natural refrigerant, fluid in the fluid flow device 100) flowing in different flow paths and a housing 22B for housing the heat exchange section 22A. Here, as... Figure 1 and Figure 3 As shown, the housing 14B of the internal heat exchanger 14 is integrated with the housing 22B of the downstream heat exchanger 22 of the expander. Thus, in this embodiment, the internal heat exchanger 14 and the downstream heat exchanger 22 of the expander are integrated, resulting in better processing and the ability to control the number and length of piping.

[0058] The housing 14B of the internal heat exchanger 14 and the housing 22B of the downstream heat exchanger 22 of the expander can also be formed from a common housing. Alternatively, the housing 14B of the internal heat exchanger 14 and the housing 22B of the downstream heat exchanger 22 of the expander can be easily integrated by means of fasteners such as bolts, or by means of welding. Furthermore, the internal heat exchanger 14 and the downstream heat exchanger 22 of the expander can also be separated.

[0059] Figure 4 It is along Figure 1 and Figure 2 The view shown is taken from the direction of arrow IV when observing the cooling system S1. Figure 5 It is along Figure 1 and Figure 2 The arrow V shown indicates the view when observing the cooling system S1. (See the image.) Figure 4 and Figure 5As shown, in this embodiment, at least a portion of the range A1 occupied by the expander 21, drive shaft 18A, and compressor 11 in the axial direction Ax overlaps with at least a portion of the range A2 occupied by the downstream heat exchanger 22 and internal heat exchanger 14 in a direction parallel to the axial direction Ax in the radial direction DD1 of the drive shaft 18A, which is perpendicular to the axial direction Ax. Specifically, the entire range A1 overlaps with the range A2 in the radial direction DD1. Thus, the compressor 11, drive shaft 18A, and expander 21 are arranged between the two ends of the range A2 in the axial direction Ax. In this case, the axial dimension Ax can be effectively suppressed in the cooling system S1.

[0060] On the other hand, the external heat exchanger 13 is configured such that it is perpendicular to the direction adjacent to the internal heat exchanger 14 and the downstream heat exchanger 22 of the expander (i.e., the direction parallel to the axial direction Ax) (see reference). Figure 4 The radial direction DD2 overlaps with the internal heat exchanger 14 (in other words, adjacent). Moreover, as... Figure 5 As shown, the external heat exchanger 13 is disposed between the two ends of the axial Ax of the range A2 occupied by the downstream heat exchanger 22 and the internal heat exchanger 14 in the axial Ax direction.

[0061] The external heat exchanger 13 has a heat exchange section 13A capable of heat exchange between fluids (natural refrigerant and cooling heat medium) flowing in different flow paths, and a housing 13B housing the heat exchange section 13A. In this embodiment, the housing 13B of the external heat exchanger 13 is rectangular parallelepiped. Furthermore, the housing 14B of the integrated internal heat exchanger 14 and the housing 22B of the downstream heat exchanger 22 of the expander are also generally rectangular parallelepipeds. Moreover, as... Figure 4 and Figure 5 As shown, one of the six faces 51 of the shell 13B of the external heat exchanger 13 and one of the six faces 52 of the shell 14B of the integrated internal heat exchanger 14 and the shell 22B of the downstream heat exchanger 22 of the expander extend parallel to the axial direction Ax and face each other in the horizontal direction.

[0062] Figure 4In this diagram, reference numeral C1 indicates the midpoint of the horizontal cross-section of the housing 13B of the external heat exchanger 13, and reference numeral C2 indicates the midpoint of the horizontal cross-section of the housing 14B of the integrated internal heat exchanger 14 and the housing 22B of the downstream heat exchanger 22 of the expander. Here, the radial direction DD1 where the external heat exchanger 13, the downstream heat exchanger 22 of the expander, and the internal heat exchanger 14 overlap in the axial direction Ax corresponds to the radial direction of the drive shaft 18A, passing through the center of the drive shaft 18A and the midpoint C1 of the housing 13B of the external heat exchanger 13. Similarly, the radial direction DD2 where the external heat exchanger 13 and the internal heat exchanger 14 overlap corresponds to the radial direction of the drive shaft 18A, passing through the center of the drive shaft 18A and the midpoint C2 of the housing 13B of the external heat exchanger 13.

[0063] In this embodiment, such as Figure 4 As shown, a layout is adopted in which the angle θ formed by radial DD1 and radial DD2 is 45 degrees or less. Therefore, the integrated assembly of the external heat exchanger 13, the internal heat exchanger 14, and the downstream heat exchanger 22 of the expander, as well as the integrated assembly of the expander 21, the drive shaft 18A, and the compressor 11, are centrally located. Alternatively, the angle θ can be 60 degrees or less, but is preferably 30 degrees or more and 45 degrees or less.

[0064] Furthermore, the external heat exchanger 13 is separately arranged from the integral assembly of the expander 21, drive shaft 18A, and compressor 11 in a radially DD2 space PS. The space PS mainly houses the piping connecting the external heat exchanger 13 to the compressor 11. The external heat exchanger 13 is positioned above the compressor 11, closer to the midpoint of the axial direction Ax of the expander 21, drive shaft 18A, and compressor 11. Thus, a flow path arrangement space FS for a predetermined fluid flow device 100 is formed below the external heat exchanger 13 (see reference). Figure 2 ).

[0065] In addition, Figure 4 The control box 40 is shown. The control box 40 houses controllers for controlling the cooling device 10, such as adjusting the speed of the drive shaft 18A, and controlling the fluid flow device 100, such as controlling the flow rate of fluid. In this embodiment, when viewing the cooling device 10 from above, an imaginary line is drawn along the radial direction DD2 passing through the center of the drive shaft 18A and the midpoint C2 of the housing 13B of the external heat exchanger 13. The control box 40 is positioned on one side across this line, and the external heat exchanger 13 is positioned on the other side. This allows for the housing of the components of the cooling system S1.

[0066] Next, the piping between the components of the refrigeration unit 10 will be described. As described above, the refrigerant circulation path 16 connects the compressor 11, the compressor downstream heat exchanger 12, the expander 21, and the expander downstream heat exchanger 22. More specifically, as... Figure 1 and Figure 3 As shown, the refrigerant circulation path 16 includes a first pipe 161 connecting the compressor 11 to the external heat exchanger 13, a second pipe 162 connecting the external heat exchanger 13 to the internal heat exchanger 14, a third pipe 163 connecting the internal heat exchanger 14 to the expander 21, a fourth pipe 164 connecting the expander 21 to the downstream heat exchanger 22 of the expander, and a fifth pipe 165 connecting the internal heat exchanger 14 to the compressor 11.

[0067] The first piping 161 receives the high-temperature refrigerant flowing from the compressor 11 and delivers it to the external heat exchanger 13. (Refer to...) Figure 1 As an example, the refrigerant outlet of compressor 11 and the refrigerant inlet of external heat exchanger 13 are at the same height in the vertical direction UD. In this case, the first piping 161 can suppress piping length and number of bends, and connect compressor 11 to external heat exchanger 13. Thus, pressure loss in the first piping 161 can be suppressed.

[0068] The second piping 162 receives cooled refrigerant from the external heat exchanger 13 and delivers it to the internal heat exchanger 14. As an example, the refrigerant outlet of the external heat exchanger 13 and the compressed refrigerant inlet of the internal heat exchanger 14 are at the same height in the vertical direction UD. In this case, the second piping 162 can minimize piping length and bends, and connect the external heat exchanger 13 to the internal heat exchanger 14. This helps to suppress pressure loss in the second piping 162.

[0069] Here, the natural refrigerant inlet and outlet of the aforementioned external heat exchanger 13 are opened on the surface of the housing 13B facing the compressor 11. Furthermore, the first pipe 161 and the second pipe 162 are arranged in... Figure 4 The setup space PS is shown. Thus, the first piping 161 and the second piping 162 are configured compactly.

[0070] The refrigerant flowing from the external heat exchanger 13 into the internal heat exchanger 14 is cooled as it flows from top to bottom within the internal heat exchanger 14. The cooled refrigerant then exits from the compressed refrigerant outlet, located below the aforementioned compressed refrigerant inlet. A third piping 163 receives the refrigerant exiting from the compressed refrigerant outlet of the internal heat exchanger 14 and delivers it to the expander 21. The compressed refrigerant inlet and outlet of the internal heat exchanger 14 are formed on the surface 52 of the housing 14B opposite to the external heat exchanger 13.

[0071] The fourth piping 164 receives the refrigerant flowing from the expander 21 and delivers it to the downstream heat exchanger 22. The downstream heat exchanger 22 receives the refrigerant flowing from the expander 21 at the refrigerant inlet. The refrigerant inlet is located below the refrigerant outlet. The refrigerant flowing into the downstream heat exchanger 22 flows from bottom to top, causing heat exchange between the fluid flowing through the fluid flow device 100 and the refrigerant. After heat exchange with the fluid, the refrigerant flowing from the downstream heat exchanger 22 flows into the internal heat exchanger 14 and flows from bottom to top. At this time, heat exchange occurs between the refrigerant flowing from the downstream heat exchanger 22 and the refrigerant flowing from the external heat exchanger 13 and from top to bottom.

[0072] Then, the refrigerant flowing from the downstream heat exchanger 22 of the expander into the internal heat exchanger 14 flows out from the expansion refrigerant outlet of the internal heat exchanger 14. In the internal heat exchanger 14, the expansion refrigerant outlet is located above the aforementioned compression refrigerant inlet. The fifth piping 165 receives the refrigerant flowing out from the expansion refrigerant outlet and delivers it to the compressor 11. After being compressed by the compressor 11, the refrigerant flowing into the compressor 11 flows back into the external heat exchanger 13 via the first piping 161.

[0073] Fluid flow device

[0074] Next, the fluid flow device 100 will be described. For example... Figure 2 As shown, in this embodiment, a flow path configuration space FS is formed below the external heat exchanger 13. Figure 1 As shown, the fluid flow device 100 is configured such that at least a portion of it is located within the flow path configuration space FS. In other words, the fluid flow device 100 is configured such that at least a portion of it overlaps with the external heat exchanger 13 in the axial direction Ax.

[0075] like Figure 1 and Figure 3 As shown, the fluid flow device 100 has an upstream flow path 101U connected to the fluid inlet 22i of the downstream heat exchanger 22 of the expander, a downstream flow path 101D connected to the fluid outlet 22e of the downstream heat exchanger 22 of the expander, a heater 102, a pump 103 and a three-way valve 104 provided on the upstream flow path 101U, and a bypass flow path 105 connecting the upstream flow path 101U and the downstream flow path 101D.

[0076] As described above, in this embodiment, the fluid flow device 100 directs the fluid cooled by the refrigeration unit 10 (downstream heat exchanger 22 of the expander) to the secondary temperature control target Tr. Then, the fluid whose temperature has been controlled by the secondary temperature control target Tr returns to the fluid flow device 100 and is cooled again by the refrigeration unit 10. In this embodiment, the fluid flowing through the fluid flow device 100 is a liquid, specifically brine. However, the fluid flowing through the fluid flow device 100 is not particularly limited and may also be a gas. The pump 103 generates a driving force for the fluid flow.

[0077] The upstream flow path 101U receives fluid returning from the secondary temperature control object Tr via its upstream end. In the upstream flow path 101U, the fluid is heated by the heater 102 as needed and then flows into the pump 103. The fluid flowing out of the pump 103 flows into the downstream heat exchanger 22 of the expander from the fluid inlet 22i connected to the downstream end of the upstream flow path 101U through two ports in the three-way valve 104, which forms part of the upstream flow path 101U.

[0078] The fluid flowing into the downstream heat exchanger 22 of the expander is cooled by the refrigerant and then flows out from the fluid outlet 22e. The fluid exiting from the fluid outlet 22e flows through the downstream flow path 101D and reaches the secondary temperature control object Tr, where its temperature is controlled. The bypass flow path 105 extends to the downstream flow path 101D from a port different from the two ports of the three-way valve 104, which forms part of the upstream flow path 101U. By adjusting the opening of the three-way valve 104, the flow rate of fluid that does not flow into the downstream heat exchanger 22 of the expander can be controlled, and the temperature of the fluid flowing through the secondary temperature control object Tr can be regulated.

[0079] like Figure 1 As shown, in this embodiment, a portion of the fluid flow device 100 is disposed in the flow path configuration space FS below the external heat exchanger 13. Therefore, the space below the external heat exchanger 13 is not rendered ineffective, but becomes the configuration space for the fluid flow device 100, thereby achieving overall size reduction.

[0080] On the other hand, in other parts of the fluid flow device 100 extending laterally from the flow path configuration space FS, piping sections extending in a direction parallel to the axial direction Ax are formed. These piping sections extending in a direction parallel to the axial direction Ax are arranged close to the compressor 11 and expander 21, thereby suppressing an increase in the radial occupancy of the fluid flow device 100. Particularly in the upstream flow path 101U, an inverted U-shaped piping section is formed with its bottom facing upwards in the vertical direction UD. A heater 102, serving as a fluid handling component, is provided on the straight portion extending in the vertical direction UD within the inverted U-shape. The heater 102 has a cylindrical appearance and is arranged with its length direction parallel to the axial direction Ax (vertical direction UD). Furthermore, by forming the inverted U-shaped piping section, the flow of fluid mixed with air bubbles can be suppressed, improving the stability of temperature control. Alternatively, in addition to or in place of the heater 102, fluid handling components such as tanks, pumps, and filters with a length direction can be provided, in which case a compact layout of the components can be achieved.

[0081] (Effects)

[0082] The effects of the cooling system S1 in the first embodiment will be explained below.

[0083] During cooling by the cooling system S1, the compressor 11 and expander 21 are driven. The compressor 11 compresses the refrigerant and delivers it to the external heat exchanger 13. The refrigerant flowing into the external heat exchanger 13 is cooled by a cooling heat medium and then flows into the internal heat exchanger 14, where it is further cooled. Afterward, the refrigerant flowing out of the internal heat exchanger 14 flows into the expander 21. The expander 21 cools the refrigerant by expanding it. Then, the refrigerant flowing out of the expander 21 flows into the downstream heat exchanger 22, where it exchanges heat with the fluid flowing through the fluid flow device 100, thus cooling the fluid.

[0084] The refrigeration unit 10 circulates nitrogen as a natural refrigerant, achieving low-temperature cooling in the downstream heat exchanger 22 of the expander via a reverse Brayton cycle. Nitrogen has a GWP of 0 and is non-flammable, thus suppressing environmental impact and ensuring safety. Furthermore, when using helium as a natural refrigerant, safety is also ensured by guaranteeing its non-flammability. On the other hand, air and the like are oxidizing agents but not flammable, thus ensuring appropriate safety.

[0085] Furthermore, as described above, in this embodiment, the internal heat exchanger 14 in the compressor downstream heat exchanger 12 and the expander downstream heat exchanger 22 are arranged in a direction parallel to the axial direction Ax of the compressor 11 and the expander 21. In this case, by arranging the internal heat exchanger 14 and the expander downstream heat exchanger 22 close to the compressor 11 and the expander 21 in the radial direction of the shared drive shaft 18A of the compressor 11 and the expander 21, the area occupied by the internal heat exchanger 14 and the expander downstream heat exchanger 22 in the radial direction of the drive shaft 18A can be suppressed. Specifically, in this embodiment, the drive shaft 18A is longitudinally arranged extending in the vertical direction, which can suppress the horizontal dimension of the refrigeration unit 10, thereby suppressing the occupied area.

[0086] Therefore, the cooling system S1 according to the first embodiment can suppress its size while suppressing environmental load and ensuring safety.

[0087] Furthermore, in this embodiment, the downstream heat exchanger 22 and the internal heat exchanger 14 of the expander are arranged sequentially along the axial direction Ax of the drive shaft 18A in the direction from the expander 21 toward the compressor 11. As a result, the piping length (the piping length of the fourth piping 164) between the expander 21 and the downstream heat exchanger 22 of the expander can be suppressed.

[0088] Furthermore, at least a portion of the area A1 occupied by the compressor 11, drive shaft 18A, and expander 21 overlaps radially with at least a portion of the area A2 occupied by the downstream heat exchanger 22 and internal heat exchanger 14 of the expander. In this case, by the radial overlap between the compressor 11, drive shaft 18A, and expander 21 and the downstream heat exchanger 22 and internal heat exchanger 14 of the expander, the axial dimension Ax of the refrigeration unit 10 can be suppressed. In particular, in this embodiment, the compressor 11, drive shaft 18A, and expander 21 are arranged between the two ends of the area A2 occupied by the downstream heat exchanger 22 and internal heat exchanger 14 of the expander in a direction parallel to the axial dimension Ax. As a result, the compressor 11, drive shaft 18A, and expander 21 do not extend axially from the downstream heat exchanger 22 and internal heat exchanger 14 of the expander, thereby effectively suppressing the axial dimension Ax of the refrigeration unit 10.

[0089] <Second Implementation>

[0090] Next, refer to Figures 6 to 8 The cooling system S2 of the second embodiment will be described. The same reference numerals are used for the components of this embodiment that are the same as those in the first embodiment, and repeated descriptions are omitted.

[0091] Figure 6This is a perspective view of the cooling system S2 according to the second embodiment. Figure 7 It is along Figure 6 The view of the cooling system S2 is shown in the direction of arrow VII. Figure 8 It is along Figure 6 The view of the cooling system S2 is shown in the direction of arrow VIII.

[0092] In this embodiment, the downstream heat exchanger 22, the internal heat exchanger 14, and the external heat exchanger 13 are arranged sequentially along the axial direction Ax of the drive shaft 18A in the direction from the expander 21 toward the compressor 11 (from bottom to top). That is, the position of the external heat exchanger 13 is different from that in the first embodiment.

[0093] Furthermore, the downstream heat exchanger 22, the internal heat exchanger 14, and the external heat exchanger 13 of the expander are integrated. Thus, the downstream heat exchanger 22, the internal heat exchanger 14, and the external heat exchanger 13 constitute a heat exchanger unit EU that integrates the three heat exchangers. Specifically, the housing 22B of the downstream heat exchanger 22, the housing 14B of the internal heat exchanger 14, and the housing 13B of the external heat exchanger 13 are integrated to form a common housing CC. Therefore, the three heat exchangers are integrated.

[0094] In addition, such as Figure 7 and Figure 8 As shown, at least a portion of the area A1 occupied by the expander 21, drive shaft 18A, and compressor 11 in the axial direction Ax overlaps with at least a portion of the area A2' occupied by the downstream heat exchanger 22, internal heat exchanger 14, and external heat exchanger 13 in the direction parallel to the axial direction Ax in the radial direction of the drive shaft 18A perpendicular to the axial direction Ax. Furthermore, the compressor 11, drive shaft 18A, and expander 21 are arranged between the two ends of the area A2' in the direction parallel to the axial direction Ax.

[0095] Reference Figure 6 and Figure 8 In this embodiment, the first piping 161 extends upward from the compressor 11 and connects to the external heat exchanger 13. The first piping 161 delivers the high-temperature refrigerant compressed by the compressor 11 to the external heat exchanger 13, which cools the refrigerant using a cooling heat medium from the cooling heat medium flow path 30. The refrigerant flowing out of the external heat exchanger 13 flows downward into the internal heat exchanger 14, and then also flows downward into the third piping 163. The subsequent flow of the refrigerant in the fourth piping 164 and the fifth piping 165 is the same as in the first embodiment.

[0096] Reference Figure 8 The flow path structure within the heat exchanger unit EU will be explained. One of the two fluid outlets (the outlet for natural refrigerant) of the heat exchange section 13A of the external heat exchanger 13 is connected inside the common housing CC to one of the two fluid inlets (the inlet for compressed natural refrigerant) of the heat exchange section 14A of the internal heat exchanger 14. Similarly, one of the two fluid outlets (the outlet for natural refrigerant) of the heat exchange section 22A of the downstream heat exchanger 22 is connected inside the common housing CC to the other of the two fluid inlets (the inlet for expanded natural refrigerant) of the heat exchange section 14A of the internal heat exchanger 14. Here, the inlet for compressed natural refrigerant and the inlet for expanded natural refrigerant in the heat exchange section 14A of the internal heat exchanger 14 open in opposite directions. The inlets for the compressed and expanded refrigerants in the heat exchange section 14A may not open in opposite directions, but preferably one inlet opens at one end of the internal heat exchanger 14, and the other inlet opens at the opposite end of the internal heat exchanger 14. This arrangement of inlets helps to reduce the complexity of the connection methods with other heat exchangers (external heat exchanger 13, downstream heat exchanger 22 of the expander).

[0097] Furthermore, when the heat exchanger unit EU is separated from the refrigeration unit 10 and observed as a single unit, the external heat exchanger 13 in this embodiment becomes a structure corresponding to the first external heat exchanger, and the downstream heat exchanger 22 of the expander becomes a structure corresponding to the second external heat exchanger.

[0098] According to this embodiment, the function of an internal heat exchanger 14, which utilizes the waste heat of the refrigerant flowing from the downstream heat exchanger 22 of the expander for temperature control of the refrigerant flowing from the external heat exchanger 13, can be realized in an easy-to-operate and compact manner. Furthermore, by reducing the number of pipes, the area occupied by the pipes can be reduced, thereby suppressing heat loss and pressure loss, and thus improving efficiency.

[0099] <Third Implementation Method>

[0100] Next, refer to Figure 9 The cooling system S3 of the third embodiment will be described. The same reference numerals are used for components in this embodiment that are the same as those in the first and second embodiments, and repeated descriptions are omitted.

[0101] In this embodiment, such as Figure 9As shown, the downstream heat exchanger 22, the internal heat exchanger 14, and the external heat exchanger 13 of the expander are integrated. Thus, the downstream heat exchanger 22, the internal heat exchanger 14, and the external heat exchanger 13 of the expander constitute a heat exchanger unit EU that integrates the three heat exchangers. On the other hand, the position of the external heat exchanger 13 is different from that in the second embodiment.

[0102] In detail, in this embodiment, the internal heat exchanger 14 and the downstream heat exchanger 22 of the expander are integrated adjacent to each other in a direction parallel to the axial direction Ax. On the other hand, in a direction perpendicular to the direction adjacent to the internal heat exchanger 14 and the downstream heat exchanger 22 of the expander (horizontal direction), the internal heat exchanger 14 and the external heat exchanger 13 are integrated adjacent to each other. The integrated state of the housing, the internal flow path structure, etc., are the same as in the second embodiment.

[0103] According to this embodiment, the same effects as in the second embodiment can be obtained. On the other hand, it is advantageous, for example, when it is desirable to suppress the height of UD in the vertical direction. In this embodiment, the internal heat exchanger 14 and the downstream heat exchanger 22 of the expander are integrated adjacent to each other in a direction parallel to the axial direction Ax. However, it is also possible that the external heat exchanger 13 and the downstream heat exchanger 22 of the expander are integrated adjacent to each other in a direction parallel to the axial direction Ax, and the internal heat exchanger 14 and the external heat exchanger 13 are integrated adjacent to each other in a direction perpendicular to the direction adjacent to the external heat exchanger 13 and the downstream heat exchanger 22 of the expander (horizontal direction).

[0104] <Fourth Implementation>

[0105] Next, refer to Figure 10 The cooling system S4 of the fourth embodiment will be described. The same reference numerals are used for the components of this embodiment that are the same as those in the first to third embodiments, and repeated descriptions are omitted.

[0106] In this embodiment, such as Figure 10 As shown, the downstream heat exchanger 22, the internal heat exchanger 14, and the external heat exchanger 13 of the expander are arranged along the axial direction Ax of the drive shaft 18A. Specifically, the downstream heat exchanger 22, the internal heat exchanger 14, and the external heat exchanger 13 are arranged sequentially away from the expander 21. This implementation is advantageous when radial extension suppression is important.

[0107] <Fifth Implementation>

[0108] Next, refer to Figure 11The cooling system S5 of the fifth embodiment will be described. The same reference numerals are used for the components of this embodiment that are the same as those in the first to fourth embodiments, and repeated descriptions are omitted.

[0109] In this embodiment, such as Figure 11 As shown, the downstream heat exchanger 22 and the internal heat exchanger 14 of the expander are arranged along the axial direction Ax of the drive shaft 18A. Specifically, the downstream heat exchanger 22 and the internal heat exchanger 14 are arranged sequentially away from the expander 21. On the other hand, the external heat exchanger 13 is arranged opposite the internal heat exchanger 14 in the radial direction of the drive shaft 18A, which is perpendicular to the axial direction Ax. According to this embodiment, the overall size can also be reduced.

[0110] <Sixth Implementation Method>

[0111] Next, refer to Figure 12 The cooling system S6 of the sixth embodiment will be described. The same reference numerals are used for the components of this embodiment that are the same as those in the first to fifth embodiments, and repeated descriptions are omitted.

[0112] In this embodiment, such as Figure 12 As shown, the downstream heat exchanger 22, the internal heat exchanger 14, and the external heat exchanger 13 of the expander are arranged axially along the drive shaft 18A at a distance Ax. Specifically, the downstream heat exchanger 22 and the internal heat exchanger 14 are arranged sequentially away from the expander 21. On the other hand, the external heat exchanger 13 is arranged adjacent to the compressor 11 axially at a distance Ax. This implementation is also advantageous when radial extension suppression is important.

[0113] The various embodiments of the present invention have been described above, but the present invention is not limited to the embodiments described above, and various further modifications can be made to the above embodiments.

[0114] For example, in the first embodiment described above, the internal heat exchanger 14 and the downstream heat exchanger 22 of the expander are arranged in a direction parallel to the axial direction Ax. However, it is also possible that the external heat exchanger 13 and the downstream heat exchanger 22 of the expander are arranged in a direction parallel to the axial direction Ax, and the internal heat exchanger 14 is positioned offset in a direction perpendicular to the direction in which the external heat exchanger 13 and the downstream heat exchanger 22 of the expander are arranged. Furthermore, the present invention can also be applied to structures requiring direct cooling.

[0115] Specifically, for example, the external heat exchanger 13 and the internal heat exchanger 14 can be arranged in a direction parallel to or along the axial direction Ax of the drive shaft 18A, forming a refrigeration device that allows the refrigerant flowing from the internal heat exchanger 14 into the expander 21 to expand and be supplied to, for example, a chamber. Such a direct-cooling refrigeration device is also advantageous in terms of size control.

[0116] Label Explanation

[0117] S1~S6: Cooling system; 1: Casing; 10: Refrigeration unit; 11: Compressor; 12: Downstream heat exchanger of compressor; 13: External heat exchanger; 13A: Heat exchange section; 13B: Casing; 14: Internal heat exchanger; 14A: Heat exchange section; 14B: Casing; 16: Refrigerant circulation path; 161: First piping; 162: Second piping; 163: Third piping; 164: Fourth piping; 165: Fifth piping; 18: Motor; 18A: Drive shaft; 21: Expander; 22: Downstream heat exchanger of expander 22A: Heat exchange unit; 22B: Housing; 22i: Fluid inlet; 22e: Fluid outlet; 30: Cooling medium flow path; 100: Fluid flow device; 101U: Upstream flow path; 101D: Downstream flow path; 102: Heater; 103: Pump; 104: Three-way valve; 105: Bypass flow path; Tr: Secondary temperature control object; UD: Up and down direction; Ax: Axial direction; DD1, DD2: Radial direction; PS: Setting space; FS: Flow path setting space; EU: Heat exchange unit; CC: Common housing.

Claims

1. A refrigeration device, wherein, The refrigeration unit includes a compressor, a heat exchanger downstream of the compressor, an expander, and a heat exchanger downstream of the expander. The refrigerant flowing from the compressor circulates back into the compressor after passing sequentially through the downstream heat exchanger of the compressor, the expander, and the downstream heat exchanger of the expander. The compressor and the expander are connected via a shared drive shaft. The downstream heat exchanger of the compressor cools the natural refrigerant flowing out of the compressor. The downstream heat exchanger of the expander allows the refrigerant flowing out of the expander to exchange heat with the temperature-controlled object. The downstream heat exchanger of the compressor and the downstream heat exchanger of the expander are arranged in a direction parallel to or along the axis of the drive shaft.

2. The refrigeration device according to claim 1, wherein, The downstream heat exchanger of the compressor includes: An external heat exchanger that uses a heat medium different from the natural refrigerant to cool the natural refrigerant flowing from the compressor; and An internal heat exchanger utilizes the natural refrigerant received from the heat exchanger downstream of the expander to cool the natural refrigerant flowing out of the compressor. At least one of the external heat exchanger and the internal heat exchanger is arranged with the downstream heat exchanger of the expander in a direction parallel to or along the axis of the drive shaft.

3. The refrigeration device according to claim 2, wherein, The downstream heat exchanger of the expander and the internal heat exchanger are arranged sequentially along the axial direction from the expander toward the compressor.

4. The refrigeration device according to claim 3, wherein, At least a portion of the area occupied by the compressor, the drive shaft, and the expander overlaps with at least a portion of the area occupied by the downstream heat exchanger of the expander and the internal heat exchanger in the radial direction of the drive shaft, which is perpendicular to the axial direction.

5. The refrigeration device according to claim 4, wherein, The expander, the drive shaft, and the expander are arranged between the two ends of the area occupied by the downstream heat exchanger and the internal heat exchanger in a direction parallel to the axial direction.

6. The refrigeration apparatus according to any one of claims 2 to 5, wherein, The downstream heat exchanger of the expander, the internal heat exchanger, and the external heat exchanger are arranged sequentially along the axial direction from the expander toward the compressor.

7. The refrigeration apparatus according to claim 6, wherein, The external heat exchanger, the internal heat exchanger, and the downstream heat exchanger of the expander are integrated.

8. The refrigeration device according to claim 2, wherein, The internal heat exchanger is integrated with the downstream heat exchanger of the expander in an adjacent manner. The internal heat exchanger and the external heat exchanger are integrated in an adjacent manner in a direction perpendicular to the direction adjacent to the internal heat exchanger and the downstream heat exchanger of the expander.

9. A heat exchanger unit, wherein, The heat exchanger unit has a first external heat exchanger, an internal heat exchanger, and a second external heat exchanger. The first external heat exchanger, the internal heat exchanger, and the second external heat exchanger each have a heat exchange section capable of heat exchange between fluids flowing in different flow paths and a housing for housing the heat exchange section. The housing of the first external heat exchanger, the housing of the internal heat exchanger, and the housing of the second external heat exchanger are integrated to form a common housing. One of the two fluid outlets of the heat exchange section of the first external heat exchanger is connected inside the common housing to one of the two fluid inlets of the heat exchange section of the internal heat exchanger. One of the two fluid outlets of the heat exchange section of the second external heat exchanger is connected inside the common housing to the other of the two fluid inlets of the heat exchange section of the internal heat exchanger.

10. The heat exchanger unit according to claim 9, wherein, The first external heat exchanger, the internal heat exchanger, and the second external heat exchanger are integrated in a linear sequence.

11. A cooling system comprising: The refrigeration device according to claim 1; and A fluid flow device connected to a heat exchanger downstream of the expander allows the flow of fluid that is the object of temperature control and exchanges heat with the natural refrigerant flowing out of the expander.

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