Inner cavity cleaning structure of single crystal growth furnace

Abstract

The invention discloses a single crystal growth furnace inner cavity cleaning structure, and relates to the technical field of single crystal furnace cleaning, the single crystal growth furnace inner cavity cleaning structure comprises a softening assembly and a scraping assembly, the softening assembly comprises a detection structure, a liquid storage cylinder and PTFE sponge, a liquid supply structure supplies liquid to the PTFE sponge, the scraping assembly comprises a scraper knife, a spray head and a rotating column, a liquid conveying cavity is formed in the rotating column, and the liquid conveying cavity is communicated with the scraper knife. The spray head is obliquely arranged on the outer side of the rotating column, a rotating plate is rotationally arranged on the rotating column, a mounting base is fixedly arranged at the end of the rotating column, the scraper knife is elastically and movably connected to the inner side of the mounting base, and the scraper knife is extruded to rotate the rotating plate to relieve blocking of the liquid conveying cavity. The device has the advantages that before scabs are shoveled, a mixed solution soaked with hydrofluoric acid and nitric acid is used for dispensing the scabs for multiple times, the composite hard scabs are softened, the collision force between the shovel blade and blocky substances is reduced through the supporting spring, and the inner wall of a hearth is prevented from being damaged.

Description

Technical Field

[0001] This invention relates to the field of single crystal furnace cleaning technology, and more particularly to a cleaning structure for the inner cavity of a single crystal growth furnace. Background Technology

[0002] A single crystal growth furnace is a core piece of equipment used to prepare high-purity single crystal materials. The working principle of a single crystal furnace is to heat and melt the raw material in a sealed furnace chamber using a heater. With a seed crystal as the core, the molten raw material is oriented to grow into a single crystal by precisely controlling the temperature gradient, the rotation of the seed crystal and the melt, and the pulling speed.

[0003] When a single crystal furnace is in use, the furnace chamber is in a vacuum and high-temperature environment for a long time. The inner wall is prone to adhering to impurities such as raw material volatiles, oxidation residues, and dust. These impurities may volatilize or decompose again at high temperatures and enter the melt through gas diffusion. This can easily lead to the formation of dislocations, inclusions, and micro-defects in the crystal. Therefore, the single crystal furnace needs to be cleaned regularly.

[0004] Residual impurities inside the furnace (such as silicon melt spatter, metal oxides, etc.) are tightly bonded to the inner wall. When scraped directly with a scraper, scratches of varying depths are easily formed on the surface. These scratches and pits become "dead zones" for subsequent impurity accumulation, making them difficult to clean thoroughly. Long-term use will lead to the continuous accumulation of contaminants. Therefore, a cleaning structure for the inner cavity of a single crystal growth furnace is required. Summary of the Invention

[0005] To address the shortcomings of existing technologies, this invention provides a cleaning structure for the inner cavity of a single crystal growth furnace, which solves the problem mentioned in the background art that hard scraping with a spatula can easily damage the inner wall of the furnace.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A cleaning structure for the inner cavity of a single crystal growth furnace includes a rotating support and a telescopic cylinder. The top of the rotating support is connected to the drive end of the telescopic cylinder, and a rotating cavity is provided at the bottom for rotatable engagement. The structure also includes:

[0008] A softening assembly is disposed on the outer wall of the rotating cavity. The softening assembly includes a detection structure, a liquid storage cylinder and a PTFE sponge. A moving cylinder for driving the liquid storage cylinder is mounted on the U-shaped frame. A receiving groove for installing the PTFE sponge is provided at the end of the liquid storage cylinder. A liquid supply structure is provided between the PTFE sponge and the liquid storage cylinder. The liquid supply structure supplies liquid to the compressed PTFE sponge.

[0009] A scraping assembly is installed on the outer wall of the rotating cavity. The scraping assembly includes a scraper, a nozzle, and a rotating column with an infusion chamber inside. The rotating column is fixed to the outer wall of the rotating cavity. The nozzle is inclinedly installed on the outside of the rotating column and communicates with the infusion chamber inside. A rotating plate that blocks the infusion chamber is rotatably installed on the rotating column. The rotating plate has a through-hole. A mounting base is fixed to the end of the rotating column. The scraper is elastically movably connected to the inner side of the mounting base. A linkage assembly is provided between the scraper and the rotating plate. When the scraper is squeezed, the rotating plate rotates and releases the blockage of the infusion chamber.

[0010] Furthermore, the detection component includes a mounting bridge fixed on a U-shaped frame, on which an inclined endoscope probe is mounted.

[0011] Furthermore, the liquid supply assembly includes a stop plate disposed inside the PTFE sponge and a connecting rod inserted into the end of the liquid storage cylinder. The end of the liquid storage cylinder has several outlet holes for connecting the receiving tank and the liquid storage cylinder. A blocking plate for sealing the outlet holes is movably disposed inside the liquid storage cylinder. One end of the connecting rod is connected to the blocking plate, and the other end is connected to the stop plate. A cavity for installing a reset spring is provided on the liquid storage cylinder. The end of the reset spring near the stop plate is fixed to the connecting rod.

[0012] Furthermore, the top of the liquid storage cylinder is connected to an inlet cylinder, the side of the inlet cylinder is provided with a viewing window, and the top of the inlet cylinder is provided with a cap.

[0013] Furthermore, the linkage component includes a sealed cavity inside the mounting base, a push rod fixedly connected to the blade, the end of the push rod penetrating into the sealed cavity and connected to a push plate, a support spring between the outer side of the push rod and the mounting base, a water bladder inside the sealed cavity, a plurality of teeth distributed on the circumferential sidewall of the rotating plate, a toothed rod slidably mounted on the outer sidewall of the rotating column, a sleeve fixedly connected to the outer sidewall of the rotating column, a transmission pipe communicating between one end of the sleeve and the water bladder, a moving rod slidably connected to the other end of the sleeve, a toothed rod fixedly mounted on the end of the moving rod away from the sleeve, a retaining spring between the toothed rod and the sleeve, and the toothed rod engaging with the plurality of teeth.

[0014] Furthermore, the rotating column is provided with a limiting frame for restricting the rotation of the teeth.

[0015] Furthermore, a motor is fixedly mounted on the rotating bracket, and a drive gear is fixedly connected to the output shaft of the motor. A stabilizer is fixedly mounted at the bottom of the rotating bracket, and the rotating cavity is rotatably connected to the stabilizer. A driven gear ring is provided on the outer wall of the rotating cavity, and the driven gear ring meshes with the drive gear. A water pump is fixedly mounted on the rotating bracket, and the outlet of the water pump communicates with the inner cavity of the rotating cavity. The water pump and the rotating cavity are rotatably connected by a sealed bearing.

[0016] Furthermore, an annular cavity is fixedly provided on the outside of the rotating cavity, and a vacuum cleaner communicating with the annular cavity is provided on the rotating cavity. A number of suction holes are distributed on the circumferential sidewall of the annular cavity, and a number of sets of bristles are distributed on the circumferential sidewall of the annular cavity. The suction holes and bristles are arranged alternately.

[0017] Furthermore, a sponge ring is provided on the outer wall of the rotating cavity, and the sponge ring is located above the softening component and the scraping component.

[0018] Compared with existing technologies, the advantages of this invention are:

[0019] 1. In this invention, before removing the scab, a mixed solution of hydrofluoric acid and nitric acid is applied to the scab multiple times. Hydrofluoric acid softens silicon-based impurities, and nitric acid dissolves metal oxides. The synergistic effect of the two can efficiently soften composite hard scabs, reducing the difficulty of removing the scabs with a scraper. The support spring reduces the force of the collision between the scraper and the blocky material, reducing damage to the inner wall of the furnace.

[0020] 2: In this invention, deionized water enters the nozzle through the infusion chamber and is sprayed onto the contact area between the scraper and the scab, washing away the residual hydrofluoric acid and nitric acid mixture, ensuring that there are no residual mixed solution residues on the inner wall of the furnace after rinsing.

[0021] 3: This invention uses a vacuum cleaner to absorb the oxide particles and dust washed out, avoiding the dust particles from floating inside the furnace cavity and causing secondary pollution to the already cleaned furnace cavity walls. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of a cleaning structure for the inner cavity of a single crystal growth furnace proposed in this invention;

[0023] Figure 2 for Figure 1 A schematic diagram of the overall structure of a single crystal furnace.

[0024] Figure 3 for Figure 1 Internal structure diagram;

[0025] Figure 4 for Figure 3 Top view;

[0026] Figure 5 for Figure 4 A cross-sectional view along the AA direction;

[0027] Figure 6 for Figure 3 Schematic diagram of the installation structure of PTFE sponge;

[0028] Figure 7 for Figure 6 Top view of the middle liquid storage tank;

[0029] Figure 8 for Figure 7 Cross-sectional view along the BB direction;

[0030] Figure 9 for Figure 3 Schematic diagram of the structure at the middle blade;

[0031] Figure 10 for Figure 9 Exploded view of the rotating plate section;

[0032] Figure 11 for Figure 9 Side view;

[0033] Figure 12 for Figure 11 A cross-sectional view along the CC direction.

[0034] In the diagram: 1. Rotating support; 11. Telescopic cylinder; 12. Motor; 13. Drive gear; 14. Water pump; 15. Rotating cavity; 16. Driven gear ring; 17. Stabilizer; 2. Furnace cavity; 3. Annular cavity; 31. Brush; 32. Adsorption hole; 4. U-shaped frame; 41. Mounting bridge; 42. Endoscope probe; 5. Moving cylinder; 51. Liquid storage tank; 52. Receiving tank; 53. PTFE 54. Sponge; 55. Discharge hole; 56. Support plate; 57. Return spring; 58. Blocking plate; 59. Inlet cylinder; 60. Viewing window; 61. Rotating column; 62. Mounting base; 63. Shovel; 64. Support rod; 65. Sealing cavity; 66. Piston plate; 67. Transmission pipe; 68. Sleeve; 681. Moving rod; 682. Support spring; 683. Toothed rod; 71. Infusion cavity; 72. Rotating plate; 73. Overlapping hole; 74. Tooth; 75. Limiting bracket; 86. Nozzle; 87. Crossbar; 881. Absorbent cotton; 9. Sponge ring. Detailed Implementation

[0035] Reference Figures 1-12A cleaning structure for the inner cavity of a single crystal growth furnace includes a rotating support 1 and a telescopic cylinder 11. The cleaning structure is used to clean the inner wall of the furnace cavity 2. The top of the rotating support 1 is connected to the drive end of the telescopic cylinder 11, and a rotating cavity 15 is rotatably provided at the bottom. The telescopic cylinder 11 is used to drive the rotating support 1 to move up and down to meet the cleaning requirements of different heights. The cleaning structure also includes a softening component and a scraping component disposed on the outer wall of the rotating cavity 15. The softening component includes a detection structure, a liquid storage cylinder 51, and a PTFE sponge 53. The PTFE sponge 53 can efficiently adsorb and cover impurities while resisting the corrosion of the mixed liquid. The detection component includes a mounting bridge 41, which is fixed on a U-shaped frame 4. An endoscope probe 42 is installed at an angle on the 1. The liquid storage cylinder 51 is filled with a mixture of hydrofluoric acid and nitric acid. The volume ratio of hydrofluoric acid to nitric acid is 1:3. Hydrofluoric acid softens silicon-based impurities, and nitric acid dissolves metal oxides. The two work together to efficiently soften composite hard scabs. A moving cylinder 5 is installed on the U-shaped frame 4 to drive the liquid storage cylinder 51 to move. A receiving groove 52 for installing PTFE sponge 53 is provided at the end of the liquid storage cylinder 51. The detection position of the endoscope probe 42 is the same as the projection position of PTFE sponge 53 on the inner wall of the furnace cavity 2. A liquid supply structure is provided between PTFE sponge 53 and liquid storage cylinder 51. The liquid supply structure supplies liquid to the compressed PTFE sponge 53.

[0036] In some specific implementation plans, such as Figures 6-8 As shown, to facilitate the triggering of liquid supply to the PTFE sponge 53, the liquid supply assembly includes a backing plate 55 disposed inside the PTFE sponge 53 and a connecting rod inserted into the end of the liquid storage cylinder 51. The end of the liquid storage cylinder 51 has several outlet holes 54 for connecting the receiving tank 52 and the liquid storage cylinder 51. A blocking plate 57 for sealing the outlet holes 54 is movably disposed inside the liquid storage cylinder 51. One end of the connecting rod is connected to the blocking plate 57, and the other end is connected to the backing plate 55. A cavity for installing a reset spring 56 is provided on the liquid storage cylinder 51. The end of the reset spring 56 near the backing plate 55 is fixed to the connecting rod. An inlet cylinder 58 is connected to the top of the liquid storage cylinder 51. The liquid inlet cylinder 58 is provided with a viewing window 59 on its side for easy observation of the internal liquid level. During use, the liquid inlet cylinder 58 is always filled with liquid. The top of the liquid inlet cylinder 58 is provided with a cap. When the abutment plate 55 is squeezed, it pushes the connecting rod and the blocking plate 57 to move synchronously, releasing the blockage of the liquid outlet hole 54 by the blocking plate 57. The mixed liquid inside the liquid storage cylinder 51 wets the PTFE sponge 53 and softens it by dot application, avoiding contact between the mixed solution and the clean area of ​​the inner wall of the furnace cavity 2. The design of the liquid inlet cylinder 58 can ensure that the liquid inside the liquid storage cylinder 51 is always full, avoiding uneven distribution of liquid on the PTFE sponge 53 during liquid supply, which would affect the softening effect.

[0037] In some specific implementation plans, such as Figures 9-12As shown, to facilitate the removal of acidic liquid while scraping away impurities, the scraping assembly includes a scraper 62, a nozzle 75, and a rotating column 6 with an internal infusion chamber 7. The rotating column 6 is fixed to the outer wall of the rotating cavity 15. The nozzle 75 is inclinedly disposed outside the rotating column 6 and communicates internally with the infusion chamber 7. The outlet of the nozzle 75 is directly opposite the blade of the scraper 62. The water sprayed from the nozzle 75 is deionized water, which carries away most of the residual hydrofluoric acid and nitric acid mixture. The deionized water also helps to prevent... When new impurities are introduced, a rotating plate 71 is rotatably mounted on the rotating column 6 to block the infusion chamber 7. The rotating plate 71 has a through-hole 72. The infusion chamber 7 and the overlapping hole 72 are initially staggered. A mounting base 61 is fixed at the end of the rotating column 6. The scraper 62 is elastically connected to the inside of the mounting base 61. A linkage component is provided between the scraper 62 and the rotating plate 71. When the scraper 62 is squeezed, the rotating plate 71 rotates to release the blockage of the infusion chamber 7, so that the overlapping hole 72 on the rotating plate 71 is aligned with the infusion chamber 7.

[0038] Specifically, the linkage assembly includes a sealing cavity 65 inside the mounting base 61, a push rod 63 fixedly connected to the scraper 62, the end of the push rod 63 penetrating into the sealing cavity 65 and connected to a push plate 66, a support spring 64 between the outer side of the push rod 63 and the mounting base 61, a water bladder inside the sealing cavity 65, a plurality of teeth 73 distributed on the circumferential sidewall of the rotating plate 71, a toothed rod 683 slidably mounted on the outer sidewall of the rotating column 6, and a fixed connection to the outer sidewall of the rotating column 6. A sleeve 68 is provided, with a transmission pipe 67 connecting one end of the sleeve 68 to the water bladder. A moving rod 681 is slidably connected to the other end of the sleeve 68. A toothed rod 683 is fixedly provided at the end of the moving rod 681 away from the sleeve 68. A retaining spring 682 is provided between the toothed rod 683 and the sleeve 68. The toothed rod 683 is engaged with several teeth 73. A limiting frame 74 is provided on the rotating column 6 to limit the rotation of the teeth 73. The limiting frame 74 is used to limit the rotation of the rotating plate 7. The rotation angle of the rotating plate 71 is designed to ensure that the overlapping hole 72 aligns with the infusion chamber 7 when the rotating plate 71 rotates. The side of the rotating cavity 15 is also provided with absorbent cotton 81, and the end of the absorbent cotton 81 is connected to a crossbar 8. During the rotation of the rotating cavity 15, the crossbar 8 absorbs the flowing ionized water to prevent the ionized water from affecting the vacuum cleaner's adsorption of floating particles. When the scraper 62 comes into contact with the scab, the scraper 62 will squeeze the support spring 64. The support spring 64 reduces the force of the collision between the scraper 62 and the blocky material, avoiding damage to the inner wall of the furnace. The pusher 66 is pushed by the pusher 63 to move and squeeze the water bag. The liquid in the water bag enters the sleeve 68 through the transmission pipe 67, pushing the moving rod 681 to move, so that the toothed rod 683 drives the rotating plate 71 to rotate. The infusion chamber 7 aligns with the overlapping hole 72, releasing the blockage of the infusion chamber 7 by the rotating plate 71. At this time, the deionized water enters the nozzle 75 through the infusion chamber 7 and is sprayed onto the place where the scraper 62 and the scab come into contact.

[0039] In some specific implementation plans, such as Figure 3 As shown, in order to facilitate the rotation of the rotating cavity 15, a motor 12 is fixed on the rotating bracket 1, and a drive gear 13 is fixedly connected to the output shaft of the motor 12. A stabilizer 17 is fixedly installed at the bottom of the rotating bracket 1, and the rotating cavity 15 is rotatably connected to the stabilizer 17. A driven gear ring 16 is provided on the outer wall of the rotating cavity 15, and the driven gear ring 16 is meshed with the drive gear 13. A water pump 14 is fixed on the rotating bracket 1, and the outlet of the water pump 14 is connected to the inner cavity of the rotating cavity 15. The water pump 14 and the rotating cavity 15 are rotatably connected by a sealed bearing.

[0040] In some specific implementation plans, such as Figure 3 As shown, in order to facilitate the pretreatment of dust inside the furnace cavity 2, an annular cavity 3 is fixedly installed on the outside of the rotating cavity 15. A vacuum cleaner connected to the annular cavity 3 is installed on the rotating cavity 15. Several adsorption holes 32 are distributed on the circumferential side wall of the annular cavity 3, and several sets of bristles 31 are distributed on the circumferential side wall of the annular cavity 3. The adsorption holes 32 and the bristles 31 are arranged alternately. The vacuum cleaner adsorbs the oxide particles and dust brushed off by the bristles 31, avoiding the dust particles from floating inside the furnace cavity 2 and causing secondary pollution to the already cleaned inner wall of the furnace cavity 2. A sponge ring 9 is installed on the outer wall of the rotating cavity 15 and fits against the inner wall of the furnace cavity 2. The sponge ring 9 is located above the softening component and the scraping component. The sponge ring 9 is used for the final wiping step to remove residual moisture and small particles in the furnace cavity 2 and ensure that the furnace is clean and smooth.

[0041] During the use of the device, the telescopic cylinder 11 is used to drive the entire cleaning structure to move up and down in the furnace to adapt to the cleaning needs of different heights in the furnace. When cleaning the inner wall of the furnace chamber 2, the motor 12 is started to drive the drive gear 13 to rotate, which causes the driven gear ring 16 meshing with the drive gear 13 to drive the rotating cavity 15 to rotate, thereby driving the multiple cleaning components on the rotating cavity 15 to rotate and clean the furnace body in all directions. After each layer is cleaned, the telescopic cylinder 11 drives the cleaning components to move to the next layer for cleaning. First, the rotating cavity 15 drives the brush bristles 31 to sweep the inner wall of the furnace chamber 2 during the rotation process, so that the oxides attached to the inner wall of the furnace chamber 2 are turned into fine particles. Then, the dust collector is used to absorb the oxide particles and dust washed out, so as to avoid the dust particles being floated in the furnace chamber 2 and causing secondary pollution to the already cleaned inner wall of the furnace chamber 2.

[0042] Secondly, the telescopic cylinder 11 drives the cleaning structure downwards until the softening component moves to the layer that the brush 31 has already cleaned. During the rotation of the rotating cavity 15, the endoscope probe 42 on the U-shaped frame 4 moves synchronously with the liquid storage cylinder 51. The endoscope probe 42 detects the inner wall of the furnace cavity 2. When scabs are detected, the controller controls the moving cylinder 5 to extend, driving the PTFE sponge 53 to move towards the furnace cavity 2 until it squeezes the inner wall of the furnace cavity 2. Once squeezed, the liquid storage cylinder 51 is driven to reset and retract. When the PTF... When the sponge 53 is squeezed, the abutment plate 55 pushes the connecting rod and the blocking plate 57 to move away from the PTFE sponge 53 in sync, thereby releasing the blockage of the outlet hole 54 by the blocking plate 57. The hydrofluoric acid and nitric acid mixture inside the storage cylinder 51 wets the PTFE sponge 53. Due to the action of the return spring 56, the blocking plate 57 is retracted in the storage cylinder 51 to restore the blockage of the outlet hole 54. During the multiple rotations, solid impurities are repeatedly applied, thereby wetting, softening and fixing the impurities by the hydrofluoric acid and nitric acid mixture, making them easier to remove later.

[0043] Then, the telescopic cylinder 11 drives the cleaning structure to move downwards, and the scraping component moves to the layer of the softening component. The rotating cavity 15 rotates, driving the scraper 62 to rotate synchronously. Under normal circumstances, the scraper 62 can scrape off soft impurities on the inner wall of the furnace. When the scraper 62 comes into contact with the scab, it will squeeze the support spring 64. The support spring 64 reduces the force of the collision between the scraper 62 and the blocky material, avoiding damage to the inner wall of the furnace. The pusher 66 is pushed by the push rod 63 to move and squeeze the water bag. The liquid in the water bag enters the sleeve 68 through the transmission pipe 67, pushing the moving rod 681 to move, so that the toothed rod 683 drives the rotating plate 71 to rotate. The infusion chamber 7 is aligned with the coincident hole 72, and the rotating plate 71 is released from the blockage of the infusion chamber 7. At this time, deionized water enters the nozzle 75 through the infusion chamber 7. The deionized water is sprayed onto the place where the scraper 62 and the scab come into contact, washing away the residual hydrofluoric acid and nitric acid mixture, ensuring that there are no residual pollutants on the inner wall of the furnace after rinsing.

[0044] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed invention.

Claims

1. A single crystal growth furnace cavity cleaning structure, comprising a rotating support (1) and a telescopic cylinder (11), the top of the rotating support (1) is connected with the driving end of the telescopic cylinder (11), and the bottom is rotationally matched with a rotating cavity (15), characterized in that, Also include: The softening assembly arranged on the outer side wall of the rotating cavity (15) includes a detection structure, a liquid storage cylinder (51) and a PTFE sponge (53), the U-shaped frame (4) is provided with a moving cylinder (5) for driving the liquid storage cylinder (51) to move, the end of the liquid storage cylinder (51) is provided with a containing groove (52) for mounting the PTFE sponge (53), and a liquid supply structure is arranged between the PTFE sponge (53) and the liquid storage cylinder (51), the liquid supply structure supplies liquid to the PTFE sponge (53) under extrusion; The scraping assembly arranged on the outer side wall of the rotating cavity (15) includes a shovel (62), a spray head (75) and a rotating column (6) with a liquid delivery cavity (7) inside, the rotating column (6) is fixed on the outer side wall of the rotating cavity (15), the spray head (75) is obliquely arranged on the outer side of the rotating column (6) and communicates with the liquid delivery cavity (7) inside, the rotating column (6) is rotatably provided with a rotating plate (71) blocking the liquid delivery cavity (7), the rotating plate (71) is provided with a coincident hole (72) through it, the end of the rotating column (6) is fixedly provided with a mounting seat (61), the shovel (62) is elastically connected to the inner side of the mounting seat (61), and the shovel (62) and the rotating plate (71) are provided with a linkage assembly, the shovel (62) is extruded to rotate the rotating plate (71) to unblock the liquid delivery cavity (7).

2. A single crystal growth furnace interior cleaning structure according to claim 1, wherein The detection assembly includes a mounting bridge (41) fixed on the U-shaped frame (4), and the mounting bridge (41) is provided with an endoscope probe (42) arranged obliquely.

3. The single crystal growth furnace interior cleaning structure of claim 1, wherein, The liquid supply assembly includes a resisting plate (55) arranged inside the PTFE sponge (53) and a connecting rod inserted into the end of the liquid storage cylinder (51), the end of the liquid storage cylinder (51) is provided with a plurality of liquid outlet holes (54) for communicating the containing groove (52) and the liquid storage cylinder (51), the liquid storage cylinder (51) is movably provided with a blocking plate (57) for blocking the liquid outlet hole (54), one end of the connecting rod is connected with the blocking plate (57), the other end is connected with the resisting plate (55), the liquid storage cylinder (51) is provided with a cavity for mounting a return spring (56), and one end of the return spring (56) close to the resisting plate (55) is fixed on the connecting rod.

4. A single crystal growth furnace interior cleaning structure according to claim 3, wherein The top of the liquid storage cylinder (51) is provided with a liquid inlet cylinder (58), the side of the liquid inlet cylinder (58) is provided with a viewing window (59), and the top of the liquid inlet cylinder (58) is provided with a cap.

5. The single crystal growth furnace interior cleaning structure of claim 1, wherein, The linkage assembly comprises a sealed cavity (65) formed in the mounting base (61), the shovel (62) is fixed with an abutting rod (63), the end of the abutting rod (63) penetrates into the sealed cavity (65), and the abutting rod (63) is connected with a push plate (66), a supporting spring (64) is arranged between the outer side of the abutting rod (63) and the mounting base (61), a water bag is arranged in the sealed cavity (65), a plurality of teeth (73) are arranged on the circumferential side wall of the rotating plate (71), a tooth rod (683) is slidably arranged on the outer side wall of the rotating column (6), a sleeve (68) is fixedly connected to the outer side wall of the rotating column (6), a transmission pipe (67) is arranged in communication between one end of the sleeve (68) and the water bag, the other end of the sleeve (68) is slidably connected with a moving rod (681), the end of the moving rod (681) away from the sleeve (68) is fixedly provided with the tooth rod (683), a resisting spring (682) is arranged between the tooth rod (683) and the sleeve (68), and the tooth rod (683) is engagedly connected with the plurality of teeth (73).

6. A single crystal growth furnace interior cleaning structure according to claim 5, wherein The rotating column (6) is provided with a limiting frame (74) for limiting rotation of the teeth (73).

7. The single crystal growth furnace interior cleaning structure of claim 1, wherein, The rotating support (1) is fixedly provided with a motor (12), an output shaft of the motor (12) is fixedly connected with a driving gear (13), a stabilizing frame (17) is fixedly arranged at the bottom of the rotating support (1), the rotating cavity (15) is rotatably connected with the stabilizing frame (17), a driven gear ring (16) is arranged on the outer side wall of the rotating cavity (15), the driven gear ring (16) is engagedly connected with the driving gear (13), the rotating support (1) is fixedly provided with a water pump (14), a water outlet of the water pump (14) is in communication with the inner cavity of the rotating cavity (15), and the water pump (14) and the rotating cavity (15) are rotatably connected through the sealing bearing.

8. The single crystal growth furnace interior cleaning structure of claim 1, wherein, The rotating cavity (15) is fixedly provided with a ring cavity (3) on the outer side, the rotating cavity (15) is provided with a dust collector in communication with the ring cavity (3), a plurality of adsorption holes (32) are arranged on the circumferential side wall of the ring cavity (3), and a plurality of groups of brush hairs (31) are arranged on the circumferential side wall of the ring cavity (3).

9. The single crystal growth furnace interior cleaning structure of claim 1, wherein, The outer side wall of the rotating cavity (15) is provided with a sponge ring (9), and the sponge ring (9) is located above the softening assembly and the scraping assembly.

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