Energy-saving and consumption-reducing high-speed turbine vacuum pump
By using a permanent magnet synchronous motor drive and a correction wheel assembly in a turbine vacuum pump, combined with a heat dissipation unit and a diaphragm pressure switch for monitoring, the problem of easy misalignment of magnetic levitation bearings is solved, achieving efficient and safe operation of the vacuum pump.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-02-02
- Publication Date
- 2026-03-31
- Estimated Expiration
- Not applicable · inactive patent
AI Technical Summary
The magnetic levitation bearings of traditional turbine vacuum pumps are prone to spindle misalignment due to airflow impact and control system delays, posing a risk of impeller rubbing against the pump body and resulting in high energy consumption.
It adopts a permanent magnet synchronous motor drive, magnetic levitation bearings, and a correction wheel assembly and heat dissipation unit. The correction wheel assembly provides all-round limit and real-time correction of the spindle, while the heat dissipation unit reduces the impact of friction and heat. A diaphragm pressure switch is used to monitor the deviation and provide timely alarm.
It effectively prevents spindle misalignment and rubbing, reduces energy consumption, improves equipment stability and operating efficiency, simplifies the structure, and reduces maintenance requirements.
Smart Images

Figure CN121760950A_ABST
Abstract
Description
Technical Field
[0001] This invention belongs to the field of vacuum pump technology, and in particular relates to an energy-saving and consumption-reducing high-speed turbine vacuum pump. Background Technology
[0002] Turbine vacuum pumps, with their high efficiency, energy saving, and oil-free cleanliness, are widely used in paper dewatering, power plant steam condensation, chemical distillation, food and pharmaceutical industries. They achieve medium to high vacuum by using a high-speed rotating impeller to perform work on the gas, meeting the stable vacuum environment requirements of various industries and serving as the core equipment of industrial vacuum systems.
[0003] Traditional turbo vacuum pumps are supported by mechanical bearings. Mechanical bearings not only produce a large amount of wear, making equipment maintenance difficult, but also consume the output energy of the main shaft, increasing energy consumption and reducing output power. Therefore, magnetic levitation bearings are now often used to achieve non-contact support, reduce wear, and reduce energy consumption and maintenance costs, such as an energy-saving magnetic levitation turbo vacuum pump disclosed in patent publication number CN119737325A.
[0004] However, although magnetic bearings can reduce wear and ensure spindle stability through their electromagnetic force dynamic adjustment system, in actual operation, the instantaneous uneven impact of airflow, electromagnetic interference from sensors, or response delays in the control system may cause occasional deviations in the spindle. Once the deviation exceeds the safety threshold, it can easily lead to the risk of impeller rubbing against the pump body. Summary of the Invention
[0005] The purpose of this invention is to address the above-mentioned problems by providing an energy-saving and consumption-reducing high-speed turbine vacuum pump.
[0006] To achieve the above objectives, the present invention adopts the following technical solution: an energy-saving and consumption-reducing high-speed turbine vacuum pump, comprising a pump casing, a permanent magnet synchronous motor, and a support base, wherein the permanent magnet synchronous motor is fixed on the top of the support base, and a main shaft is rotatably connected inside the pump casing via a magnetic levitation bearing, and a three-dimensional impeller is mounted on the main shaft, further comprising:
[0007] A connecting sleeve is fixed between the permanent magnet synchronous motor and the pump housing. The connecting sleeve has several straightening wheel assemblies evenly distributed in a ring around the main shaft axis. The main shaft is fixedly sleeved with a movable ring located inside the straightening wheel assembly. The connecting sleeve is equipped with an axial limiting mechanism, and the axial limiting mechanism has a radial limiting mechanism inside. The straightening wheel assembly is installed inside the radial limiting mechanism.
[0008] A universal coupling is installed inside the connecting sleeve, and the output end of the permanent magnet synchronous motor is connected to the main shaft drive through the universal coupling.
[0009] A heat dissipation unit is installed at the bottom of the connecting sleeve, and the heat dissipation unit is used to dissipate heat and cool down the universal coupling.
[0010] Preferably, the correction wheel assembly includes a wheel frame, with two side wheel plates rotatably connected inside the wheel frame, and a roller fixed between the two side wheel plates. The movable ring is located between the two side wheel plates, and the roller is located outside the outer edge of the movable ring. Gaps are left between the side wall of the movable ring and the wheel surface of the roller and the side wall of the side wheel plate.
[0011] Preferably, the axial limiting mechanism includes two limiting sleeves fixed inside the connecting sleeve, a movable sleeve between the two limiting sleeves, a rubber ring fixed between each of the two limiting sleeves and the movable sleeve, and several transverse sliding rods fixed on each of the two side walls of the movable sleeve, and the transverse sliding rods are slidably connected to the side wall of the limiting sleeve on the same side.
[0012] Preferably, the radial limiting mechanism includes a rubber pad fixed to the end of the wheel frame, the rubber pad being fixed to the inner side wall of the movable sleeve, a support block being fixed to the side wall of the movable sleeve, and a radial slide rod being fixed to the surface of the support block, a limiting block being fixed to the side wall of the wheel frame, and the limiting block being slidably connected to the radial slide rod.
[0013] Preferably, the heat dissipation unit includes a liquid storage box fixed to the bottom of the connecting sleeve. A micro liquid pump is fixed to the bottom of the liquid storage box. The suction end of the micro liquid pump is connected to the inside of the liquid storage box. A delivery pipe is fixed to the output end of the micro liquid pump. The outlet end of the delivery pipe extends into the inside of the connecting sleeve. A spiral heat exchange tube is sleeved on the outside of the universal coupling. The inlet end of the spiral heat exchange tube is connected to the outlet end of the delivery pipe, and the outlet end of the spiral heat exchange tube extends into the inside of the liquid storage box.
[0014] Preferably, an annular diaphragm pressure switch is fixed between the rubber ring and the side wall of the limiting sleeve on the same side, and a strip-shaped diaphragm pressure switch is inserted into the inside of the rubber pad.
[0015] Preferably, a diversion tube is fixed to the wall of the infusion tube, a detection box is fixed to the outlet end of the diversion tube, a miniature flow meter is fixed to the side wall of the detection box, and the detection end of the miniature flow meter is located inside the detection box. A return tube connected to the outlet end of the infusion tube is fixedly inserted into the detection box. A normally closed solenoid valve is installed inside the diversion tube, and a normally open solenoid valve is installed inside the infusion tube on the side away from the miniature liquid pump at the inlet end of the diversion tube. The annular diaphragm pressure switch and the strip diaphragm pressure switch are both electrically connected to the normally closed solenoid valve and the normally open solenoid valve.
[0016] Preferably, a temperature switch is fixed to the side wall of the liquid storage box, and the detection end of the temperature switch is located inside the liquid storage box. A thermoelectric cooler is fixed to the side wall of the liquid storage box, and the temperature switch is electrically connected to the thermoelectric cooler. The cold end of the thermoelectric cooler is located inside the liquid storage box.
[0017] Compared with existing technologies, the advantages of an energy-saving and consumption-reducing high-speed turbine vacuum pump are:
[0018] 1. Through the coordinated operation of the pump casing, permanent magnet synchronous motor, support base, main shaft, magnetic levitation bearing, and three-dimensional flow impeller, and the direct drive of the permanent magnet synchronous motor, the gear transmission structure can be eliminated. This not only eliminates the mechanical losses of gear transmission but also simplifies the overall structure and reduces the size of the equipment. Secondly, the magnetic levitation bearing further reduces the frictional resistance of the main shaft rotation, improving the operating efficiency and stability of the turbine vacuum pump. This not only saves energy and reduces consumption but also increases the impeller speed at the same power. Through the coordinated operation of the connecting sleeve, correction wheel assembly, movable ring, axial limit mechanism, and radial limit mechanism, the main shaft can be dynamically limited and corrected in real time in all directions. This prevents excessive radial offset and axial movement of the main shaft, avoids the risk of impeller and pump body collision and wear, and ensures the safety of equipment use.
[0019] 2. By using the universal coupling, the impact of the transmission vibration of the permanent magnet synchronous motor on the stability of the spindle can be reduced. In addition, the heat dissipation unit can be used to cool down the connection point between the spindle and the permanent magnet synchronous motor, so as to prevent the high temperature of the permanent magnet synchronous motor from being conducted to the spindle and the magnetic bearing, and to minimize the impact of high temperature on the operational stability of the magnetic bearing.
[0020] 3. By combining the ring-shaped diaphragm pressure switch and the strip-shaped diaphragm pressure switch, the radial offset and axial movement of the spindle can be monitored in real time. With the cooperation of the diverter, detection box, micro flow meter and return pipe, the trigger signals of the ring-shaped diaphragm pressure switch and the strip-shaped diaphragm pressure switch can be comprehensively measured by the heat dissipation unit. When the frequency of radial offset and axial movement of the spindle is high, it will actively remind personnel to repair the equipment in time. Attached Figure Description
[0021] Figure 1 This is a three-dimensional structural schematic diagram of a high-speed turbine vacuum pump that provides energy saving and consumption reduction according to the present invention;
[0022] Figure 2 This is a schematic diagram of the internal structure of the connecting sleeve of a high-speed turbine vacuum pump that provides energy saving and consumption reduction according to the present invention;
[0023] Figure 3This is a schematic diagram of the axial limiting mechanism of a high-speed turbine vacuum pump that provides energy saving and consumption reduction according to the present invention.
[0024] Figure 4 This is a schematic diagram of the connection structure between the two limiting sleeves and the movable sleeve of a high-speed turbine vacuum pump that provides energy saving and consumption reduction according to the present invention.
[0025] Figure 5 This invention provides an energy-saving and consumption-reducing high-speed turbine vacuum pump. Figure 3 Enlarged view of the structure of section A;
[0026] Figure 6 This invention provides an energy-saving and consumption-reducing high-speed turbine vacuum pump. Figure 4 Enlarged view of the structure of section B;
[0027] Figure 7 This is a schematic diagram of the heat dissipation unit of a high-speed turbine vacuum pump that provides energy saving and consumption reduction, as provided by the present invention.
[0028] Figure 8 This invention provides an energy-saving and consumption-reducing high-speed turbine vacuum pump. Figure 7 Enlarged view of the structure of section C;
[0029] Figure 9 This is a schematic diagram showing the positional relationship between the side wheel plate, roller, and movable ring of a high-speed turbine vacuum pump that provides energy saving and consumption reduction according to the present invention.
[0030] In the diagram: 1. Pump casing; 2. Permanent magnet synchronous motor; 3. Support base; 4. Magnetic levitation bearing; 5. Main shaft; 6. Three-dimensional impeller; 7. Connecting sleeve; 8. Correcting wheel assembly; 81. Wheel frame; 82. Side wheel plate; 83. Roller; 9. Movable ring; 10. Axial limiting mechanism; 101. Limiting sleeve; 102. Movable sleeve; 103. Rubber ring; 104. Transverse slide bar; 11. Radial limiting mechanism; 111. Rubber pad; 112. Support block; 113. Radial slide bar; 114. Limiting block; 12. Universal coupling; 13. Heat dissipation unit; 131. Liquid storage box; 132. Miniature liquid pump; 133. Infusion pipe; 134. Spiral heat exchange tube; 14. Ring diaphragm pressure switch; 15. Strip diaphragm pressure switch; 16. Diverter pipe; 17. Detection box; 18. Miniature flow meter; 19. Return pipe; 20. Normally closed solenoid valve; 21. Normally open solenoid valve; 22. Temperature switch; 23. Semiconductor cooler. Detailed Implementation
[0031] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments.
[0032] like Figures 1-9As shown, an energy-saving and consumption-reducing high-speed turbo vacuum pump includes a pump casing 1, a permanent magnet synchronous motor 2, and a support base 3. The permanent magnet synchronous motor 2 is fixed on the top of the support base 3. The pump casing 1 is rotatably connected to a main shaft 5 through a magnetic levitation bearing 4, and a three-dimensional flow impeller 6 is installed on the main shaft 5. The magnetic levitation bearing 4 captures the radial and axial offset signals of the main shaft 5 in real time through a displacement sensor. After receiving the signals, the controller calculates and outputs adjustment commands. The power amplifier then adjusts the current of the stator assembly electromagnetic coil to change the magnetic field strength, thereby generating an electromagnetic correction force opposite to the offset direction, forming a closed-loop dynamic control, and finally realizing the non-contact stable levitation and precise positioning of the main shaft 5.
[0033] The connecting sleeve 7 is fixed between the permanent magnet synchronous motor 2 and the pump housing 1. Inside the connecting sleeve 7, there are several straightening wheel assemblies 8 evenly distributed in a ring about the axis of the main shaft 5. The straightening wheel assembly 8 includes a wheel frame 81. Two side wheel plates 82 are rotatably connected inside the wheel frame 81, and a roller 83 is fixed between the two side wheel plates 82. The movable ring 9 is located between the two side wheel plates 82, and the roller 83 is located outside the outer edge of the movable ring 9. There are gaps between the side wall of the movable ring 9 and the wheel wall of the roller 83 and the side wall of the side wheel plate 82. The gap between the roller 83 and the side wheel plate 82 and the movable ring 9 is kept to be no more than 0.05mm.
[0034] The main shaft 5 is fixedly sleeved with a movable ring 9 located inside the correction wheel assembly 8. The connecting sleeve 7 is equipped with an axial limiting mechanism 10. The axial limiting mechanism 10 includes two limiting sleeves 101 fixed inside the connecting sleeve 7. A movable sleeve 102 is provided between the two limiting sleeves 101. A rubber ring 103 is fixed between each of the two limiting sleeves 101 and the movable sleeve 102. Several transverse sliding rods 104 are fixed on both side walls of the movable sleeve 102. The transverse sliding rods 104 are slidably connected to the side wall of the limiting sleeve 101 on the same side, which can provide axial limiting protection for the main shaft 5.
[0035] The axial limiting mechanism 10 is equipped with a radial limiting mechanism 11 inside. The correction wheel assembly 8 is installed inside the radial limiting mechanism 11. The radial limiting mechanism 11 includes a rubber pad 111 fixed to the end of the wheel frame 81. The rubber pad 111 is fixed to the inner side wall of the movable sleeve 102. A support block 112 is fixed to the side wall of the movable sleeve 102, and a radial slide rod 113 is fixed to the surface of the support block 112. A limiting block 114 is fixed to the side wall of the wheel frame 81, and the limiting block 114 is slidably connected to the radial slide rod 113, which can provide radial limiting protection for the main shaft 5.
[0036] Universal coupling 12 is disposed inside connecting sleeve 7. The output end of permanent magnet synchronous motor 2 is connected to main shaft 5 via universal coupling 12. Cooling unit 13 is installed at the bottom of connecting sleeve 7. Cooling unit 13 is used to cool universal coupling 12. Cooling unit 13 includes liquid storage box 131 fixed at the bottom of connecting sleeve 7. Miniature liquid pump 132 is fixed at the bottom of liquid storage box 131. The suction end of miniature liquid pump 132 is connected to the inside of liquid storage box 131. An infusion pipe 133 is fixed at the output end, and the outlet end of the infusion pipe 133 extends into the interior of the connecting sleeve 7. A spiral heat exchange tube 134 is sleeved on the outside of the universal coupling 12. The inlet end of the spiral heat exchange tube 134 is connected to the outlet end of the infusion pipe 133, and the outlet end of the spiral heat exchange tube 134 extends into the interior of the liquid storage box 131. The annular interval between the spiral heat exchange tube 134 and the universal coupling 12 is not less than 2mm, so as to avoid the spiral heat exchange tube 134 affecting the deflection and normal rotation of the universal coupling 12.
[0037] A ring-shaped diaphragm pressure switch 14 is fixed between the rubber ring 103 and the side wall of the limit sleeve 101 on the same side. A strip-shaped diaphragm pressure switch 15 is inserted into the inside of the rubber pad 111. When the ring-shaped diaphragm pressure switch 14 and the strip-shaped diaphragm pressure switch 15 are squeezed, they will send an electrical signal back to the industrial control cabinet of the equipment.
[0038] A diversion tube 16 is fixed to the wall of the infusion tube 133. A detection box 17 is fixed to the outlet end of the diversion tube 16. A micro flow meter 18 is fixed to the side wall of the detection box 17, and the detection end of the micro flow meter 18 is located inside the detection box 17. A return tube 19 connected to the outlet end of the infusion tube 133 is fixedly inserted into the detection box 17. A normally closed solenoid valve 20 is installed inside the diversion tube 16. A normally open solenoid valve 21 is installed inside the infusion tube 133 on the side away from the micro liquid pump 132 at the inlet end of the diversion tube 16. An annular diaphragm pressure switch 14 and a strip diaphragm pressure switch 15 are electrically connected to the normally closed solenoid valve 20 and the normally open solenoid valve 21. The micro flow meter 18 measures the flow rate of the liquid flowing through the detection box 17 and feeds the measurement information back to the industrial control cabinet of the equipment. A check valve can be installed inside the return tube 19 to prevent the liquid inside the infusion tube 133 from flowing back into the detection box 17.
[0039] A temperature switch 22 is fixed to the side wall of the liquid storage box 131, and the detection end of the temperature switch 22 is located inside the liquid storage box 131. A thermoelectric cooler 23 is fixed to the side wall of the liquid storage box 131, and the temperature switch 22 is electrically connected to the thermoelectric cooler 23. The cold end of the thermoelectric cooler 23 is located inside the liquid storage box 131. When the temperature at the universal coupling 12 is high, the temperature of the coolant entering the liquid storage box 131 is also high. At this time, the moving contact of the temperature switch 22 will be pressed and closed by the increased temperature. At this time, the thermoelectric cooler 23 starts to work. The cold end of the thermoelectric cooler 23 quickly transfers the heat inside the coolant and cools the coolant, ensuring the cooling efficiency of the coolant on the universal coupling 12. The heat from the hot end of the thermoelectric cooler 23 can be quickly dissipated into the surrounding air through devices such as fans.
[0040] The operating principle of the present invention is explained as follows: When the equipment is working, it is started through the industrial control cabinet. At this time, the permanent magnet synchronous motor 2 drives the main shaft 5 to rotate through the universal coupling 12. The main shaft 5 drives the three-dimensional flow impeller 6 to rotate. Under the high-speed rotation of the three-dimensional flow impeller 6, the suction pipe on the pump casing 1 begins to generate negative pressure suction, and the suction air is discharged through the outlet pipe on the pump casing 1. Since the main shaft 5 is supported by the magnetic levitation bearing 4, there is no mechanical contact wear between the main shaft 5 and the pump casing 1. Moreover, the use of the permanent magnet synchronous motor 2 can achieve high-speed and high-efficiency drive, which can greatly reduce transmission and friction losses, thereby improving the operating efficiency of the equipment. At the same time, the three-dimensional flow impeller 6 can also optimize the airflow path, reduce eddy current impact, and further improve the gas compression efficiency.
[0041] During equipment operation, if the magnetic levitation bearing 4 fails to correct the spindle 5 in time due to signal distortion, controller operation delay, power amplifier failure, or extreme airflow impact, the spindle 5 will shift to one side, causing the movable ring 9 to contact the roller 83 on the corresponding side. At this time, the roller 83 rotates synchronously under the rotation of the spindle 5. Through rolling contact, the wear between the movable ring 9 and the roller 83 can be reduced. At the same time, the roller 83 applies pressure to the rubber pad 111 on the same side through the side wheel plate 82 and the wheel frame 81. The rubber pad 111 can absorb the kinetic energy of the spindle 5. When the rubber pad 111 cannot be compressed, the radial restriction of the movable sleeve 102 can provide rigid resistance to the spindle 5, thereby preventing excessive radial offset of the spindle 5. Similarly, in the main When shaft 5 experiences axial movement, the main shaft 5 applies pressure to the side wheel plate 82 through the movable ring 9. At this time, the side wheel plate 82 applies pressure to the limiting sleeve 101 in the displacement direction through the wheel frame 81 and the movable sleeve 102. The rubber ring 103 absorbs part of the axial displacement energy. When the rubber ring 103 can no longer be compressed, the limiting sleeve 101 can provide axial rigid blocking for the main shaft 5, preventing excessive axial movement of the main shaft 5. By limiting the axial and radial movement of the main shaft 5, the phenomenon of excessive displacement of the three-dimensional impeller 6 driven by the main shaft 5 can be effectively avoided. (In order to prevent excessive wear caused by the movable ring 9 and the side wheel plate 82 due to axial movement of the main shaft 5 during rotation, balls can be embedded in the side wall of the movable ring 9 or the side wheel plate 82 to reduce friction.)
[0042] Secondly, when the permanent magnet synchronous motor 2 drives the main shaft 5 to rotate, its output end drives the main shaft 5 to rotate through the universal coupling 12. Since the universal coupling 12 has universal transmission capability, the offset force and running vibration of the output end of the permanent magnet synchronous motor 2 have little impact on the stability of the main shaft 5. However, due to the large amount of heat generated inside the permanent magnet synchronous motor 2 when it is driven at high speed, some of the heat will be conducted to the main shaft 5 through the universal coupling 12, which will cause the temperature of the main shaft 5 and the magnetic levitation bearing 4 to rise. This will lead to a change in the resistance of the electromagnetic coil of the magnetic levitation bearing 4, a decrease in the accuracy of the magnetic force output, and affect the support stability of the magnetic levitation bearing 4 on the main shaft 5. To avoid this phenomenon, after the equipment is started, the micro liquid pump 132 will work synchronously. The micro liquid pump 132 will draw the coolant inside the liquid storage box 131 and send the coolant into the spiral heat exchange tube 134 through the liquid delivery pipe 133, and finally return to the liquid storage box 131. When the coolant passes through the spiral heat exchange tube 134, it will absorb the heat around the universal coupling 12 through the spiral heat exchange tube 134, so that the heat conducted to the universal coupling 12 can be dissipated in time, and heat is avoided as much as possible from being conducted to the main shaft 5. When the coolant circulates inside the liquid storage box 131 and through the liquid delivery pipe 133, the heat absorbed by it is dissipated into the surrounding air.
[0043] When the rubber pad 111 and rubber ring 103 are subjected to compressive force, the strip-shaped diaphragm pressure switch 15 and the ring-shaped diaphragm pressure switch 14 inside them will be triggered by pressure to generate electrical signals. After receiving the electrical signals, the industrial control cabinet will control the normally open solenoid valve 21 and the normally closed solenoid valve 20 to be energized, and control the micro flow meter 18 to start working. The normally open solenoid valve 21 is energized and closed, while the normally closed solenoid valve 20 is energized and opened. At this time, the coolant delivered by the micro liquid pump 132 will pass through the diversion pipe 16, and then through the detection box 17 and the return pipe 19 back to the delivery pipe 133. The coolant is discharged internally. When the coolant passes through the detection box 17, the micro flow meter 18 detects the amount of coolant flowing through it. The micro flow meter 18 feeds back the generated flow signal to the industrial control cabinet. If the flow signal exceeds the threshold, the industrial control cabinet will issue a prompt message to remind personnel to perform timely equipment maintenance. If necessary, a secondary threshold can be set. After the secondary threshold is reached, the industrial control cabinet will shut down the permanent magnet synchronous motor 2 to avoid damage to the equipment due to prolonged operation in an unstable environment. At the same time, the industrial control cabinet will record the flow value fed back by the micro flow meter 18 each time. When the total value reaches a certain threshold, the system will record the flow value. After reaching the threshold, a maintenance reminder will be issued, prompting personnel to perform maintenance on the entire equipment. Once the electrical signals from both the strip-type diaphragm pressure switch 15 and the ring-type diaphragm pressure switch 14 are disconnected, the control cabinet will control the flow rate value fed back by the micro flow meter 18 to stop increasing and maintain this level for one minute. Then, the control cabinet will de-energize the normally open solenoid valve 21 and the normally closed solenoid valve 20, and stop the micro flow meter 18 from operating. If the control cabinet does not receive electrical signals from the strip-type diaphragm pressure switch 15 and the ring-type diaphragm pressure switch 14 again within one minute... If the flow rate is not high enough, the industrial control cabinet will control the measurement value of the micro flow meter 18 to return to zero, thus avoiding false alarms caused by long-term cumulative measurement. Conversely, if the industrial control cabinet receives intermittent and repetitive electrical signals from the strip diaphragm pressure switch 15 and the ring diaphragm pressure switch 14, the micro flow meter 18 will accumulate the flow rate during this period. When the flow rate exceeds the threshold, the industrial control cabinet will issue an alarm message to prevent the strip diaphragm pressure switch 15 and the ring diaphragm pressure switch 14 from generating intermittent electrical signals due to factors such as axial movement of the main shaft 5, which would affect normal measurement work.
[0044] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.
Claims
1. An energy-saving and consumption-reducing high-speed turbo vacuum pump, comprising a pump shell (1), a permanent magnet synchronous motor (2) and a support seat (3), the permanent magnet synchronous motor (2) is fixed on the top of the support seat (3), the inside of the pump shell (1) is rotatably connected with a main shaft (5) through a magnetic suspension bearing (4), and the main shaft (5) is installed with a three-dimensional flow impeller (6), characterized in that, Also include: The connecting sleeve (7) is fixed between the permanent magnet synchronous motor (2) and the pump shell (1), the inside of the connecting sleeve (7) is provided with a plurality of deviation correction wheel assemblies (8) which are annularly and uniformly distributed about the axis of the main shaft (5), the main shaft (5) is fixedly sleeved with a movable ring (9) located inside the deviation correction wheel assembly (8), the connecting sleeve (7) is provided with an axial limiting mechanism (10), and the inside of the axial limiting mechanism (10) is provided with a radial limiting mechanism (11), and the deviation correction wheel assembly (8) is installed in the inside of the radial limiting mechanism (11); Universal joint (12), arranged in the inside of the connecting sleeve (7), the output end of the permanent magnet synchronous motor (2) is drivingly connected with the main shaft (5) through the universal joint (12); The heat dissipation unit (13) is installed at the bottom of the connecting sleeve (7), and the heat dissipation unit (13) is used for heat dissipation cooling of the universal joint (12).
2. The energy-saving and consumption-reducing high-speed turbo vacuum pump according to claim 1, characterized in that, The deviation correction wheel assembly (8) comprises a wheel frame (81), two side wheel plates (82) are rotatably connected in the inside of the wheel frame (81), a roller (83) is fixed between the two side wheel plates (82), the movable ring (9) is between the two side wheel plates (82), the roller (83) is outside the outer edge of the movable ring (9), and gaps are left between the side wall of the movable ring (9) and the wheel wall of the roller (83) and the side wall of the side wheel plate (82).
3. The energy-saving and consumption-reducing high-speed turbo vacuum pump according to claim 1, characterized in that, The axial limiting mechanism (10) comprises two limiting sleeves (101) fixed in the inside of the connecting sleeve (7), an active sleeve (102) is arranged between the two limiting sleeves (101), rubber rings (103) are fixed between the two limiting sleeves (101) and the active sleeve (102), a plurality of transverse sliding rods (104) are fixed on the two side walls of the active sleeve (102), and the transverse sliding rods (104) are slidingly connected with the side walls of the limiting sleeves (101) on the same side.
4. The energy-saving and consumption-reducing high-speed turbo vacuum pump according to claim 3, characterized in that, The radial limiting mechanism (11) comprises a rubber pad (111) fixed at the end of the wheel frame (81), the rubber pad (111) is fixed to the inner side wall of the active sleeve (102), a support block (112) is fixed to the side wall of the active sleeve (102), a radial sliding rod (113) is fixed to the surface of the support block (112), a limiting block (114) is fixed to the side wall of the wheel frame (81), and the limiting block (114) is slidingly connected with the radial sliding rod (113).
5. The energy-saving and consumption-reducing high-speed turbo vacuum pump according to claim 4, characterized in that, The heat dissipation unit (13) comprises a liquid storage box (131) fixed at the bottom of the connecting sleeve (7), a micro liquid pump (132) is fixed at the bottom of the liquid storage box (131), the suction end of the micro liquid pump (132) is communicated with the inside of the liquid storage box (131), the output end of the micro liquid pump (132) is fixed with a liquid delivery pipe (133), the liquid outlet end of the liquid delivery pipe (133) extends into the inside of the connecting sleeve (7), a spiral heat exchange pipe (134) is arranged outside the universal joint (12), the liquid inlet end of the spiral heat exchange pipe (134) is communicated with the liquid outlet end of the liquid delivery pipe (133), and the liquid outlet end of the spiral heat exchange pipe (134) extends into the inside of the liquid storage box (131).
6. The energy-saving and consumption-reducing high-speed turbo vacuum pump according to claim 5, characterized in that, The annular thin film pressure switch (14) is fixed between the rubber ring (103) and the side wall of the same side limiting sleeve (101), and the inside of the rubber pad (111) is inserted with the strip-shaped thin film pressure switch (15).
7. The energy-saving and consumption-reducing high-speed turbo vacuum pump according to claim 6, characterized in that, The pipe wall of the infusion pipe (133) is fixed with a shunt pipe (16), the liquid outlet end of the shunt pipe (16) is fixed with a detection box (17), the side wall of the detection box (17) is fixed with a micro flowmeter (18), the detection end of the micro flowmeter (18) is arranged in the inside of the detection box (17), the detection box (17) is fixed and inserted with a backflow pipe (19) communicated with the liquid outlet end of the infusion pipe (133), the inside of the shunt pipe (16) is mounted with a normally closed electromagnetic valve (20), the inside of the infusion pipe (133) is mounted with a normally open electromagnetic valve (21) on the side of the liquid inlet end of the shunt pipe (16) away from the micro liquid pump (132), and the annular thin film pressure switch (14) and the strip-shaped thin film pressure switch (15) are electrically connected with the normally closed electromagnetic valve (20) and the normally open electromagnetic valve (21).
8. The energy-saving and consumption-reducing high-speed turbo vacuum pump according to claim 5, characterized in that, The side wall of the liquid storage box (131) is fixed with a temperature switch (22), and the detection end of the temperature switch (22) is arranged in the inside of the liquid storage box (131), the side wall of the liquid storage box (131) is fixed with a semiconductor refrigerator (23), and the temperature switch (22) and the semiconductor refrigerator (23) are electrically connected, and the cold end of the semiconductor refrigerator (23) is arranged in the inside of the liquid storage box (131).
Citation Information
Patent Citations
An energy-saving magnetically suspended turbine vacuum pump
CN119737325A