Automatic measuring equipment

Abstract

Provided is an automatic measurement device that automates a contact-type measurement device that is inexpensive and easy to use. The automatic measuring apparatus includes a holding portion that holds at least one of the workpiece and the measuring device such that when the movable element is in contact with the workpiece, the workpiece is measured by changing a relative position and posture between the workpiece and the measuring device at a pressure lower than a predetermined measuring pressure preset in the measuring device. The contact surface of the workpiece and the contact surface of the movable element are brought into close contact with each other. The holding portion includes a translation permitting mechanism portion that permits translational displacement in a plane parallel to a direction of the measurement axis, and a first rotation permitting mechanism portion that permits rotation about a rotation axis that is not parallel to the measurement axis.

Description

Technical Field

[0001] This invention relates to an automatic measuring device that uses a small measuring apparatus for measuring the dimensions of a workpiece to automatically measure the workpiece. Background Technology

[0002] Micrometers, calipers, Hall effect gauges, cylinder bore gauges, and Borematic (registered trademark) are known as measuring devices (tools) for measuring the dimensions of workpieces. Such contact-type measuring devices (tools) are widely used due to their ease of use, measurement stability, relatively low cost, and other advantages. However, the requirement for proper close contact between the workpiece and the moving element (spindle, measuring jaws, or contact point), and the need to consistently apply the same measuring pressure, inevitably leads to manual measurement. Therefore, measurement using such contact-type measuring tools is time-consuming and labor-intensive.

[0003] As an alternative to manual measurement, non-contact measuring devices such as pneumatic micrometers and laser scanning micrometers have been proposed for use in production sites (JPJ 8-14871). However, pneumatic micrometers and laser scanning micrometers are extremely expensive and relatively difficult to maintain.

[0004] Patent Document 1: Japanese Patent Application Publication No. 10-89903 Patent Document 2: Japanese Patent Application Publication No. 2019-100904 Patent Document 3: Japanese Patent Application Publication No. 8-14871 Summary of the Invention

[0005] Despite various proposals (such as those using electric motors) to automate contact measurements, there are no successful, practically applicable cases that have been widely adopted by the public (JP10-089903). Alternatively, contact measurements can be automated using coordinate measuring machines (CMMs) (JP2019-100904), but this requires an investment of tens to hundreds of millions of yen, making CMMs unsuitable as an alternative to measurements using micrometers or calipers.

[0006] The purpose of this invention is to provide an automated measuring device that automates inexpensive and easy-to-use contact measuring devices.

[0007] An automatic measuring device according to an exemplary embodiment of the present invention includes: A measuring device for measuring the dimensions of a workpiece, the measuring device comprising a movable element and a displacement detection unit, the movable element being capable of shifting relative to a fixed element and moving forward and backward to contact or move away from the workpiece, the displacement detection unit detecting the displacement of the movable element; An automatic operating unit that automates the forward / reverse movement of the movable element by means of power; and A holding part holds at least one of the workpiece and the measuring device such that when the movable element contacts the workpiece, the relative position and orientation between the workpiece and the measuring device are changed at a pressure lower than a predetermined measuring pressure preset in the measuring device, thereby ensuring close contact between the contact surfaces of the workpiece and the movable element. The automatic measuring equipment uses the measuring device to automatically measure the workpiece. The retaining part includes: The translational allowance mechanism allows translational displacement in a plane parallel to the direction of the measuring axis; and A first rotation-allowing mechanism allows rotation about a rotation axis that is not parallel to the measuring axis, and The direction of the measuring axis is the direction of the forward / backward movement of the movable element.

[0008] In an exemplary embodiment of the present invention, preferably, the translation-allowing mechanism includes a translation body that translates in a plane parallel to the direction of the measuring axis, and The first rotation allows the mechanism to be mounted on the translator and move together with the translator.

[0009] In an exemplary embodiment of the present invention, preferably, the first rotation-allowing mechanism includes: A first rotating body, which directly or indirectly holds the workpiece or the measuring device and rotates about the rotation axis; and Adjustment component, used to adjust the displacement of the first rotating body, and The adjusting component adjusts the displacement of the first rotating body when the movable element moves away from the workpiece, and allows the displacement of the first rotating body when the movable element and the workpiece are in contact with each other and a measuring pressure is applied from the movable element to the workpiece.

[0010] In an exemplary embodiment of the present invention, it is preferred that the adjusting member is a counterweight attached to the first rotating body.

[0011] In an exemplary embodiment of the present invention, preferably, the adjusting member includes a limiting member that contacts or separates from the first rotating body, and The adjusting component switches between a contact state and a separation state between the limiting member and the first rotating body, in order to switch between a holding state and a releasing state of the first rotating body.

[0012] In an exemplary embodiment of the present invention, preferably, the automatic operating unit moves the movable element forward to contact the workpiece, then moves the movable element backward by a predetermined amount, and finally moves the movable element forward again to generate the predetermined measuring pressure between the workpiece and the movable element. When the automatic operating unit moves the movable element forward again to generate the predetermined measured pressure between the workpiece and the movable element, the adjusting member causes the first rotating body to enter the release state to allow displacement of the first rotating body.

[0013] In an exemplary embodiment of the present invention, preferably, the position of the translation body of the translation-allowing mechanism includes: Non-measuring positions, where the workpiece will be replaced before and after measurement; and The measurement position, at which a measuring pressure is applied from the movable element to the workpiece, is used to measure the displacement of the movable element. The translation-allowing mechanism includes a recovery component for restoring the position of the translation body from the measured position to the non-measured position.

[0014] In an exemplary embodiment of the present invention, it is preferable that the extension line of the rotation axis of the first rotation-allowing mechanism intersects the measuring axis.

[0015] In an exemplary embodiment of the present invention, preferably, the holding portion further includes a second rotation-allowing mechanism portion, which allows rotation about a rotation axis that is not parallel to the measurement axis and the rotation axis of the first rotation-allowing mechanism portion. Attached Figure Description

[0016] Figure 1 This is a general configuration diagram of an automatic measuring device according to a first exemplary embodiment; Figure 2 This is a plan view of the automatic measurement unit; Figure 3 This is a three-dimensional view of the automatic measurement unit from the front side; Figure 4 This is a three-dimensional view of the automatic measurement unit from the rear side; Figure 5 It is a cross-sectional view of the first rotation allowing mechanism in the plane containing the rotation axis of the first rotation allowing mechanism; Figure 6 This is a diagram showing a modified example of the counterweight's installation position; Figure 7It is a cross-sectional view of the first rotational permissive mechanism in a plane containing the measuring axis; Figure 8 This is a diagram showing an example of an X-rotary stage and a workpiece holder; Figure 9 It is a diagram used to illustrate the measuring operation of an automatic micrometer device; Figure 10 It is a diagram used to illustrate the measuring operation of an automatic micrometer device; Figure 11 It is a diagram used to illustrate the measuring operation of an automatic micrometer device; Figure 12 It is a diagram used to illustrate the measuring operation of an automatic micrometer device; Figure 13 It is a diagram used to illustrate the measuring operation of an automatic micrometer device; Figure 14 This is a schematic diagram showing the offset of the first rotation axis relative to the measurement axis, which serves as a comparative example; Figure 15 This is a schematic diagram showing the offset of the first rotation axis relative to the measurement axis, which serves as a comparative example; Figure 16 This is a schematic diagram showing the offset of the first rotation axis relative to the measurement axis, which serves as a comparative example; Figure 17 This is a schematic diagram illustrating the case where the first rotation axis and the measurement axis are orthogonal to each other in the first exemplary embodiment; Figure 18 This is a diagram illustrating an example of a second exemplary embodiment; Figure 19 This is a flowchart illustrating the measurement operation of the automatic micrometer device in the second exemplary embodiment; Figure 20 It is a diagram used to illustrate the measuring operation of an automatic micrometer device; Figure 21 It is a diagram used to illustrate the measuring operation of an automatic micrometer device; Figure 22 It is a diagram used to illustrate the measuring operation of an automatic micrometer device; Figure 23 It is a diagram used to illustrate the measuring operation of an automatic micrometer device; Figure 24 It is a diagram used to illustrate the measuring operation of an automatic micrometer device; Figure 25 This diagram illustrates the case where the workpiece is a prism; Figure 26 This is an external view of the automatic measurement unit according to the third exemplary embodiment; Figure 27 This is an external view of the automatic measurement unit according to the third exemplary embodiment; Figure 28 This is an external view of the automatic measurement unit according to the third exemplary embodiment; Figure 29 This is an external view of the automatic measurement unit according to the third exemplary embodiment; Figure 30 It is a cross-sectional view of the partially cut-off automatic micrometer device; Figure 31 This is a cross-sectional view of an automatic micrometer device; Figure 32 This is a cross-sectional view of an automatic micrometer device; Figure 33 This diagram shows the rotary adjustment component in the released state to allow the rotary table to rotate; Figure 34 This diagram illustrates how the rotation adjustment component restores the rotation angle of the rotary table to its initial position while adjusting the rotation. Figure 35 This diagram illustrates how the restrictions imposed by the limiting plate are released to allow the rotation of the turntable. Figure 36 This is a cross-sectional view of an automatic micrometer device with the linear guide rail partially removed to show the workpiece holding part; Figure 37 This is a cross-sectional view of an automatic micrometer device; Figure 38 It is a cross-sectional view of an automatic micrometer device; and Figure 39 This is a diagram showing an example configuration of an automatic micrometer device attached to a robotic arm. Detailed Implementation

[0017] Embodiments of the invention are illustrated and described with reference to the reference numerals assigned to the elements in the accompanying drawings. Note that each embodiment can be implemented independently, or two or more embodiments can be combined, and the variations added in each embodiment are applicable to other embodiments. (First exemplary embodiment) Hereinafter, a first exemplary embodiment of the invention is described. Figure 1 This is a general configuration diagram showing the automatic measuring device 100. The automatic measuring device 100 includes a measuring device body 120 and a control unit 800.

[0018] (Main body of the measuring equipment) The main body 120 of the measuring device includes a robotic arm 130 as a moving part and an automatic measuring unit 200.

[0019] Articulated robotic arms will be used as an example to describe the moving part, but simpler moving mechanisms combining one or two axes of rotation or linear motion can be used. Since only the moving part is needed to move the workpiece W and the measuring device relative to each other, the moving part can either transport the workpiece W or move the measuring device; however, in the first exemplary embodiment, the moving part that transports the workpiece W will be described as an example. For example, a workpiece W (e.g., a part) machined by a machine tool (e.g., a CNC lathe) is conveyed by conveyor belt 111. The workpiece W is transported to hopper 112 for pretreatment. As pretreatment, degreasing and dust removal by air purging can be performed. The pretreated workpiece W is transported by a robotic arm 130, which is the moving part, to the measuring area of ​​the automatic measuring unit 200. The robotic arm 130 is, for example, an articulated robotic arm 130, and includes a manipulator 140 for gripping the workpiece W at its front end and a camera 150 for image recognition. The robotic arm 130 identifies the workpiece W using image recognition, the robotic hand 140 grasps the workpiece W, and transports it to the measurement area of ​​the automatic measurement unit 200. Here, it is assumed that the robotic hand 140 places the workpiece W in a preset orientation (posture) within the measurement area and releases it once. For simpler systems, a person can manually pick up and move the workpiece W. The workpiece W, transported to the measurement area in this manner, has its dimensions measured by the automatic measurement unit 200.

[0020] (Automatic Measurement Unit 200) The automatic measuring unit 200 brings a contact point (movable member) into contact with the workpiece W to measure the dimensions of the workpiece W. Although either the inner dimension (inner diameter) or the outer dimension (outer diameter) can be measured as the dimensions of the workpiece W, in this exemplary embodiment, the outer dimension (outer diameter) is measured as an example. Figure 2 This is a plan view of the automatic measurement unit. Figure 3 This is a three-dimensional view of the automatic measurement unit from the front side. Figure 4 This is a three-dimensional view of the automatic measurement unit from the rear side.

[0021] The automatic measuring unit 200 is an automated micrometer 300 that is a small measuring device (small measuring tool). The automatic measuring unit 200 in the first exemplary embodiment is referred to as an automatic micrometer device 200. Figure 2 This is an external view of the automatic micrometer device 200. The automatic micrometer device 200 includes a base plate 210, a micrometer (measuring device) 300, a measuring device support 400, an automatic operation unit 500, and a workpiece holding unit 600.

[0022] The base plate 210 is the base that supports the entire device, and in this exemplary embodiment, it is a plate-shaped metal plate.

[0023] The micrometer 300 is originally a small, manually operated measuring device, and a commercially available micrometer 300 can be used as the micrometer 300 in this exemplary embodiment. For example, there are micrometers that can be used with a measuring range of 0 to 25 mm and a resolution of 0.1 micrometers. The configuration of the micrometer 300 is briefly described below. The micrometer 300 includes a U-shaped frame (fixed element) 310, a spindle (movable element) 330, a sleeve portion 340, and a displacement detection portion 350.

[0024] The U-shaped frame 310 includes an anvil 320 on the inner side of one end of the U-shape. A spindle 330 is disposed at the other end of the U-shaped frame 310 and is axially movable forward and backward relative to the anvil 320. The spindle 330 has a measuring surface on one end face for contacting the workpiece W. Similarly, the anvil 320 has a measuring surface on its other end face for contacting the workpiece W. The measuring surfaces are machined to be flat and are formed of cemented carbide or ceramic.

[0025] Note that the U-shaped frame 310 may be, for example, a micrometer head excluding the anvil 320. The anvil 320, which mates with the spindle 330 to clamp the workpiece W, may be mounted on the measuring axis as a separate body from the micrometer 300. In this exemplary embodiment, it is assumed that both the measuring surface of the spindle 330 and the measuring surface of the anvil 320 are flat surfaces, but one of the measuring surfaces of the spindle 330 and the anvil 320 may be flat. For example, the other of the measuring surfaces of the spindle 330 and the anvil 320 may be a spherical surface (front ball) or a pin for point contact.

[0026] The spindle 330 is fed and moved forward and backward in the axial direction by rotating the sleeve portion 340. There are two types of methods for feeding the spindle 330: a rotary feed type where the spindle 330 rotates itself, and a linear feed type where the spindle 330 does not rotate itself. In the rotary feed type, the spindle 330 is provided with an external thread, and the U-shaped frame 310 is provided with an internal thread. The sleeve portion 340 and the spindle 330 engage to rotate together, and the spindle 330 is rotated by rotating the sleeve portion 340. Then, the spindle 330 is moved forward or backward by helical feed. In the linear feed type, a feed screw is provided inside the sleeve portion 340, and the spindle 330 is provided with a pin that engages with the feed screw. When the sleeve portion 340 is rotated in the locked state, the spindle 330 is fed through the engagement between the pin and the feed screw. The micrometer 300 used in this exemplary embodiment may be of a rotary feed type or a linear feed type.

[0027] The sleeve portion 340 is arranged at the other end of the U-shaped frame 310 and at the other end of the main shaft 330. The sleeve portion 340 is an operating part that moves the main shaft 330 forward and backward by rotational operation. The micrometer 300 to be used in this exemplary embodiment preferably includes a constant pressure mechanism between the sleeve portion 340 and the main shaft 330. When a preset load is applied to the main shaft 330, the constant pressure mechanism disengages the sleeve portion 340 from the main shaft 330, thereby allowing the sleeve portion 340 to idle against the main shaft 330. By always activating the constant pressure mechanism in the same appropriate manner during measurement, the measurement pressure during measurement can be kept constant, and the measurement accuracy (repeatability) can be kept high. The constant pressure mechanism is incorporated into commercially available micrometers 300 and is disclosed, for example, in Japanese Patent 3115555, Japanese Patent 3724995, Japanese Patent 5426459, and Japanese Patent 5270223. The constant pressure mechanism can be composed of a ratchet mechanism or a leaf spring. The ratchet mechanism allows slippage when a force higher than a predetermined load is applied between the sleeve 340 and the spindle 330. The leaf spring is located between the outer sleeve and the inner sleeve of the sleeve 340 to allow slippage when the load is higher than a predetermined load.

[0028] Furthermore, the micrometer 300 used in this exemplary embodiment preferably includes a measuring pressure detection mechanism for detecting the load applied to the spindle 330. For example, such measuring pressure detection mechanisms are disclosed in Japanese Patent 3751540, Japanese Patent 4806545, and Japanese Unexamined Patent Application Publication No. 2019-190916. The measuring pressure detection mechanism can directly or indirectly detect the load applied to the spindle 330 using a strain gauge or the like, or it can detect that the load applied to the spindle 330 has reached a predetermined value based on the activation of a constant pressure mechanism. The measuring pressure detection mechanism outputs a signal (measuring pressure signal) when it detects a predetermined measuring pressure. For example, the displacement detection unit 350 samples (latches) a measured value (displacement) in response to the measuring pressure detection mechanism detecting the predetermined measuring pressure.

[0029] The displacement detection unit 350 detects the displacement (or position) of the spindle 330. The displacement detection unit 350 is composed of a rotary encoder or a linear encoder.

[0030] Instead of an encoder, the displacement detection unit 350 can be analog (scale type). In this case, for automation, the scale can be read using a digital camera 150, and the measured value can be read through image analysis (image recognition). In this case, the displacement detection unit 350 can be composed of an analog scale, a digital camera 150, and an image recognition unit (image analysis unit).

[0031] In addition, the U-shaped frame 310 includes a display panel 311 for displaying measurement values ​​and a switch for operation on its front side. The U-shaped frame 310 also has a built-in electronic circuitry function for outputting measurement values ​​to the outside via wired or wireless communication.

[0032] Next, the measuring device support 400 will be described. The measuring device support 400 includes a frame 410 and a measuring device holding part 420.

[0033] The frame section 410 is an L-shaped frame as a whole. For illustrative purposes, as... Figure 2 As shown, mutually orthogonal XYZ coordinate axes are used. (This coordinate system is a left-handed coordinate system.) Of the two sides constituting the frame portion 410, the side parallel to the Z-axis is the first long side portion 411, and the side parallel to the Y-axis is the first short side portion 413. The top surface of the base plate portion 210 is parallel to the YZ plane. The normal direction of the top surface of the base plate portion 210 is parallel to the X-axis.

[0034] The first long side portion 411 and the first short side portion 413 are preferably telescopic to adjust their length. This allows the size of the frame portion 410 to be adjusted according to the size of the micrometer 300 or the workpiece W.

[0035] The measuring device holding part 420 is mounted on the first long side part 411, and the automatic operation part 500 is mounted on the first short side part 413. The part closer to the front end of the first long side part 411 is fixed to the base plate part 210, and thus the micrometer 300 and the automatic operation part 500 are mounted on the base plate part 210 via the frame part 410.

[0036] The measuring device holding part 420 is fixedly attached to the first long side part 411. The measuring device holding part 420 holds the main frame of the micrometer 300 to attach the micrometer 300 to the frame part 410 (first long side part 411). The orientation of the micrometer 300 is as follows: the forward / backward movement direction (axial direction) of the spindle 330 is parallel to the Z-axis, one end side of the U-shaped frame 310 (anvil 320 side) is the negative side in the Z-direction, and the other end side of the U-shaped frame 310 (sleeve side) is the positive side in the Z-direction.

[0037] The automatic operation unit 500 automates the forward / backward movement of the spindle (movable element) 330 by means of the power of the motor 520. The automatic operation unit 500 includes a motor housing 510, a motor 520, and a power transmission unit 530.

[0038] The motor housing 510 houses the motor 520 and the motor controller. The motor housing 510 is arranged on an extension of the centerline of the spindle 330 (or sleeve portion 340) of the micrometer 300. In other words, the automatic operation unit 500 is mounted such that the rotation axis of the rotor of the motor 520 is collinear with the center axis of the spindle 330 (or sleeve portion 340). If necessary, the position of the motor housing 510 can be adjusted by moving it along the rail of the first short side portion 413.

[0039] Motor 520 can be a conventional electric motor that extracts the rotation of the rotor to the output shaft. However, motor 520 is preferably capable of using control pulses to control the rotation angle (number of revolutions) of forward and reverse rotation to a certain extent. Additionally, motor 520 preferably has a torque detection function. (Various methods are known for detecting the torque of motor 520 (such as determining the torque based on an increase or decrease in applied current (applied voltage), etc.). A stepper motor can be used as motor 520. (Needless to specify, servo motors or synchronous motors are also suitable, and the structure and drive system of motor 520 are not particularly limited.)

[0040] The power transmission unit 530 includes a fastening ring 531 mounted on the sleeve portion 340, a rotating plate 532 configured to rotate synchronously with the rotating shaft of the rotor of the motor 520, and a transmission link 533 connecting the fastening ring 531 and the rotating plate 532. One end of the transmission link 533 is fixed to the fastening ring 531, and the other end is fixed to the rotating plate 532. The transmission link 533 is parallel to the central axis of the main shaft 330. When the rotating plate 532 is rotated by the motor 520, the rotation is transmitted to the fastening ring 531 through the transmission link 533, and the fastening ring 531 rotates synchronously with the rotating plate 532.

[0041] The workpiece holding unit 600 holds the workpiece W to be measured within the measuring area of ​​the micrometer (measuring device) 300. The workpiece holding unit 600 includes a translational allowing mechanism 610, a first rotation allowing mechanism 710, and a second rotation allowing mechanism 720.

[0042] First, the translation-allowing mechanism 610 allows translational displacement in a plane parallel to the direction of the measuring axis. The measuring axis is now the axis of the main spindle 330 or an extension of the main spindle 330, and its direction is parallel to the Z-axis. The translation-allowing mechanism 610 includes a rail 611, a translational body 612 sliding along the rail 611, a stop 615, and a linear actuator (recovery member) 616.

[0043] The rail 611 is a linear guide rail mounted parallel to the measuring axis of the measuring device (micrometer 300). Here, the rail 611 is mounted directly below the axis of the spindle 330 and the anvil 320, and is mounted on the top of the base plate 210 parallel to the Z direction.

[0044] The translator 612 includes a slider 613 that spans and slides along the rail 611, and a slightly wider Z-axis moving stage 614 that is fixed to the top of the slider 613 and moves integrally with the slider 613. The direction of movement of the translator 612 is represented as follows: as with the forward and backward movement of the spindle 330, movement to the positive side in the Z direction is "backward movement", and movement to the negative side in the Z direction is "forward movement".

[0045] The first rotation allows the mechanism 710 to be mounted on the Z-moving stage 614. This will be described later.

[0046] The stop 615 is fixedly mounted on the base plate portion 210 relative to the positive side of the translation body 612 in the Z direction. When the translation body 612 moves toward the positive side in the Z direction, the translation body 612 contacts the stop 615 and stops. The stopping position of the translation body 612 using the stop 615 corresponds to the position of the translation body 612 when changing the workpiece W before and after measurement. This will be described in the description of the operation of the workpiece holding portion 600.

[0047] The linear actuator 616 is mounted on the base plate portion 210 on the negative side of the translation body 612 in the Z direction. The linear actuator 616 is, for example, a pneumatic piston cylinder whose rod moves forward and backward. The linear actuator 616 serves as a restoring member for pushing the translation body 612, which has moved toward the anvil 320, back toward the stop member 615.

[0048] In this exemplary embodiment, since the linear actuator 616 pushes the translation body 612 back, the linear actuator 616 is mounted on the opposite side of the stop 615 with the translation body 612 between the linear actuator 616 and the stop 615. However, if the translation body 612 is to be pulled back, the linear actuator 616 and the stop 615 are mounted on the same side. Instead of the linear actuator 616, the restoring member can be a (weak) elastic body (spring) that applies a biasing force toward the stop 615 to the translation body 612.

[0049] refer to Figures 5 to 7 The first rotational permissive mechanism 710 is described. Figure 5 It is a cross-sectional view of the first rotation allowing mechanism in the plane containing the rotation axis of the first rotation allowing mechanism. Figure 6 This is a diagram showing a modified example of the mounting position of the counterweight, which serves as an adjusting component, in the first rotational permissive mechanism. Figure 7This is a schematic diagram showing the first rotation-allowing mechanism when viewed from a direction perpendicular to the measuring axis.

[0050] The first rotation allowing mechanism 710 is mounted on the translation body 612 and slides integrally with the translation body 612 in the Z direction. The first rotation allowing mechanism 710 includes a support column 711 that is erected on the translation body 612, a first rotating body 712 that is rotatably mounted on the support column 711, and an adjustment member 716.

[0051] The support column 711 is mounted on the opposite side of the U-shaped frame 310 above the Z-moving stage 614, with a measuring axis interposed. The support column 711 axially supports the first rotating body 712. The rotation axis of the first rotating body 712 is parallel to the Y-axis. The rotation axis of the first rotating body 712 is referred to as the first rotation axis. Figure 5 As shown in the cross-sectional view, the first rotating body 712 is an L-shaped component in the side view.

[0052] The first rotating body 712 includes a first rotating shaft portion 713 serving as a rotation axis, a vertically extending arm portion 714, and a Y-shaped swing stage 715 that bends from the lower end of the arm portion 714 and extends laterally toward the negative side in the Y direction. The arm portion 714 is perpendicular to the first rotating shaft, and the first rotating shaft portion 713, which is attached near the upper end of the arm portion 714 in a manner oriented toward the positive direction in the Y direction, is axially supported by a support column portion 711 as the first rotating shaft. The first rotating shaft portion 713 is supported by the support column portion 711 using radial bearings 713A and thrust bearings 713B. Instead of radial bearings 713A and thrust bearings 713B, angular bearings can be used to support the first rotating shaft portion 713. The first rotating shaft is preferably orthogonal to the measuring axis. The reason for this will be described later.

[0053] The Y-shaped swing stage 715 is positioned directly below the measuring axis and is cantilevered by the arm 714. The Y-shaped swing stage 715 rotates about the first rotation axis.

[0054] In this exemplary embodiment, the first rotating body 712 is supported in a cantilever manner, but it can be supported on both sides according to the weight of the workpiece W.

[0055] Adjustment component 716 adjusts the rotational displacement of the first rotating body 712. Adjustment component 716 includes a shaft 717 suspended from the Y-axis 715 and a counterweight 718 attached to the lower end of the shaft 717. Since the shaft 717 is suspended from the Y-axis 715, the counterweight 718 is positioned away from the first rotational axis, which is advantageous in terms of torque and allows for balance using a small and light counterweight 718. Furthermore, the weight can be balanced by changing the position of the counterweight 718 along the shaft 717 to be closer to or further away from the first rotational axis.

[0056] Since the position of the counterweight 718, which serves as an adjustment component, only requires adjusting the rotation of the first rotating body 712, the counterweight 718 can be indirectly applied to the Y-swing table 715 and other components by means of its weight. Figure 5 The setup shown is configured on the Y-axis swing table 715. For example, in... Figure 6 In this configuration, the counterweight 718 is disposed on the opposite side of the Y-axis 715 to the first rotating shaft 713. In this case, the load is not applied only to one side of the first rotating shaft 713, but rather applied evenly to both sides, thus reducing the load on the first rotating shaft 713. Furthermore, compared to mounting the counterweight 718 below the Y-axis 715, the space below the Y-axis 715 can be reduced, and the shape, weight, and position of the counterweight 718 can be easily adjusted, which is expected to provide greater design flexibility. The counterweight 718 can be directly mounted on the first rotating body 712 or indirectly mounted on the first rotating body 712.

[0057] Note that in this exemplary embodiment, the adjustment member 716 adjusts the posture of the workpiece W to a vertical posture by the weight of the counterweight 718. However, an elastomer or biasing member (such as a spring) can be used to apply a biasing force to the first rotating body 712 so that the first rotating body 712 (or the workpiece W) maintains a reference posture (e.g., a vertical posture) at a predetermined measuring pressure or a lower measuring pressure.

[0058] The workpiece holding part 600 includes a first rotation allowing mechanism 710 and a translation allowing mechanism 610 that allow displacement of the workpiece W. In this exemplary embodiment, it is preferable to adjust the position of the workpiece W on the measuring axis before adjusting the tilt of the workpiece W. In other words, it is intended that the tilt of the workpiece W be adjusted using the first rotation allowing mechanism 710 after the position of the workpiece W has been adjusted using the translation allowing mechanism 610. Therefore, in order to operate the translation allowing mechanism 610 before the first rotation allowing mechanism 710 when the spindle 330 contacts the workpiece W, an adjustment member 716 for slightly adjusting the movement is added to the first rotation allowing mechanism 710. In this exemplary embodiment, the first rotation axis of the first rotation allowing mechanism 710 is parallel to the Y-axis (horizontal direction), and the rotation is adjusted by slightly increasing the weight of the first rotating body 712.

[0059] The second rotation allowing mechanism 720 is a rotation mechanism provided on the first rotation allowing mechanism 710. Figure 8 This is a diagram showing an example of an X-rotor and a workpiece holder. like Figure 5 or Figure 8As shown, the second rotation-allowing mechanism 720 is an X-rotor 721 disposed on the Y-swing stage 715. The X-rotor 721 is rotatably supported on the Y-swing stage 715 by a radial bearing 722. The rotation axis of the X-rotor 721 intersects (orthogonals) the first rotation axis and is parallel to the X-axis when the first rotating body 712 is not rotating.

[0060] In this exemplary embodiment, it is assumed that the workpiece W is cylindrical, and the pin-shaped workpiece holder 620 can be inserted into the X-rotary stage 721. In this exemplary embodiment, the cylindrical workpiece W is mounted to cover the workpiece holder 620. In other words, the X-rotary stage 721 supports the workpiece W, and the X-rotary stage 721 can be considered as a workpiece mounting table.

[0061] When measuring the outer diameter of a cylindrical workpiece W, it is necessary to measure the largest portion of the outer dimension (diameter), which requires adjusting the sliding movement of the workpiece W in the direction intersecting the measuring axis to a certain extent. As workpiece holders, in addition to the workpiece holders arranged inside the workpiece W as described above to restrict its movement, several pins or walls (blocks) can be arranged around the X-rotary stage 721 to restrict the movement of the workpiece W from the outside. On the X-rotary stage 721, two pins or walls (blocks) can be arranged facing each other with the measuring axis between them. In other words, the two pins or walls (blocks) can be arranged in a manner that intersects (orthogonally) with the measuring axis in the facing direction. Alternatively, the top of the X-rotary stage 721 can be inclined (tapered) to place the workpiece W at the center.

[0062] The control unit 800 controls the rotation drive of the motor 520 to control the forward / reverse movement of the spindle 330. The control unit 800 further drives the linear actuator 616 of the translation permission mechanism 610 at appropriate timings. In addition, the control unit 800 also samples the measurement values ​​from the micrometer 300 (displacement detection unit 350) at appropriate timings.

[0063] The operation in the first exemplary embodiment is described below. Figures 9 to 13 This is a diagram illustrating the measuring operation of the automatic micrometer device 200. First, refer to... Figure 9 . Workpiece W is mounted on an X-rotary stage 721, which serves as a workpiece mounting table. This operation is performed by a robot arm 140. When mounting workpiece W on the X-rotary stage 721, the spindle 330 and anvil 320 must not interfere with the mounting. Therefore, the spindle 330 is moved backward, and the translator 612 is pushed backward by the linear actuator 616 to the point of contact with the stop 615. Here, the position of the workpiece holding part 600 when workpiece W is to be changed is called the workpiece change position. The workpiece change position of the workpiece holding part 600 is between the anvil 320 and the spindle 330, which has been moved backward, and on the side furthest from the anvil 320. The stop 615 limits the workpiece holding part 600 to the workpiece change position before and after measurement by stopping the translator 612, and the position of the stop 615 is set at such an adjusted position on the top of the base plate part 210.

[0064] exist Figures 9 to 13 In the example, the deformation of the workpiece W is exaggerated to facilitate understanding of the function of the workpiece holding part 600 in this exemplary embodiment. The centerline of the workpiece W is inclined relative to the bottom surface (end face) of the workpiece W, and the workpiece W is tilted when it is mounted on the X rotary table 721.

[0065] Once such Figure 9 The workpiece W is mounted on the X rotary table 721, and the control unit 800 performs preset (programmed) motor drive control. The control unit 800 rotates the motor 520 in the forward direction to move the spindle 330 forward toward the anvil 320 (see...). Figure 10 At this time, since the translation body 612 allows movement in the Z direction, the workpiece W is pushed forward by the spindle 330 while it is in the workpiece holding part 600. The first rotating body 712 of the first rotation allowing mechanism 710 is slightly weighted by the counterweight 718, and the rotation of the first rotating body 712 is adjusted accordingly. In other words, the rotation of the first rotating body 712 does not absorb most of the displacement of the spindle 330, and the first rotation allows the mechanism 710 to move forward together with the workpiece W on the translation body 612. Figure 10 The diagram shows a workpiece W being pushed forward by the spindle 330 and in contact with the anvil 320. However, in this state, the workpiece W is tilted between the spindle 330 and the anvil 320, and the correct measurement of the workpiece size cannot be obtained from the displacement (position) of the spindle 330.

[0066] In this exemplary embodiment, since the first rotation axis intersects (or is orthogonal) with the measuring axis as will be discussed later, the movement of the translation body 612 is completed when the workpiece W contacts the anvil 320, and the position of the translation body in the Z direction is now fixed during the measurement of the workpiece W. Figure 10As shown, the position of the translation body 612 when the workpiece W is clamped between the spindle 330 and the anvil 320 can be considered to correspond to the measurement position of the translation body 612. The workpiece changing position is the non-measurement position, in contrast to the measurement position.

[0067] Next, the workpiece W is clamped between the spindle 330 and the anvil 320, such that the measuring surfaces of the spindle 330 and the anvil 320 are in close contact (fitting) with the surface of the workpiece W. The control unit 800 moves the spindle 330 further forward until the constant pressure mechanism is activated. At this time, pressure (measuring pressure) is applied to the workpiece W from the spindle 330 and the anvil 320. Since the first rotation allowing mechanism 710 allows the workpiece W to rotate about the first rotation axis, the workpiece W rotates about the first rotation allowing mechanism 710's first rotation axis to adjust its own tilt posture. In other words, as Figure 11 As shown, the first rotating body 712 rotates around the first rotating axis. At this time, the workpiece W is firmly clamped between the spindle 330 and the anvil 320, and the contact surfaces are firmly engaged.

[0068] In order for the counterweight 718 of the adjusting component 716 to adjust the rotation of the first rotating body 712, the first rotating body 712 must be able to rotate when a force equivalent to the measuring pressure is applied to the two sides of the workpiece W. The weight of the counterweight 718 is adjusted according to the magnitude of the measuring pressure or the torque when the measuring pressure is applied to the side of the workpiece W.

[0069] When the constant pressure mechanism is activated, a predetermined measuring pressure is applied, and the micrometer 300 samples the displacement (position) of the spindle 330 at this time as a measurement value. The sampled measurement value (measurement data) is output to the outside via wired or wireless communication, and the measurement data is collected and processed by an external personal computer (PC) or data processing device via the control unit 800.

[0070] Now that the measurement is obtained, the spindle 330 is moved backward. Then, as... Figure 12 As shown, the first rotating body 712 returns to its vertical position under its own weight. Then, in order to replace workpiece W with the next workpiece, as... Figure 13 As shown, the linear actuator 616 pushes the translation body 612 to restore the position of the translation body 612 to the workpiece replacement position (non-measurement position).

[0071] The automatic measuring device 100 according to this exemplary embodiment can almost automate the operation of measuring workpiece W. The automatic micrometer device 200 according to this exemplary embodiment automates the micrometer 300, which is a small measuring device (small measuring tool). One reason why it is difficult to automate small measuring devices (small measuring tools, such as the micrometer 300, etc.) is that it is difficult to properly contact the contact point (movable element) with the workpiece W, and difficult to mate the measuring surface with the workpiece W. In this regard, in this exemplary embodiment, the workpiece W is supported by the workpiece holding part 600 and is allowed to translate and rotate, so the position and orientation of the workpiece W can be changed with a force lower than the measuring pressure.

[0072] Furthermore, in this exemplary embodiment, the first rotation axis intersects (or is orthogonal) the measurement axis. In other words, in this exemplary embodiment, the first rotation axis is not offset relative to the measurement axis. Here, Figure 14 , Figure 15 and Figure 16 This is a schematic diagram illustrating the case where the first rotation axis, used as a comparative example, is offset relative to the measurement axis. For example, as... Figure 15 As shown, when the workpiece W rotates about a rotation axis offset from the measuring axis to adjust its posture, the position of the anvil 320 side does not move, and the first rotation axis needs to be displaced along the measuring axis to correct the tilt. In other words, the rotation of the first rotating body 712 and the translation of the translating body 612 are required to adjust the tilt of the workpiece W. However, if both are adjusted simultaneously with only a weak measuring pressure, the adjustment will be unsuccessful in many cases, leading to variations in the measured value and measurement errors. Furthermore, if as... Figure 16 As shown, if the rotation axis is offset from the measuring axis, the rotational torque applied to the workpiece W from the spindle 330 and the torque applied to the workpiece W from the anvil 320 partially cancel each other out relative to the rotation axis, and the small difference in magnitude still produces a rotational force, but the workpiece W cannot be rotated properly with this rotational force.

[0073] In contrast, if as Figure 17 As shown, the first rotation axis and the measuring axis intersect (orthogonal) each other, so even when the workpiece W is rotated to adjust its tilt, the translation of the workpiece W can be minimized. Furthermore, the rotational torque applied to the workpiece W from the spindle 330 and the torque applied to the workpiece W from the anvil 320 serve as a force for rotating the workpiece W relative to the rotation axis in the same direction. Therefore, in this exemplary embodiment, the shape of the first rotating body 712 is designed to connect the first rotation axis portion 713 and the Y-shaped swing stage 715 to the arm portion 714. With this configuration, the posture of the workpiece W can be stably and reliably adjusted with small measuring pressures (such as the measuring pressure of a micrometer 300), and high-precision dimensional measurements can be automated.

[0074] While it is most preferably the line connecting the centerline of the anvil 320 and the centerline of the spindle 330 (strictly speaking, the measuring axis) intersects (or is orthogonal to) the first rotation axis (the extension of the first rotation axis), it can be interpreted that the extension of the rotation axis of the first rotation allowing mechanism 710 intersects (or is orthogonal to) the measuring axis, as long as the first rotation axis is between the end face of the anvil 320 and the end face of the spindle 330. The present invention does not preclude the possibility of the first rotation axis being offset relative to the measuring axis.

[0075] (Second exemplary embodiment) The second exemplary embodiment of the present invention is described below. Although the adjusting member 716 is a counterweight 718 in the first exemplary embodiment, in the second exemplary embodiment, the adjusting member 716 is a limiting member 719 that contacts or moves away from the first rotating body 712. Figure 18 In this configuration, instead of the counterweight 718, the adjusting member 716 uses clamping plates (restricting members) 719 to clamp the shaft 717 from both sides. The clamping plates 719 are positioned below the Y-shaped swing table 715 and open and close to clamp the shaft 717 from the negative and positive sides in the Z direction. The state in which the clamping plates 719 are closed to clamp the shaft 717 is called the holding state, and the state in which the clamping plates 719 are open to release the shaft 717 is called the releasing state. Various actuators, such as cylinders, can be used as mechanisms for opening and closing the clamping plates 719. Figure 18 In the example shown, shaft 717 is clamped from both sides to adjust the rotation of the first rotating body 712. However, if the rotation of the first rotating body 712 is adjusted only when the workpiece W is pushed by the spindle 330, then only the limiting member on the positive side in the Z direction can be provided. However, since the rotation of the first rotating body 712 also needs to be adjusted when the automatic micrometer device 200 is moved, shaft 717 is preferably clamped from both sides to stop movement.

[0076] Both a limiting member 719 and a counterweight 718 can be provided. Using the counterweight 718, even when the power is off, the weight of the counterweight 718 can adjust the rotation of the first rotating body 712 to a certain extent.

[0077] (Instructions for operation) The operation of the automatic micrometer device 200 in the second exemplary embodiment is described below. Figure 19 This is a flowchart illustrating the measurement operation of the automatic micrometer device 200. First, as... Figure 20As shown, the drive adjustment member 716 clamps the shaft 717 with the clamping plate 719 to adjust the rotation of the first rotating body 712. In the second exemplary embodiment, the first rotating body 712 is fixed by being clamped by the clamping plate 719 (ST201). When the workpiece W is set on the X rotary table 721 by the robotic arm 130, the control unit 800 performs preset (programmed) motor drive control. The control unit 800 causes the motor 520 to rotate forward so that the spindle 330 moves forward toward the anvil 320 (ST201). The rotational speed of the motor 520 at this time is, for example, 180 rpm (or about 100 rpm to 200 rpm). In terms of reducing measurement time, it is desirable to increase the rotational speed as high as possible. As the spindle 330 moves forward toward the anvil 320, the spindle 330 contacts the workpiece W. At this time, the translation body 612 allows movement in the Z direction, and the workpiece W is pushed forward by the spindle 330 in its state on the workpiece holding part 600. The workpiece W is pushed by the spindle 330 and moves together with the translation body 612, and the workpiece W contacts the anvil 320.

[0078] At the instant the workpiece W is clamped between the anvil 320 and the spindle 330, the motor torque increases, and the motor controller detects through the torque detection function that the spindle 330 has made contact with the workpiece W (in other words, the anvil 320 and the spindle 330 have made contact with the workpiece W) (ST203: "Yes").

[0079] Note that the mechanism for detecting that the anvil 320 and spindle 330 have contacted the workpiece W can be based on the displacement of the spindle (movable element) 330. By monitoring the displacement of the spindle 330 using the displacement detection unit 350, it can be determined that the anvil 320 and spindle 330 have contacted the workpiece W when the detected displacement of the spindle 330 is smaller than the drive signal output from the control unit 800 or when the movement of the spindle 330 stops.

[0080] When the spindle 330 is detected to have made contact with the workpiece W, the control unit 800 immediately causes the motor 520 to rotate in the reverse direction at a relatively high speed for a predetermined number of revolutions, causing the spindle 330 to move backward (ST204). The rotational speed during the reverse rotation is, for example, 180 rpm. The number of revolutions during the reverse rotation is, for example, 0.5. This rotational speed (180 rpm) is an example, and the rotational speed during the forward movement (ST202) may be the same as or different from the rotational speed during the reverse rotation (ST204).

[0081] Here, the spindle 330 does not "stop" or "decelerate," but is expected to move backward once with a relatively high-speed reverse rotation. The first reason is to ensure that the spindle 330 does not become stuck in the workpiece W. Sending a control signal to move the spindle 330 backward once, instead of simply stopping it, ensures that the spindle 330 does not become stuck in the workpiece W. Although the constant pressure mechanism is activated when measuring pressure is generated, it is necessary to ensure the operating distance of the spindle 330 so that the constant pressure mechanism is activated while the spindle 330 is always moving forward at the same speed. For this reason, it is expected that the spindle 330 will move backward once to ensure the same operation of always applying measuring pressure to the workpiece W.

[0082] Here, as Figure 21 As shown, the drive adjustment component 716 releases the shaft 717, thereby allowing the first rotating body 712 to rotate (ST205).

[0083] With the first rotating body 712 released, the motor 520 is rotated forward at a relatively low speed to move the spindle 330 toward the anvil 320 (second forward movement step ST206). The motor 520 is rotated forward at a relatively low speed. The number of revolutions is the same as in the previous backward movement (ST204). Here, for example, in the case of 9 rpm, the number of revolutions is 0.5. The workpiece W is slowly pushed to ensure contact between the workpiece W and the anvil 320 and between the workpiece W and the spindle 330. At this time, rotation of the first rotating body 712 is allowed, and the posture of the workpiece W is adjusted by the rotation of the first rotating body 712 (for example, see...). Figure 22 ).

[0084] Then, the motor 520 is rotated forward at a relatively low speed. Assuming the rotational speed is, for example, equivalent to that of the sleeve section 340 (spindle 330), this speed corresponds to the time from the moment the workpiece W contacts the anvil 320 and spindle 330 until the constant pressure mechanism is activated. Here, at 9 rpm, the rotational speed is 0.5. (The rotational speed and rotational speed can be appropriately varied.) Here, the constant pressure mechanism is activated slowly once to ensure that the contact surfaces between the workpiece W and the anvil 320, and between the workpiece W and the spindle 330, are firmly engaged (closely in contact) with each other.

[0085] Now, in this state, the workpiece W is securely clamped between the anvil 320 and the spindle 330. In this state, the motor 520 is driven forward and rotated at a relatively high speed (measurement pressure application step), and the constant pressure mechanism is reactivated to apply the predetermined measurement pressure. For example, at 180 rpm, the number of revolutions is 3. The number of revolutions required to activate the constant pressure mechanism depends on the specifications of the micrometer 300 (constant pressure mechanism) to be used.

[0086] After the constant pressure mechanism is activated to apply the predetermined measuring pressure during the pressure application step, the micrometer 300 samples the measured value (ST207). The sampled measured value (measurement data) is output to an external device via wired or wireless communication, and the measurement data is collected and processed by an external personal computer (PC) or data processing device via the control unit 800.

[0087] So far, a measurement has been obtained, and the control unit 800 causes the motor 520 to rotate in the opposite direction at a relatively high speed to move the spindle 330 backward (ST208). Then, as... Figure 23 As shown, the first rotating body 712 returns to its vertical position under its own weight. Then, the adjustment member 716 is driven to clamp the shaft 717 with the clamping plate 719 to adjust the rotation of the first rotating body 712. In the second exemplary embodiment, the first rotating body 712 is fixed by being clamped by the clamping plate 719 (ST209). Afterwards, in order to replace the workpiece W with the next workpiece, such as... Figure 24 As shown, the linear actuator 616 pushes the translation body 612 to restore the position of the translation body 612 to the workpiece replacement position (non-measurement position).

[0088] According to the second exemplary embodiment, the movement of the first rotating body 712 can be adjusted (fixed) by the clamping plate 719 of the adjusting member 716, and the operation of the translation allowing mechanism 610 is completely separated from the operation of the first rotation allowing mechanism 710. This increases the accuracy of position and orientation adjustment using the translation allowing mechanism 610 and the first rotation allowing mechanism 710. From this perspective, the release step (ST205) that allows the first rotating body 712 to rotate is paused until the workpiece W is first clamped between the spindle 330 and the anvil 320, and when tilt adjustment of the workpiece W using the first rotation allowing mechanism 710 is required, the clamping plate 719 is opened to release the first rotating body 712.

[0089] Note that the clamping plate 719 can be opened to release the first rotating body 712 simultaneously with the start of the measurement step (e.g., before the first forward movement step (ST202)). However, if translational movement and rotational displacement are performed simultaneously, changes in the posture adjustment of the workpiece W may occur, leading to measurement errors. Therefore, the operation process described in the second exemplary embodiment (where the clamping plate 719 is opened immediately before the application of measuring pressure to allow the first rotating body 712 to rotate) is preferred.

[0090] (First variation) In the above description, it is assumed that the workpiece W is cylindrical, and the second rotation-allowing mechanism 720 does not need to be activated. For example, if... Figure 25As shown, if the workpiece W is a prism, the rotation of the second rotation-allowing mechanism 720 (X-rotation stage 721) allows the workpiece W to rotate (rotate about the X-axis), and the two sides of the workpiece W can be firmly clamped between the spindle 330 and the anvil 320.

[0091] (Second variation) As described above, the first rotation allowing mechanism 710 is mounted on the translation allowing mechanism 610, and the first rotation allowing mechanism 710 moves on the translation body 612 of the translation allowing mechanism 610. This relationship can be reversed. The translational allowing mechanism 610 can be mounted on the first rotational allowing mechanism 710, and the translational allowing mechanism 610 can rotate together with the first rotating body 712 of the first rotational allowing mechanism 710. However, if the weight on the rotational allowing mechanism 710 increases, this results in increased resistance to posture adjustment about the workpiece's axis of rotation using measured pressure, and linear moving bodies (such as linear guides) are considered more suitable for supporting the weight. Therefore, the configuration in this exemplary embodiment is preferred.

[0092] (Third exemplary embodiment) In the exemplary embodiments described above, it has been shown that the measuring device 300 is fixedly mounted on the base plate portion 210, and the workpiece W is moved (translated or rotated) by the workpiece holding portion 600. However, this relationship can be reversed. The measuring device 300 can be mounted on a holding part that includes at least one of the translation allowing mechanism 610, the first rotation allowing mechanism 710, and the second rotation allowing mechanism 720. When using a small measuring device to measure dimensions, it is reasonable to assume that the object to be measured (workpiece) is smaller and lighter than the measuring device itself, and that the measuring device is fixedly mounted and displacement of the workpiece is allowed. However, there are some cases where the dimensions of a portion of a large and heavy workpiece (such as the inner diameter, outer diameter, or distance of a hole or protrusion) are measured, and in such cases, it is preferable to allow displacement (translation or rotation) of the measuring device 300. Alternatively, each of the workpiece W and the measuring device 300 can be held by a holding portion for displacement and movement. For example, the workpiece W can be held by a translation-allowing mechanism to allow translational movement, and the measuring device 300 can be held by a rotation-allowing mechanism to allow rotational displacement, thereby allowing relative translational and rotational movement between the workpiece W and the measuring device. In contrast, for example, the measuring device 300 can be held by a translation-allowing mechanism to allow translational movement, and the workpiece W can be held by a rotation-allowing mechanism to allow rotational displacement, thereby allowing relative translational and rotational movement between the workpiece W and the measuring device 300.

[0093] refer to Figures 26 to 35 A third exemplary embodiment is described. In this third exemplary embodiment, the workpiece holding part fixedly holds the workpiece W, and the measuring device holding part holds the measuring device to allow displacement (translation, rotation) of the measuring device. In the configuration example described in the third exemplary embodiment, the workpiece holding part is designed to allow displacement of the workpiece W in the Z direction when the lock is released. This will be added later.

[0094] Figures 26 to 29 This is an external view of the automatic measuring unit (automatic micrometer device) 3200 according to a third exemplary embodiment. Figure 27 and Figure 29 In the middle, the post of the workpiece holding part 3300 is removed to show the part hidden by the post of the workpiece holding part 3300.

[0095] The workpiece holding section 3300 includes two workpiece holding posts 3310 spaced apart in the X direction. The two workpiece holding posts 3310 are two posts erected at both ends in the Y direction of the base plate section 210 in the X direction. The two workpiece holding posts 3310 are coupled by a coupling plate 3312. The upper end of each workpiece holding post 3310 has a V-shaped groove 3311, which can hold a rod-shaped workpiece W substantially parallel to the X direction. The workpiece holding post 3310 can securely hold the workpiece W. Alternatively, if one workpiece holding post 3310 can hold the workpiece W in a cantilever manner, only one workpiece holding post 3310 may be provided.

[0096] In a third exemplary embodiment, the measuring device holding part 3400 holds the measuring device to allow displacement (translation, rotation) of the measuring device. The measuring device holding part 3400 includes a translation-allowing mechanism part 3500 and a rotation-allowing mechanism part 3600. Figure 30 This is a cross-sectional view of the automatic micrometer device 3200, which is partially cut along the YZ plane to show the translation body 3520 of the translation enabling mechanism 3500 and the rotation shaft 3610 of the rotation enabling mechanism 3600. Figure 31 and Figure 32 This is a cross-sectional view of the automatic micrometer device 3200, which is cut off along the YZ plane to show the gauge translation control linear actuator 3530 of the translation permission mechanism 3500.

[0097] The translation enabling mechanism 3500 allows the measuring device (micrometer) to translate in a plane parallel to the measuring axis. The translation enabling mechanism 3500 includes a rail 3510, a translation body 3520 that slides along the rail 3510, and a gauge translation control linear actuator 3530.

[0098] The rail 3510 is mounted on the top of the base plate 210 parallel to the Z direction. The translation body 3520 includes a slider 3521 that slides along the rail 3510, and a Z-moving stage 3522 that is fixed to the top of the slider 3521 and moves integrally with the slider 3521.

[0099] A gauge translation control linear actuator 3530 is mounted on the base plate portion 210 relative to the translation body 3520 on the negative Z-direction side. The gauge translation control linear actuator 3530 is, for example, a pneumatic piston cylinder, and the rod 3531 moves forward and backward. The gauge translation control linear actuator 3530 serves as a recovery component for pulling back the translation body 3520, which has already moved in the positive Z-direction (backward), to move in the negative Z-direction (forward). Figure 31 In this configuration, a locking piece 3523 is disposed on the side of the translation body 3520, and the rod 3531 of the gauge translation control linear actuator 3530 engages with the locking piece 3523. For example... Figure 31 As shown, when the lever 3531 of the gauge translation control linear actuator 3530 retracts in the negative Z direction, the translation body 3520 is pulled by the lever 3531 and moves (forward) in the negative Z direction. When the lever 3531 of the gauge translation control linear actuator 3530 is fixed at the recovery end in the negative Z direction, the translation body 3520 is locked in that position. On the other hand, as... Figure 32 As shown, when the rod 3531 of the gauge translation control linear actuator 3530 is extending in the positive Z direction, the translation body 3520 is allowed to move backward in the positive Z direction.

[0100] The rotation-allowing mechanism 3600 is mounted on the Z-moving stage 3522 and slides together with the Z-moving stage 3522 in the Z direction. The rotation-allowing mechanism 3600 includes a rotating shaft 3610, a rotating stage 3620, and a rotation adjustment component 3630.

[0101] The rotating shaft 3610 is mounted on the Z-stage 3522 and rotates about an axis parallel to the Y-axis. A ball bearing 3611 is inserted between the rotating shaft 3610 and the Z-stage 3522 to allow the rotating shaft 3610 to rotate with low friction and high precision. It is desired that the end face of the anvil 320 of the micrometer 300 is positioned on the extension line of the rotation axis of the rotating shaft 3610. In other words, if the measuring device (micrometer) rotates about the rotation axis, the end face of the anvil 320 serves as the center of rotation, and the posture of the measuring device (micrometer) is adjusted (rotated) using the end face of the anvil 320 (i.e., the contact point between the measuring device and the workpiece W) as a fixed point.

[0102] The rotary table 3620 is fixedly attached to the upper end of the rotating shaft 3610. The measuring device (micrometer) 300, including the automatic operation unit 500, is fixedly mounted on the rotary table 3620. That is, in the third exemplary embodiment, the measuring device (micrometer) 300, including the automatic operation unit 500, moves forward and backward in the Z direction while rotating about the Y-axis.

[0103] The rotation adjustment component 3630 switches between holding and releasing the rotary table 3620, and also restores the rotation angle of the rotary table 3620 to zero degrees (a predetermined initial angle). Figure 33 (or Figure 30 The diagram shows that the rotation adjustment component 3630 has released the turntable 3620 to allow it to rotate. Figure 34 (or Figure 28 , Figure 29 or Figure 31 The figure shows the rotation adjustment component 3630 restoring the rotation angle of the rotary table 3620 to its initial position while restricting the rotation of the rotary table 3620.

[0104] The rotary adjustment component 3630 includes a coupling pin 3631, a limiting plate 3632, and a gauge rotation control linear actuator 3634.

[0105] The engagement pin 3631 is offset from the rotation axis of the rotary table 3620. Here, the pin is positioned along the centerline in the Z direction. The limiting plate 3632 is a plate including a hole 3633 for receiving the engagement pin 3631 and is movable toward and away from the rotary table 3620. The engagement hole 3633 of the limiting plate 3632 has a wide portion for receiving the engagement pin 3631 and further allowing the engagement pin 3631 to move within the engagement hole 3633, and a narrow portion for engaging the engagement pin 3631 to limit its movement. Typically, the engagement hole 3633 can be triangular, but it can also be an irregularly shaped hole with portions of low and high curvature. Note that the limiting plate 3632 may include the engagement pin 3631, and the engagement hole 3633 may be located on the rotary table 3620 side.

[0106] The gauge rotation control linear actuator 3634 is an actuator that moves the limiting plate 3632 forward and backward. Here, the gauge rotation control linear actuator 3634 moves the limiting plate 3632 forward and backward along the Z direction. Figure 33 As shown, when the gauge rotation control linear actuator 3634 is at its recovery end in the negative Z direction, the rotation of the rotary table 3620 is permitted. On the other hand, as... Figure 34 As shown, when the gauge rotation control linear actuator 3634 is at the starting end in the positive Z direction, the engagement pin 3631 is deeply engaged in the engagement hole 3633, and the rotation angle of the rotary table 3620 is thus restored to its initial position.

[0107] In a third exemplary embodiment with this configuration, the process for measuring the dimension (outer diameter) of workpiece W is roughly as follows. First, the lever 3531 of the gauge translation control linear actuator 3530 is restored in the negative Z direction. Then, the gauge rotation control linear actuator 3634 is driven in the positive Z direction to push the limiting plate 3632 in the positive Z direction. The state of the automatic micrometer device 3200 at this time is as follows. Figure 31 or Figure 34 As shown. That is, the translator 3520 is pulled to the most negative Z side, and the angle of the rotary table 3620 is reset to its initial position (initial angle). The position of the Z-moving stage 3522 and the posture (angle) of the rotary table 3620 at this time can be referred to as the workpiece replacement position (non-measurement position).

[0108] In this state, the workpiece W is placed on the workpiece holding part 3300. Then, the rod 3531 of the gauge translation control linear actuator 3530 is extended in the positive Z direction. The automatic micrometer device 3200 is in the following state at this time. Figure 32 As shown. In this state, the translation body 3520 (Z-moving stage 3522) is allowed to move in the positive Z direction.

[0109] The spindle 330 is moved forward in the negative Z direction by the motor drive of the automatic operation unit 500. The spindle 330 moves forward in the negative Z direction, and the workpiece W is clamped between the anvil 320 and the spindle 330. Furthermore, the spindle 330 then presses down on the workpiece W to achieve a predetermined measuring pressure. Since the stationary workpiece W is pushed forward by the spindle 330 (in the negative Z direction), the Z-moving stage 3522 moves accordingly in the positive Z direction. Then, as... Figure 35 As shown, the engagement pin 3631 disengages from the narrow portion of the engagement hole 3633 in the limiting plate 3632, allowing the rotary table 3620 to rotate. The workpiece W is clamped between the end face of the anvil 320 and the end face of the spindle 330 to apply measuring pressure and ensure tight contact. At this time, the rotary table 3620 rotates as needed, so that the end face of the anvil 320 and the end face of the spindle 330 mate with the workpiece W and make tight contact. When the constant pressure mechanism is activated, a predetermined measuring pressure is applied, and the micrometer 300 samples the displacement (position) of the spindle 330 at this time as a measurement value. After sampling the measurement value, the spindle 330 is moved backward in the positive Z direction.

[0110] Then, the process is repeated so that the lever 3531 of the gauge translation control linear actuator 3530 is restored in the negative Z direction, and the gauge rotation control linear actuator 3634 is driven in the positive Z direction to push the limiting plate 3632 in the positive Z direction. That is, the position of the Z-movement stage 3522 and the posture (angle) of the rotary stage 3620 are restored to the workpiece replacement position (non-measuring position). Figure 31 or Figure 34 ).

[0111] With this configuration, the dimensions of a large and heavy workpiece W can be measured automatically and appropriately and accurately by allowing the measuring device 300 to be displaced (translated, rotated) relative to the workpiece which is difficult to move.

[0112] (Supplementary Explanation) like Figure 36 , Figure 37 and Figure 38 As shown, in the third exemplary embodiment, translational movement of the workpiece holding part 3300 is permitted. Figure 36 This is a cross-sectional view illustrating the linear guide 3320 that allows the workpiece holder 3300 to translate. The linear guide 3320 enables the workpiece holder 3310 to translate in the Z direction.

[0113] Figure 37 and Figure 38 This is a cross-sectional view of the automatic micrometer device 3200, which is cut along the YZ plane to show the workpiece translation control linear actuator 3330. (See diagram below.) Figure 37 As shown, when the workpiece translation control linear actuator 3330 extends in the positive Z direction and stops at the starting end, the workpiece holding part 3300 is locked and cannot move. On the other hand, as Figure 38 As shown, when the workpiece translation control linear actuator 3330 is pulled to the recovery end in the negative Z direction, the workpiece holding part 3300 is allowed to translate. When the workpiece holding part 3300 is allowed to move while the gauge translation is fixed, the gauge rotation control linear actuator 3634 is moved to the recovery end in the negative Z direction to allow the rotation of the rotary table 3620. Whether to move the measuring device or the workpiece W can be appropriately switched based on the weight and shape of both.

[0114] (Fourth exemplary embodiment) The automatic measuring unit (automatic micrometer device) 3200 can be attached to a moving part (e.g., robotic arm 130). The automatic measuring unit (automatic micrometer device) 3200 can be attached to the moving part (e.g., robotic arm 130) to move the automatic measuring unit 3200 toward the measurement target position and automatically measure the dimensions (shape) of the workpiece W. Figure 39 The example shown is a configuration example of the automatic micrometer device 3200 attached to the robotic arm 140 of the robotic arm section 130 in the third exemplary embodiment. According to this configuration, the dimensions of large workpieces W can be measured automatically.

[0115] The present invention is not limited to the exemplary embodiments described above, and may be appropriately modified without departing from the spirit of the invention. In addition to micrometers, other measuring devices (measuring units) such as calipers, digital micrometers (test indicators), Hall effect gauges, cylinder bore gauges, or Borematic (registered trademark) can also be used as measuring instruments. Explanation of reference numerals in the attached figures

[0116] 100 Automatic Measuring Equipment 111 Conveyor Belt 112 silo 120 measuring equipment main body 130 robotic arm 140 robotic arms 150 camera 200 Automatic Micrometer Device 210 base plate 300 micrometer (measuring device) 310 U-shaped frame (fixing element) 311 display panel 320 Anvil 330 spindle (movable element) 340 casing section 350 Displacement Detection Department 400 Measuring Device Support 410 Frame Section 411 First Long Side 413 First short side 420 Measuring Device Holding Section 500 Automatic Operation Unit 510 motor housing 520 motor 530 Power Transmission Unit 531 Fastening Ring 532 Rotary Plate 533 transmission link 600 workpiece holding section 610 Translation Allowable Mechanism Department 611 tracks 612 translational body 613 slider 614Z mobile station 615 stop 616 Linear Actuator (Recovery Component) 620 workpiece retainer 710 First Rotation Allowing Mechanism 711 Support Column 712 First Rotating Body 713A radial bearing 713B thrust bearing 714 Arm 715Y Swing Table 716 Adjustment Components 717 axis 718 counterweight 719 Clamping Plate (Restriction Component) 720 Second Rotation Allowing Mechanism 721X Rotary Table 722 radial bearing 800 control unit 3300 workpiece holding section 3310 workpiece retainer 3311 V-groove 3320 linear guide 3330 Workpiece Translation Control Linear Actuator 3400 Measuring Device Holding Section 3500 translation allows the mechanism department 3510 tracks 3520 translational body 3521 slider 3522Z mobile station 3523 Locking Piece 3530 gauge translation control linear actuator 3531 strokes 360° rotation allowable mechanism 3610 Rotating Shaft 3611 ball bearing 3620 Rotary Table 3630 Rotary Adjustment Component 3631 Connecting Pin 3632 Limiting Plate 3633 joint hole 3634 Gauge Rotary Control Linear Actuator

Claims

1. An automatic measuring apparatus comprising: a measuring device configured to measure a dimension of a workpiece, the measuring device including a movable element configured to be displaceable with respect to a fixed element and to move forward and backward to contact with or away from the workpiece, and a displacement detecting portion configured to detect displacement of the movable element; an automatic operation portion configured to automate the forward / backward movement of the movable element by power; and a holding portion configured to hold at least one of the workpiece and the measuring device so that, when the movable element is in contact with the workpiece, a contact surface of the workpiece and a contact surface of the movable element are brought into close contact with each other by changing a relative position and posture between the workpiece and the measuring device at a lower pressure than a predetermined measurement pressure set in advance in the measuring device, wherein the automatic measuring apparatus is configured to automatically measure the workpiece using the measuring device, the holding portion includes: a translation permitting mechanism portion configured to permit a translational displacement in a plane parallel to a direction of a measurement axis; and a first rotation permitting mechanism portion configured to permit a rotation about a rotation axis non-parallel to the measurement axis, and the direction of the measurement axis is a direction of the forward / backward movement of the movable element.

2. The automatic measuring apparatus according to claim 1, wherein the translation permitting mechanism portion includes a translation body configured to translate in a plane parallel to the direction of the measurement axis, and the first rotation permitting mechanism portion is mounted on the translation body and moves with the translation body.

3. The automatic measuring apparatus according to claim 2, wherein the first rotation permitting mechanism portion includes: a first rotation body configured to directly or indirectly hold the workpiece or the measuring device and to rotate about the rotation axis; and an adjustment member for adjusting displacement of the first rotation body, and wherein the adjustment member adjusts displacement of the first rotation body when the movable element is away from the workpiece, and permits displacement of the first rotation body when the movable element and the workpiece are in contact with each other and a measurement pressure is applied from the movable element to the workpiece.

4. The automatic measuring apparatus according to claim 3, wherein The adjustment member is a counterweight attached to the first rotation body.

5. The automatic measuring apparatus according to claim 3, wherein the adjustment member includes a restriction member configured to be in contact with or separated from the first rotation body, and the adjustment member switches between a contact state and a separation state between the restriction member and the first rotation body to switch between a holding state and a release state of the first rotation body.

6. The automatic measuring apparatus according to claim 5, wherein the automatic operation portion moves the movable element forward to bring the movable element into contact with the workpiece, then moves the movable element backward by a predetermined amount, and finally moves the movable element forward again to generate the predetermined measurement pressure between the workpiece and the movable element, and the adjustment member is a counterweight attached to the first rotation body. When the automatic operation section moves the movable element forward again to generate the predetermined measurement pressure between the workpiece and the movable element, the adjustment member brings the first rotary body into the released state to allow displacement of the first rotary body.

7. The automatic measuring apparatus according to claim 1, wherein, the movement position of the translation body of the translation permitting mechanism section includes: a non-measurement position at which the workpiece is to be replaced before and after measurement; and a measurement position at which, in a state in which a measurement pressure is applied from the movable element to the workpiece, displacement of the movable element is to be detected as a measurement value, and the translation permitting mechanism section includes a recovery member for recovering the position of the translation body from the measurement position to the non-measurement position.

8. The automatic measuring apparatus according to claim 1, wherein, An extension line of the rotation axis of the first rotation permitting mechanism section intersects the measurement axis.

9. The automatic measuring apparatus according to claim 1, wherein, The holding section further includes a second rotation permitting mechanism section configured to permit rotation about a rotation axis that is not parallel to the measurement axis and the rotation axis of the first rotation permitting mechanism section.

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