Transport robot

Abstract

The present invention provides a transport robot capable of placing a workpiece taken out from a cartridge on a stage without turning over the workpiece. A conveyance robot (1) is provided with: a first robot hand (30) including a chuck mechanism (37) that holds an outer peripheral end portion of a workpiece (W) by clamping the outer peripheral end portion of the workpiece (W); a first movement mechanism (31) that moves the first robot (30) to an advanced position (30A) at which the first robot (30) can hold a workpiece (W) accommodated in a workpiece accommodating section (2a) of the cartridge case (2), and to a retracted position (30B) at which the first robot (30) is farther from the workpiece accommodating section (2a) than the advanced position (30A); a second robot (40) including an adsorption part (56) that adsorbs the surface of the workpiece (W); a second movement mechanism (41) that moves the second robot (40) to a transfer position (40B) that vertically overlaps the retracted position (30B); and a lifting mechanism (48) that lifts and lowers the second robot (40) that has moved to the delivery position (40B).

Description

Technical Field

[0001] This invention relates to a transport robot. Background Technology

[0002] Patent Document 1 describes a workpiece flipping device for transferring workpieces between multiple holding devices. In the workpiece flipping device of Patent Document 1, each of the multiple holding devices includes an adsorption part. When one side of the workpiece is adsorbed, the adsorption part of another holding device adsorbs the other side of the workpiece, thereby transferring and transporting the workpiece between the multiple holding devices.

[0003] Thin, plate-shaped workpieces such as semiconductor wafers are typically placed and housed in shelves within a cassette-like housing. Patent Document 2 describes a transfer robot that can remove and transfer wafers housed in a cassette-like housing while they are held in a wafer ring position. The transfer robot includes a chuck mechanism that grips the end of the wafer ring.

[0004] [Existing Technical Documents]

[0005] [Patent Literature]

[0006] [Patent Document 1] Japanese Patent Application Publication No. 2019-111614

[0007] [Patent Document 2] Japanese Patent Application Publication No. 2013-030703 Summary of the Invention

[0008] [The problem the invention aims to solve]

[0009] When removing workpieces such as wafers from a cassette housing and transferring them to a platform in a processing device, it is sometimes necessary to place the workpieces onto the platform from above. However, when removing a workpiece from the cassette housing, as in Patent Document 2, it is not possible to place it directly onto the platform from above when the workpiece is removed from the upper and lower ends by a chuck mechanism. Similarly, it is also not possible to place it directly onto the platform from above when the front end of a robot arm is inserted under the workpiece and lifted to remove it.

[0010] As in Patent Document 1, if the workpiece is being transported by adsorption, it can be placed on the platform from above. Alternatively, even when using an edge-gripping chuck mechanism that holds the workpiece by contacting its outer peripheral end with the claw from the outer periphery, it is sometimes possible to place it on the platform from above. However, if it is a robot that adsorbs the workpiece or a robot that includes an edge-gripping chuck mechanism, it is impossible to remove the workpiece from the confined box. In addition, in the device of Patent Document 1, the workpiece flips over when it is transferred between multiple holding devices. Therefore, it is impossible to place the workpiece on the platform without flipping it after it has been removed from the box.

[0011] The objective of this invention is to provide, in view of the aforementioned situation, a transport robot that can place a workpiece on a platform without flipping it after it has been removed from the box.

[0012] [Technical means to solve the problem]

[0013] To address the aforementioned issues, one embodiment of the transport robot of the present invention includes: a first manipulator, comprising at least one of a chuck mechanism for gripping the outer peripheral end of a workpiece from above and below, and a workpiece support portion for supporting the workpiece from below; a first moving mechanism for moving the first manipulator to a forward position capable of holding the workpiece contained in a workpiece receiving portion, and a backward position further away from the workpiece receiving portion than the forward position; a second manipulator, comprising an adsorption portion for adsorbing the surface of the workpiece or an edge-gripping chuck mechanism for gripping the workpiece from the outer peripheral side; a second moving mechanism for moving the second manipulator to an intersection position that overlaps with the backward position; and a lifting mechanism for lifting the second manipulator that has moved to the intersection position. Attached Figure Description

[0014] Figure 1 It is a 3D diagram of a transport robot.

[0015] Figure 2 This is a front view of the transport robot.

[0016] Figure 3 This is an illustration of the action of a conveyor robot removing a workpiece from a box-shaped shell.

[0017] Figure 4 This is an exploded perspective view of the first and second robotic arm units.

[0018] Figure 5 It is an exploded perspective view showing the state of the workpiece held in the first and second robot units.

[0019] Figure 6 This is a diagram illustrating the action of transferring a workpiece from the first robotic arm unit to the second robotic arm unit.

[0020] Figure 7 It is a plan view showing the state when the chuck mechanism is open.

[0021] Figure 8 It is a plan view showing the state when the chuck mechanism is closed.

[0022] Figure 9 It is a three-dimensional diagram of the chuck mechanism and supporting components.

[0023] Figure 10 It is an exploded 3D view of the chuck mechanism and supporting components.

[0024] Figure 11 This is a side view of the chuck and cam mechanism.

[0025] Figure 12 This is a diagram illustrating the operation of the chuck and cam mechanism.

[0026] Explanation of icon numbers

[0027] 1: Transport Robot

[0028] 2: Box-type casing

[0029] 2a: Workpiece receiving section

[0030] 3: First robotic arm unit

[0031] 4: Second robotic arm unit

[0032] 5: Support platform

[0033] 10: Semiconductor wafers (chips)

[0034] 11: Chip Ring

[0035] 12: Opening

[0036] 13: Adhesive sheet

[0037] 14: Straight Section

[0038] 14A: First straight section

[0039] 15: Incision area

[0040] 30: First robotic arm

[0041] 30A: Forward position

[0042] 30B: Reverse position

[0043] 31: First moving mechanism

[0044] 32: First multi-joint arm

[0045] 33: First drive mechanism

[0046] 34: First Arm

[0047] 35: Second Arm

[0048] 36: The First Robotic Arm

[0049] 37: Chuck mechanism

[0050] 38: First board

[0051] 39: Padding

[0052] 40: Second robotic arm

[0053] 40B: Handover location

[0054] 40H: Ascending position

[0055] 40L: Descending position

[0056] 41: Second moving mechanism

[0057] 42: Second multi-joint arm

[0058] 43: Second drive mechanism

[0059] 44: First Arm

[0060] 45: Second Arm

[0061] 46: Third Arm

[0062] 47: Second robotic arm support section

[0063] 48: Lifting mechanism

[0064] 49: Robotic Arm Adjustment Mechanism

[0065] 50: Second robotic arm body

[0066] 51: Second Framework

[0067] 52: Base of the robotic arm

[0068] 53: First frame

[0069] 54: Second frame

[0070] 55: Third frame

[0071] 56: Adsorption section

[0072] 57: Absorbent Pad

[0073] 58: Air pipe

[0074] 61: Robotic arm frame

[0075] 62: Cover

[0076] 63: Supporting components

[0077] 64: Mobile mechanism

[0078] 65: Opening and closing mechanism

[0079] 66: Rod

[0080] 67: Cylinder

[0081] 68: Slider

[0082] 69: Support shaft

[0083] 70: Chuck section

[0084] 70A: Holding position

[0085] 70B: Open location

[0086] 71: First chuck component

[0087] 72: Second chuck component

[0088] 73: Cam Mechanism

[0089] 74: First cam groove

[0090] 74A: Area 1

[0091] 74B: Second Area

[0092] 75: Second cam groove

[0093] 75A: Zone 1

[0094] 75B: Second Zone

[0095] 76: Cam pin

[0096] 77: First claw

[0097] 78: Second claw

[0098] 79: Spring

[0099] L0, L1, L2: Rotation axes

[0100] R1: First rotation direction

[0101] R2: Second rotation direction

[0102] S1, S2, S3, S4: Steps

[0103] W, W1, W2: Workpieces

[0104] X, X1, X2, Y, Y1, Y2, Z, Z1, Z2: direction Detailed Implementation

[0105] Hereinafter, embodiments of the transport robot to which the present invention is applied will be described with reference to the accompanying drawings.

[0106] (Overall structure)

[0107] Figure 1 This is a 3D view of transport robot 1. Figure 2 This is a front view of the transport robot 1. Figure 3 This is an illustration of the action of the conveying robot 1 taking the workpiece W out of the box-shaped housing 2. Figure 4This is an exploded perspective view of the first robotic arm unit 3 and the second robotic arm unit 4. Figure 5 This is an exploded perspective view showing the state in which workpiece W is held in the first robot unit 3 and the second robot unit 4.

[0108] In this specification, the X, Y, and Z directions are mutually orthogonal. One side of the X direction is designated X1, and the other side is designated X2. Similarly, one side of the Y direction is designated Y1, and the other side is designated Y2. The same applies to the Z direction. One side of the Z direction is designated Z1, and the other side is designated Z2. The XY plane is horizontal. The Z direction is vertical. Z1 is upward. Z2 is downward.

[0109] In the following description, the Z direction in the attached diagram will be referred to as the "vertical direction," the Z1 direction as "upper," and the Z2 direction as "lower." The X direction is the first direction. The X1 direction is one side of the first direction. The X2 direction is the other side of the first direction. The Y direction is the second direction.

[0110] like Figure 3 As shown, the transport robot 1 performs the action of removing the workpiece W contained in the box-shaped housing 2. Figure 5 As shown, the workpiece W is a semiconductor wafer 10 (hereinafter referred to as "wafer 10") held in a flat wafer ring 11. The wafer 10 is attached to the center of an adhesive sheet 13, which seals the circular opening 12 provided in the center of the wafer ring 11. Figure 5 As shown, the wafer ring 11 has four straight sections 14 cut out in a straight line at its outer periphery.

[0111] One of the straight sections 14 of the wafer ring 11 is a first straight section 14A with cutouts 15 on both sides in the circumferential direction. One of the other three straight sections 14 is located on the opposite side in the radial direction from the first straight section 14A and extends parallel to the first straight section 14A. The remaining two straight sections 14 extend in a direction orthogonal to the first straight section 14A and are located on the opposite side in the radial direction.

[0112] like Figure 3 As shown, the box-type housing 2 includes a workpiece receiving section 2a for accommodating and housing the workpiece W arranged vertically at a certain interval. Inside the box-type housing 2, mounting sections (not shown), such as shelves for holding the wafer ring 11 of the workpiece W, are arranged vertically at a certain interval. The workpiece W is housed in the box-type housing 2 with the first straight portion 14A of the wafer ring 11 facing the opening of the box-type housing 2.

[0113] The transfer robot 1 is used in a semiconductor manufacturing system. The semiconductor manufacturing system includes, for example, a processing unit (not shown) for processing wafers 10, the transfer robot 1, and a control unit (not shown) for controlling the transfer robot 1. The transfer robot 1 transfers workpieces W based on instructions from the control unit. For example, the transfer robot 1 performs actions such as placing workpieces W, taken from a housing 2, onto a platform of the processing unit. Additionally, the transfer robot 1 performs actions such as transferring workpieces W from one platform to another, and removing workpieces W from a platform.

[0114] like Figure 1 , Figure 2 , Figure 3 As shown, the transport robot 1 includes a first robotic arm unit 3, a second robotic arm unit 4, and a support platform 5 that supports the first robotic arm unit 3 and the second robotic arm unit 4. Figure 2 As shown, the first robotic arm unit 3 and the second robotic arm unit 4 are arranged along the Y direction. The first robotic arm unit 3 is located on the Y1 side, and the second robotic arm unit 4 is located on the Y2 side.

[0115] like Figure 3 As shown, the first robotic arm unit 3 removes the workpiece W housed in the box-shaped housing 2. The transfer robot 1 transfers the workpiece W held in the first robotic arm unit 3 to the second robotic arm unit 4. The second robotic arm unit 4 performs the following actions: it transfers the workpiece W while adsorbing and holding it from above, and places the workpiece W onto the platform of the processing device from above.

[0116] The support platform 5 includes a rotary mechanism (not shown) that allows the first robotic arm unit 3 and the second robotic arm unit 4 to rotate as a whole around a rotation axis extending in the vertical direction. Alternatively, the support platform 5 may include a lifting mechanism that allows the first robotic arm unit 3 and the second robotic arm unit 4 to move up and down as a whole. Furthermore, the support platform 5 may be fixed to a base that supports it, or it may include a mechanism that allows the support platform 5 to move horizontally along a guide rail provided on the base.

[0117] (First robotic arm unit)

[0118] like Figure 1 , Figure 2 As shown, the first robotic arm unit 3 includes a first robotic arm 30 and a first moving mechanism 31 for moving the first robotic arm 30. The first moving mechanism 31 includes a first multi-joint arm 32 for moving the first robotic arm 30 in a horizontal plane, and a first driving mechanism 33 for driving the first multi-joint arm 32. Figure 2As shown, the first drive mechanism 33 is disposed inside the support platform 5. The first drive mechanism 33 includes, for example, a motor as a drive source and a drive force transmission mechanism that decelerates the rotation of the motor and transmits the drive force to the first multi-joint arm 32.

[0119] like Figure 2 , Figure 4 As shown, the first multi-joint arm 32 includes a first arm 34 connected to the output shaft of the first drive mechanism 33, and a second arm 35 connected to the first arm 34. In the first multi-joint arm 32, when the first arm 34 rotates about a rotation axis L1 extending in the vertical direction, the second arm 35 rotates in conjunction with the first arm 34, forming a linkage mechanism that extends and retracts in the X direction. When the first multi-joint arm 32 extends and retracts in the X direction, the first manipulator 30 moves linearly along the X direction while maintaining its position with its front end facing the X1 direction.

[0120] The first robotic arm unit 3 extends its first multi-joint arm 32 toward the box-shaped housing 2 in the X1 direction and moves the workpiece W out. For example... Figure 3 As shown, the first moving mechanism 31 moves the first robotic arm 30 to a forward position 30A, where the front end of the first robotic arm 30 is inserted into the box-shaped housing 2, and to a backward position 30B, which is above the support platform 5. The backward position 30B is a position further away from the box-shaped housing 2 than the forward position 30A.

[0121] like Figure 4 , Figure 5 As shown, the first manipulator 30 includes a first manipulator body 36 connected to the front end of a first articulated arm 32, a chuck mechanism 37 disposed at the end of the first manipulator body 36 in the X1 direction, and a pair of first plates 38 extending from both sides of the chuck mechanism 37 in the Y direction toward the X1 direction. The pair of first plates 38 are workpiece support portions that support the workpiece W from below. The first plates 38 may include, for example, ceramic plates. Circular pads 39 are respectively mounted at the front ends of the pair of first plates 38. The pads 39 may include, for example, an insulating resin such as polyetheretherketone (PEEK). Details regarding the chuck mechanism 37 will be described later.

[0122] like Figure 3As shown, with the front end of the chuck mechanism 37 open, the first manipulator unit 3 extends the first articulated arm 32, causing the first manipulator 30 to move to the forward position 30A. Here, the first plate 38 is inserted below the workpiece W housed in the box-type housing 2. Furthermore, the outer peripheral end of the workpiece W is inserted between the front ends of the chuck mechanism 37. When the front end of the chuck mechanism 37 is closed in this state, the outer peripheral end of the workpiece W is clamped and held by the chuck mechanism 37. Then, the first articulated arm 32 is bent, causing the first manipulator 30 to retract to the retracted position 30B. Thus, the workpiece W is moved outside the box-type housing 2.

[0123] like Figure 5 As shown, the wafer ring 11 is supported by the first plate 38 at both ends in the Y direction, and the first straight portion 14A of the wafer ring 11 is held by the chuck mechanism 37. The workpiece W, which is removed from the housing 2, is held by the first robot arm 30. The wafer ring 11 is supported on the first plate 38 by a pad 39 mounted on the front end of the first plate 38.

[0124] (Second robotic arm unit)

[0125] like Figure 1 , Figure 2 As shown, the second robotic arm unit 4 includes a second robotic arm 40 and a second moving mechanism 41 for moving the second robotic arm 40. The second moving mechanism 41 includes a second multi-joint arm 42 for moving the second robotic arm 40 in a horizontal plane, and a second drive mechanism 43 for driving the second multi-joint arm 42. Figure 2 As shown, the second drive mechanism 43 is disposed inside the support platform 5. The second drive mechanism 43 includes, for example, a motor as a drive source and a drive force transmission mechanism that reduces the rotation of the motor and transmits it to the second articulated arm 42.

[0126] like Figure 2 , Figure 4 As shown, the second multi-joint arm 42 includes a first arm 44 connected to the output shaft of the second drive mechanism 43, a second arm 45 connected to the first arm 44, a third arm 46 connected to the second arm 45, and a second manipulator support 47 connected to the front end of the third arm 46. In the second multi-joint arm 42, when the first arm 44 rotates about a rotation axis L2 extending in the Z direction, the second arm 45 and the third arm 46 rotate in conjunction with the first arm 44, forming a linkage mechanism that extends and retracts in the X direction. When the second multi-joint arm 42 extends and retracts in the X direction, the second manipulator 40 moves linearly in the X direction while maintaining its front end facing the X1 direction. Furthermore, when the second multi-joint arm 42 moves the second manipulator 40 toward the platform of the processing device, it can also extend its front end in the XY plane in a direction different from the X direction.

[0127] like Figure 1 , Figure 2 , Figure 3 As shown, the second robotic arm 40 is positioned above the first robotic arm 30. Figure 1 As shown, the second moving mechanism 41 can move the second manipulator 40 to an intersection position 40B that overlaps with the first manipulator 30, which has been moved to the retracted position 30B, by bending the second multi-joint arm 42.

[0128] The second robotic arm support 47 includes a lifting mechanism 48 and a robotic arm adjustment mechanism 49. The second robotic arm 40 is connected to the front end of the second articulated arm 42 via the lifting mechanism 48 and the robotic arm adjustment mechanism 49. The lifting mechanism 48 moves the second robotic arm 40 in the vertical direction. The lifting mechanism 48 is, for example, a direct-acting mechanism such as a cylinder. As described above, since the second robotic arm 40 is located above the first robotic arm 30, when the second robotic arm 40 descends, it approaches the first robotic arm 30, and when the second robotic arm 40 rises, it moves away from the first robotic arm 30.

[0129] like Figure 1 , Figure 4 As shown, the second robotic arm 40 includes a second robotic arm body 50 located in the X1 direction of the second robotic arm support 47, a second frame 51 extending from the second robotic arm body 50 in the X1 direction, and a plurality of suction units 56 disposed on the second frame 51. The plurality of suction units 56 are respectively connected to a suction device (not shown) via an air tube 58 wound around the top of the second frame 51.

[0130] like Figure 4 As shown, the adsorption section 56 includes an adsorption pad 57 protruding downwards from the second frame 51. The adsorption pad 57 may contain, for example, a resin such as fluororubber. When the workpiece W held by the first robot arm 30 is adsorbed by the second robot arm 40, the front end face of the adsorption pad 57 is brought into close contact with the surface of the wafer ring 11, and then the suction device is driven. Thus, as... Figure 5 As shown, the workpiece W is adsorbed by the adsorption pad 57. The robot adjustment mechanism 49 is a mechanism for adjusting the position or slope of the second robot 40 to take into account the deflection of the workpiece W held by the first robot 30, so as to enable the adsorption of the workpiece W by the multiple adsorption parts 56.

[0131] like Figure 4As shown, the second frame 51 includes: a robotic arm base 52, protruding from the second robotic arm body 50 in the X1 direction and extending to both sides in the Y direction; a first frame portion 53, extending from the Y1 end of the robotic arm base 52 in the X1 direction; a second frame portion 54, extending from the Y2 end of the robotic arm base 52 in the X1 direction; and a third frame portion 55, extending in the Y direction and connecting the first frame portion 53 and the second frame portion 54. The third frame portion 55 is connected at the center of the first frame portion 53 and the second frame portion 54 in the X direction. The second frame 51 may include, for example, a ceramic plate.

[0132] The second robotic arm 40 includes four suction units 56. Two of the four suction units 56 are located at both ends of the first frame portion 53 in the X direction, and the other two are located at both ends of the second frame portion 54 in the X direction. Therefore, two of the four suction units 56 are located at the front ends of the first frame portion 53 and the second frame portion 54. Additionally, the other two suction units 56 are located at the positions where the first frame portion 53 and the second frame portion 54 connect to the robotic arm base 52. Figure 1 As shown, two of the four suction units 56 are positioned to overlap with the front end of the first plate 38 from above when the first robot arm 30 moves to the retracted position 30B and the second robot arm 40 moves to the handover position 40B. As described above, a pad 39 for placing the workpiece W is disposed at the front end of the first plate 38. Therefore, two of the four suction units 56 are positioned to overlap with the pad 39 from above.

[0133] (The action of handing over workpiece W)

[0134] Figure 6 This is a diagram illustrating the action of transferring workpiece W from the first robotic arm unit 3 to the second robotic arm unit 4. The transfer robot 1 performs the following actions: after removing workpiece W from the box-shaped housing 2 via the first robotic arm unit 3, it transfers workpiece W from the first robotic arm unit 3 to the second robotic arm unit 4. Specifically, according to... Figure 6 The first robotic arm unit 3 and the second robotic arm unit 4 are operated in the order of steps S1, S2, S3 and S4.

[0135] First, in step S1, the first robotic arm 30 holding the workpiece W is moved to the retracted position 30B, and the second robotic arm 40 is moved to the handover position 40B. At this time, the lifting mechanism 48 raises the second robotic arm 40 to... Figure 6 The rising position 40H is shown. The rising position 40H is the position where the adsorption pad 57 of the second robot arm 40 is far away from the workpiece W.

[0136] Next, in step S2, the second robotic arm 40 is lowered to... Figure 6The device is positioned at a lowering position 40L, and the suction pads 57 of the four suction sections 56 are brought into close contact with the surface of the workpiece W. In this embodiment, the four suction pads 57 are brought into close contact with the surface of the wafer ring 11. Then, the suction device is driven to suction the wafer ring 11. As a result, the workpiece W is held in the first robot arm 30 and in the second robot arm 40.

[0137] Subsequently, in step S3, the front end portion of the chuck mechanism 37 of the first robot arm 30 is opened vertically, and the front end portion of the chuck mechanism 37 is moved in the X2 direction, retracting it into the first robot arm body 36. Thus, the chuck mechanism 37 is no longer vertically overlapping with the outer periphery of the workpiece W. The workpiece W is now placed on the first plate 38 and adsorbed onto the second robot arm 40, rather than being held by the chuck mechanism 37.

[0138] Finally, in step S4, the lifting mechanism 48 is driven to raise the second robotic arm 40, which holds the workpiece W, to the raised position 40H. At this time, since the front end of the chuck mechanism 37 retracts in the X2 direction, the workpiece W can be lifted without interfering with the chuck mechanism 37. Through the above operations, the transfer of the workpiece W from the first robotic arm 30 to the second robotic arm 40 is completed.

[0139] The transport robot 1 performs the following actions: after handing over the workpiece W to the second robotic arm unit 4, it places the workpiece W from above onto the platform of the processing device. For example, some or all of the actions of rotating the second robotic arm unit 4 as a whole relative to the support platform 5, extending and retracting the second articulated arm 42, and raising and lowering the second robotic arm 40 relative to the second articulated arm 42 via the lifting mechanism 48 can be combined. Alternatively, the actions of raising and lowering the second robotic arm unit 4 as a whole relative to the support platform 5 can also be combined.

[0140] (Chuck mechanism)

[0141] Figure 7 This is a plan view showing the state when the chuck mechanism 37 is open. Figure 8 This is a plan view showing the closed state of the chuck mechanism 37. Figure 9 This is a three-dimensional view of the chuck mechanism 37 and the supporting component 63. Figure 10 This is an exploded perspective view of the chuck mechanism 37 and the supporting component 63. Figure 11 This is a side view of the chuck section 70 and the cam mechanism 73. Figure 12 This is a diagram illustrating the operation of the chuck section 70 and the cam mechanism 73.

[0142] like Figure 4 , Figure 5As shown, the first manipulator body 36 of the first manipulator 30 includes a manipulator frame 61 that internally houses the chuck mechanism 37, a cover 62 fixed to the upper end of the manipulator frame 61, and a support member 63 fixed to the end of the manipulator frame 61 in the X1 direction. Figure 7 , Figure 8 This is a plan view of the first robotic arm 30 after the cover 62 has been removed from the robotic arm frame 61, viewed from above. The chuck mechanism 37 includes a chuck portion 70 that can open and close the front end in the X1 direction, a moving mechanism 64 that moves the chuck portion 70 relative to the robotic arm frame 61 in the X direction, and an opening and closing mechanism 65 that opens and closes the chuck portion 70.

[0143] like Figure 7 , Figure 8 , Figure 9 , Figure 10 As shown, the moving mechanism 64 includes a cylinder 67 containing a rod 66 protruding in the X1 direction, and a slider 68 connected to the front end of the rod 66. Figure 10 As shown, the chuck portion 70 includes a support shaft 69 extending in the Y direction, and a first chuck member 71 and a second chuck member 72 rotatably connected to the support shaft 69.

[0144] The support shaft 69 of the chuck portion 70 is fixed to the slider 68 and protrudes from both sides of the slider 68 in the Y direction. A set of first chuck members 71 and second chuck members 72 are respectively arranged at both ends of the support shaft 69 in the Y direction. Therefore, a set of first chuck members 71 and second chuck members 72 are respectively connected to both ends of the support shaft 69 in the Y direction. The first chuck members 71 and second chuck members 72 rotate about a rotation axis L0 that passes through the center of the support shaft 69 and extends in the Y direction.

[0145] The moving mechanism 64 extends the rod 66 in the X1 direction via the drive cylinder 67, thereby causing the slider 68 to move forward in the X1 direction. As a result, both sets of chuck sections 70 move forward simultaneously in the X1 direction. Figure 8 As shown, the moving mechanism 64 advances the two sets of chuck sections 70 to a holding position 70A where the front end of the chuck section 70 overlaps vertically with the outer peripheral end of the workpiece W. Conversely, when the driving cylinder 67 retracts the rod 66 in the X2 direction, the two sets of chuck sections 70 retract in the X2 direction via the slider 68. Figure 7 As shown, the moving mechanism 64 causes the two sets of chuck sections 70 to retract to an open position 70B in the X2 direction, where the front end of the chuck section 70 is located further than the outer peripheral end of the workpiece W.

[0146] The opening and closing mechanism 65 simultaneously opens and closes the two sets of chuck sections 70. For example... Figure 9As shown, the opening and closing mechanism 65 includes a cam mechanism 73 and a spring 79 mounted on the outer periphery of the rod 66 of the moving mechanism 64. The function of the spring 79 will be described later. The cam mechanism 73 causes the chuck portion 70 to open and close as it moves in the X direction. Specifically, when the chuck portion 70 moves in the X1 direction, it closes its front end, and when it moves in the X2 direction, it opens its front end. Therefore, when the chuck portion 70 moves to the gripping position 70A, its front end is in the most closed state. Furthermore, when the chuck portion 70 moves to the open position 70B, its front end is in the most open state. Figure 9 This indicates the state where the front end of the chuck section 70 is fully opened.

[0147] like Figure 10 , Figure 11 As shown, the cam mechanism 73 includes a first cam groove 74 formed on the first chuck member 71, a second cam groove 75 formed on the second chuck member 72, and a cam pin 76 that moves within the first cam groove 74 and the second cam groove 75. Figure 9 , Figure 10 As shown, the cam pin 76 is installed by passing through the support member 63 fixed to the front end of the robot arm frame 61. The support member 63 is disposed between two sets of chuck portions 70. The two ends of the cam pin 76, which protrudes from the support member 63 in the Y direction, pass through the first cam groove 74 and the second cam groove 75, respectively.

[0148] like Figure 10 , Figure 11 As shown, both the first cam groove 74 and the second cam groove 75 extend along the X direction and are inclined in the opposite direction relative to the X direction. The first cam groove 74 is inclined downward (Z2 direction) as it faces the X1 direction. On the other hand, the second cam groove 75 is inclined upward (Z1 direction) as it faces the X1 direction.

[0149] When the chuck portion 70 is advanced in the X1 direction by protruding the rod 66 via the drive cylinder 67, the cam pin 76 moves in the X2 direction inside the first cam groove 74 and the second cam groove 75. As a result, the first chuck component 71 moves towards... Figure 11As the chuck 70 rotates in the first rotation direction R1, the first pawl 77 located at the front end of the first chuck member 71 in the X1 direction descends. Conversely, the second chuck member 72 rotates in the second rotation direction R2, which is opposite to the first rotation direction R1, and the second pawl 78 located at the front end of the second chuck member 72 in the X1 direction rises in the Z1 direction. Therefore, as the chuck 70 advances in the X1 direction, the front end of the chuck 70 closes, and the first pawl 77 and the second pawl 78 approach each other. When the cylinder 67 retracts the rod 66, causing the chuck 70 to retract in the X2 direction, the opposite action occurs, the front end of the chuck 70 opens, and the first pawl 77 and the second pawl 78 separate.

[0150] (Shape of the cam groove)

[0151] like Figure 11 As shown, the first cam groove 74 includes a first region 74A disposed at one end in the X2 direction and a second region 74B disposed in the X1 direction, which is closer to the first region 74A. Similarly, the second cam groove 75 includes a first region 75A disposed at one end in the X2 direction and a second region 75B disposed in the X1 direction, which is closer to the first region 75A.

[0152] According to Figure 11 It can be seen that the tilt angles of the second regions 74B and 75B relative to the X direction are constant, and they extend in a straight line. On the other hand, compared to the second region 74B, the tilt angle of the first region 74A relative to the X direction is larger. More specifically, the first region 74A bends in the direction of increasing tilt angle relative to the X direction towards its end in the X2 direction toward the first cam groove 74. Similarly, compared to the second region 75B, the tilt angle of the first region 75A relative to the X direction is larger. More specifically, the first region 75A bends in the direction of increasing tilt angle relative to the X direction towards its end in the X2 direction toward the second cam groove 75.

[0153] The inclination angles of the first cam groove 74 and the second cam groove 75 correspond to the opening and closing speeds of the chuck portion 70, in other words, to the speeds at which the first jaw portion 77 and the second jaw portion 78 approach or separate. If the inclination angles of the first cam groove 74 and the second cam groove 75 relative to the X direction are large, then the speeds at which the first jaw portion 77 and the second jaw portion 78 approach or separate are fast. In this embodiment, as described above, both the first cam groove 74 and the second cam groove 75 are shaped such that the inclination angle relative to the X direction increases with the end facing the X2 direction. Therefore, the following operation is performed: when the chuck portion 70 closes, it initially closes slowly, but the closing speed becomes the fastest in the final stage of clamping the workpiece W.

[0154] Figure 12This is a diagram illustrating the operation of the chuck section 70 and the cam mechanism 73. Figure 12 In the diagram, W represents the workpiece held by the chuck section 70. W1 and W2 represent the workpieces above and below it. Figure 12 P0 to P8 represent the movement of the cam pin 76 within the entire range of the first cam groove 74 and the second cam groove 75. P0 represents the state when the chuck portion 70 is in the open position 70B. The range from P0 to P3 is the range in which the cam pin 76 moves within the second region 74B and the second region 75B. The range from P3 to P8 is the range in which the cam pin 76 moves within the first region 74A and the first region 75A.

[0155] As described above, since the tilt angles of the second regions 74B and 75B relative to the X direction are small, the closing speed of the first claw 77 and the second claw 78 is slower compared to the amount of movement in the X direction. Therefore, as can be seen from the state of P3, while the gap between the first claw 77 and the second claw 78 is still wide, the outer peripheral end of the workpiece W is inserted between the first claw 77 and the second claw 78. At this time, the positions of the first claw 77 and the second claw 78 are such that a predetermined gap can be ensured between them and the upper and lower workpieces W1 and W2.

[0156] On the other hand, since the first regions 74A and 75A are bent in a direction with an increasing tilt angle relative to the X direction, the first jaw 77 and the second jaw 78 will close rapidly within the interval from P3 to P8, even if the amount of movement in the X direction is small. P7 indicates the state in which the workpiece W is clamped by the first jaw 77 and the second jaw 78. P8 indicates the state in which the chuck portion 70 closes to the point where the first jaw 77 and the second jaw 78 are in contact when there is no workpiece W between the first jaw 77 and the second jaw 78.

[0157] Since the workpiece W is clamped between the first jaw 77 and the second jaw 78, the chuck portion 70 does not actually close to the P8 state. As described above, the opening and closing mechanism 65 includes a spring 79 mounted on the outer periphery of the rod 66 of the moving mechanism 64. When the workpiece W is clamped, the first jaw 77 and the second jaw 78 are forced together by the elastic force of the spring 79. Therefore, the workpiece W is held by the first jaw 77 and the second jaw 78 by the elastic force of the spring 79.

[0158] (Effects)

[0159] As described above, the transport robot 1 of this embodiment includes: a first manipulator 30, including a chuck mechanism 37 for holding the outer peripheral end of a workpiece W and a pair of first plates 38 for supporting the workpiece W from below; a first moving mechanism 31 for moving the first manipulator 30 to a forward position 30A and a backward position 30B further away from the workpiece receiving portion 2a than the forward position 30A; a second manipulator 40, including an adsorption portion 56 for adsorbing the surface of the workpiece W; a second moving mechanism 41 for moving the second manipulator 40 to an intersection position 40B that overlaps with the backward position 30B; and a lifting mechanism 48 for lifting the second manipulator 40 that has moved to the intersection position 40B.

[0160] Thus, in this embodiment, the transport robot 1 can remove the workpiece W from the box-shaped housing 2 by gripping its outer peripheral end with the first robotic arm 30, and then hold it by adsorbing it from above with the suction part 56 of the second robotic arm 40. Therefore, the workpiece W can be placed on the platform of the processing device from above without flipping it over after being removed from the box-shaped housing 2. In addition, since the workpiece W is removed by gripping its outer peripheral end, even if the stacking interval of the workpieces W when housed in the box-shaped housing 2 is narrow, interference between the first robotic arm 30 and other workpieces W can be avoided when removing the workpiece W.

[0161] In this embodiment, the chuck mechanism 37 includes a chuck portion 70 that can be opened and closed vertically, and a moving mechanism 64 that moves the chuck portion 70 in the X direction. Therefore, the chuck mechanism 37 can be retracted to a position where it does not overlap with the workpiece W vertically. Thus, after the workpiece W is adsorbed by the adsorption portion 56, when the second robot arm 40 is raised to lift the workpiece W, interference between the workpiece W and the chuck portion 70 can be avoided.

[0162] In this embodiment, the chuck mechanism 37 includes an opening and closing mechanism 65 for opening and closing the chuck section 70. The opening and closing mechanism 65 closes the chuck section 70 as it moves in the X1 direction, and opens it as it moves in the X2 direction. By linking the forward and backward movements of the chuck section 70 with the opening and closing movements of the chuck section 70, it is possible to perform actions such as closing the chuck section 70 while inserting it into the housing 2 to clamp the outer periphery of the workpiece W, and opening the chuck section 70 while retracting it when transferring the workpiece W to the second robot arm 40.

[0163] In this embodiment, the second moving mechanism 41 is a second multi-joint arm 42 that moves the second manipulator 40 in a horizontal plane. A lifting mechanism 48 is disposed at the front end of the second multi-joint arm 42, causing the second manipulator 40 to move up and down relative to the second multi-joint arm 42. By combining the multi-joint arm with the lifting mechanism in this way, the following actions can be performed: after adsorbing and holding the workpiece W from above, it is transported to the platform of the processing device and placed onto the platform from above.

[0164] In this embodiment, the first moving mechanism 31 is a first multi-joint arm 32 that moves the first manipulator 30 in a horizontal plane. The first manipulator 30 includes a pair of first plates 38 extending from both sides of the chuck mechanism 37 in the Y direction toward the X1 direction, supporting the workpiece W from below via the pair of first plates 38. When the first manipulator 30 moves to the retracted position 30B and the second manipulator 40 moves to the intersection position 40B, the suction part 56 of the second manipulator 40 is positioned to overlap with the pair of first plates 38 from above. In this case, the portion supported from below by the first manipulator 30 can be suctioned. Therefore, when the suction part 56 is in close contact with the workpiece W, the posture of the workpiece W can be stabilized.

[0165] In this embodiment, the first robotic arm 30 supports the workpiece W via a pad 39 mounted on the front end of a pair of first plates 38. When the first robotic arm 30 moves to the retracted position 30B and the second robotic arm 40 moves to the intersection position 40B, the adsorption part 56 is positioned to overlap with the pad 39 from above. In this case, the portion supported from below by the pad 39 can be adsorbed. Therefore, when the adsorption part 56 is in close contact with the workpiece W, the posture of the workpiece W can be stabilized.

[0166] In this embodiment, the second robotic arm 40 includes: a robotic arm base 52, which overlaps with the chuck mechanism 37 and a pair of first plates 38 from above when the first robotic arm 30 moves to the retracted position 30B and the second robotic arm 40 moves to the junction position 40B; a first frame portion 53 and a second frame portion 54, extending from both ends of the robotic arm base 52 in the Y direction towards the X1 direction; and a third frame portion 55, connecting the first frame portion 53 and the second frame portion 54. The first frame portion 53 and the second frame portion 54 are respectively provided with suction portions 56 at the position where they overlap with the pad 39 from above and at the front end in the X1 direction. By providing two suction portions 56 each at the front end and the base end of the second robotic arm 40, the workpiece W can be stably held. Furthermore, two of the suction portions 56 are close to the chuck mechanism 37 and supported by the pad 39. Therefore, when the suction portions 56 are in close contact with the workpiece W, the posture of the workpiece W can be stabilized.

[0167] (Other implementation methods)

[0168] (1) In the transport robot 1, the chuck mechanism 37 that holds the outer peripheral end of the workpiece W includes a moving mechanism 64 that moves the chuck portion 70 relative to the robot arm frame 61 in the X direction. However, the chuck mechanism 37 may also not include the moving mechanism 64. That is, after the workpiece W is adsorbed by the second robot arm 40, the chuck portion 70 can be opened, and then the first moving mechanism 31 can be used to move the first robot arm 30 as a whole, thereby causing the chuck portion 70 to retreat to a position that does not overlap with the outer peripheral end of the workpiece W.

[0169] (2) The conveying robot 1 uses a cam mechanism 73 to make the movement of the chuck section 70 in the X direction linked with the opening and closing action of the chuck section 70, but it can also be configured to make the opening and closing mechanism and the moving mechanism work together through control.

[0170] (3) In the transport robot 1, the first manipulator 30 includes both a chuck mechanism 37 and a pair of first plates 38 that serve as workpiece support portions supporting the workpiece W from below. However, it can also be configured so that the pair of first plates 38 are not provided and the workpiece W is held solely by the chuck mechanism. In this case, the number of chuck portions holding the workpiece W can be increased. In addition, the chuck portions can also be made in a shape where the portion holding the outer peripheral end of the workpiece W is longer.

[0171] (4) In the transport robot 1, the first manipulator 30 includes a chuck mechanism 37, but it can also be configured as follows: the chuck mechanism 37 is not provided in the first manipulator 30, and the workpiece W is held only by a workpiece support portion that supports the workpiece W from below. For example, the length of the pair of first plates 38 can be extended, or a workpiece support portion with the same shape as the second frame 51 of the second manipulator 40 can be provided.

[0172] (5) In the transport robot 1, the second manipulator 40 adsorbs the workpiece W from above via the adsorption part 56. However, the adsorption part 56 may not be provided on the second manipulator 40; instead, an edge gripping chuck mechanism may be provided to hold the workpiece W from the outer periphery. Since the edge gripping chuck mechanism includes claws that contact the outer periphery of the workpiece W from the outer periphery, the workpiece W can sometimes be placed on the platform of the processing device from above. In addition, by setting the claws of the edge gripping chuck mechanism in a position that does not interfere with the first manipulator 30, the workpiece W held by the first manipulator 30 can be approached from above and held. Therefore, the workpiece W can be transferred between the first manipulator 30 and the first manipulator 30 through the same process as steps S1 to S4.

[0173] (Summarize)

[0174] The present invention can be implemented in the following embodiments. (1)

[0176] A conveying robot includes: a first manipulator, comprising at least one of a chuck mechanism for gripping the outer periphery of a workpiece from above and below, and a workpiece support portion for supporting the workpiece from below;

[0177] A first moving mechanism moves the first robot arm to a forward position that holds the workpiece contained in the workpiece receiving section, and a backward position that is further away from the workpiece receiving section than the forward position;

[0178] The second robotic arm includes an adsorption part that adsorbs the surface of the workpiece or an edge clamping chuck mechanism that holds the workpiece from the outer periphery.

[0179] The second moving mechanism moves the second robotic arm to a junction position that overlaps with the retracted position; and

[0180] A lifting mechanism is used to lift the second robotic arm, which has been moved to the handover position. (2)

[0182] According to the transport robot described in (1), the first robotic arm includes the chuck mechanism.

[0183] When the direction connecting the backward position and the forward position is set as the first direction...

[0184] The chuck mechanism includes a chuck section that can be opened and closed vertically, and a moving mechanism that moves the chuck section along the first direction. (3)

[0186] According to the conveying robot described in (2), the chuck mechanism includes an opening and closing mechanism for opening and closing the chuck section.

[0187] When the direction from the backward position to the forward position is defined as one side of the first direction, and the direction from the forward position to the backward position is defined as the other side of the first direction,...

[0188] The opening and closing mechanism causes the chuck to close as it moves to one side of the first direction, and causes it to open as it moves to the other side of the first direction. (4)

[0190] According to the transport robot described in (1), the second manipulator includes the adsorption unit. (5)

[0192] According to any one of (1) to (3) of the transport robot, the second moving mechanism is a second multi-joint arm that enables the second manipulator to move in the horizontal plane.

[0193] The lifting mechanism is located at the front end of the second multi-joint arm, enabling the second robotic arm to move up and down relative to the second multi-joint arm. (6)

[0195] According to any one of (1) to (4) of the transport robot, the first moving mechanism is a first multi-joint arm that moves the first manipulator in the horizontal plane.

[0196] When the direction connecting the backward position and the forward position is defined as the first direction, the direction from the backward position towards the forward position is defined as one side of the first direction, and the direction orthogonal to the first direction in the horizontal plane is defined as the second direction,...

[0197] The first robotic arm includes a pair of first plates extending from both sides of the chuck mechanism in the second direction toward one side of the first direction, by means of the pair of first plates supporting the workpiece from below.

[0198] When the first robotic arm moves to the retracted position and the second robotic arm moves to the handover position, the adsorption part is positioned to overlap with the pair of first plates from above. (7)

[0200] According to the conveying robot described in (6), the first manipulator supports the workpiece via pads mounted on the front ends of the pair of first plates.

[0201] When the first robotic arm moves to the retracted position and the second robotic arm moves to the handover position, the adsorption part is positioned to overlap with the pad from above. (8)

[0203] According to the transport robot described in (7), the second manipulator includes: a manipulator base that overlaps with the chuck mechanism and the pair of first plates from above when the first manipulator moves to the retracted position and the second manipulator moves to the handover position; a first frame and a second frame that extend from both ends of the manipulator base in the second direction toward one side of the first direction; and a third frame that connects the first frame and the second frame.

[0204] The first frame portion and the second frame portion are respectively provided with the adsorption portion at the position where they overlap with the pad from the top side and at the front end of one side in the first direction.

Claims

1. A transport robot, characterized in that, It has: a first robotic arm, including at least one of a chuck mechanism for clamping the outer peripheral end of a workpiece from above and below, and a workpiece support portion for supporting the workpiece from below; A first moving mechanism moves the first robot arm to a forward position that holds the workpiece contained in the workpiece receiving section, and a backward position that is further away from the workpiece receiving section than the forward position; The second robotic arm includes an adsorption part that adsorbs the surface of the workpiece or an edge clamping chuck mechanism that holds the workpiece from the outer periphery. The second moving mechanism moves the second robotic arm to a junction position that overlaps with the retracted position. as well as A lifting mechanism is used to lift the second robotic arm, which has been moved to the handover position.

2. The transport robot according to claim 1, characterized in that, The first robotic arm includes the chuck mechanism. When the direction connecting the backward position and the forward position is set as the first direction... The chuck mechanism includes a chuck section that can be opened and closed vertically, and a moving mechanism that moves the chuck section along the first direction.

3. The transport robot according to claim 2, characterized in that, The chuck mechanism includes an opening and closing mechanism for opening and closing the chuck section. When the direction from the backward position to the forward position is defined as one side of the first direction, and the direction from the forward position to the backward position is defined as the other side of the first direction,... The opening and closing mechanism causes the chuck to close as it moves to one side of the first direction, and causes it to open as it moves to the other side of the first direction.

4. The transport robot according to claim 1, characterized in that, The second robotic arm includes the adsorption unit.

5. The transport robot according to claim 1, characterized in that, The second moving mechanism is a second multi-joint arm that enables the second robotic arm to move in the horizontal plane. The lifting mechanism is located at the front end of the second multi-joint arm, enabling the second robotic arm to move up and down relative to the second multi-joint arm.

6. The transport robot according to claim 1, characterized in that, The first moving mechanism is a first multi-joint arm that enables the first robotic arm to move in the horizontal plane. When the direction connecting the backward position and the forward position is defined as the first direction, the direction from the backward position towards the forward position is defined as one side of the first direction, and the direction orthogonal to the first direction in the horizontal plane is defined as the second direction,... The first robotic arm includes the chuck mechanism and the workpiece support. The workpiece support includes a pair of first plates extending from both sides of the chuck mechanism in the second direction toward one side of the first direction, thereby supporting the workpiece from below via the pair of first plates. When the first robotic arm moves to the retracted position and the second robotic arm moves to the handover position, the adsorption part is positioned to overlap with the pair of first plates from above.

7. The transport robot according to claim 6, characterized in that, The first robotic arm supports the workpiece via pads mounted at the front ends of the pair of first plates. When the first robotic arm moves to the retracted position and the second robotic arm moves to the handover position, the adsorption part is positioned to overlap with the pad from above.

8. The transport robot according to claim 7, characterized in that, The second robotic arm includes: a robotic arm base that overlaps with the chuck mechanism and the pair of first plates from above when the first robotic arm moves to the retracted position and the second robotic arm moves to the junction position; a first frame and a second frame that extend from both ends of the robotic arm base in a second direction toward one side of the first direction; and a third frame that connects the first frame and the second frame. The first frame portion and the second frame portion are respectively provided with the adsorption portion at the position where they overlap with the pad from the top side and at the front end of one side in the first direction.

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