Digital-intelligent cooperative control coating method
By using a digital and intelligent collaborative control method, the workpiece's revolution angular velocity is adjusted in real time, and a closed-loop control system is constructed. This solves the problem of poor coating uniformity and repeatability in traditional coating equipment, and realizes the digitalization and improved uniformity of the coating process.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2026-01-06
- Publication Date
- 2026-04-03
AI Technical Summary
Traditional coating equipment cannot achieve closed-loop control during the coating process, resulting in poor coating uniformity and repeatability, inability to adapt to dynamic changes in deposition rate, and lack of digital process knowledge transfer capabilities.
By adopting a digital and intelligent collaborative control method, the workpiece's revolution angular velocity is dynamically adjusted by acquiring the deposition rate in real time, and a closed-loop control system is constructed to ensure the synchronization of the workpiece's motion trajectory and deposition rate during the coating process, thereby improving the uniformity and repeatability of the coating.
It improves the uniformity and repeatability of coating under dynamic deposition conditions, ensures the symmetry and consistency of film thickness distribution, solves the problem of disconnected control logic in traditional coating equipment, and realizes the digital transfer of process knowledge.
Smart Images
Figure CN121781099A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of optical coating control technology, and more specifically to a digital and intelligent collaborative control coating method. Background Technology
[0002] High-precision optical thin films are core components of the modern optoelectronic industry, widely used in laser systems, aerospace remote sensing, medical diagnostic equipment, and consumer electronics. These applications place high demands on the performance of thin films, especially the uniformity of film thickness. Film thickness uniformity directly determines key performance indicators such as the center wavelength accuracy of filters, the residual reflectivity of antireflective films, and the damage threshold of high-reflectivity films.
[0003] Currently, mainstream high-end optical coating equipment generally employs a planetary motion system for the workpiece to improve film thickness distribution. This system utilizes the simultaneous revolution and rotation of the substrate to homogenize the spatial non-uniformity of the deposition source through motion averaging. However, in actual production, existing process control methods still have the following prominent problems and limitations: Traditional control principles suffer from a contradiction between static settings and dynamic processes. Traditional processes pre-determine a fixed workpiece revolution angular velocity for the coating process, based on an idealized, constant preset deposition rate. However, the actual deposition rate is a dynamic variable that changes in real time due to factors such as fluctuations in deposition source power, material consumption, and changes in vacuum levels. This mismatch between "static motion parameters" and "dynamic deposition process" leads to a key technical challenge: it cannot be guaranteed that the workpiece's trajectory forms a geometrically closed loop precisely at the instant the film reaches the target thickness. This "closed-loop condition" is the ideal physical state for ensuring film thickness uniformity, a state that traditional control principles cannot inherently achieve.
[0004] Control logic based on fixed parameters struggles to digitize process knowledge. Traditional coating technologies translate engineers' experience into fixed workpiece motion parameters, but these parameters themselves lack the core knowledge of "how to respond to dynamic changes in the deposition process," leading to a disconnect between process knowledge and control execution. Therefore, traditional processes are essentially an "open-loop" replication of experience, rather than a "closed-loop" intelligent reproduction, and their control logic cannot be accurately digitally transferred and inherited across different equipment and film systems.
[0005] Traditional automated systems lack the closed-loop control capability to achieve precise physical objectives. Although modern coating equipment has achieved process automation, its control core remains static. The system can monitor the real-time deposition rate, but it has not built a real-time feedback model with "achieving closed-loop conditions" as the control objective. Therefore, the automation of traditional systems is a kind of "blind" automation, unable to solve the problems of film consistency and repeatability degradation caused by deposition rate fluctuations.
[0006] Therefore, how to improve the coating uniformity of automatic coating is an urgent problem to be solved in this field. Summary of the Invention
[0007] In view of this, the present invention provides a digital and intelligent collaborative control coating method that can achieve automatic coating under closed-loop conditions and improve coating uniformity.
[0008] To achieve the above objectives, the present invention adopts the following technical solution: A digitally intelligent collaborative control coating method uses a planetary system for workpiece coating. During the coating process, the deposition source is fixed and diffuses the coating material to the surroundings. The workpiece to be coated revolves around the deposition source to receive the coating material. The method includes the following steps: S1: Real-time acquisition of deposition rate; S2: Based on the preset target number of revolutions and target thickness, confirm the speed adjustment benchmark under closed-loop conditions, and combine it with the deposition rate to obtain the target revolution angular velocity; S3: Apply a coating according to the target rotational speed.
[0009] Preferably, S2 includes:
[0010] in, Let be the target angular velocity of revolution at time t. For the target number of revolutions, For the target thickness, For the moving average time window, This represents the real-time deposition rate.
[0011] Preferably, the method for determining the target number of revolutions is as follows:
[0012] in, Indicates rounding down. The maximum angular velocity of revolution, Preset deposition rate .
[0013] Preferably, in step S2, obtaining the target orbital angular velocity by combining the deposition rate includes: The deposition rate is sampled according to a preset sampling interval, and the target orbital angular velocity corresponding to the current moment is determined based on the sampling results; the target orbital angular velocity is dynamically updated by repeated sampling.
[0014] Preferably, S2 includes: The target number of revolutions and the target thickness corresponding to the multilayer film system are obtained, and the corresponding target angular velocity is determined according to the parameters corresponding to the corresponding film layer, and multilayer film system coating is performed.
[0015] A coating equipment coating control system includes: The data acquisition module is used to obtain the real-time deposition rate of the deposition source in the coating equipment; The parameter configuration module is used to configure coating parameters, including the target number of revolutions and the target thickness; and to confirm the closed-loop conditions based on the coating parameters. The optimization calculation module is used to determine the target orbital angular velocity under the closed-loop conditions based on the coating parameters and the deposition rate. The motion control module is used to generate control commands based on the target revolution angular velocity to drive the coating equipment.
[0016] Preferably, the optimization calculation module includes a dynamic sampling submodule and a dynamic optimization submodule; The dynamic sampling submodule is used to sample the deposition rate according to a preset sampling interval; The dynamic optimization submodule is used to determine the target revolution angular velocity corresponding to the current moment based on the sampling results; and to monitor the sampling results to dynamically update the target revolution angular velocity.
[0017] Preferably, the optimization calculation module further includes a thickness detection submodule; The thickness detection submodule is used to update the cumulative coating thickness after each sampling and compare it with the target thickness. When the cumulative coating thickness is not lower than the target thickness, the coating parameters are updated or the coating is terminated.
[0018] As can be seen from the above technical solution, compared with the prior art, this invention discloses a digitally intelligent collaborative control coating method, which transforms closed-loop conditions into directly executable mathematical constraints by pre-setting the synchronous relationship between film thickness accumulation and workpiece revolution angle. This invention ensures that even with fluctuations in the actual deposition rate, the revolution angle synchronously approaches or even reaches the target value when the accumulated thickness reaches the target value, thereby achieving geometric trajectory closure. This invention uses the moving average of the real-time deposition rate as a feedback signal to dynamically output an optimized revolution angle, forming a real-time closed-loop control system, thus solving the technical deficiency of traditional fixed-parameter modes in adapting to dynamic process changes. Attached Figure Description
[0019] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.
[0020] Figure 1 A schematic diagram of a digital and intelligent collaborative control coating method provided by the present invention; Figure 2 This is a diagram illustrating the film uniformity effect of the present invention. Figure 3 This is a schematic diagram illustrating the film uniformity effect without introducing closed-loop constraints in an embodiment of the present invention. Detailed Implementation
[0021] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.
[0022] Example 1 This invention discloses a digitally intelligent collaborative control coating method, which performs coating through a planetary system on the workpiece. During the coating process, the deposition source is fixed and diffuses the coating material to the surroundings. The workpiece to be coated revolves around the deposition source to receive the coating material. The method includes the following steps: S1: Real-time acquisition of deposition rate; S2: Based on the preset target number of revolutions and target thickness, confirm the velocity adjustment benchmark under closed-loop conditions, and combine it with the deposition rate to obtain the target revolution angular velocity; S3: Apply coating according to the target angular velocity.
[0023] It should be emphasized that the present invention improves the revolution control in the planetary system of the workpiece. In the actual coating process, while the workpiece to be coated is controlled by the control method of the present invention to control its revolution, it will also ensure the uniformity of coating by rotating itself.
[0024] This invention obtains key process parameters online, such as the target thickness L of the pre-film layer and the preset deposition rate. Preset moving average time window Maximum angular velocity of the workpiece motion system Real-time deposition rate The system performs real-time calculations based on a built-in mathematical model describing the synergistic relationship between workpiece motion and deposition rate, dynamically outputting optimized workpiece motion control commands. The mathematical model for intelligent collaborative control is as follows:
[0025] Where L is the target film thickness. For real-time deposition rate, The preset moving average time window is N, where N is the target number of revolutions. The optimized revolution angular velocity is output based on the above-mentioned digital intelligent collaborative control mathematical model.
[0026] This invention operates within a preset moving average time window. Within the time frame Find the average It smooths out instantaneous fluctuations in deposition rate and enhances system stability.
[0027]
[0028] The target number of revolutions N is based on the target film thickness L and the maximum revolution angular velocity. and preset deposition rate The calculation is obtained by means of the following formula: in This indicates rounding down, and if The coating control process is executed based on a digital and intelligent collaborative control model. If If not, the intelligent collaborative control coating process will not be executed. The core principle of the formula for calculating the target number of revolutions N lies in ensuring the feasibility of the "closed-loop condition" under physical constraints, that is, the physical limits of the equipment ( ), process objectives ( ) and ideal process parameters ( This is related to the calculation of the maximum integer number of laps N that can be completed under ideal conditions. If... This means that even when operating at the maximum orbital angular velocity, it cannot complete at least one revolution before the target film thickness is deposited. At this point, the "closed-loop condition" cannot be physically achieved, so the system determines not to execute this control process, thereby avoiding invalid process operation from the source and ensuring the reliability of the collaborative control method.
[0029] The specific implementation process includes the following steps: Step 1: Parameter definition.
[0030] Current target thickness of the film: (Constant); the preset deposition rate of the current film layer. : (Constant); Maximum angular velocity of the workpiece planetary motion system: (Constant); Sampling interval: (Constant); Preset moving average time window for the pre-film layer : , (Constant); Time Index: Deposition rate sample value: Discretized moving average deposition rate is the average value in integral form. Approximation: Cumulative thickness: Workpiece revolution angular velocity: .
[0031] Step 2: Parameter initialization.
[0032] Calculate the target number of revolutions: .
[0033] Feasibility check: If The coating control process based on the aforementioned intelligent collaborative control model is executed if... If not, the intelligent collaborative control coating process will not be executed; Initialize the loop variable: Accumulated thickness: Deposition rate: Moving average queue Revolutionary angular velocity: ; Initialize and send the initial revolution angular velocity command to the motion controller of the workpiece planetary motion system, and open the deposition source baffle to start depositing the thin film.
[0034] Step 3: Enter the main control loop.
[0035] Waiting for sampling interval: Maintain current state time.
[0036] Sample the deposition rate and obtain the current deposition rate measurement. ;Will Add to queue ,if Remove the head element of the queue; maintain real-time performance and accuracy by updating the moving average queue.
[0037] Update the discretized moving average deposition rate: .
[0038] Update cumulative thickness: .
[0039] Update the orbital angular velocity: .
[0040] Send revolution angular velocity command: Send to the motion controller.
[0041] Check termination conditions: If Exit the loop, otherwise set Return to the "Wait for sampling interval" step.
[0042] Step 4: Terminate the coating process.
[0043] The deposition source is shut off to stop the coating process, and a stop command is sent to the motion controller to end the coating process.
[0044] This embodiment analyzes the control process data, and the results show that the target number of revolutions is 36, while the actual number of revolutions completed using the intelligent collaborative control coating method is 36.4. Therefore, the intelligent collaborative control coating method of this invention has high closed-loop condition control accuracy, resulting in good film uniformity and excellent symmetry in film thickness distribution. Figure 2 As shown. In contrast, if a fixed orbital angular velocity is used from the beginning, the number of revolutions at the end of the coating process is ( (×77s) / 2π = 41.58 revolutions (where =1.08π rad / s), which is far from the target number of revolutions of 36, resulting in poor film uniformity and poor film thickness distribution symmetry, such as Figure 3 As shown.
[0045] Example 2 Based on the same inventive concept, embodiments of the present invention disclose a coating equipment coating control system, comprising: The data acquisition module is used to obtain the real-time deposition rate of the deposition source in the coating equipment; The parameter configuration module is used to configure coating parameters, including the target number of revolutions and the target thickness; the closed-loop conditions are confirmed based on the coating parameters. The optimization calculation module is used to determine the target orbital angular velocity under closed-loop conditions based on the coating parameters and deposition rate. The motion control module is used to generate control commands based on the target revolution angular velocity to drive the coating equipment.
[0046] To further implement the above technical solution, the optimization calculation module includes a dynamic sampling submodule and a dynamic optimization submodule; the dynamic sampling submodule is used to sample the deposition rate according to a preset sampling interval; the dynamic optimization submodule is used to determine the target orbital angular velocity corresponding to the current moment based on the sampling results; and is used to monitor the sampling results and dynamically update the target orbital angular velocity.
[0047] To further implement the above technical solution, the optimization calculation module also includes a thickness detection submodule; the thickness detection submodule is used to update the cumulative coating thickness after each sampling and compare it with the target thickness. When the cumulative coating thickness is not lower than the target thickness, the coating parameters are updated or the coating is terminated.
[0048] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on its differences from other embodiments. Similar or identical parts between embodiments can be referred to interchangeably. For the apparatus disclosed in the embodiments, since they correspond to the methods disclosed in the embodiments, the description is relatively simple; relevant parts can be referred to the method section.
[0049] The above description of the disclosed embodiments enables those skilled in the art to make or use the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Therefore, the invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims
1. A digitally intelligent collaborative control coating method, characterized in that, Coating is performed using a planetary system for the workpiece. During the coating process, the deposition source is fixed and diffuses the coating material to the surroundings. The workpiece to be coated revolves around the deposition source to receive the coating material. Includes the following steps: S1: Real-time acquisition of deposition rate; S2: Based on the preset target number of revolutions and target thickness, confirm the speed adjustment benchmark under closed-loop conditions, and combine it with the deposition rate to obtain the target revolution angular velocity; S3: Apply a coating according to the target rotational speed.
2. The intelligent collaborative control coating method according to claim 1, characterized in that, S2 includes: in, Let be the target angular velocity of revolution at time t. For the target number of revolutions, For the target thickness, For the moving average time window, This represents the real-time deposition rate.
3. The intelligent collaborative control coating method according to claim 1, characterized in that, The method for confirming the target number of revolutions is as follows: in, Indicates rounding down. The maximum angular velocity of revolution, Preset deposition rate .
4. The intelligent collaborative control coating method according to claim 1, characterized in that, In step S2, the target orbital angular velocity is obtained by combining the deposition rate with the following: The deposition rate is sampled according to a preset sampling interval, and the target orbital angular velocity corresponding to the current moment is determined based on the sampling results; the target orbital angular velocity is dynamically updated by repeated sampling.
5. The intelligent collaborative control coating method according to claim 1, characterized in that, S2 includes: The target number of revolutions and the target thickness corresponding to the multilayer film system are obtained, and the corresponding target angular velocity is determined according to the parameters corresponding to the corresponding film layer, and multilayer film system coating is performed.
6. A coating control system for a coating equipment, characterized in that, include: The data acquisition module is used to obtain the real-time deposition rate of the deposition source in the coating equipment; The parameter configuration module is used to configure coating parameters, including the target number of revolutions and the target thickness; and to confirm the closed-loop conditions based on the coating parameters. The optimization calculation module is used to determine the target orbital angular velocity under the closed-loop conditions based on the coating parameters and the deposition rate. The motion control module is used to generate control commands based on the target revolution angular velocity to drive the coating equipment.
7. A coating equipment coating control system according to claim 6, characterized in that, The optimization calculation module includes a dynamic sampling submodule and a dynamic optimization submodule; The dynamic sampling submodule is used to sample the deposition rate according to a preset sampling interval; The dynamic optimization submodule is used to determine the target revolution angular velocity corresponding to the current moment based on the sampling results; and to monitor the sampling results to dynamically update the target revolution angular velocity.
8. A coating equipment coating control system according to claim 7, characterized in that, The optimization calculation module also includes a thickness detection submodule; The thickness detection submodule is used to update the cumulative coating thickness after each sampling and compare it with the target thickness. When the cumulative coating thickness is not lower than the target thickness, the coating parameters are updated or the coating is terminated.