Multi-zero-point independent adjustable high-roll-off two-pass filter based on 3D CRLH

Abstract

The invention provides a multi-zero-point independent adjustable high-roll-off dual-pass filter based on a 3D CRLH. The multi-zero-point independent adjustable high-roll-off dual-pass filter comprises a first metal layer, a glass dielectric layer and a second metal layer which are sequentially arranged from top to bottom, the multiple glass substrate through holes penetrate through the glass dielectric layer at intervals, the multiple glass substrate through holes are filled with first metal conductor columns, and the two ends of each first metal conductor column are connected with the first metal layer and the second metal layer respectively; the first metal conductor column, the first metal layer and the second metal layer form a resonant cavity; an input port structure and an output port structure are arranged on opposite side walls of the first metal layer; a first three-dimensional metal structure is arranged in the first metal layer; a second three-dimensional metal structure is arranged in the second metal layer; the first three-dimensional metal structure, the second three-dimensional metal structure, the first metal conductor column and the resonant cavity form a three-dimensional composite left-right hand transmission line. Therefore, the filter has higher frequency selectivity, and the out-of-band rejection performance is remarkably improved.

Description

Technical Field

[0001] This invention relates to the fields of integrated circuit manufacturing and advanced packaging technology, and in particular to a multi-zero independently adjustable high roll-off dual-pass filter based on three-dimensional composite right- / left-handed (3D CRLH). Background Technology

[0002] The slowdown in Moore's Law and the diversification of integrated circuit applications are two important characteristics of the current integrated circuit industry. With the rise of products in fields such as smartphones, the Internet of Things (IoT), automotive electronics, high-performance computing, 5G, and artificial intelligence, especially the high-speed, high-frequency, and heterogeneous integration requirements of 5G, advanced packaging technologies need continuous innovation. The 5G field includes 5G millimeter wave (28-60GHz), 5G Sub-6GHz, and 5G IoT (Sub-1GHz). The Composite Right- / Left-Handed (CRLH) transmission line theory has been widely adopted in filter design. By combining the phase lead characteristics of the left-handed material with the phase delay characteristics of the right-handed material, the CRLH structure can generate zero-order resonance, reducing the resonant frequency without increasing size, thereby achieving device miniaturization.

[0003] Traditional CRLH resonators are mostly implemented using planar structures, such as interdigitated capacitors and spiral inductors. Traditional CRLH resonators perform well in the low-frequency range, but in the millimeter-wave high-frequency range, their parasitic parameters are difficult to control precisely, and the energy constraint capability of the two-dimensional plane is limited, making it difficult to obtain an extremely high quality factor (Q value), thus limiting the further improvement of the selectivity and out-of-band rejection capability of the filter. Summary of the Invention

[0004] The purpose of this invention is to provide a multi-zero independently adjustable high roll-off dual-pass filter based on 3D CRLH, which solves the problem that existing technologies limit the further improvement of filter selectivity and out-of-band rejection capability.

[0005] To address the aforementioned technical problems, the embodiments of the present invention provide the following technical solutions: This invention provides a multi-zero independently adjustable high roll-off dual-pass filter based on 3D CRLH, comprising: The first metal layer, the glass dielectric layer, and the second metal layer are arranged sequentially from top to bottom; Multiple glass substrate vias are spaced through the glass dielectric layer, and each of the multiple glass substrate vias is filled with a first metal conductor pillar, with the two ends of the first metal conductor pillar connected to the first metal layer and the second metal layer, respectively; the first metal conductor pillar, the first metal layer, and the second metal layer together form a resonant cavity; The first metal layer has an input port structure and an output port structure on its opposite sidewalls. A first three-dimensional metal structure is disposed within the first metal layer; A second three-dimensional metal structure is provided within the second metal layer; The first three-dimensional metal structure, the second three-dimensional metal structure, the first metal conductor pillar, and the resonant cavity together constitute a three-dimensional composite left- and right-handed transmission line.

[0006] In some embodiments, the input port structure includes a first groove and a first metal sheet, wherein the first groove is formed on one side of the first metal layer and the first metal sheet is disposed in the first groove; The output port structure includes a second groove and a second metal sheet. The second groove is formed on the opposite side of the first groove on the first metal layer, and the second metal sheet is disposed in the second groove.

[0007] In some embodiments, the first three-dimensional metal structure includes: A third, fourth, fifth, and sixth groove are etched around the resonant cavity; the third and fourth grooves are located on both sides of the first metal sheet, and the fifth and sixth grooves are located on both sides of the second metal sheet.

[0008] In some embodiments, the first three-dimensional metal structure further includes: A third metal sheet is positioned above the first metal sheet; A fourth metal sheet connected below the first metal sheet; The fifth, sixth, and seventh metal sheets are spaced below the first metal sheet; An eighth metal sheet positioned above the second metal sheet; A ninth metal sheet connected below the second metal sheet; The tenth, eleventh, and twelfth metal sheets are spaced below the second metal sheet.

[0009] In some embodiments, the first three-dimensional metal structure further includes: The seventh and eighth grooves are formed within the first metal layer; The thirteenth and fourteenth metal plates are spaced apart within the seventh groove; The fifteenth, sixteenth, seventeenth, eighteenth, nineteenth, twentieth, and twenty-first metal sheets are disposed in the eighth groove; the sixteenth, seventeenth, nineteenth, twentieth, and twenty-first metal sheets are arranged at preset intervals along the length of the eighth groove.

[0010] In some embodiments, the second three-dimensional metal structure includes: The ninth, tenth, eleventh, and twelfth grooves are etched within the second metal layer; The twenty-second and twenty-third metal sheets are spaced apart within the ninth groove; The twenty-fourth and twenty-fifth metal sheets are spaced apart within the tenth groove; The twenty-sixth and twenty-seventh metal sheets are set in the eleventh groove, and the twenty-sixth and twenty-seventh metal sheets are arranged at intervals in both the length and width directions of the eleventh groove. The twenty-eighth, twenty-ninth, thirtieth, thirty-first, thirty-second, and thirty-third metal sheets are arranged at predetermined intervals within the twelfth groove.

[0011] In some embodiments, the resonant cavity is a QMSIW resonant cavity.

[0012] In some embodiments, the first metal layer, the second metal layer, and the first metal conductor pillar are all made of copper.

[0013] In some embodiments, the first three-dimensional metal structure is formed by a three-dimensional spiral inductor structure consisting of a fifth, sixth, seventh, tenth, eleventh, and twelfth metal sheet arranged at intervals.

[0014] In some embodiments, the thirteenth and fourteenth metal sheets constitute a first three-dimensional capacitor unit; The second three-dimensional capacitor unit is composed of the fifteenth, sixteenth, seventeenth, eighteenth, nineteenth, twentieth, and twenty-first metal sheets.

[0015] Compared to existing technologies, the present invention provides a multi-zero independent adjustable high roll-off dual-pass filter based on 3D CRLH, comprising: a first metal layer, a glass dielectric layer, and a second metal layer arranged sequentially from top to bottom; multiple glass substrate vias spaced apart through the glass dielectric layer, each via being filled with a first metal conductor pillar, and the two ends of the first metal conductor pillar being connected to the first metal layer and the second metal layer respectively; the first metal conductor pillar, the first metal layer, and the second metal layer together constitute a resonant cavity; an input port structure and an output port structure are provided on opposite sidewalls of the first metal layer; a first three-dimensional metal structure is provided within the first metal layer; a second three-dimensional metal structure is provided within the second metal layer; the first three-dimensional metal structure, the second three-dimensional metal structure, the first metal conductor pillar, and the resonant cavity together constitute a three-dimensional composite left- and right-hand transmission line. In this way, the first metal conductor pillar, the first metal layer, and the second metal layer together form a resonant cavity. Combined with the first three-dimensional metal structure and the second three-dimensional metal structure respectively built into the first metal layer and the second metal layer, they together form a complex three-dimensional electromagnetic resonance and coupling system. This system greatly enhances the spatial confinement capability of electromagnetic energy to improve the quality factor, which directly translates into a steeper passband edge roll-off in terms of electrical performance, i.e., higher frequency selectivity. The specific arrangement of the first three-dimensional metal structure and the second three-dimensional metal structure in three-dimensional space forms a complex distributed electromagnetic coupling with the resonant cavity to introduce multiple zeros. The introduced low-frequency passband left-side zero accelerates the roll-off, and the introduced two high-frequency band zeros can deeply attenuate signals outside the target frequency band, thereby significantly improving out-of-band rejection performance. Attached Figure Description

[0016] The above and other objects, features, and advantages of exemplary embodiments of the present invention will become readily apparent upon reading the following detailed description with reference to the accompanying drawings. In the drawings, several embodiments of the invention are illustrated by way of example and not limitation, with the same or corresponding reference numerals denoteing the same or corresponding parts, wherein: Figure 1 A schematic front view cross-sectional view of the structure of a multi-zero independently adjustable high roll-off dual-pass filter based on 3D CRLH is shown. Figure 2 A top view of the first metal layer in a 3D CRLH-based multi-zero independently adjustable high roll-off dual-pass filter is schematically shown. Figure 3 A top view schematically illustrates the second metal layer in a multi-zero independently adjustable high roll-off dual-pass filter based on 3D CRLH; Figure 4 A schematic diagram of the frequency response of a multi-zero independently adjustable high roll-off dual-pass filter based on 3D CRLH is shown.

[0017] Explanation of reference numerals in the attached figures: 1. First metal layer; 2. Glass dielectric layer; 3. Second metal layer; 4. First metal conductor post; 5. First groove; 6. Second groove; 7. First metal sheet; 8. Second metal sheet; 9. Third groove; 10. Fourth groove; 11. Fifth groove; 12. Sixth groove; 13. Third metal sheet; 14. Fourth metal sheet; 15. Fifth metal sheet; 16. Sixth metal sheet; 17. Seventh metal sheet; 18. Eighth metal sheet; 19. Ninth metal sheet; 20. Tenth metal sheet; 21. Eleventh metal sheet; 22. Twelfth metal sheet; 23. Seventh groove; 24. Eighth groove; 25. Thirteenth metal sheet; 26. Fourteenth metal sheet; 27. Fifteenth metal sheet; Metal sheet; 28. Sixteenth metal sheet; 29. ​​Seventeenth metal sheet; 30. Eighteenth metal sheet; 31. Nineteenth metal sheet; 32. Twentieth metal sheet; 33. Twenty-first metal sheet; 34. Ninth groove; 35. Tenth groove; 36. Eleventh groove; 37. Twelfth groove; 38. Twenty-second metal sheet; 39. Twenty-third metal sheet; 40. Twenty-fourth metal sheet; 41. Twenty-fifth metal sheet; 42. Twenty-sixth metal sheet; 43. Twenty-seventh metal sheet; 44. Twenty-eighth metal sheet; 45. Twenty-ninth metal sheet; 46. Thirtieth metal sheet; 47. Thirty-first metal sheet; 48. Thirty-second metal sheet; 49. Thirty-third metal sheet. Detailed Implementation

[0018] The embodiments of the present invention will be further described in detail below with reference to the accompanying drawings and examples. The detailed description of the following embodiments and the accompanying drawings are used to illustrate the principles of the present invention by way of example, but should not be used to limit the scope of the present invention. The present invention can be implemented in many different forms and is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

[0019] The following is a detailed description of a multi-zero independently adjustable high roll-off dual-pass filter based on 3D CRLH in an embodiment of the present invention.

[0020] See Figure 1 As shown, Figure 1 The schematic diagram shows the main view cross-sectional view of the structure of a multi-zero independently adjustable high roll-off double-pass filter based on 3D CRLH. The present invention proposes a multi-zero independently adjustable high roll-off double-pass filter based on 3D CRLH, including: a first metal layer 1, a glass dielectric layer 2 and a second metal layer 3 arranged sequentially from top to bottom. Multiple glass substrate through-holes are spaced through the glass dielectric layer 2, and each of the multiple glass substrate through-holes is filled with a first metal conductor pillar 4. The two ends of the first metal conductor pillar 4 are respectively connected to the first metal layer 1 and the second metal layer 3. The first metal conductor pillar 4, the first metal layer 1 and the second metal layer 3 together form a resonant cavity. An input port structure and an output port structure are provided on opposite sidewalls of the first metal layer 1; A first three-dimensional metal structure is provided within the first metal layer 1; A second three-dimensional metal structure is provided within the second metal layer 3; The first three-dimensional metal structure, the second three-dimensional metal structure, the first metal conductor pillar 4, and the resonant cavity together constitute a three-dimensional composite left- and right-hand transmission line.

[0021] Specifically, the multi-zero independently adjustable high roll-off dual-pass filter based on 3D CRLH of the present invention operates at 30.5 GHz and 45.165 GHz. Multiple glass substrate vias can be obtained by etching, and the diameter of each glass substrate via connected to the first metal layer 1 is... d 1 is 50 μm, the diameter of each through-hole in the glass substrate connected to the second metal layer 3. d 2 is 25 μm thick. The thickness of glass dielectric layer 2 is 200 μm. All metal sheets in both the first and second three-dimensional metal structures have through holes and function as capacitors.

[0022] In this embodiment, Figure 2 A schematic top view of the first metal layer 1 in a 3D CRLH-based multi-zero independently adjustable high roll-off dual-pass filter is shown. See [link to relevant documentation]. Figure 2 As shown, the input port structure includes a first groove 5 and a first metal sheet 7. The first groove 5 is formed on one side of the first metal layer 1, and the first metal sheet 7 is disposed in the first groove 5. The output port structure includes a second groove 6 and a second metal sheet 8. The second groove 6 is opened on the opposite side of the first metal layer 1, opposite to the first groove 5, and the second metal sheet 8 is disposed in the second groove 6.

[0023] Specifically, the first metal plate 7 serves as the input port of the multi-zero independently adjustable high roll-off double-pass filter, and the second metal plate 8 serves as the output port of the multi-zero independently adjustable high roll-off double-pass filter. The input port and the output port are used to input electromagnetic waves and output electromagnetic waves, respectively.

[0024] In this embodiment, the first three-dimensional metal structure includes: The third groove 9, the fourth groove 10, the fifth groove 11 and the sixth groove 12 are etched around the resonant cavity; the third groove 9 and the fourth groove 10 are located on both sides of the first metal sheet 7, and the fifth groove 11 and the sixth groove 12 are located on both sides of the second metal sheet 8.

[0025] In this embodiment, the first three-dimensional metal structure further includes: The third metal sheet 13 is disposed above the first metal sheet 7; A fourth metal sheet 14 is connected below the first metal sheet 7; The fifth metal sheet 15, the sixth metal sheet 16, and the seventh metal sheet 17 are spaced below the first metal sheet 7; The eighth metal sheet 18 is positioned above the second metal sheet 8; A ninth metal piece 19 is connected below the second metal piece 8; The tenth metal sheet 20, the eleventh metal sheet 21, and the twelfth metal sheet 22 are spaced below the second metal sheet 8.

[0026] In this embodiment, the first three-dimensional metal structure further includes: The seventh groove 23 and the eighth groove 24 are formed in the first metal layer 1; The thirteenth metal sheet 25 and the fourteenth metal sheet 26 are spaced apart within the seventh groove 23; The fifteenth metal sheet 27, the sixteenth metal sheet 28, the seventeenth metal sheet 29, the eighteenth metal sheet 30, the nineteenth metal sheet 31, the twentieth metal sheet 32, and the twenty-first metal sheet 33 are arranged in the eighth groove 24 at a predetermined interval.

[0027] Specifically, the preset spacing is 40μm.

[0028] In this embodiment, Figure 3 A schematic top view of the second metal layer 3 in a 3D CRLH-based multi-zero independently adjustable high roll-off dual-pass filter is shown. See [link to relevant documentation]. Figure 3 As shown, the second three-dimensional metal structure includes: The ninth groove 34, the tenth groove 35, the eleventh groove 36 and the twelfth groove 37 are etched in the second metal layer 3; The twentieth metal sheet 38 and the twentieth metal sheet 39 are spaced apart within the ninth groove 34; The twenty-fourth metal sheet 40 and the twenty-fifth metal sheet 41 are spaced apart within the tenth groove 35; The twenty-sixth metal sheet 42 and the twenty-seventh metal sheet 43 are disposed in the eleventh groove 36, and the twenty-sixth metal sheet 42 and the twenty-seventh metal sheet 43 are arranged at intervals in both the length and width directions of the eleventh groove 36. The twenty-eighth metal sheet 44, the twenty-ninth metal sheet 45, the thirtieth metal sheet 46, the thirty-first metal sheet 47, the thirty-second metal sheet 48, and the thirty-third metal sheet 49 are arranged at predetermined intervals in the twelfth groove 37.

[0029] Specifically, the predetermined spacing is 60μm.

[0030] In this embodiment, the resonant cavity is a high-quality factor metal-integrated substrate waveguide (QMSIW) resonant cavity.

[0031] In this embodiment, the first metal layer 1, the second metal layer 3, and the first metal conductor pillar 4 are all made of copper.

[0032] In this embodiment, the first three-dimensional metal structure is formed by a five-dimensional spiral inductor structure consisting of a fifth metal sheet 15, a sixth metal sheet 16, a seventh metal sheet 17, a tenth metal sheet 20, an eleventh metal sheet 21, and a twelfth metal sheet 22 arranged at intervals.

[0033] In this embodiment, the thirteenth metal sheet 25 and the fourteenth metal sheet 26 constitute the first three-dimensional capacitor unit; The second three-dimensional capacitor unit is composed of the fifteenth metal sheet 27, the sixteenth metal sheet 28, the seventeenth metal sheet 29, the eighteenth metal sheet 30, the nineteenth metal sheet 31, the twentieth metal sheet 32, and the twenty-first metal sheet 33.

[0034] For details, see Figure 2 As shown, both the first metal sheet 7 and the second metal sheet 8 are L-shaped, each L-shape including a horizontal extension and a vertical extension extending downwards from the end of the horizontal extension. The width of the first metal sheet 7 and the second metal sheet 8 (i.e., the length of the horizontal extension) is... w 1. All are 850μm, length (i.e., the length of the vertical extension). w Both are 1900 μm. The widths of the first groove 5 and the second groove 6 (i.e., along the direction of the width of the horizontal extension). w 24 All are 210μm. The fourth metal sheet 14, fifth metal sheet 15, sixth metal sheet 16, and seventh metal sheet 17 are arranged alternately; the tenth metal sheet 20, ninth metal sheet 19, eleventh metal sheet 21, and the twelfth metal sheet 22 of the dual-passband filter are also arranged alternately. The lengths of the third metal sheet 13, eighth metal sheet 18, fifth metal sheet 15, and tenth metal sheet 20...w All three are 150 μm. The lengths of the fourth metal plate 14 and the ninth metal plate 19 are also considered. w All four are 130 μm. The lengths of the sixth metal plate 16 and the eleventh metal plate 21 are... w All five are 413 μm in length, and the lengths of the seventh metal plate 17 and the twelfth metal plate 22 are... w All six are 220 μm. The widths of the third groove 9 and the sixth groove 12... w 7 are all 50μm, the width of the fourth groove 10 and the fifth groove 11 w 8 are all 50μm. The total length of the resonant cavity. w 9 is 2200μm, the width of the entire resonant cavity. w 11 The width of the bathtub-shaped metal plate below the resonant cavity is 1400 μm. w 10 The diameter is 150 μm. The seventh groove 23 and the eighth groove 24 can be spaced apart within the first metal layer 1, and the length of the seventh groove 23 is... w 12 The width of the seventh groove 23 is 1400μm. w 13 The length of the eighth groove 24 is 460μm. w 14 The width of the eighth groove 24 is 780μm. w 15 It is 285μm. The length of the thirteenth metal sheet 25 w 16 The length of the fourteenth metal sheet is 26, which is 940 μm. w 17 The width of the thirteenth metal strip 25 and the fourteenth metal strip 26 is 940 μm. w 18 Both are 250 μm, and the distance between the thirteenth metal sheet 25 and the fourteenth metal sheet 26 along their length is... w 19 The distance between the thirteenth metal sheet 25 and the fourteenth metal sheet 26 in the width direction is 230 μm. w 20 It is 40μm.

[0035] Metal pieces 27, 28, 29, and 30 are arranged alternately from left to right in the first row within the eighth groove 24. Metal pieces 31, 32, and 33 are arranged alternately from left to right in the second row within the eighth groove 24, with the first row positioned above the second row. The lengths of metal pieces 27 and 30 are... w 21All are 135μm. The lengths of the sixteenth metal sheet 28, the seventeenth metal sheet 29, the nineteenth metal sheet 31, the twentieth metal sheet 32, and the twenty-first metal sheet 33 are... w 22 All are 200μm; the distance between the sixteenth metal sheet 28, the seventeenth metal sheet 29, the nineteenth metal sheet 31, the twentieth metal sheet 32, and the twenty-first metal sheet 33 in the longitudinal direction. w 23 All are 40μm.

[0036] For details, see Figure 3 As shown, the ninth groove 34 and the tenth groove 35 are etched on the second metal layer 3 near the edge region, with their relative positions. The eleventh groove 36 and the twelfth groove 37 are etched alternately on the second metal layer 3 near the middle region. The lengths of the ninth groove 34 and the tenth groove 35 are also shown. w 25 All are 470μm, and the width of the ninth groove is 34. w 26 Both are 330μm; the lengths of the twenty-second metal sheet 38 and the twenty-third metal sheet 39 are... w 27 Both are 340μm, and the distance between the twenty-second metal sheet 38 and the twenty-third metal sheet 39 is... w 28 The diameter is 60μm; the twenty-fourth metal sheet 40, the twenty-fifth metal sheet 41 and the twenty-second metal sheet 38 and the twenty-third metal sheet 39 are the same size as those inside the tenth groove 35.

[0037] The length of the eleventh groove 36 w 29 It is 1400μm in length and width. w 30 The diameter is 460 μm. The twenty-sixth metal sheet 42 and the twenty-seventh metal sheet 43 are both L-shaped metal sheets. Each L-shaped metal sheet includes a target horizontal extension and a target vertical extension extending vertically downwards from the end of the target horizontal extension. The lengths of the twenty-sixth metal sheet 42 and the twenty-seventh metal sheet 43 (i.e., the lengths of the target horizontal extensions) are... w 31 Both are 780μm, and the widths (i.e., the lengths of the vertical extensions of the target) of the twenty-sixth metal sheet 42 and the twenty-seventh metal sheet 43 are also 780μm. w 32 Both are 180μm, and the distance between the twenty-sixth metal sheet 42 and the twenty-seventh metal sheet 43 along their length is... w 33 The distance between them in the width direction is 240 μm. w 34 It is 60μm.

[0038] The length of the twelfth groove 37 w 35 It is 780μm in length and width. w 36 The diameter is 285μm. The twenty-eighth metal sheet 44, the twenty-ninth metal sheet 45, the twentieth metal sheet 46, the thirty-first metal sheet 47, the thirty-second metal sheet 48, and the thirty-third metal sheet 49 are sequentially and alternately arranged within the twelfth groove 37 of the dual-passband filter; the lengths of the twenty-eighth metal sheet 44, the twenty-ninth metal sheet 45, the twentieth metal sheet 46, the thirty-first metal sheet 47, the thirty-second metal sheet 48, and the thirty-third metal sheet 49 are... w 37 Both are 185μm, and the distance between them is... w 38 All are 60μm.

[0039] Specifically, the working process of the multi-zero point independently adjustable high roll-off dual-pass filter of the present invention is as follows: First, electromagnetic waves are input from the input port to the input QMSIW resonant cavity, which simultaneously excites electromagnetic waves; then, they are coupled through the loaded three-dimensional capacitor resonant unit and transmitted to the output QMSIW resonant cavity, and then output from the output port, thus realizing the dual-passband filtering characteristics.

[0040] Figure 4 A schematic diagram of the frequency response of a multi-zero independently adjustable high roll-off dual-pass filter based on 3D CRLH is shown. (See attached image) Figure 4 The horizontal axis represents frequency, and the vertical axis represents S-parameters (scattering parameters). The black curve represents S11 (return loss), and the red curve represents S21 (insertion loss). The passband center frequencies are 30.5 GHz and 45.165 GHz. The multi-zero independently adjustable high roll-off dual-pass filter of this invention achieves out-of-band rejection of more than 20 dB when the frequency reaches 2.017 times the passband center frequency.

[0041] The multi-zero point independently adjustable high roll-off dual-pass filter of the present invention uses a glass substrate to fabricate a three-dimensional passive device. It achieves dual-passband filtering characteristics by loading a three-dimensional spiral inductor at the input and output terminals and loading a three-dimensional capacitor in the resonant cavity.

[0042] The multi-zero independently adjustable high roll-off dual-pass filter of this invention features grooves etched around the resonant cavity, reducing its resonant frequency and achieving a more compact area. By etching coupling grooves in the metal layer and, according to CRLH transmission line theory, loading the thirteenth and fourteenth metal plates 25 (i.e., the first three-dimensional capacitor unit) in the QMSIW resonant cavity, a zero is generated on the left side of the low-frequency passband of the multi-zero independently adjustable high roll-off dual-pass filter, accelerating the roll-off. Loading the fifteenth, sixteenth, seventeenth, eighteenth, nineteenth, thirteenth, twentieth, and twenty-first metal plates 33 (i.e., the second three-dimensional capacitor unit) introduces a zero, separating the passband into a dual-frequency passband, thus achieving passband separation. Loading a three-dimensional spiral inductor structure on the metal plates at the input and output ports introduces two high-frequency zeros, forming out-of-band suppression to broaden the passband, thus creating a dual-passband. The zero points mentioned above are all independently adjustable, used to adjust the width of the dual passband and the center frequency; the manufacturing process of this invention is simple, and dual passband filters with center frequencies of 30.5 GHz and 45.165 GHz are realized.

[0043] The multi-zero independent adjustable high roll-off dual-pass filter based on 3D CRLH of this invention includes: a first metal layer 1, a glass dielectric layer 2, and a second metal layer 3 arranged sequentially from top to bottom; multiple glass substrate vias are spaced through the glass dielectric layer 2, and each of the multiple glass substrate vias is filled with a first metal conductor pillar 4, and the two ends of the first metal conductor pillar 4 are respectively connected to the first metal layer 1 and the second metal layer 3; the first metal conductor pillar 4, the first metal layer 1, and the second metal layer 3 together constitute a resonant cavity; an input port structure and an output port structure are arranged on opposite sidewalls of the first metal layer 1; a first three-dimensional metal structure is arranged inside the first metal layer 1; a second three-dimensional metal structure is arranged inside the second metal layer 3; the first three-dimensional metal structure, the second three-dimensional metal structure, the first metal conductor pillar 4, and the resonant cavity together constitute a three-dimensional composite left- and right-hand transmission line. In this way, the first metal conductor pillar 4, the first metal layer 1, and the second metal layer 3 together form a resonant cavity. Combined with the first three-dimensional metal structure and the second three-dimensional metal structure respectively built into the first metal layer 1 and the second metal layer 3, they together form a complex three-dimensional electromagnetic resonance and coupling system. This system greatly enhances the spatial confinement capability of electromagnetic energy to improve the quality factor, which directly translates into a steeper passband edge roll-off in terms of electrical performance, i.e., higher frequency selectivity. The specific arrangement of the first three-dimensional metal structure and the second three-dimensional metal structure in three-dimensional space forms a complex distributed electromagnetic coupling with the resonant cavity to introduce multiple zeros. The introduced low-frequency passband left-side zero accelerates the roll-off, and the introduced two high-frequency band zeros can deeply attenuate signals outside the target frequency band, thereby significantly improving out-of-band rejection performance.

[0044] While specific embodiments of the present invention have been described in detail by way of examples, those skilled in the art should understand that the above examples are for illustrative purposes only and are not intended to limit the scope of the invention. Those skilled in the art should understand that modifications can be made to the above embodiments or equivalent substitutions can be made to some technical features without departing from the scope and spirit of the invention. In particular, as long as there is no structural conflict, the various technical features mentioned in the embodiments can be combined in any manner.

[0045] The above are merely specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A multi-zero independently adjustable high roll-off dual-pass filter based on 3D CRLH, characterized in that, The multi-zero point independently adjustable high roll-off dual-pass filter includes a first metal layer, a glass dielectric layer, and a second metal layer arranged sequentially from top to bottom. Multiple glass substrate vias are spaced apart through the glass dielectric layer. Each of the multiple glass substrate vias is filled with a first metal conductor pillar, and the two ends of the first metal conductor pillar are respectively connected to the first metal layer and the second metal layer. The first metal conductor pillar, together with the first metal layer and the second metal layer, constitute a resonant cavity. The first metal layer has an input port structure and an output port structure on its opposite sidewalls; A first three-dimensional metal structure is disposed within the first metal layer; A second three-dimensional metal structure is disposed within the second metal layer; The first three-dimensional metal structure, the second three-dimensional metal structure, the first metal conductor pillar, and the resonant cavity together constitute a three-dimensional composite left- and right-handed transmission line.

2. The multi-zero independently adjustable high roll-off dual-pass filter based on 3D CRLH according to claim 1, characterized in that, The input port structure includes a first groove and a first metal sheet, wherein the first groove is formed on one side of the first metal layer and the first metal sheet is disposed in the first groove; The output port structure includes a second groove and a second metal sheet. The second groove is formed on the first metal layer on the opposite side of the first groove, and the second metal sheet is disposed in the second groove.

3. The multi-zero independently adjustable high roll-off dual-pass filter based on 3D CRLH according to claim 2, characterized in that, The first three-dimensional metal structure includes: A third, fourth, fifth, and sixth groove are etched around the resonant cavity; the third and fourth grooves are disposed on both sides of the first metal sheet, and the fifth and sixth grooves are disposed on both sides of the second metal sheet.

4. The multi-zero independently adjustable high roll-off dual-pass filter based on 3D CRLH according to claim 3, characterized in that, The first three-dimensional metal structure further includes: A third metal sheet disposed above the first metal sheet; A fourth metal sheet connected below the first metal sheet; A fifth, sixth, and seventh metal sheet are spaced apart below the first metal sheet; An eighth metal sheet is disposed above the second metal sheet; A ninth metal sheet connected below the second metal sheet; The tenth, eleventh, and twelfth metal sheets are spaced below the second metal sheet.

5. The multi-zero independently adjustable high roll-off dual-pass filter based on 3D CRLH according to claim 4, characterized in that, The first three-dimensional metal structure further includes: The seventh and eighth grooves are formed within the first metal layer; The thirteenth and fourteenth metal sheets are spaced apart within the seventh groove; The fifteenth, sixteenth, seventeenth, eighteenth, nineteenth, twentieth, and twenty-first metal sheets are disposed in the eighth groove; the sixteenth, seventeenth, nineteenth, twentieth, and twenty-first metal sheets are arranged at predetermined intervals along the length of the eighth groove.

6. The multi-zero independently adjustable high roll-off dual-pass filter based on 3D CRLH according to claim 1, characterized in that, The second three-dimensional metal structure includes: The ninth, tenth, eleventh, and twelfth grooves are etched into the second metal layer; The twenty-second and twenty-third metal sheets are spaced apart within the ninth groove; The twenty-fourth and twenty-fifth metal sheets are spaced apart within the tenth groove; The 26th and 27th metal sheets are disposed in the 11th groove, and the 26th and 27th metal sheets are arranged at intervals in both the length and width directions of the 11th groove. The twenty-eighth, twenty-ninth, thirtieth, thirty-first, thirty-second, and thirty-third metal sheets are arranged at predetermined intervals within the twelfth groove.

7. The multi-zero independently adjustable high roll-off dual-pass filter based on 3D CRLH according to claim 1, characterized in that, The resonant cavity is a QMSIW resonant cavity.

8. The multi-zero independently adjustable high roll-off dual-pass filter based on 3D CRLH according to claim 1, characterized in that, The first metal layer, the second metal layer, and the first metal conductor pillar are all made of copper.

9. The multi-zero independently adjustable high roll-off dual-pass filter based on 3D CRLH according to claim 4, characterized in that, In the first three-dimensional metal structure, the fifth, sixth, seventh, tenth, eleventh and twelfth metal sheets arranged at intervals form a three-dimensional spiral inductor structure.

10. The multi-zero independently adjustable high roll-off dual-pass filter based on 3D CRLH according to claim 5, characterized in that, The thirteenth and fourteenth metal sheets constitute the first three-dimensional capacitor unit; The second three-dimensional capacitor unit is composed of the fifteenth metal sheet, the sixteenth metal sheet, the seventeenth metal sheet, the eighteenth metal sheet, the nineteenth metal sheet, the twentieth metal sheet, and the twenty-first metal sheet.

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