Photovoltaic cell manufacturing method and processing equipment

Abstract

The invention discloses a photovoltaic cell manufacturing method and processing equipment, the processing equipment comprises a base shell, a liquid conveying module and an oxidation generation module, the photovoltaic cell manufacturing method comprises the following steps: placing a photovoltaic cell on a bearing frame module, controlling the liquid conveying module to be conducted and conveying a protection liquid to a reaction cavity, after the liquid level of the protection liquid reaches the protection position, the liquid conveying module is controlled to be closed, and the liquid level of the protection liquid is higher than the second surface of the photovoltaic cell and lower than the first surface of the photovoltaic cell; controlling an oxidation generation module to output oxidizing gas into the reaction cavity, wherein the oxidizing gas oxidizes the first surface of the photovoltaic cell so as to generate an oxidation mask on the first surface of the photovoltaic cell; the photovoltaic cell is taken out, polishing treatment or texturing treatment is conducted on the second surface of the photovoltaic cell, the photovoltaic cell surface treatment process is optimized, and the equipment cost and the operation cost are reduced.

Description

Technical Field

[0001] This invention relates to the field of photovoltaic cell manufacturing technology, and in particular to a method for manufacturing photovoltaic cells and processing equipment. Background Technology

[0002] With the rapid development of new energy technologies, photovoltaic cells, as the core components for solar energy utilization, have always been a key focus of the industry in terms of conversion efficiency and production cost. In the manufacturing process of photovoltaic cells, surface treatment technology plays a decisive role in the photoelectric performance of the cells.

[0003] In the manufacturing process of photovoltaic cells, different microstructures are usually formed on the front and back sides of the silicon wafer to achieve better passivation and light trapping effects. A common microstructure is to prepare a pyramid-like textured surface with high light trapping effect on the front side of the silicon wafer, while preparing a polished surface with high reflection on the back side. Therefore, the front (light-receiving surface) and the back (non-light-receiving surface) need to be processed in steps.

[0004] During the double-sided fabrication of silicon wafers, there is a high risk of cross-contamination between the two sides. If one side is polished or texturized first (usually using a chemical solution etching process), the other side will be directly exposed to the etching solution. This can easily lead to surface structural damage due to solution penetration or residue (such as corrosion of the antireflection layer or contamination of the emitter doped region), thereby reducing the photoelectric conversion efficiency of the cell. If an oxide mask is generated on the other side first, an oxidizing gas needs to be introduced first. The oxidizing gas will come into contact with one side, causing an oxide mask to be generated on that side as well, which is not conducive to subsequent polishing or texturizing processes.

[0005] Therefore, most of the equipment used for generating oxide masks on silicon wafers now employs complex tubular or plate-type processing equipment to tightly shield both sides of the silicon wafer. This process is complex and has high operating costs. Summary of the Invention

[0006] This invention aims to at least solve one of the technical problems existing in the prior art. To this end, this invention proposes a method and processing equipment for manufacturing photovoltaic cells, optimizing the surface treatment process of photovoltaic cells, and reducing equipment costs and operating expenses.

[0007] A method for manufacturing a photovoltaic cell according to a first aspect of the present invention is applied to a processing equipment. The processing equipment includes a substrate, a liquid infusion module, and an oxidation generation module. The substrate has a reaction chamber, and a support frame module for placing photovoltaic cells is disposed within the reaction chamber. The liquid infusion module is connected to both the reaction chamber and a liquid supply source, and the oxidation generation module is connected to the reaction chamber. The photovoltaic cell manufacturing method includes: placing the photovoltaic cells on the support frame module, wherein the first surface of the photovoltaic cells faces upward and the second surface of the photovoltaic cells faces downward; controlling the liquid infusion module to conduct and protecting... The protective liquid is transferred to the reaction chamber until the liquid level reaches the protection position, at which point the liquid delivery module is shut off. At the protection position, the liquid level of the protective liquid is higher than the second surface of the photovoltaic cell to submerge the second surface of the photovoltaic cell, and lower than the first surface of the photovoltaic cell to expose the first surface of the photovoltaic cell. The oxidation generation module is controlled to output oxidizing gas into the reaction chamber, and the oxidizing gas oxidizes the first surface of the photovoltaic cell to generate an oxide mask on the first surface of the photovoltaic cell. The photovoltaic cell is then removed, and the second surface of the photovoltaic cell is polished or texturized.

[0008] A method for manufacturing photovoltaic cells according to an embodiment of the present invention has at least the following beneficial effects: This invention discloses a photovoltaic cell manufacturing method. The photovoltaic cell is placed on a support frame module, and a protective liquid is introduced into the reaction chamber. As the level of the protective liquid rises, it becomes higher than the second surface of the photovoltaic cell, submerging it. Simultaneously, the level of the protective liquid must remain below the first surface of the photovoltaic cell to expose it. At this point, an oxidation generation module outputs oxidizing gas into the reaction chamber. The oxidizing gas oxidizes the first surface of the photovoltaic cell, forming an oxide mask. Due to the immersion protection of the protective liquid, the oxidizing gas does not react with the second surface of the photovoltaic cell. After the oxide mask is formed on the first surface, the photovoltaic cell can be removed for subsequent polishing or texturing. The overall process is simpler and more efficient. This design optimizes the photovoltaic cell surface treatment process, reducing equipment costs and operating expenses.

[0009] According to some embodiments of the present invention, the oxidation of the first surface of the photovoltaic cell by the oxidizing gas includes: continuously outputting the oxidizing gas so that the concentration of the oxidizing gas in the reaction chamber reaches the reaction concentration threshold; maintaining the concentration of the oxidizing gas in the reaction chamber at the reaction concentration threshold and maintaining it for a time that reaches the reaction time threshold; and discharging the oxidizing gas.

[0010] According to some embodiments of the present invention, the oxidizing gas is ozone, the reaction concentration threshold is greater than 40 ppm, and the reaction time threshold is greater than 30 s.

[0011] According to some embodiments of the present invention, between the discharge of oxidizing gas and the removal of the photovoltaic cell, the process further includes: when the oxidizing gas is discharged so that the concentration of the oxidizing gas in the reaction chamber decreases to a safe concentration threshold; controlling the liquid delivery module to be turned on and returning the protective liquid to the liquid supply source or discharging it so that the second surface of the photovoltaic cell is exposed.

[0012] According to a second aspect of the present invention, the processing equipment includes a base shell, a support frame module, a liquid delivery module, and an oxidation generation module. The base shell has a reaction chamber, the support frame module is located in the reaction chamber and is used to place photovoltaic cells, the liquid delivery module is connected to the reaction chamber and a liquid supply source, and the oxidation generation module is connected to the reaction chamber. The processing equipment is used to perform the photovoltaic cell manufacturing method disclosed in any of the above embodiments.

[0013] The processing equipment according to embodiments of the present invention has at least the following beneficial effects: The processing equipment of the present invention performs the photovoltaic cell manufacturing method disclosed in any of the above embodiments, optimizes the surface treatment process of photovoltaic cells, and reduces equipment costs and operating expenses.

[0014] According to some embodiments of the present invention, the support frame module includes two lifting frame assemblies and at least one support frame assembly, each pair of support frame assemblies being arranged in a detection configuration, the lifting frame assemblies being located at opposite ends of the arrangement direction of each support frame assembly, the lifting frame assemblies being capable of descending such that the top end of the lifting frame assemblies is on the same plane as the top end of each support frame assembly, and the lifting frame assemblies being capable of rising such that they are above the plane containing the top end of each support frame assembly.

[0015] According to some embodiments of the present invention, the lifting frame assembly includes a lifting mechanism and a first bearing roller. The lifting mechanism is disposed on the base shell, the first bearing roller is arranged laterally, and the lifting mechanism is rotatably connected to the first bearing roller.

[0016] According to some embodiments of the present invention, the support assembly includes a second support roller, the second support roller being arranged laterally, and both ends of the second support roller being rotatably disposed with respect to the inner wall surface of the reaction chamber.

[0017] According to some embodiments of the present invention, the output end of the oxidation generation module is located above the support frame module.

[0018] According to some embodiments of the present invention, the infusion module includes a first liquid pump, a first solenoid valve, a second liquid pump, and a second solenoid valve. The first liquid pump and the first solenoid valve are connected to form at least a partial liquid supply branch, and the second liquid pump and the second solenoid valve are connected to form at least a partial liquid discharge branch. The first end of the liquid supply branch is connected to a liquid supply source, the last end of the liquid supply branch is connected to a reaction chamber, and the first end of the liquid discharge branch is connected to the reaction chamber.

[0019] Additional aspects and advantages of the invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0020] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a cross-sectional view of one embodiment of the processing equipment of the present invention; Figure 2 This is a first flowchart of one embodiment of the photovoltaic cell manufacturing method of the present invention; Figure 3 This is a second flowchart of one embodiment of the photovoltaic cell manufacturing method of the present invention.

[0021] Figure label: Base shell 100; reaction chamber 110; support frame module 200; lifting frame assembly 210; lifting mechanism 211; first support roller 212; support frame assembly 220; second support roller 221; infusion module 300; oxidation generation module 400. Detailed Implementation

[0022] Embodiments of the present invention are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0023] In the description of this invention, it should be understood that the orientation descriptions, such as the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer", indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limiting this invention.

[0024] In the description of this invention, "several" means one or more, "more than" means two or more, "greater than," "less than," and "exceeding" are understood to exclude the stated number, while "above," "below," and "within" are understood to include the stated number. The use of "first" and "second" in the description is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the number of indicated technical features, or implicitly indicating the order of the indicated technical features.

[0025] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0026] like Figure 1 , 2 As shown, a photovoltaic cell manufacturing method according to a first aspect of the present invention is applied to a processing equipment. The processing equipment includes a base shell 100, a liquid infusion module 300, and an oxidation generation module 400. The base shell 100 has a reaction chamber 110. The base shell 100 is provided with a support frame module 200 for placing photovoltaic cells in the reaction chamber 110. The liquid infusion module 300 is connected to the reaction chamber 110 and a liquid supply source, respectively. The oxidation generation module 400 is connected to the reaction chamber 110.

[0027] The base shell 100 can be made of resin material or sheet metal. The base shell 100 has a placement port that can place photovoltaic cells (silicon wafers) on the support frame module 200. For example, the base shell 100 can include a bottom shell and a cover. The bottom shell has a groove, and the cover is placed on the bottom shell to form a relatively sealed reaction chamber 110. There is a sealing ring between the outer peripheral wall of the cover and the inner wall of the bottom shell. The sealing ring can abut against the cover and the bottom shell to prevent the leakage of oxidizing gas.

[0028] The method for manufacturing photovoltaic cells includes: S510. Place the photovoltaic cell on the support frame module 200, wherein the first surface of the photovoltaic cell faces upward and the second surface of the photovoltaic cell faces downward. S520, control the infusion module 300 to be turned on and transmit the protective liquid to the reaction chamber 110 until the liquid level of the protective liquid reaches the protection position, then control the infusion module 300 to be turned off. At the protection position, the liquid level of the protective liquid is higher than the second surface of the photovoltaic cell to submerge the second surface of the photovoltaic cell, and the liquid level of the protective liquid is lower than the first surface of the photovoltaic cell to expose the first surface of the photovoltaic cell. S530, the oxidation generation module 400 outputs oxidation gas into the reaction chamber 110, and the oxidation gas oxidizes the first surface of the photovoltaic cell to generate an oxidation mask on the first surface of the photovoltaic cell. S540. Remove the photovoltaic cell and polish or texturize the second surface of the photovoltaic cell.

[0029] It is understood that a control module can be installed on the processing equipment. The control module is connected to the infusion module 300 and the oxidation generation module 400 respectively to control the infusion module 300 and the oxidation generation module 400 to perform corresponding actions. The control module may include an MCU or CPU and its auxiliary circuits. In step S520, the top surface of the support frame module 200 can remain relatively stationary. The control module controls the infusion module 300 to conduct to input a fixed flow rate of protective liquid into the reaction chamber 110, so that the liquid level of the protective liquid reaches the protection position. Of course, a liquid level sensor can also be installed in the reaction chamber 110 to detect the liquid level height of the protective liquid. A gas concentration sensor can also be installed in the reaction chamber 110 to detect the concentration of oxidizing gas, so that the quality of the oxide mask formed on the first surface of the photovoltaic cell is more stable and reliable. The type of gas concentration sensor is adapted to the selection of oxidizing gas. Specifically, the protective liquid can be water or other liquids that can protect the second surface of the photovoltaic cell from oxidation.

[0030] The present invention discloses a photovoltaic cell manufacturing method in which photovoltaic cells are placed on a support frame module 200, and a protective liquid is introduced into a reaction chamber 110. As the level of the protective liquid rises, it will be higher than the second surface of the photovoltaic cell to submerge the second surface. At the same time, it is necessary to ensure that the level of the protective liquid is lower than the first surface of the photovoltaic cell to expose the first surface. At this time, the oxidation generation module 400 outputs oxidizing gas into the reaction chamber 110. The oxidizing gas oxidizes the first surface of the photovoltaic cell to generate an oxide mask on the first surface. Due to the immersion protection of the protective liquid, the oxidizing gas will not react with the second surface of the photovoltaic cell. After the oxide mask is generated on the first surface of the photovoltaic cell, the photovoltaic cell can be removed for subsequent polishing or texturing. The overall process is simpler and more efficient. This design optimizes the photovoltaic cell surface treatment process and reduces equipment costs and operating expenses.

[0031] In some embodiments of the present invention, such as Figure 3 As shown, the oxidation of the first surface of the photovoltaic cell by the oxidizing gas includes: S610, continuously output oxidizing gas so that the concentration of oxidizing gas in reaction chamber 110 reaches the reaction concentration threshold; S620, Maintain the concentration of oxidizing gas in reaction chamber 110 at the reaction concentration threshold and maintain it for a time equal to the reaction time threshold; S630, emitting oxidizing gases.

[0032] Understandably, in order to ensure the oxidation effect, it is necessary to continuously output oxidizing gas into the reaction chamber 110. Once the concentration of the oxidizing gas reaches the reaction concentration threshold, the concentration of the oxidizing gas is continuously maintained. During the oxidation reaction, the oxidizing gas is consumed. Therefore, it is necessary to control the oxidation generation module 400 to continuously supply oxidizing gas to ensure that the concentration of the oxidizing gas in the reaction chamber 110 is maintained at the reaction concentration threshold, so that the oxidation process proceeds stably. The oxidizing gas is discharged after the maintenance time reaches the reaction time threshold.

[0033] The oxidation generation module 400 can be adapted to different oxidizing gases, specifically, it can be a chemical reaction generation device, an electrolysis generation device, or a pyrolysis generation device.

[0034] Specifically, the oxidizing gas can be ozone. Ozone reacts with the surface of the photovoltaic cell to form silicon oxide. In steps S610 and S620, the reaction concentration threshold is greater than 40 ppm and the reaction time threshold is greater than 30 s. Specifically, the reaction concentration threshold and the reaction time threshold can be set by the user according to the specific parameters of the photovoltaic cell, the specific thickness of the oxide mask, and other actual conditions. In step S630, the oxidizing gas can be discharged by opening the base shell 100, or the oxidizing gas can be extracted to the recovery container by a vacuum pump.

[0035] Oxidizing gases can also be other gases that can form an oxide mask on the surface of photovoltaic cells, such as nitrogen, which reacts with the surface of photovoltaic cells to form silicon nitride.

[0036] In some embodiments of the present invention, the process further includes: between the venting of the oxidizing gas and the removal of the photovoltaic cell. S640, When the oxidizing gas is discharged so that the concentration of the oxidizing gas in the reaction chamber 110 drops to a safe concentration threshold; S650 controls the liquid infusion module 300 to turn on and return the protective liquid to the liquid supply source or discharge it so that the second surface of the photovoltaic cell is exposed.

[0037] It is understandable that if the oxidizing gas concentration exceeds the safe concentration threshold, the second surface of the photovoltaic cell will be exposed. The oxidizing gas will react with the substances on the second surface of the photovoltaic cell, and even in a short period of time, there is a possibility that a thin oxide mask will form on the second surface of the photovoltaic cell. Therefore, this design needs to reduce the concentration of the oxidizing gas to the safe concentration threshold first, and then control the liquid infusion module 300 to conduct, thereby lowering the level of the protective liquid. Specifically, the safe concentration threshold can be set to 15 ppm, which can be set by the user according to the actual situation.

[0038] Processing equipment according to a second aspect embodiment of the present invention, such as Figure 1 As shown, the device includes a base shell 100, a support frame module 200, a liquid infusion module 300, and an oxidation generation module 400. The base shell 100 has a reaction chamber 110. The support frame module 200 is located in the reaction chamber 110 and is used to place photovoltaic cells. The liquid infusion module 300 is connected to the reaction chamber 110 and a liquid supply source. The oxidation generation module 400 is connected to the reaction chamber 110. The processing equipment is used to perform the photovoltaic cell manufacturing method disclosed in any of the above embodiments.

[0039] The base shell 100, the support frame module 200, the infusion module 300, and the oxidation generation module 400 can be components disclosed in the above embodiments, which will not be described in detail here.

[0040] The processing equipment of the present invention performs the photovoltaic cell manufacturing method disclosed in any of the above embodiments, optimizes the surface treatment process of photovoltaic cells, and reduces equipment costs and operating expenses.

[0041] In some embodiments of the present invention, the support frame module 200 includes two lifting frame assemblies 210 and at least one support frame assembly 220, with each pair of support frame assemblies 220 being arranged in a detection configuration. The lifting frame assemblies 210 are located at opposite ends of the arrangement direction of each support frame assembly 220. The lifting frame assemblies 210 can be lowered such that the top of the lifting frame assemblies 210 is on the same plane as the top of each support frame assembly 220, and the lifting frame assemblies 210 can be raised above the plane containing the tops of each support frame assembly 220.

[0042] Users can first place the photovoltaic cells on the lifting frame assemblies 210 at both ends. The two lifting frame assemblies 210 can be lowered synchronously so that the top of the lifting frame assemblies 210 is lowered to the top of the support frame assembly 220 and is on the same plane. After the oxidation mask is formed, in step S650, the two lifting frame assemblies 210 can lift the photovoltaic cells to facilitate their removal. During the oxidation process, due to the support of the support frame assembly 220, the photovoltaic cells are less likely to warp on both sides and be concave in the middle.

[0043] In some embodiments of the present invention, the lifting frame assembly 210 includes a lifting mechanism 211 and a first bearing roller 212. The lifting mechanism 211 is disposed on the base shell 100, the first bearing roller 212 is arranged laterally, and the lifting mechanism 211 is rotatably connected to the first bearing roller 212.

[0044] The surface of the photovoltaic cell may have slight irregularities. The first support roller 212 is rotatably mounted on the lifting mechanism 211, so that when the photovoltaic cell is placed on the first support roller 212, the rotation of the first support roller 212 can adapt to and fit the second surface of the photovoltaic cell, preventing hard pressure. Specifically, the two lifting frame assemblies 210 are arranged along the length direction of the photovoltaic cell, while the first support roller 212 is arranged along the width direction of the photovoltaic cell, and both ends of the first support roller 212 are at the same horizontal height to ensure that the photovoltaic cell is placed flat. Specifically, the lifting mechanism 211 may include a linear cylinder, which is located at the bottom of the base shell 100. The drive rod of the linear cylinder passes through the base shell 100, and a liquid sealing head is provided at the through-hole position to prevent liquid leakage. The end of the drive rod is connected to the first support roller 212.

[0045] In some embodiments of the present invention, the support frame assembly 220 includes a second support roller 221, which is arranged laterally and its two ends are rotatably arranged with respect to the inner wall surface of the reaction chamber 110, so as to ensure that the second support roller 221 can be close to the surface of the photovoltaic cell and that the adjacent second support roller 221 can allow the protective liquid to pass through, thereby maximizing the protection of the second surface of the photovoltaic cell.

[0046] In some embodiments of the present invention, such as Figure 1 As shown, the output end of the oxidation generation module 400 is located above the support frame module 200. The oxidizing gas output from the output end of the oxidation generation module 400 can be deposited downwards by the thrust or gravity of the output end of the oxidation generation module 400, and directly act on the first surface of the photovoltaic cell on the support frame module 200.

[0047] In some embodiments of the present invention, the infusion module 300 includes a first liquid pump, a first solenoid valve, a second liquid pump, and a second solenoid valve. The first liquid pump and the first solenoid valve are connected to form at least a partial liquid supply branch, and the second liquid pump and the second solenoid valve are connected to form at least a partial liquid discharge branch. The first end of the liquid supply branch is connected to a liquid supply source, the last end of the liquid supply branch is connected to a reaction chamber 110, and the first end of the liquid discharge branch is connected to the reaction chamber 110.

[0048] When protective liquid needs to be introduced into the reaction chamber 110, the first solenoid valve is opened, the second solenoid valve is closed, and the first liquid pump is started, so that the protective liquid can enter the reaction chamber 110. The control module can accurately control the liquid level of the protective liquid by controlling the start and stop of the first liquid pump. When protective liquid needs to be discharged, the first solenoid valve is closed, the second solenoid valve is opened, and the second liquid pump is started, so that the protective liquid in the reaction chamber 110 can be discharged.

[0049] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0050] Although embodiments of the invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A method for manufacturing photovoltaic cells, applied to a processing equipment, the processing equipment comprising a substrate, a liquid delivery module, and an oxidation generation module, wherein the substrate has a reaction chamber, and a support frame module for placing photovoltaic cells is disposed within the reaction chamber, the liquid delivery module is connected to both the reaction chamber and a liquid supply source, and the oxidation generation module is connected to the reaction chamber, characterized in that... The method for manufacturing photovoltaic cells includes: The photovoltaic cells are placed on the support frame module, with the first surface of the photovoltaic cells facing upwards and the second surface of the photovoltaic cells facing downwards. The infusion module is controlled to be turned on and the protective liquid is transferred to the reaction chamber. The infusion module is then turned off when the level of the protective liquid reaches the protection position. At the protection position, the level of the protective liquid is higher than the second surface of the photovoltaic cell to submerge the second surface of the photovoltaic cell, and the level of the protective liquid is lower than the first surface of the photovoltaic cell to expose the first surface of the photovoltaic cell. The oxidation generation module is controlled to output oxidizing gas into the reaction chamber, and the oxidizing gas oxidizes the first surface of the photovoltaic cell to generate an oxide mask on the first surface of the photovoltaic cell. Remove the photovoltaic cell and polish or texturize its second surface.

2. The method for manufacturing a photovoltaic cell according to claim 1, characterized in that, The oxidation of the first surface of the photovoltaic cell by the oxidizing gas includes: Oxidizing gas is continuously output so that the concentration of oxidizing gas in the reaction chamber reaches the reaction concentration threshold. The concentration of the oxidizing gas in the reaction chamber is maintained at the reaction concentration threshold and the maintenance time reaches the reaction time threshold. Oxidizing gases are released.

3. The method for manufacturing a photovoltaic cell according to claim 2, characterized in that, The oxidizing gas is ozone, the reaction concentration threshold is greater than 40 ppm, and the reaction time threshold is greater than 30 s.

4. A method for manufacturing a photovoltaic cell according to claim 2, characterized in that, Between the discharge of oxidizing gas and the removal of the photovoltaic cell, the following is also included: When the oxidizing gas is discharged so that the concentration of the oxidizing gas in the reaction chamber drops to a safe concentration threshold; Control the infusion module to conduct and return the protective fluid to the supply source or discharge it so that the second surface of the photovoltaic cell is exposed.

5. A processing equipment, characterized in that, The device includes a base shell, a support frame module, a liquid infusion module, and an oxidation generation module. The base shell has a reaction chamber, the support frame module is located in the reaction chamber and is used to place photovoltaic cells, the liquid infusion module is connected to the reaction chamber and a liquid supply source, and the oxidation generation module is connected to the reaction chamber. The processing equipment is used to perform the photovoltaic cell manufacturing method as described in any one of claims 1 to 4.

6. The processing equipment according to claim 5, characterized in that, The support frame module includes two lifting frame assemblies and at least one support frame assembly. The two support frame assemblies are arranged in a detection configuration. The lifting frame assemblies are located at opposite ends of the arrangement direction of the support frame assemblies. The lifting frame assemblies can descend so that the top of the lifting frame assemblies is on the same plane as the top of the support frame assemblies. The lifting frame assemblies can rise so that they are above the plane where the top of the support frame assemblies are located.

7. The processing equipment according to claim 6, characterized in that, The lifting frame assembly includes a lifting mechanism and a first bearing roller. The lifting mechanism is disposed on the base shell, and the first bearing roller is arranged laterally and the lifting mechanism is rotatably connected to the first bearing roller.

8. The processing equipment according to claim 6, characterized in that, The support frame assembly includes a second support roller, which is arranged laterally and its two ends are rotatably arranged with respect to the inner wall surface of the reaction chamber.

9. The processing equipment according to claim 5, characterized in that, The output end of the oxidation generation module is located above the support frame module.

10. The processing equipment according to claim 5, characterized in that, The infusion module includes a first liquid pump, a first solenoid valve, a second liquid pump, and a second solenoid valve. The first liquid pump and the first solenoid valve are connected to form at least a partial liquid supply branch. The second liquid pump and the second solenoid valve are connected to form at least a partial liquid discharge branch. The first end of the liquid supply branch is connected to a liquid supply source, the last end of the liquid supply branch is connected to a reaction chamber, and the first end of the liquid discharge branch is connected to the reaction chamber.

Images