Coaxial window inner conductor cooling structure

By setting an inner cavity inside the conductor of the vacuum microwave tube and cooperating with the liquid cooling component to construct a cooling circulation path, the problem of liquid cooling of the conductor inside the coaxial window is solved, achieving efficient heat dissipation and wide bandwidth matching, and improving peak power and structural reliability.

CN121812432APending Publication Date: 2026-04-07BEIJING VACUUM ELECTRONIC TECH RES INST (THE 12TH RES INST OF CHINA ELECTRONICS TECH CORP)
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2025-11-17
Publication Date
2026-04-07

AI Technical Summary

Technical Problem

In existing vacuum microwave tubes, the conductor inside the coaxial window is difficult to directly liquid cool, resulting in low average power of the output coaxial window and easy breakage of the window. Furthermore, the narrow matching bandwidth of the T-bar structure and the enhanced high-frequency electric field limit the output bandwidth and peak power of the vacuum microwave tube.

Method used

A coaxial window inner conductor cooling structure is designed. By setting an inner cavity inside the inner conductor and cooperating with liquid cooling components and waveguide coaxial conversion structure, a cooling circulation path is constructed, allowing the coolant to flow directly through the interior of the inner conductor, thereby achieving efficient and active cooling.

Benefits of technology

It significantly improves the heat dissipation efficiency of the inner conductor, reduces the operating temperature, reduces the risk of window shattering, and improves structural reliability and service life, while maintaining excellent impedance matching and high peak power capacity over a wide frequency band.

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Abstract

A coaxial window inner conductor cooling structure provided by the present invention comprises a coaxial window, the coaxial window comprises an annular window sheet, an outer conductor sealed on the outer peripheral surface of the window sheet and an inner conductor sealed on the inner peripheral surface of the window sheet, and the inner conductor comprises an inner cavity; the output waveguide is vertically communicated with the coaxial window; the waveguide coaxial conversion structure is connected with the inner conductor and the output waveguide; the waveguide coaxial conversion structure comprises a channel communicated with the inner cavity; the liquid cooling assembly comprises a matching piece arranged on the outer side of the output waveguide and a hollow liquid cooling pipe extending into the inner cavity in the axial direction of the coaxial window; the matching piece is provided with a liquid inlet and a liquid outlet; the output waveguide is provided with a communicating hole; one end of the liquid cooling pipe extends into the inner cavity and is provided with a liquid outlet hole communicated with the inner cavity, and the other end of the liquid cooling pipe penetrates through the channel and the communication hole and then extends into the matching piece to be communicated with the liquid inlet, so that the interior of the liquid cooling pipe, the inner cavity and the channel jointly form a cooling circulation path.
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Description

Technical Field

[0001] This invention relates to the field of vacuum microwave device technology. More specifically, it relates to a coaxial window inner conductor cooling structure. Background Technology

[0002] In existing vacuum microwave tubes, the inner conductor of the coaxial window must be at a different potential than the outer conductor, making direct liquid cooling of the inner conductor difficult. This results in low average power of the output coaxial window and a high risk of cracking at the ceramic seal of the coaxial window and inner conductor. While existing methods using a T-bar structure to connect the inner conductor for liquid cooling can partially improve heat dissipation, the narrow matching bandwidth and enhanced high-frequency electric field of the T-bar structure further limit the output bandwidth and peak power of the vacuum microwave tube. Summary of the Invention

[0003] The purpose of this invention is to provide a cooling structure for the inner conductor of a coaxial window to solve at least one of the above-mentioned technical problems.

[0004] To achieve the above objectives, the present invention adopts the following technical solution: This invention provides a coaxial window inner conductor cooling structure, comprising: A coaxial window, comprising an annular window pane, an outer conductor sealed to the outer circumferential surface of the window pane, and an inner conductor sealed to the inner circumferential surface of the window pane, wherein the inner conductor includes an inner cavity; An output waveguide perpendicularly connected to the coaxial window; A waveguide coaxial conversion structure connected to both the inner conductor and the output waveguide, the waveguide coaxial conversion structure including a channel communicating with the inner cavity; The liquid cooling assembly includes a fitting disposed on the outside of the output waveguide and a hollow liquid cooling tube extending axially into the inner cavity along the coaxial window; the fitting is provided with a liquid inlet and a liquid outlet; the output waveguide is provided with a connecting hole; one end of the liquid cooling tube extends into the inner cavity and is provided with a liquid outlet communicating with the inner cavity, and the other end extends through the channel and the connecting hole and extends into the fitting to communicate with the liquid inlet, so that the interior of the liquid cooling tube, the inner cavity and the channel together form a cooling circulation path.

[0005] In a preferred embodiment, the axis of the coaxial window is perpendicular to the axis of the output waveguide; the channel passes through the coaxial conversion structure of the waveguide along the axis of the coaxial window; the mating component includes a mating cavity, and the liquid outlet communicates with the mating cavity; the top end of the channel communicates with the inner cavity, and the bottom end communicates with the mating cavity through a connecting hole; one end of the liquid cooling tube extending into the inner cavity is fixed to the inner conductor, and the end of the liquid cooling tube located in the inner cavity includes several liquid outlet holes penetrating the circumferential sidewall of the liquid cooling tube.

[0006] A preferred embodiment is that the waveguide coaxial conversion structure is a door button conversion structure; the door button conversion structure includes a main body, and the channel passes through the main body along the coaxial window axis; the bottom of the inner conductor has an opening communicating with the inner cavity; the bottom annular surface and side surface of the main body are fitted and fixed to the inner wall surface of the output waveguide, and the top outer peripheral surface of the main body is fitted and fixed to the inner peripheral surface of the opening of the inner conductor; the channel is coaxially arranged with the inner conductor.

[0007] A preferred embodiment is that the inner conductor includes a first structural portion located above the window, a second structural portion located below the window, and a connecting portion penetrating the window and fixed to it; the connecting portion is connected to the first and second structural portions at both ends along the coaxial window axis, respectively; the second structural portion is connected to the waveguide coaxial conversion structure; an assembly groove communicating with the inner cavity is formed on the first structural portion, and one end of the liquid cooling pipe is assembled in the assembly groove; a first cavity is formed inside the connecting portion, and a second cavity is formed inside the second structural portion; the first cavity and the second cavity communicate to form an inner cavity; the second cavity communicates with the channel.

[0008] In a preferred embodiment, the inner diameter of the connecting portion is larger than the outer diameter of the liquid cooling pipe, and the diameters of both the first structural portion and the second structural portion are larger than the outer diameter of the connecting portion.

[0009] A preferred embodiment is that the liquid outlet holes are evenly distributed along the circumference of the liquid cooling pipe; and in the axial direction of the coaxial window, the height of the liquid outlet holes is higher than that of the window plate.

[0010] In a preferred embodiment, the axes of the liquid inlet and the liquid outlet are both arranged in a horizontal direction and are parallel to the axis of the output waveguide.

[0011] A preferred embodiment is that, along the axial direction of the coaxial window, the outlet is positioned at a higher height than the inlet.

[0012] A preferred embodiment is that an outer conductor liquid cooling structure is provided on the outer peripheral surface of the outer conductor.

[0013] The present invention also provides a vacuum microwave tube, including the coaxial window inner conductor cooling structure as described above.

[0014] The beneficial effects of this invention are as follows: This invention provides a coaxial window inner conductor cooling structure including a coaxial window, the coaxial window comprising an annular window plate, an outer conductor sealed to the outer circumferential surface of the window plate, and an inner conductor sealed to the inner circumferential surface of the window plate, the inner conductor including an inner cavity; an output waveguide perpendicularly connected to the coaxial window; a waveguide coaxial conversion structure connected to both the inner conductor and the output waveguide, the waveguide coaxial conversion structure including a channel communicating with the inner cavity; and a liquid cooling assembly, the liquid cooling assembly including a fitting disposed outside the output waveguide and a hollow liquid cooling tube extending axially into the inner cavity along the coaxial window; the fitting having an inlet and an outlet; the output waveguide having a connecting hole; one end of the liquid cooling tube extending into the inner cavity and having an outlet communicating with the inner cavity, the other end passing through the channel and the connecting hole and extending into the fitting to communicate with the inlet, so that the interior of the liquid cooling tube, the inner cavity, and the channel together form a cooling circulation path. This invention can simultaneously achieve efficient heat dissipation, high peak power, and wide bandwidth matching. Specifically, this invention achieves direct, efficient, and active cooling of the inner conductor by setting up channels and liquid cooling components that cooperate with the inner cavity. The coolant flows directly through the heat source, greatly improving heat exchange efficiency and effectively removing the enormous heat generated under high average power, fundamentally solving the problem of inner conductor overheating and improving the average power output capability of the coaxial window. This invention's efficient direct cooling mechanism for the inner conductor significantly reduces the overall operating temperature of the inner conductor, especially greatly improving the temperature environment at the ceramic seal interface. This greatly reduces thermal stress caused by the mismatch in thermal expansion coefficients between the metal inner conductor and the ceramic window, fundamentally eliminating the main causes of window cracking and ceramic seal failure, and improving structural reliability and service life. This invention differs from traditional T-bar external cooling structures in that it integrates the cooling circulation path to form a highly efficient cooling path directly to the heat source, achieving an improvement from indirect conduction cooling to direct cooling of the inner conductor, significantly improving heat dissipation efficiency and average power capacity. In terms of electromagnetic performance, this invention minimizes disturbances to the electromagnetic field distribution inside the coaxial line and waveguide, avoiding the additional inductance and capacitance effects introduced by the T-bar structure due to periodic loads. This not only eliminates the risk of electric field concentration, but also helps to maintain excellent impedance matching over a wide frequency range, thus solving the problem of balancing high peak power and large operating bandwidth. At the same time, the overall structure of the present invention is more compact and reliable. Attached Figure Description

[0015] The specific embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.

[0016] Figure 1 This is a schematic diagram of the overall structure of the present invention. Detailed Implementation

[0017] Various exemplary embodiments of the present invention will now be described in detail with reference to the accompanying drawings. It should be noted that, unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps set forth in these embodiments do not limit the scope of the invention.

[0018] The following description of at least one exemplary embodiment is merely illustrative and is in no way intended to limit the invention or its application or use.

[0019] Technologies and equipment known to those skilled in the art may not be discussed in detail, but where appropriate, such technologies and equipment should be considered part of the specification.

[0020] In all the examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values.

[0021] It should be noted that similar labels and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0022] This invention provides a coaxial window inner conductor cooling structure, combined with Figure 1As shown, the coaxial window inner conductor cooling structure specifically includes: a coaxial window, comprising an annular window 11, an outer conductor 12 sealed to the outer circumferential surface of the window 11, and an inner conductor 13 sealed to the inner circumferential surface of the window 11, the inner conductor 13 including an inner cavity, and the window 11 specifically being a ceramic window 11; an output waveguide 2 perpendicularly connected to the coaxial window; the output waveguide 2 is a rectangular waveguide connected to the outer conductor 12; a waveguide coaxial conversion structure connected to both the inner conductor 13 and the output waveguide 2, the waveguide coaxial conversion structure including a channel 31 communicating with the inner cavity; and a liquid cooling assembly. The liquid cooling assembly includes a fitting 41 disposed on the outside of the output waveguide 2 and a hollow liquid cooling pipe 42 extending axially into the inner cavity along the coaxial window; the fitting 41 has a liquid inlet 411 and a liquid outlet 412. The output waveguide 2 has a connecting hole 21. One end of the liquid cooling pipe 42 extends into the inner cavity and has an outlet hole 421 communicating with the inner cavity. The other end passes through the channel 31 and the connecting hole 21 and extends into the fitting part 41, communicating with the inlet 411. This allows the interior of the liquid cooling pipe 42, the inner cavity, and the channel 41 to form a cooling circulation path. By utilizing the inner cavity of the inner conductor 13 as part of the cooling circulation path and communicating with the liquid cooling assembly, a cooling path directly reaching the core of the heat source is constructed. The coolant can flow directly through the interior of the inner conductor 13, where the heat generation is most severe, efficiently removing a large amount of heat. This fundamentally solves the problem of overheating of the inner conductor under high average power, resulting in a significant improvement in the average power output capability of the coaxial window. The inner cavity of the inner conductor 13, the channel 31 of the waveguide coaxial conversion structure, the connecting hole 21 on the output waveguide 2, the liquid cooling assembly, and the external coolant circulation device for communicating with the inlet and outlet together form a closed cooling circulation loop. This design integrates the liquid cooling component, inner conductor 13, and waveguide coaxial conversion structure into a compact whole with good mechanical stability. Simultaneously, the ceramic sealing interface between the inner conductor 13 and the ceramic window 11 maintains its original vacuum sealing function, significantly enhancing the overall reliability of the structure. Compared to external T-bar cooling structures, this invention effectively reduces interference with the electromagnetic field distribution within the coaxial line and waveguide. It avoids the problems of electric field concentration and impedance mismatch caused by introducing external cooling structures, ensuring the device's high peak power handling capability and wideband operating characteristics.

[0023] In the above embodiment, to balance bandwidth, the vacuum microwave tube output adopts a rectangular waveguide to coaxial conversion method, and the axis of the coaxial window is perpendicular to the axis of the output waveguide 2. The inner conductor 13, outer conductor 12, and window 11 are all coaxially arranged. The channel 31 passes through the waveguide coaxial conversion structure along the axis of the coaxial window. The mating component 41 includes a mating cavity 413, and the liquid outlet 412 communicates with the mating cavity 413. The top end of the channel 31 communicates with the inner cavity, and the bottom end communicates with the mating cavity 413 through a connecting hole 21 to achieve communication with the liquid outlet 412. The connecting hole 21 is formed on the bottom wall of the output waveguide 2, and the mating component 41 is fixed on the outer surface of the bottom wall of the output waveguide 2 and corresponds to the position of the connecting hole 21. One end of the liquid cooling tube 42 extending into the inner cavity is fixed to the inner conductor 13, and the end of the liquid cooling tube 42 located in the inner cavity includes several liquid outlet holes 421 penetrating the peripheral sidewall of the liquid cooling tube. The coolant enters the liquid cooling pipe 42 through the inlet 411 and is transported to the heat source core area inside the inner conductor 14 through the liquid cooling pipe 42. After flowing through the outlet hole 421 at the upper end of the liquid cooling pipe 42, the coolant enters the inner cavity and channel 31 and finally flows out through the outlet 412.

[0024] In one specific embodiment, the waveguide coaxial conversion structure is a gate-button conversion structure, which includes a main body 32, through which a channel 31 extends axially along the coaxial window. The bottom of the inner conductor 13 has an opening communicating with the inner cavity; this opening facilitates communication between the inner cavity and the channel 31. The bottom annular surface and side surfaces of the main body 32 are fitted and fixed to the inner wall surfaces (bottom inner surface and side inner surface) of the output waveguide 2, and the top outer peripheral surface of the main body 32 is fitted and fixed to the inner peripheral surface of the opening of the inner conductor 13; the channel 31 is coaxially arranged with the inner conductor 13. Through this arrangement, the inherent high power capacity and wide bandwidth characteristics of the gate-button conversion structure are utilized, and by integrating a cooling channel within it, the coolant is directly guided to the inner conductor 13. This integrates the excellent electromagnetic performance of the gate-button conversion structure with the cooling function of the inner conductor, enabling it to simultaneously support the high peak power, wide operating bandwidth, and high average power output of the microwave tube, thus solving the problem of achieving these simultaneously in traditional solutions. The door switch structure is welded to the inner conductor, thus isolating the vacuum environment inside the tube from the internal liquid cooling path.

[0025] In one specific embodiment, the inner conductor 13 includes a first structural portion 132 located above the window 11, a second structural portion 133 located below the window 11, and a connecting portion 134 penetrating the window 11 and fixed to it. The connecting portion 134 is connected to the first structural portion 132 and the second structural portion 133 at both ends along the coaxial window axis, respectively; the second structural portion 133 is connected to the waveguide coaxial conversion structure; the first structural portion 132 has an assembly groove communicating with the inner cavity, and the top end of the liquid cooling tube 42 is assembled in the assembly groove; a first cavity 135 is formed inside the connecting portion 134, and a second cavity 136 is formed inside the second structural portion 133; the first cavity 135 and the second cavity 136 communicate to form an inner cavity, the first cavity 135 communicating with the assembly groove, and the second cavity 136 communicating with the channel 31 through an opening. The upper end of the liquid cooling tube 42 extending into the first cavity 135 is assembled in the assembly groove on the first structural portion 132. The top end of the liquid cooling tube 42 is sealed, and the bottom end is open. Coolant enters the mating cavity through the inlet 411, flows into the inner cavity through the inlet channel inside the liquid cooling pipe 42, and is ejected from the outlet 421. It then flows through the first cavity 135 and the second cavity 136 into the channel 31, and finally exits through the outlet 412, forming a highly efficient cooling circulation path for the inner conductor. Furthermore, the inner diameter of the connecting part 134 is larger than the outer diameter of the liquid cooling pipe 42, and the diameters of the first structural part 132 and the second structural part 133 are both larger than the outer diameter of the connecting part 134. This configuration allows the coolant to flow directly through the area of ​​highest heat load on the inner conductor 13 (especially near the sealing area with the ceramic window), achieving highly efficient heat removal.

[0026] In one specific embodiment, the liquid outlet holes 421 are evenly distributed along the circumference of the liquid cooling pipe 42; in the axial direction of the coaxial window, the height of the liquid outlet holes 421 is higher than that of the ceramic window 11. The design of the liquid outlet holes 421 being higher than the ceramic window 11 ensures that the coolant can preferentially cool the critical hot zone—the sealing interface between the inner conductor 13 and the window 11—and avoids air accumulation at the top of the inner cavity, which would affect the cooling effect. The axes of the liquid inlet 411 and the liquid outlet 412 are both arranged horizontally and parallel to the axis of the output waveguide 2, allowing the external cooling pipes to be laid parallel to the vacuum microwave tube, greatly saving radial installation space and making the overall structure more compact and neat. In the axial direction of the coaxial window, the height of the liquid outlet 412 is higher than that of the liquid inlet 411.

[0027] In one specific embodiment, an outer conductor liquid cooling structure is provided on the outer peripheral surface of the outer conductor 12. Preferably, the outer conductor liquid cooling structure is an external cooling water jacket 5 surrounding the outer conductor, which includes a liquid cooling inlet 51 and a liquid cooling outlet 52. The addition of the outer conductor liquid cooling structure further improves the overall heat dissipation efficiency. During high-power operation of the vacuum microwave tube, the ohmic loss generated by microwaves on the inner surface of the outer conductor 12 significantly increases its temperature. The external cooling water jacket 5 injects coolant through the liquid cooling inlet 51, allowing it to continuously circulate within the flow channel surrounding the outer conductor 12, directly and efficiently removing the heat generated by the outer conductor wall. During operation, both the liquid cooling pipe 42 and the external cooling water jacket 5 are circulated with coolant, cooling the coaxial window and the sealing joint between the inner and outer conductors, ensuring stable operation of the coaxial window. By working in conjunction with the internal liquid cooling pathway of the inner conductor 13, a synergistic heat dissipation architecture is formed, achieving synchronous temperature control of the two core heat-generating components of the coaxial window (inner and outer conductors). Both the window and the sealing points of the inner and outer conductors receive excellent cooling, thus controlling the average operating temperature of the entire coaxial window to a lower and safer level, ensuring an increase in the average power capacity of the microwave tube. Compared to solutions that only liquid cool the outer conductor, the synergistic internal and external cooling structure of this invention reduces the temperature gradient of the coaxial window by at least 75%. Based on this, it is estimated that its average power capacity can reach more than four times that of the original solution. Compared to the traditional T-bar cooling structure, this invention uses a gate-switch structure to increase the operating bandwidth by more than 2.5 times and the peak power capacity by more than 1.7 times.

[0028] This invention also provides a vacuum microwave tube, including the coaxial window inner conductor cooling structure described above. This invention establishes a through-cavity within the inner conductor and utilizes a waveguide coaxial conversion structure to connect the inner cavity to the liquid cooling assembly, creating a coolant circulation path with inlet and outlet ports. The coolant directly cools the inner conductor by flowing through it, without interfering with the electromagnetic field distribution of the coaxial window, thus ensuring wideband matching characteristics and high peak power capacity. This systematically solves the core contradictions that have long constrained the performance of high-power vacuum microwave tubes—namely, the heat dissipation of the inner conductor and the risk of thermal stress on the window under high average power, as well as the limitations of traditional external cooling structures on peak power and bandwidth—ultimately achieving synergistic optimization of the aforementioned key performance characteristics.

[0029] In summary, this invention provides a coaxial window inner conductor cooling structure comprising a coaxial window, the coaxial window including an annular window plate, an outer conductor sealed to the outer circumferential surface of the window plate, and an inner conductor sealed to the inner circumferential surface of the window plate, the inner conductor including an inner cavity; an output waveguide perpendicularly connected to the coaxial window; a waveguide coaxial conversion structure connected to both the inner conductor and the output waveguide, the waveguide coaxial conversion structure including a channel communicating with the inner cavity; and a liquid cooling assembly, the liquid cooling assembly including a fitting component disposed outside the output waveguide and a hollow liquid cooling tube extending axially into the inner cavity along the coaxial window; the fitting component having a liquid inlet and a liquid outlet; the output waveguide having a connecting hole; one end of the liquid cooling tube extending into the inner cavity and having a liquid outlet communicating with the inner cavity, the other end passing through the channel and the connecting hole and extending into the fitting component communicating with the liquid inlet, so that the interior of the liquid cooling tube, the inner cavity, and the channel together form a cooling circulation path. This invention can simultaneously achieve efficient heat dissipation, high peak power, and wide bandwidth matching. Specifically, this invention achieves direct, efficient, and active cooling of the inner conductor by setting up channels and liquid cooling components that cooperate with the inner cavity. The coolant flows directly through the heat source, greatly improving heat exchange efficiency and effectively removing the enormous heat generated under high average power, fundamentally solving the problem of inner conductor overheating and improving the average power output capability of the coaxial window. This invention's efficient direct cooling mechanism for the inner conductor significantly reduces the overall operating temperature of the inner conductor, especially greatly improving the temperature environment at the ceramic seal interface. This greatly reduces thermal stress caused by the mismatch in thermal expansion coefficients between the metal inner conductor and the ceramic window, fundamentally eliminating the main causes of window cracking and ceramic seal failure, and improving structural reliability and service life. This invention differs from traditional T-bar external cooling structures in that it integrates the cooling circulation path to form a highly efficient cooling path directly to the heat source, achieving an improvement from indirect conduction cooling to direct cooling of the inner conductor, significantly improving heat dissipation efficiency and average power capacity. In terms of electromagnetic performance, this invention minimizes disturbances to the electromagnetic field distribution inside the coaxial line and waveguide, avoiding the additional inductance and capacitance effects introduced by the T-bar structure due to periodic loads. This not only eliminates the risk of electric field concentration, but also helps to maintain excellent impedance matching over a wide frequency range, thus solving the problem of balancing high peak power and large operating bandwidth. At the same time, the overall structure of the present invention is more compact and reliable.

[0030] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. For those skilled in the art, other variations or modifications can be made based on the above description. It is impossible to exhaustively list all the implementation methods here. All obvious variations or modifications derived from the technical solutions of the present invention are still within the protection scope of the present invention.

Claims

1. A coaxial window inner conductor cooling structure, characterized in that, include: A coaxial window, comprising an annular window pane, an outer conductor sealed to the outer circumferential surface of the window pane, and an inner conductor sealed to the inner circumferential surface of the window pane, wherein the inner conductor includes an inner cavity; An output waveguide perpendicularly connected to the coaxial window; A waveguide coaxial conversion structure connected to both the inner conductor and the output waveguide, the waveguide coaxial conversion structure including a channel communicating with the inner cavity; The liquid cooling assembly includes a fitting disposed on the outside of the output waveguide and a hollow liquid cooling tube extending axially into the inner cavity along the coaxial window; the fitting is provided with a liquid inlet and a liquid outlet; the output waveguide is provided with a connecting hole; one end of the liquid cooling tube extends into the inner cavity and is provided with a liquid outlet communicating with the inner cavity, and the other end extends through the channel and the connecting hole and extends into the fitting to communicate with the liquid inlet, so that the interior of the liquid cooling tube, the inner cavity and the channel together form a cooling circulation path.

2. The coaxial window inner conductor cooling structure according to claim 1, characterized in that, The axis of the coaxial window is perpendicular to the axis of the output waveguide; the channel passes through the coaxial conversion structure of the waveguide along the axis of the coaxial window; the mating component includes a mating cavity, and the liquid outlet communicates with the mating cavity; the top end of the channel communicates with the inner cavity, and the bottom end communicates with the mating cavity through a connecting hole; one end of the liquid cooling tube extending into the inner cavity is fixed to the inner conductor, and the end of the liquid cooling tube located in the inner cavity includes several liquid outlet holes penetrating the circumferential sidewall of the liquid cooling tube.

3. The coaxial window inner conductor cooling structure according to claim 1, characterized in that, The waveguide coaxial conversion structure is a gate-button conversion structure; the gate-button conversion structure includes a main body, and the channel passes through the main body along the coaxial window axis; the bottom of the inner conductor has an opening communicating with the inner cavity; the bottom annular surface and side surface of the main body are fitted and fixed to the inner wall of the output waveguide, and the top outer peripheral surface of the main body is fitted and fixed to the inner peripheral surface of the opening of the inner conductor; the channel is coaxially arranged with the inner conductor.

4. The coaxial window inner conductor cooling structure according to claim 1, characterized in that, The inner conductor includes a first structural portion located above the window, a second structural portion located below the window, and a connecting portion that penetrates the window and is fixed to the window; the connecting portion is connected to the first and second structural portions at both ends along the coaxial window axis, respectively; the second structural portion is connected to the waveguide coaxial conversion structure; an assembly groove communicating with the inner cavity is formed on the first structural portion, and one end of the liquid cooling tube is assembled in the assembly groove; a first cavity is formed inside the connecting portion, and a second cavity is formed inside the second structural portion; the first cavity and the second cavity communicate to form an inner cavity; the second cavity communicates with the channel.

5. The coaxial window inner conductor cooling structure according to claim 4, characterized in that, The inner diameter of the connecting part is larger than the outer diameter of the liquid cooling pipe, and the diameters of the first structural part and the second structural part are both larger than the outer diameter of the connecting part.

6. The coaxial window inner conductor cooling structure according to claim 1, characterized in that, The liquid outlet holes are evenly distributed along the circumference of the liquid cooling pipe; in the axial direction of the coaxial window, the height of the liquid outlet holes is higher than that of the window plate.

7. The coaxial window inner conductor cooling structure according to claim 1, characterized in that, The axes of the liquid inlet and outlet are both set in the horizontal direction and are parallel to the axis of the output waveguide.

8. The coaxial window inner conductor cooling structure according to claim 7, characterized in that, Along the axial direction of the coaxial window, the outlet is at a higher height than the inlet.

9. The coaxial window inner conductor cooling structure according to claim 1, characterized in that, An outer conductor liquid cooling structure is provided on the outer peripheral surface of the outer conductor.

10. A vacuum microwave tube, characterized in that, Including the coaxial window inner conductor cooling structure as described in any one of claims 1-9.