Lifting sample loading device and scanning electron microscope

Abstract

The invention relates to the field of precise instruments, in particular to a lifting sample loading device and a scanning electron microscope. The lifting sample loading device is used for the scanning electron microscope and comprises a base, a driving mechanism and a sample loading table, the scanning electron microscope comprises a sample table, and the base is detachably connected with the sample table; the driving mechanism is installed on the base, and the driving end of the driving mechanism is connected with the sample carrying table so as to drive the sample carrying table to ascend and descend. According to the lifting sample loading device provided by the invention, the driving mechanism is arranged to drive the sample loading table to perform vertical lifting motion so as to adjust the height of the sample, and the height of the sample does not need to be adjusted by changing the sample, so that the sample changing operation time can be shortened, and the working efficiency of a user is improved. A user can flexibly mount or remove the lifting sample loading device according to different experiment requirements, and basic functions of original equipment are not affected.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of precision instruments, in particular to a lifting sample loading device and a scanning electron microscope. BACKGROUND

[0002] As a key equipment for micro-morphology observation, scanning electron microscopes are widely used in the fields of material science, biomedical science, semiconductor detection, etc. Desktop scanning electron microscopes gradually become the mainstream choice in laboratories and industrial sites due to their small size, low cost, and easy operation.

[0003] In the prior art, the overall design of a desktop scanning electron microscope usually pursues compactness and low cost, resulting in limited sample chamber space. In order to meet this design requirement, the basic functions of the sample stage are greatly simplified, and only the basic XY two-dimensional translation function is retained to realize the horizontal position adjustment of the sample. If the sample height needs to be changed, the user needs to open the sample chamber to replace the sample and adjust the sample height, which reduces the user's work efficiency. SUMMARY

[0004] The purpose of the present application is to provide a lifting sample loading device and a scanning electron microscope for adjusting the sample height and improving the user's work efficiency.

[0005] The present application provides a lifting sample loading device for a scanning electron microscope, which comprises a base, a driving mechanism, and a sample loading stage. The scanning electron microscope comprises a sample stage, and the base is detachably connected with the sample stage. The driving mechanism is installed on the base, and the driving end of the driving mechanism is connected with the sample loading stage to drive the sample loading stage to lift.

[0006] In the above technical solution, further, the driving mechanism comprises a driving assembly and a lead screw assembly. The lead screw assembly comprises a lead screw and a nut, the driving assembly is connected with the lead screw to drive the lead screw to rotate around the shaft, and the nut is sleeved on the lead screw and connected with the sample loading stage.

[0007] In the above technical solution, further, the driving assembly comprises a driving member and a transmission gear. The driving member is connected with the transmission gear to drive the transmission gear to rotate, and the transmission gear is connected with the lead screw to drive the lead screw to rotate.

[0008] In the above technical solution, further, the driving mechanism further comprises a guide assembly. The guide assembly comprises a guide rail part and a sliding part, and the sliding part is slidingly installed on the guide rail part. The guide rail part is installed on the base, and the sample loading platform is connected with the sliding part.

[0009] In the technical scheme, further, the driving mechanism further comprises an elastic member; the elastic member is installed between the sample loading platform and the base, so that the sample loading platform has a tendency to move away from the base.

[0010] In the technical scheme, further, the driving mechanism further comprises a protective cover; The protective cover is connected with the base to form an accommodating cavity; and the driving assembly is arranged in the accommodating cavity. The screw rod penetrates through the protective cover.

[0011] In the technical scheme, further, the sample loading platform comprises a mounting platform and a carrying member; the carrying member is used for placing a sample, and the carrying member is detachably installed on the mounting platform.

[0012] In the technical scheme, further, a limiting mechanism is further included, and the limiting mechanism comprises a limiting member and a limiting switch. The limiting switch comprises a first contact and a second contact, and the first contact and the second contact are arranged in a vertical direction. The limiting member is connected with the sample loading platform, and the sample loading platform can drive the limiting member to reciprocate to trigger the first contact or the second contact; the first contact and the second contact are in communication connection with the driving mechanism to control the driving mechanism to be closed.

[0013] In the technical scheme, further, a wire fixing member is further included; the wire fixing member is connected with the base to fix the outgoing wire of the driving mechanism and the outgoing wire of the limiting switch.

[0014] The application further provides a scanning electron microscope comprising the lifting sample loading device.

[0015] Compared with the prior art, the application has the following beneficial effects: The lifting sample loading device provided by the application drives the sample loading platform to perform vertical lifting movement through the driving mechanism to adjust the height of the sample, so that the time for sample replacement operation can be reduced, and the work efficiency of the user is improved. The user can flexibly install or remove the lifting sample loading device according to different experimental requirements, without affecting the basic functions of the original equipment.

[0016] The application further provides a scanning electron microscope comprising the lifting sample loading device. Based on the above analysis, the scanning electron microscope also has the beneficial effects described above, which will not be repeated here. BRIEF DESCRIPTION OF DRAWINGS

[0017] To more clearly illustrate the technical solutions in the specific embodiments of this application or the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0018] Figure 1 A first structural schematic diagram of the lifting and sample-carrying device provided in this application; Figure 2 A second structural schematic diagram of the lifting and sample-carrying device provided in this application; Figure 3 This is a third structural schematic diagram of the lifting sample carrier provided in this application; Figure 4 A partial structural schematic diagram of the drive mechanism provided in this application; Figure 5 This is a schematic diagram of the cross roller guide provided in this application.

[0019] In the diagram: 1-base; 2-sample stage; 3-lead screw assembly; 4-limiting component; 5-protective cover; 6-wire fixing component; 7-sample nail; 8-cross roller guide rail; 801-first guide rail; 802-retainer; 803-second guide rail; 9-drive assembly; 901-motor; 902-gearbox; 10-spring; 11-limit switch. Detailed Implementation

[0020] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0021] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0022] In the description of this application, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0023] Example 1 See Figures 1 to 5 As shown, the lifting sample carrier device provided in this application is used for scanning electron microscopes. The lifting sample carrier device includes a base 1, a drive mechanism and a sample stage 2. The scanning electron microscope includes a sample stage, and the base 1 is detachably connected to the sample stage. The drive mechanism is installed on the base 1, and the drive end of the drive mechanism is connected to the sample stage 2 to drive the sample stage 2 to lift.

[0024] Specifically, when it is necessary to change the sample height during the process of viewing or taking pictures with a scanning electron microscope, the sample stage 2 can be driven by the drive mechanism to move vertically up and down to adjust the sample height. This eliminates the need to change samples to adjust the sample height, thereby reducing the time spent on sample changing operations and improving the user's work efficiency.

[0025] Furthermore, the base 1 is detachably connected to the original sample stage of the scanning electron microscope, making the lifting sample loading device a "modular accessory." For example... Figure 1 As shown in the figure, the base 1 has multiple connection holes, which can be detachably connected to the sample stage via bolts. Alternatively, the base 1 can also be connected to the sample stage via a snap-fit, magnetic, or other structure.

[0026] Users can flexibly install or remove the lifting sample loading device according to different experimental needs without affecting the basic functions of the original equipment. For example, when observing small samples, the lifting sample loading device can be installed on the sample stage; when observing large samples, it can be quickly disassembled. In addition, the detachable structure of the lifting sample loading device also facilitates cleaning, maintenance, and sharing among multiple devices, thereby reducing operating costs.

[0027] In an optional embodiment, the sample stage 2 includes a mounting platform and a support member; the support member is used to place the sample and can be detachably installed on the mounting platform.

[0028] In this embodiment, Figure 1 and Figure 3The support shown includes multiple sample pins 7, which can be detachably mounted on the mounting stage. Each sample pin 7 can hold a sample, allowing the user to observe multiple samples at once. Furthermore, the user can quickly change different support components according to the characteristics of different samples (such as size, shape, material, and observation requirements).

[0029] In an optional embodiment, the driving mechanism includes a driving assembly 9 and a lead screw assembly 3. The lead screw assembly 3 includes a lead screw and a nut. The driving assembly 9 is connected to the lead screw to drive the lead screw to rotate around an axis. The nut is sleeved on the lead screw and connected to the sample stage 2. When the driving assembly 9 drives the lead screw to rotate, the nut moves linearly up and down along the length of the lead screw. The nut is connected to the sample stage 2 so that the sample stage 2 can move vertically with high precision in sync.

[0030] Specifically, the drive assembly 9 includes a drive element and a transmission gear. Figure 4 The transmission gear shown is located inside the gearbox 902; the drive unit is connected to the transmission gear to drive the transmission gear to rotate; the transmission gear is connected to the lead screw to drive the lead screw to rotate.

[0031] In this embodiment, the driving component is specifically a motor 901, which has a high rotational speed but relatively low output torque. By introducing a transmission gear, the high-speed, low-torque output of the motor 901 can be converted into a low-speed, high-torque output. This allows for smooth start and stop when controlling the lifting and lowering of the Z-axis sample stage 2, thus reliably supporting the sample stage 2 and achieving higher positioning accuracy and more precise height adjustment capabilities. The driving component is connected to the lead screw via the transmission gear, allowing it to be positioned beside the lead screw without occupying Z-axis space, optimizing space utilization and ensuring that the entire module can be integrated within a limited space.

[0032] In an optional embodiment, the driving mechanism further includes a guide assembly; the guide assembly includes a guide rail and a sliding part, with the sliding part slidably mounted on the guide rail; the guide rail is mounted on the base 1, and the sample stage 2 is connected to the sliding part.

[0033] In this embodiment, the guide assembly restricts the sample stage 2 to linear motion with only a single degree of freedom along the Z-axis, preventing skewed motion trajectories. Preferably, the guide assembly is a cross roller guide 8, which can eliminate gaps between the base 1 and the sample stage 2 except for movement in the Z-axis direction. Figure 5 As shown, the cross roller guide 8 includes a first guide rail 801 (sliding part), a retainer 802, and a second guide rail 803 (guide part). The cylindrical rollers are physically isolated by the retainer 802, which converts sliding friction into rolling friction, significantly reducing wear and noise.

[0034] In an optional embodiment, the driving mechanism further includes an elastic element; the elastic element is installed between the sample stage 2 and the base 1 so that the sample stage 2 tends to move away from the base 1.

[0035] In this embodiment, the helical fit between the lead screw and the nut inevitably has minor manufacturing tolerances and wear clearances. When the sample stage 2 needs to change its direction of movement (e.g., from rising to falling), without compensation measures, an invalid "idle travel" stroke will occur first, leading to inaccurate positioning. By applying a continuous preload force through the elastic element, which moves the sample stage 2 upward (away from the base 1), the nut is forced to always maintain a tight fit with the upper helical surface of the lead screw. In this way, regardless of whether the motor 901 rotates forward or backward, the transmission chain is in a "tight" state of unilateral pressure, completely eliminating the hysteresis and error caused by the clearance.

[0036] In an optional embodiment, the drive mechanism further includes a protective cover 5; the protective cover 5 is connected to the base 1 to form a receiving cavity; the drive assembly 9 is disposed in the receiving cavity; and the lead screw passes through the protective cover 5.

[0037] In this embodiment, the protective cover 5 creates a protected physical space for the drive assembly 9, achieving multiple functions such as dust prevention, damage prevention, and contamination suppression, thereby improving the long-term operational reliability of the power system. Furthermore, Figure 1 and Figure 2 The elastic element shown is specifically a spring 10. The spring 10 is sleeved around the circumference of the lead screw. One end of the spring 10 abuts against the outside of the protective cover 5, and the other end of the spring 10 abuts against the nut to achieve the installation limit of the spring 10.

[0038] Example 2 The lifting and loading device in this embodiment is an improvement on the above embodiments. The technical content disclosed in the above embodiments will not be described again, and the content disclosed in the above embodiments also belongs to the content disclosed in this embodiment.

[0039] In an optional embodiment, the lifting sample carrier further includes a limiting mechanism, which includes a limiting member 4 and a limiting switch 11. The limiting switch 11 includes a first contact and a second contact, which are spaced apart vertically. The limiting member 4 is connected to the sample carrier stage 2, and the sample carrier stage 2 can drive the limiting member 4 to reciprocate to trigger the first contact or the second contact. Both the first contact and the second contact are communicatively connected to the drive mechanism to control the drive mechanism to close.

[0040] In this embodiment, the lifting range of the sample stage 2 is limited by the length of the lead screw, the travel of the guide rail, and the structural strength. Without protective measures, continuous operation of the motor 901 may cause the sample stage 2 to continue to be subjected to force after rising to the highest point, or to be forcibly squeezed after descending to the lowest point, which can easily cause serious mechanical failures such as lead screw bending, nut disengagement, overload damage to the gearbox 902, or guide rail jamming. The limiting mechanism sets a first contact (such as the upper limit) and a second contact (such as the lower limit) at intervals in the vertical direction. When the sample stage 2 drives the block-shaped limiting member 4 to move to the travel limit, the corresponding contact will be physically triggered. This signal is fed back to the control system of the drive mechanism through the communication connection, and the power supply of the motor 901 is immediately forcibly shut off, thereby cutting off the power output, effectively avoiding overtravel accidents caused by operational errors or abnormal control programs, and ensuring the safe operation of the equipment.

[0041] In an optional embodiment, the lifting sample carrier further includes a wire fixing component 6; the wire fixing component 6 is connected to the base 1 to fix the lead wire of the drive mechanism and the lead wire of the limit switch 11. Figures 1 to 3 The wire fixing component 6 shown is block-shaped and installed on the protective cover 5. The wire fixing component 6 can reliably fix the lead wire so that the lead wire is laid out in a reasonable and standardized manner.

[0042] Example 3 Embodiment 3 of this application provides a scanning electron microscope, which includes the lifting sample carrier device of any of the above embodiments. Therefore, it has all the beneficial technical effects of the lifting sample carrier device of any of the above embodiments, which will not be repeated here.

[0043] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and not to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application. In addition, those skilled in the art can understand that although some embodiments herein include certain features included in other embodiments but not other features, combinations of features from different embodiments are meant to be within the scope of this application and form different embodiments.

Claims

1. A lifting sample loading device for a scanning electron microscope, characterized in that, The lifting sample carrier includes a base, a drive mechanism, and a sample carrier platform; The scanning electron microscope includes a sample stage, and the base is detachably connected to the sample stage; The drive mechanism is mounted on the base, and the drive end of the drive mechanism is connected to the sample stage to drive the sample stage to rise and fall.

2. The lifting sample carrier according to claim 1, characterized in that, The drive mechanism includes a drive assembly and a lead screw assembly; The lead screw assembly includes a lead screw and a nut; the drive assembly is connected to the lead screw to drive the lead screw to rotate around an axis; the nut is sleeved on the lead screw and is connected to the sample stage.

3. The lifting sample carrier according to claim 2, characterized in that, The drive assembly includes a drive component and a transmission gear; The driving component is connected to the transmission gear to drive the transmission gear to rotate; The transmission gear is connected to the lead screw to drive the lead screw to rotate.

4. The lifting sample carrier according to claim 2, characterized in that, The drive mechanism also includes a guide assembly; The guide assembly includes a guide rail portion and a sliding portion, wherein the sliding portion is slidably mounted on the guide rail portion; The guide rail is mounted on the base, and the sample stage is connected to the sliding part.

5. The lifting sample carrier according to claim 2, characterized in that, The drive mechanism also includes an elastic element; the elastic element is installed between the sample stage and the base so that the sample stage tends to move away from the base.

6. The lifting sample loading device according to claim 2, characterized in that, The drive mechanism also includes a protective cover; The protective cover is connected to the base to form a receiving cavity; the drive assembly is disposed within the receiving cavity; The lead screw passes through the protective cover.

7. The lifting sample carrier according to claim 1, characterized in that, The sample stage includes a mounting platform and a support component; the support component is used to place the sample and is detachably mounted on the mounting platform.

8. The lifting sample carrier according to claim 1, characterized in that, It also includes a limiting mechanism, which includes a limiting element and a limiting switch; The limit switch includes a first contact and a second contact, which are spaced apart in the vertical direction. The limiting member is connected to the sample stage, and the sample stage can drive the limiting member to reciprocate to trigger the first contact or the second contact; the first contact and the second contact are both communicatively connected to the driving mechanism to control the driving mechanism to close.

9. The lifting sample carrier according to claim 8, characterized in that, It also includes a wire fixing component; the wire fixing component is connected to the base to fix the lead wire of the drive mechanism and the lead wire of the limit switch.

10. A scanning electron microscope, characterized in that, Includes the lifting sample carrier as described in any one of claims 1 to 9.

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