Novel suction nozzle carrying mechanism
By combining a servo motor-driven eccentric lifting mechanism with a linkage transmission method, the problems of unstable lifting and rotational damage in chip handling equipment have been solved, achieving a high-precision and safe chip handling process.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-12-22
- Publication Date
- 2026-04-07
AI Technical Summary
Existing chip handling equipment suffers from problems such as unstable lifting, low positioning accuracy, unstable movement, and susceptibility to impact and vibration. Furthermore, the rotation drive can easily damage the chip.
The eccentric lifting mechanism driven by a servo motor is combined with a high-rigidity gantry frame and linear guide rails, and the nozzle is driven to rotate by a linkage transmission method. The eccentric lifting mechanism and linkage mechanism achieve smooth and precise micro-feeding and gentle rotational motion.
It improves the positioning accuracy and alignment success rate during chip handling, avoids chip damage caused by instantaneous high torque or stress concentration, and ensures the safety and stability of the handling process.
Smart Images
Figure CN121816012A_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The present application relates to the technical field of chip detection, and particularly to a novel suction nozzle conveying mechanism. BACKGROUND
[0002] In the field of precision manufacturing such as semiconductor packaging, integrated circuit manufacturing and microelectronic assembly, chip conveying, mounting and calibration are one of the core process flows. These processes are usually completed by high-precision automated equipment. At present, the common suction nozzle conveying mechanism in the industry usually has two basic functions of lifting and rotating. However, the existing technical solutions have a series of inherent technical defects when implementing these functions, mainly in the following aspects: Firstly, the existing equipment adopts a pneumatic cylinder or a common lead screw sliding table module as the lifting drive. The pneumatic cylinder drive has the problems of low positioning accuracy, unstable movement, easy to produce impact and vibration, etc., which is easy to cause invisible hidden crack damage to the small and fragile chip. Although the common lead screw module has acceptable accuracy, its response speed is slow, and it is difficult to realize high-frequency and small-stroke precise reciprocating motion in limited space.
[0003] Secondly, in order to realize the rotation of the suction nozzle, the existing equipment adopts an independent rotary motor to directly drive the suction nozzle. The direct driving method is easy to cause excessive torsion to the chip and lead to chip damage or position deviation when encountering jam during torque transmission. SUMMARY
[0004] (I) Technical problems to be solved The present application provides a novel suction nozzle conveying mechanism, which solves the problem of unstable lifting of the traditional chip conveying mechanism through an eccentric lifting mechanism, and realizes the buffering of the driving torque during the rotation of the chip through the setting of a connecting rod mechanism.
[0005] (II) Technical solutions In order to achieve the above purpose, the present application provides a novel suction nozzle conveying mechanism, which comprises a suction nozzle lifting mechanism, a suction nozzle rotating mechanism and a vacuum suction nozzle. The suction nozzle lifting mechanism is arranged on a gantry frame through a linear guide rail sliding, and the bottom is connected with the suction nozzle rotating mechanism. The vacuum suction nozzle is arranged on the suction nozzle rotating mechanism and connected with a negative pressure source through a negative pressure pipeline for adsorbing the chip to be conveyed. The suction nozzle lifting mechanism comprises a first driving device and an eccentric lifting mechanism connected with the output end of the first driving device. The eccentric lifting mechanism is connected with the suction nozzle rotating mechanism for driving the suction nozzle rotating mechanism to lift. The suction nozzle rotation mechanism includes a second driving device and a suction nozzle mounting base. The vacuum suction nozzle is rotatably mounted on the suction nozzle mounting base, and the second driving device is connected to the vacuum suction nozzle through a linkage mechanism to drive the vacuum suction nozzle to rotate the adsorbed chip.
[0006] A further technical solution is that the gantry frame includes marble columns and crossbeams, and a linear guide rail along the length direction is fixed on one side of the crossbeam. The suction nozzle lifting mechanism is connected to the linear guide rail through an L-shaped connecting plate.
[0007] A further technical solution is that the suction nozzle lifting mechanism further includes a fixed block connected to the L-shaped connecting plate, and a guide connecting block slidably disposed on one side of the fixed block via a guide rail, the guide connecting block being connected to the suction nozzle rotating mechanism; The first driving device is fixedly installed on the other side of the fixed block. The guide connecting block has a rectangular slot in the middle. A bushing is provided inside the rectangular slot. A transmission shaft is rotatably provided inside the bushing. The transmission shaft has an axially eccentrically set connecting hole inside. The output shaft of the first driving device is inserted into the connecting hole. The output shaft can drive the bushing to rotate eccentrically, so that the guide connecting block moves up and down accordingly.
[0008] A further technical solution is that the outer surface of the drive shaft is provided with an annular flange and an annular groove, the portion between the annular flange and the annular groove is in contact with the inner annular surface of the bushing, and a retaining spring is installed in the annular groove to limit the axial displacement of the drive shaft.
[0009] A further technical solution is that the front end of the transmission shaft also has a secondary shaft, and a connecting shaft is provided on the front end face of the secondary shaft. The axis of the connecting shaft coincides with the axis of the transmission shaft. A fan-shaped sensing plate is installed on the connecting shaft. The fan-shaped sensing plate can rotate synchronously with the transmission shaft. A photoelectric sensor is fixedly provided on the fixing block corresponding to the fan-shaped sensing plate.
[0010] A further technical solution is that the suction nozzle rotation mechanism also includes a motor mounting plate; The second drive device is fixedly installed on the top of the motor mounting plate, and a suction nozzle rolling mechanism is fixedly connected to the side. The vacuum nozzle is rotatably installed on the suction nozzle rolling mechanism and is connected to the second drive device through the linkage mechanism. The linkage mechanism includes a drive arm and a swing rod. One end of the drive arm is mounted on the output shaft of the second drive device, and the other end is connected to a lever. One end of the swing rod is fixedly connected to the vacuum nozzle, and the other end has a U-shaped fork structure. The lever is slidably disposed inside the U-shaped fork structure.
[0011] A further technical solution is that a fan-shaped sensing plate and a photoelectric sensor corresponding to the fan-shaped sensing plate are provided at the connection between the drive arm and the output shaft of the second drive device.
[0012] A further technical solution is that the suction nozzle rolling mechanism includes multiple adjusting bolts arranged in a rubber array, and the multiple adjusting bolts form a clamping space for clamping the vacuum suction nozzle. Each adjusting bolt is movably fitted with a rubber sleeve on its outer side, and the outer side of the rubber sleeve has an inwardly recessed groove for engaging the vacuum suction nozzle, and the vacuum suction nozzle can rotate freely.
[0013] A further technical solution includes a servo control system, wherein the first drive device and the second drive device are both servo motors, and the servo control system is electrically connected to the first drive device, the second drive device, and the photoelectric sensor.
[0014] (III) Beneficial Effects The beneficial effects of this invention are as follows: This novel nozzle handling mechanism combines a servo motor-driven eccentric lifting mechanism with a high-rigidity gantry frame and linear guide rails, effectively overcoming the vibration problem inherent in traditional cylinder-driven systems. This enables smooth and precise micro-feeding of the nozzle during chip pick-and-place, significantly improving positioning accuracy and alignment success rate. Simultaneously, the nozzle rotation mechanism uses a linkage transmission method to drive the vacuum nozzle, transforming the rigid impact of the motor output into gentle linkage motion, effectively reducing the peak torque transmitted to the chip. Therefore, when adjusting the chip angle, it effectively avoids hidden cracks, breakage, or internal circuit damage caused by instantaneous high torque or stress concentration, comprehensively ensuring the safety, stability, and reliability of the handling process. Attached Figure Description
[0015] Figure 1 This is a schematic diagram of the overall installation of the nozzle handling mechanism; Figure 2 This is a schematic diagram of the overall structure of the suction nozzle handling mechanism; Figure 3 This is a schematic diagram of the nozzle lifting mechanism; Figure 4 This is a schematic diagram of the suction nozzle rotation mechanism; Figure 5 A schematic diagram of the drive shaft in the nozzle lifting mechanism; Figure 6 for Figure 5 A sectional view; Figure 7 This is a schematic diagram of the linkage mechanism in the nozzle rotation mechanism.
[0016] [Explanation of Labels in the Attached Image] 1: Nozzle lifting mechanism; 11: First drive device; 12: Eccentric lifting mechanism; 13: Fixed block; 14: Guide connecting block; 141: Rectangular slot; 2: Nozzle rotation mechanism; 21: Second drive device; 22: Nozzle mounting base; 23: Linkage mechanism; 231: Drive arm; 232: Swing rod; 233: L-shaped lever; 24: Motor mounting plate; 25: Nozzle rolling mechanism; 251: Adjusting bolt; 252: Rubber sleeve; 3: Vacuum nozzle; 4: Gantry frame; 41: Marble column; 42: Crossbeam; 5: L-shaped connecting plate; 6: Bushing; 7: Drive shaft; 71: Connecting hole; 72: Annular flange; 73: Annular groove; 74: Secondary shaft; 75: Connecting shaft; 8: Fan-shaped sensing plate; 9: Photoelectric sensor. Detailed Implementation
[0017] To better explain and facilitate understanding of the present invention, the present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.
[0018] This embodiment provides a novel suction nozzle handling mechanism, such as Figure 1 As shown, the system includes a nozzle lifting mechanism 1, a nozzle rotating mechanism 2, and a vacuum nozzle 3. The nozzle lifting mechanism 1 is slidably mounted on the gantry frame 4 via a linear guide rail, and its bottom is connected to the nozzle rotating mechanism 2. The vacuum nozzle 3 is mounted on the nozzle rotating mechanism 2 and connected to a negative pressure source via a negative pressure pipeline for adsorbing and transporting chips. The nozzle lifting mechanism 1 includes a first drive device 11 and an eccentric lifting mechanism 12 connected to the output end of the first drive device 11. The eccentric lifting mechanism 12 is connected to the nozzle rotating mechanism 2 and is used to drive the nozzle rotating mechanism 2 to lift and lower. The nozzle rotating mechanism 2 includes a second drive device 21 and a nozzle mounting base 22. The vacuum nozzle 3 is rotatably mounted on the nozzle mounting base 22, and the second drive device 21 is connected to the vacuum nozzle 3 via a linkage mechanism 23, used to drive the vacuum nozzle 3 to rotate the adsorbed chip.
[0019] The aforementioned novel nozzle handling mechanism combines a servo motor-driven eccentric lifting mechanism 12 with a high-rigidity gantry frame 4 and linear guide rails. This effectively overcomes the vibration problems inherent in traditional cylinder-driven mechanisms, enabling smooth and precise micro-feeding of the nozzle during chip pick-and-place, significantly improving positioning accuracy and alignment success rate. Simultaneously, the nozzle rotation mechanism 2 uses a linkage transmission method to drive the vacuum nozzle 3, transforming the rigid impact of the motor output into gentle linkage motion. This effectively reduces the peak torque transmitted to the chip, thus preventing breakage or internal circuit damage caused by instantaneous high torque or stress concentration when adjusting the chip's angle.
[0020] In this embodiment, the gantry frame 4 includes marble columns 41 and a crossbeam 42. A linear guide rail along the length direction is fixed on one side of the crossbeam 42. The suction nozzle lifting mechanism 1 is connected to the linear guide rail via an L-shaped connecting plate 5. Specifically, the gantry frame 4, as the supporting foundation of the entire structure, is preferably made of highly stable marble, including two sturdy marble columns 41 and a marble crossbeam 42 mounted on them. A high-precision linear guide rail is fixedly installed on one side of the crossbeam 42. The suction nozzle lifting mechanism 1 is connected to the slider of the linear guide rail via a rigid L-shaped connecting plate 5, thereby enabling smooth linear reciprocating movement along the linear guide rail.
[0021] The nozzle lifting mechanism 1 also includes a fixed block 13 connected to an L-shaped connecting plate 5, and a guide connecting block 14 slidably disposed on one side of the fixed block 13 via a guide rail. The guide connecting block 14 is connected to the nozzle rotating mechanism 2. A first driving device 11 is fixedly disposed on the other side of the fixed block 13. A rectangular slot 141 is provided in the middle of the guide connecting block 14. A bushing 6 is provided inside the rectangular slot 141. A transmission shaft 7 is rotatably disposed inside the bushing 6. The transmission shaft 7 has an axially eccentrically disposed connecting hole 71 inside. The output shaft of the first driving device 11 is inserted into the connecting hole 71. The output shaft can drive the bushing 6 to rotate eccentrically, so that the guide connecting block 14 moves up and down accordingly. The outer surface of the transmission shaft 7 is provided with an annular flange 72 and an annular groove 73. The part between the annular flange 72 and the annular groove 73 contacts the inner annular surface of the bushing 6. A retaining spring is installed in the annular groove 73 to limit the axial displacement of the transmission shaft 7.
[0022] Specifically, in this embodiment, the connection between the L-shaped connecting plate 5 and the fixed block 13 can be a fixed connection or a sliding connection. In this embodiment, a sliding connection is preferred. Specifically, a manual adjustment slide can be set between the two. Compared with the fixed connection, this increases the freedom of linear movement in one direction, which is beneficial for alignment adjustment during equipment debugging. The main function of the nozzle lifting mechanism 1 is to achieve precise alignment. When the first driving device 11 is started, it drives the transmission shaft 7 to rotate eccentrically within the bushing 6. This eccentric movement forces the guide connecting block 14 to make precise up-and-down reciprocating movements along the guide rail on the fixed block 13, thereby achieving micron-level lifting and positioning. To ensure the stability of the transmission shaft 7, an annular flange 72 and an annular groove 73 are machined on its outer surface. By installing a retaining spring in the groove, its axial movement can be effectively limited.
[0023] Furthermore, the front end of the drive shaft 7 also has a secondary shaft 74, and a connecting shaft 75 is provided on the front end face of the secondary shaft 74. The axis of the connecting shaft 75 coincides with the axis of the drive shaft 7. A fan-shaped sensing plate 8 is installed on the connecting shaft 75, and the fan-shaped sensing plate 8 can rotate synchronously with the drive shaft 7. A photoelectric sensor 9 is fixedly installed on the fixing block 13 corresponding to the fan-shaped sensing plate 8. This design converts the real-time angular position information of the drive shaft 7 into photoelectric signals that can be accurately identified by the servo control system, thereby forming a closed-loop feedback control for the lifting motion. It can monitor and calibrate the precise height of the nozzle in real time, and this non-contact detection method can eliminate the influence of mechanical wear on measurement accuracy.
[0024] The nozzle rotation mechanism 2 also includes a motor mounting plate 24. A second drive device 21 is fixedly mounted on the top of the motor mounting plate 24, and a nozzle rolling mechanism 25 is fixedly connected to its side. The vacuum nozzle 3 is rotatably mounted on the nozzle rolling mechanism 25 and is connected to the second drive device 21 via a linkage mechanism 23. The linkage mechanism 23 includes a drive arm 231 and a swing rod 232. One end of the drive arm 231 is mounted on the output shaft of the second drive device 21, and the other end is connected to a lever 233. One end of the swing rod 232 is fixedly connected to the vacuum nozzle 3, and the other end has a U-shaped fork structure. The lever 233 is slidably disposed inside the U-shaped fork structure. A fan-shaped sensing plate 8 and a corresponding photoelectric sensor 9 are provided at the connection between the drive arm 231 and the output shaft of the second drive device 21.
[0025] When the second drive unit 21 rotates, the drive arm 231 drives the lever 233 to move, and the lever 233 in turn pushes the U-shaped fork, causing the swing arm 232 and the vacuum nozzle 3 on it to rotate. This linkage transmission method, rather than direct drive, can effectively buffer the instantaneous impact torque when the motor starts and stops, effectively reducing the impact damage to the chip.
[0026] The nozzle rolling mechanism 25 includes multiple adjusting bolts 251 arranged in a rubber array. These adjusting bolts 251 form a clamping position for mounting the vacuum nozzle 3. Each adjusting bolt 251 has a movably fitted rubber sleeve 252 on its outer side. The outer side of the rubber sleeve 252 has an inwardly recessed groove for engaging the vacuum nozzle 3, allowing the vacuum nozzle 3 to rotate freely. The vacuum nozzle 3 is connected to a negative pressure source via a negative pressure pipeline.
[0027] Specifically, in this embodiment, the nozzle rolling mechanism 25 preferably uses multiple adjusting bolts 251 arranged in an array, with rubber sleeves 252 having inwardly recessed grooves fitted on the outside of the bolts. The multiple rubber sleeves 252 together form a flexible clamping space that surrounds the rod of the vacuum nozzle 3, allowing the vacuum nozzle 3 to rotate flexibly and freely, further avoiding jamming or wear that may be caused by rigid clamping.
[0028] This embodiment also includes a servo control system. Both the first drive device 11 and the second drive device 21 are servo motors, preferably servo motors. A fan-shaped sensing plate 8 is installed at the front end of the transmission shaft 7, and a photoelectric sensor 9 is correspondingly installed on the fixing block 13 to monitor and provide feedback on the height position of the vacuum nozzle 3 in real time. Similarly, at the connection between the drive arm 231 and the output shaft of the second drive device 21, a fan-shaped sensing plate 8 and a corresponding photoelectric sensor 9 are installed to detect the rotation angle of the vacuum nozzle 3. The servo control system is electrically connected to the two drive devices and the two photoelectric sensors 9, forming a closed-loop control, thereby automating the entire process of chip picking, lifting, rotating, and placing.
[0029] It should be noted that all directional indicators (such as up, down, left, right, front, back, etc.) in this embodiment are only used to explain the relative positional relationship and movement of each component in a specific posture (as shown in the attached figure). If the specific posture changes, the directional indicator will also change accordingly.
[0030] Furthermore, in this embodiment, the use of terms such as "first" and "second" is for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include at least one of those features. In the description of this embodiment, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.
[0031] In this embodiment, unless otherwise explicitly specified and limited, the terms "connection," "fixed," etc., should be interpreted broadly. For example, "fixed" can mean a fixed connection, a detachable connection, or an integral part; it can mean a mechanical connection or an electrical connection; it can mean a direct connection or an indirect connection through an intermediate medium; it can mean the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this embodiment according to the specific circumstances.
[0032] It should be understood that the above description of specific embodiments of the present invention is only for illustrating the technical approach and features of the present invention, and is intended to enable those skilled in the art to understand the content of the present invention and implement it accordingly. However, the present invention is not limited to the specific embodiments described above. All changes or modifications made within the scope of the claims of the present invention should be covered within the protection scope of the present invention.
Claims
1. A novel suction nozzle handling mechanism, characterized in that, It includes a nozzle lifting mechanism (1), a nozzle rotating mechanism (2), and a vacuum nozzle (3); The suction nozzle lifting mechanism (1) is slidably mounted on the gantry frame (4) via a linear guide rail, and the bottom is connected to the suction nozzle rotating mechanism (2). The vacuum suction nozzle (3) is mounted on the suction nozzle rotating mechanism (2) and is connected to a negative pressure source via a negative pressure pipeline for adsorbing the chip to be transported. The nozzle lifting mechanism (1) includes a first driving device (11) and an eccentric lifting mechanism (12) connected to the output end of the first driving device (11). The eccentric lifting mechanism (12) is connected to the nozzle rotating mechanism (2) and is used to drive the nozzle rotating mechanism (2) to lift. The suction nozzle rotation mechanism (2) includes a second driving device (21) and a suction nozzle mounting base (22). The vacuum suction nozzle (3) is rotatably mounted on the suction nozzle mounting base (22), and the second driving device (21) is connected to the vacuum suction nozzle (3) through a linkage mechanism (23) to drive the vacuum suction nozzle (3) to rotate the adsorbed chip.
2. The novel suction nozzle handling mechanism as described in claim 1, characterized in that, The gantry frame (4) includes marble columns (41) and crossbeams (42). A linear guide rail along the length direction is fixed on one side of the crossbeam (42). The suction nozzle lifting mechanism (1) is connected to the linear guide rail through an L-shaped connecting plate (5).
3. The novel suction nozzle handling mechanism as described in claim 2, characterized in that, The nozzle lifting mechanism (1) further includes a fixing block (13) connected to the L-shaped connecting plate (5), and a guide connecting block (14) slidably disposed on one side of the fixing block (13) via a guide rail. The guide connecting block (14) is connected to the nozzle rotating mechanism (2). The first driving device (11) is fixedly installed on the other side of the fixed block (13). The guide connecting block (14) has a rectangular slot (141) in the middle. A bushing (6) is provided inside the rectangular slot (141). A transmission shaft (7) is rotatably provided inside the bushing (6). The transmission shaft (7) has an axially eccentrically set connecting hole (71) inside. The output shaft of the first driving device (11) is inserted into the connecting hole (71). The output shaft can drive the bushing (6) to rotate eccentrically, so that the guide connecting block (14) moves up and down accordingly.
4. The novel suction nozzle handling mechanism as described in claim 3, characterized in that, The outer surface of the drive shaft (7) is provided with an annular flange (72) and an annular groove (73). The portion between the annular flange (72) and the annular groove (73) contacts the inner annular surface of the bushing (6). A retaining ring is installed in the annular groove (73) to limit the axial displacement of the drive shaft (7).
5. The novel suction nozzle handling mechanism as described in claim 4, characterized in that, The front end of the drive shaft (7) also has a secondary shaft (74), and a connecting shaft (75) is provided on the front end face of the secondary shaft (74). The axis of the connecting shaft (75) coincides with the axis of the drive shaft (7). A fan-shaped sensing plate (8) is installed on the connecting shaft (75). The fan-shaped sensing plate (8) can rotate synchronously with the drive shaft (7). A photoelectric sensor (9) is fixedly provided on the fixing block (13) corresponding to the fan-shaped sensing plate (8).
6. The novel suction nozzle handling mechanism as described in claim 5, characterized in that, The suction nozzle rotation mechanism (2) also includes a motor mounting plate (24); The second drive device (21) is fixedly installed on the top of the motor mounting plate (24), and a suction nozzle rolling mechanism (25) is fixedly connected to the side. The vacuum nozzle (3) is rotatably installed on the suction nozzle rolling mechanism (25) and is connected to the second drive device (21) through the linkage mechanism (23). The linkage mechanism (23) includes a drive arm (231) and a swing rod (232). One end of the drive arm (231) is mounted on the output shaft of the second drive device (21), and the other end is connected to a lever (233). One end of the swing rod (232) is fixedly connected to the vacuum nozzle (3), and the other end has a U-shaped fork structure. The lever (233) is slidably disposed inside the U-shaped fork structure.
7. The novel suction nozzle handling mechanism as described in claim 6, characterized in that, The drive arm (231) is provided with a fan-shaped sensing plate (8) at the connection between the drive arm (231) and the output shaft of the second drive device (21), and a photoelectric sensor (9) corresponding to the fan-shaped sensing plate (8).
8. The novel suction nozzle handling mechanism as described in claim 7, characterized in that, The suction nozzle rolling mechanism (25) includes multiple adjusting bolts (251) arranged in a rubber array. The multiple adjusting bolts (251) form a clamping space for clamping the vacuum suction nozzle (3). Each adjusting bolt (251) is movably fitted with a rubber sleeve (252) on its outer side. The outer side of the rubber sleeve (252) has an inwardly recessed groove for engaging the vacuum suction nozzle (3), and the vacuum suction nozzle (3) can rotate freely.
9. The novel suction nozzle handling mechanism as described in claim 8, characterized in that, It also includes a servo control system. The first drive device (11) and the second drive device (21) are both servo motors. The servo control system is electrically connected to the first drive device (11), the second drive device (21) and the photoelectric sensor (9).