Toggle type bearing device and vacuum drying equipment

Abstract

The invention relates to a shifting type bearing device and vacuum drying equipment, and the shifting type bearing device comprises a bearing table, a shifting mechanism and a driving mechanism, and a plurality of mounting holes are formed in the surface of the bearing table; the ejector pin assembly comprises a plurality of ejector rods, the multiple ejector rods are arranged in the multiple mounting holes in a penetrating mode respectively, and movable intervals are reserved between the ejector rods and the hole walls of the mounting holes; the lifting driving part drives the bearing table to lift relative to the ejector pin assembly; the fulcrum structures are arranged in the mounting holes, the ejector rod penetrates through the fulcrum structures, the ejector rod is suitable for swinging with a contact point of the ejector rod and the fulcrum structures as a rotating point, and the fulcrum structures limit the ejector rod to do translational motion in the horizontal direction; the swing driving part drives the ejector rods to swing in a reciprocating mode. According to the application, the swing driving piece is used for driving the ejector rod to swing, so that the ejector rod is used for shifting the substrate, and the position of the substrate is switched on the bearing table, so that the local position of the substrate is prevented from being located at the mounting hole for a long time, the substrate is heated more uniformly, and the film forming quality is ensured.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum drying, in particular to a pushing type bearing device and a vacuum drying equipment. BACKGROUND

[0002] Inkjet printing has been applied in more and more emerging fields, such as new display, RFID, thin film solar cell, wearable flexible device, PCB, smart skin, etc. Inkjet printing technology has the advantages of high material utilization, no need for mask, low equipment cost, easy realization of large size manufacturing, etc., and can realize low-cost and large-area printing of OLED / QLED and other new display devices, and becomes the most potential process in the preparation of new display devices.

[0003] For various factors affecting the efficiency of OLED devices, the film uniformity of each functional layer material is an important point for investigation. Generally, a vacuum drying equipment is used to dry and form a film on a substrate.

[0004] In the related art, the substrate is placed in a closed box, and drying is achieved by vacuumizing the box. Specifically, a bearing plate and a needle assembly are arranged in the box, a plurality of needles of the needle assembly pass through the bearing plate from bottom to top, the needles are raised relative to the bearing plate to support the substrate, the needles are lowered relative to the bearing plate to place the substrate on the bearing plate to complete the feeding, and then the pump body can be opened to perform vacuum drying treatment on the substrate. When the substrate is vacuum dried, the substrate is supported by the bearing plate, and the drying efficiency is accelerated by heating the bearing plate.

[0005] Due to the need for feeding and discharging the substrate, a through hole is needed to be formed on the bearing plate for the needle to pass through, and the size of the through hole is generally larger than that of the needle to meet the lifting of the needle. When the substrate is dried, the part of the substrate in the through hole has an annular gap between the through hole and the needle due to the size difference between the through hole and the needle.

[0006] Due to the existence of the annular gap, on the one hand, the temperature at the annular gap is inconsistent with the temperature of the bearing table, which easily causes the local temperature of the substrate to be inconsistent; on the other hand, when the heat of the bearing table is transferred to the needle, the bearing table transfers the heat to the needle in the form of heat radiation due to the existence of the annular gap, so the temperature rising rate of the needle is greatly different from that of the bearing table, and the temperature at the support surface of the needle is also difficult to guarantee, thus also leading to the local temperature of the substrate being inconsistent. Due to the inconsistent local temperature of the substrate during vacuum drying, the surface film layer of the substrate is prone to mura defects after drying processing, which has an adverse effect on the film forming quality. SUMMARY

[0007] Embodiments of the present application provide a dial type bearing device and a vacuum drying equipment to solve the technical problem of adverse effects on film quality caused by the influence of the top pin and the through hole on the bearing plate on the temperature uniformity of the substrate in the related art.

[0008] In a first aspect, a dial type bearing device is provided, comprising: a bearing table, a plurality of mounting holes being formed through the surface of the bearing table; a top pin assembly, the top pin assembly comprising a plurality of top rods, the plurality of top rods being respectively arranged in the plurality of mounting holes, and an active space being left between the top rods and the hole walls of the mounting holes; a lifting driving member, the lifting driving member being drivingly connected with the bearing table to drive the bearing table to lift relative to the top pin assembly; a fulcrum structure, the fulcrum structure being arranged in each of the mounting holes, the top rod being arranged in the fulcrum structure, and the top rod being adapted to swing with the contact point with the fulcrum structure as the rotation point, and the fulcrum structure limiting the horizontal translation movement of the top rod; a swing driving member, the swing driving member being drivingly connected with the plurality of top rods to synchronously drive the plurality of top rods to reciprocally swing; wherein, when the bearing table supports the substrate, the top rods reciprocally swing and synchronously lift relative to the bearing table to dial the substrate on the bearing table to change the position of the substrate.

[0009] In some embodiments, the fulcrum structure comprises a support sleeve, the support sleeve being inserted into the mounting hole, a through support hole being formed in the middle of the support sleeve, and the top rod being arranged in the support hole. The hole diameter of the support hole is arranged in an up-down large-middle-small manner, and the circumferential side surface of the top rod is attached to the hole wall of the smallest hole diameter of the support hole.

[0010] In some embodiments, the support sleeve is integrally formed with the bearing table.

[0011] In some embodiments, the hole diameter of the part of the mounting hole above the fulcrum structure is smaller than the hole diameter of the part of the mounting hole below the fulcrum structure.

[0012] In some embodiments, the swing driving member comprises: a plurality of connecting rods, one end of each of the plurality of connecting rods being hingedly connected with the bottom end of each of the plurality of top rods; a horizontal moving frame, each of the plurality of connecting rods being fixed to the horizontal moving frame; a horizontal moving driving member, the horizontal moving driving member being drivingly connected with the horizontal moving frame to drive the horizontal moving frame and the plurality of connecting rods to make reciprocating linear motion in the horizontal plane; Wherein, with the straight line motion of the connecting rod, the top rod is driven to synchronously swing and lift.

[0013] In some embodiments, the swing driving member comprises: A plurality of rotating disc assemblies, each rotating disc assembly comprising a rotating disc and a rotating disc holder 45, the rotating disc being rotatably arranged on the rotating disc holder 45, the rotating disc holder 45 being fixed to the external holder body, and the rotating axis of the rotating disc being horizontally arranged; a plurality of the rotating discs are respectively arranged in a plurality of the mounting holes, and the bottom end of the top rod is eccentrically hinged to the rotating disc. A rotating driving member, the rotating driving member being drivingly connected with a plurality of the rotating discs to drive a plurality of the rotating discs to synchronously reciprocate. Wherein, with the reciprocating rotation of the rotating disc, the top rod is driven to synchronously swing and lift.

[0014] In some embodiments, the rotating driving member comprises: A plurality of gear transmission mechanisms, the output gears of a plurality of the gear transmission mechanisms being coaxially fixed with a plurality of the rotating discs, respectively. A rack holder, the input gears of a plurality of the gear transmission mechanisms being drivingly matched with the rack holder. A linear driving member, the linear driving member being drivingly connected with the rack holder to drive the rack holder to reciprocate in the horizontal plane, thereby driving the output gears of all the gear transmission mechanisms and all the rotating discs to rotate.

[0015] In some embodiments, when the top rod swings, the length of the top rod above the fulcrum structure is less than the length of the top rod below the fulcrum structure.

[0016] In some embodiments, the top surface of the top rod is provided with a heat-conducting flexible layer.

[0017] The technical scheme provided by the present application has the beneficial effects of: The base plate is fed onto the bearing table, the lifting driving member drives the bearing table to descend, at this time, the top rod is lifted above the bearing table, and the top rod is used to support the base plate. Then, the bearing table is lifted until the base plate is supported. During the lifting of the bearing table, the fulcrum structure limits the horizontal translation of the top rod, and the swing driving member does not drive the top rod to swing, so that the top rod remains stationary during the lifting of the bearing table, thereby ensuring the stable support of the top rod on the base plate.

[0018] When the substrate is subjected to vacuum drying treatment to dry the film formed on the substrate surface, the swing driving member drives the top rod to swing, the top rod gradually extends above the support table during the swing, and then retracts into the support table, and at the same time, the top of the top rod moves linearly in the horizontal plane, and reciprocates in this way. Therefore, with the swing of the top rod, the top rod lifts the substrate, and drives the substrate to move linearly in the horizontal plane, and places the substrate on the support table again, that is, the position switching of the substrate relative to the support table is realized. By periodically changing the placement position of the substrate on the support table, the substrate is prevented from being unevenly heated due to long-time placement at the mounting hole of the support table, and the different positions of the substrate are contacted with the mounting hole by changing the position of the substrate, so that the substrate is dynamically and uniformly heated, and the MURA and other defects are prevented from being generated on the substrate surface after film formation, thereby improving the film formation quality of the substrate surface.

[0019] Since the top rod and the hole wall of the mounting hole have a movable space therebetween to support the swing of the top rod relative to the support table, the position of the substrate in the horizontal direction is changed. To ensure that the current substrate is completely removed from the position of the mounting hole, after the forward swing of the top rod to change the position of the substrate is completed, the support table is raised to increase the height difference between the support table and the top rod, and the top rod is reversely swung back to the original position, at this time, the top rod will not extend above the support table. Then the support table is lowered back to the original position, and the top rod is forwardly swung again, so that the position of the substrate is continuously changed in the same direction. The position of the substrate is changed by using the top rod to swing forward multiple times, so that the position of the substrate is transferred by using the small stroke of the top rod. It is ensured that different positions of the substrate are in the mounting hole of the support table, the dynamic and uniform heating of the substrate is ensured, and the film formation quality is improved.

[0020] In a second aspect, a vacuum drying device is provided, which comprises the above-mentioned dialing type support device.

[0021] Another embodiment of the present application provides a vacuum drying device, since the vacuum drying device comprises the above-mentioned dialing type support device, the beneficial effects of the vacuum drying device are consistent with those of the above-mentioned dialing type support device, which will not be described here. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced as follows. Obviously, the drawings in the following description are only some embodiments of the present application, and other drawings can also be obtained by those skilled in the art without creative labor.

[0023] Figure 1 A schematic view of the top rod supporting the substrate is provided for the embodiment of the present application; Figure 2 A schematic view of the top rod in a swing state is provided for the embodiment of the present application; Figure 3 A schematic view of the top rod swinging to lift the substrate is provided for the embodiment of the present application; Figure 4 A schematic view of the top rod in a swinging state is provided for the embodiment of the present application; Figure 5 A schematic view of the top rod supporting the substrate is provided for another embodiment of the present application; Figure 6 A schematic view of the top rod in a swinging state is provided for another embodiment of the present application; Figure 7 A schematic view of the top rod swinging to lift the substrate is provided for another embodiment of the present application; Figure 8 A schematic view of the top rod in a swinging state is provided for another embodiment of the present application.

[0024] In the figure: 1, a bearing table; 1a, a mounting hole; 2, a top rod; 3, a fulcrum structure; 4, a swinging driving member; 41, a connecting rod; 42, a horizontal moving frame; 43, a rotating disc; 44, a rotating driving member; 45, a rotating disc frame; 441, a gear transmission mechanism; 442, a rack frame; a, a substrate. DETAILED DESCRIPTION

[0025] To make the objectives, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described below in connection with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by a person of ordinary skill in the art without creative work fall within the protection scope of the present application.

[0026] The embodiments of the present application provide a dialing type bearing device and a vacuum drying equipment. The top rod is swung by the swinging driving member to dial the substrate by the top rod, so that the substrate switches positions on the bearing table, thereby avoiding that the local position of the substrate is at the mounting hole for a long time, making the substrate heated more uniformly, thereby ensuring the film forming quality. The present application solves the technical problem that the temperature uniformity of the substrate is affected by the top pin and the through hole on the bearing plate, and the film forming quality is adversely affected.

[0027] Reference Figures 1-4 A dialing type bearing device includes a bearing table 1, a top pin assembly, and a lifting driving member. The bearing table 1 has a plurality of through mounting holes 1a on the surface, the top pin assembly includes a plurality of top rods 2, the plurality of top rods 2 are respectively arranged in the plurality of mounting holes 1a, and an active space is left between the top rod 2 and the hole wall of the mounting hole 1a. The lifting driving member is drivingly connected with the bearing table 1 to drive the bearing table 1 to move up and down relative to the top pin assembly.

[0028] In this way, as the carrier platform 1 descends, the top rod 2 extends above the carrier platform 1, and the top rod 2 supports the substrate a, leaving space for the robot between the substrate a and the carrier platform 1. As the carrier platform 1 ascends, the carrier platform 1 supports the substrate a on the top rod 2, and at this time, the top of the top rod 2 is lower than the top surface of the carrier platform 1. The substrate a is supported by the carrier platform 1 during vacuum drying and film formation.

[0029] The lifting drive includes a linear motor and a screw mechanism.

[0030] Referring to Figure 1 and Figure 5 The dial-type carrier device further includes a fulcrum structure 3 and a swing drive 4. The fulcrum structure 3 is arranged in each mounting hole 1a, and the top rod 2 passes through the fulcrum structure 3 and is adapted to swing with the contact point of the fulcrum structure 3 as the rotation point. The fulcrum structure 3 limits the horizontal translation of the top rod 2. The swing drive 4 is drivingly connected to each top rod 2 to synchronously drive the plurality of top rods 2 to reciprocally swing.

[0031] In this way, even if the bottom end of the top rod 2 is hingedly arranged, the fulcrum structure 3 limits the horizontal translation of the top rod 2, and at the same time, the swing drive 4 does not drive the top rod 2 to swing, so that the top rod 2 does not swing when supporting the substrate a, thereby ensuring that the substrate a is stably supported by the top rod 2.

[0032] When the carrier platform 1 supports the substrate a, the top rod 2 reciprocally swings and synchronously ascends and descends relative to the carrier platform 1 to dial the substrate a on the carrier platform 1 to switch the position of the substrate a.

[0033] Specifically, when the substrate a is subjected to vacuum drying treatment to dry and form a film on the surface of the substrate a, the swing drive 4 drives the top rod 2 to swing, and the top rod 2 gradually extends above the carrier platform 1 during the swinging process, and then retracts into the carrier platform 1, and at the same time, the top of the top rod 2 moves linearly in the horizontal plane, thereby reciprocating. Therefore, as the top rod 2 swings, the top rod 2 lifts the substrate a and drives the substrate a to move linearly in the horizontal plane, and then places the substrate a on the carrier platform 1 again, i.e., the position of the substrate a relative to the carrier platform 1 is switched. By periodically changing the placement position of the substrate a on the carrier platform 1, the substrate a is prevented from being unevenly heated due to being placed at the mounting hole 1a of the carrier platform 1 for a long time. By changing the position of the substrate a, different positions of the substrate a contact the mounting hole 1a, thereby dynamically maintaining the uniform heating of the substrate a, avoiding the occurrence of MURA and other defects on the surface of the substrate a after film formation, and improving the film formation quality of the surface of the substrate a.

[0034] Further, to increase the transfer distance of the substrate a, the customized swing of the top rod 2 and the lifting movement of the supporting table 1 are used to make the top rod 2 swing forward to move the substrate a and swing reversely to return to the supporting table 1. Thus, the substrate a is moved in the same direction for multiple times by the forward swing of the top rod 2, and the substrate a is transferred in a large range. The different positions of the substrate a are ensured to be at the mounting hole 1a of the supporting table 1, the dynamic heating of the substrate a is ensured to be uniform, and the film forming quality is improved.

[0035] It should be noted that the forward swing and the reverse swing of the top rod 2 are only to distinguish the two swing directions.

[0036] In detail, since the top rod 2 and the hole wall of the mounting hole 1a have a moving space, the top rod 2 is supported to swing relative to the supporting table 1, so as to change the position of the substrate a in the horizontal direction. To ensure that the current substrate a is completely moved away from the position of the mounting hole 1a, after the top rod 2 swings forward to change the position of the substrate a, the supporting table 1 is lifted to increase the height difference between the supporting table 1 and the top rod 2, and then the top rod 2 swings reversely to return. At this time, the top rod 2 does not extend above the supporting table 1. Then, the supporting table 1 is lowered to return, and the top rod 2 swings forward again, so as to continuously change the position of the substrate a in the same direction. The position of the substrate a is transferred by using the small stroke of the top rod 2 through multiple forward swings of the top rod 2. The different positions of the substrate a are ensured to be at the mounting hole 1a of the supporting table 1, the dynamic heating of the substrate a is ensured to be uniform, and the film forming quality is improved.

[0037] Referring to Figures 1-4 The supporting table 3 includes a supporting sleeve, which is inserted into the mounting hole 1a and tightly contacts the hole wall of the mounting hole 1a in the circumferential outer side surface. In this embodiment, the supporting sleeve is in interference fit with the mounting hole 1a.

[0038] The supporting sleeve has a through supporting hole, and the top rod 2 is inserted into the supporting hole. The hole diameter of the supporting hole is designed to be large at the top and bottom and small in the middle, and the circumferential side surface of the top rod 2 tightly contacts the hole wall of the smallest hole diameter of the supporting hole. Specifically, the hole diameter of the supporting hole gradually becomes small first and then becomes large from top to bottom.

[0039] In this way, since the circumferential side surface of the top rod 2 tightly contacts the hole wall of the smallest hole diameter of the supporting hole, the top rod 2 is limited to translate in the horizontal plane. However, the top rod 2 can lift relative to the supporting sleeve. Due to the shape design of the supporting hole, the top rod 2 can swing relative to the supporting sleeve.

[0040] In other embodiments, the supporting sleeve is integrally formed with the supporting table 1. That is, the mounting hole 1a with the supporting hole is directly formed.

[0041] Further, the diameter of the mounting hole 1a at the portion above the fulcrum structure 3 is smaller than the diameter of the mounting hole 1a at the portion below the fulcrum structure 3.

[0042] In this way, the space for integrating the swing driving assembly in the mounting hole 1a below the fulcrum structure 3 is ensured, and the opening size of the mounting hole 1a on the surface of the supporting table 1 is reduced, so that the temperature difference of the portion of the supporting table 1 at the mounting hole 1a and other positions is smaller, and the temperature difference of the substrate a is not too large when the substrate a is static, so that the temperature consistency of the substrate a is better after the dynamic displacement of the substrate a, and the film forming quality is ensured.

[0043] In addition, by the difference between the diameters of the mounting hole 1a, a stepped surface is formed in the mounting hole 1a for positioning and mounting of the supporting sleeve, and the supporting sleeve is abutted to the stepped surface, Referring to Figures 1-4 The swing driving member 4 includes a horizontal moving frame 42, a horizontal moving driving member, and a plurality of connecting rods 41. The horizontal moving frame 42 is located below the supporting table 1, and the horizontal moving frame 42 is arranged to slide on a horizontal plane. The bottom ends of the plurality of connecting rods 41 are fixed to the horizontal moving frame 42, and the top ends of the plurality of connecting rods 41 respectively extend into the plurality of mounting holes 1a, and the top ends of the plurality of top rods 2 are respectively hinged to the bottom ends of the plurality of top rods 2.

[0044] The horizontal moving driving member is drivingly connected with the horizontal moving frame 42 to drive the horizontal moving frame 42 and the plurality of connecting rods 41 to make reciprocating linear motion on the horizontal plane.

[0045] In this way, the top rod 2 makes linear motion with the connecting rod 41 under the limitation of the fulcrum structure 3, so as to drive the top rod 2 to make synchronous swing motion and lifting motion. The top rod 2 extends above the supporting table 1 to lift the substrate a, and moves the substrate a in the horizontal direction, and then places the substrate a on the supporting table 1 again to complete the displacement of the substrate a.

[0046] Specifically, the horizontal moving driving member includes a linear motor or a screw mechanism.

[0047] Referring to Figures 5-8 In other embodiments, the swing driving member 4 includes a rotating driving member 44 and a plurality of rotating disc assemblies. The rotating disc assembly includes a rotating disc 43 and a rotating disc frame 45, and the rotating disc frame 45 is mounted on the external frame and extends into the mounting hole 1a. The plurality of rotating discs 43 are respectively located in the plurality of mounting holes 1a, and the rotating disc 43 is arranged to rotate on the rotating disc frame 45, and the rotating axis of the rotating disc 43 is arranged horizontally. The bottom end of the top rod 2 is eccentrically hinged to the rotating disc 43.

[0048] Referring to Figures 5-8The rotating driving member 44 is drivingly connected with the plurality of rotating discs 43 to drive the plurality of rotating discs 43 to rotate reciprocatingly synchronously. That is, the rotating discs 43 rotate reciprocatingly to drive the plurality of jacks 2 to swing and move up and down synchronously. The jacks 2 are extended to the upper side of the supporting table 1 to lift the substrate a, and then the substrate a is moved horizontally, and then the substrate a is placed on the supporting table 1 again to complete the displacement of the substrate a.

[0049] With reference to Figures 5-8 Specifically, the rotating driving member 44 comprises a rack frame 442, a linear driving member and a plurality of gear transmission mechanisms 441. The gear transmission mechanisms 441 are installed on the rotating disc frame 45. The output wheels of the plurality of gear transmission mechanisms 441 are respectively located in the plurality of mounting holes la, and the output wheels of the plurality of gear transmission mechanisms 441 are respectively fixed coaxially with the plurality of rotating discs 43.

[0050] The rack frame 442 is located below the supporting table 1, and the rack frame 442 is arranged to slide linearly in the horizontal plane.

[0051] The input wheels of the plurality of gear transmission mechanisms 441 are drivingly connected with the rack frame 442. Specifically, the input wheels of the gear transmission mechanisms 441 are engaged with the racks on the rack frame 442.

[0052] The linear driving member is drivingly connected with the rack frame 442 to drive the rack frame 442 to move reciprocatingly in the horizontal plane, thereby driving the input wheels of the plurality of gear transmission mechanisms 441 to rotate, that is, the rotating discs 43 are driven to rotate reciprocatingly, and finally the plurality of jacks 2 are driven to swing reciprocatingly synchronously.

[0053] In this embodiment, the linear driving member comprises a screw mechanism or a linear motor.

[0054] Among them, the gear transmission mechanism 441 realizes the power transmission as a conventional technology, and the gear transmission mechanism 441 can realize the change of the transmission shaft direction, which is also a conventional technology, and will not be described in detail here.

[0055] The rack frame 442 in this embodiment comprises a plurality of racks to meet the engagement requirements of the input wheels of the plurality of gear transmission mechanisms 441. The linear motion of the rack drives the input wheels of the gear transmission mechanisms 441 to rotate to realize the power transmission, which is also a conventional form, and will not be described in detail here.

[0056] Preferably, when the jacks 2 swing to displace the substrate a, the length of the jacks 2 above the fulcrum structure 3 is less than the length of the jacks 2 below the fulcrum structure 3.

[0057] In this way, when the bottom of the top rod 2 is driven to move linearly on the horizontal plane and the top of the top rod 2 is driven to swing, the moving distance of the bottom of the top rod 2 on the horizontal plane is greater than the moving distance of the top of the top rod 2 on the horizontal plane, so that the speed of the top of the top rod 2 is more easily controlled, the swing speed of the top of the top rod 2 is prevented from being too fast to damage the substrate a, the substrate a is more stably pushed, and the film forming quality is ensured.

[0058] In addition, since the mounting hole 1a is designed to have a large upper hole diameter and a small lower hole diameter, the design requirements of the length of the top rod 2 above the fulcrum structure 3 and the length of the top rod 2 below the fulcrum structure 3 are met.

[0059] The top surface of the top rod 2 is provided with a heat-conducting flexible layer.

[0060] The top rod 2 contacts the substrate a by using the heat-conducting flexible layer, so as to flexibly contact the substrate a, ensure heat transfer between the top rod 2 and the substrate a, and ensure the temperature of the substrate a at the top rod 2.

[0061] In this way, the substrate a is flexibly supported, each top rod 2 supports the substrate a, and the installation precision of the top rod 2 is reduced.

[0062] Specifically, the material of the heat-conducting flexible layer includes ceramic powder silica gel.

[0063] The embodiment of the present application provides a pushing type bearing device. When the substrate a is fed onto the bearing table 1, the lifting driving member drives the bearing table 1 to descend, at this time, the top rod 2 is lifted above the bearing table 1, and the substrate a is received by the top rod 2. Then, the bearing table 1 is lifted until the substrate a is supported. During the lifting of the bearing table 1, the fulcrum structure 3 limits the horizontal translation of the top rod 2, and the swing driving member 4 does not drive the top rod 2 to swing, so that the top rod 2 remains stationary when the bearing table 1 is lifted and descended, and the stable receiving of the substrate a by the top rod 2 is ensured.

[0064] When the substrate a is subjected to vacuum drying treatment to dry the film formed on the surface of the substrate a, the swing driving member 4 drives the top rod 2 to swing, the top rod 2 gradually extends above the bearing table 1 during the swinging process, and then is retracted into the bearing table 1, and at the same time, the top of the top rod 2 moves linearly in the horizontal plane, so as to reciprocate. Therefore, with the swinging of the top rod 2, the top rod 2 lifts the substrate a, drives the substrate a to move linearly in the horizontal plane, and places the substrate a on the bearing table 1 again, that is, the position switching of the substrate a relative to the bearing table 1 is realized. By regularly changing the placement position of the substrate a on the bearing table 1, the substrate a is prevented from being unevenly heated due to long-time placement at the mounting hole 1a of the bearing table 1, the different positions of the substrate a are caused to contact the mounting hole 1a by changing the position of the substrate a, the substrate a is dynamically kept from being unevenly heated, and the film forming quality of the surface of the substrate a is improved.

[0065] Since the active space is left between the top rod 2 and the hole wall of the mounting hole 1a to support the top rod 2 to swing relative to the bearing table 1, the position of the substrate a is changed in the horizontal direction. To ensure that the current substrate a is completely removed from the position of the mounting hole 1a, after the forward swing of the top rod 2 to change the position of the substrate a is completed, the bearing table 1 is raised to increase the height difference between the bearing table 1 and the top rod 2, and the top rod 2 is swung back in the reverse direction, at this time the top rod 2 does not extend above the bearing table 1. Then the bearing table 1 is lowered back to the original position, and the top rod 2 is swung forward again, so that the position of the substrate a is continuously changed in the same direction. The position of the substrate a is changed by multiple forward swings of the top rod 2, so that the position transfer of the substrate a is completed by small stroke of the top rod 2. The different positions of the substrate a are ensured to be at the mounting hole 1a of the bearing table 1, the dynamic heating of the substrate a is ensured to be uniform, and the film forming quality is improved.

[0066] In a second aspect, a vacuum drying device is provided, which comprises the above-mentioned dialing bearing device.

[0067] Another embodiment of the present application provides a vacuum drying device, since the vacuum drying device comprises the above-mentioned dialing bearing device, the beneficial effects of the vacuum drying device are consistent with those of the above-mentioned dialing bearing device, which will not be repeated here.

[0068] In the description of the present application, it should be noted that the positions or position relationships indicated by the terms "upper", "lower", etc. are based on the positions or position relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular position, be constructed and operated in a particular position, and therefore cannot be understood as a limitation on the present application. Unless otherwise specified and limited, the terms "mounting", "connection", "connection" should be understood broadly, for example, it can be fixed connection, or detachable connection, or integral connection; it can be mechanical connection, or electrical connection; it can be direct connection, or indirect connection through intermediate medium, or internal communication of two elements. For those skilled in the art, the specific meaning of the above-mentioned terms in the present application can be understood according to the specific circumstances.

[0069] It should be noted that, in the present application, the relational terms such as "first" and "second", and the like, are used solely to distinguish one entity or action from another, without necessarily requiring or implying any actual relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can also include other elements not expressly listed or inherent to such process, method, article, or apparatus. An element proceeded by "comprises... a" does not, without more constraints, exclude the existence of additional identical elements in the process, method, article, or apparatus that comprises the element.

[0070] The foregoing is considered as illustrative only of the principles of the application. Numerous modifications and changes will readily occur to those skilled in the art, and the generic principles defined herein can be applied to other embodiments without departing from the spirit or scope of the application. Accordingly, the scope of the application is intended to be defined only as set forth in the claims.

Claims

1. A toggle-type bearing device, characterized in that, It includes: A support platform, the surface of which is provided with multiple through mounting holes; A ejector assembly, comprising a plurality of ejector rods, the plurality of ejector rods being respectively inserted into a plurality of mounting holes, wherein a movable gap is left between the ejector rods and the wall of the mounting hole; A lifting drive component is connected to the support platform to drive the support platform to move up and down relative to the ejector pin assembly; The mounting holes are equipped with the fulcrum structure, the push rod passes through the fulcrum structure, and the push rod is adapted to swing with the contact point with the fulcrum structure as the rotation point, and the fulcrum structure restricts the push rod from translating in the horizontal direction; A swing drive component is provided, which is driven to connect to multiple push rods to synchronously drive the multiple push rods to swing back and forth. When the support platform supports the substrate, the top rod swings back and forth and moves up and down synchronously relative to the support platform to move the substrate on the support platform and change the position of the substrate.

2. The toggle-type bearing device according to claim 1, characterized in that, The fulcrum structure includes a support sleeve, which is inserted into the mounting hole. The support sleeve has a through support hole in the middle, and the top rod passes through the support hole. The diameter of the support hole is set to be larger at the top and bottom and smaller in the middle, and the circumferential side of the top rod is attached to the wall of the smallest diameter hole of the support hole.

3. The toggle-type bearing device according to claim 2, characterized in that, The support sleeve is integrally formed with the bearing platform.

4. The toggle-type bearing device according to claim 1, characterized in that, The diameter of the mounting hole located above the fulcrum structure is smaller than the diameter of the mounting hole located below the fulcrum structure.

5. The toggle-type bearing device according to claim 1, characterized in that, The swing drive component includes: Multiple connecting rods, one end of each of the multiple connecting rods being hinged to the bottom end of the multiple top rods; A transverse frame, wherein multiple connecting rods are fixed to the transverse frame; A transverse drive unit is connected to the transverse frame to drive the transverse frame and the multiple connecting rods to perform reciprocating linear motion in the horizontal plane. The connecting rod moves linearly, thereby driving the top rod to perform oscillating and lifting movements synchronously.

6. The toggle-type bearing device according to claim 1, characterized in that, The swing drive component includes: Multiple turntable assemblies, each turntable assembly including a turntable and a turntable frame 45, the turntable being rotatably mounted on the turntable frame 45, the turntable frame 45 being fixed to an external frame, the rotation axis of the turntable being arranged horizontally; the multiple turntables are respectively located in the multiple mounting holes, and the bottom end of the top rod is eccentrically hinged to the turntable; A rotary drive component is provided, which is connected to multiple turntables to drive the multiple turntables to reciprocate synchronously. As the turntable rotates back and forth, it drives the top rod to perform oscillating and lifting movements in sync.

7. The toggle-type bearing device according to claim 6, characterized in that, The rotary drive component includes: Multiple sets of gear transmission mechanisms, wherein the output wheels of the multiple sets of gear transmission mechanisms are respectively fixed coaxially with the multiple turntables; The rack carrier, and the input wheels of the multiple sets of gear transmission mechanisms are all driven by the rack carrier; A linear drive unit is connected to the rack carrier to drive the rack carrier to reciprocate in the horizontal plane, thereby driving the output wheels of all the gear transmission mechanisms and all the turntables to rotate.

8. The actuating bearing device according to claim 5 or 6, characterized in that, When the push rod swings, the length of the push rod above the fulcrum structure is less than the length of the push rod below the fulcrum structure.

9. The toggle-type bearing device according to claim 1, characterized in that, The top surface of the top rod is provided with a thermally conductive flexible layer.

10. A vacuum drying apparatus, characterized in that, Includes the toggle-type bearing device as described in any one of claims 1-9.

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