Microarray lens white light interference detection system and method

Abstract

The invention relates to the field of white light interference detection, in particular to a microarray lens white light interference detection system and method. The white light interferometer main body is used for generating and providing a white light interference detection light path; the voice coil motor driving module comprises a voice coil motor and a piezoelectric ceramic fine tuning sheet attached to the bottom of the voice coil motor and is used for driving the single-probe optical machine to perform scanning motion along the Z axis, and the single-probe optical machine is integrated with an interference objective lens of the white light interferometer main body; the multi-parameter detection module is used for synchronously acquiring displacement, load fluctuation and center-of-gravity shift data of the single-probe ray machine; the mechanical supporting module comprises an objective table used for bearing the microarray lens to be tested; and the intelligent control unit is in communication connection with the voice coil motor driving module, the multi-parameter detection module and the thermal management module, and is used for generating a driving current compensation amount in real time based on the synchronously acquired data so as to control the voice coil motor. The performance of efficient and high-precision white light interference detection on the microarray lens is improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of white light interference detection, in particular to a micro-lens array white light interference detection system and method. BACKGROUND

[0002] In the detection of micro-lens arrays (such as AR / VR optical modules, semiconductor lithography lenses), vertex radius, conical coefficient and surface residual error are core detection parameters, and a single probe light machine (integrating an interference objective lens, a high-speed camera and other components) is a core execution component for realizing detection, which needs to have a load capacity suitable for batch detection. The current mainstream driving scheme in the industry mainly falls into two categories:

[0003] The first category is a piezoelectric ceramic motor scheme, such as disclosed in the published patent CN113114128B, which adopts a combination of "piezoelectric ceramic phase shifter + capacitance sensor" and relies on high-voltage driving to achieve high-precision positioning, but is limited by the physical properties of piezoelectric ceramics, and the maximum load of a single axis far fails to meet the driving needs of a large-load single probe light machine, which has a fundamental defect in large-load scenarios.

[0004] The second category is a servo motor scheme, which adopts a "servo motor + ball screw" structure and has a load capacity that can cover the needs of a large-load single probe light machine, but has two major problems: one is low bandwidth, which cannot meet the efficiency needs of fast scanning; the other is that the positioning accuracy is difficult to match the high-precision detection standards of micro-lens arrays, and even after compensation, further optimization is still needed.

[0005] In addition, the industry has tried a "servo motor + piezoelectric ceramic" composite driving scheme, trying to balance load and accuracy, but this scheme has the problems of bulky structure (excessive axial size, which cannot be integrated into a compact detection system) and high cost (far exceeding the single motor scheme), and has not been applied on a large scale. SUMMARY

[0006] The present application aims to provide a micro-lens array white light interference detection system and method, which solves the problems in the prior art.

[0007] The present application is achieved by the following technical solutions:

[0008] In a first aspect, the present application provides a micro-lens array white light interference detection system, comprising:

[0009] a white light interferometer main body for generating and providing a white light interference detection light path;

[0010] a voice coil motor driving module including a voice coil motor and a piezoelectric ceramic trimmer attached to the bottom of the voice coil motor, for driving a single probe light machine to move along the Z-axis, the single probe light machine integrating an interference objective lens of the white light interferometer main body;

[0011] a multi-parameter detection module for synchronously collecting displacement, load fluctuation and gravity center offset data of the single-probe optical machine;

[0012] a mechanical support module including a stage for carrying the microarray lens under test;

[0013] an intelligent control unit in communication connection with the voice coil motor driving module, the multi-parameter detection module and the thermal management module, for generating driving current compensation in real time based on the synchronously collected data to control the voice coil motor.

[0014] Preferably, further comprising a thermal management module for temperature control of the high-speed camera in the single-probe optical machine;

[0015] The intelligent control unit is further configured to: execute a camera heat dissipation, structure deformation and detection efficiency cooperative control scheme, and dynamically adjust operation parameters of the thermal management module and scanning processing parameters; wherein the heat dissipation strategy of the thermal management module is controlled in association with the acquisition frame rate of the high-speed camera to suppress interference fringe distortion caused by high temperature.

[0016] Preferably, the thermal management module includes a high-speed camera dedicated heat dissipation unit, which includes:

[0017] a heat plate tightly adhered to a target surface area of the high-speed camera and a surface of an image processor through a heat-conducting medium;

[0018] a micro water cooling circuit including a micro water pump, a water cooling radiator and a connecting pipeline, the water cooling radiator being linked with a camera-side auxiliary fan;

[0019] a temperature control unit for real-time acquisition of camera target surface temperature and dynamic adjustment of flow rate of the micro water pump and rotation speed of the auxiliary fan according to a preset temperature threshold interval.

[0020] Preferably, the multi-parameter detection module includes:

[0021] an optical encoder, a grating scale of the optical encoder being parallel to a Z-axis movement direction of the voice coil motor, and a reading head of the optical encoder being fixed on a mover of the voice coil motor;

[0022] a tension sensor connected in series between the mover of the voice coil motor and the single-probe optical machine for monitoring load fluctuation;

[0023] a laser displacement sensor installed on a side of the single-probe optical machine, a laser beam of the laser displacement sensor being directed vertically to a reference plane of the single-probe optical machine for detecting gravity center offset of the single-probe optical machine.

[0024] Preferably, the output signals of the grating encoder, the tension sensor and the laser displacement sensor are transmitted to the intelligent control unit through the same data bus, and the timestamp alignment error of each output signal is less than 1 millisecond.

[0025] In a second aspect, the embodiments of the present application provide a micro-lens array white light interferometric detection method, applied to the system of the first aspect, the method comprising:

[0026] The measured micro-lens array is placed on the stage of the mechanical support module;

[0027] The scanning path is planned according to the array arrangement of the lens unit;

[0028] The voice coil motor drives the single-probe optical machine to perform interferometric scanning along the Z-axis, and the white light interferometer body collects interference fringes;

[0029] In the scanning process, a driving compensation method is executed;

[0030] The interference fringes are processed to obtain the vertex radius, conic coefficient and surface residual error parameters of each unit of the micro-lens array;

[0031] The driving compensation method comprises:

[0032] The driving current of the voice coil motor, the actual displacement and speed of the grating encoder, the load of the tension sensor, the temperature of the temperature sensor and the center of gravity offset of the laser displacement sensor are synchronously collected;

[0033] A predicted displacement deviation caused by coupling effect is calculated according to the actual displacement, the driving current, the temperature, the load and the center of gravity offset;

[0034] An inertial compensation amount is calculated according to the speed and the mass of the single-probe optical machine;

[0035] The predicted displacement deviation and the inertial compensation amount are fused to generate a total driving current compensation amount;

[0036] The total driving current compensation amount is superimposed on the driving current to control the movement of the voice coil motor.

[0037] Preferably, the predicted displacement deviation caused by coupling effect is calculated according to the actual displacement, the driving current, the temperature, the load and the center of gravity offset, comprising:

[0038] The driving current, the temperature, the load and the center of gravity offset are substituted into a pre-constructed multi-physics field coupling model to calculate a predicted displacement caused by coupling effect, wherein the multi-physics field coupling model is:

[0039] ;

[0040] in, To predict displacement, For driving current, For temperature, For load, This is the offset of the center of gravity. - For model parameters, For residuals;

[0041] The predicted displacement deviation is obtained based on the actual displacement and the predicted displacement;

[0042] If the predicted displacement deviation exceeds a preset deviation threshold, the multiphysics coupling model is iteratively updated according to a preset update frequency.

[0043] Preferably, the calculation of the inertial compensation amount based on the velocity and the mass of the single-probe optical engine includes:

[0044] Regarding the speed By performing differential calculations, the instantaneous acceleration 'a' of the single-probe optomechanical system is obtained;

[0045] Based on the mass m of the single-probe optical engine, the inertial force is calculated using Newton's second law. ;

[0046] Based on the thrust coefficient k1 of the voice coil motor, the inertial force Converted into the corresponding inertia compensation current ;

[0047] The inertial compensation current As the inertial compensation amount;

[0048] And / or, the process of fusing the predicted displacement deviation with the inertia compensation amount to generate the total drive current compensation amount includes:

[0049] Based on system bandwidth and the speed The phase lag compensation amount is obtained through polynomial fitting. ,in - These are the fitting coefficients. For system bandwidth;

[0050] According to the predicted displacement deviation The phase lag compensation amount and the inertial compensation current The total drive current compensation amount is calculated. .

[0051] Preferably, during the scanning process, a cooperative control method is also executed synchronously, the cooperative control method including:

[0052] The target surface temperature of the high-speed camera is monitored in real time using a temperature sensor.

[0053] Based on the preset temperature range of the target surface temperature, a corresponding heat dissipation control strategy is dynamically selected and executed. The heat dissipation control strategy includes at least the adjustment of water cooling flow rate and the adjustment of camera acquisition frame rate.

[0054] Based on the real-time center of gravity offset collected by the laser displacement sensor and the current Z-axis position of the single probe optomechanical unit, the preset three-dimensional structural deformation compensation matrix is ​​queried to obtain the deformation compensation amount and inject the positioning command.

[0055] Preferably, the heat dissipation control strategy corresponding to the preset temperature range includes:

[0056] First zone: When the temperature is below or equal to the first threshold, a basic heat dissipation strategy is adopted and the camera's highest frame rate is maintained.

[0057] Second range: when the temperature is higher than the first threshold but lower than the second threshold, an enhanced heat dissipation strategy is adopted while maintaining the camera frame rate unchanged;

[0058] Third zone: When the temperature is equal to or higher than the second threshold, the maximum heat dissipation strategy is adopted and the camera frame rate is temporarily reduced.

[0059] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0060] This system achieves a significant performance improvement in efficient and high-precision white-light interferometry detection of microarray lenses. At the hardware level, by employing a composite drive architecture combining a voice coil motor and a piezoelectric ceramic trimmer, and integrating a multi-sensor synchronous detection network, the system achieves the high thrust and high bandwidth required to drive a single-probe optomechanical system under heavy loads. Simultaneously, it possesses the ability to synchronously sense multi-dimensional physical quantities such as displacement, load, and center-of-gravity shift. At the control level, by executing a multi-physics coupling and inertial hysteresis collaborative compensation algorithm in real time, the system can dynamically calculate and compensate for positioning deviations and motion inertial effects caused by the coupling of current, temperature, load, and structural deformation. This significantly suppresses the impact of various disturbances on Z-axis positioning accuracy under high-load, high-speed scanning conditions, improving the motion stability and positioning repeatability of the single-probe optomechanical system.

[0061] By implementing a coordinated control strategy encompassing camera heat dissipation, deformation compensation, and efficiency optimization, the system achieves closed-loop management of the operating temperature of key imaging components. The control method, linking heat dissipation power to the camera frame rate, maintains high data acquisition efficiency while preventing image noise or fringe distortion caused by overheating of the camera target surface. Combined with real-time deformation compensation based on a 3D calibration matrix, the system reduces structural interference affecting positioning accuracy. Ultimately, the combined effect of these techniques enables the system to complete stable and reliable interferometric scanning and fringe acquisition within a single-point measurement time when handling batch inspections of microlens arrays with a large number of elements and high density. Based on high-quality interferometric images, accurate parameters such as vertex radius, conic coefficient, and surface residuals are calculated, improving overall inspection efficiency and parameter consistency. This effectively resolves the traditional contradiction between high load, high precision, and high efficiency inspection, adapting to the precision inspection requirements of microlens arrays in fields such as AR / VR optical modules and semiconductor lithography lenses. Attached Figure Description

[0062] To more clearly illustrate the technical solutions of the exemplary embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly described below. It should be understood that the following drawings only show some embodiments of the present invention and should not be considered as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort. In the drawings:

[0063] Figure 1 This is a schematic diagram of the structure of the microarray lens white light interferometry detection system provided by the present invention;

[0064] Figure 2 This is a schematic flowchart of the microarray lens white light interferometry detection method provided by the present invention;

[0065] Figure 3 A schematic flowchart of the driving compensation method provided by the present invention;

[0066] Figure 4 A flowchart illustrating the collaborative control method provided by this invention. Detailed Implementation

[0067] To make the objectives, technical solutions, and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the embodiments and accompanying drawings. The illustrative embodiments and descriptions of the present invention are only used to explain the present invention and are not intended to limit the present invention.

[0068] It should be noted that, in this document, relational terms such as "first" and "second" are used merely to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising..." does not exclude the presence of additional identical elements in the process, method, article, or apparatus that includes said element.

[0069] It should be noted that all actions involving the acquisition of signals, information, or data in this invention are carried out in compliance with the relevant data protection laws and regulations of the locality and with authorization from the owner of the relevant device.

[0070] Example 1

[0071] Please see Figure 1 This invention provides a microarray lens white light interferometry detection system, comprising:

[0072] The main body of the white light interferometer is used to generate and provide the optical path for white light interferometry detection.

[0073] The voice coil motor drive module includes a voice coil motor and a piezoelectric ceramic trimmer attached to the bottom of the voice coil motor, which is used to drive a single probe optical engine to perform scanning motion along the Z-axis. The single probe optical engine integrates the interference objective lens of the white light interferometer body.

[0074] A multi-parameter detection module is used to synchronously collect displacement, load fluctuation, and center of gravity offset data of the single-probe optomechanical system;

[0075] The mechanical support module includes a stage for supporting the microarray lens under test;

[0076] The intelligent control unit is communicatively connected to the voice coil motor drive module, the multi-parameter detection module, and the thermal management module. It is used to generate drive current compensation in real time based on synchronously acquired data to control the voice coil motor.

[0077] Specifically, the voice coil motor drive module includes the voice coil motor body. The rated load of the motor body can cover the needs of a large-load single-probe optomechanical system, and the thrust and stroke are adapted to the detection scenario. The mover is rigidly connected to the optomechanical system by bolts, and the stator is fixed to the marble platform. Piezoelectric ceramic trimmers are attached to the bottom of the motor stator to compensate for small high-frequency errors and improve positioning stability.

[0078] Multi-parameter detection module: includes a grating encoder, a tension sensor, and a laser displacement sensor. The grating encoder is parallel to the motor's direction of motion and collects displacement data in real time; the tension sensor is connected in series between the motor and the optomechanical system to monitor load fluctuations; the laser displacement sensor is installed on the side of the optomechanical system to detect the position of its center of gravity and avoid interference from center of gravity offset.

[0079] Intelligent control unit: It adopts an FPGA+GPU collaborative architecture. The FPGA runs the compensation algorithm in real time (response frequency 10kHz), and the GPU accelerates the processing of interference fringes (adapting to high frame rate data from high-speed cameras). The two achieve low-latency data interaction through a high-speed interface; at the same time, it connects all sensors and actuators to control the operation of the system in a unified manner.

[0080] Mechanical support module: includes a marble platform (high flatness) and an air-floating stage. The marble platform holds the motor drive module and control unit, ensuring structural stability; the air-floating stage supports the lens under test, suppresses ground vibration, and avoids vibration interference with the test.

[0081] In some embodiments, the system also includes a thermal management module for temperature control of the high-speed camera in the single-head optical engine;

[0082] The intelligent control unit is also used to: execute a coordinated control scheme for camera heat dissipation, structural deformation, and detection efficiency, and dynamically adjust the operating parameters and scanning processing parameters of the thermal management module; wherein, the heat dissipation strategy of the thermal management module is correlated with the acquisition frame rate of the high-speed camera to suppress interference fringe distortion caused by high temperature.

[0083] Specifically, the thermal management module consists of a dedicated heat dissipation unit for the high-speed camera and auxiliary heat dissipation for the motor. The camera heat dissipation unit uses a vapor chamber and a miniature water-cooling circuit. The vapor chamber is tightly fitted to the camera's target surface and the core heat-generating area. The water-cooling circuit uses a miniature water pump to circulate coolant, and a temperature sensor (monitoring range 0-100℃) collects the camera temperature in real time. When the camera temperature approaches 65℃, the water cooling flow rate is automatically adjusted to control the local camera temperature to not exceed 65℃, avoiding increased noise or stripe distortion caused by temperatures rising to 70℃. The auxiliary heat dissipation for the motor uses aluminum heat sinks fitted to the motor stator to control the motor's operating temperature.

[0084] The thermal management module controls the temperature of the high-speed camera in the single-head optical engine. During prolonged high frame rate operation, the camera's image sensor continuously generates a large amount of heat, causing its target surface temperature to gradually rise. This leads to increased thermal noise, which may result in decreased contrast or degraded signal-to-noise ratio in the acquired white light interference fringe image, affecting the accuracy of subsequent phase calculations. To address this issue, the system employs a closed-loop control method that correlates the heat dissipation strategy with the camera's frame rate. The intelligent control unit monitors the operating temperature of the camera target surface in real time through a temperature sensor and dynamically selects and executes corresponding composite control strategies based on preset temperature threshold ranges: when the temperature is in a lower range, the system maintains a high camera frame rate and basic heat dissipation power to prioritize detection efficiency; when the temperature rises to the intermediate warning range, the system maintains the current camera frame rate while actively increasing the cooling power of the heat dissipation module, such as increasing the water cooling loop flow or increasing the fan speed, to suppress further temperature increases; if the temperature reaches or exceeds a higher protection threshold, the system maximizes heat dissipation capacity while temporarily and moderately reducing the camera's acquisition frame rate to quickly reduce the heat generation intensity of the core heat source, thereby preventing the camera target surface temperature from continuously rising to a level that could cause significant deterioration in the fringe image quality. This collaborative control mechanism, which links heat dissipation actions with core imaging parameters, achieves proactive management and constraint of the camera's operating temperature. Without excessively sacrificing detection efficiency, it stably controls the camera temperature within a safe range, effectively preventing interference fringe image distortion caused by high-temperature thermal noise, ensuring the acquisition quality and reliability of fringe information, and providing a guarantee for the long-term stable operation and measurement accuracy of the entire detection system.

[0085] In some embodiments, the thermal management module includes a dedicated heat dissipation unit for high-speed cameras, which includes:

[0086] A heat spreader is tightly bonded to the target area of ​​the high-speed camera and the surface of the image processor via a heat-conducting medium.

[0087] The miniature water-cooling circuit includes a miniature water pump, a water-cooling radiator, and connecting pipes, wherein the water-cooling radiator is linked to the auxiliary fan on the camera side;

[0088] The temperature control unit is used to collect the camera target surface temperature in real time and dynamically adjust the flow rate of the micro water pump and the speed of the auxiliary fan according to the preset temperature threshold range.

[0089] Specifically, the thermal management module includes a dedicated heat dissipation unit designed for high-speed cameras. This unit employs an active composite heat dissipation architecture to address the heat flux density of the camera's core heat-generating areas. Its core components include: a heat spreader plate tightly bonded to the camera's image sensor target surface and image processor chip surface via a high-performance thermally conductive medium, used to rapidly diffuse the high-intensity heat generated by point heat sources laterally, forming a uniform temperature field; a micro water-cooling circuit, including a micro water pump for driving coolant circulation, a water-cooled radiator for heat exchange with ambient air, and corresponding flexible connecting pipes. The water-cooled radiator is linked to an auxiliary fan installed on the side of the camera, enhancing the radiator's heat dissipation efficiency through forced air cooling; and a temperature control unit. This unit continuously collects the actual operating temperature through a high-response temperature sensor integrated near the camera target surface and dynamically adjusts the micro water pump motor speed in a closed-loop control manner according to preset multi-level temperature threshold ranges to change the coolant circulation flow rate, and simultaneously adjusts the auxiliary fan speed to adjust the air cooling intensity. When the camera is under low load or in the initial working phase, the temperature is low, and the system can maintain the basic speed of the water pump and fan, meeting basic heat dissipation needs while reducing energy consumption and operating noise. As the detection task continues, the camera target surface temperature rises and enters a higher threshold range. The temperature control unit will proportionally increase the water pump flow and fan speed according to a preset control law, thereby linearly enhancing the heat conduction and convection capabilities of the entire heat dissipation system and effectively suppressing the rate of temperature rise. If the temperature approaches the set protection limit due to abnormal conditions, the control unit will instruct the water pump and fan to operate at maximum power to ensure that the heat dissipation capacity reaches its peak instantaneously, thus creating the necessary conditions for the temperature to drop. This design, which uses real-time temperature feedback to coordinate and steplessly regulate the liquid cooling flow and air cooling intensity, achieves dynamic matching between heat dissipation capacity and thermal load. It can stably maintain the operating temperature of the camera's core components within a range that does not adversely affect electronic noise and image performance without introducing drastic temperature fluctuations, ensuring the thermal stability and imaging reliability of the high-speed camera under continuous high frame rate operation conditions.

[0090] In some embodiments, the multi-parameter detection module includes:

[0091] A grating encoder, wherein the grating scale of the grating encoder is parallel to the Z-axis movement direction of the voice coil motor, and the reading head of the grating encoder is fixed to the mover of the voice coil motor;

[0092] A tension sensor is connected in series between the mover of the voice coil motor and the single-probe optical engine to monitor load fluctuations;

[0093] A laser displacement sensor is installed on the side of the single-probe optical engine. The laser beam of the laser displacement sensor is perpendicular to the reference plane of the single-probe optical engine and is used to detect the center of gravity offset of the single-probe optical engine.

[0094] Specifically, the multi-parameter detection module integrates three types of sensors to form a synchronous sensing network for the motion state and mechanical environment of the single-probe optomechanical system. The grating scale of the grating encoder is precisely mounted so that its measuring axis is parallel to the Z-axis drive direction of the voice coil motor. Simultaneously, its reading head is rigidly connected to the mover of the voice coil motor, thus directly and without transmission links measuring the absolute displacement and instantaneous velocity of the mover and its driven load in the Z-direction, providing high-resolution position feedback for motion control. In the power transmission path, a high-stiffness tension sensor is connected in series at the mechanical interface between the voice coil motor mover and the single-probe optomechanical system. This sensor monitors and outputs the axial force signal transmitted between the two in real time. This signal directly reflects the instantaneous fluctuations of the driving load and the inertial force component caused by acceleration changes, providing direct force measurement data to distinguish between load changes and inertial effects. In addition, a laser displacement sensor is fixedly mounted on the side of the single-probe optomechanical unit. Its laser emission axis is calibrated to a high-precision reference plane pre-calibrated on the optomechanical unit. The sensor continuously measures the positional change of the laser beam reflection point on the reference plane in a non-contact manner. This change directly corresponds to the lateral shift of the center of gravity that may occur during the movement of the single-probe optomechanical unit due to its internal mass distribution or external connections. By precisely aligning the high-frequency sampling data from these three sensors in time and transmitting them to the intelligent control unit, the system can synchronously acquire three key physical quantities: motion displacement, driving load, and center of gravity shift. This provides the necessary multi-dimensional, synchronous, and high-precision raw data input for subsequent construction of a multi-physics coupling model, calculation of inertial compensation, and correction of errors introduced by structural deformation or center of gravity drift, forming the data sensing foundation for achieving high-precision collaborative compensation.

[0095] In some embodiments, the output signals of the grating encoder, tension sensor, and laser displacement sensor are transmitted to the intelligent control unit through the same data bus, and the timestamp alignment error of each output signal is less than 1 millisecond.

[0096] Specifically, to achieve precise collaborative analysis and compensation of the dynamic behavior of a single-probe optomechanical system, the output signals of the grating encoder, tension sensor, and laser displacement sensor are transmitted to the intelligent control unit via a shared high-speed data bus. Furthermore, during signal acquisition and transmission, the system employs a unified high-precision time base to synchronize and mark the sampling times of each sensor, ensuring strict consistency in the timing of the three data streams: displacement, load, and center of gravity shift. The timestamp alignment error between corresponding data points is controlled within 1 millisecond. This strict time synchronization mechanism fundamentally guarantees the temporal consistency of multi-source data, enabling the intelligent control unit to accurately correlate and fuse the optomechanical position, applied mechanical load, and center of gravity shift state at the same moment. For example, when the system calculates the combined effect caused by load fluctuations and velocity changes, millisecond-level time alignment ensures that the load value used for calculation strictly corresponds to the displacement and acceleration values ​​generated at the actual moment the load is applied. This avoids incorrect correlation of physical states at different times due to data time misalignment, thereby eliminating model calculation errors or compensation command lag. Therefore, this design ensures the spatiotemporal uniformity of the input data of the multiphysics coupling model, enabling real-time prediction and compensation based on the model to accurately reflect the current physical state of the system, effectively improving the accuracy of the compensation algorithm and the overall stability of the system's dynamic control.

[0097] Example 2

[0098] Please see Figure 2 and Figure 3 This invention provides a microarray lens white light interferometry detection method, applied to the system of Embodiment 1, the method comprising:

[0099] S1. Place the microarray lens to be tested on the stage of the mechanical support module;

[0100] S2. Plan the scanning path according to the array arrangement of the lens units;

[0101] S3. Control the voice coil motor to drive the single probe optical engine to perform interference scanning along the Z-axis, and collect interference fringes through the main body of the white light interferometer;

[0102] S4. During the scanning process, execute the drive compensation method;

[0103] S5. Process the interference fringes and calculate the vertex radius, conic coefficient and surface residual parameters of each unit of the microarray lens;

[0104] The drive compensation method includes:

[0105] S411, synchronously acquire the drive current of the voice coil motor, the actual displacement and speed of the grating encoder, the load of the tension sensor, the temperature of the temperature sensor, and the center of gravity offset of the laser displacement sensor.

[0106] S412. Calculate the predicted displacement deviation caused by the coupling effect based on the actual displacement, the driving current, the temperature, the load, and the center of gravity offset.

[0107] S413. Calculate the inertial compensation amount based on the speed and the mass of the single-probe optical engine;

[0108] S414. Combine the predicted displacement deviation with the inertia compensation amount to generate the total drive current compensation amount;

[0109] S415. The total drive current compensation is added to the drive current to control the movement of the voice coil motor.

[0110] Specifically, through a closed-loop operation of continuous real-time acquisition, prediction, calculation, and compensation during the scanning process, dynamic positioning errors caused by multi-field coupling of current, heat, force, and structure, as well as load inertia, can be effectively suppressed, improving the stability and positioning accuracy of the Z-axis scan, thus creating favorable conditions for the stable acquisition of white light interference fringes. After scanning, the system processes a series of acquired interference fringe images, and through algorithms such as phase calculation, finally obtains key optical parameters such as the vertex radius of curvature, conic constant, and surface residual of each unit of the microarray lens.

[0111] The calculation of the predicted displacement deviation caused by the coupling effect based on the actual displacement, the driving current, the temperature, the load, and the center of gravity offset includes:

[0112] Substituting the driving current, temperature, load, and center of gravity offset into a pre-constructed multiphysics coupling model, the predicted displacement caused by the coupling effect is calculated. The multiphysics coupling model is as follows:

[0113] ;

[0114] in, To predict displacement, For driving current, For temperature, For load, This is the offset of the center of gravity. - For model parameters, For residuals;

[0115] The predicted displacement deviation is obtained based on the actual displacement and the predicted displacement;

[0116] If the predicted displacement deviation exceeds a preset deviation threshold, the multiphysics coupling model is iteratively updated according to a preset update frequency.

[0117] Specifically, the impact of coupling interference on positioning accuracy at the current moment is quantified by predicting displacement deviation. To ensure the model maintains prediction accuracy throughout the entire operation, the system continuously monitors the magnitude of this predicted displacement deviation. Once the deviation value exceeds a preset allowable threshold, indicating that the current operating point may have deviated from the model's original calibration range or that system characteristics have drifted, the system will trigger an online iterative update process at a preset fixed frequency, such as several hundred hertz. During this update process, the system will refit and calibrate the parameters k1 to k5 in the model based on a large number of actual data samples collected within the recent time window, using optimization algorithms such as least squares. This allows the updated model to better adapt to the current actual operating state of the system and maintain a high-fidelity prediction capability for coupling effects. This mechanism, combining real-time prediction and periodic online updates, endows the compensation system with adaptive capabilities to changes in the working environment and its own state drift, ensuring the continuity and robustness of the compensation effect during long-term operation.

[0118] In some embodiments, calculating the inertial compensation amount based on the velocity and the mass of the single-probe optical engine includes:

[0119] Regarding the speed By performing differential calculations, the instantaneous acceleration 'a' of the single-probe optomechanical system is obtained;

[0120] Based on the mass m of the single-probe optical engine, the inertial force is calculated using Newton's second law. ;

[0121] Based on the thrust coefficient k1 of the voice coil motor, the inertial force Converted into the corresponding inertia compensation current ;

[0122] The inertial compensation current As the inertial compensation amount;

[0123] And / or, the process of fusing the predicted displacement deviation with the inertia compensation amount to generate the total drive current compensation amount includes:

[0124] Based on system bandwidth and the speed The phase lag compensation amount is obtained through polynomial fitting. ,in - These are the fitting coefficients. For system bandwidth;

[0125] According to the predicted displacement deviation The phase lag compensation amount and the inertial compensation current The total drive current compensation amount is calculated. .

[0126] Specifically, the process of calculating the inertial compensation amount based on speed and the mass of the single-head optomechanical unit (SEM) involves converting kinematic physical quantities into compensation commands that can be directly used for current control. The system first performs numerical differentiation on the speed signal fed back in real-time from the grating encoder to obtain the instantaneous acceleration value of the SEM at the current moment. This acceleration value directly reflects the drastic change in motion state. Subsequently, based on the known mass of the SEM and using Newton's second law, the system calculates the magnitude of the inertial force required to generate this acceleration. To convert this mechanical quantity into executable commands for the drive system, the system further introduces the thrust coefficient of the voice coil motor, which characterizes the electromagnetic thrust generated per unit current. By dividing the calculated inertial force by this thrust coefficient, the system linearly converts it into an equivalent inertial compensation current value, which is the direct compensation amount used to counteract the inertial effect.

[0127] In the fusion step of generating the total drive current compensation, the system also needs to consider the phase lag effect caused by the limited response bandwidth of the control system. Based on the current speed and the known closed-loop bandwidth characteristics of the system, the system calculates the phase lag compensation current value matching the motion state through a pre-calibrated polynomial function relationship. The coefficients of the polynomial are obtained by fitting the lag response under different speed and bandwidth combinations through calibration experiments. Finally, the system converts the predicted displacement deviation obtained in the previous steps into the corresponding current compensation amount, and algebraically superimposes this current compensation amount, the calculated inertial compensation current, and the phase lag compensation current to generate a comprehensive total drive current compensation amount. This compensation amount integrates compensation for multi-physics coupling deviation, motion inertial effect, and system dynamic lag characteristics. It is inversely superimposed into the original drive current command to form the final control signal acting on the voice coil motor, aiming to simultaneously correct dynamic errors in the drive process from multiple dimensions to achieve smoother and more accurate positioning control. This series of calculations fuses and compensates kinematic, dynamic, and electronic control parameters in a unified current domain, constituting the core algorithmic link for achieving high dynamic performance motion control.

[0128] In some implementations, a collaborative control method is also executed simultaneously during the scanning process, such as... Figure 4 As shown, the cooperative control method includes:

[0129] S421. Real-time monitoring of the target surface temperature of the high-speed camera using a temperature sensor;

[0130] S422. Based on the preset temperature range of the target surface temperature, dynamically select and execute the corresponding heat dissipation control strategy. The heat dissipation control strategy includes at least the adjustment of water cooling flow rate and the adjustment of camera acquisition frame rate.

[0131] S423. Based on the real-time center of gravity offset collected by the laser displacement sensor and the current Z-axis position of the single probe optical engine, query the preset three-dimensional structural deformation compensation matrix, obtain the deformation compensation amount, and inject the positioning command.

[0132] Specifically, the collaborative control method processes errors introduced by mechanical structural deformation in parallel. Based on the real-time acquisition of the single-probe optomechanical center-of-gravity offset by the laser displacement sensor, and combined with the precise current position of the optomechanical system in the Z-axis direction, the system queries a pre-established and stored three-dimensional structural deformation compensation matrix. This matrix establishes a mapping relationship between the Z-axis position, the center-of-gravity offset, and the resulting mechanical deformation. By querying this matrix, the system obtains the deformation compensation amount precisely corresponding to the current state in real time and directly superimposes this compensation amount into the target positioning command of the voice coil motor. This process achieves online real-time correction of structural elastic deformation caused by changes in load center of gravity and different movement positions. This collaborative control method deeply integrates and links temperature management, image acquisition parameter control, and geometric error compensation in terms of time and logic. It ensures that the high-speed camera operates under optimal thermal conditions to guarantee image quality, while actively compensating for mechanical deformation. This avoids overheating risks during scanning motion and improves the accuracy of positioning, thus collaboratively ensuring the high efficiency and high reliability of the white light interferometry detection process at the system level.

[0133] The corresponding heat dissipation control strategies for the preset temperature range include:

[0134] First zone: When the temperature is below or equal to the first threshold, a basic heat dissipation strategy is adopted and the camera's highest frame rate is maintained.

[0135] Second range: when the temperature is higher than the first threshold but lower than the second threshold, an enhanced heat dissipation strategy is adopted while maintaining the camera frame rate unchanged;

[0136] Third zone: When the temperature is equal to or higher than the second threshold, the maximum heat dissipation strategy is adopted and the camera frame rate is temporarily reduced.

[0137] The following specific examples illustrate this embodiment.

[0138] 1. Implementation conditions

[0139] Equipment parameters: The white light source power meets the interference requirements; the numerical aperture of the interference objective lens is adapted to the detection accuracy; the voice coil motor thrust and stroke are adapted to the large load optomechanical system; the grating encoder resolution meets the positioning requirements (sampling frequency 1kHz); commercial high-speed camera (large target area, high frame rate); the intelligent control unit adopts mainstream FPGA chip + high-performance GPU (memory meets data processing requirements); commercial tensile sensor (range adapted to optomechanical load); commercial laser displacement sensor (measurement range and accuracy meet the requirements).

[0140] Environmental conditions: temperature 25±3℃, humidity 40%-60%, ground vibration amplitude ≤5um (≤0.5um after suppression by the air-floating platform), and power supply voltage meets the equipment's operating requirements.

[0141] Load conditions: High-load single-head optical engine (including interference lens, high-speed camera, and lens assembly), load fluctuation range is within a reasonable range (due to slight shift of the optical engine's center of gravity); camera initial temperature 25℃, camera target surface temperature T_cam rises to 72℃ after 30 minutes of operation without heat dissipation.

[0142] 2. Implementation Steps

[0143] Initialization phase:

[0144] The thermal management module is activated, and the heat spreader is attached to the camera target surface and ISP through the thermal medium. The water cooling circuit is filled with coolant. After 15 minutes, T_cam stabilizes at 58°C and enters the normal heat dissipation mode (the water cooling flow rate is adapted to the basic requirements, and the camera frame rate is set to the highest value).

[0145] The grating encoder performs zero-point calibration, and the initial deviation after calibration is less than the allowable value; the tension sensor is zeroed, and the laser displacement sensor is used to calibrate the initial center of gravity position of the optomechanical system (ΔX=0, ΔY=0).

[0146] Load the parameters of the multiphysics coupling model and the three-dimensional calibration matrix "Z-ΔX-δ".

[0147] Scan parameter settings:

[0148] For a 200×200 microarray lens (500μm in diameter, 50μm in height), set the Z-axis scanning stroke (covering height + redundancy), adapt the initial step size to the detection accuracy, and set the stage serpentine scanning path (adapting the overlap of adjacent units to the requirements).

[0149] The multiphysics coupling-inertial compensation algorithm (parameter update frequency 500Hz) and the camera heat dissipation-deformation compensation-efficiency optimization collaborative scheme (single point time threshold 3s±0.5s) are enabled.

[0150] Detection execution phase:

[0151] The voice coil motor drives the optical engine to move along the Z-axis. The grating encoder collects the actual displacement D and velocity v at 1kHz; the tension sensor collects the load F at 100Hz; the temperature sensor collects the motor temperature T1 at 50Hz; and the laser displacement sensor collects the center of gravity offset ΔX at 500Hz.

[0152] FPGA runs the coupling compensation algorithm: Substitute the coupling equation to obtain ΔD_couple; calculate the acceleration a=dv / dt, and the inertial force. , Combined with bandwidth calculation Total compensation current Final drive current ;

[0153] The laser displacement sensor collects ΔX, queries the three-dimensional matrix to obtain the deformation value δ, and superimposes δ onto the positioning command to correct the target displacement.

[0154] After the camera worked for 20 minutes, the T_cam temperature rose to 62°C. The thermal management module automatically switched to enhanced heat dissipation mode (increased water cooling flow and started the auxiliary fan). After 10 minutes, the T_cam temperature stabilized at 61°C.

[0155] Stripe processing and efficiency optimization stage:

[0156] A high-speed camera captures interference fringes and transmits them to a GPU; the GPU divides the image into multiple sub-blocks and performs phase calculations in parallel.

[0157] The measurement time for the first unit was 2.8s (meeting the threshold). Due to parameter optimization, the measurement time for subsequent units stabilized between 2.6-3.2s. The measurement time for the 50th unit increased to 3.6s (exceeding the threshold). The system automatically adjusted the scan step size and the number of sub-blocks to be solved, and the measurement time was reduced to 3.2s after the adjustment.

[0158] Result output stage:

[0159] After continuously testing 200 units, the average measurement time was 3.1 seconds, and the T_cam temperature reached a maximum of 63°C (but did not exceed 65°C).

[0160] Test results: The consistency of vertex radius (3σ), conic coefficient (3σ), and surface residual (3σ) all meet the testing standards for microarray lenses;

[0161] Generate a test report, which includes parameter data for each unit, camera temperature curve, and positioning deviation curve.

[0162] 3. Implementation effect verification

[0163] Positioning stability: The multi-physics coupling-inertial compensation algorithm ensures that the maximum positioning deviation is less than the allowable value, which is significantly reduced compared to the case without compensation, thus ensuring detection accuracy;

[0164] Heat dissipation effect: After the camera worked for 2 hours, T_cam stabilized within a reasonable range and did not rise to 70℃. The stripe acquisition noise was significantly reduced compared to when there was no heat dissipation, and the reliability of the solution was improved.

[0165] Efficiency Improvement: The single-point measurement time has been reduced from about 10 seconds in the traditional solution to 3.1 seconds, significantly improving efficiency and making it suitable for batch testing of 200×200 units;

[0166] Load adaptability: After 4 hours of continuous operation under heavy load, the voice coil motor did not overheat, the connection structure was not loose, the positioning deviation fluctuation was less than the allowable value when the load fluctuated, and the system stability was good.

[0167] The specific embodiments described above further illustrate the purpose, technical solution, and beneficial effects of the present invention. It should be understood that the above description is only a specific embodiment of the present invention and is not intended to limit the scope of protection of the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A microarray lens white light interferometry detection system, characterized in that, include: The main body of the white light interferometer is used to generate and provide the optical path for white light interferometry detection. The voice coil motor drive module includes a voice coil motor and a piezoelectric ceramic trimmer attached to the bottom of the voice coil motor, which is used to drive a single probe optical engine to perform scanning motion along the Z-axis. The single probe optical engine integrates the interference objective lens of the white light interferometer body. A multi-parameter detection module is used to synchronously collect displacement, load fluctuation, and center of gravity offset data of the single-probe optomechanical system; The mechanical support module includes a stage for supporting the microarray lens under test; The intelligent control unit is communicatively connected to the voice coil motor drive module, the multi-parameter detection module, and the thermal management module. It is used to generate drive current compensation in real time based on synchronously acquired data to control the voice coil motor.

2. The microarray lens white light interferometry detection system according to claim 1, characterized in that, It also includes a thermal management module for temperature control of the high-speed camera in the single-head optical engine; The intelligent control unit is also used to: execute a coordinated control scheme for camera heat dissipation, structural deformation, and detection efficiency, and dynamically adjust the operating parameters and scanning processing parameters of the thermal management module; wherein, the heat dissipation strategy of the thermal management module is correlated with the acquisition frame rate of the high-speed camera to suppress interference fringe distortion caused by high temperature.

3. The microarray lens white light interferometry detection system according to claim 2, characterized in that, The thermal management module includes a dedicated heat dissipation unit for high-speed cameras, which includes: A heat spreader is tightly bonded to the target area of ​​the high-speed camera and the surface of the image processor via a heat-conducting medium. The miniature water-cooling circuit includes a miniature water pump, a water-cooling radiator, and connecting pipes, wherein the water-cooling radiator is linked to the auxiliary fan on the camera side; The temperature control unit is used to collect the camera target surface temperature in real time and dynamically adjust the flow rate of the micro water pump and the speed of the auxiliary fan according to the preset temperature threshold range.

4. The microarray lens white light interferometry detection system according to claim 1, characterized in that, The multi-parameter detection module includes: An optical encoder, wherein the grating scale of the optical encoder is parallel to the Z-axis movement direction of the voice coil motor, and the reading head of the optical encoder is fixed to the mover of the voice coil motor; A tension sensor is connected in series between the mover of the voice coil motor and the single-probe optomechanical unit to monitor load fluctuations; A laser displacement sensor is installed on the side of the single-probe optical engine. The laser beam of the laser displacement sensor is perpendicular to the reference plane of the single-probe optical engine and is used to detect the center of gravity offset of the single-probe optical engine.

5. The microarray lens white light interferometry detection system according to claim 4, characterized in that, The output signals of the grating encoder, tension sensor and laser displacement sensor are transmitted to the intelligent control unit through the same data bus, and the timestamp alignment error of each output signal is less than 1 millisecond.

6. A method for detecting white light interference using a microarray lens, characterized in that, Applied to the system according to any one of claims 1-5, the method comprises: The microarray lens under test is placed on the stage of the mechanical support module; Plan the scanning path based on the array arrangement of the lens units; The voice coil motor is controlled to drive the single-probe optomechanic to perform interference scanning along the Z-axis, and interference fringes are collected by the main body of the white light interferometer. During the scanning process, a drive compensation method is executed; The interference fringes are processed to calculate the vertex radius, conic coefficient, and surface residual parameters of each unit of the microarray lens. The drive compensation method includes: The system synchronously collects the drive current of the voice coil motor, the actual displacement and speed of the grating encoder, the load of the tension sensor, the temperature of the temperature sensor, and the center of gravity offset of the laser displacement sensor. The predicted displacement deviation caused by the coupling effect is calculated based on the actual displacement, the driving current, the temperature, the load, and the center of gravity offset. The inertial compensation amount is calculated based on the speed and the mass of the single-probe optical engine; The predicted displacement deviation and the inertial compensation amount are combined to generate the total drive current compensation amount; The total drive current compensation is added to the drive current to control the movement of the voice coil motor.

7. The method according to claim 6, characterized in that, The calculation of the predicted displacement deviation caused by the coupling effect based on the actual displacement, the driving current, the temperature, the load, and the center of gravity offset includes: Substituting the driving current, temperature, load, and center of gravity offset into a pre-constructed multiphysics coupling model, the predicted displacement caused by the coupling effect is calculated. The multiphysics coupling model is as follows: ； in, To predict displacement, For driving current, For temperature, For load, This is the offset of the center of gravity. - For model parameters, For residuals; The predicted displacement deviation is obtained based on the actual displacement and the predicted displacement; If the predicted displacement deviation exceeds a preset deviation threshold, the multiphysics coupling model is iteratively updated according to a preset update frequency.

8. The method according to claim 6, characterized in that, The calculation of the inertial compensation amount based on the speed and the mass of the single-probe optical engine includes: Regarding the speed By performing differential calculations, the instantaneous acceleration 'a' of the single-probe optomechanical system is obtained; Based on the mass m of the single-probe optical engine, the inertial force is calculated using Newton's second law. ; Based on the thrust coefficient k1 of the voice coil motor, the inertial force Converted into the corresponding inertia compensation current ; The inertial compensation current As the inertial compensation amount; And / or, the process of fusing the predicted displacement deviation with the inertial compensation amount to generate the total drive current compensation amount includes: Based on system bandwidth and the speed The phase lag compensation amount is obtained through polynomial fitting. ,in - These are the fitting coefficients. For system bandwidth; According to the predicted displacement deviation The phase lag compensation amount and the inertial compensation current The total drive current compensation amount is calculated. .

9. The method according to claim 6, characterized in that, During the scanning process, a collaborative control method is also executed synchronously, the collaborative control method including: The target surface temperature of the high-speed camera is monitored in real time using a temperature sensor. Based on the preset temperature range of the target surface temperature, a corresponding heat dissipation control strategy is dynamically selected and executed. The heat dissipation control strategy includes at least the adjustment of water cooling flow rate and the adjustment of camera acquisition frame rate. Based on the real-time center of gravity offset collected by the laser displacement sensor and the current Z-axis position of the single probe optomechanical unit, the preset three-dimensional structural deformation compensation matrix is ​​queried to obtain the deformation compensation amount and inject the positioning command.

10. The method according to claim 9, characterized in that, The corresponding heat dissipation control strategies for the preset temperature range include: First zone: When the temperature is below or equal to the first threshold, a basic heat dissipation strategy is adopted and the camera's highest frame rate is maintained. Second range: when the temperature is higher than the first threshold but lower than the second threshold, an enhanced heat dissipation strategy is adopted while maintaining the camera frame rate unchanged; Third zone: When the temperature is equal to or higher than the second threshold, the maximum heat dissipation strategy is adopted and the camera frame rate is temporarily reduced.

Images