New material detection system and method based on industrial vision intelligence

Abstract

The invention provides a new material detection system and method based on industrial vision intelligence, and relates to the field of new material detection. The novel material detection system based on industrial vision intelligence comprises a supporting table, a moving table, a rotating table, a detection mechanism and two material clamping assemblies, the moving table is installed on the supporting table and used for driving the rotating table to move in the radial direction. The rotating table is installed at the output end of the moving table and used for bearing a detection piece and driving the detection piece to rotate. According to the novel material detection system based on industrial vision intelligence, the material clamping structure is used for overturning detection, double-face detection of the detection piece is achieved, the adsorption table and the longitudinal moving device are connected or separated through the connecting piece, and the detection efficiency is improved. Therefore, detection of the detection parts, sorting and discharging of qualified or unqualified detection parts and feeding of the detection parts can be achieved, a manipulator does not need to be arranged to be matched with an overturning structure, an X-axis and a Y-axis to achieve the overturning function and the like, and the structure is simplified.

Description

Technical Field

[0001] This invention relates to the field of new material testing, and in particular to a new material testing system and method based on industrial visual intelligence. Background Technology

[0002] SiC substrate is a core basic material for third-generation semiconductors and belongs to the semiconductor materials under the key strategic materials in new materials. It is mainly used in new energy vehicles, photovoltaic inverters, energy storage converters, rail transportation, aerospace and high-end industrial control, etc. In order to ensure the quality of SiC substrate during the preparation process, visual inspection of the surface of SiC substrate is required to check whether there are scratches, pits, particles, etc. on the surface of SiC substrate, and both sides of SiC substrate need to be inspected.

[0003] In existing technologies, the inspection system for SiC substrates includes an inspection camera, a supplementary light, an analysis module, an inspection stage, a robotic arm, and X-axis and Y-axis mobile devices. The inspection piece is placed on the inspection stage, which can drive the inspection piece to rotate and move radially, thereby cooperating with the inspection camera for comprehensive inspection. The robotic arm, X-axis mobile devices, and Y-axis mobile devices are used for loading the inspection piece, sorting and unloading qualified or unqualified inspection pieces, and setting a flipping structure on the robotic arm to flip the inspection piece, thereby enabling inspection of both sides of the inspection piece. The loading, unloading, and flipping of the inspection piece are achieved by setting up the robotic arm, X-axis mobile devices, Y-axis mobile devices, and flipping structure. The structure is complex and the later maintenance cost is high. There is still room for improvement in how to simplify the equipment to achieve the flipping of the inspection piece, as well as simplify the equipment to achieve the functions of loading and unloading.

[0004] Therefore, it is necessary to provide a new material inspection system and method based on industrial visual intelligence to solve the above-mentioned technical problems. Summary of the Invention

[0005] This invention provides a new material inspection system based on industrial vision intelligence, which solves the problem that there is still room for improvement in how to simplify the equipment to achieve the flipping of the material to be inspected.

[0006] To solve the above-mentioned technical problems, the present invention provides a new material inspection system based on industrial vision intelligence, comprising: a support, a moving stage, a rotating stage, an inspection mechanism, and two clamping assemblies;

[0007] The movable stage is mounted on the support platform and is used to drive the rotary stage to move radially;

[0008] The rotary table is mounted on the output end of the mobile stage and is used to carry the test piece and drive the test piece to rotate.

[0009] The testing mechanism includes an assembly plate, a ring light, and a camera. The assembly plate is suspended above the rotating table, and the ring light and the camera are respectively installed at the bottom and top of the assembly plate.

[0010] Two clamping assemblies are mounted on the movable table and located on both sides of the rotary table. Each clamping assembly includes a longitudinal moving device, a lifting device, a transverse moving device, a flipping component, and an arc-shaped clamping component. The longitudinal moving device is mounted on the movable table, the lifting device is mounted at its output end, the transverse moving device is mounted at its output end, the flipping component is mounted at its output end, and the arc-shaped clamping component is mounted at its output end.

[0011] The centers of the two arc-shaped clamping members are aligned with the center height of the detection member during detection.

[0012] A flipping station is provided on one side of the support platform and along the setting direction of the longitudinal moving device.

[0013] Preferably, the mobile platform includes a mounting platform and a driving device, the mounting platform is slidably mounted on the support, and the driving device is used to drive the mounting platform to move radially.

[0014] Preferably, the rotating platform includes an adsorption platform, a gas delivery pipe, and a rotating device. The rotating device is mounted on the mounting platform, the gas delivery pipe passes through and is rotatably mounted on the mounting platform, the adsorption platform is connected to the top end of the gas delivery pipe, and the rotating device is used to drive the gas delivery pipe to rotate.

[0015] Preferably, the new material detection system based on industrial vision intelligence further includes a waste station, a loading station, an unloading station, and two connecting parts. The flipping station, waste station, loading station, and unloading station are arranged around the support platform. The connecting parts are used to detachably connect the longitudinal moving device and the adsorption platform. The longitudinal moving device is rotatably mounted on the mounting platform.

[0016] When the clamping assembly is used for sorting, unloading, or loading, the connector connects the longitudinal moving device to the adsorption table.

[0017] Preferably, the longitudinal moving device includes a mounting frame and an electric push cylinder, the electric push cylinder is mounted on the mounting frame, an annular slide rail is mounted on the mounting platform, and the mounting frame is slidably connected to the annular slide rail via an arc-shaped slider.

[0018] Preferably, the flipping component includes a mounting plate and a flipping motor. The mounting plate is mounted on the output end of the lateral moving device, and the flipping motor is mounted on the mounting plate. The output end of the flipping motor passes through the mounting plate and is connected to the arc-shaped clamping component.

[0019] Preferably, positioning blocks are installed on both sides of the adsorption platform, and positioning holes are provided on the positioning blocks. The connector includes an L-shaped frame, a connecting shaft, and a U-shaped block. The L-shaped frame is installed on the mounting frame. One end of the connecting shaft passes through the L-shaped frame and faces the positioning hole. The other end of the connecting shaft is connected to the U-shaped block. A driving block is installed at the bottom of the mounting plate, and the bottom end of the driving block extends into the U-shaped block.

[0020] Preferably, a magnetic block is embedded on the side of the L-shaped frame facing the U-shaped block, and an adsorption element is installed on the side of the U-shaped block facing the magnetic block.

[0021] Preferably, the connector further includes two limiting shafts, and positioning plates are installed on both sides of the mounting platform. One end of the limiting shaft is installed on the U-shaped block, and the other end passes through the positioning plate.

[0022] This invention also provides a novel material inspection method based on industrial vision intelligence. Using the aforementioned novel material inspection system based on industrial vision intelligence, the method includes the following steps:

[0023] S1. The clamping assembly clamps a test piece and places it on the rotary table;

[0024] S2. The camera acquires images of the inspection piece, wherein the rotating stage drives the inspection piece to rotate, and the moving stage drives the rotating stage to move radially to perform comprehensive inspection of the inspection piece;

[0025] S3. After one side of the test piece has been tested, the clamping assembly clamps the test piece and conveys it to the flipping station to flip the test piece.

[0026] S4. The clamping assembly conveys the inspection piece to the rotary table, and the camera captures an image of the other side of the inspection piece.

[0027] S5. The collected image information is sent to the image processing module, processed, and then sent to the image analysis module. The image analysis module analyzes whether the test piece is qualified.

[0028] Compared with related technologies, the new material detection system and method based on industrial vision intelligence provided by this invention has the following beneficial effects:

[0029] This invention provides a new material inspection system based on industrial vision intelligence. After one side of the test piece is inspected, two lateral moving devices push a flipping device to drive a corresponding arc-shaped clamping device to clamp the test piece. A lifting device raises the lateral moving device to separate the test piece from the rotary table. A longitudinal moving device pushes the lifting device to carry the test piece and transport it to the flipping station. The flipping device flips the test piece so that the untested side faces upward. Subsequently, the longitudinal moving device pulls the lifting device back to its original position so that the test piece returns to the top of the rotary table. The lifting device lowers the test piece onto the rotary table. The lateral moving device pulls back the flipping device to separate the arc-shaped clamping device from the test piece. The other side of the test piece is then inspected, achieving double-sided inspection of the test piece.

[0030] Furthermore, by using connectors to connect or separate the adsorption stage from the longitudinal moving device, it is possible to detect the test pieces, sort and unload qualified or unqualified test pieces, and load test pieces without the need for a robotic arm to cooperate with the flipping structure or the X and Y axes to achieve the flipping function, thus simplifying the structure. Attached Figure Description

[0031] Figure 1 A schematic diagram of the structure of the new material detection system based on industrial vision intelligence provided by the present invention;

[0032] Figure 2 for Figure 1 The image shows a side view of a new material inspection system based on industrial vision intelligence.

[0033] Figure 3 for Figure 1 The diagram shown is a schematic of the structure of the new material inspection system based on industrial vision intelligence after the inspection mechanism has been removed.

[0034] Figure 4 for Figure 3 The enlarged schematic diagram of part A shown below;

[0035] Figure 5 A schematic diagram showing the distribution of the flipping station, waste station, loading station, and unloading station provided by the present invention;

[0036] Figure 6 This invention provides a schematic diagram of two arc-shaped clamping members clamping the detection member;

[0037] Figure 7 This is a schematic diagram of the state of the connector provided by the present invention, wherein, Figure 7 Image (a) shows a schematic diagram of the connecting shaft separated from the positioning hole. Figure 7 (b) is a schematic diagram showing the assembly state of the connecting shaft and the positioning hole;

[0038] Figure 8 This is a schematic diagram of the scrap assembly provided by the present invention conveying the inspection piece to the flipping station;

[0039] Figure 9 The schematic diagram of the new material detection system based on industrial vision intelligence provided by the present invention.

[0040] Numbering on the map:

[0041] 1. Support platform;

[0042] 2. Moving platform; 21. Mounting platform; 22. Drive unit; 211. Circular slide rail; 212. Positioning plate;

[0043] 3. Rotary table; 31. Adsorption table; 32. Gas delivery pipe; 33. Positioning block; 34. Rotating device; 321. Rotary connector; 331. Positioning hole;

[0044] 4. Testing agency; 41. Assembly plate; 42. Ring light; 43. Camera;

[0045] 100. Clamping assembly;

[0046] 5. Longitudinal moving device; 51. Mounting bracket; 52. Electric push cylinder;

[0047] 6. Lifting device; 61. Fixing frame; 62. Lifting cylinder; 63. First sliding rod;

[0048] 7. Lateral movement device; 71. Support; 72. Clamping cylinder; 73. Second slide bar;

[0049] 8. Flipping component; 81. Mounting plate; 82. Flipping motor; 811. Drive block;

[0050] 9. Arc-shaped clamping component;

[0051] 11. Connecting component; 111. L-shaped frame; 112. Connecting shaft; 113. U-shaped block; 114. Limiting shaft; 10. Detection component;

[0052] 20. Turnover station; 30. Waste station; 40. Loading station; 50. Unloading station. Detailed Implementation

[0053] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention.

[0054] This invention provides a new material inspection system based on industrial visual intelligence.

[0055] Please refer to the following: Figures 1 to 5 In one embodiment of the present invention, the new material detection system based on industrial vision intelligence includes: a support 1, a moving stage 2, a rotating stage 3, a detection mechanism 4, and two clamping assemblies 100.

[0056] The movable stage 2 is mounted on the support 1 and is used to drive the rotary stage 3 to move radially;

[0057] The rotary table 3 is installed at the output end of the movable table 2 and is used to carry the detection piece 10 and drive the detection piece 10 to rotate.

[0058] The testing mechanism 4 includes an assembly plate 41, a ring light 42, and a camera 43. The assembly plate 41 is suspended above the rotating table 3, and the ring light 42 and the camera 43 are respectively installed at the bottom and top of the assembly plate 41.

[0059] Two clamping assemblies 100 are mounted on the movable table 2 and located on both sides of the rotary table 3. Each clamping assembly 100 includes a longitudinal moving device 5, a lifting device 6, a transverse moving device 7, a flipping component 8, and an arc-shaped clamping component 9. The longitudinal moving device 5 is mounted on the movable table 2, the lifting device 6 is mounted at the output end of the longitudinal moving device 5, the transverse moving device 7 is mounted at the output end of the lifting device 6, the flipping component 8 is mounted at the output end of the transverse moving device 7, and the arc-shaped clamping component 9 is mounted at the output end of the flipping component 8.

[0060] The centers of the two arc-shaped clamping members 9 are aligned with the center height of the detection member 10 during detection;

[0061] A flipping station 20 is provided on one side of the support 1 and along the setting direction of the longitudinal moving device 5.

[0062] like Figure 9 The detection mechanism 4 also includes an image processing module, an image analysis module, and a control module. The image acquisition module consists of a ring light 42 and a camera 43. The lens of the camera 43 extends into the ring light 42 and is concentrically set. The camera 43 is a CCD camera. Multiple ring lights 42 can be set as needed. Ring lights 42 can be set from the side to supplement the detection element 10 at a preset angle, which, together with the ring lights 42 with the set direction, provides a better supplementary lighting effect.

[0063] The image processing module is used to perform image denoising, enhancement, and registration, and to perform adaptive grayscale correction for the reflection problem on the SiC substrate surface. The image analysis module quickly locates the defect position based on pixel gradient changes and laser scattering signals, and generates defect coordinates and region markers. Based on the CNN convolutional neural network (trained with more than 100,000 SiC substrate defect samples), it realizes the identification of crystal defects and surface defects, and achieves intelligent detection.

[0064] Once identified, the control module controls the clamping assembly 100 to unload materials, etc.

[0065] Here, the detection element 10 is the SiC substrate. The SiC substrate is circular. The moving stage 2 drives the rotating stage 3 to move radially, that is, from the center of the SiC substrate to the edge.

[0066] During the testing process, the test piece 10 is placed on the rotating stage 3; the camera 43 captures images of the test piece 10, and the ring light 42 provides supplementary lighting to the test piece 10 to assist in the testing.

[0067] During the inspection, the rotary table 3 drives the test piece 10 to rotate, and the movable table 2 drives the rotary table 3 to move radially to conduct a comprehensive inspection of the test piece 10.

[0068] After one side of the test piece 10 has been tested, the two lateral moving devices 7 push the flipping device 8 to drive the corresponding arc-shaped clamping device 9 to clamp the test piece 10. The lifting device 6 raises the lateral moving devices 7 to separate the test piece 10 from the rotary table 3. The longitudinal moving device 5 pushes the lifting device 6 to move the test piece 10 and transport it to the flipping station 20, thus giving the test piece 10 space to flip. Figure 8 The flipping component 8 flips the detection component 10 so that the undetected side faces upward. Subsequently, the longitudinal moving device 5 pulls the lifting device 6 back to its original position so that the detection component 10 returns to above the rotary table 3. The lifting device 6 lowers the detection component 10 onto the rotary table 3. The lateral moving device 7 pulls back the flipping component 8 so that the arc-shaped clamping component 9 separates from the detection component 10. The other side of the detection component 10 is then detected in the same way, thus realizing the detection of both sides of the detection component 10. This eliminates the need for a robotic arm to cooperate with the flipping structure and the X and Y axes to achieve the flipping function, simplifying the structure.

[0069] The rotary table 3, in conjunction with the clamping assembly 100, can sequentially load, sort, and unload qualified and unqualified products. Please refer to the figure below for details.

[0070] Among them, the two arc-shaped clamping parts 9 are provided with clamping grooves on opposite sides, and protective sleeves are provided in the clamping grooves. The protective sleeves are made of rubber or silicone, etc., to avoid scratching the detection part 10.

[0071] The arc-shaped clamping component 9 and the detection component 10 are fitted with a circular arc shape.

[0072] Please see Figure 2 In this embodiment, the mobile platform 2 includes a mounting platform 21 and a driving device 22. The mounting platform 21 is slidably mounted on the support platform 1, and the driving device 22 is used to drive the mounting platform 21 to move radially.

[0073] During the inspection, the drive unit 22 drives the mounting platform 21 to move radially, and works with the rotary table 3 to adjust the position of the inspection piece 10, thereby achieving comprehensive inspection.

[0074] In one embodiment, the drive device 22 includes a mounting box, a slide rail, a nut, a ball screw, and a servo motor. The servo motor is mounted at one end of the mounting box, the slide rail is mounted inside the mounting box, the ball screw is rotatably mounted inside the mounting box, and one end is connected to the output end of the servo motor. The nut is threaded onto the ball screw and slidably connected to the slide rail. The top of the mounting box has a strip-shaped hole, and the top of the nut is connected to the mounting platform 21 via an assembly block.

[0075] In another embodiment, the drive device 22 may also adopt a servo motor in conjunction with a belt structure, with the belt connected to the mounting platform 21 via an assembly block.

[0076] Rotary table 3 is mounted on mounting platform 21.

[0077] Please refer to it again. Figure 2 The rotating platform 3 includes an adsorption platform 31, a gas supply pipe 32, and a rotating device 34. The rotating device 34 is installed on the mounting platform 21. The gas supply pipe 32 passes through and is rotatably installed on the mounting platform 21. The adsorption platform 31 is connected to the top end of the gas supply pipe 32. The rotating device 34 is used to drive the gas supply pipe 32 to rotate.

[0078] During testing, the rotating device 34 drives the gas supply pipe 32 to rotate, thereby driving the adsorption stage 31 to rotate, thus adjusting the position of the test piece 10.

[0079] The top of the adsorption platform 31 is provided with an annular groove, and multiple adsorption holes are distributed in the annular groove. The adsorption holes are connected to the interior of the adsorption platform 31. The gas supply pipe 32 is connected to the adsorption platform 31, and the bottom end of the gas supply pipe 32 is connected to a rotary connector 321.

[0080] The rotary table 3 also includes a gas path system, which includes a vacuum pump, pipelines, multiple valves, a vacuum filter, etc. The output end of the vacuum pump is connected to the rotary connector 321 through the pipeline, the vacuum filter is set at the input end of the vacuum pump, and the valves are installed on the pipeline.

[0081] In use, the gas inside the adsorption stage 31 is extracted by a vacuum pump to achieve adsorption of the test piece 10.

[0082] The rotating device 34 includes a servo motor, a harmonic reducer, and a transmission component. The servo motor is mounted on the mounting platform 21, the harmonic reducer is mounted on the output end of the servo motor, and the transmission component is connected to the air supply pipe 32 and the output end of the harmonic reducer. The transmission component can be a gear set, a belt and pulley, or a synchronous pulley and synchronous belt, etc.

[0083] Please see Figures 3 to 5 As a preferred embodiment, the new material detection system based on industrial vision intelligence further includes a waste station 30, a loading station 40, an unloading station 50, and two connecting pieces 11. The flipping station 20, waste station 30, loading station 40, and unloading station 50 are arranged around the support 1. The connecting pieces 11 are used to detachably connect the longitudinal moving device 5 and the adsorption table 31. The longitudinal moving device 5 is rotatably mounted on the mounting table 21.

[0084] When the clamping assembly 100 is used for sorting, unloading or loading, the connector 11 connects the longitudinal moving device 5 and the adsorption table 31.

[0085] Two connectors 11 detachably connect the two longitudinal moving devices 5 to the two sides of the adsorption table 31.

[0086] After testing one or both sides of the test piece 10, the connecting piece 11 connects the longitudinal moving device 5 and the adsorption table 31. When the test piece 10 is qualified, the rotating device 34 drives the adsorption table 31 to rotate 90 degrees clockwise, so that the two clamping assemblies 100 face the unloading station 50. Subsequently, the clamping assemblies 100 are used to place the test piece 10 in the unloading station 50.

[0087] Similarly, when the test piece is not qualified, the rotating device 34 drives the adsorption table 31 to rotate counterclockwise by 90 degrees, so that the two clamping components 100 face the waste station 30, and the clamping components 100 are used to place the test piece 10 in the waste station 30.

[0088] The test piece 10, processed at the previous station, is conveyed to the loading station 40. During loading, the rotating device 34 drives the adsorption table 31 to rotate 180 degrees, so that the two clamping components 100 face the loading station 40 and clamp the test piece 10 to be conveyed to the adsorption table 31.

[0089] When the test piece 10 is being tested, the adsorption stage 31 separates from the longitudinal moving device 5.

[0090] By using the connector 11 to connect or separate the adsorption table 31 from the longitudinal moving device 5, the detection of the test piece 10, the sorting and unloading of qualified or unqualified test pieces 10, and the loading of test pieces 10 can be realized, simplifying the equipment.

[0091] Among them, waste station 30, loading station 40 and unloading station 50 can be carrier platforms for placing test piece 10 or the test piece 10 after testing, and then transporting the test piece 10 through conveying equipment.

[0092] Alternatively, conveying equipment can be set up at waste disposal station 30, loading station 40 and unloading station 50. When the test piece 10 or the tested piece 10 is placed on the conveying equipment, it can be directly conveyed through the conveying equipment. The conveying equipment can be a belt conveyor with a carrier component, etc.

[0093] Please see Figure 4 In this embodiment, the longitudinal moving device 5 includes a mounting frame 51 and an electric push cylinder 52. The electric push cylinder 52 is mounted on the mounting frame 51. An annular slide rail 211 is mounted on the mounting platform 21. The mounting frame 51 is slidably connected to the annular slide rail 211 via an arc-shaped slider.

[0094] The electric push cylinder 52 pushes the lifting device 6, and the lifting device 6 sequentially moves the test piece 10 to each workstation via the lateral moving device 7, the flipping part 8 and the arc-shaped clamping part 9.

[0095] Alternatively, an annular groove can be opened on the mounting platform 21, and the arc-shaped slider can slide into the annular groove.

[0096] Preferably, the bottom of the arc-shaped slider is provided with a rolling element, which can be a ball bearing or a universal wheel, so that it moves more smoothly along the annular slide rail 211.

[0097] Please see Figure 4 In this embodiment, the flipping component 8 includes a mounting plate 81 and a flipping motor 82. The mounting plate 81 is mounted on the output end of the lateral moving device 7, and the flipping motor 82 is mounted on the mounting plate 81. The output end of the flipping motor 82 passes through the mounting plate 81 and is connected to the arc-shaped clamping component 9.

[0098] When the two arc-shaped clamping parts 9 clamp the test piece 10, the longitudinal moving device 5 pushes the test piece 10 to the flipping station 20, and then the flipping motor 82 drives the arc-shaped clamping parts 9 to rotate 180 degrees to adjust the test surface of the test piece 10.

[0099] In one embodiment, the flipping component 8 in one clamping assembly 100 is as described above, while in the other clamping assembly 100, there is no flipping motor 82. In the flipping component 8, the arc-shaped clamping component 9 is rotatably mounted on the mounting plate 81 via a rotating shaft.

[0100] In this embodiment, two inverted L-shaped rods (not shown) are provided on the mounting platform 21, located on both sides of the arc-shaped clamping member 9, to support the arc-shaped clamping member 9, thereby preventing angular deviation of the arc-shaped clamping member 9 which does not have a flip motor 82. When the two arc-shaped clamping members 9 clamp the detection member 10, the detection member 10 will not shift when connected to the two arc-shaped clamping members 9.

[0101] In another embodiment, both flipping components 8 may be equipped with flipping motors 82. When flipping, the two flipping motors 82 simultaneously drive the corresponding arc-shaped clamping components 9 to flip the detection component 10.

[0102] Among them, the flip motor 82 is a servo motor.

[0103] Please see Figure 4 In this embodiment, the lateral moving device 7 includes a bracket 71, a clamping cylinder 72, and a second slide rod 73. The clamping cylinder 72 is horizontally mounted on the bracket 71, and one end of the second slide rod 73 is mounted on the mounting plate 81, while the other end passes through the bracket 71.

[0104] The lifting device 6 includes a fixed frame 61, a lifting cylinder 62, and a first slide rod 63. The fixed frame 61 is installed at the output end of the electric push cylinder 52. The lifting cylinder 62 is vertically installed on the fixed frame 61. One end of the first slide rod 63 is installed on the bracket 71, and the other end passes through the fixed frame 61. The bracket 71 is installed at the output end of the lifting cylinder 62.

[0105] Among them, the clamping cylinder 72 and the lifting cylinder 62 are preferably equipped with servo motors and ball screw structures.

[0106] The lifting device 6 preferably includes a limit rod (not shown in the figure), with one end of the limit rod installed on the fixed frame 61 and the other end passing through the mounting frame 51.

[0107] Please see Figure 4 As an optional embodiment, positioning blocks 33 are installed on both sides of the adsorption platform 31. Positioning holes 331 are provided on the positioning blocks 33. The connector 11 includes an L-shaped frame 111, a connecting shaft 112 and a U-shaped block 113. The L-shaped frame 111 is installed on the mounting frame 51. One end of the connecting shaft 112 passes through the L-shaped frame 111 and faces the positioning hole 331. The other end of the connecting shaft 112 is connected to the U-shaped block 113. A driving block 811 is installed at the bottom of the mounting plate 81. The bottom end of the driving block 811 extends into the U-shaped block 113.

[0108] like Figure 7When the lateral moving device 7 pushes the mounting plate 81, the mounting plate 81 drives the arc-shaped clamping piece 9 to move toward the detection piece 10 through the flipping motor 82. When clamping the detection piece 10, the mounting plate 81 drives the U-shaped block 113 to move simultaneously through the driving block 811. The U-shaped block 113 drives the connecting shaft 112 to be inserted into the positioning hole 331 of the positioning block 33. Since the L-shaped frame 111 is installed on the mounting frame 51, the longitudinal moving device 5 and the adsorption table 31 are automatically connected.

[0109] When the angle of the clamping assembly 100 needs to be adjusted, the rotating device 34 drives the adsorption table 31 to rotate. The adsorption table 31 drives the mounting frame 51 to rotate along the annular slide rail 211 in sequence through the positioning block 33, the connecting shaft 112 and the L-shaped frame 111, so as to easily adjust the orientation of the two clamping assemblies 100.

[0110] Thus, in one state, the clamping assembly 100 is used to drive the inspection piece 10 to move to the flipping station 20 to achieve flipping, thereby inspecting both sides of the inspection piece 10. In another state, it is used to connect the longitudinal moving device 5 to the adsorption table 31 through the connecting member 11 to realize the loading and sorting of materials in sequence. The state switching is realized during the process of the transverse moving device 7 pushing the arc-shaped clamping member 9 to clamp the inspection piece 10.

[0111] During the feeding process, the lateral moving device 7 first pushes the flipping part 8 to move, so that the connecting shaft 112 is inserted into the positioning hole 331. After adjusting the direction of the two clamping components 100, the two arc-shaped clamping parts 9 are opened to clamp the detection part 10.

[0112] By setting up the U-shaped block 113, the drive block 811 can automatically assemble and separate from the U-shaped block 113.

[0113] As another optional method in this embodiment, the connector 11 can also be a bolt and a fixing block. The fixing block is installed on the mounting bracket 51 and has an assembly hole. Positioning blocks 33 are installed on both sides of the adsorption table 31. The positioning blocks 33 have threaded holes. After the bolt passes through the assembly hole, it is threadedly connected to the threaded hole to realize the installation of the longitudinal moving device 5 on the rotary table 3.

[0114] Please see Figure 4 In a preferred embodiment of this example, the L-shaped frame 111 is fitted with a magnetic block on the side facing the U-shaped block 113, and the U-shaped block 113 is fitted with an adsorption element on the side facing the magnetic block.

[0115] When the connecting shaft 112 is inserted into the positioning hole 331, the U-shaped block 113 is located on the L-shaped frame 111, and the adsorption component is attracted to the magnetic block, thereby improving the stability of the assembly.

[0116] The adsorption element can be a magnetic block with opposite polarity or a metal block that can be attracted to a magnet, etc.

[0117] Furthermore, there are multiple magnetic blocks and adsorption elements; in this embodiment, there are two of each.

[0118] Please participate again. Figure 4 and Figure 7 The connector 11 also includes two limiting shafts 114. Positioning plates 212 are installed on both sides of the mounting platform 21. One end of the limiting shaft 114 is installed on the U-shaped block 113, and the other end passes through the positioning plate 212.

[0119] The two limiting shafts 114 are respectively installed on the U-shaped blocks 113 in the two connecting parts 11.

[0120] By setting the limiting shaft 114 to be inserted into the positioning plate 212, the two clamping assemblies 100 can be axially limited, so that the two clamping assemblies 100 will not deflect when the test piece 10 is tested; at the same time as the connecting shaft 112 is inserted into the positioning hole 331, the U-shaped block 113 drives the limiting shaft 114 to separate from the positioning plate 212, thereby unlocking.

[0121] The height of the limiting shaft 114 is lower than the lowest end of the fixed frame 61, so as not to affect the longitudinal moving device 5 from pushing the lifting device 6 to move the detection to each work station.

[0122] In the testing mechanism 4, the assembly plate 41 is preferably installed on the roof of the testing room via a connecting arm; or it is installed on the ground via a support frame.

[0123] The working principle of the new material inspection system based on industrial vision intelligence provided by this invention is as follows:

[0124] During testing, the test piece 10 is placed on the rotating stage 3; the camera 43 captures images of the test piece 10, and the ring light 42 provides supplementary lighting to the test piece 10 to assist in the testing.

[0125] During the inspection, the rotary table 3 drives the test piece 10 to rotate, and the movable table 2 drives the rotary table 3 to move radially to conduct a comprehensive inspection of the test piece 10.

[0126] After one side of the test piece 10 is tested, the two lateral moving devices 7 push the flipping device 8 to drive the corresponding arc-shaped clamping device 9 to clamp the test piece 10. The lifting device 6 raises the lateral moving device 7 to separate the test piece 10 from the rotary table 3. The longitudinal moving device 5 pushes the lifting device 6 to drive the test piece 10 and transport it to the flipping station 20, so that the test piece 10 has space to flip. The flipping device 8 flips the test piece 10 so that the untested side is facing up. Subsequently, the longitudinal moving device 5 pulls the lifting device 6 back to its original position so that the test piece 10 returns to the top of the rotary table 3. The lifting device 6 lowers the test piece 10 onto the rotary table 3. The lateral moving device 7 pulls back the flipping device 8 to separate the arc-shaped clamping device 9 from the test piece 10. The other side of the test piece 10 is then tested in the same way, thus realizing the testing of both sides of the test piece 10.

[0127] After testing one or both sides of the test piece 10, the connecting piece 11 connects the longitudinal moving device 5 and the adsorption table 31. When the test piece 10 is qualified, the rotating device 34 drives the adsorption table 31 to rotate 90 degrees clockwise, so that the two clamping assemblies 100 face the unloading station 50. Subsequently, the clamping assemblies 100 are used to place the test piece 10 in the unloading station 50.

[0128] Similarly, when the test piece is not qualified, the rotating device 34 drives the adsorption table 31 to rotate counterclockwise by 90 degrees, so that the two clamping components 100 face the waste station 30, and the clamping components 100 are used to place the test piece 10 in the waste station 30.

[0129] After processing at the previous station, the test piece 10 is conveyed to the loading station 40. During loading, the rotating device 34 drives the adsorption table 31 to rotate 180 degrees, so that the two clamping components 100 face the loading station 40, clamp the test piece 10 and convey it to the adsorption table 31.

[0130] When the lateral moving device 7 pushes the mounting plate 81, the mounting plate 81 drives the arc-shaped clamping member 9 to move toward the detection member 10 via the flipping motor 82. When clamping the detection member 10, the mounting plate 81 drives the U-shaped block 113 to move simultaneously via the driving block 811. The U-shaped block 113 drives the connecting shaft 112 to be inserted into the positioning hole 331 of the positioning block 33. Since the L-shaped frame 111 is mounted on the mounting frame 51, the longitudinal moving device 5 and the adsorption table 31 are automatically connected.

[0131] When the angle of the clamping assembly 100 needs to be adjusted, the rotating device 34 drives the adsorption table 31 to rotate. The adsorption table 31 drives the mounting frame 51 to rotate along the annular slide rail 211 in sequence through the positioning block 33, the connecting shaft 112 and the L-shaped frame 111, so as to easily adjust the orientation of the two clamping assemblies 100.

[0132] Thus, in one state, the clamping assembly 100 is used to drive the inspection piece 10 to move to the flipping station 20 to achieve flipping, thereby inspecting both sides of the inspection piece 10. In another state, it is used to connect the longitudinal moving device 5 to the adsorption table 31 through the connecting member 11 to realize the loading and sorting of materials in sequence. The state switching is realized during the process of the transverse moving device 7 pushing the arc-shaped clamping member 9 to clamp the inspection piece 10.

[0133] This invention also provides a new material detection method based on industrial visual intelligence.

[0134] Please see Figure 9 A novel material inspection method based on industrial vision intelligence, using the aforementioned novel material inspection system based on industrial vision intelligence, includes the following steps:

[0135] S1. The clamping assembly 100 clamps a detection piece 10 and places it on the rotary table 3;

[0136] S2. The camera 43 acquires images of the detection piece 10, wherein the rotating stage 3 drives the detection piece 10 to rotate, and the moving stage 2 drives the rotating stage 3 to move radially to perform full detection of the detection piece 10.

[0137] S3. After one side of the test piece 10 has been tested, the clamping assembly 100 clamps the test piece 10 and conveys it to the flipping station 20 to flip the test piece 10.

[0138] S4. The clamping assembly 100 conveys the inspection piece 10 to the rotary table 3, and the camera 43 captures an image of the other side of the inspection piece 10.

[0139] S5. The collected image information is sent to the image processing module, processed, and then sent to the image analysis module. The image analysis module analyzes whether the test piece 10 is qualified.

[0140] The image acquisition module consists of the ring light 42 and the camera 43.

[0141] The image processing module is used to perform image denoising, enhancement, and registration, and to perform adaptive grayscale correction for the reflection problem on the SiC substrate surface. The image analysis module quickly locates the defect position based on pixel gradient changes and laser scattering signals, and generates defect coordinates and region markers. Based on a CNN convolutional neural network (trained with more than 100,000 SiC substrate defect samples), it realizes the identification of crystal defects and surface defects.

[0142] Once identified, based on the detection results, the control module controls the clamping assembly 100 to move the detection piece 10 to the unloading station 50 or the waste station 30, and controls the clamping assembly 100 to move to the loading station 40, thereby achieving intelligent detection.

[0143] The specific structure of the new material detection system based on industrial vision intelligence is as described in the above embodiments. Since the new material detection method based on industrial vision intelligence adopts all the technical solutions of all the above embodiments, it has at least all the beneficial effects brought about by the technical solutions of the above embodiments, which will not be elaborated here.

[0144] The above description is merely an embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structural or procedural transformations made based on the content of the present invention specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of the present invention.

Claims

1. A novel material inspection system based on industrial visual intelligence, characterized in that, include: Support, moving table, rotating table, detection mechanism and two clamping assemblies; The movable stage is mounted on the support platform and is used to drive the rotary stage to move radially; The rotary table is mounted on the output end of the mobile stage and is used to carry the test piece and drive the test piece to rotate. The testing mechanism includes an assembly plate, a ring light, and a camera. The assembly plate is suspended above the rotating table, and the ring light and the camera are respectively installed at the bottom and top of the assembly plate. Two clamping assemblies are mounted on the movable table and located on both sides of the rotary table. Each clamping assembly includes a longitudinal moving device, a lifting device, a transverse moving device, a flipping component, and an arc-shaped clamping component. The longitudinal moving device is mounted on the movable table, the lifting device is mounted at its output end, the transverse moving device is mounted at its output end, the flipping component is mounted at its output end, and the arc-shaped clamping component is mounted at its output end. The centers of the two arc-shaped clamping members are aligned with the center height of the detection member during detection. A flipping station is provided on one side of the support platform and along the setting direction of the longitudinal moving device.

2. The new material inspection system based on industrial vision intelligence according to claim 1, characterized in that, The mobile platform includes a mounting platform and a driving device. The mounting platform is slidably mounted on the support, and the driving device is used to drive the mounting platform to move radially.

3. The new material inspection system based on industrial vision intelligence according to claim 2, characterized in that, The rotating platform includes an adsorption platform, a gas supply pipe, and a rotating device. The rotating device is installed on the mounting platform, the gas supply pipe passes through and is rotatably installed on the mounting platform, the adsorption platform is connected to the top end of the gas supply pipe, and the rotating device is used to drive the gas supply pipe to rotate.

4. The new material inspection system based on industrial vision intelligence according to claim 3, characterized in that, The new material detection system based on industrial vision intelligence also includes a waste station, a loading station, an unloading station, and two connecting parts. The flipping station, waste station, loading station, and unloading station are arranged around the support platform. The connecting parts are used to detachably connect the longitudinal moving device and the adsorption platform. The longitudinal moving device is rotatably mounted on the mounting platform. When the clamping assembly is used for sorting, unloading, or loading, the connector connects the longitudinal moving device to the adsorption table.

5. The new material inspection system based on industrial vision intelligence according to claim 4, characterized in that, The longitudinal moving device includes a mounting frame and an electric push cylinder. The electric push cylinder is mounted on the mounting frame, and an annular slide rail is mounted on the mounting platform. The mounting frame is slidably connected to the annular slide rail via an arc-shaped slider.

6. The new material inspection system based on industrial vision intelligence according to claim 5, characterized in that, The flipping component includes a mounting plate and a flipping motor. The mounting plate is mounted on the output end of the lateral moving device, and the flipping motor is mounted on the mounting plate. The output end of the flipping motor passes through the mounting plate and is connected to the arc-shaped clamping component.

7. The new material inspection system based on industrial vision intelligence according to claim 6, characterized in that, Positioning blocks are installed on both sides of the adsorption platform, and positioning holes are provided on the positioning blocks. The connector includes an L-shaped frame, a connecting shaft, and a U-shaped block. The L-shaped frame is installed on the mounting frame. One end of the connecting shaft passes through the L-shaped frame and faces the positioning hole. The other end of the connecting shaft is connected to the U-shaped block. A driving block is installed at the bottom of the mounting plate, and the bottom end of the driving block extends into the U-shaped block.

8. The new material inspection system based on industrial vision intelligence according to claim 7, characterized in that, A magnetic block is embedded in the side of the L-shaped frame facing the U-shaped block, and an adsorption element is installed on the side of the U-shaped block facing the magnetic block.

9. The new material inspection system based on industrial vision intelligence according to claim 7, characterized in that, The connector also includes two limiting shafts. Positioning plates are installed on both sides of the mounting platform. One end of the limiting shaft is installed on the U-shaped block, and the other end passes through the positioning plate.

10. A novel material detection method based on industrial visual intelligence, characterized in that, Using the novel material inspection system based on industrial vision intelligence as described in any one of claims 1-9, the process includes the following steps: S1. The clamping assembly clamps a test piece and places it on the rotary table; S2. The camera acquires images of the inspection piece, wherein the rotating stage drives the inspection piece to rotate, and the moving stage drives the rotating stage to move radially to perform comprehensive inspection of the inspection piece; S3. After one side of the test piece has been tested, the clamping assembly clamps the test piece and conveys it to the flipping station to flip the test piece. S4. The clamping assembly conveys the inspection piece to the rotary table, and the camera captures an image of the other side of the inspection piece. S5. The collected image information is sent to the image processing module, processed, and then sent to the image analysis module. The image analysis module analyzes whether the test piece is qualified.

Images