Pneumatic assembly, seal gate assembly, and semiconductor apparatus

Abstract

The application provides a pneumatic assembly, a sealing door assembly and a semiconductor device. For the pneumatic assembly, a first cylinder has a first air port and a second air port, a second cylinder has a third air port, a fourth air port and a fifth air port, a second piston in the second cylinder is connected to a safety trigger, a main valve includes a sixth air port and a seventh air port, and the main valve has at least two positions corresponding to different air inlet and outlet directions of the sixth air port and the seventh air port. The first air port is connected to the fifth air port through a first air pipe, and the first air pipe has a first air collecting port. The second air port is connected to the fourth air port through a second air pipe, and the second air pipe has a second air collecting port. An air outlet of a first pilot one-way valve of an exhaust branch is connected to the first air collecting port, the second air collecting port is connected to the seventh air port, and the sixth air port is connected to the third air port. The pneumatic assembly has two-way output in a normal mode and single-way output in a limited mode, so that the safety of the device can be improved.

Description

Technical Field

[0001] This invention relates primarily to the field of semiconductor equipment technology, and more particularly to a pneumatic component, a sealing door component, and a semiconductor device. Background Technology

[0002] In semiconductor equipment, the overall footprint of the machine is often affected by the maintenance space required for opening and closing the chamber doors, especially the operating area that must be reserved when the chamber doors are open, which often occupies a large proportion of the overall equipment layout. Given the increasingly high cost of cleanroom construction, effectively reducing the machine footprint allows for the placement of more equipment within a fixed building area, thereby significantly reducing the cleanroom construction investment per unit of production capacity.

[0003] Currently, common cavity door structures mainly include two types: hinged doors and sliding doors. Hinged doors open by swinging outwards from a pivot axis; the larger the door leaf, the greater the external swing space required for opening, resulting in a larger maintenance space. While sliding doors save space to some extent through parallel movement, they pose significant safety hazards in actual use. During the closing process, due to the lack of effective safety buffers or sensor-based protection mechanisms, if an operator's limbs are within the door's movement trajectory, they are highly susceptible to pinching or collision accidents, posing a threat to the operator's safety. Summary of the Invention

[0004] The technical problem to be solved by the present invention is to provide a pneumatic component, a sealing door component, and a semiconductor device, wherein the pneumatic component has two outputs in a conventional mode and a single output in a restricted mode, which can be used to improve the safety of the device. When the pneumatic component is applied to the sealing door component, the safety of the sealing door component can be improved.

[0005] To address the aforementioned technical problems, in a first aspect, the present invention provides a pneumatic assembly, comprising a first cylinder, a second cylinder, and a main valve, wherein: the first cylinder has a first piston and a first air port and a second air port; the second cylinder has a third air port, a fourth air port, and a fifth air port; the second cylinder has a second piston connected to a safety trigger; when the safety trigger is not activated, the second piston is in a first position within the second cylinder, disabling the fourth air port; when the safety trigger actuates the second piston, and the second piston is in a second position within the second cylinder, disabling the fifth air port; the main valve includes a sixth air port and a seventh air port, and the main valve has at least two positional states; when the main valve is in the first position, the sixth air port is an outlet. The seventh air port is a return air port. When the main valve is in the second position, the sixth air port is a return air port, and the seventh air port is an outlet air port. The first air port is connected to the fifth air port through a first air pipe, and the first air pipe has a first air manifold. The second air port is connected to the fourth air port through a second air pipe, and the second air pipe has a second air manifold. An exhaust branch is provided, and the exhaust branch has a first pilot check valve. The outlet of the first pilot check valve is connected to the first air manifold. The inlet of the first pilot check valve is the outlet of the exhaust branch. The control port of the first pilot check valve is connected to the air pipe between the second air manifold and the fourth air port through a first pipeline. The second air manifold is connected to the seventh air port through a third air pipe, and the sixth air port is connected to the third air port through a fourth air pipe.

[0006] Optionally, a first elastic element is provided inside the second cylinder. One end of the first elastic element is fixed, and the other end is connected to the second piston. When the second piston is not subjected to external force, the first elastic element keeps the second piston in the first position. When the safety trigger applies external force, the first elastic element is in a compressed state, and the second piston is in the second position.

[0007] Optionally, a valve is provided on the air pipe between the first air inlet and the first air outlet, and / or a valve is provided on the air pipe between the second air outlet and the second air inlet, and / or a valve is provided on the third air pipe.

[0008] Optionally, the valve installed on the air pipe between the first air inlet and the first air outlet is a second pilot-operated check valve. The outlet of the second pilot-operated check valve is connected to the first air outlet, and the inlet of the second pilot-operated check valve is connected to the first air inlet. The control port of the second pilot-operated check valve is connected to the air pipe between the second air inlet and the fourth air outlet via a second pipeline. Alternatively, the valve installed on the air pipe between the second air outlet and the second air inlet is a third pilot-operated check valve, and the outlet of the third pilot-operated check valve is connected to the second air outlet. The inlet of the third pilot check valve is connected to the second gas port, and the control port of the third pilot check valve is connected to the gas pipe between the second pilot check valve and the first gas port via a third pipeline. Alternatively, the valve installed on the third gas pipe is a fourth pilot check valve, the outlet of the fourth pilot check valve is connected to the second gas port, the inlet of the fourth pilot check valve is connected to the seventh gas port, and the control port of the fourth pilot check valve is connected to the gas pipe between the second pilot check valve and the first gas port via a fourth pipeline.

[0009] Secondly, the present invention provides a sealing door assembly, comprising at least one set of connecting components, wherein the connecting components include a first connecting member and a second connecting member, wherein: the first connecting member is provided with a first rotating shaft and a second rotating shaft, the second connecting member is provided with a third rotating shaft and a fourth rotating shaft, the first rotating shaft and the third rotating shaft are connected by a first connecting rod, the second rotating shaft and the fourth rotating shaft are connected by a second connecting rod, and the distance between the first rotating shaft and the second rotating shaft is equal to the distance between the third rotating shaft and the fourth rotating shaft. The distance between the rotating shafts; a first limiting member configured to be fixed on the target cavity, wherein after the sealing door assembly is installed into the target cavity, the first limiting member causes the second connecting member to move a distance in a first direction under the traction of the first connecting member not greater than a first distance threshold, the first direction being from the lower end of the first connecting member toward the upper end of the first connecting member; the upper end of the first connecting member is connected to the upper end of the second connecting member via a second elastic member, and the lower end of the first connecting member is connected to the output mechanism of the first cylinder in the pneumatic assembly as described in the first aspect; the second connecting member is fixedly connected to the door body.

[0010] Optionally, it further includes a second limiting member, which is fixed to the second connector and located below the second link, and is configured to keep the first link and the second link horizontal during the movement of the first connector and the second connector in a second direction, wherein the second direction is from the upper end of the first connector toward the lower end of the first connector.

[0011] Optionally, it also includes a third limiting member, which is fixed to the second connecting member and located above the first connecting rod, and is configured to ensure that after the second connecting member stops moving, the distance by which the first connecting member continues to move in the first direction is not greater than a second distance threshold.

[0012] Optionally, the sealing door assembly includes two sets of connecting components, the door body is fixed between the second connecting members of the two sets of connecting components, the first connecting members of the two sets of connecting components are fixed by connecting plates, and the middle part of the connecting plates is fixed to the output mechanism of the first cylinder.

[0013] Thirdly, the present invention provides a semiconductor device, including a cavity and a sealing door assembly, wherein the sealing door assembly is the sealing door assembly as described in the second aspect, the first cylinder is fixed to the cavity, and the door is located at the cavity opening of the cavity.

[0014] Optionally, the safety trigger is a horizontal bar, which is disposed on the upper edge of the door body.

[0015] Compared with existing technologies, this invention has the following advantages: For pneumatic components, its structure is simple, and different output modes of the first cylinder are achieved through a single main valve, namely, two outputs in normal mode and a single output in restricted mode. Specifically, a second cylinder and a safety trigger are incorporated into the pneumatic component as a safety protection structure. When the safety trigger is activated, regardless of the position of the main valve, the first cylinder only has one output mode, enabling the pneumatic component to improve the safety of equipment use. For example, this pneumatic component can be applied to a sealing door assembly. When the safety trigger is not activated (i.e., in the normal state), the first cylinder achieves two output modes by the different positions of the main valve, corresponding to the opening and closing of the sealing door assembly. When the safety trigger is activated, the first cylinder only achieves one output mode. If this output mode is used to correspond to the opening of the sealing door assembly, then after the safety trigger is activated, the sealing door assembly is always in the open state, improving the safety of the sealing door assembly. Attached Figure Description

[0016] The accompanying drawings are included to provide a further understanding of this application; they are incorporated into and constitute a part of this application. The drawings illustrate embodiments of this application and, together with this specification, serve to explain the principles of this application. In the drawings:

[0017] Figure 1 This is a schematic diagram of the structure of a pneumatic component according to an embodiment of the present invention;

[0018] Figure 2 This is a pneumatic schematic diagram of a pneumatic component in conventional mode according to an embodiment of the present invention;

[0019] Figure 3 This is a pneumatic schematic diagram of a pneumatic component in a confined mode according to an embodiment of the present invention;

[0020] Figure 4 This is a schematic diagram of the structure of a sealing door assembly according to an embodiment of the present invention.

[0021] In the picture:

[0022] 110 - First cylinder, 111 - First piston, 112 - Output mechanism;

[0023] 120 - Second cylinder, 121 - First elastic element, 122 - Second piston;

[0024] 130 - Main valve;

[0025] 140 - Safety trigger;

[0026] 151 - First air inlet, 152 - Second air inlet, 153 - Third air inlet, 154 - Fourth air inlet, 155 - Fifth air inlet, 156 - Sixth air inlet, 157 - Seventh air inlet;

[0027] 161-First pilot check valve, 162-Second pilot check valve, 163-Third pilot check valve, 164-Fourth pilot check valve;

[0028] 1611 - First pipeline, 1621 - Second pipeline, 1631 - Third pipeline, 1641 - Fourth pipeline;

[0029] 171 - First trachea, 172 - Second trachea, 173 - Third trachea, 174 - Fourth trachea, 175 - Fifth trachea;

[0030] 181 - First gas port, 182 - Second gas port;

[0031] 210 - Cavity;

[0032] 220 - Connecting components;

[0033] 2211 - First connector, 2212 - Second connector;

[0034] 2221 - First pivot, 2222 - Second pivot, 2223 - Third pivot, 2224 - Fourth pivot;

[0035] 2231 - First link, 2232 - Second link;

[0036] 224 - Second elastic element;

[0037] 2251 - First limiting component, 2252 - Second limiting component, 2253 - Third limiting component;

[0038] 230-Gate body;

[0039] 240 - Connecting plate. Detailed Implementation

[0040] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are merely some examples or embodiments of this application. For those skilled in the art, these drawings can be applied to other similar scenarios without creative effort. Unless obvious from the context or otherwise specified, the same reference numerals in the drawings represent the same structures or operations.

[0041] In the description of this application, it should be understood that the orientation or positional relationship indicated by directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" is usually based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing this application and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this application; the directional terms "inner" and "outer" refer to the inner and outer contours relative to the outline of each component itself.

[0042] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0043] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, these terms have no special meaning and therefore should not be construed as limiting the scope of protection of this application. In addition, although the terminology used in this application is selected from commonly known and used terms, some terms mentioned in this application's specification may have been chosen by the applicant according to his or her judgment, and their detailed meanings are explained in the relevant sections of this description. Moreover, this application should be understood not only through the actual terms used, but also through the meaning implied by each term.

[0044] Figure 1 This is a schematic diagram of the structure of a pneumatic component according to an embodiment of the present invention, for reference. Figure 1 As shown, the pneumatic assembly includes a first cylinder 110, a second cylinder 120, and a main valve 130. The first cylinder 110 is used for power output and is also called a drive cylinder. The second cylinder 120 is used for air circuit switching and is also called a switching cylinder. The main valve 130 is used to provide initial air intake and is also called a control valve. The first cylinder 110 contains a first piston 111 and has a first air port 151 and a second air port 152. For ease of description, the first cylinder 110 is divided into a first air chamber and a second air chamber on both sides of the first piston 111. The first air chamber has a first air port 151, and the second air chamber has a second air port 152. From the structure of the first cylinder 110, it can be seen that when air is supplied to the first air chamber through the first air port 151, correspondingly, air is released from the second air chamber through the second air port 152. This causes the first piston 111 to move towards the second air chamber, thereby driving the corresponding output mechanism 112 in one direction (e.g., ...). Figure 1 The first piston 111 moves upwards; conversely, when the air inlet and outlet directions of the first air port 151 and the second air port 152 are opposite to those before, the first piston 111 will drive the output mechanism 112 to move in the other direction (e.g., above). Figure 1 Move (below) in the middle.

[0045] The second cylinder 120 has a third air port 153, a fourth air port 154, and a fifth air port 155. The second cylinder 120 contains a second piston 122, which is connected to a safety trigger 140. The second piston 122 and the safety trigger 140 can be rigidly connected in any feasible manner, such as via a connecting rod. No restrictions are placed on the connection method between the second piston 122 and the safety trigger 140. When the safety trigger 140 is subjected to an external force, the second piston 122 is simultaneously subjected to the same force. When the safety trigger 140 is not subjected to an external force or is not activated, the second piston 122 is in the first position (initial position) within the second cylinder 120, disabling the fourth air port 154. When the safety trigger 140 actuates the second piston 122, and the second piston 122 is in the second position within the second cylinder 120, the fifth air port 155 is disabled. Thus, when the fourth gas port 154 is disabled, gas flows between the third gas port 153 and the fifth gas port 155, and when the fifth gas port 155 is disabled, gas flows between the third gas port 153 and the fourth gas port 154.

[0046] The main valve 130 includes a sixth air port 156 and a seventh air port 157, and the main valve 130 has at least two positions. When the main valve 130 is in the first position, the sixth air port 156 is the outlet and the seventh air port 157 is the return air port. When the main valve 130 is in the second position, the sixth air port 156 is the return air port and the seventh air port 157 is the outlet.

[0047] The first air port 151 is connected to the fifth air port 155 via the first air pipe 171, and the first air pipe 171 has a first air manifold 181. The second air port 152 is connected to the fourth air port 154 via the second air pipe 172, and the second air pipe 172 has a second air manifold 182. This pneumatic assembly is provided with an exhaust branch, which has a first pilot check valve 161. The outlet of the first pilot check valve 161 is connected to the first air manifold 181, and the inlet of the first pilot check valve 161 is the outlet of the exhaust branch. The control port of the first pilot check valve 161 is connected to the air pipe between the second air manifold 182 and the fourth air port 154 via the first pipeline 1611. The second air manifold 182 is connected to the seventh air port 157 via the third air pipe 173, and the sixth air port 156 is connected to the third air port 153 via the fourth air pipe 174.

[0048] It should be understood that the "gas port" (including the first gas port 181 and the second gas port 182) in this application is merely a location on the trachea, named for the purpose of clearly expressing the technical solution, and does not necessarily imply any specific structure at that location. It is known that, under normal circumstances, gas can flow from its inlet to its outlet in a pilot-operated check valve. However, when the pilot gas reaches the control port, the pilot-operated check valve allows the gas to flow in the reverse direction, that is, allows the gas to flow from the outlet to the inlet.

[0049] Based on the pneumatic assembly with the above structure, a main valve 130 enables different output modes of the first cylinder 110, namely, two-way output in normal mode and single-way output in restricted mode. A second cylinder 120 and a safety trigger 140 are incorporated into the pneumatic assembly as a triggering structure for safety protection. When the safety trigger 140 is activated, regardless of the position of the main valve 130, the first cylinder 110 only has one output mode. This allows the pneumatic assembly to enhance the safety of equipment use; for example, this pneumatic assembly can be applied to the structure of a sealing door assembly to improve the safety of the sealing door assembly.

[0050] For example, this embodiment demonstrates different output modes of the first cylinder 110 by showing different states of the pneumatic component when the safety trigger 140 is not activated (normal mode / normal state) and after the safety trigger 140 is activated (restricted mode / protected state).

[0051] refer to Figure 1 As shown, Figure 1 This diagram demonstrates the first output mode achieved by the first cylinder 110 under normal conditions: as shown in the figure, it drives the output mechanism 112 to move upwards. The arrows on the air path in the diagram indicate the gas flow direction. In this state, the main valve 130 is in the first position, and the gas flows sequentially through: sixth port 156 → fourth pipe 174 → third port 153 → second cylinder 120 → fifth port 155 → first pipe 171 → first port 151 → first chamber of the first cylinder 110; for the gas in the second chamber, it flows sequentially through: second port 152 → second manifold 182 → third pipe 173 → seventh port 157. Thus, the first piston 111 in the first cylinder 110 moves upwards under the pushing force of the gas in the first chamber, driving the output mechanism 112 to move upwards.

[0052] refer to Figure 2 As shown, Figure 2 This can be used to demonstrate the second output mode achieved by the first cylinder 110 under normal conditions: as shown in the figure, it drives the output mechanism 112 to move downwards. The arrows on the air path in the figure indicate the gas flow direction. In this state, the main valve 130 is in the second position, and the gas flows sequentially through: the seventh air port 157 → the third air pipe 173 → the second air port 182 → the second air port 152 → the second air chamber in the first cylinder 110; while the gas in the first air chamber flows through: the first air port 151 → the first air pipe 171 → the fifth air port 155 → the second cylinder 120 → the third air port 153 → the fourth air pipe 174 → the sixth air port 156. At the same time, the gas in the first air chamber also flows into the exhaust branch through the first air port 151 and the first air port 181. In this way, the first piston 111 in the first cylinder 110 moves downwards under the pushing action of the gas in the second air chamber, driving the output mechanism 112 to move downwards.

[0053] refer to Figure 3 As shown, Figure 3 This can be used to demonstrate that even when the main valve 130 is in the first position under protection, the first cylinder 110 also operates in the second output mode, as shown in the figure, driving the output mechanism 112 downwards. The arrows on the gas path in the figure indicate the gas flow direction. In this state, the main valve 130 is in the first position, and the gas flows sequentially through: the sixth gas port 156 → the fourth gas pipe 174 → the third gas port 153 → the second cylinder 120 → the fourth gas port 154 → the second gas pipe 172 → the second gas port 152 → the second chamber of the first cylinder 110. The gas in the first chamber flows from the first gas port 151 through the first gas pipe 171 to the first gas manifold 181, and then flows into the exhaust branch. In this way, the first piston 111 in the first cylinder 110 moves downwards under the pushing action of the gas in the second chamber, driving the output mechanism 112 downwards.

[0054] contrast Figure 1 and Figure 3 As can be seen from the output mode of the output mechanism 112, although the main valve 130 is always in the first state, the first cylinder 110 is in different output modes depending on whether the safety trigger 140 is triggered. This property has a wide range of safety applications. For example, it can be applied to the safety protection structure of the sealing door assembly of semiconductor equipment. The sealing door assembly uses this pneumatic component. When the safety trigger 140 is not triggered, that is, in the normal state, the first cylinder 110 can achieve two output modes by the different positions of the main valve 130. This corresponds to the opening and closing of the sealing door assembly. When the safety trigger 140 is triggered, the first cylinder 110 only achieves one output mode. If this output mode is corresponding to the opening of the sealing door assembly, then when the safety trigger 140 is triggered, the sealing door assembly is always in the open state, which improves the safety of the sealing door assembly.

[0055] The first cylinder 110 can be a rodless cylinder. A rodless cylinder is a cylinder without a piston rod. Traditional cylinders convert the pressure energy of compressed gas into linear reciprocating mechanical energy through a piston rod, while a rodless cylinder directly drives a slider (corresponding to the output mechanism 112 in the figure) to move linearly outside the cylinder barrel, thus eliminating the need for an extended piston rod. For the same stroke, the installation length of a rodless cylinder is approximately half that of a traditional rod-type cylinder. For example, the first cylinder 110 can be a magnetically coupled rodless cylinder. In this rodless cylinder, the compressed gas pushes the first piston 111 to move within a completely sealed cylinder barrel. Based on the magnetic force between the inner and outer magnetic rings, the outer slider is attracted and moves synchronously with the inner first piston 111, and the corresponding load is mounted on the slider, achieving load drive. It is evident that there is no mechanical contact between the slider and the cylinder body in a rodless cylinder, resulting in low frictional resistance and enabling higher movement speeds. Simultaneously, the rodless cylinder can also optimize the spatial layout of the equipment.

[0056] In one example, a first elastic element 121 is provided inside the second cylinder 120. One end of the first elastic element 121 is fixed, and the other end is connected to the second piston 122. When the second piston 122 is not subjected to external force, the first elastic element 121 keeps the second piston 122 in a first position. When the safety trigger 140 applies external force, it will cause the first elastic element 121 to be in a compressed state, and the second piston 122 to be in a second position.

[0057] refer to Figure 1 As shown, one end of the first elastic element 121 (e.g., a spring) is fixed to the bottom of the second cylinder 120, and this end remains stationary. The other end is connected to the second piston 122. When the first elastic element 121 is in its normal state (corresponding to the safety trigger 140 being in its normal state), the first elastic element 121 pushes the second piston 122, causing the second piston 122 to be positioned at the upper end of the second cylinder 120. The upper end has a fourth air port 154. Ultimately, the fourth air port 154 is blocked by the second piston 122, preventing gas from flowing through it. (Reference) Figure 3 As shown, when the external safety trigger 140 presses down on the second piston 122, the first elastic element 121 is compressed accordingly. At this time, the second piston 122 will be located at the lower end of the second cylinder 120, and the lower end has a fifth air port 155. The final result is that the fifth air port 155 is blocked by the second piston, and gas cannot flow through the fifth air port 155. It can be seen that by whether the external safety trigger 140 pushes the second piston 122, the fifth air port 155 or the fourth air port 154 can be blocked respectively, so that the second cylinder 120 has two gas flow states: one is gas flow between the third air port 153 and the fourth air port 154, and the other is gas flow between the third air port 153 and the fifth air port 155.

[0058] The main valve 130 can be a three-position five-way valve. The three-position five-way valve includes a pressure inlet P (connected to an air source), two working outlets A and B, and two exhaust ports R and S. In the illustrated embodiment, the sixth air port 156 and the seventh air port 157 correspond to the two working outlets A and B, respectively. In addition to the first and second positions mentioned above, the three-position five-way valve also has an intermediate position. For example, in this embodiment, the pneumatic assembly can use a center-sealed three-position five-way valve. When the three-position five-way valve is in the intermediate position, the gas in the first and second chambers of the first cylinder 110 is sealed, and the first piston 111 cannot move and remains in its original position.

[0059] In one example, a valve is provided on the air pipe between the first air inlet 181 and the first air outlet 151, and / or a valve is provided on the air pipe between the second air outlet 152 and the second air inlet 182, and / or a valve is provided on the third air pipe 173. In one implementation, the valve provided on the air pipe between the first air inlet 181 and the first air outlet 151 is a second pilot check valve 162. The outlet of the second pilot check valve 162 is connected to the first air outlet 151, the inlet of the second pilot check valve 162 is connected to the first air inlet 181, and the control port of the second pilot check valve 162 is connected to the air pipe between the second air inlet 182 and the fourth air outlet 154 through a second pipeline 1621.

[0060] As mentioned above, since a "gas port" is a point on the trachea, when describing a gas path connecting to a location on the trachea between a gas port and a certain location, the technical solution expressed is substantially the same as a gas path connecting to a gas port, and both should be understood as being within the scope of protection claimed in this application. For example: the technical solution expressed in the above description of "the control port of the second pilot check valve 162 is connected to the trachea between the second gas port 182 and the fourth gas port 154 through the second pipeline 1621" is substantially the same as the following description of "the control port of the second pilot check valve 162 is connected to the second gas port 182 through the second pipeline 1621".

[0061] In one implementation, the valve on the air pipe between the second air port 152 and the second air manifold 182 is a third pilot check valve 163. The outlet of the third pilot check valve 163 is connected to the second air port 152, the inlet of the third pilot check valve 163 is connected to the second air manifold 182, and the control port of the third pilot check valve 163 is connected to the air pipe between the second pilot check valve 162 and the first air manifold 181 through a third pipeline 1631.

[0062] In one implementation, the valve installed on the third air pipe 173 is a fourth pilot check valve 164. The outlet of the fourth pilot check valve 164 is connected to the second air port 182, the inlet of the fourth pilot check valve 164 is connected to the seventh air port 157, and the control port of the fourth pilot check valve 164 is connected to the air pipe between the second pilot check valve 162 and the first air port 181 through the fourth pipeline 1641.

[0063] Based on the aforementioned pilot check valve configuration, the airflow pressure within the pneumatic components can be kept stable. (Reference) Figure 1As shown, when a pilot check valve is installed, under normal conditions, the first cylinder 110 achieves the first type of output, driving the output mechanism 112 to move upward as shown in the figure. At this time, the gas flows sequentially through: the sixth air port 156 → the fourth air pipe 174 → the third air port 153 → the second cylinder 120 → the fifth air port 155 → the first air pipe 171 → the second pilot check valve 162 → the first air port 151 → the first air chamber of the first cylinder 110; for the gas in the second air chamber, it flows sequentially through: the second air port 152 → the third pilot check valve 163 → the second air manifold 182 → the fourth pilot check valve 164 → the third air pipe 173 → the seventh air port 157.

[0064] refer to Figure 2 As shown, when a pilot check valve is installed, under normal conditions, the first cylinder 110 achieves the second output, driving the output mechanism downwards as shown in the figure. At this time, the airflow sequentially flows through: the seventh port 157 → the third pipe 173 → the fourth pilot check valve 164 → the second manifold 182 → the third pilot check valve 163 → the second port 152 → the second chamber of the first cylinder 110; while the gas in the first chamber flows through: the first port 151 → the second pilot check valve 162 → the first pipe 171 → the fifth port 155 → the second cylinder 120 → the third port 153 → the fourth pipe 174 → the sixth port 156. Simultaneously, the gas in the first chamber also flows from the first port 151 into the exhaust branch via the first manifold 181.

[0065] refer to Figure 3 As shown, when a pilot check valve is installed, the safety trigger 140 is activated, and the first cylinder 110 achieves the second output under the protection state. The gas flows sequentially through: sixth gas port 156 → fourth gas pipe 174 → third gas port 153 → second cylinder 120 → fourth gas port 154 → second gas pipe 172 → third pilot check valve 163 → second gas port 152 → second chamber of the first cylinder 110; the gas in the first chamber flows through: first gas port 151 → second pilot check valve 162 → first gas pipe 171 → first gas port 181 → exhaust branch.

[0066] It should be noted that the pneumatic assembly in this embodiment is equipped with a pilot check valve. Under certain control, the pilot check valve allows gas to flow in reverse. Its advantage lies in increasing the active control capability of reverse gas flow, thereby achieving safer and more stable airflow control. Specifically, in the first case where the pneumatic assembly has a second pilot check valve 162 and / or a third pilot check valve 163 and / or a fourth pilot check valve 164, compared with the second case where the second pilot check valve 162, the third pilot check valve 163, and the fourth pilot check valve 164 are not present, although the gas flow direction between each air port is the same, due to the presence of the pilot check valve, a certain amount of gas needs to be introduced into the control port of the pilot check valve before the pilot check valve can be opened, making the gas flow in each air pipe more stable.

[0067] For example, the following describes the pilot check valve control and gas flow (especially reverse flow) in the first and second output modes of the pneumatic assembly under normal conditions. In the first output mode: For the third pilot check valve 163, a portion of the gas flowing in the first air pipe 171 can flow into the control port of the third pilot check valve 163 through the third pipe 1631. When the gas flow rate / flow rate entering the control port reaches a certain level, the third pilot check valve 163 reverses its flow, allowing gas to flow in from the outlet of the third pilot check valve 163 and out from its inlet. For the fourth pilot check valve 164, a portion of the gas flowing in the first gas pipe 171 can flow into the control port of the fourth pilot check valve 164 through the fourth pipeline 1641. When the gas flow rate / flow rate entering the control port reaches a certain level, the fourth pilot check valve 164 reverses its flow, allowing gas to flow in from the outlet of the fourth pilot check valve 164 and out from its inlet. In the second output mode: For the second pilot check valve 162, a portion of the gas flowing in the second gas pipe 172 can flow into the control port of the second pilot check valve 162 through the second pipeline 1621. When the gas flow rate / flow rate entering the control port reaches a certain level, the second pilot check valve 162 reverses its flow, allowing gas to flow in from the outlet of the second pilot check valve 162 and out from its inlet.

[0068] Another embodiment of the present invention provides a sealing door assembly, see reference. Figure 4As shown, the device includes a door body 230 and at least one set of connecting components 220. The connecting components 220 include a first connector 2211 and a second connector 2212. The first connector 2211 is provided with a first pivot 2221 and a second pivot 2222, and the second connector 2212 is provided with a third pivot 2223 and a fourth pivot 2224. The first pivot 2221 and the third pivot 2223 are connected by a first connecting rod 2231, and the second pivot 2222 and the fourth pivot 2224 are connected by a second connecting rod 2232. The distance between the first pivot 2221 and the second pivot 2222 is equal to the distance between the third pivot 2223 and the fourth pivot 2224, and the distance between the first pivot 2221 and the third pivot 2223 is equal to the distance between the second pivot 2222 and the fourth pivot 2224. The sealing door assembly also includes a first limiting member 2251, which is configured to be fixed to the target cavity. After the sealing door assembly is installed in the target cavity, the first limiting member 2251 ensures that the second connecting member 2212 moves no more than a first distance threshold along a first direction under the traction of the first connecting member 2211. The first direction extends from the lower end of the first connecting member 2211 to the upper end of the first connecting member 2211, and can also be described as the direction in which the door 230 closes. Figure 4 In the illustrated embodiment, the orientation is upward. The upper end of the first connector 2211 is connected to the upper end of the second connector 2212 via the second elastic member 224, and the lower end of the first connector 2211 is connected to the drive mechanism. In this embodiment, the drive mechanism can be a pneumatic assembly as described in the previous embodiments, in which case the lower end of the first connector 2211 is connected to the output mechanism 112 of the first cylinder 110. The second connector 2212 is fixedly connected to the door body 230.

[0069] As can be seen from the above structure, the first rotating shaft 2221, the second rotating shaft 2222, the third rotating shaft 2223, the fourth rotating shaft 2224, the first connecting rod 2231, and the second connecting rod 2232 form a parallelogram connecting rod structure. Taking the position of the first connecting member 2211 in the diagram as a reference position, it can be seen that moving the second connecting member 2212 upwards or downwards will decrease the distance between the second connecting member 2212 and the first connecting member 2211. When the distance between the first connecting member 2211 and the second connecting member 2212 is at its maximum, the parallelogram connecting rod structure becomes a rectangular structure, i.e., the position shown in the diagram. Utilizing this property, this sealing door assembly can be applied to the cavity 210, as shown in the diagram. Figure 4 As shown, when cavity 210 switches from the closed state to the open state, door 230 moves laterally outward, breaking the vacuum seal within cavity 210. When cavity 210 switches from the open state to the closed state, door 230 moves laterally inward, compressing the sealing ring inward to form a seal.

[0070] For example, in combination Figure 1 and Figure 4 As shown, when cavity 210 needs to be closed, the driving force of the first cylinder 110 causes the first connecting member 2211 to move upward. The pulling force of the second elastic member 224 is equal to the weight of the door 230. At this time, the first connecting member 2211 will pull the door 230 upward. When the second connecting member 2212 touches the first limiting member 2251, the first connecting member 2211 continues to move upward, thereby stretching the second elastic member 224. At this time, the elastic force of the second elastic member 224 gradually exceeds the weight of the door 230. At the same time, the rectangular structure composed of the connecting rod and the rotating shaft gradually switches to a parallelogram structure, and the door 230 moves inward, squeezing the sealing ring to achieve the sealing effect of cavity 210.

[0071] Combination Figure 2 and Figure 4 As shown, when the cavity 210 needs to be opened, the driving force of the first cylinder 110 will cause the first connecting member 2211 to move downward. At this time, the cavity 210 is in a vacuum state, and the door 230 will adhere to the cavity 210 and remain stationary. As the first connecting member 2211 moves downward, the parallelogram structure composed of the connecting rod and the rotating shaft changes to a rectangular structure, thus opening the door 230 and breaking the vacuum seal in the cavity 210. At the same time, as the first connecting member 2211 moves downward, the second elastic member 224 (such as a spring) naturally contracts. After contraction, the tension of the second elastic member 224 is equal to the weight of the door 230. Then, the first connecting member 2211 and the second connecting member 2212 (or the door 230) descend simultaneously until the cavity 210 is fully opened.

[0072] Combination Figure 3 and Figure 4 As shown, to prevent injury or equipment damage caused by operator failure to remove hands from cavity 210 in time during closing, or by other personnel accidentally activating the closing mechanism while the operator is inside cavity 210, this application proposes an embodiment with a safety trigger 140. In this embodiment, when a person fails to remove themselves from cavity 210, they will press against the safety trigger 140. The pressed safety trigger 140 will cause the second cylinder 120 to switch positions, cutting off the driving force for the door 230 to rise, thus stopping the door 230 from rising. This prevents the door 230 from continuing to rise and pressing on the operator, and allows the door 230 to reopen. If the operator removes their hand, the safety trigger 140 will no longer exert force on the second piston 122 in the second cylinder 120. The first elastic member 121 will reset the second piston 122 in the second cylinder 120 to its initial position, and re-ventilation will close cavity 210 again. Alternatively, before the door 230 rises, the operator can press down the safety trigger 140 in advance to prevent the door 230 from rising and ensure the operator's safety.

[0073] In one example, the sealing door assembly further includes a second limiting member 2252. The second limiting member 2252 is fixed to the second connector 2212 and located below the second link 2232. It is configured to keep the first link 2231 and the second link 2232 horizontal during movement of the first connector 2211 and the second connector 2212 in a second direction, wherein the second direction extends from the upper end of the first connector 2211 to the lower end of the first connector 2211. This can also be described as the direction in which the door 230 opens. Figure 4 In the illustrated embodiment, the direction is downward. This causes the parallelogram structure formed by the connecting rods and the pivot to form a rectangular structure as the first connecting member 2211 and the second connecting member 2212 move downwards. Without the second limiting member 2252, the following situation might occur: during the opening of the cavity 210, the first connecting member 2211 moves downwards, and the tension of the second elastic member 224 equals the weight of the door 230. When the distance the first connecting member 2211 descends exceeds the distance the second connecting member 2212 descends, the rectangular structure will revert to a parallelogram structure, forming a reverse parallelogram structure. This would cause the door 230 to move closer to the frame of the cavity 210. Therefore, to prevent the connecting rod structure from forming a reverse parallelogram, the second limiting member 2252 is provided in this embodiment to keep the first connecting rod 2231 and the second connecting rod 2232 horizontal, forming a rectangular structure with the connecting rods and the pivot. This ensures that the first connecting member 2211 moves downwards along with the door 230.

[0074] In one example, the sealing door assembly further includes a third limiting member 2253, which is fixed to the second connecting member 2212 and located above the first connecting rod 2231. The third limiting member 2253 is configured to ensure that after the second connecting member 2212 stops moving, the distance the first connecting member 2211 continues to move in the first direction does not exceed a second distance threshold. It is understood that during the upward movement of the first connecting member 2211, since the second connecting member 2212 has stopped moving under the action of the first limiting member 2251, if the first connecting member 2211 were to rise at this time, the shape of the parallelogram structure would change, the distance between the door body 230 and the first connecting member 2211 would decrease, and the door body 230 connected to the second connecting member 2212 would be pressed against the cavity 210, sealing the cavity 210. If the first connecting member 2211 continues to rise, the distance between the door 230 and the first connecting member 2211 will further decrease. This could cause the door 230 to excessively press against the cavity 210, or even damage the seal at the cavity door of the cavity 210. To avoid this, this embodiment provides a third limiting member 2253 to restrict the first connecting member 2211 from moving along the first direction ( Figure 4The distance the first connector 2211 moves in the first direction (upward) is such that after the cavity 210 is sealed, the distance the first connector 2211 continues to move in the first direction is no greater than the second distance threshold, so as to avoid the door 230 from putting excessive pressure on the cavity 210.

[0075] In one example, the sealing door assembly includes a door body 230 and two sets of connecting assemblies 220. The door body 230 is fixed between second connecting members 2212 of the two sets of connecting assemblies 220. The first connecting members 2211 of the two sets of connecting assemblies 220 are fixed by a connecting plate 240. The first connecting members 2211 of both sets of connecting assemblies 220 can be vertically slidably fixed to the cavity 210 via a guide mechanism (e.g., a slide rail / slider mechanism). The middle of the connecting plate 240 is fixed to the output mechanism 112 of the first cylinder 110. (Reference) Figure 4 As shown, connecting components 220 are respectively provided on two opposite sides of the cavity 210. Through this symmetrical structural design, the cavity 210 has a stronger closing force and better sealing performance. Furthermore, the door 230 moves more stably during the opening and closing process of the cavity 210.

[0076] Another embodiment of the present invention provides a semiconductor device, including a cavity 210 and a sealing door assembly, wherein the sealing door assembly can be the sealing door assembly as described in the previous embodiment, a first cylinder 110 is fixed to the cavity 210, and a door 230 is located at the cavity opening of the cavity 210. Based on the advantages of the above-mentioned sealing door assembly, the semiconductor reaction device of this embodiment also has higher sealing performance and safety, which will not be elaborated further here.

[0077] In one example, the safety trigger 140 is a horizontal bar positioned along the upper edge of the door 230. (See reference) Figure 4 As shown, the horizontal bar is located on the upper edge of the door 230. During the upward movement of the door 230 (i.e., the closing process), the operator can easily press the horizontal bar, stopping the closing process in time, or preventing the closing process from starting after the operator presses the horizontal bar. To further improve the convenience of the operator pressing the horizontal bar, its length can be designed to be the same as or nearly the same as the width of the door 230. This way, the operator can easily press the horizontal bar regardless of where they press the upper edge of the door 230, thus activating the safety trigger 140, further enhancing operational convenience.

[0078] The basic concepts have been described above. Obviously, for those skilled in the art, the above disclosure is merely illustrative and does not constitute a limitation of this application. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements, and corrections to this application. Such modifications, improvements, and corrections are suggested in this application, and therefore remain within the spirit and scope of the exemplary embodiments of this application.

[0079] Furthermore, this application uses specific terms to describe embodiments of the application. For example, "an embodiment," "one embodiment," and / or "some embodiments" refer to a particular feature, structure, or characteristic related to at least one embodiment of the application. Therefore, it should be emphasized and noted that "an embodiment," "one embodiment," or "an alternative embodiment" mentioned twice or more in different locations in this specification do not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of the application can be appropriately combined.

[0080] Similarly, it should be noted that, in order to simplify the description of the present application and thus aid in the understanding of one or more embodiments of the invention, the foregoing description of the embodiments of the present application sometimes combines multiple features into a single embodiment, drawing, or description thereof. However, this disclosure method does not imply that the subject matter of the application requires more features than those mentioned in the claims. In fact, the embodiments contain fewer features than all the features of the single embodiments disclosed above.

[0081] Although this application has been described with reference to specific embodiments, those skilled in the art should recognize that the above embodiments are only used to illustrate this application, and various equivalent changes or substitutions can be made without departing from the spirit of this application. Therefore, any changes or modifications to the above embodiments within the essential spirit of this application will fall within the scope of the claims of this application.

Claims

1. A pneumatic component, characterized in that, include: The first cylinder, the second cylinder, and the main valve, wherein: The first cylinder has a first piston, and the first cylinder has a first air port and a second air port; The second cylinder has a third port, a fourth port, and a fifth port; the second cylinder contains a second piston, which is connected to a safety trigger. When the safety trigger is not activated, the second piston is in the first position inside the second cylinder, disabling the fourth air port. When the safety trigger drives the second piston to activate, and the second piston is in the second position inside the second cylinder, disabling the fifth air port. The main valve includes a sixth air port and a seventh air port, and the main valve has at least two positions; when the main valve is in the first position, the sixth air port is the outlet and the seventh air port is the return air port; when the main valve is in the second position, the sixth air port is the return air port and the seventh air port is the outlet. The first air port is connected to the fifth air port via a first air tube, and the first air tube has a first air inlet; the second air port is connected to the fourth air port via a second air tube, and the second air tube has a second air inlet. An exhaust branch is provided, the exhaust branch having a first pilot check valve, the outlet of the first pilot check valve being connected to the first gas collection port, the inlet of the first pilot check valve being the outlet of the exhaust branch, and the control port of the first pilot check valve being connected to the gas pipe between the second gas collection port and the fourth gas port via a first pipeline. The second air inlet is connected to the seventh air inlet via a third air pipe, and the sixth air inlet is connected to the third air inlet via a fourth air pipe.

2. The pneumatic assembly as described in claim 1, characterized in that, The second cylinder is provided with a first elastic element, one end of which is fixed and the other end is connected to the second piston. When the second piston is not subjected to external force, the first elastic element keeps the second piston in the first position. When the safety trigger applies external force, the first elastic element is in a compressed state and the second piston is in the second position.

3. The pneumatic assembly as described in claim 1, characterized in that, A valve is installed on the air pipe between the first air inlet and the first air outlet; And / or, a valve is provided on the air pipe between the second air port and the second air collection port; And / or, a valve is provided on the third air pipe.

4. The pneumatic assembly as described in claim 3, characterized in that, The valve installed on the air pipe between the first air inlet and the first air outlet is a second pilot-operated check valve. The outlet of the second pilot-operated check valve is connected to the first air outlet, and the inlet of the second pilot-operated check valve is connected to the first air inlet. The control port of the second pilot-operated check valve is connected to the air pipe between the second air inlet and the fourth air outlet via a second pipeline; and / or, The valve installed on the air pipe between the second air port and the second air manifold is a third pilot-operated check valve. The outlet of the third pilot-operated check valve is connected to the second air port, and the inlet of the third pilot-operated check valve is connected to the second air manifold. The control port of the third pilot-operated check valve is connected to the air pipe between the second pilot-operated check valve and the first air manifold via a third pipeline; and / or, The valve installed on the third air pipe is a fourth pilot check valve. The outlet of the fourth pilot check valve is connected to the second air port, the inlet of the fourth pilot check valve is connected to the seventh air port, and the control port of the fourth pilot check valve is connected to the air pipe between the second pilot check valve and the first air port through a fourth pipeline.

5. A sealing door assembly, characterized in that, It includes at least one set of connecting components, the connecting components including a first connector and a second connector, wherein: The first connector is provided with a first rotating shaft and a second rotating shaft, and the second connector is provided with a third rotating shaft and a fourth rotating shaft. The first rotating shaft and the third rotating shaft are connected by a first connecting rod, and the second rotating shaft and the fourth rotating shaft are connected by a second connecting rod. The distance between the first rotating shaft and the second rotating shaft is equal to the distance between the third rotating shaft and the fourth rotating shaft. A first limiting member is configured to be fixed on the target cavity. After the sealing door assembly is installed into the target cavity, the first limiting member causes the second connecting member to move a distance in a first direction under the traction of the first connecting member that is not greater than a first distance threshold. The first direction is from the lower end of the first connecting member toward the upper end of the first connecting member. The upper end of the first connector is connected to the upper end of the second connector via a second elastic member, and the lower end of the first connector is connected to the output mechanism of the first cylinder in the pneumatic assembly as described in any one of claims 1-4; the second connector is fixedly connected to the door body.

6. The sealing door assembly as claimed in claim 5, characterized in that, It also includes a second limiting member, which is fixed to the second connector and located below the second link. The second limiting member is configured to keep the first link and the second link horizontal during the movement of the first connector and the second connector in a second direction, wherein the second direction is from the upper end of the first connector toward the lower end of the first connector.

7. The sealing door assembly as claimed in claim 5, characterized in that, It also includes a third limiting member, which is fixed to the second connecting member and located above the first connecting rod. It is configured to ensure that after the second connecting member stops moving, the distance that the first connecting member continues to move in the first direction is not greater than a second distance threshold.

8. The sealing door assembly as claimed in claim 5, characterized in that, The sealing door assembly includes two sets of connecting components. The door body is fixed between the second connecting members of the two sets of connecting components. The first connecting members of the two sets of connecting components are fixed by connecting plates. The middle part of the connecting plates is fixed to the output mechanism of the first cylinder.

9. A semiconductor device, characterized in that, It includes a cavity and a sealing door assembly, wherein the sealing door assembly is the sealing door assembly as described in any one of claims 5-8, the first cylinder is fixed to the cavity, and the door is located at the cavity opening of the cavity.

10. The semiconductor device as claimed in claim 9, characterized in that, The safety trigger is a horizontal bar, which is located on the upper edge of the door.

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