Multi-active mirror system for compact MEMS-structured high-resolution wide-angle lidar scanner

Abstract

The present invention provides a multi-active mirror system for a compact MEMS-structured high-resolution wide-angle LiDAR scanner, the system having a MEMS configuration using a semiconductor device to be miniaturized and lightweight, increasing resolution of scanned images for clarity, quickly scanning a wide area by means of a multi-active mirror array, and attenuating vibrations and impact from the inside and the outside to extend the reliability and lifetime of the images.

Description

Compact MEMS structure high-resolution wide-angle LiDAR scanner multi-active mirror system

[0001] The present invention relates to a compact MEMS structure high-resolution wide-angle lidar scanner multi-active mirror system, and more specifically, to a compact MEMS structure high-resolution wide-angle lidar scanner multi-active mirror system that utilizes MEMS (Micro-Electro-Mechanical Systems) to configure the lidar optical system structure using semiconductor manufacturing processes to achieve miniaturization and weight reduction, improves the resolution quality of scanned images to make them appear clear and sharp, applies a multi-active mirror array to scan in a wide-angle area with a wide field of view, self-buffers vibrations and shocks applied from the inside or outside to increase the reliability of acquired images, and significantly extends the lifespan of the system.

[0002] One of the areas of recent interest and research focus is autonomous vehicles (AVs), which automatically drive themselves by recognizing and analyzing their surrounding environment, and one of their core components is the LiDAR (Light Detection And Ranging) sensor.

[0003] LiDAR is a laser radar that transmits laser pulse signals to a target and calculates the time required for the laser signal to be reflected back from the target and received, respectively, in point groups or units to measure and detect the distance to the target. It synthesizes distance information measured in point units into surface units to measure in three dimensions, and converts this measurement data into image data and displays it on the corresponding display unit, thereby generating three-dimensional image map data of the direction the LiDAR device is observing from the current location.

[0004] A laser (Light Amplification by the Stimulated Emission of Radiation) outputs a laser light signal by amplifying stimulated emission of light. Since laser and lidar systems utilize light, they require an optical configuration that includes lenses; generally, such optical configurations are relatively bulky, large, and heavy, and are very susceptible to shock and vibration.

[0005] 3D image map data measured and detected using LiDAR technology is constructed as terrain data for building Geographic Information System (GIS) information and developed into a visualized form, which is applied in construction, national defense, and various transportation fields. In addition, it is attracting attention as one of the major core technologies as it is applied to autonomous vehicles (AV), mobile robots, flying cars, and drones.

[0006] When a LiDAR device is installed in a vehicle (automobile) or a flying car and the 3D image map data generated by the LiDAR device is used for driving or flight information, the 3D image map data must be updated at predetermined unit times.

[0007] In the following text, "flying car" that flies in the air and "autonomous vehicle (AV)" that travels on the ground are used interchangeably. They may be listed selectively depending on the context; however, to keep the explanation simple and facilitate understanding, the focus will be on autonomous vehicles, and it is understood that flying cars are included within the definition of autonomous vehicles.

[0008] When LiDAR technology is applied to automobiles, it measures the distance between vehicles in real time to avoid collisions with the vehicle ahead or to minimize collisions and impacts with obstacles located ahead while driving, and performs warnings or automatic control of driving. A vehicle that performs automatic control is called an autonomous vehicle (AV).

[0009] In the case of autonomous vehicles, the driving performance of the vehicle is directly affected by the accuracy and reliability of data detected by the LiDAR device over a wide-angle range, as well as the processing speed and accuracy of the means for updating and processing 3D image map data extracted and generated by analyzing the detected data. Meanwhile, as the vehicle drives, various vibrations and shocks occur from the inside and outside due to the driving environment, and since the LiDAR device, which requires high precision, is relatively very vulnerable to vibrations and shocks, there is a problem in that the lifespan during which it performs normal functions is relatively limited.

[0010] Therefore, in order to enhance the driving performance and precise control of autonomous vehicles, it is necessary to develop a LiDAR device that increases the clarity of surrounding images scanned by the device, operates stably against vibration and shock, is relatively compact in volume, weight, and size, maintains reliability even during prolonged use, and has a relatively wide scanning range.

[0011] A prior art that partially resolves these needs and problems is the ‘ultra-compact and ultra-lightweight optical system for lidar’ according to Korean Patent Registration No. 10-2367563 (February 22, 2022).

[0012] FIG. 1 is a functional configuration diagram of an ultra-compact lidar scanner optical system according to one embodiment of the prior art.

[0013] Hereinafter, the prior art is described in detail with reference to the attached drawings. It is a configuration comprising a sensing unit (110) that emits and receives a laser light signal to detect the distance to an object, a rotating unit (120) that rotates the sensing unit (110) 360 degrees to detect objects in all directions, and a module base (130) that supports the rotating unit (120) and is fixedly installed on a moving body (autonomous vehicle).

[0014] In the prior art, the sensing unit (110) is configured to form a collimator lens (1112, 1124) using an aspherical lens and effectively receives scattered light using a double bandpass filter (1122, 1123). The rotating unit (120) directly rotates the sensing unit (110) to position it at a desired speed and angle, which has the advantage of making the overall configuration smaller and lighter. However, it is clear that the production cost is high due to the mechanical configuration using a motor, and there are limitations to miniaturization and weight reduction. Furthermore, since there is no configuration to cushion shocks and vibrations caused by the operation of an autonomous vehicle, the problem of the relatively limited lifespan remains unresolved.

[0015] Therefore, it is necessary to develop directional lidar technology that applies MEMS technology, which utilizes semiconductor manufacturing technology, to construct an optical system that reflects optical signals for scanning, thereby miniaturizing the size and volume; expands the scanning range by configuring the reflecting mirrors in multiple stages; reduces the driving range of each reflecting mirror to enable precise control, stable operation, and extended lifespan; shortens scanning time; and increases the accuracy and reliability of measured results while extending lifespan by self-absorbing internal and external vibrations and shocks.

[0016] [Prior Art Literature]

[0017] [Patent Literature]

[0018] Republic of Korea Patent Registration No. 10-2367563 (February 22, 2022) 'Ultra-compact and ultra-lightweight optical system for LiDAR'

[0019] The present invention, devised to resolve the problems and necessities of the conventional technology described above, provides a compact MEMS structure high-resolution wide-angle LiDAR scanner multi-active mirror system that utilizes MEMS technology configuration using a semiconductor manufacturing process to achieve miniaturization and weight reduction, improves the resolution quality of scanned images to make them clearer, rapidly scans a wide area using a multi-active mirror array, and eliminates the effects of vibrations and shocks applied from the inside and outside to extend image reliability and lifespan.

[0020] The small MEMS structure high-resolution wide-angle lidar scanner multi-active mirror system (900) of the present invention, devised to achieve the above-mentioned purpose, comprises: a directional lidar housing (1000) that has an overall rectangular hexahedron (polyhedron) shape and outputs and inputs directional lidar signals; a lidar centralized control unit (2000) that is fixedly installed in a part of the interior of the directional lidar housing (1000), connects to each functional unit constituting the directional lidar, outputs a corresponding control signal to each functional unit based on an artificial intelligence program and parameter values ​​installed and operated internally, outputs the results of analysis and learning of transmitted and received lidar signals, and monitors and records the operating status of each functional unit; and a lidar pulse signal output unit (3000) that is fixedly installed in a part of the interior of the directional lidar housing (1000) and outputs a laser light pulse signal of a point cloud generated at a specific frequency and a specific level based on the corresponding control signal of the lidar centralized control unit (2000). It may include: a LiDAR MEMS multi-scanner unit (4000) fixedly installed in an internal part of the directional LiDAR housing unit (1000) and transmitting a point group laser light pulse signal applied from the LiDAR pulse signal output unit (3000) by a corresponding control signal of the LiDAR concentration control unit (2000) in a scanning direction to an object using a MEMS mirror; and a LiDAR lens optical unit (5000) fixedly installed in an internal part of the directional LiDAR housing unit (1000) and irradiating the object with the laser light pulse signal transmitted by the LiDAR MEMS multi-scanner unit (4000) and blocking noise signals, and receiving the point group laser light pulse signal reflected from the object with noise signals blocked and condensing it by a lens combination.

[0021] It may further include a lidar flight time detection unit (6000) that is fixedly installed in a part inside the directional lidar housing (1000) and divides and inputs a laser light pulse signal output from the lidar pulse signal output unit (3000) by a corresponding control signal of the lidar concentration control unit (2000) to convert it into a first voltage signal (STOP1), converts a laser light pulse signal output by receiving and concentrating light from an object reflected by the lidar lens optical unit (5000) into a second voltage signal (STOP2), and calculates and outputs the time difference value between the first voltage signal (STOP1) and the second voltage signal (STOP2).

[0022] The above LiDAR central control unit (2000) is connected to each functional unit constituting the LiDAR central control unit (2000) and, based on an artificial intelligence program installed and operated by a built-in and parameter value, outputs a corresponding control signal to each functional unit constituting the LiDAR central control unit (2000) and the system (900), and monitors the LiDAR central control unit (2100); a GPS time information unit (2200) connected to the above LiDAR central control unit (2100) and analyzes GPS information received from a GPS satellite by the corresponding control signal to analyze and output GPS time information at the current time; and an LBS time information unit (2300) connected to the above LiDAR central control unit (2100) and analyzes LBS information received by a location-based service by the corresponding control signal to analyze and output LBS time information at the current time. An arithmetic mean time information unit (2400) that connects to the above LiDAR central control unit (2100), inputs the GPS time information and LBS time information respectively according to the corresponding control signal, and analyzes and outputs the arithmetic mean time information calculated by arithmetic mean; and a 3D map information generation unit (2500) that connects to the above LiDAR central control unit (2100), calculates the time difference value based on the point-unit arithmetic mean time information calculated by the LiDAR flight time detection unit (6000) according to the corresponding control signal and calculates the flight distance value per unit time of the laser light pulse signal, analyzes the point-unit straight distance to the target object respectively, and synthesizes the entire value scanned as a point cloud to generate a 3D map image signal. It may include a LiDAR scan information recording unit (2600) that connects to the above LiDAR central control unit (2100) and records and manages arithmetic mean time information and 3D map image signals, which are output and input at each point unit of an artificial intelligence program, parameter values, and laser light pulse signals according to the corresponding control signal, in areas assigned to each LiDAR.

[0023] The above lidar pulse signal output unit (3000) is characterized by being configured to output point-unit laser light pulse signals of 25 to 150 watts at a designated arithmetic mean time, each consisting of near-infrared light in a wavelength range of 900 to 910 nanometers, according to the corresponding control signal of the lidar concentrated control unit (2000).

[0024] The above LiDAR MEMS multi-scanner unit (4000) comprises: a first light-transmitting tilting axis unit (4100) formed in a MEMS configuration, wherein the tilting axis tilts along the X-axis and Y-axis respectively by a corresponding control signal of the LiDAR central control unit (2000); a first light-transmitting MEMS active mirror unit (4200) configured in a central axis position of the first light-transmitting tilting axis unit (4100), having a polygonal shape composed of multiple planes, and having a mirror surface formed in a MEMS configuration that specularly reflects the laser light pulse signal on one side plane; and a first light-transmitting X-axis drive unit (4300) installed at one end of the first light-transmitting tilting axis unit (4100), which tilts the X-axis by a size corresponding to the magnitude of the current applied by the corresponding control signal of the LiDAR central control unit (2000), and formed in a MEMS configuration. A first light transmission Y-axis drive unit (4400) installed at one end of the first light transmission tilting axis unit (4100) and formed in a MEMS configuration, tilting the Y-axis by a magnitude corresponding to the current magnitude applied by the corresponding control signal of the LiDAR centralized control unit (2000); a multi-light transmission tilting axis unit (4500) formed in a MEMS configuration, tilting axes that tilt along the X-axis and Y-axis respectively by the corresponding control signal of the LiDAR centralized control unit (2000); and a light transmission MEMS multi-active mirror unit (4600) configured at the center axis position of the multi-light transmission tilting axis unit (4500), having a polygonal tube shape composed of multiple planes, and having a mirror surface formed in a MEMS configuration that specularly reflects the laser light pulse signal on one plane. It may include: a multi-transmitting X-axis drive unit (4700) installed at one end of the multi-transmitting tilting axis unit (4500) and formed in a MEMS configuration that tilts the X-axis by a size corresponding to the current size applied by the corresponding control signal of the LiDAR centralized control unit (2000); and a multi-transmitting Y-axis drive unit (4800) installed at one end of the multi-transmitting tilting axis unit (4500) and formed in a MEMS configuration that tilts the Y-axis by a size corresponding to the current size applied by the corresponding control signal of the LiDAR centralized control unit (2000).

[0025] The above lidar lens optical unit (5000) may include: an irradiation-transmitting light-gathering unit (5100) that focuses the laser light pulse signal applied from the lidar MEMS multi-scanner unit (4000) so that it is not dispersed; an irradiation-transmitting light-gathering filter unit (5200) that irradiates an object while blocking noisy light signals that do not correspond to the near-infrared wavelength of the laser light pulse signal gathered from the irradiation-transmitting light-gathering unit (5100); a reflection-receiving light-receiving filter unit (5300) that receives light while blocking noisy light signals that do not correspond to the near-infrared wavelength of the laser light pulse signal reflected from the object; and a reflection-receiving light-gathering unit (5400) that focuses the laser light pulse signal received from the reflection-receiving light-receiving filter unit (5300) so that it is not dispersed.

[0026] The above-mentioned Songkwang MEMS first active mirror part (4200) and Songkwang MEMS multiple active mirror part (4600) are characterized by being formed by sputtering vacuum coating one or more selected from silver, chrome, aluminum, and stainless steel.

[0027] The above-mentioned lidar time-of-flight detection unit (6000) comprises: a laser light distribution unit (6100) that evenly divides the optical output of a laser light pulse signal output from the lidar pulse signal output unit (3000), applies one of the divided laser light pulse signals to the lidar MEMS multi-scanner unit (4000), and outputs the other divided laser light pulse signal to a designated optical path; a first laser light signal detection unit (6200) that receives the laser light pulse signal applied via the designated optical path from the laser light distribution unit (6100), converts it into a current signal, and outputs it; and a second laser light signal detection unit (6300) that receives the laser light pulse signal applied from the lidar lens optical unit (5000), converts it into a current signal, and outputs it. A first current-voltage converter (6400) that converts a current signal applied from the first laser light signal detector (6200) into a voltage signal of a level recognized by the lidar flight time detector (6700) and applies it to the STOP1 terminal of the lidar flight time detector (6700); a second current-voltage converter (6500) that converts a current signal applied from the second laser light signal detector (6300) into a voltage signal of a level recognized by the lidar flight time detector (6700) and applies it to the STOP2 terminal of the lidar flight time detector (6700); It may include a LiDAR flight time detection unit (6600) that inputs a first voltage signal (STOP1) and a second voltage signal (STOP2) from the first current-voltage conversion unit (6400) and the second current-voltage conversion unit (6500), respectively, calculates the input time difference value, and outputs it.

[0028] The mirror surface area of ​​the first active mirror section (4200) of the above-mentioned light MEMS and the mirror surface area of ​​the multiple active mirror section (4600) of the light MEMS are characterized by being configured such that one is larger, smaller, or the same.

[0029] It may further include one or more damping devices (7000) fixedly installed at the bottom of the directional lidar housing (1000) to dampen vibrations and shocks generated from the outside and inside.

[0030] The above buffer device (7000) comprises: a buffer hole (7100) formed by a recess, including an upper cylinder (7110) formed by a recess at the corner of the lower surface of the directional lidar housing part (1000) and a lower cylinder (7120) formed by connecting to the lower end of the upper cylinder (7110) with a diameter value greater than that of the upper cylinder (7110); an internal step (7200) formed at the location where the upper cylinder (7110) and the lower cylinder (7120) are connected; and a first elastic body (7300) that lands on a flat bottom surface (E) corresponding to the buffer hole (7100), is formed in an upward curved shape, and primarily buffers external shocks and vibrations applied from the lower end of the directional lidar housing part (1000). It may include: a second elastic body (7400) in which one end of the central axis is fixedly installed in the central part of the first elastic body (7300) and the other end of the central axis is fixedly installed at the upper center position inside the upper cylinder (7110) to secondarily cushion external shocks and vibrations applied from the front, rear, left, right sides and the upper side of the directional lidar housing part (1000); and a third elastic body (7500) in which one side is fixedly installed in a close contact state in the central part of the first elastic body (7300) to thirdly cushion external shocks and vibrations applied to the directional lidar housing part (1000).

[0031] The first elastic body (7300) is made of a plate spring or a convex plate spring, the second elastic body (7400) is made of a coil spring, and the third elastic body (7500) is made of elastic urethane or sponge.

[0032] The above-mentioned directional lidar housing (1000) is characterized by being formed by molding a composition comprising 6.5 parts by weight of C18H24N2, 5.5 parts by weight of PPO (POLYEHENYLENE OXIDE), 5.0 parts by weight of nonylphenol ethoxylate, 5.5 parts by weight of azelaic acid, 10 parts by weight of guar gum, 5 parts by weight of dimethylbenzylidene sorbitol, 10 parts by weight of HFP (Hexafluoropropylene), 10 parts by weight of fusidized sodium oxide hydrogel, and 5 parts by weight of sodium alkylbenzenesulfonate, based on 100 parts by weight of polyethylene resin, in order to ensure lightweighting, durability, heat resistance, moisture resistance, and sound absorption.

[0033] The above-mentioned directional lidar housing (1000) is characterized by a configuration in which a stain-resistant surface coating agent is spray-coated with an average thickness of 200 micrometers to ensure waterproofness, stain resistance, and durability.

[0034] All drying is based on a windless environment with an average indoor temperature of 25 degrees Celsius.

[0035] The above anti-fouling surface coating agent is characterized by being composed of a mixture of 5 parts by weight of fine mica powder, 10 parts by weight of methylsulfonic methane, 3.5 parts by weight of sodium boroshydride, 15 parts by weight of polytetrafluoroethylene, 10 parts by weight of urea, 10 parts by weight of phosphite, 5 parts by weight of gluconate, 10 parts by weight of sodium bicarbonate, and 5 parts by weight of titanium dioxide, based on 100 parts by weight of transparent polypropylene resin.

[0036] The present invention, having the configuration described above, utilizes a MEMS configuration that employs a silicon semiconductor manufacturing process to construct a LiDAR optical system. This allows for the production of a compact and lightweight device, while precisely controlling the tilting axis of a mirror that reflects a laser signal to form a scan area using a current control method. By forming multiple tilting mirrors, the stress on the tilting axis is reduced by more than half, extending the lifespan, rapidly scanning a wide area, improving the resolution quality of the scanned image, and eliminating internal vibrations and shocks to increase the reliability of the scanned image. Additionally, it has the advantages of extending the lifespan of the optical system, ensuring uniform quality in mass production, and lowering manufacturing costs.

[0037] FIG. 1 is a functional configuration diagram of an ultra-compact lidar scanner optical system according to an embodiment of the prior art,

[0038] FIG. 2 is an overall functional configuration diagram of a compact MEMS structure high-resolution wide-angle LiDAR scanner multi-active mirror system according to an embodiment of the present invention,

[0039] FIG. 3 is a detailed functional configuration diagram of a LiDAR centralized control unit according to an embodiment of the present invention,

[0040] FIG. 4 is a detailed functional configuration diagram of a LiDAR MEMS multi-scanner unit according to an embodiment of the present invention,

[0041] FIG. 5 is an explanatory diagram of a driving concept for a 2-axis MEMS driving scan method according to an embodiment of the present invention, wherein the X-axis and Y-axis of the light transmission tilting axis part provided in the LiDAR MEMS multi-scanner part are each configured as MEMS structures.

[0042] FIG. 6 is a diagram explaining the features of the 2-axis MEMS driving and 1-axis MEMS driving scanning methods of a LiDAR MEMS multi-scanner unit according to an embodiment of the present invention.

[0043] FIG. 7 is an explanatory diagram of the features of four types of hybrid MEMS axis drive scanning methods that combine 2-axis MEMS drive and 1-axis MEMS drive scanning methods according to an embodiment of the present invention.

[0044] FIG. 8 is a detailed functional configuration diagram of a lidar lens optical unit according to an embodiment of the present invention,

[0045] FIG. 9 is a detailed functional configuration diagram of a LiDAR flight time detection unit according to an embodiment of the present invention,

[0046] FIG. 10 is a detailed functional configuration diagram of a buffer device according to an embodiment of the present invention,

[0047] FIG. 11 is an explanatory diagram of a method for calculating the wide-angle scan angle of a multi-active mirror structure provided in a LiDAMEMS multi-scanner unit according to an embodiment of the present invention.

[0048] and,

[0049] FIG. 12 is a performance comparison diagram of a compact MEMS structure high-resolution wide-angle lidar scanner multi-active mirror system according to one embodiment of the present invention.

[0050] The present invention is capable of various modifications and may have various embodiments. Specific embodiments are illustrated in the drawings and described in detail in the detailed description. However, this is not intended to limit the present invention to specific embodiments, and it should be understood that it includes all modifications, equivalents, and substitutions that fall within the spirit and scope of the invention. In describing the present invention, detailed descriptions of related prior art are omitted if it is determined that such detailed descriptions may obscure the essence of the invention.

[0051] Each functional configuration and size depicted in the drawings below is intended to facilitate explanation and understanding, and therefore may not be identical or may differ from one another. Additionally, "positioning information" and "location information" have the same meaning below and are used appropriately according to the context to facilitate explanation and understanding.

[0052] FIG. 2 is an overall functional configuration diagram of a compact MEMS structure high-resolution wide-angle LiDAR scanner multi-active mirror system according to an embodiment of the present invention; FIG. 3 is a detailed functional configuration diagram of a LiDAR centralized control unit according to an embodiment of the present invention; FIG. 4 is a detailed functional configuration diagram of a LiDAR MEMS multi-scanner unit according to an embodiment of the present invention; FIG. 5 is an explanatory diagram of a driving concept for a 2-axis MEMS driving scan method in which the X-axis and Y-axis of the light transmission tilting axis unit equipped in the LiDAR MEMS multi-scanner unit are each configured as MEMS structures according to an embodiment of the present invention; FIG. 6 is an explanatory diagram of the characteristics of the 2-axis MEMS driving and 1-axis MEMS driving scan methods of the LiDAR MEMS multi-scanner unit according to an embodiment of the present invention; and FIG. 7 is an explanatory diagram of four types of hybrid MEMS axis driving that combine the 2-axis MEMS driving and 1-axis MEMS driving scan methods according to an embodiment of the present invention. Fig. 8 is a detailed functional configuration diagram of a LiDAR lens optical unit according to an embodiment of the present invention, Fig. 9 is a detailed functional configuration diagram of a LiDAR time-of-flight detection unit according to an embodiment of the present invention, Fig. 10 is a detailed functional configuration diagram of a buffer device according to an embodiment of the present invention, Fig. 11 is a detailed configuration diagram of a wide-angle area scan angle calculation method of a multi-active mirror structure provided in a LiDAR MEMS multi-scanner unit according to an embodiment of the present invention, and Fig. 12 is a detailed configuration diagram of a performance comparison of a small MEMS structure high-resolution wide-angle LiDAR scanner multi-active mirror system according to an embodiment of the present invention.

[0053] Hereinafter, a small MEMS structure high-resolution wide-angle lidar scanner multi-active mirror system (900) according to one embodiment of the present invention will be described in detail with reference to all attached drawings. It is configured to include a directional lidar housing unit (1000), a lidar centralized control unit (2000), a lidar pulse signal output unit (3000), a lidar MEMS multi-scanner unit (4000), a lidar lens optical unit (5000), a lidar time-of-flight detection unit (6000), and a buffer device (7000).

[0054] Meanwhile, MEMS (Micro Electro-Mechanical Systems) refers to 'micro-electromechanical systems.' MEMS sensors are ultra-small, high-sensitivity sensors used as tools for monitoring, detecting, and observing the external environment through physical, chemical, and biological sensing. It refers to the technology for electro-mechanical devices, sensors, and devices ranging in size from micrometers (μm) to millimeters (mm). It is well known that the structures are fabricated by applying semiconductor process technology used to create semiconductor circuits, thereby enabling the fabrication of mechanical configurations with three-dimensional shapes.

[0055] MEMS are relatively very small, and with the recent advancement of semiconductor microfabrication technology, pattern sizes have entered the range of several nanometers to tens of nanometers. Based on this nanotechnology, Nano Electro-Mechanical System (NEMS) technology is being proposed. Devices utilizing MEMS technology are applied, for example, to acceleration measurement, movement direction verification, and pressure detection used in smartphones, as well as to micro-robots and capsule endoscopes. Since MEMS technology is well known, further detailed explanation will be omitted.

[0056] Specular reflection occurs when light reflects from a smooth, flat surface, where the angle of incidence and the angle of reflection exactly match, and the light is reflected in a consistent direction. For example, reflections from mirrors or the surface of water are specular reflections. On the other hand, diffuse reflection is a phenomenon where light scatters in multiple directions when reflected from a rough surface. Diffuse reflection occurs when the surface is irregular and appears when an object's surface is rough or has a fine structure. Diffuse reflection occurs when light is reflected from most objects.

[0057] The directional lidar housing (1000) has an overall rectangular cuboid shape and outputs and inputs directional lidar signals.

[0058] The LiDAR centralized control unit (2000) is fixedly installed in a part of the interior of the directional LiDAR housing unit (1000) and is connected to each functional unit constituting the directional LiDAR. It outputs a corresponding control signal to each functional unit based on an artificial intelligence program and parameter values ​​that are installed and operated internally, outputs the results of analysis and learning of transmitted and received LiDAR signals, and monitors and records the operating status of each functional unit.

[0059] The LiDAR central control unit (2000) is configured to include a LiDAR central control unit (2100), a GPS visual information unit (2200), an LBS visual information unit (2300), an arithmetic mean visual information unit (2400), a 3D map information generation unit (2500), and a LiDAR scan information recording unit (2600).

[0060] The LiDAR central control unit (2100) connects to each functional unit constituting the LiDAR central control unit (2000) and, based on an artificial intelligence program installed and operated by a built-in and parameter value, outputs and monitors the corresponding control signal to each functional unit constituting the LiDAR central control unit (2000) and the system (900).

[0061] The GPS time information unit (2200) connects to the LiDAR central control unit (2100) and analyzes GPS information received from the GPS satellite by means of the corresponding control signal to analyze and output GPS time information at the current time. Since GPS satellites fly (operate) at least 24 times along the designated orbit of the Earth and analyze signals received simultaneously from at least 3 of them, the technology is well known for extracting values ​​such as latitude, longitude, elevation, time, and angular velocity of the received location, so further specific explanation will be omitted.

[0062] The LBS time information unit (2300) connects to the LiDAR central control unit (2100) and analyzes the LBS information received by the location-based service by means of the corresponding control signal, and analyzes and outputs the LBS time information at the current time.

[0063] Location-based services (LBS) provide accurate location information of subscriber terminals, verified by triangulation based on location information (positioning data) of each base station site with accurately confirmed coordinates in a mobile communication system, along with verified accurate time information. It is well known that the accuracy of positioning information is higher than that of general location information verified through the Global Positioning System (GPS).

[0064] Location-based services (LBS) are services that measure the current location, speed, and direction of movement of each moving mobile terminal (handheld device) according to the operating method of a mobile communication system, and provide positioning information or location information including time information confirmed in this way upon request; as this is well known, further specific explanation will be omitted.

[0065] The arithmetic mean time information unit (2400) connects to the LiDAR central control unit (2100), inputs GPS time information and LBS time information respectively by means of the corresponding control signal, and analyzes and outputs the arithmetic mean time information calculated by arithmetic mean. The arithmetic mean time information is described, explained, and understood as more precise time information than the GPS time information or LBS time information, respectively.

[0066] The 3D map information generation unit (2500) connects to the LiDAR central control unit (2100) and calculates the time difference value based on the point-unit arithmetic mean time information calculated by the LiDAR flight time detection unit (6000) by the corresponding control signal and the flight distance value per unit time of the laser light pulse signal to analyze the point-unit straight distance to the target, respectively, and synthesizes the total values ​​scanned as a point group to generate a 3D map image signal. A point group consists of multiple point-unit values, and the distance value of the point group formed by combining each point-unit distance value can be converted into a 3D image with good clarity and resolution. This is a technology that can determine whether a target is located in front by analyzing these data values, and simultaneously confirm the type and size of the target through artificial intelligence (AI) and deep learning. Since artificial intelligence (AI) and deep learning technologies are well known, a detailed explanation will be omitted.

[0067] The LiDAR scan information recording unit (2600) connects to the LiDAR central control unit (2100) and records and manages the arithmetic mean time information and 3D map image signals, which are output and input at each point of the artificial intelligence program, parameter values, and laser light pulse signals according to the corresponding control signal, in their respective allocated areas. The 3D map image signal information is used as data for the safe and accurate operation of the autonomous vehicle (AV).

[0068] The lidar pulse signal output unit (3000) is fixedly installed in a part of the interior of the directional lidar housing unit (1000) and outputs a laser light pulse signal of a point group generated at a specific frequency and a specific level by the corresponding control signal of the lidar concentration control unit (2000).

[0069] The lidar pulse signal output unit (3000) outputs a point unit laser light pulse signal of 25 to 150 watts at a designated arithmetic mean time, which is composed of near-infrared light in a wavelength range of 900 to 910 nanometers (nm) as in one embodiment, by means of a corresponding control signal of the lidar concentrated control unit (2000), and it is relatively highly desirable to output near-infrared light of a wavelength of 905 nanometers to ensure safety, convenience, and accuracy in handling.

[0070] In another embodiment of the lidar pulse signal output unit (3000), the wavelength is a near-infrared wavelength in the range of 1450 to 1650 nanometers (nm), and it is relatively preferable to use a wavelength of 1550 nanometers (nm).

[0071] In addition, the lidar pulse signal output unit (3000) is equipped with a functional unit that generates and outputs near-infrared rays in a wavelength range of 900 to 910 nanometers (nm) and a wavelength range of 1450 to 1650 nanometers (nm), and can selectively use either one.

[0072] Meanwhile, it is very obvious that the lidar flight time detection unit (6000), which receives the signal output from the lidar pulse signal output unit (3000), is configured to receive the signal generated and output from the lidar pulse signal output unit (3000).

[0073] The LiDAR MEMS multi-scanner unit (4000) is fixedly installed in a part of the interior of the directional LiDAR housing unit (1000) and transmits a point group laser light pulse signal applied from the LiDAR pulse signal output unit (3000) by means of a corresponding control signal of the LiDAR concentrated control unit (2000) to a target in a scanning direction using a MEMS mirror, as shown in the attached FIGS. 4 to 7. For simplicity of explanation, Type 3 in FIG. 7 is explained mainly, while Types 1, 2, and 4 are explained mainly in terms of differences.

[0074] The LiDAR MEMS multi-scanner unit (4000) is configured to include a first light transmission tilting axis unit (4100), a first light transmission MEMS active mirror unit (4200), a first light transmission X-axis unit (4300), a first light transmission Y-axis unit (4400), a multi-light transmission tilting axis unit (4500), a light transmission MEMS multi-active mirror unit (4600), a multi-light transmission X-axis unit (4700), and a multi-light transmission Y-axis unit (4800).

[0075] The first active mirror is composed of a first light-transmitting tilting shaft (4100), a first light-transmitting MEMS active mirror (4200), a first light-transmitting X-axis drive (4300), and a first light-transmitting Y-axis drive (4400), and the second active mirror is composed of a multiple light-transmitting tilting shaft (4500), a multiple light-transmitting MEMS active mirror (4600), a multiple light-transmitting X-axis drive (4700), and a multiple light-transmitting Y-axis drive (4800). If necessary, two or more of the second active mirrors may be provided (configured) in multiple units along a corresponding straight line.

[0076] The first transmission tilting axis unit (4100) is formed with a tilting axis that tilts along the X-axis and Y-axis respectively by the corresponding control signal of the LiDAR centralized control unit (2000) and is configured as a MEMS.

[0077] The first active mirror section (4200) of the light transmission MEMS is configured with the first light transmission tilting shaft section (4100) at the central axis position and has a polygonal tube shape consisting of multiple planes, and a mirror surface that reflects a laser light pulse signal specularly on one plane is formed in a MEMS configuration.

[0078] The first light-transmitting X-axis drive unit (4300) is installed at one end of the first light-transmitting tilting shaft unit (4100) and tilts the X-axis by a size corresponding to the current size applied by the corresponding control signal of the LiDAR centralized control unit (2000), and is formed with a MEMS configuration.

[0079] The first light transmission Y-axis drive unit (4400) is installed at one end of the first light transmission tilting shaft unit (4100) and tilts the Y-axis by a size corresponding to the current size applied by the corresponding control signal of the LiDAR centralized control unit (2000), and is formed with a MEMS configuration.

[0080] The multi-transmitting light tilting axis unit (4500) is formed with a tilting axis that tilts along the X-axis and Y-axis respectively by the corresponding control signal of the LiDAR centralized control unit (2000) in a MEMS configuration.

[0081] The multi-active mirror section (4600) of the light transmission MEMS is configured with the multi-light transmission tilting axis section (4500) at the central axis position and has a polygonal tube shape consisting of multiple planes, and a mirror surface that reflects a laser light pulse signal on one plane is formed in a MEMS configuration.

[0082] The Songkwang MEMS first active mirror section (4200) and the Songkwang MEMS multi-active mirror section (4600) are formed by sputtering vacuum coating one or more selected from silver, chrome, aluminum, and stainless steel, and the coating is formed with an average thickness of 50 micrometers or more for durability. Meanwhile, the mirror surface area of ​​the Songkwang MEMS first active mirror section (4200) and the mirror surface area of ​​the Songkwang MEMS multi-active mirror section (4600) are configured such that one is larger or smaller than the other and is the same, as illustrated in the attached FIG. 7.

[0083] The multi-transmitting X-axis drive unit (4700) is installed at one end of the multi-transmitting tilting axis unit (4500) and tilts the X-axis by a size corresponding to the current size applied by the corresponding control signal of the LiDAR centralized control unit (2000), and is formed with a MEMS configuration.

[0084] The multi-transmitting Y-axis actuator (4800) is installed at one end of the multi-transmitting tilting axis (4500) and tilts the Y-axis by a magnitude corresponding to the current magnitude applied by the corresponding control signal of the LiDAR centralized control unit (2000), and is formed with a MEMS configuration.

[0085] Referring to Fig. 6 for further details, the driving concepts of the 2-axis (2D) tilting method and the 1-axis (1D) tilting method of the MEMS structure are illustrated, and the state of the image scanned by each method is illustrated.

[0086] Since the MEMS structure is composed of silicon semiconductors, it has the advantage of being able to respond quickly to applied electronic control signals and control the number of times the same specific area is scanned, thereby increasing the clarity of the scanned image, but there is a problem that the scanned range is relatively small due to the physical limitations of silicon semiconductors.

[0087] The 2-axis (2D) tilting method is a concept in which the X-axis and Y-axis are each tilted and driven. The X-axis and Y-axis are tilted and driven by current, and the tilting magnitude is adjusted by the magnitude of the applied current, and the current magnitude is adjusted and applied by the corresponding control signal of the LiDAR centralized control unit (2000).

[0088] For example, in a 2-axis (2D) tilting method, the X-axis is tilted to select or determine the range of scanning in the X-axis direction, and the Y-axis is tilted to select or determine the range of scanning in the Y-axis direction.

[0089] The 2-axis tilting method has the advantage of being able to secure high-resolution scanned results, be miniaturized, and secure a square scan area by forming the size of the tilting along the X-axis and Y-axis equally, but due to the physical characteristics of the MEMS structure using semiconductors, a relatively large amount of physical stress is applied during the process of tilting the tilting axes (4100, 4500), so deformation or breakage of the tilting axes (4100, 4500) occurs, and there is a problem of quality degradation as the lifespan is shortened due to long-term use.

[0090] The 2-axis tilting method has a relatively larger tilting range of the Y-axis compared to other methods, so the scanning area in the vertical direction is wide. Therefore, it is efficient and beneficial to use in cases where a wide field of view in all directions (up, down, left, and right) is required, such as in flying cars.

[0091] The 1-axis (1D) tilting method is a method in which the Y-axis is configured with MEMS and the X-axis uses an electric motor.

[0092] The 1-axis (1D) tilting method utilizes a MEMS structure with high scanning clarity in the vertical direction of the y-axis and uses an electric motor (a) in the horizontal direction of the x-axis, thereby allowing for a large horizontal scanning range. On the other hand, since the x-axis region where the intensity of the beam output by a single semiconductor laser is transmitted at a uniform level is limited, a laser array (b) is used in which multiple laser generators or lidar pulse signal output units (3000) are arranged sequentially in a straight line in the x-axis direction.

[0093] Although the 1-axis (1D) tilting method can achieve miniaturization and high resolution, in order to secure uniform resolution in the X-axis direction, multiple laser generators or LiDAR pulse signal output units (3000) must be arranged in a straight line in the S-axis direction, and the problem of difficulty in long-term use due to physical stress is the same as that of the 2-axis tilting method, so a redundant explanation is omitted.

[0094] The 1-axis (1D) tilting method has the advantage of being efficient and beneficial for use in autonomous vehicles (AVs) moving on the ground, as it can be freely expanded in the x-axis (horizontal) direction and secure a rectangular scanning area, even though multiple laser generators or lidar pulse signal output units (3000) must be arranged in a straight line.

[0095] Referring to Fig. 7, four types (examples) of hybrid MEMS axis drive scanning methods are illustrated.

[0096] The type 1 hybrid scanning method according to the first embodiment is configured such that the first light-transmitting axis part (4100), which is the first active mirror of the multi-active mirror or LiDAR MEMS multi-scanner part (4000), and the second active mirror, which is the multi-light-transmitting axis part (4500), are each configured in a 1-axis (1-axis, 1D) MEMS tilting manner, and the mirror surface area of ​​the first light-transmitting MEMS active mirror part (4200) and the mirror surface area of ​​the multi-active light-transmitting MEMS multi-active mirror part (4600) are of the same size.

[0097] The type 2 hybrid scanning method according to the second embodiment is configured such that the first light-transmitting axis part (4100), which is the first active mirror of the multi-active mirror or LiDAR MEMS multi-scanner part (4000), and the second active mirror, which is the multi-light-transmitting axis part (4500), are each configured in a 1-axis (1-axis, 1D) MEMS tilting manner, and the mirror surface area of ​​the first light-transmitting MEMS active mirror part (4200) is smaller than the mirror surface area of ​​the multi-active light-transmitting MEMS multi-active mirror part (4600).

[0098] The type 3 hybrid scanning method according to the third embodiment is configured such that the first light-transmitting axis part (4100), which is the first active mirror of the multi-active mirror or LiDAR MEMS multi-scanner part (4000), and the second active mirror, which is the multi-light-transmitting axis part (4500), are each configured in a 2-axis (2-axis, 2D) MEMS tilting manner, and the mirror surface area of ​​the first light-transmitting MEMS active mirror part (4200) and the mirror surface area of ​​the multi-active light-transmitting MEMS multi-active mirror part (4600) are of the same size.

[0099] The type 4 hybrid scanning method according to the 4th embodiment is configured such that the first light-transmitting tilting axis part (4100), which is the first active mirror of the multi-active mirror or LiDAR MEMS multi-scanner part (4000), is configured in a 2-axis (2D) MEMS tilting manner, and the second active mirror, which is the multi-light-transmitting tilting axis part (4500), is configured in a 1-axis (1D) MEMS tilting manner, and the mirror surface area of ​​the first light-transmitting MEMS active mirror part (4200) is larger than the mirror surface area of ​​the light-transmitting MEMS multi-active mirror part (4600).

[0100] Type 1 hybrid scanning is a 1-axis symmetric multi-active mirror scanning method. Since it uses multiple active mirrors with a symmetric structure, it is possible to scan a relatively wide area. Compared to the case where a single active mirror is used, the physical stress applied to the tilting axis is halved, which has the advantage of significantly improving the lifespan. However, the scanning area is limited in inverse proportion to the number of active mirrors used.

[0101] The Type 2 hybrid scanning method is a 1-axis asymmetric multi-active mirror scanning method. Since it uses multiple active mirrors with a symmetrical structure, it is possible to scan a relatively wide area. Compared to the case where a single active mirror is used, the physical stress applied to the tilting axis is halved, so the lifespan is significantly improved. Additionally, the spacing between the multiple active mirrors is relatively reduced, so the scanning area is improved.

[0102] The Type 3 hybrid scanning method is a dual-axis symmetric multi-active mirror scanning method. Since it uses multiple active mirrors with a symmetric structure, it is possible to scan a relatively wide area in the high-speed axis (Y-axis) direction. Compared to the case where a single active mirror is used, the physical stress applied to the tilting axis is halved, which has the advantage of significantly improving the lifespan. However, the scanning area is limited in inverse proportion to the number of active mirrors used. Nevertheless, the reduction in stress in the low-speed axis (X-axis) scanning area is resolved when the low-speed axis (X-axis) is formed horizontally.

[0103] The Type 4 hybrid scanning method is a dual-axis asymmetric multi-active mirror scanning method, and since it uses a multi-active mirror with an asymmetric structure, it has the advantage of reducing the physical stress applied to the tilting axis of the high-speed axis (Y-axis) by half, and consequently, significantly improving the lifespan.

[0104] In order to simplify the explanation and facilitate understanding of the present invention, the third embodiment (Type 3) will be described in detail. Once one embodiment is understood, the remaining embodiments can be easily understood.

[0105] The LiDAR lens optical unit (5000) is fixedly installed in a part of the interior of the directional LiDAR housing unit (1000) and collects the laser light pulse signal transmitted by the LiDAR MEMS multi-scanner unit (4000), blocks noise signals, and irradiates the target object, receives the laser light pulse signal of a point group reflected from the target object with noise signals blocked, and collects it by means of a lens combination.

[0106] The LiDAR lens optical unit (5000) is configured to include an irradiating light transmitting and concentrating unit (5100), an irradiating light transmitting and concentrating filter unit (5200), a reflected light receiving filter unit (5300), and a reflected light receiving and concentrating unit (5400).

[0107] The irradiation light-concentrating unit (5100) concentrates the laser light pulse signal applied from the LiDAMEMS multi-scanner unit (4000) so that it is not dispersed. Concentration is described and explained as gathering the focus.

[0108] The irradiation light transmission filter unit (5200) irradiates the object while blocking noise light signals that do not correspond to the near-infrared wavelength of the laser light pulse signal collected from the irradiation light transmission concentrating unit (5100). Irradiation is described, explained, and understood as the act of shining light.

[0109] The reflective light receiving filter section (5300) receives light in a state where it blocks noise light signals that do not correspond to the near-infrared wavelength of the laser light pulse signal reflected from the object.

[0110] The reflective light receiving and concentrating unit (5400) concentrates the laser light pulse signal received from the reflective light receiving filter unit (5300) so that it is not dispersed.

[0111] The lidar flight time detection unit (6000) is fixedly installed in a part of the interior of the directional lidar housing unit (1000) and divides and inputs the laser light pulse signal output from the lidar pulse signal output unit (3000) by the corresponding control signal of the lidar concentrated control unit (2000) to convert it into a first voltage signal (STOP1), converts the laser light pulse signal output by receiving and concentrating the light from the target object into a second voltage signal (STOP2), and calculates and outputs the time difference value between the first voltage signal (STOP1) and the second voltage signal (STOP2).

[0112] The lidar flight time detection unit (6000) is configured to include a laser light distribution unit (6100), a first laser light signal detection unit (6200), a second laser light signal detection unit (6300), a first current voltage conversion unit (6400), a second current voltage conversion unit (6500), and a lidar flight time detection unit (6600).

[0113] The laser light distribution unit (6100) evenly divides the light output of the laser light pulse signal output from the lidar pulse signal output unit (3000), and one of the evenly divided light output signals is applied to the lidar MEMS multi-scanner unit (4000), while the other divided light output signal is applied to the first laser light signal detection unit (6200) through a designated light path. Here, being evenly divided means dividing by a value of 1 / 2 and outputting each into two light paths.

[0114] It is very obvious that, as needed, the laser light distribution unit (6100) can divide the light output of the laser light pulse signal output from the lidar pulse signal output unit (3000) into 1 / 3, 1 / 4, 1 / 5, etc., and transmit (output) each through a designated corresponding light path.

[0115] The first laser light signal detection unit (6200) receives a laser light pulse signal applied via a divided light path from the laser light distribution unit (6100), converts it into a current signal, and outputs it.

[0116] The second laser light signal detection unit (6300) receives a laser light pulse signal applied from the laser focusing unit (6000), converts it into a current signal, and outputs it.

[0117] The first current-voltage converter (6400) converts the current signal applied from the first laser light signal detector (6200) into a voltage signal of a level recognized by the lidar flight time detector (6700) and applies it to the STOP1 terminal of the lidar flight time detector (6700).

[0118] The second current-voltage converter (6500) converts the current signal applied from the second laser light signal detector (6300) into a voltage signal of a level recognized by the lidar flight time detector (6700) and applies it to the STOP2 terminal of the lidar flight time detector (6700).

[0119] The LiDAR flight time detection unit (6600) inputs a first voltage signal (STOP1) and a second voltage signal (STOP2) from the first current-voltage conversion unit (6400) and the second current-voltage conversion unit (6500), respectively, and calculates and outputs the input time difference value.

[0120] One or more buffer devices (7000) are fixedly installed at the bottom of the directional lidar housing (1000) to buffer vibrations and shocks generated from the outside and inside. It is desirable to have at least three buffer devices (7000) to maintain a balanced upright installation state of the directional lidar housing (1000), and it is very obvious that the more are installed, the more vibrations and shocks are buffered.

[0121] The buffer device (7000) is configured to include a buffer hole (7100), an inner step (7200), a first elastic body (7300), a second elastic body (7400), and a third elastic body (7500).

[0122] The buffer hole (7100) is formed by being recessed in the entire area and includes an upper cylinder (7110) formed by being recessed in the lower edge portion of the directional lidar housing portion (1000) and a lower cylinder (7120) formed by being connected to the lower portion of the upper cylinder (7110) with a diameter value larger than that of the upper cylinder (7110).

[0123] An internal step (7200) is formed at the location where the upper cylinder (7110) and the lower cylinder (7120) are connected.

[0124] The first elastic body (7300) lands on a flat bottom surface (E) corresponding to the buffer hole (7100) and is formed in an upward curved shape, and primarily buffers external shocks and vibrations applied from the lower part of the directional lidar housing (1000).

[0125] The second elastic body (7400) has a central axis fixedly installed at one end in the central part of the first elastic body (7300) and a central axis at the other end fixedly installed at the upper center position inside the upper cylinder (7110), and secondarily cushions external shocks and vibrations applied from the front, rear, left, right sides and the upper side of the directional lidar housing part (1000), respectively.

[0126] The third elastic body (7500) is fixedly installed with one side in close contact with the central part of the first elastic body (7300) and cushions external shocks and vibrations applied to the directional lidar housing part (1000) in a third manner.

[0127] Here, the first elastic body (7300) is made of a leaf spring or a convex leaf spring, the second elastic body (7400) is made of a coil spring, and the third elastic body (7500) is made of elastic urethane or sponge.

[0128] Meanwhile, in order to achieve overall weight reduction of the small MEMS structure high-resolution wide-angle lidar scanner multi-active mirror system (900), the directional lidar housing part (1000) is molded from a composition mixed with 6.5 parts by weight of C18H24N2, 5.5 parts by weight of PPO (POLYEHENYLENE OXIDE), 5.0 parts by weight of nonylphenol ethoxylate, 5.5 parts by weight of azelaic acid, 10 parts by weight of guar gum, 5 parts by weight of dimethylbenzylidene sorbitol, 10 parts by weight of HFP (Hexafluoropropylene), 10 parts by weight of fusidized sodium oxide hydrogel, and 5 parts by weight of sodium alkylbenzenesulfonate, based on 100 parts by weight of polyethylene resin, in order to ensure weight reduction, durability, heat resistance, moisture resistance, and sound absorption.

[0129] Polyethylene oxide (PPO) resin is a high-temperature heat-resistant resin with excellent electrical insulation properties due to low water absorption (water resistance), excellent dimensional stability, excellent hardness and impact strength, and is a well-known material that allows for lightweighting. Therefore, further specific explanation will be omitted.

[0130] C18H24N2(N-(1,3-Dimethylbutyl)-N'-phenyl-p-phenylenediamine) is added to prevent thermal oxidation, thereby inhibiting discoloration and enhancing durability, and nonylphenol ethoxylate is added to increase flexural strength by increasing interfacial compatibility with the resin, providing surfactant functions, and especially to obtain an antioxidant effect.

[0131] Azelaic acid suppresses heat shrinkage after molding to maintain dimensional stability. Guar gum increases water resistance while maintaining tensile strength, providing expansion absorption capacity to enhance cushioning. Dimethylbenzylidene sorbitol increases the bonding strength between components to prevent a decrease in the wear resistance of the molded product. The sodium fusidate hydrogel is formed by hydrophilic polymers expanding highly hygroscopic sodium fusidate white powder to contain water and form a hydrogel, thereby enhancing moisture resistance and cushioning by providing a three-dimensional network structure and a microcrystalline structure; it is added to enhance moisture resistance, cushioning, and sound absorption.

[0132] Sodium alkylbenzenesulfonate has the characteristic of not only enhancing acid resistance but also enhancing resistance to degradation and increasing chemical resistance.

[0133] And the directional lidar housing (1000) is formed by spray-coating an anti-contamination surface coating agent with an average thickness of 200 micrometers to ensure water resistance, anti-contamination properties, and durability. The anti-contamination surface coating agent is composed of a mixture of 5 parts by weight of fine mica powder, 10 parts by weight of methylsulfonic methane, 3.5 parts by weight of sodium boroshydride, 15 parts by weight of polytetrafluoroethylene, 10 parts by weight of urea, 10 parts by weight of phosphite, 5 parts by weight of gluconate, 10 parts by weight of sodium bicarbonate, and 5 parts by weight of titanium dioxide, based on 100 parts by weight of transparent polypropylene resin.

[0134] Polypropylene resin is a hydrocarbon chemically composed only of carbon and hydrogen, so it gives a smooth, slippery appearance and texture similar to candles or soap. It has a specific gravity of 0.91, making it lighter than water and allowing it to float on water. It is widely used in industrial applications due to its excellent strength and chemical resistance, and it is characterized by high strength, lightness, and the fact that it does not absorb moisture at all.

[0135] Sodium bicarbonate enhances durability, antifouling properties, and water resistance while increasing the degree of freedom of molding due to the high crosslinking density of polypropylene resin, while phosphites enhance chemical resistance and heat insulation properties, contributing to the suppression of deformation through improved strength, hardness, and wear resistance, and gluconates prevent interfacial separation to improve fixing power and suppress surface slipperiness.

[0136] Urea enhances moisture resistance by securing heat resistance through the formation of eutectic points, and polytetrafluoroethylene enhances heat insulation properties by securing chemical resistance, electrical insulation properties, non-stick properties, anti-fouling properties, heat resistance, and friction properties, thereby strengthening the inhibition of heat conduction.

[0137] Sodium borohydride is added to increase bonding strength to ensure heat resistance, while enhancing water repellency, moisture resistance, water resistance, and antifouling properties, and methylsulfonic methane is added to suppress cracking and splitting while maintaining flexibility.

[0138] Fine mica powder is a representative heat-insulating agent, and titanium dioxide (TiO2) is well known for its properties of increasing heat dissipation efficiency and flame retardancy, expanding the heat transfer surface area, providing sterilization and disinfection effects, and exhibiting photocatalytic effects and decomposing pollutants when exposed to light in the ultraviolet region. Titanium dioxide takes the form of a molecule in which one titanium atom, a transition metal, and two oxygen atoms are bonded. It exists in the allotropic forms of brookite, anatase, and rutile, and has well-known material properties such as excellent antibacterial, odor removal, and sterilization effects due to its high oxidizing power.

[0139] Referring to FIG. 8, the multi-active mirror configuration is described in detail as follows: a laser light pulse signal is incident on the first moving mirror (active mirror, mirror 1), and under the control of the LiDAR concentration control unit (2000), the incident laser light pulse signal is dispersed and reflected by a beta angle and then dispersed by a 2 beta angle and applied to the fixed mirror (mirror 2), and is reflected by the fixed mirror (mirror 2) without any change in angle. When incident on the second moving mirror (active mirror, mirror 3), it is again dispersed by a 4 beta angle and output under the control of the LiDAR concentration control unit (2000). That is, the laser light signal incident by the first moving mirror (mirror 1) and the second moving mirror (mirror 3), which are actively rotating mirrors, is output with a light width that is a multiple of 4. Therefore, it can be seen that the more active rotating mirrors there are, the more the corresponding amount of light is output, and a wide scanning range is formed. Here, the fixed mirror (mirror 2) can be replaced with a movable mirror, and in that case, the output width is twice as wide.

[0140] And there is one fixed mirror (mirror 2) and it is formed in a straight line on the same plane, and the scanning angle of the first moving mirror (mirror 1) is beta 1, and the scanning angle of the second moving mirror (mirror 3) is beta 2, and if this is repeated continuously up to n additional mirrors are installed, the scanning is performed using an optical value formed by adding all the angle values ​​scanned by each moving mirror, and the value is calculated as follows. Here, the value scanned by each moving mirror (active mirror) is the beta value, and it scans with the same angle value.

[0141] Total scan angle = 2 (beta 1 + beta 2 + .... beta n)

[0142] That is, if n active mirrors (moving mirrors) are installed, the wide angle is scanned by a value that is a multiple of 2 of the sum of the angle values ​​scanned by each moving mirror.

[0143] Referring to FIG. 9, the rotary lidar according to the prior art has a scanning angle of 360 degrees horizontally and 20 degrees vertically, a resolution of up to 128 channels, and has problems such as relatively large weight and volume and relatively high price. The directional lidar according to the prior art is compact, but has a scanning angle of 120 degrees horizontally and 20 degrees vertically and a maximum of 512 channels, but has problems such as being weak against vibration and shock. On the other hand, the directional lidar according to the present invention has a scanning angle of 120 degrees horizontally and 30 degrees vertically and a maximum of 512 channels, and has the advantage of being strong against vibration and shock.

[0144] Therefore, the above configuration utilizes a MEMS configuration that uses silicon semiconductors to construct the LiDAR optical system, thereby enabling the production of a compact and lightweight device. It precisely controls the tilting axis of each mirror that forms a scan area by reflecting laser signals multiple times using a current control method, and by forming the tilting mirrors in multiple stages, it reduces stress on the tilting axis and extends its lifespan. It also has the advantages of rapidly scanning a wide area, improving the resolution quality of the scanned image, eliminating the effects of internal vibrations and shocks to increase the reliability of the scanned image, extending the lifespan of the optical system, ensuring uniform quality in mass production, and lowering manufacturing costs.

[0145] In addition, even when using two multiple active mirrors, the impact on product life due to physical stress is improved on a log scale, so applying a log scan results in a 100-fold improvement in product life efficiency.

[0146] Although the present invention has been described in detail with respect to specific embodiments described above, it is obvious to those skilled in the art that various modifications and variations are possible within the scope of the technical spirit of the invention, and it is natural that such modifications and variations fall within the scope of the appended claims.

[0147] [Explanation of the symbol]

[0148] 900: Small MEMS structure high-resolution wide-angle LiDAR scanner multi-active mirror system

[0149] 1000: Directional LiDAR Housing Unit 2000: LiDAR Centralized Control Unit

[0150] 2100: LiDAR Central Control Unit 2200: GPS Visual Information Unit

[0151] 2300: LBS Visual Information Department 2400: Arithmetic Mean Visual Information Department

[0152] 2500: 3D Map Information Generation Unit 2600: LiDAR Scan Information Recording Unit

[0153] 3000: LiDAR pulse signal output unit 4000: LiDAR MEMS multi-scanner unit

[0154] 4100: 1st Songkwang Tilting Shaft Part 4200: Songkwang MEMS 1st Active Mirror Part

[0155] 4300: 1st Songkwang X Football Club 4400: 1st Songkwang Y Football Club

[0156] 4500: Multi-transmitting light tilting shaft section 4600: Transmitting light MEMS multi-active mirror section

[0157] 4700: Dajung Songkwang X Soccer East 4800: Dajung Songkwang Y Soccer East

[0158] 5000: LiDAR Lens Optics Unit 5100: Irradiator, Transmitter, Concentrator Unit

[0159] 5200: Illumination / Transmitting Filter Section 5300: Reflection / Receiving Filter Section

[0160] 5400: Reflective light receiving and concentrating unit 6000: LiDAR time-of-flight detection unit

[0161] 6100: Laser beam distribution unit 6200: First laser light signal detection unit

[0162] 6300: Second laser optical signal detector 6400: First current-voltage converter

[0163] 6500: Second current-voltage converter 6600: LiDAR time-of-flight detector

[0164] 7000: Buffer 7100: Buffer hole

[0165] 7110: Upper cylinder 7120: Lower cylinder

[0166] 7200: Internal step 7300: First elastic body

[0167] 7400: 2nd elastic body 7500: 3rd elastic body

Claims

1. A directional lidar housing (1000) having an overall rectangular cuboid shape and outputting and inputting directional lidar signals; A lidar centralized control unit (2000) that is fixedly installed in a part of the interior of the above-mentioned directional lidar housing (1000), is connected to each functional unit constituting the directional lidar, outputs a corresponding control signal to each functional unit based on an artificial intelligence program and parameter values ​​installed and operated internally, outputs the results of analysis and learning of transmitted and received lidar signals, and monitors and records the operating status of each functional unit; A lidar pulse signal output unit (3000) that is fixedly installed in a part of the interior of the directional lidar housing (1000) and outputs a laser light pulse signal of a point group generated at a specific frequency and a specific level by a corresponding control signal of the lidar concentration control unit (2000); A LiDAR MEMS multi-scanner unit (4000) fixedly installed in a part of the interior of the directional LiDAR housing unit (1000) and transmitting a point group of laser light pulse signals applied from the LiDAR pulse signal output unit (3000) by a corresponding control signal of the LiDAR concentrated control unit (2000) to an object in a scanning direction using a MEMS mirror; A small MEMS structure high-resolution wide-angle lidar scanner multi-active mirror system comprising: a lidar lens optical unit (5000) fixedly installed in an internal part of the directional lidar housing (1000), which collects a laser light pulse signal transmitted by the lidar MEMS multi-scanner unit (4000), blocks noise signals and irradiates it onto an object, receives a laser light pulse signal of a point group reflected from the object with noise signals blocked, and collects it by a lens combination.

2. In Paragraph 1, A small MEMS structure high-resolution wide-angle lidar scanner multi-active mirror system further comprising: a lidar time-of-flight detection unit (6000) fixedly installed in an internal part of the directional lidar housing (1000), which divides and inputs a laser light pulse signal output from the lidar pulse signal output unit (3000) by a corresponding control signal of the lidar concentration control unit (2000) to convert it into a first voltage signal (STOP1), converts a laser light pulse signal output by receiving and concentrating light reflected from an object by the lidar lens optical unit (5000) into a second voltage signal (STOP2), and calculates and outputs a time difference value between the first voltage signal (STOP1) and the second voltage signal (STOP2).

3. In Paragraph 2, The above LiDAR centralized control unit (2000) is A lidar central control unit (2100) that monitors and outputs a corresponding control signal to each functional unit configured in the lidar central control unit (2000) and the system (900) based on an artificial intelligence program and parameter values ​​that are connected to and installed and operated in each functional unit constituting the lidar central control unit (2000); A GPS time information unit (2200) that connects to the above LiDAR central control unit (2100) and analyzes GPS information received from a GPS satellite by means of a corresponding control signal to analyze and output GPS time information at the current time; An LBS time information unit (2300) that connects to the above LiDAR central control unit (2100) and analyzes LBS information received by a location-based service by means of a corresponding control signal to analyze and output LBS time information at the current time; An arithmetic mean time information unit (2400) that connects to the above LiDAR central control unit (2100), inputs the GPS time information and LBS time information respectively by means of the corresponding control signal, and analyzes and outputs the arithmetic mean time information calculated by arithmetic mean; A 3D map information generation unit (2500) that connects to the above LiDAR central control unit (2100), calculates the time difference value based on the point-unit arithmetic mean time information calculated by the above LiDAR flight time detection unit (6000) according to the corresponding control signal and calculates the flight distance value per unit time of the above laser light pulse signal to analyze the point-unit straight distance to the target object, respectively, and synthesizes the entire value scanned as a point group to generate a 3D map image signal; A small MEMS structure high-resolution wide-angle lidar scanner multi-active mirror system comprising: a lidar scan information recording unit (2600) connected to the lidar central control unit (2100) and recording and managing arithmetic mean time information and 3D map image signals, which are output and input at each point unit of an artificial intelligence program, parameter values, and laser light pulse signals according to the corresponding control signal, in areas respectively assigned.

4. In Paragraph 3, The above LiDAR MEMS multi-scanner unit (4000) is A first light transmission tilting axis unit (4100) formed in a MEMS configuration, wherein the tilting axis tilts in the X-axis and Y-axis respectively by the corresponding control signal of the above-mentioned LiDAR centralized control unit (2000); The first light transmission tilting shaft (4100) is configured at the central axis position, and the first active mirror (4200) of the light transmission MEMS has a polygonal tube shape consisting of multiple planes, and a mirror surface that specularly reflects the laser light pulse signal is formed in a MEMS configuration on one plane; A first light transmission X-axis drive unit (4300) installed at one end of the first light transmission tilting shaft unit (4100), tilts the X-axis by a size corresponding to the current magnitude applied by the corresponding control signal of the LiDAR centralized control unit (2000), and is formed in a MEMS configuration; A first light transmission Y-axis drive unit (4400) installed at one end of the first light transmission tilting shaft unit (4100), tilts the Y-axis by a magnitude corresponding to the current magnitude applied by the corresponding control signal of the LiDAR centralized control unit (2000), and is formed in a MEMS configuration; A multi-transmitting light tilting axis unit (4500) in which tilting axes that tilt along the X-axis and Y-axis respectively by a corresponding control signal of the above-mentioned LiDAR centralized control unit (2000) are formed in a MEMS configuration; A multi-transmitting light tilting shaft (4500) configured at the central axis position, a polygonal tube shape consisting of multiple planes, and a light transmitting MEMS multi-active mirror (4600) having a mirror surface formed in a MEMS configuration that specularly reflects the laser light pulse signal on one plane; A multi-transmitting X-axis drive unit (4700) installed at one end of the multi-transmitting tilting axis unit (4500), tilting the X-axis by a magnitude corresponding to the current magnitude applied by the corresponding control signal of the LiDAR centralized control unit (2000), and formed in a MEMS configuration; A small MEMS structure high-resolution wide-angle LiDAR scanner multi-active mirror system comprising: a multi-transmitting Y-axis drive unit (4800) installed at one end of the multi-transmitting tilting axis unit (4500), tilting the Y-axis by a magnitude corresponding to the current magnitude applied by the corresponding control signal of the LiDAR centralized control unit (2000), and formed in a MEMS configuration.

5. In Paragraph 4, The above LiDAR lens optical unit (5000) is An irradiation transmission and concentrating unit (5100) that concentrates the laser light pulse signal applied from the above LiDAMEMS multi-scanner unit (4000) so that it is not dispersed; An irradiation-transmitting filter unit (5200) that irradiates an object while blocking noise-type light signals that do not correspond to the near-infrared wavelength of the laser light pulse signal collected from the above irradiation-transmitting light-concentrating unit (5100); A reflection receiving filter unit (5300) that receives light while blocking noise light signals that do not correspond to the near-infrared wavelength of the laser light pulse signal reflected from the above object; A small MEMS structure high-resolution wide-angle LiDAR scanner multi-active mirror system comprising: a reflective light receiving and concentrating unit (5400) that concentrates the laser light pulse signal received from the reflective light receiving filter unit (5300) so that it is not dispersed.

6. In Paragraph 5, The above Songgwang MEMS first active mirror section (4200) and Songgwang MEMS multiple active mirror section (4600) are A small MEMS structure high-resolution wide-angle LiDAR scanner multi-active mirror system characterized by being composed of a structure formed by sputtering vacuum coating of one or more selected from silver, chrome, aluminum, and stainless steel.

7. In Paragraph 6, The above lidar flight time detection unit (6000) is A laser light distribution unit (6100) that evenly divides the optical output of a laser light pulse signal output from the above LiDAR pulse signal output unit (3000), applies one of the divided laser light pulse signals to the above LiDAR MEMS multi-scanner unit (4000), and outputs the other divided laser light pulse signal to a designated optical path; A first laser light signal detection unit (6200) that receives a laser light pulse signal applied via a designated optical path from the above laser light distribution unit (6100), converts it into a current signal, and outputs it; A second laser light signal detection unit (6300) that receives a laser light pulse signal applied from the above-mentioned lidar lens optical unit (5000), converts it into a current signal, and outputs it; A first current-voltage converter (6400) that converts the current signal applied from the first laser light signal detector (6200) into a voltage signal of a level recognized by the lidar flight time detector (6700) and applies it to the STOP1 terminal of the lidar flight time detector (6700); A second current-voltage converter (6500) that converts the current signal applied from the second laser light signal detector (6300) into a voltage signal of a level recognized by the lidar flight time detector (6700) and applies it to the STOP2 terminal of the lidar flight time detector (6700); A small MEMS structure high-resolution wide-angle lidar scanner multi-active mirror system comprising: a lidar time-of-flight detection unit (6600) that inputs a first voltage signal (STOP1) and a second voltage signal (STOP2) from the first current-voltage conversion unit (6400) and the second current-voltage conversion unit (6500), respectively, calculates the input time difference value, and outputs it.

8. In Paragraph 7, A small MEMS structure high-resolution wide-angle LiDAR scanner multi-active mirror system characterized in that the mirror surface area of ​​the first active mirror section (4200) of the above-mentioned light MEMS and the mirror surface area of ​​the multiple active mirror section (4600) of the light MEMS are configured such that one is larger, smaller, or the other is the same.

9. In Paragraph 8, A compact MEMS structure high-resolution wide-angle lidar scanner multi-active mirror system further comprising: one or more damping devices (7000) fixedly installed at the lower part of the directional lidar housing (1000) to dampen vibrations and shocks generated from the outside and inside.

10. In Paragraph 9, The above buffer device (7000) A recessed buffer hole (7100) including an upper cylinder (7110) formed in a recess at the lower edge of the directional lidar housing part (1000) and a lower cylinder (7120) formed connected to the lower end of the upper cylinder (7110) with a diameter value greater than that of the upper cylinder (7110); An internal step (7200) formed at the location where the upper cylinder (7110) and the lower cylinder (7120) are connected; A first elastic body (7300) that lands on a flat bottom surface (E) corresponding to the above buffer hole (7100), is formed in an upward curved shape, and primarily buffers external shocks and vibrations applied from the lower part of the directional lidar housing part (1000); A second elastic body (7400) having a central axis at one end fixedly installed in the central part of the first elastic body (7300) and a central axis at the other end fixedly installed at the upper center position inside the upper cylinder (7110), which secondarily cushions external shocks and vibrations applied from the front, rear, left, right sides and the upper side of the directional lidar housing part (1000); A small MEMS structure high-resolution wide-angle lidar scanner multi-active mirror system comprising: a third elastic body (7500) which has one side fixedly installed in close contact with the central part of the first elastic body (7300) and cushions external shocks and vibrations applied to the directional lidar housing part (1000) in a third manner.

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