Optical assembly and working method thereof, and optical system and working method thereof

Abstract

The invention provides an optical assembly, a working method of the optical assembly, an optical system and a working method of the optical system. The direction mirrors are arranged on the rotating wheel; and the driving assembly drives the rotating wheel to rotate so as to switch the different direction mirrors to preset positions, and the directions of the surface normal lines of the different direction mirrors located at the preset positions are different. The optical assembly can quickly form illumination light in different directions.

Description

Technical Field

[0001] This invention relates to the field of optical technology, and more specifically to an optical component and its working method, and an optical system and its working method. Background Technology

[0002] For the semiconductor manufacturing industry, defects generated during the production process are the main cause of reduced chip reliability and manufacturing yield. Therefore, defect detection of chips is of great significance in the semiconductor manufacturing process.

[0003] In semiconductor testing equipment, it is often necessary to detect various types of defects in samples. Different defects have different detection effects under illumination beams at different incident angles. Therefore, defect detection equipment often needs to have incident light paths with multiple incident directions.

[0004] In optical paths with multiple incident angles, in order to achieve multi-angle detection, related technologies require the use of incident light from multiple different angles to detect the sample separately, which leads to a significant decrease in detection efficiency. Summary of the Invention

[0005] The purpose of the embodiments of this disclosure is to provide an optical component and its working method, and an optical system and its working method, for rapidly generating illumination light in different directions.

[0006] The present invention provides an optical component, including: a rotating wheel; and a plurality of directional mirrors disposed on the rotating wheel; and a driving component, wherein the driving component drives the rotating wheel to rotate to switch different directional mirrors to preset positions respectively, and the directions of the surface normals of the different directional mirrors at the preset positions are different.

[0007] Optionally, the plurality of direction mirrors are arranged in a first ring to an Nth ring, where N is an integer greater than or equal to 1; each ring of direction mirrors is arranged around the rotation center axis of the rotating wheel; when N is greater than or equal to 2, any nth ring of direction mirrors is arranged around the (n-1)th ring of direction mirrors, where n is an integer greater than or equal to 2 and less than or equal to N.

[0008] Optionally, all of the directional mirrors are reflectors, with reflectors of different directions in each ring alternately arranged along the circumferential direction around the rotation center axis; or, a portion of the directional mirrors are reflectors, and another portion are transmission mirrors, with the reflectors and transmission mirrors in each ring of directional mirrors alternately arranged along the circumferential direction around the rotation center axis; the arrangement surface of the multiple directional mirrors is perpendicular to the rotation center axis; the reflecting surface of the reflector is a plane.

[0009] Optionally, the directional mirror is disposed on the side of the rotating wheel, the side being parallel to the rotation center axis; each of the directional mirrors is a curved reflector; at least a portion of the curved reflectors have different curvatures; the curved reflectors with different curvatures are alternately arranged along the circumferential direction surrounding the rotation center axis.

[0010] Optionally, the reflecting surface of the directional mirror is cylindrical; the directional mirrors with different radii of curvature are at different distances from the rotation center axis, while the directional mirrors with the same radii of curvature are at the same distance from the rotation center axis; the central axis of each directional mirror coincides with the rotation center axis.

[0011] This application also provides a method for operating an optical component, comprising: the driving component driving the rotating wheel to rotate to switch different directional mirrors to preset positions respectively, wherein the directions of the surface normals of the different directional mirrors at the preset positions are different.

[0012] Optionally, the multiple directional mirrors are arranged in a first ring to an Nth ring, where N is an integer greater than or equal to 1; each ring of directional mirrors is arranged around the rotation center axis of the rotating wheel; the arrangement plane of the multiple directional mirrors is perpendicular to the rotation center axis; the driving component drives the rotating wheel to rotate to switch different directional mirrors to preset positions, including: the driving component drives the rotating wheel to rotate to switch different directional mirrors of any ring to preset positions; the working method of the optical component further includes: changing the overall position of the rotating wheel to switch the directional mirrors of different rings to preset positions.

[0013] Optionally, the directional mirror is disposed on the side of the rotating wheel, the side being parallel to the rotation center axis; each of the directional mirrors is a curved reflector; at least a portion of the curved reflectors have different curvatures; the curved reflectors with different curvatures are alternately arranged along the circumferential direction surrounding the rotation center axis; the driving assembly switches the different directional mirrors to preset positions by driving the rotating wheel to rotate, including: the driving assembly switches the curved reflectors with different curvatures to preset positions by driving the rotating wheel to rotate.

[0014] This application also provides an optical system, including: a light source for generating illumination light; the optical components of this application; the driving component drives the rotating wheel to rotate to switch different directional mirrors to preset positions so that the illumination light is emitted in different directions; the preset position is the position through which the illumination light path passes.

[0015] Optionally, it may also include: a guiding component, the guiding component including a plurality of guiding mirrors, the plurality of guiding mirrors respectively guiding illumination light emitted from the directional mirror in different directions to the sample surface at a preset angle.

[0016] Optionally, the plurality of guide mirrors are respectively the first guide mirror to the Mth guide mirror, where M is an integer greater than or equal to 2; any mth guide mirror guides the illumination light emitted from the directional mirror to the sample surface at the mth preset angle; one of the preset angles from the first preset angle to the Mth preset angle is 90 degrees, and the remaining preset angles are not equal to 90 degrees; m is an integer greater than or equal to 1 and less than or equal to M.

[0017] Optionally, the illumination light is used to irradiate the surface of the sample; the optical system further includes: one or more collection components, each collection component including a collection mirror and a detector; wherein, the surface of the sample is used to receive the illumination light and reflect or scatter the illumination light to form signal light; if the optical system includes multiple collection components, different collection mirrors are used to collect signal light from different directions from the surface of the sample, and the detector is used to acquire the signal light from the collection mirrors.

[0018] This application also provides a method for operating an optical system, comprising: generating illumination light through the light source and illuminating the directional mirror; and driving the rotating wheel to rotate through the driving component to switch different directional mirrors to emit illumination light in different directions.

[0019] Optionally, the optical system further includes: one or more collection components, each including a collection mirror and a detector; the operation of the optical system further includes: reflecting or scattering the illumination light through the surface of the sample to form signal light; if the optical system includes multiple collection components, collecting signal light from different directions on the surface of the sample through different collection mirrors; acquiring the signal light from the collection mirrors through the detector; the frame rate of the detector being greater than or equal to the switching frequency of the mirrors in different directions.

[0020] The technical solution of this application has the following beneficial effects:

[0021] In the optical assembly provided by this invention, the driving component drives a rotating wheel to rotate, thereby switching different directional mirrors to preset positions. The normals to the surfaces of the different directional mirrors at the preset positions have different directions. This allows for rapid switching between different directional mirrors to meet specific needs.

[0022] Furthermore, the directional mirrors are disposed on the side of the rotating wheel, and the side is parallel to the rotation central axis; each of the directional mirrors is a curved reflector; at least a portion of the curved reflectors have different curvatures; the curved reflectors with different curvatures are alternately arranged along the circumferential direction surrounding the rotation central axis. This ensures that the emission direction of the same directional mirror remains unchanged during the rotation of the rotating wheel, thus stabilizing the incident angle of the illumination light on the sample. Attached Figure Description

[0023] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0024] Figure 1 A schematic diagram of an optical system provided in an embodiment of the present invention;

[0025] Figure 2 A schematic diagram of an optical system provided in another embodiment of the present invention;

[0026] Figure 3 A schematic diagram of an optical component provided in an embodiment of the present invention;

[0027] Figure 4 A schematic diagram of an optical component provided for another embodiment of the present invention. Detailed Implementation

[0028] The technical solution of the present invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0029] In the description of this invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing the invention and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0030] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0031] Furthermore, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0032] Example 1

[0033] An embodiment of the present invention provides an optical component 101, in conjunction with reference to the reference. Figure 1 , Figure 3 and Figure 4 The optical component 101 includes: a rotating wheel 1011 and a plurality of directional mirrors 1012 disposed on the rotating wheel 1011; and a driving component, which drives the rotating wheel 1011 to rotate so as to switch different directional mirrors 1012 to preset positions respectively, wherein the direction of the surface normal of the different directional mirrors 1012 in the preset positions is different.

[0034] In this embodiment, the driving component drives the rotating wheel 1011 to rotate, thereby switching different directional mirrors 1012 to preset positions. The directions of the surface normals of the different directional mirrors at the preset positions are different. This allows for rapid switching of different directional mirrors to meet the needs.

[0035] refer to Figure 3 The optical component 101 includes a rotating wheel 1011 and a plurality of directional mirrors 1012 disposed on the rotating wheel 1011. The plurality of directional mirrors 1012 are arranged in a first ring to an Nth ring, where N is an integer greater than or equal to 1; each ring of directional mirrors 1012 is arranged around the rotation center axis of the rotating wheel 1011. Figure 3 In this embodiment, N=1, and a ring of directional mirrors 1012 is set. In other embodiments, when N is greater than or equal to 2, any n-th ring of directional mirrors is set around the (n-1)-th ring of directional mirrors, where n is an integer greater than or equal to 2 and less than or equal to N.

[0036] In this embodiment, reference Figure 3 The direction mirror 1012 passes through the rotating wheel 1011 in a direction parallel to the rotation center axis.

[0037] In this embodiment, reference Figure 3 Each of the multiple directional mirrors 1012 is a reflector, with mirrors of different directions arranged alternately along the circumferential direction surrounding the central axis of rotation. The reflecting surface of each mirror is planar. The angle between the reflecting surface of each mirror and the horizontal plane is different. The drive assembly rotates the rotating wheel 1011 to switch the different reflectors to preset positions.

[0038] In another embodiment of this application, a portion of the directional mirrors 1012 are reflectors, and another portion are transmissive mirrors. The reflectors and transmissive mirrors in each ring of the directional mirrors 1012 are alternately arranged circumferentially around the rotation center axis. The drive assembly drives the rotation of the rotating wheel 1011 to switch the reflectors and transmissive mirrors to preset positions respectively. In this case, the angles between the reflecting surfaces of the multiple reflectors and the horizontal plane can be the same, or the angles between the reflecting surfaces of the multiple reflectors and the horizontal plane can be at least partially different. The reflecting surfaces of the reflectors are planar.

[0039] refer to Figure 3 The arrangement planes of multiple directional mirrors 1012 are perpendicular to the rotation center axis. The reflecting surface of the mirror is a plane.

[0040] refer to Figure 3 The optical component 101 further includes: a support structure 1014 supporting the rotating wheel 1011; and a rotating shaft 1013 passing through the rotating wheel 1011. The rotating wheel 1011 rotates around the rotating shaft 1013. A drive component drives the rotating shaft 1013 to rotate, thereby causing the rotating wheel 1011 to rotate around the rotating shaft 1013. The central axis of rotation is located on the rotating shaft 1013.

[0041] In another embodiment of this application, reference is made to Figure 4 The optical component 101 includes: a rotating wheel 1011 and a plurality of directional mirrors 1012 disposed on the rotating wheel 1011; and a driving component that drives the rotating wheel 1011 to rotate, thereby switching different directional mirrors 1012 to preset positions, wherein the directions of the surface normals of the different directional mirrors at the preset positions are different. The directional mirrors 1012 are disposed on the side of the rotating wheel 1011. The side of the rotating wheel 1011 is parallel to the rotational central axis of the rotating wheel 1011. Each of the directional mirrors 1012 is a curved reflector, and at least a portion of the curved reflectors have different curvatures. The curved reflectors with different curvatures are alternately arranged along the circumferential direction surrounding the rotational central axis. Figure 4 In this design, multiple directional mirrors 1012 include: directional mirror 1012-1 and directional mirror 1012-2. Both directional mirror 1012-1 and directional mirror 1012-2 are curved reflectors. directional mirror 1012-1 and directional mirror 1012-2 have different curvatures.

[0042] refer to Figure 4 The reflecting surface of the directional mirror 1012 is cylindrical; the distance between the directional mirror 1012 with different radii of curvature and the rotation center axis is different, while the distance between the directional mirror 1012 with the same radii of curvature and the rotation center axis is the same; the central axis of each directional mirror 1012 coincides with the rotation center axis.

[0043] It should be noted that the central axis of the directional mirror 1012 refers to the central axis corresponding to the reflecting surface of the directional mirror 1012, and the distance from the central axis to each point on the reflecting surface of the same directional mirror 1012 is equal.

[0044] refer to Figure 4 The distances between multiple directional mirrors 1012-1 and the rotation center axis are the same, the distances between multiple directional mirrors 1012-2 and the rotation center axis are the same, and the distance between directional mirror 1012-1 and the rotation center axis is less than the distance between directional mirror 1012-2 and the rotation center axis.

[0045] refer to Figure 4 The rotating wheel 1011 includes a main wheel 1011-1 and a plurality of support protrusions 1011-2 disposed on the side wall of the main wheel 1011-1. The plurality of support protrusions 1011-2 are spaced apart around the rotational central axis of the rotating wheel 1011. The distance from the side of the main wheel 1011-1 to the rotational central axis is different from the distance from the side of the support protrusions 1011-2 to the rotational central axis. A direction mirror 1012-1 is disposed on the side of the main wheel 1011-1, and a direction mirror 1012-2 is disposed on the side of the support protrusions 1011-2.

[0046] Example 2

[0047] This embodiment provides a method for operating the optical component of Embodiment 1, including: the driving component drives the rotating wheel to rotate to switch different directional mirrors to preset positions respectively, and the directions of the surface normals of the different directional mirrors at the preset positions are different.

[0048] In this embodiment, reference Figure 3 The plurality of direction mirrors 1012 are arranged in a first ring to an Nth ring, where N is an integer greater than or equal to 1; each ring of direction mirrors 1012 is arranged around the rotation center axis of the rotating wheel 1011; the arrangement plane of the plurality of direction mirrors 1012 is perpendicular to the rotation center axis; the driving component drives the rotating wheel 1011 to rotate to switch different direction mirrors to preset positions respectively, including: the driving component drives the rotating wheel 1011 to rotate to switch different direction mirrors of any ring to preset positions respectively.

[0049] In this embodiment, reference Figure 3The plurality of directional mirrors 1012 are all reflectors, and the reflectors of different directions in each circle are alternately arranged along the circumferential direction surrounding the rotation center axis; the reflective surface of the reflector is a plane; the driving component drives the rotating wheel 1011 to rotate to switch the different directional mirrors of any circle to preset positions respectively, including: the driving component drives the rotating wheel 1011 to rotate to switch the different directional mirrors of any circle to preset positions respectively.

[0050] In another embodiment of this application, a portion of the directional mirrors are reflective mirrors, and another portion of the directional mirrors are transmissive mirrors. The reflective mirrors and transmissive mirrors in each ring of directional mirrors are alternately arranged in a circumferential direction around the rotation center axis. The reflective surface of the reflective mirror is a plane. The driving component switches different directional mirrors to preset positions by driving the rotating wheel to rotate.

[0051] In this embodiment, the operation of the optical component further includes: changing the overall position of the rotating wheel to switch the direction mirrors of different circles to preset positions respectively.

[0052] In another embodiment, reference Figure 4 The directional mirror 1012 is disposed on the side of the rotating wheel 1011, and the side is parallel to the rotation center axis. Each directional mirror 1012 is a curved surface mirror. At least a portion of the curved surface mirrors have different curvatures. The curved surface mirrors with different curvatures are alternately arranged along the circumferential direction surrounding the rotation center axis. The driving assembly drives the rotating wheel 1011 to rotate to switch the different directional mirrors 1012 to preset positions, including: the driving assembly drives the rotating wheel 1011 to rotate to switch the curved surface mirrors with different curvatures to preset positions. This ensures that the emission direction of the same directional mirror remains unchanged during the rotation of the rotating wheel, thus stabilizing the incident angle of the illumination light on the sample.

[0053] Example 3

[0054] This embodiment provides an optical system, reference Figure 1 ,include:

[0055] A light source, used to produce illumination light;

[0056] The optical component 101 of Embodiment 1 includes: a rotating wheel; a plurality of directional mirrors disposed on the rotating wheel; and a driving component, wherein the driving component drives the rotating wheel to rotate to switch different directional mirrors to preset positions so that the illumination light is emitted in different directions; the preset position is the position through which the illumination light path passes.

[0057] In this embodiment, the optical system further includes a guiding component, which includes multiple guiding mirrors, each of which guides illumination light emitted from the directional mirror in different directions to the surface of the sample 120 at a preset angle.

[0058] In this embodiment, the multiple guide mirrors are respectively the first guide mirror to the Mth guide mirror, where M is an integer greater than or equal to 2; any mth guide mirror guides the illumination light emitted from the directional mirror to the sample surface at the mth preset angle; one of the preset angles from the first preset angle to the Mth preset angle is 90 degrees, and the remaining preset angles are not equal to 90 degrees; m is an integer greater than or equal to 1 and less than or equal to M.

[0059] The optical system further includes: one or more collection components, each including a collection mirror and a detector; wherein the surface of the sample 120 is used to receive the illumination light and reflect or scatter the illumination light to form signal light; if the optical system includes multiple collection components, different collection mirrors are used to collect signal light from different directions from the surface of the sample, and the detector is used to acquire the signal light from the collection mirrors.

[0060] refer to Figure 1 The plurality of guide mirrors include a first guide mirror 330 and a second guide mirror 331. The first guide mirror 330 is a beam splitter, and the second guide mirror 331 is a reflector. The first guide mirror 330 guides illumination light A in a first direction to the surface of sample 120 at a first preset angle. Sample 120 reflects illumination light A in the first direction to form a first signal light, which is transmitted through the first guide mirror 330 and illuminates detector 401. The second guide mirror 331 guides illumination light B in a second direction to the surface of sample 120 at a second preset angle. Sample 120 reflects illumination light B in the second direction to form a second signal light, which illuminates detector 406. The second preset angle is different from the first preset angle.

[0061] refer to Figure 2 The plurality of guide mirrors include a first guide mirror 1012 and a second guide mirror 1012. The first guide mirror 1012 guides the illumination light A in a first direction to the surface of the sample 120 at a first preset angle, and the second guide mirror 1012 guides the illumination light A in a second direction to the surface of the sample 120 at a second preset angle. Figure 2Multiple collection components are illustrated. The surface of the sample 120 is used to receive the illumination light and reflect or scatter it to form signal light. One set of collection components includes a collection mirror 32 and a detector. The collection mirror 32 collects the signal light from the surface of the sample 120; specifically, the collection mirror 32 reflects the signal light from the surface of the sample 120, and the detector acquires the signal light from the collection mirror 32. Another set of collection components includes a collection mirror 22 and a detector. The collection mirror 22 collects the signal light from the sample 120; specifically, the collection mirror 22 focuses the signal light from the surface of the sample 120.

[0062] In this embodiment, illumination lights from different directions will not interfere with each other. The illumination light can be any type of illumination light.

[0063] Illumination light from different directions is incident on the surface of sample 120 at different preset angles. When the illumination light is illumination light, the different preset angles of illumination light are used to detect different types of defects, improving detection efficiency. Sample 120 can be, for example, a wafer, a semiconductor semi-finished structure, or a finished semiconductor structure.

[0064] Reference Figure 1 , Figure 3 and Figure 4 The illumination light emitted from the directional mirror 1012 is used to illuminate the surface of the sample 120. The driving assembly drives the rotating wheel 1011 to rotate to switch between different directional mirrors emitting illumination light in different directions, from a first direction to an Mth direction, where M is an integer greater than or equal to 2. One of the directions from the first to the Mth direction is perpendicular to the surface of the sample 120, while the remaining directions do not form a perpendicular angle with the surface of the sample 120. All directions from the first to the Mth direction are different. Figure 1 Taking M equal to 2 as an example, the driving component drives the rotating wheel 1011 to rotate to switch the illumination light A emitted by the different directional mirrors 1012 from a first direction to a second direction. The first direction and the second direction are different. It should be noted that in other embodiments, M can be greater than 2.

[0065] In this embodiment, reference Figure 2 The optical system also includes a support stage 115 for supporting the sample 120. A portion of the collecting assembly includes a collecting mirror 32, which is a reflecting collecting mirror. A portion of the collecting assembly includes a collecting mirror 22, which is a focusing collecting mirror. The orthographic projection of the reflecting collecting mirror onto the surface of the support stage 115 is located around the side of the orthographic projection of the focusing collecting mirror onto the surface of the support stage 115. This ensures that the optical paths of the focusing collecting mirror and the reflecting collecting mirror do not interfere with each other.

[0066] In this embodiment, reference Figure 2A portion of the collecting assembly further includes a first reflecting mirror 24, located in the optical path between the focusing collecting mirror and the detector. The detector in a portion of the collecting assembly includes a first sub-detector 28 and a second sub-detector 30. Another portion of the collecting assembly further includes a first beam selector 26, located in the optical path between the first reflecting mirror 24 and the first sub-detector 28, and in the optical path between the first reflecting mirror 24 and the second sub-detector 30. The first beam selector 26 is used to transmit light from the first reflecting mirror 24 to the first sub-detector 28 and reflect it to the second detector 30. The first beam selector 26 is a beam splitter or a dichroic mirror.

[0067] In this embodiment, reference Figure 2 The collection components also include a first aperture 30, located in the optical path between the first reflector 24 and the first beam selector 26.

[0068] In this embodiment, reference Figure 2 Another portion of the collecting assembly includes a third sub-detector 36 and a fourth sub-detector 38; the other portion of the collecting assembly further includes a second beam selector 34, located in the optical path between the reflecting collecting mirror and the third sub-detector 36 and in the optical path between the reflecting collecting mirror and the fourth sub-detector 38. The second beam selector 34 is used to transmit light from the focusing collecting mirror to the third sub-detector 36 and reflect it to the fourth detector 38. The second beam selector 34 is a beam splitter or a dichroic mirror.

[0069] In this embodiment, reference Figure 2 The other part of the collecting assembly also includes a second aperture 48 located in the optical path between the reflecting collecting mirror and the second beam selector 34.

[0070] In this embodiment, reference Figure 2 The optical system also includes a processor connected to the detector, the processor being used to process the images acquired by the detector. The processor can be a computer.

[0071] In this embodiment, the optical system further includes a shaping element and a collimating element, located in the optical path between the collecting mirror and the detector.

[0072] In this embodiment, the optical system further includes a polarizer located in the optical path of the directional mirror, which changes the polarization direction of the illumination light. After the illumination light is emitted in different directions, the polarization direction of the illumination light can be changed by the polarizer, thereby detecting light of different polarization states on the sample. The polarizer can be located between the guide mirror and the directional mirror, or the polarizer can be located on the side of the guide mirror away from the directional mirror.

[0073] In other embodiments of this application, the optical system of this application can also be applied to acousto-optic detection. After the illumination light is emitted in different directions, the wavelengths of the illumination light in different directions are different. The illumination light of different wavelengths is used as excitation light (excitation sound wave) and detection light, respectively, and there is a phase delay between the excitation light and the detection light.

[0074] In other embodiments of this application, the illumination light is emitted in different directions, and the wavelengths of the illumination light in different directions are different, so light of different wavelengths can be used to detect the analyte. At least one beam of illumination light can excite fluorescence to achieve fluorescence detection.

[0075] Example 4

[0076] This embodiment provides a method for operating the optical system of Embodiment 3, including: generating illumination light through the light source and illuminating the directional mirror; driving the rotating wheel to rotate through the driving component to switch different directional mirrors to emit illumination light in different directions.

[0077] In this embodiment, the working method of the optical system further includes: guiding the illumination light emitted from the directional mirror in different directions to the sample surface at a preset angle through different guide mirrors in the guide assembly.

[0078] The optical system further includes: one or more collection components, each including a collection mirror and a detector; the operation of the optical system further includes: reflecting or scattering the illumination light through the surface of the sample to form signal light; if the optical system includes multiple collection components, collecting signal light from different directions on the surface of the sample through different collection mirrors; acquiring signal light from the collection mirrors through the detector; the frame rate of the detector is greater than or equal to the switching frequency of the mirrors in different directions.

[0079] refer to Figure 1The plurality of guide mirrors include a first guide mirror 330 and a second guide mirror 331, where the first guide mirror 330 is a beam splitter and the second guide mirror 331 is a reflector. Different guide mirrors in the guiding assembly guide illumination light emitted from the directional mirror in different directions to the sample surface at preset angles, including: guiding illumination light A in a first direction to the sample 120 surface at a first preset angle via the first guide mirror 330, and guiding illumination light B in a second direction to the sample 120 surface at a second preset angle via the second guide mirror 331. The illumination light is reflected or scattered by the sample surface to form signal light, including: reflecting illumination light A in the first direction to form a first signal light via the sample 120, and reflecting illumination light B in the second direction to form a second signal light via the sample 120. Different collection mirrors collect signal light from the sample surface in different directions, including: collecting the first signal light from the sample surface via the first collection mirror, and collecting the second signal light from the sample surface via the second collection mirror. Acquiring signal light from the collecting mirror via the detector includes: acquiring a first signal light from the first collecting mirror via detector 401, and acquiring a second signal light from the second collecting mirror via detector 4061. In this embodiment, the first collecting mirror and the first guide mirror 330 are the same component.

[0080] refer to Figure 2 The plurality of guide mirrors includes a first guide mirror 1012 and a second guide mirror 1012. Different guide mirrors in the guiding assembly guide illumination light emitted from the directional mirror in different directions to the sample surface at preset angles, including: guiding illumination light A in a first direction to the sample 120 surface at a first preset angle via the first guide mirror 1012, and guiding illumination light B in a second direction to the sample 120 surface at a second preset angle via the second guide mirror 1012.

[0081] Figure 2 Multiple collection components are illustrated. The surface of the sample 120 is used to receive the illumination light and reflect or scatter it to form signal light. One set of collection components includes a collection mirror 32 and a detector. The collection mirror 32 collects the signal light from the surface of the sample 120; specifically, the collection mirror 32 reflects the signal light from the surface of the sample 120, and the detector acquires the signal light from the collection mirror 32. Another set of collection components includes a collection mirror 22 and a detector. The collection mirror 22 collects the signal light from the sample 120; specifically, the collection mirror 22 focuses the signal light from the surface of the sample 120.

[0082] refer to Figure 2The illumination light is reflected or scattered by the surface of the sample 120 to form signal light, including: reflecting illumination light A in a first direction to form a first signal light by the sample 120, and reflecting illumination light B in a second direction to form a second signal light by the sample 120. The signal light from different directions on the surface of the sample is collected by different collecting mirrors, including: collecting the first signal light from the surface of the sample 120 by collecting mirror 32, and collecting the second signal light from the surface of the sample by collecting mirror 22.

[0083] In this embodiment, reference Figure 2 A portion of the collecting assembly further includes a first reflecting mirror 24, located in the optical path between the focusing collecting mirror and the detector. The detector in a portion of the collecting assembly includes a first sub-detector 28 and a second sub-detector 30; another portion of the collecting assembly further includes a first beam selector 26, located in the optical path between the first reflecting mirror 24 and the first sub-detector 28 and in the optical path between the first reflecting mirror 24 and the second sub-detector 30. The first beam selector 26 transmits light from the first reflecting mirror 24 to the first sub-detector 28 and reflects it to the second sub-detector 30. The first beam selector 26 is a beam splitter or a dichroic mirror. The frame rate of the first sub-detector 28 is greater than or equal to the switching frequency of the different directional mirrors, and the frame rate of the second sub-detector 30 is greater than or equal to the switching frequency of the different directional mirrors.

[0084] In this embodiment, reference Figure 2 The collection components also include a first aperture 30, located in the optical path between the first reflector 24 and the first beam selector 26.

[0085] In this embodiment, reference Figure 2 Another portion of the collecting assembly includes a third sub-detector 36 and a fourth sub-detector 38. This other portion of the collecting assembly also includes a second beam selector 34, located in the optical path between the reflecting collecting mirror and the third sub-detector 36, and in the optical path between the reflecting collecting mirror and the fourth sub-detector 38. The second beam selector 34 is used to transmit light from the focusing collecting mirror to the third sub-detector 36 and reflect it to the fourth sub-detector 38. The second beam selector 34 is a beam splitter or a dichroic mirror. The frame rate of the third sub-detector 360 is greater than or equal to the switching frequency of the different directional mirrors, and the frame rate of the fourth sub-detector 38 is greater than or equal to the switching frequency of the different directional mirrors.

[0086] In this embodiment, reference Figure 2 The other part of the collecting assembly also includes a second aperture 48 located in the optical path between the reflecting collecting mirror and the second beam selector 34.

[0087] In this embodiment, reference Figure 2 The optical system further includes a processor connected to the detector, and the operation of the optical system further includes processing the images acquired by the detector through the processor. The processor can be a computer.

[0088] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the scope of protection of this invention.

Claims

1. An optical component, characterized in that, include: Rotating wheel; and multiple directional mirrors disposed on the rotating wheel; A driving component is provided, which drives the rotating wheel to rotate to switch different directional mirrors to preset positions. The normals of the surfaces of the different directional mirrors at the preset positions are different.

2. The optical component according to claim 1, characterized in that, The plurality of directional mirrors are arranged in a first ring to an Nth ring, where N is an integer greater than or equal to 1; each ring of directional mirrors is arranged around the rotation center axis of the rotating wheel; When N is greater than or equal to 2, any n-th ring of direction mirrors is set around the (n-1)-th ring of direction mirrors, where n is an integer greater than or equal to 2 and less than or equal to N.

3. The optical component according to claim 2, characterized in that, Multiple of the directional mirrors are reflectors, and the reflectors in different directions in each ring are alternately arranged in the circumferential direction around the rotation center axis; or, a portion of the directional mirrors are reflectors and another portion of the directional mirrors are transmission mirrors, and the reflectors and transmission mirrors in each ring of the directional mirrors are alternately arranged in the circumferential direction around the rotation center axis. The arrangement surfaces of the plurality of directional mirrors are perpendicular to the rotation center axis; the reflecting surface of the reflecting mirror is a plane.

4. The optical component according to claim 1, characterized in that, The directional mirrors are disposed on the side of the rotating wheel, and the side is parallel to the rotation center axis; each of the directional mirrors is a curved reflector; at least a portion of the curved reflectors have different curvatures; the curved reflectors with different curvatures are alternately arranged in the circumferential direction surrounding the rotation center axis.

5. The optical component according to claim 4, characterized in that, The reflecting surface of the directional mirror is cylindrical; the directional mirrors with different radii of curvature are at different distances from the rotation center axis, while the directional mirrors with the same radii of curvature are at the same distance from the rotation center axis; the central axis of each directional mirror coincides with the rotation center axis.

6. A method of operating an optical component based on any one of claims 1 to 5, characterized in that, include: The driving component drives the rotating wheel to rotate so as to switch the different directional mirrors to preset positions. The normals of the surfaces of the different directional mirrors at the preset positions are different.

7. The method of operating the optical component according to claim 6, characterized in that, The plurality of directional mirrors are arranged in a first ring to an Nth ring, where N is an integer greater than or equal to 1; each ring of directional mirrors is arranged around the rotation center axis of the rotating wheel; the arrangement plane of the plurality of directional mirrors is perpendicular to the rotation center axis; The driving component drives the rotating wheel to rotate so as to switch different direction mirrors to preset positions, including: the driving component drives the rotating wheel to rotate so as to switch different direction mirrors to preset positions in any number of rotations; The working method of the optical component further includes: changing the overall position of the rotating wheel to switch the direction mirrors of different circles to preset positions respectively.

8. The method of operating the optical component according to claim 6, characterized in that, The directional mirror is disposed on the side of the rotating wheel, and the side is parallel to the rotation center axis; each of the directional mirrors is a curved surface mirror; at least a portion of the curved surface mirrors have different curvatures; the curved surface mirrors with different curvatures are alternately arranged along the circumferential direction surrounding the rotation center axis; The driving component drives the rotating wheel to rotate to switch the different directional mirrors to preset positions, including: the driving component drives the rotating wheel to rotate to switch the curved surface mirrors with different curvatures to preset positions.

9. An optical system, characterized in that, include: A light source, used to produce illumination light; The optical component according to any one of claims 1 to 5, wherein the driving component drives the rotating wheel to rotate to switch different directional mirrors to preset positions so that the illumination light is emitted in different directions; The preset position is the location where the lighting light path passes.

10. The optical system according to claim 9, characterized in that, Also includes: The guiding component includes multiple guiding mirrors, each of which guides illumination light emitted from the directional mirror in different directions to the sample surface at a preset angle.

11. The optical component according to claim 10, characterized in that, The plurality of guide mirrors are designated as the first guide mirror to the Mth guide mirror, where M is an integer greater than or equal to 2; any mth guide mirror guides the illumination light emitted from the directional mirror to the sample surface at a preset angle of the mth angle; one of the preset angles from the first preset angle to the Mth preset angle is 90 degrees, and the remaining preset angles are not equal to 90 degrees; m is an integer greater than or equal to 1 and less than or equal to M.

12. The optical system according to claim 9, characterized in that, The illumination light is used to irradiate the surface of the sample; The optical system further includes: one or more collection components, the collection components including a collection mirror and a detector; The sample surface is used to receive the illumination light and reflect or scatter the illumination light to form signal light; if the optical system includes multiple collection components, different collection mirrors are used to collect signal light from different directions from the sample surface, and the detector is used to acquire the signal light from the collection mirrors.

13. A method of operating the optical system according to any one of claims 9 to 12, characterized in that, include: The light source generates illumination light which is then projected onto the direction mirror. The drive assembly drives the rotating wheel to rotate, thereby switching between different directional mirrors that emit illumination light in different directions.

14. The method of operating the optical system according to claim 13, characterized in that, The optical system further includes: one or more collection components, the collection components including a collection mirror and a detector; The working method of the optical system further includes: reflecting or scattering the illumination light through the surface of the sample to form signal light; if the optical system includes multiple collection components, collecting signal light from different directions on the surface of the sample through different collection mirrors; and acquiring the signal light from the collection mirrors through the detector. The detector's frame rate is greater than or equal to the switching frequency of mirrors in different directions.

Images