Annealing device and annealing method
By designing an annealing device with transmission and clamping components, the problem of poor annealing performance of quartz glass was solved, achieving uniform heating and elimination of internal stress, thus improving the annealing effect of quartz glass.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- NANTONG CRYSTAL CO LTD
- Filing Date
- 2026-01-23
- Publication Date
- 2026-04-21
AI Technical Summary
Known quartz glass annealing apparatuses generally have limited effectiveness in optimizing the annealing performance of quartz glass, and are difficult to effectively eliminate internal stress and ensure heating uniformity.
An annealing device was designed, including an annealing furnace, a mounting assembly, and a clamping assembly. The connecting parts are rotated by a transmission assembly, and the clamping assembly can movably connect the product to ensure uniform heating. The airflow temperature is regulated by the air supply channel. Combined with the transmission assembly, the device improves the convenience of picking up and putting down the product and reduces the risk of bumps and knocks.
The annealing performance of quartz glass has been significantly optimized, material stress has been reduced, heating uniformity and annealing yield have been improved, and product stability and safety have been ensured.
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Figure CN121894918A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of annealing technology, and more specifically, to annealing apparatus and annealing method. Background Technology
[0002] Annealing is used in the processing of quartz glass to improve product quality; however, known annealing equipment generally does not optimize the annealing performance of quartz glass. Summary of the Invention
[0003] This application provides an annealing apparatus and an annealing device to solve the technical problem that the optimization effect of annealing performance of quartz glass is generally poor.
[0004] The embodiments of this application are implemented as follows: In a first aspect, this application provides an annealing apparatus for annealing products. The annealing apparatus includes: an annealing furnace defining a furnace cavity, the annealing furnace including a furnace wall and a heating element disposed on the furnace wall, the heating element being used to heat the furnace cavity; a mounting assembly disposed in the furnace cavity, the mounting assembly including a support member, a transmission assembly, and a connecting member, the connecting member being spaced apart from the support member, the connecting member being movably connected to the support member via the transmission assembly, the connecting member being configured to rotate relative to the annealing furnace under the drive of the transmission assembly; and a clamping assembly connected to the connecting member, the clamping assembly being used to clamp the product.
[0005] In one possible implementation: The clamping assembly includes a clamping member, which includes a clamping plate and a plurality of clamping protrusions. The clamping plate has a clamping surface, and the plurality of clamping protrusions are arrayed and protruded from the clamping surface. The plurality of clamping protrusions are used to abut against the product. The clamping surface is spaced apart from the product, and an airflow channel is formed between the plurality of clamping protrusions. The airflow channel is used to allow the gas in the furnace cavity to contact the surface of the product.
[0006] In one possible implementation: The clamping member also includes a mounting part and multiple elastic parts; there are multiple clamping plates, and each of the multiple clamping plates can be movably connected to the mounting part. Each elastic part elastically abuts against the mounting part and the corresponding clamping plate to drive the clamping plate to abut against the product.
[0007] In one possible implementation: The connector includes a first connecting portion and a second connecting portion. The first connecting portion is connected to the transmission assembly. The second connecting portion is spaced apart from the first connecting portion and is connected to the first connecting portion. The clamping assembly includes a first clamping member and a second clamping member. The first clamping member is connected to the first connecting portion and extends toward the second connecting portion. The second clamping member is connected to the second connecting portion and extends toward the first connecting portion.
[0008] In one possible implementation: The first clamping member is movably connected to the first connecting portion, and the second clamping member is movably connected to the second connecting portion; the mounting assembly further includes a first locking member and a second locking member, the first locking member being used to lock the first clamping member to the first connecting portion, and the second locking member being used to lock the second clamping member to the second connecting portion.
[0009] In one possible implementation: The furnace wall includes a first end wall, a second end wall, and a surrounding wall. The first end wall is connected to one end of the surrounding wall, and the second end wall is connected to the other end of the surrounding wall. The first end wall, the second end wall, and the surrounding wall together form the furnace cavity. There are multiple heating elements, which are distributed on the first end wall, the second end wall, and the surrounding wall.
[0010] In one possible implementation: The annealing apparatus further includes a transfer assembly, which is kinetically connected to the mounting assembly and is used to move the mounting assembly into or out of the furnace cavity.
[0011] In one possible implementation: The annealing apparatus further includes a base, the annealing furnace is movably connected to the base, one end of the mounting assembly passes through the annealing furnace and is connected to the base, the mounting assembly is sealed to the annealing furnace, and the clamping assembly is connected to one end of the mounting assembly located inside the furnace cavity.
[0012] In one possible implementation: The annealing device further includes: a base, on which the annealing furnace is disposed; a transmission assembly, a portion of which is located on the base, and another portion of which extends into the furnace cavity and is connected to the support member, the transmission assembly being used to move the mounting assembly into or out of the furnace cavity.
[0013] Secondly, this application provides an annealing method applied to the aforementioned annealing apparatus. The annealing method includes: driving the product to rotate relative to the annealing furnace via the transmission assembly; increasing the temperature of the product to a first preset temperature, the first preset temperature being lower than the annealing point temperature of the product; maintaining the temperature of the product at the first preset temperature for a first preset duration, the maximum value of the first preset duration being not less than 80 hours; decreasing the temperature of the product to a second preset temperature, the second preset temperature being lower than the strain point temperature of the product; and decreasing the temperature of the product to room temperature. Attached Figure Description
[0014] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings in the embodiments will be briefly described below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0015] Figure 1 This is a schematic diagram of the structure of an annealing apparatus according to an embodiment of this application.
[0016] Figure 2 This is a schematic diagram of the base, the first driving member, and the annealing furnace according to an embodiment of this application.
[0017] Figure 3 This is a schematic diagram of the annealing apparatus according to an embodiment of this application from another perspective.
[0018] Figure 4 This is one of the partial structural schematic diagrams of an annealing apparatus according to an embodiment of this application.
[0019] Figure 5 This is a schematic diagram of the structure of a clamping member according to an embodiment of this application.
[0020] Figure 6 This is a second partial structural schematic diagram of an annealing apparatus according to an embodiment of this application.
[0021] Figure 7 This is a schematic diagram of the annealing apparatus according to another embodiment of this application.
[0022] Figure 8 This is a schematic diagram of the support member and transmission assembly according to another embodiment of this application.
[0023] Figure 9 This is a schematic diagram of the annealing apparatus according to another embodiment of this application.
[0024] Figure 10 This is a schematic diagram of the annealing apparatus according to another embodiment of this application from another perspective.
[0025] Figure 11 for Figure 10 A magnified schematic diagram of the structure at point V in the middle.
[0026] Figure 12 This is a flowchart of an annealing method according to an embodiment of this application.
[0027] Explanation of key component symbols: Annealing apparatus 100 Annealing furnace 10 Furnace cavity 11 Furnace wall 12 First end wall 121 Second end wall 122 Wall 123 First wall 1231 Second wall 1232 Third wall 1233 Fourth wall body 1234 Heating element 13 Install Component 20 Support component 21 Transmission assembly 22 First rotating part 221 Second rotating part 222 Bracket 223 Connector 23 First connecting part 231 First board 231a Bearing 231b Second connecting part 232 Second board 232a Mounting cylinder 232b Connecting column 233 First slot 2341 Second slot 2342 Adapter Block 235 Mounting slot 236 First locking element 24 Second locking element 25 Second drive unit 26 Third ball head 261 Third link 262 Fourth ball head 263 Fourth link 264 Second drive unit 265 Clamping component 30 First clamping component 30a Second clamping member 30b Clamping component 31 Clamping plate 311 Clamping protrusion 312 airflow channel 32 Gas supply channel 33 First circulation section 331 Second circulation section 332 Third circulation section 333 Installation section 34 Connecting column 341 Slider 342 Elastic part 35 Clamping surface P1 Inner surface P2 Transfer component 40 Base 50 Heat dissipation component 60 First drive component 70 First ball head 71 First link 72 Second ball head 73 Second link 74 First Drive Unit 75 Product 200 The following detailed description, in conjunction with the accompanying drawings, will further illustrate this application. Detailed Implementation
[0028] The technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments.
[0029] It should be noted that when a component is said to be "fixed to" another component, it can be directly on the other component or there may be an intervening component. When a component is said to be "connected to" another component, it can be directly connected to the other component or there may be an intervening component. When a component is said to be "set on" another component, it can be directly set on the other component or there may be an intervening component. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.
[0030] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art. The terminology used herein in the specification of this application is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. The term "or / and" as used herein includes any and all combinations of one or more of the associated listed items.
[0031] Some embodiments of this application are described in detail. Unless otherwise specified, the following embodiments and features can be combined with each other.
[0032] Synthetic quartz glass is primarily produced through flame hydrolysis using oxidation or silicon-containing precursors. Specific manufacturing processes include vapor axial deposition (VAD), external vapor deposition (OVD), modified chemical vapor deposition (MCVD), and plasma-enhanced chemical vapor deposition (PCVD / PECVD). Depending on the manufacturing process, high-purity transparent quartz glass can be obtained and manufactured into various shapes such as rods, tubes, plates, or blocks. Quartz glass has a wide range of applications, including its use as photolithography optical components, such as lenses, windows, filters, and photomasks.
[0033] Photolithography optical elements made of quartz glass can play a key role in transmitting high-energy ultraviolet lasers in microlithography exposure and projection systems, thereby enabling the fabrication of large-scale integrated circuits on substrates.
[0034] Known microlithography projection systems generally employ excimer lasers, capable of emitting high-energy pulsed ultraviolet radiation at 248 nm (KrF laser) or 193 nm (ArF laser). A core optical requirement for such systems is that the light intensity distribution on the object plane of the illumination system must be transmitted as uniformly, conformally, and with high resolution to the mirror plane of the projected object, conjugate with the exposure substrate. Any variation in the angular spectrum within the optical path will cause distortion of the intensity distribution within the objective lens pupil, resulting in asymmetric irradiation and significantly affecting image quality. In this context, birefringence plays a crucial role because it compromises the image fidelity of optical components made of quartz glass. Stress birefringence in quartz glass can occur, for example, during the uneven cooling of the blank used to manufacture the optical component or even through UV irradiation.
[0035] To ensure material performance, quartz glass blanks require precise annealing to eliminate internal stress. As microlithography technology advances towards 193nm wavelength, the requirements for quartz glass components (including resistance to high energy density, resistance to large pulse shocks, and wavefront distortion control) are constantly increasing.
[0036] See Figure 1This embodiment provides an annealing apparatus 100, which is used for annealing a product 200. The product 200 may be synthetic quartz glass.
[0037] The annealing apparatus 100 includes an annealing furnace 10, a mounting assembly 20, and a clamping assembly 30. The annealing furnace 10 defines a furnace cavity 11 and includes a furnace wall 12 and a heating element 13. The heating element 13 is disposed on the furnace wall 12 and is used to heat the furnace cavity 11. The mounting assembly 20 is disposed in the receiving cavity and includes a support member 21, a transmission assembly 22, and a connector 23. The connector 23 is spaced apart from the support member 21 and is movably connected to the support member 21 via the transmission assembly 22. The connector 23 is configured to rotate relative to the annealing furnace 10 under the drive of the transmission assembly 22. The clamping assembly 30 connects to the connector 23 and is used to clamp the product 200.
[0038] According to the annealing apparatus 100 of this application, the clamping assembly 30 is stably supported in the furnace cavity 11 by the support member 21, so that the product 200 clamped by the clamping assembly 30 will not come into contact with the surface of the annealing furnace 10, and the product 200 will not collide with the support member 21. This ensures that the product 200 (such as quartz glass) will not be subjected to severe external forces during the annealing process, and that no stress abrupt changes occur in the quartz glass. The transmission assembly 22 can drive the connecting member 23 to move relative to the annealing furnace 10, thereby driving the clamping assembly 30 and the product 200 to move relative to the annealing furnace 10. This allows all surfaces of the product 200 to be heated stably and uniformly, resulting in a low, even negligible, overall temperature difference between different parts of the product 200, further reducing stress abrupt changes caused by temperature variations. Therefore, the annealing apparatus 100 of this application can significantly optimize the annealing performance of quartz glass and reduce the overall material stress of the quartz glass.
[0039] Specifically, the quartz glass annealed using the annealing apparatus 100 of this application has a material stress of less than or equal to 0.5 nm / cm at 632.8 nm.
[0040] In some embodiments, see Figure 1 The annealing apparatus 100 also includes a base 50 and a transfer assembly. The annealing furnace 10 is located on the base 50. A portion of the transfer assembly is located on the base 50, and another portion of the transfer assembly extends into the furnace cavity 11 and is connected to the support member 21. The transfer assembly is used to move the mounting assembly 20 into or out of the furnace cavity 11. In this way, the support member 21 can be directly removed through the transfer assembly, which can improve the convenience of picking up and placing the product 200, further reduce the risk of bumps and knocks during the picking up and placing of the product 200, and further improve the annealing yield of the product 200.
[0041] The transmission component can be constructed as a tracked component. Two transmission components can be provided. The two transmission components are respectively connected to both ends of the support member 21.
[0042] During the operation of the transmission component, the temperature measuring element and the heating element are fixed on the inner surface of the annealing furnace 10, so that they will not interfere with the transmission component.
[0043] In some embodiments, see Figure 1 and Figure 2 The annealing apparatus 100 also includes a base 50. The annealing furnace 10 is movably connected to the base 50. One end of the mounting assembly 20 passes through the annealing furnace 10 and is connected to the base 50. The mounting assembly 20 is sealed to the annealing furnace 10. A clamping assembly 30 is connected to the end of the mounting assembly 20 located within the furnace cavity 11. Thus, by driving the annealing furnace 10 to rotate relative to the mounting assembly 20, the rotation of the clamping assembly 30 can be coordinated, allowing for more degrees of freedom and more directions of rotation between the product 200 and the annealing furnace 10, further improving the uniformity of the annealing temperature of the product 200.
[0044] In some embodiments, see Figure 2 The annealing apparatus 100 also includes a first driving member 70. The first driving member 70 is fixedly connected to the base 50 and is also connected to the annealing furnace 10 to drive the annealing furnace 10 to move relative to the base 50.
[0045] Optionally, see Figure 2 The first driving component 70 includes a first ball head 71, a first connecting rod 72, a second ball head 73, a second connecting rod 74, and multiple first driving parts 75. The first ball head 71 is rotatably connected to the base 50, and the first connecting rod 72 is connected to the first ball head 71. One end of the second connecting rod 74 is movably connected to the first connecting rod 72. The second connecting rod 74 can be connected to the first connecting rod 72 via a sleeve connection. The second ball head 73 is connected to the other end of the second connecting rod 74. The second ball head 73 is rotatably connected to the annealing furnace 10. Multiple first driving parts 75 are arranged around the first ball head 71. The multiple first driving parts 75 are respectively connected to the base 50 and the annealing furnace 10. Thus, by driving different positions of the annealing furnace 10 relative to the base 50 with different displacements by the multiple first driving parts 75, the annealing furnace 10 can be driven to swing in multiple directions relative to the base 50. The first ball head 71 and the second ball head 73 ensure the stability of the connection between the base 50 and the annealing furnace 10. The drive component of the first drive unit 75 can extend through the annealing furnace 10 to the base 50 to ensure safety.
[0046] The annealing furnace 10 can be swung 50 degrees relative to the base to improve the gas flow in the furnace chamber and make the heat transfer of the product more uniform.
[0047] In other embodiments, the first drive member 70 may also be configured as a drive component such as a delta manipulator.
[0048] Furthermore, in this embodiment, the support member 21 can be constructed as a telescopic structure. During the annealing process, the support member 21 can extend and connect to the base 50, and the support member 21 is sealed to the annealing furnace 10. This allows the annealing furnace 10 to move relative to the base 50 and relative to the product 200, thereby further improving the heating uniformity of the product 200. After annealing, the support member 21 can shorten and extend into the annealing furnace 10, and then be transferred to the base 50 via the transfer assembly.
[0049] In some embodiments, see Figure 1 The annealing apparatus 100 also includes a heat dissipation assembly 60. The heat dissipation assembly 60 is disposed on the outer surface of the annealing furnace 10 to cool the outer surface of the annealing furnace 10, thereby avoiding the risk of operators accidentally touching the annealing furnace 10 and being burned, and thus improving the protection of operators. The heat dissipation assembly 60 can be implemented using a water-cooled structure; for example, the water-cooled structure can be a water-cooled metal furnace shell. The water-cooled structure can be configured as water-cooling pipes, which can be disposed on the surface of the annealing furnace 10.
[0050] Among them, the refractory bricks of the annealing furnace 10 have a good heat preservation effect. When the annealing device 100 stops working and cools down naturally, it takes a long time to drop to room temperature. During this stage, the annealing furnace 10 can be cooled down quickly by operating a water-cooling structure, thereby improving production efficiency.
[0051] In some embodiments, see Figure 1 and Figure 3 The furnace wall 12 includes a first end wall 121, a second end wall 122, and a surrounding wall 123. The first end wall 121 is connected to one end of the surrounding wall 123, and the second end wall 122 is connected to the other end of the surrounding wall 123. The first end wall 121, the second end wall 122, and the surrounding wall 123 together form the furnace cavity 11. Multiple heating elements 13 are distributed across the first end wall 121, the second end wall 122, and the surrounding wall 123. This allows for heating of the product 200 from multiple directions, and each heating element 13 can have its heating temperature adjusted to further ensure the uniformity of heating radiation to the product 200.
[0052] Optionally, see Figure 3 The enclosure 123 includes a first wall 1231, a second wall 1232, a third wall 1233, and a fourth wall 1234 connected in a ring around the product. Heating elements 13 are provided within each of the first wall 1231, second wall 1232, third wall 1233, and fourth wall 1234. Thus, the enclosure 123 can heat the product 200 from all four sides, allowing the annealing furnace 10 to heat the product 200 in six directions: up, down, left, right, front, and back.
[0053] In other embodiments, the furnace wall 12 of the annealing furnace 10 may also be constructed as a spherical shape to further improve the uniformity of heating radiation to the product 200.
[0054] Optionally, temperature sensing elements are provided in the first end wall 121, the second end wall 122, the first wall body 1231, the second wall body 1232, the third wall body 1233, and the fourth wall body 1234. The temperature sensing elements can be thermocouples. The temperature sensing elements can detect the temperature of the corresponding wall or end wall to control the heating power of the corresponding heating element 13 and adjust the heating temperature.
[0055] Optionally, the heating element 13 can be a silicon carbide rod. The number of silicon carbide rods can be multiple.
[0056] Optionally, the first end wall 121, the second end wall 122, the first wall body 1231, the second wall body 1232, the third wall body 1233, and the fourth wall body 1234 can all be made of refractory bricks. The main material of the refractory bricks is alumina + silicon dioxide, and the mass percentage of alumina + silicon dioxide is greater than 99%, of which the mass percentage of alumina is greater than 65%, and the mass percentage of impurities in the refractory bricks is less than 1%.
[0057] In some embodiments, see Figure 4 The connector 23 includes a first connecting portion 231 and a second connecting portion 232. The first connecting portion 231 is connected to the transmission assembly 22, and the second connecting portion 232 is spaced apart from the first connecting portion 231 and is connected to the first connecting portion 231. The clamping assembly 30 includes a first clamping member 30a and a second clamping member 30b. The first clamping member 30a is connected to the first connecting portion 231 and extends toward the second connecting portion 232, and the second clamping member 30b is connected to the second connecting portion 232 and extends toward the first connecting portion 231.
[0058] Thus, by connecting the first clamping member 30a and the second clamping member 30b respectively through the first connecting part 231 and the second connecting part 232, the product 200 can be stably clamped on both sides of the product 200, improving the clamping stability of the product 200 and reducing the risk of the product 200 falling off during the rotation of the product 200 driven by the transmission component 22.
[0059] In some embodiments, see Figure 4 The transmission assembly 22 includes a first rotating part 221, a second rotating part 222, and a bracket 223. The first rotating part 221 connects the bracket 223 and the support member 21. The second rotating part 222 is disposed on the bracket 223 and connected to the connecting member 23. The rotation direction driven by the first rotating part 221 to the bracket 223 intersects with the rotation direction driven by the second rotating part 222 to the connecting member 23. In this way, the transmission assembly 22 can drive the product 200 to rotate in different directions, thereby improving the rotational freedom of the product 200.
[0060] In some embodiments, see Figure 4 The first clamping member 30a is movably connected to the first connecting portion 231, and the second clamping member 30b is movably connected to the second connecting portion 232. The mounting assembly 20 also includes a first locking member 24 and a second locking member 25. The first locking member 24 locks the first clamping member 30a to the first connecting portion 231, and the second locking member 25 locks the second clamping member 30b to the second connecting portion 232. This allows for easy adjustment of the axial movement of the first connecting portion 231, locking the first clamping member 30a to the first connecting portion 231, and adjusting the axial movement of the second connecting portion 232, locking the second clamping member 30b to the second connecting portion 232. This enables stable clamping and release of the product 200. The first locking member 24 and the second locking member 25 can be constructed as nuts, etc.
[0061] In some embodiments, see Figure 4 The clamping assembly 30 includes a clamping member 31. The clamping member 31 includes a clamping plate 311. The clamping plate 311 has a clamping surface P1. The clamping surface P1 is used to abut against the product 200 to clamp the product 200. The clamping surface P1 may be constructed as an arc. In other embodiments, the clamping surface P1 may be constructed as a triangle. The clamping assembly 30 is provided with an air supply channel 33. The air supply channel 33 communicates with the clamping surface P1 and is used to supply airflow between the clamping surface P1 and the product 200. The airflow may be an inert gas. During the annealing stage where the product 200 is heated or maintained at a certain temperature, the air supply channel 33 may supply a higher temperature airflow to ensure the temperature uniformity of the product 200 surface. During the annealing stage where the product 200 is cooled, the air supply channel 33 may supply a lower temperature airflow to ensure that the product 200 can cool down uniformly and avoid sudden temperature changes in the product 200.
[0062] During the annealing process, airflow is continuously supplied through the gas supply channel 33, and the airflow temperature is approximately the same as that of the product 200. The annealing apparatus 100 also includes a return pipeline. One end of the return pipeline is connected to the gas supply channel, and the other end is connected to the cavity of the annealing furnace 10. An air pump and a heating system are installed in the return pipeline. The air pump drives the airflow. The heating system is used to heat the airflow. A water-cooled pipe may also be used to cover the gas supply channel 33.
[0063] Optionally, the air delivery channel 33 includes a first flow section 331, a second flow section 332, and a third flow section 333. The first flow section 331 is located on the transmission assembly 22 and is connected to the outside of the annealing furnace 10 via the support member 21. The second flow section 332 is located on the clamping plate 311. The second flow section 332 is constructed as a rectangular block space. The second flow section 332 is connected to the first flow section 331. There are multiple third flow sections 333. The multiple third flow sections 333 are spaced apart on the clamping plate 311. The multiple third flow sections 333 are respectively connected to the second flow section 332 and the clamping surface P1, so as to uniformly deliver the airflow to the surface of the product 200.
[0064] In some embodiments, see Figure 5 The clamping member 31 also includes a plurality of clamping protrusions 312, which are arrayed and protrude from the clamping surface P1. The clamping protrusions 312 abut against the product 200, and the clamping surface P1 is spaced apart from the product 200. An airflow channel 32 is formed between the clamping protrusions 312, allowing gas from the furnace cavity 11 to contact the surface of the product 200. Thus, the airflow channel 32 can reduce the contact area between the clamping member 31 and the product 200, improve the heating uniformity of the product 200, and enhance the annealing performance of the product 200.
[0065] Optionally, the clamping protrusion 312 is a high-temperature resistant flexible structure, capable of withstanding temperatures above 1300℃, to operate for extended periods in the annealing furnace 10 while also protecting the surface of the product 200. For example, the material of the clamping protrusion 312 can be various materials such as FR-SACA aerogel, zirconia-alumina nanofiber aerogel, or flexible zirconia / zirconia / zirconia boride ceramic nanofiber felt.
[0066] Optionally, see Figure 5 Multiple clamping protrusions 312 are arrayed, and multiple third flow sections 333 are arrayed, with a clamping protrusion 312 located in the center of the rectangular space enclosed by four third flow sections 333. This further optimizes the airflow distribution. Gas discharged from the third flow section 333 can quickly enter the airflow channel 32 and flow along it, further improving the heating uniformity of the product 200 and enhancing its annealing performance.
[0067] In some embodiments, see Figure 6One end of the connector 23 is provided with an adapter block 235. Multiple clamping plates 311 are present. These clamping plates 311 are rotatably connected to the adapter block 235. An elastic member is provided between the clamping plates 311 and the connector 23. The elastic member is used to push the clamping plates 311 against the product 200. Thus, the product 200 can be more stably and securely fixed using multiple clamping plates 311. Furthermore, the multiple clamping plates 311 can be configured to be arc-shaped, thereby conforming to the outer peripheral surface of the product 200.
[0068] In some embodiments, see Figure 7 The clamping member 31 also includes a mounting portion 34 and multiple elastic portions 35; there are multiple clamping plates 311, all of which are movably connected to the mounting portion 34. Each elastic portion 35 elastically abuts against the mounting portion 34 and the corresponding clamping plate 311, thereby driving the clamping plate 311 to abut against the product 200. In this way, the elastic portion 35 can push the clamping plate 311 to stably hold the product 200. Furthermore, the mounting portion 34 can limit the direction of elastic deformation of the elastic portion 35 to ensure that the clamping plate 311 will not scratch the product 200.
[0069] Optionally, there may be multiple mounting portions 34. Each elastic portion 35 is fitted onto one mounting portion 34. There may be multiple clamping plates 311. Each clamping plate 311 is connected to one mounting portion 34.
[0070] In some embodiments, see Figure 7 The first connecting portion 231 includes a first plate 231a. The second connecting portion 232 includes a second plate 232a. The first plate 231a is connected to the support member 21. The second plate 232a is located on the side of the first plate 231a opposite to the support member 21. The second plate 232a and the first plate 231a are spaced apart. The first plate 231a and the second plate 232a are connected by a connecting post 233. The first plate 231a is connected to a clamping member 31. The second plate 232a is connected to another clamping member 31. Each clamping member 31 includes multiple mounting portions 34, multiple elastic portions 35, and multiple clamping plates 311. The multiple clamping plates 311 are distributed circumferentially along the product 200.
[0071] In this way, the product 200 can be evenly fixed on both sides by multiple clamping plates 311. Furthermore, when the size of the product 200 changes, the mounting part 34 can be extended or retracted to meet the fixing requirements of different products 200, thereby improving the versatility of the annealing device 100.
[0072] In some embodiments, the first plate 231a is provided with a plurality of clamping members 31. The plurality of clamping members 31 are spaced apart along the length direction of the product 200. The second plate 232a is provided with a plurality of clamping members 31. The plurality of clamping members 31 are spaced apart along the length direction of the product 200. In this way, products 200 of different lengths can be stably clamped, improving the versatility of the annealing device 100 and improving the support stability of the product 200.
[0073] Optionally, the first plate 231a has a first groove 2341 extending along the length of the product 200. The second plate 232a has a second groove 2342 extending along the length of the product 200. The mounting part 34 includes a connecting post 233 and a slider 342. The elastic part 35 is fitted with the connecting post 233. The two ends of the connecting post 233 are connected to the slider 342 and the clamping plate 311. The slider 342 slides in contact with either the first groove 2341 or the second groove 2342. Thus, by moving the slider 342, the position of the clamping plate 311 can be adjusted.
[0074] In addition, the slider 342 can slide along the length of the product 200 and move along the width of the product 200 to adjust the position of the clamping plate 311 against the circumferential surface of the product 200.
[0075] In some embodiments, see Figure 8 The mounting assembly 20 also includes a second drive member 26. The second drive member 26 connects the support member 21 and the first connecting portion 231. The second drive member 26 is used to drive the first connecting portion 231 to move relative to the support member 21.
[0076] Optionally, the second driving member 26 includes a third ball head 261, a third connecting rod 262, a fourth ball head 263, a fourth connecting rod 264, and a plurality of second driving parts 265. The third ball head 261 is rotatably connected to the support member 21, and the third connecting rod 262 is connected to the third ball head 261. One end of the fourth connecting rod 264 is movably connected to the third connecting rod 262. The fourth connecting rod 264 can be connected to the third connecting rod 262 by a sleeve connection. The fourth ball head 263 is connected to the other end of the fourth connecting rod 264. The fourth ball head 263 is rotatably connected to the annealing furnace 10. The plurality of second driving parts 265 are arranged around the third ball head 261. The plurality of second driving parts 265 are respectively connected to the base 50 and the annealing furnace 10. In this way, by driving different positions of the annealing furnace 10 relative to the base 50 with different displacements by the plurality of second driving parts 265, the annealing furnace 10 can be driven to swing in multiple directions relative to the base 50. The third ball head 261 and the fourth ball head 263 ensure the stability of the connection between the base 50 and the annealing furnace 10. The driving component of the second driving part 265 can extend through the annealing furnace 10 to the base 50 to ensure safety.
[0077] In other embodiments, the second drive member 26 may also be configured as a drive member such as a delta manipulator.
[0078] In some embodiments, see Figure 9 and Figure 10 The first connecting part 231 includes a bearing 231b. The second connecting part 232 includes a mounting cylinder 232b. The mounting cylinder 232b is rotatably mounted on the bearing 231b. The clamping assembly 30 is connected to the inner surface P2 of the mounting cylinder 232b. Thus, by rotating the clamping assembly 30 through the mounting cylinder 232b, the product 200 can be rotated around the axis of the mounting cylinder 232b. Combined with the rotational engagement between the support member 21 and the transmission assembly 22, a high degree of freedom of rotation of the product 200 can be achieved. The specific structure of the clamping member 31 can be referred to the structure described above, and will not be repeated here.
[0079] Optionally, the number of bearings 231b is two. The two bearings 231b are spaced apart. The two ends of the mounting sleeve 232b are rotatably fitted to the bearings 231b. This improves the overall rotational stability.
[0080] In some embodiments, a mounting groove 236 is formed on the inner surface P2 of the mounting cylinder 232b. The mounting groove 236 extends along the length and circumference of the mounting cylinder 232b to provide ample adjustment space. The slider 342 of the mounting part 34 is slidably engaged within the mounting groove 236. Thus, the clamping member 31 can move circumferentially along the mounting cylinder 232b and along the length of the mounting cylinder 232b, significantly improving the overall versatility of the annealing apparatus 100.
[0081] Optionally, see Figure 10 The number of clamping members 31 is multiple, and the multiple clamping members 31 are arranged in an array at intervals along the length and circumference of the mounting cylinder 232b.
[0082] In some embodiments, see Figure 10 and Figure 11 The clamping member 31 includes a clamping plate 311 and a clamping protrusion 312. The clamping assembly 30 is provided with an air supply channel 33. Its specific structure can be referred to the previous description and will not be repeated here.
[0083] See Figure 12 This application also provides an annealing method, which is applied to the annealing apparatus 100 of any of the foregoing embodiments. The annealing method includes: The product 200 is driven to rotate relative to the annealing furnace 10 by the transmission component 22; Increase the temperature of product 200 to a first preset temperature, which is lower than the annealing point temperature of product 200; Maintain the product temperature at 200°C at the first preset temperature for a first preset duration, the maximum value of the first preset duration being no less than 80 hours; The temperature of product 200 is reduced to a second preset temperature, which is lower than the strain point temperature of product 200. Lower the product temperature by 200°C to room temperature.
[0084] According to the annealing method of this embodiment, the performance of quartz glass after annealing can be optimized by using the annealing apparatus 100 of the aforementioned embodiment. During the annealing process, by maintaining the product 200 (such as quartz glass) at a first preset time, and by limiting the maximum value of the first preset time to not less than 80 hours, the quartz glass can be ensured to achieve a stable homogenization effect over a long period of time. Furthermore, throughout the annealing process, by driving the product 200 to rotate relative to the annealing furnace 10 through the transmission component 22, the heating uniformity of the product 200 can be further improved. Combined with maintaining the product 200 at the first preset temperature for a first preset time, the homogenization effect of the quartz glass can be further improved, the internal structure of the quartz glass can be changed, and the internal stress of the quartz glass can be eliminated, thereby significantly reducing the internal stress of the quartz glass.
[0085] Optionally, the annealing apparatus 100 also includes a thermometer. The thermometer is used to detect the temperature of the product 200. The thermometer can be configured as a short-wave infrared thermometer, which can achieve accurate and efficient detection of the product temperature and identify minute changes in the product temperature.
[0086] In some embodiments, during the step of raising the temperature of product 200 to a first preset temperature, the heating rate of product 200 is between 100°C / h and 200°C / h. Specifically, the heating rate can be any one of 100°C / h, 110°C / h, 120°C / h, 130°C / h, 140°C / h, 150°C / h, 160°C / h, 170°C / h, 180°C / h, 190°C / h, or 200°C / h.
[0087] In some embodiments, during the step of reducing the temperature of product 200, the cooling rate of product 200 is between 1°C / h and 5°C / h. For example, the cooling rate can be any one of 1°C / h, 2°C / h, 3°C / h, 4°C / h, or 5°C / h.
[0088] In some embodiments, during the process of the transmission assembly 22 driving the product 200 to rotate relative to the annealing furnace 10, the rotational speed of the first rotating part 221 is between 0.5 r / min and 5 r / min. The rotational speed of the second rotating part is between 0.5 r / min and 5 r / min.
[0089] Optionally, the rotation speed of the first rotating part 221 and the second rotating part 222 can be any one of 0.5r / min, 1r / min, 1.5r / min, 2r / min, 2.5r / min, 3r / min, 3.5r / min, 4r / min, 4.5r / min or 5r / min.
[0090] Optionally, the rotation speed of the first rotating part 221 and the second rotating part 222 is preferably between 2 r / min and 5 r / min.
[0091] Optionally, the first rotating part 221 and the second rotating part 222 may be driven by a rotary motor, and the rotary motor can control the first rotating part 221 and the second rotating part 222 to rotate to different rotation speeds.
[0092] In some embodiments, the first preset temperature ranges from 1130°C to 1180°C. Specifically, the first preset temperature can be any one of 1130°C, 1140°C, 1150°C, 1160°C, 1170°C, and 1180°C.
[0093] The preferred range for the first preset temperature is between 1150°C and 1180°C.
[0094] In some embodiments, the first preset duration ranges from 10h to 80h. Specifically, the first preset duration can be any one of 10h, 20h, 30h, 40h, 50h, 60h, 70h, or 80h.
[0095] The preferred range for the first preset duration is between 30 hours and 80 hours.
[0096] In some embodiments, the second preset temperature ranges from 500°C to 1000°C. Specifically, the second preset temperature can be any one of 500°C, 550°C, 600°C, 650°C, 700°C, 750°C, 800°C, 850°C, 900°C, 950°C, and 1000°C.
[0097] The parameters of the product 200 obtained by the annealing methods of three embodiments are provided below.
[0098] Example 1 For circular synthetic quartz glass, the aforementioned clamping assembly 30 is used to fix the material. The clamping member 31 of the clamping assembly 30 is arc-shaped. The rotation of the first rotating part 221 and the second rotating part 222 is controlled, and the rotation speed of the first rotating part 221 and the second rotating part 222 is set to 4 r / min. Synthetic quartz glass was heated to 1180℃ at a heating rate of 150℃ / h, held at that temperature for 300h, and then cooled to 500℃ at a cooling rate of 1℃ / h. The synthetic quartz glass sample in Example 1 was tested using a stress birefringence apparatus, and the material stress (@632.8nm) was ≤0.3nm / cm.
[0099] Example 2 For square synthetic quartz glass, the aforementioned clamping assembly 30 is used to fix the material. The clamping member 31 of the clamping assembly 30 is right-angled. The first rotating part 221 and the second rotating part 222 are controlled to rotate, and the rotation speed of the first rotating part 221 and the second rotating part 222 is set to 3 r / min. Synthetic quartz glass was heated to 1165℃ at a heating rate of 150℃ / h, held at that temperature for 50h, and then cooled to 500℃ at a cooling rate of 3℃ / h. The synthetic quartz glass sample in Example 2 was tested using a stress birefringence apparatus, and the material stress (@632.8nm) was ≤0.5nm / cm.
[0100] Example 3 The synthetic quartz glass is fixed using the aforementioned clamping assembly 30, the first rotating part 221 and the second rotating part 222 are controlled to rotate, and the rotation speed of the first rotating part 221 and the second rotating part 222 is set to 2 r / min; Synthetic quartz glass was heated to 1150℃ at a heating rate of 150℃ / h, held at that temperature for 80h, and then cooled to 600℃ at a cooling rate of 5℃ / h. The synthetic quartz glass sample in Example 3 was tested using a stress birefringence apparatus, and the material stress (@632.8nm) was ≤0.5nm / cm.
[0101] In summary, the synthetic quartz glass treated by the annealing apparatus 100 and annealing method of this embodiment has low stress, with a stress (@632.8nm) ≤0.5nm / cm.
[0102] The above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit it. Although this application has been described in detail with reference to the above preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions to the technical solutions of this application should not depart from the spirit and scope of the technical solutions of this application.
Claims
1. An annealing apparatus for annealing products, characterized in that, The annealing apparatus includes: An annealing furnace, the annealing furnace defining a furnace cavity, the annealing furnace including a furnace wall and a heating element, the heating element being disposed on the furnace wall and used to heat the furnace cavity; The mounting assembly is disposed in the furnace cavity. The mounting assembly includes a support member, a transmission assembly, and a connector. The connector is spaced apart from the support member. The connector is movably connected to the support member through the transmission assembly. The connector is configured to rotate relative to the annealing furnace under the drive of the transmission assembly. A clamping assembly connected to the connector, the clamping assembly being used to clamp the product.
2. The annealing apparatus according to claim 1, characterized in that: The clamping assembly includes a clamping member, which includes a clamping plate and a plurality of clamping protrusions. The clamping plate has a clamping surface, and the plurality of clamping protrusions are arrayed and protruded from the clamping surface. The plurality of clamping protrusions are used to abut against the product. The clamping surface is spaced apart from the product, and an airflow channel is formed between the plurality of clamping protrusions. The airflow channel is used to allow the gas in the furnace cavity to contact the surface of the product.
3. The annealing apparatus according to claim 2, characterized in that: The clamping component also includes a mounting part and multiple elastic parts; The number of clamping plates is multiple, and each of the clamping plates is movably connected to the mounting part. Each elastic part elastically abuts against the mounting part and the corresponding clamping plate, so as to drive the clamping plate to abut against the product.
4. The annealing apparatus according to claim 1, characterized in that: The connector includes a first connecting portion and a second connecting portion. The first connecting portion is connected to the transmission assembly. The second connecting portion is spaced apart from the first connecting portion and is connected to the first connecting portion. The clamping assembly includes a first clamping member and a second clamping member. The first clamping member is connected to the first connecting portion and extends toward the second connecting portion. The second clamping member is connected to the second connecting portion and extends toward the first connecting portion.
5. The annealing apparatus according to claim 4, characterized in that: The first clamping member is movably connected to the first connecting portion, and the second clamping member is movably connected to the second connecting portion; The mounting assembly further includes a first locking member and a second locking member, wherein the first locking member is used to lock the first clamping member to the first connecting portion, and the second locking member is used to lock the second clamping member to the second connecting portion.
6. The annealing apparatus according to claim 1, characterized in that: The furnace wall includes a first end wall, a second end wall, and a surrounding wall. The first end wall is connected to one end of the surrounding wall, and the second end wall is connected to the other end of the surrounding wall. The first end wall, the second end wall, and the surrounding wall together form the furnace cavity. There are multiple heating elements, which are distributed on the first end wall, the second end wall, and the surrounding wall.
7. The annealing apparatus according to claim 1, characterized in that: The annealing apparatus further includes a transfer assembly, which is kinetically connected to the mounting assembly and is used to move the mounting assembly into or out of the furnace cavity.
8. The annealing apparatus according to claim 1, characterized in that: The annealing apparatus further includes a base, the annealing furnace is movably connected to the base, one end of the mounting assembly passes through the annealing furnace and is connected to the base, the mounting assembly is sealed to the annealing furnace, and the clamping assembly is connected to one end of the mounting assembly located inside the furnace cavity.
9. The annealing apparatus according to claim 1, characterized in that, The annealing apparatus further includes: The annealing furnace is located on the base; A transmission assembly, a portion of which is located on the base and another portion of which extends into the furnace cavity and is connected to the support member, is used to move the mounting assembly into or out of the furnace cavity.
10. An annealing method, characterized in that, The annealing method is applied to the annealing apparatus as described in any one of claims 1 to 9, the annealing method comprising: The product is driven to rotate relative to the annealing furnace by the transmission assembly; Increase the temperature of the product to a first preset temperature, which is lower than the annealing point temperature of the product. The temperature of the product is maintained at the first preset temperature for a first preset duration, the maximum value of the first preset duration being not less than 80 hours; The temperature of the product is reduced to a second preset temperature, which is lower than the strain point temperature of the product. Lower the temperature of the product to room temperature.