ALD deposition equipment based on pre-ozone process

Abstract

The invention discloses ALD deposition equipment based on a pre-ozone process, the ALD deposition equipment comprises an ALD machine table main body and a plasma deposition furnace, the plasma deposition furnace comprises a plasma deposition furnace gas connector, an ozone conveying mechanism and a supply device are connected to the end face of one side of the ALD machine table main body, and the ozone conveying mechanism is connected to the end face of the other side of the ALD machine table main body. The ozone conveying mechanism comprises an ozone generator, a hydrocarbon filter and an ozone conveying header pipe, the hydrocarbon filter is located on the end face of one side of the ozone generator, and a hydrocarbon residue treatment mechanism is arranged on the end face of one side of the ozone conveying header pipe. According to the invention, a multi-layer protection mechanism is adopted to filter the ozone generator before and after making ozone adsorption raw materials, so that the ozone output gas is prevented from being polluted by the gas, the ozone generation efficiency is improved, ammonium nitrate formed in the ozone output pipeline is automatically and regularly cleaned, and the problem of unstable supply caused by blockage or pollution is completely eradicated.

Description

Technical Field

[0001] This invention belongs to the field of solar cell manufacturing technology, specifically relating to ALD deposition equipment based on a pre-ozone process. Background Technology

[0002] ALD (Atomic Layer Deposition) equipment is a core piece of equipment for preparing thin films with atomic-level precision, based on the principle of atomic-layer successive saturation reactions. It is primarily used for depositing key film layers such as passivation layers and tunneling layers in high-efficiency batteries, significantly improving battery conversion efficiency and long-term reliability. It has become one of the standard core pieces of equipment in mainstream and emerging battery production lines such as PERC, TOPCon, and HJT. Furthermore, some ALD deposition equipment, when equipped with ozone generators, can achieve even better film preparation, improved battery performance, and increased mass production efficiency and yield.

[0003] However, the following problems will be encountered during the production process:

[0004] 1. During the operation of the ozone generator, the purity of the raw gas (high-purity oxygen or dry air) is insufficient (containing oil, water, and particles). Impurities in the raw gas (i.e. hydrocarbons) will participate in the reaction in the discharge tube, generating byproducts such as nitrogen oxides and acids, which will corrode internal components, pollute the ozone output gas, and significantly reduce the ozone generation efficiency.

[0005] 2. Under the influence of high concentrations of ozone and discharge or ultraviolet light (from certain light sources) inside the ozone generator, a series of complex reactions occur: N2 + O3 + H2O → NOx (nitrogen oxides) → HNO3 / HNO2 (nitric acid / nitrous acid). These acids react with trace amounts of ammonia (NH3, from the environment or certain materials) to produce ammonium nitrate (NH4NO3) and other salts, which contaminate the pipelines. These salts repeatedly crystallize and dissolve under temperature changes, exacerbating blockages and severely affecting normal production.

[0006] Therefore, in order to address the aforementioned technical issues, it is necessary to provide ALD deposition equipment based on a pre-ozone process.

[0007] The information disclosed in this background section is intended only to enhance the understanding of the overall background of the invention and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Summary of the Invention

[0008] The purpose of this invention is to provide an ALD deposition apparatus based on a pre-ozone process, which can solve the above-mentioned problems.

[0009] To achieve the above objectives, a specific embodiment of the present invention provides the following technical solution:

[0010] An ALD deposition apparatus based on a pre-ozone process includes an ALD machine body and a plasma deposition furnace. The plasma deposition furnace includes a plasma deposition furnace gas connection port. An ozone delivery mechanism and a supply device are connected to one end face of the ALD machine body. The ozone delivery mechanism includes an ozone generator, a hydrocarbon filter, and an ozone delivery main pipe. The hydrocarbon filter is located on one end face of the ozone generator. A hydrocarbon residue treatment mechanism is provided on one end face of the ozone delivery main pipe. The ozone delivery main pipe includes a first ozone delivery pipe and a second ozone delivery pipe, which are respectively connected to the plasma deposition furnace gas connection port. A pipe self-cleaning device is connected to one end face of the ozone delivery main pipe. The pipe self-cleaning device includes an immersion mechanism, a rinsing mechanism, a purging mechanism, a detection mechanism, and a drying mechanism. The immersion mechanism, purging mechanism, and rinsing mechanism are respectively connected to the first and second ozone delivery pipes at their respective ends.

[0011] In one or more embodiments of the present invention, the hydrocarbon residue treatment mechanism includes an infrared gas sensor, a vacuum pump, a hydrocarbon impurity storage tank, and an impurity recovery pipe. The infrared gas sensor is disposed between the first ozone delivery pipe and the second ozone delivery pipe and the ozone generator. The vacuum pump is disposed on one end face of the ozone generator. The vacuum pump is connected to one end face of the hydrocarbon impurity storage tank, and the opposite end face of the other side is connected to the impurity recovery pipe. A first solenoid valve is disposed on both ends face of the first ozone delivery pipe and the second ozone delivery pipe.

[0012] In one or more embodiments of the present invention, the immersion mechanism includes a pair of immersion delivery branches, a waste liquid storage tank, and a waste liquid recovery pipe. The pair of immersion delivery branches are respectively connected to the side end face of the first ozone delivery pipe or the second ozone delivery pipe near the gas connection port of the plasma deposition furnace. The ALD machine body is fixedly connected to a fixed base on the side end face of the gas connection port of the plasma deposition furnace. A cleaning supply box is fixedly connected to the fixed base. The cleaning supply box is respectively provided with a rinsing liquid storage tank, an immersion liquid storage tank, and a nitrogen storage tank. The immersion delivery branches are connected to the rinsing liquid storage tank. The rinsing liquid storage tank is connected to a supply device. The waste liquid storage tank is located on one side end face of the ozone generator. A waste liquid recovery pipe is connected to the waste liquid storage tank. The waste liquid recovery pipe is respectively connected to the first ozone delivery pipe and the second ozone delivery pipe.

[0013] In one or more embodiments of the present invention, the purging mechanism includes a waste recovery box, a purging waste recovery pipe, a blower, a first purging branch pipe, and a second purging branch pipe. The first purging branch pipe and the second purging branch pipe are respectively connected to a first ozone delivery pipe and a second ozone delivery pipe located on one end face near the gas connection port of the plasma deposition furnace, and the other end face is connected to the air outlet pipe of the blower. One end face of the blower is connected to a nitrogen storage tank. A second solenoid valve is respectively provided on the first purging branch pipe and the second purging branch pipe. The waste recovery box is located on one end face of the ozone generator. The waste recovery box is connected to one side of the purging waste recovery pipe. The purging waste recovery pipe is connected to the first ozone delivery pipe or the second ozone delivery pipe through a pair of purging recovery branch pipes.

[0014] In one or more embodiments of the present invention, the rinsing mechanism includes a pair of rinsing delivery branches, which are respectively connected to a first ozone delivery pipe and a second ozone delivery pipe located on one end face near the gas connection port of the plasma deposition furnace, and the opposite end face of the other side is connected to a rinsing liquid storage tank. The supply device includes a first supply main pipe and a storage supply system. The first supply main pipe is connected to a cleaning supply box. The storage supply system is provided with a rinsing liquid storage tank, a soaking liquid storage tank, and a nitrogen storage tank. The rinsing liquid storage tank, the soaking liquid storage tank, and the nitrogen storage tank are respectively connected to the rinsing liquid storage tank, the soaking liquid storage tank, and the nitrogen storage tank through delivery branches. The rinsing liquid includes ultrapure water, and the soaking liquid includes either ultrapure water or dilute nitric acid.

[0015] In one or more embodiments of the present invention, the drying mechanism includes a dryer and a drying gas delivery pipe. The dryer is disposed on one side end face of an ozone generator. The drying gas delivery pipe is connected above the dryer. The drying gas delivery pipe is connected to a first ozone delivery pipe and a second ozone delivery pipe. The impurity recovery pipe, the waste liquid recovery pipe, and the drying gas delivery pipe are each connected to a first recovery branch pipe and a second recovery branch pipe, respectively. The first recovery branch pipe and the second recovery branch pipe are respectively connected to the first ozone delivery pipe or the second ozone delivery pipe. The purging waste recovery pipe is connected to a pair of purging recovery branch pipes. The pair of purging recovery branch pipes are respectively connected to the first ozone delivery pipe or the second ozone delivery pipe. A fourth solenoid valve is provided between the impurity recovery pipe, the waste liquid recovery pipe, the drying gas delivery pipe, and the purging waste recovery pipe and the first recovery branch pipe, the second recovery branch pipe, and the pair of purging recovery branch pipes.

[0016] In one or more embodiments of the present invention, the detection mechanism includes a pH sensor and a water immersion sensor. The pH sensor is disposed on the end face of the first ozone delivery pipe and the second ozone delivery pipe near the ozone generator, and the water immersion sensor is disposed on multiple end faces inside the first and second ozone delivery pipes.

[0017] In one or more embodiments of the present invention, an auxiliary cleaning mechanism is provided on one end face of the purging and recovery branch pipe. The auxiliary cleaning mechanism includes a housing, a base, a sealing assembly, and a pipe tapping mechanism. The housing is fixedly connected to the bottom of the base, and the base is fixedly connected to the top end face of the ozone generator.

[0018] In one or more embodiments of the present invention, the sealing assembly includes a second automatic lifting device and a sealing plate. A cleaning groove is provided on the outer end face of each pair of purge recovery branch pipes. A matching second cleaning groove is provided on the end face of the outer shell that fits the cleaning groove. The sealing plate matches the second cleaning groove. The bottom of the sealing plate is connected to the second automatic lifting device. The second automatic lifting device is fixedly connected to one end face of the outer shell.

[0019] In one or more embodiments of the present invention, the pipe tapping mechanism includes a waste storage box, a first automatic lifting device, a drive motor, a tapping rod, a second blower, and a screening plate. The screening plate is fixedly connected to one side of the inner wall of the outer casing. The screening plate is provided with multiple drop holes. The first automatic lifting device is located on the upper side of the screening plate. One side of the first automatic lifting device is connected to the drive motor, and the other side of the drive motor is connected to the tapping rod. The tapping rod matches the inner wall of the cleaning tank. The waste storage box is located on the lower side of the screening plate. The second blower is located on the top side of the outer casing. The outer casing is provided with multiple nozzles on the upper side of the tapping rod. The multiple nozzles are connected to the second blower through connecting pipes.

[0020] Compared with the prior art, the ALD deposition equipment based on the pre-ozone process of the present invention has the following advantages.

[0021] 1) A multi-layer protection mechanism is adopted to filter the ozone generator before and after the production of ozone adsorption raw materials to prevent contamination of the ozone output gas and improve ozone generation efficiency.

[0022] 2) The ammonium nitrate formed inside the ozone output pipeline is automatically and periodically cleaned, which fundamentally eliminates the problem of unstable supply caused by blockage or pollution, ensures the quality of output gas, and reduces the number of maintenance times by eliminating the need for multiple manual disassembly and cleaning. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the ALD deposition equipment based on the pre-ozone process in Embodiment 1 of the present invention;

[0025] Figure 2 This is a schematic diagram of the ALD deposition equipment based on the pre-ozone process in Embodiment 1 of the present invention. Figure 2 ;

[0026] Figure 3 for Figure 2 A schematic diagram of the structure at point A;

[0027] Figure 4 This is a partial end-face cross-sectional view of an ALD deposition apparatus based on a pre-ozonation process.

[0028] Figure 5 for Figure 4 A schematic diagram of the structure at point B;

[0029] Figure 6 This is a schematic diagram of the ALD deposition equipment based on the pre-ozone process in Embodiment 2 of the present invention;

[0030] Figure 7 A cross-sectional view of the auxiliary cleaning mechanism 7;

[0031] Figure 8 A schematic diagram showing the usage status of the auxiliary cleaning mechanism 7.

[0032] Explanation of key figure labels:

[0033] 1-ALD machine body, 2-supply device, 201-first supply main pipe, 202-storage supply system, 3-ozone delivery mechanism, 301-ozone generator, 302-hydrocarbon filter, 303-ozone delivery main pipe, 3031-first ozone delivery pipe, 3032-second ozone delivery pipe, 3033-first solenoid valve, 304-cleaning supply box, 305-blower, 3051-outlet pipe, 306-first purging branch pipe, 307-second purging branch pipe, 308-second solenoid valve, 4-deposition raw material delivery device, 5-raw material delivery pipe, 6-pipeline self-cleaning device, 601-rinsing delivery branch pipe, 602-soaking delivery branch pipe, 603-third solenoid valve, 604-hydrocarbon impurity storage box, 604 1-Impurity recovery pipe, 605-Waste liquid storage tank, 6051-Waste liquid recovery pipe, 606-Dryer, 6061-Drying gas conveying pipe, 607-Waste material recovery box, 6071-Purge waste material recovery pipe, 608-First recovery branch pipe, 6081-Second recovery branch pipe, 609-Fourth solenoid valve, 610-Purge recovery branch pipe, 7-Auxiliary cleaning mechanism, 701-Outer shell, 702-Waste material storage box, 703-First automatic lifting device, 704-Base, 705-Drive motor, 706-Slapping rod, 707-Second blower, 708-Sealing assembly, 7081-Second automatic lifting device, 7082-Sealing plate, 709-Screening plate, 8-Plasma deposition furnace gas connection port, 9-Fixed seat. Detailed Implementation

[0034] To enable those skilled in the art to better understand the technical solutions in this disclosure, the technical solutions in the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this disclosure, and not all embodiments. Based on the embodiments in this disclosure, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of this disclosure.

[0035] Example 1

[0036] like Figure 1As shown, an ALD deposition apparatus based on a pre-ozone process in one embodiment of the present invention includes an ALD machine body 1, a deposition raw material conveying device 4, a raw material conveying pipe 5, and a plasma deposition furnace. The plasma deposition furnace includes a plasma deposition furnace gas connection port 8 and is located on the inner end face of the ALD machine body 1. The deposition raw material conveying device 4 is connected to the raw material conveying pipe 5, and the raw material conveying pipe 5 is connected to the plasma deposition furnace gas connection port 8 inside the ALD machine body 1. An ozone conveying mechanism 3 and a supply device 2 are connected to one end face of the ALD machine body 1. The ozone conveying mechanism 3 includes an ozone generator 301, a hydrocarbon filter 302, and an ozone conveying main pipe 303. The ozone generator 301 is connected to the ozone conveying main pipe 303, and ozone is conveyed to the ALD machine body 1 through the ozone conveying main pipe 303 to prepare the deposition film.

[0037] The hydrocarbon filter 302 is located on one side of the ozone generator 301. A hydrocarbon residue treatment mechanism is provided on one side of the ozone delivery main pipe 303. A pipe self-cleaning device 6 is connected to one side of the ozone delivery main pipe 303. The hydrocarbon filter 302 is located on one side of the ozone generator 301. That is, the ozone generator 301 includes an ozone generating unit. The hydrocarbon filter 302 is installed at the air inlet of the ozone generating unit. The hydrocarbon filter 302 filters the raw material before it is absorbed. The hydrocarbon filter 302 filters out hydrocarbon impurities in the raw material, thus preventing the occurrence of hydrocarbon impurities at the source.

[0038] The ozone delivery main 303 includes a first ozone delivery pipe 3031 and a second ozone delivery pipe 3032. The first ozone delivery pipe 3031 and the second ozone delivery pipe 3032 are respectively connected to the gas connection port 8 of the plasma deposition furnace. A first solenoid valve 3033 is provided on both ends of the first ozone delivery pipe 3031 and the second ozone delivery pipe 3032. That is, a first solenoid valve 3033 is provided on the end face of the first ozone delivery pipe 3031 and the second ozone delivery pipe 3032 near the gas connection port 8 of the plasma deposition furnace or near the ozone generator 301. This allows ozone to be supplied to the gas connection port 8 of the plasma deposition furnace by either the first ozone delivery pipe 3031 or the second ozone delivery pipe 3032 as needed. Even if one of the first ozone delivery pipe 3031 and the second ozone delivery pipe 3032 is damaged or needs to be cleaned, the other can be selected to deliver ozone, ensuring continuous operation and improving work efficiency.

[0039] The hydrocarbon residue treatment mechanism includes an infrared gas sensor, a vacuum pump, a hydrocarbon impurity storage tank 604, and an impurity recovery pipe 6041. An infrared gas sensor is installed between the first ozone delivery pipe 3031 and the second ozone delivery pipe 3032 and the ozone generator 301. Specifically, an infrared gas sensor is installed on the inner end face of the first ozone delivery pipe 3031 and the second ozone delivery pipe 3032 near the ozone generator 301 to detect whether any hydrocarbon impurities have leaked into the first ozone delivery pipe 3031 or the second ozone delivery pipe 3032 while the ozone is being transported inside the first ozone delivery pipe 3031 and the second ozone delivery pipe 3032.

[0040] A vacuum pump is installed on one end face of the ozone generator 301. One end face of the vacuum pump is connected to a hydrocarbon impurity storage tank 604, and the opposite end face is connected to an impurity recovery pipe 6041. The impurity recovery pipe 6041 is connected to a first ozone delivery pipe 3031 or a second ozone delivery pipe 3032 via a first recovery branch pipe 608 and a second recovery branch pipe 6081, respectively. Specifically, when residual hydrocarbon impurities enter the first ozone delivery pipe 3031 or the second ozone delivery pipe 3032, a pair of first solenoid valves 3033 close the current channel, selecting another first ozone delivery pipe 3031 or the second ozone delivery pipe 3032 without hydrocarbon impurities to deliver ozone. Simultaneously, the vacuum pump starts, adsorbing hydrocarbon impurities through the inlet pipe connected to the impurity recovery pipe 6041, and then delivering the adsorbed impurities to the hydrocarbon impurity storage tank 604 for storage via the gas delivery pipe. Once the hydrocarbon impurities have been adsorbed, the current pipeline can be reopened for subsequent use as needed, ensuring normal ozone delivery.

[0041] like Figures 2-5As shown, the pipeline self-cleaning device 6 includes a soaking mechanism, a rinsing mechanism, a purging mechanism, a detection mechanism, and a drying mechanism. The soaking mechanism, purging mechanism, and rinsing mechanism are all connected to the first and second ozone delivery pipes 3031 and 3032, respectively, on their respective end faces. Specifically, they connect the first ozone delivery pipe 3031 and the second ozone delivery pipe 3032 near the plasma deposition furnace gas connection port 8 or near the ozone generator 301. When ammonium nitrate is generated in the first ozone delivery pipe 3031 or the second ozone delivery pipe 3032, and cleaning is required, it can be performed through the soaking mechanism, rinsing mechanism, purging mechanism, detection mechanism, and drying mechanism. The specific process is as follows: First, the soaking mechanism is turned on, and the soaking solution is delivered into the first ozone delivery pipe 3031 or the second ozone delivery pipe 3032. After the soaking solution fills the first ozone delivery pipe 3031 or the second ozone delivery pipe 3032, the delivery is stopped, allowing the soaking solution to soak inside for 3-6 hours. Then, the flushing mechanism is turned on to flush the soaking solution inside the pipe. The flushing is repeated until the flushing solution is neutral. After flushing, the drying mechanism is turned on to dry the pipe. It should be noted that the drying temperature is set at 100-150°C and the drying time is set at 15-24 hours to ensure that the inside of the pipe is thoroughly dry.

[0042] Of course, during routine operations, a purging mechanism can be used frequently to purge the powder inside the pipeline, blowing out the loose powder, cleaning the pipeline, and preventing detached ammonium nitrate crystals or particles from entering the ALD reaction chamber with the ozone flow, becoming a deadly source of particulate pollution.

[0043] The soaking mechanism includes a pair of soaking delivery branch pipes 602, a waste liquid storage tank 605, and a waste liquid recovery pipe 6051. The pair of soaking delivery branch pipes 602 are respectively connected to the side end face of the first ozone delivery pipe 3031 and the second ozone delivery pipe 3032 near the gas connection port 8 of the plasma deposition furnace. The other side end face of the soaking delivery branch pipe 602 is connected to the rinsing liquid storage tank in the cleaning supply tank 304. The rinsing liquid storage tank is connected to the supply device 2, so that the soaking liquid can be delivered from the first ozone delivery pipe 3031 and the second ozone delivery pipe 3032 near the gas connection port 8 of the plasma deposition furnace from top to bottom to perform the soaking cleaning operation inside the pipeline.

[0044] Furthermore, a waste liquid storage tank 605 is located on one side of the ozone generator 301. A waste liquid recovery pipe 6051 is connected to the waste liquid storage tank 605. The waste liquid recovery pipe 6051 is connected to the first ozone delivery pipe 3031 and the second ozone delivery pipe 3032 near the ozone generator 301 through the first recovery branch pipe 608 and the second recovery branch pipe 6081, respectively. This allows the fourth solenoid valve 609 located on the waste liquid recovery pipe 6051 to be opened after the soaking solution is completed, so that the waste liquid can be recovered and stored in the waste liquid storage tank 605.

[0045] The main body 1 of the ALD machine is fixedly connected to a fixed base 9 on one side of the gas connection port 8 of the plasma deposition furnace. A cleaning supply box 304 is fixedly connected to the fixed base 9. The cleaning supply box 304 is equipped with a rinsing liquid storage tank, a soaking liquid storage tank and a nitrogen storage tank, which are used to supply the rinsing liquid, soaking liquid or nitrogen for purging to the first ozone delivery pipe 3031 or the second ozone delivery pipe 3032.

[0046] The supply device 2 includes a first supply main pipe 201 and a storage supply system 202. The first supply main pipe 201 is connected to the cleaning supply box 304. The storage supply system 202 is equipped with a main storage tank for rinsing fluid, a main storage tank for soaking fluid, and a main storage tank for nitrogen. The main storage tanks for rinsing fluid, soaking fluid, and nitrogen are connected to the rinsing fluid storage tank, soaking fluid storage tank, and nitrogen storage tank respectively via delivery branch pipes. The delivery branch pipes are located inside the first supply main pipe 201. The storage supply system 202 supplies the required raw materials to the cleaning supply box 304 in real time. Preferably, the main storage tanks for rinsing fluid, soaking fluid, and nitrogen can be externally connected to corresponding large supply source bottles to reduce the frequency of raw material replacement.

[0047] It is worth noting that the rinsing solution includes ultrapure water, and the soaking solution includes either ultrapure water or dilute nitric acid. Ammonium nitrate is highly soluble in water, so using ultrapure water or dilute nitric acid to remove ammonium nitrate salts is a fast and effective method.

[0048] The rinsing mechanism includes a pair of rinsing delivery branch pipes 601, which are respectively connected to a first ozone delivery pipe 3031 and a second ozone delivery pipe 3032 located on one side near the gas connection port 8 of the plasma deposition furnace. The opposite end faces of the branch pipes are connected to a rinsing liquid storage tank, enabling the rinsing liquid to be delivered through the storage tank into the first ozone delivery pipe 3031 or the second ozone delivery pipe 3032 for rinsing. After rinsing, the waste liquid can be recovered by opening the fourth solenoid valve 609 on the waste liquid recovery pipe 6051 and stored in the waste liquid storage tank 605.

[0049] The drying mechanism includes a dryer 606 and a drying gas delivery pipe 6061. The dryer 606 is located on one side of the ozone generator 301. The drying gas delivery pipe 6061 is connected to the top of the dryer 606. The drying gas delivery pipe 6061 is connected to a first ozone delivery pipe 3031 or a second ozone delivery pipe 3032 via a first recovery branch pipe 608 and a second recovery branch pipe 6081. After rinsing is completed, the fourth solenoid valve 609 located on the drying gas delivery pipe 6061 can be opened to deliver hot air into the drying gas delivery pipe 6061, the first ozone delivery pipe 3031, or the second ozone delivery pipe 3032 through the dryer 606 to dry the inside of the pipes. Preferably, a second nitrogen delivery pipe is connected to one side of the second recovery branch pipe 6081. The second nitrogen delivery pipe is connected to a second nitrogen storage tank, which can deliver nitrogen while heating, thereby improving drying efficiency.

[0050] Impurity recovery pipe 6041, waste liquid recovery pipe 6051, and drying gas conveying pipe 6061 are all connected to a first recovery branch pipe 608 and a second recovery branch pipe 6081, respectively. Multiple first recovery branch pipes 608 and second recovery branch pipes 6081 are connected to a first ozone conveying pipe 3031 or a second ozone conveying pipe 3032, respectively. The purging waste recovery pipe 6071 is connected to a pair of purging recovery branch pipes 610, and the pair of purging recovery branch pipes 610 are connected to a first ozone conveying pipe 3031 or a second ozone conveying pipe 3032, allowing for selective connection to either the first ozone conveying pipe 3031 or the second ozone conveying pipe 3032 for conveying or recovering the medium.

[0051] A fourth solenoid valve 609 is installed between the impurity recovery pipe 6041, waste liquid recovery pipe 6051, drying gas conveying pipe 6061, and purging waste material recovery pipe 6071 and the first recovery branch pipe 608, the second recovery branch pipe 6081, and a pair of purging recovery branch pipes 610. This allows the pipelines between the impurity recovery pipe 6041, waste liquid recovery pipe 6051, drying gas conveying pipe 6061, and purging waste material recovery pipe 6071 and the first recovery branch pipe 608, the second recovery branch pipe 6081, and the pair of purging recovery branch pipes 610 to be opened or closed as needed.

[0052] The detection mechanism includes a pH sensor and a water immersion sensor. The pH sensor is set on the end face of the first ozone delivery pipe 3031 and the second ozone delivery pipe 3032 near the ozone generator 301 to detect whether the outflow liquid after the rinsing mechanism rinses the first ozone delivery pipe 3031 and the second ozone delivery pipe 3032 is neutral. The rinsing can be stopped after neutrality is detected.

[0053] Water immersion sensors are installed on multiple end faces inside the first ozone delivery pipe 3031 and the second ozone delivery pipe 3032. These sensors monitor the moisture content inside the first ozone delivery pipe 3031 and the second ozone delivery pipe 3032, and if residual moisture is detected, the drying mechanism is continuously activated to dry the ozone until no moisture remains.

[0054] The purging mechanism includes a waste recovery box 607, a purging waste recovery pipe 6071, a blower 305, a first purging branch pipe 306, and a second purging branch pipe 307. The first purging branch pipe 306 and the second purging branch pipe 307 are respectively connected to the first ozone delivery pipe 3031 and the second ozone delivery pipe 3032 located on one side near the gas connection port 8 of the plasma deposition furnace. The other side is connected to the air outlet pipe 3051 of the blower 305. The blower 305 can deliver airflow into the first purging branch pipe 306, the second purging branch pipe 307, the first ozone delivery pipe 3031, and the second ozone delivery pipe 3032 to purge the powder from top to bottom.

[0055] Waste collection bin 607 is located on one side of ozone generator 301. Waste collection bin 607 is connected to one side of purge waste collection pipe 6071. Purge waste collection pipe 6071 is connected to the first ozone delivery pipe 3031 or the second ozone delivery pipe 3032 respectively through a pair of purge collection branch pipes 610. When the first purge branch pipe 306 or the second purge branch pipe 307 purges the inside of the first ozone delivery pipe 3031 or the second ozone delivery pipe 3032, the fourth solenoid valve 609 located on waste collection bin 607 is opened simultaneously, allowing the purged powder to be purged into waste collection bin 607 through purge waste collection pipe 6071 for storage.

[0056] Blower 305 is connected to nitrogen storage tank through air inlet pipe, so as to deliver nitrogen to the first ozone delivery pipe 3031 and the second ozone delivery pipe 3032 through the first purging branch pipe 306 and the second purging branch pipe 307. Dry and clean high-pressure nitrogen is used to purge from one end to the other, blowing the loose powder out into the waste recycling bin 607 for storage.

[0057] It is worth noting that the advantage of using nitrogen for purging is that dry ammonium nitrate powder poses a risk of combustion and explosion under certain conditions. Nitrogen purging can remove this in a timely manner. Furthermore, as an inert gas, nitrogen maintains an inert atmosphere within the pipeline, greatly reducing any potential risk of combustion and explosion, thus improving the inherent safety of the system. Regular nitrogen purging of the pipeline's inner walls also prevents detached ammonium nitrate crystals or particles from entering the ALD reaction chamber with the ozone gas flow, becoming a deadly source of particulate contamination. Regular purging removes contaminants from the system before they enter the reaction chamber.

[0058] A second solenoid valve 308 is respectively installed on the first purge branch pipe 306 and the second purge branch pipe 307. When it is necessary to clean the first ozone delivery pipe 3031 and the second ozone delivery pipe 3032, the second solenoid valve 308 located on the corresponding position of the first purge branch pipe 306 or the second purge branch pipe 307 can be opened to connect the first purge branch pipe 306 or the second purge branch pipe 307 to the first ozone delivery pipe 3031 or the second ozone delivery pipe 3032 for purge work.

[0059] like Figure 1-2 As shown, when ozone needs to be delivered, hydrocarbons in the raw material can first be filtered through the hydrocarbon filter 302 to improve the purity of the delivered raw material and ensure normal ozone generation and delivery. If hydrocarbon impurities are missed and remain in the first ozone delivery pipe 3031 or the second ozone delivery pipe 3032, they can be treated by the hydrocarbon residue treatment mechanism. The pair of first solenoid valves 3033 on the first ozone delivery pipe 3031 or the second ozone delivery pipe 3032 containing residual hydrocarbon impurities are closed, and the first solenoid valves 3033 on the unused first ozone delivery pipe 3031 or the second ozone delivery pipe 3032 are opened to allow normal ozone supply. Then, the vacuum pump is started to adsorb the residual hydrocarbon impurities inside the first ozone delivery pipe 3031 or the second ozone delivery pipe 3032 and store them in the hydrocarbon impurity storage tank 604.

[0060] When ammonium nitrate and other salts are generated in the first ozone delivery pipe 3031 or the second ozone delivery pipe 3032 and need to be cleaned, the soaking mechanism can be opened first. The third solenoid valve 603, the fourth solenoid valve 609 and the first solenoid valve 3033 in the corresponding positions can be opened. The soaking solution is delivered through the soaking delivery branch pipe 602 and flows downward from the first ozone delivery pipe 3031 or the second ozone delivery pipe 3032 near the gas connection port 8 of the plasma deposition furnace. After the soaking solution fills the first ozone delivery pipe 3031 or the second ozone delivery pipe 3032, the delivery is stopped. After the soaking solution has been soaked inside for 3-6 hours, the fourth solenoid valve 609 located on the waste liquid recovery pipe 6051 is opened to recover the waste liquid and store it in the waste liquid storage tank 605.

[0061] The flushing mechanism is activated to flush the soaking solution inside the pipeline. The third solenoid valve 603, the fourth solenoid valve 609, and the first solenoid valve 3033 at the corresponding positions are opened. The flushing solution flows downward through the flushing delivery branch pipe 601 into the first ozone delivery pipe 3031 or the second ozone delivery pipe 3032 located near the gas connection port 8 of the plasma deposition furnace. The flushing is repeated until the flushing solution is detected as neutral by the detection mechanism. At the same time, the fourth solenoid valve 609 located on the waste liquid recovery pipe 6051 is opened to recover the waste liquid and store it in the waste liquid storage tank 605.

[0062] After rinsing, start the drying mechanism to dry the pipes. Open the fourth solenoid valve 609 on the drying gas delivery pipe 6061. The dryer 606 delivers hot air to the drying gas delivery pipe 6061 and the first ozone delivery pipe 3031 or the second ozone delivery pipe 3032 to dry the inside of the pipes until the detection mechanism detects no moisture.

[0063] Example 2

[0064] like Figure 6-8 As shown, an auxiliary cleaning mechanism 7 is provided on one end face of the purge and recovery branch pipe 610. The auxiliary cleaning mechanism 7 includes a housing 701, a base 704, a sealing component 708, and a pipe beating mechanism. When the purge mechanism is activated to purge the dust inside the first ozone delivery pipe 3031 or the second ozone delivery pipe 3032, some dust may accumulate at the connection between the first ozone delivery pipe 3031 or the second ozone delivery pipe 3032 and the purge and recovery branch pipe 610. Over time, this accumulation may cause blockage. The auxiliary cleaning mechanism 7 can enter the first ozone delivery pipe 3031 or the second ozone delivery pipe 3032 and beat the connection, shaking off the dust inside the pipe wall and storing it in the waste recycling bin 607 under the action of airflow.

[0065] The bottom of the outer casing 701 is fixedly connected to the base 704, which is fixedly connected to the top end face of the ozone generator 301. The sealing assembly 708 includes a second automatic lifting device 7081 and a sealing plate 7082. The outer end faces of a pair of purge recovery branch pipes 610 are each provided with a cleaning groove. The end face of the outer casing 701 that is in contact with the cleaning groove is provided with a matching second cleaning groove. The sealing plate 7082 matches the second cleaning groove. The projection of the sealing plate 7082 on the horizontal plane is larger than the projection of the second cleaning groove on the horizontal plane. The sealing plate 7082 can be used to seal and open the second cleaning groove and the cleaning groove. The bottom of the sealing plate 7082 is connected to the second automatic lifting device 7081, which is fixedly connected to one side end face of the outer casing 701. The second automatic lifting device 7081 controls the lifting and lowering of the sealing plate 7082. When it is necessary to open the second cleaning tank and the cleaning tank, the second automatic lifting device 7081 controls the sealing plate 7082 to descend and leave the second cleaning tank. The pipe tapping mechanism can enter the second cleaning tank, the cleaning tank, the blow-back recovery branch pipe 610 and the connection of the first ozone delivery pipe 3031 or the second ozone delivery pipe 3032 to tap the dust on the inner wall.

[0066] The pipe beating mechanism includes a waste storage box 702, a first automatic lifting device 703, a drive motor 705, a beating rod 706, a second blower 707, and a screening plate 709. The screening plate 709 has multiple drop holes. The screening plate 709 is fixedly connected to one side of the inner wall of the outer shell 701, dividing the outer shell 701 into layers. The first automatic lifting device 703 is located on the upper side of the screening plate 709, and one side of the first automatic lifting device 703 is connected to the drive motor 705, controlling the forward and backward movement of the drive motor 705.

[0067] The other end face of the drive motor 705 is connected to the beater 706. The beater 706 is matched with the inner wall of the cleaning tank. When the first automatic lifting device 703 controls the drive motor 705 to drive the beater 706 forward, the drive motor 705 starts to control the beater 706 to rotate and beat the inner wall of the pipe to knock off the dust.

[0068] Among them, the 706 patting stick is preferably made of polytetrafluoroethylene, which is corrosion resistant, highly flexible, and does not easily scratch the inner wall of the pipe.

[0069] The waste storage box 702 is located on the lower end face of the screening plate 709. The second blower 707 is located on the top end face of the outer shell 701. The outer shell 701 is provided with multiple nozzles on the upper end face of the beating rod 706. The multiple nozzles are connected to the second blower 707 through connecting pipes. The airflow delivered by the second blower 707 enters the nozzles on the top of the outer shell 701 to blow away the powder adhering to the beating rod 706. The powder is blown off and falls through the screening plate 709 into the waste storage box 702 for storage, which facilitates later maintenance and replacement.

[0070] In use, after the purging mechanism has finished purging, the sealing assembly 708 can be controlled to lower the sealing plate 7082 away from the second cleaning tank. The first automatic lifting device 703 controls the drive motor 705 and the beating rod 706 to enter the purging and recovery branch pipe 610 and the corresponding first ozone delivery pipe 3031 or second ozone delivery pipe 3032. The beating rod 706 rotates to beat the dust on the inner wall and is then blown into the waste recycling box 607 for storage under the action of airflow. After purging is completed, the beating rod 706 is reset, and then the second blower 707 is started to deliver airflow through multiple nozzles to blow the dust on the surface of the beating rod 706 so that the dust on the surface of the beating rod 706 falls into the waste storage box 702 for storage, keeping the surface of the beating rod 706 clean.

[0071] The difference between Example 2 and Example 1 is that Example 2 is applicable to environments with strong light sources, where a large amount of ammonium nitrate salts are generated during the ozone transport process inside the first ozone transport pipe 3031 or the second ozone transport pipe 3032, requiring frequent purging. In this case, an auxiliary cleaning mechanism 7 is used to strengthen the cleaning of dust accumulated at the connection between the first ozone transport pipe 3031 or the second ozone transport pipe 3032 and the purging and recovery branch pipe 610.

[0072] It will be apparent to those skilled in the art that this disclosure is not limited to the details of the exemplary embodiments described above, and that this disclosure can be implemented in other specific forms without departing from its spirit or essential characteristics. Therefore, the embodiments should be considered in all respects as exemplary and non-limiting, and the scope of this disclosure is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this disclosure. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0073] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. An ALD deposition apparatus based on a pre-ozone process, comprising an ALD machine body and a plasma deposition furnace, wherein the plasma deposition furnace includes a plasma deposition furnace gas connection port, characterized in that, An ozone delivery mechanism and a supply device are connected to one end face of the main body of the ALD machine. The ozone delivery mechanism includes an ozone generator, a hydrocarbon filter, and an ozone delivery main pipe. The hydrocarbon filter is located on one end face of the ozone generator. A hydrocarbon residue treatment mechanism is provided on one end face of the ozone delivery main pipe. The ozone delivery main pipe includes a first ozone delivery pipe and a second ozone delivery pipe. The first ozone delivery pipe and the second ozone delivery pipe are respectively connected to the gas connection port of the plasma deposition furnace. A pipe self-cleaning device is connected to one end face of the ozone delivery main pipe. The pipe self-cleaning device includes an immersion mechanism, a rinsing mechanism, a purging mechanism, a detection mechanism, and a drying mechanism. The immersion mechanism, the purging mechanism, and the rinsing mechanism are respectively connected to the first and second ozone delivery pipes at both ends.

2. The ALD deposition equipment based on pre-ozone process according to claim 1, characterized in that, The hydrocarbon residue treatment mechanism includes an infrared gas sensor, a vacuum pump, a hydrocarbon impurity storage tank, and an impurity recovery pipe. The infrared gas sensor is located between the first ozone delivery pipe, the second ozone delivery pipe, and the ozone generator. The vacuum pump is located on one end face of the ozone generator. The vacuum pump is connected to one end face of the hydrocarbon impurity storage tank, and the opposite end face of the vacuum pump is connected to the impurity recovery pipe. First solenoid valves are provided on both ends of the first and second ozone delivery pipes.

3. The ALD deposition equipment based on pre-ozone process according to claim 2, characterized in that, The immersion mechanism includes a pair of immersion delivery branches, a waste liquid storage tank, and a waste liquid recovery pipe. The pair of immersion delivery branches are respectively connected to the side end face of the first ozone delivery pipe or the second ozone delivery pipe near the gas connection port of the plasma deposition furnace. The main body of the ALD machine is fixedly connected to a fixed base on the side end face of the gas connection port of the plasma deposition furnace. A cleaning supply box is fixedly connected to the fixed base. The cleaning supply box is respectively equipped with a rinsing liquid storage tank, an immersion liquid storage tank, and a nitrogen storage tank. The immersion delivery branches are connected to the rinsing liquid storage tank. The rinsing liquid storage tank is connected to a supply device. The waste liquid storage tank is located on one side end face of the ozone generator. A waste liquid recovery pipe is connected to the waste liquid storage tank. The waste liquid recovery pipe is respectively connected to the first ozone delivery pipe and the second ozone delivery pipe.

4. The ALD deposition equipment based on pre-ozone process according to claim 3, characterized in that, The purging mechanism includes a waste recovery box, a purging waste recovery pipe, a blower, a first purging branch pipe, and a second purging branch pipe. The first and second purging branch pipes are respectively connected to a first ozone delivery pipe and a second ozone delivery pipe located on one side of the plasma deposition furnace gas connection port, and the other side of the blower is connected to the blower's outlet pipe. One side of the blower is connected to a nitrogen storage tank. A second solenoid valve is respectively installed on the first and second purging branch pipes. The waste recovery box is located on one side of the ozone generator and is connected to one side of the purging waste recovery pipe. The purging waste recovery pipe is connected to the first ozone delivery pipe or the second ozone delivery pipe through a pair of purging recovery branch pipes.

5. The ALD deposition equipment based on a pre-ozone process according to claim 1 or 4, characterized in that, The rinsing mechanism includes a pair of rinsing delivery branch pipes, which are respectively connected to a first ozone delivery pipe and a second ozone delivery pipe located on one end face near the gas connection port of the plasma deposition furnace, and the opposite end face of the other side is connected to a rinsing liquid storage tank. The supply device includes a first supply main pipe and a storage supply system. The first supply main pipe is connected to a cleaning supply box. The storage supply system is equipped with a rinsing liquid storage tank, a soaking liquid storage tank, and a nitrogen storage tank. The rinsing liquid storage tank, the soaking liquid storage tank, and the nitrogen storage tank are respectively connected to the rinsing liquid storage tank, the soaking liquid storage tank, and the nitrogen storage tank through delivery branch pipes. The rinsing liquid includes ultrapure water, and the soaking liquid includes either ultrapure water or dilute nitric acid.

6. The ALD deposition equipment based on pre-ozone process according to claim 4, characterized in that, The drying mechanism includes a dryer and a drying gas delivery pipe. The dryer is located on one side of the ozone generator. The drying gas delivery pipe is connected above the dryer and is connected to a first ozone delivery pipe and a second ozone delivery pipe. The impurity recovery pipe, waste liquid recovery pipe, and drying gas delivery pipe are each connected to a first recovery branch pipe and a second recovery branch pipe, respectively. The first recovery branch pipe and the second recovery branch pipe are respectively connected to the first ozone delivery pipe or the second ozone delivery pipe. The purging waste recovery pipe is connected to a pair of purging recovery branch pipes, and the pair of purging recovery branch pipes are respectively connected to the first ozone delivery pipe or the second ozone delivery pipe. A fourth solenoid valve is provided between the impurity recovery pipe, waste liquid recovery pipe, drying gas delivery pipe, and purging waste recovery pipe and the first recovery branch pipe, the second recovery branch pipe, and the pair of purging recovery branch pipes.

7. The ALD deposition equipment based on pre-ozone process according to claim 6, characterized in that, The detection mechanism includes a pH sensor and a water immersion sensor. The pH sensor is disposed on the end face of the first ozone delivery pipe and the second ozone delivery pipe near the ozone generator. The water immersion sensor is disposed on multiple end faces inside the first ozone delivery pipe and the second ozone delivery pipe.

8. The ALD deposition equipment based on pre-ozone process according to claim 1, characterized in that, An auxiliary cleaning mechanism is provided on one end face of the purging and recovery branch pipe. The auxiliary cleaning mechanism includes an outer shell, a base, a sealing component, and a pipe tapping mechanism. The outer shell is fixedly connected to the bottom of the base, and the base is fixedly connected to the top end face of the ozone generator.

9. The ALD deposition equipment based on pre-ozone process according to claim 8, characterized in that, The sealing assembly includes a second automatic lifting device and a sealing plate. A cleaning groove is provided on the outer end face of each pair of purge and recovery branch pipes. A matching second cleaning groove is provided on the end face of the outer shell that fits the cleaning groove. The sealing plate matches the second cleaning groove. The bottom of the sealing plate is connected to the second automatic lifting device, which is fixedly connected to one end face of the outer shell.

10. The ALD deposition equipment based on the pre-ozone process according to claim 9, characterized in that, The pipe beating mechanism includes a waste storage box, a first automatic lifting device, a drive motor, a beating rod, a second blower, and a screening plate. The screening plate is fixedly connected to one side of the inner wall of the outer casing. The screening plate has multiple drop holes. The first automatic lifting device is located on the upper side of the screening plate. One side of the first automatic lifting device is connected to the drive motor, and the other side of the drive motor is connected to the beating rod. The beating rod matches the inner wall of the cleaning tank. The waste storage box is located on the lower side of the screening plate. The second blower is located on the top side of the outer casing. The outer casing has multiple nozzles on the upper side of the beating rod, and the multiple nozzles are connected to the second blower through connecting pipes.

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