Displacement and inclination angle measuring device

Abstract

The invention relates to the technical field of laser measurement, particularly provides a displacement and inclination angle measuring device, and aims to solve the problems that an existing device cannot synchronously monitor a plurality of relatively parallel surfaces, measurement is tedious and precision is low. The device comprises a shell, double light sources, a multi-beam splitter group, a beam combiner group, a spectroscope and double detection assemblies. The double light sources emit light beams with different wavelengths, and the light beams are split by the mirror group and then are respectively projected to three relatively parallel measured surfaces; reflected light beams are combined into an integrated light beam through the beam combiner, the spectroscope separates the two light beams and transmits the two light beams to the inclination angle detection assembly and the displacement detection assembly respectively, and synchronous measurement is achieved. The subordinate scheme optimizes the lens group structure, light source wavelength and reflection region division, and improves the measurement precision and stability. The device is compact in structure, high in light path integration level, free of multi-sensor combination, capable of accurately and synchronously collecting parameters of multiple parallel surfaces of the laser communication equipment, easy and convenient to operate, high in adaptability and suitable for industrial and communication equipment monitoring scenes.

Description

Technical Field

[0001] This invention relates to the field of laser measurement technology, specifically providing a displacement and tilt angle measurement device. Background Technology

[0002] In industrial production, engineering construction, and safety monitoring, displacement and tilt angle are core parameters reflecting the structural state and motion trajectory of the measured object. Their measurement accuracy and dimensional coverage directly affect engineering safety, equipment operational stability, and the reliability of experimental data. Currently, displacement and tilt angle measurement devices on the market have formed various technical routes, mainly including displacement sensors based on laser triangulation, tilt sensors based on the pendulum principle, and inertial measurement units based on MEMS (microelectromechanical systems).

[0003] Laser displacement sensors, which emit laser beams onto the surface being measured and calculate displacement based on the positional shift of the reflected light, offer advantages such as high measurement accuracy and fast response. However, their measurement direction is fixed, typically limiting them to monitoring linear displacement within a single plane. Measuring displacement across different planes requires adjusting the sensor's mounting orientation and performing multiple measurements. Pendulum tilt sensors (including gas, liquid, and solid pendulums) rely on a gravitational field reference, calculating the tilt angle of the measured object based on the pendulum's deflection angle. These sensors are often designed for specific planes and can only output tilt angle parameters within a single plane. Even some integrated measurement devices often employ a combination of multiple single-direction sensors, collecting data from different planes to achieve multi-dimensional measurements.

[0004] The design logic of these existing measurement devices is ill-suited to the specific measurement requirements of laser communication equipment. The core structures of laser communication equipment, such as the optical path adjustment components and the transmitter / receiver panels, often contain three relatively parallel functional surfaces. Traditional devices either can only monitor a single plane or require multiple sensors in combination for measurement, neither of which can achieve simultaneous monitoring of these multiple relatively parallel surfaces. For this type of multi-parallel-surface structure, traditional solutions can only measure each surface independently, resulting in poor adaptability, cumbersome operation, and low efficiency, failing to meet the requirements of laser communication equipment for accurate and synchronous acquisition of parameters from multiple parallel surfaces.

[0005] Therefore, in view of the technical shortcomings of existing displacement and tilt measurement devices, such as the inability to simultaneously monitor multiple relatively parallel surfaces, low accuracy of multi-surface measurement, and cumbersome operation, there is an urgent need for a measurement device that can simultaneously measure the displacement and tilt of three relatively parallel surfaces, and has a compact structure, reliable accuracy, and is suitable for the application requirements of laser communication equipment. Summary of the Invention

[0006] The present invention aims to solve the above-mentioned technical problems, and to address the issues that existing displacement and tilt measurement devices cannot simultaneously monitor multiple relatively parallel surfaces, have low multi-surface measurement accuracy, and are cumbersome to operate.

[0007] This invention provides a displacement and tilt angle measuring device, comprising:

[0008] A housing having a viewing window positioned above the surface being measured;

[0009] A first light source, located at the upper left of the viewing window, is configured to emit a first light beam;

[0010] The first lens group, located between the viewing window and the first light source, is configured to split the first light beam into multiple beams and direct the multiple first light beams toward the surface being measured.

[0011] The second light source, located above the viewing window, is configured to emit a second beam with a wavelength different from that of the first beam.

[0012] The second lens group, located between the viewing window and the second light source, is configured to split the second light beam into multiple beams and direct the multiple second light beams toward the surface being measured.

[0013] The third lens group, located at the upper right of the viewing window, is configured to combine multiple first beams and multiple second beams reflected by the measured surface into a multi-integrated beam.

[0014] A beam splitter, located above the third mirror group and in the path of the integrated beam, is configured to reflect the first beam in the integrated beam and allow the second beam to pass through it.

[0015] A tilt angle detection component, located above the beam splitter, receives the first beam and calculates the tilt angle;

[0016] A displacement detection component, located on one side of the beam splitter, receives the second beam and calculates the displacement.

[0017] By employing the above technical solution, two independent light sources and beam-splitting systems, combined with beam combining and beam splitting designs, separate and integrate the detection optical paths for tilt and displacement measurements in space and wavelength. This enables synchronous and integrated acquisition of displacement and tilt information from multiple measurement points on the same measured surface, greatly improving measurement efficiency and avoiding the problems of complex installation and data asynchrony caused by multi-sensor combinations. The device has a compact structure and high integration.

[0018] In the specific embodiment of the displacement and tilt measuring device described above, the first beam is divided into three beams by the first mirror group; the first mirror group includes a first beam splitter, a second beam splitter, and a first reflecting mirror arranged sequentially from back to front; a portion of the first beam passes through the first beam splitter and hits the surface to be measured, another portion of the first beam is reflected by the first beam splitter and the second beam splitter and hits the surface to be measured, and a third portion of the first beam is reflected by the first beam splitter, passes through the second beam splitter, and is reflected by the first reflecting mirror and hits the surface to be measured.

[0019] By adopting the above technical solution, a combination of two beam splitters and one reflector is used to accurately split a beam of light into three independent and optically controllable measurement beams. The structure is simple, the optical path is stable, and the accuracy and consistency of the position of the light spot at the three measurement points are ensured.

[0020] In the specific embodiment of the displacement and tilt measuring device described above, the second beam is divided into three beams by the second mirror group; the second mirror group includes a third beam splitter, a fourth beam splitter, and a second reflecting mirror arranged sequentially from back to front; a portion of the second beam passes through the third beam splitter and hits the surface to be measured, another portion of the second beam is reflected by the third beam splitter and the fourth beam splitter and hits the surface to be measured, and the third portion of the second beam is reflected by the third beam splitter, passes through the fourth beam splitter, and is reflected by the second reflecting mirror and hits the surface to be measured.

[0021] By adopting the above technical solution, a three-beam splitting scheme that is symmetrical and independent of the first beam is provided for the second wavelength beam. This ensures the consistency and symmetry of the two measurement optical paths in terms of beam splitting principle, so that the two wavelength beams have similar optical characteristics in the measurement area, reducing the complexity of subsequent signal processing and improving the overall coordination and accuracy of the system.

[0022] In a specific embodiment of the displacement and tilt measuring device described above, the third mirror group includes a first beam combiner, a second beam combiner, and a third reflecting mirror arranged sequentially from back to front. A portion of the integrated beam directed toward the third reflecting mirror is reflected by the third reflecting mirror, passes through the second beam combiner, and is reflected by the first beam combiner before being directed toward the beam splitter. Another portion of the integrated beam directed toward the second beam combiner is reflected by the second beam combiner and then by the first beam combiner before being directed toward the beam splitter. A third portion of the integrated beam directed toward the first beam combiner passes through the first beam combiner before being directed toward the beam splitter.

[0023] By adopting the above technical solution, multiple scattered or specular reflected light from different positions on the measured surface can be re-converged into the same propagation direction to form an integrated beam containing information from all measurement points. This creates conditions for subsequent wavelength separation and independent detection, effectively utilizes light energy, and simplifies the design of subsequent optical systems.

[0024] In the specific embodiment of the displacement and tilt measuring device described above, the angle between the plane where the first beam combiner is located and the plane where the second beam combiner is located is greater than 0 degrees; the angle between the plane where the first beam combiner is located and the plane where the third reflector is located is greater than 0 degrees. The third mirror group is configured to have three light spots directed towards the beam splitter.

[0025] By adopting the above technical solution and setting a non-parallel angle, mutual obstruction and stray light interference between optical paths can be effectively avoided, ensuring that the six reflected beams can enter the beam combining path without conflict and efficiently. At the same time, the three reflected first beams can be directed to different positions of the tilt angle detection component, realizing the detection of tilt angles at three different positions.

[0026] In the specific implementation of the displacement and tilt measuring device described above, the first light source is a semiconductor laser with a wavelength of 655 nanometers, and the second light source is a semiconductor laser with a wavelength of 450 nanometers.

[0027] By adopting the above technical solution, the selection of red light (655nm) and blue light (450nm), which are far apart in the visible spectrum, makes subsequent spectral separation using a beam splitter very easy and thorough, greatly reducing crosstalk between the two measurement optical paths and ensuring the purity of the tilt angle signal and displacement signal.

[0028] In the specific embodiment of the displacement and tilt measuring device described above, the beam splitter reflects blue-violet light with a wavelength of 450 nanometers and transmits red light with a wavelength of 655 nanometers.

[0029] With the above technical solution, the wavelength characteristics of the beam splitter are perfectly matched with those of the selected light source, which can almost completely reflect the blue light component in the integrated beam to the displacement detection component and transmit the red light component to the tilt detection component, thus realizing the complete separation of the two signals in physical space and laying a solid foundation for the independent and accurate operation of the two detection components.

[0030] In a specific embodiment of the displacement and tilt measuring device described above, the measured surface is disposed on the surface of the workpiece being measured, the middle position of the measured surface is a diffuse reflection region for diffusely reflecting the second light beam, and the area outside the set position of the measured surface is a specular reflection region for reflecting the first light beam.

[0031] By adopting the above technical solution, the reflection area of ​​the measured surface is divided so that the first and second beams can obtain reflection effects on the measured surface that are adapted to their own detection requirements. Specular reflection ensures the angular stability of the first beam to improve the tilt angle measurement accuracy, while diffuse reflection enables the second beam to form a uniform reflection signal to optimize the displacement measurement effect. This achieves functional adaptation of different areas of the same measured surface and simplifies the optical path design.

[0032] In a specific embodiment of the displacement and tilt angle measuring device described above, the tilt angle detection component includes a tilt angle detector and a first optical system. The tilt angle detector is provided with a number of detection areas equal to the number of the first beams after beam splitting. The detection areas are provided corresponding to each first beam after beam splitting. The first optical system is a lens that focuses the integrated beam onto the photosensitive surface of the tilt angle detector.

[0033] With the above technical solution, the multiple detection zones of the tilt detector correspond one-to-one with the first beam after beam splitting, and can simultaneously receive tilt light signals from multiple measured surfaces. The lens of the first optical system can accurately focus the integrated beam, improve the intensity and clarity of the light signal, ensure the accuracy and synchronization of tilt angle calculation, and adapt to the tilt angle monitoring needs of multiple parallel surfaces.

[0034] In a specific embodiment of the displacement and tilt measurement device described above, the displacement detection component includes a displacement detector and a second optical system. The displacement detector is provided with a number of detection areas equal to the number of the second beams after beam splitting. The detection areas are provided corresponding to each second beam after beam splitting. The second optical system is an aberration-correcting lens that images the laser points converging on the measured surface onto the photosensitive surface of the displacement detector.

[0035] With the above technical solution, the multiple detection zones of the displacement detector correspond to multiple second beams, which can simultaneously acquire displacement signals of multiple measured surfaces. The aberration-correcting lens can eliminate imaging distortion and accurately image the laser points on the measured surface onto the photosensitive surface of the displacement detector, effectively improving the accuracy of displacement measurement and avoiding the influence of imaging errors on the measurement results. Attached Figure Description

[0036] The preferred embodiments of the present invention are described below with reference to the accompanying drawings, in which:

[0037] Figure 1 This is a schematic diagram of the internal structure of an embodiment of the displacement and tilt measuring device;

[0038] Figure 2 This is a schematic diagram of the external structure of an embodiment of the displacement and tilt measuring device.

[0039] List of reference numerals in the attached figures: 1-Housing; 11-Window; 21-First light source; 211-First beam; 221-First beam splitter; 222-Second beam splitter; 223-First reflecting mirror; 31-Second light source; 311-Second beam; 321-Third beam splitter; 322-Fourth beam splitter; 323-Second reflecting mirror; 411-First beam combiner; 412-Second beam combiner; 413-Third reflecting mirror; 5-Beam splitter; 6-Integrated beam; 71-Second optical system; 72-Displacement detector; 81-First optical system; 82-Tilt detector. Detailed Implementation

[0040] Preferred embodiments of this application are described below with reference to the accompanying drawings. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of this application and are not intended to limit the scope of protection of this application. Those skilled in the art can make adjustments as needed to adapt to specific application scenarios.

[0041] It should be noted that in the description of this application, terms such as "top" and "bottom" that indicate positional relationships are based on the direction or positional relationship shown in the accompanying drawings. This is only for the convenience of description and is not intended to indicate or imply that the relevant device or element must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation of this application.

[0042] Furthermore, it should be noted that, in the description of this application, unless otherwise explicitly specified and limited, the terms "set," "connect," etc., should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or other type of connection; it can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances. In addition, the terms "first," "second," "third," and "fourth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. It should be understood that the orientation or positional relationship indicated by terms such as "above," "directly above," and "front" is based on the orientation or positional relationship shown in the accompanying drawings and is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention.

[0043] like Figures 1 to 2As shown, to address the problems of existing displacement and tilt measurement devices being unable to simultaneously monitor multiple relatively parallel surfaces, having low multi-surface measurement accuracy, and being cumbersome to operate, this invention provides a displacement and tilt measurement device, comprising: a housing 1, which is provided with a viewing window located above the surface to be measured; a first light source located to the upper left of the viewing window and configured to emit a first light beam 211; a first mirror group located between the viewing window and the first light source and configured to split the first light beam 211 into multiple beams, and to project the multiple beams 211 onto the surface to be measured respectively; a second light source located above the viewing window and configured to emit a second light beam 311 with a wavelength different from the first light beam 211; and a second mirror group located to the upper left of the viewing window and configured to emit a second light beam 311 with a wavelength different from the first light beam 211; and a second mirror group located between the viewing window and the first light source and configured to emit a second light beam 311 with a wavelength different from the first light beam 211; and a second mirror group located between the viewing window and the first light source. Between the window and the second light source, it is configured to split the second beam 311 into multiple beams and direct each beam 311 toward the surface being measured. A third mirror group, located to the upper right of the window, is configured to combine the multiple first beams 211 and second beams 311 reflected from the surface being measured into a single integrated beam 6. A beam splitter, located above the third mirror group and along the path of the integrated beam 6, is configured to reflect the first beam 211 within the integrated beam 6 and allow the second beams 311 to pass through it. A tilt detection component, located above the beam splitter, receives the first beam 211 and calculates the tilt angle. A displacement detection component, located to one side of the beam splitter, receives the second beam 311 and calculates the displacement. Thus, through two independent light sources and beam splitting systems, combined with beam combining and beam splitting design, the detection optical paths for tilt angle measurement and displacement measurement are separated and integrated in space and wavelength. It enables synchronous and integrated acquisition of displacement and tilt information of multiple measurement points on the same measured surface, greatly improving measurement efficiency and avoiding the problems of complex installation and data asynchrony caused by multi-sensor combinations. The device has a compact structure and high integration.

[0044] like Figure 1As shown, in one or more embodiments, the first mirror group precisely splits the beam emitted by the first light source 21 into three beams, which correspond exactly to the three relatively parallel functional surfaces in the laser communication device, realizing multi-face synchronous tilt angle monitoring. The first mirror group is assembled from back to front with the first beam splitter 221, the second beam splitter 222, and the first reflector 223. Each component is fixed with a precision optical bracket to ensure angular stability. The specific beam splitting process is as follows: the first beam 211 emitted by the first light source 21 first enters the first beam splitter 221. The transmittance and reflectance of the first beam splitter 221 are configured in a 1:2 ratio. A portion of the beam passes directly through the first beam splitter 221 and is projected at an angle onto the measured surface on the rear side. The transmittance and reflectance of the second beam splitter 222 are configured in a 1:1 ratio. Another portion of the beam is reflected by the first beam splitter 221 and then partially directed towards the second beam splitter 222. After being reflected by the second beam splitter 222, it is projected onto the measured surface in the middle. The third beam consists of the first beam 211, which is reflected by the first beam splitter 221, passes through the second beam splitter 222, and is incident on the first reflecting mirror 223. After reflection, it is projected onto the measured surface in front. Through the coordinated beam splitting of the three optical components, the energy uniformity and angular consistency of the three first beams 211 are ensured, and the beam projection position accurately corresponds to the three measured surfaces. Multi-face tilt angle signal acquisition can be achieved without additional adjustment of the optical path. Compared with the traditional surface-by-surface measurement method, the measurement time is greatly shortened, and the errors caused by multiple installation and adjustment are avoided, thus improving the measurement accuracy.

[0045] In one or more embodiments, the structure of the second mirror group is symmetrically adapted to the first mirror group, ensuring that the three second beams 311 and the three first beams 211 are projected onto the three measured surfaces in a one-to-one correspondence, achieving synchronous acquisition of displacement parameters. The second mirror group is arranged sequentially from back to front with a third beam splitter 321, a fourth beam splitter 322, and a second reflector 323, and the mounting posture of each component is adapted to that of the first mirror group. Specifically, the beam splitting logic is as follows: the second beam 311 emitted by the second light source 31 is incident on the third beam splitter 321, with its transmittance and reflectance configured in a 1:2 ratio; the fourth beam splitter 322 has a transmittance and reflectance configured in a 1:1 ratio. A portion of the beam passes directly through the third beam splitter 321 and is projected vertically onto the rear surface being measured. Another portion of the beam is reflected by the third beam splitter 321 and then directed towards the fourth beam splitter 322, before being projected onto the middle surface being measured. A third portion of the beam is reflected by the third beam splitter 321, passes through the fourth beam splitter 322, and is incident on the second reflecting mirror 323, before being projected onto the front surface being measured. Through structural coordination with the first mirror group, the spatial correlation of the two parameters is ensured, providing a foundation for subsequent data fusion. Simultaneously, the synchronous projection of multiple second beams 311 enables parallel acquisition of displacement signals from the three measured surfaces, solving the problem of low efficiency in multi-surface measurement using traditional devices.

[0046] In one or more embodiments, the third mirror group uses a hierarchical beam combining design to orderly integrate the six beams of light (three first beams 211 and three second beams 311) reflected from the three tested surfaces into three integrated beams 6. Specifically, each integrated beam 6 consists of one first beam 211 and one second beam 311. This simplifies the subsequent beam splitting and detection process and avoids optical path confusion. The third mirror group consists of a first beam combiner 411, a second beam combiner 412, and a third reflecting mirror 413 arranged sequentially from back to front, with each component fixed at a preset angle. The specific beam combining process of the first beam combiner 411 and the second beam combiner 412 is as follows: one integrated beam 6 reflected from the front tested surface is incident on the third reflecting mirror 413, reflected, passes through the second beam combiner 412, and is then reflected by the first beam combiner 411 before being directed towards the beam splitter 5. Another integrated beam 6 reflected from the middle tested surface is incident on the second beam combiner 412, reflected by the first beam combiner 411, and directed towards the beam splitter 5. The third integrated beam 6, reflected from the rear surface under test, is directly incident on the first beam combiner 411 and projected onto the beam splitter 5. In this way, multi-beam convergence is achieved through staged beam combining, eliminating the need for separate detection components for each beam, significantly simplifying the device structure and reducing manufacturing costs. Simultaneously, the concentrated energy of the combined beam enhances the signal reception strength of subsequent detection components, ensuring measurement accuracy.

[0047] It should be noted that the second beam combiner 412 of the first beam combiner 411 operates on the same principle as the beam splitter. Taking the second beam combiner 412 as an example, when the beam reflected by the third reflector 413 passes through the second beam combiner 412, a portion of the light is reflected upwards. However, the portion reflected upwards is not used and will not be discussed further.

[0048] In one or more embodiments, the angle design between the first beam combiner 411, the second beam combiner 412, and the third reflecting mirror 413 is crucial to ensuring the independence of the beam spots after beam combining, and ensuring that the signals from the three measured surfaces in the integrated beam 6 received by the beam splitter 5 do not overlap. Specifically, the angle between the plane containing the first beam combiner 411 and the plane containing the second beam combiner 412 is set to 0.1°, the angle between the plane containing the first beam combiner 411 and the plane containing the third reflecting mirror 413 is set to 0.1°, and the angle between the plane containing the second beam combiner 412 and the plane containing the third reflecting mirror 413 is set to 0.2°. Of course, these angle parameters are determined through simulation optimization, ensuring that the three beams form three independent beam spots along the propagation path with uniform spacing between the spots. To avoid the reflections from different test surfaces overlapping in the integrated beam 6, and to ensure that the first beam 211 and the second beam 311 after separation by the beam splitter 5 can still maintain the signal independence of the three test surfaces, this provides a guarantee for the subsequent detection components to distinguish the parameters of each surface and solves the technical problem of signal interference caused by multi-beam beam combining.

[0049] In one or more embodiments, the first light source 21 is a 655 nm red semiconductor laser, and the second light source 31 is a 450 nm blue-violet semiconductor laser. The two wavelengths differ significantly and are both within the visible light band, possessing good optical penetration and stability. The 655 nm red light has a small divergence angle and strong anti-interference capability, making it suitable as a reference beam for tilt angle measurement and reducing the influence of ambient light on angle detection. The 450 nm blue-violet light has high beam focusing accuracy, improving the resolution of displacement measurement and meeting the high-precision requirements of laser communication equipment for displacement parameters. Simultaneously, both semiconductor lasers are small in size and low in power consumption, facilitating integration into a compact housing 1, making them more suitable for installation and use in industrial settings compared to traditional gas lasers.

[0050] In one or more embodiments, the beam splitter 5 employs a wavelength-selective coating process to achieve efficient separation of the two beams. It exhibits high reflectivity for 450 nm blue-violet light (second beam 311) and high transmittance for 655 nm red light (first beam 211). This design ensures that after the integrated beam 6 is incident on the beam splitter 5, the second beam 311 is vertically reflected to the displacement detection component, while the first beam 211 passes through the beam splitter 5 along its original path to the tilt detection component. This results in high separation efficiency and no significant crosstalk between the two beams. No additional optical path switching components are required; the separation of the two measurement signals can be achieved through a single beam splitter, simplifying the optical path structure. Simultaneously, the high reflectivity and transmittance ensure minimal beam energy loss, enhancing the signal strength of the detection component and guaranteeing measurement accuracy.

[0051] In one or more embodiments, the surface under test is disposed on the surface of the optical path adjustment component or the transmitter / receiver panel of a laser communication device. A diffuse reflection region is formed at a predetermined position by spraying a diffuse reflection coating, while the area outside the predetermined position is mirror-polished to form a mirror reflection region. This region accurately reflects the first beam 211 at a precise angle, accurately reflecting the tilt angle change of the surface under test and providing a reliable angular reference for tilt angle calculation. It should be noted that the diffuse reflection region in the surface under test is approximately an ideal diffuse reflection surface, satisfying Lambert's law. The spot size of the second beam 311 in the diffuse reflection region is less than 1 mm, therefore, the tilt angle change of the surface under test will not significantly affect the position of the imaging spot on the displacement detection component.

[0052] In one or more embodiments, the tilt detection component employs a multi-detection zone design to achieve synchronous and independent calculation of the tilt parameters of the three measured surfaces. The tilt detector 82 uses a high-resolution CCD image sensor with three independent detection zones, each corresponding to one of the three first beams 211 after the first mirror assembly, ensuring that the offset signal of each reflected light beam can be acquired independently. The first optical system 81 uses a double-convex lens structure with precisely calibrated focal length, which can focus the first beam 211 after the third mirror assembly onto the photosensitive surface of the tilt detector 82, avoiding signal blurring caused by light spot diffusion. During operation, the tilt detector 82 captures the positional offset of the light spots in each detection zone and calculates the corresponding tilt angle change of the measured surface using geometric optics principles. The three detection zones operate in parallel, achieving synchronous measurement. The multi-detection zone design eliminates the need for time-division measurement, improving detection efficiency. Simultaneously, the focusing effect of the convex lenses enhances signal strength, and the high-resolution CCD ensures that minute tilt angle changes can be accurately captured, meeting the high-precision requirements of laser communication equipment for tilt parameters.

[0053] In one or more embodiments, the structural design of the displacement detection component is adapted to the measurement requirements of the second beam 311. Through aberration-correction design and multi-detection area configuration, accurate synchronous measurement of the displacement of the three measured surfaces is achieved. The displacement detector 72 has three independent detection areas, each corresponding to one of the three second beams 311 after the second lens group is assembled, enabling rapid response to changes in the beam position. The second optical system 71 employs an aberration-correction lens group, which effectively corrects aberrations such as spherical aberration and chromatic aberration, clearly imaging the laser point converged in the diffuse reflection area of ​​the measured surface onto the photosensitive surface of the displacement detector 72, ensuring a linear correspondence between the imaging position and the displacement of the measured surface. The displacement detector 72 calculates the displacement of the corresponding measured surface by detecting changes in the position of the imaging beam in each detection area. The aberration-correction lens group avoids measurement errors caused by imaging distortion, and the multi-detection area configuration enables synchronous acquisition of the displacement of the three measured surfaces, solving the problem of low efficiency in traditional surface-by-surface measurement.

[0054] This device achieves synchronous and accurate measurement of the displacement and tilt parameters of three relatively parallel planes through a closed-loop optical path of "beam splitting and projection - reflection and beam combining - beam splitting and detection". The specific process is as follows:

[0055] 1. Beam Emission and Splitting: The beam emitted by the first light source 21 (655nm red light) is split into three beams by the first mirror group (first beam splitter 221, second beam splitter 222, first reflector 223), and projected onto the specular reflection areas of the three test surfaces respectively. Simultaneously, the beam emitted by the second light source 31 (450nm blue-violet light) is split into three beams by the second mirror group (third beam splitter 321, fourth beam splitter 322, second reflector 323), and projected onto the diffuse reflection areas of the three test surfaces one by one.

[0056] 2. Beam reflection and beam combining: The three first beams 211 and three second beams 311 reflected from the three test surfaces are simultaneously incident on the third mirror group (first beam combiner 411, second beam combiner 412, and third reflecting mirror 413). After graded beam combining, three integrated beams 6 are formed. The integrated beams 6 are projected onto the beam splitter 5 along a preset path.

[0057] 3. Beam Separation and Detection: Beam splitter 5 performs wavelength selective separation on the integrated beam 6, reflecting 450nm blue-violet light (second beam 311) to the displacement detection component. The second optical system 71 (aberration-correcting lens group) images the beam onto the corresponding detection area of ​​the displacement detector 72. The displacement detector 72 calculates the displacement of the three measured surfaces based on the change in the beam spot position. Simultaneously, 655nm red light (first beam 211) passes through beam splitter 5 to the tilt detection component. The first optical system 81 (convex lens) focuses the beam onto the corresponding detection area of ​​the tilt detector 82. The tilt detector 82 calculates the tilt angle of the three measured surfaces based on the beam spot offset.

[0058] The entire working process requires no adjustment of the device posture or replacement of sensors. Through integrated optical path design, it achieves multi-parameter and multi-face synchronous measurement. It has a compact structure, is easy to operate, and its measurement accuracy and efficiency are greatly improved compared with traditional devices. It can perfectly adapt to the multi-parameter monitoring needs of laser communication equipment.

[0059] Those skilled in the art will understand that although some embodiments described herein include certain features included in other embodiments but not others, combinations of features from different embodiments are intended to be within the scope of this application and form different embodiments. For example, any of the claimed embodiments in the claims of this application can be used in any combination.

[0060] The technical solution of the present invention has been described above with reference to the preferred embodiments shown in the accompanying drawings. However, it will be readily understood by those skilled in the art that the scope of protection of the present invention is obviously not limited to these specific embodiments. Without departing from the principles of the present invention, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after such changes or substitutions will all fall within the scope of protection of the present invention.

Claims

1. A displacement and tilt measuring device, characterized in that, include: A housing having a viewing window positioned above the surface being measured; A first light source, located at the upper left of the viewing window, is configured to emit a first light beam; The first lens group, located between the viewing window and the first light source, is configured to split the first light beam into multiple beams and direct the multiple first light beams toward the surface being measured. The second light source, located above the viewing window, is configured to emit a second beam with a wavelength different from that of the first beam. The second lens group, located between the viewing window and the second light source, is configured to split the second light beam into multiple beams and direct the multiple second light beams toward the surface being measured. The third lens group, located at the upper right of the viewing window, is configured to combine multiple first beams and multiple second beams reflected by the measured surface into a multi-integrated beam. A beam splitter, located above the third mirror group and in the path of the integrated beam, is configured to reflect the first beam in the integrated beam and allow the second beam to pass through it. A tilt angle detection component, located above the beam splitter, receives the first beam and calculates the tilt angle; A displacement detection component, located on one side of the beam splitter, receives the second beam and calculates the displacement.

2. The displacement and tilt measuring device according to claim 1, characterized in that, The first beam is divided into three beams by the first mirror group; the first mirror group includes a first beam splitter, a second beam splitter, and a first reflecting mirror arranged sequentially from back to front; a portion of the first beam passes through the first beam splitter and hits the surface under test, another portion of the first beam is reflected by the first beam splitter and the second beam splitter and hits the surface under test, and a third portion of the first beam is reflected by the first beam splitter, passes through the second beam splitter, and is reflected by the first reflecting mirror and hits the surface under test.

3. The displacement and tilt measuring device according to claim 1, characterized in that, The second beam is divided into three beams by the second mirror group; the second mirror group includes a third beam splitter, a fourth beam splitter, and a second reflecting mirror arranged sequentially from back to front; a portion of the second beam passes through the third beam splitter and hits the surface under test, another portion of the second beam is reflected by the third beam splitter and the fourth beam splitter and hits the surface under test, and the third portion of the second beam is reflected by the third beam splitter, passes through the fourth beam splitter, and is reflected by the second reflecting mirror and hits the surface under test.

4. The displacement and tilt measuring device according to claim 1, characterized in that, The third mirror group includes a first beam combiner, a second beam combiner, and a third reflecting mirror arranged sequentially from back to front. A portion of the integrated beam directed towards the third reflecting mirror is reflected by the third reflecting mirror, passes through the second beam combiner, and is reflected by the first beam combiner before being directed towards the beam splitter. Another portion of the integrated beam directed towards the second beam combiner is reflected by the second beam combiner and then by the first beam combiner before being directed towards the beam splitter. A third portion of the integrated beam directed towards the first beam combiner passes through the first beam combiner before being directed towards the beam splitter.

5. The displacement and tilt measuring device according to claim 4, characterized in that, The angle between the plane where the first beam combiner is located and the plane where the second beam combiner is located is greater than 0 degrees; the angle between the plane where the first beam combiner is located and the plane where the third reflector is located is greater than 0 degrees; the third mirror group is configured to have three light spots directed toward the beam splitter.

6. The displacement and tilt measuring device according to claim 1, characterized in that, The first light source is a semiconductor laser with a wavelength of 655 nanometers, and the second light source is a semiconductor laser with a wavelength of 450 nanometers.

7. The displacement and tilt measuring device according to claim 6, characterized in that, The beam splitter reflects blue-violet light with a wavelength of 450 nanometers and transmits red light with a wavelength of 655 nanometers.

8. The displacement and tilt measuring device according to claim 1, characterized in that, The measured surface is disposed on the surface of the workpiece being measured. The middle position of the measured surface is a diffuse reflection region for diffuse reflection of the second light beam, and the area outside the set position of the measured surface is a specular reflection region for reflecting the first light beam.

9. The displacement and tilt measuring device according to claim 1, characterized in that, The tilt detection component includes a tilt detector and a first optical system. The tilt detector is provided with a number of detection areas equal to the number of the first beams after beam splitting. The detection areas are provided corresponding to each first beam after beam splitting. The first optical system is a lens that focuses the integrated beam onto the photosensitive surface of the tilt detector.

10. The displacement and tilt measuring device according to claim 1, characterized in that, The displacement detection component includes a displacement detector and a second optical system. The displacement detector is provided with a number of detection areas equal to the number of the second beams after beam splitting. The detection areas are provided corresponding to each second beam after beam splitting. The second optical system is an aberration-correcting lens that images the laser points converging on the measured surface onto the photosensitive surface of the displacement detector.

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