In-situ sensing evaluation device for simulating multi-physical field action in aerospace environment
By enabling the coordinated adjustment of multiple environmental parameters within the same testing platform, the problem of sensor performance testing devices being unable to simulate multiple physical field conditions has been solved. This allows for the stability and repeatability testing of sensors in complex aerospace environments, meeting the evaluation needs of high-requirement engineering fields.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- NANKAI UNIV
- Filing Date
- 2026-01-22
- Publication Date
- 2026-04-21
AI Technical Summary
Most existing sensor performance testing devices are designed to test single or a small number of environmental parameters, making it difficult to simulate multi-physics conditions within the same device. This results in insufficient stability and repeatability of test results, especially in complex aerospace environments where they cannot meet the comprehensive performance evaluation requirements of sensors.
An integrated multi-physics in-situ sensing and evaluation device was designed. By realizing the coordinated control of temperature, humidity, gas composition, air pressure and light parameters within the same test platform, a complex working condition simulation environment is constructed for in-situ testing and evaluation of sensor performance under multi-physics linkage conditions.
It enables in-situ performance testing under wide temperature range, variable pressure, specific gas atmosphere and illumination conditions, improving the stability and repeatability of test results, and meeting the requirements of commercial aerospace and other high-requirement engineering fields for accurate evaluation of sensor comprehensive performance.
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Figure CN121898502A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the field of sensor testing and evaluation technology, specifically to an in-situ sensing evaluation device for simulating the effects of multiple physical fields and multiple environmental parameters in aerospace environments. It is suitable for in-situ performance testing and comprehensive performance evaluation of sensors under single or multiple parameter coupling conditions of temperature, humidity, optical excitation, gas atmosphere and air pressure. Background Technology
[0002] With the continuous development of commercial aerospace, space engineering, deep space exploration, and energy systems, sensors are widely used in critical areas such as propulsion system monitoring, fuel and propellant detection, structural health monitoring, and attitude and environmental parameter sensing. Their reliability and stability are paramount. In practical engineering applications, the operating environments of sensors are typically highly diverse and complex. Taking commercial aerospace applications as an example, sensors often need to operate under wide temperature ranges, varying pressures, complex gases, humidity levels, and different lighting conditions. The media involved include not only conventional ambient gases but also potentially cryogenic, highly reactive propellants and their vapor environments, such as liquid hydrogen, liquid oxygen, liquid methane, and their mixtures or conversion atmospheres. Therefore, systematic testing and evaluation of their performance under the combined effects of multiple environmental parameters is crucial. In particular, it is necessary to simulate high and low temperatures, specific gas compositions, pressure changes, and multi-physics coupling environments under controlled conditions to evaluate the sensor's sensing performance under near-real-world service conditions.
[0003] Most existing sensor performance testing devices are designed for testing single or limited environmental parameters. For example, they may only test the sensor's response characteristics under different gas atmospheres or perform performance tests under limited temperature and humidity conditions. However, as sensor applications expand into commercial aerospace and complex engineering conditions, simulation testing with single or limited environmental parameters can no longer accurately reflect the actual working state of sensors under the combined influence of multiple environmental factors, thus limiting the engineering guidance significance of the test results. Furthermore, some multi-environment testing systems typically employ a decentralized structure, with different environmental parameters controlled by multiple independent devices. This necessitates frequent device changes or repeated sample loading during testing, complicating the testing process, reducing efficiency, and easily introducing environmental fluctuations and human error, affecting the stability and repeatability of the test results. Especially under testing conditions involving cryogenic propellant media, varying gas pressures, and multiple atmosphere switching, existing devices still exhibit significant shortcomings in terms of environmental parameter linkage control capabilities and test consistency.
[0004] Therefore, the present invention aims to provide an integrated multiphysics in-situ sensing and evaluation device. By realizing the coordinated control of temperature, humidity, gas composition, air pressure and light parameters within the same test platform, a complex working condition simulation environment covering cryogenic propellant-related media is constructed. The device enables in-situ performance testing and evaluation of sensors under complex working conditions, including cryogenic propellant-related media, thereby meeting the urgent need for accurate comprehensive performance evaluation of sensors in commercial aerospace and other high-requirement engineering fields. Summary of the Invention
[0005] To address the problems of existing sensor performance testing devices, which mostly test only a single or limited number of environmental parameters, are geographically dispersed, and lack sufficient coordination between environmental parameters, making it difficult to simulate multi-physics conditions and conduct in-situ comprehensive performance evaluations within a single device, especially failing to meet the in-situ testing requirements of sensors under aerospace environmental conditions involving wide temperature ranges, varying air pressures, specific gas atmospheres, and illumination, this invention provides an in-situ sensor evaluation device and its testing method that simulates the effects of multiple physical fields in aerospace environments. This device integrates multiple environmental control components, including temperature, gas composition, humidity, air pressure, and optical excitation, to achieve independent control and coordinated adjustment of multiple environmental parameters within a single testing platform. This allows for in-situ testing and evaluation of sensor performance under multi-physics conditions.
[0006] To achieve the above objectives, the present invention adopts the following technical solution. The structure of the device is as follows: An in-situ sensing evaluation device for simulating the effects of multiple physics fields in aerospace environment includes a three-layer shell sample chamber, a temperature control component, an optical excitation component, a pressure control component, a gas distribution component, a humidity control component, and a sensor performance testing component. Each component is integrated into the same testing system and interconnected to construct a controllable multiphysics field testing platform. The specific components are as follows.
[0007] The three-layer sample chamber comprises three coaxially arranged cavities, which, from the inside out, are: a metal cavity with a quartz glass interactive window, called the gas shielding chamber, used to carry the sensor under test and provide it with a relatively stable and controllable testing environment; a metal cavity with a quartz glass interactive window and connected to the pressure control component, called the pressure stabilization chamber, used to buffer fluctuations during pressure regulation and improve the stability of pressure control during testing, and its volume is significantly larger than that of the gas shielding chamber; and a metal cavity with an optical excitation component, called the isolation chamber, used to isolate the test system from the influence of external air and humidity, while providing an independent working space for the optical excitation component; the gas shielding chamber, the pressure stabilization chamber, and the isolation chamber are optically connected through the quartz glass interactive window, while maintaining hierarchical isolation and stable control of gas composition and pressure, thereby achieving optical excitation without damaging the environmental conditions of the sensor under test.
[0008] The temperature control component includes at least one of the following: a multi-point temperature sensor, a heating unit, an electric cooling component, and a refrigerant cooling component. It forms an upper-lower arrangement with the gas shielded chamber, and its temperature control modes include, but are not limited to, radiation temperature control and contact temperature control. A control rod is provided above the temperature control component for mechanical connection and relative position adjustment between the temperature control component and the gas shielded chamber, thereby adjusting the cooling rate. The refrigerant cooling component includes at least a refrigerant storage-evaporation module, which is connected to an external refrigerant source via a refrigerant injection port and to a fume hood at the other end. Low-temperature regulation is achieved through the phase change process of the refrigerant. The electric cooling component, refrigerant cooling component, and heating unit cooperate to achieve precise temperature control over a wide temperature range. The multi-point temperature sensor is arranged in the sensor performance testing platform and inside the gas shielded chamber for monitoring temperature. The temperature control component is connected to the sensor performance testing component to control the temperature inside the gas shielded chamber or the sensor testing platform. Preferably, the temperature control component can achieve temperature adjustment within the range of 80~425 K with a temperature control error of less than 0.1 K to meet the simulation requirements of low-temperature and high-temperature operating conditions related to aerospace environments.
[0009] The optical excitation component is located in the isolation chamber and includes, but is not limited to, a xenon lamp light source and a laser generation module, for providing controllable optical excitation conditions to the sensor under test; the optical excitation component can output light radiation in the 190~2000 nm wavelength range; the isolation chamber, the pressure stabilization chamber and the gas shielding chamber are optically coupled through a quartz glass interactive window, so that the optical excitation can act on the sensor under test without interfering with the gas, pressure and humidity environment in which it is located.
[0010] The pressure control component includes, but is not limited to, a pressure gauge, a vacuum mechanical pump, and at least one pressure tank. The pressure tank is connected to a dynamic gas distribution component and a pressure stabilization chamber for mixing the target gas and pre-regulating its pressure. The vacuum mechanical pump is connected to the pressure stabilization chamber for regulating the pressure within the chamber. The pressure stabilization chamber is relatively isolated from the gas shielding chamber, ensuring that the target gas, after pre-regulation by the pressure tank, maintains the set environmental pressure conditions upon entering the gas shielding chamber, thereby placing the sensor under test under the set pressure conditions. Preferably, the pressure control component can achieve continuous or graded adjustment within a pressure range of 0.1 Pa to 101 kPa to simulate low-pressure, variable-pressure, or pressure fluctuation conditions in aerospace environments.
[0011] The gas distribution assembly includes, but is not limited to, a mass flow meter, an auxiliary ventilation unit for gas replacement or emission, and a gas transport pipeline. The mass flow meter is connected via the gas transport pipeline to an external gas cylinder, a humidity control component, a pressure tank in a pressure control component, and a gas shielding chamber, respectively, to regulate the type, proportion, flow rate, and initial pressure of the gas entering the testing system. The target gas, pre-regulated by the mass flow meter and pressure tank, is introduced into a pressure stabilization chamber via the gas transport pipeline, and then into the gas shielding chamber, to achieve dynamic injection of the target gas under set pressure conditions. One end of the auxiliary ventilation unit is connected to the gas shielding chamber or pressure stabilization chamber, and the other end is connected to a fume hood, for ventilation after the test.
[0012] The humidity control component is connected to the gas distribution component and is used to regulate the humidity of the gas entering the test system to construct a test environment under different relative humidity conditions. The humidity control component includes one or more combinations of a humidity sensor, a gas bubbling device, an evaporation device, an ultrasonic humidifier, and a waterproof and breathable membrane. Preferably, the humidity control component can achieve humidity regulation within the range of 0 to 95% relative humidity, with a humidity control error of less than 5%.
[0013] The sensor performance testing components include, but are not limited to, a sensor performance testing bench, a digital source meter, and multimodal testing software; wherein the sensor performance testing bench is set in a gas-shielded chamber and connected to a temperature control component to establish target temperature conditions for the sensor under test; the sensor performance testing bench adopts a test connection structure with low contact resistance or low signal loss to achieve accurate evaluation of the electrical, optical, or multi-physical quantity response characteristics of the sensor. Attached Figure Description
[0014] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the embodiments of this application will be described below:
[0015] Figure 1 This is a schematic diagram of the structure of an in-situ sensing and evaluation device for simulating the effects of multiple physics fields in a space-air environment, as proposed in this invention.
[0016] Figure 2 This is a system overall functional block diagram of an in-situ sensing and evaluation device for simulating the effects of multiple physics fields in a space environment, as proposed in this invention.
[0017] Figure 3 To utilize the in-situ sensing and evaluation device proposed in this invention to simulate the effects of multiple physical fields in an aerospace environment, a temperature control curve from approximately 152.5 K to approximately 122.5 K is obtained, with a temperature control accuracy of <0.1 K, humidity ~0%, and air pressure at atmospheric pressure.
[0018] Figure 4The in-situ sensing evaluation device proposed in this invention, which simulates the effects of multiple physics fields in a simulated aerospace environment, is used to test the sensor performance in conjunction with temperature, gas, and humidity. Figure (a) shows the temperature sensor in... Figure 3 (a) Response to temperature changes; (b) Sensing response of the gas sensor under different concentrations of hydrogen gas at an ambient temperature of 100 K and an ambient humidity of ~0%.
[0019] Figure 5 To utilize the in-situ sensing and evaluation device proposed in this invention, which simulates the effects of multiple physics fields in a simulated aerospace environment, a performance evaluation graph of the sensor with temperature and gas concentration is generated in conjunction with temperature and gas.
[0020] Figure 1 The components are as follows: 1. Control lever; 2. Refrigerant evaporation port; 3. Electro-refrigeration assembly; 4. Refrigerant storage-evaporation assembly; 5. Temperature control assembly; 6. Pressure control assembly; 7. Optical excitation assembly; 8. Isolation chamber; 9. Pressure stabilization chamber; 10. Gas shielding chamber; 11. Sensor performance testing platform; 12. Dynamic gas distribution assembly; 13. Humidity control assembly; 14. Gas transport assembly; 15. Sensor performance testing assembly. Detailed Implementation
[0021] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the present invention, and not all of them. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. In the description of the present invention, it should be understood that the orientations or positional relationships shown in the illustrations are only for the convenience of describing the present invention and simplifying the description, and are not intended to indicate or imply that the components or elements referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as limiting the present invention. Example
[0022] This embodiment focuses on demonstrating the coordinated control of gas pressure, target gas concentration, and optical excitation components, used for in-situ performance evaluation of the sensor under test under controlled atmosphere, controlled gas pressure, and optical excitation conditions. Please refer to... Figure 1As shown, the device of the present invention includes a three-layer shell sample chamber, a temperature control component, a pressure control component, a dynamic gas distribution component, a humidity control component, an optical excitation component, and a sensor performance testing component. All components are integrated into the same testing system and work collaboratively under the unified scheduling of a host computer control program. The three-layer shell sample chamber, from the inside out, includes a gas shielding chamber 10, a pressure stabilization chamber 9, and an isolation chamber 8. The gas shielding chamber 10 is a relatively sealed metal cavity, inside which a sensor performance testing platform 11 is installed to support the sensor under test and create a stable testing atmosphere. The pressure stabilization chamber 9 is located outside the gas shielding chamber 10 and is connected to the gas shielding chamber 10 and the pressure control component 6, used to buffer and stabilize the ambient air pressure within the gas shielding chamber 10. The isolation chamber 8 is located on the outermost layer, used to isolate external air and humidity interference, and to provide an independent working space for the optical excitation component 7.
[0023] In this embodiment, the dynamic gas mixing component 12 first introduces hydrogen and nitrogen into the three-stage pressure tank of the pressure control component 6 according to a preset ratio for mixing. Under the action of the pressure control component 6, the pressure of the mixed gas is pre-regulated, thereby constructing a nitrogen:hydrogen gas ratio of 9:1 in the three-stage pressure tank and adjusting the gas environment to 0.1 Pa. Subsequently, the pre-regulated target gas is introduced into the pressure stabilization chamber 9 and further into the gas shielding chamber 10, so that the sensor under test is under the required gas composition and pressure conditions. The optical excitation component 7 is set in the isolation chamber 8 and provides ultraviolet light excitation conditions to the sensor under test in the gas shielding chamber 10 through the quartz glass interactive window. Under the synergistic effect of the above-mentioned pressure, gas concentration and optical excitation, the sensor performance testing component performs in-situ testing and evaluation of the electrical response, optical response or other signal response characteristics of the sensor under test. Example
[0024] This embodiment focuses on demonstrating the coordinated control of high-temperature environment, target gas concentration, and humidity conditions to evaluate the sensor's performance stability under high-temperature, multi-atmosphere conditions. Please refer to... Figure 1 As shown, the device of the present invention includes a three-layer shell sample chamber, a temperature control component, a gas pressure control component, a dynamic gas distribution component, a humidity control component, an optical excitation component, and a sensor performance testing component. All components are integrated into the same testing system and work collaboratively under the unified scheduling of a host computer control program. Specifically, a sensor performance testing platform 11 is installed inside the gas shielded chamber 10. The temperature control component 5 is connected to the gas shielded chamber 10 and is used to regulate the temperature of the testing environment. The isolation chamber 8 is located on the outermost layer to isolate external air and humidity interference and to provide an independent working space for the optical excitation component 7.
[0025] In this embodiment, the target temperature is set to 400 K through the host computer control program. The heating unit in the temperature control component 5 conducts contact heating on the sensor performance test bench 11, and the temperature signal is fed back in real time through the multi-point temperature sensor, so that the measured sensor is in a stable preset high-temperature environment. At the same time, the dynamic gas distribution component 12 and the humidity control component 13 work together. Carbon monoxide gas is introduced into the gas shielding chamber 10 through the gas transport component 14, and the relative humidity of the target gas is adjusted to 50%, so as to construct a test environment with a preset gas composition and relative humidity under high-temperature conditions. The host computer control program coordinates and schedules the temperature control component, the dynamic gas distribution component and the humidity control component to realize the combined regulation of temperature, gas concentration and humidity. The sensor performance test component tests the performance of the measured sensor under the above linkage conditions. Embodiment
[0026] This embodiment focuses on demonstrating the sensor performance test under a single gas environment condition, and is used to evaluate the basic response characteristics of the sensor to a specific gas. Please refer to Figure 1 As shown, the device of the present invention includes a three-layer shell sample cavity, a temperature control component, a pressure control component, a dynamic gas distribution component, a humidity control component, an optical excitation component and a sensor performance test component. Each component is integrated in the same test system and works together under the unified scheduling of the host computer control program.
[0027] In this embodiment, the temperature, pressure and humidity in the gas shielding chamber 10 are maintained in a relatively stable state, that is, the initial state. Only ammonia gas is injected into the gas shielding chamber 10 through the dynamic gas distribution component 12 to construct a preset gas atmosphere environment. The sensor performance test component tests the electrical or signal response of the measured sensor under this condition to obtain its basic performance parameters in a single gas environment. Embodiment
[0028] This embodiment focuses on demonstrating the full parameter linkage control of pressure, gas concentration, humidity and optical excitation conditions in a low-temperature environment, and is used to simulate the in-situ performance evaluation of sensors under complex working conditions. Please refer to Figure 1 As shown, the device of the present invention includes a three-layer shell sample cavity, a temperature control component, a pressure control component, a dynamic gas distribution component, a humidity control component, an optical excitation component and a sensor performance test component. Each component is integrated in the same test system and works together under the unified scheduling of the host computer control program.
[0029] As Figure 1As shown, the target temperature is set to 100 K, the air pressure to 10 Pa, the gas atmosphere to nitrogen, the humidity to 0%, and the optical excitation wavelength to 400 nm via the host computer control program. Liquid nitrogen is introduced into the refrigerant storage-evaporation assembly 4, which works in conjunction with the heating unit in the electric cooling assembly 3 and the temperature control assembly 5. The control lever 1 is adjusted to achieve a mechanical connection between the temperature control assembly 5 and the gas shielding chamber 10. The sensor performance test bench 11 is precisely controlled by contact temperature control to achieve low-temperature regulation of the environment inside the gas shielding chamber 10. The air pressure control assembly 6 is linked with the dynamic gas distribution assembly 12 to maintain the nitrogen pressure in the gas shielding chamber 10 at 10 Pa. The dynamic gas distribution assembly 12 and the humidity control assembly 13 work together to create a humidity environment. The optical excitation assembly 7 provides the 400 nm optical excitation condition to the sensor under test through the quartz glass interactive window. The host computer control program coordinates the above components to make temperature, air pressure, gas composition, humidity and optical excitation conditions independently controllable and linked within the set range, thereby constructing a stable multi-physics coupling test environment. Example
[0030] This embodiment focuses on high and low temperature cycling exposure conditions to test the reliability and stability of the sensor. In this embodiment, the temperature cycling exposure mode is set by the host computer control program, with the high temperature set to 373 K and the low temperature set to 273 K. Cooling is achieved through the electric cooling component 3, and the control lever 1 is adjusted to its lowest position, ensuring close contact with the gas shielding chamber. The temperature inside the gas shielding chamber is cyclically adjusted between high and low temperatures by the heating element of the temperature control component 5, subjecting the sensor under test to multiple temperature changes. During the temperature cycling process, the gas composition, pressure, and humidity conditions can be kept constant, or a dynamic gas distribution component and a pressure control component can be introduced for auxiliary adjustment according to test requirements. The sensor performance testing component continuously collects the performance data of the sensor under test during the temperature cycling process to evaluate its performance drift, response stability, and reliability under alternating high and low temperature conditions.
Claims
1. An in-situ sensing and evaluation device for simulating the effects of multiple physics fields in a space-air environment, characterized in that, include: The sample chamber, composed of a three-layer coaxial shell, consists of a gas shielding chamber, a pressure stabilization chamber, and an isolation chamber, from the inside out. A pressure control component, connected to the pressure stabilization chamber, is used to regulate the ambient air pressure inside the gas shielding chamber; a dynamic gas distribution component is used to deliver target gas to the gas shielding chamber to create a preset gas atmosphere; a humidity control component, connected to the dynamic gas distribution component, is used to regulate the humidity of the gas after passing through the dynamic gas distribution component; an optical excitation component, placed inside the isolation chamber, is used to provide optical excitation to the sensor or semiconductor device under test without disrupting the environmental conditions inside the gas shielding chamber; a sensor performance testing component is used to perform in-situ testing of the performance of the sensor under test under multi-physics field conditions; and a temperature control component, arranged vertically with the gas shielding chamber via a control rod, is used to adjust the test temperature of the sensor performance testing component or its surrounding environment.
2. The apparatus according to claim 1, characterized in that, The gas shielding chamber, the pressure stabilization chamber, and the isolation chamber are all metal cavities with quartz glass interactive windows, and they are composed of a coaxial structure.
3. The apparatus according to claim 1, characterized in that, The temperature control component includes at least one of a multi-point temperature sensor, a heating unit, an electric cooling component, and a refrigerant cooling component. The cooling component is connected to the gas shielded chamber via a control rod, and temperature conduction is achieved by adjusting its mechanical connection and relative position.
4. The apparatus according to claim 1, characterized in that, The temperature control component is used to adjust the temperature of the gas-shielded indoor environment or sensor performance test bench within the range of low to high temperature, and can achieve temperature adjustment within the range of 80~425 K with a temperature control error of less than 0.1 K.
5. The apparatus according to claim 1, characterized in that, The pressure control component includes at least a pressure gauge, a vacuum mechanical pump, and at least one pressure tank, and can achieve continuous or graded adjustment within a pressure range of 0.1 Pa to 101 kPa.
6. The apparatus according to claim 1, characterized in that, The optical excitation component is located in an isolation chamber and includes, but is not limited to, a xenon lamp light source and a laser generating module, which can output light radiation in the 190~2000 nm wavelength range.
7. The apparatus according to claim 1, characterized in that, The humidity control component includes one or more combinations of a humidity sensor, a gas bubbling device, an evaporation device, an ultrasonic humidifier, and a waterproof and breathable membrane, which can achieve humidity regulation within a relative humidity range of 0 to 95%, with a humidity control error of less than 5%.
8. The apparatus according to claim 1, characterized in that, The sensor performance testing components include, but are not limited to, a sensor performance testing bench, a digital source meter, and multimodal testing software, wherein the sensor performance testing bench is placed in a gas-shielded chamber.
9. The apparatus according to claim 1, characterized in that, The device also includes a host computer control program, which is used to coordinate the temperature control component, air pressure control component, dynamic gas distribution component, humidity control component and optical excitation component according to the test requirements, so as to achieve independent controllability and linkage adjustment of multiple physical field parameters.
10. The use of the in-situ sensing and evaluation device for simulating multiphysics field interactions in a simulated aerospace environment as described in claim 1, characterized in that, The device is used to construct a controllable multiphysics test environment to perform performance testing on sensors or semiconductor devices. The performance testing includes at least one of gas sensing detection, air pressure sensing detection, temperature sensing detection, photoelectric sensing detection, and humidity sensing detection. Its specific application scenarios include, but are not limited to, detection of harmful gases, monitoring of chemical reaction processes, and sensor performance evaluation under simulated conditions of commercial aerospace, space engineering, deep space exploration, energy systems, and multiple extreme environmental conditions.