Ammonia gas concentration detection method and device and ammonia gas detector

Abstract

The invention provides an ammonia concentration detection method and device and an ammonia detector, the detection method is applied to the ammonia detector, an ammonia sensor arranged in the ammonia detector is provided with a precious metal-doped working electrode, a reference electrode, a counter electrode and an ionic liquid electrolyte, and the method comprises the following steps: in the process of preparing a semiconductor, detecting the concentration of ammonia in the semiconductor, collecting a plurality of current values of ammonia gas in the target environment by using an ammonia gas sensor, and converting the current values into a first ammonia gas concentration value; carrying out progressive multi-stage noise filtering treatment on the first ammonia gas concentration value to obtain a second ammonia gas concentration value; based on the temperature value, compensating the second ammonia gas concentration value to obtain a target ammonia gas concentration value; and transmitting the target ammonia gas concentration value to interaction equipment so as to perform external interaction on the target ammonia gas concentration value. Through the method, the service life of the ammonia gas sensor is prolonged, and the detection efficiency, accuracy and stability of the ammonia gas concentration are improved.

Description

Technical Field

[0001] This application relates to the field of electrochemical sensor detection technology, and in particular to a method, apparatus and ammonia detector for detecting ammonia concentration. Background Technology

[0002] In the semiconductor manufacturing process, ammonia, as an alkaline gas, readily reacts with acidic gases to form ammonium salt particles. These particles adhere to the surface of the semiconductor wafer, severely impacting the performance and yield of the finished semiconductor product. Furthermore, the combination of ammonia and moisture can accelerate the corrosion of metal wires such as copper and aluminum, shortening equipment lifespan. In terms of personal safety, ammonia is irritating, and high-concentration leaks can harm the respiratory health of workers and even cause serious consequences such as explosions. Therefore, ammonia detection is a crucial step in controlling yield and ensuring safety and compliance in semiconductor manufacturing processes.

[0003] Currently, ammonia sensors have many drawbacks, such as bottlenecks in electrode sensitive materials and sensor packaging technology, insufficient selectivity and anti-interference capabilities, and low accuracy in terms of detection limit and resolution. In addition, the long dynamic response and recovery time of ammonia concentration detection using ammonia sensors directly reduces the lifespan of the ammonia sensors and decreases the efficiency, accuracy, and stability of ammonia concentration detection. Summary of the Invention

[0004] In view of this, the purpose of this application is to provide a method, apparatus, and ammonia detector for detecting ammonia concentration. By setting a working electrode doped with precious metals and an ionic liquid electrolyte in the ammonia sensor of the ammonia detector, the response speed and anti-interference ability of the ammonia sensor are improved. During the semiconductor fabrication process, multiple ammonia concentration values ​​corresponding to ammonia in the target environment are collected using the ammonia sensor and signal acquisition circuit. The ammonia concentration values ​​are then subjected to multi-level noise filtering and temperature compensation to obtain the target ammonia concentration value of the target environment. This target ammonia concentration value is then exchanged with the outside through an interactive device, thereby improving the service life of the ammonia sensor and enhancing the efficiency, accuracy, and stability of ammonia concentration detection.

[0005] This application provides a method for detecting ammonia concentration. The method is applied to an ammonia detector, which includes an ammonia sensor, a signal acquisition circuit, a temperature sensor, and an interactive device. The ammonia sensor includes a working electrode doped with a noble metal, a reference electrode, a counter electrode, and an ionic liquid electrolyte. The detection method includes: During the semiconductor fabrication process, the ammonia sensor is used to collect multiple current values ​​corresponding to ammonia in the target environment, and the signal acquisition circuit is used to convert the current values ​​into multiple corresponding first ammonia concentration values. The first ammonia concentration value is subjected to progressive multi-level noise filtering to obtain the second ammonia concentration value; The temperature value corresponding to the target environment is collected using the temperature sensor, and the second ammonia concentration value is compensated based on the temperature value to obtain the target ammonia concentration value corresponding to the target environment. The target ammonia concentration value is transmitted to the interactive device so that the target ammonia concentration value can be externally interacted with using the interactive device.

[0006] Furthermore, the step of using the ammonia sensor to collect multiple current values ​​corresponding to ammonia in the target environment includes: The ammonia sensor is preheated by powering on until the working electrode, the reference electrode, the counter electrode, and the ionic liquid electrolyte all reach a stable state. A polarization voltage is applied to the ammonia sensor using an external circuit. In the ionic liquid electrolyte, the reference electrode controls and protects the working electrode, and the working electrode causes the ammonia in the target environment to undergo an oxidation reaction to generate electrons, which then flow out through the external circuit. The electrons flowing into the external circuit are received by the counter electrode to form a current corresponding to the ammonia gas, and multiple current values ​​corresponding to the current are collected.

[0007] Furthermore, the step of performing progressive multi-level noise filtering on the first ammonia concentration value to obtain the second ammonia concentration value includes: Based on the first ammonia concentration value, the data standard deviation value is calculated, and each first ammonia concentration value is compared with the data standard deviation value to remove the first ammonia concentration values ​​that are greater than the data standard deviation value, thereby obtaining multiple ammonia concentration values ​​to be filtered. Based on a preset first sliding window, the ammonia concentration value to be filtered is subjected to median filtering to obtain multiple ammonia concentration values ​​to be processed. Based on a preset second sliding window, a weighted average is calculated on the ammonia concentration value to be processed to obtain a second ammonia concentration value.

[0008] Furthermore, the step of compensating the second ammonia concentration value based on the temperature value to obtain the target ammonia concentration value corresponding to the target environment includes: Based on a preset temperature compensation relationship, the temperature compensation coefficient corresponding to the temperature value is determined. Based on the temperature compensation coefficient and the second ammonia concentration value, a target ammonia concentration value corresponding to the target environment is determined to compensate for the second ammonia concentration value.

[0009] Furthermore, after obtaining the target ammonia concentration value, the detection method includes: The system acquires multiple historical target ammonia concentration values ​​stored in the past, and determines the drift value corresponding to the ammonia sensor based on the historical target ammonia concentration values ​​and the low point pattern among the target ammonia concentration values. Based on the drift value, the zero point value corresponding to the ammonia sensor is dynamically adjusted to correct the drift of the ammonia sensor.

[0010] This application embodiment also provides an ammonia concentration detection device, the detection device comprising: The data acquisition module is used to collect multiple current values ​​corresponding to ammonia in the target environment using an ammonia sensor during the semiconductor fabrication process, and to convert the current values ​​into multiple corresponding first ammonia concentration values ​​using a signal acquisition circuit. The filtering module is used to perform progressive multi-level noise filtering on the first ammonia concentration value to obtain the second ammonia concentration value. The data compensation module is used to collect the temperature value corresponding to the target environment using a temperature sensor, and to compensate the second ammonia concentration value based on the temperature value to obtain the target ammonia concentration value corresponding to the target environment. The data transmission module is used to transmit the target ammonia concentration value to an interactive device so that the target ammonia concentration value can be externally interacted with using the interactive device.

[0011] Furthermore, when the data acquisition module is used to collect multiple current values ​​corresponding to ammonia in the target environment using an ammonia sensor, the data acquisition module is used to: The ammonia sensor is preheated by powering on until the working electrode, the reference electrode, the counter electrode, and the ionic liquid electrolyte all reach a stable state. A polarization voltage is applied to the ammonia sensor using an external circuit. In the ionic liquid electrolyte, the reference electrode controls and protects the working electrode, and the working electrode causes the ammonia in the target environment to undergo an oxidation reaction to generate electrons, which then flow out through the external circuit. The electrons flowing into the external circuit are received by the counter electrode to form a current corresponding to the ammonia gas, and multiple current values ​​corresponding to the current are collected.

[0012] Furthermore, when the filtering module performs progressive multi-level noise filtering on the first ammonia concentration value to obtain the second ammonia concentration value, the filtering module is used to: Based on the first ammonia concentration value, the data standard deviation value is calculated, and each first ammonia concentration value is compared with the data standard deviation value to remove the first ammonia concentration values ​​that are greater than the data standard deviation value, thereby obtaining multiple ammonia concentration values ​​to be filtered. Based on a preset first sliding window, the ammonia concentration value to be filtered is subjected to median filtering to obtain multiple ammonia concentration values ​​to be processed. Based on a preset second sliding window, a weighted average is calculated on the ammonia concentration value to be processed to obtain a second ammonia concentration value.

[0013] Furthermore, when the data compensation module is used to compensate the second ammonia concentration value based on the temperature value to obtain the target ammonia concentration value corresponding to the target environment, the data compensation module is used to: Based on a preset temperature compensation relationship, the temperature compensation coefficient corresponding to the temperature value is determined. Based on the temperature compensation coefficient and the second ammonia concentration value, a target ammonia concentration value corresponding to the target environment is determined to compensate for the second ammonia concentration value.

[0014] Furthermore, the detection device also includes a drift correction module, which is used for: The system acquires multiple historical target ammonia concentration values ​​stored in the past, and determines the drift value corresponding to the ammonia sensor based on the historical target ammonia concentration values ​​and the low point pattern among the target ammonia concentration values. Based on the drift value, the zero point value corresponding to the ammonia sensor is dynamically adjusted to correct the drift of the ammonia sensor.

[0015] This application embodiment also provides an ammonia detector, including: an ammonia sensor, a signal acquisition circuit, a temperature sensor, and an interactive device. The ammonia sensor is provided with a working electrode doped with precious metals, a reference electrode, a counter electrode, and an ionic liquid electrolyte. When the ammonia detector is running, it performs the steps of the ammonia concentration detection method described above.

[0016] This application embodiment also provides an electronic device, including: a processor, a memory, and a bus. The memory stores machine-readable instructions executable by the processor. When the electronic device is running, the processor communicates with the memory via the bus. When the machine-readable instructions are executed by the processor, the steps of the ammonia concentration detection method described above are performed.

[0017] This application also provides a computer-readable storage medium storing a computer program that, when executed by a processor, performs the steps of the ammonia concentration detection method described above.

[0018] This application provides an ammonia concentration detection method, apparatus, and ammonia detector. The detection method is applied to an ammonia detector, which includes an ammonia sensor, a signal acquisition circuit, a temperature sensor, and an interactive device. The ammonia sensor includes a working electrode doped with a noble metal, a reference electrode, a counter electrode, and an ionic liquid electrolyte. The detection method includes: during semiconductor fabrication, using the ammonia sensor to acquire multiple current values ​​corresponding to ammonia in a target environment, and using the signal acquisition circuit to convert these current values ​​into multiple corresponding first ammonia concentration values; performing progressive multi-level noise filtering on the first ammonia concentration values ​​to obtain second ammonia concentration values; using the temperature sensor to acquire the temperature value corresponding to the target environment, and compensating the second ammonia concentration value based on the temperature value to obtain a target ammonia concentration value corresponding to the target environment; and transmitting the target ammonia concentration value to the interactive device for external interaction.

[0019] Compared with existing methods that directly detect ammonia concentration using an ammonia sensor, this method improves the response speed and anti-interference capability of the ammonia sensor by incorporating a working electrode doped with precious metals and an ionic liquid electrolyte in the ammonia sensor of the ammonia detector. Furthermore, during the semiconductor fabrication process, the ammonia sensor and signal acquisition circuit collect multiple ammonia concentration values ​​corresponding to the ammonia in the target environment. These values ​​are then subjected to multi-level noise filtering and temperature compensation to obtain the target ammonia concentration value for the target environment. This target ammonia concentration value is then shared with an external device, extending the lifespan of the ammonia sensor and enhancing the efficiency, accuracy, and stability of ammonia concentration detection.

[0020] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0021] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the structure of an ammonia detector provided in an embodiment of this application; Figure 2 This is one of the flowcharts for a method of detecting ammonia concentration provided in the embodiments of this application; Figure 3 This is a second flowchart of a method for detecting ammonia concentration provided in an embodiment of this application; Figure 4 This is one of the structural schematic diagrams of an ammonia concentration detection device provided in an embodiment of this application; Figure 5 This is a second schematic diagram of the structure of an ammonia concentration detection device provided in an embodiment of this application; Figure 6 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely represents selected embodiments of this application. Based on the embodiments of this application, every other embodiment obtained by those skilled in the art without inventive effort falls within the scope of protection of this application.

[0024] Research has revealed numerous drawbacks to current ammonia sensors. These include limitations in electrode sensitive materials and sensor packaging processes, insufficient selectivity and anti-interference capabilities, and low accuracy in detection limits and resolution. Furthermore, the long dynamic response and recovery times of ammonia concentration detection using ammonia sensors directly reduce the sensor's lifespan and decrease the efficiency, accuracy, and stability of ammonia concentration detection.

[0025] Based on this, this application provides a method for detecting ammonia concentration. By setting a working electrode doped with noble metal and an ionic liquid electrolyte in the ammonia sensor of the ammonia detector, the response speed and anti-interference ability of the ammonia sensor are improved. During the semiconductor fabrication process, multiple ammonia concentration values ​​corresponding to ammonia in the target environment are collected using the ammonia sensor and signal acquisition circuit. The ammonia concentration values ​​are then subjected to multi-level noise filtering and temperature compensation to obtain the target ammonia concentration value of the target environment. This target ammonia concentration value is then exchanged with the outside through an interactive device, thereby improving the service life of the ammonia sensor and enhancing the efficiency, accuracy, and stability of ammonia concentration detection.

[0026] Please see Figure 1 , Figure 1This is a schematic diagram of the structure of an ammonia detector provided in an embodiment of this application. Figure 1 As shown, the ammonia detector 10 is equipped with an ammonia sensor 100, a signal acquisition circuit 200, a temperature sensor 300, an interactive device 500, and an ammonia concentration detection device 400 provided in this embodiment of the application; furthermore, the ammonia detector 10 is also equipped with a backup battery 600, a power module 700, and an auxiliary module component 800.

[0027] The temperature sensor 300 may also integrate auxiliary detection sensors such as pressure sensors and environmental sensors; the signal acquisition circuit 200 is equipped with a universal asynchronous transceiver, which serves as a communication interface for transmitting detection data; the backup battery 600 is used for backup power supply, suitable for portable or field monitoring scenarios; the interactive device 500 includes a display device and interactive controls.

[0028] Here, since ammonia sensors typically require a stable DC power supply, the operating voltage range of the power module 700 can be set to 3.3V to 5V. For example, the power module 700 can support DC power supply of 3.3 to 5.5V (e.g., less than 5mA).

[0029] The auxiliary module component 800 includes, but is not limited to, analog interfaces, relays, network modules, and sampling pumps.

[0030] In this embodiment, the ammonia sensor 100 is provided with a working electrode doped with noble metal, a reference electrode, a counter electrode, and an ionic liquid electrolyte. The working electrode is used for the oxidation or reduction reaction of ammonia. The counter electrode provides a current loop to receive electrons. The reference electrode is used to maintain the working electrode potential stable. The ionic liquid electrolyte is used to conduct ions. In addition, the ammonia sensor 100 is also provided with a gas-permeable membrane to allow gas diffusion in while preventing electrolyte leakage.

[0031] Here, when the ammonia sensor 100 detects the ammonia concentration, when the ammonia diffuses through the permeable membrane to the surface of the working electrode, an electrochemical reaction occurs at a specific potential, generating a current signal that is proportional to the ammonia concentration. For example, in an ionic liquid electrolyte, ammonia decomposes into ions and may undergo an oxidation reaction on the working electrode. The generated current, after amplification and processing, can be converted into an ammonia concentration reading.

[0032] In this embodiment, the noble metal-doped electrode is prepared by using a noble metal as a catalyst, which is mixed with a dispersant to form an electrode slurry, and then molded onto a carrier material using printing technology. In the integration of the ionic liquid electrolyte, the ionic liquid is adsorbed into the conductive cotton and acts as an electrolyte filling the space between the electrode and the gas inlet. This structure maintains electrolyte stability through capillary action, avoiding volatilization or crystallization problems. Thus, the interface effect of noble metal doping enables the controllable introduction of oxygen vacancies, enhancing ammonia adsorption and catalytic decomposition capabilities, and significantly improving the response time.

[0033] The application of noble metal-doped electrodes in electrochemical ammonia sensors is mainly achieved by enhancing the electrocatalytic activity of the material and improving the adsorption and reaction efficiency of ammonia. Noble metals (such as platinum, palladium, and silver) can be introduced into the electrode material through doping or modification. Common carriers include carbon nanomaterials or metal oxides. The mechanisms of action include: enhanced catalytic activity, as the surface of noble metals has abundant active sites that can promote the electrochemical reaction of ammonia; optimized electron transfer, as the high conductivity of noble metals reduces the electrode resistance and shortens the electron transfer path; and improved adsorption capacity, as noble metal modification can increase oxygen vacancies or defect sites on the material surface, enhancing the physical and chemical adsorption of ammonia molecules.

[0034] Furthermore, noble metal-doped electrodes can achieve selective response to specific gases by precisely controlling the molecular structure on the surface of the catalyst layer. Specific applications include alloying strategies and core-shell structure design. In addition, the application of noble metal-doped electrodes can improve the sensor's ability to resist alcohol interference and cross-interference.

[0035] It should be noted that the limitations of traditional electrolytes include: high vapor pressure (easy to evaporate and lose in semiconductor negative pressure environments); narrow electrochemical window (limited working potential); low solubility for ammonia (limited sensitivity); strong corrosiveness (short lifespan of electrodes and casing); poor stability (high temperature sensitivity); and abnormal performance under negative pressure (easy to generate bubbles).

[0036] Based on this, the ionic liquid electrolyte system in the ammonia sensor 100 described in this application possesses characteristics such as high stability, long lifespan, resistance to high temperature and humidity, and strong resistance to alcohol interference. The electrolyte is a key component in the electrochemical sensor used for ion conduction and maintaining electrochemical reactions. Together with the electrodes, it constitutes the ion transport medium, enabling the electron transfer process. During sensor operation, the target gas diffuses through the permeable membrane to the electrode surface, undergoing oxidation or reduction reactions. The electrolyte provides the necessary ion channels, ensuring stable current signal generation. The properties of the electrolyte directly affect the sensor's sensitivity, stability, and lifespan. Traditional aqueous electrolytes may suffer from leakage or evaporation problems, while ionic liquid electrolytes contribute to instrument miniaturization and improve adaptability to testing environments.

[0037] The advantages of the ionic liquid electrolyte in the ammonia sensor 100 described in this application include: extremely low vapor pressure (does not dry out); wide electrochemical window (optimized operating potential); high gas solubility (NH3 solubility is 3-5 times higher), high thermal stability, and non-corrosiveness.

[0038] Here, the ammonia sensor 100 described in this application embodiment coats the active material in solid form onto the electrode surface, resulting in a relatively mild reaction rate. Although this improvement slows down the internal reaction rate, it significantly increases the total amount of active material that can be loaded onto the larger electrode surface within the sensor. Therefore, the lifespan of the ammonia sensor 100 is greatly extended.

[0039] Please see Figure 2 , Figure 2 This is one of the flowcharts for a method of detecting ammonia concentration provided in an embodiment of this application. Figure 2 As shown in the embodiments of this application, the method for detecting ammonia concentration is typically applied in applications such as... Figure 1 The detection method in the ammonia detector shown includes: S101. During the semiconductor fabrication process, the ammonia sensor is used to collect multiple current values ​​corresponding to ammonia in the target environment, and the signal acquisition circuit is used to convert the current values ​​into multiple corresponding first ammonia concentration values.

[0040] It should be noted that the manufacturing of semiconductor devices (such as chips) is an extremely complex and precise process, with main stages including wafer fabrication, thin film deposition, photolithography, etching, ion implantation, chemical mechanical polishing, and metallization, which are repeated multiple times. The ammonia concentration detection method described in this application is mainly applied to thin film deposition and related chamber cleaning or exhaust gas treatment processes.

[0041] The target environment is the environment in which ammonia concentration is expected to be detected during the semiconductor fabrication process.

[0042] In this step, after obtaining multiple current values ​​corresponding to ammonia in the target environment collected by the ammonia sensor, the signal acquisition circuit converts each current value into a first ammonia concentration value in real time according to the linear equation calibrated at the factory (e.g., concentration (ppm) = current (nA) / sensitivity (nA / ppm) + zero offset).

[0043] In one possible embodiment of this application, in specific implementation, the step S101 of collecting multiple current values ​​corresponding to ammonia in the target environment using the ammonia sensor may include: S1011. The ammonia sensor is preheated by powering on until the working electrode, the reference electrode, the counter electrode, and the ionic liquid electrolyte all reach a stable state.

[0044] In this step, the ammonia sensor is preheated by power-on (e.g., preheating for 5-15 minutes) until the working electrode, the reference electrode, the counter electrode, and the ionic liquid electrolyte all reach an electrochemically stable state, that is, the baseline current fluctuation is less than a preset threshold.

[0045] S1012. A polarization voltage is applied to the ammonia sensor using an external circuit, so that the reference electrode controls and protects the working electrode in the ionic liquid electrolyte, and the working electrode causes the ammonia in the target environment to undergo an oxidation reaction to generate electrons, which then flow out through the external circuit.

[0046] For example, a constant polarization voltage (e.g., +0.4V to +0.7V) is applied to the ammonia sensor using an external circuit (part of the signal acquisition circuit). At this voltage, the potential of the reference electrode remains stable in the ionic liquid electrolyte, thereby precisely controlling and protecting the potential of the working electrode. Ammonia gas diffused to the surface of the working electrode undergoes an electrochemical oxidation reaction (e.g., 2NH3 → N2 + 6H2O). + + 6e - The electrons produced by the reaction flow out through an external circuit.

[0047] S1013. The electrons flowing into the external circuit are received by the counter electrode to form the current corresponding to the ammonia gas, and multiple current values ​​corresponding to the current are collected.

[0048] In this step, the counter electrode receives electrons flowing in from the external circuit to balance the reaction of the working electrode, thereby forming a Faraday current in the external circuit that is proportional to the ammonia concentration. The current detection unit in the signal acquisition circuit continuously acquires multiple current values ​​corresponding to the current at a certain sampling frequency, and converts them into multiple first ammonia concentration values ​​through a pre-stored calibration curve (e.g., current-concentration relationship).

[0049] S102. Perform progressive multi-level noise filtering on the first ammonia concentration value to obtain the second ammonia concentration value.

[0050] In one possible implementation of this application, step S102 may include: S1021. Based on the first ammonia concentration value, calculate the data standard deviation value, and compare each first ammonia concentration value with the data standard deviation value to remove the first ammonia concentration values ​​that are greater than the data standard deviation value, thereby obtaining multiple ammonia concentration values ​​to be filtered.

[0051] In this step, based on multiple first ammonia concentration values ​​acquired within a recent time window (e.g., the past 30 seconds), a data standard deviation value for multiple first ammonia concentration values ​​is calculated. Then, each first ammonia concentration value within the window is compared with this standard deviation value (e.g., if the difference between a data point and the sequence mean is greater than 2 times the standard deviation), so that first ammonia concentration values ​​that deviate significantly from the main body (usually caused by transient strong interference) are removed as outliers, resulting in multiple ammonia concentration values ​​to be filtered.

[0052] S1022. Based on a preset first sliding window, perform median filtering on the ammonia concentration value to be filtered to obtain multiple ammonia concentration values ​​to be processed.

[0053] In this step, based on a preset first sliding window (e.g., with a width of 5 data points), median filtering is performed on the processed multiple ammonia concentration values ​​to be filtered, that is, the median of all data in the window is taken as the multiple ammonia concentration values ​​to be processed corresponding to the center point of the window.

[0054] This effectively filters out impulse noise in the data while preserving the edge features of the signal relatively well.

[0055] S1023. Based on the preset second sliding window, the ammonia concentration value to be processed is calculated by weighted average to obtain the second ammonia concentration value.

[0056] In this step, a weighted average is calculated for multiple ammonia concentration values ​​to be processed based on a preset second sliding window (e.g., with a width of 9 data points, usually larger than the first window). Specifically, the data at the center of the window is given the highest weight, and the weights of the data on both sides decrease sequentially. The weighted average is calculated as the second ammonia concentration value at that moment, thus smoothing out random noise in the data.

[0057] S103. The temperature value corresponding to the target environment is collected using the temperature sensor, and the second ammonia concentration value is compensated based on the temperature value to obtain the target ammonia concentration value corresponding to the target environment.

[0058] In one possible implementation of this application, step S103 may include: S1031. Based on the preset temperature compensation relationship, determine the temperature compensation coefficient corresponding to the temperature value.

[0059] For example, based on a preset temperature compensation relationship (which is obtained through laboratory calibration and is usually stored as a lookup table or fitting formula), a temperature compensation coefficient corresponding to the temperature value collected by the current temperature sensor is determined. This coefficient reflects the proportion of change in sensor sensitivity relative to the standard temperature at the current temperature.

[0060] S1032. Based on the temperature compensation coefficient and the second ammonia concentration value, determine the target ammonia concentration value corresponding to the target environment, so as to compensate the second ammonia concentration value.

[0061] In this step, based on the type of temperature compensation coefficient, the temperature compensation coefficient is applied to the second ammonia concentration value to determine the target ammonia concentration value corresponding to the target environment, so as to compensate for the second ammonia concentration value.

[0062] S104. The target ammonia concentration value is transmitted to the interactive device so as to use the interactive device to perform external interaction on the target ammonia concentration value.

[0063] Here, external interaction may include displaying externally, transmitting data to the corresponding client, and storing data at a specified location.

[0064] Optional, please refer to Figure 3 , Figure 3 This is a second flowchart illustrating a method for detecting ammonia concentration provided in an embodiment of this application. Figure 3 As shown in the figure, the ammonia concentration detection method provided in this application embodiment includes steps S105 to S106 in addition to steps S101 to S104. Specifically, steps S105 to S106 are used to explain the method for correcting the drift of the ammonia sensor.

[0065] S105. Obtain multiple historical target ammonia concentration values ​​stored in history, and determine the drift value corresponding to the ammonia sensor based on the low point pattern of the historical target ammonia concentration values ​​and the target ammonia concentration values.

[0066] In this embodiment, multiple historical target ammonia concentration values ​​are acquired (e.g., values ​​recorded during process breaks or periods when the ammonia concentration is known to be zero within the past 24 hours). Then, the low point patterns between these historical values ​​and the current target ammonia concentration value are analyzed (e.g., finding the periodic lowest point of the concentration reading, which usually corresponds to the "purge" or "standby" phase in the process, when the actual ammonia concentration should be close to zero). Based on this pattern, the drift value corresponding to the ammonia sensor, i.e., the deviation between the current zero point reading and the theoretical zero point, can be identified and determined.

[0067] S106. Based on the drift value, dynamically adjust the zero point value corresponding to the ammonia sensor to correct the drift of the ammonia sensor.

[0068] In this step, the zero-point value corresponding to the ammonia sensor is dynamically adjusted based on the drift value, which is the zero-point offset in the signal processing algorithm. Specifically, the drift of the ammonia sensor is corrected in a progressive manner using the zero-point value, thereby maintaining long-term measurement accuracy without manual intervention.

[0069] The ammonia concentration detection method provided in this application improves the response speed and anti-interference ability of the ammonia sensor by setting a working electrode doped with noble metal and an ionic liquid electrolyte in the ammonia sensor of the ammonia detector. During the semiconductor fabrication process, the ammonia sensor and signal acquisition circuit collect multiple ammonia concentration values ​​corresponding to ammonia in the target environment, and perform multi-level noise filtering and temperature compensation on the ammonia concentration values ​​to obtain the target ammonia concentration value of the target environment. The target ammonia concentration value is then exchanged with the outside through an interactive device, which improves the service life of the ammonia sensor and enhances the efficiency, accuracy, and stability of ammonia concentration detection.

[0070] Please see Figure 4 , Figure 5 , Figure 4 This is one of the structural schematic diagrams of an ammonia concentration detection device provided in an embodiment of this application. Figure 5 This is a second schematic diagram of an ammonia concentration detection device provided in an embodiment of this application. Figure 4 As shown, the detection device 400 includes: The data acquisition module 410 is used to collect multiple current values ​​corresponding to ammonia in the target environment using an ammonia sensor during the semiconductor fabrication process, and to convert the current values ​​into multiple corresponding first ammonia concentration values ​​using a signal acquisition circuit. The filtering module 420 is used to perform progressive multi-level noise filtering on the first ammonia concentration value to obtain the second ammonia concentration value. The data compensation module 430 is used to collect the temperature value corresponding to the target environment using a temperature sensor, and to compensate the second ammonia concentration value based on the temperature value to obtain the target ammonia concentration value corresponding to the target environment. The data transmission module 440 is used to transmit the target ammonia concentration value to an interactive device so that the target ammonia concentration value can be externally interacted using the interactive device.

[0071] Furthermore, when the data acquisition module 410 is used to collect multiple current values ​​corresponding to ammonia in the target environment using an ammonia sensor, the data acquisition module 410 is used to: The ammonia sensor is preheated by powering on until the working electrode, the reference electrode, the counter electrode, and the ionic liquid electrolyte all reach a stable state. A polarization voltage is applied to the ammonia sensor using an external circuit. In the ionic liquid electrolyte, the reference electrode controls and protects the working electrode, and the working electrode causes the ammonia in the target environment to undergo an oxidation reaction to generate electrons, which then flow out through the external circuit. The electrons flowing into the external circuit are received by the counter electrode to form a current corresponding to the ammonia gas, and multiple current values ​​corresponding to the current are collected.

[0072] Furthermore, when the filtering module 420 performs progressive multi-level noise filtering on the first ammonia concentration value to obtain the second ammonia concentration value, the filtering module 420 is used to: Based on the first ammonia concentration value, the data standard deviation value is calculated, and each first ammonia concentration value is compared with the data standard deviation value to remove the first ammonia concentration values ​​that are greater than the data standard deviation value, thereby obtaining multiple ammonia concentration values ​​to be filtered. Based on a preset first sliding window, the ammonia concentration value to be filtered is subjected to median filtering to obtain multiple ammonia concentration values ​​to be processed. Based on a preset second sliding window, a weighted average is calculated on the ammonia concentration value to be processed to obtain a second ammonia concentration value.

[0073] Furthermore, when the data compensation module 430 is used to compensate the second ammonia concentration value based on the temperature value to obtain the target ammonia concentration value corresponding to the target environment, the data compensation module 430 is used to: Based on a preset temperature compensation relationship, the temperature compensation coefficient corresponding to the temperature value is determined. Based on the temperature compensation coefficient and the second ammonia concentration value, a target ammonia concentration value corresponding to the target environment is determined to compensate for the second ammonia concentration value.

[0074] Furthermore, such as Figure 5 As shown, the detection device 400 further includes a drift correction module 450, which is used for: The system acquires multiple historical target ammonia concentration values ​​stored in the past, and determines the drift value corresponding to the ammonia sensor based on the historical target ammonia concentration values ​​and the low point pattern among the target ammonia concentration values. Based on the drift value, the zero point value corresponding to the ammonia sensor is dynamically adjusted to correct the drift of the ammonia sensor.

[0075] The ammonia concentration detection device provided in this application improves the response speed and anti-interference ability of the ammonia sensor by setting a working electrode doped with noble metal and an ionic liquid electrolyte in the ammonia sensor of the ammonia detector. During the semiconductor fabrication process, the ammonia sensor and signal acquisition circuit collect multiple ammonia concentration values ​​corresponding to ammonia in the target environment, and perform multi-level noise filtering and temperature compensation on the ammonia concentration values ​​to obtain the target ammonia concentration value of the target environment. The target ammonia concentration value is then exchanged with the outside through an interactive device, which improves the service life of the ammonia sensor and enhances the efficiency, accuracy, and stability of ammonia concentration detection.

[0076] Please see Figure 6 , Figure 6 This is a schematic diagram of the structure of an electronic device provided in an embodiment of this application. Figure 6 As shown, the electronic device 60 includes a processor 610, a memory 620, and a bus 630.

[0077] The memory 620 stores machine-readable instructions executable by the processor 610. When the electronic device 60 is in operation, the processor 610 and the memory 620 communicate via bus 630. When the machine-readable instructions are executed by the processor 610, they can perform the operations described above. Figure 2 as well as Figure 3 The steps of the ammonia concentration detection method in the illustrated method embodiment can be found in the method embodiment for specific implementation, and will not be repeated here.

[0078] This application also provides a computer-readable storage medium storing a computer program, which, when executed by a processor, can perform the above-described actions. Figure 2 as well as Figure 3 The steps of the ammonia concentration detection method in the illustrated method embodiment can be found in the method embodiment for specific implementation, and will not be repeated here.

[0079] Those skilled in the art will understand that, for the sake of convenience and brevity, the specific working processes of the systems, devices, and units described above can be referred to the corresponding processes in the foregoing method embodiments, and will not be repeated here.

[0080] In the several embodiments provided in this application, it should be understood that the disclosed systems, apparatuses, and methods can be implemented in other ways. The apparatus embodiments described above are merely illustrative. For example, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. Furthermore, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Additionally, the shown or discussed mutual couplings, direct couplings, or communication connections may be through some communication interfaces; indirect couplings or communication connections between devices or units may be electrical, mechanical, or other forms.

[0081] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0082] In addition, the functional units in the various embodiments of this application can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit.

[0083] If the aforementioned functions are implemented as software functional units and sold or used as independent products, they can be stored in a processor-executable, non-volatile, computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art, or a portion of the technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) to execute all or part of the steps of the methods described in the various embodiments of this application. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0084] Finally, it should be noted that the above-described embodiments are merely specific implementations of this application, used to illustrate the technical solutions of this application, and not to limit them. The scope of protection of this application is not limited thereto. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that any person skilled in the art can still modify or easily conceive of changes to the technical solutions described in the foregoing embodiments, or make equivalent substitutions for some of the technical features, within the scope of the technology disclosed in this application. Such modifications, changes, or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application, and should all be covered within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A method for detecting ammonia concentration, characterized in that, The detection method is applied to an ammonia detector, which includes an ammonia sensor, a signal acquisition circuit, a temperature sensor, and an interactive device. The ammonia sensor includes a working electrode doped with a noble metal, a reference electrode, a counter electrode, and an ionic liquid electrolyte. The detection method comprises: During the semiconductor fabrication process, the ammonia sensor is used to collect multiple current values ​​corresponding to ammonia in the target environment, and the signal acquisition circuit is used to convert the current values ​​into multiple corresponding first ammonia concentration values. The first ammonia concentration value is subjected to progressive multi-level noise filtering to obtain the second ammonia concentration value; The temperature value corresponding to the target environment is collected using the temperature sensor, and the second ammonia concentration value is compensated based on the temperature value to obtain the target ammonia concentration value corresponding to the target environment. The target ammonia concentration value is transmitted to the interactive device so that the target ammonia concentration value can be externally interacted with using the interactive device.

2. The method according to claim 1, characterized in that, The method of collecting multiple current values ​​corresponding to ammonia in the target environment using the ammonia sensor includes: The ammonia sensor is preheated by powering on until the working electrode, the reference electrode, the counter electrode, and the ionic liquid electrolyte all reach a stable state. A polarization voltage is applied to the ammonia sensor using an external circuit. In the ionic liquid electrolyte, the reference electrode controls and protects the working electrode, and the working electrode causes the ammonia in the target environment to undergo an oxidation reaction to generate electrons, which then flow out through the external circuit. The electrons flowing into the external circuit are received by the counter electrode to form a current corresponding to the ammonia gas, and multiple current values ​​corresponding to the current are collected.

3. The method according to claim 1, characterized in that, The step of performing progressive multi-level noise filtering on the first ammonia concentration value to obtain the second ammonia concentration value includes: Based on the first ammonia concentration value, the data standard deviation value is calculated, and each first ammonia concentration value is compared with the data standard deviation value to remove the first ammonia concentration values ​​that are greater than the data standard deviation value, thereby obtaining multiple ammonia concentration values ​​to be filtered. Based on a preset first sliding window, the ammonia concentration value to be filtered is subjected to median filtering to obtain multiple ammonia concentration values ​​to be processed. Based on a preset second sliding window, a weighted average is calculated on the ammonia concentration value to be processed to obtain a second ammonia concentration value.

4. The method according to claim 1, characterized in that, The step of compensating the second ammonia concentration value based on the temperature value to obtain the target ammonia concentration value corresponding to the target environment includes: Based on a preset temperature compensation relationship, the temperature compensation coefficient corresponding to the temperature value is determined. Based on the temperature compensation coefficient and the second ammonia concentration value, a target ammonia concentration value corresponding to the target environment is determined to compensate for the second ammonia concentration value.

5. The method according to claim 1, characterized in that, After obtaining the target ammonia concentration value, the detection method includes: The system acquires multiple historical target ammonia concentration values ​​stored in the past, and determines the drift value corresponding to the ammonia sensor based on the historical target ammonia concentration values ​​and the low point pattern among the target ammonia concentration values. Based on the drift value, the zero point value corresponding to the ammonia sensor is dynamically adjusted to correct the drift of the ammonia sensor.

6. A device for detecting ammonia concentration, characterized in that, The detection device includes: The data acquisition module is used to collect multiple current values ​​corresponding to ammonia in the target environment using an ammonia sensor during the semiconductor fabrication process, and to convert the current values ​​into multiple corresponding first ammonia concentration values ​​using a signal acquisition circuit. The filtering module is used to perform progressive multi-level noise filtering on the first ammonia concentration value to obtain the second ammonia concentration value. The data compensation module is used to collect the temperature value corresponding to the target environment using a temperature sensor, and to compensate the second ammonia concentration value based on the temperature value to obtain the target ammonia concentration value corresponding to the target environment. The data transmission module is used to transmit the target ammonia concentration value to an interactive device so that the target ammonia concentration value can be externally interacted with using the interactive device.

7. The apparatus according to claim 6, characterized in that, The detection device further includes a drift correction module, which is used for: The system acquires multiple historical target ammonia concentration values ​​stored in the past, and determines the drift value corresponding to the ammonia sensor based on the historical target ammonia concentration values ​​and the low point pattern among the target ammonia concentration values. Based on the drift value, the zero point value corresponding to the ammonia sensor is dynamically adjusted to correct the drift of the ammonia sensor.

8. An ammonia detector, characterized in that, include: The ammonia sensor, signal acquisition circuit, temperature sensor, and interactive device are provided. The ammonia sensor is equipped with a working electrode doped with precious metal, a reference electrode, a counter electrode, and an ionic liquid electrolyte. The ammonia detector performs the steps of the ammonia concentration detection method as described in any one of claims 1 to 5 when it is running.

9. An electronic device, characterized in that, include: The device includes a processor, a memory, and a bus. The memory stores machine-readable instructions executable by the processor. When the electronic device is running, the processor communicates with the memory via the bus. The machine-readable instructions are executed by the processor to perform the steps of the ammonia concentration detection method as described in any one of claims 1 to 5.

10. A computer-readable storage medium, characterized in that, The computer-readable storage medium stores a computer program that, when executed by a processor, performs the steps of the ammonia concentration detection method as described in any one of claims 1 to 5.

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