Multi-layer heat insulation pipeline for conveying gas

Abstract

The invention provides a multi-layer heat insulation pipeline used for conveying gas. The multi-layer heat insulation pipeline used for conveying first gas comprises an inner pipeline and an outer pipeline. The first gas is conveyed in the inner pipeline in the gas extraction direction. The inner pipeline is provided with a plurality of through holes. The inner pipeline is arranged in the outer pipeline. The outer pipeline comprises an air inlet pipe. The second gas is firstly heated or cooled and then is injected into the outer pipeline from the gas inlet pipe. The second gas is non-reactive with respect to the first gas. The first pressure of the first gas is less than the second pressure of the second gas.

Description

Technical Field

[0001] This invention relates to a multi-layer insulated pipeline for transporting gas, and more particularly to a multi-layer insulated pipeline for transporting gas in which the temperature of the gas transported in the pipeline can be controlled or maintained without being affected by the external ambient temperature, thereby significantly reducing the energy consumption for temperature control, and making it less likely to form deposited particles or generate process by-product deposits and blockages during the gas transport process. Background Technology

[0002] In the manufacturing processes of semiconductors and optoelectronic devices, various thin-film deposition technologies are widely used, including chemical vapor deposition (CVD) using precursors for chemical reaction deposition, atomic layer deposition (ALD), and physical vapor deposition (PVD) using plasma sputtering. In CVD, the removal of precursors and reactive gases after the surface reaction, and in PVD, the removal of exhaust gases after the process, play a crucial role in process yield and production. These deposition processes are typically performed in a vacuum environment, and the equipment is placed in a cleanroom. Exhaust gases are treated and discharged through the plant's exhaust system. Therefore, the exhaust system must effectively treat process exhaust gases, including: incompletely reacted precursors and reactive gases, byproducts generated during the process, particles generated during the process, corrosive gases, etc.

[0003] The aforementioned exhaust system will install various pipelines to connect process equipment (e.g., deposition equipment) with extraction equipment (e.g., dry pumps) and exhaust gas treatment equipment, such as pipelines from the process equipment to the dry pump or from the dry pump to the exhaust gas treatment equipment, etc. The gases transported in these pipelines can cause the following situations: particle deposition due to process generation, deposition caused by unreacted precursors and reactive gases; particle deposition from process byproducts or particle accumulation caused by corrosive gases. The aforementioned deposition or particle accumulation will cause particle issue in the process, reducing yield, and when it accumulates to a certain level, it is necessary to shut down the machine to replace or clean the pipeline, resulting in process delays.

[0004] To reduce the deposition of particles or process byproducts in the gas transported through these pipelines, existing technologies typically employ indirect heating elements encased in the pipeline. These indirect heating elements involve fixing heating wires or thermal resistance elements to a fabric made of heat-resistant fibers or to a silicone sheet, followed by bonding insulation material to the outside of the covering. The structure is typically: insulation material / heating wire / heat-resistant fiber fabric (covering) or silicone / heating wire / silicone. However, the indirect heating caused by these existing heating elements, bonded to heat-resistant fibers or silicone, results in low heating efficiency and significant energy consumption when the exhaust system is held at a constant temperature. Furthermore, the lifespan of exhaust pipelines using indirect heating elements is limited by the aforementioned deposition or particle buildup, indicating significant room for improvement. Furthermore, the insulation efficiency of indirect heating components that fix the heating element to the other side with heat-resistant fiber filling and silicone or aerogel insulation is not optimal, and there is a risk of fiber breakage and silicone and aerogel powdering, which will affect the cleanliness of the cleanroom itself.

[0005] Furthermore, the piping used in the aforementioned exhaust system is primarily rigid piping. However, rigid piping takes longer to configure and assemble, requires additional fittings at bends, and necessitates corresponding indirect heating elements to cover its surroundings. Summary of the Invention

[0006] Therefore, the technical problem to be solved by the present invention is to provide a multi-layered insulated pipeline for transporting gas and reducing pipeline temperature holding energy consumption, so that the gas transported in the pipeline is not prone to the deposition of particles or the deposition and blockage of the pipeline wall caused by process by-products, unreacted precursors and reactive gases.

[0007] According to a first preferred embodiment of the present invention, a multilayer insulated conduit for conveying a first gas includes an inner conduit and an outer conduit. The first gas is conveyed in the inner conduit along the extraction direction. The inner conduit has a plurality of through holes. The inner conduit is disposed within the outer conduit. The outer conduit includes an inlet pipe. A second gas is selectively injected from the inlet pipe into a first interlayer between the outer and inner conduits. The second gas is non-reactive relative to the first gas. When the second gas is injected from the inlet pipe into the first interlayer between the outer and inner conduits, the second gas is first heated or cooled before being injected from the inlet pipe into the first interlayer between the outer and inner conduits, and the first pressure of the first gas is less than the second pressure of the second gas.

[0008] Furthermore, the multilayer insulated piping according to a first preferred embodiment of the present invention further includes an insulation layer and a heating element. An inner piping and an outer piping are disposed within the insulation layer. The air inlet pipe of the outer piping extends to the outside of the insulation layer. A second interlayer between the insulation layer and the outer piping is evacuated. The heating element is attached to the outer periphery of the outer piping. The heating element is used to heat the outer piping.

[0009] Furthermore, the multilayer insulated piping according to a first preferred embodiment of the present invention also includes a plurality of thermal insulation support members. The plurality of thermal insulation support members are spaced apart on the outer periphery of the outer piping to separate the inner periphery of the insulation layer from the heating element.

[0010] In one specific embodiment, the average aperture of the plurality of through holes can range from 1 micrometer to 10 millimeters.

[0011] In one specific embodiment, the distribution density of the plurality of through holes can range from 0.001 to 1000 holes per centimeter of tube length.

[0012] According to a second preferred embodiment of the invention, a multilayer conduit for conveying a first gas includes a flexible metal hose and an outer conduit. The first gas is conveyed within the flexible metal hose in a pumping direction. The flexible metal hose has multiple slits. The flexible metal hose is disposed within the outer conduit. The outer conduit includes an inlet pipe. A second gas is selectively injected from the inlet pipe into a first interlayer between the outer conduit and the flexible metal hose. The second gas is non-reactive relative to the first gas. When the second gas is injected from the inlet pipe into the first interlayer between the outer conduit and the flexible metal hose, the second gas is first heated or cooled before being injected from the inlet pipe into the first interlayer between the outer conduit and the flexible metal hose, and the first pressure of the first gas is less than the second pressure of the second gas.

[0013] Furthermore, according to a second preferred embodiment of the present invention, the multilayer insulated piping further includes a heating element insulation layer and a heating element. A flexible metal hose and an outer pipe are disposed within the insulation layer. The air inlet pipe of the outer pipe extends to the outside of the insulation layer. A second interlayer between the insulation layer and the outer pipe is evacuated. The heating element is attached to the outer periphery of the outer pipe. The heating element is used to heat the outer pipe.

[0014] Furthermore, the multilayer insulated piping according to a second preferred embodiment of the present invention further includes a plurality of thermal insulation support members. The plurality of thermal insulation support members are spaced apart on the outer periphery of the outer piping to separate the inner periphery of the insulation layer from the heating element.

[0015] In one specific embodiment, the average spacing between the multiple slits can range from 0.1 micrometers to 5000 micrometers.

[0016] In one specific embodiment, the distribution density of the plurality of slits ranges from 0.001 to 100 slits per centimeter of tube length.

[0017] Unlike existing technologies, the multi-layer insulated piping system according to the present invention utilizes a temperature- and flow-controlled second gas (non-reactive gas) injected into the interlayer between the outer piping and the inner piping or flexible metal hose to infiltrate into the inner piping or flexible metal hose that carries the first gas. Based on vacuum flow characteristics, the infiltrated second gas forms a gas shield on the inner wall of the inner piping or flexible metal hose, preventing the first gas from clogging the inner piping or flexible metal hose during transport due to particle deposition or process byproduct deposition. Furthermore, by reducing heat transfer methods such as conduction and convection through the vacuum-formed interlayer between the insulation layer and the outer piping, heat transfer and loss can be significantly reduced when temperature control is applied to the outer piping and the encased inner piping, improving energy efficiency and ensuring stable temperature of the transported fluid, achieving better heating and insulation effects. The multi-layer insulated piping system according to the present invention has extremely high heating efficiency, thus improving energy utilization efficiency. Due to its modular design, the multi-layer insulated piping system according to the present invention has a short assembly time and is even flexible, requiring no additional fittings or heating elements.

[0018] The advantages and spirit of this invention can be further understood through the following detailed description of the invention and the accompanying drawings. Attached Figure Description

[0019] Figure 1 This is a partial cross-sectional view of a multilayer insulated pipeline according to a first preferred embodiment of the present invention;

[0020] Figure 2 This is a partial cross-sectional view of a multilayer insulated pipeline according to a second preferred embodiment of the present invention;

[0021] Figure 3 The graph shows the power consumption measurement results of room temperature nitrogen gas with an additional flow rate of 100 SLM and a stable temperature of 180°C as an example and comparative example of the present invention.

[0022] Figure 4 A photograph of the inlet end of the pipeline used as a comparison example after 90 days of continuous operation.

[0023] Figure 5 A photograph of the outlet end of the pipeline used as a comparison example after 90 days of continuous operation.

[0024] Figure 6 A photograph of the inlet end of a multi-layer insulated pipeline, an example of the present invention, after 90 days of continuous use.

[0025] Figure 7 This is a photograph of the outlet end of a multi-layered insulated pipeline, an example of the present invention, after 90 days of continuous use.

[0026] 1: Multi-layer insulated piping

[0027] 10: Internal piping

[0028] 102: Through hole

[0029] 12: External piping

[0030] 120: outer perimeter

[0031] 122: Intake pipe

[0032] 14: Insulation layer

[0033] 140: Inner periphery

[0034] 16: Heating element

[0035] 18: Thermal insulation support components

[0036] 2: Multi-layer insulated piping

[0037] 20: Flexible metal hose tubing

[0038] 202: Gap

[0039] 22: External piping

[0040] 220: outer perimeter

[0041] 222: Intake pipe

[0042] 24: Insulation layer

[0043] 240: Inner periphery

[0044] 26: Heating element

[0045] 28: Thermal insulation support components

[0046] g1: First gas

[0047] g2: Second gas

[0048] vd: Exhaust direction Detailed Implementation

[0049] Please see Figure 1 , Figure 1 The diagram shows a partial cross-sectional view schematically illustrating a multi-layered insulated conduit 1 for conveying a first gas g1 according to a first preferred embodiment of the present invention. The multi-layered insulated conduit 1 according to the first preferred embodiment of the present invention can be used to connect various devices and equipment in gas conveying or exhaust systems in the manufacturing fields of semiconductor devices, optoelectronic devices, etc. The first gas g1 can be process exhaust gas discharged from the system. Figure 1 In the diagram, the first gas g1 is represented by a two-dimensional arrow.

[0050] like Figure 1 As shown, the multilayer insulated pipeline 1 for conveying the first gas g1 according to a first preferred embodiment of the present invention includes an inner pipeline 10 and an outer pipeline 12.

[0051] The first gas g1 is transported within the inner pipe 10 along the extraction direction vd. The inner pipe 10 has multiple through holes 102. The inner pipe 10 is disposed within the outer pipe 12. The outer pipe 12 includes an inlet pipe 122. The inlet of the inlet pipe 122 may be located near the head end of the multilayer insulated pipe 1 according to the first preferred embodiment of the present invention (i.e., near the inlet of the first gas g1), but the present invention is not limited thereto. The outlet of the inlet pipe 122 connects to the first interlayer between the outer pipe 12 and the inner pipe 10.

[0052] The second gas g2 is selectively injected from the inlet pipe 122 of the outer pipe 12 into the first interlayer between the outer pipe 12 and the inner pipe 10. The second gas g2 is non-reactive relative to the first gas g1; for example, the second gas g2 can be an inert gas such as nitrogen or argon. Whether or not the second gas g2 is injected depends on the condition of the first gas g1 being transported. For example, if the first gas g1 being transported is dust with low particulate content or a gas with low reactivity, the second gas g2 may not need to be injected.

[0053] When the second gas g2 is injected into the first interlayer between the outer pipeline 12 and the inner pipeline 10 from the inlet pipe 122 of the outer pipeline 12, the second gas g2 is first heated or cooled and its flow rate is controlled (the flow rate can be 0) before being injected into the first interlayer between the outer pipeline 12 and the inner pipeline 10. The temperature and flow rate of the second gas g2 can be selectively adjusted according to the state of the first gas g1 (e.g., gas reactivity, viscosity, particulate content, etc.) (or it can be completely omitted). In particular, the inlet pressure p1 of the first gas g1 is less than the second pressure p2 of the second gas g2. Thus, the temperature- and flow-controlled second gas g2 will permeate into the inner pipeline 10 that transports the first gas g1. According to the vacuum flow characteristics in the inner pipeline 10, the permeated temperature-controlled second gas g2 will form a gas shield on the inner wall of the inner pipeline 10 to prevent the first gas g1 from clogging the inner pipeline 10 due to particle deposition or process by-product deposition during transportation. At Figure 1 In the diagram, the second gas g2 is also represented by a two-dimensional arrow.

[0054] In one specific embodiment, the inner conduit 10 may be a flexible metal hose. Thus, the inner conduit 10 can be bent.

[0055] In one specific embodiment, the outer conduit 12 may be a compressible pitch corrugated conduit. Therefore, the outer conduit 12 can be bent.

[0056] In one specific embodiment, the average pore size of the plurality of through holes 102 can range from 1 micrometer to 10 millimeters. By adjusting the average pore size of the plurality of through holes 102, the range and flow field of the second gas g2, which is controlled by temperature and flow rate, infiltrating into the inner pipe 10 can be controlled.

[0057] In one specific embodiment, the distribution density of the plurality of through holes 102 can range from 0.001 to 1000 holes per centimeter of pipe length. By adjusting the distribution density range of the plurality of through holes 102, the extent and flow field of the second gas g2 permeating into the inner pipe 10, which is controlled by temperature and flow rate, can be controlled.

[0058] The distance between any two through holes in a plurality of through holes ranges from 5 micrometers to 5 meters.

[0059] Furthermore, similarly Figure 1 As shown, the multi-layer insulated pipeline 1 according to the first preferred embodiment of the present invention further includes an insulation layer 14 and a heating element 16. An inner pipeline 10 and an outer pipeline 12 are disposed within the insulation layer 14. The air inlet of the air inlet pipe 122 extends to the outside of the insulation layer 14. The insulation layer 14 is primarily an airtight and expandable corrugated pipe, used to isolate the heating element 16 from direct exposure to the external environment, and forms a second interlayer between it and the outer pipeline 12. After pipeline assembly, the second interlayer is evacuated to a vacuum environment (<1 atm) to form thermal insulation. The heating element 16 is attached to and directly contacts the outer periphery 120 of the outer pipeline 12. The heating element 16 is used to directly heat the outer pipeline 12. Because the second interlayer between the insulation layer 14 and the outer pipeline 12 is in a vacuum state, heat dissipation and loss of the heating element 16 to the outside are significantly reduced. Therefore, the heating of the multi-layer insulated pipeline 1 according to the first preferred embodiment of the present invention is extremely energy-efficient.

[0060] Furthermore, similarly Figure 1 As shown, the multilayer insulated piping 1 according to a first preferred embodiment of the present invention further includes a plurality of thermal insulation support members 18. The plurality of thermal insulation support members 18 are spaced apart on the outer periphery 120 of the outer piping 12 and contact the inner periphery 140 of the insulation layer 14. The outer diameter of the thermal insulation support members 18 is larger than the outer diameter of the heating element 16 to separate the inner periphery 140 of the insulation layer 14 from the heating element 16, preventing contact between the insulation layer 14 and the heating element 16. Therefore, the heating element 16 does not conduct heat through contact with the insulation layer 14, and the second interlayer, which forms a vacuum between the insulation layer 14 and the outer piping 12, ensures its thermal insulation effect.

[0061] In one specific embodiment, the vacuum value of the second interlayer that forms a vacuum can range from 1×10⁻⁶. -8 The range of vacuum levels is from 760 torr. This range of vacuum levels can provide varying degrees of insulation.

[0062] The thermal conductivity of the various insulating coating materials used in the aforementioned indirect heating elements is described below. The thermal conductivity of cloth made from Nomex heat-resistant fibers is approximately 0.04 to 0.06 W / m·K. The thermal conductivity of silicone is approximately 0.2 to 0.3 W / m·K. The thermal conductivity of aerogel is approximately between 0.01 and 0.02 W / m·K.

[0063] In the multilayer insulated pipeline 1 according to a first preferred embodiment of the present invention, a vacuum-sealed second interlayer is used to block heat conduction to the outside of the multilayer insulated pipeline 1 according to the first preferred embodiment of the present invention. The relationship between the vacuum degree of the second interlayer and its thermal conductivity is illustrated below using nitrogen as an example. When the vacuum degree of the second interlayer is atmospheric pressure (~1 atm), the thermal conductivity of nitrogen is approximately 0.025 W / m·K. When the vacuum degree of the second interlayer is low vacuum (~0.1 atm), the thermal conductivity of nitrogen decreases significantly, to approximately 0.002 to 0.005 W / m·K. When the vacuum degree of the second interlayer is medium vacuum (~0.01 atm), the thermal conductivity of nitrogen decreases further, to approximately 0.0002 to 0.0005 W / m·K. When the vacuum degree of the second interlayer is high vacuum (~0.001 atm), the thermal conductivity of nitrogen is extremely low, to approximately 0.00002 W / m·K. When the vacuum degree of the second interlayer is ultra-high vacuum (~10) -5 At 10 atm or lower, the thermal conductivity of nitrogen is very close to zero, possibly as low as 10 atm. -8 W / m·K or lower.

[0064] Please see Figure 2 , Figure 2 The diagram shows a partial cross-sectional view schematically illustrating a multi-layered insulated conduit 2 for conveying a first gas g1 according to a second preferred embodiment of the present invention. The multi-layered insulated conduit 2 according to the second preferred embodiment of the present invention can be used to connect gas delivery or exhaust systems of various related process equipment in the manufacturing fields of semiconductor devices, optoelectronic devices, etc. The first gas g1 can be an incompletely reacted process reaction gas or process exhaust gas. Figure 2 In the diagram, the first gas g1 is represented by a two-dimensional arrow.

[0065] Figure 2 As shown, the multi-layered insulated conduit 2 for conveying a first gas g1 according to a second preferred embodiment of the present invention includes a flexible metal hose conduit 20 and an outer conduit 22. The first gas g1 is conveyed within the flexible metal hose conduit 20 in the pumping direction vd. The flexible metal hose conduit 20 has a plurality of slits 202. That is, the flexible metal hose conduit 20 can be a corrugated conduit, a metal snap-fit ​​interlocking design, or a flexible metal channel similar to a coupling, cut by laser.

[0066] A flexible metal hose 20 is disposed within an outer hose 22. The outer hose 22 includes an inlet pipe 222. The inlet of the inlet pipe 222 may be located near the head end of the multilayer insulated hose 2 according to a second preferred embodiment of the present invention (i.e., near the inlet of the first gas g1), but the present invention is not limited thereto. The outlet of the inlet pipe 222 connects to the first interlayer between the outer hose 22 and the flexible metal hose 20.

[0067] The second gas g2 is selectively injected from the inlet pipe 222 of the outer pipe 22 into the first interlayer between the outer pipe 22 and the flexible metal hose 20. The second gas g2 is non-reactive relative to the first gas g1; for example, the second gas g2 can be an inert gas such as nitrogen or argon. Whether or not the second gas g2 is injected depends on the condition of the first gas g1 being transported. For example, if the first gas g1 being transported is dust with low particulate content or a gas with low reactivity, the second gas g2 may not need to be injected.

[0068] When the second gas g2 is injected into the first interlayer between the outer pipe 22 and the flexible metal hose 20 from the inlet pipe 222 of the outer pipe 22, the second gas g2 is first heated or cooled and its flow rate is controlled before being injected into the first interlayer between the outer pipe 22 and the flexible metal hose 20. The temperature and flow rate of the second gas g2 can be selectively adjusted (or not injected at all) depending on the state of the first gas g1 (e.g., gas reactivity, viscosity, particulate content, etc.). In particular, the inlet pressure p1 of the first gas g1 is less than the second pressure p2 of the second gas g2. Therefore, the second gas g2, controlled by temperature and flow rate, will slightly permeate into the flexible metal hose 20 that delivers the first gas g1. Based on the vacuum flow characteristics within the flexible metal hose 20, the temperature-controlled second gas g2 that infiltrates will form an air shield on the inner wall of the flexible metal hose 20 to prevent the first gas g1 from clogging the flexible metal hose 20 due to particle deposition or process byproduct deposition during transportation. Figure 2 In the diagram, the second gas g2 is also represented by a two-dimensional arrow.

[0069] Furthermore, similarly Figure 2As shown, the multi-layer insulated pipeline 2 according to the first preferred embodiment of the present invention further includes an insulation layer 24 and a heating element 26. A flexible metal hose 20 and an outer pipeline 22 are disposed within the insulation layer 24. The air inlet of the air inlet pipe 222 extends to the outside of the insulation layer 14. The insulation layer 24 is primarily an airtight and expandable thin metal layer used to isolate the heating element 26 from direct exposure to the external environment, forming a second interlayer between it and the outer pipeline 22. After pipeline assembly, the second interlayer is evacuated to a vacuum environment, creating thermal insulation. The heating element 26 is attached to and directly contacts the outer periphery 220 of the outer pipeline 22. The heating element 26 is used to directly heat the outer pipeline 22. Because the second interlayer between the insulation layer 24 and the outer pipeline 22 is in a vacuum state, heat dissipation and loss of the heating element 26 are significantly reduced. Therefore, the heating of the multi-layer insulated pipeline 2 according to the second preferred embodiment of the present invention is extremely energy-efficient.

[0070] Furthermore, similarly Figure 2 As shown, the multilayer insulated piping 2 according to a second preferred embodiment of the present invention further includes a plurality of thermal insulation support members 28. The plurality of thermal insulation support members 28 are spaced apart on the outer periphery 220 of the outer piping 22 and contact the inner periphery 240 of the insulation layer 24. The outer diameter of the thermal insulation support members 28 is larger than the outer diameter of the heating element 26, thereby isolating the inner periphery 240 of the insulation layer 24 from the heating element 26 and preventing contact between the insulation layer 24 and the heating element 26. Thus, the heating element 26 does not conduct heat through contact with the insulation layer 24, and the second interlayer, which forms a vacuum between the insulation layer 24 and the outer piping 22, ensures its thermal insulation effect.

[0071] In one specific embodiment, the outer conduit 22 may be a compressible pitch corrugated conduit. Therefore, the outer conduit 22 can be bent.

[0072] In one specific embodiment, the average spacing of the plurality of slits 202 can range from 0.1 micrometers to 5000 micrometers. By adjusting the average spacing of the plurality of slits 202, the range and velocity field of the second gas g2, which is controlled by temperature and flow rate, penetrating into the flexible metal hose 20 can be controlled.

[0073] In one specific embodiment, the distribution density of the plurality of slits 202 ranges from 0.001 to 100 slits per centimeter of pipe length. By adjusting the average spacing of the plurality of slits 202, the range and velocity field of the second gas g2 permeating the flexible metal hose 20 under temperature and flow control can be controlled.

[0074] An example of the multi-layer insulated piping according to the present invention employs an interlocking type slit-plane flexible metal hose with an inner diameter equivalent to the diameter (50mm) of an NW50 pipe, and the length of the interlocking type slit-plane flexible metal hose is equal to 1.5m. In this example, the interlocking type flexible metal hose is disposed within a corrugated outer pipe, and the heating element is wound around the outer circumference of the corrugated outer pipe. This example also places the interlocking type flexible metal hose and the corrugated outer pipe within an insulation layer. A thermal insulation support member prevents the heating element from directly contacting the inner circumference of the insulation layer, and a vacuum is evacuated between the insulation layer and the corrugated outer pipe to block heat conduction.

[0075] Please see Figure 3 , Figure 3 The power consumption measurement results of a multilayer insulated pipeline of an example of the second preferred embodiment of the present invention, stably maintained at 180°C with an additional 100 SLM flow rate of ambient temperature nitrogen over time, are shown. In comparison, the comparative example uses an NW50 pipeline and an indirect heating element that is fixed between 5mm thick silicone sheets, with the indirect heating element covering the outer periphery of the NW50 pipeline. The power consumption measurement results of the comparative example pipeline heated to 180°C and maintained at 180°C over time are also shown. Figure 3 .Depend on Figure 3 The results show that, compared with the comparative example, the power consumption of the multilayer thermal insulation pipeline of the present invention can be reduced by more than 30% compared with the comparative example.

[0076] Please see Figure 4 , Figure 5 , Figure 6 and Figure 7 , Figure 4 This is a photograph of the inlet end of the pipeline in the comparative example above after 90 days of continuous use. Figure 5 This is a photograph of the outlet end of the pipeline of the above comparative example after 90 days of continuous use. Figure 6 The above-described example of the multi-layer insulated piping is shown in the inlet photograph after 90 days of continuous use. Figure 7 This is a photograph of the outlet end of the multi-layer insulated piping in the above example after 90 days of continuous use. Figure 4 and Figure 5 It was confirmed that in the comparative example, after 90 days of continuous use, the inner walls of the inlet and outlet pipes showed significant particle deposition and severe blockage. In contrast, Figure 6 and Figure 7 It has been confirmed that, after 90 days of continuous use, no obvious particle deposits were found on the inner walls of the inlet and outlet pipes of the multi-layer insulated pipes of the present invention.

[0077] Through the detailed description of the present invention above, it is clear that the multi-layer insulated pipeline according to the present invention can utilize a second gas (non-reactive gas) injected into the outer pipeline, with temperature and flow control, to slightly infiltrate the inner pipeline transporting the first gas. Based on the characteristics of vacuum flow, the infiltrated, temperature- and flow-controlled second gas forms a gas shield on the inner wall of the inner pipeline, preventing the deposition of particles from the first gas or deposition due to incomplete reaction, and preventing the generation of process byproducts that could block the inner pipeline. Furthermore, through the arrangement of the heating element and the vacuum insulation of the interlayer between the insulation layer and the inner pipeline, the multi-layer insulated pipeline according to the present invention has extremely high heating efficiency and energy utilization efficiency in maintaining temperature. The modular configuration of the multi-layer insulated pipeline according to the present invention results in a shorter assembly time, and it is even flexible, requiring no additional pipe fittings or additional heating elements.

[0078] The detailed description of the preferred embodiments above is intended to more clearly illustrate the features and spirit of the present invention, and is not intended to limit the scope of the invention to the preferred embodiments disclosed above. Rather, the aim is to cover various changes and equivalent arrangements within the scope of the claims of the present invention. Therefore, the scope of the claims of the present invention should be interpreted in the broadest possible sense based on the foregoing description, so as to cover all possible changes and equivalent arrangements.

Claims

1. A multi-layer insulated pipeline for conveying a first gas, comprising: An inner conduit, in which the first gas is transported along the extraction direction, the inner conduit having multiple through holes; and An outer pipeline, wherein the inner pipeline is disposed within the outer pipeline, the outer pipeline includes an inlet pipe, wherein a second gas is selectively injected from the inlet pipe into a first interlayer between the outer pipeline and the inner pipeline, the second gas being non-reactive relative to the first gas, and when the second gas is injected from the inlet pipe into the first interlayer between the outer pipeline and the inner pipeline, the second gas is first heated or cooled before being injected from the inlet pipe into the first interlayer between the outer pipeline and the inner pipeline, and the first pressure of the first gas is less than the second pressure of the second gas.

2. The multi-layer insulated pipeline according to claim 1, further comprising: An insulation layer, the inner and outer pipes are disposed within the insulation layer, the air inlet pipe extends to the outside of the insulation layer, and a second interlayer between the insulation layer and the outer pipe is evacuated; and A heating element is attached to the outer periphery of the outer conduit, and the heating element is used to heat the outer conduit.

3. The multi-layer insulated pipeline according to claim 2, further comprising: Multiple thermal insulation support members are spaced apart on the outer periphery of the outer pipeline to separate the inner periphery of the insulation layer from the heating element.

4. The multilayer thermal insulation pipeline according to claim 1, wherein the average pore diameter of the plurality of through holes ranges from 1 micrometer to 10 millimeters.

5. The multilayer thermal insulation pipeline according to claim 1, wherein the distribution density of the plurality of through holes ranges from 0.001 to 1000 holes per centimeter of pipe length.

6. A multi-layered insulated pipeline for conveying a first gas, comprising: A flexible metal hose, wherein the first gas is delivered within the flexible metal hose in the pumping direction, the flexible metal hose having multiple slits; and An external conduit, wherein the flexible metal hose is disposed within the external conduit, the external conduit includes an inlet pipe, wherein a second gas is selectively injected from the inlet pipe into a first interlayer between the external conduit and the flexible metal hose, the second gas being non-reactive relative to the first gas, wherein when the second gas is injected from the inlet pipe into the first interlayer between the external conduit and the flexible metal hose, the second gas is first heated or cooled before being injected from the inlet pipe into the first interlayer between the external conduit and the flexible metal hose, and the first pressure of the first gas is less than the second pressure of the second gas.

7. The multi-layer insulated pipeline according to claim 6, further comprising: An insulation layer, the flexible metal hose and the outer pipe are disposed within the insulation layer, the air inlet pipe extends to the outside of the insulation layer, and a second interlayer between the insulation layer and the outer pipe is evacuated; and A heating element is attached to the outer periphery of the outer conduit, and the heating element is used to heat the outer conduit.

8. The multi-layer insulated pipeline according to claim 7, further comprising: Multiple thermal insulation support members are spaced apart on the outer periphery of the outer pipeline to separate the inner periphery of the insulation layer from the heating element.

9. The multilayer insulated piping according to claim 6, wherein the average spacing of the plurality of gaps ranges from 0.1 micrometers to 5000 micrometers.

10. The multilayer insulated pipeline according to claim 6, wherein the distribution density of the plurality of slits ranges from 0.001 to 100 slits per centimeter of pipe length.

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