Vacuum coating visual detection device for multi-station mechanical positioning

Abstract

The invention relates to a multi-station mechanical positioning vacuum coating visual detection device, and relates to the technical field of visual detection. The multi-station mechanical positioning vacuum coating visual detection device comprises a device body, a conveying mechanism and a plurality of detection mechanisms are arranged on the device body, the plurality of detection mechanisms are used for performing different visual detections on a device to be detected, the conveying mechanism comprises an annular guide rail, a station carrying disc and a conveying assembly, and the conveying assembly is arranged on the annular guide rail. The annular guide rail is arranged on the device body, one side of the annular guide rail is located below each detection mechanism, the number of the station carrying discs is multiple, one end of each station carrying disc is embedded in the annular guide rail, and each station carrying disc is used for placing a to-be-detected device; the conveying assembly is used for driving each station carrying disc to move in the extending direction of the annular guide rail. The vacuum coating detection device has the effect of improving the detection efficiency of the vacuum coating.

Description

Technical Field

[0001] This application relates to the field of visual inspection technology, and in particular to a multi-station mechanical positioning vacuum coating visual inspection device. Background Technology

[0002] Vacuum coating technology is a technique that deposits materials onto a substrate surface in a vacuum environment using physical or chemical methods to form a functional thin film. It can be used to prepare antireflective films to reduce reflection, manufacture high-reflection films, and create optical filters, thus playing a vital role in optics, electronics, and display industries. However, because the quality of the vacuum coating directly determines the performance of the product, and because microscopic defects in vacuum coatings are difficult to detect with the naked eye, they generally require inspection using a vacuum coating visual inspection device.

[0003] Regarding the aforementioned technologies, since vacuum coating generally requires multiple different visual inspections (such as PECVD coating appearance inspection, thin film high-speed online inspection, etc.), and in existing technologies, different inspections generally require different inspection equipment, this often requires personnel to manually transport and position the device to be inspected between different inspection equipment when inspecting vacuum coatings. This reduces the inspection efficiency of vacuum coatings and therefore needs to be improved. Summary of the Invention

[0004] To improve the inspection efficiency of vacuum coatings, this application provides a multi-station mechanical positioning vacuum coating visual inspection device.

[0005] This application provides a multi-station mechanical positioning vacuum coating visual inspection device, which adopts the following technical solution: A multi-station mechanical positioning vacuum coating visual inspection device includes a device body, on which a conveying mechanism and several inspection mechanisms are provided. The inspection mechanisms are used to perform different visual inspections on the devices to be inspected. The conveying mechanism includes an annular guide rail, station trays, and a conveying assembly. The annular guide rail is disposed on the device body, with one side located below each of the inspection mechanisms. Several station trays are provided, with one end of each tray embedded in the annular guide rail. Each station tray is used to place the device to be inspected. The conveying assembly is used to drive each station tray to move along the extension direction of the annular guide rail.

[0006] By adopting the above technical solution, compared with the prior art, different tests generally require different testing equipment, which means that when testing vacuum coatings, relevant personnel need to manually transport the devices to be tested between different testing equipment, reducing the testing efficiency of vacuum coatings; this application, by setting up a conveying mechanism and several testing mechanisms, allows the devices to be tested (i.e., the testing mechanisms) to be uniformly set on the device body, and allows the conveying component to drive the tray of each station to move along the extension direction of the annular guide rail, so that the tray of each station can move directly under different testing mechanisms for different tests, thereby eliminating the need for relevant personnel to manually transport the devices to be tested between several testing mechanisms, realizing automated transportation and multi-station testing of the devices to be tested, effectively facilitating the operation of relevant personnel, and thus effectively reducing the time required to transport the devices to be tested between different testing mechanisms, thereby improving the testing efficiency of vacuum coatings.

[0007] Preferably, the device body is also provided with a discharge mechanism, which includes a discharge guide rail, a collection box, a loading box and a discharge assembly. The collection box and the loading box are both located on one side of the annular guide rail. One end of the discharge guide rail is close to the annular guide rail, and the other end extends downward to the top of the collection box. The discharge assembly is used to transport the qualified devices from the workstation tray to the loading box.

[0008] By adopting the above technical solution and configuring the discharge mechanism, when the inspection is qualified, the discharge component can transport the qualified device from the workstation tray to the material box, thereby realizing the transportation of the workstation tray. When the inspection is unqualified, the unqualified device on the workstation tray can be moved to the collection box via the discharge guide rail for unified storage. This eliminates the need for personnel to manually remove and output the device from the workstation tray, effectively improving the inspection efficiency of vacuum coating.

[0009] Preferably, each of the workstation trays is provided with a tilting frame and a tilting mechanism. The end of the tilting frame near the outer side of the annular guide rail is used to rotate relative to the corresponding workstation tray. The tilting mechanism is used to drive the corresponding tilting frame to rotate, so that the end of the corresponding tilting frame moves above the discharge guide rail.

[0010] By adopting the above technical solution, the tilting frame and tilting mechanism are designed so that when a defective vacuum coating is detected on a device, when the workstation tray containing the defective device moves close to the discharge guide rail, the tilting mechanism can drive the corresponding tilting frame to rotate relative to the workstation tray. This allows the defective device on the workstation tray to fall onto the discharge guide rail and then into the collection box, thus achieving centralized collection of the defective device.

[0011] Preferably, the tilting mechanism includes a rotating frame and a tilting component. One end of the rotating frame is rotatably connected to the corresponding workstation tray, and the other end is on the tilting frame. The annular guide rail drives the rotating frame to rotate through the tilting component.

[0012] By adopting the above technical solution, the arrangement of the rotating frame and the tilting component enables the tilting component to drive the rotating frame to rotate when the workstation tray containing defective parts moves close to the discharge guide rail, thereby causing the tilting frame set on the rotating frame to rotate, and thus realizing the drive of the tilting frame to rotate.

[0013] Preferably, the annular guide rail is provided with an inclined groove, the extension direction of the inclined groove is the same as the extension direction of the annular guide rail, and the inclined groove extends towards the discharge guide rail from the side close to the discharge guide rail. The inclined component includes a movable frame and a movable rod. The movable frame is slidably connected to the corresponding workstation tray, and one end extends into the inclined groove and abuts against the inner wall of the inclined groove. One end of the movable rod is rotatably connected to the movable frame, and the other end is rotatably connected to the rotating frame.

[0014] By adopting the above technical solution, the setting of the inclined groove and the inclined component allows the moving frame to slide under the action of the inner wall of the inclined groove when the workstation tray moves to the position corresponding to the discharge guide. This causes the moving frame to drive the moving rod to rotate relative to itself, which in turn drives the rotating frame to rotate, realizing the linkage between the annular guide rail and the rotating frame. This eliminates the need for an additional active device to drive the rotating frame, effectively reducing the overall weight of the workstation tray and the required reserved space. It also effectively reduces the setting cost required for the active device and facilitates the operation of relevant personnel.

[0015] Preferably, the end of the rotating frame away from the corresponding workstation tray is rotatably connected to the corresponding tilting frame. The tilting mechanism further includes a linkage component, which includes a drive frame, a drive rod, and a linkage member. The drive frame is slidably connected to the corresponding workstation tray. One end of the drive rod is rotatably connected to the corresponding drive frame, and the other end is rotatably connected to the corresponding tilting frame. The moving frame drives the drive frame to slide through the linkage member.

[0016] By adopting the above technical solution and setting the linkage components, during the sliding process of the moving frame, the moving frame can drive the driving frame to slide through the linkage components, thereby causing the driving frame to drive the tilting frame to rotate relative to the rotating frame through the driving rod. This effectively reduces the required rotation angle of the intermediate frame, thereby reducing the required sliding of the moving frame, thus reducing the extension of the tilting groove, and further reducing the width of the annular guide rail, which facilitates the setting of the annular guide rail, and at the same time eliminates the need for an additional active device to drive the driving frame.

[0017] Preferably, the linkage component includes a linkage frame, one end of which is rotatably connected to the corresponding movable frame, and the other end of which is rotatably connected to the corresponding driving frame.

[0018] By adopting the above technical solution and setting the linkage frame, when the moving frame slides, the moving frame can drive the corresponding drive frame to slide through the linkage frame, thereby realizing the linkage between the moving frame and the drive frame. No additional active device is required to make the drive frame slide, which effectively saves the space required to set the active device and reduces the overall weight of the workstation tray.

[0019] Preferably, each of the workstation trays is provided with a positioning mechanism, each positioning mechanism includes a positioning frame and a driving component. The number of positioning frames is set to several, and they are respectively located on different sides of the device to be tested on the corresponding workstation tray. Each positioning frame is slidably connected to the corresponding workstation tray, and the device to be tested is located on the sliding path of each positioning frame. The driving component is used to drive each corresponding positioning frame to slide.

[0020] By adopting the above technical solution and setting the positioning mechanism, when the device to be tested is transported to the corresponding workstation tray, the drive component can drive each positioning frame to slide, so that the positioning frame can abut against the side of the part to be tested, and position and clamp the part to be tested, thus realizing mechanical positioning and effectively ensuring the effect of subsequent testing.

[0021] Preferably, the driving assembly includes a driving ring, a transmission rod, and a driving component. The driving ring is rotatably connected to the corresponding workstation tray. Several transmission rods are provided and are corresponding to the positioning frame. One end of each transmission rod is rotatably connected to the driving ring, and the other end is rotatably connected to the corresponding positioning frame. The annular guide rail drives the corresponding driving ring to rotate through the driving component.

[0022] By adopting the above technical solution and configuring the drive component, when the part to be inspected needs to be clamped and positioned, the drive component can drive the drive ring to rotate, thereby causing the drive ring to drive each transmission rod to move, which in turn causes the transmission rod to drive the corresponding positioning frame to slide, thus realizing the driving of the positioning frame to slide. This effectively facilitates the simultaneous driving of several positioning frames, while also effectively ensuring the driving effect, without the need to set up multiple drive components.

[0023] Preferably, the annular guide rail is provided with a conveying groove and a driving groove. The extension direction of the conveying groove and the driving groove is the same as the extension direction of the annular guide rail. One end of each workstation tray is embedded in the conveying groove. The driving groove protrudes from the side away from the detection mechanism in a direction away from the conveying groove. The driving component includes a driving frame and a driving rod. The driving frame is slidably connected to the corresponding workstation tray, and the sliding direction is different from the extension direction of the driving groove. One end of the driving frame extends into the driving groove and abuts against the inner wall of the driving groove. One end of the driving rod is rotatably connected to the corresponding driving frame, and the other end is rotatably connected to the driving ring.

[0024] By adopting the above technical solution, the configuration of the drive groove and drive component allows the drive frame to move together with the workstation tray. When the drive frame moves to the protruding part of the conveying groove, the inner wall of the protruding groove can abut against the drive frame, causing the drive frame to slide. This, in turn, causes the drive frame to drive the drive ring to rotate via the drive rod, thus driving the rotation of the drive ring. At the same time, it also realizes the linkage between the drive ring and the annular guide rail. Therefore, there is no need to set up an additional active device to drive the drive ring to rotate, which effectively reduces the overall weight of the workstation tray and saves the space required for installation, making it convenient to drive the workstation tray.

[0025] In summary, this application includes at least one of the following beneficial technical effects: The arrangement of the conveying mechanism and several testing mechanisms allows the devices to be tested (i.e., the testing mechanisms) to be uniformly mounted on the main body of the device. The conveying component can drive the tray at each station to move along the extension direction of the annular guide rail, so that each tray at each station can move directly under different testing mechanisms for different tests. This eliminates the need for personnel to manually transport the devices to be tested between the testing mechanisms, realizing automated transportation and multi-station testing of the devices to be tested. This effectively facilitates the operation of relevant personnel, thereby reducing the time required to transport the devices to be tested between different testing mechanisms and improving the testing efficiency of vacuum coating. The tilting frame and tilting mechanism are designed so that when a defective vacuum coating is detected on a device, when the workstation tray containing the defective device moves close to the discharge guide rail, the tilting mechanism can drive the corresponding tilting frame to rotate relative to the workstation tray, so that the defective device on the workstation tray can fall onto the discharge guide rail, and then fall into the collection box through the discharge guide rail, thus realizing the centralized collection of defective devices. The positioning mechanism is designed so that when the device to be tested is transported to the corresponding workstation tray, the drive component can drive each positioning frame to slide, thereby enabling the positioning frame to abut against the side of the part to be tested, positioning and clamping the part to be tested, realizing mechanical positioning, and thus effectively ensuring the effect of subsequent testing. Attached Figure Description

[0026] Figure 1 This is a schematic diagram of the overall vacuum coating visual inspection device used to demonstrate multi-station mechanical positioning in the embodiments of this application.

[0027] Figure 2 yes Figure 1 Enlarged view of part A in the middle.

[0028] Figure 3 This is a schematic diagram illustrating the structure of the workstation tray in the embodiments of this application.

[0029] Figure 4 This is a schematic diagram illustrating the structure of the drive ring in the embodiments of this application.

[0030] Figure 5 This is a schematic diagram illustrating the structure of the driving component in the embodiments of this application.

[0031] Figure 6 This is a structural schematic diagram illustrating the tilting component in the embodiments of this application.

[0032] Explanation of reference numerals in the attached drawings: 1. Device body; 2. Conveying mechanism; 21. Circular guide rail; 211. Conveying trough; 212. Drive trough; 213. Inclined trough; 22. Station tray; 221. Abutment roller; 23. Conveying assembly; 231. Conveying belt; 232. Conveying wheel; 3. Detection mechanism; 4. Inclined frame; 5. Positioning mechanism; 51. Positioning frame; 52. Drive assembly; 521. Drive ring; 522. Transmission rod; 523. Drive component; 52 31. Drive frame; 5232. Drive rod; 5233. Extension column; 6. Inclining mechanism; 61. Rotating frame; 62. Inclining component; 621. Moving frame; 622. Moving rod; 63. Linkage component; 631. Driving frame; 632. Driving rod; 633. Linkage component; 6331. Linkage frame; 7. Feeding mechanism; 71. Conveyor belt; 8. Discharge mechanism; 81. Discharge guide rail; 82. Collection box; 83. Loading box; 84. Discharge component. Detailed Implementation

[0033] The following is in conjunction with the appendix Figure 1-6 This application will be described in further detail.

[0034] This application discloses a multi-station mechanical positioning vacuum coating visual inspection device. (Refer to...) Figure 1 A multi-station mechanical positioning vacuum coating visual inspection device includes a device body 1, on which a conveying mechanism 2 and several inspection mechanisms 3 are provided. The inspection mechanisms 3 are used to perform different visual inspections on the devices to be inspected. The conveying mechanism 2 includes an annular guide rail 21, station trays 22, and a conveying assembly 23. The annular guide rail 21 is disposed on the device body 1, with one side located below each inspection mechanism 3. Several station trays 22 are provided, each with one end embedded within the annular guide rail 21. Each station tray 22 is used to place the device to be inspected. The conveying assembly 23 drives each station tray 22 to move along the extension direction of the annular guide rail 21.

[0035] Reference Figure 1 In this embodiment, the detection mechanisms 3 are all configured as high-definition cameras, microscopic imagers, or spectral ellipsometers, etc. The detection ends of the high-definition cameras, microscopic imagers, or spectral ellipsometers are all vertically downward, positioned directly above the conveyed workstation tray 22. These high-definition cameras, microscopic imagers, and spectral ellipsometers, as well as the vacuum detection method using these visual inspection devices to perform vacuum coating on the devices, are all existing technologies and will not be described further here. Each detection mechanism 3 is fixedly installed on the top side of the device body 1 along its width direction and is distributed along the length direction of the device body 1.

[0036] Reference Figure 1 The conveying assembly 23 includes a conveyor belt 231 and several conveyor wheels 232, all of which are rotatably connected to the top of the device body 1 via pins. The conveyor belt 231 is fitted onto each conveyor wheel 232, forming a closed loop, and passes directly below each detection mechanism 3. In this embodiment, a reduction motor for driving the conveyor wheels 232 to rotate is also provided inside the device body 1. The reduction motor is fixedly installed inside the device body 1, and one of its conveyor wheels 232 is fixedly fitted onto the output shaft of the reduction motor, so that the reduction motor can drive the conveyor wheels 232 to rotate, thereby causing the conveyor belt 231 to move.

[0037] Reference Figure 1 and Figure 2In this embodiment, the annular guide rail 21 is located outside the conveyor belt 231, and the annular guide rail 21 is configured as an annular shape corresponding to the conveyor belt 231. A conveying groove 211 is also provided on the top of the annular guide rail 21. The conveying groove 211 is configured as annular and extends along the extension direction of the annular guide rail 21.

[0038] Reference Figure 1 and Figure 3 Each station tray 22 is bolted to the outside of the conveyor belt 231. Each station tray 22 has an abutment roller 221 at its bottom, which is rotatably connected to the corresponding station tray 22 via a pin. These rollers are embedded in the conveyor trough 211 and abut against the inner wall of the trough 211 to guide the movement of the station tray 22. Each inspection mechanism 3 is located directly above the movement path of each station tray 22. An opening is formed through the top wall of each station tray 22, and an inclined frame 4 is installed within each opening. The top wall of the inclined frame 4 is flush with the top wall of the corresponding station tray 22 for placing the device to be inspected.

[0039] Reference Figure 3 , Figure 4 and Figure 5 Each workstation tray 22 is provided with a positioning mechanism 5. Each positioning mechanism 5 includes a positioning frame 51 and a drive component 52. Each positioning mechanism 5 contains a plurality of positioning frames 51. In this embodiment, each positioning mechanism 5 contains three positioning frames 51, which are located on different sides of the tilting frame 4.

[0040] Reference Figure 3 , Figure 4 and Figure 5 Each positioning frame 51 is slidably connected to the corresponding workstation tray 22 via a sliding groove, and the device to be tested placed on each tilting frame 4 is located on the sliding path of the corresponding three positioning frames 51. The end of each positioning frame 51 away from the tilting frame 4 extends downward to below the corresponding workstation tray 22. The drive assembly 52 includes a drive ring 521, a transmission rod 522, and a drive component 523. The drive ring 521 has an opening on the side away from the conveyor belt 231 to allow the tilting frame 4 to move.

[0041] Reference Figure 4 and Figure 5 The drive ring 521 is fitted onto the bottom of the corresponding workstation tray 22 and is rotatably connected to the bottom of the corresponding workstation tray 22. Each drive assembly 52 contains three transmission rods 522, each corresponding to a positioning frame 51. The bottom end of each positioning frame 51 is rotatably connected to one end of the corresponding transmission rod 522 via a pin, and the other end of each transmission rod 522 is rotatably connected to the corresponding drive ring 521 via a pin.

[0042] Reference Figure 1 , Figure 2 and 3 The top of the annular guide rail 21 is provided with a drive groove 212. The drive groove 212 is annular and extends along the extension direction of the annular guide rail 21, and is located between the conveying groove 211 and the conveyor belt 231. The drive groove 212 is recessed towards the conveyor belt 231 on one side along the length direction of the device body 1 and the side away from the detection mechanism 3 (i.e., it is convex in the direction away from the conveying groove 211), so that the drive groove 212 forms an inclined portion at one end along the length direction of the device body 1 and on the side away from the detection mechanism 3 along the width direction of the device body 1.

[0043] Reference Figure 3 , Figure 4 and Figure 5 The driving component 523 includes a driving frame 5231 and a driving rod 5232. The driving frame 5231 is slidably connected to the bottom of the corresponding workstation tray 22 via a slide rail, and the sliding direction is perpendicular to the extension direction of the driving groove 212. Each driving frame 5231 has a downwardly extending extension post 5233 at its bottom. The extension post 5233 is cylindrical and integrally formed with the driving frame 5231. Each extension post 5233 extends into the driving groove 212 and abuts against the inner wall of the driving groove 212. In this embodiment, rollers may also be fitted onto the extension post 5233 to reduce friction.

[0044] Reference Figure 3 and Figure 5 One end of each drive rod 5232 is rotatably connected to the corresponding drive frame 5231 via a pin, and the other end is rotatably connected to the corresponding drive ring 521 via a pin, so that the rollers on the extension column 5233 can slide relative to the workstation tray 22 under the abutment action of the inner wall of the drive groove 212, thereby causing the drive frame 5231 to drive the drive ring 521 to rotate through the drive rod 5232.

[0045] Reference Figure 1 , Figure 3 and Figure 5 In the initial state, when the workstation tray 22 is located on the side of the device body 1 in the width direction and away from the detection mechanism 3, the drive frame 5231 is located on the side of its own sliding path close to the conveyor belt 231, and the positioning frame 51 is located on the side of its own sliding path away from the tilting frame 4.

[0046] Reference Figure 3 , Figure 4 and Figure 5As the conveyor belt 231 drives the workstation tray 22 and the abutting rollers 221 on the workstation tray 22 to move together, when the rollers on the extension column 5233 move to the inclined part of the drive groove 212 (the drive groove 212 is about to protrude to the side away from the conveyor belt 231), the inner wall of the drive groove 212 abuts against the rollers, and drives the rollers on the extension column 5233 and the drive frame 5231 to move together, thereby causing the drive frame 5231 to slide relative to the workstation tray 22, so that the drive frame 5231 drives the drive ring 521 to rotate through the drive rod 5232, and then the drive ring 521 drives the positioning frame 51 to slide through the transmission rod 522, so that the positioning frame 51 gradually approaches the part on the inclined frame 4 and clamps and fixes the part.

[0047] Reference Figure 1 , Figure 2 and Figure 5 When the parts on the tilting frame 4 are conveyed to the bottom of the inspection mechanism 3, the inspection mechanism 3 performs visual inspection on the parts on the tilting frame 4. After each inspection mechanism 3 has completed its inspection, the workstation tray 22 moves to one side of the length direction of the device body 1. At this time, the roller on the extension column 5233 moves to the tilt of the drive groove 212 (the drive groove 212 is about to be recessed towards the side of the conveyor belt 231). At this time, the inner wall of the drive groove 212 abuts against the roller on the extension column 5233, thereby causing the roller on the extension column 5233 to gradually slide against the drive frame 5231 and gradually return to the initial position, thereby causing the drive ring 521 to rotate back, so that the positioning frame 51 can gradually move away from the parts, thereby canceling the clamping and facilitating the output of qualified parts.

[0048] Reference Figure 3 , Figure 4 and Figure 6 Each workstation pallet 22 is equipped with a tilting mechanism 6. Each tilting mechanism 6 includes a rotating frame 61, a tilting component 62, and a linkage component 63. Each tilting component 62 includes a moving frame 621 and a moving rod 622. One end of each rotating frame 61 is rotatably connected to the side wall of the corresponding workstation pallet 22 away from the conveyor belt 231 via a pin. The other end is tilted upwards and passes through the inside (opening) of the drive ring 521, thereby rotatably connecting to the bottom of the corresponding tilting frame 4 via a pin.

[0049] Reference Figure 3 , Figure 4 and Figure 6 Each movable rod 622 has one end rotatably connected to the middle of the corresponding rotating frame 61 along its length via a pin, and the other end rotatably connected to the top of the corresponding movable frame 621 via a pin. Each movable frame 621 is slidably connected to the corresponding workstation tray 22 via a slide rail, and the sliding direction is perpendicular to the extension direction of the conveying trough 211.

[0050] Reference Figure 1 , Figure 2 and Figure 3 An inclined groove 213 is also provided on the top of the annular guide rail 21. The inclined groove 213 is located inside the conveying groove 211, that is, on the side close to the conveyor belt 231. The inclined groove 213 is set as an annular groove and extends along the extension direction of the annular guide rail 21. The inclined groove 213 extends (protrudes) in the direction away from the detection mechanism 3 on one end of the length direction of the device body 1.

[0051] Reference Figure 3 and Figure 6 Each movable frame 621 has a cylindrical bottom end and is fitted with a roller. Each roller is embedded in the inclined groove 213 and its sidewall abuts against the inner sidewall of the inclined groove 213. This allows the movable frame 621 to slide relative to the corresponding workstation tray 22 when it moves to the part of the inclined groove 213 that extends away from the conveyor belt 231.

[0052] Reference Figure 4 and Figure 6 The linkage component 63 includes a drive frame 631, a drive rod 632, and a linkage element 633. One end of the drive rod 632 is rotatably connected to the bottom of the corresponding tilting frame 4 near the abutting roller 221 via a pin, and the other end is inclined downwards, passes through the corresponding drive ring 521, and is finally rotatably connected to the corresponding drive frame 631 via a pin. Each drive frame 631 is slidably connected to the corresponding workstation tray 22 via a slide groove, and the sliding direction is set to the vertical direction.

[0053] Reference Figure 6 Each linkage 633 includes a linkage frame 6331. One end of each linkage frame 6331 is rotatably connected to the corresponding drive frame 631 via a pin, and the other end is inclined downward and rotatably connected to the corresponding moving frame 621 via a pin. This allows the moving frame 621 to slide when it slides, thereby causing the corresponding drive frame 631 to slide via the linkage frame 6331. The drive frame 631 then drives the corresponding tilting frame 4 to rotate via the drive rod 632.

[0054] Reference Figure 1 , Figure 3 and Figure 6 In the initial state, when the workstation tray 22 is located in the width direction of the device body 1 and away from the detection mechanism 3, the drive frame 5231 is located on the side of its own sliding path close to the conveyor belt 231, the top wall of the tilting frame 4 is in a horizontal state, the moving frame 621 is located on the end of its own sliding path close to the abutting roller 221, and the driving frame 631 is located at the top of its own sliding path.

[0055] Reference Figure 1 , Figure 2 and Figure 6 During the process of the conveyor belt 231 driving the workstation tray 22 and the abutting roller 221 on the workstation tray 22 to move together, when the workstation tray 22 moves to one side of the width direction of the device body 1 and is in a state away from the detection mechanism 3, the roller on the moving frame 621 abuts against the inclined part on the inclined groove 213, thereby causing the moving frame 621 to slide, causing the moving frame 621 to drive the rotating frame 61 to rotate.

[0056] Reference Figure 2 , Figure 3 and Figure 6 During this process, the moving frame 621 drives the driving frame 631 to slide downwards via the linkage frame 6331. This causes the driving frame 631 to move downwards via the driving rod 632, displacing the end of the tilting frame 4 away from the conveyor belt 231. Consequently, the tilting frame 4 rotates relative to the rotating frame 61, allowing it to tilt and thus displace any defective parts along the tilting direction. After tilting, when the rollers on the moving frame 621 abut against the tilting section of the tilting groove 213, the moving frame 621 gradually returns to its initial position, which in turn causes the tilting frame 4 to gradually return to its initial position, facilitating the subsequent loading of parts to be inspected.

[0057] Reference Figure 1 The device body 1 is also provided with a feeding mechanism 7, which includes several conveyor belts 71. In this embodiment, the number of conveyor belts 71 is set to four. All four conveyor belts 71 are located on the side of the device body 1 away from the detection mechanism 3 along its own width direction, and the four conveyor belts 71 are distributed along the length direction of the device body 1.

[0058] Reference Figure 1 Each conveyor belt 71 is fixedly installed on the device body 1, and the conveying direction is the width direction of the device body 1. One end of each conveyor belt 71 extends to the outside of the device body 1 along its own length direction (conveying direction) to facilitate the placement of the device to be tested by relevant personnel or other conveying structures (such as conveyor belt 71, robots, etc.). The other end of each conveyor belt 71 extends to a position close to the corresponding workstation tray 22, so that after the workstation tray 22 corresponds to the conveyor belt 71, the device to be tested on the conveyor belt 71 can be transported to the tilting frame 4 on the corresponding workstation tray 22.

[0059] Reference Figure 1 and Figure 2The device body 1 is also equipped with a discharge mechanism 8, which is located at one end of the device body 1 along its own length and on the side near the extension (protruding position) of the inclined groove 213. The discharge mechanism 8 includes a discharge guide rail 81, a collection box 82, a loading box 83, and a discharge assembly 84. The loading box 83 is located on the side of the device body 1 along its own width and near the detection mechanism 3, and is fixedly installed on the device body 1. The loading box 83 is located on the side of the drive groove 212 that is recessed towards the conveyor belt 231. The top opening of the loading box 83 is provided to load qualified devices.

[0060] Reference Figure 1 In this embodiment, the discharging component 84 is configured as a robot, which is fixedly installed between the material container 83 and the annular guide rail 21. The robot uses a suction cup on its working end to adsorb qualified devices (in other embodiments, grippers can be used on the working end to clamp the qualified devices), and then transports them into the material container 83. In this embodiment, the device body 1 is also equipped with a PLC controller. Each detection mechanism 3 and the aforementioned robot are controlled by the PLC controller, so that when each detection mechanism 3 detects that the device is qualified, the PLC controller can, based on a preset control program, control the robot to adsorb the qualified device, transport it, and place it into the material container 83.

[0061] Reference Figure 1 and Figure 2 The discharge guide rail 81 is located on the side of the discharge assembly 84 away from the detection mechanism 3, and one end of the discharge guide rail 81 is close to the inclined position on the inclined trough 213, so that after the inclined frame 4 tilts, the defective devices on the inclined frame 4 can fall onto the discharge guide rail 81. The collection box 82 is fixedly installed on the device body 1 and has an opening at the top. The end of the discharge guide rail 81 away from the conveyor belt 231 is inclined downward and located directly above the opening at the top of the collection box 82.

[0062] The implementation principle of the multi-station mechanical positioning vacuum coating visual inspection device according to this application embodiment is as follows: In use, the conveyor belt 71 transports the part to be inspected towards the station tray 22. When the part to be inspected moves to the corresponding station tray 22, the conveyor belt 231 moves, causing the station tray 22 to move as well.

[0063] When the roller on the extension column 5233 of the drive frame 5231 moves to the inclined part of the drive groove 212 (the drive groove 212 is about to protrude to the side away from the conveyor belt 231), the inner wall of the drive groove 212 abuts against the roller and drives the roller on the extension column 5233 to move together with the drive frame 5231. This causes the drive frame 5231 to slide relative to the workstation tray 22, causing the drive frame 5231 to drive the drive ring 521 to rotate through the drive rod 5232. This causes the drive ring 521 to drive the positioning frame 51 to slide through the transmission rod 522, so that the positioning frame 51 gradually approaches the part on the inclined frame 4 and clamps and fixes the part.

[0064] When the part to be inspected is conveyed directly below the inspection mechanism 3, the inspection mechanism 3 performs visual inspection on the part on the inclined frame 4. After each inspection mechanism 3 has completed its inspection, the conveyor belt 231 drives the workstation tray 22 to move to one side of the length direction of the device body 1. At this time, the roller on the extension column 5233 moves to the inclined part of the drive groove 212 (the drive groove 212 is about to be recessed towards the side close to the conveyor belt 231). At this time, the inner wall of the drive groove 212 abuts against the roller on the extension column 5233, thereby driving the drive frame 5231 to gradually return to the initial position, thereby causing the drive ring 521 to rotate back, so that the positioning frame 51 can gradually move away from the part, and thus cancel the clamping.

[0065] When each inspection unit 3 detects that the part is qualified, the output component (the robot mentioned above) picks up the qualified part and moves it into the material box 83, while the unqualified parts continue to move with the station tray 22. When the station tray 22 moves to the position corresponding to the discharge guide rail 81, the rollers on the moving frame 621 abut against the inclined part on the inclined groove 213, causing the moving frame 621 to slide, which in turn causes the moving frame 621 to drive the rotating frame 61 to rotate.

[0066] During this process, the moving frame 621 drives the driving frame 631 to slide downward through the linkage frame 6331, thereby causing the driving frame 631 to drive the end of the tilting frame 4 away from the conveyor belt 231 to move downward through the driving rod 632, thereby causing the tilting frame 4 to rotate relative to the rotating frame 61, so that the tilting frame 4 can tilt, thereby dumping the unqualified parts on itself into the discharge guide rail 81, so that the unqualified parts fall into the collection box 82.

[0067] After tilting is completed, when the rollers on the moving frame 621 abut against the tilting section 213, the moving frame 621 gradually returns to its initial position, thereby causing the tilting frame 4 to gradually return to its initial position. Afterward, the conveyor belt 231 continues to move the workstation tray 22, gradually moving it to its initial position, so that the device to be tested conveyed by the conveyor belt 71 can continue to move onto the tilting frame 4 for continuous multi-station testing.

[0068] The above are all preferred embodiments of this application and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A multi-station mechanical positioning vacuum coating visual inspection device, comprising a device body (1), characterized in that: The device body (1) is provided with a conveying mechanism (2) and a plurality of detection mechanisms (3). The plurality of detection mechanisms (3) are used to perform different visual inspections on the devices to be inspected. The conveying mechanism (2) includes an annular guide rail (21), a station tray (22) and a conveying assembly (23). The annular guide rail (21) is provided on the device body (1) and one side is located below each of the detection mechanisms (3). The station tray (22) is provided in a plurality of units, and one end of each unit is embedded in the annular guide rail (21). Each station tray (22) is used to place the device to be inspected. The conveying assembly (23) is used to drive each station tray (22) to move along the extension direction of the annular guide rail (21).

2. The multi-station mechanical positioning vacuum coating visual inspection device according to claim 1, characterized in that: The device body (1) is also provided with a discharge mechanism (8). The discharge mechanism (8) includes a discharge guide rail (81), a collection box (82), a loading box (83), and a discharge component (84). The collection box (82) and the loading box (83) are both located on one side of the annular guide rail (21). One end of the discharge guide rail (81) is close to the annular guide rail (21), and the other end extends downward to the top of the collection box (82). The discharge component (84) is used to transport the qualified devices from the workstation tray (22) to the loading box (83).

3. The multi-station mechanical positioning vacuum coating visual inspection device according to claim 2, characterized in that: Each of the workstation trays (22) is provided with a tilting frame (4) and a tilting mechanism (6). The tilting frame (4) is located at one end near the outer side of the annular guide rail (21) and is used to rotate relative to the corresponding workstation tray (22). The tilting mechanism (6) is used to drive the corresponding tilting frame (4) to rotate so that one end of the corresponding tilting frame (4) moves above the discharge guide rail (81).

4. The multi-station mechanical positioning vacuum coating visual inspection device according to claim 3, characterized in that: The tilting mechanism (6) includes a rotating frame (61) and a tilting component (62). One end of the rotating frame (61) is rotatably connected to the corresponding workstation tray (22), and the other end is on the tilting frame (4). The annular guide rail (21) drives the rotating frame (61) to rotate through the tilting component (62).

5. The multi-station mechanical positioning vacuum coating visual inspection device according to claim 4, characterized in that: An inclined groove (213) is provided on the annular guide rail (21). The extension direction of the inclined groove (213) is the same as the extension direction of the annular guide rail (21). The inclined groove (213) is located on the side close to the discharge guide rail (81) and extends towards the discharge guide rail (81). The inclined component (62) includes a movable frame (621) and a movable rod (622). The movable frame (621) is slidably connected to the corresponding workstation tray (22), and one end extends into the inclined groove (213) and abuts against the inner wall of the inclined groove (213). One end of the movable rod (622) is rotatably connected to the movable frame (621), and the other end is rotatably connected to the rotating frame (61).

6. The multi-station mechanical positioning vacuum coating visual inspection device according to claim 5, characterized in that: The rotating frame (61) is rotatably connected to the tilting frame (4) at one end away from the corresponding workstation tray (22). The tilting mechanism (6) also includes a linkage component (63). The linkage component (63) includes a drive frame (631), a drive rod (632), and a linkage member (633). The drive frame (631) is slidably connected to the corresponding workstation tray (22). One end of the drive rod (632) is rotatably connected to the corresponding drive frame (631), and the other end is rotatably connected to the corresponding tilting frame (4). The moving frame (621) drives the drive frame (631) to slide through the linkage member (633).

7. The multi-station mechanical positioning vacuum coating visual inspection device according to claim 6, characterized in that: The linkage component (633) includes a linkage frame (6331), one end of which is rotatably connected to the corresponding movable frame (621), and the other end is rotatably connected to the corresponding driving frame (631).

8. The multi-station mechanical positioning vacuum coating visual inspection device according to claim 1, characterized in that: Each of the workstation trays (22) is provided with a positioning mechanism (5). Each positioning mechanism (5) includes a positioning frame (51) and a driving component (52). The number of positioning frames (51) is set to several, and they are respectively located on different sides of the device to be tested on the corresponding workstation tray (22). Each positioning frame (51) is slidably connected to the corresponding workstation tray (22), and the device to be tested is located on the sliding path of each positioning frame (51). The driving component (52) is used to drive each corresponding positioning frame (51) to slide.

9. A multi-station mechanical positioning vacuum coating visual inspection device according to claim 8, characterized in that: The drive assembly (52) includes a drive ring (521), a transmission rod (522), and a drive component (523). The drive ring (521) is rotatably connected to the corresponding workstation tray (22). The transmission rod (522) is configured in several parts and is correspondingly arranged to the positioning frame (51). One end of each transmission rod (522) is rotatably connected to the drive ring (521), and the other end is rotatably connected to the corresponding positioning frame (51). The annular guide rail (21) drives the corresponding drive ring (521) to rotate through the drive component (523).

10. A multi-station mechanical positioning vacuum coating visual inspection device according to claim 9, characterized in that: The annular guide rail (21) is provided with a conveying groove (211) and a driving groove (212). The extending directions of the conveying groove (211) and the driving groove (212) are the same as the extending direction of the annular guide rail (21). One end of each station tray (22) is embedded in the conveying groove (211). The driving groove (212) protrudes from the side away from the detection mechanism (3) in a direction away from the conveying groove (211). The driving component (523) includes The drive frame (5231) and drive rod (5232) are slidably connected to the corresponding workstation tray (22), and the sliding direction is different from the extension direction of the drive groove (212). One end of the drive frame (5231) extends into the drive groove (212) and abuts against the inner wall of the drive groove (212). One end of the drive rod (5232) is rotatably connected to the corresponding drive frame (5231), and the other end is rotatably connected to the drive ring (521).

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