Vacuum furnace process formula simplified editing and cyclic execution control system and method

Abstract

The invention discloses a vacuum furnace process formula simplified editing and cyclic execution control system and method, and belongs to the field of vacuum heat treatment equipment control. The problems that an existing vacuum furnace process formula compiling and operation control method is tedious in operation, redundant in repeated step, not visual in circulation progress and disordered in logic after process intervention are solved. The system comprises an upper computer, a vacuum furnace formula editing module of the upper computer is used for inputting a process execution formula, and the process execution formula comprises a to-be-executed process step containing a single cycle process and at least three interactive cycle control parameters; the upper computer is in communication connection with a controller, the controller is used for analyzing parameters in the process execution formula in real time and judging whether interactive circulation control parameters are configured in the process execution formula or not, and if the interactive circulation control parameters are configured in the process execution formula, the controller controls an execution mechanism of the vacuum furnace to execute a circulation process; the invention is applied to the vacuum furnace.

Description

Technical Field

[0001] This invention relates to the field of vacuum heat treatment equipment control technology, specifically to a simplified editing and cyclic execution control system and method for vacuum furnace process recipes. Background Technology

[0002] In processes such as heat treatment and chemical vapor deposition, vacuum furnaces typically require multiple steps, including heating, holding, vacuuming, gas filling, and pressurization, to be completed according to a pre-set process formula. Traditional vacuum furnace control systems often employ a segmented formula writing method, where operators manually input parameters such as temperature, pressure, time, and power line by line and step by step according to process requirements.

[0003] In actual production, many vacuum furnace processes involve numerous repetitive or cyclical steps. Existing recipe writing methods require manually entering each repetitive step, which is not only cumbersome and prone to input errors, but also results in lengthy and unreadable recipe documents, increasing the learning and debugging costs for operators. Furthermore, during process operation, traditional control systems can only display the currently executing step, failing to intuitively show the current cycle count, total cycle count, and progress within a cycle, hindering operators from real-time monitoring of the process status and anomaly detection.

[0004] In summary, existing methods for formulating and controlling the operation of vacuum furnace processes suffer from problems such as cumbersome operation, redundant and repetitive steps, unintuitive cycle progress, and logical confusion after process intervention, making it difficult to meet the needs of efficient, stable, and convenient automated production. Summary of the Invention

[0005] To address the technical problems of existing vacuum furnace process recipe writing and operation control methods, such as cumbersome operation, redundant repetitive steps, unintuitive cycle progress, and logical confusion after process intervention, this invention proposes a simplified editing and cyclic execution control system and method for vacuum furnace process recipes.

[0006] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is: a simplified editing and cyclic execution control system for vacuum furnace process recipes, comprising: The host computer integrates a vacuum furnace recipe editing module. The vacuum furnace recipe editing module is used to input the process execution recipe. The process execution recipe includes the process steps to be executed containing a single cycle process and at least three interactive cycle control parameters. The three interactive cycle control parameters are the cycle start step, the number of cycles, and the cycle end step. The cycle start step, the number of cycles, and the cycle end step together constitute the cycle interval. The controller, communicating with the host computer, is used to analyze the information of the process steps to be executed, the cycle start step parameters, the cycle count parameters, and the cycle end step parameters in the process execution recipe in real time. It also determines whether the process execution recipe is configured with interactive cycle control parameters. If the process execution recipe is configured with interactive cycle control parameters, the controller controls the vacuum furnace execution mechanism to repeatedly execute the process steps to be repeated in the process steps containing single-cycle operations according to the set cycle start step and cycle end step. After completing the set total number of cycles, the controller exits the cycle process and continues to execute the subsequent process steps in the cycle interval. If the process execution recipe is not configured with interactive cycle control parameters, the controller controls the vacuum furnace execution mechanism to execute the process steps to be executed sequentially according to the process steps containing single-cycle operations.

[0007] Furthermore, the host computer is also used to display the current running process step, the current number of cycles, and the total number of cycles in real time.

[0008] Furthermore, the process execution recipe also includes a skip parameter. When the process execution recipe parsed by the controller contains a skip parameter, the controller controls the vacuum furnace actuator to execute the process step to be executed corresponding to the skip parameter.

[0009] Furthermore, when the number of steps in the process step to be executed corresponding to the skip step parameter is greater than the number of steps in the process step to be executed corresponding to the cycle termination step, the controller controls the vacuum furnace actuator to exit the cycle process and execute the process step to be executed corresponding to the skip step parameter and its subsequent steps.

[0010] Furthermore, when the number of process steps to be executed corresponding to the skip step parameter is less than or equal to the number of process steps to be executed corresponding to the loop termination step, the controller controls the vacuum furnace actuator to complete the process steps to be executed corresponding to the skip step parameter and the subsequent steps in the loop interval, and then continues to execute the loop operation until the set number of loops is reached and the loop process is exited.

[0011] Furthermore, the absence of interactive cyclic control parameters in the process execution formula means that all interactive cyclic control parameters are set to zero.

[0012] Furthermore, when the controller receives interactive cyclic control parameters from the host computer, it first controls the vacuum furnace actuator to execute the process steps to be executed before the cycle start step. When the vacuum furnace actuator executes to the number of process steps to be executed corresponding to the cycle start step, the cycle count is started, with an initial count of 1 and a step size of 1, until the set number of cycles is reached.

[0013] A method for simplifying and controlling the cyclic execution of vacuum furnace process recipes, employing the aforementioned simplified editing and cyclic execution control system for vacuum furnace process recipes, includes the following steps: Step S1: Input the process execution recipe into the vacuum furnace recipe editing module of the host computer. The process execution recipe includes the process steps to be executed containing a single cycle process and at least three interactive cycle control parameters. The three interactive cycle control parameters are the cycle start step, the number of cycles, and the cycle end step. The cycle start step, the number of cycles, and the cycle end step together constitute the cycle interval. Step S2: The controller receives and parses the process execution recipe sent by the host computer in real time, and parses the information of the process steps to be executed, the loop start step parameters, the loop number parameters and the loop end step parameters in the process execution recipe; Step S3: The controller determines whether the process execution recipe contains interactive cyclic control parameters. If the process execution recipe contains interactive cyclic control parameters, it jumps to step S4 to execute the cyclic process; if the process execution recipe does not contain interactive cyclic control parameters, it jumps to step S5 to execute the sequential process. Step S4: The controller controls the vacuum furnace actuator to repeatedly execute the process steps to be repeated in the process steps containing single-cycle operations according to the set cycle start step and cycle end step. After completing the set total number of cycles, the cycle process exits and continues to execute the subsequent process steps in the cycle interval. Step S5: The controller controls the vacuum furnace actuator to execute the process steps to be executed sequentially, which contain single-cycle processes.

[0014] Furthermore, in step S4, while executing the cyclic process, the controller counts the current number of cycles in real time and feeds it back to the host computer. The host computer displays the current running process step, the current number of cycles, and the total number of cycles in real time.

[0015] The advantages of this invention over the prior art are as follows: 1. Simplified process recipe writing process: By setting interactive cyclic control parameters in the vacuum furnace recipe editing module, the controller analyzes the information of the process steps to be executed, the cycle start step parameters, the cycle number parameters, and the cycle end step parameters in the process execution recipe in real time, and determines whether the process execution recipe is configured with interactive cyclic control parameters to complete the cyclic process. There is no need to repeatedly enter the same process steps, which greatly reduces the workload of writing, reduces human input error, and improves the efficiency and accuracy of process recipe editing.

[0016] 2. Improve the ease of managing process formulas: The system of this invention has a clear structure of process formulas, avoiding lengthy and messy documents, making it easy for operators to view, modify and maintain, reducing the difficulty of formula management, and adapting to the needs of large-scale production.

[0017] 3. Compatible with traditional operation modes: If the process execution formula does not have interactive cyclic control parameters, the vacuum furnace actuator will execute the process steps containing single-cycle processes sequentially, that is, execute the process formula according to the traditional process steps. There is no need to change the operator's habits, which reduces the promotion and training costs, facilitates the upgrading and transformation of existing equipment, and enhances practicality and promotion value. Attached Figure Description

[0018] The present invention will be further described below with reference to the accompanying drawings: Figure 1 This is a schematic diagram of the structure of an embodiment of the system of the present invention; Figure 2 This is a schematic diagram of another embodiment of the system of the present invention; Figure 3 This is a flowchart of an embodiment of the method of the present invention; Figure 4 This is a flowchart illustrating the formula editing, skipping steps, and process intervention of the present invention. Figure 5 This is a schematic diagram of the editing interface of the vacuum furnace recipe editing module of the present invention; Figure 6 This is a schematic diagram of the process cycle monitoring interface of the system of the present invention; Figure 7 This is a schematic diagram of the jump step parameter setting interface of the system of the present invention.

[0019] In the diagram: 1 is the host computer, 2 is the controller, and 3 is the vacuum furnace actuator. Detailed Implementation

[0020] In the description of this invention, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicate relative orientations or positional relationships and are used only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this invention, unless otherwise stated, "a plurality of" means two or more.

[0021] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art will understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0022] like Figures 1 to 7 As shown, this invention provides a simplified editing and cyclic execution control system for vacuum furnace process recipes, comprising: The host computer 1 integrates a vacuum furnace recipe editing module. The vacuum furnace recipe editing module is used to input the process execution recipe. The process execution recipe includes the process steps to be executed containing a single cycle process and at least three interactive cycle control parameters. In this embodiment, three interactive cycle control parameters are set. The three interactive cycle control parameters are the cycle start step, the cycle number, and the cycle end step. The cycle start step, the cycle number, and the cycle end step together constitute the cycle interval.

[0023] The set loop start step and loop end step correspond to the number of steps in the process steps to be executed that contain a single loop operation. The number of loops is a positive integer, with a minimum of 1 loop and a maximum limit that can be set according to the vacuum furnace process requirements to avoid invalid settings.

[0024] The host computer 1 is also used to display the current running process steps (including step number, step name and corresponding parameters), the current number of cycles (0 when there is no cycle) and the total number of cycles (0 when there is no cycle) in real time, so that operators can intuitively grasp the progress of the process operation, quickly judge whether the cycle execution is normal, facilitate timely detection and handling of abnormalities, realize the visualization of cycle status, and greatly improve the reliability of process step monitoring.

[0025] Controller 2 communicates with host computer 1 to achieve bidirectional data transmission. It is used to analyze the information of the process steps to be executed, the loop start step parameters, the loop count parameters, and the loop end step parameters in the process execution recipe in real time, and to determine whether the process execution recipe is configured with interactive loop control parameters. If the process execution recipe is configured with interactive loop control parameters, controller 2 controls vacuum furnace execution mechanism 3 to repeatedly execute the process steps to be executed that contain single-loop operations according to the set loop start step and loop end step. After completing the set total number of loops, it exits the loop process and continues to execute the subsequent process steps in the loop interval until the entire process execution recipe is completed. If the process execution recipe is not configured with interactive loop control parameters, it controls vacuum furnace execution mechanism 3 to execute the process steps to be executed that contain single-loop operations in sequence, that is, according to the sequence of process steps to be executed ("Step 1 → Step 2 → ... → Step n") analyzed by controller 2, without any loop operation, to ensure compatibility with the traditional process recipe execution mode and meet the process requirements without loops.

[0026] Specifically, when the controller 2 receives the interactive cyclic control parameters sent by the host computer 1, it first controls the vacuum furnace actuator 3 to execute the process steps to be executed before the cycle start step. When the vacuum furnace actuator 3 executes to the number of process steps to be executed corresponding to the cycle start step, the cycle count is started. The initial count is 1 and the step size is 1. That is, after each cycle process is completed, the cycle count is automatically incremented by 1. The above cycle process is repeated until the set number of cycles is reached and the cycle process is exited.

[0027] Preferably, the absence of interactive cyclic control parameters in the process execution formula means that all interactive cyclic control parameters are set to zero.

[0028] Considering that during actual vacuum furnace production, operators may need to intervene in the running process by skipping steps due to process adjustments, abnormal handling, etc., the process execution formula also includes skipping step parameters. When the process execution formula parsed by controller 2 contains skipping step parameters, controller 2 controls vacuum furnace actuator 3 to execute the process step to be executed corresponding to the skipping step parameters. During the execution of the cyclic process (i.e., the steps between the cycle start step and the cycle end step), when the number of steps of the process step to be executed corresponding to the skipping step parameter is greater than the number of steps of the process step to be executed corresponding to the cycle end step, controller 2 assigns the current cycle count to the set maximum cycle count (i.e., considers all cycles to be completed), controls vacuum furnace actuator 3 to exit the cyclic process, and executes the process step to be executed corresponding to the skipping step parameter and its subsequent steps, ensuring that the process can be connected normally after the skipping step and avoiding cycle logic disorder. During the execution of the cyclic process, when the number of process steps to be executed corresponding to the skip parameter is less than or equal to the number of process steps to be executed corresponding to the loop termination step, the controller 2 determines it as an intra-loop skip. The controller 2 controls the vacuum furnace actuator 3 to execute the original cyclic process logic unchanged, skipping to the process step to be executed corresponding to the skip parameter. After the vacuum furnace actuator 3 completes the process step to be executed corresponding to the skip parameter and the subsequent steps within the cyclic interval, the loop count is incremented by 1 normally, and the cyclic operation continues until the set number of cycles is reached, at which point the cyclic process exits. The setting of the skip parameter and the skip operation avoid loop chaos after skipping, ensuring the continuity of the process.

[0029] The system's process execution formula setting allows for the resetting of cycle counts even during process steps. This addresses potential issues in actual production, such as "too many cycle counts leading to excessively long process times" or "insufficient cycle counts failing to meet process requirements," without needing to stop the entire process or interrupt the current step, or rewrite the formula, thus significantly improving operational flexibility. If the process step to be executed has not yet entered the cycle when the cycle count is reset, the controller 2 controls the vacuum furnace actuator 3 to execute subsequent cycle steps according to the reset cycle count. If the process step to be executed has already entered the cycle when the cycle count is reset, the controller 2 updates the cycle count and continues executing the cycle step according to the reset cycle count until the reset cycle count is reached, at which point the cycle step operation exits. This ensures that the reset cycle count takes effect in real time, meeting the process step adjustment requirements, while avoiding process step interruptions or data loss due to interactive cycle control parameter modifications.

[0030] This invention's system for executing process recipes, by adding interactive cyclic control parameters and skip parameters, supports real-time parameter modification. This solves the problems of cumbersome recipe writing and redundant repetitive steps in traditional methods, while also enabling intuitive monitoring and flexible control of the cyclic process operation. It significantly improves the efficiency and reliability of vacuum furnace process recipe editing and is adaptable to various vacuum furnace production scenarios requiring cyclic processes. It effectively overcomes the core shortcomings of existing technologies, achieving significant improvements in recipe editing efficiency, process monitoring reliability, operational flexibility, and equipment compatibility. It meets the needs of automated vacuum furnace production, is highly practical, and has significant industrial application value.

[0031] This invention provides a method for simplifying and controlling the cyclic execution of vacuum furnace process recipes. The method employs the aforementioned simplified editing and cyclic execution control system for vacuum furnace process recipes, and includes the following steps: Step S1: Input the process execution recipe into the vacuum furnace recipe editing module of the host computer 1. The process execution recipe includes the process steps to be executed containing a single cycle process and at least three interactive cycle control parameters. The three interactive cycle control parameters are the cycle start step, the number of cycles, and the cycle end step. The cycle start step, the number of cycles, and the cycle end step together constitute the cycle interval.

[0032] Step S2: Controller 2 receives and parses the process execution recipe sent by host computer 1 in real time, and parses the information of the process steps to be executed, the loop start step parameters, the loop number parameters and the loop end step parameters in the process execution recipe.

[0033] Step S3: Controller 2 determines whether the process execution recipe is configured with interactive cyclic control parameters. If the process execution recipe is configured with interactive cyclic control parameters, it jumps to step S4 to execute the cyclic process; if the process execution recipe is not configured with interactive cyclic control parameters, it jumps to step S5 to execute the sequential process.

[0034] Step S4: Controller 2 controls vacuum furnace actuator 3 to repeatedly execute the process steps to be repeated in the process steps containing single-cycle operations according to the set cycle start step and cycle end step. Controller 2 counts the current cycle count in real time and feeds it back to host computer 1. Host computer 1 displays the current running process steps, the current cycle count and the total cycle count in real time. After the set total cycle count is completed, the cycle process is exited and the subsequent process steps in the cycle interval are executed.

[0035] Step S5: Controller 2 controls vacuum furnace actuator 3 to execute the process steps to be executed sequentially, which contain single-cycle processes.

[0036] Regarding the specific structure of this invention, it should be noted that the connection relationships between the various component modules used in this invention are definite and achievable. Except as specifically described in the embodiments, their specific connection relationships can bring about corresponding technical effects and solve the technical problems proposed by this invention without relying on the execution of corresponding software programs. The models of the components, modules, and specific components appearing in this invention, the connection methods between them, and the conventional usage methods and expected technical effects brought about by the above technical features, unless specifically described, are all publicly disclosed content in patents, journal articles, technical manuals, technical dictionaries, and textbooks that can be obtained by those skilled in the art before the application date, or belong to conventional technology, common knowledge, and other existing technologies in this field. There is no need to elaborate, which makes the technical solution provided in this case clear, complete, and achievable, and can reproduce or obtain corresponding physical products based on this technical means.

[0037] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A simplified editing and cyclic execution control system for vacuum furnace process recipes, characterized in that, include: The host computer (1) integrates a vacuum furnace recipe editing module. The vacuum furnace recipe editing module is used to input the process execution recipe. The process execution recipe includes the process steps to be executed containing a single cycle process and at least three interactive cycle control parameters. The three interactive cycle control parameters are the cycle start step, the number of cycles and the cycle end step. The cycle start step, the number of cycles and the cycle end step together constitute the cycle interval. The controller (2) is connected to the host computer (1) for real-time analysis of the information of the process steps to be executed, the cycle start step parameters, the cycle number parameters and the cycle end step parameters in the process execution recipe, and to determine whether there are interactive cycle control parameters in the process execution recipe. If there are interactive cycle control parameters in the process execution recipe, the controller (2) controls the vacuum furnace execution mechanism (3) to repeatedly execute the process steps to be repeated in the process steps to be executed that contain a single cycle operation according to the set cycle start step and cycle end step. After completing the set total number of cycles, the controller exits the cycle process and continues to execute the subsequent process steps in the cycle interval. If there are no interactive cycle control parameters in the process execution recipe, the controller controls the vacuum furnace execution mechanism (3) to execute the process steps to be executed in sequence according to the process steps to be executed that contain a single cycle operation.

2. The vacuum furnace process formula simplification editing and cycle execution control system according to claim 1, characterized in that, The host computer (1) is also used to display the current running process steps, the current number of cycles, and the total number of cycles in real time.

3. The vacuum furnace process formula simplification editing and cycle execution control system according to claim 1, characterized in that, The process execution formula also includes step skipping parameters. When the process execution formula parsed by the controller (2) contains step skipping parameters, the controller (2) controls the vacuum furnace actuator (3) to execute the process step to be executed corresponding to the step skipping parameters.

4. The vacuum furnace process formula simplification editing and cycle execution control system according to claim 3, characterized in that, When the number of steps of the process step to be executed corresponding to the step skip parameter is greater than the number of steps of the process step to be executed corresponding to the cycle termination step, the controller (2) controls the vacuum furnace actuator (3) to exit the cycle process and execute the process step to be executed corresponding to the step skip parameter and its subsequent steps.

5. The vacuum furnace process formula simplification editing and cycle execution control system according to claim 3, characterized in that, When the number of process steps to be executed corresponding to the step skip parameter is less than or equal to the number of process steps to be executed corresponding to the loop termination step, the controller (2) controls the vacuum furnace actuator (3) to execute the process steps to be executed corresponding to the step skip parameter and the subsequent steps in the loop interval, and then continues to execute the loop operation until the set number of loops is reached and the loop process is exited.

6. The vacuum furnace process recipe simplification editing and cycle execution control system according to claim 1, characterized in that, The absence of interactive cyclic control parameters in the process execution formula means that all interactive cyclic control parameters are set to zero.

7. The vacuum furnace process recipe simplification editing and cycle execution control system according to claim 1, characterized in that, When the controller (2) receives the interactive cyclic control parameters sent by the host computer (1), it first controls the vacuum furnace actuator (3) to execute the process steps to be executed before the cycle start step. When the controller controls the vacuum furnace actuator (3) to execute the process steps to be executed corresponding to the cycle start step, the cycle count is started. The initial count is 1 and the step size is 1 until the set number of cycles is reached.

8. A method for simplifying the editing and cyclic execution control of a vacuum furnace process formula, characterized in that, The simplified editing and cycle execution control system for vacuum furnace process recipes as described in any one of claims 1-7 includes the following steps: Step S1: Input the process execution recipe into the vacuum furnace recipe editing module of the host computer (1). The process execution recipe includes the process steps to be executed containing a single cycle process and at least three interactive cycle control parameters. The three interactive cycle control parameters are the cycle start step, the number of cycles and the cycle end step. The cycle start step, the number of cycles and the cycle end step together constitute the cycle interval. Step S2: The controller (2) receives and parses the process execution recipe sent by the host computer (1) in real time, and parses the information of the process steps to be executed, the loop start step parameters, the loop number parameters and the loop end step parameters in the process execution recipe. Step S3: The controller (2) determines whether there are interactive cyclic control parameters in the process execution recipe. If there are interactive cyclic control parameters in the process execution recipe, it jumps to step S4 to execute the cyclic process; if there are no interactive cyclic control parameters in the process execution recipe, it jumps to step S5 to execute the sequential process. Step S4: The controller (2) controls the vacuum furnace actuator (3) to repeatedly execute the process steps to be repeated in the process steps to be executed that contain a single cycle process according to the set cycle start step and cycle end step. After completing the set total number of cycles, the cycle process is exited and the subsequent process steps in the cycle interval are executed. Step S5: The controller (2) controls the vacuum furnace actuator (3) to execute the process steps to be executed in sequence, which contain single-cycle processes.

9. The method for simplifying and editing the vacuum furnace process formula and controlling its cyclic execution according to claim 8, characterized in that, In step S4, while executing the cyclic process, the controller (2) counts the current number of cycles in real time and feeds it back to the host computer (1). The host computer (1) displays the current running process steps, the current number of cycles, and the total number of cycles in real time.

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