Rolling device and manufacturing method thereof

Abstract

In the rolling device, at least one of an inner member, an outer member, and a rolling element constituting the rolling device is made of a nickel-based alloy comprising 35-45 wt% of Cr, 3.7-5 wt% of Al, and the balance of Ni and unavoidable impurities, the Rockwell hardness of the surface layer of the nickel-based alloy constituting at least one of the inner member, the outer member, and the rolling element is 40 HRC or less after solution treatment and 58 HRC or more after precipitation hardening treatment. The average KAM (core average orientation) value of the surface layer of the nickel-based alloy constituting at least one of the inner member, the outer member, and the rolling body after the solution treatment is 0.35 or less, and after the precipitation hardening treatment is 0.5 or more.

Description

Technical Field

[0001] This disclosure relates to a rolling device and a method for manufacturing the rolling device. Background Technology

[0002] As conventionally used mechanical elements, rolling devices such as ball screws, linear guides, direct-acting bearings, and ball splines are known. This rolling device comprises: an inner square member having a track surface on its outer surface; an outer square member having a track surface opposite to the track surface of the inner square member and disposed outside the inner square member; and a plurality of rolling elements that are freely arranged between the two track surfaces, by which the outer square member can freely reciprocate or rotate in the axial or circumferential direction of the inner square member.

[0003] In this type of rolling device, multiple rolling elements disposed between the inner and outer square components repeatedly undergo rolling motion, thus repeatedly applying contact stress to the structural components of these rolling devices. Therefore, the materials constituting the inner square component, outer square component, and rolling elements are usually metallic materials with excellent fatigue life and wear resistance.

[0004] Furthermore, such rolling devices are sometimes used in special environments requiring cleanliness, such as cleanrooms, semiconductor manufacturing facilities, LCD panel manufacturing facilities, and food processing facilities, as well as in medical equipment. Therefore, the materials constituting the inner square components, outer square components, and rolling elements sometimes require high corrosion resistance and non-magnetic properties. Conventional non-magnetic materials with high corrosion resistance include beryllium copper and austenitic stainless steel. These non-magnetic materials with high corrosion resistance have also been explored for use in rolling devices. For example, Patent Document 1 discloses a rolling device (motion guide device) using austenitic metals and its manufacturing method.

[0005] Existing technical documents

[0006] Patent documents

[0007] Patent Document 1: International Publication No. 2006 / 112213 Summary of the Invention

[0008] The problem that the invention aims to solve

[0009] However, materials such as beryllium copper and austenitic stainless steel have a maximum hardness of only about 40 HRC on a Rockwell hardness tester. Therefore, when using these materials to manufacture rolling devices, there is a problem that the rated load is lower than that of existing products. As a countermeasure to this problem, in the prior art, a larger model of rolling device is selected than before, thereby increasing the rated load by increasing the size of the rolling device.

[0010] Furthermore, ceramic materials exist as non-magnetic, highly corrosion-resistant, and sufficiently hard materials; however, their poor machinability presents a challenge in manufacturing high-precision rolling devices. Moreover, ceramic materials suffer from high Young's modulus and low toughness, making it impossible to achieve structures that can apply pressure to the rolling device.

[0011] This disclosure was made in view of the various problems existing in the prior art described above, and its object is to obtain a rolling device with high performance by obtaining a material that has high non-magnetic properties and high corrosion resistance, high hardness that can be used as a rolling device, and processability and Young's modulus that are equivalent to steel.

[0012] Methods for solving problems

[0013] The rolling device disclosed herein comprises: an inner square member having a track surface on its outer surface; an outer square member having a track surface facing the track surface of the inner square member and disposed outside the inner square member; and a plurality of rolling elements rotatably disposed between two of the track surfaces. The device is characterized in that a component constituting at least one of the inner square member, the outer square member, and the rolling elements is made of a nickel-based alloy, the nickel-based alloy being composed of 35-45% by weight Cr, 3.7-5% by weight Al, the remainder being Ni, and unavoidable impurities; the Rockwell hardness of the surface layer of the nickel-based alloy constituting at least one of the inner square member, the outer square member, and the rolling elements is below 40 HRC after solution treatment and above 58 HRC after precipitation hardening treatment; and the average KAM (Kernel Average KAM) of the surface layer of the nickel-based alloy constituting at least one of the inner square member, the outer square member, and the rolling elements is... Misorientation (average nucleus orientation difference) values ​​are below 0.35 after solution treatment and above 0.5 after precipitation hardening treatment.

[0014] The disclosed method for manufacturing a rolling device comprises: an inner square member having a track surface on its outer surface; an outer square member having a track surface facing the track surface of the inner square member and disposed outside the inner square member; and a plurality of rolling elements disposed freely between two of the track surfaces. The method is characterized in that, as a component constituting at least one of the inner square member, the outer square member, and the rolling elements, a nickel-based alloy composed of 35-45% by weight Cr, 3.7-5% by weight Al, the remainder Ni, and unavoidable impurities is selected, such that the Rockwell hardness of the surface layer of the nickel-based alloy constituting at least one of the inner square member, the outer square member, and the rolling elements is 40 HRC or less after solution treatment and 58 HRC or more after precipitation hardening treatment, and the average KAM (Kernel Average) of the surface layer of the nickel-based alloy constituting at least one of the inner square member, the outer square member, and the rolling elements is... Misorientation (average nucleus orientation difference) values ​​are below 0.35 after solution treatment and above 0.5 after precipitation hardening treatment.

[0015] Invention Effects

[0016] According to this disclosure, by obtaining a material with high non-magnetic properties and high corrosion resistance, high hardness suitable for use as a rolling device, and processability and Young's modulus equivalent to steel, it is possible to obtain a rolling device with high performance. Attached Figure Description

[0017] Figure 1 This is a flowchart illustrating the processing steps of the nickel-based alloy in this embodiment.

[0018] Figure 2 This is a diagram showing the test piece used in the top quenching test. In the diagram, sub-view (a) represents the top view and sub-view (b) represents the front view.

[0019] Figure 3 This is a flowchart illustrating the test method for the top-end quenching test.

[0020] Figure 4 This is a graph showing the temperature measurements taken at each elapsed time using a test piece subjected to a top-hardening test.

[0021] Figure 5 It is a graph showing the measured hardness values ​​of the test piece after solution treatment and precipitation hardening treatment, determined by using the top quenching test, according to the distance from the bottom of the test piece.

[0022] Figure 6It is a graph that represents the KAM map in a way that allows visual identification of the measured KAM values, according to the distance from the bottom of the test piece.

[0023] Figure 7 It is a graph showing the average KAM (Kernel Average Misorientation) values ​​of test pieces obtained after solution treatment and precipitation hardening treatment, based on the distance from the bottom of the test piece.

[0024] Figure 8 It is a graph that plots the results of measuring the relative permeability of each magnetic field strength of the nickel-based alloy in this embodiment using a vibrating sample type magnetometer.

[0025] Figure 9 This is a flowchart illustrating the test steps for a hydrogen fluoride corrosion test performed to verify the corrosion resistance of the nickel-based alloy of this embodiment.

[0026] Figure 10 This is a graph summarizing the test results of the nickel-based alloy of this embodiment obtained through the hydrogen fluoride corrosion test.

[0027] Figure 11 This is a graph summarizing the test results of SUS304 as a comparative example obtained through hydrogen fluoride corrosion testing.

[0028] Figure 12 This is a graph summarizing the test results of HPM75 as a comparative example obtained through the hydrogen fluoride corrosion test.

[0029] Figure 13 This is a graph summarizing the test results of SUS316L as a comparative example obtained through hydrogen fluoride corrosion testing.

[0030] Figure 14 This is a graph summarizing the test results of SUS440C as a comparative example obtained through hydrogen fluoride corrosion testing.

[0031] Figure 15 This is an external perspective view illustrating one embodiment of the rolling device being configured as a linear guide device.

[0032] Figure 16 It is used for explanation Figure 15 The diagram shows a cross-sectional view of the infinite loop path of the linear guide device.

[0033] Figure 17 This diagram illustrates a case where the rolling device of this embodiment is configured as a ball screw device.

[0034] Figure 18This diagram illustrates a case where the rolling device of this embodiment is configured as a spline device.

[0035] Figure 19 This is a partial longitudinal sectional perspective view illustrating one embodiment of the rolling device as a rotary bearing device.

[0036] Figure 20 It means Figure 19 A longitudinal section of the rotary bearing assembly shown.

[0037] Figure 21 This is an external perspective view illustrating one embodiment where the rolling device is configured as a sliding lead screw device.

[0038] Figure 22 The diagram is used to illustrate various applications of this disclosure and is a partial three-dimensional sectional view of the rolling device in which the linear motion guide and the ball screw are combined into a single structure. Detailed Implementation

[0039] When selecting a material possessing high non-magnetic properties, high corrosion resistance, high hardness suitable for use in rolling devices, and workability comparable to steel, the inventors focused on nickel-based alloys during experimental research on various materials. This nickel-based alloy is a non-ferrous metal that can be softened by solution treatment and hardened by precipitation hardening. Furthermore, it is known to have workability comparable to steel. Nickel itself is magnetic, but becomes non-magnetic by adding chromium. Additionally, nickel is known to be highly corrosion-resistant. Therefore, it was envisioned that the nickel-based alloy could achieve properties such as high non-magnetic properties and high corrosion resistance, which are difficult to obtain in steel, a ferrous metal. However, without clarifying the conditions for heat treatment processes such as solution treatment and precipitation hardening, and without clarifying the manufacturing conditions, mass production is impossible. Based on a grasp of these issues, and regarding the manufacturing conditions for mass production of nickel-based alloys, the inventors have successfully discovered a nickel-based alloy of this disclosure that can be applied to rolling devices through various experimental studies, and therefore its details are described below.

[0040] First, the inventors discovered through in-depth experimental research that the nickel-based alloy of the present invention consists of 35-45% by weight Cr, 3.7-5% by weight Al, the remainder Ni, and unavoidable impurities. More specifically, various experimental studies were conducted based on the nickel-based alloy of this embodiment that satisfies the composition conditions shown in Table 1 below.

[0041]

[0042] It should be noted that, as shown in Table 1, the nickel-based alloy of this embodiment is composed of 35-45% by weight Cr, 3.7-5% by weight Al, the remainder being 55% by weight or more Ni, and unavoidable impurities (wherein Fe is less than 1% by weight). However, regarding the properties of the nickel-based alloy of this embodiment described later, the inventors have confirmed that a nickel-based alloy composed of 35-45% by weight Cr, 3.7-5% by weight Al, the remainder being Ni, and unavoidable impurities has the same properties. Therefore, the compositional conditions used to determine the non-ferrous metal species that can be used as the nickel-based alloy of this disclosure only need to consist of 35-45% by weight Cr, 3.7-5% by weight Al, the remainder being Ni, and unavoidable impurities.

[0043] Next, the inventors investigated the processing steps for applying the nickel-based alloy of this embodiment to the rolling device. As a result, they concluded that if... Figure 1 The processing steps shown enable the manufacture of nickel-based alloy machined parts suitable for rolling devices. Here, Figure 1 This is a flowchart illustrating the processing steps of the nickel-based alloy in this embodiment.

[0044] Figure 1 In the processing steps shown, firstly, a rolled raw material made of a nickel-based alloy is prepared (step S10), and the rolled raw material is subjected to a solution treatment as a first heat treatment to soften the raw material (step S11). Next, the raw material softened by the solution treatment is rough-machined (step S12) to obtain a shape close to the shape of components such as the inner square member, outer square member, or rolling element constituting the rolling device. Furthermore, by performing a precipitation hardening treatment as a second heat treatment on the rough-machined raw material, a hardness sufficient for use as a structural component of the rolling device is obtained (step S13). Afterward, the component shape constituting the inner square member, outer square member, or rolling element constituting the rolling device is machined by grinding (step S14), and the component constituting the inner square member, outer square member, or rolling element constituting the rolling device is completed by assembling the obtained machined component (step S15) (step S16). By performing such processing steps, the nickel-based alloy of this embodiment can be applied to the rolling device. However, in order to perform... Figure 1 The processing steps shown can be determined by understanding the implementation conditions of the solution treatment (first heat treatment) in step S11, the precipitation hardening treatment (second heat treatment) in step S13, and the depth to which the raw material after the precipitation hardening treatment (second heat treatment) in step S13 has a hardness useful to the rolling device, up to the surface layer. Therefore, the machinable range of the grinding process shown in step S14 can be determined. Thus, in order to perform the processing steps... Figure 1The processing steps shown were performed for the purpose of evaluating the characteristics of heat treatment. Figure 2 and Figure 3 The top quenching test shown.

[0045] Here, Figure 2 This is a diagram showing the test piece used in the top-hardening test. Frame (a) represents the top view, and frame (b) represents the front view. Additionally, Figure 3 This is a flowchart illustrating the test method for the top-end quenching test.

[0046] like Figure 2 As shown, the test piece 10 used in the top-hardening test conducted by the inventors has a cylindrical main body with dimensions of φ25mm × 100mm. It also has six thermocouple mounting holes 11 formed along its length from the upper surface towards the lower end. A thermocouple is installed in each of the six thermocouple mounting holes 11. In the top-hardening test of this embodiment, after heating the test piece 10, cooling water is brought into contact with the lower end of the test piece 10. At this time, temperature measurements are taken at six locations—1.8mm, 5mm, 10mm, 25mm, 50mm, and 75mm—from the lower end of the test piece 10 using the thermocouples installed in the six thermocouple mounting holes 11. Therefore, by measuring the temperature at each of the six temperature measurement locations set from the lower end of the test piece 10 upwards over time, and the hardness of the test piece 10 after heat treatment and water cooling, the characteristics of the heat treatment process can be evaluated.

[0047] Next, refer to Figure 3 This describes the test method used by the inventors in the top-quenching test. In the top-quenching test of this embodiment, firstly, preparation... Figure 2 The test piece 10 shown (step S30) is heated at 1150°C for 1 hour (step S31). When the overheating in step S31 ends, the test piece 10 is brought into contact with cooling water at 20°C from its lower end to perform solution treatment (step S32). Furthermore, while continuously contacting the test piece with cooling water, the temperature is measured for each elapsed time using six thermocouples installed on the test piece 10 (step S33). It should be noted that after cooling with cooling water, the hardness of the test piece 10 after solution treatment is measured (step S34). Then, the test piece 10 is further heated at 585°C for 16 hours, followed by air cooling to perform precipitation hardening treatment (step S35). After the precipitation hardening treatment in step S35 is completed, the hardness of the precipitation hardened test piece 10 is measured (step S36). By performing the above steps, the top quenching test is completed.

[0048] It should be noted that, Figure 2 and Figure 3 The top-quenching test shown is a method originally used to evaluate the hardenability of steel, and generally, this method has not been applied to non-ferrous metal materials. However, by using the top-quenching test for the nickel-based alloy of this embodiment, which is a non-ferrous metal material, the inventors successfully evaluated the heat treatment characteristics of the nickel-based alloy for the first time. Next, the heat treatment characteristics of the nickel-based alloy of this embodiment obtained using the top-quenching test will be described.

[0049] first, Figure 4 This is a graph showing the temperature measurements taken at each elapsed time using a test piece subjected to a top-hardening test. Figure 4 The result shown will be Figure 3 The measurement results performed in step S33 are graphically presented. Figure 4 The results show that the closer to the lower end of the test piece 10 cooled by cooling water, the faster the cooling; and the farther away from the cooling point, the longer the cooling time. That is, it is clear that when the nickel-based alloy of this embodiment undergoes solution treatment, the closer to the surface layer (i.e., shallow) of the nickel-based alloy undergoing solution treatment, the faster the cooling rate; and the farther away from the surface layer (i.e., deep), the slower the cooling rate. From these results, it can be seen that the effect of solution treatment in softening the raw material tends to be higher closer to the surface layer (i.e., shallow) of the nickel-based alloy, thus reducing hardness; and lower further away from the surface layer (i.e., deep) of the nickel-based alloy, thus maintaining hardness.

[0050] Having mastered Figure 4 Based on the results shown, the hardness values ​​measured after solution treatment and precipitation hardening in the top-quenching test were compared. Here, Figure 5 It is a graph showing the measured hardness values ​​of the test piece after solution treatment and precipitation hardening treatment, determined by the distance from the bottom end of the test piece using the top quenching test.

[0051] according to Figure 5 It is known that previous understanding in this technical field held that precipitation hardening alone was beneficial for increasing hardness. However, based on a summary of the results of the inventors' top-quenching experiments... Figure 5It is known that the hardness after precipitation hardening treatment depends on the hardness after solution treatment. Specifically, in order to meet the hardness requirements for structural components used in rolling devices, the inventors considered a Rockwell hardness of 58 HRC or higher after precipitation hardening treatment. Therefore, the hardness after solution treatment needs to be 40 HRC or lower. Thus, the insight that the hardness after precipitation hardening treatment (the second heat treatment) will not reach 58 HRC or higher if the hardness is not reduced to 40 HRC or lower during the solution treatment (the first heat treatment) stage is clarified for the first time using a novel experimental evaluation method: the top-quenching test on nickel-based alloys, which are non-ferrous metals.

[0052] Therefore, it can be clearly stated that, by Figure 5 It is known that the condition for a hardness of 58 HRC or higher after precipitation hardening treatment during water cooling is met if the hardness extends from the surface of the nickel-based alloy to a depth of 35 mm. This fact is... Figure 1 The grinding process shown in step S14 of the processing steps of the nickel-based alloy in this embodiment is an important insight. This insight indicates that when cutting structural components for a rolling device from rolled raw material that has undergone rough machining and grinding, for example, if the track surface requiring a hardness of 58 HRC or higher is located at a depth greater than 35 mm, a hardness of 58 HRC or higher cannot be obtained after precipitation hardening treatment. In this case, it is sufficient to pre-cut the material with the track surface within 35 mm of the raw material surface and then perform solution treatment. That is, based on the insights obtained this time, the heat treatment characteristics of the nickel-based alloy of this embodiment are clarified, thus enabling the mass production of nickel-based alloys as structural components for rolling devices.

[0053] based on Figure 5Based on the insights gained, the inventors conducted further research. Specifically, they performed analysis and evaluation using a new evaluation method based on KAM (Kernel Average Misorientation) values, employing EBSD (Electron Back Scatter Diffraction) as an additional function of SEM (Scanning Electron Microscope). The KAM value is an indicator used to define the cooling rate after solution treatment. Specifically, the KAM value is a value that can be calculated using SEM-based EBSD measurements, representing the orientation difference of the crystal. EBSD measurements were performed under analytical conditions of an accelerating voltage of 15 kV, a step size of 0.1 μm, and an MMA threshold of 5. After cutting, the sample was prepared to a mirror finish through mechanical and chemical grinding, and then ion milled for 10 minutes at an accelerating voltage of 40 kV. A KAM mapping diagram, showing the KAM values ​​thus measured in a way that allows for visual identification, is displayed according to the distance from the lower end of the test piece 10. Figure 6 Here, Figure 6 This is a diagram showing the KAM mapping in a way that allows for visual identification of the measured KAM values, arranged according to the distance from the bottom edge of the test piece. Figure 6 In the KAM diagram, the darker the shading, the higher the value of the crystal orientation difference (an indicator of the amount of dislocations) and the higher the hardness value.

[0054] Furthermore, the inventors will Figure 6 The KAM mapping shown was numericalized, and a model was created. Figure 7 The diagram shown here. Figure 7 This is a graph showing the average KAM (Kernel Average Misorientation) values ​​of test pieces obtained using the top-quenching test, based on their distance from the bottom of the test piece after solution treatment and precipitation hardening treatment. Figure 7 It has been determined that for nickel-based alloys with a hardness of 58 HRC or higher after precipitation hardening treatment, the average KAM value at a depth of 35 mm from the surface after solution treatment is 0.35 or lower, and the average KAM value after precipitation hardening treatment is 0.5 or higher. In other words, as a new indicator for mass production of the nickel-based alloy of this embodiment as a structural component of a rolling device, the condition of an average KAM value of 0.35 or lower after solution treatment and 0.5 or higher after precipitation hardening treatment has been established. By finding a new indicator for applying the nickel-based alloy as a structural component of a rolling device, the application possibilities of the nickel-based alloy of this embodiment can be expanded.

[0055] Based on the inventors' experimental research described above, it is evident that the nickel-based alloy of this embodiment, through prescribed heat treatment, possesses high hardness suitable for use as a rolling device, and further, can be utilized as a material with workability and Young's modulus equivalent to steel. Therefore, the inventors next verified whether the nickel-based alloy of this embodiment possesses high non-magnetic properties.

[0056] The inventors prepared a nickel-based alloy according to this embodiment, wherein the Rockwell hardness of the surface layer (from the surface to a depth of 35 mm) of the nickel-based alloy is less than 40 HRC after solution treatment and more than 58 HRC after precipitation hardening treatment. In addition, the average KAM (Kernel Average Misorientation) value of the surface layer (from the surface to a depth of 35 mm) is less than 0.35 after solution treatment and more than 0.5 after precipitation hardening treatment. The non-magnetic properties were evaluated by measuring the relative permeability of the nickel-based alloy.

[0057] Then, firstly, the inventors measured the relative permeability using a measuring instrument called the Ferromaster (product model), which is typically used for measuring the relative permeability of materials with low permeability. The measurement conditions are shown in Table 2.

[0058]

[0059] The measurement results using the Ferromaster permeability meter shown in Table 2 are presented in Table 3. It should be noted that, in addition to the nickel-based alloy of this embodiment, for comparison purposes, the solution-treated SUS304 as Comparative Example 1, HPM75 as Comparative Example 2, and work-hardened SUS304 as Comparative Example 3 were also measured using the Ferromaster permeability meter.

[0060]

[0061] As shown in Table 3, the relative permeability of the nickel-based alloy in this embodiment is 1.001 μm, based on measurements using a Ferromaster permeability meter. r That is, it can be seen that the nickel-based alloy of this embodiment is suitable for use in a magnetic field with a strength of 3.5 × 10⁻⁶. 4 Relative permeability μ at A / m r Satisfy μ r The inequality is less than 1.001. Therefore, it can be seen that the nickel-based alloy of this embodiment is a material with higher non-magnetic properties than those of Comparative Examples 1-3.

[0062] However, in measurements using the Ferromaster permeability meter shown in Tables 2 and 3, the lower limit of the measurable relative permeability is 1.001 μ. r Therefore, more detailed values ​​could not be obtained. Thus, the inventors used a vibrating sample magnetometer (VSM) to measure the magnetic properties of the nickel-based alloy of this embodiment in detail. Table 4 shows the measurement conditions for the vibrating sample magnetometer.

[0063]

[0064] The measurement results of the vibrating sample type magnetometer shown in Table 4 are presented in Table 5. It should be noted that, for the measurement using the vibrating sample type magnetometer, in addition to the nickel-based alloy of this embodiment, for comparison purposes, SUS304 after solution treatment as Comparative Example 1, HPM75 as Comparative Example 2, and SUS304 after work hardening as Comparative Example 3 were also measured.

[0065]

[0066] It should be noted that the measurement results of the vibrating sample magnetometer are graphically presented in [the relevant section]. Figure 8 . Figure 8 This is a graph that graphically represents the measurement results of the relative permeability of each magnetic field strength of the nickel-based alloy in this embodiment, using a vibrating sample type magnetometer. (Example) Figure 8 As shown in Table 5, the results measured using a vibrating sample magnetometer indicate that the maximum relative permeability of the nickel-based alloy in this embodiment is 1.00035 μm. r This is a very low value; the maximum relative permeability is below the lower limit measured using a Ferromaster permeability meter. This result indicates that the nickel-based alloy of this embodiment also exhibits very high nonmagnetic properties compared to the materials of Comparative Examples 1-3. Furthermore, measurements using a vibrating sample type magnetometer show that when a magnetic field of -7.8 × 10⁻⁶ is applied… 5 ~7.8×10 5 Over a wide range of A / m, the nickel-based alloy of this embodiment exhibits a very low relative permeability. This result shows that the nickel-based alloy of this embodiment satisfies a magnetic field strength of 3.5 × 10⁻⁶. 4 Relative permeability μ at A / m r For μ r The inequality ≤1.0004, and furthermore, this inequality applies when a magnetic field of -7.8 × 10⁻⁴ is applied. 5 ~7.8×10 5 This also applies within the range of A / m.

[0067] Based on the inventors' experimental research described above, it is evident that the nickel-based alloy of this embodiment, after undergoing prescribed heat treatment, possesses high hardness suitable for use as a rolling device, and further, can be used as a material with workability and Young's modulus comparable to steel. Furthermore, it is known that the nickel-based alloy of this embodiment exhibits high non-magnetic properties. Therefore, the inventors next verified whether the nickel-based alloy of this embodiment possesses high corrosion resistance.

[0068] use Figure 9 The tests conducted by the inventors to verify the corrosion resistance of the nickel-based alloy of this embodiment will be described here. Figure 9 This is a flowchart illustrating the test steps for a hydrogen fluoride corrosion test performed to verify the corrosion resistance of the nickel-based alloy of this embodiment.

[0069] The hydrogen fluoride corrosion test conducted by the inventors was to evaluate the corrosion resistance of the test materials to hydrofluoric acid (HF). The test materials were set as the nickel-based alloys of this embodiment and five types: SUS304, HPM75, SUS316L, and SUS440C. Two test pieces of each test material were prepared, and two solutions with concentrations of 0.1% and 1% (prepared by diluting hydrofluoric acid with ultrapure water) were prepared. The specific steps of the hydrogen fluoride corrosion test were then as follows: Figure 9 As shown, firstly, the surface of the test piece is ground to a uniform roughness Ra of 0.1~0.2 μm (step S90), and then the surface of the test piece is cleaned with n-hexane (step S91). For the test pieces prepared in this way, they are masked with a masking seal with a φ30 mm hole (step S92). Solutions with concentrations of 0.1% and 1% are dropped onto each sample and allowed to contact the liquid before air drying for 24 hours (step S93). It should be noted that in step S93, the air drying process is performed without adding any solution, and the sample is air-dried directly. Then, the test piece is rinsed with ultrapure water and further air-dried for 24 hours (step S94). Finally, photographs of the test piece surface obtained after the processes consisting of steps S90 to S94 are taken using a digital camera and a digital microscope (step S95), and the corrosion resistance of the test material is evaluated by visually observing the photographs.

[0070] Will be used Figure 9 The test results obtained from the hydrogen fluoride corrosion test are shown in the diagram. Figures 10-14 Here, Figure 10 This is a graph summarizing the test results of the nickel-based alloy of this embodiment obtained through hydrogen fluoride corrosion testing. Figure 11 This is a graph summarizing the test results of SUS304 as a comparative example obtained through hydrogen fluoride corrosion testing. Figure 12This is a graph summarizing the test results of HPM75 as a comparative example, obtained through hydrogen fluoride corrosion testing. Figure 13 This is a graph summarizing the test results of SUS316L as a comparative example obtained through hydrogen fluoride corrosion testing. Figure 14 This is a graph summarizing the test results of SUS440C as a comparative example, obtained through hydrogen fluoride corrosion testing. It should be noted that... Figures 10-14 The images show two solutions of hydrogen fluoride, with concentrations of 0.1% and 1%. The top section shows an overall photograph, the middle section shows a magnified photograph at 20x magnification, and the bottom section shows a magnified photograph at 100x magnification.

[0071] Depend on Figures 10-14 It can be seen that, for the nickel-based alloy of this embodiment, even after contact with hydrogen fluoride solutions of 0.1% and 1% concentrations and then air-drying, no rust was generated or the surface properties deteriorated, confirming that it maintained an extremely clean state. On the other hand, in the materials used as comparative examples, for Figure 12 The HPM75 shown and Figure 14 The SUS440C shown confirms overall rust on the surface of the test piece. Additionally, regarding... Figure 10 The SUS304 shown and Figure 13 Although the SUS316L shown exhibits minimal rust formation, surface deterioration is confirmed. The hydrogen fluoride corrosion test described above confirms that the nickel-based alloy of this embodiment possesses extremely high corrosion resistance.

[0072] As explained above, based on the experimental research conducted by the inventors, the nickel-based alloy of this embodiment possesses the following characteristics, thereby exhibiting high non-magnetic properties and high corrosion resistance, as well as high hardness suitable for use as a rolling device, and furthermore, it is a material with workability and Young's modulus equivalent to steel.

[0073] The nickel-based alloy disclosed herein consists of 35 to 45% by weight of Cr, 3.7 to 5% by weight of Al, the remainder of Ni, and unavoidable impurities.

[0074] • The Rockwell hardness of the surface layer of nickel-based alloys is below 40 HRC after solution treatment and above 58 HRC after precipitation hardening treatment.

[0075] • The average KAM (Kernel Average Misorientation) value of the surface layer of nickel-based alloys is below 0.35 after solution treatment and above 0.5 after precipitation hardening treatment.

[0076] • The surface layer of the nickel-based alloy includes at least a portion extending from the surface of the nickel-based alloy to a depth of 35 mm.

[0077] The magnetic field strength of nickel-based alloys is 3.5 × 10⁻⁶. 4 Relative permeability μ at A / m r Satisfy μ r Inequality < 1.001.

[0078] Furthermore, the magnetic field strength of the nickel-based alloy is 3.5 × 10⁻⁶. 4 Relative permeability μ at A / m r Satisfy μ r Inequalities ≤1.0004.

[0079] By applying the nickel-based alloy of this disclosure, which has the structure described above, to a rolling device, a high-performance rolling device can be obtained. Therefore, examples of applying a component made of the nickel-based alloy of this disclosure to a rolling device will be described next.

[0080] [Examples of applications of rolling devices]

[0081] Specific embodiments of a rolling device using a component made of a nickel-based alloy of this disclosure as a rolling sliding component will be described with reference to the accompanying drawings. It should be noted that the embodiments of the rolling device illustrated below do not limit the invention involved in each technical solution, and the combinations of features described in the embodiments are not necessarily all necessary for the solution of the invention. Furthermore, the term "rolling device" in this specification includes, for example, rolling bearings used in machine tools, unlubricated bearings used in a vacuum, linear guides, linear guide devices, ball spline devices, ball screw devices, roller screw devices, crossed roller bearings, and other devices that involve all rolling and sliding actions.

[0082] (Example of application of linear guidance device)

[0083] The rolling device in this embodiment can be configured as follows: Figure 15 and Figure 16 The linear guide device shown, by using components made of the nickel-based alloy of the present disclosure for the structural members of the linear guide device, can achieve a high-performance rolling device with high non-magnetic properties and high corrosion resistance, high hardness suitable for use as a rolling device, and the inclusion of materials with machinability and Young's modulus equivalent to steel in the structural members. Here, Figure 15 This is a perspective view illustrating one embodiment where the rolling device is configured as a linear guide device. Additionally, Figure 16 It is used for explanation Figure 15 The diagram shows a cross-sectional view of the infinite loop path of the linear guide device.

[0084] First of all, Figure 15 and Figure 16The structure of the illustrated linear guide device 40 will be described. The linear guide device 40, which is the rolling device of this embodiment, includes: a track guide 41 as an inner square member; and a moving block 43 as an outer square member, which is slidably mounted on the track guide 41 via balls 42, which are provided as a plurality of rolling elements. The track guide 41 is a long strip member with a cross-section formed in a generally rectangular shape orthogonal to its length direction. On its surface (upper surface and both sides), a rolling element rolling surface 41a, which serves as the track for the rolling of the balls 42, is formed along the entire length of the track guide 41.

[0085] Here, the track guide 41 can be formed as a straight line or as a curved line. Additionally, in Figure 15 as well as Figure 16 The rolling surface 41a of the rolling element shown in the example has two on each side, for a total of four, but the number of these two surfaces can be arbitrarily changed depending on the purpose of the linear guide device 40.

[0086] On the other hand, load rolling surfaces 43a, serving as track surfaces, are provided at positions on the movable block 43 corresponding to the rolling surfaces 41a of the rolling elements. A load rolling path 52 is formed by the rolling surfaces 41a of the track guide 41 and the load rolling surfaces 43a of the movable block 43, and multiple balls 42 are sandwiched between them. Furthermore, the movable block 43 is provided with four unloaded rolling paths 53 extending parallel to each rolling surface 41a, and a direction-changing path 55 connecting each unloaded rolling path 53 to each load rolling path 52. Through the combination of a load rolling path 52 and an unloaded rolling path 53 with a pair of direction-changing paths 55 connecting them, an infinite loop path is formed (see reference). Figure 16 ).

[0087] Furthermore, multiple balls 42 are arranged in an infinite loop consisting of a loaded rolling path 52, an unloaded rolling path 53, and a pair of direction-changing paths 55, 55, so that the moving block 43 can reciprocate relative to the track guide 41.

[0088] In the linear guide device 40 of this embodiment with the structure described above, the nickel-based alloy of the present disclosure is preferably used for at least one of the components constituting the inner square component of the track guide 41, the outer square component of the moving block 43, and the multiple rolling elements of the ball 42.

[0089] It should be noted that in the linear guide device 40 of this embodiment, the nickel-based alloy of this disclosure can be used for all structural components, or only for a portion of the structural components. This selection can be made according to the usage environment, application, or manufacturing cost of the linear guide device 40.

[0090] (Application example of a ball screw device)

[0091] Furthermore, the rolling device in this embodiment can be configured, for example, as follows: Figure 17 The ball screw device 56 shown is illustrated. Figure 17 This diagram illustrates a case where the rolling device of this embodiment is configured as a ball screw device. The ball screw device 56 is a device that includes a screw shaft 57 as an inner square member and a nut member 59 as an outer square member, which is mounted on the screw shaft 57 in a rotatable manner via a plurality of balls 58.

[0092] The lead screw 57 is an inner member with a rolling groove 57a, which is a helical track surface, formed on its outer peripheral surface. On the other hand, the nut member 59 is an outer member with a load rolling groove, which is a helical track surface, formed on its inner peripheral surface, corresponding to the rolling groove 57a. As the lead screw 57 rotates relative to the nut member 59, the nut member 59 can reciprocate relative to the lead screw 57.

[0093] Furthermore, by using the nickel-based alloy of the present disclosure for the screw shaft 57, nut component 59, ball 58 and other components constituting the ball screw device 56, it is possible to realize a high-performance ball screw device 56 that incorporates a material with high non-magnetic properties and high corrosion resistance, high hardness, machinability and Young's modulus equivalent to steel into the structural components.

[0094] (Example of the application of spline device)

[0095] Furthermore, the rolling device in this embodiment can be configured, for example, as follows: Figure 18 The spline device 60 shown is as shown. Figure 18 This diagram illustrates a case where the rolling device of this embodiment is configured as a spline device.

[0096] Here, I will briefly explain Figure 18The spline device 60 shown has a structure comprising a spline shaft 61 as an inner square member and a cylindrical outer cylinder 63 as an outer square member, which is movably mounted on the spline shaft 61 via a plurality of rolling balls 62. A rolling element rolling surface 61a, serving as the track for the rolling balls 62 and extending along the axial direction of the spline shaft 61, is formed on the surface of the spline shaft 61. A load rolling element rolling surface, corresponding to the track surface 61a, is formed on the outer cylinder 63 mounted on the spline shaft 61. Multiple protrusions extending in the direction extending along the rolling element rolling surface 61a are formed on these load rolling element rolling surfaces. A load rolling path is formed between the load rolling surface formed on the outer cylinder 63 and the rolling surface 61a formed on the spline shaft 61. An unloaded return path is formed next to the load rolling path for the rolling balls 62 to move from the load. The outer cylinder 63 is equipped with a retainer 64 that holds a plurality of balls 62 arranged in a ring. The plurality of balls 62 are freely disposed between the load rolling surface of the outer cylinder 63 and the rolling surface 61a of the spline shaft 61, and are configured to circulate infinitely through a no-load return path, thereby enabling the outer cylinder 63 to reciprocate relative to the spline shaft 61.

[0097] Furthermore, in Figure 18 In the case of the spline device 60 shown, by using the nickel-based alloy of the present disclosure for the spline shaft 61, outer cylinder 63, ball bearings 62 and other components constituting the spline device 60, it is possible to realize a high-performance spline device 60 that incorporates a material with high non-magnetic properties and high corrosion resistance, high hardness, machinability and Young's modulus equivalent to steel into the structural components, which can be used as a rolling device.

[0098] (Example of the application of rotary bearing devices)

[0099] Furthermore, the rolling device in this embodiment can be configured, for example, as follows: Figure 19 and Figure 20 The rotary bearing assembly 70 is shown. Here, Figure 19 This is a partial longitudinal sectional perspective view illustrating one embodiment where the rolling device is configured as a rotary bearing device. Furthermore, Figure 20 It means Figure 19 A longitudinal section of the rotary bearing assembly shown.

[0100] like Figure 19 and Figure 20As shown, the rolling device configured as a rotary bearing device 70 includes: an inner ring 71 as an inner square member, which has an inner track surface 72 with a V-shaped cross section on its outer circumferential surface; an outer ring 73 as an outer square member, which has an outer track surface 74 with a V-shaped cross section on its inner circumferential surface; and a plurality of rollers 77 as rolling elements, which are arranged crosswise in a rolling manner between a track 75 with a generally rectangular cross section formed by the inner track surface 72 and the outer track surface 74, thereby allowing the inner ring 71 and the outer ring 73 to rotate relative to each other in the circumferential direction.

[0101] By using the nickel-based alloy of the present disclosure described above, it is possible to realize a high-performance rotary bearing device 70 that incorporates a material with high non-magnetic properties and high corrosion resistance, high hardness suitable for use as a rolling device, and workability and Young's modulus equivalent to steel into the structural components.

[0102] (Example of application of sliding lead screw device)

[0103] Regarding the aforementioned devices, an example of a device in which multiple rolling elements are sandwiched between the inner and outer square members has been described. However, the feature of this disclosure is that, by incorporating the nickel-based alloy structural member of this disclosure, a high-performance rolling device is constructed that incorporates a material with high non-magnetic properties and high corrosion resistance, high hardness suitable for use as a rolling device, and workability and Young's modulus equivalent to steel into the structural member. The scope of this disclosure is not limited to the use of such rolling elements; it can also be appropriately used in devices in which the inner and outer square members can directly contact and move relative to each other without the use of rolling elements.

[0104] For example, such as Figure 21 As shown, this disclosure can also be applied to rolling devices configured as sliding lead screw devices 80. Here, Figure 21 This is a perspective view illustrating one embodiment where the rolling device is configured as a sliding lead screw device. Figure 21 The sliding lead screw device 80 shown includes: a lead screw shaft 81 as an inner square member, which has a helical thread groove as a track surface formed on its outer peripheral surface; and a nut member 83 as an outer square member, which has a helical nut groove as a track surface formed on its inner peripheral surface corresponding to the thread groove. Thus, with the relative rotational movement of the lead screw shaft 81 relative to the nut member 83, the nut member 83 can reciprocate relative to the lead screw shaft 81.

[0105] In addition, regarding Figure 21The sliding screw device 80 shown can also utilize the nickel-based alloy of the present disclosure for either or both of its structural components, the screw shaft 81 and the nut component 83. By using the nickel-based alloy of the present disclosure, it is possible to achieve a high-performance sliding screw device 80 by incorporating materials with high non-magnetic properties, high corrosion resistance, high hardness suitable for use as a rolling device, machinability, and Young's modulus equivalent to steel into the structural components.

[0106] The preferred embodiments of this disclosure have been described above, but the technical scope of this disclosure is not limited to the scope described in the above embodiments. Various modifications or improvements can be made to the above embodiments.

[0107] For example, regarding in Figure 22 The rolling device 90, as shown, is a single unit combining a linear motion guide and a ball screw, and is compatible with this disclosure. It should be noted that... Figure 22 In the case of the rolling device 90 shown, the lead screw 91 and the moving block 93 are provided via a plurality of balls 95, but the lead screw 91 and the moving block 93 may also be configured as a sliding lead screw without being provided via a plurality of balls 95.

[0108] As is clearly understood from the description of the technical solution, the manner in which such changes or improvements are made can also be included within the scope of the technology disclosed herein.

[0109] Explanation of reference numerals in the attached figures

[0110] 10 Test piece, 11 Thermocouple mounting hole, 40 Linear guide device (rolling device), 41 Track guide (inner square component), 41a Rolling element rolling surface (track surface), 42 Ball (rolling element), 43 Moving block (outer square component), 43a Loaded rolling element rolling surface (track surface), 48, 49 Threaded hole, 52 Loaded rolling path, 53 Unloaded rolling path, 55 Direction conversion path, 56 Ball screw assembly (rolling device), 57 Threaded shaft (inner square component), 57a Rolling element rolling groove (track surface), 58 Ball (rolling element), 59 Nut component (outer square component), 60 Spline assembly (rolling device), 61 Spline shaft (inner square component), 61a Rolling element rolling surface (track surface), 62 Ball (rolling element), 63 Outer cylinder (outer square component), 64 Retainer, 70 Rotary bearing assembly (rolling device), 71 72 Inner ring (inner square component), 73 Inner track surface (track surface), 74 Outer ring (outer square component), 75 Outer track surface (track surface), 76 Track path, 77 Roller (rolling element), 80 Sliding screw device, 81 Screw shaft (inner square component), 83 Nut component (outer square component), 90 Rolling device, 91 Screw shaft (inner square component), 93 Moving block (outer square component), 95 Ball (rolling element).

Claims

1. A rolling device comprising: The inner square component has a track surface on its outer surface; An outer member having a track surface facing the track face of the inner member, and disposed on the outside of the inner member; and Multiple rolling elements are freely arranged between the two track surfaces. Its features are, The component constituting at least one of the inner square component, the outer square component, and the rolling element is made of a nickel-based alloy, which consists of 35-45% by weight Cr, 3.7-5% by weight Al, the remainder Ni, and unavoidable impurities. The Rockwell hardness of the surface layer of the nickel-based alloy constituting at least one of the inner square member, the outer square member, and the rolling element is below 40 HRC after solution treatment and above 58 HRC after precipitation hardening treatment. The average KAM value of the surface layer of the nickel-based alloy constituting at least one of the inner square member, the outer square member, and the rolling element is less than 0.35 after solution treatment and greater than 0.5 after precipitation hardening treatment. KAM is the nucleus average orientation difference.

2. The rolling device according to claim 1, characterized in that, The magnetic field strength of the nickel-based alloy constituting at least one of the inner square member, the outer square member, and the rolling element is 3.5 × 10⁻⁶. 4 Relative permeability μ at A / m r Satisfy μ r Inequality < 1.

001.

3. The rolling device according to claim 1, characterized in that, The magnetic field strength of the nickel-based alloy constituting at least one of the inner square member, the outer square member, and the rolling element is 3.5 × 10⁻⁶. 4 Relative permeability μ at A / m r Satisfy μ r Inequalities ≤1.0004.

4. A method for manufacturing a rolling device, the rolling device comprising: an inner square member having a track surface on its outer surface; an outer square member having a track surface facing the track surface of the inner square member and disposed outside the inner square member; and a plurality of rolling elements rotatably disposed between two of the track surfaces. Its features are, As a component constituting at least one of the inner square component, the outer square component, and the rolling element, a nickel-based alloy composed of 35-45% by weight Cr, 3.7-5% by weight Al, the remainder Ni, and unavoidable impurities is selected. The Rockwell hardness of the surface layer of the nickel-based alloy constituting at least one of the inner square member, the outer square member, and the rolling element is below 40 HRC after solution treatment and above 58 HRC after precipitation hardening treatment. The average KAM value of the surface layer of the nickel-based alloy constituting at least one of the inner square member, the outer square member, and the rolling element is less than 0.35 after solution treatment and greater than 0.5 after precipitation hardening treatment, where KAM is the nucleus average orientation difference.

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