Rail cleanliness monitoring system and method for semiconductor equipment

By synchronously acquiring and processing the electrostatic induction signals and acoustic emission signals of the guide rail, and combining them with the slider motion state, high-cleanliness online monitoring of the guide rail of semiconductor equipment is realized. It accurately identifies internal wear sources and external sedimentation sources, solves the blind zone and signal instability problems of guide rail monitoring in existing technologies, and provides a reliable cleanliness assessment.

CN121933604BActive Publication Date: 2026-06-23SHAANXI DAWOXIN INTELLIGENT EQUIP CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
SHAANXI DAWOXIN INTELLIGENT EQUIP CO LTD
Filing Date
2026-03-30
Publication Date
2026-06-23

AI Technical Summary

Technical Problem

Existing technologies struggle to achieve high cleanliness, high precision, and real-time online monitoring of semiconductor equipment guideways. Optical particle counting methods have blind spots, vibration monitoring methods have low sensitivity and are easily affected by external environmental interference, offline sampling and analysis methods cannot achieve real-time monitoring and may damage the guideway surface, and electrostatic induction methods have unstable signals that make it difficult to distinguish the source of contamination.

Method used

The system employs a signal acquisition module to synchronously acquire electrostatic induction signals and acoustic emission signals from the guide rail. Combined with the slider motion status information, the signal processing module generates a list of characteristic events and a contamination index vector. The contamination identification module performs spatiotemporal correlation analysis to identify internal wear sources and external sedimentation sources. Furthermore, it verifies and identifies the silent contamination layer through active excitation, generating a comprehensive assessment result of the guide rail cleanliness status.

Benefits of technology

It enables online monitoring of guide rail cleanliness and accurate identification of contamination sources, improves monitoring sensitivity and reliability, avoids false and missed judgments, enhances the ability to identify complex and weak signal contamination, provides a comprehensive quantitative assessment of guide rail cleanliness, and provides a reliable basis for preventive maintenance of semiconductor equipment.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application relates to the technical field of semiconductor equipment monitoring, in particular to a guide rail cleanliness monitoring system and method for semiconductor equipment; the system comprises a signal acquisition module, a signal processing module, a pollution identification module and an evaluation decision module; the signal processing module performs signal analysis on the collected electrostatic induction signals and acoustic emission signals, and performs event detection in combination with motion state information to obtain a characteristic event list and a pollution index vector; the pollution identification module performs space-time correlation analysis on the characteristic event list to obtain internal wear sources, and identifies external deposition sources in combination with the pollution index vector; an excitation signal is applied to the external deposition sources, and a silent pollution layer is identified according to a response result; the evaluation decision module generates a comprehensive evaluation result of the guide rail cleanliness state based on the internal wear sources, the external deposition sources and the silent pollution layer; the application realizes online monitoring of guide rail cleanliness and accurate identification of pollution sources, and improves the reliability of semiconductor equipment operation.
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