Temperature and humidity sensor calibration method and system

Abstract

The invention provides a calibration method and system for a temperature and humidity sensor, and the method comprises the steps: obtaining a real-time temperature value of a calibration cavity and a real-time humidity value of the calibration cavity within a preset maintenance time, and obtaining a temperature driving signal and a humidity driving signal based on the real-time temperature value and the real-time humidity value, carrying out temperature and humidity adjustment on the calibration cavity based on the temperature and humidity adjustment result and obtaining real-time temperature and humidity values again until a preset temperature stable condition and a preset humidity stable condition are met, and collecting a first temperature and a first humidity of the chip; calculating four correction coefficients based on the real-time humidity value, the first temperature of the chip and the first humidity; and calculating a corrected humidity value based on the four correction coefficients, the chip first temperature and the chip first humidity, calculating a humidity difference value based on the real-time humidity value, and if the humidity difference value is smaller than or equal to a preset humidity difference threshold value, completing calibration. According to the calibration method of the temperature and humidity sensors, low calibration efficiency and poor calibration batch consistency are avoided, and automatic parallel calibration of the plurality of temperature and humidity sensors is realized.

Description

Technical Field

[0001] This invention relates to the field of automated calibration and testing technology for sensors, and in particular to a calibration method and system for a temperature and humidity sensor. Background Technology

[0002] Temperature and humidity sensors are widely used in environmental monitoring, smart homes, medical equipment, and agricultural control. However, various types of sensors generally have errors at the time of manufacture, which need to be corrected through calibration. Traditional calibration methods often involve calibrating each sensor individually, which is not only inefficient and cumbersome to operate manually, but also prone to causing excessive deviations between different batches of sensors.

[0003] Under the current technological background, while existing automated calibration devices can achieve automatic calibration of individual sensors, they still have many shortcomings: First, it is difficult to balance calibration efficiency and batch consistency. Each calibration device can typically only calibrate one sensor at a time, and a single calibration can only be performed on one device, making the calibration process cumbersome and time-consuming. Furthermore, the calibration time varies significantly between different sensors, easily leading to performance deviations between different batches of sensors, affecting product consistency and reliability. Moreover, in mass production, multiple devices need to be equipped for simultaneous calibration, significantly increasing equipment procurement and maintenance costs. Second, the calibration environment has significant shortcomings. The temperature and humidity control system of traditional calibration chambers lacks precision, resulting in uneven temperature and humidity field distribution, which easily generates gradient biases, thus affecting the accuracy of calibration results. Furthermore, the poor stability of the temperature and humidity field leads to longer sensor calibration times, further reducing overall production efficiency and impacting the production cycle. Furthermore, significant issues arise in circuitry and communication. During batch calibration of multiple sensors, communication lines become complex and subject to severe interference, easily leading to unstable data transmission and potentially affecting the accuracy of calibration results. Simultaneously, current calibration algorithms are mostly designed for single sensors; when calibrating multiple sensors simultaneously, algorithm coupling is poor, resulting in low fitting accuracy between calibration data and reference source data, limited correction effects, and an inability to achieve comprehensive high-precision calibration. Finally, the level of automation is low. Most existing systems rely heavily on manual intervention, requiring manual setting and writing of calibration data, which is cumbersome and error-prone. Even in devices that can automatically read sensor data, manual intervention is still needed to adjust calibration parameters and handle abnormal situations, preventing seamless automation throughout the entire process. Summary of the Invention

[0004] The present invention aims to provide a calibration method and system for temperature and humidity sensors to solve the above-mentioned technical problems, avoid low calibration efficiency and poor batch consistency, and realize automated parallel calibration of multiple temperature and humidity sensors.

[0005] To address the aforementioned technical problems, this invention provides a calibration method for a temperature and humidity sensor, comprising: The real-time temperature and humidity values ​​of the calibration chamber are acquired within a preset maintenance time. If the real-time temperature value does not meet the preset temperature stability condition or the real-time humidity value does not meet the preset humidity stability condition, the temperature drive signal and humidity drive signal are acquired based on the real-time temperature and humidity values. Based on the temperature driving signal and humidity driving signal, the calibration cavity is adjusted for temperature and humidity, and the real-time temperature value and real-time humidity value of the calibration cavity are reacquired until the real-time temperature value meets the preset temperature stability condition and the real-time humidity value meets the preset humidity stability condition. Then, the first chip temperature and the first chip humidity of several temperature and humidity sensors to be calibrated are collected. Based on the real-time humidity value of the calibration cavity, the first temperature of the chip, and the first humidity of the chip, calculate the first correction coefficient, the second correction coefficient, the third correction coefficient, and the fourth correction coefficient; Calculate the chip corrected humidity value based on the first correction factor, the second correction factor, the third correction factor, the fourth correction factor, the first chip temperature, and the first chip humidity; Based on the chip-corrected humidity value and the real-time humidity value of the calibration chamber, the humidity difference is calculated. If the humidity difference is less than or equal to the preset humidity difference threshold, the first correction coefficient, the second correction coefficient, the third correction coefficient and the fourth correction coefficient are written to complete the calibration of the temperature and humidity sensor to be calibrated.

[0006] In the above scheme, by acquiring the real-time temperature and humidity values ​​of the calibration cavity, the temperature and humidity of the calibration cavity can be adjusted using the generated temperature and humidity driving signals until the calibration cavity reaches the preset temperature and humidity stability conditions. This provides a precise and stable calibration environment for the subsequent calibration of temperature and humidity sensors to be calibrated, avoiding recalibration due to an unstable calibration environment, thus preventing low calibration efficiency. Next, by collecting the first chip temperature and first chip humidity of several temperature and humidity sensors to be calibrated, multiple sensors can be calibrated in parallel, preventing poor consistency between calibration batches. Simultaneously, it provides raw data support for the subsequent calculation of the first, second, third, and fourth correction coefficients, ensuring the reliability of the fitted calculation data. Then, by calculating the first correction coefficient, second correction coefficient, third correction coefficient, and fourth correction coefficient using the real-time humidity value of the calibration cavity, the first temperature of the chip, and the first humidity of the chip, the measurement deviation of the temperature and humidity sensor to be calibrated can be quantified. The corrected humidity value of the chip can then be calculated using the first correction coefficient, second correction coefficient, third correction coefficient, and fourth correction coefficient. The humidity difference between the corrected humidity value and the real-time humidity value of the cavity can be calculated. The effectiveness of the first correction coefficient, second correction coefficient, third correction coefficient, and fourth correction coefficient can be verified by the humidity difference and the preset humidity difference threshold, ensuring that the accuracy of the temperature and humidity sensor to be calibrated meets the preset requirements, and completing the automated parallel calibration of multiple temperature and humidity sensors to be calibrated.

[0007] Furthermore, it also includes: Within a preset duration, the real-time temperature and humidity values ​​of the calibration chamber are acquired. If the real-time temperature and humidity values ​​meet the preset temperature stability conditions and the preset humidity stability conditions, the first chip temperature and the first chip humidity of several temperature and humidity sensors to be calibrated are directly acquired.

[0008] In the above scheme, by acquiring the real-time temperature and humidity values ​​of the calibration chamber and making judgments based on preset temperature and humidity stability conditions, the environmental state within the calibration chamber can be quickly identified. Then, provided that both the real-time temperature and humidity values ​​meet the preset temperature and humidity stability conditions, the first chip temperature and humidity of several temperature and humidity sensors to be calibrated are directly acquired, eliminating repetitive temperature and humidity adjustment steps and improving calibration efficiency. Furthermore, by directly acquiring the first chip temperature and humidity of several temperature and humidity sensors to be calibrated, accurate and reliable data is provided for subsequent fitting calculations of correction coefficients, ensuring the consistency and accuracy of batch calibration of multiple temperature and humidity sensors.

[0009] Furthermore, it also includes: The humidity difference is calculated based on the chip-corrected humidity value and the real-time humidity value of the calibration cavity. If the humidity difference is greater than the preset humidity difference threshold, the first chip temperature and the first chip humidity of several temperature and humidity sensors to be calibrated are re-acquired until the humidity difference is less than or equal to the preset humidity difference threshold.

[0010] In the above scheme, the humidity difference is calculated by comparing the chip-corrected humidity value and the real-time humidity value, which allows for a quantitative evaluation of the calibration correction effect and determines whether the currently obtained correction coefficient meets the accuracy requirements. Next, when the humidity difference exceeds a preset humidity difference threshold, the chip's first temperature and humidity of the temperature and humidity sensor to be calibrated are re-acquired. This prevents unqualified correction coefficients from being written into the sensor. Then, through repeated acquisition and verification until the humidity difference is less than or equal to the preset humidity difference threshold, it is ensured that the correction coefficients finally written into the temperature and humidity sensor meet the calibration standard, guaranteeing the consistency and reliability of batch calibration of multiple temperature and humidity sensors.

[0011] Further, the step of acquiring the real-time temperature value and the real-time humidity value of the calibration cavity within a preset maintenance time, and if the real-time temperature value does not meet the preset temperature stability condition or the real-time humidity value does not meet the preset humidity stability condition, then acquiring the temperature drive signal and the humidity drive signal based on the real-time temperature value and the real-time humidity value, includes: Within a preset maintenance time, the real-time temperature value and the real-time humidity value of the calibration chamber are obtained. If the real-time temperature value does not meet the preset temperature stability condition or the real-time humidity value does not meet the preset humidity stability condition, the temperature deviation value is obtained based on the real-time temperature value and the humidity deviation value is obtained based on the real-time humidity value. Based on the temperature deviation value and the humidity deviation value, obtain the first temperature control value and the first humidity control value; The first temperature control quantity and the first humidity control quantity are converted into signals to obtain the temperature drive signal and the humidity drive signal.

[0012] In the above scheme, by acquiring the real-time temperature and humidity values ​​of the calibration chamber and determining whether preset temperature and humidity stability conditions are met, the calibration environment of the calibration chamber can be accurately identified to determine whether the temperature and humidity adjustment process of the calibration chamber needs to be initiated. Next, when the real-time temperature or humidity value does not meet the preset temperature or humidity stability conditions, a temperature deviation value is obtained based on the real-time temperature value, and a humidity deviation value is obtained based on the real-time humidity value, providing a quantitative basis for the subsequent calculation of temperature and humidity control quantities. Then, the first temperature control quantity and the first humidity control quantity are obtained through the temperature and humidity deviation values, realizing the accurate calculation of the temperature and humidity adjustment range. Finally, by converting the first temperature and humidity control quantities into signals, they can be converted into temperature drive signals and humidity drive signals for temperature and humidity adjustment of the calibration chamber until the calibration chamber reaches the preset temperature and humidity stability conditions, thus providing a precise and stable calibration environment for the subsequent calibration of the temperature and humidity sensors to be calibrated.

[0013] Further, the step of acquiring the real-time temperature value and the real-time humidity value of the calibration cavity within a preset maintenance time, and if the real-time temperature value does not meet the preset temperature stability condition or the real-time humidity value does not meet the preset humidity stability condition, then acquiring a temperature deviation value based on the real-time temperature value and acquiring a humidity deviation value based on the real-time humidity value, includes: The real-time temperature and humidity values ​​of the calibration chamber are acquired within a preset maintenance time. If the real-time temperature value does not meet the preset temperature stability condition or the real-time humidity value does not meet the preset humidity stability condition, the real-time temperature and humidity values ​​are filtered to obtain smoothed temperature and humidity values. Temperature deviation values ​​are obtained based on smoothed temperature values ​​and preset target temperature values; humidity deviation values ​​are obtained based on smoothed humidity values ​​and preset target humidity values.

[0014] In the above scheme, by acquiring the real-time temperature and humidity values ​​of the calibration chamber and determining whether preset temperature and humidity stability conditions are met, the calibration environment of the calibration chamber can be accurately identified to determine whether the temperature and humidity adjustment process of the calibration chamber needs to be initiated. Next, when the real-time temperature or humidity value does not meet the preset temperature or humidity stability conditions, the real-time temperature and humidity values ​​are first filtered to remove noise interference, obtaining smoothed temperature and humidity values. Then, the temperature deviation is calculated by comparing the smoothed temperature value with the preset target temperature value, and the humidity deviation is calculated by comparing the smoothed humidity value with the preset target humidity value, providing accurate and stable deviation quantification for subsequent PID calculations.

[0015] Further, obtaining the first temperature control value and the first humidity control value based on the temperature deviation value and the humidity deviation value includes: PID calculations are performed on the temperature deviation value and the humidity deviation value respectively to obtain the first temperature control value and the initial humidity control value. If the first temperature control value is not equal to the preset temperature control threshold, the initial humidity control value is adjusted based on the preset feedforward decoupling compensation mechanism to obtain the first humidity control value.

[0016] In the above scheme, by performing PID calculations on the temperature deviation and humidity deviation values ​​respectively, the first temperature control value and the initial humidity control value are obtained. This allows for precise quantification of the temperature and humidity adjustment range, providing a basic control basis for temperature and humidity adjustment in the calibration chamber. Next, by determining whether the first temperature control value equals the preset temperature control threshold, the temperature adjustment range can be monitored in real time to determine whether the humidity compensation process needs to be initiated. Then, when the first temperature control value does not equal the preset temperature control threshold, the initial humidity control value is adjusted based on a preset feedforward decoupling compensation mechanism to obtain the first humidity control value. This solves the temperature and humidity coupling interference problem and ensures synchronous and stable temperature and humidity within the calibration chamber.

[0017] Further, the step of performing PID calculations on the temperature deviation value and humidity deviation value respectively to obtain the first temperature control quantity and the initial humidity control quantity includes: Based on the preset temperature proportional term, preset temperature integral term, and preset temperature derivative term, PID calculation is performed on the temperature deviation value to obtain the initial temperature control quantity; Based on the preset humidity proportional term, preset humidity integral term, and preset humidity derivative term, PID calculation is performed on the humidity deviation value to obtain the initial humidity control quantity.

[0018] In the above scheme, by using preset temperature proportional, integral, and derivative terms, PID calculations are performed on the temperature deviation value. This allows for precise quantification of the temperature deviation, obtaining the initial temperature control quantity, and ensuring that the temperature quickly and without overshoot approaches the preset target temperature value. Next, by using preset humidity proportional, integral, and derivative terms, PID calculations are performed on the humidity deviation value. This allows for adjustment of the humidity deviation, obtaining the initial humidity control quantity, and providing basic control parameters for subsequent temperature and humidity coupling compensation.

[0019] This invention provides a calibration system for a temperature and humidity sensor, comprising a calibration chamber temperature and humidity control module, a sensor data acquisition module, a correction coefficient fitting module, a correction coefficient verification module, and a sensor programming module, specifically: The calibration chamber temperature and humidity control module is used to acquire the real-time temperature value and the real-time humidity value of the calibration chamber within a preset maintenance time. If the real-time temperature value does not meet the preset temperature stability condition or the real-time humidity value does not meet the preset humidity stability condition, then the temperature drive signal and the humidity drive signal are acquired based on the real-time temperature value and the real-time humidity value. The sensor data acquisition module is used to adjust the temperature and humidity of the calibration cavity based on the temperature driving signal and the humidity driving signal, and reacquire the real-time temperature value and the real-time humidity value of the calibration cavity until the real-time temperature value meets the preset temperature stability condition and the real-time humidity value meets the preset humidity stability condition. Then, the first chip temperature and the first chip humidity of several temperature and humidity sensors to be calibrated are acquired. The correction coefficient fitting module is used to calculate a first correction coefficient, a second correction coefficient, a third correction coefficient, and a fourth correction coefficient based on the real-time humidity value of the calibration cavity, the first temperature of the chip, and the first humidity of the chip. The correction coefficient verification module is used to calculate the chip correction humidity value based on the first correction coefficient, the second correction coefficient, the third correction coefficient, the fourth correction coefficient, the chip first temperature, and the chip first humidity. The sensor programming module is used to calculate the humidity difference based on the chip-corrected humidity value and the real-time humidity value of the calibration cavity. If the humidity difference is less than or equal to a preset humidity difference threshold, the first correction coefficient, the second correction coefficient, the third correction coefficient and the fourth correction coefficient are written into the temperature and humidity sensor to be calibrated to complete the calibration of the temperature and humidity sensor to be calibrated.

[0020] This invention provides a calibration system for temperature and humidity sensors. In practical applications, it only requires a calibration cavity temperature and humidity control module. By acquiring the real-time temperature and humidity values ​​of the calibration cavity, it can adjust the temperature and humidity of the calibration cavity using generated temperature and humidity driving signals until the calibration cavity reaches preset temperature and humidity stability conditions. This provides a precise and stable calibration environment for subsequent calibration of temperature and humidity sensors, avoiding recalibration due to unstable calibration environments and thus reducing calibration efficiency. Next, a sensor data acquisition module is used to collect the first chip temperature and first chip humidity of several temperature and humidity sensors to be calibrated. This allows for parallel calibration of multiple sensors, preventing batch inconsistencies and providing raw data support for the subsequent calculation of the first, second, third, and fourth correction coefficients, ensuring the reliability of the fitted calculation data. Then, a correction coefficient fitting module is used to calculate the first, second, third, and fourth correction coefficients by calibrating the real-time humidity value of the cavity, the first temperature of the chip, and the first humidity of the chip. This allows for the quantification of the measurement deviation of the temperature and humidity sensor to be calibrated. A correction coefficient verification module is then used to calculate the corrected humidity value of the chip using the first, second, third, and fourth correction coefficients. The sensor programming module is then used to calculate the humidity difference between the corrected humidity value and the real-time humidity value of the cavity. The effectiveness of the first, second, third, and fourth correction coefficients is verified by the humidity difference and a preset humidity difference threshold, ensuring that the accuracy of the temperature and humidity sensor to be calibrated meets the preset requirements. This completes the automated parallel calibration of multiple temperature and humidity sensors to be calibrated.

[0021] Furthermore, the sensor data acquisition module is also used for: Within a preset duration, the real-time temperature and humidity values ​​of the calibration chamber are acquired. If the real-time temperature and humidity values ​​meet the preset temperature stability conditions and the preset humidity stability conditions, the first chip temperature and the first chip humidity of several temperature and humidity sensors to be calibrated are directly acquired.

[0022] In the above scheme, by acquiring the real-time temperature and humidity values ​​of the calibration chamber and making judgments based on preset temperature and humidity stability conditions, the environmental state within the calibration chamber can be quickly identified. Then, when both the real-time temperature and humidity values ​​meet the preset temperature and humidity stability conditions, the first temperature and humidity of several temperature and humidity sensors to be calibrated are directly acquired, eliminating repetitive temperature and humidity adjustment steps and improving calibration efficiency. Furthermore, by directly acquiring the first temperature and humidity of several temperature and humidity sensors to be calibrated, a basis is provided for the subsequent fitting calculation of correction coefficients. Furthermore, the humidity difference is calculated based on the chip-corrected humidity value and the real-time humidity value of the calibration cavity. If the humidity difference is greater than the preset humidity difference threshold, the sensor data acquisition module is also used to re-acquire the first chip temperature and the first chip humidity of several temperature and humidity sensors to be calibrated until the humidity difference is less than or equal to the preset humidity difference threshold.

[0023] In the above scheme, the humidity difference is calculated by comparing the chip-corrected humidity value and the real-time humidity value, which allows for a quantitative evaluation of the calibration correction effect and determines whether the currently obtained correction coefficient meets the accuracy requirements. Next, when the humidity difference exceeds a preset humidity difference threshold, the chip's first temperature and humidity of the temperature and humidity sensor to be calibrated are re-acquired. This prevents unqualified correction coefficients from being written into the sensor. Then, through repeated acquisition and verification until the humidity difference is less than or equal to the preset humidity difference threshold, it is ensured that the correction coefficients finally written into the temperature and humidity sensor meet the calibration standard, guaranteeing the consistency and reliability of batch calibration of multiple temperature and humidity sensors. Attached Figure Description

[0024] Figure 1 A flowchart illustrating a calibration method for a temperature and humidity sensor according to an embodiment of the present invention; Figure 2 A front view schematic diagram of a calibration device for a temperature and humidity sensor provided in an embodiment of the present invention; Figure 3 This is a schematic diagram of the overall frame structure of a temperature and humidity sensor fixture provided in an embodiment of the present invention; Figure 4 This is a schematic diagram of the connection frame and fixing structure of a temperature and humidity sensor fixture provided in an embodiment of the present invention; Figure 5 This is a schematic diagram of a batch calibration device for temperature and humidity sensors provided in an embodiment of the present invention; Figure 6This is an architecture diagram of a calibration system for a temperature and humidity sensor provided in an embodiment of the present invention; in: 1. Fixed pressure plate; 2. Calibration pin board connector; 3. Calibration circuit board assembly; 4. Power supply and host computer communication device; 5. Chip communication programming module; 6. Calibration cavity; 7. Calibration host computer; 8. Calibration fixture; 9. Chip connection part of calibration fixture; 10. Structural frame of calibration fixture; 11. Pin board connector structure of calibration fixture; 12. Circuit board connection structure; 13. Double-ended pin; 14. Temperature and humidity sensor to be calibrated. Detailed Implementation

[0025] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0026] This embodiment provides a calibration method for a temperature and humidity sensor; please refer to the flowchart for the method. Figure 1 ,include: Step S1: Obtain the real-time temperature value and the real-time humidity value of the calibration cavity within the preset maintenance time. If the real-time temperature value does not meet the preset temperature stability condition or the real-time humidity value does not meet the preset humidity stability condition, then obtain the temperature drive signal and the humidity drive signal based on the real-time temperature value and the real-time humidity value. Step S2: Adjust the temperature and humidity of the calibration cavity based on the temperature driving signal and humidity driving signal, and reacquire the real-time temperature value and real-time humidity value of the calibration cavity until the real-time temperature value meets the preset temperature stability condition and the real-time humidity value meets the preset humidity stability condition. Then, collect the first chip temperature and the first chip humidity of several temperature and humidity sensors to be calibrated. Step S3: Based on the real-time humidity value of the calibration cavity, the first temperature of the chip, and the first humidity of the chip, calculate the first correction coefficient, the second correction coefficient, the third correction coefficient, and the fourth correction coefficient; Step S4: Calculate the chip corrected humidity value based on the first correction coefficient, the second correction coefficient, the third correction coefficient, the fourth correction coefficient, the first chip temperature, and the first chip humidity; Step S5: Based on the chip-corrected humidity value and the real-time humidity value of the calibration cavity, calculate the humidity difference. If the humidity difference is less than or equal to the preset humidity difference threshold, write the first correction coefficient, the second correction coefficient, the third correction coefficient and the fourth correction coefficient into the temperature and humidity sensor to be calibrated to complete the calibration of the temperature and humidity sensor to be calibrated.

[0027] In this embodiment, as Figure 2 As shown, a calibration device for a temperature and humidity sensor acquires the real-time temperature and humidity values ​​of a calibration chamber 6. It then uses generated temperature and humidity driving signals to adjust the temperature and humidity of the calibration chamber 6 until both reach preset temperature and humidity stability conditions. This provides a precise and stable calibration environment for subsequent calibration of other temperature and humidity sensors, avoiding recalibration due to an unstable environment and thus reducing calibration efficiency. The preset temperature stability condition is a real-time temperature fluctuation of <±0.1℃, and the preset humidity stability condition is a real-time humidity fluctuation of <±1.0%RH. The preset maintenance time must be greater than 5 minutes. Please refer to [link to relevant documentation]. Figure 3 A temperature and humidity sensor fixture is provided; please refer to the connection frame and fixing structure for details. Figure 4 Multiple temperature and humidity sensors to be calibrated are fixed in a calibration fixture assembly. The fixture has a unified interface, and each calibration fixture is connected to the circuit board of the temperature and humidity sensor 14 to be calibrated via a double-headed pin 13, ensuring that the temperature and humidity sensor 14 is reliably electrically connected to the circuit assembly throughout the calibration process. The top of the fixture uses a positioning pin to accurately position the sensor substrate, and a fixing plate 1 ensures good contact between the probe and the sensor, effectively reducing errors caused by poor contact during calibration. This embodiment also supports adding more fixture units or adjusting the calibration environment according to actual needs to adapt to different models and specifications of sensors. Next, by collecting the first chip temperature and the first chip humidity of several temperature and humidity sensors 14 to be calibrated, multiple temperature and humidity sensors 14 can be calibrated in parallel, preventing poor consistency in calibration batches. At the same time, it provides raw data support for the subsequent calculation of the first, second, third, and fourth correction coefficients, ensuring the reliability of the data in the fitting calculation. In this embodiment, by continuously collecting the initial temperature and initial humidity of several chips of the temperature and humidity sensor 14 to be calibrated 20 times, and removing extreme values ​​and averaging the initial temperatures and humidity values ​​respectively, the first chip temperature and the first chip humidity are obtained, thereby reducing the influence of noise. Figure 5As shown, this embodiment employs a batch calibration device for temperature and humidity sensors. A double-headed pin 13 connects the device to the calibration circuit assembly and the temperature and humidity chip to be calibrated, and screws secure it to the calibration circuit board assembly 3. The circuit board is electrically connected via a bottom bracket and an upper calibration plate. The circuit board has pad contacts printed on it, identical to those on the chip substrate. Above the fixture is a chip substrate fixing area and a fixing plate 1. Positioning pins on the fixture fix the chip substrate, ensuring the probe aligns with the substrate pad. The fixing plate 1 then ensures good contact between the elastic probe and the substrate pad. This allows the temperature and humidity chips on the pre-packaged temperature and humidity sensor 14 substrate to be calibrated to be connected to the calibration equipment. This eliminates the need to cut the packaged temperature and humidity chips into individual chips for calibration, enabling direct acquisition of the chip's first temperature and humidity, thus improving efficiency in the production process. Then, by calculating the first, second, third, and fourth correction coefficients using the real-time humidity value of the calibration cavity 6, the first temperature of the chip, and the first humidity of the chip, the measurement deviation of the temperature and humidity sensor 14 to be calibrated can be quantified. Further, the corrected humidity value of the chip is calculated using these coefficients, and the humidity difference between the corrected humidity value and the real-time humidity value of the cavity is calculated. The effectiveness of the first, second, third, and fourth correction coefficients is verified by comparing the humidity difference with a preset humidity difference threshold, ensuring that the accuracy of the temperature and humidity sensor 14 to be calibrated meets the preset requirements. The first, second, third, and fourth correction coefficients are written into the OTP of the temperature and humidity sensor 14 to be calibrated, and then the OTP of the temperature and humidity sensor 14 to be calibrated is read again to check for the existence of the corresponding parameters. If the writing is successful, the first temperature and first humidity of the chip before the correction coefficients can be directly retrieved using a preset dedicated AC command, completing the automated parallel calibration of multiple temperature and humidity sensors 14 to be calibrated. The preset humidity difference threshold can be 5.0%RH. This embodiment supports the simultaneous calibration of up to 200 temperature and humidity sensors.

[0028] Furthermore, it also includes: Within a preset duration, the real-time temperature and humidity values ​​of the calibration chamber 6 are acquired. If the real-time temperature value meets the preset temperature stability condition and the real-time humidity value meets the preset humidity stability condition, the first chip temperature and the first chip humidity of several temperature and humidity sensors 14 to be calibrated are directly acquired.

[0029] In this embodiment, by acquiring the real-time temperature and humidity values ​​of the calibration chamber 6 and determining them according to preset temperature and humidity stability conditions, the environmental state within the calibration chamber 6 can be quickly identified. Then, when both the real-time temperature and humidity values ​​meet the preset temperature and humidity stability conditions, the first chip temperature and first chip humidity of several temperature and humidity sensors 14 to be calibrated are directly acquired, eliminating repetitive temperature and humidity adjustment steps and improving calibration efficiency. Furthermore, by directly acquiring the first chip temperature and first chip humidity of several temperature and humidity sensors 14 to be calibrated, accurate and reliable data is provided for subsequent fitting calculations of correction coefficients, ensuring the consistency and accuracy of batch calibration of multiple temperature and humidity sensors 14 to be calibrated.

[0030] Furthermore, it also includes: The humidity difference is calculated based on the corrected humidity value of the chip and the real-time humidity value of the calibration cavity 6. If the humidity difference is greater than the preset humidity difference threshold, the first chip temperature and the first chip humidity of several temperature and humidity sensors 14 to be calibrated are collected again until the humidity difference is less than or equal to the preset humidity difference threshold.

[0031] In this embodiment, the humidity difference is calculated by comparing the chip-corrected humidity value and the real-time humidity value, enabling a quantitative evaluation of the calibration correction effect and determining whether the currently obtained correction coefficient meets the accuracy requirements. Next, when the humidity difference exceeds a preset humidity difference threshold, the chip's first temperature and first humidity of the temperature and humidity sensor 14 to be calibrated are re-acquired. This avoids writing unqualified correction coefficients into the temperature and humidity sensor 14. Then, through repeated acquisition and verification until the humidity difference is less than or equal to the preset humidity difference threshold, it is ensured that the correction coefficients finally written into the temperature and humidity sensor 14 all meet the calibration standards, guaranteeing the consistency and reliability of batch calibration of multiple temperature and humidity sensors 14.

[0032] Further, the step of acquiring the real-time temperature value and the real-time humidity value of the calibration cavity 6 within a preset maintenance time, and if the real-time temperature value does not meet the preset temperature stability condition or the real-time humidity value does not meet the preset humidity stability condition, then acquiring the temperature drive signal and the humidity drive signal based on the real-time temperature value and the real-time humidity value, includes: Within a preset maintenance time, the real-time temperature value and the real-time humidity value of the calibration chamber 6 are obtained. If the real-time temperature value does not meet the preset temperature stability condition or the real-time humidity value does not meet the preset humidity stability condition, the temperature deviation value is obtained based on the real-time temperature value and the humidity deviation value is obtained based on the real-time humidity value. Based on the temperature deviation value and the humidity deviation value, obtain the first temperature control value and the first humidity control value; The first temperature control quantity and the first humidity control quantity are converted into signals to obtain the temperature drive signal and the humidity drive signal.

[0033] In this embodiment, by acquiring the real-time temperature and humidity values ​​of the calibration chamber 6 and determining whether preset temperature and humidity stability conditions are met, the calibration environment of the calibration chamber 6 can be accurately identified to determine whether the temperature and humidity adjustment process of the calibration chamber 6 needs to be initiated. Then, when the real-time temperature or humidity value does not meet the preset temperature or humidity stability conditions, a temperature deviation value is obtained based on the real-time temperature value, and a humidity deviation value is obtained based on the real-time humidity value, providing a quantitative basis for the subsequent calculation of temperature and humidity control quantities. Finally, the first temperature control quantity and the first humidity control quantity are obtained through the temperature and humidity deviation values, achieving accurate calculation of the temperature and humidity adjustment range. Finally, by converting the first temperature control quantity and the first humidity control quantity into signals, these quantities can be transformed into temperature drive signals and humidity drive signals for regulating the temperature and humidity of the calibration chamber 6. For example, when the first temperature control quantity is greater than zero, it indicates that the temperature needs to be increased. The corresponding temperature drive signal can control the heater in the calibration chamber 6 to achieve a small amount of heating. When the first temperature control quantity is less than zero, it indicates that the temperature needs to be decreased. The corresponding temperature drive signal can control the cooling power of the refrigeration compressor in the calibration chamber 6. When the humidity is close to the preset target value, the refrigeration compressor can operate at a constant low power, and the cooling capacity can be quickly balanced by adjusting the heater to achieve fluctuating constant temperature control. When the first humidity control quantity is greater than zero, the spray volume of the humidifier is adjusted for humidification. When the first humidity control quantity is less than zero, condensation dehumidification is performed by the refrigeration dehumidification coil. This process continues until the calibration chamber 6 reaches the preset temperature stability condition and the preset humidity stability condition, thus providing a precise and stable calibration environment for the subsequent calibration of the temperature and humidity sensor 14 to be calibrated. While adjusting the temperature and humidity using the first temperature control amount and the first humidity control amount, this embodiment also controls the circulating fan in the calibration chamber 6 to remain constant or to operate at a variable speed according to the temperature difference. After the forced airflow passes through the heating, cooling and humidifying equipment, it uniformly covers the area where the temperature and humidity sensor 14 to be calibrated is located in the form of laminar or turbulent flow, eliminating local dead zones in the temperature and humidity field and ensuring uniform temperature and humidity in the calibration chamber 6.

[0034] Further, the step of acquiring the real-time temperature value and the real-time humidity value of the calibration cavity 6 within a preset maintenance time, and if the real-time temperature value does not meet the preset temperature stability condition or the real-time humidity value does not meet the preset humidity stability condition, then acquiring a temperature deviation value based on the real-time temperature value and an humidity deviation value based on the real-time humidity value, includes: The real-time temperature value and real-time humidity value of the calibration chamber 6 are obtained within a preset maintenance time. If the real-time temperature value does not meet the preset temperature stability condition or the real-time humidity value does not meet the preset humidity stability condition, the real-time temperature value and real-time humidity value are filtered to obtain smooth temperature value and smooth humidity value. Temperature deviation values ​​are obtained based on smoothed temperature values ​​and preset target temperature values; humidity deviation values ​​are obtained based on smoothed humidity values ​​and preset target humidity values.

[0035] In this embodiment, a high-precision temperature and humidity sensor arranged within the calibration cavity 6 acquires real-time temperature and humidity values ​​at a sampling frequency of 100 milliseconds. It then determines whether preset temperature and humidity stability conditions are met, enabling precise identification of the calibration environment of the calibration cavity 6 to determine whether the temperature and humidity adjustment process needs to be initiated. Next, if the real-time temperature or humidity value does not meet the preset temperature or humidity stability conditions, the real-time temperature and humidity values ​​are first filtered to remove noise interference, resulting in smoothed temperature and humidity values. The filtering process can employ moving average filtering or Kalman filtering algorithms. Then, the smoothed temperature value T... pv Compared with the preset target temperature value T sv Calculate the temperature deviation value E t (t)= T sv - T pv Smoothing humidity value H pv Compared with the preset target humidity value H sv Calculate the humidity deviation value E h (t)= H sv - H pv Where t is the sampling time, it can provide accurate and stable deviation quantification basis for subsequent PID calculation. The preset target temperature value can be 25℃. The preset target humidity value can be 85%RH. If it is necessary to calibrate the temperature and humidity sensor 14 to be calibrated under different temperatures and different humidity levels, the calibration process can be carried out in the order of low temperature first and then high temperature, and at the same temperature, low humidity first and then high humidity, so as to effectively prevent condensation from forming on the surface of the temperature and humidity sensor to be calibrated when switching from high temperature and high humidity to low temperature.

[0036] Further, obtaining the first temperature control value and the first humidity control value based on the temperature deviation value and the humidity deviation value includes: PID calculations are performed on the temperature deviation value and the humidity deviation value respectively to obtain the first temperature control value and the initial humidity control value. If the first temperature control value is not equal to the preset temperature control threshold, the initial humidity control value is adjusted based on the preset feedforward decoupling compensation mechanism to obtain the first humidity control value.

[0037] In this embodiment, by performing PID calculations on the temperature deviation and humidity deviation values ​​respectively, the first temperature control quantity and the initial humidity control quantity are obtained. This allows for precise quantification of the temperature and humidity adjustment range, providing a basic control basis for temperature and humidity adjustment in the calibration cavity 6. Next, since relative humidity is greatly affected by temperature, an increase in temperature will lead to a decrease in relative humidity when the air moisture content remains constant. Therefore, by determining whether the first temperature control quantity is equal to the preset temperature control threshold, the temperature adjustment range can be monitored in real time to determine whether the humidity compensation process needs to be initiated. Then, when the first temperature control quantity is not equal to the preset temperature control threshold, the initial humidity control quantity is adjusted based on a preset feedforward decoupling compensation mechanism to obtain the first humidity control quantity. Specifically, the preset feedforward decoupling compensation mechanism is as follows: in This is the original gain; The preset humidity loop maximum proportional gain is obtained through testing and will not cause the first humidity control value to oscillate. This represents the maximum temperature control value, and is a preset known value. This is the first temperature control variable; This is a preset temperature control threshold. When... When the relative humidity is expected to decrease, a preset feedforward decoupling compensation mechanism can be used to predict this, and the system can automatically adjust the initial humidity control value U at the current output. h On top of that, add a humidification compensation amount and increase the humidity loop. To speed up the attainment of the preset humidity; conversely, when At that time, a pre-set feedforward decoupling compensation mechanism can maintain This design remains unchanged to prevent excessively high humidity levels caused by rapid adjustment of the dehumidification plate power, which could prevent measurement and condensation. It also solves the problem of temperature and humidity coupling interference, ensuring that the temperature and humidity in the calibration chamber 6 are synchronously stable.

[0038] Further, the step of performing PID calculations on the temperature deviation value and humidity deviation value respectively to obtain the first temperature control quantity and the initial humidity control quantity includes: Based on the preset temperature proportional term, preset temperature integral term, and preset temperature derivative term, PID calculation is performed on the temperature deviation value to obtain the initial temperature control quantity; Based on the preset humidity proportional term, preset humidity integral term, and preset humidity derivative term, PID calculation is performed on the humidity deviation value to obtain the initial humidity control quantity.

[0039] In this embodiment, the temperature deviation value E is determined by a preset temperature proportional term, a preset temperature integral term, and a preset temperature derivative term. t (t) Perform PID calculation, specifically: U t =P out1+I out1 +D out1 , among which, U t P is the initial temperature control variable. out1 For the preset temperature ratio term, I out1 For the preset temperature integral term, D out1 For the preset temperature differential term, P out1 = K p1 ·E t (t), where K p1 For temperature loop proportional gain; I out1 = K i1 ∑E t For temperature loop integral gain; D out1 = K d1 (E t - E t-1 The temperature loop differential gain is denoted as E. The temperature loop proportional gain, temperature loop integral gain, and temperature loop differential gain can be determined through on-site tuning. By acquiring the initial temperature control quantity, it is ensured that the temperature can quickly and without overshoot approach the preset target temperature value. Then, based on the preset humidity proportional term, preset humidity integral term, and preset humidity differential term, the humidity deviation value E is adjusted. h (t) Perform PID calculation, specifically: U h =P out2 +I out2 +D out2 , among which, U h P is the initial humidity control value. out2 For the preset humidity ratio, I out2 D is the preset humidity integral term. out2 As the preset humidity differential term, P out2 = K p2 ·E h (t), where K p2 For humidity loop proportional gain; I out2 = K i2 ∑E h D is the integral gain of the humidity loop; out2 = K d2 (E h - E h-1 The humidity loop differential gain is denoted as , while the humidity loop proportional gain, humidity loop integral gain, and humidity loop differential gain can be determined through on-site tuning. Obtaining the initial humidity control quantity provides the basic control parameters for subsequent temperature and humidity coupling compensation. The preset temperature integral term and preset humidity integral term can be used to eliminate steady-state errors, ensuring that temperature and humidity accurately reach the setpoint; the preset temperature differential term and preset humidity differential term can be used to predict the changing trends of temperature and humidity, suppressing overshoot.

[0040] This embodiment provides a calibration system for a temperature and humidity sensor. Please refer to [link to documentation]. Figure 6 It includes a calibration chamber 6 temperature and humidity control module, a sensor data acquisition module, a correction coefficient fitting module, a correction coefficient verification module, and a sensor programming module, specifically: The temperature and humidity control module of the calibration cavity 6 is used to acquire the real-time temperature value and the real-time humidity value of the calibration cavity 6 within a preset maintenance time. If the real-time temperature value does not meet the preset temperature stability condition or the real-time humidity value does not meet the preset humidity stability condition, then the temperature drive signal and the humidity drive signal are acquired based on the real-time temperature value and the real-time humidity value. The sensor data acquisition module is used to adjust the temperature and humidity of the calibration cavity 6 based on the temperature driving signal and the humidity driving signal, and reacquire the real-time temperature value and the real-time humidity value of the calibration cavity 6 until the real-time temperature value meets the preset temperature stability condition and the real-time humidity value meets the preset humidity stability condition. Then, the first chip temperature and the first chip humidity of a number of temperature and humidity sensors 14 to be calibrated are acquired. The correction coefficient fitting module is used to calculate the first correction coefficient, the second correction coefficient, the third correction coefficient, and the fourth correction coefficient based on the real-time humidity value of the calibration cavity 6, the first temperature of the chip, and the first humidity of the chip. The correction coefficient verification module is used to calculate the chip correction humidity value based on the first correction coefficient, the second correction coefficient, the third correction coefficient, the fourth correction coefficient, the chip first temperature, and the chip first humidity. The sensor programming module is used to calculate the humidity difference based on the chip-corrected humidity value and the real-time humidity value of the calibration cavity 6. If the humidity difference is less than or equal to the preset humidity difference threshold, the first correction coefficient, the second correction coefficient, the third correction coefficient and the fourth correction coefficient are written into the temperature and humidity sensor 14 to be calibrated to complete the calibration of the temperature and humidity sensor 14 to be calibrated.

[0041] This embodiment provides a calibration system for a temperature and humidity sensor. Connected to circuit components via a preset standard serial port, the system requires only a temperature and humidity control module for the calibration cavity 6. By acquiring the real-time temperature and humidity values ​​of the calibration cavity 6, the system can adjust the temperature and humidity of the cavity 6 using generated temperature and humidity driving signals until the cavity reaches preset stable temperature and humidity conditions. This provides a precise and stable calibration environment for subsequent calibration of the temperature and humidity sensors 14, avoiding recalibration due to an unstable environment and thus reducing calibration efficiency. Next, a sensor data acquisition module collects the first chip temperature and humidity of several temperature and humidity sensors 14 to be calibrated. This allows for parallel calibration of multiple sensors 14, preventing batch inconsistencies and providing raw data support for the calculation of subsequent correction coefficients (first, second, third, and fourth), ensuring reliable data for the fitting calculations. Then, a correction coefficient fitting module is used to calculate the first, second, third, and fourth correction coefficients by calibrating the real-time humidity value of the cavity 6, the first temperature of the chip, and the first humidity of the chip. This allows for the quantification of the measurement deviation of the temperature and humidity sensor 14 to be calibrated. A correction coefficient verification module is then used to calculate the corrected humidity value of the chip using the first, second, third, and fourth correction coefficients. The sensor programming module is then used to calculate the humidity difference between the corrected humidity value and the real-time humidity value of the cavity. The effectiveness of the first, second, third, and fourth correction coefficients is verified by the humidity difference and a preset humidity difference threshold, ensuring that the accuracy of the temperature and humidity sensor 14 to be calibrated meets the preset requirements. This completes the automated parallel calibration of multiple temperature and humidity sensors 14 to be calibrated.

[0042] The temperature and humidity sensor calibration system provided in this embodiment adopts a bus-type communication architecture, which effectively improves the stability of data transmission by reducing communication lines and interference, supports multi-node parallel communication, and avoids common communication interference problems in multi-sensor environments.

[0043] Furthermore, the sensor data acquisition module is also used for: Within a preset duration, the real-time temperature and humidity values ​​of the calibration chamber 6 are acquired. If the real-time temperature value meets the preset temperature stability condition and the real-time humidity value meets the preset humidity stability condition, the first chip temperature and the first chip humidity of several temperature and humidity sensors 14 to be calibrated are directly acquired.

[0044] In this embodiment, by acquiring the real-time temperature and humidity values ​​of the calibration chamber 6 and determining them according to preset temperature and humidity stability conditions, the environmental state within the calibration chamber 6 can be quickly identified. Then, when both the real-time temperature and humidity values ​​meet the preset temperature and humidity stability conditions, the first chip temperature and first chip humidity of several temperature and humidity sensors 14 to be calibrated are directly acquired, eliminating repetitive temperature and humidity adjustment steps and improving calibration efficiency. Furthermore, by directly acquiring the first chip temperature and first chip humidity of several temperature and humidity sensors 14 to be calibrated, a basis is provided for subsequent fitting calculations of correction coefficients. Furthermore, based on the chip-corrected humidity value and the real-time humidity value of the calibration cavity 6, the humidity difference is calculated. If the humidity difference is greater than the preset humidity difference threshold, the sensor data acquisition module is also used to re-acquire the first chip temperature and the first chip humidity of several temperature and humidity sensors 14 to be calibrated until the humidity difference is less than or equal to the preset humidity difference threshold.

[0045] In this embodiment, the humidity difference is calculated by comparing the chip-corrected humidity value and the real-time humidity value, enabling a quantitative evaluation of the calibration correction effect and determining whether the currently obtained correction coefficient meets the accuracy requirements. Next, when the humidity difference exceeds a preset humidity difference threshold, the chip's first temperature and first humidity of the temperature and humidity sensor 14 to be calibrated are re-acquired. This avoids writing unqualified correction coefficients into the temperature and humidity sensor 14. Then, through repeated acquisition and verification until the humidity difference is less than or equal to the preset humidity difference threshold, it is ensured that the correction coefficients finally written into the temperature and humidity sensor 14 all meet the calibration standards, guaranteeing the consistency and reliability of batch calibration of multiple temperature and humidity sensors 14.

[0046] To better illustrate the implementation process of the temperature and humidity sensor 14 to be calibrated in the calibration method of the temperature and humidity sensor provided above, an embodiment is provided. Under the conditions of a preset target temperature of 25℃ and a preset target humidity of 85%RH, several chip first temperatures and several chip first humidityes of the temperature and humidity sensor 14 to be calibrated are collected. Sampling points (C, T) are obtained through the chip first temperature and chip first humidity, and compared with a preset temperature and humidity sensor database to find the best-fitting preset temperature and humidity fitting curve. The chip first temperature and chip first humidity of the temperature and humidity sensor 14 to be calibrated are obtained through the preset temperature and humidity fitting curve under the conditions of 15℃ and 30%RH / 85%RH, 25℃ and 30%RH, and 40℃ and 30%RH / 85%RH in the calibration chamber 6 environment. The preset temperature and humidity sensor database consists of test data from a large number of similar sensors to be calibrated before calibration, covering humidity curves at different temperatures. By measuring the humidity curve at a single temperature point, the slope of the fitted curve can be used to deduce the curve in the corresponding database. Generally, 6 sampling points are sufficient to obtain a relatively accurate correction coefficient, thus obtaining the chip's first temperature and first humidity set: P={(15,30),(15,85),(25,30),(25,85),(40,30),(40,85)} with units of (C,%RH).

[0047] Next, a linear equation in two variables is used to describe the coupling relationship between temperature and humidity: H(C,T)=k0+k1·C+k2·T+k3·(C·T); Where: k1·C is the basic humidity sensitivity; k2·T is the zero-point drift caused by temperature; k3·(C·T) is the sensitivity change with temperature.

[0048] Y=[H1,H2,…,H i-1 H i T; i=1…6; Y is the raw humidity value read from the high-precision temperature and humidity sensor in the calibration chamber 6 at each humidity point; K = [k0, k1, k2, k3]T; K is the correction coefficient matrix, k0 is the first correction coefficient, k1 is the second correction coefficient, k2 is the third correction coefficient, and k3 is the fourth correction coefficient; M= ; M represents the temperature and humidity values ​​measured by the chip at a sampling point of 25℃ and 85%RH, and the values ​​calculated by the preset temperature and humidity fitting curve, thus allowing the construction of the matrix equation Y=M·K. K= Y The corrected humidity value for the chip is obtained by calculating the correction factor K. When | - When |≤5.0%RH, after verification, the first correction factor, the second correction factor, the third correction factor, and the fourth correction factor are written into the chip register. This indicates the real-time humidity value of calibration chamber 6. The above description represents the preferred embodiments of the present invention. It should be noted that those skilled in the art can make various improvements and modifications without departing from the principles of the present invention, and these improvements and modifications are also considered to be within the scope of protection of the present invention.

Claims

1. A calibration method for a temperature and humidity sensor, characterized in that, include: The real-time temperature and humidity values ​​of the calibration chamber are acquired within a preset maintenance time. If the real-time temperature value does not meet the preset temperature stability condition or the real-time humidity value does not meet the preset humidity stability condition, the temperature drive signal and humidity drive signal are acquired based on the real-time temperature and humidity values. Based on the temperature driving signal and humidity driving signal, the calibration cavity is adjusted for temperature and humidity, and the real-time temperature value and real-time humidity value of the calibration cavity are reacquired until the real-time temperature value meets the preset temperature stability condition and the real-time humidity value meets the preset humidity stability condition. Then, the first chip temperature and the first chip humidity of several temperature and humidity sensors to be calibrated are collected. Based on the real-time humidity value of the calibration cavity, the first temperature of the chip, and the first humidity of the chip, calculate the first correction coefficient, the second correction coefficient, the third correction coefficient, and the fourth correction coefficient; Calculate the chip corrected humidity value based on the first correction factor, the second correction factor, the third correction factor, the fourth correction factor, the first chip temperature, and the first chip humidity; Based on the chip-corrected humidity value and the real-time humidity value of the calibration chamber, the humidity difference is calculated. If the humidity difference is less than or equal to the preset humidity difference threshold, the first correction coefficient, the second correction coefficient, the third correction coefficient and the fourth correction coefficient are written to complete the calibration of the temperature and humidity sensor to be calibrated.

2. The calibration method for a temperature and humidity sensor according to claim 1, characterized in that, Also includes: Within a preset duration, the real-time temperature and humidity values ​​of the calibration chamber are acquired. If the real-time temperature and humidity values ​​meet the preset temperature stability conditions and the preset humidity stability conditions, the first chip temperature and the first chip humidity of several temperature and humidity sensors to be calibrated are directly acquired.

3. The calibration method for a temperature and humidity sensor according to claim 1, characterized in that, Also includes: The humidity difference is calculated based on the chip-corrected humidity value and the real-time humidity value of the calibration cavity. If the humidity difference is greater than the preset humidity difference threshold, the first chip temperature and the first chip humidity of several temperature and humidity sensors to be calibrated are re-acquired until the humidity difference is less than or equal to the preset humidity difference threshold.

4. The calibration method for a temperature and humidity sensor according to claim 1, characterized in that, The step of acquiring the real-time temperature and humidity values ​​of the calibration cavity within a preset maintenance time, and if the real-time temperature or humidity value does not meet the preset temperature stability condition or the preset humidity stability condition, then acquiring a temperature drive signal and a humidity drive signal based on the real-time temperature and humidity values, includes: Within a preset maintenance time, the real-time temperature value and the real-time humidity value of the calibration chamber are obtained. If the real-time temperature value does not meet the preset temperature stability condition or the real-time humidity value does not meet the preset humidity stability condition, the temperature deviation value is obtained based on the real-time temperature value and the humidity deviation value is obtained based on the real-time humidity value. Based on the temperature deviation value and the humidity deviation value, obtain the first temperature control value and the first humidity control value; The first temperature control quantity and the first humidity control quantity are converted into signals to obtain the temperature drive signal and the humidity drive signal.

5. The calibration method for a temperature and humidity sensor according to claim 4, characterized in that, The process of acquiring the real-time temperature and humidity values ​​of the calibration chamber within a preset maintenance time, and if the real-time temperature or humidity value does not meet the preset temperature stability condition or the preset humidity stability condition, then acquiring a temperature deviation value based on the real-time temperature value and an humidity deviation value based on the real-time humidity value, includes: The real-time temperature and humidity values ​​of the calibration chamber are acquired within a preset maintenance time. If the real-time temperature value does not meet the preset temperature stability condition or the real-time humidity value does not meet the preset humidity stability condition, the real-time temperature and humidity values ​​are filtered to obtain smoothed temperature and humidity values. Temperature deviation values ​​are obtained based on smoothed temperature values ​​and preset target temperature values; humidity deviation values ​​are obtained based on smoothed humidity values ​​and preset target humidity values.

6. The calibration method for a temperature and humidity sensor according to claim 4, characterized in that, The process of obtaining the first temperature control value and the first humidity control value based on the temperature deviation value and the humidity deviation value includes: PID calculations are performed on the temperature deviation value and the humidity deviation value respectively to obtain the first temperature control value and the initial humidity control value. If the first temperature control value is not equal to the preset temperature control threshold, the initial humidity control value is adjusted based on the preset feedforward decoupling compensation mechanism to obtain the first humidity control value.

7. The calibration method for a temperature and humidity sensor according to claim 6, characterized in that, The step of performing PID calculations on the temperature deviation value and humidity deviation value respectively to obtain the first temperature control quantity and the initial humidity control quantity includes: Based on the preset temperature proportional term, preset temperature integral term, and preset temperature derivative term, PID calculation is performed on the temperature deviation value to obtain the initial temperature control quantity; Based on the preset humidity proportional term, preset humidity integral term, and preset humidity derivative term, PID calculation is performed on the humidity deviation value to obtain the initial humidity control quantity.

8. A calibration system for a temperature and humidity sensor, characterized in that, It includes a calibration chamber temperature and humidity control module, a sensor data acquisition module, a correction coefficient fitting module, a correction coefficient verification module, and a sensor programming module, specifically: The calibration chamber temperature and humidity control module is used to acquire the real-time temperature value and the real-time humidity value of the calibration chamber within a preset maintenance time. If the real-time temperature value does not meet the preset temperature stability condition or the real-time humidity value does not meet the preset humidity stability condition, then the temperature drive signal and the humidity drive signal are acquired based on the real-time temperature value and the real-time humidity value. The sensor data acquisition module is used to adjust the temperature and humidity of the calibration cavity based on the temperature driving signal and the humidity driving signal, and reacquire the real-time temperature value and the real-time humidity value of the calibration cavity until the real-time temperature value meets the preset temperature stability condition and the real-time humidity value meets the preset humidity stability condition. Then, the first chip temperature and the first chip humidity of several temperature and humidity sensors to be calibrated are acquired. The correction coefficient fitting module is used to calculate a first correction coefficient, a second correction coefficient, a third correction coefficient, and a fourth correction coefficient based on the real-time humidity value of the calibration cavity, the first temperature of the chip, and the first humidity of the chip. The correction coefficient verification module is used to calculate the chip correction humidity value based on the first correction coefficient, the second correction coefficient, the third correction coefficient, the fourth correction coefficient, the chip first temperature, and the chip first humidity. The sensor programming module is used to calculate the humidity difference based on the chip-corrected humidity value and the real-time humidity value of the calibration cavity. If the humidity difference is less than or equal to a preset humidity difference threshold, the first correction coefficient, the second correction coefficient, the third correction coefficient and the fourth correction coefficient are written into the temperature and humidity sensor to be calibrated to complete the calibration of the temperature and humidity sensor to be calibrated.

9. A calibration system for a temperature and humidity sensor according to claim 8, characterized in that, The sensor data acquisition module is also used for: Within a preset duration, the real-time temperature and humidity values ​​of the calibration chamber are acquired. If the real-time temperature and humidity values ​​meet the preset temperature stability conditions and the preset humidity stability conditions, the first chip temperature and the first chip humidity of several temperature and humidity sensors to be calibrated are directly acquired.

10. A calibration system for a temperature and humidity sensor according to claim 8, characterized in that, The humidity difference is calculated based on the chip-corrected humidity value and the real-time humidity value of the calibration cavity. If the humidity difference is greater than the preset humidity difference threshold, the sensor data acquisition module is also used to re-acquire the first chip temperature and the first chip humidity of several temperature and humidity sensors to be calibrated until the humidity difference is less than or equal to the preset humidity difference threshold.

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