Immersion type ultrahigh pressure probe station

Abstract

The invention belongs to the technical field of high-voltage probe equipment, and particularly relates to an infiltration type ultrahigh-voltage probe station which comprises a structural base, a test probe seat placing platform and a wafer bearing table moving mechanism installed on the structural base. The wafer infiltrating and bearing mechanism is installed on the wafer bearing table moving mechanism, and the wafer infiltrating and bearing mechanism is used for infiltrating and positioning a wafer to be tested. According to the infiltrating type ultrahigh-voltage probe station, due to the fact that the connection position of the bowl wall and the bottom of the inner cavity of the insulating pressure-resistant outer bowl is in transition through the smooth arc with the large curvature radius instead of a right angle, under the high voltage, an electric field in the area is evenly distributed, field intensity concentration at the sharp corner is avoided, and the infiltrating type ultrahigh-voltage probe station is stable and reliable. The side surface of the high-voltage conductive inner core embedded in the center of the bottom of the insulating and voltage-resistant outer bowl is completely surrounded by the insulating and voltage-resistant outer bowl, so that no metal edge is exposed in insulating and voltage-resistant oil or air.

Description

An immersion-type ultra-high pressure probe station Technical Field

[0001] This invention belongs to the technical field of high-pressure probe equipment, specifically an immersion-type ultra-high-pressure probe station. Background Technology

[0002] In semiconductor device R&D and reliability testing, ultra-high voltage (typically referring to DC voltages above 10kV) testing is a critical step, primarily used to evaluate core electrical parameters of power devices (such as IGBTs, SiC MOSFETs, and high-voltage diodes), including breakdown voltage and leakage current. To perform this type of testing, probes must be precisely contacted with the device electrodes on the wafer under test, and an ultra-high voltage must be applied. Because air is easily ionized and broken down under high voltage, generating arcs and leakage currents, which severely affect test accuracy and safety, the test area must be placed in a medium with high insulation strength.

[0003] "Immersion" (or liquid-insulating) probe stations are the mainstream technical solution to the above problems. Its core principle is to immerse the sample under test and the probe tip in a liquid with high insulation strength, high boiling point, and chemical stability (such as mineral oil, fluorinated liquid, or special insulating withstand voltage oil) to replace air as the insulating medium, thereby significantly improving the breakdown voltage threshold and ensuring the stable conduct of ultra-high voltage tests.

[0004] Currently, most publicly available immersion-type high-voltage probe stage technologies employ a "bath-type" or "flat-plate type" structure, comprising a rigid base upon which a two-dimensional planar moving platform (XY stage) is mounted for carrying and moving the sample. The sample (wafer) is typically fixed to a metal sample stage (Chuck) via vacuum adsorption or mechanical means. This Chuck also serves as one of the electrodes for applying the test voltage (usually the ground or high-voltage end). Around the sample stage and probe arm, a rectangular or circular dam (Bath) made of insulating material (such as PTFE or plexiglass) is set up, forming an open shallow tank. During testing, insulating liquid is poured into this dam until the liquid surface completely immerses the sample and probe tip.

[0005] The following problems exist in the practical application of this type of immersion high-voltage probe station: 1. Edge field concentration and leakage problems under high voltage: Metal conductive Chucks are usually cylindrical or cuboids with small radii of curvature at their edges and corners. When tens of thousands of volts of high voltage are applied, these edges will generate extremely strong electric field concentration (point effect). Even when immersed in insulating oil, these locally excessively high electric field strengths may still exceed the dielectric strength of the insulating oil, causing local micro-discharge or increased leakage current, making it difficult to reduce the background leakage current to an extremely low level (e.g., below 100nA), affecting the accuracy of measuring devices with small leakage current.

[0006] 2. Poor Creepage Path Control: In open-type cofferdam designs, the surface of the insulating oil is in contact with air. The sides of the metal Chuck, the surface of the insulation of the conductors connecting the Chuck, and even the metal parts of the probe arms can all form creepage paths from the high-voltage point through the oil-gas interface or the surface of the solid insulator to the grounding structure. Especially at ultra-high voltages above 20kV, designing sufficiently long and controlled creepage distances becomes extremely difficult, easily leading to surface flashover.

[0007] 3. Complex structure and inconvenient maintenance: The separate Chuck and containment trough structures require precise alignment and sealing (to prevent leakage), increasing mechanical complexity. Handling large amounts of insulating oil during cleaning or sample replacement is also cumbersome.

[0008] In view of this, the present invention proposes an immersion-type ultra-high pressure probe station to solve the above-mentioned technical problems. Summary of the Invention

[0009] To overcome the shortcomings of existing technologies and solve the aforementioned technical problems, this invention proposes an immersion-type ultra-high pressure probe station.

[0010] The technical solution adopted by this invention to solve its technical problem is as follows: An immersion-type ultra-high voltage probe station, comprising a structural base, a test probe holder placement platform, and a wafer support platform moving mechanism mounted on the structural base; it also includes an immersion wafer support mechanism mounted on the wafer support platform moving mechanism, used for immersing and positioning the wafer to be tested; the immersion wafer support mechanism includes an insulating and withstand voltage outer bowl, a high-voltage conductive inner core, and a high-voltage lead connection structure; the insulating and withstand voltage outer bowl has a smooth arc transition with a large radius of curvature at the connection between the inner wall and the bottom, and the interior of the insulating and withstand voltage outer bowl forms a wafer positioning boss, used to hold insulating and withstand voltage oil; the high-voltage conductive inner core is embedded in the bottom of the insulating and withstand voltage outer bowl, the height of the high-voltage conductive inner core is less than the height of the wafer positioning boss, and a vacuum adsorption hole is opened on the high-voltage conductive inner core; the high-voltage conductive inner core has an internal threaded hole, and the high-voltage lead connection structure is connected to the high-voltage conductive inner core through the internal threaded hole, and the high-voltage lead connection structure is connected to an external high-voltage line.

[0011] Preferably, it also includes an insulating withstand voltage oil conveying mechanism, which is used to guide the insulating withstand voltage oil into and out of the insulating withstand voltage outer cup. The insulating withstand voltage oil conveying mechanism includes a vacuum pump, an oil extraction pipe, an oil delivery pipe, and an oil storage tank. The vacuum pump and the oil storage tank are both fixedly installed on the structural base, and the input end of the vacuum pump is conductively connected to the top of the oil storage tank. The oil extraction pipe and the oil delivery pipe are both fixedly installed on the oil storage tank. The end of the oil extraction pipe away from the oil storage tank is conductively connected to the vacuum adsorption hole, and the end of the oil delivery pipe away from the oil storage tank extends to the top of the insulating withstand voltage outer cup. Both the oil extraction pipe and the oil delivery pipe are unidirectional pipes, and a shut-off valve is installed in the middle of the oil delivery pipe.

[0012] Preferably, the top of the insulating pressure-resistant outer cup is provided with an overflow groove, the oil supply pipe extends into the overflow groove, and the overflow groove is arranged around the circumference of the insulating pressure-resistant outer cup.

[0013] Preferably, the oil delivery pipe is arranged around the overflow groove, and the oil delivery pipe has evenly distributed overflow holes in the overflow groove, the total diameter of the plurality of overflow holes being smaller than the diameter of the oil delivery pipe.

[0014] Preferably, the oil storage tank is equipped with a separation mechanism for separating impurities in the insulating withstand voltage oil. The separation mechanism includes a control rod, a connecting pipe, and a connecting rod. The oil storage tank is formed by a rigid top tank and a corrugated bottom tank connected in a conductive manner. Connecting plates are fixedly installed at both ends of the corrugated bottom tank, and a control rod is fixedly installed between the connecting plates. The control rod is made of an electric telescopic rod. A connecting rod is fixedly installed in the inner cavity of the corrugated bottom tank. The connecting rod is made of a spring telescopic rod, and the top end of the connecting rod extends into the rigid top tank. A connecting pipe is fixedly installed at the top end of the connecting rod for connecting the vacuum pump to the oil extraction pipe.

[0015] Preferably, a pressure control component is fixedly installed inside the oil sucker pipe, the inner cavity of the pressure control component is electrically connected to the inner cavity of the oil sucker pipe, and a stop plate is elastically installed in the inner cavity of the pressure control component through a support spring, and the stop plate is slidably and sealingly connected to the inner cavity of the pressure control component.

[0016] Preferably, a baffle plate is fixedly installed between the rigid top tank and the corrugated bottom tank, and the baffle plate has uniformly distributed jet holes.

[0017] Preferably, a stirring impeller is rotatably installed inside the rigid top tank, and the stirring impeller corresponds to the jet hole, driving the stirring impeller to rotate during the injection of insulating pressure-resistant oil.

[0018] Preferably, a jet tube is elastically installed inside the jet hole via a connecting spring. Both the jet hole and the jet tube have inverted T-shaped cross-sections. The inner cavity of the jet hole is conical, and the largest end of the conical opening faces the corrugated bottom tank.

[0019] Preferably, a filter plate is fixedly installed inside the jet hole, and the filter plate is slidably connected to the jet pipe.

[0020] The beneficial effects of the present invention are as follows: 1. The immersion-type ultra-high voltage probe station of the present invention, in the present invention, because the connection between the inner wall of the insulating pressure-resistant outer cup and the bottom adopts a smooth arc transition with a large radius of curvature instead of a right angle, this design makes the electric field distribution in this area uniform under high voltage, avoiding the concentration of field strength at sharp corners, and the high voltage conductive inner core embedded in the center of the bottom of the insulating pressure-resistant outer cup, because its sides are completely surrounded by the insulating pressure-resistant outer cup, has no metal edges exposed to the insulating pressure-resistant oil or air.

[0021] 2. The immersion-type ultra-high voltage probe station of the present invention uses the suction action of a vacuum pump to fix the wafer under test and extract and recover insulating withstand voltage oil during the testing phase and the end of the testing phase, respectively. The recovery path of the insulating withstand voltage oil partially overlaps with the vacuum adsorption path, which not only effectively reduces the number of cavities in the outer cup of the insulating withstand voltage probe station, but also reduces the probability of contamination during the addition and discharge of the insulating withstand voltage oil due to the more fixed flow path of the insulating withstand voltage oil. At the same time, the automated oil injection and discharge also effectively reduces the workload of the staff.

[0022] 3. The immersion-type ultra-high voltage probe station of the present invention changes the conduction path of the vacuum pump and utilizes the characteristic of vacuum degree to change the boiling point of liquid before the use of insulating withstand voltage oil, causing water vapor in the insulating withstand voltage oil to evaporate and be discharged, and finally injecting the standard insulating withstand voltage oil into the inner cavity of the insulating withstand voltage outer cup, so as to maintain the insulating performance of the insulating withstand voltage oil and extend the service life of the insulating withstand voltage oil. Attached Figure Description

[0023] The invention will now be further described with reference to the accompanying drawings.

[0024] Figure 1 is a perspective view of the present invention; Figure 2 is a perspective view of the present invention from another perspective; Figure 3 is a perspective view of the impregnation support mechanism; Figure 4 is an internal structural diagram of the insulating withstand voltage outer cup; Figure 5 is a perspective view of the insulating withstand voltage oil conveying mechanism; Figure 6 is an internal structural diagram of the oil storage tank; Figure 7 is a partial enlarged view of point A in Figure 6; Figure 8 is a partial enlarged view of point B in Figure 6; In the figures: 1, structural base; 11, test probe seat placement platform; 12, support platform moving mechanism; 2, insulating withstand voltage outer cup; 21, wafer positioning boss; 22, high voltage conductive inner core. 23. Vacuum adsorption hole; 24. Internal threaded hole; 25. High-voltage lead wire connection structure; 3. Vacuum pump; 31. Oil suction pipe; 32. Oil delivery pipe; 33. Shut-off valve; 34. Overflow groove; 35. Overflow hole; 4. Control rod; 41. Connecting rod; 42. Connecting pipe; 5. Rigid top tank; 51. Corrugated bottom tank; 52. Connecting plate; 6. Pressure control component; 61. Support spring; 62. Shut-off plate; 7. Blocking plate; 71. Jet hole; 72. Agitator impeller; 73. Jet pipe; 74. Connecting spring; 75. Filter plate. Detailed Implementation

[0025] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments.

[0026] As shown in Figures 1 to 8, the immersion-type ultra-high voltage probe station of the present invention is characterized by comprising a structural base 1, a test probe placement platform 11, and a wafer support platform moving mechanism 12 mounted on the structural base 1; it also includes an immersion wafer support mechanism, which is mounted on the wafer support platform moving mechanism 12, and is used for immersing and positioning the wafer to be tested; the immersion wafer support mechanism includes an insulating and pressure-resistant outer bowl 2, a high-voltage conductive inner core 22, and a high-voltage lead connection structure 25; the insulating and pressure-resistant outer bowl 2 is made of engineering plastic with high insulation strength, low dielectric loss, and high chemical stability, preferably polytetrafluoroethylene (PTFE), and its shape is a bowl-shaped container with an open top, and the bowl wall has sufficient thickness and mechanical strength.

[0027] The high-voltage conductive inner core 22 is a cylinder or short cylinder made of metal (such as stainless steel or aluminum alloy, with the surface plated with gold or nickel) and serves as the electrode for high-voltage testing, i.e., a chuck. It is precisely embedded and fixed at the bottom center of the insulating outer cup (1).

[0028] The insulating pressure-resistant outer bowl 2 has a smooth arc transition with a large radius of curvature at the connection between the inner wall and the bottom. The inner part of the insulating pressure-resistant outer bowl 2 forms a wafer positioning boss 21. The insulating pressure-resistant outer bowl 2 is used to hold insulating pressure-resistant oil, which is used to fill the gaps between the tip of the insulating probe and the surface of the wafer to be tested, as well as between the surface of the wafer to be tested and the insulating pressure-resistant outer bowl 2. The high-voltage conductive inner core 22 is embedded in the bottom of the insulating pressure-resistant outer bowl 2. The height of the high-voltage conductive inner core 22 is less than the height of the wafer positioning boss 21. The high-voltage conductive inner core 22 has a vacuum adsorption hole 23. The high-voltage conductive inner core 22 has an internal threaded hole 24. The high-voltage lead connection structure 25 is connected to the high-voltage conductive inner core 22 through the internal threaded hole 24. The high-voltage lead connection structure 25 is connected to a high-voltage line. The high-voltage lead connection structure 25 is connected to the high-voltage conductive inner core 22 through a pre-reserved sealing channel (using a compression sealing gland) at the bottom of the insulating pressure-resistant outer bowl 2.

[0029] In traditional solutions, the main reason for problems such as concentrated edge field strength, leakage, and poor control of surface creepage paths under high voltage is that the conductive Chuck, which serves as the "electrical functional carrier," and the cofferdam, which serves as the "insulating functional container," are designed as two independent components. This fails to achieve active conduction, homogenization, and physical isolation of critical creepage paths of the high voltage field from a structural perspective. Therefore, in the solution designed in this invention, an impregnation bearing mechanism is set up to actively conduct, homogenize, and physically isolate critical creepage paths of the high voltage field, thereby making up for the shortcomings of the prior art.

[0030] Specifically, in this invention, since the connection between the inner wall of the insulating pressure-resistant outer cup 2 and the bottom adopts a smooth arc transition with a large radius of curvature instead of a right angle, this design makes the electric field distribution in this area uniform under high voltage, avoiding the concentration of field strength at sharp corners. The high-voltage conductive inner core 22, which is embedded in the center of the bottom of the insulating pressure-resistant outer cup 2, has no metal edges exposed to the insulating pressure-resistant oil or air because its sides are completely surrounded by the insulating pressure-resistant outer cup 2.

[0031] In this invention, the only controlled creepage path between the high voltage (applied to the high-voltage conductive inner core 22) and the ground (typically the structural base 1 and peripheral metal parts such as microscopes) is as follows: starting from the high-voltage conductive inner core 22, along its surface, it must first pass through the insulating pressure-resistant outer cup 2 wrapped around its side to reach the outer surface of the insulating pressure-resistant outer cup 2. Because the material constituting the insulating pressure-resistant outer cup 2 has extremely high volume resistivity and surface resistivity, and because this path is entirely in the air, its insulation performance is far superior to that of an oil-air mixture interface.

[0032] The testing process in this invention consists of the following steps: 1. Preparation: The insulating and pressure-resistant outer cup 2 is installed and fixed on the support plate moving mechanism 12 (i.e., XY moving platform) on the structural base 1, and the high voltage line is connected to the high voltage conductive inner core 22 through the high voltage lead connection structure 25.

[0033] 2. Sample Placement: Place the wafer to be tested into the cavity of the insulating and voltage-resistant outer cup 2, align it and place it on the upper surface of the high-voltage conductive inner core 22, and start vacuum adsorption fixation.

[0034] 3. Inject insulating oil: Pour sufficient insulating oil into the cavity of the insulating outer cup 2 until the liquid level completely submerges the wafer and reaches the required height (usually slightly higher than the lowest point of the cup wall).

[0035] 4. Alignment and Testing: Using the microscope and probe manipulator, manually immerse the probe tip in the oil and attach it to the target pad on the wafer. Turn on the high voltage source to perform voltage-current characteristic testing.

[0036] 5. Cleaning: After the test is completed, turn off the high voltage, remove the probe, use a special tool to remove the insulating oil, and remove the wafer.

[0037] As a preferred embodiment of the present invention, it further includes an insulating withstand voltage oil conveying mechanism, which is used to guide the insulating withstand voltage oil into and out of the insulating withstand voltage outer cup 2. The insulating withstand voltage oil conveying mechanism includes a vacuum pump 3, an oil extraction pipe 31, an oil delivery pipe 32, and an oil storage tank. The vacuum pump 3 and the oil storage tank are both fixedly installed on the structural base 1, and the input end of the vacuum pump 3 is conductively connected to the top of the oil storage tank. The oil extraction pipe 31 and the oil delivery pipe 32 are both fixedly installed on the oil storage tank. The end of the oil extraction pipe 31 away from the oil storage tank is conductively connected to the vacuum adsorption hole 23, and the end of the oil delivery pipe 32 away from the oil storage tank extends to the top of the insulating withstand voltage outer cup 2. The oil extraction pipe 31 and the oil delivery pipe 32 are both unidirectional pipes, and a shut-off valve 33 is installed in the middle of the oil delivery pipe 32. The shut-off valve 33 is preferably an electrically controlled valve.

[0038] An overflow groove 34 is provided at the top of the insulating pressure-resistant outer cup 2, and the oil supply pipe 32 extends into the overflow groove 34. The overflow groove 34 is arranged around the circumference of the insulating pressure-resistant outer cup 2.

[0039] The oil delivery pipe 32 is arranged around the overflow groove 34, and the oil delivery pipe 32 has evenly distributed overflow holes 35 in the overflow groove 34. The total diameter of the multiple overflow holes 35 is smaller than the diameter of the oil delivery pipe 32.

[0040] Since the insulating withstand voltage oil needs to be injected and discharged in the outer insulating withstand voltage cup 2 during the entire testing process, in order to maximize the convenience of injecting and discharging the insulating withstand voltage oil and reduce the probability of contamination or leakage, an insulating withstand voltage oil conveying mechanism is provided in this invention. In practical applications, the insulating withstand voltage oil is initially stored in the oil storage tank. When the operator manually opens the shut-off valve 33 on the oil delivery pipe 32, the insulating withstand voltage oil flows along the oil delivery pipe 32 into the overflow tank 34 under the action of gravity. During the flow process, the insulating withstand voltage oil flows out from multiple overflow holes 35 at the end of the oil delivery pipe 32, causing the level of the insulating withstand voltage oil in the overflow tank 34 to gradually rise. As the liquid level gradually increases, it's important to understand that in this invention, the overflow trough 34 is relatively low on the side near the center of the insulating pressure-resistant outer bowl 2. Therefore, as the liquid level in the overflow trough 34 gradually increases, the insulating pressure-resistant oil eventually flows from the overflow trough 34 into the inner cavity of the insulating pressure-resistant outer bowl 2, gradually submerging the wafer under test. After the test, the operator removes the wafer and turns on the vacuum pump 3. The vacuum pump 3 continuously extracts air from the top of the oil storage tank, and the negative pressure is eventually transmitted to the oil extraction pipe 31. This negative pressure is then applied to the inner cavity of the insulating pressure-resistant outer bowl 2 by the vacuum suction hole 23, thereby extracting the insulating pressure-resistant oil. This allows the insulating pressure-resistant oil to eventually collect again in the oil storage tank for future use.

[0041] In this invention, the vacuum pump 3 is used to fix the wafer under test and extract and recover the insulating withstand voltage oil during the testing phase and the end of the testing phase, respectively. The recovery path of the insulating withstand voltage oil is partially overlapped with the vacuum adsorption path, which can not only effectively reduce the number of cavities in the insulating withstand voltage outer cup 2, but also reduce the probability of contamination during the addition and discharge of the insulating withstand voltage oil due to the more fixed flow path. At the same time, the automated oil injection and discharge also effectively reduce the workload of the staff.

[0042] In a preferred embodiment of the present invention, a separation mechanism is installed inside the oil storage tank. The separation mechanism is used to separate impurities in the insulating withstand voltage oil. The separation mechanism includes a control rod 4, a connecting pipe 42, and a connecting rod 41. The oil storage tank is formed by a rigid top tank 5 and a corrugated bottom tank 51 connected in a conductive manner. Connecting plates 52 are fixedly installed at both the upper and lower ends of the corrugated bottom tank 51. A control rod 4 is fixedly installed between the connecting plates 52. The control rod 4 is made of an electric telescopic rod. A connecting rod 41 is fixedly installed in the inner cavity of the corrugated bottom tank 51. The connecting rod 41 is made of a spring telescopic rod. The top end of the connecting rod 41 extends into the rigid top tank 5. A connecting pipe 42 is fixedly installed at the top end of the connecting rod 41. The connecting pipe 42 is used to connect the vacuum pump 3 to the oil extraction pipe 31.

[0043] A pressure control component 6 is fixedly installed inside the oil extraction pipe 31. The inner cavity of the pressure control component 6 is electrically connected to the inner cavity of the oil extraction pipe 31. A stop plate 62 is elastically installed in the inner cavity of the pressure control component 6 through a support spring 61. The stop plate 62 is slidably and sealingly connected to the inner cavity of the pressure control component 6. The presence of the pressure control component 6 and the stop plate 62 can both allow the vacuum adsorption hole 23 to be evacuated by the vacuum pump 3 to fix the wafer under test using the vacuum degree, and isolate the vacuum adsorption hole 23 from the oil storage tank as the vacuum degree continues to increase, so as to avoid damage to the wafer under test due to excessive vacuum degree.

[0044] During long-term testing, the insulating withstand voltage oil is exposed to air, which easily leads to the mixing of moisture from the air, thus adversely affecting its performance and reducing its service life. To extend the service life of the insulating withstand voltage oil, this invention includes a separation mechanism in the oil storage tank. In practical application, after the wafer to be tested is placed on the high-voltage conductive core 22, the operator starts the vacuum pump 3. The vacuum pump 3 generates negative pressure in the oil storage tank, the oil extraction pipe 31, and the vacuum adsorption hole 23. This negative pressure fixes the wafer to be tested and pulls the cut-off plate 62 into the oil extraction pipe 31. As the negative pressure continues to increase, the cut-off plate 62 eventually completely blocks the middle of the oil extraction pipe 31. At this point, one section of the oil extraction pipe 31 maintains a certain vacuum level with the vacuum adsorption hole 23 to fix the wafer to be tested, while the other section of the oil extraction pipe 31 continuously increases the vacuum level with the oil storage tank. As the vacuum level rises to the set threshold and is maintained for a period of time, the insulating withstand voltage oil... The water vapor contained within gradually evaporates and is eventually discharged by vacuum pump 3, thus removing water vapor from the insulating withstand voltage oil. Subsequently, under the control of a pre-set program, control lever 4 gradually changes from an extended state to a retracted state. As the length of control lever 4 decreases, the height of corrugated bottom tank 51 gradually shrinks, causing connecting rod 41 to push connecting pipe 42 upward. When connecting pipe 42 connects vacuum pump 3 to oil extraction pipe 31, the oil storage tank is disconnected from vacuum pump 3 and oil extraction pipe 31. As control lever 4 continues to retract... The insulating withstand voltage oil is squeezed into the oil delivery pipe 32. After the shut-off valve is opened, the insulating withstand voltage oil can be poured into the inner cavity of the insulating withstand voltage outer cup 2. After the test is completed, the control program first controls the vacuum pump 3 to reverse. As the pressure in the connecting pipe 42 and the oil extraction pipe 31 decreases, the shut-off plate 62 retracts into the inner cavity of the pressure control component 6 under the action of the support spring 61. After the wafer is taken out, the vacuum pump 3 is controlled to rotate forward again, and the control rod 4 returns to its initial length, so that the insulating withstand voltage oil in the insulating withstand voltage outer cup 2 can be recovered.

[0045] This invention alters the conduction path of the vacuum pump 3 and utilizes the characteristic of vacuum degree to change the boiling point of liquid before the use of insulating pressure-resistant oil, causing water vapor in the insulating pressure-resistant oil to evaporate and be discharged. Finally, the standard-compliant insulating pressure-resistant oil is injected into the inner cavity of the insulating pressure-resistant outer cup 2, thereby maintaining the insulating performance of the insulating pressure-resistant oil and extending its service life.

[0046] In a preferred embodiment of the present invention, a blocking plate 7 is fixedly installed between the rigid top tank 5 and the corrugated bottom tank 51, and the blocking plate 7 is provided with uniformly distributed jet holes 71.

[0047] An agitator 72 is rotatably installed inside the rigid top tank 5. The agitator 72 corresponds to the jet hole 71. During the injection of insulating pressure-resistant oil, the agitator 72 is driven to rotate.

[0048] A jet tube 73 is elastically installed inside the jet hole 71 via a connecting spring 74. Both the jet hole 71 and the jet tube 73 have inverted T-shaped cross sections. The inner cavity of the jet hole 71 is conical, and the largest end of the conical opening faces the corrugated bottom tank 51.

[0049] A filter plate is fixedly installed inside the jet hole 71, and the filter plate is slidably connected to the jet pipe 73.

[0050] To further enhance the separation effect of impurities in the insulating withstand voltage oil, in this invention, after the stop plate 62 blocks the oil extraction pipe 31, as the vacuum degree in the oil storage tank increases, the water vapor in the insulating withstand voltage oil gradually evaporates. To accelerate the evaporation rate of water vapor, the control rod 4 performs regular extension and retraction movements. When the control rod 4 retracts, the insulating withstand voltage oil in the corrugated bottom tank 51 pushes the jet pipe 73 upward and is sprayed upward from the inner cavity of the jet pipe 73. The sprayed insulating withstand voltage oil not only drives the stirring impeller 72 to rotate, but also cooperates with... The impeller 72 agitates the insulating pressure-resistant oil in the rigid top tank 5. As the insulating pressure-resistant oil is agitated, the water vapor inside it evaporates more efficiently under the influence of vacuum. When the control rod 4 extends, the insulating pressure-resistant oil in the rigid top tank 5 flows back. The backflowing insulating pressure-resistant oil flows through the filter plate (in this invention, the filter plate is a filter element, mainly used to remove solid particulate impurities in the insulating pressure-resistant oil), thereby intercepting solid particles in the insulating pressure-resistant oil and further enhancing the impurity removal effect of the insulating pressure-resistant oil.

[0051] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. An immersion-type ultra-high pressure probe station, characterized in that, The system includes a structural base (1), a test probe holder placement platform (11), and a wafer stage moving mechanism (12) mounted on the structural base (1); it also includes a wafer wetting mechanism, which is mounted on the wafer stage moving mechanism (12) and is used to wet and position the wafer to be tested; the wafer wetting mechanism includes an insulating and withstand voltage outer bowl (2), a high-voltage conductive inner core (22), and a high-voltage lead connection structure (25); the insulating and withstand voltage outer bowl (2) has a smooth arc transition with a large radius of curvature at the connection between the inner wall and the bottom of the bowl, and the interior of the insulating and withstand voltage outer bowl (2) is composed of The wafer positioning boss (21) is used to hold insulating and pressure-resistant oil in the insulating and pressure-resistant outer bowl (2). The high-voltage conductive inner core (22) is embedded in the bottom of the insulating and pressure-resistant outer bowl (2). The height of the high-voltage conductive inner core (22) is less than the height of the wafer positioning boss (21). The high-voltage conductive inner core (22) is provided with a vacuum adsorption hole (23). The high-voltage conductive inner core (22) is provided with an internal thread hole (24). The high-voltage lead connection structure (25) is connected to the high-voltage conductive inner core (22) through the internal thread hole (24). The high-voltage lead connection structure (25) is connected to a high-voltage line.

2. The immersion-type ultra-high pressure probe station according to claim 1, characterized in that: It also includes an insulating withstand voltage oil conveying mechanism, which is used to guide the input and output of insulating withstand voltage oil into and out of the insulating withstand voltage outer cup (2). The insulating withstand voltage oil conveying mechanism includes a vacuum pump (3), an oil extraction pipe (31), an oil delivery pipe (32), and an oil storage tank. The vacuum pump (3) and the oil storage tank are both fixedly installed on the structural base (1). The input end of the vacuum pump (3) is connected to the top of the oil storage tank. The oil extraction pipe (31) and the oil delivery pipe (32) are both fixedly installed on the oil storage tank. The end of the oil extraction pipe (31) away from the oil storage tank is connected to the vacuum adsorption hole (23). The end of the oil delivery pipe (32) away from the oil storage tank extends to the top of the insulating withstand voltage outer cup (2). The oil extraction pipe (31) and the oil delivery pipe (32) are both unidirectional guide pipes. A shut-off valve (33) is installed in the middle of the oil delivery pipe (32).

3. The immersion-type ultra-high pressure probe station according to claim 2, characterized in that: An overflow groove (34) is provided at the top of the insulating pressure-resistant outer cup (2), and the oil supply pipe (32) extends into the overflow groove (34). The overflow groove (34) is arranged around the circumference of the insulating pressure-resistant outer cup (2).

4. The immersion-type ultra-high pressure probe station according to claim 3, characterized in that: The oil delivery pipe (32) is arranged around the overflow groove (34), and the oil delivery pipe (32) has evenly distributed overflow holes (35) in the overflow groove (34). The total diameter of the multiple overflow holes (35) is smaller than the diameter of the oil delivery pipe (32).

5. The immersion-type ultra-high pressure probe station according to claim 4, characterized in that: The oil storage tank is equipped with a separation mechanism for separating impurities in the insulating pressure-resistant oil. The separation mechanism includes a control rod (4), a connecting pipe (42), and a connecting rod (41). The oil storage tank is formed by a rigid top tank (5) and a corrugated bottom tank (51) connected in a conductive manner. Both ends of the corrugated bottom tank (51) are fixedly installed with connecting plates (52). A control rod (4) is fixedly installed between the connecting plates (52). The control rod (4) is made of an electric telescopic rod. A connecting rod (41) is fixedly installed in the inner cavity of the corrugated bottom tank (51). The connecting rod (41) is made of a spring telescopic rod. The top end of the connecting rod (41) extends into the rigid top tank (5). A connecting pipe (42) is fixedly installed at the top end of the connecting rod (41). The connecting pipe (42) is used to connect the vacuum pump (3) to the oil extraction pipe (31).

6. The immersion-type ultra-high pressure probe station according to claim 5, characterized in that: A pressure control component (6) is fixedly installed inside the oil extraction pipe (31). The inner cavity of the pressure control component (6) is connected to the inner cavity of the oil extraction pipe (31). A stop plate (62) is elastically installed in the inner cavity of the pressure control component (6) through a support spring (61). The stop plate (62) is slidably sealed to the inner cavity of the pressure control component (6).

7. The immersion-type ultra-high pressure probe station according to claim 6, characterized in that: A blocking plate (7) is fixedly installed between the rigid top tank (5) and the corrugated bottom tank (51), and the blocking plate (7) has uniformly distributed jet holes (71).

8. The immersion-type ultra-high pressure probe station according to claim 7, characterized in that: An agitator (72) is rotatably installed inside the rigid top tank (5). The agitator (72) corresponds to the jet hole (71). During the injection of insulating pressure-resistant oil, the agitator (72) is driven to rotate.

9. The immersion-type ultra-high pressure probe station according to claim 7, characterized in that: The jet tube (73) is elastically installed inside the jet hole (71) by a connecting spring (74). The cross-sections of the jet hole (71) and the jet tube (73) are both inverted T-shaped. The inner cavity of the jet hole (71) is conical, and the largest end of the conical opening faces the corrugated bottom tank (51).

10. The immersion-type ultra-high pressure probe station according to claim 9, characterized in that: A filter plate is fixedly installed inside the jet hole (71), and the filter plate is slidably connected to the jet pipe (73).

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