Source measurement circuit and electronic chip

Abstract

According to the source measurement circuit and the electronic chip provided by the embodiment of the invention, the main control module generates the first voltage signal according to the working voltage or the working current of the device to be measured, generates the first control signal according to the current range to the first switch module, and generates the first gain adjustment signal according to the voltage range to the voltage generation module; the output first voltage signal is adjusted according to the third voltage signal and the fourth voltage signal; the first switch module determines the conduction mode of the resistor module according to the first control signal; the voltage generation module is configured to receive the first voltage signal, adjust the range of the first voltage signal according to the first gain adjustment signal and then output a second voltage signal; the voltage acquisition module acquires third voltage signals at the two ends of the first output port and the second output port; the current acquisition module acquires a fourth voltage signal of the resistor module connected between the output end of the voltage generation module and the first input end of the current acquisition module.

Description

Technical Field

[0001] This invention relates to the field of integrated circuit technology and related technical fields, specifically to a source measurement circuit and chip. Background Technology

[0002] A source measurement unit (SMU), also known as a source meter, can accurately output voltage or current and simultaneously measure voltage and / or current. It integrates the functions of a digital multimeter (DMM), power supply, actual current source, electronic load, and pulse generator into a single instrument.

[0003] In semiconductor testing equipment, a large number of source measurement units are needed to measure various parameters of semiconductors. Currently, commercially available source measurement units generally use 220V AC power supply, analog control loops, and are large in size and weight, and expensive, which is not conducive to their large-scale integration into semiconductor testing equipment.

[0004] Given the problems with existing technologies, there is an urgent need for a source measurement circuit that is highly integrated and small in size. Summary of the Invention

[0005] The embodiments described herein provide a source measurement circuit and electronic chip that address problems existing in the prior art.

[0006] In a first aspect, according to the present disclosure, a source measurement circuit is provided, which includes at least a main control module, a first switch module, a voltage generation module, a voltage acquisition module, a current acquisition module, a resistor module, a first output port, and a second output port; The main control module is configured to, in response to receiving the operating voltage or current, current range and voltage range of the device under test submitted by the target object, generate a first voltage signal based on the operating voltage or current of the device under test, generate a first control signal to the first switch module based on the current range, generate a first gain adjustment signal to the voltage generation module based on the voltage range, and adjust the output first voltage signal based on the third voltage signal and the fourth voltage signal, wherein the device under test is a bare die on a wafer; The first switch module is configured to determine, based on the first control signal, the conduction mode of the resistor module between the output terminal of the voltage generation module and the first output port, and the conduction mode of the resistor module between the output terminal of the voltage generation module and the first input terminal of the current acquisition module. The voltage generation module is configured to receive the first voltage signal, adjust the range of the first voltage signal according to the first gain adjustment signal, and then output a second voltage signal. The voltage acquisition module is configured to acquire a third voltage signal at both ends of the first output port and the second output port, and to feed the acquired third voltage signal back to the main control module. The current acquisition module is configured to acquire the fourth voltage signal of the resistor module connected between the output terminal of the voltage generation module and the first input terminal of the current acquisition module, and to feed back the acquired fourth voltage signal to the main control module.

[0007] In some embodiments of this disclosure, the resistor module includes N resistors connected in series between the output terminal of the voltage generation module and the first output port. The first switch module includes a first single-pole multi-throw (SPMD) switch and a second SPMD switch. The first terminal of the first SPMD switch is electrically connected to the first output port, the second terminal of the first SPMD switch is electrically connected to the second terminal of the first resistor, the i-th terminal of the first SPMD switch is electrically connected to the second terminal of the (i-1)-th resistor, the first terminal of the second SPMD switch is electrically connected to the first input terminal of the current acquisition module, the second terminal of the second SPMD switch is electrically connected to the second terminal of the first resistor, and the i-th terminal of the second SPMD switch is electrically connected to the second terminal of the (i-1)-th resistor. The control terminals of the first SPMD switch and the second SPMD switch receive the first control signal. .

[0008] In some embodiments of this disclosure, the voltage generation module includes a first digital-to-analog converter, an attenuator, a first operational amplifier, and a high-voltage power amplifier. The input terminal of the first digital-to-analog converter receives the first voltage signal. The output terminal of the first digital-to-analog converter is electrically connected to the input terminal of the attenuator. The output terminal of the attenuator is electrically connected to the input terminal of the first operational amplifier. The output terminal of the first operational amplifier is electrically connected to the input terminal of the high-voltage power amplifier. The output terminal of the high-voltage power amplifier outputs a second voltage signal. The control terminal of the attenuator receives the first gain adjustment signal.

[0009] In some embodiments of this disclosure, the voltage acquisition module includes a second operational amplifier, a third operational amplifier, a first high-voltage differential operational amplifier, a first fully differential operational amplifier, and a first analog-to-digital converter. The input terminal of the second operational amplifier is electrically connected to the first output port, and the output terminal of the second operational amplifier is electrically connected to the first input terminal of the first high-voltage differential operational amplifier. The input terminal of the third operational amplifier is electrically connected to the second output port, and the output terminal of the third operational amplifier is electrically connected to the second input terminal of the first high-voltage differential operational amplifier. The output terminal of the first high-voltage differential operational amplifier is electrically connected to the input terminal of the first fully differential operational amplifier, and the output terminal of the first fully differential operational amplifier is electrically connected to the input terminal of the first analog-to-digital converter. The output terminal of the first analog-to-digital converter outputs a third voltage signal.

[0010] In some embodiments of this disclosure, the current acquisition module includes a fourth operational amplifier, a fifth operational amplifier, a second high-voltage differential operational amplifier, a second fully differential operational amplifier, and a second analog-to-digital converter. The input terminal of the fourth operational amplifier is electrically connected to the output terminal of the voltage generation module, and the output terminal of the fourth operational amplifier is electrically connected to the first input terminal of the second high-voltage differential operational amplifier. The input terminal of the fifth operational amplifier is electrically connected to the first terminal of a second single-pole multi-throw switch, and the output terminal of the fifth operational amplifier is electrically connected to the second input terminal of the second high-voltage differential operational amplifier. The output terminal of the second high-voltage differential operational amplifier is electrically connected to the input terminal of the second fully differential operational amplifier, and the output terminal of the second fully differential operational amplifier is electrically connected to the input terminal of the second analog-to-digital converter. The output terminal of the second analog-to-digital converter outputs a fourth voltage signal.

[0011] In some embodiments of this disclosure, a first detection port, a second detection port, and a second switch module are also included; The main control module is also configured to generate a second control signal to the second switch module based on the voltage sampling mode submitted by the target object; The second switching module is configured to determine that when the second control signal is high, the first input terminal of the voltage acquisition module is electrically connected to the first output port and the second input terminal of the voltage acquisition module is electrically connected to the second output port; and when the second control signal is low, the first input terminal of the voltage acquisition module is electrically connected to the first detection port and the second input terminal of the voltage acquisition module is electrically connected to the second detection port.

[0012] In some embodiments of this disclosure, the second switch module includes a first single-pole double-throw (SPD) switch and a second SPD switch. A first terminal of the first SPD switch is electrically connected to the input terminal of the second operational amplifier, a second terminal of the first SPD switch is electrically connected to the first output port, and a third terminal of the first SPD switch is electrically connected to the first detection port. A first terminal of the second SPD switch is electrically connected to the input terminal of the third operational amplifier, a second terminal of the second SPD switch is electrically connected to the second output port, and a third terminal of the second SPD switch is electrically connected to the second detection port.

[0013] In some embodiments of this disclosure, the voltage generation module further includes a circuit protection unit; The circuit protection unit is configured to acquire the output voltage signal, output current signal and temperature signal of the high-voltage power amplifier, and generate an enable signal to the high-voltage power amplifier based on the relationship between the output voltage signal and a preset voltage signal, the relationship between the output current signal and a preset current signal and the relationship between the temperature signal and a preset temperature signal.

[0014] In some embodiments of this disclosure, the circuit protection unit includes a second digital-to-analog converter, a plurality of comparators and an OR gate. The second digital-to-analog converter receives a preset voltage signal, a preset current signal and a preset temperature signal. The output terminal of the second digital-to-analog converter is electrically connected to the input terminal of a comparator, the output terminal of each comparator is electrically connected to the input terminal of an OR gate, and the output terminal of the OR gate outputs an enable signal.

[0015] Secondly, according to the present disclosure, an electronic chip is provided, comprising: One or more processors; Storage device for storing one or more programs. When the one or more programs are executed by the one or more processors, the one or more processors perform the method as described in any of the second aspects.

[0016] The source measurement circuit and electronic chip provided in this disclosure embodiment include a main control module that, in response to receiving the operating voltage or current, current range, and voltage range of the device under test (DUT) submitted by the target object, generates a first voltage signal based on the operating voltage or current of the DUT, generates a first control signal to a first switching module based on the current range, generates a first gain adjustment signal to a voltage generation module based on the voltage range, and adjusts the output first voltage signal based on a third voltage signal and a fourth voltage signal. The first switching module determines the conduction mode of the resistor module between the output terminal of the voltage generation module and the first output port, and determines the conduction mode of the resistor module between the output terminal of the voltage generation module and the first input terminal of the current acquisition module, based on the first control signal. The voltage generation module receives the first voltage signal, adjusts the range of the first voltage signal according to the first gain adjustment signal, and outputs a second voltage signal. The voltage acquisition module acquires the third voltage signal between the first and second output ports and feeds the acquired third voltage signal back to the main control module. The current acquisition module acquires the fourth voltage signal from the resistor module connected between the output terminal of the voltage generation module and the first input terminal of the current acquisition module and feeds the acquired fourth voltage signal back to the main control module. By integrating a main control module, a first switch module, a voltage generation module, a voltage acquisition module, a current acquisition module, a resistor module, a first output port, and a second output port on a circuit board, the source meter function is realized based on the integrated modules. That is, it accurately outputs voltage or current and simultaneously measures voltage and / or current. It has the advantages of small size, lightweight, embeddable, cost-controllable, high accuracy, and parallel measurement.

[0017] The above description is merely an overview of the technical solutions of the embodiments of this application. In order to better understand the technical means of the embodiments of this application and to implement them in accordance with the contents of the specification, and to make the above and other objects, features and advantages of the embodiments of this application more obvious and understandable, specific implementation methods of this application are described below. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this disclosure, the accompanying drawings of the embodiments will be briefly described below. It should be understood that the drawings described below only relate to some embodiments of this disclosure and are not intended to limit this disclosure, wherein: Figure 1 This is a schematic diagram of a source measurement circuit provided in an embodiment of this disclosure; Figure 2 This is a schematic diagram of another source measurement circuit provided in an embodiment of this disclosure; Figure 3 This is a schematic diagram of another source measurement circuit provided in the embodiments of this disclosure.

[0019] In the accompanying diagram, markers with the same last two digits correspond to the same elements. It should be noted that the elements in the diagram are schematic and not drawn to scale. Detailed Implementation

[0020] To make the objectives, technical solutions, and advantages of the embodiments of this disclosure clearer, the technical solutions of the embodiments of this disclosure will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this disclosure. All other embodiments obtained by those skilled in the art based on the described embodiments of this disclosure without creative effort are also within the scope of protection of this disclosure.

[0021] Unless otherwise defined, all terms used herein (including technical and scientific terms) shall have the same meaning as commonly understood by one of ordinary skill in the art to which this subject matter pertains. It will be further understood that terms such as those defined in commonly used dictionaries shall be interpreted as having the meaning consistent with their meaning in the context of the specification and in the relevant art, and shall not be interpreted in an idealized or overly formal form unless otherwise explicitly defined herein. As used herein, the statement of “connecting” or “coupling” two or more parts together shall mean that these parts are directly joined together or joined through one or more intermediate components.

[0022] The term "embodiment" as used herein means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of the phrase "embodiment" in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0023] In this article, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can mean: A exists, A and B exist simultaneously, or B exists. Additionally, the character " / " in this article generally indicates that the preceding and following related objects have an "or" relationship.

[0024] Furthermore, in all embodiments of this disclosure, terms such as “first” and “second” are used only to distinguish one component (or part of a component) from another component (or another part of a component).

[0025] In the description of this application, unless otherwise stated, "multiple" means two or more (including two), and similarly, "multiple groups" means two or more (including two groups).

[0026] To enable those skilled in the art to better understand the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings.

[0027] Based on the problems existing in the prior art, this disclosure provides a source measurement circuit. Figure 1 This is a schematic diagram of a source measurement circuit provided in an embodiment of this disclosure, such as... Figure 1As shown, the source measurement circuit includes: a main control module 10, a first switch module 20, a voltage generation module 30, a voltage acquisition module 40, a current acquisition module 50, a resistor module 60, a first output port HF, and a second output port LF. The main control module 10 is configured to, in response to receiving the operating voltage or current, current range, and voltage range of the device under test (DUT) submitted by the target object, generate a first voltage signal based on the operating voltage or current of the DUT, generate a first control signal to the first switch module 20 based on the current range, generate a first gain adjustment signal to the voltage generation module 30 based on the voltage range, and adjust the output first voltage signal based on the third and fourth voltage signals. The DUT is a bare die on a wafer. The first switch module 20 is configured to, based on the first control signal… The conduction mode of the resistor module 60 between the output terminal of the voltage generation module 30 and the first output port HF is determined, as is the conduction mode of the resistor module 60 between the output terminal of the voltage generation module 30 and the first input terminal of the current acquisition module 50. The voltage generation module 30 is configured to receive a first voltage signal, adjust the range of the first voltage signal according to a first gain adjustment signal, and then output a second voltage signal. The voltage acquisition module 40 is configured to acquire a third voltage signal between the first output port and the second output port, and feed the acquired third voltage signal back to the main control module 10. The current acquisition module 50 is configured to acquire a fourth voltage signal from the resistor module connected between the output terminal of the voltage generation module 30 and the first input terminal of the current acquisition module 50, and feed the acquired fourth voltage signal back to the main control module 10.

[0028] The resistor module 60 includes N resistors connected in series between the output terminal of the voltage acquisition module 30 and the first output port HF, and the resistance value of each resistor is fixed.

[0029] It should be noted that the device under test is a bare die on a wafer, and the wafer includes multiple devices under test. The wafer can be a silicon carbide wafer or a wafer made of other materials. This disclosure does not specifically limit the specific materials used.

[0030] The source measurement circuit provided in this embodiment allows the target object to select the operating voltage or operating current, current range, and voltage range of the device under test in the main control module 10. At this time, the main control module 10 generates a first voltage signal based on the operating voltage or operating current of the device under test selected by the target object, generates a first control signal to the first switch module 20 based on the current range, and generates a first gain adjustment signal to the voltage generation module 30 based on the voltage range.

[0031] The first switch module 20 receives a first control signal generated by the main control module 10. The conduction state of the first switch module 20 is different under different first control signals. Based on the first control signal, the resistance value between the output terminal of the voltage generation module 30 and the first output port HF is changed, thereby changing the voltage signal acting on the first output port HF, so that the voltage signal output through the first output port HF meets the working voltage or working current of the device under test submitted by the main control module. In addition, based on the first control signal, the resistance value between the output terminal of the voltage generation module 30 and the first input terminal of the current acquisition module 50 is changed, so that the resistance value between the output terminal of the voltage generation module 30 and the first input terminal of the current acquisition module 50 is the same as the resistance value between the output terminal of the voltage generation module 30 and the first output port HF, laying the foundation for the subsequent acquisition of the current signal of the device under test by the current acquisition module 50.

[0032] The voltage generation module 30 receives the first voltage signal generated by the main control module 10, and outputs the second voltage signal after adjusting the range of the first voltage signal according to the first gain adjustment signal.

[0033] It should be noted that the first gain adjustment signal is used to adjust the voltage range of the first voltage signal. By receiving the first gain adjustment signal, the first voltage signal is adjusted to the voltage range corresponding to the attenuation coefficient according to the attenuation coefficient of the first gain adjustment signal. The voltage range is different under different attenuation coefficients.

[0034] When the source measurement circuit includes only the first output port HF and the second output port LF, the first input terminal of the voltage acquisition module 40 is electrically connected to the first output port HF, and the second input terminal of the voltage acquisition module 40 is electrically connected to the second output port LF. The voltage acquisition module 40 acquires the third voltage signal between the first output port HF and the second output port LF, and feeds back the acquired third voltage signal to the main control module 10.

[0035] The first input terminal of the current acquisition module 50 is electrically connected to the second terminal of the resistor connected to the first switch module 20, and the second input terminal of the current acquisition module 50 is electrically connected to the output terminal of the voltage generation module 30. The current acquisition module 50 acquires the fourth voltage signal of the resistor module connected between the output terminal of the voltage generation module 50 and the first input terminal of the current acquisition module 50, and feeds back the acquired fourth voltage signal to the main control module 10.

[0036] The voltage acquisition module 40 acquires a third voltage signal reflecting the voltage signal applied to the device under test (DUT) through the first output port HF, while the current acquisition module 50 acquires a fourth voltage signal reflecting the current signal applied to the DUT through the first output port HF. After acquiring the third voltage signal acquired by the voltage acquisition module 40 and the fourth voltage signal acquired by the current acquisition module 50, the main control module 10 determines whether the voltage and current signals applied to the DUT meet the operating voltage and operating current of the DUT by comparing the relationship between the third voltage signal and a preset voltage signal, and / or by comparing the relationship between the fourth voltage signal and the preset voltage signal. If the voltage signal of the DUT does not meet the operating voltage of the DUT, and / or the current signal of the DUT does not meet the operating current of the DUT, the main control module 10 adjusts the output first voltage signal until the voltage and current signals applied to the DUT meet the operating voltage and operating current of the DUT.

[0037] Furthermore, the source measurement circuit provided in this embodiment realizes the function of the source meter based on the integrated modules. The overall size of the source measurement circuit is small and the integration is high. By setting a source measurement circuit for each device under test, parallel measurement of multiple devices under test can be realized.

[0038] The source measurement circuit provided in this embodiment includes a main control module that, in response to receiving the operating voltage or current, current range, and voltage range of the device under test (DUT) submitted by the target object, generates a first voltage signal based on the operating voltage or current of the DUT, generates a first control signal to a first switching module based on the current range, generates a first gain adjustment signal to a voltage generation module based on the voltage range, and adjusts the output first voltage signal based on a third voltage signal and a fourth voltage signal. The first switching module determines the conduction mode of the resistor module between the output terminal of the voltage generation module and the first output port, and determines the conduction mode of the resistor module between the output terminal of the voltage generation module and the first input terminal of the current acquisition module, based on the first control signal. The voltage generation module receives the first voltage signal, adjusts the range of the first voltage signal according to the first gain adjustment signal, and outputs a second voltage signal. The voltage acquisition module acquires the third voltage signal between the first and second output ports and feeds the acquired third voltage signal back to the main control module. The current acquisition module acquires the fourth voltage signal from the resistor module connected between the output terminal of the voltage generation module and the first input terminal of the current acquisition module and feeds the acquired fourth voltage signal back to the main control module. By integrating a main control module, a first switch module, a voltage generation module, a voltage acquisition module, a current acquisition module, a resistor module, a first output port, and a second output port on a circuit board, the source meter function is realized based on the integrated modules. That is, it accurately outputs voltage or current and simultaneously measures voltage and / or current. It has the advantages of small size, lightweight, embeddable, cost-controllable, high accuracy, and parallel measurement.

[0039] Based on the above embodiments, see below. Figure 1 The resistor module 60 includes N resistors connected in series between the output terminal of the voltage generation module 30 and the first output port HF. Figure 1 (Example: three resistors) The first switch module 20 includes a first single-pole multi-throw switch K1 and a second single-pole multi-throw switch K2. The first terminal of the first single-pole multi-throw switch K1 is electrically connected to the first output port HF. The second terminal of the first single-pole multi-throw switch K1 is electrically connected to the second terminal of the first resistor R1. The i-th terminal of the first single-pole multi-throw switch K1 is electrically connected to the second terminal of the (i-1)-th resistor Ri-1. The first terminal of the second single-pole multi-throw switch K2 is electrically connected to the first input terminal of the current acquisition module 50. The second terminal of the second single-pole multi-throw switch K2 is electrically connected to the second terminal of the first resistor R1. The i-th terminal of the second single-pole multi-throw switch K2 is electrically connected to the second terminal of the (i-1)-th resistor Ri-1. The control terminals of the first single-pole multi-throw switch K1 and the second single-pole multi-throw switch K2 receive a first control signal. , where i is a positive integer.

[0040] In specific implementation methods, combined with Figure 1The first switch module 20 includes a first single-pole multi-throw switch K1 and a second single-pole multi-throw switch K2. The control terminals of the first single-pole multi-throw switch K1 and the second single-pole multi-throw switch K2 respectively receive a first control signal. The first control signal is determined based on the current range selected by the target object.

[0041] For a specific example, if the current range includes current range 1, current range 2, ... and current range M, the first control signal corresponds to current range 1, the second control signal corresponds to current range 2, and the Mth control signal corresponds to current range M. After the target object selects current range 1, the main control module 10 generates the first control signal to the first switch module 20. After receiving the first control signal, the first switch module 20 controls the first terminal of the first single-pole multi-throw switch K1 to conduct between the first and second terminals, and controls the first terminal of the second single-pole multi-throw switch K2 to conduct between the first and second terminals. At this time, the first resistor R1 is connected between the output terminal of the voltage generation module 30 and the first output port HF, and the first resistor R1 is connected between the output terminal of the voltage generation module 30 and the first input terminal of the current acquisition module 50. After the target object selects current range 2, the main control module 10 generates... A second first control signal is sent to the first switch module 20. After receiving the second first control signal, the first switch module 20 controls the first terminal of the first single-pole multi-throw switch K1 to conduct between the first and third terminals, and controls the first terminal of the second single-pole multi-throw switch K2 to conduct between the first and third terminals. At this time, the first resistor R1 and the second resistor R2 are connected between the output terminal of the voltage generation module 30 and the first output port HF, and between the output terminal of the voltage generation module 30 and the first input terminal of the current acquisition module 50. That is, based on the current range selected by the main control module for the target object, different first control signals are generated to the first switch module 20, thereby changing the resistance value between the output terminal of the voltage generation module 30 and the first output port HF, and changing the resistance value between the output terminal of the voltage generation module 30 and the first input terminal of the current acquisition module 50.

[0042] For a detailed implementation, please refer to [link / reference]. Figure 1 The voltage generation module 30 includes a first digital-to-analog converter DAC1, an attenuator ATT, a first operational amplifier AV1, and a high-voltage power amplifier HVPA. The input terminal of the first digital-to-analog converter DAC1 receives a first voltage signal. The output terminal of the first digital-to-analog converter DAC1 is electrically connected to the input terminal of the attenuator ATT. The output terminal of the attenuator ATT is electrically connected to the input terminal of the first operational amplifier AV1. The output terminal of the first operational amplifier AV1 is electrically connected to the input terminal of the high-voltage power amplifier HVPA. The output terminal of the high-voltage power amplifier HVPA outputs a second voltage signal. The control terminal of the attenuator ATT receives a first gain adjustment signal.

[0043] The main control module 10 generates a first voltage signal as a digital voltage signal. After receiving the first voltage signal, the voltage generation module 30 first converts the digital first voltage signal into an analog first voltage signal through the first digital-to-analog converter DAC1. Then, the analog first voltage signal is amplified by the attenuator ATT, the first operational amplifier AV1, and the high-voltage power amplifier HVPA before outputting a second voltage signal.

[0044] It should be noted that the amplification factors of the first operational amplifier AV1 and the high-voltage power amplifier HVPA are fixed values, while the attenuation factor of the attenuator ATT can be adjusted according to the first gain adjustment signal generated by the main control module 10. The main control module generates the first gain adjustment signal to the attenuator ATT in the voltage generation module 30, and adjusts the attenuation factor of the attenuator through the first gain adjustment signal, thereby changing the second voltage signal output by the voltage generation module 30.

[0045] In addition, high-voltage power amplifiers can amplify both voltage and power, ensuring that the output voltage meets the voltage requirements of high-power devices under test.

[0046] It is understandable that the output of the voltage generation module is also the output of the high-voltage power amplifier.

[0047] For a detailed implementation, please refer to [link / reference]. Figure 1 The voltage acquisition module 40 includes a second operational amplifier AV2, a third operational amplifier AV3, a first high-voltage differential operational amplifier HAV1, a first fully differential operational amplifier CMRR1, and a first analog-to-digital converter ADC1. The input terminal of the second operational amplifier AV2 is electrically connected to the first output port HF, and the output terminal of the second operational amplifier AV2 is electrically connected to the first input terminal of the first high-voltage differential operational amplifier HAV1. The input terminal of the third operational amplifier AV3 is electrically connected to the second output port LF, and the output terminal of the third operational amplifier AV3 is electrically connected to the second input terminal of the first high-voltage differential operational amplifier HAV1. The output terminal of the first high-voltage differential operational amplifier HAV1 is electrically connected to the input terminal of the first fully differential operational amplifier CMRR1, and the output terminal of the first fully differential operational amplifier CMRR1 is electrically connected to the input terminal of the first analog-to-digital converter ADC1. The output terminal of the first analog-to-digital converter ADC1 outputs a third voltage signal.

[0048] Combination Figure 1In the voltage acquisition module 40, the input terminal of the second operational amplifier AV2 is electrically connected to the first output port HF, and the input terminal of the third operational amplifier AV3 is electrically connected to the second output port LF. After sampling and amplifying the voltage between the first output port HF and the second output port LF through the second operational amplifier AV2 and the third operational amplifier AV3, the signal is amplified again through the first high-voltage differential operational amplifier HAV1 and the first fully differential operational amplifier CMRR1. Finally, the amplified analog third voltage signal is converted into a digital third voltage signal through the first analog-to-digital converter ADC1 and sent to the main control module 10.

[0049] It should be noted that in the above embodiments, the grounding nodes of the second operational amplifier AV2 and the third operational amplifier AV3 are sampling floating ground nodes (the voltage signal of the sampling floating ground node is the same as the voltage signal at the output terminal of the voltage generation module 30), and the grounding nodes of the first high-voltage differential operational amplifier HAV1 and the first fully differential operational amplifier CMRR1 are the source measurement circuit output working ground (the voltage signal of the source measurement circuit output working ground is determined based on the voltage signal of the external power supply ground).

[0050] Understandably, since the second operational amplifier AV2 and the third operational amplifier AV3 support relatively small voltage signal values, by setting the ground nodes of the second operational amplifier AV2 and the third operational amplifier AV3 as sampling floating ground nodes, it is ensured that the second operational amplifier AV2 and the third operational amplifier AV3 can receive voltage signals with higher voltage values. Then, by setting the first high-voltage differential operational amplifier HAV1, the voltage signal based on the sampling floating ground node is converted into a voltage signal based on the voltage signal of the source measurement circuit output working ground.

[0051] As a preferred implementation method, the main control module 10 generates a second gain adjustment signal to the first fully differential operational amplifier CMRR1 based on the voltage range, and adjusts the range of the third voltage signal input to the first fully differential operational amplifier CMRR1 based on the second gain adjustment signal, so as to avoid the voltage output to the first analog-to-digital converter ADC1 from exceeding the maximum operating voltage of the first analog-to-digital converter, thereby causing damage to the first analog-to-digital converter.

[0052] Based on the above embodiments, see below. Figure 1The current acquisition module 50 includes a fourth operational amplifier AV4, a fifth operational amplifier AV5, a second high-voltage differential operational amplifier HAV2, a second fully differential operational amplifier CMRR2, and a second analog-to-digital converter ADC2. The input terminal of the fourth operational amplifier AV4 is electrically connected to the output terminal of the voltage generation module 30, and the output terminal of the fourth operational amplifier AV4 is electrically connected to the first input terminal of the second high-voltage differential operational amplifier HAV2. The input terminal of the fifth operational amplifier AV5 is electrically connected to the first terminal of the second single-pole multi-throw switch K2, and the output terminal of the fifth operational amplifier AV5 is electrically connected to the second input terminal of the second high-voltage differential operational amplifier HAV2. The output terminal of the second high-voltage differential operational amplifier HAV2 is electrically connected to the input terminal of the second fully differential operational amplifier CMRR2, and the output terminal of the second fully differential operational amplifier CMRR2 is electrically connected to the input terminal of the second analog-to-digital converter ADC2. The output terminal of the second analog-to-digital converter ADC2 outputs a fourth voltage signal.

[0053] Combination Figure 1 In the current acquisition module 50, the input terminal of the fourth operational amplifier AV4 is electrically connected to the output terminal of the voltage generation module 30, and the input terminal of the fifth operational amplifier AV5 is electrically connected to the first terminal of the second single-pole multi-throw switch K2. After sampling and amplifying the voltage between the output terminal of the voltage generation module 30 and the first terminal of the second single-pole multi-throw switch K2 through the fourth operational amplifier AV4 and the fifth operational amplifier AV5, the signal is amplified again through the second high-voltage differential operational amplifier HAV2 and the second fully differential operational amplifier CMRR2. Finally, the amplified analog fourth voltage signal is converted into a digital fourth voltage signal through the second analog-to-digital converter ADC2 and sent to the main control module 10.

[0054] It should be noted that in the above embodiments, the grounding nodes of the fourth and fifth operational amplifiers are sampling floating ground nodes (the voltage signal of the sampling floating ground node is the same as the voltage signal at the output of the voltage generation module), and the grounding nodes of the second high-voltage differential operational amplifier and the second fully differential operational amplifier are the source measurement circuit output working ground (the voltage signal of the source measurement circuit output working ground is determined based on the voltage signal of the external power supply ground).

[0055] Understandably, since the fourth operational amplifier AV4 and the fifth operational amplifier AV5 support relatively small voltage signal values, by setting the ground nodes of the fourth operational amplifier AV4 and the fifth operational amplifier AV5 as sampling floating ground nodes, it is ensured that the fourth operational amplifier AV4 and the fifth operational amplifier AV5 can receive voltage signals with higher voltage values. Then, by setting the second high-voltage differential operational amplifier HAV2, the voltage signal based on the sampling floating ground node is converted into a voltage signal based on the voltage signal of the source measurement circuit output working ground.

[0056] As a preferred implementation method, the main control module 10 generates a third gain adjustment signal to the second fully differential operational amplifier CMRR2 based on the current range, and adjusts the range of the fourth voltage signal input to the second fully differential operational amplifier CMRR2 based on the third gain adjustment signal, so as to avoid the voltage output to the second analog-to-digital converter ADC2 from exceeding the maximum operating voltage of the second analog-to-digital converter, thereby causing damage to the second analog-to-digital converter.

[0057] It is understood that in the above embodiment, the first input terminal of the current acquisition module 50 is also the input terminal of the fifth operational amplifier AV5.

[0058] Based on the above embodiments, Figure 2 This is a schematic diagram of another source measurement circuit provided in an embodiment of this disclosure, such as... Figure 2 As shown, the source measurement circuit also includes a first detection port HS, a second detection port LS, and a second switch module 70; the main control module 10 is further configured to generate a second control signal to the second switch module 70 according to the voltage sampling mode submitted by the target object; the second switch module 70 is configured to determine that when the second control signal is high, the first input terminal of the voltage acquisition module 40 is electrically connected to the first output port HF, and the second input terminal of the voltage acquisition module 40 is electrically connected to the second output port LF; and when the second control signal is low, determine that the first input terminal of the voltage acquisition module 40 is electrically connected to the first detection port HS, and the second input terminal of the voltage acquisition module 40 is electrically connected to the second detection port LS.

[0059] As a preferred implementation, when the source measurement circuit includes a first output port HF, a second output port LF, a first detection port HS, and a second detection port LS, the source measurement circuit also includes a second switch module 70. The main control module 10 generates a second control signal to the second switch module 70 based on the voltage sampling mode submitted by the target object. When the second control signal is high, the second control signal controls the conduction state of the second switch module 70, so that the first input terminal of the voltage acquisition module 40 is electrically connected to the first output port HF, and the second input terminal of the voltage acquisition module 40 is electrically connected to the second output port LF. When the second control signal is low, the second control signal controls the conduction state of the second switch module 70, so that the first input terminal of the voltage acquisition module 40 is electrically connected to the first detection port HS, and the second input terminal of the voltage acquisition module 40 is electrically connected to the second detection port LS.

[0060] The second switch module 70 includes a first single-pole double-throw switch K3 and a second single-pole double-throw switch K4. The first terminal of the first single-pole double-throw switch K3 is electrically connected to the input terminal of the second operational amplifier AV2, the second terminal of the first single-pole double-throw switch K3 is electrically connected to the first output port HF, and the third terminal of the first single-pole double-throw switch K3 is electrically connected to the first detection port HS. The first terminal of the second single-pole double-throw switch K4 is electrically connected to the input terminal of the third operational amplifier AV3, the second terminal of the second single-pole double-throw switch K4 is electrically connected to the second output port LF, and the third terminal of the second single-pole double-throw switch K4 is electrically connected to the second detection port LS.

[0061] In this implementation, the source measurement circuit is configured with ports including a first output port HF, a second output port LF, a first detection port HS, and a second detection port LS. One testing method is to measure the voltage value output by the first output port HF, and another method is to measure the voltage difference between the two ends of the device under test between the first output port HS and the second output port LS (the first output port HS and the second output port LS are directly connected to the two ends of the device under test through wires).

[0062] The target object can select a voltage sampling mode in the main control module 10. At this time, the main control module 10 generates a second control signal to the second switch module 70 according to the voltage sampling mode selected by the target object. When the target object selects the first voltage sampling mode in the main control module, the second control signal generated by the main control module 10 is high level. At this time, the first terminal of the first single-pole double-throw switch K3 is electrically connected to the second terminal, the first terminal of the second single-pole double-throw switch K4 is electrically connected to the second terminal, the input terminal of the second operational amplifier AV2 is electrically connected to the first output port HF, and the input terminal of the third operational amplifier AV3 is electrically connected to the second output port LF. When the target object selects the second voltage sampling mode in the main control module, the second control signal generated by the main control module 10 is low level. At this time, the first terminal of the first single-pole double-throw switch K3 is electrically connected to the third terminal, the first terminal of the second single-pole double-throw switch K4 is electrically connected to the third terminal, the input terminal of the second operational amplifier AV2 is electrically connected to the first detection port HS, and the input terminal of the third operational amplifier AV3 is electrically connected to the second detection port LS.

[0063] It is understood that in the above embodiments, the first input terminal of the voltage acquisition module 40 is also the input terminal of the second operational amplifier AV2, and the second input terminal of the voltage acquisition module 40 is also the input terminal of the third operational amplifier AV3.

[0064] Based on the above embodiments, Figure 3 This is a schematic diagram of another source measurement circuit provided in an embodiment of this disclosure, such as... Figure 3As shown, the voltage generation module 30 also includes a circuit protection unit; the circuit protection unit is configured to acquire the output voltage signal, output current signal and temperature signal of the high voltage power amplifier, and generate an enable signal to the high voltage power amplifier based on the relationship between the output voltage signal and the preset voltage signal, the relationship between the output current signal and the preset current signal and the relationship between the temperature signal and the preset temperature signal.

[0065] The circuit protection unit includes a second digital-to-analog converter (DAC2) and multiple comparators (...). Figure 3 The example represents COMP1, COMP2, and COMP3) and OR gates. The second digital-to-analog converter receives a preset voltage signal, a preset current signal, and a preset temperature signal. The output of the second digital-to-analog converter is electrically connected to the input of a comparator, the output of each comparator is electrically connected to the input of an OR gate, and the output of the OR gate outputs an enable signal.

[0066] like Figure 3 As shown, the circuit protection unit collects parameters such as temperature signal, output voltage signal, and output current signal from the high-voltage power amplifier. The circuit protection unit receives preset voltage signal, preset current signal, and preset temperature signal output by the main control module. By comparing the collected output voltage signal with the preset voltage signal, output current signal with the preset current signal, and temperature signal with the preset temperature signal, the circuit protection unit generates an enable signal for the high-voltage power amplifier. As long as the output voltage signal is greater than the preset voltage signal, the output current signal is greater than the preset current signal, or the temperature signal is greater than the preset temperature signal, the enable signal is generated for the high-voltage power amplifier. The output of the high-voltage power amplifier is controlled by the enable signal to ensure the safe operation of the source measurement circuit.

[0067] It should be noted that the preset voltage signal, preset current signal, and preset temperature signal output by the main control module need to be converted into analog preset voltage signal, preset current signal, and preset temperature signal by the second digital-to-analog converter.

[0068] Furthermore, when the target object selects the voltage output mode (i.e., the first output port outputs a voltage signal) in the main control module, current clamping protection is implemented. Once it is detected that the output current is about to exceed the set clamping threshold, the first voltage signal output by the main control module is adjusted and reduced to keep the output current of the first output port constant at the clamping threshold size. Similarly, when the target object selects the current output mode (i.e., the first output port outputs a current signal) in the main control module, voltage clamping protection is implemented. Once it is detected that the output voltage is about to exceed the set clamping threshold, the first voltage signal output by the main control module is also adjusted and reduced to keep the output voltage of the first output port constant at the clamping threshold size.

[0069] This application also provides an electronic chip, including the circuit described in any of the above embodiments, and the method described in any of the above embodiments, which has the beneficial effects described in any of the above embodiments. This disclosure does not provide specific details on this aspect.

[0070] Unless otherwise expressly indicated by the context, the singular form of words used herein and in the appended claims includes the plural form, and vice versa. Thus, when referring to the singular, the plural form of the corresponding term is generally included. Similarly, the terms “comprising” and “including” shall be interpreted as including rather than exclusively. Likewise, the terms “including” and “or” shall be interpreted as including unless such interpretation is expressly prohibited herein. Where the term “example” is used herein, particularly when it follows a set of terms, the “example” is merely exemplary and illustrative and should not be considered exclusive or extensive.

[0071] Further aspects and scope of adaptation become apparent from the description provided herein. It should be understood that various aspects of this application may be implemented individually or in combination with one or more other aspects. It should also be understood that the descriptions and specific embodiments herein are for illustrative purposes only and are not intended to limit the scope of this application.

[0072] Several embodiments of this disclosure have been described in detail above. However, it is obvious that those skilled in the art can make various modifications and variations to the embodiments of this disclosure without departing from the spirit and scope of this disclosure. The scope of protection of this disclosure is defined by the appended claims.

Claims

1. A source measurement circuit, characterized in that, It includes at least a main control module, a first switch module, a voltage generation module, a voltage acquisition module, a current acquisition module, a resistor module, a first output port, and a second output port; The main control module is configured to, in response to receiving the operating voltage or current, current range and voltage range of the device under test submitted by the target object, generate a first voltage signal based on the operating voltage or current of the device under test, generate a first control signal to the first switch module based on the current range, generate a first gain adjustment signal to the voltage generation module based on the voltage range, and adjust the output first voltage signal based on the third voltage signal and the fourth voltage signal, wherein the device under test is a bare die on a wafer; The first switch module is configured to determine, based on the first control signal, the conduction mode of the resistor module between the output terminal of the voltage generation module and the first output port, and the conduction mode of the resistor module between the output terminal of the voltage generation module and the first input terminal of the current acquisition module. The voltage generation module is configured to receive the first voltage signal, adjust the range of the first voltage signal according to the first gain adjustment signal, and then output a second voltage signal. The voltage acquisition module is configured to acquire a third voltage signal at both ends of the first output port and the second output port, and to feed the acquired third voltage signal back to the main control module. The current acquisition module is configured to acquire the fourth voltage signal of the resistor module connected between the output terminal of the voltage generation module and the first input terminal of the current acquisition module, and to feed back the acquired fourth voltage signal to the main control module.

2. The circuit according to claim 1, characterized in that, The resistor module includes N resistors connected in series between the output terminal of the voltage generation module and the first output port. The first switch module includes a first single-pole multi-throw (SPMD) switch and a second SPMD switch. The first terminal of the first SPMD switch is electrically connected to the first output port, the second terminal of the first SPMD switch is electrically connected to the second terminal of the first resistor, the i-th terminal of the first SPMD switch is electrically connected to the second terminal of the (i-1)-th resistor, the first terminal of the second SPMD switch is electrically connected to the first input terminal of the current acquisition module, the second terminal of the second SPMD switch is electrically connected to the second terminal of the first resistor, and the i-th terminal of the second SPMD switch is electrically connected to the second terminal of the (i-1)-th resistor. The control terminals of the first and second SPMD switches receive the first control signal. .

3. The circuit according to claim 1, characterized in that, The voltage generation module includes a first digital-to-analog converter, an attenuator, a first operational amplifier, and a high-voltage power amplifier. The input terminal of the first digital-to-analog converter receives the first voltage signal. The output terminal of the first digital-to-analog converter is electrically connected to the input terminal of the attenuator. The output terminal of the attenuator is electrically connected to the input terminal of the first operational amplifier. The output terminal of the first operational amplifier is electrically connected to the input terminal of the high-voltage power amplifier. The output terminal of the high-voltage power amplifier outputs a second voltage signal. The control terminal of the attenuator receives the first gain adjustment signal.

4. The circuit according to claim 1, characterized in that, The voltage acquisition module includes a second operational amplifier, a third operational amplifier, a first high-voltage differential operational amplifier, a first fully differential operational amplifier, and a first analog-to-digital converter. The input terminal of the second operational amplifier is electrically connected to the first output port, and the output terminal of the second operational amplifier is electrically connected to the first input terminal of the first high-voltage differential operational amplifier. The input terminal of the third operational amplifier is electrically connected to the second output port, and the output terminal of the third operational amplifier is electrically connected to the second input terminal of the first high-voltage differential operational amplifier. The output terminal of the first high-voltage differential operational amplifier is electrically connected to the input terminal of the first fully differential operational amplifier, and the output terminal of the first fully differential operational amplifier is electrically connected to the input terminal of the first analog-to-digital converter. The output terminal of the first analog-to-digital converter outputs a third voltage signal.

5. The circuit according to claim 2, characterized in that, The current acquisition module includes a fourth operational amplifier, a fifth operational amplifier, a second high-voltage differential operational amplifier, a second fully differential operational amplifier, and a second analog-to-digital converter. The input terminal of the fourth operational amplifier is electrically connected to the output terminal of the voltage generation module, and the output terminal of the fourth operational amplifier is electrically connected to the first input terminal of the second high-voltage differential operational amplifier. The input terminal of the fifth operational amplifier is electrically connected to the first terminal of the second single-pole multi-throw switch, and the output terminal of the fifth operational amplifier is electrically connected to the second input terminal of the second high-voltage differential operational amplifier. The output terminal of the second high-voltage differential operational amplifier is electrically connected to the input terminal of the second fully differential operational amplifier, and the output terminal of the second fully differential operational amplifier is electrically connected to the input terminal of the second analog-to-digital converter. The output terminal of the second analog-to-digital converter outputs a fourth voltage signal.

6. The circuit according to claim 4, characterized in that, It also includes a first detection port, a second detection port, and a second switch module; The main control module is also configured to generate a second control signal to the second switch module based on the voltage sampling mode submitted by the target object; The second switching module is configured to determine that when the second control signal is high, the first input terminal of the voltage acquisition module is electrically connected to the first output port and the second input terminal of the voltage acquisition module is electrically connected to the second output port; and when the second control signal is low, the first input terminal of the voltage acquisition module is electrically connected to the first detection port and the second input terminal of the voltage acquisition module is electrically connected to the second detection port.

7. The circuit according to claim 6, characterized in that, The second switch module includes a first single-pole double-throw switch and a second single-pole double-throw switch. The first terminal of the first single-pole double-throw switch is electrically connected to the input terminal of the second operational amplifier, the second terminal of the first single-pole double-throw switch is electrically connected to the first output port, and the third terminal of the first single-pole double-throw switch is electrically connected to the first detection port. The first terminal of the second single-pole double-throw switch is electrically connected to the input terminal of the third operational amplifier, the second terminal of the second single-pole double-throw switch is electrically connected to the second output port, and the third terminal of the second single-pole double-throw switch is electrically connected to the second detection port.

8. The circuit according to claim 3, characterized in that, The voltage generation module also includes a circuit protection unit; The circuit protection unit is configured to acquire the output voltage signal, output current signal and temperature signal of the high-voltage power amplifier, and generate an enable signal to the high-voltage power amplifier based on the relationship between the output voltage signal and a preset voltage signal, the relationship between the output current signal and a preset current signal and the relationship between the temperature signal and a preset temperature signal.

9. The circuit according to claim 8, characterized in that, The circuit protection unit includes a second digital-to-analog converter, multiple comparators, and an OR gate. The second digital-to-analog converter receives a preset voltage signal, a preset current signal, and a preset temperature signal. The output terminal of the second digital-to-analog converter is electrically connected to the input terminal of a comparator, the output terminal of each comparator is electrically connected to the input terminal of an OR gate, and the output terminal of the OR gate outputs an enable signal.

10. An electronic chip, characterized in that, Includes the circuit described in any one of claims 1-9.

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