Semi-wrapped dust collecting device
By designing a semi-enclosed dust collection device, the shortcomings of traditional dust treatment methods have been solved, realizing automatic dust removal and multi-area dust collection, improving dust collection efficiency and equipment life, and improving the workshop environment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- SUZHOU DELPHI LASER
- Filing Date
- 2026-02-11
- Publication Date
- 2026-05-12
AI Technical Summary
Traditional dust handling methods suffer from incomplete collection and limited applicability, making it difficult to meet the high-precision requirements of modern semiconductor manufacturing.
A semi-enclosed dust collection device was designed, including a dust collection hood, a bridging adapter flange, a bellows adapter flange, an air blowing adjustment block, and a fan-shaped air blowing head. It is connected by a rotating shaft and an air pipe connector to achieve automatic dust removal and multi-zone dust collection, and is suitable for F100 environments.
It achieves automatic dust removal, reduces manual maintenance costs, improves dust collection efficiency, extends equipment life, improves the workshop environment, and reduces production costs and health risks.
Smart Images
Figure CN122007113A_ABST
Abstract
Description
Technical Field
[0001] This invention relates to a semi-enclosed dust collection device, and more particularly to a semi-enclosed dust collection device suitable for F100 environments. Background Technology
[0002] High-precision semiconductor equipment is the core foundation supporting modern wafer fabrication and a key enabling technology for the evolution of advanced process nodes, the realization of advanced processes, and ensuring chip yield. Its development level directly determines the performance ceiling of semiconductor manufacturing equipment. Currently, this field faces severe challenges such as approaching physical limits, complex multi-physics coupling, and high system control difficulty, but it also shows strong development trends in materials, control algorithms, intelligence, and domestic production. Breaking through the technological bottlenecks of high-precision platforms is of paramount strategic importance for the sustainable development of the global semiconductor industry and for ensuring regional supply chain security. Continuous investment in R&D and overcoming core technologies are crucial for relevant enterprises and countries to gain a competitive edge.
[0003] With the increasing sophistication of industrial production and the ever-improving environmental protection requirements, dust control has become a crucial aspect of enterprise production management. Traditional dust handling methods often suffer from incomplete collection and limited applicability, while specialized industrial dust collectors can effectively address these pain points.
[0004] In view of the above-mentioned shortcomings, the designer actively researched and innovated in order to create a new type of semi-enclosed dust collection device with greater industrial application value. Summary of the Invention
[0005] To address the aforementioned technical problems, the purpose of this invention is to provide a semi-enclosed dust collection device.
[0006] To achieve the above objectives, the present invention adopts the following technical solution:
[0007] A semi-enclosed dust collection device includes a dust collection hood. One side of the dust collection hood is connected to one side of a bridging transition flange, and the other side of the bridging transition flange is connected to one side of a bellows transition flange. The other side of the bellows transition flange is connected to an external bellows. The dust collection hood is connected to the bellows through the bridging transition flange and the bellows transition flange. An air blowing adjustment block is connected to the side of the dust collection hood adjacent to the bridging transition flange. A rotating shaft is passed through the air blowing adjustment block. An air blowing fixing block that rotates synchronously with the rotating shaft is fitted on the rotating shaft. An air pipe connector is connected to the air blowing fixing block. A through hole is opened on the dust collection hood on the same side as the air blowing adjustment block. A fan-shaped air blowing head connected to the air pipe connector is connected to the air blowing fixing block. The working end of the fan-shaped air blowing head extends into the dust collection hood through the through hole.
[0008] Preferably, in the semi-enclosed dust collection device, the bridging adapter flange is bolted to the dust collection hood.
[0009] Preferably, in the semi-enclosed dust collection device, the corrugated pipe transition flange is connected to the transition flange by bolts.
[0010] Preferably, in the semi-enclosed dust collection device, the corrugated pipe is connected to the corrugated pipe adapter flange via a hose clamp.
[0011] Preferably, in the semi-enclosed dust collection device, the bridging adapter flange is connected to the dust collection adjustment plate.
[0012] Preferably, in the semi-enclosed dust collection device, the dust collection adjustment plate has a fixing adjustment hole for connecting and fixing the bridging transition flange, and the bridging transition flange is connected to the adjustment hole by bolts.
[0013] Preferably, in the semi-enclosed dust collection device, the dust collection adjustment plate is connected to a dust collection reinforcing rib.
[0014] Preferably, in the semi-enclosed dust collection device, the air blowing adjustment block has an adjustment hole, the air blowing fixing block is connected to a fixing screw that moves within the adjustment hole, and the end of the rotating shaft is connected to a buckle.
[0015] Preferably, in the semi-enclosed dust collection device, the fastener is an E-type fastener.
[0016] Preferably, in the semi-enclosed dust collection device, the air blowing adjustment block is connected to the dust collection cover by bolts.
[0017] By means of the above-described solution, the present invention has at least the following advantages:
[0018] 1. This invention can achieve automatic dust removal, reduce manual maintenance costs, and is small in size and low in cost. It is suitable for domestic and imported environments with F100. The processing air blowing angle can be adjusted, which is conducive to accurately blowing away dust in the processing area. The overall dust collection mechanism can be adjusted up and down to better fit the product and improve dust collection efficiency.
[0019] 2. This invention can collect dust from multiple areas in a unified manner, avoiding secondary pollution. It also reduces dust wear on equipment, extends equipment lifespan, and indirectly lowers production and maintenance costs. Simultaneously, a clean workshop environment can improve employee morale and reduce health problems caused by dust.
[0020] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and to implement it in accordance with the contents of the specification, the preferred embodiments of the present invention are described in detail below with reference to the accompanying drawings. Attached Figure Description
[0021] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0022] Figure 1 This is a schematic diagram of the structure of the present invention;
[0023] Figure 2 yes Figure 1 A structural diagram from another perspective. Detailed Implementation
[0024] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0025] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.
[0026] Example
[0027] like Figure 1 and Figure 2 As shown, a semi-enclosed dust collection device includes a dust collection hood 1. One side of the dust collection hood 1 is connected to one side of a bridging transition flange 2, and the other side of the bridging transition flange 2 is connected to one side of a bellows transition flange 3. The other side of the bellows transition flange 3 is connected to an external bellows. The dust collection hood 1 is connected to the bellows through the bridging transition flange 2 and the bellows transition flange 3. An air blowing adjustment block 8 is connected to the side of the dust collection hood 1 adjacent to the bridging transition flange 2. A rotating shaft 10 is passed through the air blowing adjustment block 8. An air blowing fixing block 7 that rotates synchronously with the rotating shaft 10 is fitted on the rotating shaft 10. An air pipe connector 6 is connected to the air blowing fixing block 7. A through hole is opened on the dust collection hood 1 on the same side as the air blowing adjustment block 8. A fan-shaped air blowing head 9 connected to the air pipe connector 6 is connected to the air blowing fixing block 7. The working end of the fan-shaped air blowing head 9 extends into the dust collection hood 1 through the through hole.
[0028] In this embodiment, the bridging transition flange 2 is bolted to the dust collection hood 1; the bellows transition flange 3 is bolted to the bridging transition flange 2; the bellows is connected to the bellows transition flange 3 via a hose clamp; and the air blowing adjustment block 8 is bolted to the dust collection hood 1.
[0029] In this embodiment, the bridging transition flange 2 is connected to the dust collection adjustment plate 5. The dust collection adjustment plate 5 has a fixing adjustment hole for connecting and fixing the bridging transition flange 2. The bridging transition flange 2 is connected to the adjustment hole by bolts. At the same time, the dust collection adjustment plate 5 is connected to the dust collection reinforcing rib 4.
[0030] In this embodiment, the air blowing adjustment block 8 is provided with an adjustment hole 12, the air blowing fixing block 7 is connected with a fixing screw that moves within the adjustment hole, and the end of the rotating shaft 10 is connected with a buckle 11, wherein the buckle 11 is an E-type buckle 11.
[0031] During installation: Install the bridging adapter flange 2 onto the dust collection hood 1 using screws. Install the bellows adapter flange 3 onto the bridging adapter flange 2 using screws. Finally, connect the Φ50 bellows to the end of the bellows adapter flange 3 using a hose clamp; this forms the main body of the dust collection chamber. Fix the two dust collection reinforcing ribs 4 onto the dust collection adjusting plate 5 using screws; this forms the main body of the dust collection fixing bracket. Insert the rotating shaft 10 into the shaft hole (adjustment hole) of the air blowing adjusting block 8, and then into the shaft hole of the air blowing fixing block 7. Finally, install the E-type retaining ring 11 at the end of the rotating shaft 10. Install the air pipe connector 6 onto the air blowing fixing block 7, and then connect the air pipe to the connector of the direct-connect solenoid valve, connecting to the plant's air pressure. Thus, the air blowing fixing block 7 can be rotated and adjusted at a certain angle relative to the air blowing adjusting block 8. After each adjustment, tighten with screws; this forms the main body of the air blowing adjustment. Finally, install the main body of the dust collection chamber onto the main body of the dust collection fixing bracket, and then install the air blowing adjustment body onto the main body of the dust collection chamber. The structure of this invention adopts a semi-enclosed design, which is suitable for domestic and imported environments commonly used by F100.
[0032] The working principle of this invention is as follows:
[0033] In practical operation, the dust collection fan typically generates negative pressure through the high-speed rotation of its impeller. The impeller is driven by a motor; when the impeller rotates at high speed, the air between its blades is thrown out, forming a negative pressure zone at the fan inlet. Under this negative pressure, dust-laden gas from the surrounding environment is drawn into the fan inlet. In this invention, a Φ50 corrugated pipe connects the corrugated pipe adapter flange 3 to the dust collection fan inlet, allowing the dust generated during laser processing to be sucked away. During processing, the control device (PLC) controls the solenoid valve to open, and positive pressure air is input into the blowing regulating body through the air pipe. Air is blown towards the processing area through the fan-shaped blowing head 9 (the angle is adjustable), while the dust collection fan generates negative pressure to extract the blown dust.
[0034] This invention enables automatic dust removal, reducing manual maintenance costs. It is compact, low-cost, and suitable for both domestic and imported F100 environments. The processing air blowing angle is adjustable, facilitating precise dust removal from the processing area. The overall dust collection mechanism is adjustable vertically for a better fit to the product, improving dust collection efficiency. It can collect dust from multiple areas uniformly, avoiding secondary pollution. Furthermore, it reduces dust wear on equipment, extending its lifespan and indirectly lowering production and maintenance costs. Simultaneously, a clean workshop environment improves employee morale and reduces health problems caused by dust.
[0035] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0036] In the description of this application, it should be noted that the terms "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this application and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0037] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or vertical, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.
[0038] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.
[0039] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.
Claims
1. A semi-enclosed dust collection device, characterized in that: Includes a dust collection hood (1), one side of which is connected to one side of a bridging transition flange (2), the other side of which is connected to one side of a bellows transition flange (3), and the other side of which is connected to an external bellows. The dust collection hood (1) is connected to the bellows through the bridging transition flange (2) and the bellows transition flange (3). An air blowing adjustment block (8) is connected to the side of the dust collection hood (1) adjacent to the bridging transition flange (2). A rotating shaft (10) is connected to the air blowing adjustment block (8). An air blowing fixing block (7) that rotates synchronously with the rotating shaft (10) is fitted on the rotating shaft (10). An air pipe connector (6) is connected to the air blowing fixing block (7). A through hole is opened on the dust collection hood (1) on the same side as the air blowing adjustment block (8). A fan-shaped air blowing head (9) that communicates with the air pipe connector (6) is connected to the air blowing fixing block (7). The working end of the fan-shaped air blowing head (9) extends into the dust collection hood (1) through the through hole.
2. The semi-enclosed dust collection device according to claim 1, characterized in that: The bridging transition flange (2) is bolted to the dust collection hood (1).
3. The semi-enclosed dust collection device according to claim 1, characterized in that: The bellows transition flange (3) is connected to the transition flange (2) by bolts.
4. The semi-enclosed dust collection device according to claim 1, characterized in that: The bellows is connected to the bellows transition flange (3) by a hose clamp.
5. The semi-enclosed dust collection device according to claim 1, characterized in that: The bridging transition flange (2) is connected to the dust collection regulating plate (5).
6. The semi-enclosed dust collection device according to claim 5, characterized in that: The dust collection regulating plate (5) is provided with a fixing regulating hole for connecting and fixing the bridging transition flange (2). The bridging transition flange (2) is connected to the regulating hole by bolts.
7. A semi-enclosed dust collection device according to claim 5, characterized in that: The dust collection regulating plate (5) is connected to a dust collection reinforcing rib (4).
8. The semi-enclosed dust collection device according to claim 1, characterized in that: The blowing adjustment block (8) has an adjustment hole, the blowing fixing block (7) is connected to a fixing screw that moves in the adjustment hole, and the end of the rotating shaft (10) is connected to a buckle (11).
9. The semi-enclosed dust collection device according to claim 8, characterized in that: The buckle (11) is an E-type buckle (11).
10. The semi-enclosed dust collection device according to claim 1, characterized in that: The air blowing adjustment block (8) is bolted to the dust collection cover (1).