Vertically mounted mask automatic switching device

Abstract

The invention relates to a vertically mounted mask plate automatic switching device which comprises a fixed rack, a stock bin neatening and carrying mechanism is connected to the upper portion of the fixed rack, a fixed support is connected to the side edge of the fixed rack, and a carrying lifting mechanism used for carrying mask plates in the stock bin neatening and carrying mechanism is connected to one side of the fixed support. The other side of the fixing support is connected with a fixing plate, one side of the fixing plate which is opposite to the carrying lifting mechanism and is in butt joint with the mask plate on the carrying lifting mechanism is connected with an alignment adjusting platform mechanism, and an image hole is formed in the fixing plate. And the other side of the fixed plate is connected with an image assembly which is used for identifying the pattern shape of the mask plate through the image hole. According to the invention, the replacement efficiency can be improved.

Description

Technical Field

[0001] This invention relates to an automatic mask switching device for vertical installation. Background Technology

[0002] In the laser processing optical path of the semiconductor industry, mask replacement is generally done manually. This operation is neither convenient nor quick, and it is also quite cumbersome. Furthermore, operator replacement is time-consuming, difficult, and requires entering the machine, which is also unsafe.

[0003] In view of the above-mentioned shortcomings, the designer actively researched and innovated in order to create a new type of vertically installed automatic mask switching device, which would have greater industrial application value. Summary of the Invention

[0004] To address the aforementioned technical problems, the purpose of this invention is to provide a vertically mounted automatic mask switching device.

[0005] To achieve the above objectives, the present invention adopts the following technical solution:

[0006] A vertically mounted automatic mask switching device includes a fixed frame, a hopper organizing and transporting mechanism connected above the fixed frame, a fixed bracket connected to the side of the fixed frame, a transport lifting mechanism for transporting masks within the hopper organizing and transporting mechanism connected to one side of the fixed bracket, a fixed plate connected to the other side of the fixed bracket, an alignment adjustment platform mechanism connected to one side of the fixed plate opposite to and abutting the transport lifting mechanism and the mask on the transport lifting mechanism, an image hole provided on the fixed plate, and an image component for identifying the shape of the mask graphic connected to the other side of the fixed plate through the image hole.

[0007] Preferably, in the vertically installed automatic mask switching device, the hopper straightening and transporting mechanism includes a hopper horizontal moving screw module, the sliding block of the hopper horizontal moving screw module is slidably connected to a hopper slide plate, and a hopper straightening and transporting component is connected to the hopper slide plate.

[0008] Preferably, in the vertically installed automatic mask switching device, the hopper organizing and transporting component includes a hopper box with a top opening. The hopper box has several equidistant placement slots for placing the mask. A push rod slot communicating with the placement slot is formed on the outer wall of the hopper box. A push rod organizing component is movably connected within the push rod slot. Several push holes are formed on the left and right walls of the hopper box, each push hole corresponding to a placement slot and connected to it. A left push cylinder assembly and a right push cylinder assembly for pressing the mask are connected to the left and right sides of the hopper box, respectively, passing through the push holes. A stop bar and a sensor are connected to the bottom of the hopper box.

[0009] Preferably, in the vertically mounted automatic mask switching device, the push rod straightening assembly includes a front push rod side plate, a rear push rod side plate, and a straightening push rod. The straightening push rod is slidably connected in a push rod groove. The front end and rear end of the straightening push rod are respectively connected to the front push rod side plate and the rear push rod side plate. A push-material straightening cylinder is connected to the outer side of the front push rod side plate. The drive shaft of the push-material straightening cylinder passes through the front push rod side plate and is connected to a hopper box. A plunger fixing block that moves in the placement groove is connected to the straightening push rod. A plunger for pressing the mask is connected to the plunger fixing block. Guide rods pass through the front push rod side plate and the rear push rod side plate and the end face of the corresponding hopper box.

[0010] Preferably, in the vertically mounted automatic mask switching device, the left pusher cylinder assembly includes a pusher cylinder, a pusher slider is slidably connected to the pusher cylinder, a pusher plate is connected to the pusher slider, and a plurality of roller fixing blocks corresponding one-to-one with the pusher holes are connected to the pusher plate. Pusher rollers that pass through the pusher holes and move in the placement groove are connected to the roller fixing blocks.

[0011] Preferably, in the vertically installed automatic mask switching device, the transport lifting mechanism includes a transport lifting fixed plate, which is vertically connected to a fixed bracket. A vertical moving screw module is connected to the transport lifting fixed plate, a transport sliding plate is slidably connected to the vertical moving screw module, a transport fixed plate is connected to the transport sliding plate, a suction cup fixed plate is connected to the transport fixed plate, a suction cup for adsorbing the mask is connected to the suction cup fixed plate, and an anti-fall component is connected to the suction cup fixed plate located above the suction cup.

[0012] Preferably, in the vertically mounted automatic mask switching device, the anti-fall component includes an anti-fall cylinder, an anti-fall movable hole is provided on the suction cup fixing plate, the anti-fall cylinder is connected to the upper end of the suction cup fixing plate, an anti-fall rotating shaft is connected in the anti-fall movable hole, an anti-fall hook that rotates around the anti-fall rotating shaft is connected to the anti-fall rotating shaft, an anti-fall hole is provided at the upper end of the anti-fall hook, and the drive shaft of the anti-fall cylinder is movably connected in the anti-fall hole.

[0013] Preferably, in the vertically installed automatic mask switching device, the alignment adjustment platform mechanism includes an alignment platform connected to a fixed plate, and an adsorption clamping assembly connected to the working end of the alignment platform and connected to the transport and lifting mechanism.

[0014] Preferably, in the vertically mounted automatic mask switching device, the adsorption clamping assembly includes an adsorption clamping fixing plate. The adsorption clamping fixing plate has a through hole aligned with the image hole. A soft suction cup is connected to the adsorption clamping fixing plate around the through hole. Clamping cylinders are connected to the adsorption clamping fixing plate on the left, lower and right sides of the soft suction cup. The driving wheel of the clamping cylinder is connected to the clamping pressure block. A tension spring is connected between the clamping pressure block and the adsorption clamping fixing plate.

[0015] Preferably, in the vertically mounted automatic mask switching device, the image component includes an image moving screw module, an image moving block is slidably connected to the image moving screw module, an image connecting plate movable in the image aperture is connected to the image moving block, a camera is connected to the image connecting plate through a lens clamp, and a light source that cooperates with the camera is connected to the image connecting plate.

[0016] By means of the above-described solution, the present invention has at least the following advantages:

[0017] This invention has a simple structure and is suitable for equipment that frequently needs to change photomasks. It can replace manual replacement, is simple and quick, has a stable, safe and efficient structure, and can achieve automated operation, effectively improving efficiency.

[0018] The above description is merely an overview of the technical solution of the present invention. In order to better understand the technical means of the present invention and to implement it in accordance with the contents of the specification, the preferred embodiments of the present invention are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0019] To more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present invention and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0020] Figure 1 This is a schematic diagram of the structure of the present invention;

[0021] Figure 2 This is a schematic diagram of the structure of the material handling mechanism of the present invention;

[0022] Figure 3 This is a schematic diagram of the structure of the silo organizing and handling component of the present invention;

[0023] Figure 4 This is a schematic diagram of the right pusher cylinder assembly of the present invention;

[0024] Figure 5 This is a schematic diagram of the structure of the left pusher cylinder assembly of the present invention;

[0025] Figure 6 This is a schematic diagram of the structure of the regular push rod of the present invention;

[0026] Figure 7 This is a schematic diagram of the transport and lifting mechanism of the present invention;

[0027] Figure 8 This is a schematic diagram of the fall protection component of the present invention;

[0028] Figure 9 This is a schematic diagram of the alignment adjustment platform mechanism of the present invention;

[0029] Figure 10 This is a schematic diagram of the adsorption clamping assembly of the present invention;

[0030] Figure 11 This is a schematic diagram of the imaging component of the present invention. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0032] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.

[0033] Example

[0034] like Figures 1 to 11 As shown, a vertically mounted automatic mask switching device includes a fixed frame 5. A hopper straightening and transporting mechanism 1 is connected above the fixed frame 5. A fixed bracket 6 is connected to the side of the fixed frame 5. A transport lifting mechanism 2 for transporting the mask 137 inside the hopper straightening and transporting mechanism 1 is connected to one side of the fixed bracket 6. A fixed plate 7 is connected to the other side of the fixed bracket 6. An alignment adjustment platform mechanism 3 is connected to one side of the fixed plate 7, which is opposite to and docks with the mask on the transport lifting mechanism 2. An image hole is opened on the fixed plate 7. An image component 4 for recognizing the shape of the mask graphic is connected to the other side of the fixed plate 7 through the image hole.

[0035] In an embodiment, the silo straightening and handling mechanism 1 includes a silo horizontal moving screw module 11, the sliding block of the silo horizontal moving screw module 11 is slidably connected to a silo slide plate 12, and a silo straightening and handling component 13 is connected to the silo slide plate 12.

[0036] The material hopper straightening and handling assembly can straighten the mask. The material hopper straightening and handling assembly 13 includes a material hopper box 131 with a top opening. The material hopper box 131 has several equally spaced placement slots 132 for placing the mask. The outer wall of the material hopper box 131 has a push rod slot that communicates with the placement slot. A push rod straightening assembly 133 is movably connected in the push rod slot. The left and right walls of the material hopper box 131 have several push holes. Each push hole corresponds to each placement slot 132 and they are connected to each other. The left and right sides of the material hopper box 131, which pass through the push holes, are respectively connected to a left push cylinder assembly 134 and a right push cylinder assembly 135 for pressing the mask. A stop bar 136 is connected to the bottom of the material hopper box 131. A sensor is connected to the bottom of the material hopper box 131.

[0037] The push rod straightening assembly 133 includes a front push rod side plate 1331, a rear push rod side plate 1332, and a straightening push rod 1333. The straightening push rod 1333 is slidably connected in the push rod groove. The front end and rear end of the straightening push rod 1333 are respectively connected to the front push rod side plate 1331 and the rear push rod side plate 1332. A push straightening cylinder 1334 is connected to the outer side of the front push rod side plate 1331. The drive shaft of the push straightening cylinder 1334 passes through the front push rod side plate 1331 and is connected to the hopper box 131. A plunger fixing block 1335 that moves in the placement groove 132 is connected to the straightening push rod 1333. A plunger 1336 for pressing the mask plate is connected to the plunger fixing block 1335. A guide rod passes through the front push rod side plate 1331 and the rear push rod side plate 1332 and the end face of the corresponding hopper box 131.

[0038] The left pusher cylinder assembly 134 includes a pusher cylinder 1341, a pusher slider 1342 slidably connected to the pusher cylinder 1341, a pusher plate 1343 connected to the pusher slider 1342, a plurality of roller fixing blocks 1344 corresponding one-to-one with the pusher holes connected to the pusher plate 1343, and a pusher roller 1345 passing through the pusher hole and moving in the placement groove connected to the roller fixing block 1344.

[0039] The hopper box 131 consists of four hopper end plates 1311, hopper end plates 1312, hopper side plates 1313 and hopper side plates 1314 connected end to end to form a hopper box with an open top.

[0040] The left pusher cylinder assembly 134 and the right pusher cylinder assembly 135 have similar structures, except that the roller fixing block in the right pusher cylinder assembly 135 adopts a Y-shaped structure, while the roller fixing block in the left pusher cylinder assembly 134 adopts an I-shaped structure. Furthermore, they are positioned differently on the mask. The left pusher cylinder assembly 134 is positioned on the middle of the mask, while the right pusher cylinder assembly 135 is positioned on the upper and lower parts of the mask. By having them correspond to different positions on the mask, stable clamping is achieved.

[0041] In this embodiment, the transport and lifting mechanism is mainly used to quickly remove the mask from the material storage and transport mechanism. The specific structure is as follows: the transport and lifting mechanism 2 includes a transport and lifting fixed plate 21, which is vertically connected to the fixed bracket 6. A vertical moving screw module 22 is connected to the transport and lifting fixed plate 21. A transport slide plate 23 is slidably connected to the vertical moving screw module 22. A transport fixed plate 24 is connected to the transport slide plate 23. A suction cup fixed plate 25 is connected to the transport fixed plate 24. A suction cup 26 for adsorbing the mask is connected to the suction cup fixed plate 25. An anti-fall component 27 is connected to the suction cup fixed plate 25 located above the suction cup 26.

[0042] To prevent the mask from potentially falling during transit, a fall protection assembly is used. This assembly includes a fall protection cylinder 271. The suction cup fixing plate 25 has a fall protection movable hole. The fall protection cylinder 271 is connected to the upper end of the suction cup fixing plate 25. A fall protection rotating shaft 272 is connected inside the fall protection movable hole. A fall protection hook 273 that rotates around the fall protection shaft 272 is connected to the shaft. A fall protection hole is provided at the upper end of the fall protection hook 273. The drive shaft of the fall protection cylinder 271 is movably connected inside the fall protection hole.

[0043] In this embodiment, the alignment adjustment platform mechanism 3 includes an alignment platform 31, which is connected to the fixed plate 7. The working end of the alignment platform 31 is connected to an adsorption clamping assembly 32 that is in contact with the transport and lifting mechanism 2.

[0044] The product can be adsorbed by the adsorption clamping assembly 32. The adsorption clamping assembly 32 includes an adsorption clamping fixing plate 321. The adsorption clamping fixing plate 321 has a through hole aligned with the image hole. A soft suction cup 322 is connected to the adsorption clamping fixing plate 321 around the through hole. A clamping cylinder 323 is connected to the adsorption clamping fixing plate 321 to the left, lower and right of the soft suction cup 322. The driving wheel of the clamping cylinder 323 is connected to the clamping pressure block 324. A tension spring 325 is connected between the clamping pressure block 324 and the adsorption clamping fixing plate 321.

[0045] In an embodiment, the imaging component 4 includes an imaging movement screw module 41, an imaging movement block 42 is slidably connected to the imaging movement screw module 41, an imaging connection plate that moves in the imaging aperture is connected to the imaging movement block 42, a camera 44 is connected to the imaging connection plate through a lens clamp 43, and a light source 45 that cooperates with the camera is connected to the imaging connection plate.

[0046] The working principle of this invention is as follows:

[0047] In practice, the mask is first placed in the placement slot of any of the hopper boxes. There are three baffles at the bottom of the hopper box, with the middle baffle being higher than the other two. The bottom of the mask has a clearance groove. If the placement direction is incorrect, the two sensors directly below the mask will not be able to detect it at the same time, and the placement will be judged as abnormal. Only when the mask is placed in a fixed direction can it be placed at the bottom of the hopper box, and the two sensors will be able to detect it at the same time, ensuring that the orientation of multiple masks is consistent.

[0048] The air-pressing and leveling cylinder moves, pushing the push rod leveling assembly. The plungers on the push rod leveling assembly press the mask plate tightly. Three plungers push the same mask plate simultaneously to ensure stable flattening and positioning. The back of the mask plate is attached to the inner wall of the placement slot. The air-pressing and leveling cylinder receives a positioning signal, completing the leveling in one direction. Meanwhile, the left and right push cylinder assemblies are simultaneously ventilated, both pushing towards the hopper box. The right push cylinder assembly has two rollers, and the left push cylinder assembly has one roller. A total of three rollers on both sides ensure that the push does not tilt. The mask plate is pushed to the middle position of the hopper, and the cylinder receives a positioning signal, completing the leveling action in the other direction. The mask plate leveling action is now complete.

[0049] To facilitate the placement and removal of the mask, the placement slot inside the hopper box needs to be larger than the size of the mask, thus requiring a regularization function.

[0050] The material handling mechanism moves the material box along with the material box, moving the mask to be retrieved below the handling lifting mechanism. The handling lifting mechanism, along with the suction cups, moves downwards to the side of the mask inside the material box. The vacuum of the four suction cups is opened to adsorb and fix the mask. Then, the anti-fall cylinder is vented and extended, pushing the anti-fall hook to swing. After swinging, the anti-fall hook extends into the hole of the mask. Because it is a vertical adsorption, if the vacuum is suddenly broken during the handling process, the mask will fall. The anti-fall hook can catch the mask when the vacuum is broken to prevent it from falling.

[0051] Then, the cylinders in the left pusher cylinder assembly, the right pusher cylinder assembly, and the push rod straightening assembly are simultaneously vented and opened to release the mask plate; next, the transport and lifting mechanism moves the mask plate upward. After the mask plate leaves the hopper box, the left pusher cylinder assembly, the right pusher cylinder assembly, and the push rod straightening assembly perform a straightening action to straighten and press the other mask plates in the hopper box.

[0052] The hopper handling mechanism moves the hopper box back to a safe position, ensuring there are no obstructions below the lifting mechanism. Then, the suction cups in the lifting mechanism move the mask plate downwards to a designated position (opposite to the alignment platform mechanism). The central axis of the alignment platform mechanism pushes the suction clamping assembly horizontally. The soft suction cups stop upon contacting the mask plate, and the vacuum of the four soft suction cups opens, adsorbing and fixing the mask plate. The anti-fall cylinder retracts, pushing the anti-fall hook to swing, and the hook moves out of the hole in the mask plate. The vacuum of the four suction cups closes, and the lifting mechanism moves upwards to a safe position and stops. Then, the three suction clamping assemblies simultaneously clamp the mask plate, as the mask plate is side-suction oriented. In case of vacuum abnormalities, the mask may fall. Therefore, a cylinder clamping structure is added, and the cylinder is also equipped with two tension springs to ensure that the mask will not fall even when there is no vacuum in the suction cup or no air in the cylinder. The tension springs press the mask tightly, providing double protection against fall and ensuring the mask remains stable during use. Finally, the image translation screw module in the imaging component moves the camera horizontally to identify the shape of the mask. The control device automatically controls the alignment platform to move and adjust the position and orientation of the mask to the set position before normal use. If the mask needs to be replaced, the used mask must first be removed and placed in the raw material bin, and then retrieved from the designated bin.

[0053] This invention has a simple structure and is suitable for equipment that frequently needs to change photomasks. It can replace manual replacement, is simple and quick, has a stable, safe and efficient structure, and can achieve automated operation, effectively improving efficiency.

[0054] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0055] In the description of this application, it should be noted that the terms "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product is in use. They are used only for the convenience of describing this application and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0056] Furthermore, terms such as "horizontal" and "vertical" do not imply that components must be absolutely horizontal or vertical, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal than "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0057] In the description of this application, it should also be noted that, unless otherwise expressly specified and limited, the terms "set up," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0058] The above description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the technical principles of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A vertically mounted automatic mask switching device, characterized in that: The device includes a fixed frame (5), a material storage and handling mechanism (1) connected above the fixed frame (5), a fixed bracket (6) connected to the side of the fixed frame (5), a handling and lifting mechanism (2) for handling the mask inside the material storage and handling mechanism (1) connected to one side of the fixed bracket (6), a fixed plate (7) connected to the other side of the fixed bracket (6), an alignment and adjustment platform mechanism (3) connected to one side of the fixed plate (7) which is opposite to and docks with the mask on the handling and lifting mechanism (2), an image hole is provided on the fixed plate (7), and an image component (4) for identifying the shape of the mask graphic is connected to the other side of the fixed plate (7) through the image hole.

2. The vertically mounted automatic mask switching device according to claim 1, characterized in that: The silo organizing and transporting mechanism (1) includes a silo horizontal moving screw module (11), the sliding block of the silo horizontal moving screw module (11) is slidably connected to a silo slide plate (12), and a silo organizing and transporting component (13) is connected to the silo slide plate (12).

3. The vertically mounted automatic mask switching device according to claim 2, characterized in that: The material storage and handling assembly (13) includes a material storage box (131) with an open top. The material storage box (131) has several equally spaced placement slots (132) for placing the mask. The outer wall of the material storage box (131) has a push rod slot that communicates with the placement slot. A push rod straightening assembly (133) is movably connected in the push rod slot. Several push holes are respectively opened on the left and right walls of the material storage box (131). Each push hole corresponds to each placement slot (132) and they are connected to each other. The left and right sides of the material storage box (131) through the push holes are respectively connected to a left push cylinder assembly (134) and a right push cylinder assembly (135) for pushing the mask. A stop bar (136) is connected to the bottom of the material storage box (131). A sensor is connected to the bottom of the material storage box (131).

4. The vertically mounted automatic mask switching device according to claim 3, characterized in that: The push rod straightening assembly (133) includes a front push rod side plate (1331), a rear push rod side plate (1332), and a straightening push rod (1333). The straightening push rod (1333) is slidably connected in the push rod groove. The front end and rear end of the straightening push rod (1333) are respectively connected to the front push rod side plate (1331) and the rear push rod side plate (1332). A pusher straightening cylinder (1334) is connected to the outer side of the front push rod side plate (1331). The drive shaft of 334 passes through the front push rod side plate (1331) and is connected to the hopper box (131). The regular push rod (1333) is connected to a plunger fixing block (1335) that moves in the placement groove (132). The plunger fixing block (1335) is connected to a plunger (1336) for pressing the mask plate. The front push rod side plate (1331) and the rear push rod side plate (1332) are connected to the end face of the corresponding hopper box (131) by a guide rod.

5. The vertically mounted automatic mask switching device according to claim 3, characterized in that: The left pusher cylinder assembly (134) includes a pusher cylinder (1341), a pusher slider (1342) is slidably connected to the pusher cylinder (1341), a pusher plate (1343) is connected to the pusher slider (1342), a plurality of roller fixing blocks (1344) corresponding one-to-one with the pusher holes are connected to the pusher plate (1343), and a pusher roller (1345) passing through the pusher hole and moving in the placement groove is connected to the roller fixing block (1344).

6. The vertically mounted automatic mask switching device according to claim 1, characterized in that: The transport lifting mechanism (2) includes a transport lifting fixed plate (21), which is vertically connected to a fixed bracket (6). A vertical moving screw module (22) is connected to the transport lifting fixed plate (21), and a transport sliding plate (23) is slidably connected to the vertical moving screw module (22). A transport fixed plate (24) is connected to the transport fixed plate (24), and a suction cup fixed plate (25) is connected to the transport fixed plate (25). A suction cup (26) for adsorbing the pressure plate is connected to the suction cup fixed plate (25), and an anti-fall component (27) is connected to the suction cup fixed plate (25) located above the suction cup (26).

7. The vertically mounted automatic mask switching device according to claim 6, characterized in that: The fall protection component (27) includes a fall protection cylinder (271). A fall protection movable hole is provided on the suction cup fixing plate (25). The fall protection cylinder (271) is connected to the upper end of the suction cup fixing plate (25). A fall protection rotating shaft (272) is connected in the fall protection movable hole. A fall protection hook (273) that rotates around the fall protection rotating shaft (272) is connected on the fall protection rotating shaft (272). A fall protection hole is provided at the upper end of the fall protection hook (273). The drive shaft of the fall protection cylinder (271) is movably connected in the fall protection hole.

8. The vertically mounted automatic mask switching device according to claim 1, characterized in that: The alignment adjustment platform mechanism (3) includes an alignment platform (31), which is connected to a fixed plate (7). The working end of the alignment platform (31) is connected to an adsorption clamping assembly (32) that is in contact with the transport lifting mechanism (2).

9. The vertically mounted automatic mask switching device according to claim 8, characterized in that: The adsorption clamping assembly (32) includes an adsorption clamping fixing plate (321). The adsorption clamping fixing plate (321) has a through hole aligned with the image hole. A soft suction cup (322) is connected to the adsorption clamping fixing plate (321) around the through hole. A clamping cylinder (323) is connected to the adsorption clamping fixing plate (321) on the left, lower and right sides of the soft suction cup (322). The driving wheel of the clamping cylinder (323) is connected to the clamping block (324). A tension spring (325) is connected between the clamping block (324) and the adsorption clamping fixing plate (321).

10. The vertically mounted automatic mask switching device according to claim 1, characterized in that: The imaging component (4) includes an imaging moving screw module (41), an imaging moving block (42) is slidably connected to the imaging moving screw module (41), an imaging connecting plate that moves in the imaging hole is connected to the imaging moving block (42), a camera (44) is connected to the imaging connecting plate through a lens clamp (43), and a light source (45) that works with the camera is connected to the imaging connecting plate.

Images