Multifunctional vacuum coating machine

Abstract

The invention provides a multifunctional vacuum coating machine, and belongs to the technical field of thin film deposition. Comprising an electrical control cabinet and a vacuum chamber installed on one side of the electrical control cabinet, a coating evaporator is arranged at the bottom of the vacuum chamber, and a coating turnover assembly is installed at the top end of the vacuum chamber; the coating overturning assembly comprises a driving assembly, a first rotating shaft, a second rotating shaft, a plurality of first clamping assemblies installed on the outer surface of the first rotating shaft and a plurality of second clamping assemblies installed on the outer surface of the second rotating shaft. According to the invention, the coating overturning assembly is mounted at the top end of the vacuum chamber, the driving assembly drives the first rotating shaft and the second rotating shaft to rotate reversely, and the first clamping assembly and the second clamping assembly which are arranged in a staggered manner as well as the design of the first avoiding groove and the second avoiding groove are matched, so that double-sided continuous coating can be realized without shutdown; the operation process is simplified, the labor cost and the time cost are saved, the damage of manual touch to the coated part is reduced, and the product quality is improved.

Description

Technical Field

[0001] This invention belongs to the field of thin film deposition technology, specifically relating to a multifunctional vacuum coating machine. Background Technology

[0002] In the field of thin film deposition, vacuum coating equipment is widely used in various industries such as lenses and optical lenses due to its advantages such as high coating quality and low impurity contamination. Most existing vacuum coating equipment consists of a vacuum chamber and a control unit. Its core function is to achieve thin film deposition on the surface of the workpiece by evacuating the vacuum chamber to a high vacuum state and using an evaporator.

[0003] Most existing coating equipment uses a single clamping mechanism, which can only coat one side of the part at a time. After coating one side, the machine needs to be stopped, the vacuum chamber opened, and the coated part needs to be manually flipped over before vacuuming and coating again. This is not only cumbersome and time-consuming, significantly reducing production efficiency, but also causes unstable vacuum due to repeated opening and closing of the vacuum chamber, affecting the consistency of the coating layer. In addition, the coating surface is easily touched during manual flipping, causing damage to the coated part and affecting product quality. Summary of the Invention

[0004] (1) Technical problems to be solved

[0005] To address the shortcomings of existing technologies, the present invention aims to provide a multifunctional vacuum coating machine that solves the problem that existing coating machines can only coat one side of a part at a time. After coating one side, the machine needs to be stopped, the vacuum chamber opened, and the coated part manually flipped over, which significantly reduces production efficiency. At the same time, the manual flipping process can easily damage the coated surface, affecting product quality.

[0006] (2) Technical solution

[0007] To solve the above-mentioned technical problems, the present invention provides a multifunctional vacuum coating machine, including an electrical control cabinet and a vacuum chamber installed on one side of the electrical control cabinet. A coating evaporator is provided at the bottom of the vacuum chamber, and a coating flipping assembly is installed at the top of the vacuum chamber.

[0008] The coating flipping assembly includes a driving assembly, a first rotating shaft, a second rotating shaft, a plurality of first clamping assemblies mounted on the outer surface of the first rotating shaft, and a plurality of second clamping assemblies mounted on the outer surface of the second rotating shaft. The plurality of first clamping assemblies and the plurality of second clamping assemblies are arranged alternately. Both the first clamping assemblies and the second clamping assemblies are used to fix the coated part. The first clamping assembly has a first clearance groove corresponding to the second rotating shaft, and the second clamping assembly has a second clearance groove corresponding to the first rotating shaft. The driving assembly is used to make the first rotating shaft and the second rotating shaft rotate in opposite directions to achieve double-sided coating.

[0009] Preferably, the drive assembly includes a first mounting base, a second mounting base, and a drive motor fixedly connected inside the first mounting base. One end of the first and second rotating shafts is rotatably connected to the first mounting base via bearings, and the other end of the first and second rotating shafts is rotatably connected to the second mounting base via bearings. The first and second rotating shafts are located inside the first mounting base and are respectively fixedly connected to a driving gear and a driven gear. The driving gear and the driven gear are meshed together, and the second rotating shaft is drivenly connected to the output end of the drive motor.

[0010] Preferably, both the first clamping assembly and the second clamping assembly include a fixed base, and two clamping rods are provided on the fixed base by means of an adjustment component, and a slot is provided at the end of each clamping rod away from the fixed base.

[0011] Preferably, the fixed base has a U-shaped structure, and the adjusting assembly includes a guide rod fixedly connected between the inner walls of the two sides of the fixed base and a lead screw rotatably connected by a bearing. An adjusting block is fixedly connected to the middle of the lead screw, and left-hand threads and right-hand threads are respectively opened at both ends of the outer surface of the lead screw. Two clamping rods are respectively sleeved on the two ends of the guide rod and the lead screw. The guide rod is slidably connected to the clamping rod, and the lead screw is threadedly connected to the clamping rod.

[0012] Preferably, the clamping rod includes a connecting part, a bending part and a clamping part connected in sequence, and the slot is formed on the clamping part.

[0013] Preferably, a positioning rod is fixedly connected to one of the clamping rods, and the other end of the positioning rod passes through another clamping rod.

[0014] Preferably, a pressure plate is provided in the slot, and two vertical rods are fixedly connected to the pressure plate and a screw is rotatably connected to it through a bearing. Both the vertical rods and the screw pass through the clamping rod. The vertical rods are slidably connected to the clamping rod, and the screw is threadedly connected to the clamping rod. A handle is fixedly connected to the screw.

[0015] Preferably, the slot, positioning rod, and pressure plate are all fixedly connected with soft pads on the side near the coated part.

[0016] Preferably, a rotating ring is rotatably connected to the top of the vacuum chamber via a bearing, a gear ring is fixedly connected to the bottom of the rotating ring, a first motor is fixedly connected to the inner wall of the vacuum chamber, a first gear is fixedly connected to the output end of the first motor and meshes with the gear ring, and the first mounting base and the second mounting base are fixedly connected to the upper surface of the rotating ring by screws.

[0017] Preferably, the vacuum chamber includes a tank and a cover plate that is fixedly connected by a locking buckle, and the tank is provided with an observation window and an air extraction port.

[0018] Beneficial effects

[0019] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0020] In the above solution, by installing a coating flipping component at the top of the vacuum chamber and driving the first and second rotating shafts to rotate in opposite directions through a drive component, and with the staggered arrangement of the first and second clamping components, as well as the design of the first and second clearance grooves, the coating parts can be flipped without stopping the machine, and continuous coating can be completed on both sides of the coating parts. This not only simplifies the operation process and saves labor and time costs, but also reduces damage to the coating parts caused by manual touch and improves product quality.

[0021] In the above scheme, both the first clamping component and the second clamping component are equipped with adjustment components. The left-hand and right-hand threads at both ends of the lead screw are designed so that rotating the adjustment block can drive the two clamping rods to move closer or further apart, thereby adjusting the clamping distance. At the same time, the pressure plate in the slot can be adjusted in height by the screw, which can flexibly adapt to coating parts of different thicknesses without replacing the clamping components, thus improving the versatility of the coating machine.

[0022] In the above solution, a rotating ring is set at the top of the vacuum chamber. The first motor drives the first gear to mesh with the gear ring, which can drive the rotating ring, the coating flipping component and the clamped coating part to rotate synchronously. This allows all parts of the coating part to receive the evaporated material evenly, effectively solving the problem of uneven coating thickness caused by the fixed setting of the coating part in the existing equipment. It significantly improves the consistency and uniformity of the coating layer, enhances the adhesion of the coating layer and improves the product qualification rate. Attached Figure Description

[0023] Figure 1 This is a three-dimensional structural diagram of a multi-functional vacuum coating machine.

[0024] Figure 2 This is a schematic diagram of the cross-sectional structure of the vacuum chamber of a multi-functional vacuum coating machine.

[0025] Figure 3 For multi-functional vacuum coating machine Figure 2 A magnified structural diagram of point A in the middle.

[0026] Figure 4 This is a schematic diagram of the internal structure of the vacuum chamber of a multi-functional vacuum coating machine.

[0027] Figure 5 This is a schematic diagram of the coating flipping component of a multi-functional vacuum coating machine.

[0028] Figure 6 This is a schematic cross-sectional view of the coating flipping component of a multi-functional vacuum coating machine.

[0029] Figure 7 For multi-functional vacuum coating machine Figure 6 A magnified structural diagram at point B in the middle.

[0030] Figure 8 This is a schematic diagram of the clamping rod structure of a multi-functional vacuum coating machine.

[0031] Figure 9 This is a schematic diagram of the cross-sectional structure of the clamping rod of a multi-functional vacuum coating machine.

[0032] The labels in the attached diagram are as follows: 1. Electrical control cabinet; 2. Vacuum chamber; 3. Coating evaporator; 4. Coating flipping assembly; 5. Rotating ring; 6. Gear ring; 7. First motor; 8. First gear; 201. Tank body; 202. Lock; 203. Cover plate; 204. Observation window; 205. Vacuum port; 11. Drive assembly; 12. First rotating shaft; 13. Second rotating shaft; 14. First clamping assembly; 15. Second clamping assembly; 16. First clearance groove; 17. Second clearance groove; 111. First mounting base; 112. 113. Mounting base; 114. Drive motor; 115. Drive gear; 116. Driven gear; 151. Fixed base; 152. Adjustment assembly; 153. Clamping rod; 154. Slot; 155. Positioning rod; 156. Pressure plate; 157. Vertical rod; 158. Screw; 159. Handle; 160. First soft pad; 161. Second soft pad; 162. Third soft pad; 1521. Guide rod; 1522. Lead screw; 1523. Adjustment block; 1531. Connecting part; 1532. Bending part; 1533. Clamping part.

[0033] As shown in the figure, specific structures and devices are labeled in the figure to clearly illustrate the structure of the embodiments of the present invention. However, this is only for illustrative purposes and is not intended to limit the present invention to the specific structure, device and environment. Those skilled in the art can adjust or modify these devices and environments according to specific needs, and such adjustments or modifications are still included in the scope of the appended claims. Detailed Implementation

[0034] An embodiment of the present invention provides a multifunctional vacuum coating machine, including an electrical control cabinet 1 and a vacuum chamber 2 installed on one side of the electrical control cabinet 1. A coating evaporator 3 is provided at the bottom of the vacuum chamber 2, and a coating flipping assembly 4 is installed at the top of the vacuum chamber 2. The vacuum chamber 2 includes a tank 201 and a cover plate 203 that is sealed and fixedly connected by a latch 202. An observation window 204 and a vacuum port 205 are provided on the tank 201. The interior of the vacuum chamber 2 is used to be evacuated to a high vacuum state to complete thin film deposition. The electrical control cabinet 1 integrates a PLC, a power module, a vacuum gauge and various control components, which are responsible for monitoring and adjusting key parameters such as vacuum degree, temperature and coating time of the vacuum chamber 2 to ensure stable operation of the equipment.

[0035] The coating flipping assembly 4 includes a drive assembly 11, a first rotating shaft 12, a second rotating shaft 13, a plurality of first clamping assemblies 14 mounted on the outer surface of the first rotating shaft 12, and a plurality of second clamping assemblies 15 mounted on the outer surface of the second rotating shaft 13. The plurality of first clamping assemblies 14 and the plurality of second clamping assemblies 15 are staggered. The gap between two first clamping assemblies 14 is greater than the width of a second clamping assembly 15, and the gap between two second clamping assemblies 15 is greater than the width of a first clamping assembly 14. Both the first clamping assembly 14 and the second clamping assembly 15 are used to fix the coated part. The first clamping assembly 14 has a first clearance groove 16 corresponding to the second rotating shaft 13, and the second clamping assembly 15 has a second clearance groove 17 corresponding to the first rotating shaft 12. The first clearance groove 16 and the second clearance groove 17 are larger than the diameter of the first rotating shaft 12 and the second rotating shaft 13. The drive assembly 11 is used to make the first rotating shaft 12 and the second rotating shaft 13 rotate in opposite directions to achieve double-sided coating.

[0036] By installing a coating flipping assembly 4 at the top of the vacuum chamber and driving the first rotating shaft 12 and the second rotating shaft 13 to rotate in opposite directions via the drive assembly 11, and with the staggered arrangement of the first clamping assembly 14 and the second clamping assembly 15, as well as the design of the first clearance groove 16 and the second clearance groove 17, the coating parts can be flipped without stopping the machine, and continuous coating on both sides of the coating parts can be completed. This not only simplifies the operation process and saves labor and time costs, but also reduces damage to the coating parts caused by manual touch and improves product quality.

[0037] like Figure 5 and Figure 6 As shown, in this embodiment, the drive assembly 11 includes a first mounting base 111, a second mounting base 112, and a drive motor 113 fixedly connected inside the first mounting base 111. The first rotating shaft 12 and the second rotating shaft 13 have the same diameter. One end of the first rotating shaft 12 and the second rotating shaft 13 are rotatably connected to the first mounting base 111 via bearings, and the other end of the first rotating shaft 12 and the second rotating shaft 13 are rotatably connected to the second mounting base 112 via bearings. The first rotating shaft 12 and the second rotating shaft 13 are located inside the first mounting base 111 and are respectively A drive gear 114 and a driven gear 115 are fixedly connected. The drive gear 114 and the driven gear 115 are meshed together. The drive gear 114 and the driven gear 115 have the same size and number of teeth. The second rotating shaft 13 is connected to the output end of the drive motor 113. The drive motor 113 is a servo motor. A worm gear transmission box can be set between the second rotating shaft 13 and the drive motor 113. This not only reduces the rotation speed but also enables self-locking, so that the first rotating shaft 12 and the second rotating shaft 13 can maintain a stable state after rotation.

[0038] like Figure 6 and Figure 8As shown, in this embodiment, both the first clamping assembly 14 and the second clamping assembly 15 include a fixed base 151. Two clamping rods 153 are provided on the fixed base 151 through the adjusting assembly 152. The ends of the two clamping rods 153 away from the fixed base 151 are provided with slots 154. The slots 154 can limit the two sides of the coated part without affecting the coating process.

[0039] like Figure 6 and Figure 7 As shown, in this embodiment, the fixed base 151 has a U-shaped structure. The adjusting assembly 152 includes a guide rod 1521 fixedly connected between the inner walls of both sides of the fixed base 151 and a lead rod 1522 rotatably connected by a bearing. An adjusting block 1523 is fixedly connected to the middle of the lead rod 1522. The two ends of the outer surface of the lead rod 1522 are respectively provided with left-hand threads and right-hand threads. Two clamping rods 153 are respectively sleeved on the two ends of the guide rod 1521 and the lead rod 1522. The fixed base 151 of the first clamping assembly 14 is fixedly connected to the first rotating shaft 12. The fixed base 151 of the second clamping assembly 15 is fixedly connected to the second rotating shaft 13. The guide rod 1521 is slidably connected to the clamping rod 153. The lead rod 1522 is threadedly connected to the clamping rod 153.

[0040] like Figure 5 and Figure 8 As shown, in this embodiment, the clamping rod 153 includes a connecting part 1531, a bending part 1532 and a clamping part 1533 connected in sequence, a slot 154 is formed on the clamping part 1533, and a first clearance groove 16 or a second clearance groove 17 is formed by the bending part 1532.

[0041] like Figure 8 As shown, in this embodiment, a positioning rod 155 is fixedly connected to a clamping rod 153, and the other end of the positioning rod 155 passes through another clamping rod 153. In this way, when the two clamping rods 153 move closer or further apart, the positioning rod 155 can move to always support the placed coated part.

[0042] like Figure 8 and Figure 9 As shown, in this embodiment, a pressure plate 156 is provided inside the slot 154. Two vertical rods 157 are fixedly connected to the pressure plate 156 and a screw 158 is rotatably connected to it via bearings. Both the vertical rods 157 and the screw 158 pass through the clamping rod 153. The vertical rods 157 and the clamping rod 153 are slidably connected. The screw 158 is threadedly connected to the clamping rod 153. A handle 159 is fixedly connected to the screw 158. By rotating the handle 159, the screw 158 can be rotated. Since the screw 158 is threadedly connected to the clamping rod 153, the screw 158 can drive the pressure plate 156 to move during rotation, thereby adjusting the thickness of the slot 154 to accommodate coating parts of different thicknesses.

[0043] In this embodiment, the slot 154, the positioning rod 155, and the pressure plate 156 are all fixedly connected with soft pads on the side near the coated part. This provides cushioning when fixing the coated part and avoids excessive clamping force that could damage the coated part.

[0044] like Figure 1 , Figure 2 and Figure 3 As shown, in this embodiment, a rotating ring 5 is rotatably connected to the top of the vacuum chamber 2 via a bearing, and a gear ring 6 is fixedly connected to the bottom of the rotating ring 5. A first motor 7 is fixedly connected to the inner wall of the vacuum chamber 2, and a first gear 8 is fixedly connected to the output end of the first motor 7 and meshes with the gear ring 6. The first mounting base 111 and the second mounting base 112 are fixedly connected to the upper surface of the rotating ring 5 via screws. The first motor 7 drives the first gear 8 to rotate. During the rotation, the first gear 8 cooperates with the gear ring 6 to drive the rotating ring 5, the coating flipping assembly 4, and the coating part to rotate, thereby improving the uniformity of the coating.

[0045] The technical solution provided by this invention involves opening the cover plate 203 during use. The drive motor 113 drives the active gear 114 to rotate. During rotation, the active gear 114 engages with the driven gear 115, causing the first rotating shaft 12 and the second rotating shaft 13 to rotate in opposite directions until the first clamping assembly 14 and the second clamping assembly 15 are rotated to a vertical position. The workpiece to be coated is then placed into the slots 154 of the first clamping assembly 14 and the second clamping assembly 15, supported by the positioning rod 155, until the slots 154 are full of workpieces. Then, the adjusting block 1523 is rotated to drive the lead screw 1522 to rotate. Since the two ends of the lead screw 1522's outer surface are respectively provided with left-hand and right-hand threads, the lead screw 1522, during rotation, can drive the two clamping rods 153 to move closer together until the placed workpiece is fixed. Then, the drive motor 113... 13. Reverse rotation causes the first clamping assembly 14 and the second clamping assembly 15 to rotate to a horizontal position. At this time, the first clamping assembly 14 is located on the front side and the second clamping assembly 15 is located on the rear side. Then, the cover plate 203 is closed for coating. After one side is coated, the drive motor 113 drives the first rotating shaft 12 and the second rotating shaft 13 to rotate 180 degrees again. Since the first clamping assembly 14 has a first clearance groove 16 corresponding to the second rotating shaft 13, and the second clamping assembly 15 has a second clearance groove 17 corresponding to the first rotating shaft 12, and multiple first clamping assemblies 14 and multiple second clamping assemblies 15 are staggered, the first clamping assembly 14 will rotate from the front side to the rear side, and the second clamping assembly 15 will rotate from the rear side to the front side, completing the flipping of the coated part. Then, the other side is coated, so that manual removal and flipping are not required, improving the coating efficiency.

[0046] This invention encompasses any substitutions, modifications, equivalent methods, and solutions made within the spirit and scope of this invention. To provide the public with a thorough understanding of this invention, specific details have been described in detail in the above preferred embodiments; however, those skilled in the art will fully understand the invention even without these details. Furthermore, to avoid unnecessary misunderstanding of the essence of this invention, well-known methods, processes, procedures, components, and circuits have not been described in detail.

[0047] Those skilled in the art will understand that all or part of the steps in the methods of the above embodiments can be implemented by a program instructing related hardware. The program can be stored in a computer-readable storage medium, such as ROM / RAM, magnetic disk, optical disk, etc.

[0048] The above description is only a preferred embodiment of the present invention. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present invention, and these improvements and modifications should also be considered within the scope of protection of the present invention.

Claims

1. A multifunctional vacuum coating machine, characterized in that, It includes an electrical control cabinet (1) and a vacuum chamber (2) installed on one side of the electrical control cabinet (1). A coating evaporator (3) is provided at the bottom of the vacuum chamber (2), and a coating flipping assembly (4) is installed at the top of the vacuum chamber (2). The coating flipping assembly (4) includes a drive assembly (11), a first rotating shaft (12), a second rotating shaft (13), a plurality of first clamping assemblies (14) mounted on the outer surface of the first rotating shaft (12), and a plurality of second clamping assemblies (15) mounted on the outer surface of the second rotating shaft (13). The plurality of first clamping assemblies (14) and the plurality of second clamping assemblies (15) are arranged alternately. The first clamping assemblies (14) and the second clamping assemblies (15) are both used to fix the coated parts. The first clamping assembly (14) is provided with a first clearance groove (16) corresponding to the second rotating shaft (13), and the second clamping assembly (15) is provided with a second clearance groove (17) corresponding to the first rotating shaft (12). The drive assembly (11) is used to make the first rotating shaft (12) and the second rotating shaft (13) rotate in opposite directions to achieve double-sided coating.

2. The multifunctional vacuum coating machine according to claim 1, characterized in that, The drive assembly (11) includes a first mounting base (111), a second mounting base (112), and a drive motor (113) fixedly connected inside the first mounting base (111). One end of the first rotating shaft (12) and the second rotating shaft (13) are rotatably connected to the first mounting base (111) through bearings, and the other end of the first rotating shaft (12) and the second rotating shaft (13) are rotatably connected to the second mounting base (112) through bearings. The first rotating shaft (12) and the second rotating shaft (13) are located inside the first mounting base (111) and are respectively fixedly connected to a drive gear (114) and a driven gear (115). The drive gear (114) and the driven gear (115) are meshed and connected, and the second rotating shaft (13) is drivenly connected to the output end of the drive motor (113).

3. The multifunctional vacuum coating machine according to claim 2, characterized in that, The first clamping assembly (14) and the second clamping assembly (15) both include a fixed base (151). Two clamping rods (153) are provided on the fixed base (151) through an adjustment assembly (152). A slot (154) is provided at the end of each clamping rod (153) away from the fixed base (151).

4. The multifunctional vacuum coating machine according to claim 3, characterized in that, The fixed base (151) has a U-shaped structure. The adjustment assembly (152) includes a guide rod (1521) fixedly connected between the inner walls of the two sides of the fixed base (151) and a lead screw (1522) rotatably connected by a bearing. An adjustment block (1523) is fixedly connected to the middle of the lead screw (1522). The two ends of the outer surface of the lead screw (1522) are respectively provided with a left-hand thread and a right-hand thread. The two clamping rods (153) are respectively sleeved on the two ends of the guide rod (1521) and the lead screw (1522). The guide rod (1521) is slidably connected to the clamping rod (153), and the lead screw (1522) is threadedly connected to the clamping rod (153).

5. The multifunctional vacuum coating machine according to claim 4, characterized in that, The clamping rod (153) includes a connecting part (1531), a bending part (1532) and a clamping part (1533) connected in sequence, and the slot (154) is formed on the clamping part (1533).

6. The multifunctional vacuum coating machine according to claim 5, characterized in that, A positioning rod (155) is fixedly connected to one of the clamping rods (153), and the other end of the positioning rod (155) passes through another clamping rod (153).

7. The multifunctional vacuum coating machine according to claim 5, characterized in that, A pressure plate (156) is provided in the slot (154). Two vertical rods (157) are fixedly connected to the pressure plate (156) and a screw (158) is rotatably connected to it through a bearing. Both the vertical rods (157) and the screw (158) pass through the clamping rod (153). The vertical rods (157) are slidably connected to the clamping rod (153), and the screw (158) is threadedly connected to the clamping rod (153). A handle (159) is fixedly connected to the screw (158).

8. The multifunctional vacuum coating machine according to claim 5, characterized in that, The slot (154), positioning rod (155), and pressure plate (156) are all fixedly connected with soft pads on the side near the coated part.

9. The multifunctional vacuum coating machine according to claim 5, characterized in that, The top of the vacuum chamber (2) is rotatably connected to a rotating ring (5) via a bearing. The bottom of the rotating ring (5) is fixedly connected to a gear ring (6). The inner wall of the vacuum chamber (2) is fixedly connected to a first motor (7). The output end of the first motor (7) is fixedly connected to a first gear (8) and meshes with the gear ring (6). The first mounting base (111) and the second mounting base (112) are fixedly connected to the upper surface of the rotating ring (5) by screws.

10. The multifunctional vacuum coating machine according to claim 1, characterized in that, The vacuum chamber (2) includes a tank (201) and a cover plate (203) that is sealed and fixed by a latch (202). The tank (201) is provided with an observation window (204) and an air extraction port (205).

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