Dynamic analysis method for circulating flow of bath solution of copper foil deposition equipment

Abstract

The invention provides a dynamic analysis method for tank liquid circulation flow of copper foil deposition equipment, which comprises the following steps: acquiring the output flow of a circulating pump of the copper foil deposition equipment and temperature gradient data of upper and lower layers of tank liquid, and calculating buoyancy-driven flow velocity to obtain buoyancy-driven flow velocity data; adjusting the circulation flow according to the mixing strength grade classification result to obtain adjusted circulation flow data; according to the adjusted circulating flow data, the temperature homogenization degree of the bath solution in the vertical direction is evaluated, and a temperature distribution evaluation result is obtained; analyzing the temperature homogenization degree according to a temperature distribution evaluation result to obtain an updated ratio of the flow mixing strength to the buoyancy mixing strength; the temperature vertical mixing effect is enhanced according to the updated ratio of the flow mixing strength to the buoyancy mixing strength, and optimized flow mixing strength data are obtained; and according to the optimized flow mixing intensity data, evaluating to obtain a copper foil deposition uniformity confirmation result.

Description

Technical Field

[0001] This invention relates to the field of information technology, and in particular to a dynamic analysis method for the circulation flow rate of the bath solution in a copper foil deposition equipment. Background Technology

[0002] In industrial production, the operational stability of copper foil deposition equipment is crucial to product quality, especially in electronic materials manufacturing, where the uniformity of the bath directly affects the deposition quality and performance of the copper foil. Research and optimization in this area are considered core aspects of improving production efficiency and product consistency, impacting the competitiveness of the entire industry. However, existing methods for handling the relationship between bath circulation flow rate and temperature distribution often neglect the mutual interference between different flow mechanisms, leading to imprecise control strategies. Many solutions simply focus on increasing the circulation flow rate to improve mixing, failing to fully consider the complex interaction between natural convection and forced circulation, often resulting in counterproductive effects and making it difficult to fundamentally solve the temperature distribution problem. A deeper technical challenge lies in the dynamic balance between circulation flow rate and temperature stratification. As a key factor affecting bath mixing, the circulation flow rate not only determines the intensity of forced circulation but also interferes with natural convection caused by temperature differences. When the circulation flow rate is small, the vertical flow driven by temperature difference can promote mixing between the upper and lower liquid layers; however, when the flow rate increases to a certain extent, the forced horizontal flow suppresses vertical mixing, exacerbating temperature stratification. This contradiction makes it difficult to achieve temperature uniformity simply by adjusting the flow rate, especially since the dominance of the two flow mechanisms changes constantly under different operating conditions, increasing the difficulty of control. Specifically, during copper foil deposition, the upper layer of the bath solution is warmer due to its proximity to the heating source, while the lower layer is relatively cooler. This temperature difference naturally creates vertical flow to balance the temperature. However, when the circulation pump flow rate is too high, the horizontal liquid movement disrupts this balance, preventing the upper hot liquid from sinking effectively and the lower cold liquid from rising, ultimately resulting in significant temperature stratification and affecting the stability of the deposition process. Therefore, accurately determining the dominant relationship between the circulation flow rate and the temperature-driven flow under dynamically changing operating conditions, and optimizing flow control accordingly to eliminate temperature stratification, becomes a key issue in optimizing the operation of copper foil deposition equipment. Summary of the Invention

[0003] This invention provides a method for dynamic analysis of the circulation flow rate of the bath solution in a copper foil deposition equipment, mainly including: The output flow rate of the circulating pump of the copper foil deposition equipment and the temperature gradient data of the upper and lower layers of the bath were obtained, and the buoyancy-driven flow velocity was calculated to obtain the buoyancy-driven flow velocity data. Based on the output flow rate of the circulating pump and the buoyancy-driven flow velocity data, the ratio of flow mixing intensity to buoyancy mixing intensity is identified, and the mixing intensity level is classified according to the ratio to obtain the mixing intensity level classification result. The circulation flow rate is adjusted based on the mixed intensity level classification results to obtain the adjusted circulation flow rate data; Based on the adjusted circulation flow rate data, the degree of temperature uniformity in the vertical direction of the tank liquid is evaluated to obtain the temperature distribution evaluation results. Based on the temperature distribution assessment results, the degree of temperature homogenization is analyzed to obtain the updated ratio of flow mixing intensity to buoyancy mixing intensity; The updated ratio of flow mixing intensity to buoyancy mixing intensity enhances the vertical mixing effect at temperature, resulting in optimized flow mixing intensity data. Based on the optimized flow mixing intensity data, the evaluation results confirmed the uniformity of copper foil deposition.

[0004] Furthermore, the step of identifying the ratio of flow mixing intensity to buoyancy mixing intensity based on the circulating pump output flow rate and buoyancy-driven flow velocity data, and classifying the mixing intensity level according to the ratio to obtain the mixing intensity level classification result includes: The horizontal flow velocity is calculated based on the output flow rate data of the circulating pump, and the volumetric flow rate of forced circulation and the volumetric flow rate of natural convection are calculated in combination with the buoyancy-driven flow velocity data. The dimensionless ratio of the forced circulation volumetric flow rate to the natural convection volumetric flow rate is calculated by using the forced circulation volumetric flow rate and the natural convection volumetric flow rate to obtain the flow intensity ratio data. Based on the flow intensity ratio data and the preset threshold range, the flow patterns are classified into natural convection-dominated, mixing equilibrium, or forced circulation-dominated categories, and the mixing intensity level classification result is determined.

[0005] Furthermore, the adjustment of the circulating flow rate based on the mixed intensity level classification results to obtain adjusted circulating flow rate data includes: Based on the classification results of mixing intensity levels, if the flow intensity ratio exceeds the preset threshold, it is determined that forced circulation is dominant, the speed of the circulation pump motor is reduced, the output flow rate at the new speed is calculated according to the direct proportional relationship between speed and flow rate, and the actual flow rate value after adjustment is monitored by the flow sensor to obtain the adjusted circulation flow rate data.

[0006] Furthermore, based on the adjusted circulation flow rate data, the degree of temperature uniformity in the vertical direction of the tank solution is evaluated to obtain the temperature distribution evaluation results, including: A temperature sensor array is arranged at a preset interval in the vertical direction of the tank to collect temperature values ​​from multiple points in the temperature sensor array. The local temperature gradient is calculated by the temperature difference between adjacent measuring points, and the temperature-height relationship curve is obtained by polynomial fitting. The second derivative is calculated based on the curve to determine the temperature jump layer and the characteristic parameters of temperature stratification. The degree of vertical mixing is assessed by combining the temperature stratification characteristic parameters, and the temperature distribution assessment result is determined.

[0007] Furthermore, determining the temperature stratification characteristic parameters includes: calculating the second derivative of the fitted temperature-height relationship curve at each height point; determining the stratification intensity index by the change in the sign of the second derivative and the temperature difference between the upper and lower parts of the transition layer; and determining the temperature stratification characteristic parameters by combining the stratification intensity index and the adjusted circulation flow rate.

[0008] Furthermore, determining the temperature distribution assessment result includes: based on the temperature stratification characteristic parameters, calculating the square root of the sum of the squares of the deviations between the temperature at each measuring point and the average temperature to obtain the temperature standard deviation, and combining the stratification intensity index and the temperature standard deviation to determine the temperature distribution assessment result.

[0009] Furthermore, the analysis of temperature uniformity based on the temperature distribution evaluation results includes: If the temperature standard deviation exceeds the preset stratification threshold, it is determined that the temperature stratification is still obvious. The real-time output flow rate of the circulation pump is read, and the latest temperature data of the upper and lower layers of the tank liquid is obtained. The temperature difference between the upper and lower layers of the tank liquid is calculated to obtain updated temperature difference data. The degree of temperature uniformity is analyzed based on the updated temperature difference data.

[0010] Furthermore, obtaining the updated ratio of flow mixing intensity to buoyancy mixing intensity includes: calculating the vertical buoyancy-driven flow velocity based on the updated temperature difference data; calculating the effective horizontal flow velocity using the output flow rate of the circulating pump; determining the ratio of the effective horizontal flow velocity to the buoyancy-driven flow velocity; and obtaining the updated ratio of flow mixing intensity to buoyancy mixing intensity.

[0011] Furthermore, after obtaining the updated ratio of flow mixing intensity to buoyancy mixing intensity, the process includes: Based on the updated ratio of flow mixing intensity to buoyancy mixing intensity, if the ratio is less than a preset threshold, it is determined that natural convection is dominant. The servo motor drives the outlet pipe of the circulating pump to deflect downward, causing the jet to generate a downward velocity component. The ratio of vertical velocity to horizontal velocity is calculated based on the angle value after deflection to obtain jet direction adjustment data. Based on the jet direction adjustment data, the downward-sloping jet flows downward along the tank wall, turns at the bottom of the tank, and carries the bottom cold liquid upward, forming a vertical circulation flow mode.

[0012] Furthermore, the evaluation yielded confirmation results regarding the uniformity of copper foil deposition, including: For the real-time temperature data of each measuring point, the coefficient of variation of the temperature at all measuring points is calculated. If the coefficient of variation is less than a preset threshold, the temperature distribution is determined to be uniform, the degree of uniformity improvement is determined, and the temperature uniformity evaluation index is obtained. Based on the temperature uniformity evaluation index, it is determined whether the current temperature distribution meets the deposition uniformity requirements, and the copper foil deposition uniformity confirmation result is output.

[0013] The technical solutions provided by the embodiments of the present invention may include the following beneficial effects: This invention discloses a dynamic analysis method for the circulation flow rate of copper foil deposition equipment. Addressing the issues of mixing intensity and temperature stratification in the deposition tank, it calculates the buoyancy-driven flow velocity by acquiring the output flow rate of the circulation pump and the temperature gradient data between the upper and lower layers of the tank, identifies the ratio of flow mixing intensity to buoyancy mixing intensity, and classifies the levels. If forced circulation dominates, leading to excessive energy consumption and disturbance, this invention adjusts the flow rate by reducing the circulation pump speed. If natural convection dominates, resulting in insufficient mixing, the vertical mixing effect is enhanced by adjusting the pump outlet angle. Simultaneously, this invention combines temperature gradient data to assess the degree of temperature uniformity, dynamically updates the mixing intensity ratio until an optimal balance is reached, and ultimately confirms the uniformity of copper foil deposition. This invention effectively solves the problems of energy consumption and temperature stratification by intelligently adjusting circulation pump parameters and flow mixing strategies, achieving uniform temperature distribution in the deposition tank, and improving copper foil deposition quality and production efficiency. Attached Figure Description

[0014] Figure 1 This is a flowchart of a dynamic analysis method for the circulation flow rate of the copper foil deposition equipment bath according to the present invention. Detailed Implementation

[0015] The technical solutions of the embodiments of the present invention will be clearly and thoroughly described below with reference to the accompanying drawings. The described embodiments are merely some embodiments of the present invention.

[0016] like Figure 1 The dynamic analysis method for the circulation flow rate of the copper foil deposition equipment bath in this embodiment may specifically include: S101. Obtain the output flow rate of the circulating pump of the copper foil deposition equipment and the temperature gradient data of the upper and lower layers of the bath solution, calculate the buoyancy-driven flow velocity, and obtain the buoyancy-driven flow velocity data.

[0017] Real-time flow data from the output of the circulating pump is acquired, and the volumetric flow rate of the tank solution is collected using a turbine flow meter. Temperature sensors are simultaneously placed at preset positions on the upper layer of the tank solution (distance from the surface) and on the lower layer (distance from the bottom) to collect temperature values ​​for both layers. Based on the correlation between temperature and copper sulfate solution density, linear interpolation is used to determine the tank solution density at different temperatures. The density difference between the upper and lower layers is calculated to obtain the density difference data. Based on this density difference data, combined with the tank solution depth characteristic length and kinematic viscosity parameters, the Grashof number is calculated to determine the natural convection state. If the Grashof number exceeds a preset threshold, the natural convection is in a turbulent state. The vertical upward flow velocity under buoyancy is calculated based on the product of gravitational acceleration, volumetric expansion coefficient, temperature difference between the upper and lower layers, and tank solution height, obtaining the buoyancy-driven flow velocity value. The buoyancy-driven flow velocity value is compared with the horizontal flow velocity converted from the output flow rate of the circulating pump. The combined flow velocity value is obtained by taking the square root of the sum of the squares of the horizontal and vertical flow velocities. The Reynolds number is calculated using the combined flow velocity value, the tank liquid density, the characteristic dimensions of the tank, and the dynamic viscosity to determine whether the internal flow state of the tank liquid is in the laminar or turbulent region, and thus the buoyancy-driven flow velocity data is determined.

[0018] For example, in the actual operation of the copper foil deposition equipment, the flow rate of the tank solution circulation system is continuously monitored using a turbine flow meter. The turbine flow meter is installed on the outlet pipe of the circulation pump. Its internal impeller, driven by the tank solution, generates a rotational speed signal. This signal is converted into an electrical pulse frequency via a magneto-electric conversion device. The pulse frequency has a linear relationship with the volumetric flow rate. After calibration, the real-time flow rate value is obtained. A PT100 platinum resistance thermometer is used as the temperature sensor. Its resistance value exhibits a stable linear relationship with temperature changes. The upper sensor is installed approximately one-fifth of the tank depth from the liquid surface, while the lower sensor is positioned approximately one-quarter of the tank depth from the bottom. This arrangement effectively reflects the temperature stratification of the tank solution. The density of the copper sulfate solution has a clear correlation with temperature. In actual operation, linear interpolation calculations are performed based on the measured upper and lower layer temperature values ​​using a pre-established temperature and density data table.

[0019] Specifically, when the measured temperature falls between two adjacent temperature points in the data table, the linear interpolation formula is used. Calculate the corresponding density, where T is the measured temperature. and For adjacent temperature points, and This corresponds to the density value. After determining the densities of the upper and lower layers of the tank liquid using this method, the difference directly reflects the degree of density unevenness caused by temperature stratification. The Grashof number, as a dimensionless parameter for judging the intensity of natural convection, physically characterizes the relative magnitude of buoyancy and viscous forces. In a tank liquid system, when there is a temperature difference between the upper and lower layers, the buoyancy generated by the density difference drives the fluid to generate vertical natural convection. The calculation of the Grashof number involves parameters such as gravitational acceleration, volumetric expansion coefficient, temperature difference, characteristic length, and kinematic viscosity. When its value exceeds a preset critical threshold, it indicates that natural convection has changed from a laminar state to a turbulent state, at which point the vertical mixing effect is significantly enhanced. The determination of the buoyancy-driven flow velocity is based on Archimedes' principle. The density difference generated by the temperature difference forms a driving force under the action of gravity. The velocity at which this driving force balances with the fluid resistance is the buoyancy-driven flow velocity.

[0020] In one embodiment, the horizontal and vertical velocities are synthesized using the principle of vector composition. The horizontal velocity generated by the circulating pump and the vertical velocity generated by buoyancy are combined according to the hypotenuse calculation method of a right triangle. The Reynolds number is calculated to determine the state characteristics of the synthesized flow. When the Reynolds number is less than 2300, the flow is in the laminar region; when it is greater than 4000, it enters the turbulent region; and the region in between is the transition region.

[0021] S102. Based on the output flow rate of the circulating pump and the buoyancy-driven flow velocity data, identify the ratio of flow mixing intensity to buoyancy mixing intensity, classify the mixing intensity level according to the ratio, and obtain the mixing intensity level classification result.

[0022] Based on the horizontal velocity value and buoyancy-driven velocity data obtained from the output flow rate data of the circulating pump, the volumetric flow rate of forced circulation is calculated by multiplying the horizontal velocity by the vertical cross-sectional area of ​​the tank. Simultaneously, the volumetric flow rate of natural convection is calculated by multiplying the vertical velocity by the horizontal cross-sectional area of ​​the tank. Dividing the forced circulation volumetric flow rate by the natural convection volumetric flow rate yields a dimensionless ratio, resulting in flow intensity ratio data. For this flow intensity ratio data, a range is determined based on a preset first and second threshold. If the ratio is less than the first threshold, it is classified into the natural convection-dominated range; if the ratio is between the first and second thresholds, it is classified into the mixing equilibrium range; and if the ratio is greater than the second threshold, it is classified into the forced circulation-dominated range. The corresponding flow mode category is determined based on the range, resulting in preliminary classification data. Based on the preliminary classification data, the Richardson number is calculated by combining the ratio of the Grashof number to the square of the Reynolds number of the tank liquid. The Richardson number represents the relative magnitude of the buoyancy effect and the inertial force effect. If the Richardson number is greater than the preset upper threshold, the buoyancy effect is dominant. If the Richardson number is less than the preset lower threshold, the forced convection is dominant. The preliminary classification is refined and adjusted according to the numerical range of the Richardson number to determine the classification result of the mixing intensity level.

[0023] For example, in the process of evaluating the flow mixing intensity of a copper foil deposition equipment, the calculation of volumetric flow rate is a fundamental parameter for judging the mixing effect.

[0024] Specifically, the forced circulation volumetric flow rate is obtained by multiplying the horizontal velocity generated by the circulation pump by the vertical cross-sectional area of ​​the tank, where the vertical cross-sectional area refers to the tank cross-section perpendicular to the horizontal flow direction. The natural convection volumetric flow rate is calculated by multiplying the buoyancy-driven vertical velocity by the horizontal cross-sectional area of ​​the tank, where the horizontal cross-sectional area refers to the cross-section parallel to the surface of the liquid. The ratio of the two volumetric flow rates directly reflects the relative strength of forced circulation and natural convection. The physical meaning of the flow intensity ratio lies in quantifying the contribution of the two mixing mechanisms. When the ratio is less than a preset first threshold, it indicates that natural convection is dominant. At this time, the liquid mainly relies on the density difference caused by the temperature difference to drive vertical mixing, and the effect of forced circulation in the horizontal direction is relatively weak. In this state, the mixing efficiency of the liquid mainly depends on the magnitude of the temperature gradient between the upper and lower layers. The greater the temperature difference, the stronger the natural convection. However, excessive reliance on natural convection will lead to insufficient mixing, especially when the tank size is large.

[0025] Preferably, when the flow intensity ratio is between the first and second thresholds, it falls within the mixing equilibrium range, where forced circulation and natural convection work together to create a synergistic mixing effect. Within this range, horizontal flow does not excessively inhibit vertical mixing, while vertical flow effectively compensates for the deficiencies of horizontal circulation, achieving three-dimensional mixing of the tank liquid. The Richardson number, as a key dimensionless parameter in fluid dynamics, is calculated based on the ratio of the Grashof number to the square of the Reynolds number.

[0026] In one embodiment, the Richardson number is physically the ratio of buoyant potential energy to kinetic energy, reflecting the relative importance of buoyancy and inertial forces. When the Richardson number exceeds a preset upper threshold, buoyancy dominates, and fluid motion is primarily controlled by temperature stratification. In this case, even increasing the circulation pump flow rate is insufficient to disrupt the stable stratification structure. Conversely, when the Richardson number is below a preset lower threshold, inertial forces prevail, and the agitation effect of forced circulation is sufficient to overcome buoyancy stratification. However, excessively strong horizontal flow can inhibit beneficial vertical mixing.

[0027] In one possible implementation, the process of refining the initial classification using the Richardson number is actually a more accurate determination of the flow state. This secondary correction mechanism can identify boundary conditions in the initial classification, avoid errors caused by a single indicator, and thus obtain a more accurate classification result of the mixing intensity level.

[0028] S103. Adjust the circulating flow rate based on the classification results of the mixed intensity level to obtain the adjusted circulating flow rate data.

[0029] Based on the classification results of mixing intensity levels, the flow intensity ratio data in the classification results is read. If the ratio exceeds a preset forced circulation dominance threshold, forced circulation is determined to be dominant. By querying the speed and flow characteristic curve of the circulation pump (a standard curve provided by the pump manufacturer), the power consumption value corresponding to the current speed is determined. Simultaneously, the fluctuation amplitude of the tank liquid surface and the intensity of internal vortices are monitored to obtain energy consumption and disturbance status data. To address the excessive disturbance problem shown in the energy consumption and disturbance status data, a frequency converter is used to reduce the circulation pump motor speed to a preset ratio of the original speed. Based on the direct proportionality between speed and flow rate, the theoretical output flow rate at the new speed is calculated using the formula... Calculation, where Original traffic Original speed, For new traffic, For the new rotational speed, the actual flow rate is monitored in real time by a flow sensor to obtain the adjusted circulation flow rate data. If the mixing intensity level classification result shows that forced circulation is not dominant, the current circulation pump operating state remains unchanged, and the existing circulation flow rate is directly output as the adjusted circulation flow rate data.

[0030] For example, in the actual operation of copper foil deposition equipment, determining whether forced circulation is dominant is a key step in optimizing flow control.

[0031] Specifically, when the flow intensity ratio exceeds the preset forced circulation dominant threshold, it indicates that the forced flow in the horizontal direction is too strong, and obvious disturbance characteristics will appear inside the tank liquid. The fluctuation amplitude of the tank liquid surface is monitored by a liquid level sensor array. The sensors are arranged at multiple positions along the length of the tank to collect real-time data on changes in liquid level height. If the fluctuation amplitude exceeds the preset value, it indicates that the liquid surface stability has decreased. The assessment of the internal vortex intensity involves the complex characteristics of the flow field. Under excessive forced circulation, large-scale vortex structures will form inside the tank liquid. These vortices will interfere with the uniform distribution of copper ions and affect the quality of the deposition layer. Pressure sensors installed on the sidewall of the tank can detect the pressure pulsations caused by the vortices. The pulsation frequency and amplitude reflect the intensity characteristics of the vortices. At the same time, the power consumption of the circulation pump is monitored in real time by an electric power meter. The power value is proportional to the product of the flow rate and the head. Excessive power consumption means reduced energy utilization efficiency.

[0032] In one embodiment, the frequency converter regulates the speed of the circulating pump motor by changing the power supply frequency. The relationship between speed and flow rate follows a similarity law, meaning that flow rate is directly proportional to speed; this relationship can be expressed as... ,in Represents traffic, The speed is represented by the index 1 and 2, indicating the state before and after adjustment, respectively. When the flow rate needs to be reduced, the inverter reduces the frequency from 50Hz to a preset ratio, such as 40Hz. Consequently, the speed and flow rate decrease to 0.8 times their original values. This adjustment method is more energy efficient than throttle valve regulation, avoiding throttling losses.

[0033] Preferably, the flow sensor is an electromagnetic flow meter or an ultrasonic flow meter, installed on the outlet pipe of the circulating pump to monitor flow changes in real time during the adjustment process. The actual flow value after adjustment is compared with the theoretical calculation value, and correction is required if the deviation exceeds the allowable range.

[0034] For example, when the mixing intensity classification result shows that the system is in the mixing equilibrium range or the natural convection-dominated range, it indicates that the current circulation flow setting is reasonable and no adjustment is needed. In this case, the operating parameters of the circulation pump should be kept unchanged to avoid unnecessary adjustments that could interfere with system stability.

[0035] S104. Based on the adjusted circulation flow data, evaluate the degree of temperature uniformity in the vertical direction of the tank liquid to obtain the temperature distribution evaluation results.

[0036] Based on the adjusted circulation flow rate data and the temperature gradient data between the upper and lower layers of the tank liquid, a temperature sensor array is arranged at preset intervals along the vertical direction of the tank. Multiple temperature values ​​are collected from the bottom of the tank to the liquid surface. The local temperature gradient is obtained by dividing the temperature difference between adjacent measuring points by the interval. The rate of change of this local temperature gradient along the height reflects the degree of nonlinear temperature distribution. A polynomial fitting is used to obtain a temperature-height relationship curve, yielding the vertical temperature distribution characteristic data. For this vertical temperature distribution characteristic data, the second derivative of the fitted curve at each height point is calculated. If the sign of the second derivative changes beyond 0.1, it indicates the existence of a temperature jump layer. The stratification intensity index is determined by multiplying the temperature difference above and below the jump layer by the density difference and then by the ratio of the tank liquid volume to the total height. Simultaneously, the ratio of the flow velocity to the thermal diffusivity α is calculated based on the adjusted circulation flow rate and tank dimensions, where α is the thermal diffusivity of the tank liquid, thus obtaining the temperature stratification characteristic parameters. Based on the temperature stratification characteristic parameters, the sum of squares of the deviations between the temperature at each measuring point and the average temperature is calculated. This sum is then divided by the number of measuring points minus 1, and the square root is taken to obtain the temperature standard deviation. If the standard deviation exceeds 2 degrees Celsius, significant stratification is determined. The degree of vertical mixing is assessed in conjunction with the stratification intensity index, yielding temperature uniformity evaluation data. Based on this temperature uniformity evaluation data, the vertical heat transfer rate is calculated using the temperature difference between adjacent measuring points and the convective heat transfer coefficient. If the heat transfer rate decreases sharply at a certain height, a thermal barrier layer is formed at that location. A weighted sum is calculated based on the location of the thermal barrier layer, the stratification intensity, and the temperature standard deviation, with weights of 0.3, 0.4, and 0.3, respectively. If the sum exceeds 1, the temperature distribution is determined to be non-uniform; otherwise, it is uniform. This determines the temperature distribution evaluation result.

[0037] For example, in the process of evaluating the temperature distribution of a copper foil deposition equipment, the arrangement of the temperature sensor array directly affects the monitoring accuracy.

[0038] Specifically, the sensors are distributed vertically in the tank at equal intervals, typically one-tenth of the total height of the liquid. This density allows for the capture of detailed temperature field changes. Temperature data collected by each sensor is transmitted in real-time to the control system via a data acquisition card, with a sampling frequency set to once per second to ensure accurate reflection of dynamic temperature changes. The local temperature gradient is calculated using the central difference method, where the temperature gradient at a point equals the temperature difference between its two adjacent points divided by twice the distance between them. This method minimizes measurement errors. Polynomial fitting of the temperature-height relationship curve is a crucial step in identifying temperature distribution characteristics.

[0039] In one embodiment, a cubic polynomial is used for fitting, and the coefficients of the polynomial are determined by minimizing the sum of squared errors between the measured temperature and the fitted value. The fitted continuous curve can smooth the discrete measurement data, eliminate the influence of random measurement errors, and thus more accurately reflect the vertical distribution of temperature. The vertical temperature distribution characteristic data includes the coefficients of each order of the polynomial and the goodness-of-fit index; these parameters together describe the spatial distribution of the temperature field. The identification of temperature jump layers is based on the abrupt change characteristics of the curve curvature.

[0040] Preferably, the curvature change is determined by calculating the second derivative of the fitted curve. When the sign of the second derivative changes, it indicates the presence of an inflection point, meaning the temperature distribution changes from convex to concave or vice versa. This inflection point often corresponds to the location of a temperature jump layer, the presence of which indicates that heat exchange between the upper and lower layers of the bath is suppressed. The stratification intensity index is calculated as the ratio of the maximum temperature difference above and below the jump layer to the total height of the bath. This index, after being dimensionless, allows for comparison between baths of different sizes.

[0041] In one possible implementation, the ratio of flow velocity to thermal diffusivity reflects the relative importance of convective heat transfer and conductive heat transfer. When the circulation flow rate is large, the increased flow velocity leads to convective heat transfer dominating, and the temperature distribution is mainly controlled by the flow pattern; when the circulation flow rate is small, thermal diffusivity is relatively enhanced, and the temperature distribution is more controlled by thermal conduction. This ratio is similar to the Bekeleton number concept in heat transfer and is an important parameter for judging the heat transfer mechanism. By comprehensively considering the stratification intensity index and the flow velocity-thermal diffusivity ratio, the stratification characteristics of the temperature field can be fully evaluated.

[0042] For example, the calculation of the temperature standard deviation involves the application of statistical methods. First, the arithmetic mean of the temperatures at all measuring points is calculated. Then, the deviation of each measuring point's temperature from the mean is calculated. The squares of these deviations are summed, divided by the number of measuring points, and then the square root is taken to obtain the standard deviation. The standard deviation reflects the dispersion of the temperature distribution; a larger value indicates a more uneven temperature distribution. When the standard deviation exceeds a preset threshold, it is determined that there is significant temperature stratification. This threshold is usually determined based on the temperature uniformity requirements of the copper foil deposition process. The assessment of the adequacy of vertical mixing requires a comprehensive consideration of multiple indicators. In addition to the temperature standard deviation, the stratification intensity index provides information on the spatial distribution of the temperature gradient. When both the stratification intensity index and the temperature standard deviation are large, it indicates severe temperature stratification in the bath solution and insufficient vertical mixing. Conversely, when both indices are small, it indicates a relatively uniform temperature distribution and good vertical mixing.

[0043] Specifically, the heat transfer rate is calculated based on Fourier's law, which states that heat flux density equals the product of thermal conductivity and temperature gradient. In the bath system, the vertical heat transfer rate is obtained by dividing the temperature difference between adjacent measuring points by the distance between them, and then multiplying by the thermal conductivity of the bath. Thermal conductivity is a physical property parameter of the bath, related to temperature and concentration, and is usually determined by looking up tables or empirical formulas. When the heat transfer rate decreases sharply at a certain height, it indicates the presence of a region with high thermal resistance, i.e., a thermal barrier layer. The formation of a thermal barrier layer is usually due to flow stagnation or stable temperature stratification at that location, hindering vertical heat transfer. Furthermore, the presence of a thermal barrier layer severely affects the uniformity of copper foil deposition. The temperature difference above and below the thermal barrier layer leads to different diffusion rates of copper ions, thus affecting the uniformity of the deposition rate. By identifying the location and intensity of the thermal barrier layer, the circulation flow rate or flow pattern can be adjusted in a targeted manner to break the thermal barrier layer structure and improve the uniformity of temperature distribution.

[0044] In one embodiment, the temperature distribution assessment results integrate three key parameters: the location of the thermal barrier layer, the stratification intensity index, and the temperature standard deviation. These three parameters describe the characteristics of the temperature field from different perspectives: the location of the thermal barrier layer indicates the spatial location of the problem area, the stratification intensity reflects the magnitude of the temperature gradient, and the standard deviation characterizes the overall uniformity.

[0045] S105. Analyze the degree of temperature homogenization based on the temperature distribution assessment results to obtain the updated ratio of flow mixing intensity to buoyancy mixing intensity.

[0046] Based on the temperature standard deviation value in the temperature distribution assessment results, if the standard deviation value exceeds a preset stratification threshold, it is determined that temperature stratification is still significant. The real-time output flow rate of the circulating pump is read using a flow sensor, and the latest upper and lower layer temperature data is obtained from the temperature sensor array. The temperature difference between the upper and lower layers is calculated to obtain updated temperature difference data. Based on the updated temperature difference data, according to the formula... Recalculate the vertical buoyancy-driven flow velocity, where The flow velocity is driven by buoyancy. It is the acceleration due to gravity. The coefficient of volume expansion is 1. For temperature difference, The height of the tank is given; the effective horizontal velocity is obtained by multiplying the output flow rate of the circulating pump by the mixing coefficient 0.8 and dividing by the effective mixing cross-sectional area of ​​the tank. The ratio of the effective horizontal velocity to the buoyancy-driven velocity is calculated to obtain the updated ratio of the flow mixing intensity to the buoyancy mixing intensity.

[0047] For example, in the iterative optimization of copper foil deposition equipment, continuous monitoring of temperature stratification is the basis for achieving dynamic control.

[0048] Specifically, the temperature standard deviation, as a quantitative indicator, can directly reflect the dispersion of temperature stratification in the bath solution. When this value exceeds a preset threshold, it indicates that the existing circulation flow setting has failed to effectively eliminate temperature stratification, requiring a new round of parameter adjustments. Among these, the temperature standard deviation... By calculating multiple temperature difference data The standard deviation is derived from these, and subsequent parameter updates are based on them. conduct, Used to monitor overall dispersion. The preset layering threshold is typically determined based on the quality requirements of the copper foil deposition process; different thicknesses of copper foil products have different requirements for temperature uniformity. Thinner copper foils are more sensitive to temperature fluctuations, and therefore require more stringent threshold settings.

[0049] In one embodiment, the flow sensor and temperature sensor array operate continuously, acquiring data in real time and transmitting it to the control system. When it is determined that parameters need to be updated, the latest flow and temperature data are first read to ensure that the calculations are based on the current actual operating conditions. The updated temperature difference data reflects the temperature distribution after the previous adjustment, and this data will be used as the input parameter for the new buoyancy-driven flow velocity calculation.

[0050] Preferably, the recalculation of the buoyancy-driven flow velocity follows the same physical principles, derived from the product of gravitational acceleration, volume expansion coefficient, and temperature difference. The updated ratio of flow mixing intensity to buoyancy mixing intensity provides a basis for the next round of optimization adjustments.

[0051] S106. Enhance the vertical mixing effect of temperature by updating the ratio of flow mixing intensity to buoyancy mixing intensity, and obtain optimized flow mixing intensity data.

[0052] Based on the updated ratio of flow mixing intensity to buoyancy mixing intensity, if the ratio is less than a preset natural convection dominance threshold, natural convection is determined to be dominant. The initial flow direction of the liquid jet entering the tank is obtained by reading the current installation angle of the circulating pump outlet pipe, and the flow field distribution characteristics inside the tank are monitored to obtain current flow pattern characteristic data. Addressing the issue of insufficient vertical mixing shown in the current flow pattern characteristic data, the circulating pump outlet pipe is driven by a servo motor to deflect downwards by a preset angle, causing the originally horizontal jet to generate a downward velocity component. The ratio of vertical velocity to horizontal velocity is calculated based on the deflected angle value, and the adjusted flow vector direction is determined through this ratio to obtain jet direction adjustment data. Based on the jet direction adjustment data, the downward-sloping jet flows down the tank wall, turns at the bottom of the tank, and carries the bottom cold liquid upwards, forming a vertical circulation flow pattern. This vertical circulation promotes the exchange of matter and heat between the upper and lower tank liquids. The intensity and range of the circulation flow are monitored to obtain vertical mixing effect data. Based on the vertical mixing effect data, the flow mixing intensity value is recalculated. The mixing uniformity data is directly input into the vector synthesis process. The total flow intensity s is calculated by vector synthesis of the horizontal flow velocity u and the vertical flow velocity v. The total flow intensity s is equal to the square root of u squared plus the square root of v squared. If the updated ratio of flow mixing intensity to buoyancy mixing intensity indicates that natural convection is no longer dominant, it is determined that a mixing equilibrium state has been reached. The current outlet pipe angle is kept unchanged, and the current flow mixing intensity is output as the optimized flow mixing intensity data.

[0053] For example, in the process of optimizing the flow control of a copper foil deposition equipment, the identification of the dominant state of natural convection is a key prerequisite for determining the regulation strategy.

[0054] Specifically, when the ratio of flow mixing intensity to buoyancy mixing intensity is lower than a preset threshold, it indicates that the vertical mixing of the bath solution mainly relies on natural convection driven by temperature difference, while the contribution of forced circulation is relatively small. In this state, although excessive stirring and energy waste are avoided, relying solely on natural convection often fails to achieve sufficient vertical mixing, especially in large-sized tanks where temperature stratification persists. Monitoring the flow field distribution characteristics is achieved through flow velocity sensors arranged inside the tank. These sensors can measure the magnitude and direction of flow velocity at different locations, thus obtaining a complete picture of the flow pattern inside the bath solution. Adjusting the angle of the circulation pump outlet pipe is an effective means of changing the flow pattern. In traditional copper foil deposition equipment, the circulation pump outlet is usually installed horizontally, and the bath solution enters the tank in the form of a horizontal jet. This arrangement mainly generates horizontal circulation flow, contributing little to vertical mixing. By installing adjustable-angle elbows or rotary joints on the outlet pipe, coupled with a servo motor drive, precise adjustment of the outlet direction can be achieved. After receiving the control signal, the servo motor drives the rotary joint to rotate through a reduction mechanism, changing the outlet angle of the pipe. Angle sensors provide real-time feedback on the current deflection angle, forming a closed-loop control to ensure the accuracy of angle adjustment.

[0055] In one embodiment, when the pipe is deflected downwards by a certain angle, the originally horizontal jet acquires a downward velocity component. The decomposition of the velocity component follows the principle of vector decomposition. Let the original horizontal flow velocity be v, and the deflection angle be θ, then the horizontal component becomes... The vertical component is This redistribution of velocity components causes the jet to no longer flow parallel to the liquid surface, but instead enters the tank at a downward angle. The selection of the deflection angle requires consideration of several factors: too small an angle results in insufficient vertical component, failing to effectively enhance vertical mixing; too large an angle reduces the horizontal component, potentially affecting the overall circulation of the tank. In practice, the deflection angle is typically controlled between 15 and 45 degrees, with the specific value determined based on the tank dimensions and flow rate.

[0056] Preferably, the downward-sloping jet forms a specific flow pattern as it flows along the tank wall. The jet initially moves downwards along the tank wall, and due to its large momentum, it can penetrate the temperature stratification to reach the bottom region. At the bottom, the jet is deflected by the bottom surface; some fluid diffuses horizontally along the bottom, while some begins to rise. During this ascent, the fluid carries the cold tank liquid from the bottom upwards, mixing with the hot tank liquid above. This flow pattern is similar to thermohaline circulation in nature, achieving vertical material circulation through forced drive. The intensity of the vertical circulation depends on the initial momentum and deflection angle of the jet; the greater the momentum and the more suitable the angle, the stronger the circulation.

[0057] For example, the disruptive effect of vertical circulation on temperature stratification manifests in several ways. First, the downflow carries the high-temperature liquid from the upper layer to the lower layer, raising the temperature of the lower layer; simultaneously, the upflow carries the low-temperature liquid from the lower layer to the upper layer, lowering the temperature of the upper layer. This bidirectional heat transfer gradually reduces the temperature difference between the upper and lower layers. Second, the vortices and turbulence generated by vertical circulation enhance molecular diffusion and heat conduction, accelerating the uniform distribution of heat. Furthermore, the circulation disrupts the original stable stratification structure, making it impossible to maintain the temperature gradient and promoting overall temperature homogenization.

[0058] Understandably, monitoring the vertical mixing effect requires considering multiple parameters. Besides directly measuring the vertical flow velocity, the mixing effect can also be assessed by the rate of change in the temperature field. When vertical mixing is enhanced, the rate of decrease in the temperature difference between the upper and lower layers accelerates significantly, and the decreasing trend of the temperature standard deviation becomes more pronounced. Mixing effect data is obtained by comparing the changes in temperature distribution before and after adjustment, including information from multiple dimensions such as the magnitude of the temperature gradient reduction, the degree of blurring at the layer interface, and the frequency characteristics of temperature fluctuations.

[0059] In one possible implementation, the recalculation of flow mixing intensity takes into account the flow field changes caused by angle adjustment. The adjusted flow is no longer a simple horizontal circulation but includes a significant vertical component; therefore, the calculation of flow mixing intensity needs to consider the characteristics of the three-dimensional flow field. By vector synthesis of the horizontal and vertical velocities, the total flow intensity is obtained, and then compared with the buoyancy-driven flow velocity to obtain a new intensity ratio. Furthermore, the determination of the mixing equilibrium state is based on stability analysis after multiple iterations. After angle adjustment, if the ratio of the new flow mixing intensity to the buoyancy mixing intensity is within a preset equilibrium range, and the uniformity of the temperature distribution meets the process requirements, then a mixing equilibrium state is considered to have been reached. In this state, forced circulation and natural convection work together, avoiding both energy waste and excessive disturbance caused by overly strong forced circulation, and insufficient mixing caused by the dominance of natural convection.

[0060] Specifically, the decision to keep the current parameters constant is based on considerations of system stability. Frequent parameter adjustments would cause continuous changes in the flow field, affecting the stability of the deposition process. Once mixing equilibrium is reached, maintaining the existing operating parameters, allowing the bath solution to operate under stable flow conditions, is beneficial for obtaining uniform and consistent copper foil products.

[0061] S107. Based on the optimized flow mixing intensity data, the copper foil deposition uniformity is evaluated and confirmed.

[0062] Based on optimized flow mixing intensity data and real-time temperature gradient data between the upper and lower layers of the bath, the difference between the temperature gradient value before optimization and the current temperature gradient value is calculated. Obtain the percentage of layered elimination, where To optimize the initial temperature gradient value, The current temperature gradient value is used, and real-time temperature data at each measuring point is read simultaneously to obtain temperature distribution improvement data. For this improved temperature distribution data, the coefficient of variation (COP) of the temperature at all measuring points is calculated. The COP is obtained as the ratio of the standard deviation to the average value. If the COP is less than a preset COP threshold of 0.05, the temperature distribution is considered to have reached a uniform state. The degree of uniformity improvement is determined by comparing the COPs before and after optimization, resulting in a temperature uniformity evaluation index. Based on this temperature uniformity evaluation index, and combined with the preset allowable range of ±1 degree Celsius for temperature fluctuations in the copper foil deposition process, it is determined whether the current temperature distribution meets the deposition uniformity requirements. If the evaluation index shows that the temperature fluctuation is within the allowable range, the bath temperature conditions are confirmed to be suitable for uniform deposition, and the copper foil deposition uniformity confirmation result is output.

[0063] For example, in the final evaluation stage of copper foil deposition equipment, quantitative analysis of the degree of temperature stratification elimination is the core step in judging the optimization effect.

[0064] Specifically, by comparing the changes in temperature gradient before and after optimization, the effectiveness of the flow control strategy can be intuitively reflected. The temperature gradient value before optimization is usually recorded during the initial run of the system and stored in the control system as baseline data. The current temperature gradient value is obtained by dividing the temperature difference between the upper and lower layers in real time by the vertical distance. The difference between the two directly reflects the degree of reduction in temperature stratification.

[0065] It should be noted that the calculation of the percentage of elimination by stratification provides a dimensionless evaluation metric.

[0066] In one embodiment, if the initial temperature gradient is 5 degrees Celsius per meter and is reduced to 1 degree Celsius per meter after optimization, the stratification elimination percentage reaches 80%, indicating a significant improvement in temperature stratification. This percentage representation facilitates horizontal comparisons between equipment of different sizes and provides a clear quantitative target for process control.

[0067] Preferably, the coefficient of variation (COP), as a statistical indicator of relative dispersion, can eliminate the influence of the average temperature level on uniformity evaluation. The COP is calculated as the ratio of the standard deviation to the mean; a smaller COP indicates lower relative dispersion and more uniform temperature distribution. In copper foil deposition processes, the COP is typically required to be controlled below 0.05, meaning temperature fluctuations do not exceed 5% of the average. Such temperature uniformity ensures that the diffusion and deposition rates of copper ions remain consistent throughout the entire tank.

[0068] For example, determining the evaluation index for temperature uniformity also requires consideration of the spatial distribution of measuring points. Measuring points should cover different areas of the tank, including key locations such as the central area, edge areas, and areas near the inlet and outlet. By calculating the coefficient of variation of temperature data from all measuring points, the overall uniformity level can be obtained. Furthermore, by comparing the changes in the coefficient of variation before and after optimization, the improvement effect of the optimization measures can be quantitatively assessed.

[0069] In one possible implementation, the tolerance range for temperature fluctuations in the copper foil deposition process is preset according to product specifications and quality requirements. High-precision electronic-grade copper foil requires temperature fluctuations to be controlled within ±1 degree Celsius, while the tolerance range for ordinary industrial-grade copper foil can be relaxed to ±2 degrees Celsius. When the temperature uniformity evaluation index shows that the actual temperature fluctuation is within the allowable range, it is determined that the bath temperature conditions meet the uniform deposition requirements, and a confirmation signal is output.

[0070] Understandably, the results of copper foil deposition uniformity confirmation include not only a simple judgment of whether it is qualified or not, but also detailed evaluation data, such as the percentage of delamination elimination, the coefficient of variation, and the temperature deviation of each measuring point.

[0071] The above description is merely an example and illustration of the structure of the present invention. Those skilled in the art can make various modifications or additions to the specific embodiments described, or use similar methods to replace them, as long as they do not deviate from the structure of the invention or exceed the scope defined in the claims, all of which should fall within the protection scope of the present invention.

Claims

1. A method for dynamic analysis of the circulating flow rate of the bath solution in a copper foil deposition equipment, characterized in that, The method includes: The output flow rate of the circulating pump of the copper foil deposition equipment and the temperature gradient data of the upper and lower layers of the bath were obtained, and the buoyancy-driven flow velocity was calculated to obtain the buoyancy-driven flow velocity data. Based on the output flow rate of the circulating pump and the buoyancy-driven flow velocity data, the ratio of flow mixing intensity to buoyancy mixing intensity is identified, and the mixing intensity level is classified according to the ratio to obtain the mixing intensity level classification result. The circulation flow rate is adjusted based on the mixed intensity level classification results to obtain the adjusted circulation flow rate data; Based on the adjusted circulation flow rate data, the degree of temperature uniformity in the vertical direction of the tank liquid is evaluated to obtain the temperature distribution evaluation results. Based on the temperature distribution assessment results, the degree of temperature homogenization is analyzed to obtain the updated ratio of flow mixing intensity to buoyancy mixing intensity; The updated ratio of flow mixing intensity to buoyancy mixing intensity enhances the vertical mixing effect at temperature, resulting in optimized flow mixing intensity data. Based on the optimized flow mixing intensity data, the evaluation results confirmed the uniformity of copper foil deposition.

2. The method for dynamic analysis of the circulating flow rate of the copper foil deposition equipment bath according to claim 1, characterized in that, The process involves identifying the ratio of flow mixing intensity to buoyancy mixing intensity based on the output flow rate of the circulating pump and the buoyancy-driven flow velocity data, classifying the mixing intensity level according to the ratio, and obtaining the mixing intensity level classification result, including: The horizontal flow velocity is calculated based on the output flow rate data of the circulating pump, and the volumetric flow rate of forced circulation and the volumetric flow rate of natural convection are calculated in combination with the buoyancy-driven flow velocity data. The dimensionless ratio of the forced circulation volumetric flow rate to the natural convection volumetric flow rate is calculated by using the forced circulation volumetric flow rate and the natural convection volumetric flow rate to obtain the flow intensity ratio data. Based on the flow intensity ratio data and the preset threshold range, the flow patterns are classified into natural convection-dominated, mixing equilibrium, or forced circulation-dominated categories, and the mixing intensity level classification result is determined.

3. The method for dynamic analysis of the circulating flow rate of the copper foil deposition equipment bath according to claim 1, characterized in that, The process of adjusting the circulating flow rate based on the mixed intensity level classification results to obtain adjusted circulating flow rate data includes: Based on the classification results of mixing intensity levels, if the flow intensity ratio exceeds the preset threshold, it is determined that forced circulation is dominant, the speed of the circulation pump motor is reduced, the output flow rate at the new speed is calculated according to the direct proportional relationship between speed and flow rate, and the actual flow rate value after adjustment is monitored by the flow sensor to obtain the adjusted circulation flow rate data.

4. The method for dynamic analysis of the circulating flow rate of the copper foil deposition equipment bath according to claim 1, characterized in that, The adjusted circulation flow rate data is used to evaluate the degree of temperature uniformity in the vertical direction of the bath liquid, and the temperature distribution evaluation results are obtained, including: A temperature sensor array is arranged at a preset interval in the vertical direction of the tank to collect temperature values ​​from multiple points in the temperature sensor array. The local temperature gradient is calculated by the temperature difference between adjacent measuring points, and the temperature-height relationship curve is obtained by polynomial fitting. The second derivative is calculated based on the curve to determine the temperature jump layer and the characteristic parameters of temperature stratification. The degree of vertical mixing is assessed by combining the temperature stratification characteristic parameters, and the temperature distribution assessment result is determined.

5. The method for dynamic analysis of the circulating flow rate of the copper foil deposition equipment bath according to claim 4, characterized in that, The determination of temperature stratification characteristic parameters includes: calculating the second derivative of the fitted temperature-height relationship curve at each height point; determining the stratification intensity index by the change in the sign of the second derivative and the temperature difference between the upper and lower parts of the transition layer; and determining the temperature stratification characteristic parameters by combining the stratification intensity index and the adjusted circulation flow rate.

6. The method for dynamic analysis of the circulating flow rate of the copper foil deposition equipment bath according to claim 4, characterized in that, The determination of the temperature distribution assessment result includes: based on the temperature stratification characteristic parameters, calculating the square root of the sum of the squares of the deviations between the temperature at each measuring point and the average temperature to obtain the temperature standard deviation, and combining the stratification intensity index and the temperature standard deviation to determine the temperature distribution assessment result.

7. The method for dynamic analysis of the circulating flow rate of the copper foil deposition equipment bath according to claim 6, characterized in that, The analysis of temperature uniformity based on the temperature distribution evaluation results includes: If the temperature standard deviation exceeds the preset stratification threshold, it is determined that the temperature stratification is still obvious. The real-time output flow rate of the circulation pump is read, and the latest temperature data of the upper and lower layers of the tank liquid is obtained. The temperature difference between the upper and lower layers of the tank liquid is calculated to obtain updated temperature difference data. The degree of temperature uniformity is analyzed based on the updated temperature difference data.

8. The method for dynamic analysis of the circulation flow rate of the copper foil deposition equipment bath according to claim 7, characterized in that, The process of obtaining the updated ratio of flow mixing intensity to buoyancy mixing intensity includes: calculating the vertical buoyancy-driven flow velocity based on the updated temperature difference data; calculating the effective horizontal flow velocity using the output flow rate of the circulating pump; determining the ratio of the effective horizontal flow velocity to the buoyancy-driven flow velocity; and obtaining the updated ratio of flow mixing intensity to buoyancy mixing intensity.

9. The method for dynamic analysis of the circulating flow rate of the copper foil deposition equipment bath according to claim 1, characterized in that, After obtaining the updated ratio of flow mixing intensity to buoyancy mixing intensity, the process includes: Based on the updated ratio of flow mixing intensity to buoyancy mixing intensity, if the ratio is less than a preset threshold, it is determined that natural convection is dominant. The servo motor drives the outlet pipe of the circulating pump to deflect downward, causing the jet to generate a downward velocity component. The ratio of vertical velocity to horizontal velocity is calculated based on the angle value after deflection to obtain jet direction adjustment data. Based on the jet direction adjustment data, the downward-sloping jet flows downward along the tank wall, turns at the bottom of the tank, and carries the bottom cold liquid upward, forming a vertical circulation flow mode.

10. The method for dynamic analysis of the circulation flow rate of the copper foil deposition equipment bath according to claim 1, characterized in that, The evaluation yielded confirmation results of copper foil deposition uniformity, including: For the real-time temperature data of each measuring point, the coefficient of variation of the temperature at all measuring points is calculated. If the coefficient of variation is less than a preset threshold, the temperature distribution is determined to be uniform, the degree of uniformity improvement is determined, and the temperature uniformity evaluation index is obtained. Based on the temperature uniformity evaluation index, it is determined whether the current temperature distribution meets the deposition uniformity requirements, and the copper foil deposition uniformity confirmation result is output.

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