Double-cube light splitting interference device and method of optical interference microscope and medium

Abstract

The invention provides a double-cube light splitting interference device, method, equipment and medium for an optical interference microscope, and the device comprises a first beam splitter which is provided with a first incident port, a first emergent port and a third emergent port, and is used for carrying out the beam splitting of incident light from the first incident port, the beam splitter is used for splitting the returned combined beam from the second beam splitter to the first emergent port; the second beam splitter is provided with a second incident port, a fourth emergent port, a reference arm port and a sample arm port and is used for splitting the light from the second incident port to the reference arm port and the sample arm port and combining the light returned from the reference arm port and the sample arm port, and the splitting ratio can be independently adjusted; wherein a third emergent port of the first beam splitter is optically connected with a second incident port of the second beam splitter, so that the problem that the FF-OCM is restricted in the aspects of weak signal detection and high-quality imaging is solved.

Description

Technical Field

[0001] This invention relates to the field of full-field optical coherence microscopy, and more particularly to a double-cube beam-splitting interferometer, method, equipment, and medium for an optical interference microscope. Background Technology

[0002] Full-field optical coherence microscopy (FF-OCM) is a three-dimensional non-destructive imaging technique based on the principle of low-coherence interference. It combines the depth-detection capabilities of traditional optical coherence tomography (OCT) with the high lateral resolution of optical microscopy. Unlike traditional OCT, which acquires longitudinal tomographic images, FF-OCM directly acquires the frontal view image of the sample using an area array camera, avoiding depth-of-field limitations and allowing the use of high numerical aperture objectives to achieve sub-micron lateral resolution. By using symmetrical microscope objectives and interference optical paths in the reference and sample arms, this technique can simultaneously obtain high axial and lateral resolution, providing an important tool for observing microstructures and dynamic processes in the biomedical field.

[0003] In FF-OCM systems, the signal-to-noise ratio (SNR) is a key parameter determining imaging quality and weak signal detection capability. According to Dubois (2016), the minimum detectable sample return rate is closely related to the reference arm return efficiency, incoherent noise, and camera noise characteristics. Theoretical analysis shows that the system's SNR is optimal when the reference arm return efficiency is similar to the incoherent noise level. However, in practical systems, incoherent noise mainly originates from stray light from optical elements and sample scattering, and its intensity is usually low. Therefore, the reference arm return efficiency needs to be controlled to a similar order of magnitude to avoid excessively high reference signals reducing system sensitivity. This requirement makes traditional high-reflectivity mirrors unsuitable for FF-OCM reference arms.

[0004] Currently, common methods for controlling the reflectivity of the reference arm mainly include three types: First, using special reflective interfaces such as YAG crystals to achieve a reflectivity of approximately 2.5% through Fresnel reflection between the crystal and the immersion liquid. However, this method suffers from stray light interference, difficulty in adjusting the reflectivity, and high cost. Second, using a polished silicon wafer as the reflective surface, which has a high reflectivity and can absorb transmitted light to reduce stray light, but it differs significantly from the system's optimal reflectivity, resulting in a significant reduction in the signal-to-noise ratio. Third, inserting a reflective attenuator into the reference arm and adjusting the attenuation rate to match the target reflectivity. However, this introduces tilt aberrations, etalon effects, and stray light interference, and it is difficult to ensure perfect optical path matching between the sample arm and the reference arm. All these methods have certain limitations, restricting further optimization of FF-OCM in weak signal detection and high-quality imaging.

[0005] Therefore, there is an urgent need for a double cube beam-splitting interferometer for optical interference microscopes to solve the problem of limitations in weak signal detection and high-quality imaging of FF-OCM. Summary of the Invention

[0006] To overcome the problems existing in the related technologies, this disclosure provides a double cube beam-splitting interferometer device, method, apparatus and medium for optical interference microscopes, so as to solve the technical problem of inefficient R&D testing caused by the fragmentation of the automotive software development process in the related technologies.

[0007] This specification provides one or more embodiments of a double-cube beam-splitting interferometer for an optical interference microscope, comprising: The first beam splitter has a first incident port, a first exit port and a third exit port, and is used to split the incident light from the first incident port and split the return combined light from the second beam splitter to the first exit port. The second beam splitter has a second incident port, a fourth exit port, a reference arm port, and a sample arm port. It is used to split the light from the second incident port to the reference arm port and the sample arm port, and to combine the light returning from the reference arm port and the sample arm port. The splitting ratio can be adjusted independently. The third exit port of the first beam splitter is optically connected to the second incident port of the second beam splitter. Preferably, the splitting ratio of the first beam splitter is configured such that no more than 50% of the optical power of the light incident from the first incident port is directed to the second beam splitter; The splitting ratio of the second beam splitter is configured such that the optical power incident from the second incident port to the sample arm port is greater than the optical power incident to the reference arm port.

[0008] Preferably, the splitting ratio of the second beam splitter is configured such that the ratio of the light intensity returned from the reference arm port to the light intensity returned from the sample arm port is in the range of 0.5% to 5%.

[0009] Preferably, both the first beam splitter and the second beam splitter are cubic beam splitters; The first beam splitter and the second beam splitter adopt a prism bonding structure, which consists of three right-angled triangular prisms. The corresponding surfaces of the two prisms are respectively coated with the beam splitting films of the first beam splitter and the second beam splitter, and the remaining surfaces are coated with anti-reflection films. They are optically bonded to form an integrated module.

[0010] Preferably, the first beam splitter and / or the second beam splitter have a predetermined non-zero rotation angle relative to the incident optical axis, for spatially separating stray light generated by reflection from the beam splitter surface from interference signal light from the sample arm port and the reference arm port.

[0011] Preferably, the predetermined non-zero rotation angle is about 3°, and the incident light direction of the first incident port is adjusted accordingly by twice the predetermined non-zero rotation angle, i.e., 6°, so that the stray light and the interference signal light form a resolvable angle at the fourth exit port.

[0012] Preferably, it further includes: A photodetector is provided at the first emission port to monitor the power stability of the light source; And / or, A second imaging camera is provided at the third emission port for performing at least one of the following functions: color imaging, large field-of-view imaging, or auxiliary sample stage splicing and positioning.

[0013] This specification provides one or more embodiments of a double-cube beam-splitting interferometry method for an optical interference microscope, including the following steps: By setting the splitting ratio of the second beam splitter, the ratio of light intensity entering the reference arm to that entering the sample arm can be independently controlled. By setting the splitting ratio of the first beam splitter, a trade-off is made between the light source input and the signal detection efficiency; The splitting ratio of the second beam splitter is configured to match the equivalent return light intensity of the reference arm with the incoherent background noise light intensity of the system.

[0014] This specification provides one or more embodiments of a computer device, including a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor executes the computer program to implement a method for adjusting optical interference signals using a double cube beam-splitting interferometer as described above in an optical interference microscope.

[0015] This specification provides one or more embodiments of a computer-readable storage medium storing a computer program that, when executed by a processor, implements the steps of a method for adjusting optical interference signals using a double cube beam-splitting interferometer as described above in an optical interference microscope.

[0016] This disclosure provides a double-cube beam splitting interferometer device, method, apparatus, and medium for an optical interference microscope. The advantages are as follows: the first beam splitter, through the coordinated action of its three ports, accurately receives and splits the incident light from the first incident port, providing a stable optical signal input for the subsequent interference optical path and ensuring reasonable energy distribution of the incident light. It also efficiently receives the returned combined light from the second beam splitter and directionally splits it to the first exit port, providing a reliable interference signal for the detection module and reducing energy loss and signal distortion. The second beam splitter, with its structural design of a second incident port, a fourth exit port, a reference arm port, and a sample arm port, as well as its independent beam splitting ratio adjustment function, can stably receive the optical signal from the third exit port of the first beam splitter and uniformly split it to the reference arm port. The device, along with the sample arm port, enables the synchronous and precise distribution of optical signals to the two core optical paths. This ensures that the reference arm and sample arm receive optical signals with matched intensity, creating the necessary conditions for subsequent interference phenomena. It efficiently receives the reference optical signal returning from the reference arm port and the sample optical signal carrying sample information returning from the sample arm port, and efficiently combines the two beams to form a stable interference superposition state. This provides core support for the generation of interference signals. The independently adjustable splitting ratio allows the device to flexibly adjust the intensity distribution ratio between the reference arm and sample arm according to actual detection needs, significantly improving the device's adaptability and detection flexibility. It can effectively optimize interference effects under different detection scenarios, ensuring detection accuracy and reliability. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in one or more embodiments of this specification or in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this specification. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 A schematic diagram of a double cube beam-splitting interferometer for an optical interference microscope provided in one or more embodiments of this specification; Figure 2 The propagation path of light between six ports is provided for one or more embodiments of this specification; Figure 3 A typical optical path layout diagram of the double cube beam interferometer provided in one or more embodiments of this specification applied to a full-field optical coherence microscope (FF-OCM) system; Figure 4 A schematic diagram of the propagation path of light between six ports provided for one or more embodiments of this specification; Figure 5An exploded and assembled schematic diagram of the prism adhesive-bonded integral structure provided in one or more embodiments of this specification; Figure 6 A schematic diagram illustrating the principle of beam splitter rotation angle design for separating stray light in one or more embodiments of this specification; Figure 7 Device diagram of a full-field OCT system provided for one or more embodiments of this specification; Figure 8 A schematic flowchart illustrating a double-cube beam-splitting interferometry method for an optical interference microscope provided for one or more embodiments of this specification; Figure 9 This is a schematic diagram of the structure of a computer device provided for one or more embodiments of this specification. Detailed Implementation

[0019] To enable those skilled in the art to better understand the technical solutions in one or more embodiments of this specification, the technical solutions in one or more embodiments of this specification will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this specification, and not all of the embodiments. Based on one or more embodiments of this specification, all other embodiments obtained by those skilled in the art without creative effort should fall within the protection scope of this invention.

[0020] The present invention will now be described in detail with reference to specific embodiments and accompanying drawings.

[0021] Method Implementation Examples According to embodiments of the present invention, a double-cube beam-splitting interferometer for an optical interference microscope is provided, such as... Figure 1The diagram shows a schematic of the double-cube beam splitter interferometer of the optical interference microscope provided in this embodiment. The core of the double-cube beam splitter interferometer of the optical interference microscope according to this embodiment consists of a first beam splitter 11 (BS1) and a second beam splitter 12 (BS2) arranged adjacent to each other. BS1 defines a first incident port ①, a first exit port ②, and a third exit port ③. BS2 defines a second incident port (aligned with the optical path of port ③), a fourth exit port ④, a reference arm port ⑤, and a sample arm port ⑥. Ports ① and ④ are still the input light source and output interference signal ports, and can be interchanged. Ports ⑤ and ⑥ are the reference light and sample light ports; the beams will return along the same path, and ⑤ and ⑥ can also be interchanged. Ports ② and ③ are empty beam output ports; the light emitted here is wasted, and beam dumps are usually placed here to prevent stray light return. Internally, BS1 is adjacent to BS2. This double-BS module (red dashed box) can directly replace the traditional full-field OCT interference module - single BS.

[0022] like Figure 2 As shown, this embodiment provides the propagation path of light between six ports. The first beam splitter 11 has a first incident port ①, a first exit port ②, and a third exit port ③. It is used to split the incident light from the first incident port ①, and to split the returned combined light carrying sample and reference information from the second beam splitter 12 again, and guide a portion of it to the first exit port ②.

[0023] The second beam splitter 12 has a second incident port, a fourth exit port ④, a reference arm port ⑤, and a sample arm port ⑥. It is used to split the light from the second incident port into the reference arm port ⑤ and the sample arm port ⑥ according to a preset and independently adjustable beam splitting ratio, and to combine the two beams of light returning from the reference arm port ⑤ and the sample arm port ⑥ respectively. The beam splitting ratio can be adjusted independently, and the beams are guided to the second incident port and then returned to the first beam splitter 11 and the fourth exit port ④.

[0024] In this configuration, the third exit port ③ of the first beam splitter 11 and the second incident port of the second beam splitter 12 are directly or indirectly aligned via optical paths to achieve optical connection, thereby forming an integrated interference device with six functional ports (①, ②, ③, ④, ⑤, ⑥), such as... Figure 3 The diagram shown is a typical optical path layout of the double cube beam interferometer provided in this embodiment applied to a full-field optical coherence microscope (FF-OCM) system. The device provided in this embodiment features a first beam splitter 11 that precisely receives and splits the incident light from the first incident port ① through the coordinated action of its three ports, providing a stable optical signal input for the subsequent interference optical path, ensuring reasonable distribution of incident light energy, and efficiently receiving the returned combined light from the second beam splitter 12, directionally splitting it to the first exit port ② to provide a reliable interference signal for the detection module, reducing energy loss and signal distortion. The second beam splitter 12, with its structural design of the second incident port, fourth exit port ④, reference arm port ⑤, and sample arm port ⑥, and its independent beam splitting ratio adjustment function, can stably receive the optical signal from the third exit port ③ of the first beam splitter 11 and evenly split it to the reference arm port ⑤ and the sample arm port ⑥. The synchronous and precise distribution of the optical signal to the two core optical paths ensures that the reference arm and sample arm receive optical signals with matched light intensity, creating the necessary conditions for the subsequent interference phenomenon. It efficiently receives the reference optical signal returned from port ⑤ of the reference arm and the sample optical signal carrying sample information returned from port ⑥ of the sample arm, and completes the efficient beam combining of the two beams, enabling the two beams to form a stable interference superposition state, providing core support for the generation of interference signals. The feature of independently adjustable beam splitting ratio allows the device to flexibly adjust the light intensity distribution ratio of the reference arm and sample arm according to actual detection needs, significantly improving the adaptability and detection flexibility of the device, effectively optimizing the interference effect under different detection scenarios, and ensuring detection accuracy and reliability.

[0025] In one embodiment, such as Figure 4 The diagram illustrates the light propagation path between the six ports provided in this embodiment. The splitting ratio of the first beam splitter 11 is configured such that no more than 50% of the light power incident from the first incident port ① is guided to the third exit port ③ of the second beam splitter 12, while the remaining light power is guided to the first exit port ②. This configuration sacrifices some illumination efficiency when the light source power is sufficient, in exchange for a higher proportion of the signal light energy returned from the sample being guided to the detector.

[0026] The splitting ratio of the second beam splitter 12 is configured such that the light power incident from the second incident port to the sample arm port ⑥ is always greater than the light power incident to the reference arm port ⑤, which is the key to reducing the equivalent reflectivity of the reference arm.

[0027] The device provided in this embodiment guides no more than 50% of the incident light power to the second beam splitter 12 via the first beam splitter 11, which can improve the sample light detection efficiency, adapt to the scenario where the light power of biological samples is limited, and be compatible with existing light source systems and reduce costs. The second beam splitter 12 is configured such that the light power of the sample arm is greater than that of the reference arm, which can precisely control the return efficiency of the reference light to match the intensity of the incoherent noise light in the system, improve the signal-to-noise ratio, optimize the imaging quality, and at the same time, no special devices are required, simplifying the system structure.

[0028] In one embodiment, the splitting ratio of the second beam splitter 12 is finely configured such that, under the condition that the reference arm uses a high-reflectivity mirror (e.g., reflectivity > 95%), the ratio of the light intensity returned from the reference arm port ⑤ to the light intensity returned from the sample arm port ⑥ is in the range of 0.5% to 5%. This range has been theoretically calculated and experimentally verified, which enables the reference light intensity to achieve the best match with the incoherent noise light intensity (R_inc), thereby significantly improving the system signal-to-noise ratio and weak signal detection capability.

[0029] In one embodiment, such as Figure 5 The diagram shown is an exploded and assembled schematic of the prism-bonded integrated structure provided in this embodiment. Structurally, both the first beam splitter 11 and the second beam splitter 12 are cubic beam splitters. To further improve integration, reduce stray light, and lower assembly difficulty, the first beam splitter 11 and the second beam splitter 12 adopt a prism-bonded integrated structure. A preferred embodiment is as follows: it consists of three right-angled triangular prisms, wherein the corresponding surfaces of two prisms are respectively coated with the beam-splitting films of the first beam splitter 11 and the second beam splitter 12, and the third prism is bonded to them. Anti-reflection films are coated on the remaining non-functional optical surfaces, and a robust and stable integrated module is formed by precision optical bonding. Specifically, a beam-splitting film for the function of the first beam splitter 11 is formed on the inclined surface of the first prism. A beam-splitting film for the function of the second beam splitter 12 is formed on the inclined surface of the second prism. The first prism, the second prism, and the third prism are precisely bonded together with optical adhesive to form a robust cubic module. All exposed glass-air interfaces are coated with anti-reflection films to reduce reflection loss.

[0030] In one embodiment, such as Figure 6 The diagram illustrates the principle of the beam splitter rotation angle design for separating stray light in this embodiment. To suppress stray light caused by residual reflection from the beam splitter glass-air interface, the first beam splitter 11 and / or the second beam splitter 12 have a predetermined non-zero rotation angle relative to the system's incident optical axis. This is used to spatially separate the reflection direction of harmful stray light generated by reflection from the beam splitter surface from the propagation direction of useful interference signal light from the sample arm port ⑥ and the reference arm port ⑤. An optimized implementation is to set the predetermined non-zero rotation angle of both beam splitters to approximately 3°, and correspondingly adjust the incident light direction at the first incident port ① by twice the predetermined non-zero rotation angle, i.e., 6°. This configuration ensures that at the fourth exit port ④, the stray light and the main interference signal light form a sufficiently large and resolvable angle, facilitating spatial filtering or separation on the imaging plane. This can be eliminated by setting an aperture or post-processing, thereby effectively improving image contrast.

[0031] In one embodiment, the device may also integrate extended functional modules to improve system performance. For example... Figure 7The diagram shows the apparatus of the full-field OCT system provided in this embodiment. For example, a photodetector can be installed at the first emission port ② to monitor the stability of the light source's output power in real time. This signal can be used for subsequent image data standardization processing, providing a basis for system calibration or data compensation. And / or, a second imaging camera can be installed at the third emission port ③. This second camera can be used to perform various auxiliary functions, such as performing color FF-OCM imaging, using a sensor with a larger target surface to achieve a larger field of view than the main camera, or specifically for bright-field imaging of the sample surface, assisting the main imaging camera 6 in positioning and navigation during large-scale sample stitching, thereby enhancing the functionality and practicality of the entire microscope system.

[0032] The following specific implementation examples further illustrate this point: During operation, illumination light from a light source (such as an LED) enters BS1 through port ①. Based on the splitting ratio of BS1 (e.g., 30:70), approximately 30% of the optical power is directed to port ③, entering BS2; approximately 70% of the optical power is directed to port ②, where it can be terminated or utilized. The light entering BS2 is split according to its independent splitting ratio (e.g., 10:90): approximately 10% of the optical power is directed to the reference arm port ⑤, illuminating the reference mirror 7; approximately 90% of the optical power is directed to the sample arm port ⑥, illuminating the sample 8. After reflection from the reference mirror 7 and the sample 8 respectively, the two beams return to BS2 along their original paths and interfere. A portion (approximately 50%) of the combined interference light returns to BS1 from the second incident port of BS2. After being split again by BS1, a portion exits from port ④ and is received by the main imaging camera 6; the other portion exits directly from port ④ of BS2. Calculations show that, under this configuration, the equivalent returned light intensity of the reference arm is only about 1.2% (=(10% / 90%)^2) of the returned light intensity of the sample arm, falling into the optimization range of 0.5%-5%.

[0033] Method Implementation Examples According to embodiments of the present invention, a double-cube beam-splitting interferometry method for optical interference microscopes is provided, such as... Figure 8 The diagram shown is a schematic flowchart of the double-cube beam-splitting interferometry method for an optical interference microscope provided in this embodiment. The double-cube beam-splitting interferometry method for an optical interference microscope according to this embodiment includes the following steps: S810: By setting the splitting ratio of the second beam splitter 12, the light intensity ratio entering the reference arm and the sample arm can be independently controlled.

[0034] S820: By setting the splitting ratio of the first beam splitter 11, a trade-off is made between the light source input and the signal detection efficiency.

[0035] The splitting ratio of the second beam splitter is configured to match the equivalent return light intensity of the reference arm with the incoherent background noise light intensity of the system.

[0036] The method provided in this embodiment effectively improves the signal-to-noise ratio of the interference signal by precisely and independently controlling the light intensity distribution between the reference arm and the sample arm, combined with the configuration of the incoherent background noise light intensity of the equivalent return light intensity matching system of the reference arm. This provides a foundation for subsequent high-quality interferometric detection. At the same time, it achieves an optimized balance between the input energy of the light source and the signal detection efficiency, avoiding waste of light source energy or weak detection signal, and ensuring the rationality of energy utilization and the stability of detection effect of the optical path system.

[0037] The embodiments of the present invention are method embodiments corresponding to the above-described device embodiments. The specific operations of each module processing step can be understood by referring to the description of the device embodiments, and will not be repeated here.

[0038] like Figure 9 As shown, the present invention also provides a computer-readable storage medium having a computer program stored thereon. When the computer program is executed by a processor, it implements the method for adjusting the optical interference signal of the double cube beam-splitting interferometer of the optical interference microscope in the above embodiments, or when the computer program is executed by a processor, it implements the method for adjusting the optical interference signal of the double cube beam-splitting interferometer of the optical interference microscope in the above embodiments.

[0039] Those skilled in the art will understand that all or part of the processes in the methods of the above embodiments can be implemented by a computer program instructing related hardware. The computer program can be stored in a non-volatile computer-readable storage medium, and when executed, it can include the processes of the embodiments of the above methods. Any references to memory, storage, databases, or other media used in the embodiments provided in this application can include non-volatile and / or volatile memory. Non-volatile memory can include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM), or flash memory. Volatile memory can include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM is available in various forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), dual data rate SDRAM (DDRSDRAM), enhanced SDRAM (ESDRAM), synchronous link DRAM (SLDRAM), Rambus direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and memory bus dynamic RAM (RDRAM), etc.

[0040] The various embodiments in this specification are described in a progressive manner. Similar or identical parts between embodiments can be referred to mutually. Each embodiment focuses on describing the differences from other embodiments. In particular, for apparatus or system embodiments, since they are basically similar to method embodiments, the description is relatively simple, and relevant parts can be referred to the description of the method embodiments. The apparatus and system embodiments described above are merely illustrative. The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple network units. Some or all of the modules can be selected to achieve the purpose of this embodiment according to actual needs. Those skilled in the art can understand and implement this without creative effort.

[0041] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features. These modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention, and the contents not described in detail in the specification of the present invention are known to those skilled in the art.

Claims

1. A double-cube beam-splitting interferometer for an optical interference microscope, characterized in that, include: The first beam splitter has a first incident port, a first exit port and a third exit port, and is used to split the incident light from the first incident port and split the return combined light from the second beam splitter to the first exit port. The second beam splitter has a second incident port, a fourth exit port, a reference arm port, and a sample arm port. It is used to split the light from the second incident port to the reference arm port and the sample arm port, and to combine the light returning from the reference arm port and the sample arm port. The splitting ratio can be adjusted independently. The third exit port of the first beam splitter is optically connected to the second incident port of the second beam splitter.

2. The double-cube beam-splitting interferometer of the optical interference microscope as described in claim 1, characterized in that, The splitting ratio of the first beam splitter is configured such that no more than 50% of the optical power of the light incident from the first incident port is directed to the second beam splitter; The splitting ratio of the second beam splitter is configured such that the optical power incident from the second incident port to the sample arm port is greater than the optical power incident to the reference arm port.

3. The double-cubic-width beam-splitting interferometer of the optical interference microscope as described in claim 2, characterized in that, The splitting ratio of the second beam splitter is configured such that the ratio of the light intensity returned from the reference arm port to the light intensity returned from the sample arm port is in the range of 0.5% to 5%.

4. The double-cube beam-splitting interferometer of the optical interference microscope as described in claim 1, characterized in that, Both the first beam splitter and the second beam splitter are cubic beam splitters; The first beam splitter and the second beam splitter adopt a prism bonding structure, which consists of three right-angled triangular prisms. The corresponding surfaces of the two prisms are respectively coated with the beam splitting films of the first beam splitter and the second beam splitter, and the remaining surfaces are coated with anti-reflection films. They are optically bonded to form an integrated module.

5. The double-cube beam-splitting interferometer of the optical interference microscope as described in claim 1, characterized in that, The first beam splitter and / or the second beam splitter have a predetermined non-zero rotation angle relative to the incident optical axis, for spatially separating stray light generated by reflection from the beam splitter surface from interference signal light from the sample arm port and the reference arm port.

6. The double-cubic-width beam-splitting interferometer of the optical interference microscope as described in claim 5, characterized in that, The predetermined non-zero rotation angle is approximately 3°, and the incident light direction at the first incident port is adjusted accordingly by twice the predetermined non-zero rotation angle, i.e., 6°, so that the stray light and the interference signal light form a resolvable angle at the fourth exit port.

7. The double-cube beam-splitting interferometer apparatus for an optical interference microscope as described in claim 1, characterized in that, Also includes: A photodetector is provided at the first emission port to monitor the power stability of the light source; And / or, A second imaging camera is provided at the third emission port for performing at least one of the following functions: color imaging, large field-of-view imaging, or auxiliary sample stage splicing and positioning.

8. A method for adjusting optical interference signals using the interference device as described in claim 1, characterized in that, Includes the following steps: By setting the splitting ratio of the second beam splitter, the ratio of light intensity entering the reference arm to that entering the sample arm can be independently controlled. By setting the splitting ratio of the first beam splitter, a trade-off is made between the light source input and the signal detection efficiency; The splitting ratio of the second beam splitter is configured to match the equivalent return light intensity of the reference arm with the incoherent background noise light intensity of the system.

9. A computer device comprising a memory, a processor, and a computer program stored in the memory and executable on the processor, characterized in that, When the processor executes the computer program, it implements the method for adjusting optical interference signals using an interference device as described in claim 8.

10. A computer-readable storage medium storing a computer program, characterized in that, When the computer program is executed by the processor, it implements the steps of the method for adjusting optical interference signals using an interference device as described in claim 8.

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